TWI829388B - Cassette for carrying plates - Google Patents
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- TWI829388B TWI829388B TW111138521A TW111138521A TWI829388B TW I829388 B TWI829388 B TW I829388B TW 111138521 A TW111138521 A TW 111138521A TW 111138521 A TW111138521 A TW 111138521A TW I829388 B TWI829388 B TW I829388B
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- positioning groove
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- 230000000903 blocking effect Effects 0.000 claims abstract description 30
- 230000004308 accommodation Effects 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
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- Packaging Frangible Articles (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Abstract
Description
本發明涉及一種用於承載板件的卡匣,尤指一種能用以承載板件,以方便自動化搬送板件的卡匣。The present invention relates to a cassette for carrying panels, and in particular, to a cassette that can be used to carry panels to facilitate automatic transportation of panels.
銅箔基板(板件)的製程較為繁複,因此會利用自動化搬送,製程間搬送時所使用的載具稱之為卡匣,卡匣能利用牙叉(fork)承托搬運,由於卡匣的底部並無設置定位結構,因此必須另外設置複雜的夾持機構夾持定位卡匣,導致成本的增加。The manufacturing process of copper foil substrates (boards) is relatively complicated, so automated transportation is used. The carrier used for transportation between processes is called a cassette. The cassette can be supported and transported using a fork. Due to the There is no positioning structure at the bottom, so a complex clamping mechanism must be installed to hold the positioning cassette, which increases the cost.
本發明所要解決的技術問題在於,針對現有技術的不足提供一種用於承載板件的卡匣,可提供導引及定位功能,使卡匣能定位及精準的設置於承載件上,且結構簡單,可降低成本。The technical problem to be solved by the present invention is to provide a cassette for carrying plate parts in view of the shortcomings of the existing technology, which can provide guidance and positioning functions, so that the cassette can be positioned and accurately placed on the bearing part, and has a simple structure , which can reduce costs.
為了解決上述的技術問題,本發明提供一種用於承載板件的卡匣,包括:兩立板,該兩立板間隔的設置,該兩立板相向的一側各設有多個容置槽,該兩立板相向的一側分別設有多個肋條,每上下相鄰的兩所述肋條之間各形成一所述容置槽,該些容置槽能用以容納板件;一頂板,該頂板設置於該兩立板的上端之間;以及一底板,該底板設置於該兩立板的下端之間,該兩立板、該頂板及該底板圍繞組成一卡匣本體,該卡匣本體的兩端各形成一開口;其中該底板的底面設有一定位槽組,該定位槽組包含一第一定位槽、一第二定位槽及一第三定位槽,定義該底板的中間具有一中間線,該第一定位槽位於該中間線上,該第一定位槽沿著該中間線延伸預定長度,該第二定位槽及該第三定位槽分別設置於該中間線的兩側間隔處,該第二定位槽及該中間線的間距係與該第三定位槽及該中間線的間距相等,且該第二定位槽及該第三定位槽沿著該中間線的傾斜方向延伸預定長度。In order to solve the above technical problems, the present invention provides a cassette for carrying plates, which includes: two vertical plates, the two vertical plates are arranged at intervals, and a plurality of accommodation slots are provided on the opposite sides of the two vertical plates. , the opposite sides of the two vertical boards are respectively provided with a plurality of ribs, and a receiving groove is formed between each two upper and lower adjacent ribs, and these receiving grooves can be used to accommodate plate components; a top plate , the top plate is disposed between the upper ends of the two vertical plates; and a bottom plate is disposed between the lower ends of the two vertical plates. The two vertical plates, the top plate and the bottom plate surround to form a cassette body, and the cassette Each end of the box body forms an opening; the bottom surface of the bottom plate is provided with a positioning groove group, which includes a first positioning groove, a second positioning groove and a third positioning groove, defining a middle position of the bottom plate. A middle line, the first positioning groove is located on the middle line, the first positioning groove extends along the middle line for a predetermined length, the second positioning groove and the third positioning groove are respectively provided at intervals on both sides of the middle line , the distance between the second positioning groove and the middle line is equal to the distance between the third positioning groove and the middle line, and the second positioning groove and the third positioning groove extend for a predetermined length along the inclined direction of the middle line .
