TWI812161B - Integrated optical inspection apparatus - Google Patents

Abstract

The present invention provides an integrated optical inspection apparatus, comprising a light source device, a camera device, a light source filter module, a camera filter module, and an image inspection device. The light source device provides an illumination light to an object through an illumination light path. The camera device can selectively move any one of the cameras onto the imaging optical path to generate an image of the object. The light source filter module can selectively switch any one of the light source filters onto the illumination light path among a plurality of light source filters to filter the illumination light. The camera filter module can selectively switch any one of the camera filters onto the imaging light path to filter the illumination light. The image detection device is coupled to the camera to produce a fluorescent image detection results or/and a monochromatic light image detection results.

Description

Integrated optical inspection equipment

The present invention relates to an optical detection device, in particular to an integrated optical detection device.

With the development of fully automated industry, Automatic Optical Inspection (AOI) has been widely used in the appearance inspection of circuit board assembly production lines in the electronics industry and replaced the previous manual visual inspection (Visual Inspection).

The automatic optical identification system is a common representative method in industrial processes. The main method is to use a photography device to capture the surface state of the object to be tested, and then use computer image processing technology to detect defects such as foreign matter or pattern abnormalities. Due to the use of non-contact Type inspection, so it can be used to inspect semi-finished products during the production line.

In response to the needs of IC products for low power consumption, high performance, and thin size, advanced packaging technology fully utilizes the characteristics of semiconductor IC circuit size reduction, homogeneous and heterogeneous integration, and three-dimensional chip stacking. In compliance with Moore's Law, the continued miniaturization of logic gate components in advanced packages is an inevitable trend, which is also a big challenge for automatic optical inspection. In response to the demand for high-precision detection of objects to be tested, automatic optical inspection systems generally set up multiple stations according to actual needs to detect various defects and characteristics separately, causing the overall size of the equipment to be too large and the cost to increase.

The main purpose of the present invention is to provide an integrated optical detection equipment, including a light source device, a camera device, a light source filter module, a camera filter module, and an image detection device. The light source device provides an illuminating light to an object to be measured through an illuminating light path. The camera device can selectively switch any one of the plurality of cameras on an imaging optical path to capture the object to be measured and generate an image of the object to be measured. The light source filter module can selectively switch any one of the plurality of light source filters on the illumination light path to filter the illumination light. The camera filter module can selectively switch any one of the plurality of camera filters on the imaging light path to filter the illumination light. The image detection device is coupled to the camera to receive and analyze the image of the object to be tested to obtain an image detection result. The image detection result includes a fluorescence image detection result or/and a monochromatic light image detection result.

The invention integrates three detection platforms: appearance detection, fluorescence detection, and re-inspection detection, which can effectively reduce the size of the equipment. In addition, the present invention supports image detection at different wavelengths, fluorescence detection at different wavelengths, and supports an autofocus function. The objective lens of the present invention has high magnification selectivity and breaks through the sub-micron limit. It has superior effects compared to conventional technologies.

The detailed description and technical content of the present invention are described below with reference to the drawings. Furthermore, for the convenience of explanation, the proportions of the drawings in the present invention may not be drawn according to actual proportions, but may be exaggerated. These drawings and their proportions are not intended to limit the scope of the present invention.

In addition, the features and components in the figures are not drawn to actual scale, but are drawn in a manner intended to best represent specific features and components relevant to the present invention. In addition, the same or similar reference symbols are used in different drawings to refer to the same or similar elements and components.

In this article, unless the context indicates otherwise, the words "includes", "includes", "has" or "contains" are inclusive or open-ended and do not exclude other unstated elements or method steps.

In this article, "middle", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner" ”, “outside” and other terms used to indicate the orientation or positional relationship description are based on the orientation or positional relationship shown in the drawings. They are only used to facilitate the description of the present invention and simplify the description, rather than indicating or implying the device or device referred to. Elements must have a specific orientation, be constructed and operate in a specific orientation and therefore are not to be construed as limitations of the invention.

