TWI847464B - Cleaning device - Google Patents

Abstract

The present invention discloses a cleaning device, comprising: a cleaning tank having a cleaning cavity; a first supporting structure for supporting an object to be cleaned, the first supporting structure being movable; a second supporting structure for supporting an object to be cleaned, the second supporting structure being movable; a driving mechanism for driving the second supporting structure to move to the object to be cleaned when the first supporting structure is driven to move to the object to be cleaned away; and a driving mechanism for driving the second supporting structure to move to the object to be cleaned away when the first supporting structure is driven to move to the object to be cleaned. The object to be cleaned can be a silicon wafer. When cleaning the silicon wafer in the tank, the first supporting structure and the second supporting structure can alternately support the object to be cleaned, so that the contact part between the supporting structure and the silicon wafer can be better cleaned, thereby improving the cleaning effect of the silicon wafer.

Description

Cleaning device

The present invention belongs to the field of silicon chip technology, and specifically relates to a cleaning device.

Silicon wafer cleaning is very important as the basis for manufacturing solar cells and integrated circuits. The cleaning effect directly affects the final performance, efficiency and stability of solar cells and integrated circuits. When silicon wafers are cut from silicon rods, the multi-layer lattices on the surface of the silicon wafers are in a broken state and are filled with unsaturated hanging bonds. The hanging bonds are highly active and easily absorb foreign impurity particles, causing the surface of the silicon wafer to be contaminated and the performance to deteriorate. Particle impurities will reduce the dielectric strength of silicon wafers, metal ions will increase the reverse leakage current of the solar cell PN junction and reduce the life of minority carriers, organic compounds will deteriorate the quality of the oxide layer, and _H2O will aggravate the corrosion of the silicon surface. Cleaning silicon wafers not only removes impurities on the surface of silicon wafers, but also passivates the surface of silicon wafers, thereby reducing the adsorption capacity of the surface of silicon wafers. High-specification silicon wafers have very strict requirements on the cleanliness of the surface. In theory, no particles, metal ions, organic adhesion, water vapor, oxide layer, etc. are allowed to exist. In addition, the surface of silicon wafers is required to have atomic-level flatness, and the hanging bonds at the edges of silicon wafers are terminated with hydrogen. Due to defects in silicon wafer cleaning technology, problems arise in large integrated circuits due to insufficient cleanliness of the silicon substrate, and the failure rate can even reach 50%. Therefore, it is extremely necessary to optimize the silicon wafer cleaning process.

At present, the cleaning process of silicon wafers mainly uses a tank cleaning method. When cleaning inside the tank, a carrier is used to hold the silicon wafer. Since the contact part between the carrier and the silicon wafer is fixed, the silicon wafer cannot be cleaned at the contact point, resulting in poor cleaning effect.

The purpose of the embodiment of the present invention is to provide a cleaning device to solve the problem that when cleaning silicon wafers in a tank, the contact area between the carrier and the silicon wafer is difficult to clean and the cleaning effect is poor.

The embodiment of the present invention provides a cleaning device, comprising: a cleaning tank, the cleaning tank having a cleaning cavity; a first supporting structure, the first supporting structure is used to support the object to be cleaned, the first supporting structure is movable; a second supporting structure, the second supporting structure is used to support the object to be cleaned, the second supporting structure is movable; a driving mechanism, the driving mechanism is used to drive the second supporting structure to move to support the object to be cleaned when the first supporting structure is driven to move away from the object to be cleaned; the driving mechanism is used to drive the second supporting structure to move away from the object to be cleaned when the first supporting structure is driven to move to support the object to be cleaned.

