TWI804485B - Insulation-coated conductive particle, anisotropic conductive film, method for producing anisotropic conductive film, bonded structure, and method for producing bonded structure - Google Patents

Abstract

Insulation-coated conductive particles have conductive substrate particles, and insulating fine particles covering the surface of the substrate particles, and have a sparse region where the number of insulating fine particles per unit area is small or zero, and insulating particles per unit area. A dense area with more fine particles than a sparse area.

Description

Insulation-coated conductive particle, anisotropic conductive film, method for producing anisotropic conductive film, bonded structure, and method for producing bonded structure

The present invention relates to an insulating coated conductive particle, an anisotropic conductive film, a manufacturing method of the anisotropic conductive film, a bonded structure and a method for manufacturing the bonded structure.

Previously, for example, in the connection of liquid crystal display and tape carrier package (Tape Carrier Package, TCP), the connection of flexible printed circuit board (Flexible Printed Circuit, FPC) and TCP, or the connection of FPC and printed wiring board, conductive particles are dispersed in Anisotropic conductive film in adhesive film. In addition, in the case of mounting a semiconductor silicon chip on a substrate, a so-called Chip On Glass (COG) in which a semiconductor silicon chip is directly mounted on a substrate is also performed instead of the previous wire bonding. Anisotropic conductive films are also used.

In recent years, along with the development of electronic equipment, the densification of wiring and the enhancement of functionality of circuits are progressing. As a result, there is a demand for a bonded structure in which the interval between the connection electrodes is, for example, 15 μm or less, and the area of the bump electrodes of the connection member is also reduced. In order to obtain a stable electrical connection in the small-area bump connection, a sufficient number of conductive particles needs to be interposed between the bump electrode and the circuit electrode on the substrate side.

In order to solve such a problem, Patent Document 1 and Patent Document 2 propose the following content: the conductive particles are biased to the substrate side at a certain ratio, and the conductive particles are By arranging them at equal intervals, the catchability of conductive particles of the bump electrodes and the circuit electrodes is improved, and the insulation between the narrowed adjacent circuit electrodes is improved.

[Prior art literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Laid-Open No. 2009-535843

[Patent Document 2] Japanese Patent Laid-Open No. 2015-25104

However, in the above-mentioned prior method, the conductive particles are arranged at equal intervals, thereby improving the catchability of the conductive particles and improving the connection reliability, but the anisotropic conductive film melts and flows when the circuit is connected, so the uniform Conductive particles arranged at intervals may also flow, and there is a possibility that a problem of lowering the insulation between adjacent circuit electrodes may occur.

An object of the present invention is to provide a method for connecting circuit members having opposing electrodes that can ensure both the reliability of the connection between the opposing electrodes and the insulation between adjacent electrodes in the circuit members. Insulation-coated conductive particles, anisotropic conductive film, method for producing the anisotropic conductive film, and a connection structure capable of achieving both connection reliability between opposing electrodes and insulation between adjacent electrodes in a circuit member, and A method of manufacturing a connected structure.

The present invention provides a first insulating-coated conductive particle comprising a conductive substrate particle and insulating fine particles covering the surface of the substrate particle, and A sparse region having a small or zero number of insulating fine particles per unit area and a dense region having a larger number of insulating fine particles per unit area than the sparse region.

In the first insulating-coated conductive particle of the present invention, insulation when the particles are in contact with each other can be ensured by the dense region, and electrical conductivity can be ensured by the sparse region.

The first insulating-coated conductive particle of the present invention may have the two sparse regions through which a central axis passes through the center of the substrate particle.

In the connection between the circuit members having the opposite electrodes, the insulation-coated conductive particles make the two sparse regions respectively contact the opposite electrodes, thereby ensuring the reliability of the connection between the opposite electrodes. In the case of insulating-coated conductive particles, insulation can be ensured by the dense regions.

In addition, the present invention provides a second insulating-coated conductive particle, which is a composite particle comprising a conductive substrate particle and insulating fine particles covering the surface of the substrate particle, which is cut by two parallel planes. Part or all of the insulating fine particles in the two spherical cap regions of the substrate particles are removed.

In the second insulating-coated conductive particle of the present invention, in the connection between circuit members having opposing electrodes, the two spherical cap regions from which a part or all of the insulating fine particles have been removed are respectively in contact with the opposing electrodes, thereby ensuring The connection reliability between the opposing electrodes can be ensured by the insulating fine particles located in the ball band region when they are in contact with other insulating coated conductive particles.

In addition, the present invention provides a third insulating-coated conductive particle comprising a conductive substrate particle and insulating fine particles covering the surface of the substrate particle. Particles, the insulating fine particles are partial to the spherical band region when cutting the substrate particles with two parallel planes.

In the third insulating-coated conductive particle of the present invention, in the connection between circuit members having opposing electrodes, the two spherical cap regions are respectively in contact with the opposing electrodes, so that the connection reliability between the opposing electrodes can be ensured, When in contact with other insulating and coated conductive particles, the insulation can be ensured by the insulating particles that are biased in the ball zone area.

Also, the present invention provides an anisotropic conductive film comprising a conductive adhesive layer comprising the first, second, or third insulating-coated conductive particles of the present invention and an adhesive component.

According to the anisotropic conductive film of the present invention, in the connection between circuit members having opposing electrodes, the insulation between adjacent electrodes in the circuit member can be ensured while taking into account the connection reliability between the opposing electrodes. ensure.

The anisotropic conductive film of the present invention may include the first insulating-coated conductive particle of the present invention having two sparse regions through which a central axis passes through the center of the substrate particle, and the insulating-coated conductive particle is An axis passing through the center of the substrate particle and parallel to the thickness direction of the conductive adhesive layer is arranged so as to pass through two sparse regions.

According to such an anisotropic conductive film, in the connection between circuit members having facing electrodes, the two sparse regions included in the insulating-coated conductive particles can be brought into contact with the facing electrodes more reliably, and can be connected with other electrodes. In the case where insulating-coated conductive particles are in contact, insulation can be ensured by mutual dense regions. In this way, higher Ensuring the reliability of the connection between the opposing electrodes and ensuring the insulation between adjacent electrodes in the circuit member are balanced.

The anisotropic conductive film of the present invention may include the second insulating-coated conductive particle of the present invention, the insulating-coated conductive particle passing through the center of the substrate particle and parallel to the thickness direction of the conductive adhesive layer through two axes. Configured in the form of a spherical cap area.

According to such an anisotropic conductive film, in the connection between circuit members having facing electrodes, the two spherical cap regions of the insulating-coated conductive particles can be brought into contact with the facing electrodes more reliably, and the In the case where other insulation-coated conductive particles are in contact, insulation can be ensured by mutual insulating fine particles located in the ball zone region. Thereby, securing of connection reliability between opposing electrodes and securing of insulation between adjacent electrodes in a circuit member can be achieved at a higher level.

The anisotropic conductive film of the present invention may include the second or third insulating-coated conductive particles of the present invention, and the insulating-coated conductive particles have an axis that passes through the center of the substrate particle and is parallel to the thickness direction of the conductive adhesive layer. Arranged so as to be orthogonal to the two parallel planes.

According to such an anisotropic conductive film, in the connection between circuit members having facing electrodes, the two spherical cap regions of the insulating-coated conductive particles can be brought into contact with the facing electrodes more reliably, and the In the case where other insulation-coated conductive particles are in contact, insulation can be ensured by mutual insulating fine particles located in the ball zone region. Thereby, securing of connection reliability between opposing electrodes and securing of insulation between adjacent electrodes in a circuit member can be achieved at a higher level.

In addition, the present invention provides a method for producing an anisotropic conductive film, which includes the steps of: preparing composite particles including conductive substrate particles and insulating fine particles covering the surface of the substrate particles; storing the composite particles A step of entering the hole of the particle storage member provided with a hole with a closed end surface; a step of removing part or all of the insulating fine particles in the spherical cap region of the composite particles exposed from the hole; making the insulating fine particles in the spherical cap region The removed composite particles move from the particle storage member to the first adhesive layer in such a manner that the spherical cap region is in contact with the first adhesive layer, and part of the insulating fine particles of the composite particles adheres to the closed end surface of the particle storage member. removing the step of disposing the insulating-coated conductive particles on the first adhesive layer; and attaching the second adhesive layer to the side of the first adhesive layer on which the insulating-coated conductive particles are arranged.

According to the production method of the anisotropic conductive film of the present invention, the insulating coated conductive particles having two spherical cap regions in which a part or all of the insulating fine particles are removed can be provided on the first adhesive layer, and the second adhesive layer By sticking to the first adhesive layer, a conductive adhesive layer containing insulating-coated conductive particles can be easily formed. In this conductive adhesive layer, insulating-coated conductive particles may be arranged so that an axis parallel to the thickness direction of the conductive adhesive layer passing through the center of the substrate particle passes through two spherical cap regions.

In addition, in the method for producing an anisotropic conductive film of the present invention, by providing the particle storage member with regularly arranged holes, the insulating-coated conductive particles in the anisotropic conductive film can be regularly arranged. In addition, by adjusting the thickness of the first adhesive layer and the second adhesive layer, it can be formed so that the conductive adhesive layer is biased on both main surfaces of the conductive adhesive layer. One side of the method includes a conductive adhesive layer that insulates and coats conductive particles.

In addition, the present invention provides a connection structure comprising: a first circuit member having bump electrodes; a second circuit member having circuit electrodes corresponding to the bump electrodes; and the first and second aspects of the present invention. Or the third insulation-coated conductive particle is interposed between the bump electrode and the circuit electrode and electrically connected to the bump electrode and the circuit electrode.