In this article, "setting", "installation", "connection", "connection", "fixing", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a mechanical connection, a direct connection, or an indirect connection through an intermediate medium. wait. For those with ordinary knowledge in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

The following is a description of one embodiment of the present invention. Please refer to "Figure 1" first, which is a block diagram of an integrated optical detection device in the present invention, as shown in the figure.

This embodiment discloses an integrated optical detection device 100. The optical detection system 100 is used to photograph the object W on the platform, obtain an image of the object W by photographing the object W, and analyze the object W. Image to obtain image detection results. After obtaining the image of the object W, the image detection device 60 generates an image detection result based on the image of the object W. In one embodiment, the object W to be tested includes a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, a display panel, or other objects containing organic matter, which are not limited in the present invention.

The optical detection system 100 includes a light source device 10, a camera device 20, a light source filter module 30, a camera filter module 40, an objective lens device 50, an image detection device 60, and a display device 70.

The light source device 10 provides illumination light to the object to be measured through an illumination light path. In one embodiment, the light source device 10 includes a laser light source, which provides illumination light to the object under test through the illumination light path P. The laser light source can be designed to be located in the excitation frequency band of the object under test W to excite the object under test. Object W produces fluorescence. In another embodiment, the light source device 10 includes a monochromatic light source, which provides illumination light to the object to be measured through the illumination light path P. The monochromatic light source can be, for example, white light, red light, blue light, green light, etc. In the present invention, Not restricted. In one embodiment, the optical detection system 100 further includes a dark field ring light 80 , which is arranged around the outer circumference of the object W to be measured.

The camera device 20 can selectively switch any one of the plurality of cameras on the imaging optical path R to capture the object W to be measured and generate an image of the object to be measured. In one embodiment, the cameras may include, but are not limited to, line scan cameras and/or area scan cameras, which are not limited in the present invention.

The light source filter module 30 can selectively switch any one of the plurality of light source filters on the illumination light path P to filter the illumination light. In one embodiment, the light source filter module 30 includes a plurality of light source filters and a light source filter switching device. The light source filter switching device can selectively switch any light source filter among the plurality of light source filters in the illumination light path. P; In one embodiment, the plurality of light source filters may include but are not limited to a first excitation light filter, a second red light filter, a second green light filter, a second blue light filter and a second White light filters are not limited in the present invention.

The camera filter module 40 can selectively switch any camera filter among a plurality of camera filters on the imaging light path R to filter the illumination light. In one embodiment, the camera filter module 40 includes a plurality of camera filters and a camera filter switching device. The camera filter switching device can selectively switch any one of the camera filters among the plurality of camera filters. On the imaging optical path R; in one embodiment, the plurality of camera filters include a first excitation light filter, a first red light filter, a first green light filter, a first blue light filter and a first A white light filter.

The objective lens device 50 can selectively switch any one of the plurality of objective lenses on the imaging optical path R. In one embodiment, the individual magnifications of the objective lenses are between 1x and 100x, such as 1x, 4x, 10x, 40x, 100x, etc., which are not limited in the present invention.

The image detection device 60 is coupled to the camera of the camera device 20 to receive and analyze the image of the object to be tested to obtain an image detection result. The image detection device 60 can be, for example, any device including a processor. The processor can be, for example, a central processing unit (CPU), a microprocessor (Microprocessor), a digital signal processor (Digital Signal Processor, DSP), or a processor. The present invention is not limited to programmable controllers, programmable logic devices (Programmable Logic Devices, PLDs) or other similar devices or combinations of these devices. The image detection results may be, for example, the detection of defects in the object W, the type of defects in the object W, the structural size measurement of the object W, the characteristic analysis of the object W, or the characteristics of the object W. Reduction of structural features is not limited in the present invention. The image detection method can be, for example, a traditional image algorithm, or through a neural network (including machine learning). (Machine Learning, Deep Learning, etc.) to perform detection. Since the detection technology is not within the scope of the present invention, the algorithm for performing image detection will not be described redundantly here. The image detection results include fluorescence image detection results or/and monochromatic light image detection results.

