TWI764499B - Biometric sensing apparatus - Google Patents

Abstract

A biometric sensing apparatus including a light sensing device, a first medium layer, a first light-shielding layer, a second medium layer, and a second light-shielding layer is provided. The light sensing device is disposed on the substrate. The first medium layer is disposed on the substrate and the light sensing device. The first light-shielding layer is disposed on the first medium layer and has a first hole corresponding to the light sensing device. The first hole has a first aperture and a first center line perpendicular to the substrate. There is a first height between the surface of the first light-shielding layer away from the light sensing device and the light sensing device. The first hole has an offset distance. There is a maximum angle between the light passing through the first hole to the light sensing device and the first center line. The offset distance (S1), the first aperture (W1), the first height (D1) and the maximum angle (α) have the following relationship: 0 ＜S1 ＜[W1+(2*(D1*|tan(α)|)) ]; 0 ＜D1/W1 ＜15.

Description

Biometric Sensing Device

The present invention relates to a sensing device, and more particularly, to a biometric sensing device.

In general fingerprint sensor (fingerprint sensor; FPS), the design of pinhole (pinhole; also called: pinhole) is often used to improve the signal-to-noise ratio (SNR or S/N) and /or enhance the processing capability of the image signal of the sensing element with an algorithm.

The present invention provides a biometric sensing device with good optical and/or corresponding identification performance.

The biometric sensing device of the present invention is suitable for sensing light. The biometric sensing device includes at least one light sensing element, a first medium layer, a first light shielding layer, a second medium layer and a second light shielding layer. The light sensing element is arranged on the substrate. The first dielectric layer is disposed on the substrate and the light sensing element. The first light shielding layer is disposed on the first dielectric layer. The first light shielding layer includes a plurality of first holes. At least one of the first holes corresponds to the light sensing element. At least one of the first holes has a first centerline perpendicular to the substrate. The first light shielding layer has two opposite surfaces. One of the two opposing surfaces is closer to the at least one light sensing element. A first height is provided between the other surface of the first light shielding layer farther from the light-sensing element and the other opposite surface of the first light-shielding layer and the light-sensing element. At least one of the first holes has a first aperture. The ratio of the first height to the first aperture is greater than 0 and less than 15. The second dielectric layer is disposed on the first light shielding layer. The second light shielding layer is disposed on the second dielectric layer. The second light shielding layer includes a plurality of second holes. At least one of the second holes corresponds to at least one of the first holes. At least one of the second holes corresponds to the light sensing element. The second light shielding layer has two opposite surfaces. One of the two opposing surfaces is closer to the at least one light sensing element. The other two opposite surfaces of the second light shielding layers farther from the light sensing element have a second height between the other surface and the light sensing element. At least one of the second holes has a second aperture. The ratio of the second height to the second aperture is greater than 0 and less than 15. At least one of the first holes has an offset distance. There is a maximum included angle between the light rays passing through at least one of the first holes to the light sensing element and the first center line. The offset distance is S1, the first aperture is W1, the first height is D1, the maximum angle is α, and the offset distance, the first aperture, the first height and the maximum angle have the following relationship: 0 < S1 < [W1+(2 *(D1*|tan(α)|))].

The biometric sensing device includes at least one light sensing element, a first medium layer, a first light shielding layer, a second medium layer and a second light shielding layer. The light sensing element is arranged on the substrate. The first dielectric layer is disposed on the substrate and the light sensing element. The first light shielding layer is disposed on the first dielectric layer. The first light shielding layer includes a plurality of first holes. At least one of the first holes corresponds to at least one light sensing element. At least one of the first holes has a first centerline perpendicular to the substrate. The first light shielding layer has two opposite surfaces and a first side. The first side connects the two opposing surfaces. The first side connects one of the two opposite surfaces to form a first node. One of the two opposite surfaces of the first light shielding layer is closer to the at least one light sensing element. There is a first height between the other two opposite surfaces of the first light shielding layers farther from the light sensing element and the light sensing element. At least one of the first holes has a first aperture. The ratio of the first height to the first aperture is greater than 0 and less than 15. The second dielectric layer is disposed on the first light shielding layer. The second light shielding layer is disposed on the second dielectric layer. The second light shielding layer includes a plurality of second holes. At least one of the second holes corresponds to at least one of the first holes. The second light shielding layer has two opposite surfaces and a second side. The second side connects the two opposing surfaces. The second side connects one of the two opposite surfaces to form a second node. One of the two opposite surfaces of the second light shielding layer is closer to the light sensing element. The other two opposite surfaces of the second light shielding layers farther from the light sensing element have a second height between the other surface and the light sensing element. At least one of the second holes has a second aperture. The ratio of the second height to the second aperture is greater than 0 and less than 15. At least one of the first holes has an offset distance. The connecting line between the first node and the second node has a maximum included angle with the first center line. The offset distance is S1, the first aperture is W1, the first height is D1, the maximum angle is α, and the offset distance, the first aperture, the first height and the maximum angle α have the following relationship: 0<S1<[W1+( 2*(D1*|tan(α)|))].

