TWI780976B - A parallelism detection method and a parallelism detection device - Google Patents

Abstract

The invention relates to the technical field of detection and calibration, in particular to a parallelism detection method and a parallelism detection device. The parallelism detection method includes the following steps: providing a standard plane; selecting a target position on the plane to be measured, and performing multiple loop steps to obtain a plurality of test distances between the target position and the standard plane; determine whether a plurality of the test distances are all equal, if not, confirm that the plane to be tested is not parallel to the standard plane; the cycle step includes: rotating the plane to be tested by a preset angle, and obtaining the rotated the test distance between the target position and the standard plane. The invention improves the accuracy of parallelism detection between two planes, avoids the influence of human subjective factors on the detection result, and has simple operation and high detection efficiency.

Description

Parallelism detection method and parallelism detection device

The invention relates to the technical field of detection and calibration, in particular to a parallelism detection method and a parallelism detection device.

In semiconductor manufacturing and application technology, it is often necessary to detect the parallelism between two planes to ensure the smooth implementation of subsequent manufacturing processes or normal use of semiconductor devices. For example, during the installation of mechanical components, it is necessary to ensure that the contact surfaces of the two components are parallel to ensure the stability of the mechanical structure after installation; another example, in the wafer bonding process, it is necessary to ensure that the two wafers to be bonded The opposite surfaces are parallel to ensure the smooth implementation of the bonding process and the bonding strength between the two wafers after bonding. However, at present, it is only possible to confirm whether the two planes are parallel through subjective visual inspection by engineers, which will inevitably bring about the influence of human subjective factors. The way of human visual inspection is not only time-consuming, laborious, inefficient, but also less accurate.

Therefore, how to improve the accuracy of the parallelism detection between two planes and avoid the influence of human subjective factors on the parallelism detection result is currently a technical problem to be solved.

The invention provides a parallelism detection method and a parallelism detection device, which are used to solve the problem of low accuracy in detecting the parallelism of two planes in the prior art, and avoid the influence of human subjective factors on the parallelism detection result.

In order to solve the above problems, the invention provides a parallelism detection method, comprising the following steps:

Provide a standard plane;

Selecting a target position on the plane to be measured, and performing multiple loop steps to obtain a plurality of test distances between the target position and the standard plane;

judging whether a plurality of the test distances are equal, if not, confirming that the plane to be measured is not parallel to the standard plane;

The cycle steps include:

The plane to be measured is rotated by a preset angle, and the test distance between the rotated target position and the standard plane is obtained.

Optionally, in a direction along the standard plane pointing to the plane to be measured, the projection of the plane to be measured is completely located in the standard plane.

Optionally, before performing the multiple cycle steps, the following steps are also included:

A sensor is fixed at the target position, and the sensor is used to detect the distance between the target position and the standard plane.

Optionally, the sensor is a laser sensor.

Optionally, the sensor emits detection light to the standard plane along a direction perpendicular to the plane to be measured; or,

The sensor emits detection light to the standard plane along a direction inclined by a threshold angle relative to the plane to be measured, and the threshold angle is greater than 90 degrees.

Optionally, the cyclic steps include:

Rotate the plane to be measured by a preset angle, and obtain the test distance between the rotated target position and the standard plane;

Counting the total angle value of the rotated plane to be measured;

Judging whether the total angle value is greater than or equal to 360 degrees, if yes, ending the loop step.

In order to solve the above problems, the present invention also provides a parallelism detection device, comprising:

standard plane;

A bracket, the first end of which is used to fix a plane to be measured;

a driving module, connected to the second end of the bracket, for driving the bracket to rotate;

The processing module is used to control the driving module to rotate the bracket multiple times, and obtain the test distance between a target position on the plane to be measured and the standard plane after each rotation;

The judging module is used to judge whether the plurality of test distances are equal, and if not, confirm that the plane to be tested is not parallel to the standard plane.

Optionally, in a direction along the standard plane pointing to the plane to be measured, the projection of the plane to be measured is completely located in the standard plane.

Optionally, the processing module includes:

The sensor is used to fix the target position on the plane to be measured.

Optionally, the sensor is a laser sensor.