本發明的有益效果在於,本發明所提供的用於承載板件的卡匣,包括兩立板、一頂板及一底板,兩立板相向的一側各設有多個容置槽及多個肋條,每上下相鄰的兩肋條之間各形成一容置槽,該些容置槽能用以容納板件(如銅箔基板)。底板的底面設有一定位槽組,定位槽組包含一第一定位槽、一第二定位槽及一第三定位槽,定義底板的中間具有一中間線,第一定位槽位於中間線上,第一定位槽沿著中間線延伸預定長度,第二定位槽及第三定位槽分別設置於中間線的兩側間隔處,第二定位槽及中間線的間距係與第三定位槽及中間線的間距相等,且第二定位槽及第三定位槽沿著中間線的傾斜方向延伸預定長度。第一定位槽、第二定位槽及第三定位槽能與承載件(fork)上的多個定位體配合,用以提供導引及定位功能,使卡匣能定位及精準的設置於承載件上,且結構簡單,可降低成本。The beneficial effect of the present invention is that the cassette for carrying boards provided by the present invention includes two vertical plates, a top plate and a bottom plate. Each side of the two vertical plates facing each other is provided with a plurality of receiving slots and a plurality of The ribs form an accommodating groove between each upper and lower adjacent ribs, and these accommodating grooves can be used to accommodate boards (such as copper foil substrates). The bottom surface of the base plate is provided with a positioning groove group. The positioning groove group includes a first positioning groove, a second positioning groove and a third positioning groove. It is defined that there is a middle line in the middle of the base plate. The first positioning groove is located on the middle line, and the first positioning groove is located on the middle line. The positioning groove extends along the middle line for a predetermined length. The second positioning groove and the third positioning groove are respectively arranged at intervals on both sides of the middle line. The distance between the second positioning groove and the middle line is the distance between the third positioning groove and the middle line. are equal, and the second positioning groove and the third positioning groove extend a predetermined length along the inclined direction of the center line. The first positioning groove, the second positioning groove and the third positioning groove can cooperate with multiple positioning bodies on the carrier (fork) to provide guidance and positioning functions, so that the cassette can be positioned and accurately set on the carrier. It has a simple structure and can reduce costs.
為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and illustration and are not used to limit the present invention.
以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following is a description of the relevant implementation modes disclosed in the present invention through specific specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention. In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.
[實施例][Example]
請參閱圖1至圖4,本發明提供一種用於承載板件的卡匣,包括兩立板1、一頂板2及一底板3,立板1、頂板2及底板3呈方形板體,兩立板1間隔的設置,兩立板1分別設置於左側及右側,兩立板1相向的一側各設有多個容置槽11,亦即可於兩立板1相向的一側分別設有多個肋條12,於每上下相鄰的兩肋條12之間各形成一容置槽11,該些容置槽11能用以容納板件,板件的兩側以無效區接觸肋條12,肋條12不會接觸板件的有效區。該頂板2設置於兩立板1的上端之間,該底板3設置於兩立板1的下端之間,該兩立板1、頂板2及底板3圍繞組成一卡匣本體A,該卡匣本體A呈方形殼體,該卡匣本體A的兩端各形成一開口13,以便於取放板件。兩開口13分別位於卡匣的兩端(前端及後端),兩開口13與卡匣內部相連通,因此可通過任一開口13取放板件,使卡匣的兩端皆可取放料。Please refer to Figures 1 to 4. The present invention provides a cassette for carrying panels, which includes two
