TWI798748B - Circuit board structure and manufacturing method thereof - Google Patents

Abstract

A circuit board structure includes a redistribution structure layer, a build-up circuit structure layer and a connection structure layer. The redistribution structure layer has a first and a second surfaces, and includes an inner and an outer dielectric layers, first connecting pads and die pads. A bottom surface of each first connecting pads is aligned with the first surface, and the chips pads protrude from and are located on the second surface. The build-up circuit structure layer includes second connecting pads. The connection structure layer is disposed between the redistribution structure layer and the build-up circuit structure layer and includes a substrate and conductive paste pillars penetrating the substrate. The first connecting pads are electrically connected to the second connecting pads through the conductive paste pillars, respectively. A top surface of each conductive paste pillars is aligned with the first surface of the redistribution structure layer.

Description

Circuit board structure and manufacturing method thereof

The present invention relates to a substrate structure and its manufacturing method, and in particular to a circuit board structure and its manufacturing method.

Generally, two circuit boards with circuits or conductive structures are to be combined with each other through solder joints, and an underfill is filled between the two substrates to seal the solder joints. However, in the process of solder reflow at high temperature, the circuit board with a large area size cannot be released due to the stress, so it is prone to large warpage, thereby reducing the assembly yield between the two circuit boards.

The invention provides a circuit board structure, which does not need to use solder and primer, can reduce costs, and has better structural reliability.

The present invention also provides a method for manufacturing the circuit board structure, which is used to manufacture the above circuit board structure.

The circuit board structure of the present invention includes a reconfiguration circuit structure layer, an A circuit structure layer and a connection structure layer. The reconfiguration circuit structure layer has a first surface and a second surface opposite to each other, and includes an inner dielectric layer, an outer dielectric layer, a plurality of first connection pads and a plurality of chip pads. The inner dielectric layer has a first surface, and a bottom surface of each first connection pad is cut to be aligned with the first surface. The outer dielectric layer has a second surface, and the chip pad protrudes from the second surface and is located on the second surface. The build-up circuit structure layer is configured on one side of the reconfiguration circuit structure layer and includes a plurality of second connection pads. The line width and line spacing of the reconfiguration line structure layer are smaller than the line width and line spacing of the build-up line structure layer. The connection structure layer is configured between the reconfiguration line structure layer and the layer-adding line structure layer. The connection structure layer includes a base material and a plurality of conductive glue pillars penetrating the base material. The first connection pads are respectively electrically connected to the second connection pads through the conductive glue pillars. A top surface of each conductive glue column is aligned with the first surface of the reconfiguration circuit structure layer, and the second connection pads are respectively embedded in the base material.

In an embodiment of the present invention, the above-mentioned reconfiguration circuit structure layer further includes at least one dielectric layer, at least one reconfiguration circuit and a plurality of conductive vias. The dielectric layer is located between the inner dielectric layer and the outer dielectric layer. The reconfiguration lines are alternately arranged with the dielectric layer. The first connection pad, the reconfiguration line and the chip pad are electrically connected through the conductive via hole.

In an embodiment of the present invention, the above-mentioned inner dielectric layer, outer dielectric layer and dielectric layer are made of photosensitive dielectric material or Ajinomoto Build-up Film (ABF).

In an embodiment of the present invention, the above-mentioned circuit board structure further includes a surface treatment layer disposed on the chip pads of the reconfiguration circuit structure layer. surface treatment layer The materials used include nickel-palladium immersion gold (ENEPIG), organic solderability preservatives (OSP) or electroless nickel immersion gold (Electroless Nickel Immersion Gold, ENIG).

In an embodiment of the present invention, the above-mentioned circuit board structure further includes a solder resist layer, which is disposed on a surface of the build-up circuit structure layer relatively away from the connection structure layer, and covers part of the build-up circuit structure layer to define multiple A solder ball pad.

