TWI801643B - Electrode, discharge device, manufacturing method of electrode, and inspection method of electrode - Google Patents

Abstract

Electrodes are used in discharge devices. The electrode has an emphasizing part for emphasizing the contour part and the peripheral part in the target area including at least a part of the contour part of the electrode among the surface of the electrode viewed from the observation direction when performing the appearance inspection of the electrode. contrast. In this way, by having the highlighted portion in the target area, it becomes easy to detect the contour portion of the electrode, which is useful for securing the dimensional accuracy that is important for use in a discharge device.

Description

Electrode, discharge device, manufacturing method of electrode, and inspection method of electrode

field of invention The disclosure relates to an electrode, a discharge device, a method for manufacturing the electrode, and a method for inspecting the electrode. More specifically, the present disclosure relates to an electrode used in discharge, a discharge device, a method for manufacturing the electrode, and a method for inspecting the electrode.

Background of the invention Conventionally, as disclosed in Japanese Patent Application Laid-Open No. 2018-022574, there is provided a discharge device including a discharge electrode, a counter electrode (electrode), and a voltage application circuit.

This kind of discharge device uses a voltage applying circuit to apply a voltage between the discharge electrode and the opposite electrode to generate discharge. In addition, when a liquid is supplied to the discharge electrode, the liquid may be electrostatically atomized during discharge, and a charged fine particle liquid containing radicals as active ingredients may be generated.

Summary of the invention In the discharge device configured as described above, in order to realize a desired discharge, the dimensional accuracy between the discharge electrode and the counter electrode is important. As one method of measuring and managing the dimension between the discharge electrode and the counter electrode, there is, for example, image inspection using a camera. In order to measure the size between the discharge electrode and the counter electrode by means of image inspection, it is necessary to detect the contours near the discharge point of the discharge electrode and the counter electrode, but there will be differences due to the shape of the discharge electrode and the way the light is irradiated to the discharge electrode. etc. and it is difficult to detect the contour.

The present disclosure provides an electrode, a discharge device, a method of manufacturing the electrode, and a method of inspecting the electrode, which can easily detect contour portions.

An electrode according to an aspect of the present disclosure is an electrode used in a discharge device. The electrode has an emphasizing part for emphasizing the contour part and the peripheral part in the target area including at least a part of the contour part of the electrode among the surface of the electrode viewed from the observation direction when performing the appearance inspection of the electrode. contrast.

A discharge device according to an aspect of the present disclosure includes an electrode, a discharge electrode facing the electrode with a gap therebetween, and a voltage application circuit for applying a voltage between the electrode and the discharge electrode.

The method of manufacturing an electrode according to an aspect of the present disclosure includes the step of forming an accentuated portion in a contour portion including at least a part of the electrode, among the surface of the electrode viewed from the viewing direction when performing an appearance inspection of the electrode. In the target area, it is used to emphasize the contrast between the outline part and the surrounding part.

In an electrode inspection method according to an aspect of the present disclosure, the appearance inspection of the electrode is performed using an image obtained by observing the surface of the electrode from an observation direction in a state where the electrode is irradiated with light from inspection illumination.

According to the present disclosure, it is possible to provide an electrode, a discharge device, a method for manufacturing the electrode, and a method for inspecting the electrode that can easily detect contour portions.

form for carrying out the invention (implementation form) (1) Summary The electrode 20 of the present embodiment and the discharge device 1 provided with the electrode 20 will be described with reference to FIGS. 1 to 5 .

As shown in FIG. 1 and FIG. 2A , the electrode 20 of this embodiment is an electrode used in the discharge device 1 . The electrode 20 is in the surface 20A of the electrode 20 viewed from the observation direction D1 (refer to FIG. 1 ), in the target area 21 (refer to FIGS. 2B and 3 ) represented by a semicircle in FIG. In the middle is the emphasized portion 23 represented by an arc. The observation direction D1 shown in FIG. 1 is a direction in which the appearance inspection of the electrode 20 is performed. The object area 21 is an outline portion 22 including at least a part of the electrode 20 . The emphasis portion 23 emphasizes the contrast between the outline portion 22 and the peripheral portion 300 (see FIG. 2A ).

Here, the appearance inspection refers to the following image inspection: as shown in FIG. 1, for example, the electrode 20 is photographed by a camera 80 arranged above the electrode 20, and the size and installation position of the electrode 20 are inspected based on the image of the camera 80. wait. Furthermore, the visual inspection may be a visual inspection in which an inspector observes the electrode 20 with the naked eye using an optical device such as a magnifying glass or a microscope. During visual inspection, the inspector uses optical equipment such as a magnifying glass and a microscope to visually identify the outline of the electrode 20, and checks the position and installation position of the electrode 20 by comparing it with a ruler as a size reference. wait. That is, the "observation" of the surface 20A of the electrode 20 is not limited to the observation performed by image processing the image of the electrode 20 captured by the camera 80, and the inspector may use the naked eye or an optical machine, observations made visually. Therefore, the observation direction during visual inspection may be the direction in which the electrode 20 is photographed by the camera 80 or the direction in which the inspector views the electrode 20 with the naked eye or an optical device. In the example of FIG. 1 , the observation direction D1 is a direction in which the discharge device 1 located on the lower side is looked down from the camera 80 located on the upper side.

1 and 3 are schematic diagrams, and the size of the electrode 20, the camera 80, and the inspection illumination 90, and the positional relationship between the electrode 20, the camera 80, and the inspection illumination 90 are different from the actual situation. In FIG. 3 , the light irradiated from the inspection illumination 90 is shown by an arrow. Also, the peripheral portion 300 refers to a portion existing around the accentuated portion 23 when the electrode 20 is viewed from the viewing direction. The peripheral portion 300 includes members other than the electrode 20 that appear to exist adjacent to the emphasis portion 23, and includes members that are located on the front side or the rear side of the electrode 20 and that appear to be adjacent to the emphasis portion 23 when viewed from the viewing direction D1. . In addition, the peripheral portion 300 also includes the adjacent region 24 adjacent to the accentuated portion 23 in the surface 20A of the electrode 20 (see FIG. 2B ).

