TWI809510B - Comb filter with multi-layer structure and miniature spectral detecting device using thereof - Google Patents

Abstract

A comb filter based on a multilayer structure optical film technology and a miniature spectrum measuring device using the comb filter are provided in the present disclosure. The device includes a controller, a set of multi-light source systems generating specific different spectral distributions, and the optical receiver consisting of a set of optical signal converters. The light source system emits light of different spectrums to irradiate the target object to be measured, and the light receiver receives the light signal reflected by the object modulated by the comb filter. The present invention receives the light signal converters under different spectrum irradiation conditions. After the signal data are processed, the spectral response characteristics of the object to be measured are reconstructed to achieve the purpose of spectral response measurement.

Description

Comb filter with film structure and miniature spectroscopic measuring device using it

The invention relates to a comb filter with a film layer structure and a micro-spectrum measuring device using it, in particular to a method of reconstructing the spectrum of the object to be measured after spectral modulation processing by using the object to transmit or reflect light without spectral separation processing Responsive miniature spectroscopic measurement device.

Most of the traditional spectral distribution measurement devices need to perform spectral separation processing on the light to be measured, often requiring complex grating spectroscopic devices, but in this way, the cost of the measurement device is high, the structure is complicated, and the installation accuracy is high. Generally, it is only suitable for the laboratory environment, which is inconvenient. to carry.

Although the Fourier spectrometer does not require spectral separation processing, it requires sophisticated optical interference devices, so it is only suitable for laboratory environments.

In recent years, some compact spectrometers based on thin-film interference filter technology have been proposed one after another, but they often adopt the design of a single bandpass filter, so a large number of filters and detector groups are required to achieve spectral measurement. Increased cost and manufacturing difficulty.

Therefore, how to provide a low-cost miniature spectrum measuring device has become one of the important issues to be solved by this project.

The technical problem to be solved by the present invention is to provide a A kind of miniature spectrum measurement device with a comb-shaped filter of film layer structure, comprising: a controller; a light source provider, including a plurality of light sources, the light source provider is electrically connected to the controller, and the light source provides The device provides a plurality of light sources with different spectral distributions; a light receiver includes a plurality of film layer structures and a plurality of signal converters, and the plurality of signal converters are electrically connected to the controller, and each of the film layer structures On each of the signal converters; wherein the light source provider sends a light to an object, the light receiver receives a light transmitted or reflected from the object, and the light receiver utilizes the The optical thin film with multilayer structure is modulated to obtain multiple optical signals with different spectral distributions, and the optical receiver provides the multiple optical signals to the controller.

The present invention also discloses a comb-shaped optical filter, which includes: a plurality of film layer structures, each film layer structure includes: an H-shaped structure film; and an L-shaped structure film, and the H-shaped structure film is arranged on the One side of the L-shaped structure membrane, wherein the H-type structure membrane includes TiO ₂ , and the L-type structure membrane includes SiO ₂ .

One of the beneficial effects of the present invention is that the miniature spectrum measurement device provided by the present invention can use a specific light source provider and a limited number of light receivers to use the light reflected/transmitted by the object to be measured to pass through the covered light receivers. The received signal is modulated by the film layer structure to reconstruct the spectral response distribution of the object. The miniature spectrum measuring device of the present invention can be used for detection of an object to be measured or a specific light source, and can also improve detection speed and accuracy.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.

1: Miniature spectral measuring device

10: Shell

11: Controller

12: Light source provider

13: Optical receiver group

14: Storage module

15: Communication module

OB: object

131: Comb filter with film layer structure

132:Signal converter

9: Server

FH: H-type structure membrane

FL: L-shaped structure membrane

131A: Film structure

CAV: cavity film

SB: Substrate

Fig. 1 is a schematic diagram of a micro-spectroscopy measuring device according to a first embodiment of the present invention.

Fig. 2 is another schematic view of the miniature spectrum measuring device according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram of the spectrum of light sources with different wavelengths provided by the light source provider in FIG. 1 .

Fig. 4 is a schematic diagram of the multi-layer film realization of the film-layer structure comb filter of the present invention.

FIG. 5 and FIG. 6 are transmission spectrum response diagrams of the comb filter with film structure used in the first embodiment of the present invention, and there are eight filters in total.