The manufacturing method of the circuit board structure of the present invention includes the following steps. Provides a reconfiguration line structure layer. The reconfiguration circuit structure layer has a first surface and a second surface opposite to each other, and includes an inner dielectric layer, an outer dielectric layer, a plurality of first connection pads and a plurality of chip pads. The inner dielectric layer has a first surface, and a bottom surface of each first connection pad is cut to be aligned with the first surface. The outer dielectric layer has a second surface, and the chip pad protrudes from the second surface and is located on the second surface. A connection structure layer including a base material and a plurality of conductive glue pillars penetrating the base material is provided, wherein the connection structure layer is in a B-stage state. A build-up wiring structure layer including a plurality of second connection pads is provided, wherein the line width and line spacing of the reconfiguration wiring structure layer are smaller than the line width and line spacing of the build-up wiring structure layer. Laminating the reconfiguration line structure layer, the connection structure layer and the layer-up line structure layer, so that the connection structure layer is located between the reconfiguration line structure layer and the layer-up line structure layer. The first connection pads are respectively electrically connected to the second connection pads through the conductive glue pillars. A top surface of each conductive glue column is aligned with the first surface of the reconfiguration circuit structure layer, and the second connection pads are respectively embedded in the base material, and the connection structure layer changes from a B-stage state to a C-stage state.

In an embodiment of the present invention, the above-mentioned reconfiguration line structure layer The step includes: providing a temporary substrate, a release film and a first seed layer. The release film is located between the temporary substrate and the first seed layer. A first patterned photoresist layer is formed on the first seed layer, wherein the first patterned photoresist layer exposes a part of the first seed layer. Using the first patterned photoresist layer as an electroplating mask, a first metal layer is electroplated on the first seed layer exposed by the first patterned photoresist layer. The first patterned photoresist layer and the first seed layer under it are removed to expose a part of the release film and form a first connection pad. An internal dielectric layer is formed on the first connection pad and the exposed release film. At least one reconfiguration line, at least one dielectric layer, a plurality of first conductive vias and a plurality of second conductive vias are formed. The reconfiguration lines are arranged on the inner dielectric layer, and the reconfiguration lines and the dielectric layer are alternately arranged. The first conductive via passes through the inner dielectric layer and electrically connects the reconfiguration line and the first connection pad. The second conductive via passes through the dielectric layer and is electrically connected to the reconfiguration line. An external dielectric layer is formed on the reconfiguration line, wherein the external dielectric layer has a plurality of openings, and the openings expose part of the reconfiguration line. A second seed layer is formed on the outer dielectric layer and the inner wall of the opening. A second patterned photoresist layer is formed on the second seed layer, wherein the second patterned photoresist layer exposes a part of the second seed layer. Using the second patterned photoresist layer as an electroplating mask, a second metal layer is electroplated on the second seed layer exposed by the second patterned photoresist layer. The second patterned photoresist layer is removed to expose the second seed layer and form wafer pads.

In an embodiment of the present invention, before laminating the reconfiguration circuit structure layer, the connection structure layer and the build-up circuit structure layer, it further includes: laminating an adhesive layer and a composite substrate on the reconfiguration circuit structure layer. The adhesive layer is located between the composite substrate and the chip pads of the reconfiguration circuit structure layer. The composite substrate includes a core substrate and A first copper foil layer and a second copper foil layer are located on opposite surfaces of the core substrate. The second copper foil layer is located between the core substrate and the adhesive layer. After pressing the adhesive layer and the composite substrate on the reconfiguration circuit structure layer, the temporary substrate and the release film are removed to expose the bottom surface of each first connection pad and the first surface of the internal dielectric layer.

In an embodiment of the present invention, after the lamination and reconfiguration of the circuit structure layer, the connection structure layer, and the build-up circuit structure layer, it further includes: forming a protective layer on a layer of the build-up circuit structure layer that is relatively far away from the connection structure layer On the surface. A stripping procedure is performed to remove the first copper foil layer and the core substrate. A first etching process is performed to remove the second copper foil layer to expose the adhesive layer. A stripping process is performed to remove the protective layer, exposing the surface of the build-up circuit structure layer relatively away from the connection structure layer. A plasma etch process is performed to remove the adhesive layer and expose the die pads. A second etching process is performed to remove the second seed layer to expose the second surface of the outer dielectric layer. Form a surface treatment layer on the chip pad of the reconfiguration circuit structure layer, wherein the material of the surface treatment layer includes nickel-palladium immersion gold (ENEPIG), organic solderability preservatives (OSP) or electroless nickel immersion gold (Electroless Nickel Immersion Gold, ENIG). .

