TWI777373B - Cobalt-carbon gas trapping device and method thereof - Google Patents

Abstract

A cobalt-carbon gas trapping device, comprising a housing having a chamber formed inside; a heat generating part provided in the housing; an evaporation part being provided across the chamber of the housing, When the part is heated, the cobalt complex is oxidized and vapor-deposited while the surface is in contact with the cobalt complex; the cooling part cools the wall of the case, so that the carbon in contact with the inner surface of the case is compounded When the body is rapidly cooled, solidification and evaporation are guided; the interior of the chamber of the casing is heated by the heating element, so that the cobalt-carbon gas flowing into the chamber is separated into a cobalt composite and a carbon composite. For the separated cobalt Composites and carbon composites, differentiate and guide evaporation on the heated cobalt-evaporated part and the inner surface of the cooled casing.

Description

Cobalt-carbon gas trapping device and method thereof

The present invention relates to a manufacturing equipment for semiconductors or similar products, in particular to a cobalt-carbon gas trapping device, which can effectively trap cobalt-carbon gas as a by-product produced in a metal process.

Usually, the semiconductor manufacturing process roughly includes a pre-process (manufacturing process) and a post-process (assembly process). The so-called pre-process refers to the deposition of thin films on the wafer (Wafer) in various processing chambers (Chamber). Repeatedly The process of selectively etching the vapor-deposited film to process a specific pattern is the process of manufacturing semiconductor chips (Chip). And the process of assembling it into a finished product.

At this time, the process of depositing a thin film on the wafer or etching the thin film deposited on the wafer uses harmful gases such as Silane, Arsine, and boron chloride, and hydrogen gas in a processing chamber. The process gas is carried out at high temperature. During the above process, a large amount of harmful gas containing various flammable gases, corrosive foreign substances and toxic components is generated inside the processing chamber.

Therefore, semiconductor manufacturing equipment is provided with a scrubber, which purifies the exhaust gas discharged from the processing chamber at the rear end of a vacuum pump that sets the processing chamber in a vacuum state and discharges it to the atmosphere.

However, there is a problem in that the exhaust gas discharged from the processing chamber is in contact with the atmosphere, or when the surrounding temperature drops, it solidifies and turns into powder, and the powder is fixed to the exhaust line and raises the exhaust pressure and flows into the vacuum pump. This can cause vacuum pump failure, causing backflow of exhaust gas and contamination of wafers in the chamber.

Therefore, in order to solve the above-mentioned problems, as shown in FIG. 1 , a powder trapping device is provided between the processing chamber 10 and the vacuum pump 30 , which coagulates the exhaust gas discharged from the processing chamber 10 into a powder state.

In other words, as shown in FIG. 1 , the processing chamber 10 and the vacuum pump 30 are connected by a pumping pipe 60, and a trapping pipe 70 is provided in the pumping pipe 60, which is branched from the pumping pipe 60 and is provided to The reaction by-products generated in the chamber 10 are trapped and accumulated in powder form.

In the case of the conventional powder trapping device as described above, the unreacted gas generated during thin film deposition or etching inside the processing chamber 10 flows into the pumping pipe 60 having a relatively lower temperature atmosphere than the processing chamber 10 and solidifies into powder at the same time. The powder in the state is deposited on the collecting pipe 70 branched from the pumping pipe 60 and provided.

At this time, the reason why the collection pipe 70 is branched from the pumping pipe 60 is to prevent the powder from flowing into the vacuum pump 30 side. For reference, the unexplained symbol "9" in the drawing indicates powder.

However, in the case where the object to be captured is the cobalt-carbon gas generated in the metal process, there is a problem in that the capture efficiency is greatly reduced when using the reaction by-product powder capture device according to the related art. This is because the cobalt-carbon gas is formed from the cobalt complex and the carbon complex, and the cobalt complex and the carbon complex are immediately vapor-deposited into a cobalt-carbon gas state even if the deposition conditions of the cobalt complex and the carbon complex are greatly different from each other.

prior art literature

Patent Literature

(Patent Document 0001) Korean Registered Patent Publication No. 10-0862684 (2008.10.02)

Therefore, the present invention has been made in order to solve all the conventional problems as described above, and an object of the present invention is to provide a cobalt-carbon gas trapping device capable of removing cobalt-carbon, which is a by-product produced in a metal process, Gas is effectively trapped.

