TWI824938B - Ion collection device and method inside tablet cassette - Google Patents

Abstract

The present disclosure provides an ion collection device and method inside a film cassette. The device includes: a collection unit, including a frame body, and a clamping device connected to the frame body for clamping the film cassette and rotating the film cassette around an axis in a first direction. mechanism, and a rotation mechanism connected to the frame body for rotating the frame body around an axis in the second direction; the liquid injection unit includes a liquid injection component and a liquid supply component for supplying a standard solution to the liquid injection component, and the liquid injection unit The assembly includes a liquid injection head and a first moving mechanism for moving the liquid injection head. The liquid injection head can inject solution into the frame body driven by the first moving mechanism; and a liquid collection unit. The liquid collection unit includes a liquid suction component and a liquid suction component for collecting the suction. A liquid collection component for the solution sucked by the liquid component. The liquid suction component includes a liquid suction head and a second moving mechanism for moving the liquid suction head.

Description

Ion collection device and method inside tablet cassette

Related applications

This disclosure claims priority from Chinese Patent Application No. 202211624233.X filed in China on December 16, 2022, the entire content of which is incorporated herein by reference.

The present disclosure relates to the field of semiconductor technology, and in particular, to an ion collection device and method inside a chip cassette.

In the silicon wafer manufacturing process, the cleanliness of the cassette containing the silicon wafers is crucial to the quality of the silicon wafers. Real-time monitoring of the ion concentration in the wafer cassettes is conducive to timely discovery of the impact of ions inside the cassettes on the quality of the silicon wafers. degree. At present, the following method is generally used to monitor the ion concentration inside the tablet cassette: first, a solution is used to collect the ions inside the tablet cassette, and then the ion concentration in the solution is detected by an ion analysis instrument. Therefore, the adequacy of ion collection inside the cassette and the cleanliness of the collection process are crucial for subsequent test analysis.

From the perspective of ion collection uniformity, if the ion collection is insufficient, the direct consequence is that the test data is too small and cannot reflect the true value of the ion concentration inside the cassette, resulting in a deeper contamination of the silicon wafers in the cassette. In terms of ion collection cleanliness, in the related technology method, after the ion collection inside the tablet cassette is completed, the tablet cassette solution needs to be manually poured out. This will inevitably bring contaminants into the tablet cassette solution, resulting in larger test data. , directly affects the authenticity of the test data.

In the related art, the tablet cassette is washed by hand to achieve the purpose of collecting ions. However, there are two unsolvable problems with this method: First, this method cannot overcome the frequency of hand washing of the tablet cassettes by different operators, and cannot quantify the frequency of hand shaking washing, resulting in insufficient ion collection inside the tablet cassettes and the inability to standardize them. ; Secondly, the relevant technology only provides ion collection methods, and does not consider the process of collecting ions into the liquid and taking out the liquid. Artificial contamination caused by the liquid filling and taking out processes is the key point that affects the ion test concentration inside the cassette. The accuracy of the ion concentration test data inside the cassette has a great influence.

Embodiments of the present disclosure provide an ion collection device and method inside a tablet cassette, which can improve the adequacy and cleanliness of ion collection and improve detection accuracy.

The technical solutions provided by the embodiments of this disclosure are as follows:

An ion collection device inside a tablet cassette, including:

A collection unit for collecting ions inside the film cassette. The collection unit includes a frame body and a clamp connected to the frame body for clamping the film cassette and rotating the film cassette around an axis in a first direction. a holding mechanism, and a rotation mechanism connected to the frame body for rotating the frame body around an axis in a second direction, the first direction being perpendicular to the second direction;

a film cassette cover opening and closing assembly for opening or closing the film cassette cover of the film cassette, and the film cassette cover opening and closing assembly is connected to the frame body;

A liquid injection unit for injecting a standard solution into the tablet cassette. The liquid injection unit includes a liquid injection component and a liquid supply component for supplying a standard solution to the liquid injection component. The liquid injection component includes a liquid injection component. head and a first moving mechanism that moves the liquid injection head. The liquid injection head, driven by the first moving mechanism, can inject solution into the inside of the frame body cassette; and

A liquid collection unit for collecting the solution inside the tablet cassette, the liquid collection unit includes a liquid suction component for sucking solution from the inside of the chip cassette, and a liquid suction component for collecting the solution sucked by the liquid suction component The liquid collection assembly includes a liquid suction head and a second moving mechanism for moving the liquid suction head.

