TWI790142B - Hydrofluoric acid treatment monitoring system and method of monitoring hydrofluoric acid treatment - Google Patents

Abstract

The present disclosure provides a hydrofluoric acid treatment monitoring system and a method of monitoring the hydrofluoric acid treatment by the system. The hydrofluoric acid treatment monitoring system includes a treatment tank including a hydrofluoric acid filling port, an oxidant filling port, a refluxing port, and an outlet. The hydrofluoric acid treatment monitoring system also includes a fluid pipeline connected to the outlet of the treatment tank, a reflux line connecting the fluid pipeline and the refluxing port of the treatment tank and including a transparent window, a video camera for filming the transparent window of the reflux line to obtain an image, an image recognition unit for determining a color saturation of the image, and a monitoring unit for alarming when the color saturation is lower than a standard color saturation.

Description

Hydrofluoric acid treatment monitoring system and monitoring method for hydrofluoric acid treatment

The present disclosure relates to hydrofluoric acid treatment processes, and more particularly to systems and methods for monitoring hydrofluoric acid treatment processes.

In order to meet the quality requirements of electronic grade hydrofluoric acid, the impurities in hydrofluoric acid should be less than the standard value. Oxidants are often used to oxidize the impurities in hydrofluoric acid into compounds with high boiling points, so that the subsequent rectification system can further separate hydrofluoric acid and the compounds of impurities to achieve the effect of treating hydrofluoric acid. In the above oxidation process, the equivalent of the oxidizing agent needs to be controlled so that the oxidizing agent is sufficient to continuously oxidize the impurities in the hydrofluoric acid. However, in order to confirm the oxidant equivalent in hydrofluoric acid, it is necessary to carry out on-site staged manual sampling for testing. This not only takes a lot of time and labor costs, but also causes danger to the on-site operators. Therefore, how to safely and conveniently monitor the oxidant equivalent in the hydrofluoric acid treatment process is a problem to be solved in related fields.

According to an embodiment of the present disclosure, a hydrofluoric acid treatment monitoring system includes a treatment tank, wherein the treatment tank includes a hydrofluoric acid injection port, an oxidant injection port, a reflux injection port and an outlet. The hydrofluoric acid treatment monitoring system also includes a fluid pipeline connected to the outlet of the treatment tank, and a return pipe connecting the fluid pipeline and the return flow inlet of the treatment tank, wherein the return pipe includes a transparent window. The hydrofluoric acid treatment monitoring system also includes a camera for shooting the transparent window of the return pipe to obtain an image, an image recognition unit for judging the color saturation of the image, and an image recognition unit for judging the color saturation of the image when the color saturation is lower than the standard value of the color saturation. A monitoring unit that issues prompts.

In some embodiments, the hydrofluoric acid treatment monitoring system further includes a control unit for controlling the hydrofluoric acid injection port and the oxidant injection port.

In some embodiments, the hydrofluoric acid treatment monitoring system further includes a management unit connected to the image recognition unit, the control unit and the monitoring unit, wherein the management unit is used to send instructions to the control unit and the monitoring unit according to the color saturation of the image.

In some embodiments, the diameter of the return pipe located at the transparent window is between 1 inch and 2 inches.

In some embodiments, the transparent window includes a fluororesin.

According to an embodiment of the present disclosure, a method of monitoring hydrofluoric acid treatment includes the following steps. Hydrofluoric acid and a first dose of oxidant are injected into the treatment tank to form a hydrofluoric acid mixture. The hydrofluoric acid mixture is returned to the treatment tank through the return pipe, wherein the return pipe includes a transparent window. Photograph the clear window of the return line to obtain an image of the hydrofluoric acid mixture. The color saturation of the image is judged by the image recognition unit, and the color saturation is compared with a standard value of the color saturation. When the color saturation of the image is lower than the color saturation standard value, the monitoring unit sends out a prompt, and injects a second dose of oxidant into the processing tank.

In some embodiments, judging the color saturation of the image by the image recognition unit includes judging RGB parameters of the image by the image recognition unit, and converting the RGB parameters into HSV parameters to obtain the color saturation.

In some embodiments, the color saturation standard value is between 25% and 30% of the maximum color saturation that can be judged by the image recognition unit.

In some embodiments, judging the color saturation of the image by the image recognition unit further includes continuously judging the color saturation of the image over time, and plotting the continuously judging color saturation as a time-varying curve.

In some embodiments, the oxidizing agent includes permanganate ions.