In order to achieve the above object, the cobalt-carbon gas trapping device according to the technical idea of the present invention is characterized in that, as a cobalt-carbon gas trapping device, a cobalt-carbon gas trapping device is used for manufacturing any one product in a product group including semiconductor products. At the same time, the cobalt-carbon gas generated in the metal process that is carried out can be trapped, including: a casing equipped with a chamber formed inside and equipped with an inflow port and an outflow port communicating with the chamber; A heat generating component provided in the casing, in order to heat the cobalt-carbon gas flowing into the chamber of the casing to a higher temperature than the temperature after the inflow, and raise the temperature inside the chamber of the casing, thereby guiding the separation of the cobalt-carbon gas It is a cobalt composite and a carbon composite; a cobalt vapor deposition member is provided across the cavity of the casing, and in the state of being heated by the heat generating member, the cobalt composite is oxidized and evaporated while making surface contact with the cobalt composite Plating; cooling member, which cools the carbon composite body in contact with the inner surface of the casing by cooling the wall of the casing, and at the same time guides solidification and evaporation; Heating is performed to separate the cobalt-carbon gas flowing into the chamber into cobalt composites and carbon composites, and for the separated cobalt composites and carbon composites, the cobalt-evaporated parts and the cooled casing are guided, respectively. The inner surface is evaporated.

Here, it is characterized in that the heat generating member heats the cobalt-carbon gas particles formed by the structure in which the cobalt composite is wrapped by the carbon composite at a temperature at which the cobalt composite is heated and expanded, thereby guiding the separation of the carbon composite and the cobalt composite, In order to oxidize and vaporize the cobalt composite, the cobalt vapor deposition member is heated to a temperature higher than the temperature inside the chamber of the case, and the inner surface of the case is cooled to a temperature that induces solidification and vapor deposition of the carbon composite. The temperature is sharply lower than the temperature of the cobalt-carbon gas after flowing into the chamber of the housing.

Moreover, it is characterized in that the cobalt vapor deposition member is composed of a metal lath as a plate having a mesh shape so that the cobalt composite body and the carbon composite body are in surface contact while passing from the upper side to the lower side.

In addition, it is characterized in that a plurality of cobalt vapor deposition members are arranged adjacent to each other and spaced up and down, and heat generating members are provided in the spaced gaps, so that the cobalt vapor deposition members can be heated in the vicinity of the heat generating members.

In addition, it is characterized in that the heat generating part includes: a wire-shaped heater arranged in a wire shape along the cobalt vapor deposition member; a heating contact piece arranged in a wing shape along the outer peripheral surface of the wire-shaped heater, so that the heating contact area for the cobalt composite body becomes big.

Furthermore, it is characterized in that the heating contact piece is continuously and wound in a spiral shape along the outer peripheral surface of the linear heater.

In addition, it is characterized by further comprising an auxiliary vapor deposition member provided across the chamber of the casing at a point spaced apart from the lower side of the cobalt vapor deposition member, and composited with cobalt that has not been vapor-deposited on the cobalt vapor deposition member but passed through. The cobalt composite body and the carbon composite body pass from the upper side to the lower side while the cobalt composite body and the carbon composite body pass from the upper side to the lower side. In surface contact, a plurality of auxiliary vapor deposition members are arranged adjacent to each other and spaced apart from each other, densely arranged at intervals narrower than those of the cobalt vapor deposition members, and heated to a surface temperature lower than the surface temperature of the cobalt vapor deposition members.

Moreover, it is characterized in that a plurality of cobalt vapor deposition members and auxiliary vapor deposition members are alternately provided in the chamber of the casing.

In addition, it is characterized in that the upper end of the outflow pipe provided at the outflow port protrudes upward from the bottom surface of the chamber of the case, thereby suppressing the outflow of the cobalt composite and the carbon composite that are not vapor-deposited in the chamber of the case. .

Moreover, it is characterized in that the wall of the casing is formed into a double-walled structure having an isolation space inside, and the cooling member is a cooling water injection pipe and a cooling water discharge pipe that allow cooling water to flow along the isolation space of the casing wall.