Optionally, the sensor emits detection light to the standard plane along a direction perpendicular to the plane to be measured; or,

The sensor emits detection light to the standard plane along a direction inclined by a threshold angle relative to the plane to be measured, and the threshold angle is greater than 90 degrees.

Optionally, the processing module is further configured to count the total angle value of the rotated plane to be measured after controlling the driving module to rotate the bracket each time, and determine whether the total angle value is greater than or equal to 360 degrees, if so, then end the cycle step.

In the parallelism detection method and parallelism detection device provided by the present invention, by rotating the plane to be measured multiple times, the test distance between the same target position on the plane to be measured and the standard plane is obtained after each rotation, and passed Judging whether the test distances acquired multiple times are equal to detect whether the plane to be measured is parallel to the standard plane, improves the accuracy of parallelism detection between the two planes, avoids the influence of human subjective factors on the detection results, and Simple operation and high detection efficiency.

The specific implementations of the parallelism detection method and the parallelism detection device provided by the present invention will be described in detail below in conjunction with the drawings.

This specific embodiment provides a parallelism detection method. FIG. 1 is a flow chart of the parallelism detection method in the specific embodiment of the present invention, and FIGS. 2A to 2F are schematic diagrams of the parallelism detection process in the specific embodiment of the present invention. As shown in Fig. 1 and Fig. 2A to Fig. 2F, the parallelism detection method provided in this specific embodiment includes the following steps:

Step S11 , providing a standard plane 20 .

Specifically, the standard plane 20 should have a flat surface, so as to facilitate the subsequent measurement of the distance between the standard plane 20 and the plane 21 to be measured. In order to simplify the operation steps, a wall is used as the standard plane 20 in this embodiment. During the process of parallelism detection, the position of the standard plane 20 is fixed.

Step S12, selecting a target position 211 on the plane to be measured 21, and performing multiple loop steps to obtain a plurality of test distances between the target position 211 and the standard plane 20; the loop steps include:

Rotate the plane 21 to be measured by a preset angle, and obtain the test distance between the rotated target position 211 and the standard plane 20 .

Optionally, in a direction along the standard plane 20 pointing to the plane 21 to be measured, the projection 24 of the plane to be measured 21 is completely located in the standard plane 20 .

FIG. 2A is a side view showing the relative positional relationship between the standard plane 20 and the plane to be measured 21 , and FIG. 2B is a top view showing the relative size between the standard plane 20 and the plane to be measured 21 . 2C to 2F are schematic diagrams when detecting the parallelism between the plane 21 to be measured and the standard plane 20 . Specifically, as shown in FIG. 2C, the plane 21 to be measured is located outside the standard plane 20, and there is a certain distance between the plane 21 to be measured and the standard plane 20, that is, the plane to be measured 21 No contact with said standard plane 20. The size of the standard plane 20 should be greater than the size of the plane to be measured 21, so that the projection 24 of the plane to be measured 21 pointing to the direction of the plane to be measured 21 along the standard plane 20 is completely located in the standard plane 20 Inside. The relative dimensional relationship between the standard plane 20 and the plane to be measured 21 can be set according to actual needs by those skilled in the art. For example, the size of the standard plane 20 can be the size of the plane to be measured. 2 to 10 times the size of the measuring plane 21 .

The plane to be measured 21 described in this specific embodiment may be any plane that requires parallelism calibration. The target position 211 can be any position on the plane to be measured 21, because when the plane to be measured 21 is parallel to the standard plane 20, the point at any position on the plane to be measured 21 will reach the standard plane 21. The distances of the plane 20 (that is, the vertical distance between any point on the plane 21 to be measured and the standard plane 20 ) are equal. In this specific embodiment, in order to facilitate measurement, the target position 211 can be selected at the corner of the plane to be measured 21, for example, when the plane to be measured 21 is a rectangle, the target position 211 can be the The position of any one of the four corners of the plane to be measured 21.

Optionally, before performing the multiple cycle steps, the following steps are also included:

A sensor is fixed at the target position 211 , and the sensor is used to detect the distance between the target position 211 and the standard plane 20 .

Optionally, the sensor is a laser sensor.

