TWI910246B - 用於操作壓力感測器之群組的方法、壓力感測器及電腦程式產品 - Google Patents

用於操作壓力感測器之群組的方法、壓力感測器及電腦程式產品

Info

Publication number
TWI910246B
TWI910246B TW110137729A TW110137729A TWI910246B TW I910246 B TWI910246 B TW I910246B TW 110137729 A TW110137729 A TW 110137729A TW 110137729 A TW110137729 A TW 110137729A TW I910246 B TWI910246 B TW I910246B
Authority
TW
Taiwan
Prior art keywords
pressure
measurement
gas type
gas
pressure sensor
Prior art date
Application number
TW110137729A
Other languages
English (en)
Chinese (zh)
Other versions
TW202232070A (zh
Inventor
克利斯汀 柏格
羅夫 恩德瑞斯
伯哈德 安德勞斯
馬丁 烏斯特
Original Assignee
列支敦斯登商英飛康股份公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 列支敦斯登商英飛康股份公司 filed Critical 列支敦斯登商英飛康股份公司
Publication of TW202232070A publication Critical patent/TW202232070A/zh
Application granted granted Critical
Publication of TWI910246B publication Critical patent/TWI910246B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/02—Testing or calibrating of apparatus for measuring fluid pressure of indicators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
TW110137729A 2020-10-14 2021-10-12 用於操作壓力感測器之群組的方法、壓力感測器及電腦程式產品 TWI910246B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/EP2020/078937 WO2022078594A1 (de) 2020-10-14 2020-10-14 Verfahren zum betrieb einer gruppe von drucksensoren
WOPCT/EP2020/078937 2020-10-14

Publications (2)

Publication Number Publication Date
TW202232070A TW202232070A (zh) 2022-08-16
TWI910246B true TWI910246B (zh) 2026-01-01

Family

ID=72885575

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110137729A TWI910246B (zh) 2020-10-14 2021-10-12 用於操作壓力感測器之群組的方法、壓力感測器及電腦程式產品

Country Status (8)

Country Link
US (1) US12480831B2 (da)
EP (1) EP4229381B1 (da)
JP (1) JP7599012B2 (da)
KR (1) KR20230086714A (da)
CN (1) CN116368360B (da)
DK (1) DK4229381T3 (da)
TW (1) TWI910246B (da)
WO (1) WO2022078594A1 (da)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19860500A1 (de) * 1998-12-28 2000-07-27 Heinz Ploechinger Vorrichtung und Verfahren zur Druckmessung
JP2001330543A (ja) * 2000-05-25 2001-11-30 Natl Inst Of Advanced Industrial Science & Technology Meti ２種類混合気体の濃度測定方法及び濃度測定装置
EP1394523A1 (de) * 2002-08-24 2004-03-03 Pfeiffer Vacuum GmbH Verfahren zum Betrieb eines Totaldrucktransmitters

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE94642T1 (de) 1989-01-23 1993-10-15 Balzers Hochvakuum Gasdruck-messgeraet.
US5542286A (en) * 1995-01-23 1996-08-06 Hewlett-Packard Company Method and apparatus for correcting flow and pressure sensor drift in a gas chromatograph
JP2012026995A (ja) * 2010-07-28 2012-02-09 Ulvac Japan Ltd トランスデューサ型真空計及びトランスデューサ型真空計を用いた単結晶引き上げ装置
US20130086972A1 (en) * 2011-10-10 2013-04-11 Mocon, Inc. Calibration technique for calibrating a zirconium oxide oxygen sensor and calibrated sensor
US9605992B2 (en) * 2014-03-14 2017-03-28 Hitachi Metals, Ltd. On-tool mass flow controller diagnostic systems and methods
US10663337B2 (en) * 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
CN106645587B (zh) * 2017-01-16 2024-03-12 清华大学 一种气体传感器评测与校准系统
US10914717B2 (en) * 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
DE102018007884A1 (de) * 2018-10-05 2020-04-09 Heinz Plöchinger Sensor zur komparativen Druckmessung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19860500A1 (de) * 1998-12-28 2000-07-27 Heinz Ploechinger Vorrichtung und Verfahren zur Druckmessung
JP2001330543A (ja) * 2000-05-25 2001-11-30 Natl Inst Of Advanced Industrial Science & Technology Meti ２種類混合気体の濃度測定方法及び濃度測定装置
EP1394523A1 (de) * 2002-08-24 2004-03-03 Pfeiffer Vacuum GmbH Verfahren zum Betrieb eines Totaldrucktransmitters
DE10238961A1 (de) * 2002-08-24 2004-03-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb eines Totaldrucktransmitters

Also Published As

Publication number Publication date
CN116368360A (zh) 2023-06-30
JP2023547360A (ja) 2023-11-10
KR20230086714A (ko) 2023-06-15
TW202232070A (zh) 2022-08-16
EP4229381A1 (de) 2023-08-23
EP4229381B1 (de) 2025-05-07
US20230375428A1 (en) 2023-11-23
JP7599012B2 (ja) 2024-12-12
DK4229381T3 (da) 2025-07-21
US12480831B2 (en) 2025-11-25
WO2022078594A1 (de) 2022-04-21
CN116368360B (zh) 2025-09-26

Similar Documents

Publication Publication Date Title
JP4009523B2 (ja) オゾンガス濃度計測方法及びオゾンガス濃度計測装置
JP7628637B2 (ja) 分圧検出装置及び方法
Şenlikci et al. Pressure calcimeter as a simple method for measuring the CaCO3 content of soil and comparison with Scheibler calcimeter
TWI910246B (zh) 用於操作壓力感測器之群組的方法、壓力感測器及電腦程式產品
JPH11326204A (ja) 炭酸ガス濃度測定装置
JP2000039347A (ja) 流量検査装置
Loriot et al. Reliability of a capacitance manometer in the range 2× 10− 4− 5× 10− 6 Torr
CN115128210B (zh) 一种小量程计量设备的超量程标定方法
JP7674474B2 (ja) 圧力センサグループの動作方法
Yoshida et al. Calibration of ultrahigh vacuum gauge from 10− 9 Pa to 10− 5 Pa by the two-stage flow-dividing system
JP3461973B2 (ja) 圧力洩れ測定方法
KR20150053829A (ko) 능동적 자가 정도 교정이 가능한 공연비 측정기 및 그 제어방법
JP4953087B2 (ja) 濃度測定方法および装置
Xi et al. Uncertainty analysis of the LIP vacuum standard for XHV range
Phanakulwijit et al. Establishment of Thailand’s national primary vacuum standard by a static expansion method
KR100439160B1 (ko) 분동식 압력표준기를 이용한 압력계 교정 시스템 및교정방법
JPH04204133A (ja) 基準真空計の校正装置
CN114838789B (zh) 一种用于热式质量流量控制器的气体质量流量校准方法
Poulter et al. Reproducibility of the performance of Pirani gauges
SU564553A1 (ru) Способ динамической градуировки манометров низкого давлени
JP2575507B2 (ja) 還元性雰囲気炉の操炉方法
JP2575521B2 (ja) 還元性雰囲気炉の操炉方法
Legras et al. Calibration chain of the BNM-LNE from 10− 4 Pa to 10 kPa
JPS6021335B2 (ja) ガスの発熱量測定方法および装置
CN121994726A (zh) 一种环境参数自适应的拉曼光谱爆炸物识别仪校准方法