Based on the above, in the biometric sensing device of the present invention, the height of the light-shielding layer, the aperture of the hole in the light-shielding layer, the offset distance of the hole in the light-shielding layer, and the corresponding angle have at least the above relationship (with the above-mentioned relationship) relational representation). In this way, the biometric sensing device can have better optical and/or corresponding identification performance.

In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail with the accompanying drawings as follows. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

In the drawings, the thickness of each element and the like is exaggerated for clarity. The same reference numerals refer to the same elements throughout the specification. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on," "connected to," "overlying" another element, it can be directly on the other element on or connected to another element, or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to a physical and/or electrical connection.

It will be understood that, although the terms “first,” “second,” “third,” etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, and/or or parts shall not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a "third element," "component," "region," "layer," or "section" discussed below could be termed a second element, component, region, layer, or section, and "second element" , "component," "region," "layer," or "section" could be termed a third element, component, region, layer, or section without departing from the teachings herein.

The terminology used herein is for the purpose of describing particular embodiments only and is not limiting. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms including "at least one" unless the content clearly dictates otherwise. "Or" means "and/or". As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. It will also be understood that the terms "comprising" and/or "comprising" when used in this specification designate the stated feature, region, integer, step, operation, presence of an element and/or part, but do not exclude one or more The presence or addition of other features, entireties of regions, steps, operations, elements, components, and/or combinations thereof.

Furthermore, relative terms such as "lower" and "upper" may be used herein to describe one element's relationship to another element, as shown in the figures. It should be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation shown in the figures. For example, if the device in one of the figures is turned over, elements described as being on the "lower" side of other elements would then be oriented on "upper" sides of the other elements. Thus, the exemplary term "lower" may include an orientation of "lower" and "upper", depending on the particular orientation of the drawings. Similarly, if the device in one of the figures is turned over, elements described as "below" or "beneath" other elements would then be oriented "above" the other elements. Thus, the exemplary terms "below" or "under" can encompass both an orientation of above and below.

As used herein, "substantially" or other similar terms include the stated value and the average value within an acceptable deviation of the particular value as determined by one of ordinary skill in the art, taking into account the measurement in question and the error associated with the measurement. A specific quantity (that is, the limit of the measurement system). For example, "substantially" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be construed as having meanings consistent with their meanings in the context of the related art and the present invention, and are not to be construed as idealized or excessive Formal meaning, unless expressly defined as such herein.

Exemplary embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments. Thus, variations in the shapes of the illustrations as a result of, for example, manufacturing techniques and/or tolerances, are to be expected. Accordingly, the embodiments described herein should not be construed as limited to the particular shapes of regions as shown herein, but rather include deviations in shapes resulting from, for example, manufacturing. For example, regions illustrated or described as flat may typically have rough and/or nonlinear features. Additionally, the acute angles shown may be rounded. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the claims.

1 to 4 are schematic partial cross-sectional views of a biometric sensing device according to an embodiment of the present invention. FIG. 5 is a schematic partial top view of a biometric sensing device according to an embodiment of the present invention. FIG. 2 may be an enlarged view corresponding to the region R1 in FIG. 1 . FIG. 3 may be an enlarged view corresponding to the region R2 in FIG. 1 . FIG. 4 may be a partial cross-sectional schematic diagram of a light shielding layer in the biometric sensing device 100 . In addition, for the sake of clarity, some of the film layers or components may be omitted from the drawings in FIGS. 1 to 5 . For example, FIG. 5 only schematically illustrates the substrate 190 , the top-view position corresponding to the first hole 117 , the rough corresponding top-view position of the outer contour of the light sensing element 170 , and the outer contour of the active element 188 . The outline corresponds to the upward-looking position and the upward-looking position corresponding to the preset position 917 .

