TWI776943B - Electromagnetic wave shielding film - Google Patents

Electromagnetic wave shielding film Download PDF

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TWI776943B
TWI776943B TW107129906A TW107129906A TWI776943B TW I776943 B TWI776943 B TW I776943B TW 107129906 A TW107129906 A TW 107129906A TW 107129906 A TW107129906 A TW 107129906A TW I776943 B TWI776943 B TW I776943B
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layer
wiring board
printed wiring
electromagnetic wave
adhesive
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TW201931985A (en
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高見晃司
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日商拓自達電線股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0083Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising electro-conductive non-fibrous particles embedded in an electrically insulating supporting structure, e.g. powder, flakes, whiskers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D163/00Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40Additives
    • C09D7/60Additives non-macromolecular
    • C09D7/61Additives non-macromolecular inorganic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40Additives
    • C09D7/70Additives characterised by shape, e.g. fibres, flakes or microspheres
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22Plastics; Metallised plastics
    • C09J7/25Plastics; Metallised plastics based on macromolecular compounds obtained otherwise than by reactions involving only carbon-to-carbon unsaturated bonds
    • C09J7/255Polyesters
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/10Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet
    • C09J2301/12Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the arrangement of layers
    • C09J2301/122Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the arrangement of layers the adhesive layer being present only on one side of the carrier, e.g. single-sided adhesive tape
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/30Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/312Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2463/00Presence of epoxy resin
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2467/00Presence of polyester
    • C09J2467/006Presence of polyester in the substrate

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Laminated Bodies (AREA)
  • Structure Of Printed Boards (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

本發明係提供一種具有良好傳輸特性的電磁波屏蔽膜。 一種電磁波屏蔽膜,具有絕緣性保護層、屏蔽層及接著劑層,且前述屏蔽層中前述接著劑層側表面的粗度曲線要素的平均長度RSm為40μm以上且100μm以下。The present invention provides an electromagnetic wave shielding film with good transmission characteristics. An electromagnetic wave shielding film comprising an insulating protective layer, a shielding layer, and an adhesive layer, wherein the average length RSm of roughness curve elements on the surface of the adhesive layer side surface of the shielding layer is 40 μm or more and 100 μm or less.

Description

電磁波屏蔽膜Electromagnetic wave shielding film

本發明係關於電磁波屏蔽膜、其製造方法及屏蔽印刷配線板。The present invention relates to an electromagnetic wave shielding film, a method for producing the same, and a shielding printed wiring board.

背景技術 關於屏蔽印刷配線板以避免電磁波的方法,已知有將具有屏蔽層及導電性接著劑層的電磁波屏蔽膜貼合於印刷配線板的方法。於此種方法中,印刷配線板係使電磁波屏蔽膜的導電性接著劑層與印刷配線板的前述接地電路經由設置於被覆接地電路之絕緣膜的開口部形成連接,而獲得屏蔽。Background Art As a method of shielding a printed wiring board from electromagnetic waves, a method of bonding an electromagnetic wave shielding film having a shielding layer and a conductive adhesive layer to a printed wiring board is known. In this method, the printed wiring board is shielded by connecting the conductive adhesive layer of the electromagnetic wave shielding film and the ground circuit of the printed wiring board through the opening provided in the insulating film covering the ground circuit.

於專利文獻1中記載有一種電磁波屏蔽片,其由具備含有導電性填料的接著層、導電層及絕緣層的積層體構成。於專利文獻2中記載有一種電磁波屏蔽膜,其包含至少一面經粗化的電磁屏蔽層。於專利文獻3中記載有一種電磁波屏蔽膜,其具備導電性屏蔽層及接著劑層,且導電性屏蔽層的凹凸的最大高度大於接著劑層的厚度。Patent Document 1 describes an electromagnetic wave shielding sheet comprising a laminate including an adhesive layer containing a conductive filler, a conductive layer, and an insulating layer. Patent Document 2 describes an electromagnetic wave shielding film including a roughened electromagnetic shielding layer on at least one surface. Patent Document 3 describes an electromagnetic wave shielding film including a conductive shielding layer and an adhesive layer, and wherein the maximum height of irregularities of the conductive shielding layer is larger than the thickness of the adhesive layer.

先行技術文獻 專利文獻 [專利文獻1]日本特開2016-157838號說明書 [專利文獻2]日本特開2015-133474號說明書 [專利文獻3]國際公開2016/088381號Prior Art Documents Patent Documents [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-157838 [Patent Document 2] Japanese Patent Application Laid-Open No. 2015-133474 [Patent Document 3] International Publication No. 2016/088381

發明概要 發明欲解決之課題 於專利文獻1中記載有藉由上述電磁波屏蔽片可維持良好的傳輸特性。然而,由於專利文獻1中記載的電磁波屏蔽片係於接著層使用導電性填料,故於產生導電性填料的材料費等方面並不令人滿意。又,於電磁波屏蔽片的薄膜化上,難以使電磁波屏蔽片比導電性填料的粒徑更薄。SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION Patent Document 1 describes that the electromagnetic wave shielding sheet described above can maintain good transmission characteristics. However, since the electromagnetic wave shielding sheet described in Patent Document 1 uses the conductive filler in the adhesive layer, it is not satisfactory in terms of the material cost of the conductive filler and the like. In addition, it is difficult to make the electromagnetic wave shielding sheet thinner than the particle size of the conductive filler in thinning the electromagnetic wave shielding sheet.

於專利文獻2中,藉由使電磁屏蔽層的粗化面貫通膜層,即使接著層未含有導電性填料時,亦可使粗化面的至少一部分與電路基板的基層連接而接地。然而,於專利文獻2中並未記載粗化面粗度之相關參數與傳輸損失的關係。In Patent Document 2, by passing the roughened surface of the electromagnetic shielding layer through the film layer, even when the adhesive layer does not contain a conductive filler, at least a part of the roughened surface can be connected to the base layer of the circuit board and grounded. However, Patent Document 2 does not describe the relationship between the parameters related to the roughened surface roughness and the transmission loss.

於專利文獻3中記載有導電性屏蔽層的凸部能穿過接著劑層而與接地電路連接,但也沒有提到粗化面粗度之相關參數與傳輸損失的關係。In Patent Document 3, it is described that the convex portion of the conductive shield layer can be connected to the ground circuit through the adhesive layer, but the relationship between the parameters related to the roughened surface roughness and the transmission loss is also not mentioned.

本發明之課題係提供一種具有良好傳輸特性的電磁波屏蔽膜。本發明之另一課題係提供一種於接著劑層不含導電性填料的電磁波屏蔽膜中具有良好傳輸特性的電磁波屏蔽膜。The subject of this invention is to provide the electromagnetic wave shielding film which has favorable transmission characteristics. Another subject of this invention is to provide the electromagnetic wave shielding film which has favorable transmission characteristics in the electromagnetic wave shielding film whose adhesive layer does not contain a conductive filler.

用以解決課題之方法 本發明人針對上述課題專心致力於研究,結果發現:於屏蔽層的凸部穿過不含導電性填料的接著劑層而與接地電路連接的電磁波屏蔽片,在屏蔽層與信號電路之間的距離較大且接著劑於其之間所佔的比例較多時,可獲得良好的傳輸特性。然後,本發明人發現:若著眼於屏蔽層表面的粗度,將屏蔽層中前述接著劑層側表面的粗度曲線要素的平均長度RSm設為40μm以上且100μm以下,則將電磁波屏蔽膜與印刷配線板貼合時,屏蔽層的凸部便可穿過接著劑層而能與接地電路連接,且即使在屏蔽層的凸部穿過接著劑層後,屏蔽層與印刷配線板之間亦充分地蓄留接著劑,屏蔽層與信號電路之間的距離變大,結果可獲得良好的傳輸特性,終完成本發明。MEANS TO SOLVE THE PROBLEM The present inventors have devoted themselves to researches on the above-mentioned problems. As a result, they have found that the electromagnetic wave shielding sheet in which the convex portion of the shielding layer is connected to the ground circuit through an adhesive layer that does not contain a conductive filler When the distance from the signal circuit is large and the proportion of the adhesive is large, good transmission characteristics can be obtained. Then, the present inventors found that when the average length RSm of the roughness curve elements on the surface of the adhesive layer side in the shield layer is set to 40 μm or more and 100 μm or less, the electromagnetic wave shielding film and the When the printed wiring board is attached, the convex part of the shielding layer can pass through the adhesive layer to be connected to the ground circuit, and even after the convex part of the shielding layer passes through the adhesive layer, there is no connection between the shielding layer and the printed wiring board. When the adhesive is sufficiently stored, the distance between the shield layer and the signal circuit is increased, and as a result, good transmission characteristics can be obtained, and the present invention has been completed.

本發明包含以下合適態樣。 [1]一種電磁波屏蔽膜,具有絕緣性保護層、屏蔽層及接著劑層,且前述屏蔽層中前述接著劑層側表面之根據JIS B 0601:2013的粗度曲線要素的平均長度RSm為40μm以上且100μm以下。 [2]如[1]記載之電磁波屏蔽膜,其中前述屏蔽層中前述接著劑層側表面的負荷面積率Smr2為92%以上。 [3]如[1]或[2]記載之電磁波屏蔽膜,其中前述絕緣性保護層包含粒子狀物質。 [4]如[3]記載之電磁波屏蔽膜,其中前述粒子狀物質之平均粒徑為15μm以上。 [5]一種屏蔽印刷配線板,其貼合有如[1]至[4]中任一項記載之電磁波屏蔽膜。 [6]一種電磁波屏蔽膜之製造方法,係製造如[1]至[4]中任一項記載之電磁波屏蔽膜之方法,其包含以下步驟: 於支持基材上塗佈絕緣性樹脂組成物並使之硬化而得到絕緣性保護層; 於絕緣性保護層上形成屏蔽層;及 於屏蔽層上形成接著劑層。The present invention includes the following suitable aspects. [1] An electromagnetic wave shielding film having an insulating protective layer, a shielding layer, and an adhesive layer, wherein the average length RSm of the roughness curve element according to JIS B 0601:2013 on the surface of the adhesive layer in the shielding layer is 40 μm more than 100 μm or less. [2] The electromagnetic wave shielding film according to [1], wherein the load area ratio Smr2 of the adhesive layer side surface in the shielding layer is 92% or more. [3] The electromagnetic wave shielding film according to [1] or [2], wherein the insulating protective layer contains particulate matter. [4] The electromagnetic wave shielding film according to [3], wherein the average particle diameter of the particulate matter is 15 μm or more. [5] A shielded printed wiring board to which the electromagnetic wave shielding film according to any one of [1] to [4] is attached. [6] A method for producing an electromagnetic wave shielding film, which is a method for producing the electromagnetic wave shielding film according to any one of [1] to [4], comprising the steps of: coating an insulating resin composition on a support substrate and hardening it to obtain an insulating protective layer; forming a shielding layer on the insulating protective layer; and forming an adhesive layer on the shielding layer.

發明效果 根據本發明之一態樣之電磁波屏蔽膜,即使接著劑層不含導電性填料,於貼合電磁波屏蔽膜與印刷配線板時,屏蔽膜的凸部亦可與印刷配線板的接地電路連接,且能夠發揮良好的傳輸特性。Advantageous Effects of Invention According to the electromagnetic wave shielding film of one aspect of the present invention, even if the adhesive layer does not contain a conductive filler, when the electromagnetic wave shielding film and the printed wiring board are bonded together, the protrusions of the shielding film can be connected to the ground circuit of the printed wiring board. connection, and can play a good transmission characteristics.

用以實施發明之形態 <電磁波屏蔽膜> 本發明之一態樣之電磁波屏蔽膜,具有絕緣性保護層、屏蔽層及接著劑層,且前述屏蔽層中前述接著劑層側表面之根據JIS B 0601:2013的粗度曲線要素的平均長度RSm(以下亦稱為RSm)為40μm以上且100μm以下。MODE FOR CARRYING OUT THE INVENTION <Electromagnetic wave shielding film> An electromagnetic wave shielding film according to an aspect of the present invention has an insulating protective layer, a shielding layer, and an adhesive layer, and the surface of the shielding layer on the side of the adhesive layer conforms to JIS B The average length RSm (hereinafter also referred to as RSm) of the roughness curve elements of 0601:2013 is 40 μm or more and 100 μm or less.

本發明之一態樣之電磁波屏蔽膜可為保持長條狀態地捲起來的捲筒狀,亦可為經裁切的單片狀。The electromagnetic wave shielding film of one aspect of the present invention may be in the form of a roll that is rolled up while maintaining an elongated state, or may be in the form of a cut single sheet.

