TWI802338B - Precise alignment device for large arm beam - Google Patents

Abstract

A precise alignment device for a large arm beam, which includes: a detection platform, two rotary mechanisms, and a pair of alignment platforms. The alignment platform is driven by a single X-axis, a Y-axis, and a free-axis. The displacement dynamics of the X-axis, Y-axis and θ angle, and a rotary mechanism is assembled at both ends of the alignment platform, and then installed between the two connecting columns of the detection platform through the two rotary mechanisms, and the two connecting columns are equipped with The Z-axis guide rail drives the two Z-axis sliding tables to move up and down through the Z-axis driving motor, and the Z-axis sliding table and the rotary mechanism are respectively equipped with a passive turntable and a Y-axis sliding seat, so that the alignment platform itself is in addition to X In addition to the displacement dynamics of the axis, Y axis, and θ angle, it also includes the Z-axis lifting displacement and the Y-axis displacement dynamics, which greatly improves the accuracy of the adjustment and detection operations of the alignment platform.

Description

Large boom precision alignment device

The invention relates to a precise alignment device, especially a large arm beam precise alignment device suitable for elongated workpieces and long-side workpieces.

According to, in various liquid crystal panel manufacturing, inspection equipment, semiconductor manufacturing, inspection settings, screen printing equipment or printed circuit board manufacturing, inspection equipment, it is necessary to use the alignment platform for alignment movement and other procedures, and in order to improve precision, except X In addition to the movement of axis and Y axis, it should also have the function of θ angle movement in order to meet the high precision requirements.

However, the alignment platforms currently on the market all form a square body shape. When applied to long workpieces, part of the workpiece area will be exposed outside the alignment platform. During the alignment process, due to the As mentioned above, the workpiece is suspended in the air and the alignment is unstable, and the alignment program needs to be adjusted many times and the inspection is complicated. When the exposed area of the workpiece is larger than the area stacked on the alignment platform, the workpiece cannot be stacked on the alignment platform smoothly. On the platform, the error of the alignment detection of the workpiece is increased, and the efficiency and precision of the alignment, inspection, and production process of the workpiece are greatly reduced, and there is indeed a need for improvement.

In view of this, the inventor of the present invention has been engaged in the design, development and manufacture of related products for many years, and after careful design and careful evaluation of the above-mentioned problems, he finally obtained a practical invention.

The technical problem to be solved by the present invention lies in the above-mentioned problems existing in the prior art Missing, provide a large arm beam precise alignment device suitable for long workpieces and long-side workpieces.

The above-mentioned large-scale arm beam precise alignment device includes: a detection platform, two slewing mechanisms and a pair of alignment platforms. The detection platform is a long plate type platform, and a symmetrical A left connecting column and a right connecting column, the left and right connecting columns are provided with a Z-axis guide rail, and the Z-axis guide rails are provided with a Z-axis driving motor, and a Z-axis sliding table is driven along the Z-axis through the Z-axis driving motor. As the Z-axis guide rail moves up and down, the Z-axis slides face each other and are provided with a transfer riser. The transfer riser on the Z-axis slide of one of the left connecting columns is set on the facade. A passive turntable, the transfer vertical plate on the Z-axis slide table of one of the right connecting columns is provided with a Y-axis slide seat and a passive turntable on the facade, and the passive turntables are all equipped with an adapter seat. The transfer base is perpendicular to the surface of the passive turntable to form a transfer portion; the slewing mechanism is composed of a self-rotating plate, a driven wheel and a turning platform with a base body, and one end of the self-turning disc is fixed on the base body. The other end is assembled with the driven wheel, and then connected with the rotary platform via the driven wheel, and a rotary drive motor is provided on the base, and the rotary drive motor drives the driven wheel, and then synchronously drives the rotary platform to rotate, and the The slewing mechanism is installed on the adapter part of the adapter seat through the seat body; the alignment platform is provided with a long base, a transfer seat and a connecting arm beam, and the long base has two symmetrical short One side and two symmetrical long sides, and two X-axis units, one Y-axis unit and two free-axis units are arranged along the forming direction of the long side from one of the short sides, and the two X-axis units are Respectively assembled adjacent to the two short sides, the Y-axis unit is assembled at the center of the long base, and the two free-axis units are respectively assembled between the two X-axis units and the Y-axis unit The center position between, the inner surface of the transfer seat connects the two X-axis units, the Y-axis unit and the two free-axis units, and passes through the two X-axis units, the Y-axis unit and the two free-axis units. The shaft unit drives the transfer seat to generate displacement dynamics in the X-axis, Y-axis and θ angle. The connecting arm beam is assembled on the upper surface of the long base, and then assembled on the two ends of the connecting arm beam. turn around Between the rotary platform of the mechanism, and make the transfer seat face down to the detection platform.