The display device 70 is connected to the area scan camera of the camera device 20 to display the image of the object to be measured captured by the area scan camera. Specifically, the display device 70 can be used as a re-inspection device for re-inspection personnel to conduct visual inspection or re-inspection of the object W to be tested through the display device 70; in one embodiment, the integrated optical inspection device 100 of the present invention The line scan camera can first capture the image of the object W to be tested for inspection, and then the area scan camera can capture the image of the object W for re-inspection.

In one embodiment, the optical detection system 100 switches to an excitation light filter through the light source filter module 30 to filter the illumination light on the illumination light path P, so that the excitation light wavelength component of the illumination light passes to the object W to be measured, so that The object W under test generates fluorescence; on the other hand, the optical detection system 100 switches to a fluorescence filter through the camera filter module 40. The fluorescence filter filters the fluorescence on the imaging light path R, allowing the wavelength components of the fluorescence to pass through. , thereby generating a fluorescent image through the camera device 20 .

In one embodiment, the optical detection system 100 switches to the first red light filter, the first green light filter, the first blue light filter or the first white light filter through the light source filter module 30, and filters through the illumination light path P The illumination light allows the red light, green light, blue light or white light wavelength component of the illumination light to pass to the object W to be measured; on the other hand, the optical detection system 100 switches to the second red light filter through the camera filter module 40, The second green light filter, the second blue light filter or the second white light filter is used to filter the illumination light through the imaging light path R, allowing the red light, green light, blue light or white light wavelength component of the illumination light to pass, thereby generating non-fluorescent light. light image.

The following is a detailed description of a specific embodiment of the integrated optical detection device 10 of the present invention. Please refer to "Fig. 2", "Fig. 3", "Fig. 4" and "Fig. 5". The appearance schematic, side schematic, front schematic, and cross-sectional schematic of the integrated optical photography equipment are as shown in the figure.

The integrated optical detection equipment 100 in this embodiment mainly includes an equipment bracket SP, and a light source device 10, a camera device 20, a light source filter module 30, a camera filter module 40, and an objective lens device 50 that are disposed on the equipment bracket SP. , and image detection device 60.

The equipment support SP can be, for example, a support on any inspection platform or processing machine tool, such as a side support, a gantry support, a cantilever support, a vertical support, etc., which are not limited in the present invention. It is worth noting that in the drawings of this embodiment, although it is revealed that the light source device 10, the camera device 20, the light source filter module 30, the camera filter module 40, and the objective lens device 50 are disposed on the same bracket, in practice , the devices can also be respectively installed on different equipment racks, and finally a plurality of equipment racks are arranged in sequence to form the integrated optical detection equipment 100. All changes in the above embodiments are protected by the present invention. range. In this embodiment, the devices are configured from top to bottom: camera device 20, camera filter module 40, light source device 10, light source filter module 30, and objective lens device 50 (light source device 10 and light source The filter module 30 can be configured on the same layer).

The camera device 20 is installed on the equipment bracket SP. The camera device 20 includes a plurality of cameras 21 and a camera switching device 22 for installing the plurality of cameras 21 . The camera switching device 22 switches the camera 21 at the shooting position corresponding to the imaging light path R and at least a first preparation position. In an application embodiment, for example, a line scan camera can be used to perform high-precision inspection, and an area scan camera can be used to perform a re-inspection process, thereby realizing the functions of image inspection and image re-inspection on the same device. In one embodiment, the camera switching device 22 is a linear moving stage carrying a plurality of cameras 21, or any other vehicle, such as an XY stage, a robotic arm, a cylinder, etc., which is not limited in the present invention. In one embodiment, the camera device 20 includes a height adjustment mechanism 23 correspondingly disposed between the linear moving stage (camera switching device 22) and the cameras 21. The height of the cameras 21 can be manually adjusted through the height adjustment mechanism 23. For example, a manual slide is used to adjust the appropriate focal length; in another embodiment, the height adjustment mechanism 23 can also adjust the lifting and lowering of the camera 21 through a servo motor or other similar driving device, such as an automatic slide, which is not used in the present invention. be restricted.

