TWI768573B - Vibration force measuring device - Google Patents

Vibration force measuring device Download PDF

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TWI768573B
TWI768573B TW109142473A TW109142473A TWI768573B TW I768573 B TWI768573 B TW I768573B TW 109142473 A TW109142473 A TW 109142473A TW 109142473 A TW109142473 A TW 109142473A TW I768573 B TWI768573 B TW I768573B
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vibration force
vibration
sensor
lifting device
platform
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TW109142473A
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TW202223350A (en
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簡國諭
林庚達
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財團法人金屬工業研究發展中心
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Abstract

A vibration force measuring device includes a measuring platform, a lifter, a sensor, and a connector. The measuring platform has a carrying surface for carrying a device under test. The lifter is configured to lift up the measuring platform to separate the measuring platform from an upper surface of the lifter. The sensor is configured to sense vibration produced by the device under test during operation. The connector connects the measuring platform and the sensor, and is configured to transmit the vibration of the device under test to the sensor. The connector has different rigidity on different directions.

Description

振動力量量測裝置Vibration force measuring device

本揭露是有關於一種力量量測裝置,且特別是有關於一種振動力量量測裝置。The present disclosure relates to a force measuring device, and more particularly, to a vibration force measuring device.

旋轉機械廣泛應用在各領域的機電系統中。為了解決旋轉機械在運轉時所產生的不平衡振動問題,產業的習知技術中多採動平衡校正機來量測不平衡質量與存在位置,採減法或加法補正質量的方式來解決轉子不平衡振動問題。Rotating machinery is widely used in electromechanical systems in various fields. In order to solve the problem of unbalanced vibration generated by rotating machinery during operation, the industry's conventional technology uses a balance corrector to measure the unbalanced mass and its existing position, and uses subtraction or addition to correct the mass to solve the rotor unbalance. Vibration problem.

動平衡校正機在原理上可分為軟式動平衡機與硬式動平衡機。由於軟式動平衡機操作繁雜,因此於市場中相對少見。而硬式平衡機是採用壓電式力感測器,直接對振動的力量作訊號處理。對於雙面及單面動平衡的處理上,相較於軟式平衡機之複雜的平面分離法運算,硬式平衡機能提供較快速的平衡處理方法。In principle, the dynamic balancing machine can be divided into a soft dynamic balancing machine and a hard dynamic balancing machine. Due to the complicated operation of soft balancing machines, they are relatively rare in the market. The rigid balancing machine uses piezoelectric force sensors to directly process the vibration force. For the processing of double-sided and single-sided dynamic balancing, compared with the complex plane separation method of the soft balancing machine, the hard balancing machine can provide a faster balancing processing method.

平衡機主要是透過轉子旋轉時所產生之離心力來測量轉子的不平衡量。硬支撐(hard bearing)平衡機可直接測量離心力,再利用離心力計算出轉子的不平衡量。而軟支撐(soft bearing)平衡機則是測量轉子旋轉時的振動量,因此須加試重才能轉換成轉子的不平衡量。The balancing machine mainly measures the unbalance of the rotor through the centrifugal force generated when the rotor rotates. The hard bearing balancing machine can directly measure the centrifugal force, and then use the centrifugal force to calculate the unbalance of the rotor. The soft bearing balancing machine measures the vibration of the rotor when it rotates, so it is necessary to add a test weight to convert it into the unbalance of the rotor.

硬支撐平衡機較適用於大質量且不平衡量初始量大的轉子。而軟支撐平衡機則較適用於較輕的轉子以及工作轉速非常高的轉子。由於較輕的轉子和轉速高的轉子廣泛應用在各類小家電中,因此在市場上的需求量比較大。The hard support balancing machine is more suitable for rotors with large mass and large initial unbalance. The soft support balancing machine is more suitable for lighter rotors and rotors with very high working speeds. Because lighter rotors and high-speed rotors are widely used in various small household appliances, they are in great demand in the market.

而針對應用在電子、汽車、醫療、家電等領域的各種小型散熱風扇,硬支撐平衡機對於微量振動力量的精準度誤差過大,對於高轉速轉子易有固有頻率過近或低於的狀態,而無法量測。針對風扇所開發之軟支撐平衡機係採加速規來量測振動量,無法對應產線直觀需檢測離心力量的需求,同時檢測的振動量轉換為離心力亦存在誤差。此外,現有軟支撐平衡機規格對於微量振動力量的量測靈敏度與解析度不佳,無法精準直接呈現產線需要的小型風扇振動力量數據,因而無法進一步應用在產品分級上。For various small cooling fans used in electronics, automobiles, medical care, home appliances and other fields, the precision error of the hard support balancing machine for the trace vibration force is too large, and the natural frequency of the high-speed rotor is easy to be too close or lower. cannot be measured. The soft support balancing machine developed for the fan uses an accelerometer to measure the vibration, which cannot meet the needs of the production line to directly detect the centrifugal force. At the same time, there is an error in converting the detected vibration into centrifugal force. In addition, the existing soft support balancing machine specifications have poor sensitivity and resolution for the measurement of trace vibration forces, and cannot accurately and directly present the vibration force data of small fans required by the production line, so they cannot be further applied to product classification.