Moreover, it is characterized in that a plurality of vertically formed first guide partitions and second guide partitions are alternately provided along the peripheral direction of the housing in the isolation space formed inside the wall of the housing, and the first guide partitions The second guide partition is inclined downward to allow the cooling water to flow upward, thereby allowing the cooling water to zigzag in the isolation space inside the wall of the housing , guide the cooling water to flow in the surrounding direction of the casing.

In addition, it is characterized in that the upper surface of the casing is formed by an upper cover that can be opened and closed, and a cooling water flow hole is formed inside the upper cover, so that the cooling water is injected through the cooling water injection pipe and circulated in the peripheral direction, and then along the cooling water discharge pipe. discharge, thereby guiding the vapor deposition of the carbon composite in contact with the lower surface of the upper cover.

In addition, the cobalt-carbon gas trapping method of the present invention is characterized in that, as a cobalt-carbon gas trapping method, when manufacturing any one product in a product group including semiconductor products, it can The cobalt-carbon gas generated in the metal process is captured, and it heats the interior of the closed chamber. First, the cobalt-carbon gas flowing into the chamber is separated into a cobalt composite and a carbon composite, and the separated cobalt-carbon gas is separated. The cobalt complex and the carbon complex are separated and vapor-deposited, respectively.

Here, in order to separate the cobalt-carbon gas in the chamber into the cobalt complex and the carbon complex, the cobalt complex enclosed by the carbon complex is heated and expanded.

Furthermore, it is characterized in that the separated cobalt composite is oxidized and vapor-deposited by being brought into contact with the surface of a cobalt vapor deposition member heated to a temperature higher than the internal temperature of the chamber, The separated carbon composite is brought into contact with the surface of other parts, which are cooled to a temperature lower than the temperature at which the cobalt-carbon gas flows into the chamber, to be rapidly cooled to solidification and evaporation.

According to the cobalt-carbon gas trapping device of the present invention, after the cobalt-carbon gas is separated into cobalt composites and carbon composites, and the separated cobalt composites and carbon composites are separated and vapor-deposited, it can be more efficiently to capture.

A cobalt-carbon gas trapping device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and forms, and specific embodiments are illustrated in the drawings and are intended to be described in detail herein. However, this is not intended to limit the present invention to a specific disclosed form, and it should be understood that all modifications, equivalents, and substitutes included within the spirit and technical scope of the present invention are included. While describing the drawings, similar reference numerals are used for similar components. In the drawings, in order to ensure the clarity of the present invention, the size of the structure is enlarged and shown, or the size of the structure is reduced and shown in order to understand the schematic configuration.

In addition, terms such as first and second may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from other components. For example, the first constituent element may be named as the second constituent element, and similarly, the second constituent element may be named as the first constituent element without departing from the scope of rights of the present invention. Also, unless otherwise defined, all terms including technical or scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. Terms with the same meaning as defined in commonly used dictionaries should be interpreted as having meanings consistent with the meanings in the context of the related art, and if not clearly defined in this application, they should not be interpreted above or excessively for the formal meaning.

<Example>

2 is a perspective view of a cobalt-carbon gas trapping device according to an embodiment of the present invention, FIG. 3 is a front view of a cobalt-carbon gas trapping device according to an embodiment of the present invention, and FIG. 4 is an embodiment of the present invention FIG. 5 is a side view of the cobalt-carbon gas trapping device according to the embodiment of the present invention, and FIG. 6 is the cobalt-carbon gas trapping device according to the embodiment of the present invention. Bottom view, FIG. 7 is a sectional view according to A-A of FIG. 3 , FIG. 8 is a sectional view according to B-B of FIG. 4 , and FIG. 9 is for explaining the internal structure of the cobalt-carbon gas trapping device according to the embodiment of the present invention 10 is a reference view showing the constitution of the inside of the wall in the cobalt-carbon gas trapping device according to the embodiment of the present invention, after removing the outer plate of the casing wall.

As shown, the cobalt-carbon gas trapping device according to the embodiment of the present invention includes a housing 110, a heat generating part 120, a cobalt evaporation part 130, an auxiliary evaporation part 140, and cooling parts 114a, 114b.

