TWI796226B - Electrical testing equipment and electrical testing method thereof - Google Patents

Abstract

An electrical testing equipment includes a main body, a first flexible plate, a second flexible plate, a plurality of pressure sensing elements and a plurality of metallic contact pads. The first flexible plate includes a first surface and a second surface opposite to the first surface. The second flexible plate includes a third surface and a fourth surface opposite to the third surface. The fourth surface is connected with the main body. The pressure sensing elements are respectively connected between the second surface and the third surface. The metallic contact pads are disposed on the first surface and are at least partially overlapped with the pressure sensing elements. Each of the metallic contact pads is configured to abut against a device under test.

Description

Electrical testing equipment and electrical testing method thereof

The invention relates to an electrical testing device and a corresponding electrical testing method.

With the advancement of today's technology, different electronic products have become an indispensable part of people's life, thus creating a huge consumer market.

In order to win the favor of consumers, manufacturers of electronic products not only invest resources in research and development and improve product performance and performance, but how to strengthen quality control is undoubtedly an important part that manufacturers cannot ignore.

One of the objectives of the present invention is to provide an electrical testing device, which can improve the reliability of electrical testing results.

According to an embodiment of the present invention, an electrical testing device includes a main body, a first flexible substrate, a second flexible substrate, a plurality of pressure sensing elements, and a plurality of metal contact pads. The first flexible substrate includes opposite first surfaces and second surfaces. The second flexible substrate includes a third surface and a fourth surface opposite to each other, and the fourth surface is connected to the main body. The pressure sensing elements are respectively connected between the second surface and the third surface. The metal contact pad is arranged on the first surface and at least partially overlaps with the pressure sensing element, and the metal contact pad is configured to abut against the object to be tested.

In one or more embodiments of the present invention, the above-mentioned electrical testing equipment further includes a supporting portion and a flexible supporting element. The supporting part is connected to the main body. The soft support element is connected between the fourth surface and the supporting part, the soft support element is aligned with the pressure sensing element, and separated from the main body.

In one or more embodiments of the present invention, the pressure sensing element mentioned above is a resistive pressure sensing element.

In one or more embodiments of the present invention, the pressure sensing element mentioned above is a capacitive pressure sensing element.

In one or more embodiments of the present invention, the above-mentioned electrical testing device further includes an adhesive material. The adhesive material is connected between the second surface and the third surface and at least partially surrounds the pressure sensing element.

In one or more embodiments of the present invention, the above electrical testing equipment further includes a plurality of first circuits and a plurality of second circuits. The first circuit is arranged on the second surface, and is electrically connected to the corresponding pressure sensing element respectively. The second circuit is arranged on the third surface, and is electrically connected to the corresponding pressure sensing element respectively.

In one or more embodiments of the present invention, the above-mentioned electrical testing equipment further includes a first protection layer and a second protection layer. The first circuit is at least partially located between the first protection layer and the second surface. The second circuit is at least partially located between the second protection layer and the third surface.

In one or more embodiments of the present invention, the above-mentioned second lines are connected to each other.

In one or more embodiments of the present invention, the above-mentioned electrical testing equipment further includes a plurality of third lines and a third protection layer. The third circuit is disposed on the first surface and electrically connected to the corresponding metal contact pads respectively. The third line is at least partially located between the third protection layer and the first surface.

In one or more embodiments of the present invention, the above-mentioned pressure sensing element includes a first sub-pressure sensing element and a second sub-pressure sensing element. The first sub-pressure sensing element is connected to the second surface. The second sub-pressure sensing element is connected to the third surface and aligned with the first sub-pressure sensing element, and a gap is defined between the first sub-pressure sensing element and the second sub-pressure sensing element.

In one or more embodiments of the present invention, the above electrical testing equipment further includes a plurality of first circuits and a plurality of second circuits. The first circuit is arranged on the second surface, and is electrically connected to the corresponding pressure sensing element respectively. The second circuit is arranged on the second surface and is electrically connected to the corresponding pressure sensing element, and the second circuit is separated from the first circuit.

In one or more embodiments of the present invention, the above-mentioned electrical testing equipment further includes a first protective layer. The first circuit and the second circuit are at least partially located between the first protection layer and the second surface.