於圖1顯示本發明之一態樣之電磁波屏蔽膜100。如圖1所示,電磁波屏蔽膜100依序具有絕緣性保護層110、屏蔽層120及接著劑層130。屏蔽層120中接著劑層130側表面的RSm為40μm以上且100μm以下。FIG. 1 shows an electromagnetic wave shielding film 100 according to an aspect of the present invention. As shown in FIG. 1 , the electromagnetic wave shielding film 100 has an insulating protective layer 110 , a shielding layer 120 and an adhesive layer 130 in this order. The RSm of the surface on the side of the adhesive layer 130 in the shield layer 120 is 40 μm or more and 100 μm or less.

(絕緣性保護層) 絕緣性保護層係為了保護屏蔽層而設置。絕緣性保護層例如可為由絕緣性樹脂組成物構成的塗佈層及/或膜等。(Insulating protective layer) The insulating protective layer is provided to protect the shield layer. The insulating protective layer may be, for example, a coating layer and/or film composed of an insulating resin composition.

關於絕緣性樹脂,只要具有絕緣性者即可,例如可列舉:熱塑性樹脂、熱硬化性樹脂或活性能量線硬化性樹脂等。絕緣性樹脂可單獨或組合2種以上使用。The insulating resin should just have insulating properties, and examples thereof include thermoplastic resins, thermosetting resins, active energy ray-curable resins, and the like. The insulating resins may be used alone or in combination of two or more.

關於熱硬化性樹脂,例如可列舉:酚系樹脂、環氧系樹脂、胺基甲酸酯系樹脂、三聚氰胺系樹脂及醇酸系樹脂等。As a thermosetting resin, a phenol type resin, an epoxy type resin, a urethane type resin, a melamine type resin, an alkyd type resin, etc. are mentioned, for example.

關於熱塑性樹脂,例如可列舉:苯乙烯系樹脂、乙酸乙烯酯系樹脂、聚酯系樹脂、聚乙烯系樹脂、聚丙烯系樹脂、醯亞胺系樹脂、醯胺系樹脂及丙烯酸系樹脂等。As a thermoplastic resin, a styrene-type resin, a vinyl acetate-type resin, a polyester-type resin, a polyethylene-type resin, a polypropylene-type resin, an imide-type resin, an amide-type resin, an acrylic resin, etc. are mentioned, for example.

關於活性能量線硬化性樹脂,例如可列舉:藉由紫外線或電子束等的照射而硬化的自由基聚合性化合物等。作為自由基聚合性化合物之例,可舉例如分子中具有至少2個(甲基)丙烯醯氧基的聚合性化合物等。絕緣性樹脂組成物包含活性能量線硬化性樹脂時,絕緣性樹脂組成物宜包含聚合引發劑、例如自由基聚合引發劑。As an active-energy-ray-curable resin, the radical polymerizable compound etc. which are hardened by irradiation of an ultraviolet-ray, an electron beam, etc. are mentioned, for example. As an example of a radically polymerizable compound, the polymerizable compound etc. which have at least 2 (meth)acryloyloxy groups in a molecule|numerator are mentioned, for example. When the insulating resin composition contains an active energy ray-curable resin, the insulating resin composition preferably contains a polymerization initiator, for example, a radical polymerization initiator.

關於絕緣性樹脂,宜為熱硬化性樹脂、較佳為環氧系樹脂。使用環氧系樹脂作為絕緣性樹脂時,在將電子零件安裝於印刷配線板之回焊步驟中,有容易防止屏蔽層受到熱損傷的傾向。The insulating resin is preferably a thermosetting resin, preferably an epoxy resin. When an epoxy-based resin is used as the insulating resin, the shield layer tends to be easily prevented from being thermally damaged in the reflow step of mounting the electronic component on the printed wiring board.

絕緣性樹脂組成物亦可包含粒子狀物質。在絕緣性樹脂組成物包含粒子狀物質時,有容易製造如下電磁波屏蔽膜的傾向,即:絕緣性保護層之至少屏蔽層側表面被凹凸化、且屏蔽層之接著劑層側表面的RSm為40μm以上且100μm以下。關於粒子狀物質的種類、平均粒徑(D50)、在絕緣性樹脂組成物中的含量及形狀等,可為後述電磁波屏蔽膜的製造中所舉例者。The insulating resin composition may contain particulate matter. When the insulating resin composition contains particulate matter, it tends to be easy to manufacture an electromagnetic wave shielding film in which at least the shielding layer side surface of the insulating protective layer is uneven and the RSm of the adhesive layer side surface of the shielding layer is 40 μm or more and 100 μm or less. The kind of particulate matter, the average particle diameter (D50), the content in the insulating resin composition, the shape, and the like can be exemplified in the production of the electromagnetic wave shielding film described later.

絕緣性樹脂組成物亦可視需要包含如下至少1種添加劑:例如溶劑、交聯劑、聚合用觸媒、硬化促進劑、黏著性賦予劑、抗氧化劑、顏料、染料、著色劑、塑化劑、紫外線吸收劑、消泡劑、調平劑、填充劑、阻燃劑、黏度調節劑及抗結塊劑。The insulating resin composition may optionally contain at least one of the following additives: for example, a solvent, a crosslinking agent, a catalyst for polymerization, a curing accelerator, an adhesion imparting agent, an antioxidant, a pigment, a dye, a colorant, a plasticizer, UV absorbers, defoamers, levelers, fillers, flame retardants, viscosity modifiers and anti-caking agents.

絕緣性保護層為由絕緣性樹脂組成物構成的塗佈層時,作為形成由絕緣性樹脂組成物構成的塗佈層之方法,可舉下述方法等為例:於支持基材上塗佈絕緣性樹脂組成物,並使之乾燥及硬化,藉此獲得塗佈層。關於塗佈絕緣性樹脂組成物之方法,可列舉周知的塗佈方法,例如:模嘴塗佈法、缺角輪塗佈法、凹版塗佈法、狹縫式模具塗佈法等。When the insulating protective layer is a coating layer composed of an insulating resin composition, as a method for forming a coating layer composed of an insulating resin composition, the following methods are exemplified: coating on a support substrate The insulating resin composition is dried and cured to obtain a coating layer. As a method of coating the insulating resin composition, well-known coating methods, for example, a die coating method, a corner wheel coating method, a gravure coating method, a slit die coating method, etc. are mentioned.

關於支持基材,例如可列舉由下述等構成的基材:聚丙烯(PP)、聚乙烯(PE)、聚對苯二甲酸乙二酯(PET)、聚醯亞胺(PI)、聚醯胺(PA)、聚碳酸酯(PC)、聚苯乙烯(PS)或聚苯硫醚(PPS)。支持基材亦可於表面實施剝離處理。As the supporting substrate, for example, substrates composed of polypropylene (PP), polyethylene (PE), polyethylene terephthalate (PET), polyimide (PI), polyethylene Amide (PA), Polycarbonate (PC), Polystyrene (PS) or Polyphenylene Sulfide (PPS). The support substrate can also be subjected to peeling treatment on the surface.

絕緣性保護層的厚度例如可為1μm以上、較佳為1.5μm以上、更佳為2μm以上、再更佳為3μm以上、特別佳為4μm以上。另一方面,絕緣性保護層的厚度例如可為30μm以下、較佳為20μm以下、更佳為10μm以下、再更佳為7μm以下、特別佳為5μm以下。絕緣性保護層的厚度為1μm以上且30μm以下時,可獲得良好的絕緣性、充分地保護屏蔽層及接著劑層且容易獲得彎曲性,有容易使電磁波屏蔽膜薄膜化的傾向。絕緣性保護層的厚度可按照例如後述實施例中的厚度測定方法進行測定。The thickness of the insulating protective layer may be, for example, 1 μm or more, preferably 1.5 μm or more, more preferably 2 μm or more, still more preferably 3 μm or more, and particularly preferably 4 μm or more. On the other hand, the thickness of the insulating protective layer may be, for example, 30 μm or less, preferably 20 μm or less, more preferably 10 μm or less, still more preferably 7 μm or less, and particularly preferably 5 μm or less. When the thickness of the insulating protective layer is 1 μm or more and 30 μm or less, good insulating properties are obtained, the shielding layer and the adhesive layer are sufficiently protected, flexibility is easily obtained, and the electromagnetic wave shielding film tends to be thinned easily. The thickness of the insulating protective layer can be measured, for example, according to the thickness measurement method in the examples described later.

絕緣性保護層為由絕緣性樹脂組成物構成之膜時,由絕緣性樹脂組成物構成之膜可使用周知的成形法、例如擠製成形、吹製成形、壓延成形等而製造。When the insulating protective layer is a film composed of an insulating resin composition, the film composed of the insulating resin composition can be produced by a known molding method such as extrusion molding, blow molding, and calender molding.

絕緣性保護層亦可為2層以上積層體、例如由2種以上絕緣性樹脂組成物構成的塗佈層及/或膜的組合。例如絕緣性保護層為2層積層體時,積層體可為例如:將由2種絕緣性樹脂組成物構成的膜貼合而成的積層體、於由絕緣性樹脂組成物構成的膜上形成由其他絕緣性樹脂組成物構成的塗佈層的積層體、於由絕緣性樹脂組成物構成的塗佈層上形成由其他絕緣性樹脂組成物構成的塗佈層的積層體等。The insulating protective layer may be a laminate of two or more layers, for example, a combination of coating layers and/or films composed of two or more insulating resin compositions. For example, when the insulating protective layer is a two-layer laminate, the laminate may be, for example, a laminate in which films composed of two types of insulating resin compositions are bonded together, and a laminate composed of two insulating resin compositions is formed on the film composed of the insulating resin compositions. Laminates of coating layers composed of other insulating resin compositions, laminates in which coating layers composed of other insulating resin compositions are formed on coating layers composed of insulating resin compositions, and the like.

絕緣性保護層為2層以上的積層體、且絕緣性保護層包含粒子狀物質時,構成屏蔽層側的最外層的絕緣性樹脂組成物宜包含粒子狀物質。When the insulating protective layer is a laminate of two or more layers and the insulating protective layer contains particulate matter, the insulating resin composition constituting the outermost layer on the shield layer side preferably contains particulate matter.

絕緣性保護層的表面宜至少屏蔽層側的表面被凹凸化。若至少屏蔽層側的表面被凹凸化,藉由於該表面形成屏蔽層,有容易獲得如下屏蔽層之傾向,即:於接著劑層側具有與絕緣性保護層表面的粗糙形狀大致相同的表面形狀。It is preferable that the surface of the insulating protective layer is roughened at least on the shield layer side. If at least the surface on the side of the shielding layer is roughened, by forming the shielding layer on this surface, there is a tendency to easily obtain a shielding layer having a surface shape substantially the same as the roughness of the surface of the insulating protective layer on the adhesive layer side .

關於使絕緣性保護層表面凹凸化之方法,例如可為如下方法等:由上述包含粒子狀物質之絕緣性樹脂組成物形成絕緣性保護層的方法、於絕緣性樹脂組成物的塗膜撒上粒子狀物質的方法。又,亦可藉由噴砂加工、電漿照射、電子束照射、藥劑處理或壓紋加工等對已形成的絕緣性保護層表面進行處理。進而亦可舉例如下方法等:於後述絕緣性保護層的形成步驟中使用的支持基材上,預先撒上粒子狀物質,接著塗佈絕緣性樹脂組成物的方法;及於表面具有凹凸形狀的支持基材表面塗佈絕緣性樹脂組成物的方法。其中,由包含粒子狀物質的絕緣性樹脂組成物形成絕緣性保護層的方法,由於容易調節表面粗度,故為佳。As a method of making the surface of the insulating protective layer uneven, for example, a method of forming the insulating protective layer from the insulating resin composition containing the particulate matter described above, and sprinkling on the coating film of the insulating resin composition, etc. Methods for Particulate Matter. Moreover, the surface of the formed insulating protective layer may be processed by sandblasting, plasma irradiation, electron beam irradiation, chemical treatment, embossing, or the like. Further, the following methods can also be exemplified: a method in which particulate matter is sprinkled in advance on a support substrate used in the step of forming an insulating protective layer to be described later, and then an insulating resin composition is applied; A method of coating the surface of a support substrate with an insulating resin composition. Among them, a method of forming an insulating protective layer from an insulating resin composition containing a particulate matter is preferable because it is easy to adjust the surface roughness.

於絕緣性保護層的屏蔽層側的表面被凹凸化時,絕緣性保護層的屏蔽層側的表面形狀可根據屏蔽層的形成方法或厚度而適當設定。於形成與絕緣性保護層的表面形狀大致相同的屏蔽層時,絕緣性保護層表面之例如粗度曲線要素的平均長度RSm可為130μm以下、較佳為120μm以下、更佳為110μm以下。絕緣性保護層的屏蔽層側表面的RSm為130μm以下時,有容易將屏蔽層的接著劑層側表面的RSm設為40μm以上且100μm以下的傾向,故為佳。When the surface on the shield layer side of the insulating protective layer is uneven, the shape of the surface on the shield layer side of the insulating protective layer can be appropriately set according to the formation method and thickness of the shield layer. When forming a shield layer having substantially the same shape as the surface of the insulating protective layer, the average length RSm of the roughness curve elements on the surface of the insulating protective layer, for example, may be 130 μm or less, preferably 120 μm or less, and more preferably 110 μm or less. When the RSm of the shield layer side surface of the insulating protective layer is 130 μm or less, the RSm of the adhesive layer side surface of the shield layer tends to be 40 μm or more and 100 μm or less, which is preferable.