The biometric sensing device 100 includes a substrate 190 , at least one light sensing element 170 , a first dielectric layer 151 , a first light shielding layer 110 , a second medium layer 152 and a second light shielding layer 120 . The light sensing element 170 is disposed on the substrate surface 190 a of the substrate 190 . The first dielectric layer 151 is disposed on the substrate surface 190 a of the substrate 190 and on the light sensing element 170 . The first light shielding layer 110 is disposed on the first dielectric layer 151 . The second dielectric layer 152 is disposed on the first light shielding layer 110 . The second light shielding layer 120 is disposed on the second dielectric layer 152 .

In this embodiment, the biometric sensing device 100 may further include a first protective layer 161 or a second protective layer 162, but the present invention is not limited thereto. The first protective layer 161 may be sandwiched between the first dielectric layer 151 and the first light shielding layer 110 . The second protective layer 162 may be sandwiched between the second dielectric layer 152 and the second light shielding layer 120 .

In this embodiment, the biometric sensing device 100 can be adapted to sense light L by at least the light sensing element 170 . In one embodiment, the biometric sensing device 100 may be adapted to sense light reflected by biometrics (eg, fingerprints, but not limited to), but the invention is not limited thereto.

In FIG. 1 , only one light sensing element 170 is exemplarily shown, but the present invention is not limited thereto. In other not-shown embodiments, or, the biometric sensing device 100 may have other photo-sensing elements that are the same or similar to the photo-sensing element 170 in areas not shown in FIG. 1 .

In one embodiment, the light sensing element 170 may be composed of a plurality of stacked film layers (eg, corresponding electrode layers and corresponding photosensitive layers), but the invention is not limited thereto. The aforementioned photosensitive layer is, for example, a silicon-rich oxide (SRO) layer, but the present invention is not limited thereto. In a possible embodiment, the light sensing element 170 may comprise a modular light sensing element.

The first light shielding layer 110 has a plurality of first holes 117 . At least one of the first holes 117 corresponds to the light sensing element 170 .

The first hole 117 corresponding to the light sensing element 170 has a first aperture W1. The first hole 117 corresponding to the light sensing element 170 has a first center line C1 perpendicular to the substrate surface 190 a of the substrate 190 .

In this embodiment, the first light shielding layer 110 has two opposite surfaces, one of the two opposite surfaces is closer to the light sensing element 170 , and the other one of the two opposite surfaces is farther away from the light sensing element 170 . . For example, the first light shielding layer 110 has a first upper surface 110a and a first lower surface 110b opposite to each other. Compared with the first upper surface 110a , the first lower surface 110b is closer to the light sensing element 170 . Compared with the first lower surface 110b, the first upper surface 110a is farther away from the light sensing element 170. There is a first height D1 between the first upper surface 110a and the light sensing element 170 . The ratio of the first height D1 to the first aperture W1 is greater than 0 and less than 15. That is, the first height D1 (represented by D1 in the relational expression described later) and the first aperture W1 (represented by W1 in the relational expression described later) have the following relational expression: 0 < D1/W1 <15.

In this embodiment, the first light shielding layer 110 may further have a first side 110c connecting the first upper surface 110a and the first lower surface 110b. At least one of the first upper surface 110a and the first lower surface 110b and the first side edge 110c may form a first node P1.

In this embodiment, for the first light shielding layer 110 , the first node P1 may be the most edge corresponding to the incident light L. That is to say, for the first light shielding layer 110 , the first aperture W1 of the first hole 117 may be mainly determined in a range with a larger amount of limited light.

In this embodiment, in a cross-sectional view, the diameter of the first hole 117 on the first upper surface 110a may be substantially the same as the diameter of the first hole 117 on the first lower surface 110b. That is, in a cross-sectional view, the shape of the first hole 117 may be the same or similar to a rectangle. Here, the first aperture W1 of the first hole 117 may be mainly the aperture on the first upper surface 110a or the aperture on the first lower surface 110b. However, the present invention does not exclude other possibilities described later.