The emphasizing unit 23 emphasizes the contrast between the outline portion 22 included in the target area 21 and the peripheral portion 300 , and increases at least a part of the difference between, for example, brightness and color. For example, the emphasis portion 23 increases the difference between brightness and darkness between the emphasis portion 23 and the peripheral portion 300 when the electrode 20 is irradiated with light from the inspection illumination 90 during the appearance inspection, and the emphasis portion 23 is emphasized. Comparison with peripheral portion 300 . That is, the accentuated portion 23 is formed by, for example, making at least one of the shape of the surface 20A, the property and state of the surface 20A, that is, the property, and the material, in a position other than the emphasized portion 23 and the emphasized portion 23 in the surface 20A of the electrode 20. different, to emphasize the contrast with the surrounding part 300. Here, varying the properties of the surface 20A means, for example, varying at least one of the reflectance of light on the surface, the reflection direction of light on the surface, and the color of the surface. Furthermore, the emphasis part 23 may be provided only in the outline part 22 included in the target area 21 , may be provided in a part of the target area 21 including the outline part 22 , or may be provided in the entire target area 21 .

Moreover, the discharge device 1 of this embodiment is equipped with the electrode 20, the discharge electrode 10, and the voltage application circuit 30 (refer FIG. 4 and FIG. 5).

The discharge electrode 10 is opposed to the electrode 20 via a gap (space), as shown in FIG. 1 and FIG. 2A .

The voltage application circuit 30 applies a voltage between the electrode 20 and the discharge electrode 10 . The voltage application circuit 30 applies a high voltage between the discharge electrode 10 and the electrode 20 by making the discharge electrode 10 a negative electrode (ground) and the electrode 20 a positive electrode (plus), for example.

In addition, the discharge device 1 of the present embodiment further includes a liquid supply unit 40 as shown in FIG. 4 . Liquid supply unit 40 has a function of supplying liquid 70 (see FIG. 4 ) to discharge electrode 10 . However, the discharge device 1 only needs to include the voltage application circuit 30 , the discharge electrode 10 , and the electrode 20 as minimum components, and the liquid supply unit 40 may not be included in the components of the discharge device 1 .

In the discharge device 1 of this embodiment, for example, the voltage application circuit 30 applies a voltage between the discharge electrode 10 and the electrode 20 in a state where the liquid 70 is adhered to the surface of the discharge electrode 10 and the liquid 70 is held on the discharge electrode 10 . Thereby, a discharge is generated at least on the discharge electrode 10, and the liquid 70 held on the discharge electrode 10 is electrostatically atomized by the discharge. That is, the discharge device 1 of this embodiment constitutes a so-called electrostatic atomization device. In this disclosure, the liquid 70 held in the discharge electrode 10, that is, the liquid 70 to be electrostatically atomized is also simply referred to as "liquid 70".

As mentioned above, since the electrode 20 of this embodiment has the emphasis portion 23 in the target area 21, when the electrode 20 is viewed from the observation direction, the outline portion 22 and the peripheral portion 300 can be emphasized (see FIGS. 2A and 2B ). In contrast, there is an advantage that the outline portion 22 can be easily detected. Therefore, there is also an advantage in that dimension W1 between electrode 20 and discharge electrode 10 can be easily measured (see FIG. 2A ), and dimension W1 between electrode 20 and discharge electrode 10 can be managed with high precision. (2) Details (2.1) Composition

Hereinafter, the electrode 20 and the discharge device 1 of the present embodiment will be described in detail with reference to FIGS. 1 to 4 .

As shown in FIG. 1 , FIG. 2A , FIG. 2B , FIG. 4 and FIG. 5 , the discharge device 1 of this embodiment includes a discharge electrode 10 , an electrode 20 that is an opposite electrode facing the discharge electrode 10 , and a voltage application circuit 30 . In addition, the shape of the discharge electrode 10 and the electrode 20 is shown schematically in FIG.4 and FIG.5.

In addition, the discharge device 1 of the present embodiment further includes a liquid supply unit 40, a control circuit 50, and a main body 60 for holding the discharge electrode 10 and the electrode 20 (see FIGS. 1 and 2A). However, the discharge device 1 only needs to include the discharge electrode 10 , the electrode 20 , and the voltage application circuit 30 as minimum components, and the liquid supply unit 40 may not be included in the components of the discharge device 1 .

The discharge electrode 10 is a rod-shaped electrode. As shown in Figure 1, the discharge electrode 10 has a front end 101 at one end along the long axis of the discharge electrode 10, and the other end (the end opposite to the front end 101) along the long axis of the discharge electrode 10. It has a base end portion 102 . The discharge electrode 10 is a needle electrode in which at least the tip portion 101 is formed into a tapered shape. The term "thin head shape" here is not limited to a shape with a sharply tapered tip, but includes a shape with a rounded tip as shown in FIG. 1 .

The electrode 20 that is the counter electrode includes, for example, a plate-shaped support portion 200 and four protrusions 201 . The support portion 200 is flat and has a circular opening 202 . The four protrusions 201 are arranged at equal intervals in the circumferential direction of the opening 202 . Each protruding portion 201 protrudes from the inner peripheral edge of the opening portion 202 in the supporting portion 200 toward the center of the opening portion 202 . The front end portion (the end portion on the center side of the opening portion 202 ) of each protruding portion 201 in the longitudinal direction is formed in a semicircular shape. The amount of protrusion of each protrusion 201 is, for example, 2 mm or less, but the size and shape of each protrusion 201 can be appropriately changed. Furthermore, although the electrode 20 has four protrusions 201 , the number of protrusions 201 is not limited to four, and may be one, two, three, or five or more.

Here, in the surface 20A of the electrode 20 viewed from the observation direction D1 (see FIG. 1 ), in the target area 21 (see FIGS. 2B and 3 ) including the contour portion 22 on the front end side of each protrusion 201, Emphasis on Section 23. In FIG. 2B , the semicircular target region 21 is a region different from the discharge site where the discharge occurs in the electrode 20 . The discharge part of the electrode 20 is the part closest to the discharge electrode 10 in the electrode 20, and in this embodiment, it is the surface on the side of the discharge electrode 10 among the protrusions 201 of the electrode 20 (the lower surface in FIG. 1 ). front end. Therefore, in this embodiment, in each protruding portion 201 of the electrode 20, the front end portion of the surface (upper surface) opposite to the discharge electrode 10 is used as the target area 21, and the emphasis portion 23 located in the target area 21 can be reduced. Affects the possibility of discharge at the discharge site.

The highlighting unit 23 sets the light quantity per unit area of the light reflected by the highlighting unit 23 toward the observation direction D1 in a state where the electrode 20 is irradiated with light from the inspection illumination 90 during appearance inspection, as the first light quantity. And when the light quantity per unit area of the light reflected in the observation direction D1 by the parts other than the accentuated part 23 in the surface 20A of the electrode 20 is set as the second light quantity, the second light quantity is increased or decreased from the first light quantity. . In the present embodiment, the second light intensity is reduced, for example, from the first light intensity. In this way, the emphasis portion 23 is the amount of light per unit area of the light reflected by the emphasis portion 23 toward the observation direction D1, and the light reflected toward the observation direction D1 by portions other than the emphasis portion 23 on the surface 20A of the electrode 20. The difference in the amount of light per unit area becomes larger. Thereby, the highlighting part 23 emphasizes the contrast between the highlighting part 23 and the peripheral part 300 , so that the outline part 22 can be easily detected.