Wherein, the driving mechanism includes: a first driving mechanism and a second driving mechanism, wherein the first driving mechanism drives the first supporting structure to move downward along the height direction of the cleaning chamber to be separated from the object to be cleaned, and the second driving mechanism drives the second supporting structure to move upward along the height direction of the cleaning chamber to carry the object to be cleaned; When the first driving mechanism drives the first supporting structure to move upward along the height direction of the cleaning chamber to carry the object to be cleaned, the second driving mechanism drives the second supporting structure to move downward along the height direction of the cleaning chamber to be separated from the object to be cleaned.

The first bearing structure includes: a plurality of first bearing rods, the plurality of first bearing rods are arranged at intervals, the first bearing rods are used to bear the object to be cleaned, the first bearing rods are movable, and during the movement of the first bearing rods, the first bearing rods are separated from or bear the object to be cleaned.

Wherein, the driving mechanism includes: a first driving mechanism, each of which is used to drive a first bearing rod to move.

Wherein, the first driving mechanism includes a first cam, and during the rotation of the first cam, the first cam drives the first bearing rod to move.

The first driving mechanism further includes: a first gear, the first cam is provided with the first gear, and the first gear drives the first cam to rotate during the rotation process.

The second bearing structure includes: a plurality of second bearing rods, the plurality of second bearing rods are arranged at intervals, the second bearing rods are used to bear the items to be cleaned, and the second bearing rods are movable; the driving mechanism also includes: a second driving mechanism and a third gear, the second driving mechanism includes a second cam and a second gear, the second cam is provided with the second gear; the first gear and the second gear are both engaged with the third gear, and the third gear can drive the first gear and the second gear to move. The gear rotates, and the second gear rotates to drive the second cam to rotate, and the second cam rotates to drive the second bearing rod to move; When the first cam drives the first bearing rod to move away from the object to be cleaned, the second cam drives the second bearing rod to move to carry the object to be cleaned; When the first cam drives the first bearing rod to move to carry the object to be cleaned, the second cam drives the second bearing rod to move away from the object to be cleaned.

Among them, the first supporting rod and the second supporting rod are arranged in parallel with each other; and/or the driving mechanism further includes: a fourth gear and a driving motor, the fourth gear is engaged with the third gear, the driving motor is used to drive the fourth gear to rotate, and the rotation of the fourth gear drives the third gear to rotate; and/or the spacing distance between the first supporting rod and the bottom of the cleaning chamber is greater than the spacing distance between the second supporting rod and the bottom of the cleaning chamber; and/or the spacing distance between each of the first supporting rods and the bottom of the cleaning chamber is equal, and the spacing distance between each of the second supporting rods and the bottom of the cleaning chamber is equal.

The first bearing structure is the same as the second bearing structure; the driving mechanism includes: a second driving mechanism, the first driving mechanism is the same as the second driving mechanism, and the second driving mechanism is used to drive the second bearing structure.

Wherein, the first supporting structure has the same structure as the second supporting structure.

In the cleaning device of the embodiment of the present invention, the first supporting structure is used to support the object to be cleaned, the second supporting structure is used to support the object to be cleaned, and the driving mechanism is used to drive the second supporting structure to move to support the object to be cleaned when the first supporting structure is driven to move away from the object to be cleaned; the driving mechanism is used to drive the second supporting structure to move to away from the object to be cleaned when the first supporting structure is driven to move to support the object to be cleaned. The part to be cleaned can be a silicon wafer. When cleaning the silicon wafer in the tank, the first supporting structure and the second supporting structure can alternately support the part to be cleaned, so that the contact part between the supporting structure and the silicon wafer can be better cleaned, and the edge of the silicon wafer can be completely cleaned, avoiding the problem that the contact part between the supporting structure and the silicon wafer cannot be completely cleaned, thereby improving the cleaning effect of the silicon wafer.