現有風扇振動量測系統對於廠商產線上的品管,最大問題為架設安裝與量測時間過長,單位時間檢測量無法超越人工。The biggest problem of the existing fan vibration measurement system for the quality control of the manufacturer's production line is that the installation and measurement time is too long, and the detection amount per unit time cannot exceed that of manual work.

因此,本揭露之一目的就是在提供一種振動力量量測裝置,其具備即時力量感測、數據量化分級、與快速全檢能力,且裝置的架設安裝容易,故可解決商業化轉子振動檢測系統於風扇等具高速轉動元件之待測物產線中量測時間過長與無法全檢的問題。Therefore, one purpose of the present disclosure is to provide a vibration force measurement device, which has real-time force sensing, data quantification and classification, and fast full inspection capabilities, and the device is easy to erect and install, so it can solve the problem of commercial rotor vibration detection systems. In the production line of the product to be tested with high-speed rotating components such as fans, the measurement time is too long and the full inspection cannot be performed.

本揭露之另一目的就是在提供一種振動力量量測裝置,其可採用荷重元(load cell)感測器作為振動量的感測器,因此可直接量測到待測物運轉時之力量變化數據,且具低成本、易取得、與規格完整的優勢,尤其是針對10N以下的微量振動力量測範圍。Another object of the present disclosure is to provide a vibration force measuring device, which can use a load cell sensor as a vibration sensor, so that the force change of the object to be measured can be directly measured when it is running data, and has the advantages of low cost, easy access, and complete specifications, especially for the measurement range of trace vibration forces below 10N.

本揭露之又一目的就是在提供一種振動力量量測裝置,其量測平台可由無摩擦力或低摩擦力的抬升裝置支撐,因此可阻絕外部干擾,有效提升待測物之振動力量量測的靈敏度。Another object of the present disclosure is to provide a vibration force measurement device, the measurement platform of which can be supported by a frictionless or low-friction lifting device, so that external interference can be blocked, and the vibration force measurement of the object to be measured can be effectively improved. sensitivity.

本揭露之再一目的就是在提供一種振動力量量測裝置,其連接件可採撓性絞鍊,而可實現單平面外之干擾源隔離,因此可精準量測待測物之水平振動力量變化。Another object of the present disclosure is to provide a vibration force measuring device, the connecting member of which can adopt a flexible hinge, so as to achieve isolation of interference sources outside a single plane, so that the change of the horizontal vibration force of the object to be measured can be accurately measured .

根據本揭露之上述目的,提出一種振動力量量測裝置,適用於量測具有高速轉動元件之待測物。此振動力量量測裝置包含量測平台、抬升裝置、感測器、以及連接件。量測平台具有承載面以承載待測物。抬升裝置配置以將量測平台抬離抬升裝置之上表面。感測器配置以感測待測物運轉時所產生之振動量。連接件連接量測平台與感測器,且配置以將待測物之振動量傳遞給感測器。連接件於不同方向上之剛性不相同。According to the above-mentioned purpose of the present disclosure, a vibration force measuring device is provided, which is suitable for measuring an object to be tested with a high-speed rotating element. The vibration force measuring device includes a measuring platform, a lifting device, a sensor, and a connecting piece. The measuring platform has a bearing surface to carry the object to be measured. The lifting device is configured to lift the measurement platform off the upper surface of the lifting device. The sensor is configured to sense the amount of vibration generated when the object to be tested is running. The connecting piece connects the measuring platform and the sensor, and is configured to transmit the vibration of the object to be measured to the sensor. The rigidity of the connector in different directions is not the same.

依據本揭露之一實施例,上述之量測平台包含夾治具,此夾治具配置以將待測物固定在量測平台上。According to an embodiment of the present disclosure, the above-mentioned measuring platform includes a jig, and the jig is configured to fix the object to be measured on the measuring platform.

依據本揭露之一實施例,上述之抬升裝置為氣浮軸承,氣浮軸承可利用氣體將量測平台予以浮離。According to an embodiment of the present disclosure, the above-mentioned lifting device is an air bearing, and the air bearing can use gas to float the measuring platform away.

