TWI801196B - 薄膜電阻元件 - Google Patents

薄膜電阻元件 Download PDF

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Publication number
TWI801196B
TWI801196B TW111112986A TW111112986A TWI801196B TW I801196 B TWI801196 B TW I801196B TW 111112986 A TW111112986 A TW 111112986A TW 111112986 A TW111112986 A TW 111112986A TW I801196 B TWI801196 B TW I801196B
Authority
TW
Taiwan
Prior art keywords
thin film
film resistor
resistor
thin
film
Prior art date
Application number
TW111112986A
Other languages
English (en)
Other versions
TW202341191A (zh
Inventor
陳仲渝
邱正中
郭順和
盧契佑
Original Assignee
光頡科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 光頡科技股份有限公司 filed Critical 光頡科技股份有限公司
Priority to TW111112986A priority Critical patent/TWI801196B/zh
Priority to CN202310197872.0A priority patent/CN116895413A/zh
Priority to EP23161690.5A priority patent/EP4258295A1/en
Priority to US18/296,260 priority patent/US20230326635A1/en
Application granted granted Critical
Publication of TWI801196B publication Critical patent/TWI801196B/zh
Publication of TW202341191A publication Critical patent/TW202341191A/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C3/00Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
    • H01C3/10Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
    • H01C3/12Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C1/00Details
    • H01C1/01Mounting; Supporting
    • H01C1/012Mounting; Supporting the base extending along and imparting rigidity or reinforcement to the resistive element
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C1/00Details
    • H01C1/08Cooling, heating or ventilating arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C1/00Details
    • H01C1/08Cooling, heating or ventilating arrangements
    • H01C1/084Cooling, heating or ventilating arrangements using self-cooling, e.g. fins, heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C1/00Details
    • H01C1/14Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C3/00Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
    • H01C3/08Dimension or characteristic of resistive element changing gradually or in discrete steps from one terminal to another
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5228Resistive arrangements or effects of, or between, wiring layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/20Resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0207Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
    • H01L27/0211Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique adapted for requirements of temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Adjustable Resistors (AREA)
TW111112986A 2022-04-06 2022-04-06 薄膜電阻元件 TWI801196B (zh)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW111112986A TWI801196B (zh) 2022-04-06 2022-04-06 薄膜電阻元件
CN202310197872.0A CN116895413A (zh) 2022-04-06 2023-03-03 薄膜电阻元件
EP23161690.5A EP4258295A1 (en) 2022-04-06 2023-03-14 Thin film resistor
US18/296,260 US20230326635A1 (en) 2022-04-06 2023-04-05 Thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111112986A TWI801196B (zh) 2022-04-06 2022-04-06 薄膜電阻元件

Publications (2)

Publication Number Publication Date
TWI801196B true TWI801196B (zh) 2023-05-01
TW202341191A TW202341191A (zh) 2023-10-16

Family

ID=85641092

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111112986A TWI801196B (zh) 2022-04-06 2022-04-06 薄膜電阻元件

Country Status (4)

Country Link
US (1) US20230326635A1 (zh)
EP (1) EP4258295A1 (zh)
CN (1) CN116895413A (zh)
TW (1) TWI801196B (zh)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4203499B2 (ja) * 2005-09-26 2009-01-07 太陽社電気株式会社 チップ抵抗器及びチップ抵抗器の製造方法
JP2016152301A (ja) * 2015-02-17 2016-08-22 ローム株式会社 チップ抵抗器およびその製造方法
CN113113199B (zh) * 2021-04-14 2022-09-06 南京萨特科技发展有限公司 一种大功率合金箔电阻器及制造方法

Also Published As

Publication number Publication date
US20230326635A1 (en) 2023-10-12
TW202341191A (zh) 2023-10-16
EP4258295A1 (en) 2023-10-11
CN116895413A (zh) 2023-10-17

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