In a not-shown embodiment, in a cross-sectional view, the diameter of the first hole 117 on the first upper surface 110a may be smaller than the diameter of the first hole 117 on the first lower surface 110b. That is to say, in a cross-sectional view, the shape of the first hole 117 may be the same or similar to a regular trapezoid. Here, the first aperture W1 of the first hole 117 is basically the aperture on the first upper surface 110a. That is, the first upper surface 110a and the first side edge 110c can basically form the first node P1.

In a not-shown embodiment, in a cross-sectional view, the diameter of the first hole 117 on the first upper surface 110a may be larger than the diameter of the first hole 117 on the first lower surface 110b. That is to say, in a cross-sectional view, the shape of the first hole 117 may be the same or similar to an inverted trapezoid. The first hole 117 corresponding to the light sensing element 170 has an offset distance S1. The offset distance S1 may be the vertical projection of the center of the first hole 117 on the substrate surface 190 a of the substrate 190 (eg, corresponding to the first center line C1 ) and the vertical projection of the preset position of the first hole 117 on the substrate surface of the substrate 190 The distance between the centers on 190a (eg, corresponding to the second center line C2).

Referring to FIG. 1 to FIG. 3 , for example, the first holes 117 in the region R1 may have an offset distance S1 , and the first holes 117 in the region R2 may be located at their preset positions. That is, within the region R1, the first center line C1 of the offset first hole 117 does not overlap with the second center line C2 of the second hole 127 corresponding thereto. In the region R2, the first center line C1 of the first hole 117 at the preset position substantially overlaps with the second center line C2 of the second hole 127 corresponding thereto.

There is a maximum included angle α between the light rays passing through the first hole 117 with the offset distance S1 to the light sensing element 170 and the first center line C1 . Offset distance S1 (represented by S1 in the relational expression described later), first aperture W1 (represented by W1 in the relational expression described later), first height D1 (represented by D1 in the relational expression described later), and maximum included angle (represented by the relational expression described later) The relational expression is represented by α) has the following relational expression: 0<S1<(W1+2*D1*|tan(α)|). The aforementioned relational expression can also be expressed as: 0< S1 < (W1+2*D1*abs(tan(α))), where abs is a representation of the absolute value function.

In this embodiment, the maximum included angle α may be greater than 0° and less than or equal to 60°, but the present invention is not limited thereto.

In this embodiment, the biometric sensing device 100 may further include a third dielectric layer 153 , a fourth dielectric layer 154 and a third light shielding layer 130 . The third dielectric layer 153 and the fourth dielectric layer 154 are disposed on the first light shielding layer 110 . The third light shielding layer 130 is disposed on the third dielectric layer 153 and the fourth dielectric layer 154 .

In this embodiment, the second light shielding layer 120 can be sandwiched between the two dielectric layers 152 and the third dielectric layer 153; and/or, the second light shielding layer 120 can be sandwiched between the two dielectric layers 152 and the fourth dielectric layer 154, but the present invention is not limited to this.

The third light shielding layer 130 has a plurality of third holes 137 . At least one of the third holes 137 corresponds to the aforementioned first hole 117 corresponding to the light sensing element 170 . The third hole 137 corresponding to the aforementioned first hole 117 corresponding to the light sensing element 170 has a third aperture W3.

In this embodiment, the third light shielding layer 130 has two opposite surfaces, one of the two opposite surfaces is closer to the light sensing element 170 , and the other one of the two opposite surfaces is farther away from the light sensing element 170 . For example, the third light shielding layer 130 has a third upper surface 130a and a third lower surface 130b opposite to each other. Compared with the third upper surface 130a, the third lower surface 130b is closer to the light sensing element 170. Compared with the third lower surface 130b, the third upper surface 130a is farther away from the light sensing element 170. There is a third height D3 between the third upper surface 130a and the light sensing element 170 . The ratio of the third height D3 to the third aperture W3 is greater than 0 and less than 15. That is, the third height D3 (represented by D3 in the relational expression described later) and the third aperture W3 (represented by W3 in the relational expression described later) have the following relationship: 0<D3/W3<15.

In this embodiment, the third light shielding layer 130 may further have a third side edge 130c connecting the third upper surface 130a and the third lower surface 130b. At least one of the third upper surface 130a and the third lower surface 130b and the third side edge 130c may form a third node P3. In this embodiment, for the third light shielding layer 130, the third node P3 may be the edge corresponding to the incident light beam. That is to say, for the third light shielding layer 130 , the third aperture W3 of the third hole 137 may be mainly determined by the one with more light-limiting amount.