The cobalt-carbon gas trapping device according to the embodiment of the present invention is configured to separate the cobalt-carbon gas flowing into the chamber into a cobalt composite and a carbon composite by heating the inside of the chamber of the casing 110 by the heat generating member 120 . For the separated cobalt composite and carbon composite, vapor deposition is performed separately on the heated cobalt vapor deposition member 130 and the inner surface of the cooled casing 110, so that the cobalt-carbon gas can be efficiently trapped.

Hereinafter, the cobalt-carbon gas trapping device according to the embodiment of the present invention will be described in detail, focusing on the above-mentioned components.

The casing 110 is formed with a chamber with a wide space inside, an inflow port 110a into which the cobalt-carbon gas flows in an upper part, and a cobalt-carbon gas remaining after vapor deposition inside the chamber is formed in the lower part to flow out. Outflow port 110b. The wall body 111 of the housing 110 is formed in a double-walled structure having an isolation space 111a inside, so that cooling water can be injected and flowed.

As shown in FIG. 10 , a plurality of vertically formed first guide partitions 113 a and second guide partitions 113 b are alternately provided in the isolation space 111 a along the circumferential direction of the housing 110 . The first guide partitions 113a are inclined and arranged upward in the isolation space 111a to allow cooling water to flow downward, and the second guide partitions 113b are sloped and arranged downward to allow cooling water to flow upward. Thereby, the cooling water flows in the peripheral direction of the casing 110 while drawing a zigzag shape in the partition space 111 a inside the wall body 111 of the casing 110 .

Moreover, the upper surface of the case 110 is formed by the upper cover 112 which can be opened and closed. Here, a cooling water flow hole 112a is formed in the upper cover 112 to allow cooling water to be injected, circulated in the peripheral direction, and then discharged, and the auxiliary cover 112b covers the upper side thereof. As shown in FIGS. 2 and 10 , the cooling water flowing through the isolation space 111 a formed inside the wall body 111 of the casing 110 and the cooling water flow hole 112 a of the upper cover 112 is connected through the branched cooling water injection pipe 114 a while being supplied. , and at the same time, it is discharged through the branched cooling water discharge pipe 114b.

In this way, the interior of the wall body 111 of the casing 110 is integrally provided with the isolation space 111a, the cooling water flows in the isolation space 111a in a filled state, and the cooling water flow hole 112a is provided so that the cooling water flows to the upper cover 112, according to such Therefore, it is possible to use fresh cooling water having a temperature of about 15° C. to cool the inner surface of the casing 110 very efficiently. Therefore, in the chamber of the casing 110, the carbon composite separated from the cobalt composite cannot be vapor-deposited at a temperature higher than 250°C or higher while moving in a high-temperature atmosphere inside the chamber set at a temperature of about 250°C. The surface of the cobalt vapor deposition member 130 or the auxiliary vapor deposition member 140 having a similar surface temperature is rapidly cooled at the moment of contact with the inner surface of the casing 110 cooled to a temperature of less than 60° C. by cooling water, and is rapidly evaporated while solidifying.

A pair of handles 116 are provided on the left and right sides of the upper cover 112 of the casing 110 , which can be easily transported by grasping the handles 116 , and a metal punching plate 150 is also disposed along the lower side of the casing 110 , which is separated from the bottom surface of the casing 110 Open ground. Such a metal punching plate 150 prevents the bottom surface of the casing 110 from directly contacting the ground, thereby protecting the indoor bottom from damage. As shown in the figure, the housing 110 is formed in a box shape with four corners, is equipped with a handle 116, and is also provided with a metal punching plate 150. According to such a configuration, it can be known that the cobalt-carbon gas trapping device according to the embodiment of the present invention is a Optimised for very simple handling and setup.

