TWM244580U - Stack structure of chip package - Google Patents

Stack structure of chip package Download PDF

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Publication number
TWM244580U
TWM244580U TW091221437U TW91221437U TWM244580U TW M244580 U TWM244580 U TW M244580U TW 091221437 U TW091221437 U TW 091221437U TW 91221437 U TW91221437 U TW 91221437U TW M244580 U TWM244580 U TW M244580U
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TW
Taiwan
Prior art keywords
wafer
package structure
stacked
patent application
chip package
Prior art date
Application number
TW091221437U
Other languages
Chinese (zh)
Inventor
I-Tseng Lee
Andy Liao
Jen-Te Tseng
Kenny Chang
Original Assignee
Via Tech Inc
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Publication date
Application filed by Via Tech Inc filed Critical Via Tech Inc
Priority to TW091221437U priority Critical patent/TWM244580U/en
Publication of TWM244580U publication Critical patent/TWM244580U/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32135Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015Shape
    • H01L2924/10155Shape being other than a cuboid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

M244580M244580

新型所屬之技彳 本創作疋有關於一種晶片封裝結構,且特別是有關於 , 一種堆疊式晶片封裝結構。 先前技術 k > ik著積體電路(Integrated Circuit,IC )製程技術This new technology belongs to a chip packaging structure, and in particular, a stacked chip packaging structure. Previous technology k > ik integrated circuit (IC) process technology

的南Γ♦展 Μ日日片之内部電路的積集度(integration ^不斷地向上攀升,因而大幅地增加I C晶片之内部電路的 電晶體數目,並逐漸地縮小Ic晶片之内部電路的導線截面 f °因此’ IC晶片在運作時,! c晶片之内部電路將產生大 里的熱此’因而導致1C晶片之本身的溫度不斷地升高。值 得注意的是’當I C晶片之本身的溫度一旦超出正常的工作 溫度範圍時’ I C晶片之内部電路可能會發生運算錯誤、暫 時性地失效或永久性地損壞等情況。因此,I C封裝 (package )除了必須提供IC晶片之訊號向外連接的媒介 以外’更必須提供適當的保護作用及良好的散熱效能,使 得正在運作之I c晶片其本身的溫度可以獲得適當的控制, 以避免超出其正常的工作溫度範圍。 就常見之打線接合(w i r e b ο n d i n g )型態之晶片封裝 結構而§ ’為了因應散熱的需求,習知技術通常是利用空The integration degree of the internal circuits of the Japanese and Japanese films (continuously rising upwards, thus greatly increasing the number of transistors in the internal circuits of IC chips, and gradually reducing the cross-sections of the internal circuits of IC chips f ° Therefore, when the IC chip is in operation, the internal circuit of the chip will generate a large amount of heat, which will cause the temperature of the 1C chip itself to continue to rise. It is worth noting that when the temperature of the IC chip itself exceeds In the normal operating temperature range, the internal circuit of the IC chip may be subject to calculation errors, temporary failure, or permanent damage. Therefore, IC packages (packages) must provide a medium for the external connection of the signal from the IC chip. 'It is also necessary to provide appropriate protection and good heat dissipation performance, so that the temperature of the IC chip in operation can be properly controlled to avoid exceeding its normal operating temperature range. Wireb ο nding is common ) Type of chip packaging structure and § 'In order to meet the needs of heat dissipation, the conventional technology is usually beneficial. Empty

白晶片(dummy die)或導熱性佳之金屬塊(metal block )來作為散熱塊(thermal conductive block),並將散 熱塊堆疊於功能性晶片(functional die)之上,用以降 低功能性晶片之熱傳導路徑上的熱阻抗(thermal impedance ),使得功能性晶片於運作時所產生的熱能,A white die (dummy die) or a metal block with good thermal conductivity is used as the thermal conductive block, and the thermal block is stacked on the functional die to reduce the thermal conductivity of the functional die. Thermal impedance on the path, so that the thermal energy generated by the functional chip during operation,

I0387twf.ptd 第8頁 M244580 五、創作說明(2) 能夠很快地傳導到晶片封裝結構之表面,並散逸至外界之 大氣環境。 請參考第1圖,其繪示習知之一種堆疊式晶片封裝結 構的剖面示意圖。就打線接合(W / B )型態之晶片封裝結 構1 0 0而言’晶片封裝結構1 0 0主要包括承載器(c a r r i e r )1 1 0、晶片1 2 0、散熱塊1 3 0、膠料層1 4 0、多條導線1 5 0 及封膠1 6 0。首先’承載器1 1 0 ’例如為基板(s u b s t r a t; e )或導線架(leadframe)(此處之承載器no係以基板作 為代表),承載器11〇具有一承載表面112及多個之接合墊 114,而這些接合墊114均配置於承載器Π0之承載表面 112。此外,晶片120具有一主動表面122及對應之一背面 1 2 4,且晶片1 2 0係以其背面1 2 4並經由一膠料層1 4 2,而貼 附至承載器1 1 〇之承載表面1 1 2,而晶片1 2 0更具有多個金 屬墊(metal pad) 126,其配置於晶片120之主動表面 1 2 2。另外,散熱塊1 3 0例如為空白晶片或導熱性佳之金屬 塊,散熱塊1 3 0具有一接合面1 3 2,且散熱塊1 3 〇係以其接 合面132並經由另一膠料層140,而貼附至晶片12〇之主動 表面1 2 2。最後,這些導線1 5 0則分別電性連接這些金屬墊 1 2 6之一至其所對應之這些接合墊1 1 4之一,而封膠1 6 〇則 包覆晶片1 2 0、散熱塊1 3 0及這些導線1 5 0。 請同樣參考第1圖’受到機械加工的影響之下,散熱 塊1 3 0通常具有矩形立方體的外形,使得散熱塊1 3 〇之接合 面132 (即底面)通常會正交於散熱塊130之侧面134 (即 接合面132與側面134之夾角通常為90度),導致散熱塊I0387twf.ptd Page 8 M244580 5. Creation Instructions (2) It can be quickly conducted to the surface of the chip packaging structure and dissipated to the outside atmosphere. Please refer to FIG. 1, which is a schematic cross-sectional view of a conventional stacked chip package structure. In terms of wire bonding (W / B) type chip packaging structure 1 0 0, 'chip packaging structure 1 0 0 mainly includes a carrier 1 1 0, a chip 1 2 0, a heat sink 1 3 0, a rubber Layer 1 40, multiple wires 150, and sealant 160. First, the “carrier 1 1 0” is, for example, a substrate (substrat; e) or a lead frame (here, the carrier no is represented by a substrate). The carrier 11 has a carrier surface 112 and a plurality of joints. Pads 114, and these bonding pads 114 are all disposed on the bearing surface 112 of the carrier Π0. In addition, the chip 120 has an active surface 122 and a corresponding back surface 1 2 4, and the chip 120 is attached to the carrier 1 1 0 with its back surface 1 2 4 and a glue layer 1 4 2. The bearing surface 1 1 2, and the wafer 1 2 0 further has a plurality of metal pads 126, which are disposed on the active surface 1 2 2 of the wafer 120. In addition, the heat sink block 130 is, for example, a blank wafer or a metal block with good thermal conductivity. The heat sink block 130 has a joint surface 1 32, and the heat sink block 130 uses its joint surface 132 and passes through another rubber layer. 140, and the active surface 1 2 2 attached to the wafer 120. Finally, these wires 1 50 are electrically connected to one of the metal pads 1 2 6 to one of the corresponding bonding pads 1 1 4 respectively, and the sealant 1 6 0 covers the chip 1 2 0 and the heat sink 1 30 and these wires 150. Please also refer to Figure 1 'under the influence of mechanical processing. The heat sink 1 30 usually has a rectangular cube shape, so that the joint surface 132 (that is, the bottom surface) of the heat sink 1 30 is usually orthogonal to the heat sink 130. Side 134 (that is, the angle between the joint surface 132 and the side 134 is usually 90 degrees), resulting in a heat sink