In this embodiment, in a cross-sectional view, the diameter of the third hole 137 on the third upper surface 130a may be smaller than the diameter of the third hole 137 on the third lower surface 130b. That is to say, in a cross-sectional view, the shape of the third hole 137 may be the same or similar to a regular trapezoid. Here, the third aperture W3 of the third hole 137 is basically the aperture on the third upper surface 130a. That is, the third upper surface 130a and the third side edge 130c can basically form the third node P3. However, the present invention does not exclude other possibilities described later.

In a not-shown embodiment, in a cross-sectional view, the diameter of the third hole 137 on the third upper surface 130a may be larger than the diameter of the third hole 137 on the third lower surface 130b. That is to say, in a cross-sectional view, the shape of the third hole 137 may be the same or similar to an inverted trapezoid. Here, the third aperture W3 of the third hole 137 is basically the aperture on the third lower surface 130b.

In a not-shown embodiment, in a cross-sectional view, the diameter of the third hole 137 on the third upper surface 130a may be substantially the same as the diameter of the third hole 137 on the third lower surface 130b. That is, in a cross-sectional view, the shape of the third hole 137 may be the same or similar to a rectangle. Here, the third aperture W3 of the third hole 137 may be mainly the aperture on the third upper surface 130a or the aperture on the third lower surface 130b.

In this embodiment, at least one of the first light shielding layer 110 , the second light shielding layer 120 and the third light shielding layer 130 includes a low reflection layer 810 and a light shielding conductive layer 820 . The reflectivity of the low reflection layer 810 may be substantially less than 10%, or further less than or equal to 5%. The low reflection layer 810 may include metal oxide, metal oxynitride, or a stack of the above materials, or a stack of conductive materials and the above. The aforementioned conductive materials preferably include copper (Cu), aluminum (Al), molybdenum (Mo), titanium (Ti), silver (Ag), niobium (Nb), other suitable metal elements, alloys containing the above-mentioned elements or Co-metal compounds (eg: molybdenum tantalum (MoTa), molybdenum niobium (MoNb), or molybdenum titanium (MoTi)). The light-shielding conductive layer 820 may be a single-layer or stacked structure of the aforementioned conductive materials. The aforementioned low reflection layer 810 may include the aforementioned metal oxides or metal oxynitrides (eg, molybdenum oxide (MoO _x ), molybdenum tantalum oxide (MoTaO _x ), molybdenum niobium oxide (MoNbO _x ), molybdenum oxynitride (MoO _x N _y ), molybdenum tantalum oxynitride (MoTaO _x N _y ), molybdenum niobium oxynitride (MoNbO _x N _y )) or a combination or stack of the above, but the present invention is not limited thereto. In addition, x or y in the aforementioned chemical formulas may be the manners used to represent numerical values in general chemical formulas, and x or y is not limited to be a natural number or the same or fixed numerical value. In addition, in the aforementioned alloy or co-metal compound, the ratio of each metal element is not limited.

In this embodiment, the biometric sensing device 100 further includes a plurality of lenses 187 . These lenses 187 are provided on the substrate 190 . At least one of the lenses 187 corresponds to at least one of the plurality of third holes 137 .

In this embodiment, one lens 187 may correspond to one first hole 117 , one second hole 127 and/or one third hole 137 , but the invention is not limited thereto. In a not-shown embodiment, a lens (eg, a lens similar to the lens 187 ) may correspond to the plurality of first holes 117 , the plurality of second holes 127 and/or the plurality of third holes 137 .

In this embodiment, the center line of the lens 187 (eg, the line corresponding to the thickest part of the lens 187 ) may correspond to the center line of a hole (eg, the center line C1 of a first hole 117 and/or a second hole) 127 centerline C2).

In this embodiment, there is a distance S2 between the centers of the two adjacent third holes 137, and there is a gap G between the two adjacent lenses 187 embedded in the third holes 137, wherein the distance S2 (described later) The relational expression of , represented by S2), the interval G (represented by G in the relational expression described later) and the third aperture W3 (represented by W3 in the relational expression described later), have the following relational expression: (S2-W3)≦G.

