CN207894771U - A kind of device measuring gas density in air film gap based on electromagnetic method - Google Patents
A kind of device measuring gas density in air film gap based on electromagnetic method Download PDFInfo
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- CN207894771U CN207894771U CN201820009787.1U CN201820009787U CN207894771U CN 207894771 U CN207894771 U CN 207894771U CN 201820009787 U CN201820009787 U CN 201820009787U CN 207894771 U CN207894771 U CN 207894771U
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- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000002706 hydrostatic effect Effects 0.000 claims abstract description 39
- 238000006073 displacement reaction Methods 0.000 claims abstract description 13
- 239000004579 marble Substances 0.000 claims abstract description 10
- 230000003068 static effect Effects 0.000 claims description 13
- 238000002955 isolation Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The utility model discloses a kind of device measuring gas density in air film gap based on electromagnetic method, belongs to precision equipment performance detection field.The utility model includes sensor stand, the horizontal vibration-isolating platform of marble, active air hydrostatic bearing, micro-displacement sensor, electromagnetic coil, compressed spring, servo-actuated aerostatic bearing, throttle valve, aerostatic bearing air inlet pipe, pressure-regulating valve, pressure gauge, air compressor.Utility model device is simple, it is only necessary to additionally add micro-displacement sensor, capacitance measuring instrument and Micro-force sensor；Model simplification, it is readily appreciated that, data processing amount is small, simple and convenient；The air film gap of aerostatic bearing can flexibly be rapidly adjusted, it can be by increasing electromagnetic loading device within the bearing, apply an active force on the Aerostatic Spindle is held, realize the function of adjusting aerostatic bearing air film gap, the variation of air film gap is calculated by formula, to calculate gas density in air film gap, manoscopy in air film gap can be come out by repeatedly testing, reliability is high and is easily achieved；Instrument application is universal, at low cost.
Description
Technical field
The utility model is related to a kind of devices measuring gas density in air film gap based on electromagnetic method, belong to precision equipment
Performance detection field.
Background technology
Aerostatic bearing has ultralow friction coefficient and very high kinematic accuracy, to ring using air as lubricant medium
The tolerances such as border such as low temperature, high temperature, radiation are stronger, are widely applied in aerospace and precision machinery, between air film
Gap change influences whether aerostatic bearing bearing capacity, so the air film gap of control aerostatic bearing, air film gap
Variation, can cause the variation of air film gap capacitance, the variation by experiment test aerostatic bearing capacitance is also to find out air film
One of important content of density.
Invention content
The purpose of this utility model is to provide a kind of device measuring gas density in air film gap based on electromagnetic method, packets
Include the horizontal vibration-isolating platform 2 of sensor stand 1, marble, active air hydrostatic bearing 3, micro-displacement sensor 4, electromagnetic coil 5,
Compressed spring 6, servo-actuated aerostatic bearing 7, air compressor 12；Active air hydrostatic bearing 3 be placed on marble level every
It shakes on platform 2, micro-displacement sensor 4 is vertically placed on active air hydrostatic bearing 3, by sensor stand 1 to micro-displacement
Sensor 4 is fixed, and the other end of sensor stand 1 is fixed on the horizontal vibration-isolating platform of marble 2；Servo-actuated static air pressure axis
7 surfaces for being located at active air hydrostatic bearing 3 are held, the two is opposite to be installed, active air hydrostatic bearing 3 and servo-actuated static air pressure
Bearing 7 is connected by compressed spring 6, applies pretightning force, active air hydrostatic bearing 3 and servo-actuated static air pressure to compressed spring 6
It is respectively arranged with electromagnetic coil 5, the electromagnetism on active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7 on four angles of bearing 7
5 upper and lower position of coil is staggered relatively, can change the size in magnetic field by the size of electric current in regulating winding, realizes that electromagnetism adds
Function is carried, so as to which the air-film thickness of active air hydrostatic bearing 3 is adjusted flexibly；Active air hydrostatic bearing 3 and servo-actuated sky
Aerostatic bearing air inlet pipe 9 is equipped with inside gas static pressure bearing 7, two aerostatic bearing air inlet pipe 9 are compressed with air
Machine 12 is connected to, and a pressure sensor is respectively equipped on active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7, and pressure passes
Sensor is located at the junction of active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7 and compressed spring 6.
Throttle valve is equipped on the pipeline that hydrostatic bearing air inlet pipe 9 described in the utility model is connected to air compressor 12 successively
8, pressure-regulating valve 10, pressure gauge 11 adjust the size of supply gas pressure by adjusting pressure-regulating valve 10.