Preferably, the outer diameter surface ring of the driven wheel is provided with a toothed section, and the rotary drive motor is provided with a worm, and the toothed section of the driven wheel is driven by the worm meshing to achieve the rotational movement of the driven wheel By.

Preferably, the seat body of the slewing mechanism is provided with a circular tank chamber for accommodating and assembling the self-rotating disk and the driven wheel, and the rotary platform is exposed outside the circular tank chamber, and the upper half of the seat body A cover plate is further provided.

Preferably, a ruler scale is provided around the surface of the outer diameter of the rotary platform.

Preferably, the X-axis single system has a base, an X-axis slider, a Y-axis slider and a self-rotating top seat in sequence from bottom to top, and a corresponding Two symmetrical X-axis slide rail groups enable the X-axis slider to slide and displace above the base through the two X-axis slide rail groups, and use an X-axis drive motor as the sliding displacement power of the X-axis slider. There are two symmetrical Y-axis slide rail sets between the X-axis slider and the Y-axis slider. The upper surface of the seat is connected and fixed.

Preferably, one of the long sides of the long base is respectively provided with two openings adjacent to the two short sides, and the X-axis driving motor passes through the openings.

Preferably, the Y-axis single system has a base, a Y-axis slider, an X-axis slider, and a self-rotating top seat in sequence from bottom to top, and a symmetrical structure is arranged between the base and the Y-axis slider. Two Y-axis slide rail groups, so that the Y-axis slider can slide and displace above the base through the two Y-axis slide rail groups, and a Y-axis drive motor is used as the sliding displacement power of the Y-axis slider. There are two symmetrical X-axis slide rail sets between the Y-axis slider and the X-axis slider. The upper surface is connected and fixed.

Preferably, the free-axis single system has a base, a Y-axis slider, an X-axis slider, and a self-rotating top seat in sequence from bottom to top, and a corresponding Symmetrical two Y-axis slide rail sets, there are two symmetrical X-axis slide rail sets between the Y-axis slide block and the X-axis slide block, the self-rotating top seat is fixed on the top surface of the X-axis slide block, and The self-rotating top seat is connected and fixed with the upper surface of the transfer seat.

Compared with the effect of the previous technology: the alignment platform of the present invention forms a long platform through the long base and the corresponding transfer seat, so that it can be applied to long workpieces or long-side workpieces, and through the X The driving displacement of single-axis, Y-axis and free-axis can achieve the displacement dynamics of X-axis, Y-axis and θ angle, thereby improving the efficiency and accuracy of long workpiece alignment, detection and production process By.

In addition, a rotary mechanism is assembled at both ends of the alignment platform, and then the two rotary mechanisms are assembled between the two connecting columns of the detection platform. The two connecting columns are equipped with Z-axis guide rails, and through the Z The shaft drive motor drives the Z-axis sliding table to move up and down, and the Z-axis sliding table and the slewing mechanism are respectively provided with the passive turntable on one side, and the passive turntable and the passive turntable on the other side. The above-mentioned Y-axis slide seat makes the alignment platform itself not only the displacement dynamics of the X-axis, Y-axis and θ angle, but also includes the deviation generated when the Z-axis is lifted and displaced, which can be obtained by the passive turntable on one side The rotation and the rotation of the passive turntable on the other side and the displacement adjustment dynamics of the Y-axis sliding seat greatly improve the accuracy of the adjustment and detection operations of the alignment platform.