The accentuated portion 23 of the present embodiment includes, for example, an inclined surface 211 formed at a corner between the upper surface and the side surface of each protruding portion 201 in the target region 21 of each protruding portion 201 . In other words, the emphasis portion 23 includes the inclined surface 211 that is inclined relative to the adjacent region 24 adjacent to the emphasis portion 23 on the surface 20A of the electrode 20 . In this way, since the accentuating portion 23 includes the inclined surface 211 , the direction of light reflected on the inclined surface 211 and the direction of light reflected on the adjacent region 24 can be made different from each other. Moreover, since the inclined surface 211 is also inclined to the surface of the cover 63 behind the protruding portion 201, the direction of light reflected on the inclined surface 211 and the direction of reflected light on the cover 63 can be different from each other. Therefore, when the electrode 20 is irradiated with light from the inspection illumination 90, the difference between the brightness of the inclined surface 211 and the brightness of the peripheral portion 300 (the adjacent region 24 and the surface of the cover member 63) becomes large. , so that the camera 80 becomes easy to detect the contour portion 22 of each protruding portion 201 .

The inclined surface 211 is, for example, in the outline portion 22 included in the target area 21 of each protrusion 201, by performing chamfering (such as cutting, grinding or pressing) on the corner between the upper surface and the side surface of each protrusion 201 . Extrusion processing, etc.) and formed. The inclined surface 211 formed by chamfering is, for example, a flat surface with a width of 0.2 mm or more. That is, the inclined surface 211 includes a plane. Furthermore, the inclined surface 211 may also include a curved surface, and may also be a curved surface with a radius of curvature of 0.2 mm or more, for example. Furthermore, the size and angle of the inclined surface 211 can be appropriately changed according to the size of the electrode 20 and the like. In addition, among the plurality of protrusions 201 , the planar inclined surface 211 may be provided on some of the protrusions 201 , and the curved inclined surface 211 may be provided on the remaining protrusions 201 .

Here, the positional relationship between electrode 20 and discharge electrode 10 is determined such that the thickness direction of support portion 200 is parallel to the long axis of discharge electrode 10 and the tip 101 of discharge electrode 10 is positioned near the center of opening 202 . In addition, parallelism between the thickness direction of the support part 200 and the long axis of the discharge electrode 10 is not limited to the state in which the thickness direction of the support part 200 and the long axis of the discharge electrode 10 do not intersect in the same plane. The thickness direction of the support portion 200 and the long axis of the discharge electrode 10 may be seen as almost parallel to the human eye, and may be slightly (several degrees) deviated from the parallel state.

In this embodiment, at least the opening 202 of the electrode 20 ensures a gap (space) between the electrode 20 and the discharge electrode 10 . In other words, the electrode 20 is disposed so as to face the discharge electrode 10 via a gap, and is electrically insulated from the discharge electrode 10 . Here, the state of the discharge generated between the electrode 20 and the discharge electrode 10 is changed according to the dimension W1 (refer to FIG. 2A ) between each front end portion of the electrode 20, that is, the front end portion of each protrusion 201 and the discharge electrode 10. . In the electrode 20 of this embodiment, since the outline part 22 of the electrode 20 can be detected easily by providing the highlight part 23, it becomes easy to measure the dimension W1 between the electrode 20 and the discharge electrode 10. Accordingly, dimension W1 between electrode 20 and discharge electrode 10 can be managed more accurately, and desired discharge can be easily generated between electrode 20 and discharge electrode 10 .

The voltage application circuit 30 applies a voltage between the electrode 20 and the discharge electrode 10 . Specifically, the voltage application circuit 30 generates a discharge between the electrode 20 and the discharge electrode 10 by applying a high voltage of, for example, about 4 kV between the electrode 20 and the discharge electrode 10 .

The liquid supply part 40 supplies the liquid 70 for electrostatic atomization to the discharge electrode 10 (refer FIG. 4). As an example, the liquid supply unit 40 is realized using a cooling device 41 (see FIG. 1 ) that cools the discharge electrode 10 to generate dew condensation water on the discharge electrode 10 .

Specifically, the cooling device 41 includes a pair of Peltier elements 411 and a pair of radiator plates 412 as an example. A pair of Peltier elements 411 are held by a pair of heat sinks 412 . The pair of Peltier elements 411 are mechanically and electrically connected to the base end portion 102 of the discharge electrode 10 by, for example, solder. The pair of Peltier elements 411 are mechanically and electrically connected to the pair of heat sinks 412 by, for example, solder. Electricity is supplied to the pair of Peltier elements 411 through the pair of radiator plates 412 and the discharge electrode 10 . Therefore, the cooling device 41 constituting the liquid supply part 40 cools the entire discharge electrode 10 through the base end part 102 by energizing the pair of Peltier elements 411 . Thereby, moisture in the air condenses, and dew condensation water adheres to the surface of the discharge electrode 10 . That is, liquid supply unit 40 is configured to cool discharge electrode 10 to generate dew condensation water as liquid on the surface of discharge electrode 10 . In this configuration, since the liquid supply unit 40 can supply the liquid (condensation water) 70 to the discharge electrode 10 using moisture in the air, supply and replenishment of the liquid to the discharge device 1 become unnecessary.

As shown in FIG. 4 , the control circuit 50 controls the operations of the voltage application circuit 30 and the liquid supply unit 40 . The control circuit 50 is mainly composed of, for example, a microcontroller having one or more processors and one or more memories. Various functions of the control circuit 50 can be realized by the processor of the microcontroller executing the programs recorded in the memory of the microcontroller. The program may be recorded in memory, provided through telecommunication lines such as the Internet, or recorded in a non-transitory recording medium such as a memory card.

The main body 60 is formed in a box shape with an opening 61 on the upper surface of an electrically insulating synthetic resin. The main body 60 is used to hold the discharge electrode 10 , the electrode 20 and the cooling device 41 .

Specifically, the pair of heat sinks 412 are held by the main body 60 by embedding part of the pair of heat sinks 412 in the main body 60 . Here, among the pair of heat sinks 412 , at least the portion holding the Peltier element 411 is exposed from the main body 60 . Since the base end portion 102 of the discharge electrode 10 is fixed to the pair of Peltier elements 411 , the discharge electrode 10 can be held by the main body 60 by holding the pair of cooling plates 412 through the main body 60 . The discharge electrode 10 is held by the main body 60 with the base end 102 arranged near the bottom wall of the main body 60 and the front end 101 facing the opening 61 side of the main body 60 . In this embodiment, a disk-shaped cover 63 covering the Peltier element 411 is attached to the main body 60 . A circular through-hole 64 is provided at the center of the cover member 63 . The discharge electrode 10 protrudes above the cover 63 through the through-hole 64 of the cover 63 .

