TWI783429B - Apparatus for recycling photovoltaic module through thermal cracking of plasma - Google Patents

Abstract

An apparatus is provided for recycling photovoltaic module. The apparatus comprises a vacuum chamber, an automatic control module, a pumping and vacuum measurement module, and an inductively-coupled plasma module. The present invention puts a plasma torch in a vacuum state through thermal cracking of plasma. After heating, melting, and gasifying materials to be processed, a high-energy plasma source continuously applies energy to the materials to be processed for processing high-temperature decomposition of organic substances in the absence of oxygen. Thereby, the exposure to atmosphere is subsided for the materials to be processed. Not only the problem of air pollution treatment is solved for nitrogen oxides, sulfur oxides, suspended particles, etc. produced by pyrolysis; but also the problems of solvent volatilization and sewage treatment caused by EVA chemical treatment disappear. Through the control of the process parameters, organic matters are completely carbonized to avoid the problems of solvent volatilization and sewage treatment caused by wet chemical treatment of EVA. Thus, the present invention avoids the above problems regarding anaerobic thermal cracking of inductively-coupled plasma while collecting reduced carbon materials for reuse.

Description

Plasma pyrolysis recovery device for solar photoelectric modules

The invention relates to a solar photoelectric module plasma thermal cracking recovery device, especially relates to a solar photoelectric module that can be fully recycled and reused without nitrogen oxides, sulfur oxides, suspended particles and other air pollutants. , and no sewage treatment problems.

Renewable energy is an alternative energy to ensure the sustainable development of nature, and solar energy is one of the important goals. Therefore, all countries in the world promote the installation of photovoltaic modules, which promotes the rapid growth of photovoltaic installations, and the growth trend also reflects the future. The increase in the number of waste solar photovoltaic modules will inevitably face a huge problem of solar photovoltaic module waste disposal in the future. However, there is currently no suitable treatment technology for waste solar photovoltaic modules in China. They can only be disposed of by landfill, which not only costs high And it will cause environmental burden. If the waste solar battery modules can be recycled, the lower the recycling fee and the higher the price of recycled resources, the solar photovoltaic module recycling industry can continue to operate and develop together with the photovoltaic industry .

The structure of the current photovoltaic module 90 is shown in FIG. 6, which consists of glass 91, encapsulation material (Ethylene vinyl acetate, EVA) 92, solar cell 93, encapsulation material (EVA) 92 and back The sandwich structure formed by pressing the plates 94, and then the aluminum frame 95 and the junction box 96 are mounted on the outside. Among them, EVA is a material that tightly bonds glass, solar cells, and backplanes together. Because EVA has good weather resistance, it can provide solar photovoltaic modules with a service life of up to 20 years. Therefore, EVA has become one of the most difficult materials to process when recycling and decomposing solar photovoltaic modules.

The recycling process of waste solar photovoltaic modules usually first undergoes mechanical dismantling to remove the aluminum frame and junction box. Since the solar cells and valuable metals are still tightly covered by glass, EVA and backplane, the glass must be disassembled in detail According to the current main recycling methods, recycling materials such as solar cell wafers and metals can be divided into crushing method (dry recycling), solution method (wet recycling) and heat treatment method.

The crushing method directly crushes the module (glass/EVA/solar cell/EVA/backboard) with rollers, hammers, centrifugal wind, etc., and then sieves the crushed parts according to different particle sizes, and finally Color or density sorting, color sorting can separate glass and metal according to transparency, and density can sort inorganic substances (glass, metal, silicon, etc.) and organic substances (EVA, backplane, etc.) according to size. Although the crushing method requires less investment in equipment, the price of recycled resources is lower because EVA will still adhere to glass and solar cells after treatment.

The solution method is mainly to use the solution method to dissolve the EVA or reduce its viscosity (usually to dissolve it) for the remaining part (EVA/solar cell/EVA) after the glass and the back plate are ground. The choice of solvent is acid or alkali. With organic solvents, etc., after the EVA is removed, the battery sheet can be collected. However, the main problem of this solution method is that it uses a chemical solution to process EVA. After the module is processed, an additional procedure is required to dispose of the waste solution. Although it can be recovered and reused by filtration, centrifugation, or distillation, the extra time or energy will be spent. resulting in increased processing costs.