(屏蔽層) 屏蔽層只要具有導電性即可,並無特別限制,可為金屬膜、或由導電性粒子構成的導電膜等。(Shield Layer) The shield layer is not particularly limited as long as it has conductivity, and may be a metal film, a conductive film composed of conductive particles, or the like.

關於構成金屬膜的金屬,例如可列舉選自於由鎳、銅、銀、錫、金、鈀、鋁、鉻、鈦及鋅所構成群組中之一種、或包含此等中之任一種以上的合金等。其中,由屏蔽性與經濟性之觀點而言,較佳為銅、及包含銅的合金。The metal constituting the metal film may be, for example, one selected from the group consisting of nickel, copper, silver, tin, gold, palladium, aluminum, chromium, titanium, and zinc, or any one or more of these. alloy, etc. Among them, copper and an alloy containing copper are preferred from the viewpoint of shielding properties and economical efficiency.

關於形成金屬膜的方法,例如可列舉:電解鍍覆法、無電鍍覆法(例如置換鍍覆法、化學鍍覆法等)、濺鍍法、電子束蒸鍍法、真空蒸鍍法、CVD法金屬有機法等加成法、及此等之組合等。又,金屬膜亦可為藉由壓延加工形成之金屬箔、或藉由電解而形成之金屬箔(例如特殊電解銅箔等)等。其中,由容易控制金屬膜厚度、容易獲得具有期望粗度之金屬膜的觀點而言,較佳為加成法。As a method of forming a metal film, for example, electrolytic plating, electroless plating (for example, displacement plating, electroless plating, etc.), sputtering, electron beam vapor deposition, vacuum vapor deposition, and CVD are exemplified. Addition methods such as metal-organic methods, and combinations thereof, etc. Moreover, the metal foil formed by a rolling process, or the metal foil (for example, special electrolytic copper foil etc.) formed by electrolysis, etc. may be sufficient as a metal film. Among them, the addition method is preferable from the viewpoint of easy control of the thickness of the metal film and easy acquisition of a metal film having a desired thickness.

屏蔽層為由導電性粒子構成的導電膜時,導電性粒子例如可為碳、銀、銅、鎳、焊料等粒子。又,導電性粒子亦可為於銅粉實施鍍銀的銀包銅粒子、或於樹脂球或玻璃珠等絕緣性粒子實施金屬鍍覆的粒子等。此等導電性粒子可單獨使用或混合2種以上使用。When the shielding layer is a conductive film composed of conductive particles, the conductive particles may be particles such as carbon, silver, copper, nickel, and solder, for example. Moreover, the electroconductive particle may be the silver-coated copper particle which performed silver plating on copper powder, the particle which performed metal plating on insulating particles such as resin balls and glass beads, and the like. These electroconductive particles can be used individually or in mixture of 2 or more types.

導電性粒子的形狀可為球狀、針狀、纖維狀、小片狀或樹枝狀中任一種,由作成層狀之觀點而言,較佳為片狀。The shape of the conductive particles may be spherical, needle-like, fibrous, platelet-like, or dendritic, and from the viewpoint of forming a layered shape, a sheet-like shape is preferred.

導電性粒子的平均粒徑並無特別限定,可根據屏蔽層的表面粗度及厚度等而適當選擇。導電性粒子的平均粒徑例如可為0.1μm以上、較佳為0.5μm以上、更佳為1.5μm以上、再更佳為2μm以上、特別佳為4μm以上。另一方面,導電性粒子的平均粒徑例如可為10μm以下、較佳為9μm以下、更佳為8μm以下、再更佳為7μm以下、特別佳為6μm以下。導電性粒子的平均粒徑為0.1μm以上且10μm以下時,有容易將屏蔽層的接著劑層側表面的RSm設為40μm以上且100μm以下、並且容易使電磁波屏蔽膜的厚度變得適當的傾向。The average particle diameter of electroconductive particle is not specifically limited, According to the surface roughness, thickness, etc. of a shielding layer, it can select suitably. The average particle diameter of the conductive particles may be, for example, 0.1 μm or more, preferably 0.5 μm or more, more preferably 1.5 μm or more, still more preferably 2 μm or more, and particularly preferably 4 μm or more. On the other hand, the average particle diameter of the conductive particles may be, for example, 10 μm or less, preferably 9 μm or less, more preferably 8 μm or less, still more preferably 7 μm or less, and particularly preferably 6 μm or less. When the average particle diameter of the conductive particles is 0.1 μm or more and 10 μm or less, the RSm of the adhesive layer side surface of the shielding layer tends to be easily set to 40 μm or more and 100 μm or less, and the thickness of the electromagnetic wave shielding film tends to be appropriate. .

關於形成由導電性粒子構成的導電膜的方法,例如可列舉:形成包含導電性粒子的糊料的塗膜的方法、及將導電性粒子撒在絕緣性保護層上的方法等。包含導電性粒子的糊料可舉例如導電性粒子與熱硬化性樹脂及/或熱塑性樹脂的混合物等。關於熱硬化性樹脂及熱塑性樹脂之例子,可以是作為上述構成絕緣性保護層的絕緣性樹脂組成物中包含的熱硬化性樹脂及熱塑性樹脂所舉例者。包含導電性粒子的糊料可視需要包含溶劑等添加劑。As a method of forming the electroconductive film which consists of electroconductive particle, the method of forming the coating film of the paste containing electroconductive particle, the method of scattering electroconductive particle on an insulating protective layer, etc. are mentioned, for example. As a paste containing electroconductive particle, the mixture etc. of electroconductive particle, a thermosetting resin, and/or thermoplastic resin are mentioned, for example. As an example of a thermosetting resin and a thermoplastic resin, the thermosetting resin and thermoplastic resin contained in the insulating resin composition which comprise the said insulating protective layer can be exemplified. The paste containing electroconductive particle may contain additives, such as a solvent, as needed.

屏蔽層的厚度只要粗度曲線要素的平均長度RSm於預定範圍內即可,並無特別限定,例如可為0.1μm以上且15μm以下。屏蔽層的厚度為0.1μm以上時,電磁波屏蔽膜的屏蔽特性變得良好。又,為15μm以下時,電磁波屏蔽膜的耐彎曲性變得良好。屏蔽層的厚度可按照例如後述實施例中的厚度測定方法進行測定。The thickness of the shield layer is not particularly limited as long as the average length RSm of the roughness curve elements is within a predetermined range, and may be, for example, 0.1 μm or more and 15 μm or less. When the thickness of the shielding layer is 0.1 μm or more, the shielding properties of the electromagnetic wave shielding film become favorable. Moreover, when it is 15 micrometers or less, the bending resistance of an electromagnetic wave shielding film becomes favorable. The thickness of the shielding layer can be measured, for example, according to the thickness measurement method in the examples described later.

屏蔽層厚度的下限宜為0.5μm以上、較佳為1μm以上、更佳為2μm以上、特別佳為4μm以上。另一方面,屏蔽層厚度的上限宜為12μm以下、較佳為10μm以下、更佳為8μm以下、特別佳為6μm以下。The lower limit of the thickness of the shielding layer is preferably 0.5 μm or more, preferably 1 μm or more, more preferably 2 μm or more, and particularly preferably 4 μm or more. On the other hand, the upper limit of the thickness of the shielding layer is preferably 12 μm or less, preferably 10 μm or less, more preferably 8 μm or less, and particularly preferably 6 μm or less.

屏蔽層的接著劑層側表面的RSm為40μm以上且100μm以下。RSm為根據JIS B 0601:2013的粗度曲線要素的平均長度RSm。如圖2所示,RSm係表示於粗度曲線的基準長度L中,與由山峰與山谷構成的1個粗度曲線要素對應的長度Xs的平均值。因此,通常有RSm越小,一定長度中的表面粗度的凹凸數越容易變多的傾向。表面RSm可以下式算出: [數學式1]

Figure 02_image002
[式中,m表示週期數、Xs表示1個週期的長度]。RSm係經由後述實施例中說明的「RSm測定方法」測定出的值。The RSm of the adhesive layer side surface of the shielding layer is 40 μm or more and 100 μm or less. RSm is the average length RSm of the roughness curve element according to JIS B 0601:2013. As shown in FIG. 2 , RSm is the average value of the length Xs corresponding to one roughness curve element consisting of a peak and a valley among the reference lengths L of the roughness curve. Therefore, generally, as RSm is smaller, the number of irregularities in the surface roughness in a certain length tends to increase more easily. The surface RSm can be calculated as follows: [Math 1]
Figure 02_image002
[In the formula, m represents the number of cycles, and Xs represents the length of one cycle]. RSm is the value measured by the "RSm measurement method" demonstrated in the Example mentioned later.

於RSm小於40μm時,屏蔽層表面的凸部分(即接著劑層未含導電性填料之情形下,從用以積層接著劑層側的面俯視屏蔽層表面時,屏蔽層隆起的部分)彼此的間隔變窄,且屏蔽層表面的凹部分(即接著劑層未含導電性填料之情形下,從用以積層接著劑層側的面俯視屏蔽層表面時,屏蔽層凹陷的部分)的區域變少。藉此,將電磁波屏蔽膜貼合於印刷配線板時,接著劑於屏蔽層與印刷配線板之間所佔的比例變小,信號傳輸通道與屏蔽層之距離(的平均值)變小。此處,於信號傳輸通道傳輸的信號的衰減量取決於存在於信號傳輸通道與屏蔽層之間的物質的介電損耗,若存在於信號傳輸通道與屏蔽層之間的物質的介電損耗變大,則信號的衰減量亦變大。因此推定RSm小於40μm時,信號傳輸通道與屏蔽層之間的介電損耗變大,信號衰減量亦變大。又,推定RSm超過100μm時,屏蔽層表面的凸部分彼此的間隔變大,以致與接地電路的接觸區域變小,故不能獲得良好的屏蔽特性。又,推定RSm超過100μm時,屏蔽層的表面形狀有平緩且高度較低的凸部較多的傾向,若將如此的屏蔽膜貼於配線板,由於屏蔽層(的平均線)接近信號電路,故存在於屏蔽層與信號電路間的接著劑層的比例變少、傳輸特性變差。然而,上述推定並非用來限定本發明。When RSm is less than 40 μm, the convex parts on the surface of the shielding layer (that is, when the adhesive layer does not contain a conductive filler, when the surface of the shielding layer is viewed from the surface on which the adhesive layer is laminated, the convex part of the shielding layer) with respect to each other. The space is narrowed, and the area of the concave portion on the surface of the shielding layer (that is, the concave portion of the shielding layer when the surface of the shielding layer is viewed from the surface on which the adhesive layer is laminated when the adhesive layer does not contain a conductive filler) becomes larger. few. Thereby, when the electromagnetic wave shielding film is attached to the printed wiring board, the ratio of the adhesive between the shielding layer and the printed wiring board is reduced, and the distance (average value) between the signal transmission channel and the shielding layer is reduced. Here, the attenuation of the signal transmitted in the signal transmission channel depends on the dielectric loss of the material existing between the signal transmission channel and the shielding layer. If the dielectric loss of the material existing between the signal transmission channel and the shielding layer changes, large, the attenuation of the signal also increases. Therefore, it is estimated that when RSm is less than 40 μm, the dielectric loss between the signal transmission channel and the shielding layer increases, and the amount of signal attenuation also increases. In addition, when RSm is estimated to exceed 100 μm, the distance between the convex portions on the surface of the shielding layer increases, and the contact area with the ground circuit decreases, so that good shielding characteristics cannot be obtained. In addition, it is estimated that when RSm exceeds 100 μm, the surface shape of the shield layer tends to be gentle and there are many convex portions with low heights. Therefore, the ratio of the adhesive layer existing between the shield layer and the signal circuit is reduced, and the transmission characteristics are deteriorated. However, the above presumptions are not intended to limit the present invention.

RSm宜為95μm以下、較佳為90μm以下、更佳為85μm以下、特別佳為80μm以下。另一方面,RSm宜為45μm以上、較佳為50μm以上、更佳為55μm以上。RSm is preferably 95 μm or less, preferably 90 μm or less, more preferably 85 μm or less, and particularly preferably 80 μm or less. On the other hand, RSm is preferably 45 μm or more, preferably 50 μm or more, and more preferably 55 μm or more.