The heat-generating component 120 is installed in the casing 110 and generates heat after the power supply is introduced. In order to heat the cobalt-carbon gas flowing into the chamber of the casing 110 to a higher temperature than the temperature after the inflow, the internal temperature of the chamber of the casing 110 is increased, thereby It plays the role of guiding the separation of cobalt-carbon gas into cobalt composites and carbon composites. Here, the heating temperature of the heat generating member 120 should be a level that reaches a temperature at which the cobalt composite is heated and expanded for the cobalt-carbon gas particles formed from the structure of the carbon composite including the cobalt composite. When the cobalt composite body is heated and expanded, the carbon composite body surrounding the carbon composite body is actively separated, and if appropriate conditions are applied to each, it will be in a state that can be effectively vapor-deposited. For reference, in the case where cobalt-carbon gas is generated during the semiconductor manufacturing of a company to which the applicant of the present application is entrusted, the cobalt-carbon gas particles begin to actively separate into cobalt complexes and carbon complexes at about 250°C, and therefore, by exothermic heat For the heat generation of the components 120, the temperature inside the chamber of the case 110 is set to rise to 250°C. As a result, when the cobalt-carbon gas having a temperature of about 100° C. flows into the chamber of the casing 110 maintained at an internal temperature of 250° C., it is actively separated into a cobalt complex and a carbon complex. However, since the composition of the cobalt complex and the carbon complex that forms the cobalt-carbon gas is not constant for each manufacturing company, the temperature required for the cobalt-carbon gas particles to be actively separated into the cobalt complex and the carbon complex depends on the The set temperature of the housing chamber is deviated, and the appropriate temperature can be known through repeated experiments. The important point is that the temperature inside the chamber of the casing 110 should be set to a temperature for guiding the active separation of the cobalt-carbon gas into a cobalt composite and a carbon composite by the heat generating member 120 .

Here, the heating component 120 includes: a linear heater 121 arranged in a linear shape along the cobalt vapor deposition component 130 ; a planar heating contact piece 122 arranged in a wing shape along the outer peripheral surface of the linear heater 121 . The heating contact piece 122 serves to widen the surface area that is insufficient only by the wire heater 121 . In this way, if the surface area is widened to a sufficient level by heating the contact sheet 122, the cobalt vapor deposition member 130 disposed adjacent to the interior of the cavity of the housing 110 can be heated more rapidly. Also, the heating contact piece 122 is in surface contact with the cobalt composite body, so that the function of vapor deposition of the cobalt composite body can be performed together. The heating contact piece 122 is not simply a form in which a plurality of disks are continuously arranged along the linear heater 121. As shown in FIG. 8 and FIG. Continue and set up in a twist (like a whirlwind potato chip). In this way, if the heating contact piece 122 is continuously wound in a spiral shape, the heating contact piece 122 is formed as a state of a slanted inclined surface rather than a vertical surface, so that the cobalt complex mainly moves from the upper side to the lower side is realized. The stronger the contact, the higher the evaporation efficiency. The upper cover 112 of the housing 110 is provided with a power supply box 115 for introducing power to the linear heater 121 of the heat generating component 120, and is equipped with a power supply terminal 115a for inserting a power plug in order to introduce power.

The cobalt vapor deposition member 130 is provided across the chamber of the case 110 , and in a state heated by the heat generating member 120 , plays a role of oxidizing and vapor-depositing the cobalt complex while making surface contact with the cobalt complex. For this purpose, the cobalt vapor deposition member 130 is constituted by a metal lath as a plate having a mesh shape so that the cobalt composite body and the carbon composite body are in surface contact while passing from the upper side to the lower side. Here, as shown in FIGS. 8 and 9 , the plurality of cobalt vapor deposition members 130 are arranged adjacent to each other and spaced apart from each other, and the heat generating members 120 are provided in the spaced gaps and are integrated by a module ( M1 ). Thereby, the cobalt vapor deposition member 130 can be directly heated in the vicinity of the heat generating member 120 . In order to oxidize and vaporize the cobalt composite, the cobalt vapor deposition member 130 should be heated to a higher temperature than the temperature inside the chamber of the case 110 , and thus, the heat generating member 120 is provided so as to adjoin the upper side and the lower side. The arrangement of the cobalt vapor deposition member 130 does not require separate temperature control or additional configuration.