Specifically, during the entire detection process, the direction in which the sensor emits a test signal is fixed, and the test signal is used to detect the distance between the target position 211 and the standard plane 20 . In order to simplify the measuring steps of the distance between the plane to be measured 21 and the standard plane 20, a laser sensor can be fixed at the target position 211 of the plane to be measured 21, and the The standard plane 20 emits detection light to obtain the distance between the standard plane 20 and the target position 211 . In order to further improve the accuracy of parallelism detection, the accuracy of the laser sensor should be at least ±5 mm, for example, the accuracy of the laser sensor is ±3 mm.

Optionally, the sensor emits detection light to the standard plane 20 along a direction perpendicular to the plane 21 to be measured; or

The sensor emits detection light to the standard plane 20 in a direction inclined to the standard plane 20 by a threshold angle relative to the plane 21 to be measured, and the threshold angle is greater than 90 degrees.

For example, as shown in FIG. 2C, the sensor fixed at the target position 211 can emit detection light to the standard plane 20 along a direction perpendicular to the plane 21 to be measured. The dotted line in FIG. 2C The straight lines represent the detection rays emitted by the sensors located at different positions on the plane 21 to be measured. For another example, as shown in FIG. 2E, the sensor fixed on the target position 211 can emit detection light to the standard plane 20 inclined relative to the plane 21 to be measured, and the dotted line in FIG. 2E represents For the detection light emitted by the sensor at different positions on the plane 21 to be measured, the threshold angle β between the detection light and the plane to be measured may be greater than 90 degrees and less than or equal to 135 degrees . That is, it only needs to ensure that the direction of the detection light emitted by the sensor remains constant relative to the plane to be measured during the entire process of parallelism detection.

Optionally, the cyclic steps include:

Rotate the plane 21 to be measured by a preset angle, and obtain the test distance between the rotated target position 211 and the standard plane 20;

Counting the total angle value that the plane to be measured 21 has rotated;

Judging whether the total angle value is greater than or equal to 360 degrees, if yes, ending the loop step.

Rotating the plane to be measured 21 at a predetermined angle means that the plane to be measured 21 passes through the axis of the center of the plane to be measured 21 along the direction of the standard plane 20 pointing to the plane to be measured 21 by a preset angle. angle. Specifically, firstly, the test distance between the target position 211 and the standard plane 20 before rotation (the preset angle is 0 degrees at this time) is obtained as the first test distance. Carry out the first cycle step: rotate the plane to be measured 21 to a preset angle, the direction of rotation in the plane to be measured 21 can be as shown by the arrow in Figure 2D or Figure 2F, and obtain a preset angle of rotation Then the test distance between the target position 211 and the standard plane 20 is used as the second test distance; and it is judged whether the total angle of the plane to be measured 21 rotated by the first cycle step is greater than or equal to 360 degrees , if not, perform the second loop step; if yes, end the loop step. Carry out the second cycle step: continue to rotate the plane to be measured 21 by a preset angle from the position rotated in the first cycle step, the rotation direction is the same as that of the first cycle step, and obtain a rotation The test distance between the target position 211 and the standard plane 20 after the preset angle is used as the third test distance; and the plane to be measured 21 rotated by the first cycle step and the second cycle step is judged Whether the total angle (that is, the sum of the angles of the first cycle step rotation and the second cycle step rotation) is greater than or equal to 360 degrees, if not, perform the third cycle step; if so, end the cycle step. Carry out the third cycle step: continue to rotate the plane to be measured 21 by a preset angle from the position rotated in the second cycle step, the rotation direction is the same as that of the first cycle step, and obtain a rotation The test distance between the target position 211 and the standard plane 20 after the preset angle is used as the fourth test distance; and judge the rotation of the first cycle step, the second cycle step and the third cycle step Whether the total angle of the plane 21 to be measured (that is, the sum of the angles of the first cycle step rotation, the second cycle step rotation, and the third cycle step rotation) is greater than or equal to 360 degrees, if not, then proceed Fourth loop step; if yes, end the loop step. By analogy, until the plane to be measured 21 rotates a full circle, that is, the rotation track of the plane to be measured 21 can form a complete circle. The dotted circle on the standard plane 20 in FIG. 2D and FIG. 2F represents the rotation track of the projection 24 of the plane to be measured 21 on the standard plane 20 .