In an embodiment of the present invention, before lamination and reconfiguration of the circuit structure layer, the connection structure layer and the build-up circuit structure layer, it further includes forming a solder resist layer on a layer of the build-up circuit structure layer that is relatively far away from the connection structure layer. On the surface. The solder resist layer covers part of the build-up circuit structure layer to define a plurality of solder ball pads.

Based on the above, in the manufacturing method of the circuit board structure of the present invention, the circuit structure layer, the connection structure layer and the layered circuit structure layer are reconfigured through lamination. formula to form the circuit board structure. The first connection pads of the reconfiguration circuit structure layer are respectively electrically connected to the second connection pads of the build-up circuit structure layer through the conductive adhesive columns of the connection structure layer. A top surface of each conductive glue column is aligned with the first surface of the reconfiguration circuit structure layer, and the second connection pads are respectively embedded in the base material. Therefore, the manufacturing method of the circuit board structure of the present invention does not need to use solder joints and primer, which can effectively reduce the manufacturing cost of the circuit board structure. In addition, since no solder is used, the bonding yield among the reconfiguration circuit structure layer, the connection structure layer and the build-up circuit structure layer can be effectively improved, thereby improving the structural reliability of the circuit board structure of the present invention.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail together with the accompanying drawings.

10: Temporary substrate

20: Release film

30: Adhesive layer

40: Composite substrate

42: Core base material

44: The first copper foil layer

46: Second copper foil layer

50: protective layer

100: Circuit board structure

110:Reconfigure the line structure layer

110’: semi-finished product of reconfiguration line structure layer

111: Internal dielectric layer

112: first connection pad

113: dielectric layer

114, 116: reconfigure the line

115: external dielectric layer

118: chip pad

120:Connection structure layer

122: Substrate

125: Conductive adhesive column

130:Add layer circuit structure layer

131: surface

132: Second connection pad

140: solder mask

150: surface treatment layer

200: chip

210: Solder

300: chip package structure

B: Bottom

C1, C2, C3: metal layer

H1, H2: opening

P1, P2, P3: patterned photoresist layer

S1, S2, S3: seed layer

SP: Solder Ball Pad

T: top surface

T1, T2, T3: Conductive vias

1A to 1X are schematic cross-sectional views of a manufacturing method of a circuit board structure according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of disposing chips on the circuit board structure of FIG. 1X .

1A to 1X are schematic cross-sectional views of a manufacturing method of a circuit board structure according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of disposing chips on the circuit board structure of FIG. 1X . Regarding the manufacturing method of the circuit board structure of this embodiment, at first, please refer to Fig. 1A, provide a temporary substrate 10, a release film 20 and a kind of seed Layer S1, wherein the release film 20 is located between the temporary substrate 10 and the seed layer S1. Here, the material of the temporary substrate 10 is, for example, glass or plastic, which is a substrate without lines.

Next, please refer to FIG. 1B , a patterned photoresist layer P1 is formed on the seed layer S1 , wherein the patterned photoresist layer P1 exposes a part of the seed layer S1 .

Next, referring to FIG. 1C , using the patterned photoresist layer P1 as an electroplating mask, a metal layer C1 is electroplated on the seed layer S1 exposed by the patterned photoresist layer P1 . The material of the metal layer C1 is, for example, copper, but not limited thereto.

Next, referring to FIG. 1C and FIG. 1D , the patterned photoresist layer P1 and the seed layer S1 below are removed to expose part of the release film 20 and form the first connection pads 112 .

Next, referring to FIG. 1E , an internal dielectric layer 111 is formed on the first connection pad 112 and the exposed release film 20 . The internal dielectric layer 111 has a plurality of openings H1 , wherein the openings H1 expose part of the first connection pads 112 . The material of the inner dielectric layer 111 is, for example, photosensitive dielectric material or Ajinomoto build-up film (ABF).