Exemplarily, the liquid supply component includes:

A first liquid supply bottle and a second liquid supply bottle for respectively providing different original solutions;

A liquid mixer for mixing and configuring different original solutions from the first liquid supply bottle and the second liquid supply bottle into the standard solution, and the liquid inlet of the liquid mixer is connected to the standard solution through a first pipeline. The first liquid supply bottle is connected to the second liquid supply bottle through a second pipeline, the first pipeline is provided with a first valve, and the second pipeline is provided with a second valve;

A syringe used to extract the standard solution from the liquid mixer and inject it into the liquid injection head, the liquid outlet of the liquid mixer is connected to the liquid inlet of the syringe, and the liquid outlet of the syringe is connected to The liquid injection head;

Controller, the controller is connected to the first valve, the second valve, the third valve and the syringe, and is used to control the first valve, the second valve, the third valve and the working state of the syringe so that different original solutions are mixed and configured in a predetermined ratio.

Exemplarily, the first moving mechanism includes a first bracket, the first bracket is rotatable around an axis along the third direction and telescopic in the third direction, and the liquid injection head is disposed on the On the first bracket, the third direction is perpendicular to the first direction and the second direction.

Exemplarily, the first bracket includes a first vertical pipe disposed along the third direction and a first transverse pipe disposed along the first direction. The relationship between the first vertical pipe and the first transverse pipe is The inner cavity is connected to the liquid injection head, the first vertical pipe is telescopic in the third direction, and the first vertical pipe is provided with a liquid inlet connected to the liquid supply component, and the first vertical pipe is retractable in the third direction. The liquid injection head is connected to the first horizontal tube.

Exemplarily, the second moving mechanism includes a second bracket, the second bracket can rotate around an axis along the third direction and can telescope in the third direction, and the liquid suction head is disposed on the second On the bracket, the third direction, the first direction and the second direction are perpendicular to each other.

Exemplarily, the second bracket includes a second vertical pipe disposed along the third direction and a second transverse pipe disposed along the first direction. The connection between the second vertical pipe and the second transverse pipe is The inner cavity is connected to the liquid suction head, the second vertical pipe is telescopic in the third direction, and the second vertical pipe is provided with a liquid inlet connected to the liquid collection assembly, and the second vertical pipe is retractable in the third direction. The liquid suction head is connected to the second horizontal tube.

Exemplarily, the liquid collection assembly includes a peristaltic pump and a liquid collection bottle, and the peristaltic pump is connected between the liquid collection bottle and the liquid suction assembly.

Exemplarily, the rack includes: a rack body with an opening at the top;

The film box cover opening and closing assembly includes:

a movable top beam movably disposed at the opening; an automatic opening and closing cover component capable of performing the action of opening or closing the film box cover;

A bayonet component for opening the film box cover is fixed on the movable top beam to move synchronously with the movable top beam. The film box cover is provided with a bayonet component that is adapted to the opening bayonet component of the film box cover. The bayonet adapter structure has a locked state and an unlocked state between the bayonet opening component of the film box cover and the bayonet adapter structure. In the locked state, the film box cover can follow the film box. When the cover is opened, the bayonet parts move synchronously.

The rotating mechanism of the opening and closing assembly includes: a rotating shaft capable of forward and reverse rotation, the frame body is connected to the rotating shaft to perform rotational movement with the rotating shaft; and driving the rotating shaft Rotating drive motor.

The clamping mechanism of the opening and closing assembly includes:

The first clamping part includes a first motor and a fixed chuck. The fixed chuck is arranged on the first inner wall of the frame. The first motor is located outside the frame. And the output shaft of the first motor is arranged along the first direction and is connected to the fixed chuck through the first inner wall to drive the fixed chuck to rotate; and

The second clamping part includes a chuck knob and an adjustable movable chuck. The adjustable movable chuck is arranged on the second inner wall of the frame body. The second inner wall Opposite to the first inner wall, the chuck knob is located outside the frame. The rotating axis of the chuck knob is disposed along the first direction and is connected to the adjustable axis through the second inner wall. On the activity card.

A method for collecting ions inside a tablet cassette, which uses the ion collecting device inside the tablet cassette as described above to collect ions inside the tablet cassette. The method includes:

Place the film cassette inside the frame, and clamp the film cassette through the clamping mechanism;

Open the film box cover of the film box through the film box cover opening and closing assembly;

Inject standard solution into the tablet cassette through the liquid injection unit;

The film box cover of the film box is closed by the film box cover opening and closing assembly;

The clamping mechanism rotates the chip cassette in a first direction, and the rotating mechanism rotates the frame in a second direction, so that the standard solution can fully collect ions inside the chip cassette;

Open the film box cover of the film box through the film box cover opening and closing assembly;

The solution is sucked from the tablet box through the liquid suction component and transported to the liquid collecting component.