依據本揭露之一實施例,上述之抬升裝置包含至少三滾珠凸設於抬升裝置之上表面,這些滾珠配置以將量測平台抬離抬升裝置之上表面。According to an embodiment of the present disclosure, the aforementioned lifting device includes at least three balls protruding from the upper surface of the lifting device, and the balls are configured to lift the measuring platform away from the upper surface of the lifting device.

依據本揭露之一實施例,上述之抬升裝置更包含至少一磁吸元件,此至少一磁吸元件配置以對量測平台施加磁吸力。According to an embodiment of the present disclosure, the above-mentioned lifting device further includes at least one magnetic attraction element, and the at least one magnetic attraction element is configured to exert a magnetic attraction force on the measurement platform.

依據本揭露之一實施例,上述之抬升裝置更包含基座,感測器固定於此基座上,抬升裝置、感測器、與連接件所組成之系統之自然頻率高於待測物之轉動頻率。According to an embodiment of the present disclosure, the above-mentioned lifting device further includes a base, the sensor is fixed on the base, and the natural frequency of the system composed of the lifting device, the sensor, and the connecting piece is higher than that of the object to be tested. rotation frequency.

依據本揭露之一實施例,上述之連接件在與量測平台之承載面平行之平面方向上的剛性,大於垂直於此平面方向上的剛性。According to an embodiment of the present disclosure, the rigidity of the above-mentioned connecting element in a plane direction parallel to the bearing surface of the measuring platform is greater than the rigidity in a plane direction perpendicular to the plane direction.

依據本揭露之一實施例,上述之連接件為撓性絞鍊。According to an embodiment of the present disclosure, the above-mentioned connecting element is a flexible hinge.

依據本揭露之一實施例,上述之連接件包含金屬片。According to an embodiment of the present disclosure, the aforementioned connector includes a metal sheet.

硬支撐動平衡技術適合測量振動小於其系統之自然頻率的轉子,因此較適用於較大的轉子工件,直接量測離心力。軟支撐動平衡技術則適合測量振動大於其系統之自然頻率的轉子,因此較適用於微小及高速的轉子工件,量測振動位移量。本揭露在此提出一種振動力量量測裝置,其適用待測物之振動頻率低於量測裝置之支撐系統的自然頻率。The hard support dynamic balancing technology is suitable for measuring the rotor whose vibration is less than the natural frequency of its system, so it is more suitable for the larger rotor workpiece to directly measure the centrifugal force. The soft support dynamic balancing technology is suitable for measuring the rotor whose vibration is greater than the natural frequency of the system, so it is more suitable for measuring the vibration displacement of small and high-speed rotor workpieces. The present disclosure hereby provides a vibration force measuring device, which is suitable for the vibration frequency of the object to be measured which is lower than the natural frequency of the supporting system of the measuring device.

請參照圖1至圖3,其係分別繪示依照本揭露之一實施方式的一種振動力量量測裝置的立體示意圖、上視示意圖、與側視示意圖。振動力量量測裝置100a可用以量測具高速轉動元件之待測物在運轉時所產生的振動力量。待測物可為馬達或風扇,例如薄型散熱風扇或薄型馬達。舉例而言,風扇之旋轉半徑大於風扇之軸向厚度的3倍以上。薄型風扇的離心力較非薄型風扇的離心力大。因此,薄型風扇運轉時之晃動力量主要為風扇質心的偏移量在轉動時產生的徑向離心力。振動力量量測裝置100a主要可包含量測平台110、抬升裝置120、感測器130、以及連接件140。Please refer to FIG. 1 to FIG. 3 , which are respectively a three-dimensional schematic view, a top view schematic view, and a side view schematic view of a vibration force measuring device according to an embodiment of the present disclosure. The vibration force measuring device 100a can be used to measure the vibration force generated by the object to be tested with a high-speed rotating element during operation. The DUT can be a motor or a fan, such as a thin cooling fan or a thin motor. For example, the rotation radius of the fan is more than three times larger than the axial thickness of the fan. The centrifugal force of a thin fan is greater than that of a non-thin fan. Therefore, the shaking force of the thin fan is mainly the radial centrifugal force generated by the offset of the center of mass of the fan when it rotates. The vibration force measuring device 100 a may mainly include a measuring platform 110 , a lifting device 120 , a sensor 130 , and a connecting member 140 .