In the process of performing the cyclic steps, the angle of each rotation can be the same or different, and those with ordinary knowledge in the technical field can set it according to actual needs, for example, the higher the accuracy of parallelism, the higher the accuracy of a single rotation. the smaller the angle.

Step S13 , judging whether the plurality of test distances are equal, if not, confirming that the plane 21 to be tested is not parallel to the standard plane 20 .

In all the cyclic steps performed, the test distance between the rotated target position 211 and the standard plane 20 is obtained along the same direction. For example, they are all along the direction that the target position 211 is perpendicular to the standard plane 20 , or are all along the direction that the target position 211 is inclined by a threshold angle relative to the plane 21 to be measured.

Specifically, a plurality of test distances are obtained by executing the loop step multiple times, and if there are two test distances among the plurality of test distances whose values are not equal, it is considered that the plane to be tested 21 and The standard planes 20 are not parallel.

Not only that, but this specific embodiment also provides a parallelism detection device. Fig. 3 is a structural block diagram of a parallelism detection device in a specific embodiment of the present invention. The parallelism detection device provided in this specific embodiment can detect the parallelism between a plane to be measured and a standard plane by using the parallelism detection method shown in FIG. 1 , FIG. 2A to FIG. 2F . As shown in Fig. 1, Fig. 2A to Fig. 2F and Fig. 3, the parallelism detection device provided in this specific embodiment includes:

standard plane 20;

Support 22, the first end of described support 22 is used for fixing a plane 21 to be measured;

A driving module 23, connected to the second end of the bracket 22, for driving the bracket 22 to rotate;

The processing module 30 is used to control the driving module 23 to rotate the bracket 22 multiple times, and obtain the test between a target position 211 on the plane to be measured 21 and the standard plane 20 after each rotation. distance;

The judging module 31 is used for judging whether the plurality of test distances are equal, and if not, confirming that the plane 21 to be tested is not parallel to the standard plane 20 .

Specifically, the driving module 23 may include a multi-axial mechanical arm, and the driving module 23 drives the bracket 22 to rotate according to the control command of the processing module 30, and the rotation of the bracket 22 drives The rotation of the plane to be measured 21 realizes the acquisition of multiple test distances. The higher the precision of the multi-axial mechanical arm, the higher the accuracy of parallelism detection. For example, the accuracy of the multi-axis robotic arm should be at least ±3mm. By using a multi-axis mechanical arm, when it is detected that the plane 21 to be measured is not parallel to the standard plane 20, the position of the plane 21 to be measured can also be adjusted according to the measured multiple test distances .

Optionally, in a direction along the standard plane 20 pointing to the plane 21 to be measured, the projection 24 of the plane to be measured 21 is completely located in the standard plane 20 .

Optionally, the processing module 30 includes:

The sensor is used to fix the target position 211 on the plane 21 to be measured.

Optionally, the sensor is a laser sensor.

Optionally, the sensor emits detection light to the standard plane 20 along a direction perpendicular to the plane 21 to be measured; or,

The sensor emits detection light to the standard plane 20 in a direction inclined to the standard plane 20 by a threshold angle relative to the plane 21 to be measured, and the threshold angle is greater than 90 degrees.

Optionally, the processing module 30 is also used to count the total angle value that the plane to be measured 21 has rotated after controlling the driving module 23 to rotate the bracket 22 each time, and judge the total angle value. Whether the angle value is greater than or equal to 360 degrees, if so, then end the loop step.

The parallelism detection method and the parallelism detection device provided in this specific embodiment obtain the test distance between the same target position on the plane to be measured and the standard plane after each rotation by rotating the plane to be measured multiple times, And by judging whether the test distances obtained multiple times are equal to detect whether the plane to be tested is parallel to the standard plane, the accuracy of parallelism detection between the two planes is improved, and the influence of human subjective factors on the detection results is avoided. , and the operation is simple and the detection efficiency is high.

The above description is only the preferred embodiment of the present invention, and it should be pointed out that for those with ordinary knowledge in the technical field, some improvements and modifications can also be made without departing from the principles of the present invention, and these improvements and modifications should also be It is regarded as the protection scope of the present invention.

