CN108761300B - System and method for rapidly testing external quantum efficiency of solar cell based on frequency division multiplexing - Google Patents

System and method for rapidly testing external quantum efficiency of solar cell based on frequency division multiplexing Download PDF

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CN108761300B
CN108761300B CN201810651960.2A CN201810651960A CN108761300B CN 108761300 B CN108761300 B CN 108761300B CN 201810651960 A CN201810651960 A CN 201810651960A CN 108761300 B CN108761300 B CN 108761300B
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solar cell
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CN108761300A (en
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王赟
金怀洲
金尚忠
孟彦龙
陈亮
王洪
黄强
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China Jiliang University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract

The invention discloses a system and a method for rapidly testing external quantum efficiency of a solar cell based on frequency division multiplexing, and relates to the technical field of solar cell testing devices and methods. The system comprises a light source, a filter wheel, a slit, a dispersion unit, a spatial light modulation unit, a mixing and focusing optical device, a standard silicon detector, signal acquisition equipment and a PC (personal computer). The light source emits white light, the white light is filtered by the filter wheel and dispersed by the dispersion unit to form a plurality of dispersion light beams with different wavelengths, then the dispersion light beams irradiate on the space modulation unit to be modulated based on a frequency division multiplexing method, finally the dispersion modulation light is polymerized back to a multi-color light beam to irradiate on a sample to be detected, and the acquired photocurrent signal is subjected to inverse Fourier transform demodulation processing to obtain the spectral response of the battery. Compared with the traditional monochromatic measurement system method, the method greatly improves the detection speed, and has the characteristics of high signal-to-noise ratio, rapidness, accuracy, economy, high efficiency, stability and high repeatability.

Description

System and method for rapidly testing external quantum efficiency of solar cell based on frequency division multiplexing
Technical Field
The invention relates to the technical field of solar cell testing devices and methods, in particular to a system and a method for rapidly testing the external quantum efficiency of a solar cell based on frequency division multiplexing.
Background
Measuring the external quantum efficiency of a solar cell is a standard method for gaining insight into its optoelectronic properties. Quantum efficiency, also known as spectral response, refers to the ratio of the number of photons generated to the number of photons incident. Quantum efficiencies are divided into external quantum efficiencies and internal quantum efficiencies, where external quantum efficiencies do not take reflections into account. The quantum efficiency can clearly reflect the response distribution of the solar cell under each wavelength, and the photo-generated current of the solar cell can be calculated according to the test value. In practical test application, a test system irradiates pulse monochromatic light with different wavelengths onto a sample, a solar cell generates pulse current, and external quantum efficiency is obtained by calculating the ratio of the pulse current to the number of photons of the pulse light. However, the traditional method adopting the monochromator usually needs several minutes to finish single measurement, has low measurement speed and high cost, and is not suitable for the industrial production environment of a fast production line.
There have been some recent alternatives to overcome the slowness of speed measurement of the traditional monochromatic method, one is to use a series of modulated laser light sources instead of monochromators, although this does enable extremely fast measurements, but the external quantum efficiency spectrum can only be determined at up to five different wavelengths given by the laser wavelength used, and therefore this cannot be compared with standard monochromatic measurements, which typically include tens of points in the visible and near infrared wavelength ranges, in terms of accuracy. Another is to use fourier transform optical current spectroscopy by modulating white light from a halogen source by a michelson interferometer, with the result that different wavelengths of light in the source are modulated at different frequencies. When a film or solar cell is illuminated with such modulated light, the spectral response of the sample can be extracted by inverse fourier transformation of the photocurrent, since the photocurrent is modulated in the same way as the incident light. However, this method is inconvenient for its popularity because of the mechanical instability of the interferometer and the fact that the interferometer is a relatively bulky, expensive component. Therefore, the current method generally has the defects of low measurement speed, high cost, low measurement precision, poor stability and the like.