The beneficial effects brought by the embodiments of the present disclosure are as follows:

In the ion collection device and method inside the tablet cassette provided by the embodiments of the present disclosure, the tablet cassette can be placed in the frame, the tablet cassette can be clamped by the clamping mechanism, and the tablet cassette cover can be opened and closed The assembly opens the tablet cassette, injects standard solution into the frame through the liquid injection unit, closes the tablet cassette through the tablet cassette cover opening and closing assembly, and rotates the tablet cassette in the first direction through the clamping mechanism. The rotation mechanism rotates the frame body in the second direction, so that the standard solution can fully collect the ions inside the tablet box. After the collection is completed, the tablet box cover opening and closing assembly is used to open the tablet box again. The cassette cover is opened, and the solution to be detected is sucked from the frame through the liquid suction component and transported to the liquid collecting component. Therefore, the liquid inlet and liquid extraction processes during the ion collection process inside the tablet cassette can be completed through the liquid injection unit and the liquid suction unit, without manual operation, avoiding contamination caused by human factors, and ensuring the cleanliness of the solution to be detected; and, Through the shaking of the tablet cassette by the clamping mechanism and the rotating mechanism, the standard solution can fully collect the ions inside the tablet cassette, thereby ensuring the adequacy of ion collection in the solution to be detected. It can be seen from this that the embodiments of the present disclosure provide The device and method for collecting ions inside the tablet cassette, compared with the method of hand-cranking to collect the solution to be detected in related technologies, can avoid the problem of insufficient ion collection inside the tablet cassette caused by different operators washing the tablet cassette by hand-cranking at different frequencies. , and can avoid cleanliness during the liquid inlet and liquid extraction processes, improve detection accuracy, and greatly improve sampling efficiency.

In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are some, but not all, of the embodiments of the present disclosure. Based on the described embodiments of the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present disclosure.

Unless otherwise defined, technical terms or scientific terms used in this disclosure shall have the usual meaning understood by a person with ordinary skill in the art to which this disclosure belongs. "First", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Likewise, similar words such as "a", "an" or "the" do not indicate a quantitative limitation but rather indicate the presence of at least one. Words such as "include" or "comprising" mean that the elements or things appearing before the word include the elements or things listed after the word and their equivalents, without excluding other elements or things. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right", etc. are only used to express relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

As shown in Figures 1 to 4, the ion collection device inside the cassette provided by the embodiment of the present disclosure includes:

The collection unit 10 is used to collect ions inside the film cassette. The collection unit 10 includes a frame body 11 and a device connected to the frame body 11 for clamping the film cassette and rotating around the axis of the first direction X. The clamping mechanism 12 of the film box and the rotation mechanism 13 connected to the frame 11 for rotating the frame 11 around the axis of the second direction Y, the first direction Two directions Y are vertical;

A film box cover opening and closing assembly 50 for opening or closing the film box cover of the film box, and the film box cover opening and closing assembly 50 is connected to the frame body 11;

A liquid injection unit 20 for injecting a standard solution into the tablet cassette. The liquid injection unit 20 includes a liquid injection component 22 and a liquid supply component 21 for supplying a standard solution to the liquid injection component 22. The liquid injection unit 20 The liquid assembly 22 includes a liquid injection head 221 and a first moving mechanism 222 that moves the liquid injection head 221. The liquid injection head 221, driven by the first moving mechanism 222, can inject standard solution into the inside of the tablet cassette. ;and

A liquid collection unit for collecting the solution after ion collection has been completed inside the cassette. The liquid collection unit includes a liquid suction component 31 for sucking the solution from the inside of the cassette and a liquid suction assembly 31 for collecting the suction liquid. The liquid collection component 41 of the solution to be detected is sucked by the component 31. The liquid suction component 31 includes a liquid suction head 311 and a second moving mechanism 312 that moves the liquid suction head 311.

