TWI792524B - Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure - Google Patents

Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure Download PDF

Info

Publication number
TWI792524B
TWI792524B TW110131765A TW110131765A TWI792524B TW I792524 B TWI792524 B TW I792524B TW 110131765 A TW110131765 A TW 110131765A TW 110131765 A TW110131765 A TW 110131765A TW I792524 B TWI792524 B TW I792524B
Authority
TW
Taiwan
Prior art keywords
pressure
heat
heat dissipation
liquid
dissipating substrate
Prior art date
Application number
TW110131765A
Other languages
Chinese (zh)
Other versions
TW202309468A (en
Inventor
彭晟書
林彥錞
Original Assignee
艾姆勒科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 艾姆勒科技股份有限公司 filed Critical 艾姆勒科技股份有限公司
Priority to TW110131765A priority Critical patent/TWI792524B/en
Application granted granted Critical
Publication of TWI792524B publication Critical patent/TWI792524B/en
Publication of TW202309468A publication Critical patent/TW202309468A/en

Links

Images

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)

Abstract

A liquid-cooled heat-dissipation substrate structure with a partial reinforcement structure includes a heat-dissipation substrate which is integrally formed with a main structure and a reinforcement structure. The main structure and the reinforcement structure are formed by different processes. The metallographic structure of the main structure is different from the metallographic structure of the reinforcement structure. The crystal grains of the metallographic structure of the main structure are arranged in all directions, and the crystal grains of the metallographic structure of the reinforcement structure are arranged in stacks perpendicular to the direction of the pressure applied to the heat-dissipation substrate.

Description

一種局部施壓補強之液冷散熱基材結構A liquid-cooled and heat-dissipating substrate structure with partial pressure reinforcement

本發明涉及一種散熱基材結構,具體來說是涉及一種局部施壓補強之液冷散熱基材結構。The invention relates to a heat dissipation base material structure, in particular to a liquid-cooled heat dissipation base material structure reinforced by partial pressure application.

基於高功率發熱元件的散熱需求,目前現有的高功率發熱元件的散熱器主體多使用銅金屬,但無論是通過金屬擴散接合或金屬燒結所形成,材料強度降低無可避免,因而導致產品使用壽命大幅降低。Based on the heat dissipation requirements of high-power heating elements, the heat sink body of existing high-power heating elements mostly uses copper metal, but whether it is formed by metal diffusion bonding or metal sintering, the reduction of material strength is inevitable, which leads to the service life of the product significantly reduce.

有鑑於此,本發明人本於多年從事相關產品之開發與設計,有感上述缺失之可改善,乃特潛心研究並配合學理之運用,終於提出一種設計合理且有效改善上述缺失之本發明。In view of this, the inventor has been engaged in the development and design of related products for many years, and felt that the above-mentioned defects can be improved, so he devoted himself to research and combined with the application of theories, and finally proposed an invention with a reasonable design and effective improvement of the above-mentioned defects.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種局部施壓補強之液冷散熱基材結構。The technical problem to be solved by the present invention is to provide a liquid-cooled and heat-dissipating base material structure with local pressure and reinforcement for the deficiencies of the prior art.

為了解決上述的技術問題,本發明提供一種局部施壓補強之液冷散熱基材結構,包括:一散熱基底,其一體地形成有一散熱主結構及一施壓補強結構,且所述散熱主結構與所述施壓補強結構以不同工藝所形成,並且所述散熱主結構的金相組織與所述施壓補強結構的金相組織不同;其中,所述散熱主結構的金相組織的晶粒無排列方向,而所述施壓補強結構的金相組織的晶粒具有與施壓方向垂直的層疊排列方向。In order to solve the above-mentioned technical problems, the present invention provides a liquid-cooled and heat-dissipating substrate structure with partial pressure reinforcement, including: a heat dissipation base, which is integrally formed with a heat dissipation main structure and a pressure reinforcement structure, and the heat dissipation main structure Formed in a different process from the pressure reinforcing structure, and the metallographic structure of the heat dissipation main structure is different from the metallographic structure of the pressure reinforcing structure; wherein, the grains of the metallographic structure of the heat dissipation main structure There is no arrangement direction, but the grains of the metallographic structure of the pressure reinforcing structure have a lamination arrangement direction perpendicular to the direction of pressure.

