TWI792382B - Piercing device - Google Patents
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- TWI792382B TWI792382B TW110124180A TW110124180A TWI792382B TW I792382 B TWI792382 B TW I792382B TW 110124180 A TW110124180 A TW 110124180A TW 110124180 A TW110124180 A TW 110124180A TW I792382 B TWI792382 B TW I792382B
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Abstract
Description
本發明與如何割破一真空包裝體的技術有關,該真空包裝體包括一真空包裝袋及被包裝在該真空包裝袋內的一物品,例如一晶圓盒專用真空包裝袋及其內的晶圓盒。 The present invention is related to the technology of how to cut a vacuum packaging body, which includes a vacuum packaging bag and an article packed in the vacuum packaging bag, such as a vacuum packaging bag for wafer cassettes and the wafer inside. round box.
半導體產業經常利用晶圓盒來裝載晶圓,例如前開式通用晶圓盒(front opening unified pod;FOUP)可以在廠內運輸時保護晶圓,前開式晶圓運輸盒(front opening shipping box;FOSB)裝載晶圓可以在廠與廠之間運輸時保護晶圓。每一晶圓盒在運輸的過程中為了避免外部環境的微塵進入內部造成汙染而影響到良率,通常會以真空包裝方式將它包裝在一專用真空包裝袋內,以形成一真空包裝體,等到需要時,才拆開該專用真空包裝袋,以取出該晶圓盒。目前,該專用真空包裝袋有鋁袋、抗靜電袋、塑膠袋……等多種選擇,特性各有不同,可視需求決定,例如12吋晶圓盒所使用的塑膠袋材質較硬,8吋晶圓盒所使用的塑膠袋材質較軟,另外,亦有使用兩層包裝方式來包裝晶圓盒的情形。 The semiconductor industry often uses wafer boxes to load wafers, such as the front opening unified pod (FOUP) to protect the wafers during transportation in the factory, and the front opening shipping box (FOSB ) loads the wafers to protect the wafers during transport between fabs. During the transportation process, in order to avoid the fine dust from the external environment entering the interior and causing pollution and affecting the yield rate, it is usually packaged in a special vacuum packaging bag by vacuum packaging to form a vacuum packaging body. When needed, the special vacuum packaging bag is unpacked to take out the wafer box. At present, the special vacuum packaging bag has a variety of options such as aluminum bag, antistatic bag, plastic bag, etc. The characteristics are different and can be determined according to the needs. For example, the plastic bag used in the 12-inch wafer box The plastic bag used for the round box is relatively soft. In addition, there are also cases where two-layer packaging is used to package the wafer box.
圖9顯示的一真空包裝體9包括一真空包裝袋91及被包裝在該真空包裝袋91內的一物品92,該物品92係為一晶圓盒,例如上述的前開式通用晶圓盒(FOUP),至於該真空包裝袋91則是該晶圓盒的專用包裝袋。
A
圖10顯示該真空包裝袋91包括一封口部910a及原本就呈一密封狀態的一封底部910b。該封口部910a展開後形成一開
口910,該物品92從該開口910a被推入該真空包裝袋91內,然後,如圖11所示,利用一封口裝置(圖中未示)的一對熱壓頭93熱壓呈一閉合狀態的該封口部910a,以密封該封口部910a。最後,將該封口部910a折疊好並以一或多塊膠帶(圖中未示)黏住,此時,如圖9所示,整個包裝體9就大致呈一四方體的形態。其中,為了避免污染及保持乾燥,在熱壓該封口部910a之前,還利用一真空泵(圖中未示)將該真空包裝袋91內的空氣抽離,然後才熱壓該封口部910a。理想上,該真空包裝袋91內部此時已處於一真空密封狀態,故可確保該物品92(例如上述晶圓盒)不受污染。
FIG. 10 shows that the
由於該真空包裝袋91的各個內側面會因為空氣被抽離而向內縮束,並因此緊貼於該物品92,若為取出該物品92而直接去割破該真空包裝袋91,可能會一併割傷該真空包裝袋91的該物品92,此亟需改善。
Since each inner surface of the
本發明提供一種割破一真空包裝體的方法,該真空包裝體包括一真空包裝袋及被以真空包裝方式包裝在該真空包裝袋內的一物品。該方法包括:先刺破該真空包裝體的該真空包裝袋,然後,再割開該真空包裝體的該真空包裝袋。 The invention provides a method for cutting a vacuum packaging body, the vacuum packaging body includes a vacuum packaging bag and an article packed in the vacuum packaging bag in a vacuum packaging manner. The method includes: first piercing the vacuum packaging bag of the vacuum packaging body, and then cutting the vacuum packaging bag of the vacuum packaging body.