Disclosure of Invention
The invention aims to solve the technical problem of providing a frequency division multiplexing-based solar cell external quantum efficiency rapid test system and method with high measurement speed, high measurement precision and high repeatability.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows: a solar cell external quantum efficiency rapid test system based on frequency division multiplexing is characterized by comprising a light source, a filter wheel, a slit, a dispersion unit, a spatial light modulation unit, a mixing and focusing light device, a standard silicon detector, signal acquisition equipment and a PC (personal computer); the filter wheel is arranged in front of the light source and is provided with a plurality of optical cut-off filters; the slit is arranged behind the filter wheel, the dispersion unit is positioned behind the slit, the dispersed light generated by the dispersion unit is spatially modulated by the spatial light modulation unit and then reflects two beams of light beams, one beam of main light beam passes through the first mixing and focusing optical device and then is aligned with a sample to be detected, the other beam of secondary light beam passes through the second mixing and focusing optical device and then is aligned with the standard silicon detector, the light intensity of the two beams of light beams is the same as the modulation mode, and the signal acquisition equipment is connected with the sample to be detected, the standard silicon detector and the PC, is used for acquiring photocurrent signals generated by the sample to be detected and the standard silicon detector, preprocessing the signals and transmitting the signals to the PC.
The further technical scheme is as follows: the light source adopts a halogen light source or an LED light source or a xenon light source.
The further technical scheme is as follows: the dispersion unit adopts a diffraction grating.
The further technical scheme is as follows: the spatial light modulation unit adopts a digital micro-mirror device and is driven and controlled by the PC.
The invention also discloses a method for rapidly testing the external quantum efficiency of the solar cell based on frequency division multiplexing, which is characterized by comprising the following steps of:
1) the light source emits white light, the white light is filtered by the filter on the filter wheel and then forms a beam of polychromatic light through the slit, and then the beam of polychromatic light irradiates the dispersion unit to generate a plurality of dispersed light beams with different wavelengths;
2) the scattered light beams generated by the dispersion unit irradiate the spatial light modulation unit, the micromirror array on the spatial light modulation unit corresponds to different incident wavelengths in a row unit, the intensity of light with different wavelengths corresponding to a series of rows is modulated simultaneously by controlling the on or off of the micromirrors on the device according to a projected image transmitted by a PC, and the light with different wavelengths corresponds to different modulation frequencies to simulate 1 frequency multiplication, 2 frequency multiplication and 3 frequency multiplication of Fourier transform, …, until the light intensity generated by n frequency multiplication is modulated; the projected image of each pixel in each column is a group of bitmap images representing different sine wave patterns which are sequenced according to time, the images are firstly calculated by a PC according to an image generation algorithm and then are continuously projected onto a digital micro-mirror device through a controller on the PC;
3) the two groups of light beams simultaneously pass through a first mixing and focusing optical device and a second mixing and focusing optical device to form two beams of multi-color modulated light which are respectively irradiated on a sample to be detected and a standard silicon detector, the collected light current signals of the solar cell to be detected and the reference standard silicon detector are transmitted to a PC (personal computer), and the PC performs inverse Fourier transform demodulation on the two light current signals and then divides the two light current signals to calculate the spectral response and the external quantum efficiency of the solar cell to be detected;
4) rotating the filter wheel to change the wavelength range of the white light in the step 1), and repeating the previous steps 1) to 3) to calculate the external quantum efficiency of the wavelength range of the optical filter; and calculating the external quantum efficiency under all the optical filters on the filter wheel by analogy, and finally splicing the measurement results to form the external quantum efficiency result of the solar cell under the target wavelength range.
The further technical scheme is as follows: the spatial light modulation unit in the step 2) uses a digital micromirror device, and a micromirror array of the digital micromirror device is divided into 32, or 64, or 128, or 256 modes. Taking 64 modes as an example, each mode corresponds to a narrow band wavelength, i.e. each mode is a vertical mirror column with the same modulation frequency, and the width of each mode corresponding to the vertical column is 16 mirror planes, and the height is 768 mirror planes.