Before heat treatment, it is usually necessary to remove the backsheet of solar photovoltaic modules, because most of the backsheets are composed of fluorine-containing polymers, and fluorine-containing polymers may produce substances that are harmful to biology and the environment during heat treatment; After removing the remaining part of the back sheet (glass/EVA/solar cell/EVA), it can be placed in a heat treatment furnace to thermally decompose the EVA. After the EVA is decomposed, the glass and cells are collected separately. the heat The treatment method uses thermal energy to crack or burn the EVA in the solar photovoltaic module. However, after the EVA is thermally decomposed, it may produce organic waste gas, acid gas or dioxin, etc., and the metal components in the solar photovoltaic module may also be discharged due to high temperature. , so the subsequent exhaust gas needs to be handled carefully.

In view of the increasing number of solar photovoltaic modules being scrapped, it is necessary to face up to this problem in advance. At that time, the recycling technology and procedures must reach the stage where waste can be recycled and reused. Recycling and proposing effective solutions and technical countermeasures can not only create circular economic benefits, but also reduce the burden on the environment. Therefore, it is necessary to develop a set of inventions that can solve the related environmental problems and the technical shortcomings of the prior art.

The main purpose of the present invention is to overcome the above-mentioned problems encountered in the prior art and provide a vacuum thermal plasma pyrolysis technology that puts the plasma torch in a vacuum state and heats, melts and vaporizes the material to be treated. The high-energy plasma source continuously applies energy to the material to be treated to cause the pyrolysis reaction of the organic substance in the absence of oxygen, in addition to reducing the nitrogen oxides, sulfur oxides, and suspended particles produced by the pyrolysis of the material to be treated when it is exposed to the atmosphere In addition to the treatment of air pollutants, there are no solvent volatilization and sewage treatment problems caused by EVA chemical treatment; and, through the control of process parameters, organic matter can be completely carbonized to avoid solvent volatilization and sewage treatment caused by chemical wet treatment of EVA To deal with the problem, it can further collect the reduced carbon materials and reuse the solar photovoltaic module plasma pyrolysis recovery device.

To achieve the above purpose, the present invention is a solar photoelectric module plasma thermal cracking recovery device, which includes: a vacuum chamber, which is used for inductively coupled plasma anaerobic thermal cracking reaction, and is arranged in a first On the box body, the vacuum cavity has a corresponding first end and a second end, and the first end is provided with A chamber door, the bottom end of the chamber door is connected with a slide rail, the slide rail is arranged on a second box body, and can be used for the sideways reciprocating sliding of the vacuum chamber body to open or close the chamber door, and the chamber door has a The loading platform, on which at least one material to be processed is placed, can automatically transport and carry the material to be processed into the vacuum chamber, wherein the material to be processed is discarded or discarded after removing the aluminum frame and the junction box Decommissioned photovoltaic module (photovoltaic module); an automatic control module, set in the second box, which includes a programmable logic controller (Programmable Logic Controller, PLC) and a control interface unit, the programmable logic The controller is used for the user to switch the automatic control module to the automatic operation mode or the manual operation mode. The control interface unit is equipped with a fool-proof mechanism for immediate abnormality and emergency stop, so as to prevent misoperation and safety protection during the entire operation period; The air extraction and vacuum measurement module includes a vacuum valve, a cavity vacuum gauge, a process vacuum gauge, a pressure regulating valve and an air extraction control solenoid valve arranged on the vacuum chamber, and the vacuum chamber There is an air intake control solenoid valve between the cavity vacuum gauge and a low vacuum pumping line automatic pressure relief solenoid valve between the vacuum cavity and the process vacuum gauge to quickly and accurately control the set pressure function , and has a constant pressure process control pressure function option; and an inductively coupled plasma module, which includes an induction coil and a radio frequency plasma power generator, the induction coil surrounds the vacuum cavity, and the radio frequency plasma power supply generates The device is arranged in the first box, and is coupled to the induction coil through an automatic matching controller to drive the induction coil to generate inductively coupled plasma (ICP). The pyrolysis reaction concentrates the high-energy heat source on the waste or decommissioned solar photovoltaic module, cracks the packaging material and plastic backplane of the waste or decommissioned photovoltaic module, and makes the silicon, metal, glass and carbon achieve the initial layering, Wherein the packaging material is vinyl acetate polymer (Ethylene vinyl acetate, EVA).

In the above embodiment of the present invention, the vacuum cavity has a diameter of 420mm±20% and a length of 1000mm±20%.