量測平台110具有承載面112,承載面112可將待測物承載於其上。承載面112可例如水平延伸。請同時參照圖2與圖3,在一些示範例子中,水平面係由座標軸X與座標軸Y所定義出之XY平面,且進行量測時承載面112則大致上和XY平面平行。座標軸Z垂直XY平面,即座標軸X、座標軸Y、與座標軸Z互相垂直。量測平台110較佳係選擇輕質的板材,藉以降低對待測物振動訊號的影響。The measurement platform 110 has a bearing surface 112 , and the bearing surface 112 can carry the object to be measured thereon. The bearing surface 112 may, for example, extend horizontally. 2 and 3, in some exemplary examples, the horizontal plane is an XY plane defined by the coordinate axis X and the coordinate axis Y, and the bearing surface 112 is substantially parallel to the XY plane during measurement. The coordinate axis Z is perpendicular to the XY plane, that is, the coordinate axis X, the coordinate axis Y, and the coordinate axis Z are perpendicular to each other. The measurement platform 110 is preferably made of a light-weight plate, so as to reduce the influence of the vibration signal of the object to be measured.

在一些例子中,量測平台110可包含夾治具114。夾治具114可凸出量測平台110的承載面112。藉此,夾治具114可將待測物夾持固定在量測平台110之承載面112之上。在另一些例子中,量測平台110亦可利用其他固定元件,例如卡固件、鎖固件、磁吸件、或真空吸附件等,來將待測物夾持固定在量測平台110之承載面112之上。In some examples, metrology platform 110 may include fixture 114 . The fixture 114 can protrude from the bearing surface 112 of the measurement platform 110 . Thereby, the fixture 114 can clamp and fix the object to be measured on the bearing surface 112 of the measurement platform 110 . In other examples, the measurement platform 110 can also use other fixing elements, such as fasteners, locks, magnetic parts, or vacuum suction parts, etc., to clamp and fix the object to be measured on the bearing surface of the measurement platform 110 112 and above.

量測平台110設於抬升裝置120之上表面122之上方。抬升裝置120可將量測平台110抬離抬升裝置120的上表面122,藉以大幅減少量測平台110與抬升裝置120之間的摩擦力。抬升裝置120之上表面122為XY平面。藉由減少量測平台110與抬升裝置120之間的摩擦力,可避免摩擦力對於待測物在XY平面振動力量訊號的干擾。在此實施方式中,抬升裝置120為氣浮軸承。在一些例子中,如圖3所示,抬升裝置120可包含基座124與一或多個氣浮部126,其中氣浮部126可凸設於基座124上。在一些示範例子中,氣浮部126可嵌設於基座124中,且氣浮部126之頂面可與基座124之頂面齊平或可低於基座124之頂面。抬升裝置120之氣浮部126可利用氣體將量測平台110浮離抬升裝置120之上表面122。The measuring platform 110 is disposed above the upper surface 122 of the lifting device 120 . The lifting device 120 can lift the measuring platform 110 away from the upper surface 122 of the lifting device 120 , thereby greatly reducing the frictional force between the measuring platform 110 and the lifting device 120 . The upper surface 122 of the lifting device 120 is an XY plane. By reducing the friction force between the measuring platform 110 and the lifting device 120 , the interference of the friction force on the vibration force signal of the object to be measured in the XY plane can be avoided. In this embodiment, the lifting device 120 is an air bearing. In some examples, as shown in FIG. 3 , the lifting device 120 can include a base 124 and one or more air-floating parts 126 , wherein the air-floating parts 126 can be protruded on the base 124 . In some exemplary examples, the air floating portion 126 may be embedded in the base 124 , and the top surface of the air floating portion 126 may be flush with the top surface of the base 124 or may be lower than the top surface of the base 124 . The air floating portion 126 of the lifting device 120 can float the measurement platform 110 away from the upper surface 122 of the lifting device 120 by using gas.

感測器130主要可用以感測待測物運轉時所產生之振動量。在本實施方式中,感測器130與量測平台110間接接合。感測器130可例如固定於抬升裝置120之基座124上,亦可固定在外部的支撐結構上。感測器130可例如為荷重元感測器、壓電式力傳感器、或電容式力傳感器。感測器130亦可為位移傳感器、加速度傳感器等,例如線性差動變壓器(LVDT)、電容式位移器、光學尺、磁性尺、與加速規。只要能量測到振動所產生之力量、位移、或加速度等物理量之傳感器,均為本揭露之感測器的實施範圍。在一些示範例子中,感測器130可採荷重元感測器,因荷重元感測器可直接量測到力量變化數據,尤其是針對10N以下的微量振動力量測範圍,且具有低成本、易取得、與規格完整的優點。The sensor 130 is mainly used for sensing the vibration amount generated when the object to be tested is running. In this embodiment, the sensor 130 is indirectly connected to the measurement platform 110 . The sensor 130 can be, for example, fixed on the base 124 of the lifting device 120, or can also be fixed on an external support structure. The sensor 130 may be, for example, a load cell sensor, a piezoelectric force sensor, or a capacitive force sensor. The sensor 130 can also be a displacement sensor, an acceleration sensor, etc., such as a linear differential transformer (LVDT), a capacitive displacement device, an optical scale, a magnetic scale, and an accelerometer. As long as the sensor can measure physical quantities such as force, displacement, or acceleration generated by vibration, it is within the scope of implementation of the sensor of the present disclosure. In some exemplary examples, the sensor 130 can be a load cell sensor, because the load cell sensor can directly measure the force change data, especially for the micro vibration force measurement range below 10N, and has low cost, The advantages of easy access and complete specifications.