〔this invention〕

10: Detection platform

11: Left connecting column

111: Z-axis guide rail

112: Z-axis drive motor

113: Z-axis sliding table

114: transfer riser

12: Right connecting column

121: Z-axis guide rail

122: Z-axis drive motor

123: Z-axis sliding table

124: transfer riser

13: Passive turntable

14: Y-axis sliding seat

141: passive turntable

15: adapter seat

151: transfer part

16: Detected substance

20: Rotary mechanism

21: seat body

211: circular tank chamber

212: cover plate

22: Self-rotating disk

23: passive wheel

231: Teeth segment

24: Swivel platform

241: Ruler scale

25: Rotary drive motor

251: worm

30: Alignment platform

31: long base

311: short side

312: long side

313: opening

32: transfer seat

33: Connecting arm beam

34: X-axis single body

341: base

342: X-axis slider

343:Y-axis slider

344: Rotation top seat

345: X-axis slide rail group

346: X-axis drive motor

347: Y-axis slide rail group

35: Y-axis single body

351: base

352: Y-axis slider

353:X-axis slider

354: Rotation top seat

355: Y-axis slide rail group

356: Y-axis drive motor

357: X-axis slide rail group

36: Free axis single body

361: Base

362: Y-axis slider

363: X-axis slider

364: Rotation top seat

365: Y-axis slide rail group

366: X-axis slide rail group

37: Detection benchmark group

[Fig. 1] is a perspective view of the present invention.

[Fig. 2] is an exploded view of the present invention.

[Fig. 3] is an exploded view of the rotary mechanism of the present invention.

[Fig. 4] is a combined sectional view of the slewing mechanism of the present invention.

[Fig. 5] is an exploded view of the alignment platform of the present invention.

[Fig. 6] is an exploded view of the X (Y) axis monomer of the present invention.

[Fig. 7] is an exploded view of the free shaft of the present invention.

[Fig. 8] is a top view and partially enlarged schematic diagram of the present invention.

[Fig. 9] is a front view and partially enlarged schematic diagram of the present invention.

[Fig. 10] is a schematic diagram of the horizontal displacement of the alignment platform of the present invention along the Z-axis direction.

[Fig. 11] is a schematic diagram of the tilt displacement of the alignment platform of the present invention along the Z-axis direction.

[Fig. 12] is a schematic diagram of the alignment platform of the present invention being controlled by the rotary mechanism to form a horizontal state.

[Fig. 13] is a schematic diagram of the slewing mechanism of the present invention not in action.

[Fig. 14] is a schematic diagram of the rotary mechanism of the present invention driven to rotate.

[Fig. 15] is a schematic diagram showing that the alignment platform of the present invention is controlled by the rotary mechanism to form a non-horizontal state.

[Fig. 16] is a schematic diagram of the transfer seat of the present invention at the reference position without displacement.

[Fig. 17] is a schematic diagram of the transfer seat of the present invention being driven to displace in the X-axis.

[Fig. 18] is a schematic diagram of the transfer seat of the present invention being driven to displace in the Y-axis.

[Fig. 19] is a schematic diagram of the oblique rotational displacement of the transfer base of the present invention driven by it.

In order to enable your review committee members to have a further understanding and understanding of the purpose, characteristics and effects of the present invention, please cooperate with the [simplified description of the drawings] to describe in detail as follows:

First of all, please observe from Figures 1 to 5 and Figure 8, a large-scale arm beam precise alignment device, which includes: a detection platform 10, which is a long plate platform, and on the detection platform The two long side ends of the platform 10 are provided with a symmetrical left connecting column 11 and a right connecting column 12, and the left connecting column 11 and the right connecting column 12 are all provided with a Z-axis guide rail 111, 121, and the Z-axis The guide rails 111, 121 are provided with a Z-axis drive motor 112, 122, and the Z-axis slide table 113, 123 is driven to move up and down along the Z-axis guide rail 111, 121 via the Z-axis drive motor 112, 122 respectively. The Z-axis slide tables 113, 123 are facing each other and are all provided with a transfer riser 114, 124, and the facade of the transfer riser 114 on the Z-axis slide table 113 of one of the left connecting columns 11 is provided with a passive The turntable 13, the transfer vertical plate 124 of the Z-axis slide 123 of one of the right connecting columns 12 is first provided with a Y-axis slide 14 on the facade, and then a passive turntable 141 is set through the Y-axis slide 14 , and the passive turntables 13, 141 are all assembled with an adapter seat 15, the adapter seat 15 is perpendicular to the surface of the passive turntables 13, 141 to form an adapter portion 151; two rotary mechanisms 20, the rotary mechanism 20 A self-rotating disk 22, a driven wheel 23 and a rotary platform 24 are all set up with a base body 21, and a circular groove chamber 211 is provided for the seat body 21 to accommodate and assemble the self-rotating disk 22 and the driven wheel 23, and The rotary platform 24 is exposed outside the circular tank chamber 211, and a cover plate 212 is provided on the upper half of the base body 21, and one end of the self-rotating disk 22 is fixed in the circular tank chamber 211 of the base body 21 , the other end is assembled with the driven wheel 23, and then connected with the rotary platform 24 via the driven wheel 23, and a rotary drive motor 25 is set on the seat body 21, and the rotary drive motor 25 drives the driven wheel 23 to synchronize Drive this revolving platform 24 to rotate, and the outer diameter surface of described revolving platform 24 is provided with a chi gauge scale 241 more; A pair of position platform 30, this position platform 30 is provided with a long base 31, a transfer seat 32 and a link Arm beam 33, the long base 31 has two symmetrical short sides 311 and two symmetrical long sides 312, and two X-axis monomers 34 are arranged along the forming direction of the long sides from one of the short sides 311 , a Y-axis monomer 35 and two free-axis monomers 36, the two X-axis monomers 34 are respectively arranged adjacent to the two short sides 311, and the Y-axis monomer 35 is arranged on the long side At the central position of the base 31, the two free-axis units 36 are respectively assembled at the central position between the two X-axis units 34 and the Y-axis units 35, and the upper surface of the transfer seat 32 is connected to the two X-axis units. The unit 34 , the Y-axis unit 35 and the two free-axis units 36 , and the connecting arm beam 33 are assembled on the upper surface of the long base 31 .

The outer diameter surface ring of the above-mentioned driven wheel 23 is provided with a toothed segment 231, and the rotary drive motor 25 is provided with a worm 251, and the toothed segment 231 of the driven wheel 23 is driven by the worm 251 to reach the driven wheel 23. rotating runner.

Please observe from Figures 5 and 6 at the same time, the above-mentioned X-axis unit 34 has a base 341, an X-axis slider 342, a Y-axis slider 343, and a self-rotating top seat 344 in sequence from bottom to top. The base 341 and the X-axis slider 342 are provided with two symmetrical X-axis slide rail sets 345, so that the X-axis slide block 342 can slide and displace above the base 341 through the two X-axis slide rail sets 345, And use an X-axis drive motor 346 as the sliding displacement power of the X-axis slider 342, and two symmetrical Y-axis slide rail groups 347 are arranged between the X-axis slider 342 and the Y-axis slider 343. The top seat 344 is fixed on the top surface of the Y-axis slide block 343, and is connected and fixed with the upper surface of the transfer seat 32 by the rotation top seat 344, and the long sides 312 of one of the long bases 31 are respectively adjacent to Two openings 313 are formed on the short side 311 , and the X-axis driving motor 346 passes through the openings 313 .

Please observe from Figures 5 and 6 at the same time, the above-mentioned Y-axis unit 35 has a base 351, a Y-axis slider 352, an X-axis slider 353, and a self-rotating top seat 354 in sequence from bottom to top. There are two symmetrical Y-axis slide rail sets 355 between the base 351 and the Y-axis slide block 352, so that the Y-axis slide block 352 can slide and displace above the base 351 through the two Y-axis slide rail sets 355, And a Y-axis driving motor 356 is used as the sliding displacement power of the Y-axis slider 352, and two symmetrical X-axis slide rail groups 357 are arranged between the Y-axis slider 352 and the X-axis slider 353. The top seat 354 is fastened on the top surface of the X-axis slider 353 , and is connected and fixed with the upper surface of the transfer seat 32 by the self-rotating top seat 354 .

Please observe from Figures 5 and 7 at the same time, the above-mentioned free-axis unit 36 has a base 361, a Y-axis slider 362, an X-axis slider 363, and a self-rotating top seat 364 in sequence from bottom to top. There are two symmetrical Y-axis slide rail sets 365 between the base 361 and the Y-axis slider 362, and two symmetrical X-axis slide rail sets between the Y-axis slide block 362 and the X-axis slide block 363. 366, the autorotation top seat 364 can freely rotate 360 degrees, and the autorotation top seat 364 is arranged on the top surface of the X-axis slider 363, and the autorotation top seat 364 is connected and fixed with the upper surface of the transfer seat 32.