Fig. 7 is a schematic diagram of the spectrum of the single-cavity optical film filter of the present invention.

Fig. 8 is a schematic diagram of the spectrum of the comb-shaped filter with a film layer structure of the present invention, and the number of peaks in the comb-shaped spectrum is determined by the number of cavities.

FIG. 9 is a case of spectral reconstruction implemented by simulation in the present invention. The solid line is the initial spectral response of the object, and the dotted line is the spectral response after the optical receiver of the present invention receives signals for reconstruction and measurement. The two are basically consistent, which verifies the effectiveness of the present invention for object spectral response measurement.

The implementation of the "miniature spectrometer measuring device" disclosed in the present invention is described below through specific specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[first embodiment]

Please refer to FIG. 1 , FIG. 2 , FIG. 3 and FIG. 4 . FIG. 1 is a schematic diagram of a micro-spectroscopy device according to a first embodiment of the present invention. Fig. 2 is another of the miniature spectrum measuring device of the first embodiment of the present invention schematic diagram. FIG. 3 is a schematic diagram of the light source provider in FIG. 1 providing light sources with different spectral distributions. FIG. 4 is a schematic structural view of the multi-layer structure film comb filter on the optical receiver group 13 of the embodiment.

The miniature spectrum measurement device 1 includes a controller 11 , a light source provider 12 , a light receiver group 13 , a storage module 14 , a communication module 15 and a housing 10 .

The controller 11 is electrically connected to the light source provider 12 , the light receiver group 13 , the storage module 14 and the communication module 15 . In this embodiment, the controller 11 , the light source provider 12 , the light receiver group 13 , the storage module 14 , and the communication module 15 are arranged in the casing 10 .

The light source provider 12 includes a plurality of spectrally distributed light sources. In this embodiment, the multiple light sources of the light source provider 12 may be light sources with different spectral distributions or the same light source undergoes spectral modulation through different filters. For example, the light source provider 12 includes six light sources, which are obtained by setting six different optical filters in front of the same single broadband light source for spectral modulation.

As shown in FIG. 3 , in this embodiment, the six light sources are obtained by spectrally modulating the same white light source through six different filters. In this embodiment, the filter is made of silicon dioxide (SiO ₂ ) film material, but the thickness of the silicon dioxide (SiO ₂ ) film in front of each light source is different, so each light source is matched with The respective filters provide six different spectral distributions of light.

The light receiver group 13 includes a group of comb filters 131 with a film structure and a plurality of signal converters 132 . A plurality of signal converters 132 are disposed under the plurality of film-structured comb filters 131 respectively. The optical enhancement response of the film-structured comb filter 131 is a comb-shaped multi-peak transmissive spectrum signal. The multiple signal converters 132 of the optical receiver group 13 are electrically connected to the controller 11 .

The light received by each optical signal converter 132 in the optical receiver group 13 is spectrally modulated by comb filters 131 with different film layer structures. In this embodiment, each optical signal converter 132 in the optical receiver group 13 has a film layer structure comb filter 131 with a specific spectral response (its transmission spectrum is shown in FIG. 5 and FIG. 6 ). In this embodiment, the light receiver group 13 includes 8 light signal converter. That is to say, 8 optical signal converters with 8 film structures 131A can be used to modulate the optical signal from the object OB and received by the optical signal converter, and obtain the object OB at 400 in FIG. 2 through a reconstruction algorithm. A spectral restoration information for the -800nm spectral range. In this embodiment, six light sources are turned on respectively. That is, each time a light source is turned on, the light receiver group 13 can receive 8 different light signals due to the different spectral responses of the 8 film structures 131A. When multiple light sources are turned on sequentially, the light receiver group 13 receives a total of 48 light signals, and reconstructs the spectral response of the object to be measured by using the 48 light signal data through a reconstruction algorithm.