S11: Provide a standard plane S12: Select a target position on the plane to be measured, and perform multiple loop steps to obtain a plurality of test distances between the target position and the standard plane; the loop step includes: rotating the plane to be measured by one The angle is preset to obtain the test distance between the rotated target position and the standard plane. S13: judging whether a plurality of the test distances are equal, if not, confirming that the plane to be measured is not parallel to the standard plane 20: Standard plane 21: Plane to be measured 211: target location 22: Bracket 23: Driver module 24: projection 30: Processing Modules 31: Judgment module

Fig. 1 is the flowchart of parallelism detection method in the specific embodiment of the present invention; 2A to 2F are schematic diagrams of a specific embodiment of the present invention in the process of detecting parallelism; Fig. 3 is a structural block diagram of a parallelism detection device in a specific embodiment of the present invention.

S11: Provide a standard plane S12: Select a target position on the plane to be measured, and perform multiple loop steps to obtain a plurality of test distances between the target position and the standard plane; the loop step includes: rotating the plane to be measured by one The angle is preset to obtain the test distance between the rotated target position and the standard plane. S13: judging whether a plurality of the test distances are equal, if not, confirming that the plane to be measured is not parallel to the standard plane

Claims (12)

A method for detecting parallelism, comprising the steps of: providing a standard plane; selecting a target position on a plane to be measured, and performing a cycle step multiple times to obtain a test distance between multiple target positions and the standard plane ; and judging whether a plurality of the test distances are equal, if not, then confirming that the plane to be measured is not parallel to the standard plane; the cyclic steps include: rotating the plane to be measured at a preset angle, and obtaining the target position after rotation The test distance from the standard plane. The method for detecting parallelism as claimed in claim 1, wherein, in a direction along the standard plane to the plane to be measured, the projection of the plane to be measured is completely located in the standard plane. The method for detecting parallelism as described in Claim 1, wherein, before performing the step of multiple cycles, the following steps are further included: fixing a sensor at the target position, and the sensor is used to detect the target position and the standard plane the distance between. The parallelism detection method as described in Claim 3, wherein the sensor is a laser sensor. The parallelism detection method as described in claim 4, wherein the sensor emits detection light to the standard plane along a direction perpendicular to the plane to be measured; or, the sensor is inclined by one degree relative to the plane to be measured A detection ray is emitted toward the standard plane in a direction of a threshold angle, the threshold angle being greater than 90 degrees. The parallelism detection method as described in Claim 1, wherein the looping step includes: rotating the plane to be measured by the preset angle, obtaining the test distance between the rotated target position and the standard plane; counting the measured plane A total angle value of the plane has been rotated; and judging whether the total angle value is greater than or equal to 360 degrees, and if so, ending the loop step. A parallelism detection device, comprising: a standard plane; a bracket, a first end of the bracket is used to fix a plane to be measured; a driving module, connected to a second end of the bracket, used to drive the bracket to rotate ; a processing module, used to control the driving module to rotate the bracket multiple times, and obtain a test distance between a target position on the plane to be measured and the standard plane after each rotation; and a judgment module , for judging whether the multiple test distances are equal, if not, confirming that the plane to be tested is not parallel to the standard plane. The parallelism detection device according to claim 7, wherein, in a direction along the standard plane to the plane to be measured, the projection of the plane to be measured is completely located in the standard plane. The parallelism detection device as described in Claim 7, wherein the processing module includes: a sensor, which is used to fix the target position on the plane to be measured. The parallelism detection device as claimed in claim 9, wherein the sensor is a laser sensor. The parallelism detection device as described in Claim 9, wherein the sensor emits detection light to the standard plane along a direction perpendicular to the plane to be measured; The detection light is emitted to the standard plane in a direction inclined by a threshold angle of the plane to be measured, and the threshold angle is greater than 90 degrees. The parallelism detection device as described in claim 7, wherein the processing module is further configured to count a total angle value of the plane to be measured that has been rotated after each time the drive module is controlled to rotate the bracket, and judge Whether the total angle value is greater than or equal to 360 degrees, if yes, end a loop step.

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