In this embodiment, a plurality of lenses 187 may correspond to one light sensing element 170, but the present invention is not limited thereto. In a not-shown embodiment, one lens (eg, a lens similar to the lens 187 ) may correspond to one light sensing element 170 .

In this embodiment, the lens corresponding to the third hole 137 is disposed on at least one of the plurality of second holes 137 in the third light shielding layer 130 , and the upper surface 187 a of the lens 187 and the third light shielding layer 130 There is a contact angle θ between the proximity and the third upper surface 130 a of the third light shielding layer 130 . The contact angle θ is greater than or equal to 30° and less than or equal to 75°.

In this embodiment, the biometric sensing device 100 further includes an IR-cut layer 140 . In one embodiment, the infrared filter layer 140 may be a single film layer or a stack of multiple film layers. The infrared filter layer 140 is disposed on the light sensing element 170 and the substrate 190 .

In this embodiment, the biometric sensing device 100 may further include a third protective layer 163 or a fourth protective layer 163, but the present invention is not limited thereto. The third protective layer 163 may be sandwiched between the third dielectric layer 153 and the infrared filter layer 140 . The fourth protective layer 164 may be sandwiched between the third light shielding layer 130 and the fourth dielectric layer 154 .

Referring to FIG. 5 , in this embodiment, the substrate 190 has at least one unit SU. The unit SU may include a light sensing element 170 . When at least one of the first holes 117 is moved or shifted from a preset position 917 to another position, the shifted or shifted first holes 117 may be located at the edge of the unit SU.

In addition, in FIG. 5 (or; corresponding to FIG. 1 ), the moving direction or the offset direction of the first hole 117 is only shown by way of example, and is not limited to the present invention.

In addition, the present invention does not limit the corresponding number of light sensing elements 170 and/or the corresponding number of lenses 187 in a unit SU. In one embodiment, if a unit SU has multiple light sensing elements 170 , two of the aforementioned multiple light sensing elements 170 may be connected in series or in parallel. In addition, the configuration of the light sensing element 170 can also be adjusted according to the sensing requirements. For example, the light sensing element 170 can be divided into different regions.

In one embodiment, the first hole 117 that is farther from the edge of the unit SU may have less movement or offset; or, may not move or offset.

In one embodiment, the aforementioned unit SU may be referred to as a sensor unit. For example, the aforementioned unit SU may include a corresponding light sensing element 170 , a hole corresponding to the light sensing element 170 (eg, at least one first hole 117 in the first light shielding layer 110 ) and/or electrical connections The active element 188 of the light sensing element 170 .

In this embodiment, the first hole 117 that is moved or shifted has an offset distance S1.

In one embodiment, when the aforementioned first hole 117 moves or shifts from a preset position 917 to another position, the offset distance S1 may be the vertical projection of the center line of the preset position 917 on the substrate 190 The distance from where the first center line C1 of the moved or offset first hole 117 is perpendicularly projected on the substrate 190 .

In one embodiment, when the aforementioned first hole 117 moves or shifts from one preset position 917 to another, the shift distance S1 may be the distance of the first hole 117 that is moved or shifted perpendicular to the substrate 190 . The projection of the first centerline C1 of the substrate surface 190a on the substrate surface 190a and the second centerline C2 of the second hole 127 corresponding to the aforementioned first hole 117 perpendicular to the substrate surface 190a of the substrate 190 on the substrate surface 190a the distance between the projections. That is, the first center line C1 and the second center line C2 may not overlap.

To sum up, in the biometric sensing device of the present invention, the height of the light-shielding layer, the aperture of the hole in the light-shielding layer, the offset distance of the aperture of the hole in the light-shielding layer, and the corresponding angle have at least the above relationship. (represented by the above relationship). In this way, the biometric sensing device can have good optical and/or corresponding identification performance.