In the above solution, the tablet cassette can be placed in the frame 11, the tablet cassette is clamped by the clamping mechanism 12, the tablet cassette is opened by the tablet cassette cover opening and closing assembly 50, and the tablet cassette is opened by the liquid injection unit. 20 Inject the standard solution into the frame 11, close the film box through the film box cover opening and closing assembly 50, rotate the film box around the first direction X through the clamping mechanism 12, and use the rotation mechanism to 13. Rotate the frame 11 around the second direction Y so that the standard solution can fully collect the ions inside the cassette. After the collection is completed, open the cassette again through the cassette cover opening and closing assembly 50, and pass the cassette through the cassette. The liquid suction component 31 sucks the solution to be detected from the frame 11 and transports it to the liquid collection component 41 . Therefore, the liquid inlet and liquid extraction processes during the sampling process can be completed through the liquid injection unit 20 and the liquid suction unit, without manual operation, avoiding contamination caused by human factors, and ensuring the cleanliness of the solution to be detected; and, through the above The shaking of the cassette by the rotating mechanism 13 and the clamping mechanism 12 can allow the standard solution to fully collect the ions inside the cassette, thereby ensuring the adequacy of ion collection in the solution to be detected. It can be seen from this that the ions provided by the embodiments of the present disclosure are Compared with the method of hand-cranking to collect the solution to be detected in related technologies, the ion collection device inside the tablet cassette can avoid the problem of insufficient ion collection caused by different operators washing the tablet cassette by hand-cranking at different frequencies, and can avoid liquid inlet and The cleanliness during the liquid collection process improves detection accuracy and greatly improves sampling efficiency;

Moreover, the shaking frequency of the clamping mechanism 12 and the rotating mechanism 13 can be quantified, which can ensure the standardization of ion collection, thereby improving the accuracy of the ion concentration test data inside the cassette.

In some exemplary embodiments, as shown in Figures 1 and 2, the liquid supply component 21 includes:

The first liquid supply bottle 211 and the second liquid supply bottle 212 are used to respectively provide different original solutions;

A liquid mixer 213 for mixing and configuring different original solutions from the first liquid supply bottle 211 and the second liquid supply bottle 212 into a standard solution. The liquid inlet of the liquid mixer 213 is connected through a first pipeline. to the first liquid supply bottle 211 and connected to the second liquid supply bottle 212 through a second pipeline. The first pipeline is provided with a first valve 214, and the second pipeline is provided with a second valve 215. ;

A syringe 216 used to extract the standard solution from the liquid mixer 213 and inject it into the liquid injection head 221. The liquid outlet of the liquid mixer 213 is connected to the liquid inlet of the syringe 216, and the liquid mixing A third valve 217 can be provided between the syringe 213 and the syringe 216, and the liquid outlet of the syringe 216 is connected to the liquid injection head 221;

Controller 218, the controller 218 is connected to the first valve 214, the second valve 215, the third valve 217 and the syringe 216, and is used to control the first valve 214, the second valve 218 and the syringe 216. The working states of the valve 215, the third valve 217 and the syringe 216 are such that different original solutions are mixed and configured in a predetermined ratio.

In the above solution, the first liquid supply bottle 211 can contain an acid solution, and the second liquid supply bottle 212 can contain a deionized water (De-Ionzied Water, DIW) solution. The process of configuring the standard solution can be As follows: first, open the first valve 214 and the third valve 217, set the volume of the input acid solution through the controller 218, and the acid solution in the first liquid supply bottle 211 will automatically follow the set volume. be sucked into the liquid mixer 213; then, close the first valve 214, open the second valve 215, input the volume of the DIW solution on the controller 218, and the DIW solution in the second liquid supply bottle 212 will be automatically sucked into the liquid mixer 213 according to the set volume; finally, the first valve 214 and the second valve 215 are closed. After the acid solution and the DIW solution are evenly mixed in the liquid mixer 213, the mixture will be mixed through the syringe 216. The final standard solution is delivered to the liquid injection unit 20. It can be seen that the standard solution of the liquid supply unit provided by the embodiment of the present disclosure has high efficiency, can effectively avoid standard solution and standard solution contamination during the liquid injection process, shorten the solution preparation time, and improve work efficiency.

As some exemplary embodiments, the first moving mechanism 222 includes a first bracket that is rotatable about an axis along the third direction Z and telescopic in the third direction. Note that The liquid head 221 is disposed on the first bracket, and the third direction Z is perpendicular to the first direction X and the second direction Y.

In the above solution, the first vertical pipe can be rotated and raised and lowered, so that the first horizontal pipe can synchronously drive the liquid injection head 221 to move, thereby achieving the purpose of moving the liquid injection head 221, when liquid injection is required. The liquid injection head 221 can be moved to the top of the frame body 11. When liquid injection is not required, it can be moved to one side of the frame body 11. The third direction Z is connected with the first direction X and the second direction. The directions Y are perpendicular to each other.

Of course, it can be understood that the specific structure of the first moving mechanism 222 is not limited to this.