Next, referring to FIG. 1F , a seed layer S2 is formed on the internal dielectric layer 111 and the inner wall of the opening H1 , wherein the seed layer S2 directly contacts the first connection pad 112 exposed by the opening H1 .

Next, referring to FIG. 1G , a patterned photoresist layer P2 is formed on the seed layer S2 , wherein the patterned photoresist layer P2 exposes a part of the seed layer S2 .

Next, referring to FIG. 1H , using the patterned photoresist layer P2 as an electroplating mask, a metal layer C2 is electroplated on the seed layer S2 exposed by the patterned photoresist layer P2 . The material of the metal layer C2 is, for example, copper, but not limited thereto.

Next, referring to FIG. 1H and FIG. 1I at the same time, the patterned photoresist layer P2 and the underlying seed layer S2 are removed to expose part of the internal dielectric layer 111, and a reconfiguration line 114 and a plurality of conductive vias T1 are formed. . Here, the reconfiguration line 114 is located on the inner dielectric layer 111, and the conductive vias T1 pass through the inner dielectric layer 111 and are respectively located in the openings H1, wherein the conductive vias T1 are electrically connected to the first connection pad 112 and the reconfiguration Line 114.

Next, referring to FIG. 1J , the steps in FIG. 1E to FIG. 1I may be optionally repeated to form a dielectric layer 113 , a reconfiguration line 116 , a conductive via T2 and an external dielectric layer 115 . Here, the reconfiguration lines 114 , the dielectric layer 113 , the reconfiguration lines 116 and the outer dielectric layer 115 are arranged alternately in sequence. The conductive via T2 passes through the dielectric layer 113 and electrically connects the reconfiguration lines 114 and 116 . The outer dielectric layer 115 is formed on the reconfiguration line 116 and has a plurality of openings H2 , wherein the openings H2 expose part of the reconfiguration line 116 . Here, the materials of the outer dielectric layer 115 and the dielectric layer 113 are, for example, photosensitive dielectric material or Ajinomoto build-up film (ABF).

Next, referring to FIG. 1J again, a seed layer S3 is formed on the outer dielectric layer 115 and the inner wall of the opening H2, wherein the seed layer S3 directly contacts the reconfiguration line 116 exposed by the opening H2.

Next, referring to FIG. 1K , a patterned photoresist layer P3 is formed on the seed layer S3 , wherein the patterned photoresist layer P3 exposes a part of the seed layer S3 .

Next, referring to FIG. 1L , using the patterned photoresist layer P3 as an electroplating mask, a metal layer C3 is electroplated on the seed layer S3 exposed by the patterned photoresist layer P3 . The material of the metal layer C3 is copper, for example, but not limited thereto.

Next, referring to FIG. 1M , the patterned photoresist layer P3 is removed to expose the seed layer S3 , and a plurality of chip pads 118 and a plurality of conductive vias T3 are formed. Here, the die pad 118 and the conductive via T3 are formed at the same time and belong to the same material. So far, the semi-finished product 110' of the reconfiguration circuit structure layer has been completed.

Next, referring to FIG. 1N , an adhesive layer 30 and a composite substrate 40 are laminated on the seed layer S3 . The adhesive layer 30 is located between the composite substrate 40 and the die pad 118 . The composite substrate 40 includes a core substrate 42 and a first copper foil layer 44 and a second copper foil layer 46 located on opposite surfaces of the core substrate 42 . The second copper foil layer 46 is located between the core substrate 42 and the adhesive layer 30 .

Next, referring to FIG. 1N and FIG. 1O , the temporary substrate 10 and the release film 20 are removed to expose the bottom surface B of each first connection pad 112 and the first surface S1 of the internal dielectric layer 111 .

Next, please refer to FIG. 1P , providing a connection structure layer 120 including a base material 122 and a plurality of conductive glue pillars 125 penetrating through the base material 122 , wherein the connection structure layer 120 is in a B-stage state. Here, the material of the base material 122 is, for example, prepreg (PP), and the material of the conductive glue column 125 is, for example, conductive metal glue, which is coated by printing and can have the effect of conducting electricity and heat. , and suitable for bonding with any metal material.