連接件140連接量測平台110與感測器130。量測平台110上的力量變化由此連接件傳遞至感測器130。亦即,連接件140可將待測物在量測平台110上運轉時所產生之振動量傳遞給感測器130。在本實施方式中,由於感測器130固定於抬升裝置120,因此抬升裝置120、感測器130、與連接件140所組成之系統在設計上,其自然頻率須高於待測物之轉動頻率。The connector 140 connects the measurement platform 110 and the sensor 130 . Changes in force on the measurement platform 110 are transmitted to the sensor 130 by this connector. That is, the connecting member 140 can transmit the vibration amount generated when the object to be measured runs on the measurement platform 110 to the sensor 130 . In this embodiment, since the sensor 130 is fixed to the lifting device 120 , the natural frequency of the system composed of the lifting device 120 , the sensor 130 , and the connecting member 140 must be higher than the rotation frequency of the object to be tested in design. .

連接件140於不同方向上之剛性不相同,以濾除所需方向以外的力量干擾。在一些例子中,連接件140在與量測平台110之承載面112平行之平面方向上的剛性,大於垂直於此平面方向上的剛性。舉例而言,與量測平台110之承載面112平行之平面方向為XY平面,而連接件140在XY平面上的剛性大於在座標軸Z上的剛性,以濾除XY平面外之振動力量訊號。利用連接件140具有的特異方向剛性,來濾除XY平面以外的力量干擾。在一些例子中,連接件140為撓性絞鍊。在一些示範例子中,連接件140包含金屬片,金屬片水平延伸在X座標軸與Y座標軸定義出之XY平面上,且此金屬片在XY平面上的剛性大於金屬片在座標軸Z上的剛性,以濾除XY平面外之振動力量訊號。連接件可依量測對象物,例如風扇,而採用不同厚度的薄金屬片。舉例而言,針對直徑50mm且轉速為7600rpm的風扇,可採厚度0.1mm的金屬片作為連接件140。The rigidity of the connecting member 140 is different in different directions, so as to filter out the force interference other than the desired direction. In some examples, the rigidity of the connecting member 140 in a plane direction parallel to the bearing surface 112 of the measurement platform 110 is greater than the rigidity in a plane direction perpendicular to the plane direction. For example, the plane direction parallel to the bearing surface 112 of the measurement platform 110 is the XY plane, and the rigidity of the connecting member 140 on the XY plane is greater than the rigidity on the coordinate axis Z, so as to filter out vibration force signals outside the XY plane. The specific directional rigidity of the connector 140 is used to filter out the force interference outside the XY plane. In some examples, the connector 140 is a flexible hinge. In some exemplary examples, the connecting member 140 includes a metal sheet, the metal sheet extends horizontally on the XY plane defined by the X coordinate axis and the Y coordinate axis, and the rigidity of the metal sheet on the XY plane is greater than the rigidity of the metal sheet on the coordinate axis Z, To filter out the vibration force signal outside the XY plane. The connecting piece can be made of thin metal sheets of different thicknesses according to the object to be measured, such as a fan. For example, for a fan with a diameter of 50 mm and a rotational speed of 7600 rpm, a metal sheet with a thickness of 0.1 mm can be used as the connecting member 140 .

由於多數散熱風扇的轉子型態為旋轉直徑大於軸向尺寸的3倍~10倍,風扇轉子在運轉時的不平衡量可視為單平面振動,主要部分為徑向振動。因此,本實施方式簡化為只量測風扇等具有高速轉動元件之待測物在XY平面上的徑向振動力量。Since the rotor type of most cooling fans is that the rotating diameter is 3 to 10 times larger than the axial size, the unbalance of the fan rotor during operation can be regarded as single-plane vibration, and the main part is radial vibration. Therefore, this embodiment is simplified to only measure the radial vibration force on the XY plane of the object under test with high-speed rotating elements, such as a fan.