In addition, near the opening 61 of the main body 60 , the electrode 20 having a plurality of (for example, four) protrusions 201 is attached. Here, discharge electrode 10 and electrode 20 are held in main body 60 so that discharge electrode 10 is positioned at the center of opening 202 when main body 60 is viewed from observation direction D1 when performing appearance inspection of electrode 20 . The four protrusions 201 included in the electrode 20 are arranged at equal intervals in the circumferential direction of the opening 202 , and protrude from the inner peripheral edge of the opening 202 toward the center of the opening 202 . The front end of each protrusion 201 is formed in a semicircular shape as viewed from above, so the distance W1 between each protrusion 201 and discharge electrode 10 becomes smaller toward the front end of each protrusion 201 . Thereby, electric field concentration becomes easy to generate|occur|produce at the front-end|tip part of each protrusion part 201, As a result, discharge becomes easy to generate|occur|produce stably between the front-end|tip part of each protrusion part 201 and the front-end|tip part 101 of the discharge electrode 10. (2.2) Action

In the discharge device 1 of the present embodiment, the control circuit 50 supplies the liquid 70 to the discharge electrode 10 by controlling the operation of the liquid supply unit 40 . In addition, the control circuit 50 controls the voltage application circuit 30 to apply a voltage between the discharge electrode 10 and the electrode 20, so that the liquid 70 held on the discharge electrode 10 is subjected to the force of the electric field to form a shape called Taylor cone. Conical shape. And, electric field is concentrated on the front end portion (apex portion) of the Taylor cone to generate discharge.

However, in the discharge device 1 of the present embodiment, the voltage application circuit 30 generates a discharge by applying a voltage between the discharge electrode 10 and the electrode 20 arranged to face each other with a gap therebetween. In the discharge device 1 , a discharge path partially subjected to dielectric breakdown is formed between a discharge electrode 10 and an electrode 20 that is a counter electrode when a discharge is generated. The discharge path L1 includes a first dielectric breakdown region R1 and a second dielectric breakdown region R2 (see FIG. 5 ). The first dielectric breakdown region R1 is formed around the discharge electrode 10 . The second dielectric breakdown region R2 is formed around the electrode 20 which is the counter electrode. In addition, in FIG. 5, the discharge electrode 10 and the electrode 20 are shown schematically, and the illustration of the liquid 70 held in the discharge electrode 10 is abbreviate|omitted.

Thus, between the discharge electrode 10 and the electrode 20, the discharge path L1 which received dielectric breakdown not entirely but partially (locally) can be formed. The "dielectric breakdown" used in this disclosure means a state in which the electrical insulation of an insulator (including gas) separating conductors is destroyed and the insulating state cannot be maintained. Dielectric breakdown of gas occurs because, for example, ionized molecules are accelerated by an electric field to collide with other gas molecules and ionize, causing a sharp increase in ion concentration to cause gas discharge. In short, when the discharge performed by the discharge device 1 of this embodiment is generated, it is formed as follows: in the gas (air) existing on the path connecting the discharge electrode 10 and the electrode 20, part (that is, only Part of it) produces insulation breakdown. In this way, the discharge path L1 formed between the discharge electrode 10 and the electrode 20 is a path that has not yet undergone dielectric breakdown in its entirety but has been partially subjected to dielectric breakdown.

Furthermore, the discharge path L1 includes a first dielectric breakdown region R1 formed around the discharge electrode 10 and a second dielectric breakdown region R2 formed around the electrode 20 . That is, the first dielectric breakdown region R1 is a region in which insulation is broken around the discharge electrode 10 , and the second dielectric breakdown region R2 is a region in which insulation is broken around the electrode 20 . The first dielectric breakdown region R1 and the second dielectric breakdown region R2 exist separately so as not to contact each other. Therefore, the discharge path L1 includes a region (insulation region) not subjected to dielectric breakdown at least between the first dielectric breakdown region R1 and the second dielectric breakdown region R2. Accordingly, the discharge path L1 between the discharge electrode 10 and the electrode 20 is in a state where electrical insulation is lowered so that at least a part of the insulating region remains and dielectric breakdown occurs partially.

According to the discharge device 1 as described above, between the discharge electrode 10 and the electrode 20 , the discharge path L1 that is partially subjected to dielectric breakdown is formed not entirely. Like this, even if the discharge path L1 with partial insulation breakdown occurs, in other words, a part of the discharge path L1 that is not subjected to insulation breakdown, current can still flow through the discharge path L1 between the discharge electrode 10 and the electrode 20, and produce a discharge. In the following, the discharge in the form of forming the discharge path L1 partially subjected to dielectric breakdown is referred to as "partial breakdown discharge".

In such a partial destructive discharge, radicals are generated with energy greater than that of corona discharge, and a large number of radicals can be generated about 2 to 10 times that of corona discharge. The free radicals generated in this way are the basis for the following: not limited to sterilization, deodorization, moisturizing, preservation, and virus inactivation, they can exert useful effects in various occasions. Here, when free radicals are generated by partial destruction discharge, ozone is also generated. However, in partial destruction discharge, about 2 to 10 times as many radicals can be generated as compared with corona discharge, and the amount of ozone generation is suppressed to the same extent as in the case of corona discharge.

Also, unlike partial breakdown discharge, there is a form of discharge in which a phenomenon in which corona discharge progresses to dielectric breakdown (whole circuit breakdown) is repeated intermittently. This type of discharge is hereinafter referred to as "all-circuit dielectric breakdown discharge". In the whole-circuit insulation breakdown discharge, the following phenomenon is repeated: when the corona discharge develops to insulation breakdown (full-circuit insulation breakdown), a relatively large discharge current flows instantaneously, and then the applied voltage is lowered to Interrupt the discharge current, and then increase the applied voltage to reach insulation breakdown. In the whole circuit insulation breakdown discharge, like the partial breakdown discharge, free radicals are generated with a larger energy than corona discharge, and a large number of free radicals can be generated about 2 to 10 times compared with corona discharge base. However, the energy of the full-circuit insulation breakdown discharge is greater than that of the partial breakdown discharge. Therefore, in the state where the energy level is "medium", the ozone disappears and the free radicals increase. Even if a large amount of free radicals are generated, there will still be a part of the energy level in the subsequent reaction path because the energy level becomes "high". The possibility of free radicals disappearing.

