TWI767408B - Connection structure for use in plasma processing apparatus and plasma processing apparatus - Google Patents

Abstract

The present invention relates to a connection structure used in a plasma processing apparatus and a plasma processing apparatus. The connecting structure includes a first part and a second part with an installation hole; the first connection part is located in the installation hole and is detachably connected with the second part; the anti-corrosion adhesive layer is located between the first connection part and the first part. between the first part and the second part to achieve reliable connection. The present invention uses the above-mentioned connection structure to connect the gas shower head and the mounting substrate, so that the interface between the gas shower head and the mounting substrate is closely attached, thereby increasing the thickness of the gas shower head that can be consumed and prolonging its service life. The plasma processing apparatus of the present invention uses the above-mentioned gas shower head, and/or uses the above-mentioned connecting structure to connect various adjacent components in the plasma processing apparatus.

Description

Connection structure for use in plasma processing apparatus and plasma processing apparatus

The present invention relates to the technical field of semiconductor manufacturing, and in particular, to a connection structure used in a plasma processing apparatus and a plasma processing apparatus.

The plasma processing device is used to perform etching, deposition and other process processing on the substrate. For example, in a capacitively coupled plasma processing device, a reaction chamber is included, and a base (corresponding to a lower electrode) for carrying a substrate is arranged in the reaction chamber, and a reaction gas, auxiliary gas, etc. are introduced into the reaction chamber. The gas shower head (corresponding to the upper electrode), the upper and lower electrodes are used as the process area, and any one of the upper and lower electrodes is applied with high-frequency radio frequency power to dissociate the reactive gas in the process area into plasma, reaching the upper surface of the substrate. The plasma performs corresponding process treatment on the substrate; the plasma treatment device is provided with an exhaust area at a suitable position in the lower part of the reaction chamber, and the exhaust area is connected with an external exhaust pump, and the reaction gas used in the treatment process and By-product gases, etc. are drawn out of the reaction chamber. An upper grounding ring is also arranged around the gas shower head, which can support the gas shower head or be used to increase the lateral area of the gas shower head to improve the uniformity of the plasma treatment.

As shown in FIG. 1 , the gas shower head 11 ′ is a disc-shaped element with a certain thickness, which is stacked and arranged with the disc-shaped mounting substrate 12 ′, and the gas is transported through the communicating vent holes 13 ′ opened on the two plates. into the reaction chamber. Wherein, the mounting substrate 12' is typically made of aluminum alloy, which can support the gas shower head 11' below it; the gas shower head 11' is typically made of single crystal silicon, serving as an upper electrode.

At present, the connection method of the gas shower head 11' and the mounting substrate 12' is to form a plurality of concave holes 14' distributed on the top surface of the gas shower head 11', and a first connecting member 15' ( A step hole 16' is opened at the corresponding position of the mounting base plate 12' to limit the position of the second connecting piece 17'; the lower end of the second connecting piece 17' passes through the stepped hole 16' and penetrates into the The concave hole 14' is connected with the first connecting piece 15', so that the mounting substrate 12' can be fixedly connected with the gas shower head 11', and the bottom surface of the mounting substrate 12' is connected to the gas shower head 11'. the top surface is in close contact.

In addition, the thickness of the gas shower head 11' (or the thickness of the combination of the gas shower head 11' and the mounting substrate 12') needs to be within a specified range to match technologies such as the rate of gas delivery and the effect of temperature control. requirements, so as to ensure processing efficiency and finished product quality. However, the bottom surface of the gas shower head 11' is exposed to the process area, and is easily affected by the gas and plasma used in the etching process, which causes the material loss of the gas shower head 11'. The opening of the concave hole 14' makes the thickness d that the gas shower head 11' consumes very small, and a little more consumption may cause the overall thickness of the gas shower head 11' to be insufficient in the specified range, or cause the bottom of the concave hole 14' to penetrate. The first connection piece 15' is etched and thus affects the reliability of the connection, thereby reducing the service life of the gas shower head 11'; replacing the gas shower head 11' with a new one will greatly waste cost and manpower. affect production efficiency.