10387twf.ptd 第 9 頁 M244580 五、創作說明(3) 1 3 0之底部周緣極易發生應力集中的現象。因此,當晶片 封裝結構1 0 0接受熱應力(t h e rma 1 s t r e s s )測試,例如 溫度循環測試(Temperature Cycle Test,TCT)或熱衝 擊測試(Thermal Shock Test ’TST)時,由於散熱塊 之本身所產生的反覆熱;;張冷縮及彎曲運動,因而在散熱塊 1 3 0之底部周緣產生應力集中環,如此將導致晶片i 2 〇之主 動表面1 2 2的保護層(未繪示)發生破裂的現象,甚至會 破壞保護層之下方的線路(未繪示),進而導致晶片丨/〇 之功能失效。 請同樣參考第1圖,為了提高晶片12〇與散熱塊13〇 間的彈性緩衝,可藉由增加膠料層丨4〇之厚度來達成。 得注意的是,由於膠料層140之熱阻抗係數係大於埶 130之熱阻抗係數,所以增加膠料層14〇之厚度將對楹a 晶片12G之熱傳導路徑上的熱阻抗H 封裝^⑽之本身的散熱需求,㈣4層14()及^片 制小於某個預^值,如此又❹法肖 頁限 周緣的㈣層^的厚度,使得^12()之㈣受^底部 破壞的現象仍舊無法解決。 W力所 新型内容 有鑑於此,本創作之目 封裝結構,用以大幅地降低二::提供-種堆疊式晶片 集中的程$,使得晶片之表二:底部周緣所產生應力 有效地延長晶片封裝結構:“I:到應力所破壞’故可 基於本創作之上述目的,“;提出一種堆疊式 I» M244580 五、創作說明(4) 封裝結構,其具有一承載器、一晶片、一膠料層、一散熱 塊及一封膠◦首先,承載器具有一承載表面及多個接合 墊,且這些接合墊係配設於承載器之承載表面。此外,晶 片具有一主動表面及對應之一背面,且晶片係以背面配置 於承載器之承載表面,而晶片更具有多個金屬墊,其配置 於晶片之主動表面。另外,膠料層係配置於晶片之主動表 面,而散熱塊具有一接合面,且散熱塊係以接合面,並經 由膠料層而貼附至晶片之主動表面,而接合面包括一中央 面及多個導角面,而這些導角面係圍繞於中央面之外圍, 並分別連接至中央面之周緣,且中央面與這些導角面之一 ^ 的夾角係小於9 0度。最後,這些導線係分別電性連接這些 金屬墊之一至其所對應之這些接合墊之一,而封膠則包覆 晶片、散熱塊及這些導線。10387twf.ptd Page 9 M244580 V. Creative Instructions (3) The bottom periphery of 1 3 0 is prone to stress concentration. Therefore, when the chip package structure 100 is subjected to the rma 1 stress test, such as a Temperature Cycle Test (TCT) or a Thermal Shock Test (TST), due to the heat dissipation block itself, Generated repetitive heat; tension shrinkage and bending movement, so a stress concentration ring is generated at the bottom periphery of the heat sink 130, which will cause a protective layer (not shown) of the active surface 1 2 2 of the chip i 2 〇 The phenomenon of cracking may even destroy the wiring (not shown) under the protective layer, and then cause the function of the chip 丨 / 〇 to fail. Please refer to FIG. 1 as well. In order to improve the elastic buffering between the wafer 12 and the heat sink 13o, it can be achieved by increasing the thickness of the rubber layer 4o. It should be noted that because the thermal impedance coefficient of the rubber layer 140 is greater than the thermal impedance coefficient of 埶 130, increasing the thickness of the rubber layer 140 will affect the thermal resistance H of the heat conduction path of the 楹 a chip 12G. For its own heat dissipation requirements, the thickness of the four layers 14 () and ^ is less than a certain pre- ^ value, so that the thickness of the ㈣ layer ^ around the edge of the page is still small, so that the phenomenon of ^ 12 () being damaged by the bottom is still Cannot be resolved. In view of this, the new content of W Lisuo, the purpose of this creative package structure, is to greatly reduce the second :: provide-a stack of wafer concentration process $, so that the table of the wafer: the bottom peripheral stress effectively extend the wafer Package structure: "I: to the stress's damage, so it can be based on the above purpose of this creation,"; propose a stacked I »M244580 5. Creation instructions (4) Package structure, which has a carrier, a chip, a glue Material layer, a heat sink and an adhesive. First, the carrier has a bearing surface and a plurality of bonding pads, and these bonding pads are arranged on the bearing surface of the carrier. In addition, the wafer has an active surface and a corresponding back surface, and the wafer is arranged on the bearing surface of the carrier with the back surface, and the wafer further has a plurality of metal pads arranged on the active surface of the wafer. In addition, the glue layer is arranged on the active surface of the wafer, and the heat sink has a joint surface, and the heat sink is based on the joint surface, and is attached to the active surface of the wafer through the glue layer, and the joint surface includes a central surface. And a plurality of chamfer surfaces, and the chamfer surfaces surround the periphery of the central surface and are respectively connected to the periphery of the central surface, and the angle between the central surface and one of the chamfer surfaces ^ is less than 90 degrees. Finally, the wires are electrically connected to one of the metal pads to one of the corresponding bonding pads, respectively, and the encapsulant covers the chip, the heat sink and the wires.

依照本創作之較佳實施例所述,膠料層之位於這些導 角面之一及主動表面之間的部分係較厚於膠料層之位於中 央面及主動表面之間的部分。此外,這些導角面係為平面 或曲面,當這些導角面係為曲面時,局部之該些導角面之 一與該中央面的夾角係小於9 0度。另外,承載器係可為基 板或導線架,而散熱塊係可為空白晶片、金屬塊或石墨 塊。 P 同樣基於本創作之上述目的,本創作更提出一種堆疊 式晶片封裝結構,其具有一晶片、一膠料層、一散熱塊、 多個引腳及一封膠。首先,晶片具有一主動表面,且晶片 更具有多個金屬墊,其配置於晶片之主動表面。此外,膠According to the preferred embodiment of the present invention, the portion of the rubber layer between the one of the corner surfaces and the active surface is thicker than the portion of the rubber layer between the central surface and the active surface. In addition, the chamfered surfaces are planes or curved surfaces. When the chamfered surfaces are curved surfaces, the angle between one of the chamfered surfaces and the central surface is less than 90 degrees. In addition, the carrier system can be a substrate or a lead frame, and the heat sink can be a blank wafer, a metal block, or a graphite block. P Also based on the above purpose of this creation, this creation also proposes a stacked chip packaging structure, which has a chip, an adhesive layer, a heat sink, multiple pins, and an adhesive. First, the wafer has an active surface, and the wafer further has a plurality of metal pads, which are disposed on the active surface of the wafer. In addition, glue

