TWI784498B - Workpiece processing device - Google Patents

Workpiece processing device Download PDF

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TWI784498B
TWI784498B TW110115158A TW110115158A TWI784498B TW I784498 B TWI784498 B TW I784498B TW 110115158 A TW110115158 A TW 110115158A TW 110115158 A TW110115158 A TW 110115158A TW I784498 B TWI784498 B TW I784498B
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unit
workpiece
tool
displacement unit
displacement
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TW110115158A
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TW202241614A (en
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馮展華
陳威仁
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國立中正大學
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一種工件加工裝置,包含刀具台、承載台、控制裝置及電源,其中刀具台具有第一位移單元及固定單元,固定單元係設於第一位移單元,並藉由第一位移單元移動,固定單元係用以固定刀具;承載台具有第二位移單元及承載單元,承載單元設於第二位移單元,承載單元係藉由第二位移單元移動,承載單元係用以固定工件,且承載單元具有超音波震動件,當工件與刀具接觸,藉由超音波震動件所產生之震動隨之震動,進而令刀具對工件進行切削,控制裝置係控制刀具台、承載台之作動;電源係供應所需之電力。A workpiece processing device, including a tool table, a bearing table, a control device and a power supply, wherein the tool table has a first displacement unit and a fixed unit, the fixed unit is arranged on the first displacement unit, and is moved by the first displacement unit, and the fixed unit It is used to fix the tool; the bearing table has a second displacement unit and a bearing unit, the bearing unit is arranged on the second displacement unit, the bearing unit is moved by the second displacement unit, the bearing unit is used to fix the workpiece, and the bearing unit has super The sonic vibrating part, when the workpiece is in contact with the tool, the vibration generated by the ultrasonic vibrating part vibrates accordingly, and then the tool cuts the workpiece. The control device controls the movement of the tool table and the bearing table; electricity.

Description

工件加工裝置Workpiece processing device

本發明係與工件加工技術有關,特別是指一種工件加工裝置。The invention relates to workpiece processing technology, in particular to a workpiece processing device.

現行超音波(超聲波)加工工件的技術,請參閱中華民國第M372763號專利,所提供之一種超聲波震動式刀具模組,此種刀具模組係將超音波裝置設置於刀具軸,藉由刀具改變加工角度並隨超音波裝置沿軸向高速震動的方式,對固定不動的工件胚料進行加工,進而完成工件的加工,此種加工技術稱作強力刮齒(Power skiving)。For the current technology of ultrasonic (ultrasonic) processing of workpieces, please refer to the Republic of China Patent No. M372763, which provides an ultrasonic vibration tool module. The processing angle and the way of high-speed vibration along the axial direction with the ultrasonic device process the fixed workpiece blank, and then complete the processing of the workpiece. This processing technology is called power skiving.

然而,在強力刮齒的技術中,刀具改變加工角度會與工件形成側傾角,在有側傾角的情況下會產生側向分力,當側向分力過大時,容易令工件產生變形,這樣的情況在加工小模數的齒輪時,尤為明顯,進而會影響到加工的品質。However, in the technology of powerful gear skiving, changing the machining angle of the tool will form a side inclination angle with the workpiece, and a lateral component force will be generated when there is a side inclination angle. When the lateral component force is too large, it is easy to deform the workpiece, so The situation is especially obvious when processing small modulus gears, which will affect the quality of processing.

此外,在強力刮齒的技術中, 工件也容易受到機台無規律的自激震動影響,也會影響加工工件的品質。In addition, in the powerful gear skiving technology, the workpiece is also easily affected by the irregular self-excited vibration of the machine, which will also affect the quality of the processed workpiece.

本發明之主要目的乃在於提供一種工件加工裝置,相較於先前技術,能有效減少側向分力,進而避免工件變形,進而提升加工的品質。The main purpose of the present invention is to provide a workpiece processing device, which can effectively reduce the lateral component force compared with the prior art, thereby avoiding deformation of the workpiece and improving the processing quality.

本發明之另一主要目的乃在於提供一種工件加工裝置,相較於先前技術,能避免工件受到機台無規律的自激震動影響,進而提升加工品質。Another main purpose of the present invention is to provide a workpiece processing device, which can prevent the workpiece from being affected by the irregular self-excited vibration of the machine compared with the prior art, thereby improving the processing quality.