在一優選實施例中,所述散熱基底是先通過金屬擴散接合工藝形成為一體式結構,然後通過施加壓力之工藝在所述散熱基底的局部區域進行施壓補強以形成所述施壓補強結構。In a preferred embodiment, the heat dissipation base is firstly formed into an integrated structure through a metal diffusion bonding process, and then pressure is applied to a local area of the heat dissipation base through a process of applying pressure to form the pressure reinforcement structure .

在一優選實施例中,所述施壓補強結構是通過沖壓、鍛造、鍛壓工藝的至少其一而形成在所述散熱基底上的結構。In a preferred embodiment, the pressure reinforcing structure is a structure formed on the heat dissipation base by at least one of stamping, forging and forging processes.

在一優選實施例中,所述散熱基底是先通過金屬粉末燒結工藝形成為一體式結構,然後通過施加壓力之工藝在所述散熱基底的局部區域進行施壓補強以形成所述施壓補強結構。In a preferred embodiment, the heat dissipation base is firstly formed into an integrated structure through a metal powder sintering process, and then pressure is applied to a local area of the heat dissipation base through a process of applying pressure to form the pressure reinforcement structure .

在一優選實施例中,所述散熱基底是由銅、銅合金的其中之一所形成。In a preferred embodiment, the heat dissipation base is formed of one of copper and copper alloy.

在一優選實施例中,所述散熱基底的表面上更一體形成有一鰭片結構,且所述施壓補強結構的多個補強部與所述鰭片結構的多個鰭片是呈交錯式平行排列。In a preferred embodiment, a fin structure is further integrally formed on the surface of the heat dissipation base, and the multiple reinforcing parts of the pressure reinforcing structure and the multiple fins of the fin structure are staggered and parallel. arrangement.

在一優選實施例中,所述散熱基底的表面上更一體形成有一鰭片結構,且所述施壓補強結構的多個補強部是平行交錯於所述鰭片結構的多個排列呈多排的針柱式鰭片。In a preferred embodiment, a fin structure is integrally formed on the surface of the heat dissipating base, and a plurality of reinforcing parts of the pressure reinforcing structure are arranged parallel to and interlaced with the fin structure to form multiple rows pin post fins.

在一優選實施例中,所述散熱基底的表面上更一體形成有一鰭片結構,且所述施壓補強結構的多個補強部是依垂直與平行兩種方式交錯排列於所述鰭片結構的多個針柱式鰭片之間。In a preferred embodiment, a fin structure is further integrally formed on the surface of the heat dissipation base, and a plurality of reinforcing parts of the pressure reinforcing structure are arranged vertically and parallelly on the fin structure in a staggered manner. Between multiple pin post fins.

在一優選實施例中,所述施壓補強結構是壓痕、壓陷、圖案化之壓痕及壓陷的至少其一。In a preferred embodiment, the pressure reinforcing structure is at least one of indentations, indentations, patterned indentations and indentations.

本發明的有益效果至少在於,本發明提供的局部施壓補強之液冷散熱基材結構,其可以通過「散熱基底一體地形成有一散熱主結構及一施壓補強結構」、「所述散熱主結構與所述施壓補強結構以不同工藝所形成」、「所述散熱主結構的金相組織與所述施壓補強結構的金相組織不同」、「所述散熱主結構的金相組織的晶粒無排列方向,而所述施壓補強結構的金相組織的晶粒具有與施壓方向垂直的層疊排列方向」的技術方案,從而得以有效提升散熱基材結構強度,以強化整體結構。The beneficial effect of the present invention lies at least in that the liquid-cooled and heat-dissipating substrate structure provided by the present invention can be integrally formed with a heat-dissipating base structure and a pressure-applying reinforcing structure through "the heat-dissipating base", "the main heat-dissipating structure The metallographic structure of the heat dissipation structure is different from that of the pressure reinforcement structure”, “the metallographic structure of the heat dissipation main structure is different from the metallographic structure of the pressure application reinforcement structure”, “the metallographic structure of the heat dissipation main structure is The crystal grains have no arrangement direction, and the grains of the metallographic structure of the pressure-applied reinforcement structure have a stacking arrangement direction perpendicular to the pressure-applied direction", so that the structural strength of the heat dissipation substrate can be effectively improved to strengthen the overall structure.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following are specific examples to illustrate the implementation methods disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[第一實施例][first embodiment]