10: Cleaning tank

11: Cleaning cavity

20: Parts to be cleaned

A: Driving mechanism

30: Third gear

3: The first bearing structure

31: First load bearing rod

32: First cam

40: Fourth gear

4: Second bearing structure

41: Second bearing rod

42: Second cam

Figure 1 is a schematic diagram of the first supporting rod in the cleaning device being separated from the object to be cleaned; Figure 2 is a schematic diagram of the second supporting rod in the cleaning device being separated from the object to be cleaned; Figure 3 is a side view of the cleaning device; Figure 4 is a top view of the cleaning device; Figure 5 is a schematic diagram of the cam and the supporting rod in the cleaning device.

The following will combine the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making progressive labor are within the scope of protection of the present invention.

The terms "first", "second", etc. in the specification and patent application of the present invention are used to distinguish similar objects, rather than to describe a specific order or precedence. It should be understood that the data used in this way can be interchanged where appropriate so that the embodiments of the present invention can be implemented in an order other than those illustrated or described herein. In addition, "and/or" in the specification and patent application indicates at least one of the connected objects, and the character "/" generally indicates that the objects connected before and after are in an "or" relationship.

The cleaning device provided by the embodiment of the present invention is described in detail below with reference to Figures 1 to 5 through specific embodiments and their application scenarios.

As shown in Figures 1 to 5, the cleaning device of the embodiment of the present invention includes: a cleaning tank 10, a first supporting structure 3, a second supporting structure 4 and a driving mechanism A, wherein the cleaning tank 10 has a cleaning chamber 11, in which a cleaning liquid can be placed. The first supporting structure 3 can be used to support the object to be cleaned, which can be a silicon wafer, and the first supporting structure 3 can be moved, and the first supporting structure 3 can move along the height direction of the cleaning chamber 11. The second supporting structure 4 can be used to support the object to be cleaned, and the second supporting structure 4 can be moved, and the second supporting structure 4 can move along the height direction of the cleaning chamber 11. The first supporting structure 3 can be a supporting plate or a supporting column, and the second supporting structure 4 can be a supporting plate or a supporting column. The supporting structure can be selected according to the specific object to be cleaned.

The driving mechanism A is used to drive the second supporting structure 4 to move to carry the article to be cleaned 20 when driving the first supporting structure 3 to move to be separated from the article to be cleaned 20. The second supporting structure 4 carries the article to be cleaned 20, so that the first supporting structure 3 is separated from the article to be cleaned 20, so that the area where the first supporting structure 3 and the article to be cleaned 20 are originally in contact can be cleaned, and the contact part between the article to be cleaned 20 and the supporting structure can be better cleaned. The driving mechanism A is used to drive the second supporting structure 4 to move away from the object to be cleaned 20 when the first supporting structure 3 is driven to move to carry the object to be cleaned 20. The first supporting structure 3 carries the object to be cleaned 20, and the second supporting structure 4 is separated from the object to be cleaned 20, so that the area where the second supporting structure 4 and the object to be cleaned 20 originally contact can be cleaned, and the contact part between the object to be cleaned 20 and the supporting structure can be better cleaned. In the process of the object to be cleaned 20 and the supporting structure being separated, the movement of the supporting structure can disturb the local cleaning liquid, so as to achieve a better cleaning effect. During the process of separating the part 20 to be cleaned from the supporting structure, when cleaning the part 20 to be cleaned, the contaminants brought down from the part 20 to be cleaned on the supporting structure can be cleaned, and the contact parts of the supporting structure with the part 20 to be cleaned can also be better cleaned to prevent the part 20 to be cleaned from being contaminated when the part 20 to be cleaned is carried again.

In the cleaning device of the embodiment of the present invention, the items to be cleaned are carried by the first supporting structure 3, and the items to be cleaned are carried by the second supporting structure 4. The driving mechanism A drives the second supporting structure 4 to move to carry the items to be cleaned when driving the first supporting structure 3 to move to be separated from the items to be cleaned; the driving mechanism A is used to drive the second supporting structure 4 to move to be separated from the items to be cleaned when driving the first supporting structure 3 to move to carry the items to be cleaned. The object to be cleaned can be a silicon wafer. When cleaning the silicon wafer in the tank, the first supporting structure 3 and the second supporting structure 4 can alternately support the object to be cleaned, so that the contact part between the supporting structure and the silicon wafer can be better cleaned, so that the edge of the silicon wafer can be completely cleaned, avoiding the problem that the contact position between the supporting structure and the silicon wafer cannot be completely cleaned, and improving the cleaning effect of the silicon wafer.