為了達成上述之目的,本發明提供之一種工件加工裝置,其包含:一刀具台,具有一第一位移單元及一固定單元,該固定單元係設於該第一位移單元,並藉由該第一位移單元移動,該固定單元係用以固定一刀具;一承載台,具有一第二位移單元及一承載單元,該承載單元設於該第二位移單元,該承載單元係藉由該第二位移單元移動,該承載單元係用以固定一工件,且該承載單元具有一超音波震動件,該超音波震動件產生一震動方向,當該工件與該刀具接觸,藉由該超音波震動件所產生之震動方向令該工件隨該震動方向震動,進而令該刀具對該工件進行切削;一控制裝置,電性連接該刀具台及該承載台,藉以控制該刀具台及該承載台之作動;以及一電源,電性連接該控制裝置、該刀具台及該承載台,提供所需之電力。In order to achieve the above object, the present invention provides a workpiece processing device, which includes: a tool table with a first displacement unit and a fixed unit, the fixed unit is set on the first displacement unit, and through the first displacement unit A displacement unit moves, and the fixed unit is used to fix a tool; a carrying platform has a second displacement unit and a carrying unit, the carrying unit is arranged on the second displacement unit, and the carrying unit is connected by the second The displacement unit moves, the carrying unit is used to fix a workpiece, and the carrying unit has an ultrasonic vibrating element, which produces a vibration direction, when the workpiece contacts the tool, the ultrasonic vibrating element The generated vibration direction makes the workpiece vibrate with the vibration direction, and then makes the tool cut the workpiece; a control device is electrically connected to the tool table and the carrier table, so as to control the movement of the tool table and the carrier table ; and a power supply electrically connected to the control device, the tool table and the carrying table to provide the required power.

藉此,本發明所提供之一種工件加工裝置,藉由承載單元具有超音波震動件之技術特徵,相較於先前技術,能有效減少側向分力,進而避免工件變形,進而提升加工的品質。In this way, the workpiece processing device provided by the present invention can effectively reduce the lateral force component compared with the prior art, thereby avoiding deformation of the workpiece and improving the quality of processing by virtue of the bearing unit having the technical characteristics of an ultrasonic vibrating element. .

以及,本發明所提供之一種工件加工裝置,藉由承載單元具有超音波震動件之技術特徵,相較於先前技術,能避免工件受到機台無規律的自激震動影響,進而提升加工品質。And, the workpiece processing device provided by the present invention can prevent the workpiece from being affected by the irregular self-excited vibration of the machine table by virtue of the technical characteristics of the ultrasonic vibrating element in the carrying unit, thereby improving the processing quality.

為了詳細說明本發明之技術特點所在,茲針對以下一較佳實施例,並配合圖式說明如後,其中:如圖1-3所示本發明之工件加工裝置10,其包含一刀具台20、一承載台30、一控制裝置40及一電源50。In order to describe the technical features of the present invention in detail, hereby aim at the following preferred embodiment, and describe it with the drawings as follows, wherein: the workpiece processing device 10 of the present invention as shown in Figures 1-3 includes a tool rest 20 , a carrying platform 30 , a control device 40 and a power supply 50 .

如圖2-5所示,該刀具台20具有一第一位移單元21及一固定單元23,該固定單元23係設於該第一位移單元21,並藉由該第一位移單元21移動,該固定單元23係用以固定一刀具90(如圖6、7所示)。As shown in Figures 2-5, the tool table 20 has a first displacement unit 21 and a fixed unit 23, the fixed unit 23 is arranged on the first displacement unit 21, and is moved by the first displacement unit 21, The fixing unit 23 is used to fix a cutter 90 (as shown in FIGS. 6 and 7 ).

如圖2、7所示,在本較佳實施例中,該第一位移單元21包含二X軸向導軌211、二Y軸向導軌213及二Z軸向導軌215,該固定單元23係沿該二X、Y、Z軸向導軌211、213、215移動,而該刀具90呈環狀,該刀具90具有一外表面91,該外表面91形成複數刃口部92,各該刃口部92係具有一預定傾斜角度。As shown in Figures 2 and 7, in this preferred embodiment, the first displacement unit 21 includes two X-axis guide rails 211, two Y-axis guide rails 213 and two Z-axis guide rails 215, and the fixing unit 23 is along the The two X, Y, and Z axis guide rails 211, 213, 215 move, and the cutter 90 is annular, and the cutter 90 has an outer surface 91, and the outer surface 91 forms a plurality of cutting edge portions 92, each of which cutting edge portions 92 lines have a predetermined angle of inclination.