請參閱圖1、2所示,其為本發明的其中一種實施例,本發明實施例提供一種局部施壓補強之液冷散熱基材結構,可用於接觸發熱元件。如圖1、2所示,根據本發明實施例所提供的局部施壓補強之液冷散熱基材結構,其可包括有一散熱基底10其係一體地形成有一散熱主結構11及一施壓補強結構12。Please refer to Figs. 1 and 2, which are one of the embodiments of the present invention. The embodiment of the present invention provides a liquid-cooled and heat-dissipating substrate structure with partial pressure reinforcement, which can be used to contact heating elements. As shown in Figures 1 and 2, the liquid-cooled and heat-dissipating substrate structure provided according to the embodiment of the present invention may include a heat-dissipating base 10 which is integrally formed with a main heat-dissipating structure 11 and a pressure-applying reinforcement structure12.

進一步說,本實施例的所述散熱基底10可以是先通過金屬擴散接合(Diffusion Bonding)工藝形成為一體式結構,然後通過施加壓力之工藝(如沖壓、鍛造或鍛壓工藝)在所述散熱基底10的局部區域進行施壓補強以形成所述施壓補強結構12,使得所述散熱基底10的所述散熱主結構11與所述施壓補強結構12是以不同工藝所形成。Furthermore, the heat dissipation base 10 of this embodiment can be formed into an integrated structure through a metal diffusion bonding (Diffusion Bonding) process, and then through a process of applying pressure (such as stamping, forging or forging process) on the heat dissipation base The local area of 10 is reinforced by pressure to form the pressure reinforcement structure 12 , so that the heat dissipation main structure 11 and the pressure reinforcement structure 12 of the heat dissipation base 10 are formed by different processes.

並且,所述散熱主結構11的金相組織與所述施壓補強結構12的金相組織不同。如圖2所示意的,所述散熱主結構11的金相組織的晶粒110無特定的排列方向,也可以說是呈無規則排列或是呈隨機排列,而所述施壓補強結構12的金相組織的晶粒120則具有與施壓方向F垂直的層疊排列方向,也就是使所述施壓補強結構12的金相組織的晶粒120具有垂直於施壓方向F的層疊狀排列,藉此可以有效提升散熱基材結構強度,以強化整體結構。In addition, the metallographic structure of the heat dissipation main structure 11 is different from the metallographic structure of the pressure reinforcing structure 12 . As shown in FIG. 2 , the grains 110 of the metallographic structure of the heat dissipation main structure 11 have no specific arrangement direction, and can also be said to be arranged randomly or randomly, while the pressure reinforcing structure 12 The grains 120 of the metallographic structure have a stacked arrangement direction perpendicular to the direction F of the pressure, that is, the grains 120 of the metallographic structure of the pressure reinforcing structure 12 have a stacked arrangement perpendicular to the direction F of the pressure, In this way, the structural strength of the heat dissipation base material can be effectively improved to strengthen the overall structure.