The connection structure of the present invention connects the bump electrodes and the circuit electrodes by using the first, second or third insulating-coated conductive particles of the present invention, so that both the connection reliability between the opposing electrodes and the circuit member can be achieved. Insulation between adjacent electrodes inside.

In addition, the present invention provides a method for producing a bonded structure comprising the anisotropic conductive film of the present invention or an anisotropic conductive film obtained by the method for producing an anisotropic conductive film of the present invention. A step of thermocompression bonding the first circuit member and the second circuit member with a spacer between the first circuit member having bump electrodes and the second circuit member having circuit electrodes corresponding to the bump electrodes .

According to the manufacturing method of the bonded structure of this invention, the bonded structure compatible with the connection reliability between opposing electrodes and the insulating property of the adjacent electrodes in a circuit member can be obtained.

According to the present invention, it is possible to provide a circuit that can ensure the reliability of the connection between the opposing electrodes and ensure the connection reliability between the opposing electrodes in the connection between the circuit members having the opposing electrodes. Insulation-coated conductive particles and anisotropic conductive film for ensuring insulation between adjacent electrodes in a member, method for producing anisotropic conductive film, and connection reliability between opposing electrodes and circuit member The insulating bonded structure of adjacent electrodes and the manufacturing method of the bonded structure.

1: Substrate particles

2: Insulating fine particles

3: Ball crown area

5, 7: Main body

5a, 7a: Mounting surface

6: Bump electrode

8: Circuit electrode

10: Insulation coated conductive particles

11: Anisotropic conductive film with release film

12: Peeling film (release film)

13: Conductive adhesive layer (anisotropic conductive film)

13a: The first adhesive layer

13b: The second adhesive layer

20: Composite Particles

30: Particle storage component

32: hole

50: Connection structure

52: 1st circuit component

53: Second circuit component

54: Hardened

D: the shortest distance

P: central axis

P': axis

S: closed end face

X, Y: particle size

X': Minimum diameter

Y': Maximum diameter

FIG. 1( a ) is a diagram showing one embodiment of the insulating-coated conductive particle of the present invention, and FIG. 1( b ) is a diagram schematically showing a cross section along the central axis P shown in FIG. 1( a ).

Fig. 2 is a diagram illustrating the maximum diameter and minimum diameter of the insulating-coated conductive particles of the present invention.

FIG. 3( a ) is a schematic cross-sectional view showing one embodiment of the anisotropic conductive film of the present invention, and FIG. 3( b ) is an enlarged schematic view of main parts of the anisotropic conductive film.

4( a ) and FIG. 4( b ) are schematic cross-sectional views showing the manufacturing steps of the anisotropic conductive film of the present invention.

5( a ), FIG. 5( b ), and FIG. 5( c ) are schematic cross-sectional views showing subsequent steps of FIG. 4( a ) and FIG. 4( b ).

Fig. 6 is a schematic cross-sectional view showing an anisotropic conductive film obtained through the steps of Fig. 5(a), Fig. 5(b) and Fig. 5(c).

FIG. 7 is a diagram showing an example of an arrangement of insulating-coated conductive particles.

Fig. 8 is a schematic cross-sectional view showing an embodiment of the bonded structure of the present invention.

Fig. 9 is a schematic cross-sectional view showing a manufacturing step of the bonded structure shown in Fig. 8 .

FIG. 10 is a schematic cross-sectional view showing steps subsequent to FIG. 9 .

Hereinafter, preferred embodiments of the insulation-coated conductive particles, the anisotropic conductive film, the method for manufacturing the anisotropic conductive film, the bonded structure, and the method for manufacturing the bonded structure of the present invention will be described in detail with reference to the drawings. illustrate.

[Constitution of insulating coated conductive particles]

FIG. 1( a ) is a diagram showing the appearance of one embodiment of the insulating-coated conductive particle of the present invention, and FIG. 1( b ) is a diagram schematically showing a cross section along the central axis P shown in FIG. 1( a ). The insulating-coated conductive particle 10 is comprised including the substrate particle 1 which has electroconductivity, and the insulating fine particle 2 which coats the surface of the substrate particle 1. As shown in FIG. The central axis P refers to an axis passing through the center of the substrate particle 1 .

The substrate particle 1 may be a core-shell type particle including a core particle and a metal layer covering at least a part of the surface of the core particle. For example, those obtained by coating core particles with a metal by plating are mentioned.

As the core particles, any of metal core particles, organic core particles, and inorganic core particles can be used. In terms of conductivity, it is preferable to use organic core particles.

The material of the organic core particles is not particularly limited, and examples thereof include acrylic resins such as polymethyl methacrylate and polymethyl acrylate, polyolefin resins such as polyethylene, polypropylene, polyisobutylene, and polybutadiene.

In the case of coating the core particle by plating etc., as its metal, Examples include metals such as gold, silver, copper, platinum, zinc, iron, palladium, nickel, tin, chromium, titanium, aluminum, cobalt, germanium, cadmium, indium tin oxide (Indium Tin Oxide, ITO), and solder, etc. metal compounds, etc.

The structure of the metal layer covering the core particles is not particularly limited, but the outermost layer is preferably a nickel layer in terms of conductivity. In addition, from the viewpoint of conductivity, it is preferable that the outermost layer has protrusions (or protrusions). A metal layer such as copper may be further provided inside the nickel layer.

The average primary particle size of the substrate particle 1 is preferably 1 μm or more and 10 μm or less, more preferably 2 μm, from the viewpoint of absorbing the uneven height of the connected electrodes and balancing the conduction reliability and insulation reliability. Not less than 5 μm, and more preferably not less than 2 μm and not more than 3 μm.

As the insulating fine particles 2 , inorganic oxide fine particles, organic fine particles, etc. can be used, and can be appropriately selected according to desired characteristics such as insulation and conductivity. The insulating fine particle 2 is preferably a core-shell type particle including a core particle containing an organic polymer and a shell layer covering at least a part of the surface of the core particle. The material of the shell layer includes, for example, cross-linked polysiloxane.

From the viewpoint of both conduction reliability and insulation reliability, the average primary particle size of the insulating fine particles 2 is preferably from 100 nm to 500 nm, more preferably from 200 nm to 450 nm, and still more preferably from 250 nm to 350 nm. . In particular, if the average primary particle size of the insulating fine particles 2 is 250 nm or more, it is easy to ensure sufficient adjacent circuits even when the insulating-coated conductive particles 10 are aggregated in the connection between circuit members having opposing electrodes. Insulation between electrodes When the thickness is 350 nm or less, even if insulating fine particles exist in a sparse region with a small number of insulating fine particles per unit area described later, it is easy to sufficiently secure conduction between opposing circuits.

The insulating-coated conductive particles 10 of this embodiment may have a sparse region with a small or zero number of insulating fine particles per unit area, and a dense region with a larger number of insulating fine particles per unit area than the sparse region.

As shown in Figure 1(a) and Figure 1(b), the insulating coated conductive particles 10 preferably have two sparse regions through which the central axis P passes through the substrate particle 1. center. In other words, the insulation-coated conductive particles 10 preferably have sparse regions in the two spherical cap regions and dense regions in the spherical band region when the substrate particle 1 is cut by two parallel planes. Furthermore, in other words, in the insulating-coated conductive particles 10 , it is preferable that the insulating fine particles 2 exist in a biased manner in the spherical band region when the substrate particle 1 is cut with two parallel planes.

Such insulation-coated conductive particles 10 can be obtained by cutting the substrate with two parallel planes, which are composite particles comprising conductive substrate particles 1 and insulating fine particles 2 covering the surface of the substrate particles 1. The particles 1 are obtained by removing part or all of the insulating fine particles 2 in the two spherical cap regions.

Furthermore, in this embodiment, the boundary between the sparse area and the dense area does not necessarily need to be clear, and an intermediate area with more insulating particles per unit area than the sparse area and less dense area can be set between the sparse area and the dense area. Each region may be provided so that the number of insulating fine particles per unit area increases from the sparse region to the dense region.

From the viewpoint of lowering the resistance of the connection between opposing circuits, the insulating-coated conductive particles 10 preferably have a sparse region where the particle density of the insulating fine particles 2 is 0 particles/μm ² to 2.0 particles/μm ² . Preferably, it is a sparse region having a particle density of insulating fine particles ² of 0 to 1.0 particles/μm ² , and more preferably a region having a particle density of insulating fine particles 2 of 0 particles/μm ² to 0.5 particles/μm ² sparse area. In addition, when the surface area of the substrate particle 1 is defined as S ₀ μm ² , the sparse region is preferably at least 0.5×S ₀ μm ² , more preferably at least 0.7×S ₀ μm ² .

From the viewpoint of improving the insulation between adjacent circuits, the insulating-coated conductive particles 10 preferably have a dense region with a particle density of insulating fine particles 2 of 2.0 particles/μm ² to 5.0 particles/μm ² , more preferably have a The particle density of the insulating fine particles 2 is a dense region of 2.5 particles/μm ² to 4.5 particles/μm ² , and more preferably a dense region having a particle density of the insulating fine particles 2 of 3.0 particles/μm ² to 3.5 particles/μm ² . In addition, when the surface area of the substrate particle is defined as S ₀ μm ² , the dense domain is preferably 0.2×S ₀ μm ² or more, more preferably 0.3×S ₀ μm ² or more.

The number of insulating fine particles per unit area in the sparse area and the dense area can be measured by measuring the central part of the substrate particle 1 in the scanning electron microscope (Scanning Electron Microscope, SEM) photo of the insulating coated conductive particle (the substrate particle 1 The length of half of the diameter of the outer peripheral circle is set as the diameter and is concentric with the outer peripheral circle) to measure the number of insulating particles present. In addition, the particle density of the insulating fine particles 2 can be calculated from the number of insulating fine particles per unit area. Regarding the unit area, when the surface area of the substrate particle 1 is S ₀ μm ² , it can be set to a predetermined area in the range of 0.04×S ₀ μm ² to 0.20×S ₀ μm ² , or can be set to 0.17×S ₀ μm ² .