In one or more embodiments of the present invention, the above-mentioned second lines are connected to each other.

In one or more embodiments of the present invention, the above electrical testing device further includes a conductive layer. The conductive layer is disposed between the third surface and the pressure sensing element.

According to an embodiment of the present invention, an electrical testing device includes a main body, a supporting portion, a flexible substrate, a plurality of sensing metal pads, a flexible supporting element, and a plurality of metal contact pads. The supporting part is connected to the main body. The flexible substrate includes opposite first surfaces and second surfaces, and the second surfaces are connected to the main body. The sensing metal pad is connected to the second surface and separated from the main body. The soft support element is connected between the induction metal pad and the support part, and the soft support element is separated from the main body. The metal contact pad is arranged on the first surface and at least partially overlaps with the sensing metal pad, and the metal contact pad is configured to abut against the object to be tested.

In one or more embodiments of the present invention, the above electrical testing equipment further includes a plurality of first circuits. The first circuit is disposed on the second surface and electrically connected to the corresponding sensing metal pads respectively.

In one or more embodiments of the present invention, the above-mentioned electrical testing equipment further includes a plurality of second circuits and a protective layer. The second circuit is disposed on the first surface and electrically connected to the corresponding metal contact pads respectively. The second circuit is at least partially located between the protection layer and the first surface.

One of the objectives of the present invention is to provide an electrical testing method, which can improve the reliability of electrical testing results.

According to an embodiment of the present invention, an electrical testing method includes: contacting the object under test with a plurality of metal contact pads along the working direction; and respectively sensing the reaction force borne by the metal contact pads along the working direction when contacting the object under test .

In one or more embodiments of the present invention, the step of sensing the reaction force further includes: using a resistive pressure sensing element to obtain the reaction force through resistance changes.

In one or more embodiments of the present invention, the above-mentioned step of sensing the reaction force further includes: using a capacitive pressure sensing element to obtain the reaction force through capacitance changes.

The above-mentioned embodiment of the present invention has at least the following advantages: since the pressure sensing element can respectively sense the magnitude of the reaction force that the corresponding metal contact pad bears when abutting against different conductive parts on the object to be tested, therefore, according to the pressure sensing element The magnitude of the sensed reaction force allows the user to simply and easily know whether the individual metal contact pads and the object under test are in a good contact state during the electrical test, so as to improve the reliability of the electrical test results.

Several embodiments of the present invention will be disclosed in the following figures. For the sake of clarity, many practical details will be described together in the following description. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some commonly used structures and elements will be shown in a simple schematic way in the drawings, and in all the drawings, the same reference numerals will be used to represent the same or similar elements . And if possible in practice, the features of different embodiments can be used interchangeably.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have their ordinary meanings that can be understood by those skilled in the art. Furthermore, the definitions of the above-mentioned words in the commonly used dictionaries should be interpreted in the content of this specification as meanings consistent with the relevant fields of the present invention. Unless specifically defined, these terms are not to be interpreted in an idealized or overly formal sense.

Please refer to Figures 1 and 2. FIG. 1 is a side cross-sectional view illustrating an electrical testing device 100 according to an embodiment of the present invention. Figure 2 is a cross-sectional view along line A-A in Figure 1. In this embodiment, as shown in FIGS. 1-2 , the electrical testing device 100 includes a main body 110 , a first flexible substrate 120 , a second flexible substrate 130 , a plurality of pressure sensing elements 140 and a plurality of metal contact pads 150 . The first flexible substrate 120 includes a first surface 121 and a second surface 122 opposite to each other. The second flexible substrate 130 includes a third surface 131 and a fourth surface 132 opposite to each other, and the fourth surface 132 is connected to the main body 110 . The pressure sensing elements 140 are respectively connected between the second surface 122 of the first flexible substrate 120 and the third surface 131 of the second flexible substrate 130 . The metal contact pad 150 is disposed on the first surface 121 of the first flexible substrate 120 , and the metal contact pad 150 overlaps with the pressure sensing element 140 . Furthermore, the metal contact pad 150 is configured to abut against the object under test 200 . For example, as shown in FIG. 2 , the numbers of the metal contact pads 150 and the pressure sensing elements 140 are the same, but the invention is not limited thereto. According to the actual situation, in other embodiments, the numbers of the metal contact pads 150 and the pressure sensing elements 140 are not necessarily the same. Specifically, the metal contact pads 150 respectively abut against different conductive portions 210 on the object under test 200 . For example, the object under test 200 can be a light-emitting diode (light-emitting diode; LED) display, but the invention is not limited thereto.

