TWI802493B - motor waterproof cover - Google Patents

motor waterproof cover Download PDF

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Publication number
TWI802493B
TWI802493B TW111131708A TW111131708A TWI802493B TW I802493 B TWI802493 B TW I802493B TW 111131708 A TW111131708 A TW 111131708A TW 111131708 A TW111131708 A TW 111131708A TW I802493 B TWI802493 B TW I802493B
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Taiwan
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joint part
motor
drive shaft
joint
shielding
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TW111131708A
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Chinese (zh)
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TW202410602A (en
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徐慶吉
許哲維
許能惟
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凱爾迪科技股份有限公司
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Publication of TW202410602A publication Critical patent/TW202410602A/en

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Abstract

本發明係一種馬達防水蓋,其包含一蓋體,蓋體為中空管體且具有一結合部及一遮蔽部,結合部形成有一上開口、一環槽及複數鎖孔,上開口位於結合部的一端,環槽環繞凹設於結合部的內壁面,各鎖孔環繞間隔穿設於結合部,遮蔽部形成有一下開口,下開口位於遮蔽部相對於結合部的另一端;一防水件,其設置於環槽中;藉由將本發明套設於一馬達之驅動軸且鄰近於馬達本體的一側,達到除了可與驅動軸同步轉動,使得回濺之清洗液將會被本發明所遮擋並再次利用離心力而甩開外,更能夠達到防止回濺之清洗液沿驅動軸流入馬達本體,避免馬達損壞之功效。The invention relates to a motor waterproof cover, which includes a cover body, the cover body is a hollow tube body and has a joint part and a shielding part, the joint part is formed with an upper opening, a ring groove and a plurality of lock holes, and the upper opening is located at the joint part At one end of the connecting part, the ring groove is recessed around the inner wall surface of the joint part, and the keyholes are penetrated around the joint part at intervals, and the shielding part is formed with a lower opening, which is located at the other end of the shielding part relative to the joint part; a waterproof part, It is arranged in the ring groove; by setting the present invention on the drive shaft of a motor and adjacent to one side of the motor body, it can rotate synchronously with the drive shaft, so that the cleaning liquid splashed back will be suppressed by the present invention. Covering and throwing off again by centrifugal force can also prevent the splashed cleaning fluid from flowing into the motor body along the drive shaft and avoid damage to the motor.

Description

馬達防水蓋motor waterproof cover

本發明係涉及一種防水蓋,尤指一種用於馬達軸心之馬達防水蓋。The invention relates to a waterproof cover, in particular to a motor waterproof cover used for a motor shaft.

現有技術的馬達,尤指用於驅動晶圓旋轉載具的馬達,其主要結構包含一本體及一驅動軸,本體位於下方位置,驅動軸的一端連接於本體,另一端自本體的上方方向向上延伸而出,整體呈直立狀,晶圓旋轉載具的轉盤固定於驅動軸上,當欲對放置於轉盤上的晶圓進行清洗作業時,驅動軸會開始轉動,使得晶圓進行同步轉動,並且將清洗液噴灑於晶圓上,藉此達到清洗液可均勻的噴灑於晶圓上後再甩乾之功效。A motor in the prior art, especially a motor used to drive a wafer rotation carrier, its main structure includes a body and a drive shaft, the body is located at the bottom, one end of the drive shaft is connected to the body, and the other end is upward from the top of the body Extending out, the whole is upright. The turntable of the wafer rotating carrier is fixed on the drive shaft. When cleaning the wafer placed on the turntable, the drive shaft will start to rotate, so that the wafer will rotate synchronously. And spray the cleaning solution on the wafer, so as to achieve the effect that the cleaning solution can be evenly sprayed on the wafer and then dried.

然而,在前述清洗的過程中,因為清洗液受到晶圓旋轉的離心力影響而甩出,甩出之清洗液碰到壁面後,會產生回濺之情形,而因為清洗液為酸性液體,故當回濺之清洗液噴灑至驅動軸上時,容易沿著驅動軸而流入馬達本體中,長時間下來易導致馬達本體受損及減少使用壽命;因此,針對前述的問題及缺點,實有待加以改良。However, in the aforementioned cleaning process, because the cleaning liquid is thrown out due to the centrifugal force of the wafer rotation, the thrown cleaning liquid will splash back when it hits the wall surface, and because the cleaning liquid is an acidic liquid, when When the splashed cleaning fluid is sprayed on the drive shaft, it is easy to flow into the motor body along the drive shaft, which will easily cause damage to the motor body and reduce the service life of the motor body after a long time; therefore, it is necessary to improve the above-mentioned problems and shortcomings. .