The auxiliary vapor deposition member 140 is provided across the chamber of the case 110 at a point spaced apart from the lower side of the cobalt vapor deposition member 130 , and is in surface contact with the cobalt composite that has not been vapor-deposited on the cobalt vapor deposition member 130 and passed through. At the same time, it plays the role of oxidation and evaporation. Similar to the cobalt vapor deposition member 130 , the auxiliary vapor deposition member 140 is provided as a metal lath having a meshed plate in a form of spaced up and down arrangement so that the cobalt composite and the carbon composite pass from the upper side to the lower side. Simultaneous surface contact. However, as shown in FIGS. 8 and 9 , the auxiliary vapor deposition member 140 is arranged to be narrower than the metal mesh separation distance of the cobalt vapor deposition member 130 . Also, preferably, the auxiliary vapor deposition member 140 is formed in a denser mesh shape than the cobalt vapor deposition member 130 , so that the contact density with respect to the cobalt composite is higher and differentiated than the cobalt vapor deposition member 130 . The auxiliary vapor deposition member 140 provided in this way is differentiated from the cobalt vapor deposition member 130, heated to have a lower surface temperature than the cobalt vapor deposition member 130, and is in contact with the cobalt complex and densely arranged in two at a narrow interval. Such a differentiated configuration is advantageous in that the cobalt composite that has not been vapor-deposited on the cobalt vapor deposition member 130 is more thoroughly vapor-deposited. A plurality of cobalt vapor deposition members 130 and auxiliary vapor deposition members 140 are alternately provided in the chamber of the casing 110 , so that the amount of cobalt composites collected can be increased.

The cooling members 114a and 114b cool the wall body 111 of the casing 110 and at the same time reduce the temperature of the inner surface of the casing 110 below a certain temperature, thereby guiding the solidification and evaporation of the carbon composite in contact with the inner surface of the casing 110. plating. As shown in FIGS. 2 and 10 , the cooling parts 114 a and 114 b include a cooling water injection pipe 114 a and a cooling water discharge pipe 114 b , so that the cooling water flows along the isolation space of the wall 111 of the casing 110 . Here, the cooling water injection pipe 114a is connected to a cooling water tank storing the cooling water, and the fresh cooling water supplied from the cooling water tank is branched and injected into the partition space 111a of the wall body 111 of the casing 110 and the cooling water flow hole 112a of the upper cover 112 . Of course, the cooling water injection pipe 114a can also be directly connected to the upper water channel instead of the cooling water tank and receive the cooling water supply. In this way, the cobalt-carbon gas trapping device according to the embodiment of the present invention can be noted that the isolation space 111a and the cooling water flow hole 112a are provided in the wall body 111 and the upper cover 112 of the casing 110 and the cooling water flow hole 112a is provided. The cooling water injection pipe 114a and the cooling water discharge pipe 114b to be injected and discharged can be formed on almost the entire inner surface of the casing 110 with a sufficient area and temperature to allow rapid cooling and vapor deposition of the carbon composite only by the above-mentioned simple configuration. condition. Here, in order to form the same conditions for vapor deposition of the carbon composite on the inner surface of the casing 110, a configuration in which Peltier elements are continuously provided on the wall body 111 of the casing 110 is conceivable, but a Peltier element is used. The disadvantage of the case is that it is not easy to cool the wall 111 of the casing 110 and form a uniform temperature in the whole of the wall 111 only with low installation and maintenance costs.

In this way, after the cobalt-carbon gas is separated into cobalt composites and carbon composites using the cobalt-carbon gas trapping device according to the present invention, the separated cobalt composites and carbon composites are separately separated and vapor-deposited, whereby it is possible to more effective capture. Encouraging results have been obtained through the applicant's own comparative experiments, namely, by separating the cobalt-carbon gas into a cobalt complex and carbon, compared with the direct evaporation of the cobalt-carbon gas through the existing trapping device After the composites, the separated cobalt composites and carbon composites are separated and vapor-deposited separately, which can achieve more than twice the trapping.

The preferred embodiments of the present invention have been described above, but the present invention can employ various changes, modifications, and equivalents. It goes without saying that the present invention can be appropriately modified in the embodiments and applied equally. Therefore, the above description does not limit the scope of the present invention, which is defined by the limits of the following claims.

The above descriptions are only preferred feasible embodiments of the present invention, and any equivalent changes made by applying the description of the present invention and the scope of the patent application should be included in the patent scope of the present invention.