In some embodiments, the driving mechanism A includes: a first driving mechanism and a second driving mechanism, the first driving mechanism drives the first supporting structure 3 to move along the height direction of the cleaning chamber 11 to separate from the object to be cleaned 20, and the second driving mechanism drives the second supporting structure 4 to move along the height direction of the cleaning chamber 11 to carry the object to be cleaned 20; for example, the first driving mechanism drives the first supporting structure 3 to move downward along the height direction of the cleaning chamber 11 to separate from the object to be cleaned 20, and the second driving mechanism drives the second supporting structure 4 to move upward along the height direction of the cleaning chamber 11 to carry the object to be cleaned 20.

When the first driving mechanism drives the first supporting structure 3 to move along the height direction of the cleaning chamber 11 to carry the object to be cleaned 20, the second driving mechanism drives the second supporting structure 4 to move along the height direction of the cleaning chamber 11 to separate from the object to be cleaned 20. For example, when the first driving mechanism drives the first supporting structure 3 to move upward along the height direction of the cleaning chamber 11 to carry the object to be cleaned 20, the second driving mechanism drives the second supporting structure 4 to move downward along the height direction of the cleaning chamber 11 to separate from the object to be cleaned 20. By moving the supporting structure along the height direction of the cleaning chamber 11, the supporting structure can carry or detach the object to be cleaned 20, and the first supporting structure 3 and the second supporting structure 4 can alternately carry the object to be cleaned, so that the contact part between the supporting structure and the object to be cleaned can be better cleaned, thereby improving the cleaning effect.

In other embodiments, as shown in Figures 1 to 5, the first supporting structure 3 includes: a plurality of first supporting rods 31, for example, the number of the first supporting rods 31 can be two, and the plurality of first supporting rods 31 are arranged at intervals, and the first supporting rods 31 are used to support the parts to be cleaned 20, for example, the supporting is achieved by the plurality of first supporting rods 31 being stopped at the periphery of the parts to be cleaned 20. The first bearing rod 31 can move. During the movement of the first bearing rod 31, the first bearing rod 31 is separated from or carries the part to be cleaned 20. The first bearing rod 31 can be separated from or carries the part to be cleaned 20 as needed, so that when the first bearing rod 31 is separated from the part to be cleaned 20, the contact part between the first bearing rod 31 and the part to be cleaned 20 can be better cleaned, avoiding the problem that the contact position between the first bearing rod 31 and the part to be cleaned 20 cannot be completely cleaned. The first bearing rod 31 can be a plastic part or a metal part, for example, the first bearing rod 31 can be a polyetheretherketone (PEEK) material part, and the specific material can be selected according to actual conditions.

In some embodiments, the first supporting rod 31 is used to support the object to be cleaned 20. The first supporting rod 31 has a first supporting groove, and the object to be cleaned 20 can be supported through the first supporting groove, so as to stably support the object to be cleaned 20 and prevent it from slipping or falling off. The inner wall of the first supporting groove can be provided with an elastic layer, which has a buffering effect, reduces the hard collision between the first supporting groove and the object to be cleaned 20, and avoids damaging the object to be cleaned 20. Hollow holes can be provided on the side walls of the first supporting groove, and the cleaning liquid can flow through the hollow holes, so as to facilitate cleaning the inner wall of the first supporting groove.