在本實施例中,每一肋條12的一端(或二端)靠近開口13處的兩面(頂面及底面)各形成有一第一斜面14(如圖5所示),兩相鄰的肋條12相互靠近的兩第一斜面14朝向開口13形成擴張狀,可具有導引板件置入的功能。在本實施例中,每一立板1的一側靠近開口13處鄰接容置槽11的位置各形成有一第二斜面15,位於同一水平高度的兩第二斜面15朝向開口13形成擴張狀,可提供板件置入時導引及導正的功能,較佳的,該些第二斜面15朝向遠離開口13的方向遞減高度,使第二斜面15形成尖頭狀(如圖5所示),可具有較佳的導引及導正功能。板件在通過開口13置入容置槽11中時,板件的兩側可利用第一斜面14及第二斜面15的導引順利的插入,且能減少板件的摩擦,不易產生磨屑,以具有較佳的潔淨度。In this embodiment, one end (or two ends) of each
較佳的,兩立板1上可各設有多個開槽16,該些開槽16貫穿立板1的兩側,該些開槽16可設於肋條12上,使該些開槽16可與該些容置槽11形成錯開狀態,該些開槽16可呈長條狀,並沿著肋條12的長度方向設置。該些開槽16可使卡匣的兩側形成鏤空狀,用以節省材料及減輕重量。Preferably, the two
該頂板2上可設有至少一觀測孔21(如圖1所示),以便於觀測或偵測板件,該觀測孔21上亦可設置透明防塵片22,以提供防塵功能。該頂板2上亦可設有無線射頻(RFID)標籤或條碼等辨識單元23,以便於辨識。The
兩立板1上靠近開口13的一端可各設置一第一手把17,頂板2上可設置至少一第二手把24,以便於提起搬運,兩第一手把17可方便由前方提起卡匣,第二手把24可方便由上方提起卡匣。頂板2上的第二手把24可設置兩個,兩第二手把24樞設於頂板2上,使得兩第二手把24可折疊,而能減少佔用的空間。兩第二手把24上可分別設置有磁吸元件25(如圖1所示),兩磁吸元件25可為相互磁吸的磁石、鐵件等。兩第二手把24折疊時,可利用兩磁吸元件25磁吸固定,使兩第二手把24能穩固的定位。A
該底板3的底面設有一定位槽組31(如圖2及圖4所示),該定位槽組31(KC pin)能與承載件(fork)20上的多個定位體201、202、203(如圖10所示)配合,用以提供導引及定位功能。該定位槽組31包含一第一定位槽311、一第二定位槽312及一第三定位槽313,定義該底板3的中間具有一中間線L(如圖4所示),該中間線L位於該底板3的兩側(左側及右側)之間,該中間線L可與底板3的兩側等距,該第一定位槽311位於中間線L上,該第一定位槽311沿著中間線L延伸預定長度。該第二定位槽312及第三定位槽313分別設置於中間線L的兩側間隔處,第二定位槽312及中間線L2的間距係與第三定位槽313及中間線L2的間距相等,且第二定位槽312及第三定位槽313沿著中間線L的傾斜方向延伸預定長度。該第二定位槽312靠近底板3的一側與中間線L的中間位置,該第三定位槽313靠近底板3的另一側與中間線L的中間位置。較佳的,該第一定位槽311與其中一開口13的間距小於第二定位槽312、第三定位槽313與另一開口13的間距,使定位槽組31較靠近卡匣的後端,且第一定位槽311、第二定位槽312及第三定位槽313位於最佳位置,而能穩定的承托該卡匣。The bottom surface of the
較佳的,該第一定位槽311、第二定位槽312及第三定位槽313的結構相同,如圖6及圖7所示,該第一定位槽311為長形凹槽,亦即該第一定位槽311在縱向的長度大於橫向的長度,可具有較佳的適用性。該第一定位槽311的斷面寬度形成向上漸縮,而使第一定位槽311形成錐孔,從而具有較佳的導引及導正功能。該第二定位槽312及第三定位槽313與第一定位槽311的結構相同,該第二定位槽312及第三定位槽313亦為長形凹槽,且斷面寬度形成向上漸縮,而形成錐孔,從而具有較佳的導引及導正功能。較佳的,該第一定位槽311、第二定位槽312及第三定位槽313的兩端皆呈圓弧形,亦具有導引及導正功能。Preferably, the
該頂板2及底板3上可分別設有至少一上缺口26及至少一下缺口32(如圖3所示),該上缺口26及下缺口32靠近開口13,該上缺口26及下缺口32可呈方形或其他形狀,該上缺口26貫穿頂板2的兩面,該下缺口32貫穿底板3的兩面,上缺口26及下缺口32上下相對應,該上缺口26及下缺口32可供配合有軌制導車輛(Rail Guided Vehicle)10的擋片101(如圖8所示),該擋片101可配合於上缺口26及下缺口32中,使該擋片101可伸入開口13處,用以限位板件,該上缺口26及下缺口32亦可供拍板定位機構(圖略)伸入,以提供拍板定位功能。The
兩開口13處可各安裝至少一擋桿4,擋桿4的兩端可採用固定或活動方式設置於頂板2及底板3上,較佳的,每一開口13處各設置兩擋桿4,而能提供較佳的擋止功能。在本實施例中,擋桿4的兩端採用活動方式設置於頂板2及底板3上,以便利於擋桿4的拆裝,使擋桿4選擇性地設置於開口13處。在本實施例中,該擋桿4可具有一擋桿本體41(如圖9所示),擋桿本體41的上端及下端分別插置於頂板2的一上插孔27及底板3的一下插孔33中。該擋桿本體41靠近下端處套設一彈性元件42,該彈性元件42位於擋桿本體41及底板3之間,該彈性元件42能向上頂推擋桿本體41,使擋桿本體41的上端彈性插置於頂板2的上插孔27中,若施力下壓擋桿本體41,即可使擋桿本體41的上端脫離頂板2的上插孔27,以便於快速的拆裝擋桿4。該擋桿本體41外亦可套設一套環43,該套環43能利用矽膠等材料製成,該套環43可提供緩衝作用,用以減輕板件與擋桿4之間的碰撞,不易產生磨屑,可具有較佳的潔淨度。At least one blocking
該兩立板1的上端及底板3的底面亦可分別設有第一定位部28及第二定位部34,該第一定位部28及第二定位部34可為相對應的凹凸結構(如凸體及凹孔等),使卡匣上下堆疊時可以定位。The upper ends of the two
[實施例的有益效果][Beneficial effects of the embodiment]