The present invention provides a connection structure used in a plasma processing device and a plasma processing device. The connection structure can realize the fast connection of adjacent components without reducing the thickness of the components themselves for the purpose of arranging connectors, thereby effectively prolonging the life of the components. service life.

A technical solution of the present invention is to provide a connection structure for use in a plasma processing device, comprising: the first part; a second part having mounting holes; a first connector, located in the mounting hole, and detachably connected to the second component; An anti-corrosion adhesive layer for bonding the first connector and the first component together.

Preferably, the second part comprises an opposite first surface and a second surface, and the first surface faces the first part, the first connector enters the mounting hole from the first surface of the second part, and The second surface of the second member may or may not be pierced.

Preferably, the mounting holes penetrate through the first surface and the second surface of the second component.

Preferably, the first connecting piece is a first bolt or a first screw, and the outer surface of the screw rod matches the inner surface of the mounting hole; the screw rod is connected with the second component in the mounting hole.

Preferably, it also includes a second connector adapted to the first connector; The second connecting piece is a first nut; the first connecting piece is a first bolt or a first screw, the outer surface of the screw rod is matched with the inner surface of the screw hole of the first nut; The screw rod enters the mounting hole and is connected with the first nut disposed in the mounting hole; or, the screw rod passes through the mounting hole and is connected with the first nut located on the second surface of the second component.

Preferably, it also includes a second connector adapted to the first connector; The first connecting piece is a second nut, the first connecting piece includes a first end face and a second end face opposite to each other, the first end face is attached to the anti-corrosion adhesive layer, and the second end face is provided with a direction. a screw hole extending from the first end face; The second connecting piece is a second bolt or a second screw, and the outer surface of the screw rod is matched with the inner surface of the screw hole of the second nut; one end of the second bolt or second screw is connected to the second screw through the screw rod. The nut is connected, and the other end is located on the second surface of the second component or arranged in the mounting hole.

Preferably, the first part, the first connecting part and the anti-corrosion adhesive layer do not rotate, and the second connecting part is independently rotatable, or the second connecting part and the second part are connected to form a co-rotatable whole; Alternatively, the first part is connected with the first connector and the corrosion-resistant adhesive layer as a co-rotatable integral body, and the second connector is an independently rotatable part, or the second connector is connected with the second part as a common rotatable part Another whole that turns.

Preferably, the material of the anti-corrosion adhesive layer includes Kalrez material.

The present invention also provides a plasma processing device, comprising: reaction chamber; a gas shower head, located at the top of the reaction chamber; an installation base plate, which is located on the gas shower head and has installation holes therein; a first connector, located in the mounting hole, and detachably connected to the mounting substrate; and An anti-corrosion adhesive layer connects the gas shower head and the first connecting piece together.

The present invention additionally provides a plasma processing device, comprising: reaction chamber; a gas shower head, located at the top of the reaction chamber; an upper grounding ring surrounding the gas shower head; an installation transition plate, which is located on the upper grounding ring and has installation holes therein; a first connector, located in the installation hole, and detachably connected to the installation transition substrate; and An anti-corrosion adhesive layer connects the upper ground ring with the first connector.

Compared with the prior art, the connection structure and the plasma processing device used in the plasma processing device of the present invention have the following advantages: The invention uses the anti-corrosion adhesive layer to bond the first connecting piece and the gas shower head together, so that the gas shower head and the first connecting piece are integrated into one; The connecting piece adopts the combination of bolt (screw) and nut, with simple structure and reliable connection. Compared with the prior art of setting up connecting pieces by opening pits on the gas shower head, in the present invention, it is no longer necessary to reserve positions for the pits, so the thickness of the gas shower head itself can be basically unchanged when the connecting pieces are arranged. , which effectively increases the thickness of the gas shower head that can be worn, thereby prolonging its service life. The present invention can apply a similar connection structure to plasma processing apparatuses and other various equipments.