In other words, in the whole circuit insulation breakdown discharge, because the energy of the discharge is too high, there is the possibility of: Part of it disappears, resulting in a decrease in the production efficiency of active ingredients. As a result, according to the discharge device 1 of the present embodiment using the partial breakdown discharge, it is possible to improve the production efficiency of the active component even compared with the full circuit breakdown discharge. Therefore, in the discharge device 1 of the present embodiment, even compared with any one of the corona discharge and the full-circuit dielectric breakdown discharge, there is still the following advantage: the generation efficiency of effective components such as free radicals can be improved. . (2.3) Manufacturing method of electrodes

The manufacturing method of the electrode 20 according to the present embodiment includes the step of forming an accentuated portion 23 in the middle of the surface 20A of the electrode 20 viewed from the observation direction D1 (refer to FIG. 1 ) when the appearance inspection of the electrode 20 is performed. Formed in the target area 21 of the outline portion 22 including at least a part of the electrode 20 .

In this embodiment, the electrode 20 having a plurality of protrusions 201 is formed on the inner peripheral edge of the opening 202 by pressing a sheet metal of a metal (for example, titanium alloy, etc.). Furthermore, by performing chamfering processing (such as cutting, grinding, or pressing processing, etc.) on the contour portion 22 of the target area 21 included in each protrusion 201 among the surface 20A of the electrode 20 (the upper surface in FIG. 1 ), processing) to form the inclined surface 211 as the accentuated portion 23 .

Here, in this embodiment, although the target region 21 of each protruding portion 201 is formed in a planar shape in which the observation direction D1 at the time of visual inspection intersects the normal direction of the inclined surface 211 at an angle smaller than 90 degrees. The inclined surface 211, but the inclined surface 211 is not limited to a plane. For example, the inclined surface 211 of the accentuating portion 23 may also be a curved surface with a predetermined radius of curvature provided at the corner between the upper surface and the side surface of each protruding portion 201 . (2.4) Visual inspection of electrodes

In the present embodiment, when the appearance inspection of the electrodes 20 is carried out with the main body 60 holding the discharge electrodes 10 and 20, for example, as shown in FIG. .

The inspection illumination 90 is an annular illumination in which a light source such as a light emitting diode is arranged around the camera 80 , and irradiates the discharge device 1 with light from the entire circumference of the camera 80 .

In the appearance inspection of the electrode 20 , the discharge device 1 is photographed by the camera 80 in a state where the light from the inspection illumination 90 is irradiated on the discharge device 1 from the observation direction D1 . The camera 80 takes an image of an imaging area including at least an area where the discharge electrode 10 and the electrode 20 are arranged in the discharge device 1 . In addition, the dimension W1 between the discharge electrode 10 and the electrode 20 can be measured by, for example, image processing the image of the camera 80 . That is, in the inspection method of the electrode 20 of the present embodiment, the electrode 20 is irradiated with the light from the inspection illumination 90, and the image of the surface of the electrode 20 observed from the observation direction D1 is used. Visual inspection of the electrode 20 .

In the present embodiment, in the surface 20A of the electrode 20, the emphasis portion 23 including the inclined surface 211 is provided in the target area 21 including the contour portion 22 of at least a part of the electrode 20 (for example, the tip portion of each protruding portion 201). . When such an electrode 20 is irradiated with light from the inspection illumination 90, as shown in FIG. 80 , but most of the light reflected on the inclined surface 211 is reflected in a direction different from that of the camera 80 . Moreover, among the light from the inspection illumination 90, the light irradiated to the inside of the discharge device 1 through the opening 202 of the electrode 20 is in the members (for example, the discharge electrode 10 and the cover 63, etc.) located inside the discharge device 1. It is reflected and enters the camera 80 . Therefore, the amount of light per unit area of the light reflected on the inclined surface 211 (emphasis part 23 ) and incident on the camera 80 becomes larger than the light quantity per unit area of the light reflected on the peripheral part 300 of the emphasis part 23 and incident on the camera 80 The amount of light is less.

FIG. 6A shows an example of an image G1 captured by the camera 80 when the appearance inspection of the electrode 20 is performed. The image G1 is, for example, a monochrome shaded image. Among the surface 20A of the electrode 20, in the target area 21 of each protrusion 201, an inclined surface 211 is formed as the accentuated portion 23, so the inclined surface 211 is more illuminated than the peripheral portion 300 (the adjacent area 24 of the electrode 20 and the discharge device). 1) the inner area) is dark. Therefore, in the electrode 20 of this embodiment, there is an advantage that it becomes easier to detect the contour portion 22 of the electrode 20 from the image G1 of the camera 80 .

Here, when no emphasis portion 23 is provided in the target area 21 including the outline portion 22 of each protruding portion 201 , the image captured by the camera 80 is an image G2 as shown in FIG. 6B . When the electrode 20 does not include the highlighting portion 23 , the difference between the luminance of the target area 21 and the luminance of the peripheral portion of the target area 21 becomes small, and the contour portion 22 of each protruding portion 201 is blurred. In this way, in the image G2 shown in FIG. 6B , since the emphasized portion 23 does not exist, the difference in brightness between the front end portion of each protruding portion 201 and the peripheral portion 300 becomes small, and it becomes difficult to detect each protruding portion 201 . The position of the front end portion (that is, the contour portion 22 of each protruding portion 201).

On the other hand, in the electrode 20 of this embodiment, since the emphasis portion 23 is provided in the target area 21 of each protruding portion 201, in the image G1 shown in FIG. The difference in brightness of the portion 300 becomes large. Thus, it becomes easier to detect the position of the front end portion (ie, outline portion 22 ) of each protruding portion 201 of the electrode 20 from the image G1 of the camera 80 . Accordingly, it becomes easier to measure the dimension W1 between the tip of each protruding portion 201 and the discharge electrode 10 in the surface 20A of the electrode 20 viewed from the observation direction D1 in the visual inspection, and the discharge electrode 10 can be The dimension W1 between the counter electrode and the electrode 20 is managed within an appropriate range.

