TWI799511B - 電漿蝕刻方法及電漿蝕刻裝置 - Google Patents
電漿蝕刻方法及電漿蝕刻裝置 Download PDFInfo
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- TWI799511B TWI799511B TW108105018A TW108105018A TWI799511B TW I799511 B TWI799511 B TW I799511B TW 108105018 A TW108105018 A TW 108105018A TW 108105018 A TW108105018 A TW 108105018A TW I799511 B TWI799511 B TW I799511B
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- plasma etching
- etching method
- etching apparatus
- plasma
- etching
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Applications Claiming Priority (4)
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JP2018024761 | 2018-02-15 | ||
JP2018-024761 | 2018-02-15 | ||
JP2018-214584 | 2018-11-15 | ||
JP2018214584A JP7158252B2 (ja) | 2018-02-15 | 2018-11-15 | プラズマエッチング方法及びプラズマエッチング装置 |
Publications (2)
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TW201937593A TW201937593A (zh) | 2019-09-16 |
TWI799511B true TWI799511B (zh) | 2023-04-21 |
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TW108105018A TWI799511B (zh) | 2018-02-15 | 2019-02-15 | 電漿蝕刻方法及電漿蝕刻裝置 |
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JP (1) | JP7158252B2 (zh) |
TW (1) | TWI799511B (zh) |
Families Citing this family (1)
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JP7454983B2 (ja) | 2020-03-30 | 2024-03-25 | 東京エレクトロン株式会社 | エッジリング及びプラズマ処理装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002110650A (ja) * | 2000-10-03 | 2002-04-12 | Tokyo Electron Ltd | プラズマエッチング方法およびプラズマエッチング装置 |
JP2017050529A (ja) * | 2015-08-12 | 2017-03-09 | セントラル硝子株式会社 | ドライエッチング方法 |
JP2017228690A (ja) * | 2016-06-23 | 2017-12-28 | 東京エレクトロン株式会社 | エッチング処理方法 |
Family Cites Families (5)
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JP6454492B2 (ja) | 2014-08-08 | 2019-01-16 | 東京エレクトロン株式会社 | 多層膜をエッチングする方法 |
JP6498022B2 (ja) | 2015-04-22 | 2019-04-10 | 東京エレクトロン株式会社 | エッチング処理方法 |
JP6516603B2 (ja) | 2015-04-30 | 2019-05-22 | 東京エレクトロン株式会社 | エッチング方法及びエッチング装置 |
CN106298502B (zh) | 2015-05-18 | 2019-04-09 | 中微半导体设备(上海)股份有限公司 | 一种利用等离子体对多层材料刻蚀的方法 |
US10847374B2 (en) | 2017-10-31 | 2020-11-24 | Lam Research Corporation | Method for etching features in a stack |
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2018
- 2018-11-15 JP JP2018214584A patent/JP7158252B2/ja active Active
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2019
- 2019-02-15 TW TW108105018A patent/TWI799511B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002110650A (ja) * | 2000-10-03 | 2002-04-12 | Tokyo Electron Ltd | プラズマエッチング方法およびプラズマエッチング装置 |
JP2017050529A (ja) * | 2015-08-12 | 2017-03-09 | セントラル硝子株式会社 | ドライエッチング方法 |
JP2017228690A (ja) * | 2016-06-23 | 2017-12-28 | 東京エレクトロン株式会社 | エッチング処理方法 |
Also Published As
Publication number | Publication date |
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TW201937593A (zh) | 2019-09-16 |
JP7158252B2 (ja) | 2022-10-21 |
JP2019145780A (ja) | 2019-08-29 |
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