10387twf.ptd 第11頁 M244580 五、創作說明(5) 料層係配置於晶片之主動表面,而散熱塊具有一接合面, 且散熱塊係以接合面,並經由膠料層而貼附至晶片之主動 表面,而接合面包括一中央面及多個導角面,而這些導角 面係圍繞於中央面之外圍,並分別連接至中央面之周緣, 且中央面與這些導角面之一的夾角係小於9 0度。另外,這 些引腳之一端係分別搭接至這些金屬墊之一,而封膠則包 覆至少局部之晶片、散熱塊及局部之這些引腳。 依照本創作之較佳實施例所述,封膠係暴露出晶片之 背面。此外,膠料層之位於這些導角面之一及主動表面之 間的部分係較厚於膠料層之位於中央面及主動表面之間的 部分。另外,這些導角面係為平面或曲面,當這些導角面 係為曲面時,局部之該些導角面之一與該中央面的夾角係 小於90度。 同樣基於本創作之上述目的,本創作再提出一種堆疊 式晶片封裝結構,其主要包括一晶片、一膠料層及一堆疊 結構體。晶片具有一主動表面,而膠料層係配置於晶片之 主動表面。此外,堆疊結構體具有一接合面,且堆疊結構 體係以接合面,並經由膠料層而貼附至晶片之主動表面, 而接合面包括一中央面及多個導角面,而這些導角面係圍 繞於中央面之外圍,並分別連接至中央面之周緣,且中央 面與這些導角面之一的夾角係小於90度。 依照本創作之較佳實施例所述,膠料層之位於這些導 角面及主動表面之間的部分係較厚於膠料層之位於中央面 及主動表面之間的部分。此外,這些導角面係為平面或曲10387twf.ptd Page 11 M244580 V. Creation instructions (5) The material layer is arranged on the active surface of the chip, and the heat sink block has a joint surface, and the heat sink block uses the joint surface and is attached to the chip through the glue layer. Active surface, and the joint surface includes a central surface and a plurality of chamfer surfaces, and these chamfer surfaces surround the periphery of the central surface and are connected to the periphery of the central surface, respectively, and the central surface and one of these chamfer surfaces The included angle is less than 90 degrees. In addition, one end of these pins is respectively connected to one of these metal pads, and the sealant covers at least a part of the chip, the heat sink and the part of these pins. According to the preferred embodiment of this creation, the sealant exposes the back of the wafer. In addition, the portion of the rubber layer between one of the corner surfaces and the active surface is thicker than the portion of the rubber layer between the central surface and the active surface. In addition, the chamfered surfaces are planes or curved surfaces. When the chamfered surfaces are curved surfaces, the angle between one of the chamfered surfaces and the central surface is less than 90 degrees. Also based on the above purpose of this creation, this creation proposes a stacked chip packaging structure, which mainly includes a wafer, a rubber layer and a stacked structure. The wafer has an active surface, and the rubber layer is disposed on the active surface of the wafer. In addition, the stacked structure has a bonding surface, and the stacked structure system uses the bonding surface and is attached to the active surface of the wafer through a glue layer, and the bonding surface includes a central surface and a plurality of lead angle surfaces, and these lead angles The planes surround the periphery of the central plane and are respectively connected to the peripheral edges of the central plane, and the angle between the central plane and one of the angled planes is less than 90 degrees. According to the preferred embodiment of the present invention, the portion of the rubber layer between the corner surfaces and the active surface is thicker than the portion of the rubber layer between the central surface and the active surface. In addition, these corner surfaces are flat or curved

10387twf.ptd 第12頁 M244580 五、創作說明(6) 面,當這些導角面係為曲面時,局部之導角面與中央面的 夾角係小於9 0度。另外,堆疊結構體係為空白晶片、散熱 塊或功能性晶片。並且,晶片更具有多個金屬墊,其配置 於晶片之主動表面,且此堆疊式晶片封裝結構更包括一承 載器、多個導線及一封膠,其中承載器具有一承載表面及 多個接合墊,且這些接合墊係配設於承載器之承載表面, 而晶片係以背面配置於承載器之承載表面’並且這些導線 係分別電性連接這些金屬墊之一至其所對應之這些接合墊 之一,而封膠包覆晶片、堆疊結構體及這些導線。 基於上述,本創作之堆豐式晶片封裝結構主要是在堆 疊結構體之底部周緣形成多個導角面,故可增加堆疊結構 體之底部周緣的膠料含量。因此,當晶片封裝結構接受熱 應力測試時,堆疊結構體之底部周緣的膠料層將可提供適 當的彈性緩衝,因而大幅降低堆疊結構體之底部周緣所產 生應力集中的程度,以避免晶片之表層受到應力不當地破 壞,故可有效延長晶片封裝結構之使用壽命。 為讓本創作之上述目的、特徵和優點能更明顯易懂, 下文特舉一較佳實施例,並配合所附圖式,作詳細說明如 τ 丨· 實施方式 , 請參考第2 Α圖,其繪示本創作之較佳實施例之第一種 堆疊式晶片封裝結構的剖面示意圖。晶片封裝結構20 0主 要包括承載器2 1 0、晶片2 2 0、散熱塊2 3 0、膠料層2 4 0、多 條導線25 0及封膠2 60。首先,承載器210,例如為基板或10387twf.ptd Page 12 M244580 V. Creation Instructions (6) Surfaces. When these lead surfaces are curved surfaces, the angle between the local lead surface and the central surface is less than 90 degrees. In addition, the stacked structure system is a blank wafer, a heat sink, or a functional wafer. In addition, the chip further has a plurality of metal pads, which are arranged on the active surface of the chip, and the stacked chip package structure further includes a carrier, a plurality of wires and an adhesive, wherein the carrier has a carrier surface and a plurality of bonding pads. And the bonding pads are arranged on the bearing surface of the carrier, and the chip is arranged on the back of the bearing surface of the carrier, and the wires are electrically connected to one of the metal pads to one of the corresponding bonding pads, respectively. The encapsulant covers the wafer, the stacked structure, and these wires. Based on the above, the stack-type chip packaging structure of the present invention mainly forms a plurality of corner surfaces at the bottom periphery of the stacked structure, so the rubber content at the bottom periphery of the stacked structure can be increased. Therefore, when the chip package structure is subjected to a thermal stress test, the rubber layer at the bottom periphery of the stacked structure will provide appropriate elastic buffering, thereby greatly reducing the degree of stress concentration generated at the bottom periphery of the stacked structure to avoid the chip The surface layer is damaged by stress improperly, so the service life of the chip package structure can be effectively extended. In order to make the above-mentioned purpose, features, and advantages of this creation more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings for detailed descriptions such as τ 丨 · implementation, please refer to FIG. 2 Α, It shows a schematic cross-sectional view of a first stacked chip package structure according to a preferred embodiment of the present invention. The chip package structure 20 0 mainly includes a carrier 2 10, a chip 2 2 0, a heat sink 2 3 0, a rubber layer 2 4 0, a plurality of wires 2 50, and a sealant 2 60. First, the carrier 210 is, for example, a substrate or