在其他較佳實施例中,該二X軸向導軌211、該二Y軸向導軌213及該二Z軸向導軌215之數量亦能以一或三以上為例,同樣能提供該固定單元23移動,故該二X軸向導軌211、該二Y軸向導軌213及該二Z軸向導軌215之數量不僅以本較佳實施例為限;此外,在其他較佳實施例中,如依使用需求增加更多方向的導軌,則能以不同可供該固定單元23的移動機構作為實施,故該第一位移單元21亦不僅以本較佳實施例為限;另外,在其他較佳實施例中,該刀具90之刃口部92數量並非一定要為複數,亦可依需求而進行調整,此外,該刀具90也並非一定要呈環狀、具有該外表面91及形成有該複數刃口部92,該刀具90是能依加工需求來選擇使用不同外型的該刀具90。In other preferred embodiments, the number of the two X-axis guide rails 211, the two Y-axis guide rails 213 and the two Z-axis guide rails 215 can also be one or more than three as an example, and the fixing unit 23 can also be provided Therefore, the number of the two X-axis guide rails 211, the two Y-axis guide rails 213 and the two Z-axis guide rails 215 is not limited to this preferred embodiment; in addition, in other preferred embodiments, if according to The use of guide rails that require more directions can be implemented with different moving mechanisms available for the fixed unit 23, so the first displacement unit 21 is not limited to this preferred embodiment; in addition, in other preferred implementations In the example, the number of cutting edges 92 of the cutter 90 does not have to be plural, and can also be adjusted according to requirements. In addition, the cutter 90 does not have to be annular, have the outer surface 91 and be formed with the plurality of blades. Mouth 92, the cutting tool 90 can choose to use different shapes of the cutting tool 90 according to processing requirements.

如圖1、3-7所示,該承載台30具有一第二位移單元31及一承載單元33,該承載單元33設於該第二位移單元31,該承載單元33係藉由該第二位移單元31移動,該承載單元33係用以固定一工件100,且該承載單元33具有一超音波震動件35,該超音波震動件35產生一震動方向D,藉由該第一位移單元21及該第二位移單元31係調整該工件100與該刀具90的相對位置,當該工件100與該刀具90接觸,藉由該超音波震動件35所產生之震動方向D令該工件100隨該震動方向D震動,進而令該刀具90對該工件100進行切削(如圖6-7所示),利用超音波加工技術的高頻振動,達到以錘擊與磨蝕的效果提升該刀具90對該工件100切削的效能,能有效減少該刀具90的耗損,此外亦能減少如先前技術中所述的側向分力,進而能避免該工件100變形,進而提升加工的品質;此外,利用超音波加工技術的高頻振動,亦可取代先前技術中所述工件100胚料受到機台無規律的自激震動,避免工件100胚料受到機台無規律的自激震動影響,進而提升加工品質;還有,因為在加工過程中,該複數刃口部92係唯一與該工件100接觸的部位,將該刀具90之刃口部設置成具有該預定傾斜角度,即是為避免該刀具90之其他部位干涉該工件100,導致該工件100的加工品質不佳。As shown in Figures 1 and 3-7, the bearing table 30 has a second displacement unit 31 and a bearing unit 33, the bearing unit 33 is arranged on the second displacement unit 31, and the bearing unit 33 is carried by the second displacement unit 33. The displacement unit 31 moves, the bearing unit 33 is used to fix a workpiece 100, and the bearing unit 33 has an ultrasonic vibrating element 35, the ultrasonic vibrating element 35 generates a vibration direction D, by the first displacement unit 21 And the second displacement unit 31 is to adjust the relative position of the workpiece 100 and the tool 90, when the workpiece 100 is in contact with the tool 90, the vibration direction D generated by the ultrasonic vibrating element 35 makes the workpiece 100 follow the The vibration direction D vibrates, and then the tool 90 cuts the workpiece 100 (as shown in Figure 6-7), and the high-frequency vibration of the ultrasonic processing technology is used to improve the tool 90 by hammering and abrasion. The cutting performance of the workpiece 100 can effectively reduce the wear and tear of the cutting tool 90. In addition, it can also reduce the lateral component force as described in the prior art, thereby avoiding the deformation of the workpiece 100, thereby improving the quality of processing; in addition, the use of ultrasonic The high-frequency vibration of the processing technology can also replace the irregular self-excited vibration of the workpiece 100 blanks mentioned in the previous technology, avoiding the influence of the irregular self-excited vibration of the workpiece 100 blanks by the machine, thereby improving the processing quality; Also, because in the machining process, the plurality of cutting edge portions 92 are the only positions in contact with the workpiece 100, the cutting edge portion of the tool 90 is set to have the predetermined angle of inclination, which is to avoid other slant angles of the tool 90. Parts interfere with the workpiece 100 , resulting in poor processing quality of the workpiece 100 .