The further technical scheme is as follows: the projection image generation algorithm used in the step 2) comprises the following steps:
i) setting the initial modulation frequency to fmThe total frame repetition rate of the digital micromirror device is fsWith a frequency interval of dfEach frequency carrier having a phase of
Figure BDA0001704320710000032
The current frame and the total frame number of the frame sequence of the digital micromirror device are respectively defined as SnAnd SsumThe current mode and the total mode of the mode sequence of the digital micromirror device are respectively defined as PnAnd PsumSetting Sn＝0；
Ii) comparison SnAnd SsumWhen the size of (1) satisfies Sn﹤SsumAnd if so, judging to be true, and entering a mode loop in the current frame: setting PnCompare P with 0nAnd PsumWhen P is satisfiedn﹤PsumThen, the value is judged to be true, the amplitude values of different modulation frequencies given by the sine function are digitally calculated according to the following formula,
Figure BDA0001704320710000031
wherein t is 1+ SnAfter the calculation, P is pairedn Add 1, return value to continue with PsumComparing, and circularly calculating all amplitude values in the total number of the patterns until P is not satisfiedn﹤PsumIf the amplitude value is false, all calculated amplitude values are subjected to image compression processing to generate full-resolution mirror image mapping matched with the digital micromirror device, so that a frame is completed, and the frame binary image is gradually transmitted to the digital micromirror device controller through a USB and stored in an on-board memory of the digital micromirror device controller;
iii) skipping mode cycling in the current frame, for SnPlus 1, continue the loop of step ii) until all frames are completed, i.e. when S is not satisfiedn﹤SsumAnd if so, judging to be false, uploading all frames successfully, and starting projection by the digital micromirror device according to the frame sequence.
Adopt the produced beneficial effect of above-mentioned technical scheme to lie in: the invention detects the external quantum efficiency of the solar cell by using the frequency division multiplexing method of the spatial light modulation elements such as the digital micromirror device and the like, allows the wavelength under a range to be detected at one time, greatly improves the detection speed, and improves 3 orders of magnitude compared with the traditional monochromatic measurement. Meanwhile, the detection result also has high measurement precision, optical bandwidth and resolution. The whole measuring system has the advantages of high signal-to-noise ratio, rapidness, accuracy, economy, high efficiency, stability and high repeatability. In addition, the system is also provided with a bias light source, and the bias light source can be measured on the multi-section solar cell. The system has a high spreading potential and can in principle also be used for spectral reflectance and transmittance measurements.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a functional block diagram of a system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the digital micromirror device displaying column modulation frequency assignments according to an embodiment of the present invention;
FIG. 3 is a simplified flow diagram of a projection image generation algorithm on a digital micromirror device according to the present invention;
wherein: 1. the device comprises a light source 2, a filter wheel 3, a slit 4, a dispersion unit 5, a spatial light modulation unit 6, a first mixing and focusing optical device 7, a second mixing and focusing optical device 8, a sample to be detected 9, a standard silicon detector 10, a signal acquisition device 11, a PC 12 and a digital micro-mirror device.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a system according to the present invention, where the system includes a light source 1, a filter wheel 2, a slit 3, a dispersion unit 4, a spatial light modulation unit 5, a mixing and focusing optical device, a standard silicon detector 9, a signal acquisition device 10, and a PC 11; the filter wheel 2 is arranged in front of the light source 1 and is provided with a plurality of optical cut-off filters; the slit 3 is arranged behind the filter wheel 2, the dispersion unit 4 is arranged behind the slit 3, the dispersed light generated by the dispersion unit 4 is spatially modulated by the spatial light modulation unit 5, and then reflects two beams of light beams, one beam of main light beam passes through the first mixing and focusing optical device 6 and then is aligned with the sample 8 to be measured, the other beam of sub light beam passes through the second mixing and focusing optical device 7 and then is aligned with the standard silicon detector 9, the light intensity of the two beams of light beams is the same as the modulation mode, the signal acquisition equipment 10 is connected with the sample 8 to be measured, the standard silicon detector 9 and the PC 11 and is used for acquiring photocurrent signals generated by the sample 8 to be measured and the standard silicon detector 9 and preprocessing the signals and then transmitting the signals to the PC 11.
The light source 1 employs a halogen light source or an LED light source or a xenon light source because these types of lamps exhibit a smooth emission spectrum; the dispersion unit 4 adopts a diffraction grating; the spatial light modulation unit 5 adopts a digital micro-mirror device 12 and is driven and controlled by the PC 11; the sample 8 to be tested is a solar cell to be tested; the spectral response of the standard silicon detector 9 is calibrated in advance and is used as a reference detector to calibrate the test system; the PC 11 is configured as a control center and a data processing center of the system, and a built-in algorithm software controls the projection pattern on the digital micromirror device 12 and processes the signal transmitted by the signal acquisition device 10 to calculate the out-of-battery quantum efficiency.