10387twf.ptd 第13頁 M244580 五、創作說明(7) 導線架等(此處之承載器2丨〇係為基板),承載器2丨〇具有 一承栽表面212及多個之接合墊214,而這些接合墊214/均 配置於承載器2 1 0之承載表面2 1 2。此外,晶片2 2 〇具有二 主動表面22 2及對應之一背面224,且晶片22〇係以其背面 2 24並經由一膠料層142,而貼附至承載器21〇之承載表面 212 ’而晶片220更具有多個金屬墊226,其配置於晶片220 之主動表面222。另外,散熱塊23 0例如為一空白晶片、. 導熱性佳之金屬塊或石墨塊,且散熱塊230具有一接合面 232 ’而散熱塊2 3 0係以其接合面23 2,經由另一膠料層24〇10387twf.ptd Page 13 M244580 V. Creation instructions (7) Lead frame, etc. (here, the carrier 2 is a substrate), the carrier 2 has a bearing surface 212 and a plurality of bonding pads 214, The bonding pads 214 / are all disposed on the bearing surface 2 1 2 of the carrier 2 10. In addition, the wafer 22 has two active surfaces 22 2 and a corresponding one of the back surfaces 224, and the wafer 22 is attached to the bearing surface 212 of the carrier 21 with its back surface 2 24 and a glue layer 142 through. The wafer 220 further has a plurality of metal pads 226 disposed on the active surface 222 of the wafer 220. In addition, the heat dissipation block 23 0 is, for example, a blank wafer, a metal block or a graphite block with good thermal conductivity, and the heat dissipation block 230 has a bonding surface 232 ′, and the heat dissipation block 2 3 0 uses its bonding surface 23 2 through another adhesive. Material layer 24

而貼附至晶片220之主動表面222,其中膠料層24〇之材質 例如為環氧樹脂(epoxy resin)。最後,這些導線25〇係 分別電性連接這些金屬墊2 2 6之一至其所對應之這些接合 墊214之一,而封膠260則包覆晶片220、散熱塊23〇~及這1些 導線250。 一 凊同樣參考弟2A圖’散熱塊230之接合面232包括一中The active surface 222 attached to the chip 220, wherein the material of the rubber layer 24 is, for example, epoxy resin. Finally, these wires 250 are electrically connected to one of the metal pads 2 2 6 to one of the corresponding bonding pads 214 respectively, and the sealant 260 covers the chip 220, the heat sink 23 ° and these wires. 250.一 凊 Also referring to FIG. 2A, the joint surface 232 of the heat sink 230 includes a middle

央面232a及多個導角面232b (如第2A圖之局部放大區域 )。值得注意的是,這些導角面23 2b係圍繞於中央面f32a 之外圍’並分別連接至中央面23 2a之周緣,且_央面232a 與任一導角面232b的夾角均小於90度,並且散熱塊23〇之 多個側面234係經由這些導角面232b,而間接地連接至中 央面232a,換句話說,散熱塊230之中央面232係經由導角 面232b ’而間接地連接至中央面232a。因此,導角面Μη 其相對於主動表面222之高度係大於中央面232a其相對於 主動表面222之高度,意即導角面232b將較中央面232a遠The central surface 232a and a plurality of corner surfaces 232b (such as a partially enlarged area in FIG. 2A). It is worth noting that these corner surfaces 23 2b surround the periphery of the central surface f32a and are connected to the periphery of the central surface 23 2a, respectively, and the angle between the central surface 232a and any of the corner surfaces 232b is less than 90 degrees. And the plurality of side surfaces 234 of the heat sink 23 are connected indirectly to the central surface 232a via the corner surfaces 232b. In other words, the central surface 232 of the heat sink 230 is indirectly connected to the corner surfaces 232b '.中心 面 232a. Therefore, the height of the guide angle surface Mη relative to the active surface 222 is greater than the height of the center surface 232a relative to the active surface 222, which means that the guide angle surface 232b will be farther from the center surface 232a.

10387丨wf.ptd 第14頁 M244580 五、創作說明(8) 離主動表面222。 承上所述,當散熱塊2 3 0之接合面2 3 2經由膠料層 2 4 0,而貼附至晶片2 2 0之主動表面2 2 2時,由於導角面 232b其相對於主動表面222之高度係大於中央面232a其相 對於主動表面222之高度,故可使膠料層240之位於導角面 2 3 2b及主動表面2 2 2之間的部分將較厚於膠料層240之位於 中央面232a及主動表面222之間的部分,因而增加散熱塊 2 3 0之底部周緣的部分膠料層24〇的厚度。因此,當晶片封 裝結構2 0 0接受熱應力測試時,晶片封裝結構2 0 0之本身所 產生的反覆熱派冷縮及彎曲運動,可利用位於散熱塊2 3 0 之導角面232b與晶片220之主動表面222之間的部分膠料層 2 40來提供適當的彈性緩衝,因而大幅降低散熱塊2 30之底 部周緣產生應力集中的程度’以避免晶片22 0之表層受到 應力不當地破壞。 請同時參考第2A、2B圖,其中第2B圖繪示第2A圖之晶 片封裝結構,其散熱塊之導角面係為曲面的剖面示意圖。 如第2A圖所示,導角面232b除了可以是平面以外,如第2B 圖所示,導角面2 3 2b亦可以是曲面,如此同樣可降低在散 熱塊2 3 0之底部周緣產生應力集中的程度。值得注意的 是,由於曲面亦可視為由多個連續銜接之平面所構成的 面,所以當導角面232b係為曲面時,局部之導角面232b將 可視為平面。因此’當導角面232b係為曲面時’局部之導 角面232b與中央面的夾角係同樣小於90度。 請同時參考第2A、2B、3圖,其中第3圖繪示本創作之10387 丨 wf.ptd Page 14 M244580 V. Creative Instructions (8) From the active surface 222. As mentioned above, when the bonding surface 2 3 2 of the heat sink 2 3 0 passes through the rubber layer 2 4 0 and is attached to the active surface 2 2 2 of the chip 2 2 0, the corner surface 232b is relatively The height of the surface 222 is greater than the height of the central surface 232a relative to the active surface 222, so that the portion of the rubber layer 240 between the corner surface 2 3 2b and the active surface 2 2 2 will be thicker than the rubber layer A portion of 240 between the central surface 232a and the active surface 222 increases the thickness of a part of the rubber layer 24o at the bottom periphery of the heat sink 230. Therefore, when the chip package structure 2000 is subjected to the thermal stress test, the repeated thermal shrinkage and bending movement generated by the chip package structure 2000 itself can use the corner surface 232b of the heat dissipation block 230 and the chip Part of the rubber layer 2 40 between the active surfaces 222 of 220 provides appropriate elastic cushioning, thereby greatly reducing the degree of stress concentration at the bottom periphery of the heat sink 2 30 to prevent the surface layer of the wafer 22 0 from being damaged by stress. Please also refer to Figs. 2A and 2B, where Fig. 2B shows the wafer package structure of Fig. 2A, and the corner surface of the heat dissipation block is a schematic sectional view. As shown in FIG. 2A, in addition to the lead surface 232b being a flat surface, as shown in FIG. 2B, the lead surface 2 3 2b may also be a curved surface, which can also reduce the stress generated on the bottom periphery of the heat sink 2 30. Degree of concentration. It is worth noting that, since the curved surface can also be regarded as a surface composed of a plurality of continuous connected planes, when the corner surface 232b is a curved surface, the local corner surface 232b can be regarded as a plane. Therefore, when the "corner surface 232b is a curved surface", the angle between the local corner surface 232b and the central surface is also smaller than 90 degrees. Please also refer to Figures 2A, 2B, and 3, of which Figure 3 shows the creation