100: Biometric Sensing Device 190: Substrate 190a: Substrate Surface 170: Light sensing element 151: first dielectric layer 110: The first shading layer 117: The first hole C1: First centerline W1: first aperture 110a: first upper surface 110b: First lower surface 110c: First side 152: Second dielectric layer 120: Second shading layer 127: The second hole C2: Second centerline W2: Second aperture 120a: Second upper surface 120b: Second lower surface 120c: Second side 130: The third shading layer 137: The third hole W3: Third aperture 130a: Third upper surface 130b: Third lower surface 140: Infrared filter layer 153: The third dielectric layer 154: Fourth dielectric layer 161: The first protective layer 162: Second protective layer 163: The third protective layer 164: Fourth protective layer 187: Lens 188: Active Components 810: light-shielding conductive layer 820: low reflection layer 917: Preset α: Maximum included angle θ: contact angle D1: first height D2: The second height D3: The third height G: Interval L: light P1: the first node P2: The second node P3: The second node R1, R2: area S1: offset distance S2: Spacing SU: unit

FIG. 1 is a partial cross-sectional schematic diagram of a biometric sensing device according to an embodiment of the present invention. FIG. 2 is a schematic partial cross-sectional view of a biometric sensing device according to an embodiment of the present invention. 3 is a partial cross-sectional schematic diagram of a biometric sensing device according to an embodiment of the present invention. 4 is a partial cross-sectional schematic diagram of a biometric sensing device according to an embodiment of the present invention. FIG. 5 is a schematic partial top view of a biometric sensing device according to an embodiment of the present invention.

100: Biometric Sensing Device

190: Substrate

190a: Substrate Surface

170: Light sensing element

151: first dielectric layer

161: The first protective layer

110: The first shading layer

110a: first upper surface

110b: First lower surface

117: The first hole

C1: First centerline

152: Second dielectric layer

162: Second protective layer

120: Second shading layer

120a: Second upper surface

120b: Second lower surface

127: The second hole

C2: Second centerline

153: The third dielectric layer

163: The third protective layer

140: Infrared filter layer

154: Fourth dielectric layer

164: Fourth protective layer

130: The third shading layer

130a: Third upper surface

130b: Third lower surface

137: The third hole

187: Lens

G: Interval

R1, R2: area

S1: offset distance

S2: Spacing

Claims (12)