Exemplarily, as shown in Figures 1 and 2, the first bracket includes a first vertical tube 2221 arranged along the third direction Z and a first transverse tube 2222 arranged along the first direction X, so The first vertical pipe 2221 is connected to the inner cavity of the first horizontal pipe 2222 and connected to the liquid injection head 221. The first vertical pipe 2221 is telescopic in the third direction Z and the first vertical pipe 2221 is telescopic in the third direction Z. The vertical pipe 2221 is provided with a liquid inlet 222a connected with the liquid supply assembly 21 , and the liquid injection head 221 is connected to the first horizontal pipe 2222 . Using the above solution, the first vertical pipe 2221 and the first horizontal pipe 2222 can be used as pipelines to transport the standard solution from the syringe 216 to the liquid injection head 221 . Of course, it is understandable that in practical applications, separate pipelines can also be set up to transport the standard solution.

In addition, illustratively, the second moving mechanism 312 includes a second bracket that can rotate around an axis along the third direction Z and can telescope in the third direction, and the liquid suction head 311 is provided with on the second bracket. In the above solution, the second vertical pipe can be rotated and raised and lowered so that the second horizontal pipe can synchronously drive the liquid injection head 221 to move, thereby achieving the purpose of moving the liquid suction head 311. When liquid needs to be sucked, , the liquid suction head 311 can be rotated to the top of the frame 11 and then lowered to suck the solution inside the tablet cassette; when there is no need to absorb liquid, it can be raised and rotated to the side of the frame 11 . Of course, it can be understood that the specific structure of the second moving mechanism 312 is not limited to this.

For example, as shown in Figure 4, the second bracket includes a second vertical tube 3121 arranged along the third direction Z and a second transverse tube 3122 arranged along the first direction X. The second The vertical pipe 3121 is connected to the inner cavity of the second horizontal pipe 3122 and connected to the liquid injection head 221. The second vertical pipe 3121 is telescopic in the third direction Z and the second vertical pipe 3121 There is a liquid suction port connected to the liquid collection assembly 41 , and the liquid suction head 311 is connected to the second horizontal tube 3122 . Using the above solution, the second vertical pipe 3121 and the second horizontal pipe 3122 can be used as pipelines to transport the solution to be detected from the liquid suction assembly 31 to the liquid collection assembly 41 . Of course, it is understandable that in practical applications, separate pipelines can also be set up to transport the solution to be detected.

In addition, as shown in FIG. 4 , in one embodiment, the liquid collection assembly 41 includes a peristaltic pump 411 and a liquid collection bottle 412 , and the peristaltic pump 411 is connected between the liquid collection bottle 412 and the liquid suction assembly 31 During this time, the peristaltic pump 411 can provide the suction power and solution delivery power of the liquid suction head 311.

In addition, as an example, as shown in Figure 3, the frame 11 includes: a frame body with an opening on the top; the film box cover opening and closing assembly 50 includes:

A movable top beam 51 movably provided at the opening;

Automatic opening and closing cover component 52, which can perform the action of opening the film cassette cover or closing the film cassette cover;

The film box cover opening bayonet component 53 is fixed on the movable top beam 51 to move synchronously with the movable top beam 51. The film box cover is provided with a bayonet component for opening the film box cover. 53, the film box cover opening bayonet component 53 and the bayonet adapting structure have a locked state and an unlocked state, and in the locked state, the film box cover can be The film box cover opening bayonet component 53 moves synchronously.

Using the above solution, the film box cover of the film box can be provided with a bayonet adapting structure, and the bayonet adapting structure can cooperate with the bayonet component 53 for opening the film box cover. The specific opening and closing of the film box cover The process can be as follows:

The film box cover opening bayonet component 53 is locked with the film box cover, and the automatic opening and closing cover component 52 performs the action of opening the film box cover, thereby opening the film box cover; the movable top beam 51 drives the film box cover to open. The tablet cassette cover moves backward horizontally along the second direction Y to realize the opening process of the tablet cassette cover. At this time, the solution can be injected into the tablet cassette or the solution can be aspirated;

The movable top beam 51 drives the film box cover of the film box to move forward horizontally in the second direction Y. After that, the film box cover opens and the bayonet component 53 locks the film box cover, and the automatic opening and closing cover component 52 closes the film box. The cassette can be rocked through the rotating mechanism and the clamping mechanism to collect ions.

Exemplarily, as shown in FIG. 3 , the rotating mechanism 13 includes: a rotating shaft 131 capable of forward and reverse rotation. The frame body is connected to the rotating shaft 131 to rotate along with the rotating shaft 131 . perform rotational motion; and a drive motor that drives the rotation shaft 131 to rotate.