Hereinafter, various embodiments of the present invention will be described with reference to the accompanying drawings.

The present invention provides a connecting structure used in a plasma processing device, comprising a first component, a second component, and a connecting piece for connecting the two components; the first component and the second component have opposite interfaces; the connecting piece A first connector is included, which is bonded to the interface of the first component through an anti-corrosion adhesive layer. The second part is provided with an installation hole, and the first connecting piece is detachably connected with the second part in the installation hole, so that the first part and the second part are fastened.

The present invention is not limited to the material used as the anti-corrosion adhesive layer. When the above connecting structure is used in a plasma processing device, in addition to the adhesive function, the anti-corrosion adhesive layer also needs to be resistant to etching gas corrosion: common gases include C ₄ F ₆ , C ₄ F ₈ , CH ₂ F ₂ , H ₂ , O ₂ , CHF ₃ , CF ₄ , CO ₂ , CO; in addition, the long-term use temperature needs to be greater than 150 degrees.

An example corrosion resistant bond coat is made using Kalrez material, which is perfluoroether rubber (FFKM). The Kalrez material is an elastic material, which can last longer in harsh working environments, has higher sealing efficiency, and has good high temperature stability (327°C) compared to other elastomers. The use of seals has the characteristics of less particle generation, low precipitates, and resistance to degradation in harsh plasma environments. The present invention utilizes the above Kalrez material as a corrosion-resistant adhesive layer to reliably bond the first connector to the first component without the need for additional adhesive.

The present invention also provides a plasma processing apparatus using the above connection structure. The plasma processing apparatus shown in FIG. 2 includes a reaction chamber 60 . The reaction chamber 60 is provided with a base 50 (corresponding to the lower electrode) for carrying the substrate 40 , and the gas shower head 11 (corresponding to the upper electrode) A process area is formed between the base 50 and the upper and lower electrodes. When high-frequency radio frequency power is applied to any one of the upper and lower electrodes, the reactive gas in the process area is dissociated into plasma and reaches the upper surface of the substrate 40 to perform etching or film deposition on the substrate 40. The plasma treatment device is provided with an exhaust area at a suitable position in the lower part of the reaction chamber 60, and the exhaust area is connected with an external exhaust pump, and the reaction gas and by-product gas used in the treatment process are drawn out of the reaction chamber. 60. An upper grounding ring 20 is also arranged around the gas shower head 11 , which can support the gas shower head 11 or be used to increase the lateral area of the gas shower head 11 to improve the uniformity of plasma processing.

The gas shower head 11 is a disc-shaped element having a certain thickness, which is arranged in a stacked manner with a disc-shaped mounting substrate 12 . The mounting substrate 12 is made of, for example, aluminum alloy, and can support the gas shower head 11 below it; the gas shower head 11 is made of, for example, monocrystalline silicon, serving as an upper electrode.

Referring to FIG. 3 or FIG. 6 , the gas shower head 11 and the mounting substrate 12 are respectively provided with a large number of ventilation holes, which are all through holes in this example: the second ventilation holes 121 of the mounting The top surface penetrates through the bottom surface and communicates with the first vent hole 111 of the gas shower head 11 to deliver the gas to the gas shower head 11 ; the first vent hole 111 of the gas shower head 11 penetrates from the top surface of the gas shower head 11 To the bottom, further gas is injected into the reaction chamber. The respective shapes and diameters of the first ventilation holes 111 and the second ventilation holes 121 can be freely designed according to the application. Since the manufacturing methods and structures of the gas shower head 11 and the mounting substrate 12 have been well-developed in the prior art, for the sake of brevity, they will not be repeated here.