如圖1、3、4及7所示,在本較佳實施例中,該第二位移單元31包含一迴轉盤311及一轉軸313,該迴轉盤311係設於該轉軸313並受其驅動,該承載單元33係固設於該迴轉盤311,藉此當該轉軸313驅動該迴轉盤311轉動,可調整該工件100相對該刀具90的角度。在其他較佳實施例中,該第二位移單元31依移動方向的需求,將該第二位移單元31設置如該第一位移單元21為該X、Y、Z軸向導軌211、213、215,故該第二位移單元31之實施型態,不僅以本較佳實施例為限。As shown in Figures 1, 3, 4 and 7, in this preferred embodiment, the second displacement unit 31 includes a rotary disc 311 and a rotating shaft 313, and the rotary disc 311 is arranged on the rotating shaft 313 and driven by it The carrying unit 33 is fastened to the rotary disk 311 , so that when the rotating shaft 313 drives the rotary disk 311 to rotate, the angle of the workpiece 100 relative to the tool 90 can be adjusted. In other preferred embodiments, the second displacement unit 31 is set as the first displacement unit 21 as the X, Y, Z axis guide rails 211, 213, 215 according to the requirements of the moving direction. , so the implementation of the second displacement unit 31 is not limited to this preferred embodiment.

此外,在本較佳實施例中,該工件100係以齒輪為例,而該刀具90依加工需求也設置為呈環狀、具有該外表面91及形成有該複數刃口部92等技術特徵。在其他較佳實施例中,該工件100亦可為其他造型之工件100,而該刀具90如前述段落所述,能依加工需求來選擇使用不同外型的該刀具90,因此,該工件100及該刀具90之實施型態,不僅以本較佳實施例為限。In addition, in this preferred embodiment, the workpiece 100 is an example of a gear, and the tool 90 is also configured to be ring-shaped according to processing requirements, has the technical features such as the outer surface 91 and the plurality of cutting edges 92 formed therein . In other preferred embodiments, the workpiece 100 can also be a workpiece 100 of other shapes, and the cutting tool 90 can be selected to use different shapes of the cutting tool 90 according to processing requirements, so the workpiece 100 And the implementation form of the cutter 90 is not limited to this preferred embodiment.

如圖2所示,該控制裝置40電性連接該刀具台20及該承載台30,藉以控制該刀具台20及該承載台30之作動。As shown in FIG. 2 , the control device 40 is electrically connected to the tool table 20 and the carrying table 30 to control the movement of the tool table 20 and the carrying table 30 .

如圖2及4所示,在本較佳實施例中,該控制裝置40係藉由齒輪嚙合原理計算該刀具90及該工件100的加工路徑,藉此控制該固定單元23及該承載單元33位移至定位,且該刀具90及該工件100則以固定比例旋轉。在其他較佳實施例中,當該工件100並非齒輪的狀況下,可依需求而改變計算該刀具90及該工件100加工路徑的方式,故該控制裝置40計算該刀具90及該工件100加工路徑的方式,不僅以本較佳實施例為限。As shown in Figures 2 and 4, in this preferred embodiment, the control device 40 calculates the machining path of the tool 90 and the workpiece 100 by the principle of gear meshing, thereby controlling the fixing unit 23 and the carrying unit 33 is displaced to position, and the tool 90 and the workpiece 100 are rotated at a fixed ratio. In other preferred embodiments, when the workpiece 100 is not a gear, the way of calculating the machining path of the tool 90 and the workpiece 100 can be changed according to requirements, so the control device 40 calculates the machining path of the tool 90 and the workpiece 100 The way of the path is not limited to this preferred embodiment.

如圖2所示,該電源50電性連接該控制裝置40、該刀具台20及該承載台30,提供所需之電力。As shown in FIG. 2 , the power supply 50 is electrically connected to the control device 40 , the tool table 20 and the carrier table 30 to provide required power.

以上說明本發明一較佳實施例所提供之工件加工裝置的結構,以下接續說明本發明一較佳實施例所提供之工件加工裝置的使用狀態。The structure of the workpiece processing device provided by a preferred embodiment of the present invention has been described above, and the use status of the workpiece processing device provided by a preferred embodiment of the present invention will be described below.