The composition of its structure, please observe again from the 1st, 2nd, 4th figure and the 5th, 8th, 9th figure, and the two rotary mechanisms 20 are installed on the left and right connecting columns 11, 12 with the seat body 21 respectively Corresponding to the position of the adapter part 151 of the adapter seat 15, the rotation of the turning mechanism 20 is provided through the passive turntables 13 and 141, and the Y-axis slide seat 14 of one of the passive turntables 141 can provide a rotation The mechanism 20 performs displacement in the Y-axis. The alignment platform 30 is combined with the connecting arm beam 33 on the upper surface of the long base 31, and the two ends of the connecting arm beam 33 are assembled between the two rotary mechanisms 20. Rotate the platform 24, and make the transfer seat 32 face down to the detection platform 10, thereby completing a large-scale arm beam precise alignment device.

The operation of its structure, as shown in the 9th and 10th figures, is provided to place a detected object 16 on the detection platform 10, and a detection reference group is provided on the bottom surface of the transfer seat 32 of the alignment platform 30 37. When the two Z-axis sliding tables 113, 123 are driven by the Z-axis drive motors 112, 122 at the same time, and synchronously move up and down along the Z-axis guide rails 111, 121 connecting the left and right columns 11, 12, the The alignment platform 30 is capable of adjusting the Z-axis displacement of the detection reference group 37 facing the detection object 16 of the detection platform 10 .

Please see again from the 11th figure, when the displacements of the two Z-axis slides 113, 123 along the left and right connecting columns 11, 12 are different, the passive turntables 13, 141 can assist the two The alignment platform 30 rotates and swings, so that the heights of the two ends of the alignment platform 30 are different to form an inclined shape, and the Y-axis slide seat 14 of one of the passive turntables 141 will also provide the displacement in the Y-axis to compensate for the alignment in time. Platform 30 is tilted to produce the distance of hypotenuse deviation, so that the alignment platform 30 can still smoothly move up and down along the left and right connecting columns 11, 12, so that the detection reference group 37 can face the detection platform 10 in parallel The detected object 16 persons.

Please continue to see from the 12th, 13th, 14th, and 15th figures, the two ends of the alignment platform 30 are fixed between the two rotary mechanisms 20, when the two rotary mechanisms 20 drive the rotary drive motor 25 When the driven wheel 23 rotates, it can drive the alignment platform 30 to swing through the two rotary platforms 24, so that the alignment platform 30 can be connected between the left and right columns 11 and 12 with two rotary platforms. 24 produce the person who rotates and swings around the Y axis.

The operating state of its alignment platform 30, please observe from Fig. 16 and Fig. 17 in conjunction with Fig. 6, the original reference position of the transfer seat 32 is aligned with the long base 31, and the X-axis unit 34, Both the Y-axis unit 35 and the free-axis unit 36 remain at the origin without moving. When the X-axis slider 342 is displaced by the X-axis driving motor 346 of the X-axis unit 34, the transfer seat 32 is moved. Driven to move in the X-axis direction, and the X-axis sliders 353 and 363 of the Y-axis unit 35 and the free-axis unit 36 that are not actuated by the drive motor are simultaneously pulled and slid along with the transfer seat 32 to further achieve the The purpose of moving the transfer seat 32 to the X-axis direction.

Then please see from Fig. 18 and Fig. 6 that when the Y-axis slider 352 is driven to move by the Y-axis driving motor 356 of the Y-axis unit 35, the transfer seat 32 is driven to the Y-axis. The X-axis unit 34 and the Y-axis sliders 343 and 362 of the free-axis unit 36 that are not actuated by the drive motor are simultaneously pulled and slid along with the transfer seat 32 to further reach the transfer seat. 32 The purpose of moving to the Y-axis direction.