When the gas shower head 11 uses the connection structure of the present invention, the gas shower head 11 corresponds to the first component, the mounting substrate 12 corresponds to the second component, and the top surface of the gas shower head 11 and the bottom surface of the mounting substrate 12 are opposite interfaces , the top surface of the gas shower head 11 (avoiding the position of the first vent hole 111 ) is distributed and bonded with a plurality of first connecting pieces through the anti-corrosion adhesive layer 2 for connecting the stacked gas shower head 11 and the The mounting board 12 is connected.

In one embodiment shown in FIGS. 3 to 5 , the first connecting member is first bolts 3 , and the gas shower head 11 is integrated with these first bolts 3 . The head end face of each first bolt 3 is bonded to the top surface of the gas shower head 11 through a corresponding anti-corrosion adhesive layer 2 (optional Kalrez material), and the screw of the first bolt 3 is perpendicular to the gas shower head 11 Lay the top side up.

When the gas shower head 11 of this embodiment is connected to the mounting substrate 12 , the top surface of the gas shower head 11 is opposite to the bottom surface of the mounting substrate 12 ; The top surface penetrates to a plurality of mounting holes on the bottom surface of the mounting substrate 12 , which correspond to the plurality of first bolts 3 on the top surface of the gas shower head 11 one-to-one. The first nut 4 is used as the second connecting piece, which is matched with the first bolt 3 passing through the installation hole. The outer thread of the screw rod of the first bolt 3 is engaged with the inner thread of the first nut 4; After a nut 4 is connected, the gas shower head 11 and the mounting base 12 are firmly connected.

Each mounting hole in the example includes three sections including an upper section 122, a middle section 123, and a lower section 124, which are roughly I-shaped: the diameter of the middle section 123 is smaller than the diameter of the upper section 122 and the diameter of the lower section 124; the specific shape, diameter, height, etc. of each section The parameters can be designed according to the application to meet the situation when connecting with the first bolt 3:

The screw rod of the first bolt 3 penetrates into the middle section 123 from the lower section 124 of the mounting hole, and the end of the screw rod enters the upper section 122; the inner surface of the middle section 123 may be smooth. The first nut 4 as the second connecting piece can be embedded in the upper section 122 of the installation hole, and can rotate the first nut 4 on the upper section 122 of the installation hole under the action of the wrenching structure of the first nut 4 by an external tool, Therefore, when the end of the screw rod of the first bolt 3 passes through the middle section 123 and reaches the upper section 122 , the screw rod is tightened, so as to realize the fast connection between the gas shower head 11 and the mounting base plate 12 . The lower section 124 of the mounting hole is sufficient to accommodate the head of the first bolt 3 and the anti-corrosion adhesive layer 2 to be embedded therein, so that when the gas shower head 11 is connected to the mounting substrate 12, the top surface of the gas shower head 11 and the bottom surface of the mounting substrate 12 can be installed. Closely fit for better thermal and/or electrical conductivity between the two boards.

In another embodiment shown in FIGS. 6 to 8 , the first connecting member is a second nut 5 , and the gas shower head 11 is integrated with these second nuts 5 . The first end face of the main body of each second nut 5 is bonded to the top surface of the gas shower head 11 through a corresponding anti-corrosion adhesive layer 2 (optional Kalrez material), and the main body of the second nut 5 is perpendicular to the gas shower head 11 The top surface is arranged upward, extends downward from the second end surface of the main body of the second nut 5, and is provided with a screw hole with an internal thread; the example screw hole does not penetrate to the first end surface.

When the gas shower head 11 in this embodiment is connected to the mounting substrate 12, the top surface of the gas shower head 11 is opposite to the bottom surface of the mounting substrate 12; The top surface of the base plate 12 penetrates through a plurality of installation holes on the bottom surface of the installation base plate 12, which are in one-to-one correspondence with the plurality of second nuts 5 on the top surface of the gas shower head 11; the second bolts 6 matched with the second nuts 5 serve as The second connecting piece is inserted into the mounting hole, and the external thread of the screw rod of the second bolt 6 is engaged with the internal thread of the second nut 5; when the second nut 5 is connected with the second bolt 6, the gas shower head 11 and the mounting base plate 12 be securely connected.