另外,本實施例的所述散熱基底10可以是先通過金屬粉末燒結工藝形成為一體式結構,並且可以是由銅、銅合金粉末加溫燒結所形成的一多孔銅散熱基底,然後通過施加壓力之工藝在所述散熱基底10的特定局部區域進行施壓補強以形成所述施壓補強結構12,使得所述散熱基底10的所述散熱主結構11與所述施壓補強結構12是以不同工藝所形成。並且,所述散熱基底10可以是浸沒於兩相冷卻液中且孔隙率大於5%的孔洞化液冷散熱片,以強化整體散熱效果。並且,所述施壓補強結構12可以是壓痕、壓陷、或是圖案化之壓痕或壓陷。In addition, the heat dissipation base 10 of this embodiment may be a one-piece structure firstly formed by a metal powder sintering process, and may be a porous copper heat dissipation base formed by heating and sintering copper or copper alloy powder, and then by applying The process of pressure applies pressure to a specific local area of the heat dissipation substrate 10 to form the pressure reinforcement structure 12, so that the heat dissipation main structure 11 and the pressure reinforcement structure 12 of the heat dissipation substrate 10 are formed by different processes. Moreover, the heat dissipation base 10 may be a porous liquid-cooled heat sink submerged in a two-phase cooling liquid with a porosity greater than 5%, so as to enhance the overall heat dissipation effect. Moreover, the pressure reinforcing structure 12 may be indentation, indentation, or patterned indentation or indentation.

[第二實施例][Second embodiment]

請參閱圖3所示,其為本發明的其中一種實施例。如圖3的俯視圖所示,根據本發明實施例所提供的局部施壓補強之液冷散熱基材結構,其可包括有一散熱基底10其係一體地形成有一散熱主結構11及一施壓補強結構12a。Please refer to FIG. 3 , which is one of the embodiments of the present invention. As shown in the top view of FIG. 3 , the liquid-cooled and heat-dissipating substrate structure provided according to the embodiment of the present invention may include a heat-dissipating base 10 which is integrally formed with a heat-dissipating main structure 11 and a pressure-applying reinforcement. Structure 12a.

進一步說,本實施例的所述散熱基底10的表面上更一體形成有一鰭片結構13a,且所述施壓補強結構12a的多個補強部121a與所述鰭片結構13a的多個板片狀鰭片131a是呈交錯式平行排列,藉此可以同時有效地強化散熱基材的散熱效果及結構強度。Furthermore, in this embodiment, a fin structure 13a is integrally formed on the surface of the heat dissipation base 10 , and the plurality of reinforcing portions 121a of the pressure reinforcing structure 12a and the plurality of plates of the fin structure 13a The fins 131a are arranged in a staggered manner, thereby effectively enhancing the heat dissipation effect and structural strength of the heat dissipation substrate.

[第三實施例][Third embodiment]

請參閱圖4所示,其為本發明的其中一種實施例。如圖4的俯視圖所示,根據本發明實施例所提供的局部施壓補強之液冷散熱基材結構,其可包括有一散熱基底10其係一體地形成有一散熱主結構11及一施壓補強結構12b。Please refer to FIG. 4 , which is one embodiment of the present invention. As shown in the top view of FIG. 4 , the liquid-cooled and heat-dissipating substrate structure provided according to the embodiment of the present invention may include a heat-dissipating base 10 which is integrally formed with a heat-dissipating main structure 11 and a pressure-applying reinforcement. Structure 12b.

進一步說,本實施例的所述散熱基底10的表面上更一體形成有一鰭片結構13b,且所述施壓補強結構12b的多個補強部121b是平行交錯於所述鰭片結構13b的多個排列呈多排的針柱式鰭片(pin-fins)131b,藉此可以同時有效地強化散熱基材的散熱效果及結構強度。Furthermore, in this embodiment, a fin structure 13b is integrally formed on the surface of the heat dissipation base 10, and the plurality of reinforcing parts 121b of the pressure reinforcing structure 12b are parallel to and interlaced with the plurality of fin structures 13b. The pin-fins 131b are arranged in multiple rows, thereby effectively enhancing the heat dissipation effect and the structural strength of the heat dissipation base material at the same time.

[第四實施例][Fourth embodiment]

請參閱圖5所示,其為本發明的其中一種實施例。如圖5的俯視圖所示,根據本發明實施例所提供的局部施壓補強之液冷散熱基材結構,其可包括有一散熱基底10其係一體地形成有一散熱主結構11及一施壓補強結構12c。Please refer to FIG. 5 , which is one of the embodiments of the present invention. As shown in the top view of FIG. 5 , the liquid-cooled and heat-dissipating substrate structure provided according to the embodiment of the present invention may include a heat-dissipating base 10 which is integrally formed with a heat-dissipating main structure 11 and a pressure-applying and reinforcing structure. Structure 12c.