Next, referring to FIG. 1P again, a build-up circuit structure layer 130 including a plurality of second connection pads 132 is provided, wherein the line width and line pitch of the reconfigured circuit structure layer semi-finished product 110' are smaller than the lines of the build-up circuit structure layer 130. Width and line spacing. At this time, a solder resist layer 140 has been formed on a side of the build-up circuit structure layer 130 that is relatively far away from the connection structure layer 120. surface 131 . The solder resist layer 140 covers part of the build-up circuit structure layer 130 to define a plurality of solder ball pads SP. Here, the build-up wiring structure layer 130 is embodied as a multi-layer circuit board.

It should be noted that this embodiment does not limit the order of providing the semi-finished product 110 ′ of the reconfiguration circuit structure layer, the connection structure layer 120 and the build-up circuit structure layer 130 .

Next, please refer to FIG. 1Q , in a heat-compression bonding manner, the reconfiguration circuit structure layer semi-finished product 110 ′, the connection structure layer 120 and the build-up circuit structure layer 130 are pressed together, so that the connection structure layer 120 is positioned on the reconfiguration circuit structure layer semi-finished product 110 ′ and the build-up circuit structure layer 130 . At this time, the adhesive layer 30 and the composite substrate 40 are still on the semi-finished product 110' of the reconfiguration circuit structure layer. In particular, the first connection pads 112 are respectively electrically connected to the second connection pads 132 through the conductive glue posts 125, a top surface T of the conductive glue posts 125 is aligned with the first surface S1 of the internal dielectric layer 111, and the second The connection pads 132 are respectively embedded in the substrate 122 . During thermocompression bonding, the semi-finished product 110' of the reconfigured circuit structure layer and the build-up circuit structure layer 130 directly contact the substrate 122 of the connection structure layer 120 and squeeze the conductive adhesive column 125 to deform it. At this time, the base material 122 and the conductive adhesive column 125 are flexible and viscous because they are not fully cured, and can be bonded to the semi-finished product 110 ′ of the reconfiguration circuit structure layer and the build-up circuit structure layer 130 , and the second connection pad 132 is squeezed. Into the substrate 122, and embedded in the substrate 122. After lamination and curing, the base material 122 and the conductive adhesive post 125 connecting the structural layer 120 are transformed from a B-stage state to a C-stage state.

Next, please refer to FIG. 1R , a protection layer 50 is formed on the surface 131 of the build-up circuit structure layer 130 relatively away from the connection structure layer 120 . The passivation layer 50 covers the solder resist layer 140 and the solder ball pads SP.

Next, please refer to FIG. 1R and FIG. 1S at the same time, and perform a de-boarding procedure to remove the first copper foil layer 44 and the core base material 42 of the composite substrate 40 .

Next, referring to FIG. 1S and FIG. 1T , a first etching process is performed to remove the second copper foil layer 46 to expose the adhesive layer 30 .

Next, referring to FIG. 1T and FIG. 1U , a stripping process is performed to remove the protection layer 50 to expose the solder resist layer 140 and the solder ball pads SP of the build-up circuit structure layer 130 .

Next, please refer to FIG. 1U and FIG. 1V at the same time, perform a plasma etching process to remove the adhesive layer 30 , and expose the chip pad 118 .

Afterwards, please refer to FIG. 1V and FIG. 1W at the same time, perform a second etching process to remove the seed layer S3 located outside the wafer pads, so as to expose the second surface S2 of the external dielectric layer 115 . So far, the fabrication of the reconfiguration circuit structure layer 110 has been completed. Here, the reconfiguration line structure layer 110 is embodied as a reconfiguration line structure layer with thin lines.

Finally, referring to FIG. 1X, a surface treatment layer 150 is formed on the chip pad 118 of the reconfiguration circuit structure layer 110, wherein the material of the surface treatment layer 150 is, for example, nickel-palladium immersion gold (ENEPIG), organic solder preservative (OSP ) or electroless nickel immersion gold (ENIG). So far, the fabrication of the circuit board structure 100 has been completed.

