TWI799709B - 快速分類在製造組件之子組件中的缺陷的方法及設備 - Google Patents

快速分類在製造組件之子組件中的缺陷的方法及設備 Download PDF

Info

Publication number
TWI799709B
TWI799709B TW109118091A TW109118091A TWI799709B TW I799709 B TWI799709 B TW I799709B TW 109118091 A TW109118091 A TW 109118091A TW 109118091 A TW109118091 A TW 109118091A TW I799709 B TWI799709 B TW I799709B
Authority
TW
Taiwan
Prior art keywords
subcomponents
manufactured component
classifying defects
rapidly classifying
rapidly
Prior art date
Application number
TW109118091A
Other languages
English (en)
Other versions
TW202107071A (zh
Inventor
愛德華 Ｒ 雷特尼爾
安德魯 喬治 雷德
Original Assignee
美商布魯克奈米公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商布魯克奈米公司 filed Critical 美商布魯克奈米公司
Publication of TW202107071A publication Critical patent/TW202107071A/zh
Application granted granted Critical
Publication of TWI799709B publication Critical patent/TWI799709B/zh

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2411—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on the proximity to a decision surface, e.g. support vector machines
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/06—Recognition of objects for industrial automation

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Multimedia (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • Quality & Reliability (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
TW109118091A 2019-05-30 2020-05-29 快速分類在製造組件之子組件中的缺陷的方法及設備 TWI799709B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201962854775P 2019-05-30 2019-05-30
US62/854,775 2019-05-30
US16/830,108 US11475556B2 (en) 2019-05-30 2020-03-25 Method and apparatus for rapidly classifying defects in subcomponents of manufactured component
US16/830,108 2020-03-25

Publications (2)

Publication Number Publication Date
TW202107071A TW202107071A (zh) 2021-02-16
TWI799709B true TWI799709B (zh) 2023-04-21

Family

ID=73550425

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109118091A TWI799709B (zh) 2019-05-30 2020-05-29 快速分類在製造組件之子組件中的缺陷的方法及設備

Country Status (5)

Country Link
US (1) US11475556B2 (zh)
KR (1) KR20220015415A (zh)
CN (1) CN114207624A (zh)
TW (1) TWI799709B (zh)
WO (1) WO2020242763A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11521309B2 (en) * 2019-05-30 2022-12-06 Bruker Nano, Inc. Method and apparatus for rapid inspection of subcomponents of manufactured component
CN113344929B (zh) * 2021-08-09 2021-11-05 深圳智检慧通科技有限公司 一种焊点视觉检测识别方法、可读存储介质及设备
US11769270B2 (en) * 2022-01-18 2023-09-26 Smart Radar System, Inc. Method and apparatus for measuring eccentricity of blind via hole formed in printed circuit board
EP4254325A1 (en) * 2022-03-30 2023-10-04 Siemens Aktiengesellschaft Inspection of printed circuit board assemblies
CN117078620B (zh) * 2023-08-14 2024-02-23 正泰集团研发中心(上海)有限公司 Pcb焊点缺陷检测方法、装置、电子设备和存储介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101785009A (zh) * 2007-08-20 2010-07-21 恪纳腾公司 确定实际缺陷是潜在系统性缺陷还是潜在随机缺陷的计算机实现的方法
US20140270491A1 (en) * 2013-03-14 2014-09-18 Navteq B.V. Acceleration of Linear Classifiers
TW201838052A (zh) * 2017-03-30 2018-10-16 義守大學 適用於三維晶片的缺陷測試方法及系統
TW201901113A (zh) * 2017-05-11 2019-01-01 美商克萊譚克公司 用於對準以不同模態所獲取之影像之以學習為基礎之方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6923067B2 (en) 1999-03-19 2005-08-02 Betriebsforschungsinstitut Vdeh Institut Fur Angewandte Forschung Gmbh Defect type classifying method
US6456899B1 (en) 1999-12-07 2002-09-24 Ut-Battelle, Llc Context-based automated defect classification system using multiple morphological masks
JP3978098B2 (ja) 2002-08-12 2007-09-19 株式会社日立製作所 欠陥分類方法及びその装置
US7602962B2 (en) 2003-02-25 2009-10-13 Hitachi High-Technologies Corporation Method of classifying defects using multiple inspection machines
US7346470B2 (en) * 2003-06-10 2008-03-18 International Business Machines Corporation System for identification of defects on circuits or other arrayed products
US6980873B2 (en) 2004-04-23 2005-12-27 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment
JP4317805B2 (ja) 2004-09-29 2009-08-19 株式会社日立ハイテクノロジーズ 欠陥自動分類方法及び装置
KR100687090B1 (ko) 2005-05-31 2007-02-26 삼성전자주식회사 결함 분류 방법
JP4776308B2 (ja) 2005-09-05 2011-09-21 株式会社東京精密 画像欠陥検査装置、画像欠陥検査システム、欠陥分類装置及び画像欠陥検査方法
JP2007141943A (ja) * 2005-11-15 2007-06-07 Matsushita Electric Ind Co Ltd クリティカルエリア算出方法及び歩留まり算出方法
JP5479782B2 (ja) 2009-06-02 2014-04-23 株式会社日立ハイテクノロジーズ 欠陥画像処理装置、欠陥画像処理方法、半導体欠陥分類装置および半導体欠陥分類方法
KR101448967B1 (ko) 2009-06-19 2014-10-13 케이엘에이-텐코어 코오포레이션 상이한 피치들을 갖는 다수의 어레이 구역들을 동시에 검사하기 위한 방법 및 장치
US8595666B2 (en) 2009-07-09 2013-11-26 Hitachi High-Technologies Corporation Semiconductor defect classifying method, semiconductor defect classifying apparatus, and semiconductor defect classifying program
US8692246B2 (en) 2011-09-15 2014-04-08 International Business Machines Corporation Leakage measurement structure having through silicon vias
US9129715B2 (en) 2012-09-05 2015-09-08 SVXR, Inc. High speed x-ray inspection microscope
US9430743B2 (en) 2014-03-06 2016-08-30 Kla-Tencor Corp. Composite defect classifier
US9613411B2 (en) 2014-03-17 2017-04-04 Kla-Tencor Corp. Creating defect classifiers and nuisance filters
US20170069075A1 (en) 2015-09-04 2017-03-09 Canon Kabushiki Kaisha Classifier generation apparatus, defective/non-defective determination method, and program
US10713534B2 (en) 2017-09-01 2020-07-14 Kla-Tencor Corp. Training a learning based defect classifier
US20190236415A1 (en) * 2018-01-30 2019-08-01 Beamr Imaging Ltd. Method of classification of an object and system thereof
KR20200123858A (ko) * 2018-03-21 2020-10-30 케이엘에이 코포레이션 합성 이미지를 사용한 머신 러닝 모델 트레이닝
US10692184B2 (en) * 2018-07-05 2020-06-23 SVXR, Inc. Super-resolution X-ray imaging method and apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101785009A (zh) * 2007-08-20 2010-07-21 恪纳腾公司 确定实际缺陷是潜在系统性缺陷还是潜在随机缺陷的计算机实现的方法
US20140270491A1 (en) * 2013-03-14 2014-09-18 Navteq B.V. Acceleration of Linear Classifiers
TW201838052A (zh) * 2017-03-30 2018-10-16 義守大學 適用於三維晶片的缺陷測試方法及系統
TW201901113A (zh) * 2017-05-11 2019-01-01 美商克萊譚克公司 用於對準以不同模態所獲取之影像之以學習為基礎之方法