本發明的有益效果在於,本發明所提供的用於承載板件的卡匣,包括兩立板、一頂板及一底板,兩立板相向的一側各設有多個容置槽及多個肋條,每上下相鄰的兩肋條之間各形成一容置槽,該些容置槽能用以容納板件(如銅箔基板)。底板的底面設有一定位槽組,定位槽組包含一第一定位槽、一第二定位槽及一第三定位槽,定義底板的中間具有一中間線,第一定位槽位於中間線上,第一定位槽沿著中間線延伸預定長度,第二定位槽及第三定位槽分別設置於中間線的兩側間隔處,第二定位槽及中間線的間距係與第三定位槽及中間線的間距相等,且第二定位槽及第三定位槽沿著中間線的傾斜方向延伸預定長度。第一定位槽、第二定位槽及第三定位槽能與承載件(fork)上的多個定位體配合,用以提供導引及定位功能,使卡匣能定位及精準的設置於承載件上,且結構簡單,可降低成本。The beneficial effect of the present invention is that the cassette for carrying boards provided by the present invention includes two vertical plates, a top plate and a bottom plate. Each side of the two vertical plates facing each other is provided with a plurality of receiving slots and a plurality of The ribs form an accommodating groove between each upper and lower adjacent ribs, and these accommodating grooves can be used to accommodate boards (such as copper foil substrates). The bottom surface of the base plate is provided with a positioning groove group. The positioning groove group includes a first positioning groove, a second positioning groove and a third positioning groove. It is defined that there is a middle line in the middle of the base plate. The first positioning groove is located on the middle line, and the first positioning groove is located on the middle line. The positioning groove extends a predetermined length along the middle line. The second positioning groove and the third positioning groove are respectively arranged at intervals on both sides of the middle line. The distance between the second positioning groove and the middle line is the distance between the third positioning groove and the middle line. are equal, and the second positioning groove and the third positioning groove extend a predetermined length along the inclined direction of the center line. The first positioning groove, the second positioning groove and the third positioning groove can cooperate with multiple positioning bodies on the carrier (fork) to provide guidance and positioning functions, so that the cassette can be positioned and accurately set on the carrier. It has a simple structure and can reduce costs.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.
1:立板 11:容置槽 12:肋條 13:開口 14:第一斜面 15:第二斜面 16:開槽 17:第一手把 2:頂板 21:觀測孔 22:透明防塵片 23:辨識單元 24:第二手把 25:磁吸元件 26:上缺口 27:上插孔 28:第一定位部 3:底板 31:定位槽組 311:第一定位槽 312:第二定位槽 313:第三定位槽 32:下缺口 33:下插孔 34:第二定位部 4:擋桿 41:擋桿本體 42:彈性元件 43:套環 A:卡匣本體 L:中間線 10:RGV 101:擋片 20:承載件 201:定位體 202:定位體 203:定位體 1: vertical board 11: Accommodation tank 12:ribs 13: Open your mouth 14: First slope 15:Second slope 16: Grooving 17:First hand 2: Top plate 21: Observation hole 22:Transparent dust-proof sheet 23:Identification unit 24:Second handle 25:Magnetic components 26: Upper gap 27: Upper jack 28:First positioning department 3: Bottom plate 31: Positioning slot group 311: First positioning slot 312: Second positioning slot 313:Third positioning slot 32: Lower gap 33:Lower jack 34:Second positioning department 4:Block lever 41:Block lever body 42: Elastic element 43: Collar A: Cassette body L: middle line 10:RGV 101:Block 20: Bearing part 201: Positioning body 202: Positioning body 203: Positioning body
圖1為本發明用於承載板件的卡匣的立體圖。Figure 1 is a perspective view of a cassette for carrying panels according to the present invention.