In the above-mentioned embodiment of the present invention, the size of the vacuum chamber is set to be able to process several discarded or decommissioned solar photovoltaic modules having at least one dimension with a length of 600mm±20% and a width of 300mm or less.

In the above embodiments of the present invention, the material of the loading platform is a ceramic material made of alumina, zirconia, recrystallized silicon carbide or a combination thereof.

In the above embodiments of the present invention, the control interface unit includes an abnormal display light and an emergency stop button.

In the above-mentioned embodiment of the present invention, it further includes an electromagnetic wave shielding box, which is used to cover the vacuum cavity, the loading platform and the induction coil, so as to prevent the radio frequency from being emitted during the anaerobic pyrolysis reaction of the inductively coupled plasma. vent.

In the above embodiments of the present invention, the induction coil is a water-cooled inductive coupling coil electrode made of copper, and its covered area is set according to the size of the discarded or decommissioned photovoltaic module.

In the above-mentioned embodiment of the present invention, a carbon particle collector is further included, which is arranged on the second end of the vacuum chamber to collect the carbon material produced by thermal cracking.

In the above-mentioned embodiments of the present invention, the chamber vacuum gauge and the process vacuum gauge are digital vacuum pressure gauges, and their vacuum degrees range from 5×10 ⁻⁴ to 1000 Torr and 1 to 1000 Torr, respectively.

In the above embodiments of the present invention, the air extraction and vacuum measurement module has an air extraction capacity greater than 1200 L/min.

100: Solar photoelectric module plasma pyrolysis recovery device

1: Vacuum cavity

10: The first box

101: Windows

11: cavity door

12: slide rail

13: Riding platform

2: Automatic control module

20: The second box

21: Programmable logic controller

22: Control interface unit

221: Abnormal display light

222: Emergency stop button

3: Air extraction and vacuum measurement module

30: Electromagnetic wave shielding box

31: Vacuum valve

32:Cavity vacuum gauge

33: Process vacuum gauge

34: Pressure regulating valve

35: Air extraction control solenoid valve

36: Air intake control solenoid valve

37: Low vacuum pumping line automatic pressure relief solenoid valve

4: Inductively coupled plasma module

41: induction coil

42: RF plasma power generator

43: Automatic matching controller

5: Abandoned or decommissioned solar photovoltaic modules

6: Carbon Particle Collector

(usual part)

90:Solar photoelectric module

91: glass

92: Encapsulation material

93: solar cell

94: Backplane

95: aluminum frame

96: junction box

Fig. 1 is a schematic diagram of the three-dimensional structure of the present invention.

Figure 2 is a schematic diagram of the vacuum cavity and the automatic control module of the present invention.

Figure 3 is a schematic diagram of the air extraction and vacuum measurement module of the present invention.

Figure 4 is a schematic diagram of the inductively coupled plasma module of the present invention.

Fig. 5 is a schematic diagram of the carbon particle collector of the present invention.

Figure 6 is a schematic diagram of the current solar photovoltaic module structure.

In view of the current market share of solar energy is mainly dominated by monocrystalline silicon and polycrystalline silicon. Among them, the largest solar panels are crystalline silicon solar panels. The main components of standardized crystalline silicon solar panels are 67.4~74.2% glass, 10.3~17.3% aluminum frame, 9.6~11.3% EVA and plastic backplane, 2.6% ~3.4% silicon, and 1% other metals such as copper, silver, zinc, lead, etc. This invention is mainly aimed at the discarded or decommissioned photovoltaic modules after removing the aluminum frame and junction box. Therefore, glass, EVA and plastic backplanes, silicon, and metals (such as copper, silver, zinc, lead) will be the main The main object of the processing and recycling of materials.

Please refer to "Fig. 1 ~ Fig. 5", which are schematic diagrams of the three-dimensional structure of the present invention, schematic diagrams of the vacuum chamber and automatic control module of the present invention, schematic diagrams of the air extraction and vacuum measurement module of the present invention, A schematic diagram of the inductively coupled plasma module of the present invention, and a schematic diagram of the carbon particle collector of the present invention. As shown in the figure: the present invention is a solar photoelectric module plasma thermal cracking recovery device. The proposed vacuum thermal plasma thermal cracking technology puts the plasma torch in a vacuum state, and heats, melts and gasifies the materials to be treated. , The high-energy plasma source continues to apply energy to the material to be treated, so that the organic material undergoes a pyrolysis reaction in the absence of oxygen. Operating in a vacuum environment can reduce the treatment of air pollutants such as nitrogen oxides, sulfur oxides, and suspended particles produced by pyrolysis of materials to be treated in the atmosphere, and there is no EVA Solvent volatilization and sewage treatment problems caused by chemical treatment. Through the control of the process parameters, the organic matter can be completely carbonized, and the problems of solvent volatilization and sewage treatment caused by chemical wet treatment of EVA can be avoided; therefore, the inductively coupled plasma anaerobic pyrolysis technology proposed in the present invention has no above-mentioned problems, and can be collected and restored. Carbon material reuse. At present, a kilogram-level solar photoelectric module plasma pyrolysis recovery device has been completed. Its overall structure is shown in Figure 1, which mainly includes a vacuum chamber 1, an automatic control module 2, and an air extraction and vacuum measurement module. 3, and an inductively coupled plasma module 4 constitutes.