Also Published As

Publication number Publication date
KR20220015415A (ko) 2022-02-08
WO2020242763A1 (en) 2020-12-03
TW202107071A (zh) 2021-02-16
US20200380654A1 (en) 2020-12-03
US11475556B2 (en) 2022-10-18
CN114207624A (zh) 2022-03-18

Similar Documents

Publication Publication Date Title
TWI799709B (zh) 快速分類在製造組件之子組件中的缺陷的方法及設備
EP3836686A4 (en) METHOD AND APPARATUS FOR CONFIGURATION OF SIDE LINK RESOURCES IN THE VEHICLE INTERNET
EP3869803A4 (en) METHOD AND DEVICE FOR EVALUATING THE SUBJECTIVE QUALITY OF A VIDEO
EP3816614A4 (en) OBJECT TEST APPARATUS AND OBJECT TEST METHOD USING THE SAME
EP3964954A4 (en) PROCESSING METHOD AND DEVICE FOR WAITING SCENARIO IN APPLICATION
EP3904866A4 (en) DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD AND ASSOCIATED PROGRAM
EP3987709A4 (en) METHOD AND APPARATUS FOR SS/PBCH BLOCK REPEAT
EP3909286A4 (en) METHOD AND APPARATUS FOR EARLY MEASUREMENT CONFIGURATION
EP3982261A4 (en) METHOD AND APPARATUS FOR I/O PROCESSING
EP4117333A4 (en) MEASUREMENT METHOD AND DEVICE
EP3660491A4 (en) DEFECT INSPECTION PROCEDURE AND DEFECT INSPECTION DEVICE
EP4006776A4 (en) METHOD AND APPARATUS FOR CLASSIFYING IMAGES
EP4016942A4 (en) METHOD AND APPARATUS FOR DETERMINING A SENDING PERIOD ACCORDING TO A DETERMINISTIC IP PROTOCOL
EP3779419A4 (en) NON-DESTRUCTIVE INSPECTION PROCESS AND APPARATUS
EP4096280A4 (en) MEASUREMENT PROCESS AND APPARATUS
EP4124158A4 (en) METHOD AND APPARATUS FOR PERFORMING DXT-BASED RLF OPERATION IN NR V2X
EP3568087A4 (en) PROCEDURE AND APPARATUS FOR PASSING A SUTURE
EP3751780A4 (en) METHOD AND DEVICE FOR HANDLING A HANDOVER
EP4057539A4 (en) METHOD AND DEVICE FOR SIDELINK RETRANSMISSION BASED ON CR IN NR V2X
EP4050930A4 (en) METHOD AND APPARATUS FOR CONFIGURING MEASUREMENTS
EP3895789A4 (en) METHOD FOR IDENTIFYING MEMBRANE DEFECTS AND DEVICE FOR IDENTIFYING MEMBRANE DEFECTS
EP3804233A4 (en) METHOD AND DEVICE FOR COMMUNICATION IN THE INTERNET OF THINGS
EP4070557A4 (en) VIDEO PROCESSING METHOD AND APPARATUS FOR USING PALETTE MODE
EP4059178A4 (en) DEVICE AND METHOD FOR DETERMINING A QUASI-COLOCATION CONFIGURATION
EP4049953A4 (en) UNLOADING APPARATUS AND UNLOADING METHOD