In terms of structure, please refer to FIG. 1X again. In this embodiment, the circuit board structure 100 includes a reconfiguration circuit structure layer 110 , a build-up circuit structure layer 130 and a connection structure layer 120 . The reconfiguration circuit structure layer 110 has a first surface S1 and a second surface S2 opposite to each other, and includes an inner dielectric layer 111, an outer dielectric layer 115, a first connection pad 112 and die pad 118 . The internal dielectric layer 111 has a first surface S1, and the bottom surface B of the first connection pad 112 is aligned with the first surface S1. The outer dielectric layer 115 has a second surface S2, and the chip pad 118 protrudes from the second surface S2 and is located on the second surface S2. The build-up circuit structure layer 130 is disposed on one side of the reconfiguration circuit structure layer 110 and includes a second connection pad 132 . The line width and line spacing of the reconfiguration wiring structure layer 110 are smaller than the line width and line spacing of the build-up wiring structure layer 130 . The connection structure layer 120 is disposed between the reconfiguration circuit structure layer 110 and the build-up circuit structure layer 130 . The connection structure layer 120 includes a base material 122 and a conductive glue post 125 penetrating through the base material 122 . The first connection pads 112 are respectively electrically connected to the second connection pads 132 through the conductive adhesive pillars 125 . The top T surface of the conductive glue column 125 is aligned with the first surface S1 of the redistribution circuit structure layer 110 , and the second connection pads 132 are respectively embedded in the base material 122 .

Further, the reconfiguration line structure layer 110 of this embodiment further includes a dielectric layer 113 , reconfiguration lines 114 , 116 , and conductive vias T1 , T2 , T3 . The dielectric layer 113 is located between the inner dielectric layer 111 and the outer dielectric layer 115 . The reconfiguration lines 114 , 116 are arranged alternately with the dielectric layer 113 . The first connection pad 112 , the reconfiguration lines 114 , 116 and the chip pad 118 are electrically connected through the conductive vias T1 , T2 , T3 . Here, the materials of the inner dielectric layer 111 , the outer dielectric layer 115 and the dielectric layer 113 are, for example, photosensitive dielectric materials or Ajinomoto stacked film (ABF).

Furthermore, the circuit board structure 100 of this embodiment further includes a surface treatment layer 150 disposed on the chip pad 118 of the reconfiguration circuit structure layer 110 . Here, the material of the surface treatment layer 150 is, for example, nickel-palladium immersion gold, organic solder flux or electroless nickel immersion gold. In addition, the circuit board structure 100 of this embodiment also includes a solder resist layer 140 configured A plurality of solder ball pads SP are defined on the surface 131 of the build-up circuit structure layer 130 relatively away from the connection structure layer 120 and covering a part of the build-up circuit structure layer 130 .

In short, since the circuit board structure 100 is formed by laminating and reconfiguring the circuit structure layer 110, the connection structure layer 120 and the build-up circuit structure layer 130 in this embodiment, there is no need to use solder and primer, which can effectively The manufacturing cost of the circuit board structure 100 is reduced. In addition, since no solder joints are used, the joint yield between the reconfiguration circuit structure layer 110, the connection structure layer 120 and the build-up circuit structure layer 130 can be effectively improved, thereby improving the circuit board of this embodiment. Structural reliability of structure 100 .

In application, please refer to FIG. 2 , at least one chip 200 can be electrically connected to the chip pads 118 of the reconfiguration circuit structure layer 110 through solder 210 to form a chip package structure 300 .

To sum up, in the manufacturing method of the circuit board structure of the present invention, the circuit board structure is formed by laminating and reconfiguring the circuit structure layer, the connection structure layer and the build-up circuit structure layer. The first connection pads of the reconfiguration circuit structure layer are respectively electrically connected to the second connection pads of the build-up circuit structure layer through the conductive adhesive columns of the connection structure layer. A top surface of each conductive glue column is aligned with the first surface of the reconfiguration circuit structure layer, and the second connection pads are respectively embedded in the base material. Therefore, the manufacturing method of the circuit board structure of the present invention does not need to use solder joints and primer, which can effectively reduce the manufacturing cost of the circuit board structure. In addition, since no solder is used, the bonding yield among the reconfiguration circuit structure layer, the connection structure layer and the build-up circuit structure layer can be effectively improved, thereby improving the structural reliability of the circuit board structure of the present invention.