Each mounting hole in the example consists of upper, middle and lower sections, which are roughly I-shaped: the diameter of the middle section 123 is smaller than the diameter of the upper section 122 and the diameter of the lower section 124; the specific shape, diameter, height and other parameters of each section can be designed according to the application. , to meet the situation when connecting with the second bolt 6:

The screw rod of the second bolt 6 penetrates into the middle section 123 from the upper section 122 of the mounting hole, and the end of the screw rod enters the lower section 124; the inner surface of the middle section 123 may be smooth. The head of the second bolt 6 can be embedded in the upper section 122 of the installation hole, and the second bolt 6 can be rotated in the installation hole under the action of the wrenching structure of the external tool on the head, so that the second bolt 6 can be rotated in the installation hole. When the end of the screw rod passes through the middle section 123 and reaches the lower section 124, tighten the screw rod, so that the second bolt 6 is connected with the second nut 5, so as to realize the fast connection between the gas shower head 11 and the installation base plate 12. The lower section 124 of the mounting hole is sufficient to accommodate the second nut 5 and the anti-corrosion adhesive layer 2 embedded therein, so that when the gas shower head 11 is connected to the mounting substrate 12, the top surface of the gas shower head 11 and the bottom surface of the mounting substrate 12 can be closely attached to each other. together, so that there is a better thermal and/or electrical conduction effect between the two plates.

Compared with the prior art in which a cavity is formed on the gas shower head 11 to set the connecting piece, in the above two embodiments of the present invention, it is no longer necessary to reserve a position for the cavity, so the gas spraying is performed when the connecting piece is set. The thickness of the head 11 and the mounting substrate 12 itself can be basically unchanged, which is equivalent to an increase in the thickness of the gas shower head 11 that can be lost during the manufacturing process (expanded to the overall thickness of the gas shower head 11 ), effectively extending the its service life.

In order to control the service life of the gas shower head 11 , initially, the gas shower head 11 has a first thickness, and the mounting substrate 12 has a second thickness. After the connection, the top surface of the gas shower head 11 and the bottom surface of the mounting substrate 12 are connected. Closely fit; after performing multiple processes, obtain the current actual thickness of the gas shower head 11 (or its combination with the mounting substrate 12 ), and specify it with the gas shower head 11 (or the combination) If the actual thickness of the gas shower head 11 (or the combination) is not within the thickness range, replace the gas shower head 11 with a new one; if the gas shower head 11 (or the said combination) combination) if the current actual thickness is within the specified thickness range, the gas shower head 11 can continue to be used.

The connection structure of the present invention based on the anti-corrosion adhesive layer 2 is not limited to the connection between the gas shower head 11 and the mounting substrate 12, and can also be applied to other components in the plasma processing device:

For example, in FIG. 2 , the upper ground ring 20 surrounding the gas shower head 11 is arranged in layers with the mounting transition plate 21 above the upper ground ring 20 ; the upper ground ring 20 is made of silicon or silicon carbide, for example, as the upper The ground electrode can be a single piece or a ring composed of a plurality of ring segments; the installation transition plate 21 is made of aluminum alloy, for example, to support the upper ground ring 20 and provide a ground path. Then, based on the connection structure of the present invention, the upper ground ring 20 corresponds to the first part, the installation transition plate 21 corresponds to the second part, the bottom surface of the installation transition plate 21 and the top surface of the upper ground ring 20 are opposite interfaces, and the upper ground ring The interface of 20 is erected with a plurality of first connectors (such as first bolts or second nuts) through the anti-corrosion adhesive layer, and through the matching second connectors (the first connector located at the second end of the second component mounting hole) A nut, or a second bolt penetrating from the second end of the second component mounting hole to the first end) is connected to realize the fast connection between the upper grounding ring 20 and the mounting transition plate 21 .

