TWI799875B - 折射率量測系統、方法與其所使用的全反射子系統 - Google Patents

折射率量測系統、方法與其所使用的全反射子系統 Download PDF

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Publication number
TWI799875B
TWI799875B TW110119571A TW110119571A TWI799875B TW I799875 B TWI799875 B TW I799875B TW 110119571 A TW110119571 A TW 110119571A TW 110119571 A TW110119571 A TW 110119571A TW I799875 B TWI799875 B TW I799875B
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Taiwan
Prior art keywords
refractive index
measurement system
total reflection
index measurement
subsystem used
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TW110119571A
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English (en)
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TW202246727A (zh
Inventor
李朱育
江家宇
盧洺霈
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國立中央大學
英特格系統股份有限公司
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Publication of TW202246727A publication Critical patent/TW202246727A/zh
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TW110119571A 2021-05-28 2021-05-28 折射率量測系統、方法與其所使用的全反射子系統 TWI799875B (zh)

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TW110119571A TWI799875B (zh) 2021-05-28 2021-05-28 折射率量測系統、方法與其所使用的全反射子系統

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TWI799875B true TWI799875B (zh) 2023-04-21

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3602925B2 (ja) * 1995-12-08 2004-12-15 独立行政法人科学技術振興機構 光干渉法による測定対象物の屈折率と厚さの同時測定装置
US20070046953A1 (en) * 2003-03-06 2007-03-01 De Groot Peter Interferometer and method for measuring characteristics of optically unresolved surface features
US7233396B1 (en) * 2006-04-17 2007-06-19 Alphasniffer Llc Polarization based interferometric detector
US8009292B2 (en) * 2007-11-13 2011-08-30 Korea Research Institute Of Standards And Science Single polarizer focused-beam ellipsometer
US9134182B2 (en) * 2012-06-14 2015-09-15 Canon Kabushiki Kaisha Measurement apparatus and method, tomography apparatus and method
CN105352915A (zh) * 2015-10-23 2016-02-24 西北工业大学 一种折射率二维分布的动态测量方法
US10429244B2 (en) * 2015-03-25 2019-10-01 Nec Corporation Light measurement device
CN114660023A (zh) * 2022-03-14 2022-06-24 江苏理工学院 基于全反射共光程偏振干涉技术的折射率测量系统及测量

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3602925B2 (ja) * 1995-12-08 2004-12-15 独立行政法人科学技術振興機構 光干渉法による測定対象物の屈折率と厚さの同時測定装置
US20070046953A1 (en) * 2003-03-06 2007-03-01 De Groot Peter Interferometer and method for measuring characteristics of optically unresolved surface features
US7233396B1 (en) * 2006-04-17 2007-06-19 Alphasniffer Llc Polarization based interferometric detector
US8009292B2 (en) * 2007-11-13 2011-08-30 Korea Research Institute Of Standards And Science Single polarizer focused-beam ellipsometer
US9134182B2 (en) * 2012-06-14 2015-09-15 Canon Kabushiki Kaisha Measurement apparatus and method, tomography apparatus and method
US10429244B2 (en) * 2015-03-25 2019-10-01 Nec Corporation Light measurement device
CN105352915A (zh) * 2015-10-23 2016-02-24 西北工业大学 一种折射率二维分布的动态测量方法
CN114660023A (zh) * 2022-03-14 2022-06-24 江苏理工学院 基于全反射共光程偏振干涉技术的折射率测量系统及测量

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
網路文獻 Huang et al. Detecting phase shifts in surface plasmon resonance: a review Hindawi Publishing Corporation 2012 https://downloads.hindawi.com/archive/2012/471957.pdf;網路文獻 Wang et al. Dynamic full-field refractive index distribution measurements using total internal reflection terahertz digital holography Chinese Laser Press 7 January 2022 https://opg.optica.org/DirectPDFAccess/0375A057-69F7-463B-8E32AC2C2A5DB97A_468393/prj-10-2-289.pdf?da=1&id=468393&seq=0&mobile=no *
網路文獻 Wang et al. Dynamic full-field refractive index distribution measurements using total internal reflection terahertz digital holography Chinese Laser Press 7 January 2022 https://opg.optica.org/DirectPDFAccess/0375A057-69F7-463B-8E32AC2C2A5DB97A_468393/prj-10-2-289.pdf?da=1&id=468393&seq=0&mobile=no

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TWI799875B (zh) 折射率量測系統、方法與其所使用的全反射子系統