The "imaging light path" mentioned in the present invention refers to the optical axis direction of the camera 21 facing the object W when the camera 21 moves to the shooting position. In addition, in this embodiment, although the imaging light path R between the object W and the camera 21 is a straight line, in other embodiments, the imaging light path R can also be turned through a mirror or a half-reflecting mirror. Changes in the examples all fall within the protection scope of the present invention and are described in advance.

The camera filter module 40 is disposed on the lower side of the equipment bracket SP relative to the camera device 20 . The camera filter module 40 can selectively switch any one of the plurality of camera filters 41 on the imaging light path R to filter the illumination light. The camera filter module 40 includes a plurality of camera filters 41 and a camera filter switching device 42. The camera filter switching device 42 can selectively switch any one of the camera filters 41 on the imaging light path R. . The camera filter switching device 42 switches the camera filter 41 on the imaging optical path R and at least a second preparation position. In one embodiment, the plurality of camera filters 41 include a first UV light filter, a first red light filter, a first green light filter, a first blue light filter and a first white light filter. The switching device 42 can switch among the various filters mentioned above. In one embodiment, the camera filter switching device 42 includes a stepper motor 421 and a bearing turntable 422 provided at the driving end of the stepper motor 421. The bearing turntable 422 has a plurality of setting holes 423 for the camera filters 41 respectively. settings. Specifically, the driving end of the stepper motor is the rotation axis at the output position of the stepper motor 421, and the stepper motor 421 rotates the bearing turntable 422 to move the corresponding filter to the imaging optical path R; in this embodiment , the camera filter 41 directly corresponds to the light entrance hole of the camera 21 when switched to the working position, and the above embodiment is not within the scope of the present invention. In another embodiment, the stepper motor 421 can also be replaced by other types of motors (such as servo motors), which is not limited in the present invention.

The light source device 10 provides illumination light to the object W through the illumination light path P. The "illumination light path" mentioned in the present invention refers to the path along which the output light of the light source device 10 reaches the position of the object W to be measured. In addition, in this embodiment, although the illumination light path P between the object W and the light source device 10 turns in an L shape through the half-reflecting mirror, in other embodiments, the illumination light path P does not block the camera when shooting. The direction of the illumination light path P can also be appropriately adjusted. The changes in the above embodiments all fall within the scope of protection of the present invention and will be described in advance. In this embodiment, the illumination light is provided to the object W in the form of coaxial light. Specifically, the type of light source device 10 includes a light source 11 and at least one half-mirror 13 (as shown in FIG. 5 ) disposed between the imaging direction and the light emission direction of the light source 11 ; in one embodiment, the light source 11 can, for example But it is not limited to include laser light sources, monochromatic light sources or other such light sources. The half mirror 13 converts the light provided by the light source 11 into coaxial light parallel to the shooting direction. In one embodiment, the laser light source may include, but is not limited to, a continuous laser, a pulsed laser, a phase-locked laser, or a pulse pump, etc., which are not limited in the present invention; the monochromatic light The light source may include, for example, but is not limited to, white LED strong light, halogen lamp, fluorescent lamp, RGB lamp, etc. Any lamp that can be used for detection and meets the detection requirements can be set as the light source device 10. In the present invention, Not restricted. In one embodiment, collimated light is formed. A collimating lens is further disposed between the light source 11 and the half-reflecting mirror 13, and the diffused light is converted into collimated light through the collimating lens.