在一實施例中,本發明上述方法還包括:在刺破該真空包裝袋之後、割開該真空包裝袋之前,執行一氣體調整作業,該氣體調整作業包括利用一中空針管刺入該真空包裝袋,並經由該中空針管將該真空包裝袋中的氣體抽出或將氣體輸入該真空包裝袋內。 In one embodiment, the above method of the present invention further includes: after puncturing the vacuum packaging bag and before cutting the vacuum packaging bag, performing a gas adjustment operation, the gas adjustment operation includes using a hollow needle to penetrate the vacuum packaging bag, and the gas in the vacuum packaging bag is drawn out or gas is input into the vacuum packaging bag through the hollow needle tube.
本發明還提供一種刺破設備,其包括用於承載該真空包裝體的一承載台及一第一刺破裝置。該第一刺破裝置面對該承載台的一第一側邊,且包括一第一伸縮驅動裝置及連接該第一伸縮驅動裝置的一第一刺刀,該第一刺刀能在該伸縮驅動裝置的驅動下 從一第一原位置前進到一第一刺破位置及從該第一刺破位置後退到該第一原位置。其中,該第一刺刀係在該第一刺破位置刺進該真空包裝體,以致於在該真空包裝體的該真空包裝袋的一第一側面形成一破洞。較佳地,前述承載台可包括一輸送帶及一定位部。該輸送帶用於承載該真空包裝體及將它從一輸入側往一輸出側輸送。該定位部位於該輸送帶的該輸出側,用以在該輸出側擋住該真空包裝體,及在偵測到該真空包裝體到達一定點位置時,令該輸送帶暫停輸送及令該第一刺破裝置前進到該第一刺破位置。 The present invention also provides a piercing device, which includes a carrying platform for carrying the vacuum package and a first piercing device. The first piercing device faces a first side of the carrying platform, and includes a first telescopic drive device and a first bayonet connected to the first telescopic drive device, and the first bayonet can be positioned on the telescopic drive device Driven by Advance from a first original position to a first puncture position and retreat from the first puncture position to the first original position. Wherein, the first bayonet pierces the vacuum package at the first piercing position, so that a hole is formed on a first side of the vacuum package of the vacuum package. Preferably, the aforementioned carrying platform may include a conveyor belt and a positioning portion. The conveyor belt is used to carry the vacuum package and transport it from an input side to an output side. The positioning part is located on the output side of the conveyor belt, and is used to block the vacuum package at the output side, and when it is detected that the vacuum package reaches a certain position, the conveyor belt is suspended and the first The piercing device is advanced to this first piercing position.
在一實施例中,本發明上述刺破設備,還包括面對該承載台的一第二側邊的一第二刺破裝置,該第一、二刺破裝置相正對,該承載台位於該第一、二刺破裝置之間,且該第二刺破裝置包括一第二伸縮驅動裝置及連接該第二伸縮驅動裝置的一第二刺刀,該第二刺刀能在該伸縮驅動裝置的驅動下,從一第二原位置前進到刺破該包裝體的該真空包裝袋另一側面的一第二刺破位置,及從該第二刺破位置後退到該第二原位置。較佳地,前述承載台可包括上述輸送帶及一定位部。該輸送帶。用於承載該真空包裝體及將它從一輸入側往一輸出側輸送。該定位部位於該輸送帶的該輸出側,用以在該輸出側擋住該真空包裝體,及在偵測到該真空包裝體到達一定點位置時,令該輸送帶暫停輸送及令該第一、二刺破裝置分別前進到該第一、二刺破位置。 In one embodiment, the puncturing device of the present invention further includes a second puncturing device facing a second side of the carrying platform, the first and second puncturing devices face each other, and the carrying platform is located at Between the first and second puncturing devices, and the second puncturing device includes a second telescopic drive device and a second bayonet connected to the second telescopic drive device, the second bayonet can be positioned between the telescopic drive device Under the driving, it advances from a second original position to a second puncture position on the other side of the vacuum packaging bag that punctures the packaging body, and retreats from the second puncture position to the second original position. Preferably, the aforementioned carrying platform may include the aforementioned conveyor belt and a positioning portion. The conveyor belt. It is used to carry the vacuum packaging body and transport it from an input side to an output side. The positioning part is located on the output side of the conveyor belt, and is used to block the vacuum package at the output side, and when it is detected that the vacuum package reaches a certain position, the conveyor belt is suspended and the first The second piercing device advances to the first and second piercing positions respectively.