The following disclosure presents many different embodiments or examples in order to achieve the different features of the mentioned subject matter. Specific examples of components, operations, configurations, etc. are described below to simplify the present disclosure. Of course, these are examples only, not limiting. In addition, for the sake of simplifying the drawings, some well-known structures and components will be shown in a simple and schematic manner in the drawings.

The present disclosure provides a hydrofluoric acid treatment monitoring system and a method of monitoring hydrofluoric acid treatment using the system. The hydrofluoric acid treatment monitoring system includes a treatment tank, a fluid pipeline connected to the treatment tank and a return pipe, wherein the return pipe includes a transparent window. The camera in the hydrofluoric acid treatment monitoring system shoots the hydrofluoric acid mixture in the transparent window, and uses the image recognition unit to interpret the color saturation value of the hydrofluoric acid mixture to determine whether the oxidant equivalent in the hydrofluoric acid mixture is Appropriate amount. The hydrofluoric acid process monitoring system eliminates the hazards of manual sampling due to the closed fluid path formed by the process tank, fluid lines, and return lines. In addition, the camera and image recognition unit continuously monitor the change of color saturation, so that the hydrofluoric acid treatment monitoring system can continuously monitor and increase the control accuracy of the process.

According to an embodiment of the present disclosure, FIG. 1 shows a schematic diagram of a hydrofluoric acid treatment monitoring system 10 . The hydrofluoric acid treatment monitoring system 10 includes a treatment tank 100 , a fluid pipeline 120 , a return pipe 130 , a camera 140 , an image recognition unit 150 and a monitoring unit 160 .

The treatment tank 100 is used for loading liquid, so that hydrofluoric acid can perform a treatment process (or may be called a pretreatment process) in the treatment tank 100 . Specifically, the treatment tank 100 includes a hydrofluoric acid injection port 102 , an oxidant injection port 104 , a backflow injection port 106 and an outlet 108 . During the treatment process, hydrofluoric acid 110 is injected into the treatment tank 100 from the hydrofluoric acid injection port 102 , and an oxidant 115 is injected into the treatment tank 100 from the oxidant injection port 104 . The hydrofluoric acid 110 and the oxidizing agent 115 are fully mixed in the treatment tank 100, so that the oxidizing agent 115 and the hydrofluoric acid 110 form a hydrofluoric acid mixture, thereby oxidizing the impurities in the hydrofluoric acid 110 to be more easily removed in subsequent processes compound.

The fluid line 120 is connected to the outlet 108 of the treatment tank 100 to guide the hydrofluoric acid mixture to the outside of the treatment tank 100 . For example, the fluid line 120 can guide the treated hydrofluoric acid mixture to the subsequent rectification system 190 , so as to remove oxidized impurities in the hydrofluoric acid mixture through rectification. In some embodiments, the fluid line 120 can be connected with the pump 125 so that the flow of the hydrofluoric acid mixture can be guided by the pressure of the pump 125 .

The return pipe 130 connects the fluid line 120 and the return flow inlet 106 of the treatment tank 100 to guide the hydrofluoric acid mixture flowing through the fluid line 120 into the return pipe 130 . In detail, the end of the return pipe 130 connected to the fluid line 120 may have a switch valve to control the flow direction of the hydrofluoric acid mixture entering the return pipe 130 or continuing in the fluid line 120 . After the hydrofluoric acid mixture flows through the return pipe 130 , it returns to the processing tank 100 through the return injection port 106 .

In addition, the return pipe 130 includes a transparent window 132 , so that the hydrofluoric acid mixture in the return pipe 130 can be observed through the transparent window 132 . In other words, the fluid pipeline 120 and the hydrofluoric acid mixture in the treatment tank 100 can be observed through the transparent window 132 . Such a closed return pipeline design allows the operator to directly observe the hydrofluoric acid mixture being processed in the treatment tank 100 through the return pipe 130 without opening the pipeline for manual sampling of the hydrofluoric acid mixture. Therefore, the return pipe 130 with the transparent window 132 can avoid the danger of manual sampling. In addition, the hydrofluoric acid mixture can be continuously observed through the return pipe 130, thereby improving the accuracy of monitoring the hydrofluoric acid treatment process.