[accustomed to] 10: Processing Room 30: Vacuum Pump 60: Pumping Lines 70: Capture tube 9: Powder [this invention] 110: Shell 110a: Inflow 110b: Outflow outlet 111: Wall 111a: Isolation Space 112: Upper cover 112a: cooling water flow hole 112b: Auxiliary cover 113a: first guide baffle 113b: Second guide baffle 114a: Cooling water injection pipe 114b: Cooling water discharge pipe 115: Power box 115a: Power terminal 116: handle 120: Heating parts 121: Linear heater 122: Heating Contact Sheet 130: Cobalt Evaporated Parts 140: Auxiliary evaporation parts 150: Metal perforated plate M1: Module

FIG. 1 is a reference diagram for explaining a trapping device according to the related art. 2 is a perspective view of a cobalt-carbon gas trapping device according to an embodiment of the present invention. 3 is a front view of a cobalt-carbon gas trapping device according to an embodiment of the present invention. 4 is a plan view of a cobalt-carbon gas trapping device according to an embodiment of the present invention. 5 is a side view of a cobalt-carbon gas trapping device according to an embodiment of the present invention. 6 is a bottom plan view of a cobalt-carbon gas trapping device according to an embodiment of the present invention. FIG. 7 is a sectional view according to A-A of FIG. 3 . FIG. 8 is a sectional view according to B-B of FIG. 4 . 9 is a cross-sectional perspective view for explaining the internal configuration of the cobalt-carbon gas trapping device according to the embodiment of the present invention. FIG. 10 is a reference diagram showing the constitution of the inside of the wall by removing the outer plate of the casing wall in the cobalt-carbon gas trapping device according to the embodiment of the present invention.

110: Shell 110a: Inflow 110b: Outflow outlet 111: Wall 111a: Isolation Space 112: Upper cover 112a: cooling water flow hole 112b: Auxiliary cover 115: Power box 120: Heating parts 121: Linear heater 122: Heating Contact Sheet 130: Cobalt Evaporated Parts 140: Auxiliary evaporation parts 150: Metal perforated plate M1: Module

Claims (14)