That is, as shown in FIG. 2 , the spectral response of the object OB itself is modulated by the ambient light source to have a spectrum. In this embodiment, the miniature spectrum measuring device 1 provides light of a predetermined wavelength or a predetermined spectrum to the object OB, and these light rays are absorbed, transmitted or reflected by the object OB, and then the light of the miniature spectrum measuring device 1 Receiver group 13 receives. The light receiver group 13 can use the film-structured comb filter 131 to perform spectral modulation to obtain multiple optical signals containing different spectral distribution information. After that, the light signal is sent to the controller 11 . Furthermore, the controller 11 can store a plurality of spectral frequency signals in the storage module 14 . The controller 11 then transmits a plurality of spectral frequency signals to the server 9 through the communication module 15 .

The controller 11 of the miniature spectrum measurement device 1 can send multiple optical signals to the server 9 . The server 9 or the controller 11 can analyze and process the received optical signal according to a spectral reconstruction algorithm to reconstruct the initial spectral response of the object OB. In this embodiment, the analysis program includes a least square algorithm (Least square algorithm), an ikhonov regularization algorithm (ikhonov regularization) or a deep learning algorithm (Deep Learning). Users can use other machine learning algorithms according to actual needs, which is not limited in the present invention.

Please refer to FIG. 4 , the film layer structure comb filter 131 is combined in a stacked manner by a multilayer structure film 131A of multiple reflectors and a plurality of cavity films CAV. The film structure 131A adopts an H-shaped structure film FH and An L-shaped structure film FL constitutes a mirror surface. In this embodiment, the H-type structure film FH includes titanium dioxide (TiO ₂ ). The L-shaped structure film FL includes silicon dioxide (SiO ₂ ), the cavity film CAV is composed of a single-layer TIO ₂ film, and the cavity film CAV is sandwiched between two sets of multi-layer structure films 131A.

In addition, a plurality of the film structure 131A and the cavity thin film CAV are combined in a stacked manner to form a film structure comb filter 131, which is arranged on a substrate SB. In this embodiment, the structural thicknesses of the plurality of cavity membranes CAV are the same. In this embodiment, the substrate SB is the signal converter 132 , that is, the optical signal after the light is spectrally modulated by the film structure comb filter 131 is directly received by the signal converter 132 . In addition, the number of the film structure 131A contained in the film structure comb filter 131 included in each light receiver in the light receiver group 13 can be different, and the thickness of the cavity film CAV film can also be adjusted according to actual needs. .

In this embodiment, the film-structured comb filter 131 is a comb-shaped band pass filter that allows light in multiple frequency bands to pass through. In addition, the number of cavity films CAV included in the comb filter 131 with a film layer structure can determine the number of peaks of the comb bandpass filter.

Fig. 5 and Fig. 6 are transmission spectrum response diagrams of the comb filter with film layer structure in this embodiment where the present invention is implemented. By adjusting the film thickness and the number of cavity film CAVs, there are 8 different filter spectra, which represent the different spectral responses of the 8 photosensors of the photoreceptor through the filters.

Please refer to Fig. 7, the light passes through the cavity film CAV of the single cavity structure film, that is, a cavity film CAV is set between the multi-layer structure film 131A of the two reflection mirrors of the embodiment of the present invention, and the light can be obtained by passing through this structure Bandpass transmitted light spectral signal with a single peak.

Please refer to FIG. 8 , which is a transmission spectrum response diagram of a comb-shaped filter with a film structure formed by superimposing multiple film structures 131A and cavity films CAV. There are 5 cavity film CAVs in this filter, so there are 5 a band-pass peak.

The multi-layer structure film 131A of this embodiment may be a multi-layer H-type structure film FH and a multi-layer L-type structure film FL to be stacked to complete the lens design of the film structure 131A. In other embodiments, the multi-layer structure film 131A can also be designed by a single-layer metal reflective film.

The multi-layer H-shaped structure film FH and the multi-layer L-shaped structure film FL can be combined with multiple cavity films CAV to complete the film layer structure comb filter 131 .

Please refer to FIG. 9 . FIG. 9 is a diagram of the spectrum distribution of an object actually measured by the miniature spectrum measuring device according to the embodiment of the present invention.

Wherein, the solid line is the spectrum of the object, and the dotted line is the spectrum distribution diagram measured by the miniature spectrum measuring device in FIG. 1 of the present invention.

The controller 11 is a central processing unit (CPU), an application specific integrated circuit (ASIC), a graphics processing unit (GPU) or a microprocessor (MCU).