RSm例如可藉由選擇構成絕緣性保護層或屏蔽層的材料、調節絕緣性保護層或屏蔽層的製造條件等手段而成為所期望的值,但本發明之一態樣之電磁波屏蔽膜並不限定於利用上述手段而獲得者。關於使RSm成為預定值的方法,有下述方法等:例如使絕緣性保護層含有填料而於絕緣性保護層的表面形成凹凸,並藉由加成法於該凹凸表面形成屏蔽層的方法;例如藉由蝕刻法等將形成於絕緣性保護層表面的屏蔽層的一部分表面去除的方法;例如藉由網版印刷法或被覆遮罩進行真空蒸鍍的方法等而於絕緣性保護層表面沉積具有預定表面形狀的屏蔽層的方法。For example, RSm can be set to a desired value by selecting a material constituting the insulating protective layer or shielding layer, adjusting the manufacturing conditions of the insulating protective layer or shielding layer, etc. However, the electromagnetic wave shielding film of one aspect of the present invention does not It is limited to those obtained by the above-mentioned means. Regarding the method of making RSm a predetermined value, there are the following methods: for example, the insulating protective layer contains a filler to form unevenness on the surface of the insulating protective layer, and the method of forming a shielding layer on the uneven surface by an addition method; For example, a method of removing a part of the surface of the shielding layer formed on the surface of the insulating protective layer by etching, etc.; A method for a shielding layer having a predetermined surface shape.

屏蔽層之負荷面積率Smr2(以下亦稱為Smr2)宜為92%以上、較佳為94%以上、更佳為95%以上、特別佳為95.5%以上。Smr2的上限通常小於100%,但由生產性之觀點而言亦可為99%以下。Smr2為92%以上時,有容易抑制於印刷配線板傳輸的高頻信號的傳輸損失、且容易優化與印刷配線板的接地電路的連接性之傾向。The load area ratio Smr2 (hereinafter also referred to as Smr2) of the shielding layer is preferably 92% or more, preferably 94% or more, more preferably 95% or more, and particularly preferably 95.5% or more. The upper limit of Smr2 is usually less than 100%, but may be 99% or less from the viewpoint of productivity. When Smr2 is 92% or more, it is easy to suppress the transmission loss of the high-frequency signal transmitted to the printed wiring board, and it tends to be easy to optimize the connectivity with the ground circuit of the printed wiring board.

負荷面積率Smr2為ISO 25178-2:2012所定義的參數。如圖3概念性所示,Smr2係指針對在關於粗度曲線的負荷曲線的中央部分將負荷面積率Smr的差ΔSmr設為40%所畫出的負荷曲線的割線,將成為最緩斜率的直線設為等價直線,並將等價直線於負荷面積率為0%與100%的位置與縱軸相交的二個高度位置之間設為核心部時,負荷曲線與突出谷部和核心部的交界線相交的點上的負荷面積率。Smr2係按照於後述實施例中說明的Smr2測定方法而求出的值。再者,負荷曲線係關於面的負荷曲線,以切斷程度相對於負荷面積率的函數表示。The load area ratio Smr2 is a parameter defined by ISO 25178-2:2012. As conceptually shown in FIG. 3 , Smr2 refers to the secant of the load curve drawn with the difference ΔSmr of the load area ratio Smr as 40% in the central part of the load curve with respect to the thickness curve, and will be the secant of the slowest slope. When the straight line is set as an equivalent straight line, and the equivalent straight line is set as the core part between the position where the load area ratio is 0% and 100% and the two height positions where the vertical axis intersects, the load curve is related to the protruding valley part and the core part. The load area rate at the point where the boundary lines intersect. Smr2 is a value obtained in accordance with the Smr2 measurement method described in the examples below. In addition, the load curve is a load curve with respect to the surface, and is expressed as a function of the degree of cutting with respect to the load area ratio.

Smr2例如可藉由選擇構成絕緣性保護層或屏蔽層的材料、調節絕緣性保護層或屏蔽層的製造條件等手段而成為所期望的值,但本發明之電磁波屏蔽膜並不限定於利用上述手段而獲得者。Smr2 can be set to a desired value by, for example, selecting the material constituting the insulating protective layer or the shielding layer, and adjusting the manufacturing conditions of the insulating protective layer or the shielding layer, etc. However, the electromagnetic wave shielding film of the present invention is not limited to the use of the above means to gain.

屏蔽層之負荷面積率Smr1(以下亦稱為Smr1)宜為17%以上、較佳為18%以上、更佳為20%以上、特別佳為22%以上。另一方面,Smr1通常為50%以下。Smr1為17%以上時,有容易抑制於印刷配線板傳輸的高頻信號的傳輸損失、且容易優化與印刷配線板的接地電路的連接性之傾向。The load area ratio Smr1 (hereinafter also referred to as Smr1) of the shielding layer is preferably 17% or more, preferably 18% or more, more preferably 20% or more, and particularly preferably 22% or more. On the other hand, Smr1 is usually 50% or less. When Smr1 is 17% or more, it is easy to suppress the transmission loss of the high-frequency signal transmitted to the printed wiring board, and it tends to be easy to optimize the connectivity with the ground circuit of the printed wiring board.

負荷面積率Smr1為ISO 25178-2:2012所定義的參數。如圖3概念性所示,Smr1係指針對在關於粗度曲線的負荷曲線的中央部分將負荷面積率Smr的差ΔSmr設為40%所畫出的負荷曲線的割線,將成為最緩斜率的直線設為等價直線,並將等價直線於負荷面積率為0%與100%的位置與縱軸相交的二個高度位置之間設為核心部時,負荷曲線與突出山部和核心部的交界線相交的點上的負荷面積率。Smr1係按照於後述實施例中說明的Smr1測定方法而求出的值。再者,負荷曲線係關於面的負荷曲線,以切斷程度相對於負荷面積率的函數表示。The load area ratio Smr1 is a parameter defined by ISO 25178-2:2012. As conceptually shown in FIG. 3 , Smr1 refers to the secant line of the load curve drawn with the difference ΔSmr of the load area ratio Smr as 40% in the central part of the load curve with respect to the thickness curve, and will be the secant of the slowest slope. When the straight line is set as an equivalent straight line, and the equivalent straight line is set as the core part between the positions where the load area ratio is 0% and 100% and the two height positions where the vertical axis intersects, the load curve is related to the protruding mountain part and the core part. The load area rate at the point where the boundary lines intersect. Smr1 is a value determined according to the Smr1 measurement method described in the examples below. In addition, the load curve is a load curve with respect to the surface, and is expressed as a function of the degree of cutting with respect to the load area ratio.

Smr1例如可藉由選擇構成絕緣性保護層或屏蔽層的材料、調節絕緣性保護層或屏蔽層的製造條件等手段而成為所期望的值,但本發明之電磁波屏蔽膜並不限定於利用上述手段而獲得者。Smr1 can be set to a desired value by, for example, selecting the material constituting the insulating protective layer or the shielding layer, and adjusting the manufacturing conditions of the insulating protective layer or the shielding layer. However, the electromagnetic wave shielding film of the present invention is not limited to the use of the above means to gain.

(接著劑層) 接著劑層可由已知的接著劑或黏著劑構成。由抑制於印刷配線板傳輸的高頻信號的傳輸損失之觀點而言,接著劑宜具有較低的介電常數。接著劑層的相對介電常數於測定頻率1GHz、測定溫度23℃下例如可為1~5、較佳為2~2.8。又,接著劑層的介電損耗正切於測定頻率1GHz、測定溫度23℃下例如可為0~0.03、較佳為0.0001~0.02。(Adhesive Layer) The adhesive layer may be constituted by a known adhesive or adhesive. From the viewpoint of suppressing transmission loss of high-frequency signals transmitted through the printed wiring board, the adhesive preferably has a low dielectric constant. The relative dielectric constant of the adhesive layer may be, for example, 1 to 5, preferably 2 to 2.8, at a measurement frequency of 1 GHz and a measurement temperature of 23°C. In addition, the dielectric loss tangent of the adhesive layer may be, for example, 0 to 0.03, preferably 0.0001 to 0.02, at a measurement frequency of 1 GHz and a measurement temperature of 23°C.

接著劑層可為絕緣性抑或導電性。接著劑層為導電性時,可為各向異性導電性抑或各向同性導電性。然而,由抑制傳輸損失之觀點、薄膜化及製造成本等觀點而言,接著劑層宜不含導電性填料(即為絕緣性)。The adhesive layer can be insulating or conductive. When the adhesive layer is conductive, it may be anisotropic conductivity or isotropic conductivity. However, it is preferable that the adhesive layer does not contain conductive fillers (that is, insulating properties) from the viewpoint of suppressing transmission loss, thinning, and manufacturing cost.

接著劑層含有導電性填料時,關於導電性填料例如可列舉:金屬填料、碳填料及其等之混合物等。關於金屬填料,例如可列舉:銀、銅、鎳等金屬粉等,該等亦可為經以金或銀被覆者。When the adhesive layer contains a conductive filler, the conductive filler includes, for example, a metal filler, a carbon filler, a mixture thereof, and the like. As a metal filler, metal powders, such as silver, copper, and nickel, etc. are mentioned, for example, These may be covered with gold or silver.

接著劑層可由接著性樹脂組成物構成。關於接著性樹脂組成物所包含的樹脂,只要具有接著性即可,並無特別限定,但例如可包含上述作為絕緣性保護層中使用的樹脂所舉例的樹脂。接著性樹脂組成物例如可包含熱塑性樹脂或熱硬化性樹脂。The adhesive layer may be composed of an adhesive resin composition. The resin contained in the adhesive resin composition is not particularly limited as long as it has adhesiveness, and for example, the resin exemplified above as the resin used for the insulating protective layer can be contained. The adhesive resin composition may contain, for example, a thermoplastic resin or a thermosetting resin.

關於熱塑性樹脂,例如可列舉:苯乙烯系樹脂、乙酸乙烯酯系樹脂、聚酯系樹脂、聚乙烯系樹脂、聚丙烯系樹脂、醯亞胺系樹脂、醯胺系樹脂及丙烯酸系樹脂等。接著性樹脂組成物包含熱塑性樹脂時,接著性樹脂組成物所包含的熱塑性樹脂宜玻璃轉移點及/或熔點低於絕緣性保護層所包含的熱塑性樹脂。As a thermoplastic resin, a styrene-type resin, a vinyl acetate-type resin, a polyester-type resin, a polyethylene-type resin, a polypropylene-type resin, an imide-type resin, an amide-type resin, an acrylic resin, etc. are mentioned, for example. When the adhesive resin composition contains a thermoplastic resin, the thermoplastic resin contained in the adhesive resin composition preferably has a lower glass transition point and/or melting point than the thermoplastic resin contained in the insulating protective layer.

關於熱硬化性樹脂,例如可列舉:酚系樹脂、環氧系樹脂、胺基甲酸酯系樹脂、三聚氰胺系樹脂及醇酸系樹脂等。此等樹脂亦可經改質。As a thermosetting resin, a phenol type resin, an epoxy type resin, a urethane type resin, a melamine type resin, an alkyd type resin, etc. are mentioned, for example. These resins can also be modified.

接著性樹脂組成物亦可視需要包含上述導電性填料或如下至少1種添加劑:例如硬化促進劑、黏著性賦予劑、抗氧化劑、顏料、染料、塑化劑、紫外線吸收劑、消泡劑、調平劑、填充劑、阻燃劑及黏度調節劑等。The adhesive resin composition may also optionally contain the above-mentioned conductive fillers or at least one of the following additives: for example, hardening accelerators, adhesion imparting agents, antioxidants, pigments, dyes, plasticizers, ultraviolet absorbers, defoaming agents, adjusting agents Leveling agent, filler, flame retardant and viscosity modifier, etc.

關於黏著劑只要為具有黏著性的樹脂即可,並無特別限定,例如可列舉:由丙烯酸系樹脂、胺基甲酸酯系樹脂、矽系樹脂構成者等。黏著劑通常可使用形成於剝離膜上者。The adhesive is not particularly limited as long as it is a resin having adhesive properties, and examples thereof include those composed of acrylic resins, urethane resins, and silicone resins. As the adhesive, one formed on the release film can be generally used.

接著劑層的厚度並無特別限定,例如可為1μm以上且20μm以下。接著劑層的厚度較佳為4μm以上、更佳為5μm以上。另一方面,接著劑層的厚度較佳為9μm以下、更佳為8μm以下。接著劑層的厚度可按照例如後述實施例中的厚度測定方法進行測定。The thickness of the adhesive layer is not particularly limited, but may be, for example, 1 μm or more and 20 μm or less. The thickness of the adhesive layer is preferably 4 μm or more, more preferably 5 μm or more. On the other hand, the thickness of the adhesive layer is preferably 9 μm or less, more preferably 8 μm or less. The thickness of the adhesive layer can be measured, for example, according to the thickness measurement method in the examples described later.