From the viewpoint of ensuring the direct contact area between the electrodes and the conductive particles during connection between opposing circuits, the insulating-coated conductive particles 10 preferably include 0.05×S ₀ μm ^{or more} in the spherical cap region of the substrate particle 1. The region where the number of insulating fine particles is 0 preferably includes 0.10×S ₀ μm ² or more.

The covering ratio of the insulating fine particles 2 of the insulating-coated conductive particles 10 is preferably 35% to 75%, more preferably 40% to 75%. Furthermore, the coverage rate of the insulating fine particles refers to the center portion of the substrate particle 1 in the SEM photograph of the insulating-coated conductive particle (the half length of the diameter of the outer circumference of the substrate particle 1 is defined as the diameter and the The outer peripheral circle is a concentric circle) and the measured value was analyzed. Specifically, when the total surface area of the central portion of the substrate particle 1 in the SEM photograph is W (the area calculated from the particle diameter of the conductive particle), the area of the substrate particle 1 in the SEM photograph is When the surface area of the central part analyzed to be covered with the insulating fine particles 2 is represented by P, the coverage rate is represented by P/W×100(%). In addition, the surface area P of the part analyzed as the said coating in this embodiment is the average value of the surface area calculated|required from 200 SEM photographs of the insulating coating|coated conductive particle.

From the viewpoint of conduction characteristics, the minimum diameter X' of the insulating-coated conductive particles 10 is preferably not less than the diameter of the substrate particle 1 and not more than the sum of the diameter of the substrate particle 1 and the diameter of the insulating fine particle 2. In addition, from the viewpoint of insulation, the maximum diameter Y' of the insulating-coated conductive particle 10 is preferably greater than or equal to the total value of the diameter of the substrate particle 1 and 2×(the diameter of the insulating fine particle 2), and the diameter of the substrate particle 1 The total value of the diameter and 6×(the diameter of the insulating fine particle 2) is less than or equal to. Furthermore, Fig. 2 shows that the minimum diameter X' of the insulating coating conductive particle 10 shown in Fig. diameter) total Case.

From the viewpoint of both conductivity and insulation, the ratio X'/Y' of the smallest diameter X' to the largest diameter Y' of the insulating-coated conductive particles 10 is preferably not less than 0.4 and not more than 0.9. By setting X'/Y' to be 0.4 or more, even when the bump area of the circuit member is reduced, it is easy to ensure the capture property of the insulating-coated conductive particles 10. By setting X'/Y' When it is 0.9 or less, it is easy to lower the connection resistance.

Various methods can be used for producing the above-mentioned insulating-coated conductive particles 10 . For example, (i) a method in which substrate particles 1 are filled in a parallel plate having the same gap as the particle diameter of substrate particles 1, and insulating fine particles 2 are attached to the filled substrate particles 1, (ii) A method of preparing composite particles in which the entire surface of the substrate particle 1 is covered with the insulating fine particles 2 and removing a part of the insulating fine particles 2 of the composite particles.

The method of attaching the insulating fine particles 2 to the substrate particles 1 in (i) includes, for example, filling the space between the substrate particles 1 and the insulating fine particles 2 between parallel plates, and then using an organic solvent or heat to make the insulating fine particles 2 A method of fusing to the substrate particle 1.

In (ii), the method of obtaining composite particles in which the entire surface of the substrate particle 1 is covered with insulating fine particles 2 includes, for example, applying a charging treatment material such as polyethyleneimine to the substrate particle 1, and using electrostatic force to make the insulating particle 1 The method of attaching the microparticles 2 is a method of introducing a functional group capable of bonding with the substrate particle 1 and the insulating microparticles 2 to obtain composite particles through chemical bonding. In addition, as a means of removing a part of the insulating fine particles 2 , a method of removing the insulating fine particles 2 in the spherical cap region of the composite particles using an adhesive tape or the like can be cited as a simple method. Furthermore, the present invention described later The method for producing an anisotropic conductive film is a particularly useful method for producing insulating-coated conductive particles 10 in the production of an anisotropic conductive film.

[Structure of Anisotropic Conductive Film]

FIG. 3( a ) is a schematic cross-sectional view showing one embodiment of the anisotropic conductive film of the present invention, and FIG. 3( b ) is an enlarged schematic view of main parts of the anisotropic conductive film. The anisotropic conductive film 11 with a release film shown in the figure includes a release film 12 and a conductive adhesive layer (anisotropic conductive film) 13 including an insulating-coated conductive particle 10 and an adhesive component. The insulating-coated conductive particles 10 are dispersed in the conductive adhesive layer 13 . In this specification, the region not including the insulating-coated conductive particles 10 in the cross section when the conductive adhesive layer 13 is cut in a plane perpendicular to the thickness direction may be referred to as an adhesive region, and the region including the insulating-coated conductive particles 10 may be referred to as an adhesive region. The region is called the conductive region.

The peeling film 12 can be formed using polyethylene terephthalate (PET), polyethylene, polypropylene, etc., for example. Arbitrary fillers may be contained in the release film 12 . In addition, release treatment, plasma treatment, etc. may be performed on the surface of the release film 12 .

Examples of the adhesive component contained in the conductive adhesive layer 13 include monomers and curing agents. As a monomer, a cation polymerizable compound, an anion polymerizable compound or a radical polymerizable compound can be used. Examples of the cationically polymerizable compound and the anionically polymerizable compound include epoxy-based compounds.

As the epoxy-based compound, bisphenol-type epoxy resins derived from epichlorohydrin, bisphenol A, bisphenol F, or bisphenol AD and other bisphenol compounds can be used. Epoxy novolacs derived from novolac resins such as novolaks Lacquer resins, and various epoxy compounds having two or more glycidyl groups in one molecule, such as glycidylamine, glycidyl ether, biphenyl, and alicyclic.

As the radically polymerizable compound, a compound having a functional group polymerizable by radicals can be used, and examples thereof include acrylic monomers such as (meth)acrylates, maleimide compounds, and styrene derivatives. The radically polymerizable compound may be used in any state of a monomer or an oligomer, or may be used in admixture of a monomer and an oligomer.

A monomer may be used individually by 1 type, and may use 2 or more types together.

In the case of using an epoxy-based compound, examples of the hardener include: imidazole-based, hydrazine-based, boron trifluoride-amine complexes, percilium salts, amidoimides, polyamine salts, dicyandiamide Amines etc. From the viewpoint of prolonging the usable time, these curing agents are preferably microencapsulated by being coated with a polyurethane-based or polyester-based high-molecular substance.

The curing agent used together with the epoxy-based compound can be appropriately selected according to the target connection temperature, connection time, storage stability, and the like. In terms of high reactivity, when preparing a composition comprising an epoxy compound and a hardener, the hardener preferably has a gel time within 10 seconds at a specified temperature. In terms of storage stability In terms of curing agent, it is preferable that there is no difference in gel time from the composition stored in a thermostat at 40°C for 10 days. In this aspect, the hardening agent is preferably a columium salt.

In the case of using an acrylic monomer, examples of the curing agent include those that decompose by heating to generate free radicals, such as peroxide compounds and azo compounds.

The hardener used in combination with acrylic monomers can be selected according to the target joining temperature, continuous It can be selected according to the exposure time, storage stability, etc. In terms of high reactivity and storage stability, the curing agent is preferably an organic peroxide or an azo compound with a half-life of 10 hours at a temperature of 40° C. or higher and a half-life of 1 minute at a temperature of 180° C. or lower, more preferably An organic peroxide or an azo compound having a half-life of 10 hours at a temperature of 60° C. or higher and a half-life of 1 minute at a temperature of 170° C. or lower.

A hardening agent may be used individually by 1 type, and may use 2 or more types together. The conductive adhesive layer 13 may further contain a decomposition accelerator, an inhibitor, and the like.

In the case of using either an epoxy compound or an acrylic monomer, a sufficient reaction rate is obtained even when the connection time is set to 10 seconds or less. 100 parts by mass in total of the materials, the blending amount of the curing agent is preferably 0.1 parts by mass to 40 parts by mass, more preferably 1 part by mass to 35 parts by mass. If the compounding amount of the curing agent is 0.1 parts by mass or more, a sufficient reaction rate can be obtained, and it is easy to obtain good adhesive strength and small connection resistance, and if it is 40 parts by mass or less, it is easy to prevent the conductive adhesive layer 13 It is easy to ensure the storage stability of the anisotropic conductive film when the fluidity is lowered and the connection resistance is increased.

The conductive adhesive layer 13 may also contain a film forming material. The film-forming material is a polymer that functions to facilitate the handling of the low-viscosity composition containing the monomer and the curing agent. By using a film forming material, it is possible to suppress easy cracking, cracking, and stickiness of the film, and it is possible to obtain the anisotropic conductive film 11 which is easy to handle.

As a film forming material, a thermoplastic resin can be preferably used. For example, phenoxy resin, polyvinyl formaldehyde resin, polystyrene resin, polyvinyl butyral Resin, polyester resin, polyamide resin, xylene resin, polyurethane resin, polyacrylic resin, polyester urethane resin, etc. These polymers may also contain siloxane linkages or fluorine substituents. From the viewpoint of adhesive strength, compatibility, heat resistance, and mechanical strength, it is preferable to use a phenoxy resin among the resins.

These thermoplastic resins may be used alone or in combination of two or more.