The above-mentioned connection structure of the present invention can also be applied to various stacked components in equipment such as the susceptor of the plasma processing apparatus, the lower grounding structure around the susceptor, and the insulating structure of the plasma confinement system. In addition, it is not limited to the components stacked up and down. By adjusting the direction of the first component and the second component relative to the interface, and the arrangement direction of the first connector, the above-mentioned connection structure of the present invention can be applied to connect various left and right adjacent components. part.

Some embodiments of the connection structure of the present invention and its modification examples are provided below, which are suitable for the connection of various first components and second components:

In one embodiment, the first connector is a first bolt, and the end face of one end where the head is located is bonded to the interface of the first component through the anti-corrosion adhesive layer 2, so that the first bolt and the first component are integrated into one. The threaded rod of the first bolt is perpendicular to the interface of the first component, and at least one section of the circumferential surface of the threaded rod is provided with an external thread. The second part is formed with a mounting hole into which the other end of the first bolt can enter.

In some examples, the first bolt has been integrated with the first component, and in the case that it is difficult to rotate and tighten the bolt alone, configuring the first nut adapted to the first bolt as the second connecting piece can The connection of the first part to the second part is relatively simple.

When the mounting hole is a through hole, the first nut can be connected at the surface of the second component at the second end of the through hole with the screw rod of the first bolt that penetrates the second component to reach the surface; If the first end or the second end is embedded in the mounting hole of the second component, the first bolt may not need to penetrate the entire second component but be connected with the first nut in the mounting hole. Alternatively, when the mounting hole is not a through hole, and the first nut is completely embedded into the mounting hole from the first end of the mounting hole, the first bolt may also be connected to the first nut in the mounting hole.

In some examples, the first nut is an independently rotatable part that is not fixedly connected to the second part. At this time, the first nut needs to have a wrenching structure, so that it can be rotated and tightened by a tool. When the first nut can be rotated, the head of the first bolt may or may not be provided with a wrenching structure.

The wrenching structure can be formed on the surface of the connector, such as a shape structure that is suitable for the tool to exert force on it, such as using a hexagonal, dodecagonal, square and other structure or a nut with knurling on the outer surface; or, the wrench The structure is fitted to the surface of the connector and can be removed after tightening the connector.

In other examples, the second part is convenient to rotate together with the first nut, the first nut and the second part can be fixedly connected in advance, and then the second part is rotated to drive the first nut to rotate, and then the first nut can be tightened The connection is made to the first bolt at the first part. At this time, the first nut may or may not be provided with a wrenching structure. The connection of the first nut and the second component may be in any manner, and may similarly be bonded using another anti-corrosion adhesive layer, but is not limited thereto.

When the first nut is provided, the mounting hole of the second component may have no internal thread, and the first bolt penetrates or passes through the mounting hole to be connected with the first nut. In some examples, the configuration of the first nut and the setting of the mounting hole of the second component as a screw hole with an internal thread can also be implemented together.

Or, in other examples, assuming that the first part is easy to rotate together with the first bolt, the first nut may not be additionally configured, and the mounting hole of the second part may be made as a screw hole with an internal thread (through hole or non-through holes), so that the external thread of the first bolt engages with it, and the connection is achieved when the first bolt is screwed into the mounting hole of the second component.

In any of the above examples, the first screw can be used to replace the first bolt as the first connecting piece, screwed into a suitable mounting hole to connect with the second component, or screwed into (or penetrated or passed through) the mounting hole Connect with the matching first nut. In addition, in some examples, the second component may not have a mounting hole in advance, and the material of the second component itself allows the first screw to form a mounting hole in the second component and complete the connection at the same time (the inner thread of the mounting hole and the first screw are screwed in). the external thread of a screw).

In another embodiment of the connecting structure of the present invention, the first connecting piece is a second nut, and the first end face of the second nut body is bonded to the interface of the first component through an anti-corrosion adhesive layer, so that the second nut is connected to the interface of the first component. The first component is integrated into one body; a screw hole with an internal thread is opened from the second end face of the second nut body; the screw hole extends from the second end face to the first end face, and the example screw hole does not penetrate to the first end face.