接著劑層的厚度為1μm以上時,有電磁波屏蔽膜的傳輸特性容易變得良好的傾向。接著劑層的厚度為20μm以下時,於貼合電磁波屏蔽膜與印刷配線板時,有屏蔽層的凸部容易穿過接著劑層而與印刷配線板的接地電路連接的傾向。When the thickness of the adhesive layer is 1 μm or more, the transmission characteristics of the electromagnetic wave shielding film tend to be good. When the thickness of the adhesive layer is 20 μm or less, when the electromagnetic wave shielding film and the printed wiring board are bonded together, the projections of the shielding layer tend to easily pass through the adhesive layer and be connected to the ground circuit of the printed wiring board.

電磁波屏蔽膜的厚度並無特別限定,例如可為3μm以上且50μm以下。接著劑層的厚度較佳為5μm以上、更佳為30μm以上。另一方面,接著劑層的厚度較佳為10μm以下、更佳為20μm以下。接著劑層的厚度係按照後述實施例中的厚度測定方法測定出的值。The thickness of the electromagnetic wave shielding film is not particularly limited, but may be, for example, 3 μm or more and 50 μm or less. The thickness of the adhesive layer is preferably 5 μm or more, more preferably 30 μm or more. On the other hand, the thickness of the adhesive layer is preferably 10 μm or less, more preferably 20 μm or less. The thickness of the adhesive layer is a value measured according to the thickness measurement method in the examples described later.

<電磁波屏蔽膜之製造方法> 電磁波屏蔽膜之製造方法可為例如包含如下步驟的製造方法:於支持基材上塗佈絕緣性樹脂組成物並使之硬化而形成絕緣性保護層之步驟(以下亦稱為絕緣性保護層形成步驟);於絕緣性保護層上形成屏蔽層之步驟(以下亦稱為屏蔽層形成步驟);及於屏蔽層上形成接著劑層之步驟(以下亦稱為接著劑層步驟)。如此形成的電磁波屏蔽膜可為本發明之一態樣之電磁波屏蔽膜。<Manufacturing method of electromagnetic wave shielding film> The manufacturing method of the electromagnetic wave shielding film may be, for example, a manufacturing method including a step of coating an insulating resin composition on a support substrate and curing it to form an insulating protective layer (hereinafter. Also referred to as the insulating protective layer forming step); the step of forming a shielding layer on the insulating protective layer (hereinafter also referred to as the shielding layer forming step); and the step of forming an adhesive layer on the shielding layer (hereinafter also referred to as the following agent layer step). The electromagnetic wave shielding film thus formed can be an electromagnetic wave shielding film of one aspect of the present invention.

(絕緣性保護層形成步驟) 關於支持基材,可列舉由熱塑性樹脂、例如聚丙烯(PP)、聚乙烯(PE)、聚對苯二甲酸乙二酯(PET)、聚醯亞胺(PI)、聚醯胺(PA)、聚碳酸酯(PC)、聚苯乙烯(PS)或聚苯硫醚(PPS)等構成者。其中較佳為聚對苯二甲酸乙二酯(PET),因為具有彎曲性及高耐熱性。(Insulating Protective Layer Forming Step) As the supporting base material, thermoplastic resins such as polypropylene (PP), polyethylene (PE), polyethylene terephthalate (PET), polyimide (PI) can be mentioned. ), polyamide (PA), polycarbonate (PC), polystyrene (PS) or polyphenylene sulfide (PPS). Among them, polyethylene terephthalate (PET) is preferable because of its flexibility and high heat resistance.

支持基材的厚度例如可為10μm以上且10mm以下、較佳為20μm以上且8mm以下。支持基材例如可將捲成捲筒狀的支持基材一面捲出一面連續性使用,亦可使用預先裁切過的單片物。The thickness of the support substrate may be, for example, 10 μm or more and 10 mm or less, preferably 20 μm or more and 8 mm or less. As the support base, for example, a roll-shaped support base can be continuously used while being rolled out, or a single piece that has been cut in advance may be used.

亦可於支持基材與絕緣性保護層之間設置剝離劑層。關於剝離劑,例如可列舉:氟系樹脂、聚酯系樹脂、矽系樹脂、三聚氰胺系樹脂等。A release agent layer may also be provided between the support substrate and the insulating protective layer. As a release agent, a fluorine resin, a polyester resin, a silicone resin, a melamine resin etc. are mentioned, for example.

關於絕緣性樹脂組成物,可使用於上述關於電磁波屏蔽膜中之絕緣性保護層的說明中所舉例者。絕緣性樹脂組成物亦可視需要包含至少1種溶劑,例如甲苯、丙酮、甲乙酮、甲醇、乙醇、丙醇及二甲基甲醯胺等。絕緣性樹脂組成物可藉由周知製造方法、例如將各成分及溶劑一起混合調製而獲得。為了在屏蔽層的接著劑層側的表面設置凹凸,宜使用包含粒子狀物質的絕緣性樹脂組成物。The insulating resin composition can be used as exemplified in the description of the insulating protective layer in the electromagnetic wave shielding film above. The insulating resin composition may optionally contain at least one solvent, such as toluene, acetone, methyl ethyl ketone, methanol, ethanol, propanol, dimethylformamide, and the like. The insulating resin composition can be obtained by a well-known manufacturing method, for example, by mixing and preparing each component and a solvent together. In order to provide unevenness on the surface of the shield layer on the adhesive layer side, an insulating resin composition containing particulate matter is preferably used.

關於在支持基材單面塗佈絕緣性樹脂組成物之方法,例如可使用模嘴塗佈法、缺角輪塗佈法、凹版塗佈法、狹縫式模具塗佈法等方法。As a method of coating the insulating resin composition on one side of the support substrate, for example, a die coating method, a notch wheel coating method, a gravure coating method, and a slit die coating method can be used.

於塗佈絕緣性樹脂組成物後,可視需要藉由加熱及/或減壓使之乾燥而除去溶劑。After coating the insulating resin composition, the solvent may be removed by heating and/or drying under reduced pressure as necessary.

絕緣性樹脂組成物中的絕緣性樹脂為熱硬化性樹脂時,絕緣性樹脂組成物可於乾燥後藉由加熱而硬化。加熱可使用例如紅外線照射爐、熱風烘箱等進行。When the insulating resin in the insulating resin composition is a thermosetting resin, the insulating resin composition can be cured by heating after drying. Heating can be performed using, for example, an infrared irradiation furnace, a hot air oven, or the like.

絕緣性樹脂為活性能量線硬化性樹脂時,絕緣性樹脂組成物可於乾燥後藉由照射活性能量線而硬化。活性能量線例如可為紫外線、電子束、紅外線等。其中較佳為紫外線。紫外線的照射可使用例如高壓水銀燈、金屬鹵素燈、低壓水銀燈、超高壓水銀燈等光源進行。When the insulating resin is an active energy ray curable resin, the insulating resin composition can be cured by irradiating an active energy ray after drying. The active energy rays may be, for example, ultraviolet rays, electron beams, infrared rays, or the like. Among them, ultraviolet rays are preferable. Irradiation of ultraviolet rays can be performed using, for example, light sources such as high-pressure mercury lamps, metal halide lamps, low-pressure mercury lamps, and ultra-high pressure mercury lamps.

支持基材可於使絕緣性樹脂組成物乾燥及/或硬化後進行剝離,或於將電磁波屏蔽膜黏貼於印刷配線板後進行剝離。The support base material can be peeled off after drying and/or curing the insulating resin composition, or peeling off after the electromagnetic wave shielding film is pasted on the printed wiring board.

亦可無論絕緣性保護組成物中有無粒子狀物質,均至少使絕緣性保護層的屏蔽層側的表面凹凸化。將絕緣性保護層的屏蔽層側的表面進行凹凸化後,有容易獲得具有預定RSm的屏蔽層的傾向。Regardless of the presence or absence of particulate matter in the insulating protective composition, at least the surface on the shield layer side of the insulating protective layer may be made uneven. When the surface on the shield layer side of the insulating protective layer is roughened, a shield layer having a predetermined RSm tends to be easily obtained.

關於使絕緣性保護層表面凹凸化之方法,例如可列舉如下方法等:使用包含粒子狀物質之絕緣性保護組成物的方法;藉由噴砂加工、利用電漿照射或電子束照射之乾式蝕刻、利用藥劑處理之溼式蝕刻或壓紋加工等對已形成的絕緣性保護層表面進行處理的方法;於形成的絕緣性樹脂組成物的塗膜撒上粒子狀物質的方法;於支持基材上撒上粒子狀物質後塗佈絕緣性樹脂組成物的方法;於表面具有凹凸形狀的支持基材的表面塗佈絕緣性樹脂組成物的方法。As a method of making the surface of the insulating protective layer uneven, for example, the following methods are mentioned: a method of using an insulating protective composition containing a particulate substance; dry etching by sandblasting, plasma irradiation or electron beam irradiation, A method of treating the surface of the formed insulating protective layer by chemical treatment such as wet etching or embossing; a method of sprinkling particulate matter on the formed coating film of the insulating resin composition; A method of applying an insulating resin composition after sprinkling a particulate matter; a method of applying an insulating resin composition to the surface of a support substrate having a concavo-convex shape on the surface.

使用包含粒子狀物質的絕緣性保護組成物於絕緣性保護層的屏蔽層側的表面設置凹凸時,關於粒子狀物質可使用具有絕緣性的粒子狀物質。關於具有絕緣性的粒子狀物質之例,可舉如無機粒子、例如二氧化矽或氧化鋁等、以及樹脂粒子等。粒子狀物質可單獨或組合2種以上使用。When providing unevenness|corrugation on the surface of the shield layer side of an insulating protective layer using the insulating protective composition containing a particulate-form substance, the particulate-form substance which has an insulating property can be used as a particulate-form substance. Examples of the insulating particulate matter include inorganic particles, for example, silica, alumina, and the like, and resin particles. The particulate matter can be used alone or in combination of two or more.

使用的粒子狀物質的平均粒徑(D50)可根據絕緣性保護層中屏蔽層側的表面粗度而適當決定。粒子狀物質的平均粒徑例如可為1μm以上、較佳為5μm以上、更佳為10μm以上、再更佳為13μm以上、特別佳為15μm以上。另一方面,粒子狀物質的平均粒徑例如可為50μm以下、較佳為40μm以下、更佳為35μm以下、再更佳為30μm以下、特別佳為25μm以下。粒子狀物質的平均粒徑為1μm以上且50μm以下時,有下述傾向:容易將絕緣性保護層的屏蔽層側的表面適度地凹凸化,使屏蔽層的接著劑層側表面的RSm成為40μm以上且100μm以下,且容易使電磁波屏蔽膜的厚度變得適當。粒子狀物質的平均粒徑係按照後述實施例中的平均粒徑測定方法測定出的值。The average particle diameter (D50) of the particulate matter to be used can be appropriately determined according to the surface roughness on the shield layer side in the insulating protective layer. The average particle diameter of the particulate matter may be, for example, 1 μm or more, preferably 5 μm or more, more preferably 10 μm or more, still more preferably 13 μm or more, and particularly preferably 15 μm or more. On the other hand, the average particle diameter of the particulate matter may be, for example, 50 μm or less, preferably 40 μm or less, more preferably 35 μm or less, still more preferably 30 μm or less, and particularly preferably 25 μm or less. When the average particle diameter of the particulate matter is 1 μm or more and 50 μm or less, there is a tendency that the surface of the insulating protective layer on the shielding layer side tends to be appropriately uneven and the RSm of the surface on the adhesive layer side of the shielding layer is 40 μm It is more than 100 micrometers or less, and it is easy to make the thickness of an electromagnetic wave shielding film suitable. The average particle diameter of the particulate matter is a value measured in accordance with the average particle diameter measuring method in the examples described later.

使絕緣性樹脂組成物含有粒子狀物質時,絕緣性樹脂組成物中的粒子狀物質的含量可相對於樹脂成分100質量份為例如1質量份以上且100質量份以下。使絕緣性樹脂組成物含有粒子狀物質時,絕緣性樹脂組成物中的粒子狀物質的含量相對於樹脂成分100質量份較佳為5質量份以上、更佳為10質量份以上、再更佳為20質量份以上。另一方面,使絕緣性樹脂組成物含有粒子狀物質時,絕緣性樹脂組成物中的粒子狀物質的含量相對於樹脂成分100質量份宜為90質量份以下、較佳為80質量份以下、更佳為60質量份以下。使絕緣性樹脂組成物以1質量份以上且100質量份以下含有粒子狀物質時,有容易將絕緣性保護層的表面適度地凹凸化、且容易使屏蔽層的接著劑層側表面的RSm成為40μm以上且100μm以下的傾向。When the insulating resin composition contains the particulate matter, the content of the particulate matter in the insulating resin composition may be, for example, 1 part by mass or more and 100 parts by mass or less with respect to 100 parts by mass of the resin component. When the insulating resin composition contains particulate matter, the content of the particulate matter in the insulating resin composition is preferably 5 parts by mass or more, more preferably 10 parts by mass or more, even more preferably 100 parts by mass of the resin component. It is 20 mass parts or more. On the other hand, when the insulating resin composition contains particulate matter, the content of the particulate matter in the insulating resin composition is preferably 90 parts by mass or less, preferably 80 parts by mass or less, relative to 100 parts by mass of the resin component. More preferably, it is 60 parts by mass or less. When the insulating resin composition contains the particulate matter in an amount of 1 part by mass or more and 100 parts by mass or less, the surface of the insulating protective layer can be easily unevenly formed, and the RSm of the adhesive layer side surface of the shielding layer can be easily made. A tendency of 40 μm or more and 100 μm or less.