The greater the molecular weight of the thermoplastic resin, the easier it is to obtain film formability, and the melt viscosity that affects the fluidity of the anisotropic conductive film 11 can be set in a wide range. The weight average molecular weight of the thermoplastic resin is preferably from 5,000 to 150,000, more preferably from 10,000 to 80,000. When the weight average molecular weight of a thermoplastic resin is 5000 or more, favorable film formability will be acquired easily, and when it is 150000 or less, it will become easy to acquire favorable compatibility with other components.

Furthermore, in the present invention, the weight average molecular weight refers to a value measured by a gel permeation chromatography (Gel Permeation Chromatograph, GPC) using a calibration curve of standard polystyrene according to the following conditions.

(measurement conditions)

Device: GPC-8020 manufactured by Tosoh Co., Ltd.

Detector: RI-8020 manufactured by Tosoh Co., Ltd.

Column: Gelpack GLA160S+GLA150S manufactured by Hitachi Chemical Co., Ltd.

Sample concentration: 120mg/3mL

Solvent: Tetrahydrofuran

Injection volume: 60μL

Pressure: 2.94×106Pa (30kgf/cm ² )

Flow: 1.00mL/min

Based on the total amount of the monomer, hardener and film-forming material, the blending amount of the film-forming material is preferably 5% by mass to 80% by mass, more preferably 15% by mass to 70% by mass. By setting the blending amount of the film forming material to 5% by mass or more, it is easy to obtain good film formability, and by setting it to 80% by mass or less, the conductive adhesive layer 13 (especially the adhesive region) exhibits good performance. Mobility propensity.

In addition, the conductive adhesive layer 13 may further contain fillers, softeners, accelerators, anti-aging agents, colorants, flame retardants, thixotropic agents, coupling agents, phenol resins, melamine resins, and isocyanates. wait.

When the conductive adhesive layer 13 contains a filler, improvement in connection reliability can be further expected. The maximum diameter of the filler is preferably less than the minimum diameter of the insulating-coated conductive particles 10 . The content of the filler in the conductive adhesive layer 13 is preferably 5 to 60 parts by volume relative to 100 parts by volume of the conductive adhesive layer. If it is this range, the effect of improving reliability corresponding to the addition amount is easy to be acquired.

In the conductive adhesive layer (anisotropic conductive film) 13 of the present embodiment, it is preferable that the insulating-coated conductive particles 10 are located on one side of both main surfaces of the conductive adhesive layer 13 . As shown in Figure 3 (b), in the case where the insulating coated conductive particles 10 are biased towards the side of the conductive adhesive layer 13 on which the release film 12 is provided, the shortest distance between the insulating coated conductive particles 10 and one of the sides can be greater than 0 μm to 1 μm or less. By setting the shortest distance D within the above-mentioned range, the flow of the insulating-coated conductive particles 10 during crimping can be suppressed, thereby improving the performance of the insulating-coated conductive particles 10. capture performance.

In addition, as shown in FIG. 3( b ), the insulating-coated conductive particles 10 preferably pass through the center of the substrate particle 1 and the axis P' parallel to the thickness direction of the conductive adhesive layer 13 passes through two sparse regions or insulating regions. The two spherical cap regions in which a part or all of the permanent microparticles 2 are removed are arranged, or the parallel axis P' is perpendicular to the two parallel planes (the plane dividing the two spherical cap regions and the spherical zone region) way to configure. In such an anisotropic conductive film 11, the particle diameter X in the direction of the axis P' of the insulating-coated conductive particles 10 and the particle diameter Y in the direction perpendicular to the axis P' have a relationship of Y>X. Furthermore, when the anisotropic conductive film 11 is strip-shaped, the direction perpendicular to the axis P' may also be referred to as the longitudinal direction.

In addition, the particle diameter X is preferably not less than the diameter of the substrate particle 1 and not more than the total value of the diameter of the substrate particle 1 and the diameter of the insulating fine particle 2 . When the particle size X satisfies such a condition, the insulating-coated conductive particle 10 has a non-existing particle in at least one of the two spherical cap regions when cutting on two parallel planes with the axis P' as a perpendicular line. The state of the region of the insulating fine particle 2. In this case, when the insulating coated conductive particles 10 are captured between the facing electrodes in the connection between circuit members having opposing electrodes, it is possible to suppress the insulating fine particles 2 from being held by the insulating coated conductive particles 10. Low-resistance connection between the substrate particle 1 and the electrode is easy.

In addition, the particle size Y is preferably not less than the sum of the diameter of the substrate particle 1 and 2×(the diameter of the insulating fine particle 2) and not more than the value of 2×(the diameter of the substrate particle 1). When the particle size Y satisfies this condition, the spherical band region when the insulating coated conductive particle 10 is cut on two parallel planes with the axis P' as a perpendicular line In the region covered with insulating fine particles 2 , even if aggregation of insulating-coated conductive particles 10 occurs during connection of circuit members having opposing electrodes, short circuit caused by the aggregated particles can be preferably suppressed. Furthermore, the larger the particle size Y, the more effective it is for the suppression of short circuits, and if it is below the value of 2×(the diameter of the substrate particle 1), the insulation-coated conductive particles in the conductive adhesive layer 13 will be more effective. It is preferable in terms of adjusting the particle density of 10 and controlling the fluidity of the conductive adhesive layer 13 during crimping.

In addition, from the viewpoint of achieving both conductivity and insulation, the ratio X/Y of the particle size X to the particle size Y is preferably 0.4 or more and 0.9 or less. If X/Y is 0.4 or more, even when the bump area of the circuit member is reduced in size, it is easy to ensure the capture property of the insulating coating conductive particles 10, and if X/Y is 0.9 or less, it is easy to connect Resistors are reduced in resistance.

In the conductive adhesive layer (anisotropic conductive film) 13 of the present embodiment, it is preferable that the average value of 80% or more of the insulating-coated conductive particles satisfy the above conditions.

The particle diameter X, the particle diameter Y, and the shortest distance D can be cut along the plane passing through the center of the substrate particle 1 of the insulating-coated conductive particle 10 and parallel to the thickness direction of the conductive adhesive layer 13 by observing The cross-section of the anisotropic conductive film 11 was confirmed.

The cross-section can be processed by using Focus Ion Beam (FIB), scanning electron microscope (SEM), transmission electron microscope (Transmission Electron Microscope, TEM), etc. Observation device. For example, FIB can be used to cut the cross section of the conductive adhesive layer (anisotropic conductive film) 13, and then use SEM for observation and measurement. Specifically, the release film 12 side of the anisotropic conductive film 11 with a release film was fixed to the sample processing using a conductive carbon tape. Fixtures for observation. Thereafter, platinum sputtering was performed from the conductive adhesive layer (anisotropic conductive film) 13 side to form a 10 nm platinum film on the conductive adhesive layer (anisotropic conductive film) 13 . The conductive adhesive layer 13 side of the anisotropic conductive film 11 with a release film was processed using a focused ion beam (FIB), and the processed cross section was observed with a scanning electron microscope (SEM).

The thickness of the adhesive region in the conductive adhesive layer (anisotropic conductive film) 13 can be appropriately set, for example, the thickness of the adhesive region on the opposite side to the adhesive region that satisfies the shortest distance D of the conductive region can be determined according to The height of the bump electrode is set appropriately.

The anisotropic conductive film may also have a multilayer structure in which an insulating adhesive layer not containing conductive particles is laminated on the conductive adhesive layer 13 .

The insulating adhesive layer may contain the above-mentioned monomers, hardeners, and film-forming materials in the same manner as the conductive adhesive layer 13, and may further contain fillers, softeners, accelerators, anti-aging agents, colorants, and resists. Burning agent, thixotropic agent, coupling agent, phenol resin, melamine resin, isocyanate, etc.

By laminating the insulating adhesive layer on the conductive adhesive layer 13, the insulating-coated conductive particles 10 contained in the anisotropic conductive film can be easily localized to one side of the film. In this case, a first adhesive region/conductive region/second adhesive region derived from the conductive adhesive layer 13, and a third adhesive region adjacent to the second adhesive region and derived from the insulating adhesive layer can be formed. Anisotropic conductive film in adhesive region. In addition, by adjusting the difference in melt viscosity between the conductive adhesive layer 13 and the insulating adhesive layer, the fluidity of the insulating-coated conductive particles 10 and the adhesive region during circuit connection can be adjusted arbitrarily.

As an adjustment method, for example, including a film-forming material having a predetermined glass transition temperature (Tg) in the conductive adhesive layer 13 and the insulating adhesive layer is mentioned. In this embodiment, it is preferable to use a thermoplastic resin (especially phenoxy resin) with a Tg of 60°C to 180°C as the film forming material contained in the conductive adhesive layer 13, and to use a thermoplastic resin with a Tg of 40°C to 100°C. thermoplastic resin (especially phenoxy resin) as a film-forming material contained in the insulating adhesive layer. In addition, glass transition temperature can be measured with the thermophysical property measuring apparatuses, such as a differential scanning calorimeter (DSC). For example, a film-forming material is weighed in an aluminum sample pan, and it is measured simultaneously with an empty aluminum sample pan to measure the difference in heat. In this case, in the first measurement, measurement errors may occur due to the influence of melting of the film forming material, etc., so it is preferable to measure the glass transition temperature based on the second and subsequent measurement data.