進一步說,本實施例的所述散熱基底10的表面上更一體形成有一鰭片結構13c,且所述施壓補強結構12c的多個補強部121c是依垂直與平行兩種方式交錯排列於所述鰭片結構13c的多個針柱式鰭片131c之間,藉此可以同時有效地強化散熱基材的散熱效果及結構強度。Furthermore, in this embodiment, a fin structure 13c is integrally formed on the surface of the heat dissipation base 10, and the reinforcing parts 121c of the pressure reinforcing structure 12c are arranged vertically and parallelly on the surface of the reinforcing structure 12c. Between the plurality of pin post fins 131c of the fin structure 13c, the heat dissipation effect and the structural strength of the heat dissipation substrate can be effectively enhanced at the same time.

綜合以上所述,本發明實施例提供的局部施壓補強之液冷散熱基材結構,其可以通過「散熱基底一體地形成有一散熱主結構及一施壓補強結構」、「所述散熱主結構與所述施壓補強結構以不同工藝所形成」、「所述散熱主結構的金相組織與所述施壓補強結構的金相組織不同」、「所述散熱主結構的金相組織的晶粒無排列方向,而所述施壓補強結構的金相組織的晶粒具有與施壓方向垂直的層疊排列方向」的技術方案,從而得以有效提升散熱基材結構強度,以強化整體結構。Based on the above, the liquid-cooled and heat-dissipating substrate structure provided by the embodiment of the present invention can be formed through "the heat-dissipating base integrally forms a heat-dissipating main structure and a pressure-applying and reinforcing structure", "the main heat-dissipating structure Formed in a different process from the pressure reinforcing structure", "the metallographic structure of the main heat dissipation structure is different from the metallographic structure of the pressure reinforcing structure", "the crystallographic structure of the metallographic structure of the main heat dissipation structure The grains have no arrangement direction, and the grains of the metallographic structure of the pressure reinforcement structure have a stacking arrangement direction perpendicular to the direction of pressure", so that the structural strength of the heat dissipation substrate can be effectively improved to strengthen the overall structure.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The content disclosed above is only a preferred feasible embodiment of the present invention, and does not therefore limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

10:散熱基底 11:散熱主結構 110:晶粒 12:施壓補強結構 120:晶粒 12a:施壓補強結構 121a:補強部 13a:鰭片結構 131a:板片狀鰭片 12b:施壓補強結構 121b:補強部 13b:鰭片結構 131b:針柱式鰭片 12c:施壓補強結構 121c:補強部 13c:鰭片結構 131c:針柱式鰭片 F:施壓方向 10: heat dissipation base 11: Main heat dissipation structure 110: grain 12: Pressure reinforcement structure 120: grain 12a: Pressure reinforcement structure 121a: Reinforcement department 13a: Fin structure 131a: Slab fins 12b: Pressure reinforcement structure 121b: Reinforcing Department 13b: Fin structure 131b: pin column fins 12c: Pressure reinforcement structure 121c: Reinforcing Department 13c: Fin structure 131c: pin column fins F: Direction of pressure

圖1為本發明第一實施例局部施壓補強之液冷散熱基材結構的俯視示意圖。FIG. 1 is a schematic top view of the structure of a liquid-cooled and heat-dissipating base material reinforced by partial pressure in accordance with the first embodiment of the present invention.

圖2為圖1中的II-II線的剖視示意圖。FIG. 2 is a schematic cross-sectional view of line II-II in FIG. 1 .

圖3為本發明第二實施例局部施壓補強之液冷散熱基材結構的俯視示意圖。FIG. 3 is a top view schematic diagram of a liquid-cooled and heat-dissipating substrate structure reinforced by partial pressure in accordance with a second embodiment of the present invention.