Optionally, the driving mechanism A includes: a first driving mechanism, each first driving mechanism is used to drive a first supporting rod 31 to move, for example, the first driving mechanism can drive the first supporting rod 31 to move along the height direction of the cleaning chamber. The first driving mechanism can include a driving cam, a driving motor, a driving cylinder or an electro-deformable member and other mechanisms with a driving function, which can be selected according to actual conditions.

Optionally, as shown in FIG5 , the first driving mechanism includes a first cam 32. During the rotation of the first cam 32, the first cam 32 drives the first supporting rod 31 to move. The outer peripheral wall of the first cam 32 can stop the outer side wall of the first supporting rod 31. During the rotation of the first cam 32, since the radial dimensions of the first cam 32 are not completely the same, the first supporting rod 31 can be driven to move by the first cam 32. For example, the first supporting rod 31 can be driven to move along the height direction of the cleaning chamber by the first cam 32.

In some embodiments, a first guide groove may be provided on the outer periphery of the first cam 32, and the first bearing rod 31 may be provided in the first guide groove. During the rotation of the first cam 32, the first cam 32 is stably in contact with the first bearing rod 31 to prevent the first bearing rod 31 from detaching from the first cam 32. An elastic layer may be provided on the inner side wall of the first guide groove to have a buffering effect and reduce the vibration of the first bearing rod 31 during the rotation of the first cam 32.

Optionally, the first driving mechanism further includes: a first gear, the first cam is provided with a first gear, and the first gear drives the first cam 32 to rotate during the rotation of the first gear. The first cam 32 is driven to rotate by the rotation of the first gear, so that the first cam 32 can rotate stably.

In some embodiments, as shown in FIGS. 1 to 5 , the second supporting structure 4 includes: a plurality of second supporting rods 41, for example, the number of the second supporting rods 41 can be two. The plurality of second supporting rods 41 are arranged at intervals, and the second supporting rods 41 are used to support the parts to be cleaned 20, for example, the support is achieved by the plurality of second supporting rods 41 abutting against the periphery of the parts to be cleaned 20. The second supporting rod 41 is movable. During the movement of the second supporting rod 41, the second supporting rod 41 is separated from or carries the object to be cleaned 20. The second supporting rod 41 can be separated from or carries the object to be cleaned 20 as needed, so that when the second supporting rod 41 is separated from the object to be cleaned 20, the contact part between the second supporting rod 41 and the object to be cleaned 20 can be better cleaned, avoiding the problem that the contact position between the second supporting rod 41 and the object to be cleaned 20 cannot be completely cleaned. The second supporting rod 41 can be a plastic part or a metal part, for example, the second supporting rod 41 can be a polyetheretherketone material part, and the specific material can be selected according to actual conditions. The shapes and materials of the first supporting rod 31 and the second supporting rod 41 can be the same or different, depending on the actual choice.

As shown in FIG5 , the driving mechanism A further includes: a second driving mechanism and a third gear 30. The second driving mechanism includes a second cam 42 and a second gear. The second cam 42 is provided with a second gear. The first gear and the second gear are both engaged with the third gear 30. The third gear 30 can drive the first gear and the second gear to rotate. The second gear rotates and drives the second cam 42 to rotate. The second cam 42 rotates and drives the second bearing rod 41 to move.

When the first cam 32 drives the first supporting rod 31 to move away from the object to be cleaned 20, the second cam 42 drives the second supporting rod 41 to move to carry the object to be cleaned 20; when the first cam 32 drives the first supporting rod 31 to move to carry the object to be cleaned 20, the second cam 42 drives the second supporting rod 41 to move away from the object to be cleaned 20. For example, as shown in FIG1 , the first cam 32 drives the first supporting rod 31 to move downward along the height direction of the cleaning chamber until it is separated from the object to be cleaned 20, and the second cam 42 drives the second supporting rod 41 to move upward along the height direction of the cleaning chamber until it carries the object to be cleaned 20; as shown in FIG2 , the first cam 32 drives the first supporting rod 31 to move upward along the height direction of the cleaning chamber until it carries the object to be cleaned 20, and the second cam 42 drives the second supporting rod 41 to move downward along the height direction of the cleaning chamber until it is separated from the object to be cleaned 20. By moving the supporting structure along the height direction of the cleaning chamber 11, the supporting rod can carry or detach the object to be cleaned 20, and the first supporting rod 31 and the second supporting rod 41 can alternately carry the object to be cleaned, so that the contact part between the supporting structure and the object to be cleaned can be better cleaned, thereby improving the cleaning effect.