10387twf.Ptd 第15頁 M244580 五、創作說明(9) 較佳實施例之第二種堆疊式晶片封裝結構的剖面示意圖。 第2A、2B圖之晶片封裝結構2〇〇與第3圖之晶片封裝結構 3 0 0相較之下,第2A、2B圖之晶片封裝結構2 0 0乃是以,,基 板1’作為承載器2 1 〇,而第3圖之晶片封裝結構3 0 0則是以,, 導線架”作為承載器3 1 〇。如第3圖所示,當承載器3 1 〇係為 導線架時,其通常具有一晶片座(die pad ) 31 〇a及多根 引腳(lead ) 310b,而晶片32 0及散熱塊3 3 0則是依序堆叠10387twf.Ptd Page 15 M244580 V. Creative Instructions (9) A cross-sectional schematic diagram of the second stacked chip package structure of the preferred embodiment. The wafer package structure 200 in FIGS. 2A and 2B is compared with the wafer package structure 300 in FIG. 3. The wafer package structure 200 in FIGS. 2A and 2B is based on the substrate 1 ′ as a carrier. Device 2 1 0, and the chip package structure 3 0 of FIG. 3 is based on, the lead frame "as the carrier 3 1 0. As shown in Fig. 3, when the carrier 3 1 0 is a lead frame, It usually has a die pad 31 〇a and multiple leads 310b, and the chip 32 0 and the heat sink 3 3 0 are sequentially stacked.

於晶片座3 1 0 a之上,且這些引腳3 1 0 b之一端係分別提供打 線接合用之接合塾3 1 4,並且這些導線3 5 0則分別電性連接 這些金屬墊326之一至其所對應之這些接合墊314之一。此 外,封膠36 0則包覆晶片320、散熱塊330、這些導線360及 局部之承載器310 (即晶片座310a及局部之引腳31〇b )。 值得注意的是’由於散熱塊330之接合面332的設計係相同 於第2A、2B圖之接合面232的設計,兩者均包括中央面 ( 2 32a )及多個導角面( 232b),而導角面(232b)亦包括設 計成平面及曲面,故於此不再重複贅述。On the chip holder 3 1 0 a, and one end of these pins 3 1 0 b respectively provides a bonding pad 3 3 4 for wire bonding, and the wires 3 5 0 are electrically connected to one of the metal pads 326 to It corresponds to one of these bonding pads 314. In addition, the sealing compound 360 covers the chip 320, the heat sink 330, these wires 360, and a part of the carrier 310 (that is, the chip holder 310a and the part of the pin 31ob). It is worth noting that 'the design of the joint surface 332 of the heat sink 330 is the same as the design of the joint surface 232 of Figs. 2A and 2B, both of which include a central surface (2 32a) and multiple corner surfaces (232b), The corner surface (232b) also includes a flat surface and a curved surface, so it will not be repeated here.

請同時參考第2A、2B、4圖,其中第4圖繪示本創作之 較佳實施例之第三種堆疊式晶片封裝結構的剖面示意圖。 第2A、2B圖之晶片封裝結構20 0與第4圖之晶片封裝^構 4 00相較之下,晶片封裝結構3 00係為一種”引腳於晶片上 (Lead On Chip,LOC ) ”之晶片封裝型態,其並無承載器 之設置。如第4圖所示,晶片封裝結構4 〇 〇並未經由第3圖 之導線3 5 0,而是直接利用至些引腳41 1之一端分別搭接至 晶片420之主動表面422的多個金屬墊426。此外,散熱塊Please refer to FIGS. 2A, 2B, and 4 at the same time, and FIG. 4 shows a schematic cross-sectional view of a third stacked chip package structure according to the preferred embodiment of the present invention. Compared with the chip package structure 200 of FIGS. 2A and 2B and the chip package structure 400 of FIG. 4, the chip package structure 300 is a kind of “lead on chip (LOC)”. The chip package type has no carrier arrangement. As shown in FIG. 4, the chip package structure 400 does not pass through the wires 3 5 0 in FIG. 3, but directly utilizes a plurality of pins 41 1 and a plurality of terminals respectively connected to the active surface 422 of the chip 420. Metal pad 426. In addition, the heat sink

M244580 五、創作說明(ίο) 430之接合面432亦同樣地經由_膠料層44〇,而貼附至晶 片4 2 0之主動表面4 2 2。另外,封膠4 6 〇則包覆局部之晶片 420、散熱塊430及局部之這些引腳4丨1,其中封膠46〇更可 暴露出晶片4 2 0之背面4 2 4。值得注意的是,由於散熱塊 430之接合面432的設計係相同於第2A、2β圖之接合面232 的設計’兩者均包括中央面(232a)及多個導角面 (232b) ’而導角面(232b)亦包括設計成平面及曲面,故於 此不再重複贅述。 為了符合系統單封裝(System in Package,SIP)的 要求,尚可堆疊多個功能性晶片於承載器之上。請參考 第5圖,其繪不本創作之第四種堆疊式晶片封裝結構的剖 面示意圖。晶片封裝結構5 0 0包括承載器51〇、(功能性) 晶片520、(功能性)晶片57〇、膠料層54〇、導線55〇及封 膠5 60。晶片封裝結構5 0 0乃是以功能性之晶片52〇b取代散 熱塊2 30,且晶片570之主動表面572的金屬墊576係經由導 線5 5 0,而電性連接至承載器51〇之承載表面512的接合墊 514。值得注意的是,由於晶片57〇之背面574係相同於第 2八圖之散熱塊230的接合面232,所以晶片57()以其背面 574,亚經由膠料層540而貼附至晶片52〇之主動表面522 時,將可增加晶片570之底部周緣的膠料層54()的厚度,此 乃相對於晶片570之底部中央的膠料層54〇的厚度而言。 接著請參考第5B圖,其繪示第5A圖之堆疊式晶片封裝 結構,其插入一墊塊於兩晶片之間的剖面示意圖。就晶^ 封裝結構5 0 2而言,晶片5 2 0與晶片5 7 0之間更可插入一墊M244580 Fifth, the joint surface 432 of the creation instruction (430) is also attached to the active surface 4 2 2 of the wafer 4 2 through the rubber layer 44. In addition, the sealing compound 460 covers the local chip 420, the heat sink 430, and the local pins 4 丨 1, and the sealing compound 460 can expose the back surface 4 2 4 of the chip 4 2 0. It is worth noting that since the design of the joint surface 432 of the heat sink 430 is the same as the design of the joint surface 232 of Figs. 2A and 2β, 'both include a central surface (232a) and a plurality of angled surfaces (232b)' and The corner surface (232b) also includes a flat surface and a curved surface, so it will not be repeated here. In order to meet the requirements of System in Package (SIP), multiple functional chips can still be stacked on the carrier. Please refer to Figure 5 for a schematic cross-sectional view of the fourth stacked chip package structure created in this work. The chip package structure 500 includes a carrier 51o, a (functional) wafer 520, a (functional) wafer 57o, an adhesive layer 54o, a wire 55o, and a sealant 560. The chip package structure 5 0 0 is a functional chip 52 0 b instead of the heat sink 2 30, and the metal pad 576 of the active surface 572 of the chip 570 is electrically connected to the carrier 51 5 through a wire 5 50. The bonding pads 514 of the bearing surface 512. It is worth noting that, since the back surface 574 of the wafer 57 is the same as the bonding surface 232 of the heat sink 230 of FIG. 28, the wafer 57 () is attached to the wafer 52 with the back surface 574 and the glue layer 540 as the sub-layer. The active surface 522 of 〇 will increase the thickness of the rubber layer 54 () at the bottom periphery of the wafer 570, which is relative to the thickness of the rubber layer 54 (0) at the bottom center of the wafer 570. Please refer to FIG. 5B for a cross-sectional schematic diagram of the stacked chip package structure of FIG. 5A with a pad inserted between the two chips. As far as the crystal package structure 502 is concerned, a pad can be inserted between the chip 5 2 0 and the chip 5 7 0