振動力量量測裝置100a可採用荷重元感測器作為感測器130,而可直接量測到待測物運轉時之力量變化數據,因此具備即時力量感測、數據量化分級、與快速全檢能力。舉例而言,可設定待測物振動力量的上下邊界值,藉此可根據量測數據快速檢測出待測物品質。此外,可將振動感測力量分級,藉此可根據量測數據對待測物產品品質快速分級。The vibration force measuring device 100a can use the load cell sensor as the sensor 130, and can directly measure the force change data of the object to be tested when it is running, so it has real-time force sensing, data quantification and classification, and fast full detection ability. For example, the upper and lower boundary values of the vibration force of the object to be tested can be set, so that the quality of the object to be tested can be quickly detected according to the measurement data. In addition, the vibration sensing force can be classified, whereby the product quality of the object to be tested can be quickly classified according to the measurement data.

此外,荷重元感測器價格低,可降低振動力量量測裝置100a的設備成本。量測平台110由無摩擦力的氣浮式抬升裝置110所支撐,且撓性連接件140的選用可實現單平面外之干擾源隔離。因此,振動力量量測裝置100a可精準且靈敏的量測到待測物的真實振動力量,特別適用於振動力量量級為0.001N~0.1N等級之電子、車用、醫療用等小型精密散熱風扇。In addition, the low price of the load cell sensor can reduce the equipment cost of the vibration force measuring device 100a. The measurement platform 110 is supported by a frictionless air-floating lifting device 110 , and the selection of the flexible connecting member 140 can achieve isolation of interference sources outside a single plane. Therefore, the vibration force measuring device 100a can accurately and sensitively measure the real vibration force of the object to be measured, and is especially suitable for small and precise heat dissipation of electronic, automotive, and medical applications where the vibration force magnitude is 0.001N~0.1N. fan.

可進一步透過頻域、時域、或模型來對振動力量量測裝置100a所量測得之數據進行特性鑑別分析,以應用於後續的智慧化管理。The data measured by the vibration force measuring device 100a can be further characterized and analyzed through frequency domain, time domain, or model, so as to be applied to subsequent intelligent management.

本揭露之抬升裝置不限於上述之氣浮式元件,亦可採用低摩擦力元件來作為抬升裝置。請參照圖4,其係繪示依照本揭露之另一實施方式的一種振動力量量測裝置的側視示意圖。此實施方式之振動力量量測裝置100b之元件與架構大致上與振動力量量測裝置100a相同,二者之間的差異在於,振動力量量測裝置100b之抬升裝置150為包含多個滾珠156的低摩擦力元件。The lifting device of the present disclosure is not limited to the above-mentioned air-floating element, and a low-friction element can also be used as the lifting device. Please refer to FIG. 4 , which is a schematic side view of a vibration force measuring device according to another embodiment of the present disclosure. The components and structure of the vibration force measuring device 100b of this embodiment are substantially the same as those of the vibration force measuring device 100a. Low friction element.

在一些例子中,抬升裝置150主要可包含基座154與多個滾珠156。這些滾珠156可滾動地設於基座154中,且凸出抬升裝置150之上表面152。量測平台110放置在抬升裝置150之上表面152之上。這些滾珠156可承托量測平台110,並將量測平台110抬離抬升裝置150之上表面152。滾珠156的數量等於或大於三個,以利平穩支撐量測平台110。In some examples, the lifting device 150 may primarily include a base 154 and a plurality of balls 156 . The balls 156 are rotatably disposed in the base 154 and protrude from the upper surface 152 of the lifting device 150 . The measurement platform 110 is placed on the upper surface 152 of the lifting device 150 . The balls 156 can support the measuring platform 110 and lift the measuring platform 110 away from the upper surface 152 of the lifting device 150 . The number of the balls 156 is equal to or greater than three, so as to support the measurement platform 110 stably.

利用滾珠156來抬升量測平台110,可大幅減少量測平台110與抬升裝置150之間的接觸面積,進而可有效降低量測平台110與抬升裝置150之間的摩擦力。量測平台110與抬升裝置150之間之低摩擦力設計,可避免二者之摩擦力對於待測物在XY平面振動力量訊號的干擾。Using the balls 156 to lift the measuring platform 110 can greatly reduce the contact area between the measuring platform 110 and the lifting device 150 , thereby effectively reducing the friction between the measuring platform 110 and the lifting device 150 . The low friction design between the measuring platform 110 and the lifting device 150 can avoid the interference of the friction between the two to the vibration force signal of the object to be measured in the XY plane.