The model HM91 of pressure sensor described in the utility model belongs to miniature, ultrathin pressure sensor.
Two aerostatic bearings described in the utility model keep synchronous during the motion, active air hydrostatic bearing 3
For bearing external load, servo-actuated aerostatic bearing 7 follows active bearings to move.
The course of work of the utility model is：When active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7 work,
By magnetic field size between control electromagnetic coil 5, aerostatic bearing air-film thickness is adjusted flexibly, makes active air hydrostatic bearing
3 air film space change, to form dynamic pressure, active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7 become dynamic and static
Two kinds of form static pressure combine, and improve the bearing capacity of bearing and the stability of movement.And it can also be entire by measuring in advance
The straightness error of device during the motion sets the air film gap thickness of different moments bearing according to the error measured, into
The feedforward compensation of row error can reduce straightness and flatness requirement to air-float guide rail in this way, reduce guide rail processing and manufacturing
Cost can also reduce air film gap by adjustment posture appropriate, reduce the degree of gas suspension micro-vibration.Pass through design
It is the air film gap that aerostatic bearing is adjusted by controlling electromagnetic force in magnetic force dynamic loading device principle, so as to adjust air
The kinetic characteristics of hydrostatic bearing.According to theory analysis it is found that when magnetic gap is close with air film gap, the change in air film gap
Change can influence bearing capacity and electromagnetic attraction, same reason simultaneously, and the variation of electromagnetic force can lead to the variation in air film gap, into
And aerostatic bearing bearing capacity can be influenced.Aerostatic bearing pressure P is accurately detected using HM91 pressure sensors（It takes
The average value of upper and lower two measurement value sensors）, using micro-displacement sensor, the variation in energy more accurate measurement air film gap
Δh。
Specific formula is as follows：
P：Air film clearance pressure；g：Acceleration of gravity；Δh：The variation in air film gap
The utility model has the beneficial effects that：Device is simple, it is only necessary to additionally add electromagnetic coil；Model simplification is easy
Understand, data processing amount is small, simple and convenient；The posture that aerostatic bearing can flexibly be rapidly adjusted, can be by bearing
Middle increase electromagnetic loading device applies an active force on the Aerostatic Spindle is held, realizes and adjust aerostatic bearing air film
The function in gap calculates the variation of air film gap by formula, can be by repeatedly surveying to calculate gas density in air film gap
Examination comes out manoscopy in air film gap, and reliability is high and is easily achieved；Instrument application is universal, at low cost；It is also big
Reason stone horizontal seismic isolation platform can effectively reduce influence of the interference signal to test result due to being generated when air film gap, reduce
Measurement error improves measurement accuracy, ensures measurement result accuracy.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
In figure：1- sensor stands；The horizontal vibration-isolating platform of 2- marbles；3- active air hydrostatic bearings；4- micro-displacements pass
Sensor；5- coils；6- compressed springs；7- is servo-actuated aerostatic bearing；8- throttle valves；9- aerostatic bearing air inlet pipe；10- is pressed
Force regulating valve；11- pressure gauges；12- air compressors.
Specific implementation mode
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, but the guarantor of the utility model
Shield range is not limited to the content.
Embodiment 1
A kind of device measuring gas density in air film gap based on electromagnetic method, including sensor stand 1, marble are horizontal
Vibration-isolating platform 2, active air hydrostatic bearing 3, micro-displacement sensor 4, electromagnetic coil 5, compressed spring 6, servo-actuated static air pressure axis
Hold 7, air compressor 12；Active air hydrostatic bearing 3 is placed on marble horizontal seismic isolation platform 2, and micro-displacement sensor 4 is perpendicular
It is directly positioned on active air hydrostatic bearing 3, micro-displacement sensor 4 is fixed by sensor stand 1, sensor stand
1 other end is fixed on the horizontal vibration-isolating platform of marble 2；Servo-actuated aerostatic bearing 7 is located at active air hydrostatic bearing 3
Surface, the two is opposite to be installed, and active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7 are connected by compressed spring 6, and
Pretightning force is applied to compressed spring 6, pressure sensor can show pressure value at this time at this time；3 He of active air hydrostatic bearing
It is respectively arranged with electromagnetic coil 5, active air hydrostatic bearing 3 and servo-actuated static air pressure axis on four angles of servo-actuated aerostatic bearing 7
5 upper and lower position of electromagnetic coil held on 7 is staggered relatively, can change the size in magnetic field by the size of electric current in regulating winding,
Realize that electromagnetism loads function, so as to which the air-film thickness of active air hydrostatic bearing 3 is adjusted flexibly；Active air hydrostatic bearing
3 and servo-actuated aerostatic bearing 7 inside be equipped with aerostatic bearing air inlet pipe 9, two aerostatic bearing air inlet pipe 9 with
Air compressor 12 is connected to, and a pressure sensor is respectively equipped on active air hydrostatic bearing 3 and servo-actuated aerostatic bearing 7
(for HM91 is miniature, ultrathin pressure sensor), pressure sensor is located at active air hydrostatic bearing 3 and servo-actuated static air pressure axis
Hold the junction of 7 and compressed spring 6.On the pipeline that hydrostatic bearing air inlet pipe 9 is connected to air compressor 12 described in the present embodiment
It is equipped with throttle valve 8, pressure-regulating valve 10, pressure gauge 11 successively, the big of supply gas pressure is adjusted by adjusting pressure-regulating valve 10
It is small（As shown in Figure 1）.