Using the above solution, the specific process of using the collection unit 10 to wash the tablet box can be as follows:

First, keep the film cassette in a horizontal state as shown in Figure 3, and the clamping mechanism 12 clamps and drives the film cassette to rotate, and the rotation rate can be 20 rpm;

After rotating for a certain period of time (for example, 1 minute), the driving motor controls the rotating shaft 131 to drive the frame 11 to rotate 90° counterclockwise in the orientation shown in Figure 3, so that the film cassette assumes the first vertical state. The clamping mechanism 12 clamps and drives the film cassette to rotate, and the rotation rate can be 20 rpm;

After rotating for a certain period of time (for example, 1 minute), by adjusting the driving motor, the rotating shaft 131 drives the frame 11 to rotate 180° clockwise, so that the film cassette is in the second vertical state, and the clamping mechanism 12. The clamp drives the film cassette to rotate, and the rotation speed can be 20 rpm;

After rotating for a certain period of time (for example, 1 minute), the rotating shaft 131 drives the frame 11 to rotate counterclockwise 90° in the direction shown in Figure 3, so that the film cassette returns to the initial horizontal state.

Of course, it is understandable that the above are only examples. In actual applications, the actual rotation and rotation angle can be reasonably adjusted according to actual needs.

In addition, as an example, as shown in Figure 3, the clamping mechanism 12 includes:

The first clamping part includes a first motor 121 and a fixed chuck 122. The fixed chuck 122 is provided on the first inner wall of the frame body. The first motor 121 The output shaft of the first motor 121 is located outside the frame 11 and is arranged along the first direction X and passes through the first inner wall and is connected to the fixed chuck 122 to drive the fixed chuck 122 . The chuck 122 rotates; and

The second clamping part includes a chuck knob 123 and an adjustable movable chuck 124. The adjustable movable chuck 124 is provided on the second inner wall of the frame 11. The second inner wall is opposite to the first inner wall. The chuck knob 123 is located outside the frame 11 . The rotating axis of the chuck knob 123 is arranged along the first direction X and passes through the first direction X. The two inner walls are connected to the adjustable movable chuck 124 .

In the above solution, the adjustable movable chuck 124 can perform axial translation or rotation through the chuck knob 123, so that the adjustable movable chuck 124 can clamp the film cassette with the fixed chuck 122. Moreover, a bearing is provided between the rotating shaft of the chuck knob 123 and the second inner wall, so that when the fixed chuck 122 rotates driven by the first motor 121, the adjustable movable chuck 124 rotates accordingly.

In a second aspect, embodiments of the present disclosure provide a method for collecting ions inside a tablet cassette, using an ion collection device inside a tablet cassette provided by embodiments of the present disclosure to collect ions inside the tablet cassette. The method includes:

Step S01: Place the film cassette in the frame 11 and clamp the film cassette through the clamping mechanism 12;

Step S02: Open the film box cover of the film box through the film box cover opening and closing assembly 50;

Step S03: Inject standard solution into the tablet cassette through the liquid injection unit 20;

Step S04: Close the film box cover of the film box through the film box cover opening and closing assembly; Step S05: Rotate the film box around the first direction X through the clamping mechanism 12, and use the rotation mechanism 13 to rotate the film box. Rotate the frame 11 around the second direction Y so that the standard solution can fully collect the ions inside the cassette;

Step S06: Open the film box cover of the film box through the film box cover opening and closing assembly;

Step S07: Aspirate the solution from the frame 11 through the liquid suction assembly 31 and transport it to the liquid collecting assembly 41.

In the ion collection method inside the cassette provided by the embodiment of the present disclosure, the cassette can be placed in the frame 11 , the cassette can be clamped by the clamping mechanism 12 , and the liquid injection unit 20 can be used to inject the cassette into the cassette. The standard solution is injected into the frame 11, the film cassette is rotated around the first direction X through the clamping mechanism 12, and the frame 11 is rotated around the second direction Y through the rotating mechanism 13, so that the The standard solution fully cleans the tablet cassette to obtain a solution to be tested. The solution to be tested is sucked from the frame 11 through the liquid suction component 31 and transported to the liquid collection component 41 . Therefore, the liquid inlet and liquid extraction processes during the sampling process can be completed through the liquid injection unit 20 and the liquid suction unit, without the need for manual operations, to avoid contamination due to human factors, and to ensure the cleanliness of the solution to be detected; and, through the above The rotating mechanism 13 and the shaking of the tablet cassette by the rotating mechanism can make the standard solution fully wash the tablet cassette, thereby ensuring the adequacy of the solution to be detected. It can be seen that the ion collection device inside the tablet cassette provided by the embodiment of the present disclosure is relatively Compared with the method of hand-cranking to collect the solution to be detected in related technologies, it can avoid the problem of insufficient ion collection caused by different operators hand-cranking the tablet cassette at different frequencies, and can avoid problems with cleanliness during the liquid inlet and liquid extraction processes. , improve detection accuracy, and greatly improve sampling efficiency.