請繼續參照圖4,在一些示範例子中,抬升裝置150更選擇性地包含一或多個磁吸元件158。在這樣的例子中,量測平台110可包含鐵磁性材料。磁吸元件158可對量測平台施加磁力,以對量測平台110施加朝向抬升裝置150之上表面152的預壓力。藉此預壓力,可避免待測物運轉時所產生之過大晃動力而造成量測平台110跳離,因此抬升裝置150可在量測過程中穩定承托量測平台110。Please continue to refer to FIG. 4 , in some exemplary examples, the lifting device 150 may optionally include one or more magnetic attraction elements 158 . In such an example, the metrology platform 110 may comprise a ferromagnetic material. The magnetic attraction element 158 can apply a magnetic force to the measuring platform, so as to exert a pre-pressure on the measuring platform 110 toward the upper surface 152 of the lifting device 150 . The pre-pressure can prevent the measurement platform 110 from jumping off due to excessive shaking force generated when the object to be tested is running, so the lifting device 150 can stably support the measurement platform 110 during the measurement process.

由上述之實施方式可知,本揭露之一優點就是因為本揭露之振動力量量測裝置具備即時力量感測、數據量化分級、與快速全檢能力,且裝置的架設安裝容易,因此可解決商業化轉子振動檢測系統於風扇等具有高速轉動元件之待測物產線中量測時間過長與無法全檢的問題。As can be seen from the above-mentioned embodiments, one of the advantages of the present disclosure is that the vibration force measurement device of the present disclosure has the capability of real-time force sensing, data quantification and classification, and fast full inspection, and the device is easy to erect and install, so it can solve the problem of commercialization. The rotor vibration detection system has the problem that the measurement time is too long and cannot be fully detected in the production line of the product to be tested with high-speed rotating components such as fans.

由上述之實施方式可知,本揭露之另一優點就是因為本揭露之振動力量量測裝置可採用荷重元感測器作為振動量的感測器,因此可直接量測到待測物運轉時之力量變化數據,且具低成本、易取得、與規格完整的優勢。As can be seen from the above-mentioned embodiments, another advantage of the present disclosure is that because the vibration force measuring device of the present disclosure can use a load cell sensor as the vibration amount sensor, it can directly measure the movement of the object to be measured. Force variation data with the advantages of low cost, easy access, and complete specifications.

由上述之實施方式可知,本揭露之又一優點就是因為本揭露之振動力量量測裝置之量測平台可由無摩擦力或低摩擦力的抬升裝置支撐,因此可阻絕外部干擾,有效提升待測物之振動力量量測的靈敏度。As can be seen from the above-mentioned embodiments, another advantage of the present disclosure is that the measuring platform of the vibration force measuring device of the present disclosure can be supported by a frictionless or low-friction lifting device, so that external interference can be blocked, and the object to be measured can be effectively improved. The sensitivity of the measurement of the vibrational force of a thing.

由上述之實施方式可知,本揭露之再一優點就是因為本揭露之振動力量量測裝置之連接件可採撓性絞鍊,而可實現單平面外之干擾源隔離,因此可精準量測待測物之水平振動力量變化。As can be seen from the above-mentioned embodiments, another advantage of the present disclosure is that the connecting member of the vibration force measuring device of the present disclosure can adopt a flexible hinge, which can realize the isolation of the interference source outside a single plane, and thus can accurately measure the vibration force. Changes in the horizontal vibration force of the measured object.

雖然本揭露已以實施例揭示如上,然其並非用以限定本揭露,任何在此技術領域中具有通常知識者,在不脫離本揭露之精神和範圍內,當可作各種之更動與潤飾,因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。Although the present disclosure has been disclosed above with examples, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in this technical field can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the appended patent application.

100a:振動力量量測裝置 100b:振動力量量測裝置 110:量測平台 112:承載面 114:夾治具 120:抬升裝置 122:上表面 124:基座 126:氣浮部 130:感測器 140:連接件 150:抬升裝置 152:上表面 154:基座 156:滾珠 158:磁吸元件 X:座標軸 Y:座標軸 Z:座標軸 100a: Vibration force measuring device 100b: Vibration force measuring device 110: Measurement platform 112: Bearing surface 114: Fixtures 120: Lifting device 122: upper surface 124: Pedestal 126: Air flotation part 130: Sensor 140: Connector 150: Lifting device 152: Upper surface 154: Pedestal 156: Ball 158: Magnetic components X: coordinate axis Y: coordinate axis Z: coordinate axis

為讓本揭露之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下: [圖1]係繪示依照本揭露之一實施方式的一種振動力量量測裝置的立體示意圖; [圖2]係繪示依照本揭露之一實施方式的一種振動力量量測裝置的上視示意圖; [圖3]係繪示依照本揭露之一實施方式的一種振動力量量測裝置的側視示意圖;以及 [圖4]係繪示依照本揭露之另一實施方式的一種振動力量量測裝置的側視示意圖。 In order to make the above and other objects, features, advantages and embodiments of the present disclosure more clearly understood, the accompanying drawings are described as follows: [ FIG. 1 ] is a schematic perspective view of a vibration force measuring device according to an embodiment of the present disclosure; [ FIG. 2 ] is a schematic top view of a vibration force measurement device according to an embodiment of the present disclosure; [ FIG. 3 ] is a schematic side view of a vibration force measuring device according to an embodiment of the present disclosure; and [ FIG. 4 ] is a schematic side view of a vibration force measuring device according to another embodiment of the present disclosure.