In some embodiments, the pipe diameter of the return pipe 130 located at the transparent window 132 can be between 1 inch and 2 inches, so that the hydrofluoric acid mixture flowing through the transparent window 132 is sufficient to represent the hydrofluoric acid in the entire return pipe 130 Acid mixture state. Furthermore, the hydrofluoric acid mixture flowing through the transparent window 132 is sufficient to represent the state of the hydrofluoric acid mixture in the fluid pipeline 120 and the treatment tank 100 , so as to monitor the hydrofluoric acid mixture in the treatment tank 100 for the treatment process. In some embodiments, the transparent window 132 may include fluorine-containing resin, so that the transparent window 132 has sufficient light transmittance, and reduces the erosion of the hydrofluoric acid mixture on the transparent window 132 .

The camera 140 and the image recognition unit 150 are used to observe the hydrofluoric acid mixture in the return pipe 130 . Specifically, the lens of the camera 140 is aimed at the transparent window 132 of the return pipe 130 , so as to shoot the transparent window 132 to obtain an image of the hydrofluoric acid mixture. Next, the camera 140 transmits the image to the image recognition unit 150, so that the image recognition unit 150 interprets the state of the hydrofluoric acid mixture in the image.

More specifically, when the hydrofluoric acid mixture includes the oxidizing agent 115, the hydrofluoric acid mixture may exhibit a non-transparent color. For example, when the oxidizing agent 115 includes permanganate ions, the hydrofluoric acid mixture will appear light green. In addition, when the equivalent of the oxidizing agent 115 in the hydrofluoric acid mixed liquid increases, the color of the hydrofluoric acid mixed liquid will have higher color saturation. Therefore, after the camera 140 captures the image of the hydrofluoric acid mixture through the transparent window 132, the image recognition unit 150 can judge the color saturation of the hydrofluoric acid mixture through the image, so as to determine whether the oxidant equivalent in the hydrofluoric acid mixture is appropriate.

The monitoring unit 160 is used for monitoring the state of the hydrofluoric acid mixture in the treatment tank 100 . Specifically, the standard value of color saturation can be set in the hydrofluoric acid treatment monitoring system 10 , and this standard value corresponds to the minimum equivalent of the oxidizing agent 115 that should exist in the hydrofluoric acid mixture. In other words, when the color saturation of the hydrofluoric acid mixture is lower than the set color saturation standard value, it means that the equivalent of the oxidizing agent 115 in the treatment tank 100 is not enough to continue to oxidize the impurities in the hydrofluoric acid 110 into compounds that are easier to remove. At this point, the monitoring unit 160 will issue a prompt to remind the operator or the system to increase the equivalent of the oxidizing agent 115 in the treatment tank 100 .

In some embodiments, the hydrofluoric acid treatment monitoring system 10 may further include a control unit 170 such as a distributed control system (distributed control system, DCS). The control unit 170 can be used for computerized control of the treatment process of the hydrofluoric acid mixture. Specifically, the control unit 170 can control the opening and closing of the hydrofluoric acid injection port 102 and the oxidant injection port 104 , so as to control the liquid amounts of the hydrofluoric acid 110 and the oxidant 115 injected into the treatment tank 100 . In addition, the control unit 170 can control the flow direction and flow rate of the hydrofluoric acid mixture in the hydrofluoric acid treatment monitoring system 10 , so as to control the start and end points of the treatment process.

In some embodiments, the hydrofluoric acid treatment monitoring system 10 may further include a management unit 180 such as a real-time production management system (RTPMS). Specifically, the management unit 180 is connected to the image recognition unit 150 , the control unit 170 and the monitoring unit 160 , so that the management unit 180 can adjust each unit in the hydrofluoric acid treatment monitoring system 10 . For example, the management unit 180 can collect the color saturation interpreted by the image recognition unit 150 and present a curve of the color saturation over time. The management unit 180 may also issue instructions to the control unit 170 or the monitoring unit 160 according to the interpreted color saturation. For example, when the color saturation of the hydrofluoric acid mixture is lower than the color saturation standard value, the management unit 180 can send an instruction to the monitoring unit 160 to make the monitoring unit 160 issue a prompt; the management unit 180 can also send an instruction to the control unit 170 , so that the control unit 170 opens the oxidant injection port 104 to increase the oxidant equivalent in the treatment tank 100 .

FIG. 2 depicts a flowchart of a method 200 for monitoring hydrofluoric acid treatment, according to an embodiment of the present disclosure. Method 200 includes step 202 to step 212 . In step 202, a hydrofluoric acid mixture is formed. In step 204, the hydrofluoric acid mixture is refluxed. In step 206, the obtained image is captured by shooting the hydrofluoric acid mixture. In step 208, the color saturation of the image is judged. In step 210 to step 212, it is determined whether to add the oxidizing agent in the hydrofluoric acid mixture according to the color saturation. In the following description, the above steps will be further described in conjunction with FIG. 1 and FIG. 2 .