The shapes of the first cam 32 and the second cam 42 can be the same or different. For example, as shown in FIG5 , the cross-sections of the first cam 32 and the second cam 42 can both be elliptical, and the major axis angle of the cross-sectional ellipse of the first cam 32 and the second cam 42 can be 90 degrees, so that during the rotation of the first cam 32 and the second cam 42, the cam can drive the carrying rod to alternately carry the parts to be cleaned.

In an embodiment of the present invention, the first supporting rod 31 and the second supporting rod 41 can be arranged in parallel at intervals, and the first supporting rod 31 and the second supporting rod 41 can be arranged in parallel at intervals in the height direction of the cleaning chamber, so as to carry the object to be cleaned 20.

Optionally, the driving mechanism A further includes: a fourth gear 40 and a driving motor, the fourth gear 40 is engaged with the third gear 30, the driving shaft of the driving motor is connected to the fourth gear 40, the driving motor is used to drive the fourth gear 40 to rotate, the fourth gear 40 rotates to drive the third gear 30 to rotate, and the first gear can be driven by the third gear 30. The first gear rotates with the second gear, the first cam 32 rotates, the first cam 32 rotates and the first bearing rod 31 moves during the rotation, the second gear rotates and the second cam 42 rotates, the second cam 42 rotates and the second bearing rod 41 moves during the rotation, so that the bearing rod can carry or detach the object to be cleaned 20.

Optionally, the spacing distance between the first supporting rod 31 and the bottom of the cleaning chamber 11 is greater than the spacing distance between the second supporting rod 41 and the bottom of the cleaning chamber 11. The spacing distance is the vertical distance between the supporting rod and the bottom of the cleaning chamber 11. The first supporting rod 31 is located above the second supporting rod 41, so that the supporting rod can carry or detach from the object 20 to be cleaned. When the supporting rod is arranged parallel to the bottom of the cleaning chamber 11, the spacing distances between different positions on the supporting rod and the bottom of the cleaning chamber 11 are equal; when the supporting rod is not arranged parallel to and perpendicular to the bottom of the cleaning chamber 11, the spacing distances between different positions on the supporting rod and the bottom of the cleaning chamber 11 are not equal, and the minimum spacing distance between the first supporting rod 31 and the bottom of the cleaning chamber 11 can be greater than the maximum spacing distance between the second supporting rod 41 and the bottom of the cleaning chamber 11, and the first supporting rod 31 is located above the second supporting rod 41 as a whole.

Optionally, the spacing distance between each first supporting rod 31 and the bottom of the cleaning chamber 11 is equal, and the spacing distance between each second supporting rod 41 and the bottom of the cleaning chamber 11 is equal, and the spacing distance is the vertical distance between the supporting rod and the bottom of the cleaning chamber 11. The number of first supporting rods 31 can be two, and the number of second supporting rods 41 can be two. The height positions of the two first supporting rods 31 are the same, and the height positions of the two second supporting rods 41 are the same. The spacing distance between the two first supporting rods 31 in the left-right direction is greater than the spacing distance between the two second supporting rods 41 in the left-right direction. The silicon wafer is round, which is convenient for carrying or detaching the silicon wafer.

In some embodiments, the first supporting structure 3 and the second supporting structure 4 have the same structure; the driving mechanism A may include: a second driving mechanism, the first driving mechanism and the second driving mechanism have the same structure, and the second driving mechanism is used to drive the second supporting structure 4. Driving the second supporting structure 4 by the second driving mechanism can have the same effect as driving the first supporting structure 3 by the first driving mechanism.

