TWI800751B - 氣體感測方法及氣體感測系統 - Google Patents

氣體感測方法及氣體感測系統 Download PDF

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Publication number
TWI800751B
TWI800751B TW109132370A TW109132370A TWI800751B TW I800751 B TWI800751 B TW I800751B TW 109132370 A TW109132370 A TW 109132370A TW 109132370 A TW109132370 A TW 109132370A TW I800751 B TWI800751 B TW I800751B
Authority
TW
Taiwan
Prior art keywords
gas sensing
sensing system
sensing method
gas
sensing
Prior art date
Application number
TW109132370A
Other languages
English (en)
Other versions
TW202212818A (zh
Inventor
許鉦宗
徐浩軒
陳志偉
Original Assignee
國立陽明交通大學
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 國立陽明交通大學 filed Critical 國立陽明交通大學
Priority to TW109132370A priority Critical patent/TWI800751B/zh
Priority to US17/214,428 priority patent/US11852603B2/en
Publication of TW202212818A publication Critical patent/TW202212818A/zh
Application granted granted Critical
Publication of TWI800751B publication Critical patent/TWI800751B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/129—Diode type sensors, e.g. gas sensitive Schottky diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
TW109132370A 2020-09-18 2020-09-18 氣體感測方法及氣體感測系統 TWI800751B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW109132370A TWI800751B (zh) 2020-09-18 2020-09-18 氣體感測方法及氣體感測系統
US17/214,428 US11852603B2 (en) 2020-09-18 2021-03-26 Gas sensing method and gas sensing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW109132370A TWI800751B (zh) 2020-09-18 2020-09-18 氣體感測方法及氣體感測系統

Publications (2)

Publication Number Publication Date
TW202212818A TW202212818A (zh) 2022-04-01
TWI800751B true TWI800751B (zh) 2023-05-01

Family

ID=80740188

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109132370A TWI800751B (zh) 2020-09-18 2020-09-18 氣體感測方法及氣體感測系統

Country Status (2)

Country Link
US (1) US11852603B2 (zh)
TW (1) TWI800751B (zh)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI278619B (en) * 2004-12-24 2007-04-11 Nat Univ Chung Hsing Gas sensor and the method of producing thereof
TW201413241A (zh) * 2012-09-21 2014-04-01 Univ Nat Taiwan Science Tech 氣體感測器
US20150085249A1 (en) * 2001-02-23 2015-03-26 Geelux Holding, Ltd. Noninvasive measurement of chemical substances
TWI545318B (zh) * 2015-06-26 2016-08-11 南臺科技大學 高分子陶瓷氣體感測器及其製作方法
TWI648521B (zh) * 2014-02-13 2019-01-21 德商愛思強歐洲公司 用於測定氣體或氣體混合物之質量流量的裝置
TW202027192A (zh) * 2018-08-08 2020-07-16 美商蘭姆研究公司 利用基於電阻溫度係數(tcr)元件之加熱器漸進式加熱基板處理系統的構件

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960031987A (ko) * 1995-02-24 1996-09-17 구자홍 가스(gas) 센싱소자의 구조 및 제조방법
DE19924906C2 (de) 1999-05-31 2001-05-31 Daimler Chrysler Ag Halbleiter-Gassensor, Gassensorsystem und Verfahren zur Gasanalyse
US7411854B2 (en) 2006-04-18 2008-08-12 Infineon Technologies Ag System and method for controlling constant power dissipation
US8596108B2 (en) * 2007-10-01 2013-12-03 Scott Technologies, Inc. Gas measuring device and method of operating the same
EP2105733A1 (de) * 2008-03-26 2009-09-30 Micronas GmbH Verfahren zum Messen der Konzentration eines Gases
JP5115411B2 (ja) * 2008-09-08 2013-01-09 富士電機株式会社 薄膜ガスセンサ
JP2014041055A (ja) * 2012-08-22 2014-03-06 Ngk Spark Plug Co Ltd ガス検出装置及びガス検出方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150085249A1 (en) * 2001-02-23 2015-03-26 Geelux Holding, Ltd. Noninvasive measurement of chemical substances
TWI278619B (en) * 2004-12-24 2007-04-11 Nat Univ Chung Hsing Gas sensor and the method of producing thereof
TW201413241A (zh) * 2012-09-21 2014-04-01 Univ Nat Taiwan Science Tech 氣體感測器
TWI648521B (zh) * 2014-02-13 2019-01-21 德商愛思強歐洲公司 用於測定氣體或氣體混合物之質量流量的裝置
TWI545318B (zh) * 2015-06-26 2016-08-11 南臺科技大學 高分子陶瓷氣體感測器及其製作方法
TW202027192A (zh) * 2018-08-08 2020-07-16 美商蘭姆研究公司 利用基於電阻溫度係數(tcr)元件之加熱器漸進式加熱基板處理系統的構件

Also Published As

Publication number Publication date
US11852603B2 (en) 2023-12-26
US20220091061A1 (en) 2022-03-24
TW202212818A (zh) 2022-04-01

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