有鑒於現有技術的不足,本發明提供一種馬達防水蓋,其利用結合部固定於馬達之驅動軸,達到與驅動軸同部旋轉外,結合部與遮蔽部可同時達到遮蔽驅動軸之目的。In view of the deficiencies in the prior art, the present invention provides a motor waterproof cover, which is fixed to the drive shaft of the motor by a joint, so as to achieve the same rotation with the drive shaft, and the joint and the shielding part can simultaneously achieve the purpose of shielding the drive shaft.

為達上述之發明目的,本發明所採用的技術手段為設計一種馬達防水蓋,其包含: 一蓋體,其為中空管體且具有一結合部及一遮蔽部,該結合部位於該蓋體的一端,該遮蔽部位於該蓋體的另一端,該結合部形成有一上開口、一環槽及複數鎖孔,該上開口位於該結合部相對於該遮蔽部的另一端,該環槽環繞凹設於該結合部的內壁面,各該鎖孔環繞間隔穿設於該結合部,該遮蔽部形成有一下開口,該下開口位於該遮蔽部相對於該結合部的另一端,該下開口與該上開口相連通; 一防水件,其設置於該環槽中。 In order to achieve the above-mentioned purpose of the invention, the technical means adopted in the present invention is to design a motor waterproof cover, which includes: A cover body, which is a hollow tube and has a joint portion and a shielding portion, the joint portion is located at one end of the cover body, the shielding portion is located at the other end of the cover body, the joint portion forms an upper opening, a ring groove and a plurality of lock holes, the upper opening is located at the other end of the joint part relative to the shielding part, the annular groove is recessed around the inner wall of the joint part, and each of the lock holes is spaced around the joint part, the The shielding part is formed with a lower opening, the lower opening is located at the other end of the shielding part relative to the joint part, and the lower opening communicates with the upper opening; A waterproof piece is arranged in the ring groove.

進一步而言,所述之馬達防水蓋,其中該結合部進一步形成有一上環斜面,該上環斜面位於該結合部的外壁面,且該上環斜面的外徑朝向該遮蔽部的方向逐漸增加。Furthermore, in the motor waterproof cover, the joint portion is further formed with an upper ring slope, the upper ring slope is located on the outer wall surface of the joint portion, and the outer diameter of the upper ring slope gradually increases toward the shielding portion.

進一步而言,所述之馬達防水蓋,其中該遮蔽部進一步形成有一下環斜面,該下環斜面位於該遮蔽部的外壁面,且該下環斜面的外徑朝向該下開口的方向逐漸增加。Furthermore, the motor waterproof cover, wherein the shielding part is further formed with a lower ring slope, the lower ring slope is located on the outer wall of the shielding part, and the outer diameter of the lower ring slope gradually increases toward the lower opening .

進一步而言,所述之馬達防水蓋,其中該防水件為環形橡膠圈。Further, in the motor waterproof cover, the waterproof member is an annular rubber ring.

本發明的優點在於,藉由將本發明套設固定於一驅動馬達之驅動軸,當進行晶圓清洗作業時,驅動軸與本發明為同步轉動的狀態,而噴灑於晶圓上之清洗液甩出碰到壁面後,產生回濺之清洗液將會被本發明之上環斜面及下環斜面所遮擋,並再次利用離心力而甩開,防止清洗液沿驅動軸流入驅動馬達的本體中,藉此達到防止清洗液對驅動馬達本體造成損壞,以提升驅動馬達之使用壽命之功效。The advantage of the present invention is that, by setting the present invention on the drive shaft of a drive motor, when the wafer cleaning operation is performed, the drive shaft and the present invention are in a state of synchronous rotation, and the cleaning liquid sprayed on the wafer After being thrown out and hitting the wall, the cleaning liquid that splashes back will be blocked by the slope of the upper ring and the slope of the lower ring of the present invention, and will be thrown away by centrifugal force again to prevent the cleaning liquid from flowing into the body of the drive motor along the drive shaft. This prevents the cleaning fluid from damaging the drive motor body and improves the service life of the drive motor.

以下配合圖式以及本發明之較佳實施例,進一步闡述本發明為達成預定發明目的所採取的技術手段。The technical means adopted by the present invention to achieve the predetermined invention objectives are further described below in conjunction with the drawings and preferred embodiments of the present invention.