A biometric sensing device suitable for sensing a light, the biometric sensing device comprising: at least one light sensing element disposed on a substrate; a first dielectric layer disposed on the substrate and the at least one light on the sensing element; a first light shielding layer disposed on the first dielectric layer, the first light shielding layer including a plurality of first holes, wherein at least one of the first holes corresponds to the at least one light sensing element , and at least one of the first holes has a first center line perpendicular to the substrate, wherein the first light shielding layer has two opposite surfaces, one of the two opposite surfaces is closer to the at least one light sensor an element, the other one of the two opposite surfaces of the first light shielding layer farther from the at least one light sensing element and the at least one light sensing element has a first height, and at least one of the first holes has a first aperture, and the ratio of the first height to the first aperture is greater than 0 and less than 15; a second medium layer is arranged on the first light shielding layer; and a second light shielding layer is arranged on the first light shielding layer On the two dielectric layers, the second light shielding layer includes a plurality of second holes, wherein at least one of the second holes corresponds to at least one of the first holes, wherein at least one of the second holes corresponds to the at least one of the first holes A light sensing element, wherein the second light shielding layer has two opposite surfaces, the two opposite surfaces One of them is closer to the at least one light sensing element, and the other one of the two opposite surfaces of the second light shielding layer that is farther from the at least one light sensing element has a first space between the at least one light sensing element and the at least one light sensing element. Two heights, at least one of the second holes has a second hole diameter, and the ratio of the second height to the second hole diameter is greater than 0 and less than 15; wherein at least one of the first holes has an offset distance, There is a maximum angle between the light passing through at least one of the first holes to the at least one light sensing element and the first center line, the offset distance is S1, the first aperture is W1, the first The height is D1, the maximum angle is α, and the offset distance, the first aperture, the first height and the maximum angle have the following relationship: 0<S1<[W1+(2*(D1*|tan(α) |))]. A biometric sensing device, comprising: at least one light sensing element disposed on a substrate; a first dielectric layer disposed on the substrate and the at least one light sensing element; a first light shielding layer disposed on On the first dielectric layer, the first light shielding layer includes a plurality of first holes, wherein at least one of the first holes corresponds to the at least one light sensing element, and at least one of the first holes has a perpendicular The first center line of the substrate, the first light shielding layer has two opposite surfaces and a first side, the first side is connected to the two opposite surfaces, the first side is connected to one of the two opposite surfaces one of the two opposite surfaces of the first light-shielding layer is closer to the at least one light-sensing element and farther away from the first light-shielding layer of the at least one light-sensing element There is a first height between the other one of the two opposite surfaces and the at least one light sensing element, at least one of the first holes has a first aperture, and the first height is the difference between the first aperture and the first aperture. The ratio is greater than 0 and less than 15; a second medium layer is disposed on the first light-shielding layer; and a second light-shielding layer is disposed on the second medium layer, and the second light-shielding layer includes a plurality of second holes, wherein at least one of the second holes corresponds to at least one of the first holes, and the second light shielding layer has two opposite surfaces and a second side, the second side is connected to the two opposite surfaces, The second side connects one of the two opposite surfaces to form a second node, wherein one of the two opposite surfaces of the second light shielding layer is closer to the at least one light sensing element and farther away from the at least one light sensing element There is a second height between the other one of the two opposite surfaces of the second light shielding layer of a light sensing element and the at least one light sensing element, and at least one of the second holes has a second aperture, And the ratio of the second height to the second aperture is greater than 0 and less than 15, wherein at least one of the first holes has an offset distance, and the connection line between the first node and the second node and the first There is a maximum included angle between a center line, the offset distance is S1, the first aperture is W1, the first height is D1, the maximum included angle is α, and the offset distance, the first aperture, the first aperture A height and the maximum included angle α have the following relationship: 0<S1<[W1+(2*(D1*|tan(α)|))]. The biometric sensing device according to claim 1 or 2, wherein the maximum included angle α is greater than 0° and less than or equal to 60°. The biometric sensing device according to claim 1 or 2, wherein there is a distance between the centers of two adjacent second holes, and a distance is formed between two adjacent second holes, The spacing is S2, the spacing is G, the second aperture is W2, and the spacing, the spacing and the second aperture have the following relationship: (S2-W2)≦G. The biometric sensing device according to claim 1 or 2, further comprising: a plurality of lenses disposed on the substrate, and at least one of the lenses corresponds to at least one of the second holes. The biometric sensing device according to claim 5, wherein at least one of the lenses is disposed on at least one of the second holes of the second light shielding layer, and the upper surface of the at least one of the lenses is different from the upper surface of the lens. The other one of the two opposite surfaces of the second light shielding layer away from the at least one light sensing element is sandwiched with a contact angle, and the contact angle is greater than or equal to 30° and less than or equal to 75°. The biometric sensing device according to claim 1 or 2, further comprising: an infrared filter layer disposed on the at least one light sensing element and the substrate. The biometric sensing device according to claim 1 or 2, further comprising: a third medium layer disposed on the first light shielding layer; a third light shielding layer disposed on the third medium layer, and the The third light shielding layer is sandwiched between the two dielectric layers and the third medium layer, and the third light shielding layer includes a plurality of third holes, Wherein at least one of the third holes corresponds to at least one of the first holes, the third light shielding layer has two opposite surfaces, one of the two opposite surfaces is closer to the at least one light sensing element, There is a third height between the other of the two opposite surfaces of the third light shielding layer away from the at least one light sensing element and the at least one light sensing element, and at least one of the third holes has a first Three apertures, and the ratio of the third height to the third aperture is greater than 0 and less than 15. The biometric sensing device according to claim 8, wherein at least one of the first light shielding layer, the second light shielding layer and the third light shielding layer comprises: a light shielding conductive layer and a low reflection layer, and the The low-reflection layer includes oxide of conductive material, oxynitride of conductive material, or a combination thereof. The biometric sensing device according to claim 1 or 2, wherein the substrate has at least one unit, and when at least one of the first holes moves from a preset position to another position, the first holes At least one of the holes is located at the edge of the at least one unit, and the unit includes the at least one light sensing element. The biometric sensing device of claim 1 or 2, wherein at least one of the first holes has the offset distance, and the offset distance is when at least one of the first holes is positioned from a preset When moving to another position, there is a distance between the first center line of the preset position projected vertically on the substrate and the first center line of the other position. The biometric sensing device of claim 1 or 2, wherein at least one of the second holes has a second centerline perpendicular to the substrate, and at least one of the first holes has the offset distance , the offset distance is when these When at least one of the first holes is offset, the distance between the first centerline perpendicularly projected on the substrate and a second centerline of at least one of the second holes, and the first centerline and the The second centerlines do not coincide.

Images