The specific embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the utility model is not
It is limited to the above embodiment, within the knowledge of a person skilled in the art, this practicality can also be not being departed from
Various changes can be made under the premise of novel objective.
Claims (3)
1. a kind of device measuring gas density in air film gap based on electromagnetic method, it is characterised in that：Including sensor stand
（1）, the horizontal vibration-isolating platform of marble（2）, active air hydrostatic bearing（3）, micro-displacement sensor（4）, electromagnetic coil（5）, pressure
Contracting spring（6）, servo-actuated aerostatic bearing（7）, air compressor（12）；Active air hydrostatic bearing（3）It is placed on marble
Horizontal seismic isolation platform（2）On, micro-displacement sensor（4）It is vertically placed on active air hydrostatic bearing（3）On, pass through sensor branch
Frame（1）To micro-displacement sensor（4）It is fixed, sensor stand（1）The other end be fixed on the horizontal vibration-isolating platform of marble
（2）On；Servo-actuated aerostatic bearing（7）Positioned at active air hydrostatic bearing（3）Surface, the two is opposite to be installed, actively empty
Gas static pressure bearing（3）With servo-actuated aerostatic bearing（7）Pass through compressed spring（6）Connection, and to compressed spring（6）Apply and pre-tightens
Power；Active air hydrostatic bearing（3）With servo-actuated aerostatic bearing（7）Four angles on be respectively arranged with electromagnetic coil（5）, it is servo-actuated sky
Gas static pressure bearing（7）With active air hydrostatic bearing（3）On electromagnetic coil（5）Upper and lower position is staggered relatively, and active air is quiet
Last item is held（3）With servo-actuated aerostatic bearing（7）Inside is equipped with aerostatic bearing air inlet pipe（9）, two static air pressure axis
Hold air inlet pipe（9）And air compressor（12）Connection, active air hydrostatic bearing（3）With servo-actuated aerostatic bearing（7）On
It is respectively equipped with a pressure sensor, pressure sensor is located at active air hydrostatic bearing（3）With servo-actuated aerostatic bearing（7）
With compressed spring（6）Junction.
2. the device of gas density in air film gap is measured based on electromagnetic method according to claim 1, it is characterised in that：Static pressure
Bearing air inlet pipe（9）With air compressor（12）Throttle valve is equipped on the pipeline of connection successively（8）, pressure adjust（10）, pressure
Table（11）.
3. the device of gas density in air film gap is measured based on electromagnetic method according to claim 1, it is characterised in that：Pressure
The model HM91 of sensor belongs to miniature, ultrathin pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820009787.1U CN207894771U (en) | 2018-01-04 | 2018-01-04 | A kind of device measuring gas density in air film gap based on electromagnetic method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820009787.1U CN207894771U (en) | 2018-01-04 | 2018-01-04 | A kind of device measuring gas density in air film gap based on electromagnetic method |
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| Publication Number | Publication Date |
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| CN207894771U true CN207894771U (en) | 2018-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820009787.1U Expired - Fee Related CN207894771U (en) | 2018-01-04 | 2018-01-04 | A kind of device measuring gas density in air film gap based on electromagnetic method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110296839A (en) * | 2019-08-13 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | Gas film pressure test device and test method for gas bearing |
-
2018
- 2018-01-04 CN CN201820009787.1U patent/CN207894771U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110296839A (en) * | 2019-08-13 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | Gas film pressure test device and test method for gas bearing |
| CN110296839B (en) * | 2019-08-13 | 2024-02-06 | 中国工程物理研究院机械制造工艺研究所 | Air film pressure testing device and testing method for gas bearing |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180921 Termination date: 20200104 |
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| CF01 | Termination of patent right due to non-payment of annual fee |