The implementation type structure of the above-mentioned vacuum chamber 1 is shown in FIG. 2. It is arranged on a first box 10, and it is used for inductively coupled plasma anaerobic pyrolysis reaction. The vacuum chamber 1 type is mainly replaced by quartz tubes and ceramic tubes. The diameter of the chamber is 420mm and the length is 1000mm. Or decommissioned photovoltaic modules (photovoltaic module)5. The vacuum chamber 1 has a corresponding first end and a second end, the first end is provided with a chamber door 11, the bottom end of the chamber door 11 is connected with a slide rail 12, and the slide rail 12 is arranged on a second box 20, the vacuum chamber 1 can be reciprocated sideways to open or close the chamber door 11. The chamber door 11 has a loading platform 13. The material of the loading platform 13 is ceramic materials, such as alumina, oxide Zirconium, recrystallized silicon carbide or combinations thereof, etc., the loading platform 13 is for placing at least one material to be processed. The size of the material to be processed is 600mm long, 300mm wide, and 5mm thick, and can be automatically transported to carry the material to be processed Into the vacuum chamber 1; wherein, the first box body 10 is provided with a movable switch window 101, and the material to be processed is the discarded or decommissioned solar photovoltaic module 5 after removing the aluminum frame and the junction box .

The implementation type structure of the automatic control module 2 is shown in FIG. 2 . The automatic control module 2 is disposed in the second box 20 and includes a Programmable Logic Controller (PLC) 21 and a control interface unit 22 . The programmable logic controller 21 is used For the user to switch the automatic control module 2 to automatic operation mode or manual operation mode, the control interface unit 22 is provided with a fool-proof mechanism for immediate abnormality and emergency stop, so as to prevent misoperation and safety protection during the entire operation period; , the control interface unit 22 includes an abnormal display light 221 and an emergency stop button 222 .

The implementation type structure of the air extraction and vacuum measurement module 3 is shown in FIG. 3 . The pumping power of the vacuum pumping system equipped in this device is mainly mechanical vacuum pump, with molecular pump, the pumping capacity is greater than 1200L/min. The pumping and vacuum measurement module 3 includes a vacuum valve 31 arranged on the vacuum chamber 1, a cavity vacuum gauge 32, a process vacuum gauge 33, a pressure regulating valve 34 and a pumping control solenoid valve 35, and the suction control solenoid valve 35 is a rough vacuum pneumatic angle valve. The cavity vacuum gauge 32 and the process vacuum gauge 33 are digital vacuum pressure gauges, and their vacuum degrees range from 5×10 ⁻⁴ to 1000 Torr and 1 to 1000 Torr respectively. An air intake control solenoid valve 36 is provided between the vacuum chamber 1 and the chamber vacuum gauge 32 , and a low-vacuum pumping line automatic pressure relief solenoid valve 37 is provided between the vacuum chamber 1 and the process vacuum gauge 33 , to quickly and accurately control the set pressure function, and there is a constant pressure process control function option.

The implementation type structure of the inductively coupled plasma module 4 is shown in FIG. 4 . The ICP module 4 includes an induction coil 41 and a radio frequency plasma power generator 42 . The induction coil 41 surrounds the vacuum chamber 1 and is a water-cooled induction coupling coil electrode made of copper. The area covered by the induction coil 41 is designed to cover an area of 640mm×340mm (inclusive) in accordance with the planned solar photoelectric module feed size. The following area. The RF plasma power generator 42 is installed in the first box 10, its maximum output power is 5kW, the output frequency is 13.56MHz, the output impedance is 50W, the cooling method is water cooling, and the flow rate is 6L/min. The automatic matching controller 43 has an input frequency of 13.56MHz, a rated power of 50W~5KW, and a cooling method of air cooling plus 2L/min water cooling. The RF plasma power supply generates The device 42 is coupled to the induction coil 41 through the automatic matching controller 43 to drive the induction coil 41 to generate inductively coupled plasma (ICP). If so, a brand new solar photovoltaic module plasma pyrolysis recovery device 100 is formed through the above disclosed process.