In addition, as shown in FIG. 7 , the inspection illumination 90A may be arranged so as to irradiate the electrode 20 with light from a direction different from the observation direction D1 of the camera 80 . In this case, the light quantity per unit area of the light reflected toward the observation direction D1 by the accentuating portion 23 is set to be greater than the light quantity per unit area of the light reflected toward the observation direction D1 by portions other than the emphasizing portion 23 in the surface 20A of the electrode 20. The amount of light per unit area increases. Also, the light quantity per unit area of the light reflected in the observation direction D1 by the accentuating portion 23 is greater than the light quantity per unit area of the light reflected in the observation direction D1 by the members inside the discharge device 1 . Therefore, in the image of the camera 80, the contrast between the highlighted portion 23 provided in the target area 21 of the electrode 20 and the peripheral portion 300 can be increased, and it becomes easier to detect the highlighted portion 23 of the electrode 20 (that is, the edge of the electrode 20). outline part). (3) Variations

All of the above-mentioned embodiments are merely one of various embodiments of the present disclosure. As long as the above-mentioned embodiment can provide an electrode, a discharge device, a method of manufacturing the electrode, and a method of inspecting the electrode that can easily detect the contour portion, various changes can be made in accordance with the design and the like. Hereinafter, modification examples of the above-mentioned embodiment will be listed. Modifications described below can be applied in combination as appropriate. (3.1) First modified example

In the above embodiment, although the emphasis portion 23 provided on the target region 21 among the surface 20A of the electrode 20 is the inclined surface 211 formed on the contour portion 22 of the target region 21 , the emphasis portion 23 is not limited to the inclined surface 211 .

In the electrode 20 of the first modified example, the properties of the surface of the accentuated part 23 are different from the properties of the surface of the adjacent region 24 adjacent to the emphasized part 23 in the surface 20A of the electrode 20. In this point, the first modified The electrode 20 of this example is different from the above-mentioned embodiment.

Here, the surface properties of the accentuated portion 23 and the adjacent region 24 refer to at least one of surface irregularities, surface roughness, light reflectance on the surface, surface color, and the like.

For example, in the electrode 20 of the first modified example, fine unevenness is formed by performing, for example, knurling on the surface of the target region 21 , and the portion where the unevenness is formed is used as the accentuated portion 23 . On the other hand, in the surface 20A of the electrode 20 , the surface of the adjacent region 24 adjacent to the accentuated portion 23 is not formed with unevenness, but the surface of the adjacent region 24 is formed flatter than the emphasized portion 23 . Thereby, the light quantity per unit area of the light reflected in the observation direction D1 on the surface of the accentuated part 23 becomes smaller than the light quantity per unit area of the light reflected in the observation direction D1 on the surface of the adjacent region 24 . Therefore, in the image of the camera 80, the contrast between the emphasized portion 23 of the target area 21 and the adjacent area 24 provided on the electrode 20 can be increased, and it becomes easier to detect the emphasized portion 23 of the electrode 20 (that is, the highlighted portion 23 of the electrode 20). outline part of the ).

Furthermore, the properties of the surface of the accentuated portion 23 and the adjacent region 24 are not limited to the concavo-convex shape of the surface. At least one of the surface of the accentuated portion 23 and the surface of the adjacent region 24 may be plated so that the reflectance of the emphasized portion 23 becomes lower than that of the adjacent region 24 . For example, by applying anti-glare plating to the surface of the accentuated portion 23 in the surface 20A of the electrode 20 , the reflectance of the surface of the accentuated portion 23 is lowered than that of the surface of the adjacent region 24 . On the other hand, in order to make the reflectance of the surface of the adjacent region 24 higher than the reflectance of the surface of the accentuated part 23, the surface of the adjacent region 24 is provided with mirror reflection plating or no anti-glare plating is applied. apply. Thereby, the reflectance in the emphasized portion 23 becomes lower than the reflectance in the adjacent region 24 . Therefore, when the electrode 20 is irradiated with the light of the inspection illumination 90 , the amount of light per unit area of the light reflected in the observation direction D1 by the accentuating portion 23 is larger than that in the observation direction by the adjacent region 24 . The amount of light per unit area of the light reflected by D1 decreases. Accordingly, in the image of the camera 80, the contrast between the target region 21 and the adjacent region 24 can be emphasized, and it becomes easier to detect the target region 21 of the electrode 20 (that is, included in the target region 21 ) according to the image of the camera 80. The outline part of 22).

Also, the surface roughness of the surface of the accentuated portion 23 and the surface roughness of the surface of the adjacent region 24 may be different from each other so that the reflectance at the emphasized portion 23 becomes lower than that at the adjacent region 24. . For example, at least one of the accentuated portion 23 and the adjacent region 24 may be subjected to surface treatment such as cutting or grinding, so that the surface of the emphasized portion 23 becomes rougher than the surface of the adjacent region 24 . By making the surface of the accentuated portion 23 rougher than the surface of the adjacent region 24 , the reflectance at the accentuated portion 23 becomes lower than that at the adjacent region 24 . Thus, in a state where the inspection illumination 90 is irradiated on the electrode 20 , the amount of light per unit area of the light reflected in the observation direction D1 by the accentuating portion 23 is greater than that observed by the adjacent region 24 . The amount of light per unit area of light reflected in the direction D1 decreases. Thus, since the contrast of the target area 21 and the adjacent area 24 can be emphasized in the image of the camera 80 , it becomes easier to detect the target area 21 of the electrode 20 from the image of the camera 80 .

Also, at least one of the surface of the accentuated portion 23 and the surface of the adjacent region 24 may be colored in different colors by methods such as painting or laser coloring, so as to emphasize the difference between the target region 21 and the adjacent region 24. Contrast of colors. In this case, the camera 80 is preferably a camera that outputs color images. Since the color contrast between the object area 21 and the adjacent area 24 can be emphasized, it becomes easier to detect the outline portion 22 of the object area 21 included in the electrode 20 from the image of the camera 80 .

Furthermore, it is also possible to make the properties of the surfaces of the accentuated portion 23 and the adjacent region 24 different from each other, so that the amount of light per unit area of the light reflected in the emphasized portion 23 toward the viewing direction D1 is greater than that in the adjacent region 24 toward the observing direction. The amount of light per unit area of the light reflected by D1 increases. Also in this case, since the contrast between the emphasized portion 23 and the adjacent region 24 can be emphasized in the image of the camera 80 , the contour portion 22 of the target region 21 included in the electrode 20 can be easily detected. (3.2) Second modified example

In the electrode 20 of the second modified example, it is different from the above-mentioned embodiment in the following point: As shown in FIG. Adjacent regions 24 are of different materials.

Here, the material of the accentuated portion 23 is different from the material of the adjacent region 24 , and is not limited to the case where the material of the entire accentuated portion 23 is different from the material of the entire adjacent region 24 . For example, the material of the member constituting the surface of the accentuating portion 23 and the material of the member constituting the surface of the adjacent region 24 may be different from each other. For example, the accentuating portion 23 may be formed of a metal different from that of the adjacent region 24 that is laminated and fixed on the surface of the target region 21 of the electrode 20 .