The light source filter module 30 is disposed on the equipment bracket SP corresponding to the light emitting side of the light source device 10 . The light source filter module 30 can selectively switch any light source filter 31 among the plurality of light source filters 31 on the illumination light path P to filter the illumination light. The plurality of light source filters 31 and the light source filter switching device 32 of the light source filter module 30 can selectively switch any one of the plurality of light source filters 31 on the illumination light path P. The light source filter switching device 32 switches the light source filter 31 in the illumination direction of the light source device 10 and at least a third preparation position. In one embodiment, the plurality of light source filters 31 include a second UV light filter, a second red light filter, a second green light filter, a second blue light filter and a second white light filter. The switching device 32 can switch among the various light source filters 31 mentioned above. In one embodiment, the light source filter switching device 32 includes a stepper motor 321 provided on any equipment bracket SP, and a bearing turntable 322 provided on the driving end of the stepper motor 321 . The bearing turntable 322 has a plurality of setting holes 323 for respectively setting the light source filters 31 . Specifically, the driving end of the stepper motor 321 is the rotation axis at the output position of the stepper motor 321. The stepper motor 321 rotates the bearing turntable 322 to move the corresponding light source filter 31 to the shooting direction of the camera 21. . In another embodiment, the stepper motor 321 can also be replaced by other types of motors (such as servo motors), which is not limited in the present invention.

In one embodiment, the optical detection system 100 includes a dark-field ring light 80 disposed on the equipment support SP. The dark-field ring light 80 is ring-disposed on the outer peripheral side of the object W to be tested. The dark-field ring light 80 enhances the edge of the microstructure. brightness, increasing contrast. In one embodiment, the dark field ring light 80 is disposed on the periphery of the object W in a horizontal and radial manner, and the illumination direction is substantially parallel to the surface of the object W, so as to form a sharp edge display effect.

The objective lens device 50 can selectively switch any objective lens 51 among the plurality of objective lenses 51 on the imaging optical path R. The objective lens device 50 is disposed on the equipment bracket SP on the lower side of the light source device 10 and corresponds to the object to be measured W. Set the upper side of the platform. The objective lens device 50 includes a plurality of objective lenses 51 and a rotating disk 52 for setting the plurality of objective lenses 51. The rotating disk 52 is provided with a plurality of setting holes 521 for setting the objective lenses 51 respectively. The objective lens device 50 switches the objective lens 51 on the imaging optical path R of the camera 21 and at least a fourth preliminary position. In one embodiment, the respective magnifications of the plurality of objective lenses 51 are between 1x and 100x. Specifically, the objective lens 51 can be, for example, a 1x objective lens, a 4x objective lens, a 10x objective lens, a 40x objective lens, a 100x objective lens, etc. The number of the objective lenses 51 and the magnification of the objective lens 51 are not within the scope of the present invention, and can be determined according to actual requirements. Requirements change. In one embodiment, the objective lens device 50 can be a rotating disk 52 carrying a plurality of objective lenses 51. The rotating disk 52 can switch the objective lenses 51 to adjust the magnification through manual rotation or automatic rotation, which is not limited in the present invention. In the embodiment of automatic rotation, the rotation of the rotating disk 52 can be controlled by a stepper motor, a servo motor, or other similar devices in conjunction with a linkage mechanism (such as a gear).

In order to realize the auto-focus function, in one embodiment, the optical detection system 100 includes a focus module 53 provided on the equipment support SP, and a mobile stage 54 provided on the equipment support SP to control the lifting and lowering of the objective lens device 50 . The moving stage 54 adjusts the distance between the objective lens 51 and the object W on the imaging optical path R according to the signal from the focusing module 53 . In one embodiment, the movable stage 54 is a linear stage. In other embodiments, the movable stage 54 can realize the function of adjusting the lifting and lowering of the objective lens device 50 through the cooperation of gears and racks. The implementation of the movable stage 54 The method can be changed according to actual needs and is not limited in the present invention.

In this embodiment, switching between various devices (such as cameras and filters) can be accomplished by providing control instructions to linear motors, stepper motors, servo motors, etc. through computers, servers, or programmable logic controllers (PLC). It is executed by a robot arm, cylinder, etc., and the processor performs calculations and then performs corresponding switching according to the user's control instructions (for example, through a human-machine interface) or according to a pre-programmed program.