請參閱圖1及圖3所示,本發明之馬達防水蓋,其包含一蓋體10及一防水件20。Please refer to FIG. 1 and FIG. 3 , the motor waterproof cover of the present invention includes a cover body 10 and a waterproof member 20 .

請參閱圖2至圖4所示,蓋體10為中空管體,其具有一結合部11及一遮蔽部12,結合部11位於蓋體10的一端,遮蔽部12位於蓋體10的另一端,結合部11與遮蔽部12為一體成型,結合部11形成有一上開口111、一環槽112、複數鎖孔113及一上環斜面114,上開口111位於結合部11相對於遮蔽部12的另一端,環槽112環繞凹設於結合部11的內壁面,各鎖孔113環繞間隔穿設於結合部11且各鎖孔113形成有內螺紋,上環斜面114形成於結合部11的外壁面,上環斜面114的外徑自鄰近於上開口111的一端朝向遮蔽部12的方向逐漸增加。Please refer to Fig. 2 to Fig. 4, the cover body 10 is a hollow tube body, which has a joint part 11 and a shielding part 12, the joint part 11 is located at one end of the cover body 10, and the shielding part 12 is located at the other end of the cover body 10. At one end, the joint part 11 and the shielding part 12 are integrally formed. The joint part 11 is formed with an upper opening 111, a ring groove 112, a plurality of lock holes 113 and an upper ring slope 114. The upper opening 111 is located at the other side of the joint part 11 relative to the shielding part 12. At one end, the ring groove 112 is recessed around the inner wall surface of the joint part 11, each lock hole 113 is circumferentially and spaced through the joint part 11 and each lock hole 113 is formed with an internal thread, and the upper ring slope 114 is formed on the outer wall surface of the joint part 11, The outer diameter of the upper ring slope 114 gradually increases from an end adjacent to the upper opening 111 toward the shielding portion 12 .

請參閱圖2至圖5所示,遮蔽部12形成有一下開口121及一下環斜面122,下開口121位於遮蔽部12相對於結合部11的另一端,下開口121與上開口111相連通,下環斜面122形成於遮蔽部12的外壁面,下環斜面122的外徑自鄰近於結合部11的一端朝向下開口121的方向逐漸增加。2 to 5, the shielding portion 12 is formed with a lower opening 121 and a lower ring slope 122, the lower opening 121 is located at the other end of the shielding portion 12 relative to the joint portion 11, the lower opening 121 communicates with the upper opening 111, The lower ring slope 122 is formed on the outer wall of the shielding portion 12 , and the outer diameter of the lower ring slope 122 gradually increases from an end adjacent to the joint portion 11 toward the lower opening 121 .

防水件20為環形橡膠圈,其設置於結合部11的環槽112內,但不以此為限,防水件20之形式可依使用者需求作改變。The waterproof member 20 is an annular rubber ring, which is arranged in the ring groove 112 of the joint portion 11, but not limited thereto, and the form of the waterproof member 20 can be changed according to the needs of users.

本發明使用時,請參閱圖6及圖7所示,為便於說明僅以一驅動馬達90及一支撐台91為例配合實施,支撐台91用以支撐固定一晶圓旋轉裝置(圖式中未示),驅動馬達90包含一本體92及一驅動軸93,驅動軸93的一端可轉動地連接於本體92,驅動軸93的另一端連接晶圓旋轉裝置的轉盤(圖式中未示),轉盤上放置有一晶圓(圖式中未示),支撐台91貫穿有一穿孔94,支撐台91的一端固設於本體92,驅動軸93貫穿穿孔94,驅動軸93可相對於支撐台91轉動。When the present invention is in use, please refer to Fig. 6 and Fig. 7, for ease of description, only take a drive motor 90 and a support table 91 as an example to cooperate, and the support table 91 is used to support and fix a wafer rotating device (in the figure). Not shown), the drive motor 90 includes a body 92 and a drive shaft 93, one end of the drive shaft 93 is rotatably connected to the body 92, and the other end of the drive shaft 93 is connected to the turntable of the wafer rotation device (not shown in the drawings) , a wafer (not shown in the drawings) is placed on the turntable, the support table 91 runs through a perforation 94, one end of the support table 91 is fixed to the body 92, the drive shaft 93 passes through the perforation 94, and the drive shaft 93 can be opposite to the support table 91 turn.