如圖4-7所示,欲加工該工件100時,使用者係將該工件100固定於該承載單元33,其後藉由該控制裝置40將設於該固定單元23之刀具90及固定於該承載單元33之工件100調整至對應的位置,並計算該刀具90及該工件100的加工路徑,令該刀具90及該工件100依固定比例旋轉,其中,該固定單元23係藉由該二X軸向導軌211、該二Y軸向導軌213及該二Z軸向導軌215進行X、Y及Z之軸向移動,進而使該刀具90能夠環繞該工件100移動,而該承載單元33則係藉由設於該迴轉盤311,在該迴轉盤311受該轉軸313驅動後,得以調整該工件100相對該刀具90的角度;完成該刀具90及該工件100的定位後,依照該控制裝置40預先計算好的加工路徑,藉由該超音波震動件35之震動,該工件100隨之震動,進而讓該刀具90與該工件100依固定比例旋轉進行切削,完成該工件100之加工。As shown in Figures 4-7, when the workpiece 100 is to be processed, the user fixes the workpiece 100 on the carrying unit 33, and then uses the control device 40 to set the tool 90 on the fixing unit 23 and fix it on the The workpiece 100 of the carrying unit 33 is adjusted to the corresponding position, and the machining path of the tool 90 and the workpiece 100 is calculated, so that the tool 90 and the workpiece 100 are rotated according to a fixed ratio. The X-axis guide rail 211, the two Y-axis guide rails 213 and the two Z-axis guide rails 215 perform axial movement in X, Y and Z, so that the tool 90 can move around the workpiece 100, and the carrying unit 33 By being installed on the rotary disc 311, after the rotary disc 311 is driven by the rotating shaft 313, the angle of the workpiece 100 relative to the tool 90 can be adjusted; after the positioning of the tool 90 and the workpiece 100 is completed, according to the control device 40 The pre-calculated machining path, through the vibration of the ultrasonic vibrating element 35, the workpiece 100 vibrates accordingly, and then the tool 90 and the workpiece 100 are rotated at a fixed ratio for cutting, and the machining of the workpiece 100 is completed.

藉此,本發明提供之一種工件加工裝置,藉由承載單元具有超音波震動件之技術特徵,相較於先前技術,能有效減少側向分力,進而避免工件變形,進而提升加工的品質。Therefore, the present invention provides a workpiece processing device. The bearing unit has the technical characteristics of an ultrasonic vibrating element. Compared with the prior art, the lateral component force can be effectively reduced, thereby avoiding deformation of the workpiece, thereby improving the processing quality.

此外,本發明提供之一種工件加工裝置,藉由承載單元具有超音波震動件之技術特徵,相較於先前技術,能避免工件受到機台無規律的自激震動影響,進而提升加工品質。In addition, the workpiece processing device provided by the present invention can prevent the workpiece from being affected by the irregular self-excited vibration of the machine, thereby improving the processing quality, because the bearing unit has the technical characteristics of an ultrasonic vibrating element.

還有,本發明提供之一種工件加工裝置,藉由承載單元具有超音波震動件之技術特徵,錘擊與磨蝕的效果提升刀具對工件切削的效能,能有效減少該刀具的耗損。In addition, the present invention provides a workpiece processing device. The bearing unit has the technical characteristics of an ultrasonic vibrating element. The effects of hammering and abrasion can improve the cutting performance of the tool on the workpiece, and can effectively reduce the wear and tear of the tool.

10:工件加工裝置 20:刀具台 21:第一位移單元 211:X軸向導軌 213:Y軸向導軌 215:Z軸向導軌 23:固定單元 30:承載台 31:第二位移單元 311:迴轉盤 313:轉軸 33:承載單元 35:超音波震動件 40:控制裝置 50:電源 D:震動方向 90:刀具 91:外表面 92:刃口部 100:工件 10: Workpiece processing device 20: tool table 21: The first displacement unit 211: X-axis guide rail 213: Y-axis guide rail 215: Z-axis guide rail 23: fixed unit 30: carrying platform 31: The second displacement unit 311: Turntable 313: Shaft 33: Bearing unit 35: Ultrasonic vibration parts 40: Control device 50: power supply D: vibration direction 90: Knife 91: Outer surface 92: cutting edge 100: workpiece