Regarding the camera switching method of the camera device 20, please refer to "Figure 6" and "Figure 7", which are schematic diagrams (1) and (2) of the camera switching actions, as shown in the figures.

The camera device 20 described in this embodiment mainly includes two types of cameras. Depending on the number of cameras, the number of stations where the camera switching device 22 stops will be adjusted accordingly. This part can be confirmed by the feedback motor rotation stroke or the encoder, and is not limited in the present invention. When the linear moving stage (as shown in FIG. 2 ) of the camera switching device 22 that jointly carries the first camera 21A (for example, a line scan camera) and the second camera 21B (for example, an area scan camera) is at position A, the first The camera 21A is aimed at the shooting position A1 (the first end of the imaging optical path R), and the second camera 21B is aimed at the first preparation position A2; when the camera switching device 22 receives the switching instruction, the camera switching device 22 22 When the linear moving stage is moved to position B, the second camera 21B is aimed at the shooting position A1, and the first camera 21A is aimed at the first preparation position A3.

Regarding the filter switching method of the camera filter module 40, please refer to "Figure 8", which is a schematic diagram of the switching action of the camera filter module, as shown in the figure.

In this embodiment, the camera filter module 40 includes five camera-side filters, namely a first UV light filter 41A, a first red light filter 41B, a first green light filter 41C, and a first blue light filter. filter 41D and the first white light filter 41E. In the figure, the first UV light filter 41A is aligned to the shooting position B1 (imaging light path R), the first red light filter 41B, the first green light filter 41C, the first blue light filter 41D, and The first white light filters 41E are respectively aligned to the second preparation positions B2-B5. When the holding turntable 422 rotates (for example, in the direction pointed by arrow Ar1), the position of each filter will switch. For example, if the movement switching instruction is one stroke, the first UV light filter 41A will move from the shooting position B1 to the second In the preparation position B2, the first red light filter 41B will move from the second preparation position B2 to the second preparation position B3, the first green light filter 41C will move from the second preparation position B3 to the second preparation position B4, and the first blue light filter 41C will move from the second preparation position B3 to the second preparation position B4. The filter 41D will move from the second preparation position B4 to the second preparation position B5, and the first white light filter 41E will move from the second preparation position B5 to the shooting position B1; in the case of two strokes, it will move by two widths. And so on. In addition to the above-mentioned embodiments, the rotation direction of the bearing turntable 422 may also be the opposite direction to the arrow Ar1, which is not limited in the present invention.

Regarding the filter switching method of the light source filter module 30, please refer to "Figure 9", which is a schematic diagram of the switching action of the light source filter module, as shown in the figure.

In this embodiment, the light source filter module 30 includes five light-incidence filters, namely a second UV filter 31A, a second red light filter 31B, a second green light filter 31C, and a second blue light filter. filter 31D, and the second white light filter 31E. In the figure, the second UV filter 31A is aligned at the shooting position C1, the second red light filter 31B, the second green light filter 31C, the second blue light filter 31D, and the second white light filter 31E. Then they are respectively aligned to the third preliminary positions C2-C5. When the carrying turntable 322 rotates (for example, the direction pointed by arrow Ar2), the position of each filter will be switched. For example, if the movement switching instruction is one stroke, the third The two UV filters 31A will move from the shooting position C1 to the third preparation position C2, the second red light filter 31B will move from the third preparation position C2 to the third preparation position C3, and the second green light filter 31C will move from the third preparation position C2 to the third preparation position C3. The position C3 moves to the third preparation position C4, the second blue light filter 31D moves from the third preparation position C4 to the third preparation position C5, and the second white light filter 31E moves from the third preparation position C5 to the shooting direction C1; in In the case of two strokes, it will move by two spans, and so on. In addition to the above-mentioned embodiments, the rotation direction of the bearing turntable 322 may also be the opposite direction to the arrow Ar2, which is not limited in the present invention.

Regarding the objective lens switching method of the objective lens device 50, please refer to "Fig. 10", which is a schematic diagram of the switching operation of the objective lens, as shown in the figure.