The insulating coated conductive particles 10 are preferably disposed in the conductive adhesive layer 13 in a regular arrangement. For example, when viewed from the thickness direction of the conductive adhesive layer 13 , it is preferable to arrange the insulating-coated conductive particles 10 so as to form the arrangement pattern shown in FIG. 7 . Regarding the arrangement pattern, as the shape included when connecting the insulating coating conductive particles 10 with a straight line, regular triangle type, isosceles triangular type, regular pentagonal type, square type, rectangular type, and these patterns can be enumerated. Slanted arrangement styles, etc. Among them, the regular triangular arrangement is the pattern that can realize the densest packing of the insulating coating conductive particles 10, and is used to increase the insulating coating trapped between the opposite electrodes. The number of conductive particles and the better arrangement pattern.

The particle density of the insulating-coated conductive particles 10 is preferably not less than 5000 particles/mm ² and not more than 40000 particles/mm ² . By satisfying this condition, securing of connection reliability between opposing electrodes and securing of insulation between adjacent electrodes in the circuit member can be achieved more favorably.

[Manufacturing method of anisotropic conductive film]

Next, one embodiment of the manufacturing method of the anisotropic conductive film of this invention is demonstrated, referring FIG. 4(a), FIG. 4(b) - FIG.

The manufacturing method of the anisotropic conductive film of the present embodiment shown in Fig. 4 (a), Fig. 4 (b) ~ Fig. 6 includes: Step 1, prepare substrate particle 1 with conductivity, and coat this substrate Composite particles 20 of insulating fine particles 2 on the surface of the material particle 1; step 2, accommodate the composite particles 20 in the holes 32 of the particle storage member 30 provided with the holes 32 of the closed end surface S (refer to FIG. 4(a)) Step 3, a part or all of the insulating particles 2 located in the spherical cap region 3 of the composite particles 20 exposed from the holes 32 or all are removed (refer to FIG. 4 (b)); Step 4, make the insulating fine particles in the spherical cap region 3 The removed composite particles 20 move from the particle storage member 30 to the first adhesive layer 13a so that the spherical cap region 3 side is in contact with the first adhesive layer 13a, and the insulating fine particles 2 of the composite particles 20 Part of it is attached to the closed end surface S of the particle storage member 30 and removed, whereby the insulating-coated conductive particles 10 are provided on the first adhesive layer 13a (see FIG. 5(a) and FIG. 5(b)); and In step 5, the second adhesive layer 13b is bonded to the side of the first adhesive layer 13a on which the insulating-coated conductive particles 10 are arranged (see FIG. 5(c)).

The composite particles 20 in step 1 can be prepared as described in the method of (ii) above.

Examples of the material of the particle storage member 30 used in step 2 include cured products of radically polymerizable compounds such as acrylate and methacrylate. The shape of the hole 32 may be any shape that can accommodate the composite particle 20 and the spherical cap region 3 of the composite particle 20 can protrude from the particle storage member 30 , for example, a cylinder, a cone, a prism, and a pyramid. Examples of the shape of the closed end surface S include a circular shape (spherical shape) and a polygonal shape.

The holes 32 are preferably arranged in a regular arrangement (for example, the arrangement shown in FIG. 7 ), so that the conductive adhesive layer 13 in which the insulating coated conductive particles 10 are arranged in the arrangement pattern can be formed.

As a method of removing the insulating fine particles 2 located in the spherical cap region 3 of the composite particle 20, for example, a method of scraping with a scraper made of urethane rubber or metal, and a method of scraping with a brush etc. method.

As a material which comprises the 1st adhesive agent layer 13a, the monomer contained in the said electroconductive adhesive agent layer 13, a curing agent, and a film forming material are mentioned. The first adhesive layer 13a may further contain fillers, softeners, accelerators, anti-aging agents, colorants, flame retardants, thixotropic agents, coupling agents, phenol resins, melamine resins, isocyanates, and the like.

In this embodiment, as shown in Fig. 5(a), it can be used on the release film 12 A laminate in which the first adhesive layer 13a is formed. The thickness of the 1st adhesive layer 13a can be suitably set according to the height of a bump electrode.

Moreover, when bonding the 2nd adhesive bond layer 13b, the laminated body which formed the 2nd adhesive bond layer 13b on the release film 12 can also be used. The thickness of the second adhesive layer 13b can be appropriately set according to the height of the bump electrode. As a material which comprises the 2nd adhesive agent layer 13b, the monomer contained in the said electroconductive adhesive agent layer 13, a curing agent, and a film forming material are mentioned. The second adhesive layer 13b may further contain fillers, softeners, accelerators, anti-aging agents, colorants, flame retardants, thixotropic agents, coupling agents, phenol resins, melamine resins, isocyanates, and the like.

As a bonding method, the lamination method of bonding, heating an adhesive agent, for example is mentioned. In addition, if a vacuum heating laminator that performs lamination under reduced pressure in addition to heating is used, it is possible to reduce the entrainment of air bubbles during lamination.

Through steps 1 to 5, the conductive adhesive layer (anisotropic conductive film) 13 shown in FIG. 12 An anisotropic conductive film with a layered structure with a release film laminated sequentially.

In this embodiment, from the viewpoint of biasing the insulating-coated conductive particles 10 to one side of the conductive adhesive layer 13, it is preferable to set the thickness Da of the first adhesive layer 13a to the thickness Da of the second adhesive layer 13b. The ratio Da/Db of the thickness Db is set to 20/1 to 15/5.

[Constitution of connection structure]

Fig. 8 is a schematic cross section showing an embodiment of the bonded structure of the present invention picture. As shown in this figure, the bonded structure 50 is provided with a first circuit member 52 and a second circuit member 53 facing each other, and a conductive adhesive layer (anisotropic conductive layer) connecting these circuit members 52 and 53. Film) hardened product 54 and constituted.

The first circuit member 52 is, for example, a tape carrier package (TCP), a printed wiring board, a semiconductor silicon chip, or the like. The first circuit member 52 has a plurality of bump electrodes 6 on the mounting surface 5 a side of the main body 5 . The bump electrode 6 is, for example, viewed as a rectangular shape in plan view, and has a thickness of, for example, 3 μm or more and less than 18 μm. Au etc. can be used for the formation material of the bump electrode 6, for example, and it deform|transforms more easily than the insulating-coated conductive particle 10 contained in the hardened|cured material 54 of a conductive adhesive layer (anisotropic conductive film). Furthermore, an insulating layer may be formed on a portion of the mounting surface 5a where the bump electrode 6 is not formed.

The second circuit member 53 is, for example, ITO used in a liquid crystal display, indium zinc oxide (Indium Zinc Oxide, IZO), or a glass substrate or a plastic substrate, a flexible printed circuit board (FPC), and a ceramic wiring formed with a circuit using metal or the like. board etc. As shown in FIG. 8 , the second circuit member 53 has a plurality of circuit electrodes 8 corresponding to the bump electrodes 6 on the mounting surface 7 a side of the main body portion 7 . Like the bump electrodes 6 , the circuit electrodes 8 have, for example, a rectangular shape in plan view, and have a thickness of, for example, about 100 nm. The surface of the circuit electrode 8 is, for example, made of one or more selected from gold, silver, copper, tin, ruthenium, rhodium, palladium, osmium, iridium, platinum, indium tin oxide (ITO), and indium zinc oxide (IZO). Composed of two or more materials. Furthermore, an insulating layer may be formed on a portion of the mounting surface 7a where the circuit electrode 8 is not formed.

The cured product 54 can be formed using, for example, the anisotropic conductive film 11 with a release film shown in FIG. electric film) 13 hardened. Furthermore, in this embodiment, for convenience of description, the layer in which the insulating-coated conductive particles 10 are dispersed is referred to as the conductive adhesive layer 13 , but the adhesive component itself constituting the layer is non-conductive.

The insulating-coated conductive particles 10 may be in a state biased toward the second circuit member 53 , and may be interposed between the bump electrodes 6 and the circuit electrodes 8 in a state of being slightly deformed flat by crimping. Thereby, the electrical connection between the bump electrodes 6 and the circuit electrodes 8 can be realized. In addition, between the adjacent bump electrodes 6, between the bump electrodes 6 and the adjacent circuit electrodes 8, and between the circuit electrodes 8, the insulation-coated conductive particles 10 are separated in a patterned state, thereby realizing the formation of the adjacent bump electrodes 6. , Electrical insulation between bump electrodes 6 and adjacent circuit electrodes 8 , and between circuit electrodes 8 .

[Manufacturing method of bonded structure]

9 and 10 are schematic cross-sectional views showing steps of manufacturing the bonded structure shown in FIG. 8 . When forming the bonded structure 50, first, the release film 12 is peeled off from the anisotropic conductive film 11 with the release film, and the conductive adhesive layer (anisotropic conductive film) 13 layers are placed opposite to the mounting surface 7a. Press on the second circuit member 53 . Next, as shown in FIG. 10 , the first circuit member 52 is placed on the second circuit on which the conductive adhesive layer (anisotropic conductive film) 13 is laminated so that the bump electrodes 6 and the circuit electrodes 8 face each other. member 53. Then, the first circuit member 52 and the second circuit member 53 are pressed in the thickness direction while heating the conductive adhesive layer (anisotropic conductive film) 13 .

Thereby, the adhesive component of the conductive adhesive layer (anisotropic conductive film) 13 flows, the distance between the bump electrode 6 and the circuit electrode 8 is shortened, and the insulating coating is electrically conductive. The particles 10 are interlocked, and in this state, the conductive adhesive layer 13 is cured. By hardening the conductive adhesive layer 13, the bump electrodes 6 and the circuit electrodes 8 are electrically connected, and the adjacent bump electrodes 6, the bump electrodes 6, and the adjacent circuit electrodes 8, and the circuit electrodes 8 are electrically connected to each other. In an insulated state, a cured product 54 of the conductive adhesive layer (anisotropic conductive film) 13 is formed to obtain a bonded structure 50 shown in FIG. 8 . In the obtained bonded structure 50, the cured product 54 of the conductive adhesive layer (anisotropic conductive film) 13 can sufficiently prevent the temporal change in the distance between the bump electrode 6 and the circuit electrode 8, In addition, long-term reliability of electrical characteristics can be ensured.