M244580 五、創作說明(11) 塊5 8 0來墊高晶片5 70,以避免晶片5 70之背面碰觸到導線 5 5 0而造成導線5 5 0之間的短路。值得注意的是,墊塊5 8 0 之頂部周緣及底部周緣亦可形成導角面,以使膠料層5 4 0 之周緣的厚度大於其中央的厚度,使得厚度不均句之膠料 層可在結構上提供適當的彈性緩衝。此外,墊塊5 8 0係可 為空白晶片、金屬塊、石墨塊或由其他材質所製成。 本創作之堆疊式晶片封裝結構更可依序由多個堆疊結 構體(例如功能性晶片、空白晶片、金屬塊、石墨塊或墊 塊)所依序堆疊而成’而任二相鄰之堆疊結構體之間的膠 料層的厚度係可隨著堆疊結構體之相鄰的表面其形成起伏 0 而加以改變,特別是可在兩堆疊結構體之一的底部周緣形 成多個導角面,使得部分位於堆疊結構體之底部周緣的膠 料層係厚於部分位於堆疊結構體之底部中央的膠料層,故 可在結構上提供適當的彈性緩衝。 綜上所述,本創作之堆疊式晶片封裝結構僅需在堆疊 結構體(例如空白晶片、金屬塊、石墨塊或功能性晶片) 之底部周緣,簡單地利用機械加工的方式形成多個導角 面,用以增加堆疊結構體之底部周緣與晶片之主動表面的 相對距離,因而增加堆疊結構體之底部周緣的膠料層的厚 > 度,此乃相對於堆疊結構體之底部中央的膠料層的厚度而 言,如此將不須藉由全面性增加膠料層之整體厚度來增加 堆疊結構體之底部周緣的膠料層的厚度。因此,當晶片封 裝結構接受熱應力測試時,堆疊結構體之底部周緣的膠料 層將可提供適當的彈性緩衝,因而大幅降低堆疊結構體之M244580 V. Creative Instructions (11) Block 5 8 0 is used to raise the chip 5 70 to prevent the back of the chip 5 70 from touching the wire 5 5 0 and causing a short circuit between the wires 5 5 0. It is worth noting that the top and bottom edges of the pad 5 8 0 can also form a corner surface, so that the thickness of the peripheral edge of the rubber layer 5 4 0 is greater than the thickness of its center, so that the rubber layer of uneven thickness Provides proper elastic cushioning in structure. In addition, the pad 580 can be a blank wafer, a metal block, a graphite block, or made of other materials. The stacked chip packaging structure of this creation can be sequentially stacked from multiple stacked structures (such as functional wafers, blank wafers, metal blocks, graphite blocks or pads), and any two adjacent stacks The thickness of the rubber layer between the structures can be changed as the adjacent surfaces of the stacked structures form undulations. In particular, a plurality of chamfered surfaces can be formed on the bottom periphery of one of the two stacked structures. The rubber layer that is partly located at the bottom periphery of the stacked structure is thicker than the rubber layer that is partly located at the bottom center of the stacked structure, so it can provide appropriate elastic cushioning in structure. To sum up, the stacked chip packaging structure of this creation only needs to form multiple lead angles simply by machining on the bottom periphery of the stacked structure (such as a blank wafer, a metal block, a graphite block, or a functional wafer). Surface to increase the relative distance between the bottom periphery of the stacked structure and the active surface of the wafer, thereby increasing the thickness > of the rubber layer at the bottom periphery of the stacked structure, which is relative to the adhesive at the bottom center of the stacked structure In terms of the thickness of the material layer, it is not necessary to increase the thickness of the rubber layer at the bottom periphery of the stacked structure by comprehensively increasing the overall thickness of the rubber layer. Therefore, when the wafer packaging structure is subjected to a thermal stress test, the rubber layer on the bottom periphery of the stacked structure will provide appropriate elastic buffering, thereby greatly reducing the stack structure.

10387twf.ptd 第18頁 M244580 五、創作說明(12) 底部周緣所產生應力集中的程度,以避免晶片之表層(特 別是晶片之主動表面)受到應力不當地破壞,故可有效延 長晶片封裝結構之使用壽命。 此外,本創作之堆疊式晶片封裝結構除可應用於"打 線接合(W/B ) π型態之晶片封裝結構之外,更可應用於” 引腳於晶片上(LOC ) ”型態之晶片封裝結構,或可應用於 π系統單封裝(S I Ρ ) ”型態之晶片封裝結構。 雖然本創作已以一較佳實施例揭露如上’然其並非用 以限定本創作,任何熟習此技藝者,在不脫離本創作之精 神和範圍内,當可作些許之更動與潤飾,因此本創作之保 ¥ 護範圍當視後附之申請專利範圍所界定者為準。10387twf.ptd Page 18 M244580 V. Creative Instructions (12) The degree of stress concentration at the bottom periphery to prevent the surface of the wafer (especially the active surface of the wafer) from being damaged by stress improperly, so it can effectively extend the structure of the chip package. Service life. In addition, the stacking chip package structure of this creation can be applied to " wire bonding (W / B) π-type chip package structure, and can also be applied to the "lead on chip (LOC)" type Chip package structure, or it can be applied to π system single package (SI P) type chip package structure. Although this creation has been disclosed above with a preferred embodiment, it is not intended to limit the creation, anyone familiar with this technique Those who do not depart from the spirit and scope of this creation should make some changes and retouching. Therefore, the protection scope of this creation shall be determined by the scope of the attached patent application.

10387twf.ptd 第19頁 M244580 圖式簡單說明 第1圖繪示習知之一種堆疊式晶片封裝結構的剖面示 意圖。 第2A圖繪示本創作之較佳實施例之第一種堆疊式晶片 封裝結構的剖面示意圖。 第2B圖繪示第2A圖之晶片封裝結構,其散熱塊之導角 面係為曲面的剖面示意圖。 第3圖繪示本創作之較佳實施例之第二種堆疊式晶片 封装結構的剖面示意圖。 第4圖繪示本創作之較佳實施例之第三種堆疊式晶片 封裳結構的剖面示意圖。 第5圖繪示本創作之第四種堆疊式晶片封裝結構的剖 面示意圖。 第6圖繪示第5圖之堆疊式晶片封裝結構,其插入一墊 塊於兩晶片之間的剖面示意圖。 圖式才票言己言允明 100 晶 片 封 裝 結 構 1 10 承 載 器 1 12 承 載 表 面 1 14 接 合 墊 120 晶 片 122 主 動 表面 124 背 面 126 金 屬 墊 130 散 執 塊 132 接 合 面 140 膠 料 層 142 膠 料 層 150 導 線 160 封 膠 200 晶 片 封 裝 結 構 210 承 載 器 212 承 載 表 面 214 接 合 墊10387twf.ptd Page 19 M244580 Brief Description of Drawings Figure 1 shows a schematic cross-sectional view of a conventional stacked chip package structure. FIG. 2A is a schematic cross-sectional view of a first stacked chip package structure according to a preferred embodiment of the present invention. FIG. 2B is a schematic cross-sectional view of the chip package structure of FIG. 2A. FIG. 3 is a schematic cross-sectional view of a second stacked chip package structure according to a preferred embodiment of the present invention. FIG. 4 is a schematic cross-sectional view of a third stacked wafer sealing structure according to a preferred embodiment of the present invention. FIG. 5 is a schematic cross-sectional view of a fourth stacked chip package structure of the present invention. FIG. 6 is a schematic cross-sectional view of the stacked chip package structure of FIG. 5 with a pad inserted between the two chips. Schematic votives and promises 100 chip package structure 1 10 Carrier 1 12 Carrying surface 1 14 Bonding pad 120 Wafer 122 Active surface 124 Back surface 126 Metal pad 130 Dispersion block 132 Bonding surface 140 Rubber layer 142 Rubber layer 150 lead 160 sealant 200 chip package structure 210 carrier 212 carrier surface 214 bonding pad