In this way, by setting the material of the accentuated portion 23 to a material different from that of the adjacent region 24, at least one of the reflectivity and reflection direction of light between the surface of the emphasized portion 23 and the surface of the adjacent region 24 Make a difference. For example, if the electrode 20 is irradiated with the light of the inspection illuminator 90, the light quantity per unit area of the light reflected in the observation direction D1 in the highlighting part 23 is compared, and the light quantity in the adjacent area 24 in the observation direction D1 is compared with that in the adjacent region 24. When the amount of reflected light per unit area decreases, the contrast between the target area 21 and the adjacent area 24 can be emphasized in the image of the camera 80 . According to this, it becomes easier to detect the target area 21 of the electrode 20 from the image of the camera 80 .

Furthermore, in the second modified example, the materials of the accentuated portion 23 and the adjacent region 24 may also be made different from each other so that the light quantity per unit area of the light reflected in the emphasized portion 23 toward the viewing direction D1 is greater than that of the corresponding area. The amount of light per unit area of light reflected by the adjacent region 24 toward the viewing direction D1 increases. Also in this case, since the contrast between the emphasis portion 23 and the adjacent region 24 can be emphasized, the target region 21 of the electrode 20 can be easily detected. (3.3) Other modifications

The discharge form adopted by the discharge device 1 is not limited to the form described in the above-mentioned embodiment. For example, the discharge device 1 may also adopt a form of discharge that intermittently repeats the so-called phenomenon of developing from corona discharge to full-circuit dielectric breakdown, that is, "full-circuit dielectric breakdown discharge". In this case, in the discharge device 1, the following phenomenon is repeated: when the corona discharge progresses to the insulation breakdown of the whole circuit, a relatively large discharge current flows instantaneously, and the applied voltage is lowered immediately thereafter. And cut off the discharge current, and then let the applied voltage rise to the insulation destruction of the whole circuit.

The discharge device 1 may omit the liquid supply unit 40 for generating the charged fine particle liquid. In this case, the discharge device 1 generates air ions as active components by the discharge generated between the discharge electrode 10 and the electrode 20 .

In addition, the voltage application circuit 30 may also be configured so that the discharge electrode 10 is set as a positive electrode (plus) and the electrode 20 is set as a negative electrode (ground (ground)), and a high voltage is applied between the discharge electrode 10 and the electrode 20. . In addition, since it is only necessary to generate a potential difference (voltage) between the discharge electrode 10 and the electrode 20, the voltage application circuit 30 may also ground the electrode (positive electrode) on the high potential side and ground the electrode on the low potential side. (Negative electrode) is made into a negative potential, and a negative voltage is applied between the discharge electrode 10 and the electrode 20. That is, the voltage application circuit 30 may ground the discharge electrode 10 and set the electrode 20 to a negative potential, or may set the discharge electrode 10 to a negative potential and ground the electrode 20 . (Summarize)

As explained above, the electrode (20) of the first aspect is an electrode for a discharge device. In the surface (20A) of the electrode (20) viewed from the viewing direction (D1) when performing the visual inspection of the electrode (20), the contour portion (22) including at least a part of the electrode (20) There is an emphasis part (23) in the target area (21). The emphasis part (23) emphasizes the contrast between the outline part (22) and the peripheral part (300).

According to this aspect, there is an advantage that it is easy to detect the outline portion (22) of the electrode (20).

In the electrode (20) of the second aspect, in the first aspect, the target area (21) and the discharge site where the discharge occurs in the electrode (20) may be different areas.

According to this aspect, it is possible to reduce the possibility that the discharge at the discharge site is hindered by providing the accentuating portion (23).

In the electrode (20) of the third aspect, in any one of the first or second aspect, the highlighting part (23) has been irradiated with light from the inspection illumination (90) during the visual inspection. In the state of the electrode (20), the first light quantity is increased or decreased compared to the second light quantity. The first light quantity refers to the light quantity per unit area of the light reflected in the viewing direction ( D1 ) by the accentuating portion ( 23 ). The second light quantity refers to the light quantity per unit area of light reflected in the viewing direction ( D1 ) by portions other than the accentuated portion ( 23 ) of the surface ( 20A) of the electrode ( 20 ).

According to this aspect, there is an advantage that it becomes easier to detect the outline portion (22) of the electrode (20) by emphasizing light and shade at the outline portion (22) and the peripheral portion (300).

In the electrode (20) of the fourth aspect, it can also be in any one of the first to third aspects, the accentuating part (23) includes an inclined surface (211), and the aforementioned inclined surface (211) is formed on the surface of the electrode. The surface (20A) of (20) is inclined relative to the adjacent area (24) adjacent to the accentuated portion (23).

According to this aspect, by making the direction of the light reflected on the inclined surface (211) and the direction of the light reflected on the adjacent region (24) different from each other, the difference between the inclined surface (211) and the adjacent region (24) can be made different. (24) The amount of light reflected toward the observation direction (D1) is different.

In the electrode (20) of the fifth aspect, in the fourth aspect, the inclined surface (211) may include a flat surface.

According to this aspect, by making the direction of the light reflected on the inclined surface (211) and the direction of the light reflected on the adjacent region (24) different from each other, the difference between the inclined surface (211) and the adjacent region (24) can be made different. (24) The amount of light reflected toward the observation direction (D1) is different.

In the electrode (20) of the sixth aspect, in any one of the fourth or fifth aspects, the inclined surface (211) may include a curved surface.

According to this aspect, by making the direction of the light reflected on the inclined surface (211) and the direction of the light reflected on the adjacent region (24) different from each other, the difference between the inclined surface (211) and the adjacent region (24) can be made different. (24) The amount of light reflected toward the observation direction (D1) is different.

In the electrode (20) of the 7th aspect, it can also be in any one of the 1st to 6th aspects, so that the character of the surface of the accentuated part (23) is different from that of the surface (20A) of the electrode (20). The properties of the surface of the adjacent region (24) adjacent to the middle and accentuated portion (23) are different.

According to this aspect, by making the surface properties of the emphasized part (23) different from the properties of the surface of the adjacent area (24), the reflectance of light can be adjusted between the emphasized part (23) and the adjacent area (24). and at least one of the reflection direction is different. Therefore, according to this aspect, the amount of light reflected in the viewing direction ( D1 ) on the inclined surface ( 211 ) and the adjacent region ( 24 ) can be made different.

In the electrode (20) of the 8th aspect, in any one of the 1st to 7th aspects, the material of the accentuated portion (23) is the same as that of the electrode (20) and the accentuated portion (23). Adjacent adjacent regions (24) are of different materials.