Furthermore, the heating temperature at the time of connection is preferably higher than the temperature at which polymerization active species are generated in the curing agent and polymerization of the polymerization monomer is initiated. The heating temperature is, for example, 80°C to 200°C, preferably 100°C to 180°C. In addition, the heating time is, for example, 0.1 second to 30 seconds, preferably 1 second to 20 seconds. When the heating temperature is less than 80°C, the curing rate becomes slow, and when it exceeds 200°C, undesired side reactions tend to proceed. In addition, when the heating time is less than 0.1 second, the curing reaction cannot proceed sufficiently, and when it exceeds 30 seconds, the productivity of the cured product 54 decreases, and undesirable side reactions tend to proceed.

According to the method of manufacturing the bonded structure of this embodiment, by using the conductive adhesive layer (anisotropic conductive film) 13 containing the insulating coated conductive particles 10, both the connection reliability and the An insulating connection structure between adjacent electrodes in a circuit member.

[Example]

Hereinafter, although an Example and a comparative example demonstrate this invention more concretely, this invention is not limited to the following Example.

[Formation of Adhesive Layer]

The adhesive layer was formed by the method shown below, respectively.

(adhesive layer 1)

In a 3000mL three-necked flask equipped with a Dimroth cooling tube, a calcium chloride tube, and a Teflon stirring rod connected to a stirring motor, 4,4'-(9-Fremylene) -45 g of diphenol (manufactured by Sigma-Aldrich Japan Co., Ltd.), and 50 g of 3,3',5,5'-tetramethylbiphenol diglycidyl ether (manufactured by Mitsubishi Chemical Co., Ltd. : YX-4000H) was dissolved in 1000 mL of N-methylpyrrolidone to prepare a reaction solution. 21 g of potassium carbonate was added there, and it stirred, heating to 110 degreeC with the mantle heater. After stirring for 3 hours, the reaction solution was dropped into a beaker containing 1000 mL of methanol, and the generated precipitate was suction-filtered and collected by filtration. The filtered precipitate was washed three times with 300 mL of methanol to obtain 75 g of phenoxy resin a.

Furthermore, according to the following conditions and using gel permeation chromatography (GPC) to measure the molecular weight and dispersity of phenoxy resin a, the results are based on polystyrene conversion using the standard curve of standard polystyrene, Mn =15769, Mw=38045, Mw/Mn=2.413.

(measurement conditions)

Device: GPC-8020 manufactured by Tosoh Co., Ltd.

Detector: RI-8020 manufactured by Tosoh Co., Ltd.

Column: Gelpack GLA160S+GLA150S manufactured by Hitachi Chemical Co., Ltd.

Sample concentration: 120mg/3mL

Solvent: Tetrahydrofuran

Injection volume: 60μL

Pressure: 2.94×106Pa (30kgf/cm ² )

Flow: 1.00mL/min

In addition, when the glass transition temperature of the phenoxy resin a was measured under the following conditions, it was 160°C.

(measurement conditions)

Using a differential scanning calorimetry device (manufactured by PerkinElmer Japan Co., Ltd., Pyeis), under a nitrogen atmosphere, measure twice at a heating rate: 10°C/min, in the range of 30°C to 250°C , let the second measurement result be the glass transition temperature.

Next, 50 parts by mass of bisphenol A type epoxy resin (manufactured by Mitsubishi Chemical Corporation: jER828), 5 parts by mass of 4-hydroxyphenylmethylbenzyl hexafluoroantimonate as a hardener, and 50 parts by mass Parts of phenoxy resin a as a film forming material were dissolved and mixed in methyl ethyl ketone to prepare an adhesive paste.

The obtained adhesive paste was coated on a PET resin film with a thickness of 50 μm using a coater, and dried with hot air at 70° C. for 5 minutes to form an adhesive layer 1 with a thickness of 15 μm.

(adhesive layer 2)

The adhesive layer 2 having a thickness of 0.8 μm was formed in the same manner as the formation of the adhesive layer 1 .

(adhesive layer 3)

45 parts by mass of bisphenol F-type epoxy resin (manufactured by Mitsubishi Chemical Corporation: jER807), 5 parts by mass of 4-hydroxyphenylmethylbenzyl hexafluoroantimonate as a hardener, and 55 parts by mass of Phenoxy resin YP-70 (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.) as a film forming material was mixed to prepare an adhesive paste.

The obtained adhesive paste was coated on a PET resin film with a thickness of 50 μm using a coater, and dried with hot air at 70° C. for 5 minutes to form an adhesive layer 3 with a thickness of 15 μm.

[Preparation of Composite Particles]

Composite particles were respectively prepared by the methods shown below.

(substrate particles)

After alkaline degreasing, 3 g of crosslinked polystyrene particles (resin fine particles) with an average particle diameter of 3.0 μm were neutralized with acid. Next, the resin fine particles were added to 100 mL of a cationic polymer solution adjusted to pH 6.0, stirred at 60° C. for 1 hour, filtered through a membrane filter with a diameter of 3 μm (manufactured by Millipore), and wash. The resin microparticles after water washing were added to the palladium catalyst containing 8% by mass of Atotech Neoganth 834 (manufactured by Atotech Japan Co., Ltd., trade name) as a palladium catalyst. solution in 100 mL, stirred at 35°C for 30 minutes, filtered, and washed with water.

Next, the water-washed resin fine particles were added to a 3 g/L sodium hypophosphite solution to obtain surface-activated resin fine particles (resin core particles). This resin core particle, water 1000mL, sodium malate (concentration 20g/L) drop into 2000mL Ultrasonic dispersion was carried out in a glass beaker. Next, the pH was adjusted to 5.5 or less by stirring (600 rpm) with a fluorine-made stirring blade, and the dispersion liquid was heated to 80°C. Use a quantitative pump to add thereto SEK670 (Japan Carney (Kanigen) Co., Ltd., product name) mixed with the ratio of (SEK670-0)/(SEK670-1)=1.8 as electroless nickel plating solution with 7ml/min As a result, the resulting initial thin film plating solution started a reduction reaction after about 30 seconds, bubbles were generated from the bath, and the bath as a whole changed from gray to black. Afterwards, after completing the formation of the initial film, add the thickening plating solution mixed with nickel sulfate (concentration 224g/L) and sodium malate (concentration 305g/L) simultaneously with 13ml/min without interruption, and utilize hypophosphorous acid Two kinds of thickening plating solution mixed with sodium (concentration: 534g/L) and sodium hydroxide (concentration: 34g/L). Thereafter, stirring was performed until generation of air bubbles ceased, and as a result, the entire bath changed from black to gray. By this plating treatment, a nickel plating layer covering the resin core particles can be formed. When the diameter of the substrate particle was measured by SEM, it was 3.3 μm in diameter.

(insulating fine particles)

A silane coupling agent (3-acryloxypropyltrimethoxysilane, manufactured by Shin-Etsu Chemical Co., Ltd.: KBM-5103) having a radically polymerizable double bond and an alkoxysilyl group was put into a 500 mL three-neck flask 7.5 g, methacrylic acid (manufactured by Wako Pure Chemical Industries, Ltd.) 6.9 g, methyl acrylate (manufactured by Wako Pure Chemical Industries, Ltd.) 4.1 g, 0.36 g of 2,2'-azobis(isobutyronitrile) , and 350 g of acetonitrile, and these were mixed. After displacing dissolved oxygen with nitrogen gas (100 mL/min) for 1 hour, heating was carried out at 80° C. and polymerization was carried out for 6 hours to obtain organic-inorganic hybrid particles with a primary particle diameter of 300 nm. Put the dispersion containing the organic-inorganic hybrid particles into 20mL In a container, unreacted monomers were removed by centrifugation (manufactured by Kokusan Co., Ltd.: H-103N) at 3000 r.p.m. for 30 minutes. Furthermore, 20 mL of methanol was added, ultrasonic dispersion was performed, and centrifugation was performed again. Triethylamine was put therein in an equimolar amount relative to the amount of carboxyl groups as a curing catalyst, methanol was added thereto, ultrasonic dispersion was carried out, and a crosslinking reaction was carried out. After centrifugation again, triethylamine was removed, and the obtained insulating fine particles were dispersed in methanol.

(composite particle 1)

<Step of Forming Surface Functional Groups on Substrate Particles>

8 mmol of mercaptoacetic acid (manufactured by Wako Pure Chemical Industries, Ltd., trade name) was dissolved in 200 ml of methanol, and 10 g of the above-prepared substrate particles were added thereto. Stir at room temperature (25° C.) for 2 hours using a Three-One Motor (Three-One Motor) (manufactured by Shinto Science Co., Ltd., trade name: BL3000) equipped with a stirring blade with a diameter of 45 mm, and use methanol after washing Φ3 μm membrane filter (manufactured by Millipore: coated membrane filter) was filtered to obtain 10 g of substrate particles having a carboxyl group as a surface functional group.

<Step of Adsorbing Polymer Electrolyte on Substrate Particles>

A 30 mass % polyethyleneimine aqueous solution (manufactured by Wako Pure Chemical Industries, Ltd., trade name: 30% polyethyleneimine P-70 solution) containing polyethyleneimine with a weight average molecular weight of 70000 was diluted with ultrapure water, A 0.3 mass % polyethyleneimine aqueous solution was obtained. 10 g of the above-mentioned carboxyl group-introduced substrate particles were added to the 0.3 mass % polyethyleneimine aqueous solution. Stir at room temperature (25° C.) for 15 minutes, and filter with a Φ3 μm membrane filter to obtain polyethylene oxide as a polymer electrolyte. Amines are adsorbed to the surface of particles. The particles were mixed with 200 g of ultrapure water, stirred at room temperature (25° C.) for 5 minutes, and filtered. The particles obtained by filtration were washed twice with 200 g of ultrapure water on the membrane filter to remove polyethyleneimine not adsorbed to the particles.