Although the present invention has been disclosed above with the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field may make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention should be defined by the scope of the appended patent application.

100: Circuit board structure

110:Reconfigure the line structure layer

111: Internal dielectric layer

112: first connection pad

113: dielectric layer

114, 116: reconfigure the line

115: external dielectric layer

118: chip pad

120:Connection structure layer

122: Substrate

125: Conductive adhesive column

130:Add layer circuit structure layer

131: surface

132: Second connection pad

140: solder mask

150: surface treatment layer

B: Bottom

SP: Solder Ball Pad

T: top surface

T1, T2, T3: Conductive vias

Claims (10)

A circuit board structure, comprising: a reconfiguration circuit structure layer, having a first surface and a second surface opposite to each other, and including an inner dielectric layer, an outer dielectric layer, a plurality of first connection pads and a plurality of Chip pads, the inner dielectric layer has the first surface, and a bottom surface of each of the first connection pads is aligned with the first surface, and the outer dielectric layer has the second surface, and the chip pads Protruding from the second surface and located on the second surface; a build-up circuit structure layer, configured on one side of the reconfiguration circuit structure layer, and including a plurality of second connection pads, wherein the reconfiguration circuit structure layer The line width and line spacing are smaller than the line width and line spacing of the build-up circuit structure layer; and a connection structure layer is arranged between the reconfiguration circuit structure layer and the build-up circuit structure layer, and includes a base material and through A plurality of conductive adhesive columns of the substrate, wherein the first connection pads are respectively electrically connected to the second connection pads through the conductive adhesive columns, and a top surface of each conductive adhesive column is aligned with the reconfiguration The first surface of the circuit structure layer and the second connection pads are respectively embedded in the substrate. The circuit board structure as claimed in claim 1, wherein the reconfiguration circuit structure layer further includes at least one dielectric layer, at least one reconfiguration circuit and a plurality of conductive vias, the at least one dielectric layer is located between the inner dielectric layer and Between the outer dielectric layers, the at least one reconfiguration line and the at least one dielectric layer are arranged alternately, and the first connection pads, the at least one reconfiguration line and the chip pads are electrically connected through the conductive vias . The circuit board structure according to claim 2, wherein materials of the inner dielectric layer, the outer dielectric layer and the at least one dielectric layer respectively include photosensitive dielectric material or Ajinomoto stacked film. The circuit board structure as described in claim 1, further comprising: a surface treatment layer disposed on the chip pads of the reconfiguration circuit structure layer, wherein the material of the surface treatment layer includes nickel-palladium immersion gold, organic protection Solder or electroless nickel immersion gold. The circuit board structure as described in claim 1, further comprising: a solder resist layer, disposed on a surface of the build-up circuit structure layer relatively far away from the connection structure layer, and covering part of the build-up circuit structure layer to define Multiple solder ball pads. A method for manufacturing a circuit board structure, comprising: providing a reconfiguration circuit structure layer, the reconfiguration circuit structure layer has a first surface and a second surface opposite to each other, and includes an inner dielectric layer, an outer dielectric layer , a plurality of first connection pads and a plurality of chip pads, the inner dielectric layer has the first surface, and a bottom surface of each of the first connection pads is aligned with the first surface, and the outer dielectric layer has the first surface The second surface, and the chip pads protrude from the second surface and are located on the second surface; providing a connection structure layer comprising a base material and a plurality of conductive glue columns penetrating the base material, wherein the connection structure layer is in a B-stage state; providing a build-up wiring structure layer including a plurality of second connection pads, wherein the line width and pitch of the reconfiguration wiring structure layer are smaller than the line width and line spacing of the build-up wiring structure layer distance; and pressing the reconfiguration circuit structure layer, the connection structure layer and the layer-building circuit structure layer so that the connection structure layer is located between the reconfiguration circuit structure layer and the layer-build circuit structure layer, wherein the The first connection pads are respectively electrically connected to the second connection pads through the conductive glue columns, a top surface of each of the conductive glue columns is aligned with the first surface of the reconfiguration circuit