In this embodiment, the objective lens device 50 includes five types of objective lenses, namely a 1x objective lens 51A, a 4x objective lens 51B, a 10x objective lens 51C, a 40x objective lens 51D, and a 100x objective lens 51E. In the figure, the 4x objective lens 51B is aligned at the shooting position D1, and the 1x objective lens 51A, 10x objective lens 51C, 40x objective lens 51D, and 100x objective lens 51E are aligned at the fourth preparation positions D5 and D2-D4 respectively. When the rotating disk 52 rotates (for example, in the direction pointed by arrow Ar3), the position of each objective lens will switch. For example, when the rotating disk 52 rotates one stroke counterclockwise, the 4x objective lens 51B will move from the shooting position D1 to the fourth preparation position D2. on, the 10x objective lens 51C will move from the fourth preparation position D2 to the fourth preparation position D3, the 40x objective lens 51D will move from the fourth preparation position D3 to the fourth preparation position D4, and the 100x objective lens 51E will move from the fourth preparation position D4 to the fourth preparation position. At position D5, the 1x objective lens 51A moves from the fourth preliminary position D5 to the shooting direction D1; in the case of two strokes, it moves by two widths, and so on. In addition to the above-mentioned embodiments, the rotation direction of the bearing turntable 52 may also be the opposite direction to the arrow Ar3, which is not limited in the present invention.

To sum up, the present invention integrates three detection platforms: appearance detection, fluorescence detection, and re-inspection detection, which can effectively reduce the size of the equipment. In addition, the present invention supports image detection at different wavelengths, fluorescence detection at different wavelengths, and supports an autofocus function. The objective lens of the present invention has high magnification selectivity and breaks through the sub-micron limit. It has superior effects compared to conventional technologies.

The present invention has been described in detail above. However, what is described above is only one of the preferred embodiments of the present invention. It should not be used to limit the scope of the present invention, that is, any application based on the patent scope of the present invention shall be equal. Changes and modifications should still fall within the scope of the patent of the present invention.

100: Integrated optical inspection equipment W: object to be tested 10:Light source device 11:Light source 13: Half mirror 20:Camera rig 21:Camera 21A:First camera 21B: Second camera 22:Camera switching device 23:Height adjustment mechanism A: Location B: Location A1: Shooting location A2-A3: first ready position 30:Light source filter module 31:Light source filter 31A: Second UV filter 31B: Second red light filter 31C: Second green light filter 31D: Second blue light filter 31E: Second white light filter 32:Light source filter switching device 321: Stepper motor 322: Carrying turntable 323: Setting hole C1: Shooting location C2-C5: The third ready position Ar2: arrow 40:Camera filter module 41:Camera filter 41A: First excitation filter 41B: The first red light filter 41C: The first green light filter 41D: The first blue light filter 41E: The first white light filter 42:Camera filter switching device 421: Stepper motor 422: Carrying turntable 423: Setting hole B1: Shooting location B2-B5: Second preparation position 50:Objective lens device 51:Objective lens 51A:1x objective lens 51B:4x objective lens 51C:10x objective lens 51D:40x objective lens 51E:100x objective lens 52: Rotating disk 521: Setting hole 53:Focus module 54:Mobile carrier D1: Shooting location D2-D5: The fourth reserve position 60:Image detection device 70:Display device 80: Dark field ring light SP: Equipment stand R: Imaging light path P: Illumination light path

Figure 1 is a block diagram of the integrated optical detection equipment of the present invention.

Figure 2 is a schematic diagram of the appearance of the integrated optical detection equipment of the present invention.

Figure 3 is a schematic side view of the integrated optical detection equipment of the present invention.

Figure 4 is a schematic front view of the integrated optical detection equipment of the present invention.

Figure 5 is a schematic cross-sectional view of the integrated optical detection equipment of the present invention.

Figure 6 is a schematic diagram of the camera switching action (1).

Figure 7 is a schematic diagram of the camera switching action (2).

Figure 8 is a schematic diagram of the switching action of the camera filter module.

