TWI799528B - Transport device - Google Patents
Transport device Download PDFInfo
- Publication number
- TWI799528B TWI799528B TW108107625A TW108107625A TWI799528B TW I799528 B TWI799528 B TW I799528B TW 108107625 A TW108107625 A TW 108107625A TW 108107625 A TW108107625 A TW 108107625A TW I799528 B TWI799528 B TW I799528B
- Authority
- TW
- Taiwan
- Prior art keywords
- transport device
- transport
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/06—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for minimising or preventing longitudinal or transverse swinging of loads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Handcart (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-042066 | 2018-03-08 | ||
JP2018042066A JP6939651B2 (en) | 2018-03-08 | 2018-03-08 | Transport device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201943638A TW201943638A (en) | 2019-11-16 |
TWI799528B true TWI799528B (en) | 2023-04-21 |
Family
ID=67847389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108107625A TWI799528B (en) | 2018-03-08 | 2019-03-07 | Transport device |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6939651B2 (en) |
KR (1) | KR102513293B1 (en) |
CN (1) | CN111741911B (en) |
TW (1) | TWI799528B (en) |
WO (1) | WO2019172155A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7238733B2 (en) * | 2019-11-07 | 2023-03-14 | 株式会社ダイフク | Goods transport equipment |
JP7487721B2 (en) | 2021-11-08 | 2024-05-21 | 株式会社ダイフク | Item transport device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1572709A (en) * | 2003-05-20 | 2005-02-02 | 株式会社大福 | Transport apparatus |
JP2015131702A (en) * | 2014-01-10 | 2015-07-23 | 株式会社ダイフク | Transfer device |
JP2016172607A (en) * | 2015-03-16 | 2016-09-29 | 株式会社ダイフク | Article conveyance facility and inspection jig |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02300091A (en) * | 1989-05-16 | 1990-12-12 | Toshiba Corp | Lifting position control device for movable crane |
JP3975532B2 (en) * | 1997-11-12 | 2007-09-12 | アシスト シンコー株式会社 | Ceiling transport vehicle |
JP4048409B2 (en) * | 2001-10-22 | 2008-02-20 | 株式会社ダイフク | Transport equipment |
JP5266680B2 (en) * | 2007-07-23 | 2013-08-21 | 村田機械株式会社 | Conveying device, conveying system, and extension mechanism |
JP6052143B2 (en) * | 2013-11-20 | 2016-12-27 | 株式会社ダイフク | Linear rotation device |
-
2018
- 2018-03-08 JP JP2018042066A patent/JP6939651B2/en active Active
-
2019
- 2019-03-04 CN CN201980015370.3A patent/CN111741911B/en active Active
- 2019-03-04 KR KR1020207022111A patent/KR102513293B1/en active IP Right Grant
- 2019-03-04 WO PCT/JP2019/008274 patent/WO2019172155A1/en active Application Filing
- 2019-03-07 TW TW108107625A patent/TWI799528B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1572709A (en) * | 2003-05-20 | 2005-02-02 | 株式会社大福 | Transport apparatus |
JP2015131702A (en) * | 2014-01-10 | 2015-07-23 | 株式会社ダイフク | Transfer device |
JP2016172607A (en) * | 2015-03-16 | 2016-09-29 | 株式会社ダイフク | Article conveyance facility and inspection jig |
Also Published As
Publication number | Publication date |
---|---|
KR20200128517A (en) | 2020-11-13 |
TW201943638A (en) | 2019-11-16 |
JP2019156516A (en) | 2019-09-19 |
JP6939651B2 (en) | 2021-09-22 |
KR102513293B1 (en) | 2023-03-22 |
WO2019172155A1 (en) | 2019-09-12 |
CN111741911B (en) | 2023-01-17 |
CN111741911A (en) | 2020-10-02 |
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