Optionally, the first supporting structure 3 is the same as the second supporting structure 4. As shown in Figures 1 to 5, the second supporting structure 4 includes: a plurality of second supporting rods 41, the second supporting rods 41 are arranged at intervals, the second supporting rods 41 are used to carry the parts to be cleaned 20, and the second supporting rods 41 are movable. During the movement of the second supporting rods 41, the second supporting rods 41 can be separated from or carry the parts to be cleaned 20. The second supporting rods 41 can be separated from or carry the parts to be cleaned 20 as needed, so that when the second supporting rods 41 are separated from the parts to be cleaned 20, the contact parts between the second supporting rods 41 and the parts to be cleaned 20 can be better cleaned, avoiding the problem that the contact parts between the second supporting rods 41 and the parts to be cleaned 20 cannot be completely cleaned.

In some embodiments, the second supporting rod 41 is used to support the object to be cleaned 20. The second supporting rod 41 has a second supporting groove, and the object to be cleaned 20 can be supported through the second supporting groove, so as to stably support the object to be cleaned 20 and prevent it from slipping or falling off. The inner wall of the second supporting groove can be provided with an elastic layer, which has a buffering effect, reduces the hard collision between the second supporting groove and the object to be cleaned 20, and avoids damaging the object to be cleaned 20. Hollow holes can be provided on the side walls of the second supporting groove, and the cleaning liquid can flow through the hollow holes, so as to facilitate cleaning the inner wall of the second supporting groove.

Optionally, the driving mechanism A includes: a second driving mechanism, which is used to drive the second supporting rod 41 to move. For example, the second driving mechanism can drive the second supporting rod 41 to move along the height direction of the cleaning chamber. The second driving mechanism can include a driving cam, a driving motor, a driving cylinder or an electro-deformable member and other mechanisms with a driving function, which can be selected according to actual conditions.

Optionally, the first driving mechanism has the same structure as the second driving mechanism. As shown in FIG5 , the second driving mechanism includes a second cam 42. During the rotation of the second cam 42, the second cam 42 drives the second supporting rod 41 to move. The outer peripheral wall of the second cam 42 can stop the outer side wall of the second supporting rod 41. During the rotation of the second cam 42, since the radial dimensions of the second cam 42 are not exactly the same, the second supporting rod 41 can be driven to move by the second cam 42. For example, the second supporting rod 41 can be driven to move along the height direction of the cleaning chamber by the second cam 42.

Optionally, a second guide groove may be provided on the outer periphery of the second cam 42, and the second bearing rod 41 may be provided in the second guide groove. During the rotation of the second cam 42, the second cam 42 is stably in contact with the second bearing rod 41 to prevent the second bearing rod 41 from detaching from the second cam 42. An elastic layer may be provided on the inner side wall of the second guide groove to have a buffering effect and reduce the vibration of the second bearing rod 41 during the rotation of the second cam 42.

In the embodiment of the present invention, the second driving mechanism further includes: a second gear, and the second cam is provided with a second gear, and the second gear drives the second cam 42 to rotate during the rotation process. By driving the second cam 42 to rotate by the rotation of the second gear, the second cam 42 can be rotated stably.

The embodiments of the present invention are described above in conjunction with the attached drawings, but the present invention is not limited to the above specific implementations, which are only illustrative and not restrictive. Under the inspiration of the present invention, ordinary technicians in this field can make many forms without departing from the purpose of the present invention and the scope of protection of the patent application, all of which are within the protection of the present invention.