圖2為本發明用於承載板件的卡匣另一角度的立體圖。FIG. 2 is a perspective view of the cassette for carrying panels according to the present invention from another angle.
圖3為本發明用於承載板件的卡匣又一角度的立體圖。Figure 3 is a perspective view of the cassette for carrying panels according to the present invention from another angle.
圖4為本發明用於承載板件的卡匣的底視圖。Figure 4 is a bottom view of a cassette for carrying panels according to the present invention.
圖5為本發明立板的側視圖。Figure 5 is a side view of the vertical plate of the present invention.
圖6為圖2的Ⅵ-Ⅵ剖視圖。Figure 6 is a cross-sectional view taken along line VI-VI in Figure 2 .
圖7為圖2的Ⅶ-Ⅶ剖視圖。Figure 7 is a cross-sectional view taken along line VII-VII of Figure 2.
圖8為本發明用於承載板件的卡匣與有軌制導車輛(RGV)配合的示意圖。Figure 8 is a schematic diagram of the cooperation between the cassette for carrying panels according to the present invention and the rail-guided vehicle (RGV).
圖9為圖1的Ⅸ-Ⅸ剖視圖。Figure 9 is a cross-sectional view taken along line IX-IX in Figure 1.
圖10為本發明承載件的示意圖。Figure 10 is a schematic diagram of the bearing member of the present invention.
1:立板 1: vertical board
11:容置槽 11: Accommodation tank
12:肋條 12:ribs
13:開口 13: Open your mouth
16:開槽 16: Grooving
17:第一手把 17:First hand
2:頂板 2: Top plate
21:觀測孔 21: Observation hole
22:透明防塵片 22:Transparent dust-proof sheet
3:底板 3: Bottom plate
31:定位槽組 31: Positioning slot group
311:第一定位槽 311: First positioning slot
312:第二定位槽 312: Second positioning slot
313:第三定位槽 313:Third positioning slot
32:下缺口 32: Lower gap
34:第二定位部 34:Second positioning department
4:擋桿 4:Block lever
43:套環 43: Collar
A:卡匣本體 A: Cassette body
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW111138521A TWI829388B (en) | 2022-10-12 | 2022-10-12 | Cassette for carrying plates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW111138521A TWI829388B (en) | 2022-10-12 | 2022-10-12 | Cassette for carrying plates |
Publications (2)
Publication Number | Publication Date |
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TWI829388B true TWI829388B (en) | 2024-01-11 |
TW202415602A TW202415602A (en) | 2024-04-16 |
Family
ID=90458999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW111138521A TWI829388B (en) | 2022-10-12 | 2022-10-12 | Cassette for carrying plates |
Country Status (1)
Country | Link |
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TW (1) | TWI829388B (en) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
TW200417501A (en) * | 2003-03-04 | 2004-09-16 | Shinetsu Polymer Co | Precision substrate storage container |
US20070062889A1 (en) * | 2005-09-19 | 2007-03-22 | Vishay Thin Film, Inc. | Universal cassette |
CN101014509A (en) * | 2004-04-18 | 2007-08-08 | 安堤格里斯公司 | Wafer container door with particulate collecting structure |
US7316325B2 (en) * | 2003-11-07 | 2008-01-08 | Entegris, Inc. | Substrate container |
TWM486999U (en) * | 2014-05-23 | 2014-10-01 | Hocheng Corp | Cabinet handle |
TWM630690U (en) * | 2022-03-14 | 2022-08-11 | 迅得機械股份有限公司 | Cassette with stopping mechanism |
-
2022
- 2022-10-12 TW TW111138521A patent/TWI829388B/en active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
TW200417501A (en) * | 2003-03-04 | 2004-09-16 | Shinetsu Polymer Co | Precision substrate storage container |
US7316325B2 (en) * | 2003-11-07 | 2008-01-08 | Entegris, Inc. | Substrate container |
CN101014509A (en) * | 2004-04-18 | 2007-08-08 | 安堤格里斯公司 | Wafer container door with particulate collecting structure |
US20070062889A1 (en) * | 2005-09-19 | 2007-03-22 | Vishay Thin Film, Inc. | Universal cassette |
TWM486999U (en) * | 2014-05-23 | 2014-10-01 | Hocheng Corp | Cabinet handle |
TWM630690U (en) * | 2022-03-14 | 2022-08-11 | 迅得機械股份有限公司 | Cassette with stopping mechanism |
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Publication number | Publication date |
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TW202415602A (en) | 2024-04-16 |
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