The storage module 14 is a flash memory, a read-only memory, a programmable read-only memory, an electrically rewritable read-only memory, an erasable programmable read-only memory or an electronically programmable Erase configurable read-only memory.

The communication module 15 includes a wired communication unit (not shown) and a wireless communication unit (not shown). The wired communication unit (not shown) can also be independently configured to communicate with the server 9 to receive control signals from the server 9 or data in the database of the server 9 . When the communication module 15 is a wireless communication unit, the communication module 15 can be a Wi-Fi communication unit, a Bluetooth communication unit, a Zigbee communication unit (Zigbee), a LoRa communication unit, a Sigfox communication unit or A NB-IoT communication unit. The server 9 can be a local server or a remote server.

[Advantageous Effects of Embodiment]

One of the beneficial effects of the present invention is that the miniature spectrum measurement device provided by the present invention can use a specific light source provider and a limited number of light receivers to use the light reflected/transmitted by the object to be measured to pass through the covered light receivers. The received signal is modulated by the film layer structure to reconstruct the spectral response distribution of the object. The miniature spectrum measuring device of the present invention can be used for detection of an object to be measured or a specific light source, and can also improve detection speed and accuracy.

The content disclosed above is only the preferred feasible embodiment of the present invention, and is not intended to The scope of patent application of the present invention is limited, so all equivalent technical changes made by using the description and drawings of the present invention are included in the scope of patent application of the present invention.

1: Miniature spectral measuring device 10: Housing 11: Controller 12: Light source provider 13: Optical receiver group 14: Storage module 15: Communication module OB: object 131: Comb filter 132: Optical signal converter 9: Server

Claims (9)

A micro-spectrum measurement device with a film layer structure, comprising: a controller; a light source provider, including at least one light source, the light source provider is electrically connected to the controller, and the light source provider provides a plurality of different spectra Distributed light; a light receiver, including a plurality of film structures and a plurality of signal converters, the plurality of signal converters are electrically connected to the controller, each of the film structures in each of the signal On the converter; wherein, the light source provider sends the light to an object, and the light receiver uses the film layer structure to modulate the light transmitted or reflected from the object to obtain a plurality of optical signals with different spectral distributions , the optical receiver provides the plurality of optical signals to the controller. The miniature spectrum measurement device according to claim 1, wherein a group of spectrum modulation films are arranged in front of the at least one light source of the light source provider, for modulating the light source to generate multiple light rays with different spectral distributions . The miniature spectrum measurement device as claimed in claim 2, wherein the spectrum modulation film is composed of a plurality of filters with different thicknesses, and the light source is modulated accordingly to generate the light with a plurality of different spectral distributions. The miniature spectrum measurement device according to claim 1, wherein the light source provider includes a plurality of light sources, and each light source generates the light with a different spectral distribution. The miniature spectroscopic measurement device as claimed in claim 1 to claim 4, wherein each said film layer structure includes at least two multi-layer structure films that produce reflective mirror effects and a sandwich between said at least two film layer structures Each of the multi-layer structural films includes at least one H-shaped structural film and one L-shaped structural film, and the L-shaped structural film is arranged on one side of the H-shaped structural film. The miniature spectrometer measuring device according to claim 5, wherein the H-type structure film includes TiO ₂ , the L-type structure film includes SiO ₂ , and the cavity structure film includes TiO ₂ or SiO ₂ . The miniature spectrum measuring device according to claim 5, further comprising a casing, the light source provider and the light receiver are arranged in the casing. The miniature spectrum measurement device as described in claim 5, further includes a communication module, electrically connected to the controller, the controller communicates with a server through the communication module, and the controller sends the A plurality of optical signals are sent to the server, and the server or the controller generates a spectrum restoration information according to an analysis program and the plurality of optical signals, and the analysis program includes a least square algorithm , a Tykhonov regularization algorithm or a deep learning algorithm. A comb-shaped optical filter, comprising: a plurality of film-layer structures, each film-layer structure comprising: an H-shaped structure film; an L-shaped structure film; and a cavity film, arranged between the two film-layer structures Between, wherein, the H-type structure film includes TiO ₂ , the L-type structure film includes SiO ₂ , and the cavity film includes TiO ₂ or SiO ₂ .

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