In practical applications, when operating the electrical testing equipment 100, the user moves the electrical testing equipment 100 toward the object under test 200 along the working direction DO, and makes the metal contact pads 150 contact the object under test 200 along the working direction DO. Different conductive parts 210 are connected to conduct an electrical test on the object under test 200 . When the metal contact pads 150 abut against different conductive parts 210 on the object under test 200 along the working direction DO, the metal contact pads 150 respectively exert some force on the object under test 200 by pressing against the object under test 200, and at the same time, the The object 200 generates a reaction force opposite to the action force but with the same strength on the individual metal contact pads 150 . Since the respective positions of the metal contact pads 150 are aligned with the corresponding pressure sensing elements 140, the reaction force in the contact area can cause the corresponding pressure sensing elements 140 to be pressed, and the pressure sensing elements 140 can be obtained according to the degree of pressure. The size of the reaction force. In other words, the pressure sensing element 140 can respectively sense the magnitude of the reaction force that the corresponding metal contact pad 150 bears when contacting the conductive portion 210 in different regions of the object under test 200 . In this way, according to the magnitude of the reaction force sensed by the pressure sensing element 140, the user can simply and easily know whether the individual metal contact pad 150 and the object under test 200 are in a good contact state during the electrical test. To improve the reliability of electrical test results.

Furthermore, as shown in FIGS. 1-2 , the electrical testing device 100 further includes a supporting portion 160 and a flexible supporting element 165 . The supporting portion 160 is connected to the main body 110 , and the flexible supporting element 165 is connected between the fourth surface 132 of the second flexible substrate 130 and the supporting portion 160 , and the flexible supporting element 165 is aligned with the pressure sensing element 140 and separated from the main body 110 . In this way, when the metal contact pad 150 bears the reaction force, the reaction force will be transmitted to the first flexible substrate 120, the pressure sensing element 140 and the second flexible substrate 130 in sequence, and the supporting part 160 and the flexible supporting element 165 can support The second flexible substrate 130 provides support so that the pressure sensing element 140 can accurately sense the magnitude of the reaction force by being pressed. Since the flexible supporting element 165 is located between the second flexible substrate 130 and the supporting part 160 , the second flexible substrate 130 can reduce the chance of being scratched when the second flexible substrate 130 presses against the flexible supporting element 165 and is supported by the flexible supporting element 165 .

In practical application, the pressure sensing element 140 can be a resistive pressure sensing element, which can obtain the reaction force through the change of resistance when it is pressed. Please refer to Figure 3. Fig. 3 is a cross-sectional view along line B-B in Fig. 1 . In this embodiment, as shown in FIGS. 1-3 , when the pressure sensing element 140 is a resistive pressure sensing element, the electrical testing device 100 further includes an adhesive material 170 . The adhesive material 170 is connected between the second surface 122 of the first flexible substrate 120 and the third surface 131 of the second flexible substrate 130 , and at least partially surrounds the pressure sensing element 140 .

Moreover, as shown in FIGS. 1 to 3 , the electrical testing device 100 further includes a plurality of first circuits 181 . The first circuit 181 is disposed on the second surface 122 of the first flexible substrate 120 and electrically connected to the corresponding pressure sensing element 140 respectively.

Please refer to Figure 4. Figure 4 is a cross-sectional view along the line segment C-C in Figure 1. In this embodiment, as shown in FIGS. 1 to 2 and 4 , the electrical testing device 100 further includes a plurality of second circuits 182 . The second circuit 182 is disposed on the third surface 131 of the second flexible substrate 130 and is electrically connected to the corresponding pressure sensing element 140 respectively.