In step 202, hydrofluoric acid and a first dose of oxidant are injected into the treatment tank to form a hydrofluoric acid mixture. Specifically, the hydrofluoric acid injection port 102 and the oxidant injection port 104 of the treatment tank 100 are opened by the control unit 170, so that a single batch of hydrofluoric acid 110 and a first dose of oxidant 115 are injected into the treatment tank 100 for processing Process. In some embodiments, the treatment process includes causing the oxidizing agent 115 to oxidize impurities in the hydrofluoric acid 110 , such as arsenic-containing compounds. The oxidized arsenic-containing compounds can be removed in the subsequent rectification process, so that the hydrofluoric acid 110 after the treatment process and the subsequent rectification process can reach the standard of electronic grade. For example, the oxidizing agent 115 may include permanganate ions. In the above embodiments, the hydrofluoric acid mixture including the oxidizing agent 115 may appear light green.

In step 204, the hydrofluoric acid mixture is returned to the treatment tank through the return pipe. Specifically, the hydrofluoric acid mixture that has not completed the treatment process will enter the fluid pipeline 120 after leaving the treatment tank 100 , and further flow back into the treatment tank 100 through the return pipe 130 to continue the treatment process.

In step 206, the transparent window of the return pipe is photographed to obtain an image of the hydrofluoric acid mixture. Specifically, the return pipe 130 includes a transparent window 132 , so that the hydrofluoric acid mixture in the return pipe 130 can be directly observed from the outside of the return pipe 130 . Therefore, the camera 140 can capture the image of the hydrofluoric acid mixture through the transparent window 132 of the return pipe 130 . Since the camera 140 takes pictures of the hydrofluoric acid mixture through the transparent window 132, the hydrofluoric acid treatment monitoring system 10 can continuously take pictures of the hydrofluoric acid mixture through the camera 140, thereby continuously monitoring the state of the hydrofluoric acid mixture.

In step 208, the color saturation of the image is judged by the image recognition unit. Specifically, after the camera 140 captures the image, the image recognition unit 150 can judge the color saturation of the hydrofluoric acid mixture in the image. The color saturation of the hydrofluoric acid mixed liquid corresponds to the oxidant equivalent in the hydrofluoric acid mixed liquid, thereby providing the hydrofluoric acid treatment monitoring system 10 with a basis for judging whether to add an oxidant.

In some implementations, the image recognition unit 150 judging the color saturation of the image may include first judging three primary colors red-green-blue (RGB) parameters of the image. Next, the image recognition unit 150 converts the RGB parameters into hue-saturation-value (HSV) parameters, and normalizes the saturation parameters to obtain the color saturation of the image. For example, the normalized color saturation can be between 0 and 255.

In some embodiments, judging the color saturation of the image may further include continuously judging the color saturation of the image over time, and plotting the continuously judging color saturation as a time-varying curve. FIG. 3 is a graph showing color saturation of an image as a function of time according to an embodiment of the present disclosure. As shown in Figure 3, when hydrofluoric acid is mixed with the first dose of oxidizing agent, the equivalent of the oxidizing agent in the hydrofluoric acid mixed solution is the highest, and the color saturation of the hydrofluoric acid mixed solution rises to the maximum value at this time, that is, the corresponding The position of the first peak 310. With the progress of the treatment process, the equivalent of the oxidizing agent in the hydrofluoric acid mixed solution gradually decreases, so the color saturation of the hydrofluoric acid mixed solution also gradually decreases.

In step 210, the color saturation of the image is compared with the color saturation standard value to determine whether the color saturation is lower than the color saturation standard value. Specifically, a standard value of color saturation is firstly set in the hydrofluoric acid treatment monitoring system 10, and this standard value corresponds to the minimum equivalent of the oxidizing agent 115 for oxidizing impurities in the hydrofluoric acid mixed solution.