在一實施例中,本發明上述刺破設備的該第一刺破裝置包括連接該第一伸縮驅動裝置的一第一定位塊,該第一刺刀設置在該第一定位塊上,且能與該第一定位塊同步進退,該第二刺破裝置包括連接該第二伸縮驅動裝置的一第二定位塊,該第二刺刀設置在該第二定位塊上,且能與該第二定位塊同步進退,當該第一、二刺刀一起前進到達各自的該第一、二刺破位置時,跟著該第一刺刀同步移動該第一定位塊到達一第一定位位置,跟著該第二刺刀同步移動該第二定位塊到達一第二定位位置,以使位於該定點位置的該真空包裝體剛好位於該輸送帶在寬度方向的中央處。 In one embodiment, the first puncture device of the above-mentioned puncture device of the present invention includes a first positioning block connected to the first telescopic drive device, the first bayonet is arranged on the first positioning block, and can be connected with the first positioning block. The first positioning block advances and retreats synchronously, the second piercing device includes a second positioning block connected to the second retractable driving device, the second bayonet is arranged on the second positioning block, and can be connected with the second positioning block Advance and retreat synchronously, when the first and second bayonets advance together to reach the respective first and second piercing positions, move the first positioning block synchronously with the first bayonet to reach a first positioning position, and follow the second bayonet synchronously Moving the second positioning block to a second positioning position, so that the vacuum packaging body at the fixed point is just located at the center of the conveyor belt in the width direction.
相對於先前技術,本發明先刺破該真空包裝袋而使它變鬆,然後再割破該真空包裝袋,如此,在割破該真空包裝袋時一併割傷該物品的機率就可降低。 Compared with the prior art, the present invention first punctures the vacuum packaging bag to make it loose, and then cuts the vacuum packaging bag, so that the probability of cutting the article while cutting the vacuum packaging bag can be reduced .
a、b、a':步驟 a, b, a': steps
9:真空包裝體 9: Vacuum package
91:真空包裝袋 91: Vacuum bag
911:底面 911: Bottom
912a~912e:線狀切口 912a~912e: linear incision
913:開口 913: opening
92:物品 92: Items
921:把手 921: handle
1:承載台 1: carrying platform
11:輸送帶 11: Conveyor belt
12:偵測裝置 12: Detection device
120:定位部 120: Positioning department
13:引導架 13: guide frame
2:第一刺破裝置 2: The first piercing device
21:第一伸縮驅動裝置 21: The first telescopic drive device
22:第一刺刀 22: First bayonet
22a:尖刺 22a: Spikes
23:第一定位塊 23: The first positioning block
26:中空針管 26: Hollow needle tube
3:第二刺破裝置 3: Second piercing device
31:第二伸縮驅動裝置 31: The second telescopic driving device
32:第二刺刀 32: Second bayonet
32a:尖刺 32a: Spikes
33:第二定位塊 33: The second positioning block
34:減壓閥 34: Pressure reducing valve
G1、G2:空隙區 G1, G2: void area
圖1顯示兩種本發明方法的流程示意圖。 Figure 1 shows a schematic flow diagram of two methods of the present invention.
圖2顯示本發明之一刺破設備的一個較佳實施例的立體外觀圖。 Fig. 2 shows a perspective view of a preferred embodiment of a piercing device of the present invention.
圖3顯示本發明該刺破設備的該較佳實施例的俯視圖。 Figure 3 shows a top view of the preferred embodiment of the lancing device of the present invention.