By electrically connecting the corresponding pressure sensing element 140 with the first line 181 and the second line 182 , the resistance change of the pressure sensing element 140 can be transmitted to the processor through the first line 181 and the second line 182 (not shown in the figure), and the processor can then calculate the magnitude of the reaction force that the pressure sensing element 140 bears when it is pressed according to the signals transmitted through the first line 181 and the second line 182 . In other words, according to the magnitude of the reaction force sensed by the pressure sensing element 140, the processor can determine whether the individual metal contact pads 150 and the object under test 200 are in a good contact state during the electrical test, so as to improve Reliability of electrical test results.

Moreover, as shown in FIGS. 1 and 3 , the electrical testing device 100 further includes a first protective layer 186 , and the first circuit 181 is at least partially located between the first protective layer 186 and the second surface 122 of the first flexible substrate 120 between. In this way, the first protection layer 186 can protect and insulate the first circuit 181 to prevent the first circuit 181 from being scratched, damaged and short-circuited.

Similarly, as shown in FIGS. 1 and 4 , the electrical testing device 100 further includes a second protective layer 187 , and the second circuit 182 is at least partially located between the second protective layer 187 and the third surface 131 of the second flexible substrate 130 between. In this way, the second protection layer 187 can protect and insulate the second circuit 182 to prevent the second circuit 182 from being scratched, damaged and short-circuited.

Moreover, as shown in FIGS. 1-2 , the electrical testing device 100 further includes a plurality of third circuits 183 and a third protection layer 188 (please refer to FIG. 1 for the third protection layer 188 ). The third circuit 183 is disposed on the first surface 121 of the first flexible substrate 120, and is electrically connected to the corresponding metal contact pads 150, so that the metal contact pads 150 conduct electrical tests on the object under test 200 and obtain electrical test results. . The third circuit 183 is at least partially located between the third protective layer 188 and the first surface 121 of the first flexible substrate 120, so the third protective layer 188 can provide protection and insulation for the third circuit 183, preventing the third circuit 183 from being scratched. damaged and shorted.

Please refer to Figure 5. FIG. 5 is a cross-sectional view illustrating an electrical testing device 100 according to another embodiment of the present invention, wherein the second lines 182 are connected to each other. In this embodiment, as shown in FIG. 5 , the second circuits 182 disposed on the third surface 131 of the second flexible substrate 130 are connected to each other, so the number of the second circuits 182 can be reduced.

Please refer to Figure 6. FIG. 6 is a partially enlarged side view of an electrical testing device 100 according to yet another embodiment of the present invention, wherein the pressure sensing element 140 includes a first sub-pressure sensing element 141 and a second sub-pressure sensing element 142 . In this embodiment, as shown in FIG. 6 , the pressure sensing element 140 includes a first sub-pressure sensing element 141 and a second sub-pressure sensing element 142 . The first sub-pressure sensing element 141 is connected to the second surface 122 of the first flexible substrate 120, and the second sub-pressure sensing element 142 is connected to the third surface 131 of the second flexible substrate 130, and aligned with the first sub-pressure sensing element. 141 , and a gap G is defined between the first sub-pressure sensing element 141 and the second sub-pressure sensing element 142 . When the metal contact pad 150 bears the reaction force from the object under test 200, the first sub-pressure sensing element 141 is pushed by the metal contact pad 150 and the first flexible substrate 120 to move toward the second sub-pressure sensing element 142 until the first sub-pressure sensing element 141 touches the second sub-pressure sensing element 142 so that the gap G disappears. At this time, the first sub-pressure sensing element 141 and the second sub-pressure sensing element 142 are electrically connected to each other.

Please refer to Figures 7-8. FIG. 7 is a partially enlarged side view of an electrical testing device 100 according to another embodiment of the present invention, wherein the first circuit 181 and the second circuit 182 are both disposed on the second surface 122 . Fig. 8 is a cross-sectional view along line D-D in Fig. 7 . In this embodiment, as shown in Figures 7-8, the first circuit 181 is disposed on the second surface 122 of the first flexible substrate 120, and is electrically connected to the corresponding pressure sensing element 140, while the second circuit 182 It is also arranged on the second surface 122 of the first flexible substrate 120, and is electrically connected to the corresponding pressure sensing element 140. The second circuit 182 and the first circuit 181 are separated from each other, that is, the second circuit 182 and the first circuit 181 Not in direct contact.