10: Cleaning tank

11: Cleaning cavity

20: Parts to be cleaned

3: The first bearing structure

31: First load bearing rod

4: Second bearing structure

41: Second bearing rod

Claims (10)

A cleaning device comprises: A cleaning tank having a cleaning cavity; A first supporting structure, the first supporting structure is used to support the object to be cleaned, and the first supporting structure is movable; A second supporting structure, the second supporting structure is used to support the object to be cleaned, and the second supporting structure is movable; A driving mechanism, the driving mechanism is used to drive the second supporting structure to move to support the object to be cleaned when the first supporting structure is driven to move away from the object to be cleaned; The driving mechanism is used to drive the second supporting structure to move away from the object to be cleaned when the first supporting structure is driven to move to support the object to be cleaned. The cleaning device as claimed in claim 1, wherein the driving mechanism comprises: A first driving mechanism and a second driving mechanism, wherein the first driving mechanism drives the first supporting structure to move downward along the height direction of the cleaning chamber to be separated from the object to be cleaned, and the second driving mechanism drives the second supporting structure to move upward along the height direction of the cleaning chamber to carry the object to be cleaned; When the first driving mechanism drives the first supporting structure to move upward along the height direction of the cleaning chamber to carry the object to be cleaned, the second driving mechanism drives the second supporting structure to move downward along the height direction of the cleaning chamber to be separated from the object to be cleaned. The cleaning device as described in claim 1, wherein the first supporting structure comprises: A plurality of first supporting rods, the plurality of first supporting rods are arranged at intervals, the first supporting rods are used to support the object to be cleaned, the first supporting rods are movable, and during the movement of the first supporting rods, the first supporting rods are separated from or support the object to be cleaned. A cleaning device as described in claim 3, wherein the driving mechanism comprises: A first driving mechanism, each of which is used to drive one of the first supporting rods to move. A cleaning device as described in claim 4, wherein the first driving mechanism includes a first cam, and during the rotation of the first cam, the first cam drives the first supporting rod to move. The cleaning device as described in claim 5, wherein the first driving mechanism further comprises: A first gear, the first cam is provided with the first gear, and the first gear drives the first cam to rotate during the rotation process. The cleaning device as described in claim 6, wherein the second bearing structure comprises: a plurality of second bearing rods, the plurality of second bearing rods are arranged at intervals, the second bearing rods are used to bear the object to be cleaned, and the second bearing rods are movable; The driving mechanism further comprises: a second driving mechanism and a third gear, the second driving mechanism comprises a second cam and a second gear, the second cam is provided with the second gear; The first gear and the second gear are both engaged with the third gear, the third gear can drive the first gear and the second gear to rotate, the second gear drives the second cam to rotate during the rotation process, and the second cam drives the second bearing rod to move during the rotation process; When the first cam drives the first supporting rod to move away from the object to be cleaned, the second cam drives the second supporting rod to move to carry the object to be cleaned; When the first cam drives the first supporting rod to move to carry the object to be cleaned, the second cam drives the second supporting rod to move away from the object to be cleaned. The cleaning device as described in claim 7, wherein the first supporting rod and the second supporting rod are arranged in parallel with each other; and/or the driving mechanism further comprises: a fourth gear and a driving motor, the fourth gear is engaged with the third gear, the driving motor is used to drive the fourth gear to rotate, and the rotation of the fourth gear drives the third gear to rotate; and/or the spacing distance between the first supporting rod and the bottom of the cleaning chamber is greater than the spacing distance between the second supporting rod and the bottom of the cleaning chamber; and/or the spacing distance between each first supporting rod and the bottom of the cleaning chamber is equal, and the spacing distance between each second supporting rod and the bottom of the cleaning chamber is equal. A cleaning device as described in any one of claims 4 to 6, wherein the first supporting structure has the same structure as the second supporting structure; The driving mechanism includes: a second driving mechanism, the first driving mechanism has the same structure as the second driving mechanism, and the second driving mechanism is used to drive the second supporting structure. A cleaning device as described in claim 3, wherein the structure of the first supporting structure is the same as that of the second supporting structure.

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