圖4及圖5顯示本發明該刺破設備的該較佳實施例的動作示意 Figure 4 and Figure 5 show the action diagram of the preferred embodiment of the piercing device of the present invention
圖6顯示本發明方法在一真空包裝體9上所割出來的多道線狀切口912a~e。
FIG. 6 shows multiple
圖7顯示上述線狀切口912a~e所造成的一開口913。
FIG. 7 shows an
圖8顯示本發明方法所使用的一中空針管26的動作示意圖。
FIG. 8 shows a schematic diagram of the action of a
圖9顯示該真空包裝體9的立體外觀示意圖。
FIG. 9 shows a schematic perspective view of the
圖10顯示該真空包裝體9的一真空包裝袋91及一物品92的立體外觀示意圖。
FIG. 10 shows a schematic perspective view of a
圖11顯示一對熱壓頭93對該真空包裝袋91進行熱壓的立體外觀示意圖。
FIG. 11 shows a schematic perspective view of a pair of thermal
圖1顯示本發明方法的一個較佳實施例的流程示意圖,該方法係用割破一真空包裝體,在此實施例中,係以圖9所示的真空包裝體9為例,該真空包裝體9包括上述真空包裝袋91及被以真空包裝方式包裝在該真空包裝袋91內的上述物品92。該物品92可以是上述的晶圓盒,該真空包裝袋91可以是上述的晶圓盒專用包裝袋,但不以此為限。
Fig. 1 shows a schematic flow chart of a preferred embodiment of the method of the present invention, the method is to cut a vacuum package, in this embodiment, take the
如圖1(A)所示,該方法包括步驟a之刺破該真空
包裝體9的該真空包裝袋91,及步驟b之割破該真空包裝體9的該真空包裝袋91。在此實施例中,該步驟a可由一操作人員使用一尖銳工具(例如針或錐子)來刺破該真空包裝袋91,或是選用圖2所示的一刺破設備來自動刺破該真空包裝袋91。該步驟b可由該操作人員或另一人員操作一刀片來割破該真空包裝袋91,或是藉由一自動切割裝置(圖中未示)來割破該真空包裝袋91,藉以在該真空包裝袋91上造成至少一道線狀切口。
As shown in Figure 1(A), the method includes step a of puncturing the vacuum
The
該真空包裝袋91一旦被刺破而出現一或多個破洞,它的真空密閉狀態就會受到破壞,外面的空氣就會迅速從該一或多個破洞進入該真空包裝袋91內,以使該真空包裝袋91變鬆而不再緊貼於該物品92,故當以一刀片去割破該真空包裝袋91時,就比較不會一併割到該真空包裝袋91內的該物品92,從而降低割傷該物品92的機率。
Once the
如圖2所示,該刺破設備包括用於承載該真空包裝體9的一承載台1及一第一刺破裝置2。在此實施例中,該第一刺破裝置2面對該承載台1的一第一側邊(例如圖中的左側邊),且包括一第一伸縮驅動裝置21及連接該第一伸縮驅動裝置21的一第一刺刀22。該第一伸縮驅動裝置21可選用一雙軸氣壓缸。該第一刺刀22能在該第一伸縮驅動裝置21的驅動下從圖3及圖4所示的一第一原位置前進到圖5所示的一第一刺破位置及從該第一刺破位置後退到該第一原位置。該第一刺刀22在該第一刺破位置刺進該真空包裝體9,以致於在該真空包裝體9的該真空包裝袋91的一第一側面(例如圖中的左側面)形成至少一破洞,此時,外面的空氣立即從該破洞進入該真空包裝袋91內,以使該真空包裝袋91變鬆。在此實施例中,該刺刀22具有兩支尖刺22a,故能在該真空包裝袋91的該第一側面刺出兩個破洞,以增加空氣進入該真空包裝袋91內的路徑,從而加快該真空包裝袋91變鬆速度,及提高它的鬆弛程度。
As shown in FIG. 2 , the piercing device includes a
較佳地,該刺破設備還包括一第二刺破裝置3,在此實施例中,該第二刺破裝置3面對該承載台1的一第二側邊(例