Then please observe from Fig. 19 with Figs. 5, 6, and 7, when the X-axis drive motor 346 of the X-axis unit 34 and the Y-axis drive motor 356 of the Y-axis unit 35 operate simultaneously, the The X-axis slider 342 of the X-axis unit 34 and the Y-axis slider 352 of the Y-axis unit 35 will drive the displacement of the transfer seat 32, and pass through the X-axis unit 34 and the Y-axis unit 35 and the self-rotating top seats 344, 354, 364 at the top of the free-axis unit 36 assist the transfer seat 32 to produce the displacement dynamics of oblique displacement, rotational displacement and center rotation except for the X and Y axes, and the said X-axis unit 34, Y-axis unit 35, and free-axis unit 36 other sliders that are not actuated by the drive motor will slide along with the transfer seat 32, so that the platform can be displaced in various directions and angles Movement is helpful to improve the moving range and accuracy of the alignment platform 30 .

By the structure of the above-mentioned specific embodiment, the following benefits can be obtained: the alignment platform 30 of the present invention forms a strip-shaped platform through the long base 31 and the corresponding transfer seat 32, so that it can be applied to a strip-shaped platform. The workpiece or the long-side workpiece, and through the driving displacement of the X-axis monomer 34, the Y-axis monomer 35 and the free-axis monomer 36, the displacement dynamics of the X-axis, Y-axis and θ angle are achieved, thereby improving the length Efficiency and accuracy of bar-shaped workpiece alignment, inspection and production process.

Also set a rotary mechanism 20 at both ends of the alignment platform 30, and then set between the left and right connecting columns 11 and 12 of the detection platform 10 through two rotary mechanisms 20, the left and right connecting columns 11 , 12 are equipped with Z-axis guide rails 111, 121, and drive the two Z-axis sliding tables 113, 123 to move up and down through the Z-axis driving motors 112, 122, and the Z-axis sliding tables 113, 123 and the rotary The passive turntables 13 and 141 are respectively provided between the mechanism 20, so that the alignment platform 30 itself includes not only the displacement dynamics of the X-axis, Y-axis and θ angle, but also the deviation generated when the Z-axis is lifted and displaced. The dynamics can be adjusted by the rotation of the passive turntables 13 and 141 and the displacement of the Y-axis slide 14, which greatly improves the accuracy of the alignment platform 30 for adjustment and detection operations.

In summary, the present invention has indeed achieved a breakthrough structural design, has improved invention content, and at the same time can achieve industrial practicability and advancement, and the present invention has not been seen in any publications, and it is also novel. In line with the provisions of the relevant laws and regulations of the Patent Law, I filed an application for a patent for invention according to the law, and I sincerely request the examination committee of the Jun Bureau to grant a legal patent right. I sincerely pray for it.

Only the above is only a preferred embodiment of the present invention, and should not be used to limit the scope of the present invention; that is, all equivalent changes and modifications made according to the patent scope of the present invention should still belong to the present invention within the scope of the patent.

10: Detection platform

11: Left connecting column

111: Z-axis guide rail

112: Z-axis drive motor

113: Z-axis sliding table

114: transfer riser

12: Right connecting column

121: Z-axis guide rail

122: Z-axis drive motor

123: Z-axis sliding table

13: Passive turntable

14: Y-axis sliding seat

141: passive turntable

15: adapter seat

151: transfer part

16: Detected substance

20: Rotary mechanism

21: seat body

24: Swivel platform

241: Ruler scale

25: Rotary drive motor

30: Alignment platform

31: long base

32: transfer seat

33: Connecting arm beam

37: Detection benchmark group

Claims (8)