圖1係本發明一較佳實施例之方塊圖。 圖2係本發明一較佳實施例之立體圖。 圖3係本發明一較佳實施例之前視圖。 圖4如圖3視角之局部放大圖。 圖5係本發明一較佳實施例之側視圖。 圖6係本發明一較佳實施例之使用狀態示意圖,顯示本發明裝設有刀具及工件的狀態。 圖7係本發明一較佳實施例之使用狀態示意圖,顯示本發明刀具對工件加工的狀態。 Fig. 1 is a block diagram of a preferred embodiment of the present invention. Fig. 2 is a perspective view of a preferred embodiment of the present invention. Fig. 3 is a front view of a preferred embodiment of the present invention. Figure 4 is a partially enlarged view from the perspective of Figure 3 . Fig. 5 is a side view of a preferred embodiment of the present invention. Fig. 6 is a schematic view of the use state of a preferred embodiment of the present invention, showing the state that the present invention is equipped with a cutting tool and a workpiece. Fig. 7 is a schematic diagram of the use state of a preferred embodiment of the present invention, showing the state of the cutting tool of the present invention processing a workpiece.

10:工件加工裝置 20:刀具台 21:第一位移單元 211:X軸向導軌 213:Y軸向導軌 215:Z軸向導軌 23:固定單元 30:承載台 31:第二位移單元 311:迴轉盤 313:轉軸 33:承載單元 35:超音波震動件 10: Workpiece processing device 20: tool table 21: The first displacement unit 211: X-axis guide rail 213: Y-axis guide rail 215: Z-axis guide rail 23: fixed unit 30: carrying platform 31: The second displacement unit 311: Turntable 313: Shaft 33: Bearing unit 35: Ultrasonic vibration parts

Claims (2)

一種工件加工裝置,其包含:一刀具台,具有一第一位移單元及一固定單元,該固定單元係設於該第一位移單元,並藉由該第一位移單元移動,該固定單元係用以固定一刀具,且該刀具係被固定呈直向;一承載台,具有一第二位移單元及一承載單元,該承載單元設於該第二位移單元,該第二位移單元包含一迴轉盤及一轉軸,該迴轉盤之盤面係呈直向,且該迴轉盤係設於該轉軸並受其驅動,該承載單元係設於該迴轉盤,該承載單元係藉由該第二位移單元移動,該承載單元係用以固定一工件,且該承載單元具有一超音波震動件,該超音波震動件產生一震動方向,當該工件與該刀具接觸,藉由該超音波震動件所產生之震動方向令該工件隨該震動方向震動,進而令該刀具對該工件進行切削;一控制裝置,電性連接該刀具台及該承載台,藉以控制該刀具台及該承載台之作動;以及一電源,電性連接該控制裝置、該刀具台及該承載台,提供所需之電力。 A workpiece processing device, which includes: a tool table with a first displacement unit and a fixed unit, the fixed unit is arranged on the first displacement unit, and is moved by the first displacement unit, the fixed unit is used to fix a tool, and the tool is fixed in a straight direction; a carrying platform has a second displacement unit and a carrying unit, the carrying unit is arranged on the second displacement unit, and the second displacement unit includes a rotary disc and a rotating shaft, the disk surface of the rotating disk is straight, and the rotating disk is arranged on the rotating shaft and driven by it, the bearing unit is arranged on the rotating disk, and the bearing unit is moved by the second displacement unit , the carrying unit is used to fix a workpiece, and the carrying unit has an ultrasonic vibrating element, the ultrasonic vibrating element generates a vibration direction, when the workpiece contacts the tool, the vibration generated by the ultrasonic vibrating element The vibration direction makes the workpiece vibrate with the vibration direction, and then the tool cuts the workpiece; a control device is electrically connected to the tool table and the carrier table, so as to control the movement of the tool table and the carrier table; and a A power supply is electrically connected to the control device, the tool table and the carrying table to provide the required power. 如請求項1所述之工件加工裝置,其中:該第一位移單元包含至少一X軸向導軌、至少一Y軸向導軌及至少一Z軸向導軌,該固定單元係沿該至少一X、Y、Z軸向導軌移動。 The workpiece processing device according to claim 1, wherein: the first displacement unit includes at least one X-axis guide rail, at least one Y-axis guide rail, and at least one Z-axis guide rail, and the fixing unit is along the at least one X, Y, Z axis guide rail moves.
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CN109396972A (en) * 2019-01-07 2019-03-01 东北大学 A kind of ultrasonic wave added optics hard brittle material rubbing down system of processing and method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109396972A (en) * 2019-01-07 2019-03-01 东北大学 A kind of ultrasonic wave added optics hard brittle material rubbing down system of processing and method

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