10387twf.ptd 第20頁 M244580 圖式簡單說明 2 2 0 : 晶片 2 22 : 主動表面 2 24 : 背面 2 2 6 : 金屬塾 2 3 0 : 散熱塊 2 3 2 : 接合面 2 3 2a :中央面 2 3 2b :導角面 24 0 : 膠料層 242 膠料層 2 5 0 : 導線 260 封膠 3 0 0 : 晶片封裝結構 310 承載器 310a •晶片座 310b :引腳 312 : 承載表面 314 : :接合墊 3 2 0 : 晶片 3 22 : :主動表面 324 : 背面 3 2 6 : :金屬墊 3 3 0 : 散熱塊 3 32 : :接合面 340 ·· 膠料層 342 : :膠料層 3 5 0 : 導線 3 6 0 : :封膠 40 0 : 晶片封裝結構 411 : I引腳 42 0 : 晶片 422 : :主動表面 42 4 : 背面 426 :金屬墊 43 0 : 散熱塊 432 :接合面 440 : 膠料層 442 :膠料層 46 0 : 封膠 5 0 0〜 5 0 2 :晶片封裝結構 510 承載器 512 : 承載表面 514 接合墊 52 0 : (功能性)晶片 522 主動表面 524 : 背面 526 金屬墊10387twf.ptd Page 20 M244580 Schematic description 2 2 0: Chip 2 22: Active surface 2 24: Back surface 2 2 6: Metal 塾 2 3 0: Heat sink 2 3 2: Joint surface 2 3 2a: Central surface 2 3 2b: corner surface 24 0: rubber layer 242 rubber layer 2 50: wire 260 sealant 3 0: chip package structure 310 carrier 310a • wafer base 310b: pin 312: carrier surface 314 :: bonding Pad 3 2 0: Wafer 3 22:: Active surface 324: Back face 3 2 6:: Metal pad 3 3 0: Heat sink 3 32:: Joint surface 340 ·· Rubber layer 342:: Rubber layer 3 5 0: Lead 3 6 0:: Sealant 40 0: Chip package structure 411: I pin 42 0: Chip 422:: Active surface 42 4: Back surface 426: Metal pad 43 0: Heat sink 432: Joint surface 440: Rubber layer 442: Rubber layer 46 0: Sealant 50 0 ~ 5 0 2: Chip package structure 510 Carrier 512: Carrying surface 514 Bonding pad 52 0: (functional) wafer 522 Active surface 524: Back 526 metal pad

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10387twf.ptd 第22頁10387twf.ptd Page 22

Claims (1)