Moreover, as shown in FIGS. 7-8 , the electrical testing device 100 further includes a first protection layer 186 . The first circuit 181 and the second circuit 182 are at least partially located between the first protection layer 186 and the second surface 122 . In this way, the first protective layer 186 can protect and insulate the first circuit 181 and the second circuit 182 , preventing the first circuit 181 and the second circuit 182 from being scratched, damaged and short-circuited.

Please refer to Figure 9. FIG. 9 is a cross-sectional view illustrating an electrical testing device 100 according to another embodiment of the present invention, wherein the first circuit 181 and the second circuit 182 are both disposed on the second surface 122, and the second circuits 182 are connected to each other. In this embodiment, as shown in FIG. 9 , the second circuits 182 disposed on the second surface 122 of the first flexible substrate 120 are connected to each other, so the number of the second circuits 182 can be reduced.

Please refer to Figure 10. FIG. 10 is a partially enlarged side view of an electrical testing device 100 according to yet another embodiment of the present invention, wherein the electrical testing device 100 further includes a conductive layer 190 . In this embodiment, as shown in FIG. 10, when the first circuit 181 and the second circuit 182 are both disposed on the second surface 122 of the first flexible substrate 120, the electrical testing device 100 further includes a conductive layer 190, and The conductive layer 190 is disposed between the third surface 131 of the second flexible substrate 130 and the pressure sensing element 140 .

In practical application, the pressure sensing element 140 can also be a capacitive pressure sensing element, which obtains the reaction force through the capacitance change when it is pressed. Please refer to Figure 11. FIG. 11 is a partially enlarged side view of an electrical testing device 100 according to yet another embodiment of the present invention, wherein the pressure sensing element 140 is a capacitive pressure sensing element. In this embodiment, as shown in FIG. 11 , when the pressure sensing element 140 is a capacitive pressure sensing element, the electrical testing device 100 does not include the above-mentioned adhesive material 170 .

Please refer to Figures 12-13. FIG. 12 is a side view illustrating an electrical testing device 100 according to another embodiment of the present invention. Figure 13 is a cross-sectional view along line E-E in Figure 12. In this embodiment, as shown in Figures 12-13, the electrical testing device 100 includes a main body 110, a support portion 160, a first flexible substrate 120, a plurality of sensing metal pads 143, a flexible supporting element 165 and a plurality of metal contacts Pad 150. The supporting part 160 is connected to the main body 110 . The first flexible substrate 120 includes a first surface 121 and a second surface 122 opposite to each other, and the second surface 122 is connected to the main body 110 . The sensing metal pad 143 is connected to the second surface 122 of the first flexible substrate 120 and separated from the main body 110 . The soft support element 165 is connected between the sensing metal pad 143 and the support portion 160 , and the soft support element 165 is separated from the main body 110 . The metal contact pad 150 is disposed on the first surface 121 of the first flexible substrate 120 and at least partially overlaps with the sensing metal pad 143 . For example, as shown in FIG. 13 , the numbers of the metal contact pads 150 and the sensing metal pads 143 are the same, but the invention is not limited thereto. According to the actual situation, in other embodiments, the numbers of the metal contact pads 150 and the sensing metal pads 143 are not necessarily the same. Furthermore, the metal contact pad 150 is configured to abut against the object under test 200 . Specifically, the metal contact pads 150 respectively abut against different conductive portions 210 on the object under test 200 .

Furthermore, as shown in FIGS. 12-13 , the electrical testing device 100 further includes a plurality of first circuits 181 . The first circuit 181 is disposed on the second surface 122 of the first flexible substrate 120 and is respectively connected to the corresponding sensing metal pads 143 . Specifically, the supporting part 160 is made of conductive metal material and grounded, and the soft supporting element 165 is made of a soft material with a proper dielectric coefficient. When the flexible supporting element 165 is compressed, the sensing metal pad 143 detects the change in capacitance between the supporting portion 160 , so the sensing metal pad 143 is actually a capacitive pressure sensing element.