粒子狀物質的形狀並無特別限定,可為球狀、針狀、纖維狀、小片狀及樹枝狀等形狀,但由使屏蔽層的接著劑層側表面的RSm成為40μm以上且100μm以下之觀點而言,較佳為球狀。The shape of the particulate matter is not particularly limited, and may be spherical, needle-like, fibrous, platelet-like, and dendritic. From a viewpoint, spherical shape is preferable.

絕緣性樹脂組成物含有粒子狀物質時,絕緣性保護層的厚度例如可為1μm以上、較佳為5μm以上、更佳為10μm以上、再更佳為15μm以上。另一方面,絕緣性保護層的厚度例如可為30μm以下、較佳為28μm以下、更佳為25μm以下、再更佳為23μm以下。When the insulating resin composition contains particulate matter, the thickness of the insulating protective layer may be, for example, 1 μm or more, preferably 5 μm or more, more preferably 10 μm or more, and even more preferably 15 μm or more. On the other hand, the thickness of the insulating protective layer may be, for example, 30 μm or less, preferably 28 μm or less, more preferably 25 μm or less, and still more preferably 23 μm or less.

例如於利用噴砂加工的處理中,可對支持基材表面噴上研磨劑、例如珠子、沙子、乾冰等而使之凹凸化。例如於利用壓紋加工的處理中,可對絕緣性保護層表面按壓具有凹凸形狀的模具而賦予凹凸形狀。For example, in the treatment by sandblasting, the surface of the support substrate may be sprayed with an abrasive, such as beads, sand, dry ice, or the like, to be uneven. For example, in the treatment by embossing, the surface of the insulating protective layer can be given a concavo-convex shape by pressing a mold having a concavo-convex shape.

將絕緣性保護層的屏蔽層側的表面凹凸化時,絕緣性保護層的屏蔽層側表面之例如粗度曲線要素的平均長度RSm可為100μm以下、較佳為80μm以下、更佳為60μm以下。絕緣性保護層的屏蔽層側表面的RSm為100μm以下時,由於有容易將屏蔽層的接著劑層側表面的RSm設為40μm以上且100μm以下的傾向,故為佳。When the surface on the shield layer side of the insulating protective layer is made uneven, for example, the average length RSm of the roughness curve element on the shield layer side surface of the insulating protective layer may be 100 μm or less, preferably 80 μm or less, more preferably 60 μm or less. . When the RSm of the shield layer side surface of the insulating protective layer is 100 μm or less, it is preferable because the RSm of the adhesive layer side surface of the shield layer tends to be 40 μm or more and 100 μm or less.

(屏蔽層形成步驟) 屏蔽層可藉由於絕緣性保護層的表面形成金屬膜而形成。金屬膜的形成可藉由電解鍍覆法、無電鍍覆法、濺鍍法、電子束蒸鍍法、真空蒸鍍法、CVD法、或金屬有機法等加成法、貼合金屬箔的方法等而進行。其中,較佳為電解鍍覆法或無電鍍覆法。藉由電解鍍覆法或無電鍍覆法形成金屬膜時,有容易於金屬膜表面形成樹枝狀的微小凹凸、且容易連接屏蔽層與印刷配線板的接地電路的傾向。金屬膜可由上述關於屏蔽層所提到的金屬構成。(Shield Layer Forming Step) The shield layer can be formed by forming a metal film on the surface of the insulating protective layer. The metal film can be formed by an additive method such as an electrolytic plating method, an electroless plating method, a sputtering method, an electron beam evaporation method, a vacuum evaporation method, a CVD method, or a metal-organic method, or a method of bonding a metal foil. and so on. Among them, an electrolytic plating method or an electroless plating method is preferable. When a metal film is formed by an electrolytic plating method or an electroless plating method, dendritic fine irregularities are easily formed on the surface of the metal film, and the shield layer and the ground circuit of the printed wiring board tend to be easily connected. The metal film may consist of the metals mentioned above with respect to the shielding layer.

使絕緣性保護層含有填料而於絕緣性保護層的表面形成凹凸,並以加成法於該凹凸表面形成屏蔽層時,較佳的加成法宜為電解鍍覆法及無電鍍覆法。電解鍍覆法可採用周知的方法。例如電解液宜為硫酸銅,並宜於25℃~40℃的溫度下施加60秒~6分鐘的電流。無電鍍覆法可採用周知的方法。關於電解鍍覆法中的觸媒,較佳為金屬奈米粒子,宜於45℃~60℃的溫度下進行60秒~5分鐘。使絕緣性保護層含有填料而於絕緣性保護層的表面形成凹凸,並以加成法於該凹凸表面形成屏蔽層時,屏蔽層的厚度並無特別限定,較佳為0.1~15μm、更佳為0.1~1μm、再更佳為0.1~0.5μm。若屏蔽層的厚度在上述範圍,則有容易獲得與絕緣性保護層表面的凹凸形狀大致相同形狀的屏蔽層的傾向。When the insulating protective layer contains fillers to form concavities and convexities on the surface of the insulating protective layer, and the shielding layer is formed on the concavo-convex surface by an additive method, the preferred additive methods are electrolytic plating and electroless plating. A well-known method can be employ|adopted for the electrolytic plating method. For example, the electrolyte should be copper sulfate, and the current should be applied for 60 seconds to 6 minutes at a temperature of 25°C to 40°C. As the electroless plating method, a known method can be used. The catalyst in the electrolytic plating method is preferably a metal nanoparticle, and the catalyst is preferably carried out at a temperature of 45° C. to 60° C. for 60 seconds to 5 minutes. When the insulating protective layer contains filler to form unevenness on the surface of the insulating protective layer, and the shielding layer is formed on the uneven surface by an additive method, the thickness of the shielding layer is not particularly limited, and it is preferably 0.1 to 15 μm, more preferably It is 0.1-1 micrometer, More preferably, it is 0.1-0.5 micrometer. When the thickness of the shielding layer is within the above-mentioned range, it tends to be easy to obtain a shielding layer having substantially the same shape as the uneven shape on the surface of the insulating protective layer.

藉由在形成金屬膜後使金屬膜的表面凹凸化,亦可使屏蔽層的接著劑層側表面的RSm成為40μm以上且100μm以下。關於使金屬膜表面凹凸化之方法,例如可列舉如下方法等:藉由噴砂加工、利用電漿照射或電子束照射之乾式蝕刻、利用藥劑處理之溼式蝕刻或壓紋加工等進行處理的方法。又,進行貼合金屬箔的方法時,可舉如將藉由壓紋加工而於表面設置有凹凸形狀的銅箔貼合於絕緣性保護層表面之方法等。By making the surface of the metal film uneven after forming the metal film, the RSm of the adhesive layer side surface of the shielding layer can also be set to be 40 μm or more and 100 μm or less. As a method of making the surface of the metal film uneven, for example, a method of processing by sandblasting, dry etching by plasma irradiation or electron beam irradiation, wet etching by chemical treatment, or embossing, etc. . Moreover, when performing the method of bonding a metal foil, the method of bonding the copper foil which provided the uneven|corrugated shape on the surface by embossing, etc., is mentioned, for example.

屏蔽層亦可由導電性粒子形成。關於由導電性粒子形成屏蔽層的方法,可列舉:藉由將包含導電性粒子的導電性糊料塗佈於絕緣性保護層表面而形成的方法、將導電性粒子撒在絕緣性保護層表面的方法等。關於塗佈包含導電性粒子的導電性糊料的方法,例如可列舉:模嘴塗佈法、缺角輪塗佈法、凹版塗佈法、狹縫式模具塗佈法等。塗佈包含導電性粒子的導電性糊料後,可視需要進行乾燥處理、硬化處理等。The shielding layer may be formed of electroconductive particles. About the method of forming a shielding layer from electroconductive particle, the method of forming by apply|coating the electroconductive paste containing electroconductive particle to the surface of the insulating protective layer, the method of forming by coating the electroconductive particle on the surface of the insulating protective layer, method etc. As a method of apply|coating the electroconductive paste containing electroconductive particle, a die coating method, a corner wheel coating method, a gravure coating method, a slit die coating method, etc. are mentioned, for example. After apply|coating the electroconductive paste containing electroconductive particle, drying process, hardening process, etc. are performed as needed.

(接著劑層形成步驟) 接著劑層可由接著劑或黏著劑構成。(Adhesive Layer Forming Step) The adhesive layer may be constituted by an adhesive or an adhesive.

由接著劑構成接著劑層時,可藉由將接著劑塗佈於屏蔽層而形成。關於將接著劑塗佈於屏蔽層的方法,例如可列舉:模嘴塗佈法、缺角輪塗佈法、凹版塗佈法、狹縫式模具塗佈法等。關於接著劑,可舉例上述的熱塑性樹脂組成物及熱硬化性樹脂組成物等。塗佈接著劑後,可視需要進行乾燥處理、硬化處理等。為了在與印刷配線板貼合之前保護接著劑層表面,亦可於接著劑層表面貼合剝離膜。When the adhesive layer is composed of an adhesive, it can be formed by applying the adhesive to the barrier layer. As a method of apply|coating an adhesive agent to a shield layer, a die-tip coating method, a corner wheel coating method, a gravure coating method, a slit die coating method, etc. are mentioned, for example. As an adhesive agent, the above-mentioned thermoplastic resin composition, thermosetting resin composition, etc. are mentioned. After applying the adhesive, drying treatment, hardening treatment, and the like may be performed as necessary. In order to protect the surface of the adhesive layer before bonding with the printed wiring board, a release film may be bonded to the surface of the adhesive layer.

又,由接著劑構成接著劑層時,亦可藉由將於剝離膜上塗佈有接著劑者之塗佈有接著劑側的面與屏蔽層的表面貼合而形成接著劑層。剝離膜可在與印刷配線板貼合時進行剝離。Moreover, when an adhesive agent layer is comprised with an adhesive agent, an adhesive agent layer can also be formed by sticking the adhesive agent side surface of the release film which apply|coats an adhesive agent with the surface of a shielding layer. The peeling film can be peeled off when it is bonded to a printed wiring board.

由黏著劑構成接著劑層時,通常可藉由將形成於剝離膜上的黏著劑貼合於屏蔽層側的表面而形成接著劑層。剝離膜可在與印刷配線板貼合時進行剝離。When the adhesive layer is composed of an adhesive, the adhesive layer can usually be formed by sticking the adhesive formed on the release film to the surface on the side of the shielding layer. The peeling film can be peeled off when it is bonded to a printed wiring board.

由此獲得的電磁波屏蔽膜,即使接著劑層不含導電性填料,於貼合電磁波屏蔽膜與印刷配線板時,屏蔽膜的凸部亦可與印刷配線板的接地電路連接,能夠發揮良好的傳輸特性。又,因為不含導電性填料,故可使屏蔽膜較薄。In the electromagnetic wave shielding film thus obtained, even if the adhesive layer does not contain a conductive filler, when the electromagnetic wave shielding film and the printed wiring board are pasted together, the convex portion of the shielding film can be connected to the ground circuit of the printed wiring board, and good performance can be exhibited. transfer characteristics. Moreover, since the conductive filler is not contained, the shielding film can be made thinner.

<屏蔽印刷配線板> 可藉由將電磁波屏蔽膜貼合於印刷配線板而作成屏蔽印刷配線板。<Shielded printed wiring board> A shielded printed wiring board can be produced by bonding an electromagnetic wave shielding film to a printed wiring board.