The solar photoelectric module plasma thermal cracking recovery device 100 further includes an electromagnetic wave shielding box 30, which is used to cover the vacuum chamber 1, the loading platform 13 and the induction coil 41, so as to prevent the inductively coupled electrical Radio frequency leakage during the anaerobic pyrolysis reaction of pulp.

The solar photoelectric module plasma thermal cracking recovery device 100 further includes a carbon particle collector 6, which is arranged on the second end of the vacuum chamber 1 to collect carbon materials generated by thermal cracking, as shown in Figure 5 Show.

When in use, the solar photovoltaic module plasma thermal cracking recovery device 100 of the present invention is mainly aimed at disposing of the discarded or decommissioned solar photovoltaic module 5 after removing the aluminum frame and junction box as materials to be processed, and putting it into the solar photovoltaic module 5. Photoelectric module plasma thermal cracking recovery device 100 uses inductively coupled plasma anaerobic thermal cracking reaction to concentrate high-energy heat source on the waste or decommissioned solar photovoltaic module 5 for direct heating with high thermal efficiency and can effectively crack the waste or decommissioned photovoltaic module 5. After decommissioning the packaging materials of solar photovoltaic module 5 - EVA and plastic backplane, the materials such as silicon, copper metal strips, glass and carbon are initially layered, and then the materials are collected by subsequent mechanical buoyancy sorting, Purification and refining recover valuable metals, molten glass is blown and drawn to make glass fiber raw materials, EVA is pyrolyzed to collect carbon materials.

From the above, it can be known that in order to enable solar photovoltaic modules to be recycled and reduce the impact of burial and improper disposal on the environment, the present invention develops an innovative recycling model for solar photovoltaic modules, and develops an arc for waste or decommissioned solar photovoltaic modules. Refining cycle technology, refining and purifying valuable metals from waste modules, template glass and then using high-temperature melt-blowing and spinning to make glass fiber raw materials. The developed module packaging material EVA inductively coupled plasma anaerobic pyrolysis technology can collect carbon materials, which can be beneficial to subsequent stabilization Disposal for reuse. Therefore, the present invention can solve the technological gap in the circular economy of the domestic optoelectronic industry, so that there is no need to worry about the future, and the norms for the sustainable growth of the optoelectronic semiconductor industry can be constructed.

To sum up, the present invention is a solar photoelectric module plasma thermal cracking recovery device, which can effectively improve the various shortcomings of the conventional ones. The technical features of the proposed technology are: EVA and plastic backplanes are cracked to produce carbon materials, and glass is melted and blown to produce fibers. 1. High-temperature refining of precious metals can fully recycle solar photovoltaic modules, and there is no problem of air pollutants such as nitrogen oxides, sulfur oxides, and suspended particles, and there is no problem of sewage treatment, which makes the production of the present invention more advanced , more practical, more in line with the needs of users, and indeed meet the requirements for patent applications for inventions, and file patent applications according to law.

But the above-mentioned ones are only preferred embodiments of the present invention, and should not limit the scope of the present invention; therefore, all simple equivalent changes and modifications made according to the patent scope of the present invention and the contents of the description of the invention , should still fall within the scope covered by the patent of the present invention.

100: Solar photoelectric module plasma pyrolysis recovery device

1: Vacuum cavity

10: The first box

101: Windows

11: cavity door

12: slide rail

13: Riding platform

2: Automatic control module

20: The second box

21: Programmable logic controller

22: Control interface unit

221: Abnormal display light

222: Emergency stop button

3: Air extraction and vacuum measurement module

30: Electromagnetic wave shielding box

31: Vacuum valve

32:Cavity vacuum gauge

33: Process vacuum gauge

34: Pressure regulating valve

35: Air extraction control solenoid valve

36: Air intake control solenoid valve

37: Low vacuum pumping line automatic pressure relief solenoid valve

4: Inductively coupled plasma module

41: induction coil

42: RF plasma power generator

5: Abandoned or decommissioned solar photovoltaic modules

Claims (10)