A second bolt that matches the second nut is set as the second connecting piece, and the second part is formed with a mounting hole for the second bolt to penetrate (or screw in or pass through), so that the external thread of the second bolt is connected with the first bolt. The inner threads of the two nuts are engaged, so as to fasten the connection between the first part and the second part.

In some examples, the mounting hole of the second component may be a through hole (with or without internal thread), the screw rod of the second bolt passes through the through hole, and is connected with the second nut at the first end of the mounting hole; The end where the heads of the two bolts are located can be embedded in the mounting holes or left on the second surface of the second part.

The mounting hole may also not be a through hole, and the end of the second bolt head is embedded in the mounting hole of the second component, so that the end of the screw rod is exposed at the first end of the mounting hole, and then connected with the second nut; When the first and second components are used, the second nut itself is also embedded in the first end of the mounting hole of the second component, so the end of the screw rod of the second bolt does not need to pass through the first end of the mounting hole and can also be connected with the second nut. connect.

When the second bolt needs to be rotated independently, the head or other parts can be provided with a wrench structure that is convenient for the tool to rotate and tighten it; or, the second bolt is embedded in the mounting hole or the second bolt and the second component can rotate together The second bolt may also not be provided with a wrenching structure. The outer surface of the second nut may or may not be provided with a wrench structure; the first part may be a structure that can be rotated by an external force and drive the second nut to rotate; The rotation of the two bolts (or the second bolt that rotates with the second part) implements the connection.

In the above-mentioned many examples, the second bolt can be replaced by the second screw as the second connecting member, and the connection can be performed with the matching second nut. In some examples, the second component may not have a mounting hole in advance, and the material of the second component itself allows a mounting hole to be formed in the second component when the second screw is screwed in, and the connection with the second component is completed at the same time. The internal thread engages the external thread of the second screw).

The first end of the mounting hole of the second component is located at the interface of the second component, and the interface of the second component is opposite to the interface of the first component; if the first end of the mounting hole of the second component is sufficient to accommodate the first connector and the anti-corrosion adhesive If the junction layers are embedded together, after connecting the first and second components through the connecting piece, the interface of the first component and the interface of the second component can be closely attached. In some examples, it is also possible to appropriately form an interval and adjust the interval distance between the opposing interfaces of the first component and the second component by limiting the depth at which the first connector is inserted into the second component. In addition, in some examples, the reliable connection can be achieved by relying on a tight fit between the two connecting pieces instead of threaded engagement, or using other means between the contact surfaces of the two connecting pieces.

Although the content of the present invention has been described in detail by way of the above preferred embodiments, it should be appreciated that the above description should not be construed as limiting the present invention. Various modifications and substitutions to the present invention will be apparent to those of ordinary skill in the art upon reading the foregoing disclosure. Therefore, the protection scope of the present invention should be defined by the appended claims.

11,11': Gas sprinkler 111: First vent 12,12': Mounting base plate 121: Second vent hole 122: upper paragraph 123: middle section 124: next paragraph 13': Vent hole 14': Recessed hole 15': The first connector 16': Step hole 17': Second connector 2: Anti-corrosion adhesive layer 20: Upper ground ring 21: Install the transition plate 3: The first bolt 4: The first nut 40: Substrate 5: Second nut 50: Pedestal 6: Second bolt 60: reaction chamber

FIG. 1 is a schematic diagram of the connection between a conventional gas shower head and a mounting substrate; Fig. 2 is the schematic diagram of plasma processing apparatus; 3 is a first embodiment of the connection between the gas shower head and the mounting substrate of the present invention, showing a side cross-sectional view when the gas shower head and the mounting substrate are connected at one set of connectors; 4 is a perspective view of the gas shower head connected to a plurality of first connectors according to the first embodiment; Figure 5 is a side sectional view along line A-A1 in Figure 4; FIG. 6 is a second embodiment of the connection between the gas shower head and the mounting substrate of the present invention, showing a side cross-sectional view when the gas shower head and the mounting substrate are connected at one set of connectors; 7 is a perspective view of a gas shower head connected to a plurality of first connectors according to the second embodiment; FIG. 8 is a side cross-sectional view taken along line A-A1 in FIG. 7 .