The filter wheel 2 in the system is arranged in front of the light source 1, and is provided with a plurality of optical cut-off filters, the number and the wavelength range can be changed, and the wavelength ranges are sequentially connected to eliminate high-order spectrum; the slit 3 is disposed behind the filter wheel 2.
The digital micromirror device 12 employed by the spatial light modulation unit 5 in the system of the present invention consists of a rectangular array of 1024 x 768 square mirrors attached to the surface of an integrated circuit chip. Each mirror is mounted on a torsion hinge located at two diagonally opposite corners. Because each mirror defaults to rotate on one axis between two fixed angle positions to simulate the state of the mirror of being opened or closed, the dispersed light generated by the dispersion unit 4 can reflect two beams of light after being spatially modulated, one beam of main light is aligned with the sample 8 to be measured after passing through the mixing and focusing optical device 6, the other beam of secondary light is aligned with the standard silicon detector 9 after passing through the mixing and focusing optical device 7, and the light intensity of the two beams of light is the same as the modulation mode.
To better understand the spatial modulation process of the distributed light beam by the dmd 12, i.e., the frequency division multiplexing method, referring to fig. 2, the micromirror array on the dmd corresponds to different incident wavelengths in units of columns, and adjacent columns are combined into a pattern, so that the whole dmd is divided into N sets of vertical columns, each corresponding to a monochromatic wavelength and a modulation frequency fn. The digital micromirror device receives the intensities of incident light with different wavelengths corresponding to a series of columns and modulates the light with different wavelengths simultaneously, and the light with different wavelengths corresponds to different modulation frequencies to simulate 1 frequency multiplication, 2 frequency multiplication and 3 frequency multiplication of Fourier transform, …, until the effect generated by n frequency multiplication; the projected image of each pixel in each column is a group of bitmap images representing different sine wave patterns which are sequenced according to time, the images are firstly calculated by a PC according to an image generation algorithm and then are continuously projected onto a digital micro-mirror device through a controller on the PC; the micromirror array of the digital micromirror device can be divided into 32, or 64, or 128, or 256 modes. Taking 32 modes as an example, one mode corresponds to one monochromatic wavelength, that is, each mode is a set of vertical mirror columns with the same modulation frequency, and then the width of each set of vertical columns is 32 mirror planes, and the height is 768 mirror planes.
The specific algorithm for generating the projection image used by the dmd 12 in the spatial modulation process in the system of the present invention is shown in fig. 3, and includes the following steps: i) setting the initial modulation frequency to fmThe total frame repetition rate of the digital micromirror device is fsWith a frequency interval of dfEach ofThe phase of the frequency carrier being
Figure BDA0001704320710000062
The current frame and the total frame number of the frame sequence of the digital micromirror device are respectively defined as SnAnd SsumThe current mode and the total mode of the mode sequence of the digital micromirror device are respectively defined as PnAnd PsumSetting Sn0; ii) comparison SnAnd SsumWhen the size of (1) satisfies Sn﹤SsumAnd if so, judging to be true, and entering a mode loop in the current frame: setting PnCompare P with 0nAnd PsumWhen P is satisfiedn﹤PsumThen, the value is judged to be true, the amplitude values of different modulation frequencies given by the sine function are digitally calculated according to the following formula,
Figure BDA0001704320710000061
wherein t is 1+ SnAfter the calculation, P is pairedn Add 1, return value to continue with PsumComparing, and circularly calculating all amplitude values in the total number of the patterns until P is not satisfiedn﹤PsumIf the amplitude value is false, all calculated amplitude values are subjected to image compression processing to generate full-resolution mirror image mapping matched with the digital micromirror device, so that a frame is completed, and the frame binary image is gradually transmitted to the digital micromirror device controller through a USB and stored in an on-board memory of the digital micromirror device controller; iii) skipping mode cycling in the current frame, for SnPlus 1, continue the loop of step ii) until all frames are completed, i.e. when S is not satisfiedn﹤SsumAnd if so, judging to be false, uploading all frames successfully, and starting projection by the digital micromirror device according to the frame sequence.