如圖中的右側邊),該承載台1位於該第一刺破裝置2與第二刺破裝置3之間,且該第一刺破裝置2與第二刺破裝置3相正對。其中,該第二刺破裝置3包括一第二伸縮驅動裝置31及連接該第二伸縮驅動裝置31的一第二刺刀32。該第二伸縮驅動裝置31可選用一雙軸氣壓缸。該第二刺刀32能在該第二伸縮驅動裝置31的驅動下從圖3及圖4所示的一第二原位置前進到圖5所示的一第二刺破位置及從該第二刺破位置後退到該第二原位置。該第二刺刀32在該第二破位置刺進該真空包裝體9,以致於在該真空包裝體9的該真空包裝袋91的一第二側面(例如圖中的右側面)形成至少一破洞。在此實施例中,該刺刀32具有兩支尖刺32a,故能在該真空包裝袋91的該第二側面刺出兩個破洞。如上所述,在該真空包裝袋91上所形成的破洞愈多,該真空包裝袋91變鬆速度就愈快,且它的鬆弛程度也會跟著變高。
Preferably, the piercing device also includes a
較佳地,該承載台1包括一輸送帶11及一定位部120。如圖3所示,該輸送帶11能承載該真空包裝體9,並將它從一輸入側往一輸出側輸送。該定位部120位於該輸送帶11的該輸出側,用以在該輸出側擋住該真空包裝體9。
Preferably, the carrying
在此實施例中,當該定位部120的兩偵測裝置12被該真空包裝體9踫到時,表示該真空包裝體9已被該輸送帶11輸送到預定的一定點位置,此時,該兩偵測裝置12就會發出一信號給該輸送帶11的一驅動機構(圖中未示),以使該驅動機構暫停驅動該輸送帶11,該輸送帶11此時是停止輸送的。與此同時,該信號也一併被送給該第一刺破裝置2及/或該第二刺破裝置3,以使它們開始進行上述刺破該真空包裝袋91的動作。簡言之,該定位部120在偵測到該真空包裝體9到達該定點位置時,令該輸送帶11暫停輸送,並令該第一刺破裝置2前進到該第一刺破位置,及/或該第二刺破裝置3前進到該第二刺破位置。
In this embodiment, when the two
在此實施例中,該第一刺破裝置2還包括連接該第一伸縮驅動裝置21的一第一定位塊23,該第一刺刀22位於該第一
定位塊23上方,且能與該第一定位塊23同步進退。此外,該第二刺破裝置3包括連接該第二伸縮驅動裝置31的一第二定位塊33,該第二刺刀32位於該第二定位塊33上方,且能與該第二定位塊33同步進退。當該第一、二刺刀22及32一起前進到達各自的該第一、二刺破位置時,跟著該第一刺刀22同步移動該第一定位塊23到達一第一定位位置,跟著該第二刺刀32同步移動該第二定位塊33到達一第二定位位置,此時,如圖5所示,位於該定點位置的該真空包裝體9就剛好位於該輸送帶11在寬度方向的中央處。更詳而言之,位於該定點位置的該真空包裝體9若是稍微偏右,它將被該第二定位塊33往左推移,反之,若是稍微偏左它將被該第一定位塊23往右推移,無論如何,只要該第一、二定位塊23及33各自到達該第一、二定位位置,該真空包裝體9就會剛好位於該中央處。
In this embodiment, the
較佳地,該第二刺破裝置3還包括連接至該第二伸縮驅動裝置31的一減壓閥34,該減壓閥34可被調整,用以將該第二伸縮驅動裝置31的推力調低,以使該第二伸縮驅動裝置31的推力小於該第一伸縮驅動裝置21的推力,如此便可利用該第一伸縮驅動裝置21的該第一定位塊23作為定位邊,以確保該真空包裝體9能被定位該中央處。
Preferably, the
在該第一刺破裝置2及/或該第二刺破裝置3完成上述刺破動作之後,被刺破的該真空包裝體9就由該操作人員或另一人員搬移到一割袋工作站(圖中未示)。此外,也可以藉由一機械手臂或其它的移載裝置,將被刺破的該真空包裝體9搬移到該割袋工作站。在該割袋工作站中,如上所述,可藉由人工方式或該自動切割裝置來進行割破該真空包裝袋91的作業,俾於該真空包裝袋91形成至少一道線狀切口。
After the
在此實施例中,如圖6所示,可在該真空包裝袋91的一底面911依序切割出多道線狀切口912a至912e(以虛線表示),圖中各線狀切口912a至912e旁的箭號表示它們的切割進行方向。如圖7所示,這些線狀切口912a至912e造成該真空包裝體9的該外包
裝91出現圖中所示的一開口913,以使該物品92部分露出。接著,就可藉由人工方式或一自動脫袋裝置(圖中未示),將該真空包裝袋91從該物品92脫掉。然而,該開口913僅是一個示範,事實上也可以只形成一道線狀切口,至於要在該底面911形成多少線狀切口及造成什麼樣的開口,可視實際需求來決定。