<Step of Coating Substrate Particles with Insulating Fine Particles>

To 10 g of substrate particles adsorbed by polyethyleneimine, 2% by mass of insulating fine particles obtained by diluting the prepared insulating fine particles with 2-propanol (manufactured by Wako Pure Chemical Industries, Ltd.) was added dropwise. While stirring 50 g of the dispersion liquid at room temperature (25° C.) for 30 minutes, composite particles 1 including substrate particles and insulating fine particles covering them were obtained. Composite particles 1 taken out by filtration were put into a mixture of 50 g of a silicone oligomer with a weight average molecular weight of 1000 (manufactured by Hitachi Chemical Coated Sand Co., Ltd.: SC-6000) and 150 g of methanol solution, stirred at room temperature (25° C.) for 1 hour, and filtered. Finally, the composite particles were put in toluene (manufactured by Wako Pure Chemical Industries, Ltd.), stirred for 3 minutes, and filtered.

<grading steps>

The obtained composite particles 1 were vacuum-dried at 150° C. for 1 hour. Thereafter, aggregates were removed using a cyclone airflow type sieve classifier (Seishin Enterprise Co., Ltd.).

(composite particle 2)

10 g of substrate particles having a carboxyl group as a surface functional group were obtained in the same manner as in composite particle 1 .

A 30 mass % polyethyleneimine aqueous solution (manufactured by Wako Pure Chemical Industries, Ltd., trade name: 30% polyethyleneimine P-70 solution) containing polyethyleneimine with a weight average molecular weight of 70000 was diluted with ultrapure water, A 0.3 mass % polyethyleneimine aqueous solution was obtained. 10 g of the above-mentioned carboxyl group-introduced substrate particles were added to the 0.3 mass % polyethyleneimine aqueous solution. The mixture was stirred at room temperature (25° C.) for 15 minutes, and filtered through a Φ5 μm membrane filter to obtain particles having polyethyleneimine as a polymer electrolyte adsorbed on the surface. The particles were mixed with 200 g of ultrapure water, stirred at room temperature (25° C.) for 5 minutes, and filtered. The particles obtained by filtration were washed twice with 200 g of ultrapure water on the membrane filter to remove polyethyleneimine not adsorbed to the particles.

To 10 g of substrate particles adsorbed by polyethyleneimine, 2% by mass of insulating fine particles obtained by diluting the prepared insulating fine particles with 2-propanol (manufactured by Wako Pure Chemical Industries, Ltd.) was added dropwise. While stirring 50 g of the fine particle dispersion liquid at room temperature (25° C.) for 30 minutes, composite particles 2 including conductive particles and insulating fine particles 1 covering them were obtained. Composite particles 2 taken out by filtration were put into a mixture of 50 g of a silicone oligomer with a weight average molecular weight of 1000 (manufactured by Hitachi Chemical Coated Sand Co., Ltd.: SC-6000) and 150 g of methanol solution, stirred at room temperature (25° C.) for 1 hour, and filtered. Finally, the composite particles were put in toluene (manufactured by Wako Pure Chemical Industries, Ltd.), stirred for 3 minutes, and filtered.

The obtained composite particles 2 were vacuum-dried at 150° C. for 1 hour. After that, using a cyclone airflow type sieving classifier (Seishin) Enterprise Co., Ltd.) to remove the condensate.

(composite particle 3)

10 g of substrate particles having a carboxyl group as a surface functional group were obtained in the same manner as in composite particle 1 .

A 30 mass % polyethyleneimine aqueous solution (manufactured by Wako Pure Chemical Industries, Ltd., trade name: 30% polyethyleneimine P-70 solution) containing polyethyleneimine with a weight average molecular weight of 70000 was diluted with ultrapure water, A 0.3 mass % polyethyleneimine aqueous solution was obtained. 10 g of the above-mentioned carboxyl group-introduced substrate particles were added to the 0.3 mass % polyethyleneimine aqueous solution. The mixture was stirred at room temperature (25° C.) for 15 minutes, and filtered through a Φ6 μm membrane filter to obtain particles having polyethyleneimine as a polymer electrolyte adsorbed on the surface. The particles were mixed with 200 g of ultrapure water, stirred at room temperature (25° C.) for 5 minutes, and filtered. The particles obtained by filtration were washed twice with 200 g of ultrapure water on the membrane filter to remove polyethyleneimine not adsorbed to the particles.

To 10 g of substrate particles adsorbed by polyethyleneimine, 50 g of a 2% by mass insulating fine particle dispersion obtained by diluting insulating fine particles with 2-propanol (manufactured by Wako Pure Chemical Industries, Ltd.) was added dropwise , while stirring at room temperature (25° C.) for 30 minutes, composite particles 3 including conductive particles and insulating fine particles 1 covering them were obtained. Composite particles 3 taken out by filtration were put into a mixture of 50 g of a silicone oligomer with a weight average molecular weight of 1000 (manufactured by Hitachi Chemical Coated Sand Co., Ltd.: SC-6000) and 150 g of methanol solution, stirred at room temperature (25° C.) for 1 hour, and filtered. Finally, the composite particles The mixture was put into toluene (manufactured by Wako Pure Chemical Industries, Ltd.), stirred for 3 minutes, and filtered.

The obtained composite particles 3 were vacuum-dried at 150° C. for 1 hour. Thereafter, aggregates were removed using a cyclone airflow type sieve classifier (Seishin Enterprise Co., Ltd.).

[Preparation of particle storage member]

The particle storage members shown below were prepared respectively.

(Particle storage member 1)

It is arranged in a methacrylic acid layer with a thickness of 5.0 μm in such a way that the holes in the shape of a cylinder (diameter 4.0 μm, depth 3.8 μm) with a closed end surface (bottom surface) are arranged in a regular triangle at a density of 29,000/mm ² The plates obtained by the polymerization of esters.

(Particle storage member 2)

Arrange the holes in the shape of a cylinder (diameter 4.0 μm, depth 3.8 μm) with a closed end surface (bottom surface) in a square shape at a density of 20,000/mm ² on a methacrylate substrate with a thickness of 5.0 μm polymerization obtained on the plate.

(Particle storage member 3)

It is arranged in a methacrylic acid layer with a thickness of 5.0 μm in such a way that the holes in the shape of a cylinder (diameter 4.6 μm, depth 3.8 μm) with a closed end surface (bottom surface) are arranged in a regular triangle at a density of 25,000 pieces/mm ² The plates obtained by the polymerization of esters.

(Particle storage member 4)

It is arranged in a methacrylic acid layer with a thickness of 5.0 μm in such a way that the holes of the cylindrical shape (5.2 μm in diameter and 3.8 μm in depth) with a closed end surface (bottom surface) are arranged in a regular triangle at a density of 20,000/mm ² The plates obtained by the polymerization of esters.

(Particle storage member 5)

It is arranged in a methacrylic acid layer with a thickness of 5.0 μm in such a way that the holes in the shape of a cylinder (diameter 3.7 μm, depth 3.8 μm) with a closed end surface (bottom surface) are arranged in a regular triangle at a density of 29000/mm ² The plates obtained by the polymerization of esters.

[Production of anisotropic conductive film]

(Example 1)

Perform the same method as shown in FIG. 4( a ) and FIG. 4( b ), store the composite particles 1 in the holes of the particle storage member 1, and remove them using a scraper made of urethane rubber with the end surface horizontal. Insulating fine particles located in the spherical cap region of the composite particles exposed from the pores. In addition, according to this operation, it was confirmed by SEM observation that a region where the number of insulating fine particles of 54.7 μm ² is zero is provided in the spherical cap region of the composite particles.

Next, proceed in the same manner as the method shown in FIG. 5(a) and FIG. 5(b), and arrange insulating-coated conductive particles arranged in a regular triangle at a particle density of 29,000/mm ² on the adhesive layer 1. . Furthermore, at this time, by the adherence of insulating fine particles to the bottom surface of the hole of the particle storage member 1, it was confirmed by observation with an SEM that the insulating coating conductive particles are provided with A region where the number of insulating fine particles of 47.9 μm ² is 0.

Next, the adhesive layer 2 is bonded to the side of the adhesive layer 1 on which the insulating coated conductive particles are disposed by using a hot roll laminator heated to 40° C., so that a conductive adhesive is provided between the two PET resin films. Layer anisotropic conductive film.

(Example 2)

The anisotropic conductive film was obtained in the same manner as in Example 1 except that the insulating coated conductive particles arranged in a square shape at a particle density of 20,000 particles/ ^mm2 were provided on the adhesive layer 1 using the particle storage member 2. .

(Example 3)

Except having used the composite particle 2 instead of the composite particle 1, and having used the particle storage member 3 instead of the particle storage member 1, it carried out similarly to Example 1, and obtained the anisotropic conductive film. In this case, it can also be confirmed that there is a region where the number of insulating fine particles of 50.2 μm ² is 0 in the spherical cap region of the composite particle, and it can be confirmed that the insulating coating conductive particle is in contact with the adhesive layer 1. On the opposite side, there is a region where the number of insulating fine particles of 48.7 μm ² is 0.