11: Gas shower head

111: First vent

3: The first bolt

Claims (10)

A connection structure used in a plasma processing device, comprising: a first part; a second part having a mounting hole; A first connecting piece, located in the mounting hole, is detachably connected with the second component; and A corrosion-resistant adhesive layer for bonding the first connector to the first component. The connection structure for use in a plasma processing apparatus according to claim 1, wherein, The second component includes a first surface and a second surface opposite to each other, and the first surface faces the first component, the first connecting piece enters the mounting hole from the first surface of the second component, and the first connecting member enters the mounting hole from the first surface of the second component The second surface of the second component is or is not pierced. The connection structure for use in a plasma processing apparatus according to claim 2, wherein, The mounting hole penetrates the first surface and the second surface of the second component. The connection structure for use in a plasma processing apparatus according to any one of claims 1 to 3, wherein, The first connecting piece is a first bolt or a first screw, the outer surface of the screw rod is matched with the inner surface of the installation hole; the first bolt or the screw rod of the first screw is in the installation hole with the The second part is connected. The connection structure for use in a plasma processing apparatus according to claim 2, wherein, Also includes a second connector adapted to the first connector; The second connecting piece is a first nut; the first connecting piece is the first bolt or the first screw, the outer surface of the screw rod is matched with the inner surface of the screw hole of the first nut; The first bolt or the screw rod of the first screw enters the mounting hole and is connected to the first nut disposed in the mounting hole; or, the first bolt or the screw rod of the first screw passes through the mounting hole and is located in the mounting hole The first nut of the second surface of the second part is connected. The connection structure for use in a plasma processing apparatus according to claim 2, wherein, Also includes a second connector adapted to the first connector; The first connector is a second nut, the first connector includes a first end face and a second end face opposite to each other, the first end face is attached to the anti-corrosion adhesive layer, and the second end face is provided with a direction a screw hole extending from the first end face; The second connecting piece is a second bolt or a second screw, the outer surface of the screw is matched with the inner surface of the screw hole of the second nut; one end of the second bolt or the second screw is connected to the screw through the screw The second nut is connected, and the other end is located on the second surface of the second component or arranged in the mounting hole. The connection structure for use in a plasma processing apparatus according to claim 5 or 6, wherein, The first part, the first connecting part and the anti-corrosion adhesive layer do not rotate, and the second connecting part is independently rotatable, or the second connecting part and the second part are connected to form a co-rotatable whole; Alternatively, the first component is connected with the first connector and the anti-corrosion adhesive layer to form a co-rotatable integral body, and the second connector is an independently rotatable part, or the second connector and the first connector are The two parts are connected to form another unit that can rotate together. The connection structure for use in a plasma processing apparatus according to claim 1, wherein, The material of the anti-corrosion adhesive layer includes Kalrez material. A plasma processing device, comprising: a reaction chamber; a gas shower head, located at the top of the reaction chamber; a mounting base plate, located on the gas shower head, with a mounting hole therein; a first connector located in the mounting hole and detachably connected to the mounting substrate; and An anti-corrosion adhesive layer connects the gas shower head and the first connecting piece together. A plasma processing device, comprising: a reaction chamber; a gas shower head, located at the top of the reaction chamber; A grounding ring surrounds the gas sprinkler; an installation transition plate, which is located on the upper grounding ring and has an installation hole therein; a first connecting piece located in the mounting hole and detachably connected to the mounting transition plate; and A corrosion-resistant adhesive layer connects the upper ground ring with the first connector.

Images