圖4為本發明第三實施例局部施壓補強之液冷散熱基材結構的俯視示意圖。FIG. 4 is a top view schematic diagram of a liquid-cooled and heat-dissipating substrate structure reinforced by partial pressure in accordance with a third embodiment of the present invention.

圖5為本發明第四實施例局部施壓補強之液冷散熱基材結構的俯視示意圖。FIG. 5 is a schematic top view of a liquid-cooled and heat-dissipating substrate structure reinforced by partial pressure in accordance with a fourth embodiment of the present invention.

10:散熱基底 10: heat dissipation base

11:散熱主結構 11: Main heat dissipation structure

12:施壓補強結構 12: Pressure reinforcement structure

Claims (7)

一種局部施壓補強之液冷散熱基材結構,包括:一散熱基底,其一體地形成有一散熱主結構及一施壓補強結構,且所述散熱主結構與所述施壓補強結構以不同工藝所形成,並且所述散熱主結構的金相組織與所述施壓補強結構的金相組織不同;其中,所述散熱主結構的金相組織的晶粒無排列方向,而所述施壓補強結構的金相組織的晶粒具有與施壓方向垂直的層疊排列方向;其中,所述散熱基底的表面上更一體形成有一鰭片結構,且所述施壓補強結構的多個補強部與所述鰭片結構的多個鰭片是呈交錯式平行排列。 A liquid-cooled and heat-dissipating substrate structure with partial pressure reinforcement, comprising: a heat dissipation base, which is integrally formed with a heat dissipation main structure and a pressure reinforcement structure, and the heat dissipation main structure and the pressure reinforcement structure are made of different processes formed, and the metallographic structure of the heat dissipation main structure is different from the metallographic structure of the pressure reinforcing structure; wherein, the grains of the metallographic structure of the heat dissipation main structure have no arrangement direction, and the pressure reinforcing structure The crystal grains of the metallographic structure of the structure have a stacking direction perpendicular to the direction of pressure; wherein, a fin structure is integrally formed on the surface of the heat dissipation base, and the multiple reinforcing parts of the pressure reinforcement structure are connected to the A plurality of fins in the above fin structure are arranged in parallel in a staggered manner. 如請求項1所述的局部施壓補強之液冷散熱基材結構,其中,所述散熱基底是先通過金屬擴散接合工藝形成為一體式結構,然後通過施加壓力之工藝在所述散熱基底的局部區域進行施壓補強以形成所述施壓補強結構。 The liquid-cooled and heat-dissipating substrate structure reinforced by local pressure application as described in Claim 1, wherein the heat-dissipating substrate is firstly formed into an integrated structure through a metal diffusion bonding process, and then bonded to the heat-dissipating substrate through a process of applying pressure The local area is reinforced with pressure to form the pressure-reinforced structure. 如請求項2所述的局部施壓補強之液冷散熱基材結構,其中,所述施壓補強結構是通過沖壓、鍛造、鍛壓工藝的至少其一而形成在所述散熱基底上的結構。 The liquid-cooled and heat-dissipating substrate structure with partial pressure reinforcement according to Claim 2, wherein the pressure-reinforcing structure is formed on the heat dissipation substrate by at least one of stamping, forging, and forging processes. 如請求項1所述的局部施壓補強之液冷散熱基材結構,其中,所述散熱基底是先通過金屬粉末燒結工藝形成為一體式結構,然後通過施加壓力之工藝在所述散熱基底的局部區域進行施壓補強以形成所述施壓補強結構。 The liquid-cooled and heat-dissipating substrate structure reinforced by local pressure application as described in claim 1, wherein the heat-dissipating substrate is firstly formed into an integrated structure through a metal powder sintering process, and then applied pressure on the heat-dissipating substrate The local area is reinforced with pressure to form the pressure-reinforced structure. 如請求項4所述的局部施壓補強之液冷散熱基材結構,其中,所述施壓補強結構是通過沖壓、鍛造、鍛壓工藝的至少其一 而形成在所述散熱基底上的結構。 The liquid-cooled and heat-dissipating substrate structure for local pressure reinforcement according to claim 4, wherein the pressure reinforcement structure is at least one of stamping, forging, and forging processes And the structure formed on the heat dissipation base. 如請求項1所述的局部施壓補強之液冷散熱基材結構,其中,所述散熱基底是由銅、銅合金的其中之一所形成。 The liquid-cooled and heat-dissipating substrate structure reinforced by partial pressure as claimed in claim 1, wherein the heat-dissipating substrate is formed of one of copper and copper alloy. 如請求項1所述的局部施壓補強之液冷散熱基材結構,其中,所述施壓補強結構是壓痕、壓陷、圖案化之壓痕及壓陷的至少其一。 The liquid-cooled and heat-dissipating substrate structure for partial pressure reinforcement according to Claim 1, wherein the pressure reinforcement structure is at least one of indentations, indentations, patterned indentations, and indentations.
TW110131765A 2021-08-27 2021-08-27 Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure TWI792524B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW110131765A TWI792524B (en) 2021-08-27 2021-08-27 Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110131765A TWI792524B (en) 2021-08-27 2021-08-27 Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure

Publications (2)

Publication Number Publication Date
TWI792524B true TWI792524B (en) 2023-02-11
TW202309468A TW202309468A (en) 2023-03-01

Family

ID=86689125

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110131765A TWI792524B (en) 2021-08-27 2021-08-27 Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure

Country Status (1)

Country Link
TW (1) TWI792524B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202001178A (en) * 2018-06-08 2020-01-01 訊凱國際股份有限公司 Vapor chamber and manufacturing method for thesame
TW202126975A (en) * 2020-01-10 2021-07-16 雙鴻科技股份有限公司 Vapor chamber
TWM631317U (en) * 2021-08-27 2022-09-01 艾姆勒車電股份有限公司 Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202001178A (en) * 2018-06-08 2020-01-01 訊凱國際股份有限公司 Vapor chamber and manufacturing method for thesame
TW202126975A (en) * 2020-01-10 2021-07-16 雙鴻科技股份有限公司 Vapor chamber
TWM631317U (en) * 2021-08-27 2022-09-01 艾姆勒車電股份有限公司 Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure

Also Published As

Publication number Publication date
TW202309468A (en) 2023-03-01

Similar Documents

Publication Publication Date Title
CN101681896B (en) Heat spreader for semiconductor device and method for manufacturing the heat spreader
JP6233677B1 (en) Heat sink and manufacturing method thereof
JP6462899B2 (en) Heat dissipation plate material for high output elements
EP2863425A2 (en) Heat radiator
CN107112316A (en) Semiconductor module
TWM627557U (en) Immersion-cooled porous heat-dissipation substrate structure
TWM631317U (en) Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure
TWI792524B (en) Liquid-cooled heat-dissipation substrate structure with partial reinforcement structure
KR20160120887A (en) Heat radiation plate for high power devices
TWI774542B (en) Liquid-cooled heat-dissipation substrate with partial reinforcement structure
TW202309469A (en) Liquid-cooled heat-dissipation substrate with partial reinforcement structure
EP1601012A2 (en) Microelectronic assembly having variable thickness solder joint
JP2012174734A (en) Heat sink and semiconductor package provided with heat sink
TWM624077U (en) Heat-dissipation device with patterned surface layer for vehicle
JP2009188366A (en) Integral semiconductor heat dissipating substrate and its manufacturing method
TWI809641B (en) Immersion-cooling type heat-dissipation plate
KR102064158B1 (en) Heat sink plate
JP5917903B2 (en) Brazing clad material
TW202316944A (en) Immersion-cooled porous heat-dissipation structure having macroscopic-scale fin structure
JP3526614B2 (en) Semiconductor device
TWI787895B (en) Immersion-cooled porous heat-dissipation substrate structure
CN219068743U (en) Heat dissipation type metal base
TWI797865B (en) Two-phase immersion-cooled heat-dissipation structure
JPH0677365A (en) Radiation board material
TWI734637B (en) Water-cooling radiator with composite heat-dissipating structure