A solar photoelectric module plasma thermal cracking recovery device, comprising: a vacuum cavity, which is used for inductively coupled plasma anaerobic thermal cracking reaction, and is arranged on a first box, the vacuum cavity has Corresponding to the first end and the second end, the first end is provided with a chamber door, and the bottom end of the chamber door is connected with a slide rail, and the slide rail is arranged on a second box body, allowing the vacuum chamber body to laterally Sliding back and forth to open or close the chamber door, the chamber door has a loading platform on which at least one material to be processed can be placed, and the material to be processed can be automatically transported and carried into the vacuum chamber, wherein, The material to be processed is a waste or decommissioned solar photoelectric module (photovoltaic module) after the aluminum frame and junction box are removed; an automatic control module is set in the second box, which includes a programmable logic controller ( Programmable Logic Controller, PLC) and a control interface unit, the programmable logic controller is used for the user to switch the automatic control module to automatic operation mode or manual operation mode, the control interface unit is equipped with an immediate abnormality and emergency stop Foolproof mechanism, during the whole operation period, to prevent misoperation and safety protection; a pumping and vacuum measurement module, including a vacuum valve, a cavity vacuum gauge, a process vacuum gauge, a A pressure regulating valve and an air extraction control solenoid valve, and an air intake control electromagnetic valve is provided between the vacuum chamber and the chamber vacuum gauge, and a low vacuum air extraction pipeline is provided between the vacuum chamber and the process vacuum gauge The automatic pressure relief solenoid valve is used to quickly and accurately control the set pressure function, and has the option of constant pressure process control pressure function; and an inductively coupled plasma module, which includes an induction coil and a radio frequency plasma power generator, The induction coil surrounds the vacuum cavity, the radio frequency plasma power generator is arranged in the first box, and is coupled to the induction coil through an automatic matching controller to drive the induction coil to generate inductively coupled plasma ( inductively coupled plasma, ICP), using the inductively coupled plasma anaerobic pyrolysis reaction, so that The high-energy heat source concentrates the waste or decommissioned solar photovoltaic module, cracks the packaging material and plastic backplane of the waste or decommissioned photovoltaic module, and makes the silicon, metal, glass and carbon achieve preliminary layering, among which the packaging material It is vinyl acetate polymer (Ethylene vinyl acetate, EVA). According to the solar photoelectric module plasma thermal cracking recovery device described in item 1 of the scope of the patent application, the vacuum chamber has a diameter of 420mm±20% and a length of 1000mm±20%. According to the solar photoelectric module plasma thermal cracking recovery device described in item 1 of the scope of the patent application, the size of the vacuum chamber is set to be able to handle several with at least one size with a length of 600mm ± 20% and a width It is a discarded or decommissioned photovoltaic module with a thickness of less than 300mm. According to the solar photovoltaic module plasma thermal cracking recovery device described in item 1 of the scope of patent application, the material of the loading platform is a ceramic material made of alumina, zirconia, recrystallized silicon carbide or a combination thereof By. According to the solar photovoltaic module plasma thermal cracking recovery device described in item 1 of the scope of the patent application, the control interface unit includes an abnormal display light and an emergency stop button. According to the solar photovoltaic module plasma thermal cracking recovery device described in item 1 of the scope of the patent application, it further includes an electromagnetic wave shielding box, which is used to cover the vacuum chamber, the loading platform and the induction coil, In order to prevent the leakage of radio frequency during the inductively coupled plasma anaerobic pyrolysis reaction. According to the solar photovoltaic module plasma thermal cracking recovery device described in item 1 of the scope of patent application, the induction coil is a water-cooled inductively coupled coil electrode made of copper, and its covered area is suitable for the waste or decommissioned solar photovoltaic module. It is set by the size of the group. The solar photoelectric module plasma thermal cracking recovery device described in item 1 of the scope of the patent application further includes a carbon particle collector, which is installed on the second end of the vacuum chamber to collect carbon materials generated by thermal cracking . According to the solar photoelectric module plasma thermal cracking recovery device described in item 1 of the scope of patent application, the chamber vacuum gauge and the process vacuum gauge are digital vacuum pressure gauges, and the vacuum degree ranges are 5×10 ^{- 4} ~1000Torr and 1~1000Torr. According to the solar photoelectric module plasma thermal cracking recovery device described in item 1 of the scope of the patent application, the air extraction and vacuum measurement module has an air extraction capacity greater than 1200L/min.

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