Figure 9 is a schematic diagram of the switching action of the light source filter module.

Figure 10 is a schematic diagram of the switching action of the objective lens.

100: Integrated optical inspection equipment

W: object to be tested

11:Light source

20:Camera rig

30:Light source filter module

40:Camera filter module

50:Objective lens device

60:Image detection device

70:Display device

R: Imaging light path

P: Illumination light path

Claims (15)

An integrated optical detection equipment, including: a light source device that provides an illumination light to an object to be measured through an illumination light path; a camera device that can selectively switch any one of a plurality of cameras to an imaging light On the road, the object under test is photographed to generate an image of the object under test; a light source filter module can selectively switch any one of the light source filters among a plurality of light source filters on the illumination light path to filter the illumination. light; a camera filter module that can selectively switch any one of a plurality of camera filters on the imaging light path to filter the illumination light; and an image detection device coupled to the camera to Receive and analyze the image of the object to be tested to obtain an image detection result; wherein the image detection result includes a fluorescence image detection result or/and a monochromatic light image detection result. The integrated optical inspection equipment of claim 1, wherein the object to be tested includes a semiconductor device, a semiconductor wafer, a semiconductor wafer, a circuit board, a display panel or other objects containing organic matter. The integrated optical detection equipment as claimed in claim 1, wherein the light source device includes a laser light source that provides the illumination light to the patient to be treated through the illumination light path. On the measuring object. The integrated optical inspection equipment as claimed in claim 1, wherein the cameras include line scan cameras and/or area scan cameras. The integrated optical inspection equipment as described in claim 4 further includes: a linear moving stage for carrying and moving the camera device; and a display device connected to the surface scanning camera to display the results of the surface scanning camera. The captured image of the object under test. The integrated optical inspection equipment of claim 5, wherein the camera device includes a height adjustment mechanism correspondingly disposed between the linear moving stage and the cameras. Integrated optical detection equipment as claimed in claim 1, wherein the light source filter module includes a light source filter switching device that can selectively switch any one of the light source filters among a plurality of the light source filters in the illumination light. On the way. The integrated optical detection equipment as claimed in claim 1, wherein the camera filter module includes a camera filter switching device that can selectively switch any one of the camera filters on the imaging optical path. . The integrated optical detection equipment as described in claim 7 or 8, wherein the light source filter includes an excitation light filter that filters the illumination on the illumination light path. Bright light allows the excitation light wavelength component of the illumination light to pass to the object to be measured, causing the object to be measured to produce fluorescence; and wherein the camera filter includes a fluorescence filter that filters the fluorescence on the imaging light path , allowing the wavelength component of the fluorescent light to pass, whereby the camera device generates a fluorescent image. The integrated optical detection device as claimed in claim 7 or 8, wherein the light source filter includes a first red light filter, a first green light filter, a first blue light filter or a first A white light filter filters the illumination light through the illumination light path, allowing the red light, green light, blue light or white light wavelength component of the illumination light to pass to the object to be measured; wherein the camera filter includes a second red light filter , a second green light filter, a second blue light filter or a second white light filter, filtering the illumination light through the imaging light path, allowing the red light, green light, blue light or white light wavelength component of the illumination light to pass, This produces a non-fluorescent image. The integrated optical detection equipment as claimed in claim 1, wherein the light source device includes a monochromatic light source that provides the illumination light to the object to be measured through the illumination light path. The integrated optical detection equipment as described in claim 1 further includes an objective lens device that can selectively switch any one of the plurality of objective lenses on the imaging optical path. The integrated optical inspection equipment as described in claim 12 further includes: a focusing module; and a mobile stage that adjusts the relationship between the objective lens and the object to be measured on the imaging optical path according to the signal of the focusing module. distance between. The integrated optical detection equipment as claimed in claim 10, wherein the individual magnifications of the objective lenses are between 1x and 100x. The integrated optical detection equipment as described in claim 1 further includes: a dark field annular light, which is arranged around the outer circumference of the object to be tested.

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