Furthermore, as shown in FIG. 12 , the electrical testing device 100 further includes a plurality of third lines 183 and a first protection layer 186 . The third circuit 183 is disposed on the first surface 121 of the first flexible substrate 120 and electrically connected to the corresponding metal contact pads 150 respectively. The third circuit 183 is at least partially located between the first protection layer 186 and the first surface 121 of the first flexible substrate 120 . In this way, the first protection layer 186 can protect and insulate the third circuit 183 to prevent the third circuit 183 from being scratched, damaged and short-circuited.

To sum up, the technical solutions disclosed in the above-mentioned embodiments of the present invention have at least the following advantages: since the pressure sensing element can respectively sense the reaction force that the corresponding metal contact pad bears when abutting against different conductive parts on the object under test Therefore, according to the magnitude of the reaction force sensed by the pressure sensing element, the user can simply and easily know whether the individual metal contact pad and the object under test are in a good contact state during the electrical test, so as to improve Reliability of electrical test results.

Although the present invention has been disclosed above in terms of implementation, it is not intended to limit the present invention. Anyone skilled in this art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be defined by the appended patent application scope.

100: Electrical testing equipment 110: subject 120: The first flexible substrate 121: first surface 122: second surface 130: Second flexible substrate 131: third surface 132: The fourth surface 140: pressure sensing element 141: the first sub-pressure sensing element 142: the second sub-pressure sensing element 143: induction metal pad 150: metal contact pad 160: support part 165: soft support element 170: Adhesive material 181: The first line 182: second line 183: The third line 186: The first protective layer 187: Second protective layer 188: The third protective layer 190: conductive layer 200: The object to be tested 210: conductive part A-A, B-B, C-C, D-D, E-E: line segment DO: direction of work G: Gap

FIG. 1 is a side sectional view illustrating an electrical testing device according to an embodiment of the present invention. Figure 2 is a cross-sectional view along line A-A in Figure 1. Fig. 3 is a cross-sectional view along line B-B in Fig. 1 . Figure 4 is a cross-sectional view along the line segment C-C in Figure 1. FIG. 5 is a cross-sectional view illustrating an electrical testing device according to another embodiment of the present invention, wherein the second lines are connected to each other. FIG. 6 is a partially enlarged side view of an electrical testing device according to yet another embodiment of the present invention, wherein the pressure sensing element includes a first sub-pressure sensing element and a second sub-pressure sensing element. FIG. 7 is a partial enlarged side view of an electrical testing device according to another embodiment of the present invention, wherein both the first circuit and the second circuit are disposed on the second surface. Fig. 8 is a cross-sectional view along line D-D in Fig. 7 . FIG. 9 is a cross-sectional view illustrating an electrical testing device according to another embodiment of the present invention, wherein both the first circuit and the second circuit are disposed on the second surface, and the second circuits are connected to each other. FIG. 10 is a partial enlarged side view of an electrical testing device according to yet another embodiment of the present invention, wherein the electrical testing device further includes a conductive layer. FIG. 11 is a partial enlarged side view of an electrical testing device according to another embodiment of the present invention, wherein the pressure sensing element is a capacitive pressure sensing element. Fig. 12 is a side view showing an electrical testing device according to another embodiment of the present invention. Figure 13 is a cross-sectional view along line E-E in Figure 12.

Domestic deposit information (please note in order of depositor, date, and number) none Overseas storage information (please note in order of storage country, institution, date, and number) none

100: Electrical testing equipment

110: subject

120: The first flexible substrate

121: first surface

122: second surface

130: Second flexible substrate

131: third surface

132: The fourth surface

140: pressure sensing element

150: metal contact pad

160: support part

165: soft support element

170: Adhesive material

181: The first line

182: second line

183: The third line

186: The first protective layer

187: Second protective layer

188: The third protective layer

200: The object to be tested

210: conductive part

A-A,B-B,C-C: line segment

DO: direction of work

Claims (18)