A cobalt-carbon gas trapping device, as a cobalt-carbon gas trapping device, can trap cobalt-carbon gas generated in a metal process performed when any product in a product group including semiconductor products is manufactured, It is characterized in that it includes: a casing equipped with a chamber formed inside, and equipped with an inflow port and an outflow port communicating with the chamber; The cobalt-carbon gas in the chamber of the shell is heated to a higher temperature than the temperature after the inflow, and the temperature inside the chamber of the shell is increased, thereby guiding the cobalt-carbon gas to be separated into a cobalt complex and a carbon complex; a A cobalt vapor deposition member, which is provided across the cavity of the casing, and in the state of being heated by the heat-generating member, makes surface contact with the cobalt complex to oxidize and vaporize the cobalt complex; a cooling member, which By cooling the wall of the casing, the carbon composite in contact with the inner surface of the casing is rapidly cooled, and at the same time, solidification and vapor deposition are guided; the interior of the chamber of the casing is heated by the heating element , so that the cobalt-carbon gas flowing into the chamber is separated into a cobalt composite and a carbon composite, and for the separated cobalt composite and carbon composite, the heated cobalt vapor deposition member and the cooled inner surface of the casing are subjected to Distinguishing and guiding vapor deposition in which the heat generating member heats the cobalt-carbon gas particles formed by the structure in which the cobalt composite is wrapped by the carbon composite at a temperature at which the cobalt composite is heated and expanded, thereby guiding the carbon composite and the cobalt composite Separation, in order to oxidize and vaporize the cobalt composite, the cobalt vapor deposition member is heated to a temperature higher than the temperature inside the chamber of the case, and in order to induce the solidification and vapor deposition of the carbon composite, the inside of the case is heated. The surface is cooled to a temperature that is drastically lower than the temperature of the cobalt-carbon gas after flowing into the chamber of the housing. The cobalt-carbon gas trapping device according to claim 1, wherein the cobalt vapor deposition member is composed of a metal mesh as a plate having a mesh shape, so that the cobalt composite and the carbon composite pass from the upper side to the lower side simultaneously. surface contact. The cobalt-carbon gas trapping device according to claim 2, wherein a plurality of the cobalt vapor deposition members are adjacent to each other and are arranged at intervals above and below, and the heat generating members are provided in the spaced gaps, so that the cobalt vapor deposition members can be The vicinity of the heat generating member is heated. The cobalt-carbon gas trapping device as claimed in claim 3, wherein the heating element comprises: a linear heater arranged in a linear shape along the cobalt evaporation parts; a heating contact piece along the linear heater The outer peripheral surface is provided in a wing shape, so that the heating contact area with respect to the cobalt composite becomes large. The cobalt-carbon gas trapping device according to claim 4, wherein the heating contact sheet is continuously and wound in a spiral shape along the outer peripheral surface of the linear heater. The cobalt-carbon gas trapping device as claimed in claim 3, comprising an auxiliary vapor deposition member disposed across the chamber of the casing at a location spaced apart from the lower side of the cobalt vapor deposition member, separate from the uncobalt vapor deposition member. The cobalt composite body through which the cobalt vapor deposition member is vapor-deposited is oxidized and vapor-deposited while surface contact is made, and the auxiliary vapor deposition member is composed of a metal mesh as a plate having a mesh shape so that the cobalt composite body and carbon The composite body is in contact with the surface while passing from the upper side to the lower side, a plurality of the auxiliary vapor deposition members are arranged adjacent to each other and spaced apart from each other, are densely arranged at intervals narrower than those of the cobalt vapor deposition members, and are heated to The surface temperature of some cobalt vapor-deposited parts is low. The cobalt-carbon gas trapping device according to claim 6, wherein a plurality of the cobalt evaporation parts and the auxiliary evaporation parts are alternately arranged in the chamber of the casing. The cobalt-carbon gas trapping device according to claim 7, wherein the upper end portion of the outflow pipe provided at the outflow port of the casing protrudes upward from the bottom surface of the chamber of the casing, so as to suppress that the outflow pipe is not in the casing. The vapor-deposited cobalt complex and carbon complex flow out of the chamber of the housing. The cobalt-carbon gas trapping device according to claim 1, wherein the wall of the casing is formed into a double-walled structure with an isolation space inside, and the cooling member is for allowing cooling water to circulate along the isolation space of the casing wall cooling water injection pipe and cooling water discharge pipe. The cobalt-carbon gas trapping device according to claim 9, wherein a plurality of vertically formed first guide partitions are alternately provided along the peripheral direction of the housing in the partition space formed inside the wall of the housing. plate and second guide partitions, the first guide partitions are inclined upward to allow cooling water to flow downward, the second guide partitions are inclined downward to allow cooling water to flow upward, thereby While the cooling water draws a zigzag shape in the isolation space inside the wall of the casing, the cooling water is guided to flow in the peripheral direction of the casing. The cobalt-carbon gas trapping device according to claim 9, wherein the upper surface of the casing is formed through an upper cover that can be opened and closed, and a cooling water flow hole is formed inside the upper cover, which allows the cooling water to pass through the cooling water injection pipe After being injected and circulated in the peripheral direction, it is discharged along the cooling water discharge pipe, thereby leading the vapor deposition of the carbon composite in contact with the lower side surface of the upper cover. A cobalt-carbon gas trapping method, as a cobalt-carbon gas trapping method, which can trap cobalt-carbon gas generated in a metal process performed when any one product in a product group including semiconductor products is manufactured, It is characterized in that, by heating the inside of the sealed chamber, first, the cobalt-carbon gas flowing into the chamber is separated into cobalt composites and carbon composites, and the separated cobalt composites and carbon composites are separated and evaporated. plating. The cobalt-carbon gas trapping method of claim 12, wherein in order to separate the cobalt-carbon gas in the chamber into a cobalt composite body and a carbon composite body, the cobalt composite body wrapped by the carbon composite body is heated and expanded. The cobalt-carbon gas trapping method according to claim 12, wherein the separated cobalt composite is brought into contact with the surface of a cobalt vapor deposition member to be oxidized and vapor-deposited, and the cobalt vapor deposition member is heated To a temperature higher than the internal temperature of the chamber, the separated carbon composite is brought into contact with the surface of other parts, thereby rapidly cooled to solidification and evaporation, and the other parts are cooled to a temperature higher than the cobalt-carbon gas inflow. The temperature of the chamber is low temperature.

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