The following points need to be explained:

(1) The drawings of the embodiments of this disclosure only refer to structures related to the embodiments of this disclosure, and other structures may refer to common designs.

(2) For the sake of clarity, in the drawings used to describe embodiments of the present disclosure, the thicknesses of layers or regions are exaggerated or reduced, that is, these drawings are not drawn according to actual scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or Intermediate elements may be present.

(3) If there is no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. The protection scope of the present disclosure should be subject to the protection scope of the claims.

10: Collection unit 11: Frame 12: Clamping mechanism 121:First motor 122: Fixed chuck 123:Chuck knob 124: Adjustable movable chuck 13:Rotating mechanism 131:Rotation axis 20: Liquid injection unit 21: Liquid supply component 211: First liquid supply bottle 212: Second liquid supply bottle 213:Mixer 214:First valve 215:Second valve 216:Syringe 217:Third valve 218:Controller 22: Liquid injection component 221: Liquid injection head 222:First mobile agency 222a:Liquid inlet 2221:The first standpipe 2222:First horizontal tube 31:Liquid suction component 311:Liquid suction head 312: Second mobile mechanism 3121:Second standpipe 3122:Second horizontal tube 41:Liquid collection component 411:Peristaltic pump 412:Liquid collection bottle 50: Film box cover opening and closing assembly 51:Removable roof beam 52: Automatic opening and closing cover parts 53: Film box cover opening bayonet component X: first direction Y: second direction Z: third direction

Figure 1 shows a schematic diagram of the overall structure of the ion collection device inside the cassette provided in an embodiment of the present disclosure;

Figure 2 shows a schematic structural diagram of the liquid injection unit in the ion collection device inside the cassette provided in the embodiment of the present disclosure;

Figure 3 shows a schematic structural diagram of the collection unit in the ion collection device inside the cassette provided by an embodiment of the present disclosure;

FIG. 4 shows a schematic structural diagram of the liquid collection unit in the ion collection device inside the cassette provided by an embodiment of the present disclosure.

10: Collection unit

11: Frame

12: Clamping mechanism

13:Rotating mechanism

20: Liquid injection unit

21: Liquid supply component

211: First liquid supply bottle

212: Second liquid supply bottle

213:Mixer

214:First valve

215:Second valve

216:Syringe

217:Third valve

218:Controller

22: Liquid injection component

221: Liquid injection head

222:First mobile agency

222a:Liquid inlet

2221:The first standpipe

31:Liquid suction component

311:Liquid suction head

312: Second mobile mechanism

3121:Second standpipe

41:Liquid collection component

411:Peristaltic pump

412:Liquid collection bottle

X: first direction

Y: second direction

Z: third direction

Claims (10)