An electrical testing device, comprising: a main body; a first flexible substrate including a first opposite surface and a second surface; a second flexible substrate including a third opposite surface and a fourth surface, the The fourth surface is connected to the main body; a plurality of pressure sensing elements are respectively connected between the second surface and the third surface; a plurality of metal contact pads are arranged on the first surface and at least connected to the pressure sensing elements Partial positions are overlapped, and each of the metal contact pads is configured to abut an object under test; a plurality of first circuits are arranged on the first surface, and are respectively electrically connected to the corresponding metal contact pads; and a first protection layer, the first lines are at least partially located between the first protection layer and the first surface. The electrical testing device as described in claim 1, further comprising: a supporting part connected to the main body; and a flexible supporting element connected between the fourth surface and the supporting part, and the flexible supporting element is aligned with the pressures The sensing element is separated from the main body. The electrical test equipment as described in claim 1, wherein each The pressure sensing elements are resistive pressure sensing elements. The electrical testing device as claimed in claim 1, wherein each of the pressure sensing elements is a capacitive pressure sensing element. The electrical testing device as claimed in claim 1, further comprising: an adhesive material connected between the second surface and the third surface and at least partially surrounding the pressure sensing element. The electrical testing device as described in claim 1, further comprising: a plurality of second circuits arranged on the second surface and electrically connected to the corresponding pressure sensing elements; and a plurality of third circuits arranged on the second surface The third surface is electrically connected to the corresponding pressure sensing element. The electrical testing device as claimed in claim 6, further comprising: a second protective layer, the second circuits are at least partially located between the second protective layer and the second surface; and a third protective layer, the The third lines are at least partially located between the third protection layer and the third surface. The electrical testing device as claimed in claim 6, wherein the third lines are connected to each other. The electrical testing device as described in claim 1, wherein each of the pressure sensing elements includes: a first sub-pressure sensing element connected to the second surface; and a second sub-pressure sensing element connected to the The third surface is aligned with the first sub-pressure-sensing element, and a gap is defined between the first sub-pressure-sensing element and the second sub-pressure-sensing element. The electrical testing device as described in claim 1, further comprising: a plurality of second circuits arranged on the second surface and electrically connected to the corresponding pressure sensing elements; and a plurality of third circuits arranged on the second surface The second surface is electrically connected to the corresponding pressure sensing element, and the third lines and the second lines are separated from each other. The electrical testing device as claimed in claim 10 further comprises: a second protection layer, the second lines and the third lines are at least partially located between the second protection layer and the second surface. The electrical testing device as claimed in claim 10, wherein the third lines are connected to each other. The electrical testing device as claimed in claim 10 further includes: a conductive layer disposed between the third surface and the pressure sensing elements. An electrical testing device, comprising: a main body; a support portion connected to the main body; a flexible substrate including a first surface opposite to a second surface, the second surface connected to the main body; a plurality of sensing metal pads, connected to the second surface and separated from the main body; a flexible supporting element connected between the sensing metal pads and the supporting part, the flexible supporting element separated from the main body; a plurality of metal contact pads set On the first surface and at least partially overlapping with the sensing metal pads, each of the metal contact pads is configured to contact an object under test; a plurality of first circuits are arranged on the first surface, and are electrically connected to each other. connecting the corresponding metal contact pad; and a protection layer, the first lines are at least partially located between the protection layer and the first surface. The electrical testing device as described in claim 14 further includes: a plurality of second circuits disposed on the second surface and electrically connected to the corresponding sensing metal pads respectively. An electrical testing method, comprising: using a plurality of metal contact pads of an electrical testing device to resist along a working direction connected to an object to be tested, wherein the electrical testing equipment includes: a flexible substrate; the metal contact pads are arranged on the flexible substrate; a plurality of circuits are arranged on the flexible substrate, and these circuits are respectively electrically connected to the corresponding metal contact pads; and a protection layer, the circuits are at least partially located between the protection layer and the flexible substrate; One reaction force. The method as claimed in claim 16, wherein the step of sensing each of the reaction forces further comprises: using a resistive pressure sensing element to obtain the reaction force through a resistance change. The method as claimed in claim 16, wherein the step of sensing each of the reaction forces further comprises: using a capacitive pressure sensing element to obtain the reaction force through a capacitance change.

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