In some embodiments, the color saturation standard value can be obtained from the experimental results before treating the monitoring system 10 with hydrofluoric acid. Specifically, different equivalents of oxidizing agents are added to hydrofluoric acid, and then part of the hydrofluoric acid mixture is taken out and water is added to form a sample of the hydrofluoric acid mixture. When there is excessive oxidizing agent in the hydrofluoric acid mixed solution, the hydrofluoric acid mixed solution sample after adding water will present dark color. When there is an appropriate amount of oxidant in the hydrofluoric acid mixture, the hydrofluoric acid mixture sample after adding water will appear light-colored. When there is insufficient oxidizing agent in the hydrofluoric acid mixed solution, the hydrofluoric acid mixed solution sample after adding water will appear colorless. Put the hydrofluoric acid mixture with excessive, proper and insufficient oxidant equivalents into the hydrofluoric acid treatment monitoring system 10, and use the camera 140 and the image recognition unit 150 to interpret the color saturation of the hydrofluoric acid mixture in different states. As a result, the color saturation of the hydrofluoric acid mixture with an appropriate amount of oxidant equivalent can be used as the standard value of color saturation.

It is worth noting that, in a preferred embodiment, the goal of monitoring the hydrofluoric acid mixture can be to maintain the color saturation of the hydrofluoric acid mixture at slightly higher than the color saturation standard value, such as mixing the hydrofluoric acid The color saturation of the liquid is maintained at about 5% to 10% greater than the color saturation standard value. At this time, the hydrofluoric acid mixed solution has an appropriate excess oxidant equivalent, so that the oxidant equivalent in the hydrofluoric acid mixed solution is sufficient to process the hydrofluoric acid, while avoiding the excessive oxidant from affecting product quality.

In some embodiments, the color saturation standard value may be between about 25% and 30% of the maximum color saturation that can be interpreted by the image recognition unit. For example, when the range of color saturation that can be judged by the image recognition unit is between 0 and 255, the standard value of color saturation may be in the range of about 60 to 75. In some embodiments, when the hydrofluoric acid mixed solution has insufficient oxidant equivalent, the color saturation of the hydrofluoric acid mixed solution can be between about 20% and 24% of the maximum color saturation that can be interpreted by the image recognition unit .

If the color saturation of the image is lower than the color saturation standard value, the process proceeds to step 212 , the monitoring unit issues a prompt, and a second dose of oxidant is injected into the processing tank. Specifically, when the color saturation of the image is lower than the color saturation standard value, the monitoring unit 160 will issue a prompt to remind the operator or the hydrofluoric acid treatment monitoring system 10 to increase the oxidant equivalent. At the same time, the control unit 170 may open the oxidant injection port 104 of the treatment tank 100 , so that the second dose of oxidant 115 is injected into the treatment tank 100 . After the second dose of oxidant 115 is injected into the treatment tank 100 , return to step 206 of the method 200 and continue to monitor the color saturation of the hydrofluoric acid mixture until the hydrofluoric acid treatment process is completed.

In some embodiments, the second dose of oxidizing agent 115 substantially complements the deficiency of the first dose of oxidizing agent 115, so the second dose of oxidizing agent 115 may be less than the first dose. For example, referring to FIG. 3 , at time t1, after the first dose of oxidant is added to the hydrofluoric acid, the color saturation of the hydrofluoric acid mixture rises to a first peak 310 . As the reaction continues, the color saturation of the hydrofluoric acid mixture gradually decreases with time, and the oxidizing agent therein is also consumed. At time t2, when the color saturation is lower than the color saturation standard value (in this example, 25% of the maximum color saturation that can be interpreted by the image recognition unit), it means that the oxidant has been consumed enough to allow the reaction to continue, so The hydrofluoric acid treatment monitoring system adds a second dose of oxidant into the hydrofluoric acid mixture, so that the color saturation at time t3 rises to the second peak 320 . Since the second dose of oxidant may be smaller than the first dose, the height of the second peak 320 is lower than the height of the first peak 310 .

If the color saturation of the image is not lower than the color saturation standard value, then return to step 206, so that the hydrofluoric acid treatment monitoring system continuously monitors the color saturation of the image until the hydrofluoric acid treatment process is completed. Once the color saturation of the image is lower than the color saturation standard value, proceed to step 212 again, that is, inject the oxidant into the processing tank again.

According to the above-mentioned embodiments of the present disclosure, the hydrofluoric acid treatment monitoring system of the present disclosure includes a treatment tank forming a closed fluid path, a fluid pipeline and a return pipe, wherein the return pipe includes a transparent window. The hydrofluoric acid treatment monitoring system also includes a camera that shoots the hydrofluoric acid mixture in the transparent window, and uses the image recognition unit to interpret the color saturation value of the hydrofluoric acid mixture image to determine the oxidant in the hydrofluoric acid mixture Whether the equivalent is appropriate. Since the hydrofluoric acid treatment monitoring system of the present disclosure includes a closed fluid path and a unit capable of continuously monitoring changes in color saturation, the danger of manual sampling can be avoided, and the control accuracy of the treatment process can be increased through continuous monitoring.