In this embodiment, as shown in FIG. 6, a plurality of
較佳地,如圖3所示,該承載台1還包括位於該輸送帶11的該輸入側的兩引導架13,兩引導架13是用來初步導正該輸送帶11上的該真空包裝體9。
Preferably, as shown in FIG. 3 , the carrying
在該第一刺破裝置2及/或該第二刺破裝置3進行上述刺破動時,若有需要避免刺到該真空包裝袋91內的該物品92的話,如圖5所示,可選擇位於該真空包裝體9的左側面及右側面內的空隙區G1及G2,這個空隙區G1及G2主要是因為左、右兩把手921(請配合參見圖10)所造成的。進一步言之,如一般所知,該物品92通常不會每一側面都是平坦的,因此,儘管該真空包裝袋91內部空氣被抽離,它的內側面也不會全部都是緊貼於該物品92,例如外凸的上述把手921就會造成上述空隙區G1及G2,該物品92的其它外凸元件也會造其它的空隙區。該真空包裝體9的這些空隙區,讓它的真空包裝袋91與物品92之間形成足夠大的空間,因此,可選擇這些空隙區的其中一個或多個來讓該第一刺破裝置2及/或該第二刺破裝置3刺破,以避免刺傷該物品92。
When the first piercing
該真空包裝袋91被刺破之後,理想上應呈現適當的鬆緊度而有利於後續割破該真空包裝袋91的進行,然而,也有可能變得過鬆或仍不夠鬆(這跟該真空包裝袋91內的空氣被抽離的程度及它的材質有關),以致於影響割破該真空包裝袋91的效率及良率。因此,如圖1(B)所示,可考慮在該步驟b之前,先執行步驟a'之一氣體調整作業(但此非必要),該氣體調整作業包括利用一中空針管26(參見圖8)刺入該真空包裝袋91,並經由該中空針管26將該真空包裝袋91中的氣體抽出或將氣體輸入該真空包裝袋91內,以使該真空包裝袋91處於想要的鬆緊狀態,俾利於後續割破該真空
包裝袋91的進行。
After the
綜上所述可知,由於本發明在割破該真空包裝體9的該真空包裝袋91之前,先行刺破該真空包裝袋91,以使該真空包裝袋91變鬆而不再緊緊束住該真空包裝袋91內的該物品,故能降低在割破該真空包裝袋91時一併割傷該物品92的機率。
In summary, it can be seen that, before the present invention cuts the
a、b、a':步驟 a, b, a': steps
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CN206031980U (en) * | 2016-09-20 | 2017-03-22 | 贾妍 | Device is torn brokenly fast open to case and bag |
CN208854868U (en) * | 2018-09-29 | 2019-05-14 | 宁波瑞成包装材料有限公司 | Multi-function membrane production line robot feeding system |
CN213110057U (en) * | 2020-05-18 | 2021-05-04 | 江门市凯斯特尔实业有限公司 | Material conveying and bag cutting equipment |
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CN206031980U (en) * | 2016-09-20 | 2017-03-22 | 贾妍 | Device is torn brokenly fast open to case and bag |
CN208854868U (en) * | 2018-09-29 | 2019-05-14 | 宁波瑞成包装材料有限公司 | Multi-function membrane production line robot feeding system |
CN213110057U (en) * | 2020-05-18 | 2021-05-04 | 江门市凯斯特尔实业有限公司 | Material conveying and bag cutting equipment |
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