According to this aspect, by making the material of the accentuated portion (23) different from that of the adjacent region (24), the reflectivity of light and the direction of reflection can be adjusted between the emphasized portion (23) and the adjacent region (24). At least one is different. Therefore, according to this aspect, the amount of light reflected in the viewing direction ( D1 ) on the inclined surface ( 211 ) and the adjacent region ( 24 ) can be made different.

A discharge device (1) of a ninth aspect is provided with the electrode (20) of any one of the first to eighth aspects, a discharge electrode (10) facing the electrode (20) across a gap, and an electrode ( 20) A voltage application circuit (30) for applying a voltage between the discharge electrode (10).

According to this aspect, it is possible to provide a discharge device (1) provided with an electrode (20) having an easily detectable contour portion (22).

The method for manufacturing the electrode of the tenth aspect is the method for manufacturing the electrode (20) of any one of the first to eighth aspects. This manufacturing method includes the step of forming an accentuated portion 23, which includes the electrode (20) in the surface (20A) of the electrode (20) viewed from the observation direction (D1) when the appearance inspection of the electrode (20) is performed. ) formed in the object area (21) of at least a part of the contour portion (22).

According to this aspect, it is possible to provide a method of manufacturing the electrode (20) that can easily detect the contour portion (22).

The inspection method of the electrode of the eleventh aspect is the inspection method of the electrode (20) of any one of the first to eighth aspects. This inspection method is to use the image (G1) of observing the surface (20A) of the electrode (20) from the observation direction (D1) under the condition that the electrode (20) has been irradiated with light from the inspection illumination (90), to carry out the visual inspection of the electrode (20).

According to this aspect, it is possible to perform visual inspection of the electrode (20) to easily detect the contour portion (22).

The configurations of the second to eighth aspects are not essential configurations on the electrode (20), and can be appropriately omitted.

Electrodes and discharge devices can be used in various applications such as dryers, facial beauty devices, humidifiers, air cleaners, air conditioners, electric fans, refrigerators, washing machines, and automobiles.

1: discharge device 10: Discharge electrode 20: electrode 20A: surface 21: Object area 22: Contour part 23: Emphasis Department 24: Adjacent area 30: Voltage application circuit 40: Liquid supply part 41: cooling device 50: Control circuit 60: subject 61: Opening 63: cover 64: Through hole 70: liquid 80: camera 90, 90A: lighting for inspection 101: front end 102: base end 200: support part 201: protrusion 202: Opening 211: Inclined surface 300: Peripheral part 411: Peltier element 412: cooling plate D1: Observation direction G1, G2: Image L1: discharge path R1: 1st insulation breakdown zone R2: 2nd insulation breakdown zone W1: The size between the discharge electrode and the electrode

Fig. 1 is a schematic cross-sectional view of a discharge device including an electrode according to an embodiment of the present disclosure.

Fig. 2A is a schematic plan view of a discharge device according to an embodiment of the present disclosure.

Fig. 2B is an enlarged view of part A1 in Fig. 2A.

FIG. 3 is a schematic diagram illustrating reflection of light on an electrode according to an embodiment of the present disclosure.

Fig. 4 is a block diagram of a discharge device according to an embodiment of the present disclosure.

FIG. 5 is a schematic diagram showing a state in which a discharge occurs in the discharge device according to an embodiment of the present disclosure.

FIG. 6A is an explanatory view showing an example of an image acquired in an appearance inspection of a discharge device according to an embodiment of the present disclosure.

6B is an explanatory view showing an example of an image acquired in an appearance inspection of a discharge device having an electrode not provided with a highlighted portion.

FIG. 7 is a schematic diagram illustrating reflection of light on an electrode according to an embodiment of the present disclosure.

Fig. 8 is a schematic diagram illustrating reflection of light on electrodes according to a second modification of one embodiment of the present disclosure.

20: electrode

20A: surface

21: Object area

22: Contour part

23: Emphasis Department

24: Adjacent area

200: support part

201: protrusion

202: Opening

211: Inclined surface

300: Peripheral part

Claims (11)

An electrode is an electrode for a discharge device arranged with a gap between a discharge electrode and has an accentuated portion. In the object area of the contour portion of at least a part of the electrode, the contrast between the contour portion and the peripheral portion is emphasized, and the emphasis portion is located on the surface of the electrode opposite to the discharge electrode. An electrode, which is an electrode for a discharge device, and has an accentuated portion which is located between a contour portion including at least a part of the electrode on the surface of the electrode viewed from an observation direction when performing an appearance inspection of the electrode. In the target area, for emphasizing the contrast between the contour portion and the peripheral portion, the surface of the emphasis portion has a different surface shape from that of an adjacent region adjacent to the emphasis portion on the surface of the electrode. An electrode, which is an electrode for a discharge device, and has an accentuated portion which is located between a contour portion including at least a part of the electrode on the surface of the electrode viewed from an observation direction when performing an appearance inspection of the electrode. In the target area, for emphasizing the contrast between the outline portion and the peripheral portion, the material of the emphasis portion is different from the material of an adjacent area adjacent to the emphasis portion in the electrode. The electrode according to any one of claims 1 to 3, wherein the former The target area is an area different from the discharge site where the discharge occurs in the electrode. The electrode according to any one of claims 1 to 3, wherein the highlighting portion is directed toward the observation direction through the highlighting portion in a state where the electrode has been irradiated with light from inspection illumination in the appearance inspection. The light quantity per unit area of the reflected light is increased or decreased from the light quantity per unit area of the light reflected in the viewing direction by a portion other than the accentuated portion on the surface of the electrode. The electrode according to any one of claims 1 to 3, wherein the accentuated portion includes an inclined surface, and the inclined surface is inclined relative to an adjacent region adjacent to the emphasized portion on the surface of the electrode. The electrode according to claim 6, wherein the inclined surface includes a plane. The electrode according to claim 6, wherein the inclined surface includes a curved surface. A discharge device comprising: the electrode according to any one of claims 1 to 8; a discharge electrode facing the electrode with a gap therebetween; and a voltage application circuit for applying a voltage between the electrode and the discharge electrode. A method for manufacturing an electrode, which is the method for manufacturing an electrode according to any one of Claims 1 to 8, and includes the step of forming an accentuated portion, the emphasized portion being the aforementioned highlighted portion viewed from an observation direction when performing an appearance inspection of the aforementioned electrode Among the electrode surfaces, to the In the object area of the outline part with a small part, it is used to emphasize the contrast between the outline part and the surrounding part. An inspection method of an electrode, which is an inspection method of an electrode according to any one of Claims 1 to 8, and is to use the method of observing the surface of the electrode from the observation direction in the state where the light from the inspection illumination is irradiated on the electrode. The image is used to carry out the aforementioned visual inspection of the aforementioned electrodes.

Images