M244580 六、申請專利範圍 1 一種堆疊式晶片封裝結構,包括: 一承載器,具有一承載表面及複數個接合墊,且該些 接合墊係配設於該承載器之該承載表面; 一晶片,具有一主動表面及對應之一背面,且該晶片 係以該背面配置於該承載器之該承載表面,而該晶片更具 有複數個金屬墊,其配置於該晶片之該主動表面; 一膠料層,配置於該晶片之該主動表面; 一散熱塊,具有一接合面,且該散熱塊係以該接合 面,並經由該膠料層而貼附至該晶片之該主動表面,而該 接合面包括一中央面及複數個導角面,而該些導角面係圍 繞於該中央面之外圍,並分別連接至該中央面之周緣.,且 該中央面與該些導角面之一的夾角係小於9 0度; 複數個導線,分別電性連接該些金屬墊之一至其所對 應之該些接合墊之一;以及 一封膠,包覆該晶片、該散熱塊及該些導線。 2. 如申請專利範圍第1項所述之堆疊式晶片封裝結 構,其中該膠料層之位於該些導角面及該主動表面之間的 部分係較厚於該膠料層之位於該中央面及該主動表面之間 的部分。 3. 如申請專利範圍第1項所述之堆疊式晶片封裝結 構,其中該些導角面係為平面。 4. 如申請專利範圍第1項所述之堆疊式晶片封裝結 構,其中該些導角面係為曲面,且局部之該些導角面之一 與該中央面的夾角係小於90度。M244580 VI. Scope of patent application 1 A stacked chip package structure, including: a carrier having a carrier surface and a plurality of bonding pads, and the bonding pads are arranged on the carrier surface of the carrier; a chip, It has an active surface and a corresponding back surface, and the wafer is arranged on the bearing surface of the carrier with the back surface, and the wafer further has a plurality of metal pads arranged on the active surface of the wafer; a rubber material; A heat dissipating block having a bonding surface, and the heat dissipating block is attached to the active surface of the wafer through the glue layer, and the bonding The plane includes a central plane and a plurality of chamfer planes, and the chamfer planes surround the periphery of the central plane and are respectively connected to the periphery of the central plane. The central plane and one of the chamfer planes. The included angle is less than 90 degrees; a plurality of wires are electrically connected to one of the metal pads to one of the corresponding bonding pads respectively; and an adhesive covering the chip, the heat sink and the wire. 2. The stacked chip package structure according to item 1 of the scope of the patent application, wherein a portion of the rubber layer between the corner surfaces and the active surface is thicker than the rubber layer at the center Between the surface and the active surface. 3. The stacked chip package structure described in item 1 of the patent application scope, wherein the corner surfaces are flat. 4. The stacked chip package structure according to item 1 of the scope of the patent application, wherein the corner surfaces are curved surfaces, and the angle between one of the corner surfaces and the central surface is less than 90 degrees. 10387twf.ptd 第23頁 M244580 六、申請專利範圍 5. 如申請專利範圍第1項所述之堆疊式晶片封裝結 構,其中該承載器係為基板及導線架其中之一。 6. 如申請專利範圍第1項所述之堆疊式晶片封裝結 構,其中該散熱塊係為空白晶片、金屬塊及石墨塊其中之 ——- 〇 7. —種堆疊式晶片封裝結構,包括: 一晶片,具有一主動表面,且該晶片更具有複數個金 屬墊,其配置於該晶片之該主動表面; 一膠料層,配置於該晶片之該主動表面; 一散熱塊,具有一接合面,且該散熱塊係以該接合 面,並經由該膠料層而貼附至該晶片之該主動表面,而該 接合面包括一中央面及複數個導角面,而該些導角面係圍 繞於該中央面之外圍,並分別連接至該中央面之周緣,且 該中央面與該些導角面之一的夾角係小於9 0度; 複數個引腳,其中該些引腳之一端係分別搭接至該些 金屬墊之一;以及 一封膠,包覆至少局部之該晶片、該散熱塊及局部之 該些引腳。 8 ·如申請專利範圍第7項所述之堆疊式晶片封裝結 構,其中該封膠係暴露出該晶片之該背面。 9.如申請專利範圍第7項所述之堆疊式晶片封裝結 構,其中該膠料層之位於該些導角面及該主動表面之間的 部分係較厚於該膠料層之位於該中央面及該主動表面之間 的部分。10387twf.ptd Page 23 M244580 6. Scope of patent application 5. The stacked chip package structure described in item 1 of the patent application scope, wherein the carrier is one of a substrate and a lead frame. 6. The stacked chip package structure described in item 1 of the scope of patent application, wherein the heat sink is one of a blank chip, a metal block, and a graphite block--〇7.-A stacked chip package structure, including: A wafer having an active surface, and the wafer further having a plurality of metal pads arranged on the active surface of the wafer; a glue layer arranged on the active surface of the wafer; a heat sink having a bonding surface And the heat sink is attached to the active surface of the chip by the joint surface and through the glue layer, and the joint surface includes a central surface and a plurality of lead surfaces, and the lead surfaces are It surrounds the periphery of the central surface and is respectively connected to the periphery of the central surface, and the angle between the central surface and one of the lead angle surfaces is less than 90 degrees; a plurality of pins, one of which Are respectively overlapped to one of the metal pads; and a piece of glue covering at least a part of the chip, the heat sink and the pins. 8. The stacked chip package structure as described in item 7 of the patent application scope, wherein the sealant exposes the back surface of the wafer. 9. The stacked chip package structure according to item 7 of the scope of the patent application, wherein a portion of the rubber layer between the corner surfaces and the active surface is thicker than the rubber layer at the center Between the surface and the active surface. 10387twf.ptd 第24頁 M244580 六、申請專利範圍 1 0.如申請專利範圍第7項所述之堆疊式晶片封裝結 構,其中該些導角面係為平面。 Π .如申請專利範圍第7項所述之堆疊式晶片封裝結 構,其中該些導角面係為曲面,且局部之該些導角面之一 與該中央面的失角係小於9 0度。 1 2.如申請專利範圍第7項所述之堆疊式晶片封裝結 構’其中該散熱塊係為空白晶片、金屬塊及石墨塊其中之 —— 〇 1 3. —種堆疊式晶片封裝結構,至少包括: 一晶片,具有一主動表面; 一膠料層,配置於該晶片之該主動表面;以及 一堆疊結構體,具有一接合面,且該堆疊結構體係以 該接合面,並經由該膠料層而貼附至該晶片之該主動表 面,而該接合面包括一中央面及複數個導角面,而該些導 角面係圍繞於該中央面之外圍,並分別連接至該中央面之 周緣,且該中央面與該些導角面之一的夾角係小於9 0度。 1 4.如申請專利範圍第1 3項所述之堆疊式晶片封裝結 構,其中該膠料層之位於該些導角面及該主動表面之間的 部分係較厚於該膠料層之位於該中央面及該主動表面之間 的部分。 1 5.如申請專利範圍第1 3項所述之堆疊式晶片封裝結 構,其中該些導角面係為平面。 1 6.如申請專利範圍第1 3項所述之堆疊式晶片封裝結 構,其中該些導角面係為曲面,且局部之該些導角面之一10387twf.ptd Page 24 M244580 6. Scope of patent application 1 0. The stacked chip package structure described in item 7 of the scope of patent application, wherein the corner surfaces are flat. Π. The stacked chip package structure described in item 7 of the scope of the patent application, wherein the corner surfaces are curved surfaces, and the angle between the one of the corner surfaces and the central surface is less than 90 degrees . 1 2. The stacked chip package structure described in item 7 of the scope of the patent application, wherein the heat sink block is one of a blank chip, a metal block, and a graphite block— 〇1 3. — A stacked chip package structure, at least It includes: a wafer with an active surface; a rubber layer disposed on the active surface of the wafer; and a stacked structure with a bonding surface, and the stacked structure system uses the bonding surface and passes through the rubber Layer is attached to the active surface of the chip, and the joint surface includes a central surface and a plurality of corner surfaces, and the corner surfaces are around the periphery of the center surface and are connected to the center surface respectively. The peripheral edge, and the angle between the central surface and one of the corner surfaces is less than 90 degrees. 1 4. The stacked chip package structure described in item 13 of the scope of patent application, wherein the portion of the rubber layer between the corner surfaces and the active surface is thicker than that of the rubber layer. A portion between the central surface and the active surface. 1 5. The stacked chip package structure according to item 13 of the scope of the patent application, wherein the corner surfaces are flat. 16. The stacked chip package structure according to item 13 of the scope of patent application, wherein the corner surfaces are curved surfaces, and one of the corner surfaces is partially 10387twf.ptd 第25頁 M244580 六、申請專利範圍 與該中央面的夾角係小於9 0度。 1 7.如申請專利範圍第1 3項所述之堆疊式晶片封裝結 構,其中該堆疊結構體係為空白晶片、散熱塊及功能性晶 片其中之一。 1 8.如申請專利範圍第1 3項所述之堆疊式晶片封裴結 構,其中該晶片更具有複數個金屬墊,其配置於該晶片之 該主動表面,且該堆疊式晶片封裝結構更包括: 一承載器,具有一承載表面及複數個接合墊,且該些 接合墊係配設於該承載器之該承載表面,而該晶片係以該 背面配置於該承載器之該承載表面; 複數個導線,分別電性連接該些金屬墊之一至其所對 應之該些接合墊之一;以及 一封膠,包覆該晶片、該堆疊結構體及該些導線。10387twf.ptd Page 25 M244580 6. Scope of patent application The included angle with the central plane is less than 90 degrees. 1 7. The stacked chip package structure according to item 13 of the scope of the patent application, wherein the stacked structure system is one of a blank chip, a heat sink and a functional chip. 1 8. The stacked wafer sealing structure described in item 13 of the scope of patent application, wherein the wafer further has a plurality of metal pads, which are arranged on the active surface of the wafer, and the stacked wafer packaging structure further includes : A carrier having a bearing surface and a plurality of bonding pads, the bonding pads are arranged on the bearing surface of the carrier, and the wafer is arranged on the bearing surface of the carrier with the back surface; a plurality of Each of the wires is electrically connected to one of the metal pads to one of the bonding pads corresponding to the metal pads; and a piece of glue covers the chip, the stacked structure and the wires. 10387twf.ptd 第26頁10387twf.ptd Page 26
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11302601B1 (en) 2020-12-21 2022-04-12 Amulaire Thermal Technology, Inc. IGBT module with heat dissipation structure and method for manufacturing the same
TWI792059B (en) * 2020-09-30 2023-02-11 艾姆勒科技股份有限公司 Method of manufacturing igbt module with heat-dissipation structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI792059B (en) * 2020-09-30 2023-02-11 艾姆勒科技股份有限公司 Method of manufacturing igbt module with heat-dissipation structure
US11302601B1 (en) 2020-12-21 2022-04-12 Amulaire Thermal Technology, Inc. IGBT module with heat dissipation structure and method for manufacturing the same

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