An ion collection device inside a tablet cassette, including: A collection unit for collecting ions inside the film cassette. The collection unit includes a frame body and a clamp connected to the frame body for clamping the film cassette and rotating the film cassette around an axis in a first direction. a holding mechanism, and a rotation mechanism connected to the frame body for rotating the frame body around an axis in a second direction, the first direction being perpendicular to the second direction; a film cassette cover opening and closing assembly for opening or closing the film cassette cover of the film cassette, and the film cassette cover opening and closing assembly is connected to the frame body; A liquid injection unit for injecting a standard solution into the tablet cassette. The liquid injection unit includes a liquid injection component and a liquid supply component for supplying a standard solution to the liquid injection component. The liquid injection component includes a liquid injection component. head and a first moving mechanism that moves the liquid injection head. The liquid injection head, driven by the first moving mechanism, can inject a standard solution into the inside of the frame cassette; and A liquid collection unit for collecting the solution inside the tablet cassette, the liquid collection unit includes a liquid suction component for sucking solution from the inside of the chip cassette, and a liquid suction component for collecting the solution sucked by the liquid suction component The liquid collection assembly includes a liquid suction head and a second moving mechanism for moving the liquid suction head. The ion collection device inside the cassette as described in claim 1, wherein, The liquid supply component includes: A first liquid supply bottle and a second liquid supply bottle for respectively providing different original solutions; A liquid mixer for mixing and configuring different original solutions from the first liquid supply bottle and the second liquid supply bottle into the standard solution, and the liquid inlet of the liquid mixer is connected to the standard solution through a first pipeline. The first liquid supply bottle is connected to the second liquid supply bottle through a second pipeline, the first pipeline is provided with a first valve, and the second pipeline is provided with a second valve; A syringe used to extract the standard solution from the liquid mixer and inject it into the liquid injection head, the liquid outlet of the liquid mixer is connected to the liquid inlet of the syringe, and the liquid mixer and the syringe A third valve is provided between them, and the liquid outlet of the syringe is connected to the liquid injection head; Controller, the controller is connected to the first valve, the second valve, the third valve and the syringe, and is used to control the first valve, the second valve, the third valve and the working state of the syringe so that different original solutions are mixed and configured in a predetermined ratio. The ion collection device inside the cassette as described in claim 1, wherein, The first moving mechanism includes a first bracket, the first bracket is rotatable around an axis along a third direction and telescopic in the third direction, and the liquid injection head is provided on the first bracket; The second moving mechanism includes a second bracket, the second bracket can rotate around an axis along the third direction and can telescope in the third direction, and the liquid suction head is provided on the second bracket, so The third direction is perpendicular to the first direction and the second direction. The ion collection device inside the cassette as described in claim 3, wherein, The first bracket includes a first vertical tube arranged along the third direction and a first horizontal tube arranged along the first direction. The first vertical tube communicates with the inner cavity of the first horizontal tube and is Connected to the liquid injection head, the first vertical pipe is telescopic in the third direction, and the first vertical pipe is provided with a liquid inlet connected to the liquid supply component, and the liquid injection head is connected to to the first horizontal tube. The ion collection device inside the cassette as described in claim 3, wherein, The second bracket includes a second vertical tube arranged along the third direction and a second horizontal tube arranged along the first direction. The second vertical tube communicates with the inner cavity of the second horizontal tube and is Connected to the liquid suction head, the second vertical pipe is telescopic in the third direction, and the second vertical pipe is provided with a liquid suction port connected to the liquid collecting assembly, and the liquid suction head is connected to to the second horizontal tube. The ion collection device inside the cassette as described in claim 1, wherein, The liquid collection assembly includes a peristaltic pump and a liquid collection bottle, and the peristaltic pump is connected between the liquid collection bottle and the liquid suction assembly. The ion collection device inside the cassette as described in claim 1, wherein, The frame body includes: a frame body with an opening at the top; The film box cover opening and closing assembly includes: a movable top beam movably disposed at the opening; an automatic opening and closing cover component capable of performing the action of opening or closing the film box cover; A bayonet component for opening the film box cover is fixed on the movable top beam to move synchronously with the movable top beam. The film box cover is provided with a bayonet component that is adapted to the opening bayonet component of the film box cover. The bayonet adapter structure has a locked state and an unlocked state between the bayonet opening component of the film box cover and the bayonet adapter structure. In the locked state, the film box cover can follow the film box. When the cover is opened, the bayonet parts move synchronously. The ion collection device inside the cassette as described in claim 1, wherein, The rotation mechanism includes: a rotation shaft capable of forward and reverse rotation, the frame body is connected to the rotation shaft to perform rotational movement with the rotation shaft; and a drive motor that drives the rotation shaft to rotate. The ion collection device inside the cassette as described in claim 1, wherein, The clamping mechanism includes: The first clamping part includes a first motor and a fixed chuck. The fixed chuck is arranged on the first inner wall of the frame. The first motor is located outside the frame. And the output shaft of the first motor is arranged along the first direction and is connected to the fixed chuck through the first inner wall to drive the fixed chuck to rotate; and The second clamping part includes a chuck knob and an adjustable movable chuck. The adjustable movable chuck is arranged on the second inner wall of the frame body. The second inner wall Opposite to the first inner wall, the chuck knob is located outside the frame. The rotating axis of the chuck knob is disposed along the first direction and is connected to the adjustable axis through the second inner wall. On the activity card. A method for collecting ions inside the cassette, using the ion collection device inside the cassette as described in any one of claims 1 to 9 to collect ions inside the cassette, the method comprising: Place the film cassette inside the frame, and clamp the film cassette through the clamping mechanism; Open the film box cover of the film box through the film box cover opening and closing assembly; Inject standard solution into the tablet cassette through the liquid injection unit; The film box cover of the film box is closed by the film box cover opening and closing assembly; The clamping mechanism rotates the chip cassette in a first direction, and the rotating mechanism rotates the frame in a second direction, so that the standard solution can fully collect ions inside the chip cassette; Open the film box cover of the film box through the film box cover opening and closing assembly; The solution is sucked from the tablet box through the liquid suction component and transported to the liquid collecting component.

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