The signal acquisition equipment 10 in the system is connected with the sample to be detected 8, the standard silicon detector 9 and the PC 11, and is used for acquiring photocurrent signals generated by the battery to be detected and the reference detector, preprocessing the photocurrent signals and transmitting the photocurrent signals to the PC 11. Further calculations are required since the generated photocurrent signal only indirectly contains spectral responsivity information. The core data processing step of the PC 11 to quantize the measurement data is high resolution fast fourier transform followed by a pitch detection algorithm based on line search, so that the exact frequency and amplitude can be found.
The method comprises the following specific working processes:
step 1): the light source 1 emits white light, the white light is filtered by a filter on the filter wheel 2 and then forms a beam of polychromatic light through the slit 3, and the beam of polychromatic light irradiates the dispersion unit 4 to generate a plurality of dispersed light beams with different wavelengths;
step 2): the dispersed light beams generated by the dispersion unit 4 irradiate the digital micro-mirror device 12, the micro-mirror array on the digital micro-mirror device 12 corresponds to different incident wavelengths in a row unit, the intensity of a series of lights with different wavelengths is modulated simultaneously by controlling the on or off of micro-mirrors on the device according to a projection image transmitted by the PC 11, and the lights with different wavelengths correspond to different modulation frequencies to simulate the effects generated by 1 frequency multiplication, 2 frequency multiplication and 3 frequency multiplication of Fourier transform, …, until n frequency multiplication;
step 3) two scattered modulated lights are generated after spatial modulation of a digital micro-mirror device 12, the two groups of light beams form two multi-color modulated lights after being mixed and focused by optical devices 6 and 7, the two multi-color modulated lights are respectively irradiated on a sample 8 to be measured and a standard silicon detector 9, a signal acquisition device 10 transmits collected light current signals of the solar cell to be measured and a reference detector to a PC (personal computer) 11, and the PC 11 performs inverse Fourier transform demodulation on the two light current signals, so that the spectral response and the external quantum efficiency of the solar cell to be measured in the current optical filter wavelength range can be calculated;
step 4) rotating the filter wheel 2 to change the wavelength range of the white light in the step 1, and repeating the steps 1-3 to calculate the external quantum efficiency of the wavelength range of the optical filter; and calculating the external quantum efficiency under all the optical filters on the filter wheel 2 by analogy, and finally splicing all the measurement results together to form a solar cell external quantum efficiency result graph under the target wavelength range.
In one particular experiment using the system and method of the present invention, three optical cut-off filters were used on the filter wheel 2 in the system to measure the solar cell response in the 375-.
And when different optical filters are used for measurement, the projection images used for spatial modulation on the digital micromirror device 12 are also respectively calculated and optimized to correspond to different wavelength ranges, and the wavelength interval between adjacent modes, i.e. the wavelength resolution, is controlled to be 5-15 nm. In the experiment, the system and the method are used for carrying out external quantum efficiency detection on the single-junction p-i-n hydrogenated amorphous silicon solar cell, and the detection result is compared with the detection result of a conventional monochromatic system to evaluate the performance of the system in terms of accuracy and speed. Other variables such as control detection conditions and the like are the same in the experimental process, and the experimental result shows that the difference between the two data sets is very small, the absolute average value of the difference is less than 1.3%, and the detection time of one solar cell is greatly shortened. By repeating the measurement, the system of the invention can still obtain stable measurement results. Experiments prove that the system and the method are applicable to the rapid test of the external quantum efficiency of the solar cell, and the system has excellent performance and has the characteristics of high signal-to-noise ratio, rapidness, accuracy, economy, high efficiency, stability and repeatability.