A large boom precise alignment device, which includes: A detection platform, the detection platform is a long plate platform, and a symmetrical left connecting column and a right connecting column are provided at the two long side ends of the testing platform, and a Z is arranged on the left and right connecting columns. The Z-axis guide rails are equipped with a Z-axis drive motor, and the Z-axis drive motor drives a Z-axis slide table to move up and down along the Z-axis guide rail. The two Z-axis slide tables are facing each other. Both of them are equipped with a transfer vertical plate, wherein the transfer vertical plate installed on the left connecting column is provided with a passive turntable on the facade, and the connecting vertical plate installed on the right connecting column is provided with a Y in front of the vertical surface. Axis sliding seat, and then set a passive turntable through the Y-axis sliding seat, so that the passive turntable can not only rotate freely, but also have a displacement dynamic in the Y-axis through the Y-axis sliding seat, and the passive turntable is assembled with a An adapter seat, the adapter seat is perpendicular to the surface of the passive turntable to form an adapter portion; Two slewing mechanisms, the slewing mechanism is composed of a self-rotating plate, a driven wheel and a slewing platform, one end of the self-turning plate is fixed on the base, the other end is assembled with the driven wheel, and then through the The driven wheels are connected to the slewing platform, and a slewing drive motor is provided on the base body, and the slewing drive motor drives the driven wheel through a worm, and then synchronously drives the slewing platform to rotate, and the slewing mechanism is installed through the pedestal. The transfer part on the transfer base; A pair of alignment platforms, the alignment platform is provided with a long base, a transfer seat and a connecting arm beam, the long base has two symmetrical short sides and two symmetrical long sides, and from one of the short sides Along the forming direction of the long side, two X-axis units, one Y-axis unit and two free-axis units are arranged, and the two X-axis units are respectively arranged adjacent to the two short sides, and the Y-axis unit It is assembled on the central position of the long base, and the two free axis units are respectively assembled on the two X-axis units and the Y-axis In the central position between the monomers, the upper surface of the transfer seat connects the two X-axis monomers, the Y-axis monomer and the two free-axis monomers, and passes through the two X-axis monomers, the Y-axis monomers and 2. The free-axis unit drives the transfer seat to generate displacement dynamics in the X-axis, Y-axis and θ angle. The connecting arm beam is assembled on the surface of the long base, and then assembled on the two ends of the connecting arm beam. Between the rotary platform of the rotary mechanism, make the transfer seat face down and face the testing platform. The large boom beam precise alignment device as described in Claim 1, wherein the outer diameter surface ring of the driven wheel is provided with a toothed section, and the rotary drive motor uses the worm mesh to drive the toothed section of the driven wheel , to reach the rotational movement of the driven wheel. The large-scale arm beam precise alignment device as described in Claim 1, wherein, the base of the slewing mechanism is provided with a circular chamber for accommodating and assembling the self-rotating disk and the driven wheel, and exposing the slewing platform to the Outside the circular tank, a cover plate is further provided on the upper half of the base body. The precise alignment device for a large boom beam as described in Claim 1, wherein a ruler scale is provided around the surface of the outer diameter of the slewing platform. The large boom beam precise alignment device as described in Claim 1, wherein the X-axis single system has a base, an X-axis slider, a Y-axis slider, and a self-rotating top seat in sequence from bottom to top , There are two symmetrical X-axis slide rail sets between the base and the X-axis slide block, so that the X-axis slide block can slide and displace above the base through the two X-axis slide rail sets, and is driven by an X-axis The motor is used as the sliding displacement power of the X-axis slider. There are two symmetrical Y-axis slide rail sets between the X-axis slider and the Y-axis slider. The self-rotating top seat is fixed on the Y-axis slider. top surface, and the self-rotating top seat is connected and fixed with the upper surface of the transfer seat. The large boom beam precise alignment device as described in claim 5, wherein, one of the long sides of the long base is respectively provided with two openings adjacent to the two short sides, and the X-axis drive is provided through the openings The motor comes out. The large boom beam precise alignment device as described in claim 1, wherein the Y-axis single system has a base, a Y-axis slider, an X-axis slider and a self-rotating top seat in sequence from bottom to top, There are two symmetrical Y-axis slide rail sets between the base and the Y-axis slide block, so that the Y-axis slide block can slide and displace above the base through the two Y-axis slide rail sets, and a Y-axis drive motor is used As the sliding displacement power of the Y-axis slider, there are two symmetrical X-axis slide rail sets between the Y-axis slider and the X-axis slider, and the self-rotating top seat is fixed on the top of the X-axis slider. surface, and the self-rotating top seat is connected and fixed with the upper surface of the transfer seat. The large boom beam precise alignment device as described in Claim 1, wherein the free-axis single system has a base, a Y-axis slider, an X-axis slider, and a self-rotating top seat in sequence from bottom to top , There are two symmetrical sets of Y-axis slide rails between the base and the Y-axis slider, and there are two symmetrical X-axis slide rail sets between the Y-axis slider and the X-axis slider. It is fixed on the top surface of the X-axis slider, and is connected and fixed with the upper surface of the transfer seat by the self-rotating top seat.

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