本發明套設於驅動軸93,並以複數鎖固件(圖式中未示)穿設於各個鎖孔113將接合部鎖固於驅動軸93上,且遮蔽部12與支撐台91之間保持一間隙,故進行晶圓清洗作業時,驅動軸93與本發明為同步轉動的狀態,當噴灑於晶圓上之清洗液甩出碰到壁面後,產生回濺之清洗液將會被本發明所遮擋並再次利用離心力而甩開,防止清洗液沿驅動軸93流入本體92中,具體而言,當清洗液是以朝向支撐台91的穿孔94方向回濺時,可直接被本發明所遮擋,當清洗液是以朝向位於本發明上方之驅動軸93的方向回濺時,殘留於驅動軸93上的清洗液即便沿驅動軸93向下流動,亦可藉由防水件20所止擋,而被止擋之清洗液將可沿上環斜面114及下環斜面122朝向外側排出,藉此達到防止清洗液沿驅動軸93流入本體92中而造成損壞,以提升驅動馬達90之使用壽命之功效。The present invention is sleeved on the drive shaft 93, and a plurality of locking pieces (not shown in the drawings) are passed through each lock hole 113 to lock the joint part on the drive shaft 93, and the shielding part 12 and the support table 91 are maintained There is a gap, so when the wafer cleaning operation is carried out, the drive shaft 93 and the present invention are in a state of synchronous rotation. When the cleaning liquid sprayed on the wafer is thrown out and hits the wall surface, the cleaning liquid that is splashed back will be absorbed by the present invention. It is blocked and thrown away again by centrifugal force to prevent the cleaning liquid from flowing into the body 92 along the drive shaft 93. Specifically, when the cleaning liquid splashes back toward the perforation 94 of the support table 91, it can be directly blocked by the present invention When the cleaning liquid is splashed back towards the direction of the drive shaft 93 located above the present invention, the cleaning liquid remaining on the drive shaft 93 can be stopped by the waterproof member 20 even if it flows downward along the drive shaft 93, The stopped cleaning liquid can be discharged outward along the upper ring slope 114 and the lower ring slope 122, thereby preventing the cleaning liquid from flowing into the body 92 along the drive shaft 93 and causing damage, and improving the service life of the drive motor 90. .

以上所述僅是本創作之較佳實施例而已,並非對本創作做任何形式上的限制,雖然本創作已以較佳實施例揭露如上,然而並非用以限定本創作,任何所屬技術領域中具有通常知識者,在不脫離本創作技術方案的範圍內,當可利用上述揭示的技術內容作出些許更動或修飾作為等同變化的等效實施例,但凡是未脫離本創作技術方案的內容,依據本創作的技術實質對以上實施例所做的任何簡單修改、等同變化與修飾,均仍屬於本創作技術方案的範圍內。The above description is only a preferred embodiment of this creation, and does not impose any formal restrictions on this creation. Although this creation has been disclosed as above with a preferred embodiment, it is not used to limit this creation. Anyone in the technical field has Ordinary knowledgeable persons, without departing from the scope of this creative technical solution, may use the technical content disclosed above to make some changes or modifications as equivalent embodiments of equivalent changes, but any content that does not deviate from this creative technical solution, according to this Any simple modifications, equivalent changes and modifications made to the above embodiments by the technical essence of the creation still belong to the scope of the technical solution of the creation.

10:蓋體 11:結合部 111:上開口 112:環槽 113:鎖孔 114:上環斜面 12:遮蔽部 121:下開口 122:下環斜面 20:防水件 90:驅動馬達 91:支撐台 92:本體 93:驅動軸 94:穿孔10: cover body 11:Joint part 111: upper opening 112: ring groove 113: Keyhole 114: Upper ring bevel 12: Shading Department 121: Lower opening 122: lower ring bevel 20: waterproof parts 90: Drive motor 91: support table 92: Ontology 93: drive shaft 94: perforation

圖1係本發明之立體外觀圖。 圖2係本發明之另一立體外觀圖。 圖3係本發明之分解圖。 圖4係本發明之局部剖面圖。 圖5係本發明之剖面圖。 圖6係本發明之使用示意圖。 圖7係本發明使用狀態之局部剖面圖。 Fig. 1 is the perspective view of the present invention. Fig. 2 is another perspective view of the present invention. Fig. 3 is an exploded view of the present invention. Fig. 4 is a partial sectional view of the present invention. Fig. 5 is a sectional view of the present invention. Fig. 6 is a schematic diagram of the use of the present invention. Fig. 7 is a partial sectional view of the present invention in use.