Claims (2)

1. A method for rapidly testing the external quantum efficiency of a solar cell based on frequency division multiplexing is characterized by comprising the following steps:
1) the light source (1) emits white light, the white light is filtered by the optical filter on the optical filter wheel (2) and then forms a beam of polychromatic light through the slit (3), and then the beam of polychromatic light irradiates the dispersion unit (4) to generate a plurality of dispersed light beams with different wavelengths;
2) the scattered light beams generated by the dispersion unit (4) irradiate onto the spatial light modulation unit (5), a micromirror array of a digital micromirror device (12) on the spatial light modulation unit (5) corresponds to different incident wavelengths in a column unit, the amplitude of the different incident wavelengths corresponding to the series of columns is simultaneously modulated according to the on or off of a micromirror on the spatial light modulation unit (5) of a projection image transmitted by a PC (11), and the light with the different incident wavelengths is modulated by simulating 1 frequency multiplication, 2 frequency multiplication, 3 frequency multiplication and … of Fourier transform until the light intensity generated by n frequency multiplication; the projection images of all the pixels in each column are a group of bitmap images representing different sine wave patterns in a time sequence, the images are firstly calculated by a PC (11) according to an image generation algorithm and then are continuously projected onto a digital micro-mirror device (12) through a controller on the PC (11);
the projection image generation algorithm used in the step 2) comprises the following steps:
i) setting the initial modulation frequency to fmThe total frame repetition rate of the digital micromirror device is fsWith a frequency interval of dfThe phase of each frequency carrier being phinThe current frame and the total frame number of the frame sequence of the digital micromirror device are respectively defined as SnAnd SsumThe current mode and the total mode of the mode sequence of the digital micromirror device are respectively defined as PnAnd PsumSetting Sn=0；
Ii) comparison SnAnd SsumWhen the size of (1) satisfies Sn﹤SsumAnd if so, judging to be true, and entering a mode loop in the current frame: setting Pn=0, comparison PnAnd PsumWhen P is satisfiedn﹤PsumThen, the value is judged to be true, the amplitude values of different modulation frequencies given by the sine function are digitally calculated according to the following formula,
Figure DEST_PATH_IMAGE002
wherein t =1+ SnAfter the calculation, P is pairednAdd 1, return value to continue with PsumComparing, and circularly calculating all amplitude values in the total number of the patterns until P is not satisfiedn﹤PsumIf yes, the method is judged to be false, and all calculated frames areThe value is processed by image compression to generate full-resolution mirror image mapping matched with the digital micro-mirror device, so that a frame is completed, and the binary image of the frame is gradually transmitted to a controller of a micro-mirror of the spatial light modulation unit (5) through a USB and is stored in an on-board memory of the controller;
iii) skipping mode cycling in the current frame, for SnPlus 1, continue the loop of step ii) until all frames are completed, i.e. when S is not satisfiedn﹤SsumIf so, judging to be false, uploading all frames successfully, and starting projection by the digital micromirror device according to the frame sequence;
3) the two groups of light beams simultaneously pass through a first mixing and focusing optical device (6) and a second mixing and focusing optical device (7) to form two beams of multicolor modulated light which respectively irradiate a sample to be detected (8) and a standard silicon detector (9), a signal acquisition device (10) transmits acquired photocurrent signals of the solar cell to be detected and the reference standard silicon detector to a PC (11), and the PC (11) performs inverse Fourier transform demodulation on the two photocurrent signals and then divides the two photocurrent signals to calculate the spectral response and the external quantum efficiency of the solar cell to be detected;
4) rotating the filter wheel (2) to change the wavelength range of the white light in the step 1), and repeating the previous steps 1) to 3) to calculate the external quantum efficiency of the wavelength range of the optical filter; and calculating the external quantum efficiency under all the optical filters on the filter wheel (2) by analogy, and finally splicing the measurement results to form the external quantum efficiency result of the solar cell under the target wavelength range.
2. The method for fast testing the external quantum efficiency of the frequency division multiplexing-based solar cell of claim 1, wherein: the spatial light modulation unit (5) in the step 2) uses a digital micro-mirror device (12), and a micro-mirror array of the digital micro-mirror device (12) is divided into 32, or 64, or 128, or 256 modes; taking 64 modes as an example, each mode corresponds to a narrow band wavelength, i.e. each mode is a vertical mirror column with the same modulation frequency, and the width of each mode corresponding to the vertical column is 16 mirror planes, and the height is 768 mirror planes.
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