國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無 Domestic storage information (please note in the order of storage institution, date and number) none Foreign deposit information (please note in the order of deposit country, institution, date and number) none

100a:振動力量量測裝置 110:量測平台 112:承載面 114:夾治具 120:抬升裝置 122:上表面 124:基座 126:氣浮部 130:感測器 140:連接件 X:座標軸 Z:座標軸 100a: Vibration force measuring device 110: Measurement platform 112: Bearing surface 114: Fixtures 120: Lifting device 122: upper surface 124: Pedestal 126: Air flotation part 130: Sensor 140: Connector X: coordinate axis Z: coordinate axis

Claims (9)

一種振動力量量測裝置,適用於量測具有高速轉動元件之一待測物,包含: 一量測平台,具有一承載面以承載該待測物; 一抬升裝置,配置以將該量測平台抬離該抬升裝置之一上表面; 一感測器,配置以感測該待測物運轉時所產生之一振動量;以及 一連接件,連接該量測平台與該感測器,且配置以將該待測物之該振動量傳遞給該感測器,該連接件於不同方向上之剛性不相同。 A vibration force measuring device, suitable for measuring an object to be measured with a high-speed rotating element, includes: a measuring platform with a bearing surface to carry the object to be measured; a lift device configured to lift the measurement platform off an upper surface of the lift device; a sensor configured to sense a vibration amount generated when the object to be tested is running; and A connecting piece connects the measuring platform and the sensor, and is configured to transmit the vibration of the object to be measured to the sensor, and the rigidity of the connecting piece is different in different directions. 如請求項1所述之振動力量量測裝置,其中該量測平台包含一夾治具,該夾治具配置以將該待測物固定在該量測平台上。The vibration force measuring device according to claim 1, wherein the measuring platform comprises a fixture configured to fix the object to be measured on the measuring platform. 如請求項1所述之振動力量量測裝置,其中該抬升裝置為一氣浮軸承,該氣浮軸承可利用氣體將該量測平台予以浮離。The vibration force measuring device as claimed in claim 1, wherein the lifting device is an air bearing, and the air bearing can use gas to float the measuring platform away. 如請求項1所述之振動力量量測裝置,其中該抬升裝置包含至少三滾珠凸設於該抬升裝置之該上表面,該些滾珠配置以將該量測平台抬離該抬升裝置之該上表面。The vibration force measuring device as claimed in claim 1, wherein the lifting device comprises at least three balls protruding from the upper surface of the lifting device, and the balls are configured to lift the measuring platform away from the upper surface of the lifting device surface. 如請求項4所述之振動力量量測裝置,其中該抬升裝置更包含至少一磁吸元件,該至少一磁吸元件配置以對該量測平台施加一磁吸力。The vibration force measuring device according to claim 4, wherein the lifting device further comprises at least one magnetic attraction element, and the at least one magnetic attraction element is configured to exert a magnetic attraction force on the measuring platform. 如請求項1所述之振動力量量測裝置,其中該抬升裝置更包含一基座,該感測器固定於該基座上,該抬升裝置、該感測器、與該連接件所組成之一系統之一自然頻率高於該待測物之一轉動頻率。The vibration force measuring device according to claim 1, wherein the lifting device further comprises a base, the sensor is fixed on the base, and the lifting device, the sensor, and the connecting piece are composed of A natural frequency of a system is higher than a rotational frequency of the object to be tested. 如請求項1所述之振動力量量測裝置,其中該連接件在與該量測平台之該承載面平行之一平面方向上的剛性,大於垂直於該平面方向上的剛性。The vibration force measuring device according to claim 1, wherein the rigidity of the connecting member in a plane direction parallel to the bearing surface of the measuring platform is greater than the rigidity in a direction perpendicular to the plane. 如請求項7所述之振動力量量測裝置,其中該連接件為一撓性絞鍊。The vibration force measuring device according to claim 7, wherein the connecting member is a flexible hinge. 如請求項7所述之振動力量量測裝置,其中該連接件包含一金屬片。The vibration force measuring device as claimed in claim 7, wherein the connecting member comprises a metal sheet.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010103004A2 (en) * 2009-03-12 2010-09-16 Endress+Hauser Flowtec Ag Measuring system comprising a vibrating transducer
CA2785933A1 (en) * 2009-12-31 2011-07-07 Endress+Hauser Flowtec Ag Measuring system having a measuring transducer of vibration-type
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