10:蓋體 10: cover body

11:結合部 11:Joint part

111:上開口 111: upper opening

113:鎖孔 113: Keyhole

114:上環斜面 114: Upper ring bevel

12:遮蔽部 12: Shading Department

122:下環斜面 122: lower ring bevel

20:防水件 20: waterproof parts

Claims (4)

一種馬達防水蓋,其包含: 一蓋體,其為中空管體且具有一結合部及一遮蔽部,該結合部位於該蓋體的一端,該遮蔽部位於該蓋體的另一端,該結合部形成有一上開口、一環槽及複數鎖孔,該上開口位於該結合部相對於該遮蔽部的另一端,該環槽環繞凹設於該結合部的內壁面,各該鎖孔環繞間隔穿設於該結合部,該遮蔽部形成有一下開口,該下開口位於該遮蔽部相對於該結合部的另一端,該下開口與該上開口相連通; 一防水件,其設置於該環槽中。 A motor waterproof cover, comprising: A cover body, which is a hollow tube and has a joint portion and a shielding portion, the joint portion is located at one end of the cover body, the shielding portion is located at the other end of the cover body, the joint portion forms an upper opening, a ring groove and a plurality of lock holes, the upper opening is located at the other end of the joint part relative to the shielding part, the annular groove is recessed around the inner wall of the joint part, and each of the lock holes is spaced around the joint part, the The shielding part is formed with a lower opening, the lower opening is located at the other end of the shielding part relative to the joint part, and the lower opening communicates with the upper opening; A waterproof piece is arranged in the ring groove. 如請求項1所述之馬達防水蓋,其中該結合部進一步形成有一上環斜面,該上環斜面位於該結合部的外壁面,且該上環斜面的外徑朝向該遮蔽部的方向逐漸增加。The motor waterproof cover according to claim 1, wherein the joint part is further formed with an upper ring slope, the upper ring slope is located on the outer wall surface of the joint part, and the outer diameter of the upper ring slope gradually increases toward the direction of the shielding part. 如請求項1或2所述之馬達防水蓋,其中該遮蔽部進一步形成有一下環斜面,該下環斜面位於該遮蔽部的外壁面,且該下環斜面的外徑朝向該下開口的方向逐漸增加。The motor waterproof cover according to claim 1 or 2, wherein the shielding part is further formed with a lower ring slope, the lower ring slope is located on the outer wall of the shielding part, and the outer diameter of the lower ring slope faces the direction of the lower opening gradually increase. 如請求項3所述之馬達防水蓋,其中該防水件為環形橡膠圈。The motor waterproof cover according to claim 3, wherein the waterproof member is an annular rubber ring.
TW111131708A 2022-08-23 2022-08-23 motor waterproof cover TWI802493B (en)

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Citations (6)

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Publication number Priority date Publication date Assignee Title
TWM579849U (en) * 2019-03-15 2019-06-21 瑞智精密股份有限公司 Waterproof and dustproof structure of outer-rotor fan motor
TWI705644B (en) * 2019-05-17 2020-09-21 大青節能科技股份有限公司 Motor with waterproof structure
CN211956118U (en) * 2020-04-07 2020-11-17 芯米(厦门)半导体设备有限公司 Rotary motor for assembling on photoresist coating machine
TW202044729A (en) * 2019-05-17 2020-12-01 大青節能科技股份有限公司 Motor with waterproof structure
TWI747350B (en) * 2020-07-01 2021-11-21 威剛科技股份有限公司 Motor
TWI756940B (en) * 2020-11-26 2022-03-01 威剛科技股份有限公司 Motor end cover and motor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM579849U (en) * 2019-03-15 2019-06-21 瑞智精密股份有限公司 Waterproof and dustproof structure of outer-rotor fan motor
TWI705644B (en) * 2019-05-17 2020-09-21 大青節能科技股份有限公司 Motor with waterproof structure
TW202044729A (en) * 2019-05-17 2020-12-01 大青節能科技股份有限公司 Motor with waterproof structure
CN211956118U (en) * 2020-04-07 2020-11-17 芯米(厦门)半导体设备有限公司 Rotary motor for assembling on photoresist coating machine
TWI747350B (en) * 2020-07-01 2021-11-21 威剛科技股份有限公司 Motor
TWI756940B (en) * 2020-11-26 2022-03-01 威剛科技股份有限公司 Motor end cover and motor

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