(Example 4)

Except having used the composite particle 3 instead of the composite particle 1, and having used the particle storage member 4 instead of the particle storage member 1, it carried out similarly to Example 1, and obtained the anisotropic conductive film. In this case, it can also be confirmed that there is a region where the number of insulating fine particles of 53.3 μm ² is 0 in the spherical cap region of the composite particle, and it can be confirmed that the insulating coating conductive particle is in contact with the adhesive layer 1. On the opposite side, there is a region where the number of insulating fine particles of 48.7 μm ² is 0.

(Example 5)

Except having used the particle storage member 5 instead of the particle storage member 1, it carried out similarly to Example 1, and obtained the anisotropic conductive film. In this case, it can also be confirmed that there is a region where the number of insulating fine particles of 52.6 μm ² is 0 in the spherical cap region of the composite particle, and it can be confirmed that the portion of the insulating-coated conductive particle in contact with the adhesive layer 1 On the opposite side, there is a region where the number of insulating fine particles of 47.9 μm ² is zero.

(Example 6)

Except having used the adhesive bond layer 3 instead of the adhesive bond layer 1, it carried out similarly to Example 1, and obtained the anisotropic conductive film.

[Evaluation of Anisotropic Conductive Film]

The cross-section processing and cross-sectional observation of the anisotropic conductive film of Example 1-Example 6 were performed by FIB-SEM. Furthermore, cross-sectional observation is carried out in a plane that passes through the center of the substrate particle of the insulating-coated conductive particle and is parallel to the thickness direction of the conductive adhesive layer to measure the thickness of the insulating-coated conductive particle parallel to the conductive adhesive layer. The particle size X in the thickness direction of the conductive adhesive layer and the particle size Y in the direction perpendicular to the thickness direction of the conductive adhesive layer, and the shortest distance D between the insulating coated conductive particles and one side of the conductive adhesive layer is measured . The results are shown in Table 1.

[Creation of connection structure]

As the first circuit member, prepare an IC wafer having a linear arrangement structure in which bump electrodes are arranged in a row (the outer shape is 2 mm × 20 mm, the thickness is 0.55 mm, the size of the bump electrodes is 100 μm × 30 μm, the distance between the bump electrodes 8µm, bump electrical pole thickness of 15 μm). In addition, as a second circuit member, an ITO wiring pattern (pattern width: 21 μm, inter-electrode space: 17 μm) was prepared on the surface of a glass substrate (manufactured by Corning: #1737, 38 mm×28 mm, thickness 0.3 mm). become one.

One of the PET resin films of the anisotropic conductive films (2.5mm×25mm) of Examples 1 to 6 was peeled off, and a stage (150mm×150mm) including a ceramic heater and a tool (3mm×20mm) were used. The thermocompression bonding device heats and presses for 2 seconds under the conditions of 80° C. and 0.98 MPa (10 kgf/cm ² ), and attaches the conductive adhesive layer to the glass substrate.

Next, after peeling off the other PET resin film of the anisotropic conductive film and aligning the bump electrodes of the IC chip and the circuit electrodes of the glass substrate, a stage (150mm×150mm) including a ceramic heater and a tool are used to (3mm×20mm) thermocompression bonding device, heat and press for 5 seconds under the conditions of the measured maximum temperature of the conductive adhesive layer of 170°C and a pressure of 70MPa converted from the area of the bump electrode to obtain a connection structure.

[Evaluation of Linked Structure]

The connection resistance between a bump electrode and a circuit electrode, and the insulation resistance between adjacent circuit electrodes were evaluated about the obtained bonded structure. In addition, the evaluation of connection resistance was implemented by the four-probe measurement method, and the average value of the measurement of 14 places was used. In addition, in the evaluation of the insulation resistance, a voltage of 50 V was applied to the bonded structure, and the insulation resistance between the circuit electrodes at a total of 1440 points was measured at once. The results are shown in Table 2.

[Table 2]

As shown in Table 2, the bonded structures produced using the anisotropic conductive films of Examples 1 to 6 had a connection resistance value of 1.2Ω or less, and had sufficient insulation resistance.

1‧‧‧Substrate particles

2‧‧‧Insulating particles

10‧‧‧Insulation coated conductive particles

P‧‧‧central axis

Claims (17)

An insulating-coated conductive particle comprising a conductive substrate particle and insulating fine particles covering the surface of the substrate particle, and having a sparse region with a density of insulating fine particles of 0 to 2.0 pieces/μm ² , a dense region having a density of insulating fine particles higher than that of the sparse region, the insulating-coated conductive particle has two of the sparse regions through which a central axis passes through the center of the substrate particle, When the surface area of the substrate particle is S ₀ μm ² , the two sparse regions include a region where the number of insulating fine particles is 0.10×S ₀ μm ² or more. Insulation-coated conductive particles as described in item 1 of the scope of the patent application, wherein in the two sparse regions, the density of the number of insulating fine particles is 0/μm ² , and when the surface area of the substrate particles is set to When S ₀ μm ² , the two sparse regions occupy more than 0.5×S ₀ μm ² . The insulation-coated conductive particle according to claim 1, wherein in the dense region, the density of the insulating fine particles is 2.0-5.0 particles/μm ² . An insulating-coated conductive particle, which is a composite particle including a conductive substrate particle and insulating fine particles covering the surface of the substrate particle, when the substrate particle is cut in two parallel planes Part or all of the insulating fine particles in the two spherical cap regions are removed, wherein when the surface area of the substrate particle is set as S ₀ μm ² , the two spherical cap regions contain 0.10×S ₀ A region where the number of insulating fine particles of μm ² or more is zero. Insulation-coated conductive particles as described in item 4 of the scope of the patent application, wherein in the two spherical cap regions, the number of insulating fine particles per unit area is 0, and when the surface area of the substrate particles is set as S ₀ μm ² , the two spherical cap regions occupy more than 0.5×S ₀ μm ² . The insulation-coated conductive particle as described in Claim 4 of the patent application, wherein the density of the insulating fine particles is 2.0 to 5.0 in the band region when the substrate particle is cut by the two parallel planes /μm ² . An insulating-coated conductive particle comprising a conductive substrate particle and insulating fine particles covering the surface of the substrate particle, the insulating fine particles are biased when the substrate particle is cut in two parallel planes The area of the spherical zone, when the surface area of the substrate particle is set as S ₀ μm ² , the two spherical cap regions when the substrate particle is cut by the two parallel planes include 0.10×S ₀ μm ² The above region where the number of insulating fine particles is 0. Insulation-coated conductive particles as described in item 7 of the scope of the patent application, wherein in the two spherical cap regions, the number of insulating fine particles per unit area is 0, and when the surface area of the substrate particles is set as S ₀ μm ² , the two spherical cap regions occupy more than 0.5×S ₀ μm ² . Insulation-coated conductive particles as described in claim 7 of the patent application, wherein the density of the insulating fine particles is 2.0-5.0 particles/μm ² in the spherical region. Insulation-coated conductive particles as described in any one of items 1 to 9 of the scope of the patent application, wherein the smallest diameter X' and the largest diameter of the individual insulating-coated conductive particles The ratio X'/Y' of Y' is not less than 0.4 and not more than 0.9. An anisotropic conductive film comprising a conductive adhesive layer comprising insulating coated conductive particles and adhesive components as described in any one of claims 1 to 10 of the patent application. The anisotropic conductive film as described in item 11 of the scope of application for patents, which comprises the insulating coated conductive particles as described in item 1 of the scope of patent applications, the conductive particles of insulating coated coating pass through the center of the substrate particles and are parallel to An axis in the thickness direction of the conductive adhesive layer is arranged so as to pass through the two sparse regions. The anisotropic conductive film as described in claim 11 of the patent application, which comprises the insulating coated conductive particles as described in claim 4, the insulating coated conductive particles pass through the center of the substrate particle and are parallel to The axis in the thickness direction of the conductive adhesive layer is arranged so as to pass through the two spherical cap regions. The anisotropic conductive film as described in claim 11 of the patent application, which comprises the insulating coated conductive particles as described in claim 4 or claim 7, the insulating coated conductive particles pass through the substrate particles The center of the conductive adhesive layer and the axis parallel to the thickness direction of the conductive adhesive layer are arranged so as to be perpendicular to the two parallel planes. A method for manufacturing an anisotropic conductive film, which is used to manufacture an anisotropic conductive film as described in any one of the 11th to 14th items of the patent application, which includes: preparing substrate particles with conductivity, and coating The table of the substrate particle The steps of composite particles of insulating fine particles on the surface; the step of storing the composite particles in the holes of the particle storage member provided with holes that close the end faces; the steps of the composite particles exposed from the holes A step of removing part or all of the insulating fine particles located in the spherical cap region; making the composite particles from which the insulating fine particles in the spherical cap region have been removed contact the first adhesive layer at the spherical cap region side moving from the particle storage member to the first adhesive layer, and a part of the insulating fine particles of the composite particles are attached to the closed end surface of the particle storage member and removed, whereby the The step of providing the insulating-coated conductive particles on the first adhesive layer; and the step of attaching the second adhesive layer to the side of the first adhesive layer on which the insulating-coated conductive particles are arranged. A connection structure comprising: a first circuit member having a bump electrode; a second circuit member having a circuit electrode corresponding to the bump electrode; The insulating-coated conductive particle according to one item exists between the bump electrode and the circuit electrode and electrically connects the bump electrode and the circuit electrode. A method of manufacturing a connection structure, which has the anisotropic conductive film as described in any one of the 11th to 14th items of the patent application or is obtained by the method as described in the 15th item of the patent application The anisotropic conductive film exists between the first circuit member having the bump electrode and the electric circuit member corresponding to the bump electrode. between the second circuit members of the road electrodes, and thermocompression bonding the first circuit member and the second circuit member.

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