於圖4顯示本發明之一態樣之屏蔽印刷配線板300。如圖4所示,屏蔽印刷配線板300具有電磁波屏蔽膜100與印刷配線板200。印刷配線板200具有:基底層210、形成於基底層210上的接地電路220A與信號電路220B、及以使接地電路220A之至少一部分露出之方式覆蓋基底層210的絕緣層230。屏蔽層120的一部分凸部穿過接著劑層130,與接地電路220A接觸。因此,即使接著劑層130不含導電性填料,亦可使屏蔽層120與接地電路220A導通,發揮優異的屏蔽特性。又,由於屏蔽層120的接著劑側表面的RSm為100μm以下,故接著劑被蓄留於屏蔽層120之凹部,可於屏蔽層120與印刷配線板200之間充分地確保接著劑層130,因此可發揮良好的傳輸特性。 對信號電路220B傳輸高頻信號。所謂高頻係指例如從100MHz(極長短波)至3000GHz(亞毫米波)的區域,只要是於印刷配線板傳輸信號時所使用的100MHz至100GHz的區域,都適合使用本發明之電磁波屏蔽膜。FIG. 4 shows a shielded printed wiring board 300 according to an aspect of the present invention. As shown in FIG. 4 , the shielded printed wiring board 300 includes the electromagnetic wave shielding film 100 and the printed wiring board 200 . The printed wiring board 200 includes a base layer 210 , a ground circuit 220A and a signal circuit 220B formed on the base layer 210 , and an insulating layer 230 covering the base layer 210 so as to expose at least a part of the ground circuit 220A. A part of the convex portion of the shielding layer 120 passes through the adhesive layer 130 and is in contact with the ground circuit 220A. Therefore, even if the adhesive layer 130 does not contain a conductive filler, the shielding layer 120 and the ground circuit 220A can be electrically connected, and excellent shielding properties can be exhibited. In addition, since the RSm of the adhesive-side surface of the shielding layer 120 is 100 μm or less, the adhesive is stored in the concave portion of the shielding layer 120 , and the adhesive layer 130 can be sufficiently secured between the shielding layer 120 and the printed wiring board 200 . Therefore, good transmission characteristics can be exhibited. A high frequency signal is transmitted to the signal circuit 220B. The so-called high frequency refers to, for example, the region from 100MHz (extremely long and short wave) to 3000GHz (submillimeter wave), as long as it is the region of 100MHz to 100GHz used for signal transmission in printed wiring boards, the electromagnetic wave shielding film of the present invention is suitable for use .

(印刷配線板) 印刷配線板可為具有基底層、絕緣層、印刷電路者。基底層及絕緣層可為例如樹脂膜等。樹脂膜可由聚丙烯、交聯聚乙烯、聚酯、聚苯并咪唑、聚醯亞胺、聚醯亞胺醯胺、聚醚醯亞胺或聚苯硫醚等樹脂構成。(Printed Wiring Board) The printed wiring board may have a base layer, an insulating layer, and a printed circuit. The base layer and the insulating layer may be, for example, a resin film or the like. The resin film may be composed of resins such as polypropylene, cross-linked polyethylene, polyester, polybenzimidazole, polyimide, polyimide, polyetherimide, or polyphenylene sulfide.

(印刷電路) 印刷電路例如可為形成於基底層上的銅配線圖案等。印刷電路可具有信號電路及接地電路。(Printed Circuit) The printed circuit may be, for example, a copper wiring pattern or the like formed on the base layer. The printed circuit may have a signal circuit and a ground circuit.

電磁波屏蔽膜可將接著劑層置於印刷配線板側而與印刷配線板接著。例如屏蔽印刷配線板可藉由於印刷配線板上載置電磁波屏蔽膜,以加壓機一邊加熱一邊加壓而進行接著。於加壓時,屏蔽層的至少一部分凸部穿過接著劑層,與接地電路連接從而可導通。又,即使進行了加壓之情形下於屏蔽層的凹部亦充分地存在接著劑,故可獲得良好的傳輸特性。The electromagnetic wave shielding film can be bonded to the printed wiring board by placing the adhesive layer on the printed wiring board side. For example, the shielded printed wiring board can be bonded by placing an electromagnetic wave shielding film on the printed wiring board, and heating and pressing with a press. During pressurization, at least a part of the convex portion of the shielding layer passes through the adhesive layer and is connected to the ground circuit so as to be conductive. Moreover, even when pressurization is performed, since the adhesive agent fully exists in the recessed part of a shield layer, favorable transmission characteristics can be obtained.

本發明之一態樣之屏蔽印刷配線板由於可發揮良好的傳輸特性,故適合使用於需要高速地傳輸大量資料的智慧型手機或平板終端、個人電腦等。Since the shielded printed wiring board of one aspect of the present invention can exhibit good transmission characteristics, it is suitable for use in smart phones, tablet terminals, personal computers, etc. that need to transmit a large amount of data at high speed.

以下,舉實施例進一步具體地說明本發明,但本發明並不限定於此等例子。Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.

[實施例] 於實施例及比較例獲得的電磁波屏蔽膜中的各特性值係利用以下方法測定出。EXAMPLES Each characteristic value in the electromagnetic wave shielding film obtained in the Example and the comparative example was measured by the following method.

<測定RSm> 就各實施例及比較例獲得的屏蔽層測定RSm。具體而言,使用共聚焦顯微鏡(Lasertec公司製、OPTELICS HYBRID、物鏡20倍)測定屏蔽層表面的任意5處後,使用資料分析軟體(LMeye7),根據JIS B 0601:2013測定表面性狀,得到其算術平均值。又,截止波長λc設為0.8mm。<Measurement of RSm> RSm was measured for the shielding layers obtained in the respective Examples and Comparative Examples. Specifically, after measuring five arbitrary points on the surface of the shielding layer using a confocal microscope (manufactured by Lasertec, OPTELICS HYBRID, objective lens 20 times), the surface properties were measured according to JIS B 0601:2013 using data analysis software (LMeye7) to obtain the Arithmetic mean. In addition, the cutoff wavelength λc was set to 0.8 mm.

<測定Smr2> 就各實施例及比較例獲得的屏蔽層測定Smr2。具體而言,使用共聚焦顯微鏡(Lasertec公司製、OPTELICS HYBRID、物鏡20倍)測定屏蔽層表面的任意5處後,使用資料分析軟體(LMeye7),根據ISO 25178-6:2010測定表面性狀,得到其算術平均值。又,S濾波器的截止波長為0.0025mm、L濾波器的截止波長設為0.8mm。<Measurement of Smr2> Smr2 was measured for the shielding layers obtained in the respective Examples and Comparative Examples. Specifically, after measuring five arbitrary points on the surface of the shielding layer using a confocal microscope (manufactured by Lasertec, OPTELICS HYBRID, objective lens 20 times), the surface properties were measured according to ISO 25178-6:2010 using data analysis software (LMeye7) to obtain its arithmetic mean. In addition, the cutoff wavelength of the S filter was set to 0.0025 mm, and the cutoff wavelength of the L filter was set to 0.8 mm.

<測定Smr1> 就各實施例及比較例獲得的屏蔽層測定Smr1。具體而言,使用共聚焦顯微鏡(Lasertec公司製、OPTELICS HYBRID、物鏡20倍)測定屏蔽層表面的任意5處後,使用資料分析軟體(LMeye7),根據ISO 25178-6:2010測定表面性狀,得到其算術平均值。又,S濾波器的截止波長為0.0025mm、L濾波器的截止波長設為0.8mm。<Measurement of Smr1> Smr1 was measured for the shielding layers obtained in the respective Examples and Comparative Examples. Specifically, after measuring five arbitrary points on the surface of the shielding layer using a confocal microscope (manufactured by Lasertec, OPTELICS HYBRID, objective lens 20 times), the surface properties were measured according to ISO 25178-6:2010 using data analysis software (LMeye7) to obtain its arithmetic mean. In addition, the cutoff wavelength of the S filter was set to 0.0025 mm, and the cutoff wavelength of the L filter was set to 0.8 mm.

<測定平均粒徑> 島津製作所社股份有限公司製SALD-2200以吸光度30%進行測定,求出平均粒徑。<Measuring the average particle size> SALD-2200 manufactured by Shimadzu Corporation Co., Ltd. was measured at an absorbance of 30%, and the average particle size was determined.

<測定厚度> 接著劑層的厚度係由利用電子顯微鏡(日本電子股份有限公司製JSM-6510LA)以1000倍觀察電磁波屏蔽膜的截面而獲得的圖像,以5點平均算出接著劑層的厚度。<Measurement of thickness> The thickness of the adhesive layer is an image obtained by observing the cross section of the electromagnetic wave shielding film at 1000 times with an electron microscope (JSM-6510LA, manufactured by JEOL Ltd.), and the thickness of the adhesive layer is calculated by averaging 5 points. .

<評價連接性> 於印刷配線板的表面暫時黏貼電磁波屏蔽膜(120℃、0.5MPa、5秒)後,進行加熱加壓(170℃、3MPa、30分鐘),形成屏蔽印刷配線板。印刷配線板係使用如下者,其具有:彼此保持間隔地平行延伸的2條銅箔圖案、及覆蓋銅箔圖案且厚度25μm的由聚醯亞胺構成的絕緣層。於絕緣層上設置有使各個銅箔圖案露出的開口部。開口部的直徑設為1mm。藉由電阻計測定2條銅箔圖案之間的電阻值,藉此評價銅箔圖案與電磁波屏蔽膜的連接性。電阻小於0.4Ω時,視為連接性為良好。<Evaluation of Connectivity> After temporarily sticking an electromagnetic wave shielding film (120°C, 0.5MPa, 5 seconds) on the surface of a printed wiring board, heat and pressure (170°C, 3MPa, 30 minutes) were performed to form a shielded printed wiring board. A printed wiring board having two copper foil patterns extending in parallel with an interval therebetween and an insulating layer made of polyimide having a thickness of 25 μm and covering the copper foil patterns were used. The insulating layer is provided with openings exposing the respective copper foil patterns. The diameter of the opening was 1 mm. By measuring the resistance value between two copper foil patterns with an electrical resistance meter, the connectivity between the copper foil pattern and the electromagnetic wave shielding film was evaluated. When the resistance was less than 0.4Ω, the connectivity was considered to be good.

<頻率特性> 就電磁波屏蔽膜的頻率特性,使用圖5所示的網路分析儀31進行評價。網路分析儀31係使用Rohde & Schwarz公司製的ZVL6。網路分析儀31具有輸入端子與輸出端子,其等分別與連接用基板32連接。將測定對象的屏蔽印刷配線板60以被支持成浮在空中的直線狀態之方式連接於該1對連接用基板32之間後,進行測定。屏蔽印刷配線板60使用長度200mm者。又,於100kHz~6GHz的頻率範圍內進行測定。又,於溫度25℃、相對溼度30~50%的氣體環境下進行測定。網路分析儀31於頻率10GHz下測定輸入的信號相對於輸出的信號衰減了多少。將測出的衰減量作為傳輸損失顯示於表2。衰減量越接近零,表示傳輸損失越少。<Frequency Characteristics> The frequency characteristics of the electromagnetic wave shielding film were evaluated using the network analyzer 31 shown in FIG. 5 . As the network analyzer 31, ZVL6 manufactured by Rohde & Schwarz was used. The network analyzer 31 has input terminals and output terminals, which are connected to the connection substrate 32, respectively. The measurement is performed after the shield printed wiring board 60 to be measured is connected between the pair of connection substrates 32 so as to be supported in a linear state floating in the air. As the shield printed wiring board 60, a length of 200 mm was used. In addition, the measurement was performed in a frequency range of 100 kHz to 6 GHz. In addition, the measurement is performed in a gas environment with a temperature of 25° C. and a relative humidity of 30 to 50%. The network analyzer 31 measures how much the input signal is attenuated relative to the output signal at a frequency of 10 GHz. The measured attenuation is shown in Table 2 as transmission loss. The closer the attenuation is to zero, the lower the transmission loss.

<製作屏蔽印刷配線板> 於印刷配線板中使用厚度12.5μm的聚醯亞胺膜加上厚度25μm的接著劑層而成之37.5μm的絕緣膜。又,於電路圖案使用對12μm的銅箔實施6μm的鍍銅者。於電路圖案中不含接地電路。又,於基底膜使用25μm的聚醯亞胺膜。<Preparation of a shielded printed wiring board> An insulating film of 37.5 μm formed by adding a polyimide film with a thickness of 12.5 μm and an adhesive layer with a thickness of 25 μm was used for the printed wiring board. Moreover, what performed the copper plating of 6 micrometers with respect to the copper foil of 12 micrometers was used for the circuit pattern. No ground circuit is included in the circuit pattern. In addition, a 25 μm polyimide film was used for the base film.

將於各實施例及比較例中得到的電磁波屏蔽膜與印刷配線板貼合,加熱至170℃,以3MPa的壓力得到屏蔽印刷配線板。The electromagnetic wave shielding films obtained in the respective Examples and Comparative Examples were bonded to a printed wiring board, heated to 170° C., and a shielded printed wiring board was obtained with a pressure of 3 MPa.