structure layer, and the first connection pads are aligned with each other. Two connection pads are respectively embedded in the substrate, and the connection structure layer changes from the B-stage state to a C-stage state. The manufacturing method of the circuit board structure as described in Claim 6, wherein the step of providing the reconfiguration circuit structure layer includes: providing a temporary substrate, a release film and a first seed layer, the release film is located on the temporary Between the substrate and the first seed layer; forming a first patterned photoresist layer on the first seed layer, wherein the first patterned photoresist layer exposes part of the first seed layer; with the first pattern The photoresist layer is an electroplating mask, and a first metal layer is electroplated on the first seed layer exposed by the first patterned photoresist layer; the first patterned photoresist layer and the underlying layer are removed The first seed layer exposes part of the release film and forms the first connection pads; forms the internal dielectric layer on the first connection pads and the exposed release film; forms at least one heavy layer Configuration lines, at least one dielectric layer, a plurality of first conductive vias and a plurality of second conductive vias, the at least one reconfiguration line is configured on the inner dielectric layer, and the at least one reconfiguration line is connected to the at least one dielectric layer Alternate configuration of electrical layers, the The first conductive vias pass through the inner dielectric layer and electrically connect the at least one reconfiguration line and the first connection pads, and the second conductive vias pass through the at least one dielectric layer and electrically connect the at least one connection pad. a reconfiguration line; forming the outer dielectric layer on the at least one reconfiguration line, wherein the outer dielectric layer has a plurality of openings, and the openings expose part of the at least one reconfiguration line; forming a second seed layer on the outer On the dielectric layer and on the inner walls of the openings; forming a second patterned photoresist layer on the second seed layer, wherein the second patterned photoresist layer exposes part of the second seed layer; with the The second patterned photoresist layer is an electroplating mask, electroplating a second metal layer on the second seed layer exposed by the second patterned photoresist layer; and removing the second patterned photoresist layer , exposing the second seed layer and forming the wafer pads. The method for manufacturing a circuit board structure according to claim 7, further comprising: laminating an adhesive layer and a composite substrate before laminating the reconfiguration circuit structure layer, the connection structure layer, and the build-up circuit structure layer On the reconfiguration wiring structure layer, the adhesive layer is located between the composite substrate and the chip pad of the reconfiguration wiring structure layer, and the composite substrate includes a core substrate and is located on opposite surfaces of the core substrate A first copper foil layer and a second copper foil layer, the second copper foil layer is located between the core substrate and the adhesive layer; and After laminating the adhesive layer and the composite substrate on the reconfiguration wiring structure layer, removing the temporary substrate and the release film, exposing the bottom surface of each of the first connection pads and the inner dielectric layer the first surface. The method for manufacturing a circuit board structure according to claim 8, further comprising: forming a protective layer on the build-up circuit after laminating the reconfiguration circuit structure layer, the connection structure layer and the build-up circuit structure layer On a surface of the structural layer relatively away from the connecting structural layer; performing a stripping process to remove the first copper foil layer and the core substrate of the composite substrate; performing a first etching process to remove the second copper foil layer to expose the adhesive layer; perform a stripping process to remove the protection layer to expose the surface of the build-up wiring structure layer that is relatively far away from the connection structure layer; perform a plasma etching process to remove the adhesive layer to expose the die pads; perform a second etching process to remove the second seed layer to expose the second surface of the external dielectric layer; and form a surface treatment layer on the heavy On the chip pads on which the circuit structure layer is arranged, the material of the surface treatment layer includes nickel-palladium immersion gold, organic solder flux or electroless nickel immersion gold. The method for manufacturing a circuit board structure as described in claim 6, further comprising: forming a solder resist layer on the build-up layer before laminating the reconfiguration circuit structure layer, the connection structure layer and the build-up circuit structure layer On a surface of the circuit structure layer relatively away from the connection structure layer, the solder resist layer covers part of the build-up circuit structure layer to define a plurality of solder ball pads.

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