The foregoing outlines features of some embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages as the embodiments described herein. Those skilled in the art should also understand that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and alterations without departing from the spirit and scope of the present disclosure.

10: Hydrofluoric acid treatment monitoring system 100: processing tank 102: Hydrofluoric acid injection port 104: Oxidizer injection port 106: Backflow inlet 108: Exit 110: hydrofluoric acid 115: Oxidizing agent 120: Fluid pipeline 125: pump 130: return pipe 132: transparent window 140: camera 150: Image recognition unit 160: Monitoring unit 170: control unit 180: Snap-in 190: Distillation system 200: method 202, 204, 206, 208, 210, 212: steps 310: The first crest 320:Second crest t1, t2, t3: time

Aspects of the disclosure are best understood from the following detailed description when read with the accompanying figures. It should be noted that, according to the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion. FIG. 1 is a schematic diagram of a hydrofluoric acid treatment monitoring system according to an embodiment of the present disclosure. FIG. 2 is a flowchart illustrating a method for monitoring hydrofluoric acid treatment according to an embodiment of the present disclosure. FIG. 3 shows a time-varying graph of color saturation according to an embodiment of the present disclosure.

Domestic deposit information (please note in order of depositor, date, and number) none Overseas storage information (please note in order of storage country, institution, date, and number) none

10: Hydrofluoric acid treatment monitoring system

100: processing tank

102: Hydrofluoric acid injection port

104: Oxidizer injection port

106: Backflow inlet

108: Exit

110: hydrofluoric acid

115: Oxidizing agent

120: Fluid pipeline

125: pump

130: return pipe

132: transparent window

140: camera

150: Image recognition unit

160: Monitoring unit

170: control unit

180: Snap-in

190: Distillation system

Claims (10)

A hydrofluoric acid treatment monitoring system, comprising: A treatment tank, including a hydrofluoric acid injection port, an oxidant injection port, a backflow injection port and an outlet; a fluid line connected to the outlet of the treatment tank; a return pipe, connecting the fluid line and the return inlet of the treatment tank, wherein the return pipe includes a transparent window; a camera, used to photograph the transparent window of the return pipe to obtain an image; an image recognition unit for judging a color saturation of the image; and A monitoring unit is used for sending a prompt when the color saturation is lower than a standard value of color saturation. The hydrofluoric acid treatment monitoring system as described in claim 1 further includes a control unit for controlling the hydrofluoric acid injection port and the oxidant injection port. The hydrofluoric acid treatment monitoring system as described in claim 2, further comprising a management unit connected to the image recognition unit, the control unit and the monitoring unit, wherein the management unit is used to report to the user according to the color saturation of the image The control unit and the monitoring unit issue commands. The hydrofluoric acid treatment monitoring system as described in Claim 1, wherein a pipe diameter of the return pipe located at the transparent window is between 1 inch and 2 inches. The hydrofluoric acid treatment monitoring system as described in Claim 1, wherein the transparent window includes fluorine-containing resin. A method of monitoring hydrofluoric acid treatment comprising: injecting hydrofluoric acid and a first dose of an oxidizing agent into a treatment tank to form a hydrofluoric acid mixture; return the hydrofluoric acid mixture to the treatment tank through a return pipe, wherein the return pipe includes a transparent window; photographing the transparent window of the return pipe to obtain an image of the hydrofluoric acid mixture; Judging a color saturation of the image by an image recognition unit, and comparing the color saturation with a color saturation standard value; and When the color saturation of the image is lower than the color saturation standard value, a monitoring unit issues a prompt, and injects a second dose of the oxidant into the processing tank. The method according to claim 6, wherein judging the color saturation of the image by the image recognition unit includes: Deciphering an RGB parameter of the image by the image recognition unit; and Convert the RGB parameter to an HSV parameter to obtain the color saturation. The method as claimed in claim 6, wherein the color saturation standard value is between 25% and 30% of a maximum color saturation that can be interpreted by the image recognition unit. The method as claimed in claim 6, wherein judging the color saturation of the image by the image recognition unit further comprises continuously judging the color saturation of the image over time, and plotting the continuously judging color saturation as a time Curve. The method of claim 6, wherein the oxidizing agent comprises permanganate ions.

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