<接著性樹脂組成物1> 於附有攪拌裝置的1000ml燒瓶中,以下述比例添加下述原料,於室溫下攪拌6小時使之溶解,藉此進行調製。 [環氧樹脂] 甲酚酚醛型環氧樹脂(DIC公司製、EPICLON N-655-EXP):100質量份 [咪唑系硬化促進劑] 四國化成公司製、CUREZOL C11-Z:0.2質量份 [溶劑] 甲乙酮:400質量份<Adhesive resin composition 1> The following raw material was added in the following ratio to the 1000 ml flask with a stirring apparatus, and it prepared by stirring and dissolving it at room temperature for 6 hours. [Epoxy resin] Cresol novolac epoxy resin (manufactured by DIC Corporation, EPICLON N-655-EXP): 100 parts by mass [Imidazole-based hardening accelerator] manufactured by Shikoku Chemical Corporation, CUREZOL C11-Z: 0.2 part by mass [ Solvent] methyl ethyl ketone: 400 parts by mass

<實施例1> 將以表1所示各成分及各量調配而成的絕緣性樹脂組成物塗佈於表面形成有聚酯系離型劑的PET膜(厚度50μm)上,接著進行乾燥,藉此形成凹凸表面的絕緣性保護層。無機粒子的平均粒徑為16.7μm。測定絕緣性保護層的厚度。將結果顯示於表2。將得到的絕緣性保護層的RSm顯示於表2。<Example 1> The insulating resin composition prepared with the respective components and amounts shown in Table 1 was coated on a PET film (thickness 50 μm) on which a polyester-based release agent was formed on the surface, followed by drying. Thereby, the insulating protective layer of the uneven surface is formed. The average particle diameter of the inorganic particles was 16.7 μm. The thickness of the insulating protective layer was measured. The results are shown in Table 2. Table 2 shows the RSm of the obtained insulating protective layer.

於經形成的絕緣性保護層的凹凸表面利用鍍覆形成厚度2μm的鍍銅層,作成凹凸表面的屏蔽層。鍍銅層係按照以下條件利用電解鍍覆法而形成。於電解鍍覆法中,使用的電解液為硫酸銅,並於25℃溫度下施加電流6分鐘。 測定獲得的屏蔽層之用以設置接著劑層的表面的RSm、Smr2、Smr1。於表2顯示結果。On the uneven surface of the formed insulating protective layer, a copper plated layer with a thickness of 2 μm was formed by plating to form a shielding layer of the uneven surface. The copper plating layer was formed by the electrolytic plating method under the following conditions. In the electrolytic plating method, the electrolytic solution used was copper sulfate, and a current was applied at a temperature of 25° C. for 6 minutes. RSm, Smr2, and Smr1 of the surface of the obtained shielding layer on which the adhesive layer is provided were measured. The results are shown in Table 2.

於獲得的凹凸表面的屏蔽層的表面塗佈如上所述調製的接著性樹脂組成物1,接著進行乾燥來製作接著劑層,而得到電磁波屏蔽膜。將接著劑層的厚度顯示於表2。The adhesive resin composition 1 prepared as described above was applied to the surface of the shielding layer on the obtained uneven surface, followed by drying to prepare an adhesive layer, thereby obtaining an electromagnetic wave shielding film. Table 2 shows the thickness of the adhesive layer.

<實施例2> 除了將實施例1使用的無機粒子調配量取代成相對於樹脂固體成分為42.9質量份外,以與實施例1相同方式獲得電磁波屏蔽膜。<Example 2> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the inorganic particle compounding amount used in Example 1 was replaced by 42.9 parts by mass relative to the resin solid content.

<實施例3> 除了將絕緣性保護層的厚度取代成23μm外,以與實施例1相同方式獲得電磁波屏蔽膜。<Example 3> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the thickness of the insulating protective layer was replaced with 23 μm.

<實施例4> 除了將絕緣性保護層的厚度取代成30μm、及將無機粒子取代成平均粒徑27.3μm的無機粒子外,以與實施例1相同方式獲得電磁波屏蔽膜。<Example 4> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the thickness of the insulating protective layer was replaced by 30 μm, and the inorganic particles were replaced by inorganic particles having an average particle diameter of 27.3 μm.

<比較例1> 將以表1所示各成分及各量調配而成的絕緣性樹脂組成物塗佈於表面形成有聚酯系離型劑的PET膜(厚度50μm)上,接著進行乾燥,藉此形成厚度為5μm的絕緣性保護層。然後,將藉由壓延加工而製成的厚度2μm的銅箔貼合於絕緣性保護層。 然後,調製固體成分濃度20%的液狀導電性接著劑組成物,該組成物係對100質量份的接著性樹脂組成物1添加17.6質量份的中心粒徑D50為13μm的銀包銅粉而得。使用刮刀片(板狀抹刀)將前述液狀導電性接著劑組成物塗佈於銅箔上,於100℃×3分鐘的條件下使之乾燥,形成導電性接著劑層。 藉此,製成具有絕緣性保護層/金屬層/接著劑層的構造的屏蔽膜。<Comparative Example 1> The insulating resin composition prepared with the components and amounts shown in Table 1 was applied on a PET film (thickness 50 μm) on which a polyester-based release agent was formed on the surface, followed by drying. Thereby, an insulating protective layer with a thickness of 5 μm was formed. Then, the 2-micrometer-thick copper foil produced by rolling was bonded to the insulating protective layer. Then, a liquid conductive adhesive composition having a solid content concentration of 20% was prepared by adding 17.6 parts by mass of silver-coated copper powder having a center particle diameter D50 of 13 μm to 100 parts by mass of the adhesive resin composition 1 have to. The above-mentioned liquid conductive adhesive composition was applied on copper foil using a doctor blade (plate spatula), and dried under the conditions of 100° C.×3 minutes to form a conductive adhesive layer. Thereby, a shielding film having a structure of insulating protective layer/metal layer/adhesive layer is produced.

<比較例2> 除了將實施例1使用的無機粒子調配量取代成相對於樹脂固體成分為100質量份外,以與實施例1相同方式獲得電磁波屏蔽膜。<Comparative Example 2> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the inorganic particle compounding amount used in Example 1 was replaced by 100 parts by mass relative to the resin solid content.

<比較例3> 除了將實施例1使用的無機粒子取代成平均粒徑20.7μm的無機粒子外,以與實施例1相同方式獲得電磁波屏蔽膜。<Comparative Example 3> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the inorganic particles used in Example 1 were replaced with inorganic particles having an average particle diameter of 20.7 μm.

<比較例4> 除了將比較例1使用的無機粒子調配量設成相對於樹脂固體成分為42.9質量份外,以與實施例1相同方式獲得電磁波屏蔽膜。<Comparative Example 4> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the compounding amount of the inorganic particles used in Comparative Example 1 was 42.9 parts by mass with respect to the resin solid content.

<比較例5> 除了將比較例1使用的無機粒子調配量設成相對於樹脂固體成分為100質量份外,以與實施例1相同方式獲得電磁波屏蔽膜。<Comparative Example 5> An electromagnetic wave shielding film was obtained in the same manner as in Example 1, except that the compounding amount of the inorganic particles used in Comparative Example 1 was 100 parts by mass with respect to the resin solid content.

[表1]

Figure 107129906-A0304-0001
單位:質量份[Table 1]
Figure 107129906-A0304-0001
Unit: parts by mass

[環氧樹脂] 雙酚A型環氧系樹脂(三菱化學製、jER1256):100質量份 環氧樹脂硬化劑(三菱化學製、ST14):0.1質量份 [無機粒子A] 多孔二氧化矽粒子:平均粒徑16.7μm [無機粒子B] 多孔二氧化矽粒子:平均粒徑20.7μm [無機粒子C] 多孔二氧化矽粒子:平均粒徑27.3μm[Epoxy resin] Bisphenol A type epoxy resin (manufactured by Mitsubishi Chemical, jER1256): 100 parts by mass epoxy resin hardener (manufactured by Mitsubishi Chemical, ST14): 0.1 part by mass [Inorganic particle A] Porous silica particles : Average particle size 16.7μm [Inorganic particle B] Porous silica particle: Average particle size 20.7μm [Inorganic particle C] Porous silica particle: Average particle size 27.3μm

[表2]

Figure 107129906-A0304-0002
*OL:過負荷(超過測定範圍)[Table 2]
Figure 107129906-A0304-0002
*OL: Overload (out of measurement range)

由表2可知,實施例1~4與比較例1~5相比較,傳輸信號的衰減量較低、傳輸損失較少。As can be seen from Table 2, compared with Comparative Examples 1 to 5, Examples 1 to 4 have lower attenuation of the transmission signal and less transmission loss.

31‧‧‧網路分析儀32‧‧‧連接用基板60‧‧‧屏蔽印刷配線板100‧‧‧電磁波屏蔽膜110‧‧‧絕緣層120‧‧‧屏蔽層130‧‧‧接著劑層200‧‧‧印刷配線板210‧‧‧基底層220A‧‧‧接地電路220B‧‧‧信號電路230‧‧‧絕緣層300‧‧‧屏蔽印刷配線板31‧‧‧Network Analyzer 32‧‧‧Substrate for connection 60‧‧‧Shielding printed wiring board 100‧‧‧Electromagnetic wave shielding film 110‧‧‧Insulating layer 120‧‧‧Shielding layer 130‧‧‧Adhesive layer 200 ‧‧‧Printed wiring board 210‧‧‧Base layer 220A‧‧‧Ground circuit 220B‧‧‧Signal circuit 230‧‧‧Insulation layer 300‧‧‧Shielded printed wiring board

圖1係顯示本發明之一態樣之典型的電磁波屏蔽膜之示意性截面圖。 圖2係顯示粗度曲線要素之平均長度RSm之概略圖。 圖3係概念性顯示負荷面積率Smr1及Smr2之圖。 圖4係本發明之一態樣之屏蔽印刷配線板之示意性截面圖。 圖5係測定頻率特性之系統構造圖。FIG. 1 is a schematic cross-sectional view showing a typical electromagnetic wave shielding film of one aspect of the present invention. FIG. 2 is a schematic diagram showing the mean length RSm of the roughness curve elements. FIG. 3 is a diagram conceptually showing the load area ratios Smr1 and Smr2. 4 is a schematic cross-sectional view of a shielded printed wiring board according to an aspect of the present invention. Fig. 5 is a system configuration diagram for measuring frequency characteristics.

Claims (5)

一種屏蔽印刷配線板,具有電磁波屏蔽膜與印刷配線板;前述電磁波屏蔽膜具有絕緣性保護層、屏蔽層及接著劑層;前述印刷配線板具有基底層、形成於基底層上之接電電路與信號電路以及絕緣層,且該絕緣層係以使接地電路之至少一部分露出的方式覆蓋基底層;前述電磁波屏蔽膜透過前述接著劑層而貼合於前述印刷配線板,且前述屏蔽層中前述接著劑層側表面之根據JIS B 0601:2013的粗度曲線要素的平均長度RSm為40μm以上且100μm以下;前述接著劑層之厚度為1μm以上且20μm以下;前述接著劑層不含導電性填料;前述絕緣性保護層之至少屏蔽層側表面被凹凸化;並且,前述屏蔽層之一部分凸部穿過接著劑而與前述接地電路導通。 A shielding printed wiring board, comprising an electromagnetic wave shielding film and a printed wiring board; the electromagnetic wave shielding film has an insulating protective layer, a shielding layer and an adhesive layer; the printed wiring board has a base layer, an electrical circuit formed on the base layer and A signal circuit and an insulating layer, and the insulating layer covers the base layer in such a way that at least a part of the ground circuit is exposed; the electromagnetic wave shielding film is attached to the printed wiring board through the adhesive layer, and the adhesive in the shielding layer The average length RSm of roughness curve elements according to JIS B 0601:2013 on the side surface of the adhesive layer is 40 μm or more and 100 μm or less; the thickness of the adhesive layer is 1 μm or more and 20 μm or less; the adhesive layer does not contain conductive fillers; At least the side surface of the shielding layer of the insulating protective layer is concave and convex; and a part of the convex part of the shielding layer passes through the adhesive and is connected to the grounding circuit. 如請求項1之屏蔽印刷配線板,其中前述屏蔽層中前述接著劑層側表面的負荷面積率Smr2為92%以上。 The shielded printed wiring board according to claim 1, wherein the load area ratio Smr2 of the side surface of the adhesive layer in the shield layer is 92% or more. 如請求項1或2之屏蔽印刷配線板,其中前述絕緣性保護層包含粒子狀物質。 The shielded printed wiring board according to claim 1 or 2, wherein the insulating protective layer contains particulate matter. 如請求項3之屏蔽印刷配線板,其中前述粒子狀物質之平均粒徑為15μm以上。 The shielded printed wiring board according to claim 3, wherein the average particle diameter of the particulate matter is 15 μm or more. 一種屏蔽印刷配線板之製造方法,係製造如請求項1至4中任一項之屏蔽印刷配線板之方法,包含以下步驟:於支持基材上塗佈絕緣性樹脂組成物並使之硬化而得到絕緣性保護層;於絕緣性保護層上形成屏蔽層;於屏蔽層上形成接著劑層而得到電磁波屏蔽膜;及將得到之電磁波屏蔽膜與印刷配線板貼合。 A method of manufacturing a shielded printed wiring board, which is a method of manufacturing a shielded printed wiring board as claimed in any one of claims 1 to 4, comprising the steps of: coating a support substrate with an insulating resin composition and curing it to obtaining an insulating protective layer; forming a shielding layer on the insulating protective layer; forming an adhesive layer on the shielding layer to obtain an electromagnetic wave shielding film; and laminating the obtained electromagnetic wave shielding film to a printed wiring board.
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