TWI761651B - Optical inspection system and method with high information - Google Patents

Abstract

The present invention provides an optical detection system and method with height information. The method includes: activating light source devices of different colors to illuminate a calibration sheet carried on a platform, and shooting a calibration image from the calibration sheet; recording the color of the calibration image distribution; activate light source devices of different colors to illuminate an object to be detected carried by the platform, and shoot a detection image from the object to be detected; calculate the color distribution of the detected image; compare the color distribution of the corrected image and the detected image , if at least a part of the color distribution of the two is inconsistent, record the defect that the object to be inspected has height information; and convert the part of the inspection image that is consistent with the color distribution of the calibration image into a preset color, and store The converted inspection image is used for subsequent re-inspection of the object to be inspected for defects.

Description

Optical inspection system and method with high information

The present invention relates to an optical detection system and method, in particular, the present invention relates to an optical detection system and method for illuminating an object to be detected by light source devices of different colors to obtain height information.

Please refer to the first figure and the second figure at the same time, which show a system structure diagram and a system block diagram of a conventional optical detection system, respectively. The conventional optical inspection system includes: an image capturing system and a light source device. The image capturing system defines a capturing optical axis 18 from a to-be-detected object 1 carried by a platform 2 to capture a detection image, wherein the to-be-detected image is captured by the image capturing system. The object 1 takes a circuit board as an example, and a plurality of parts or their wirings can be distributed on the surface thereof. The image capturing system includes: a camera 11 with a lens 12, the camera 11 defines the shooting optical axis 18; and a polarizer 13 , which is arranged on the photographing optical axis 18 of the camera 11 to filter out stray light sources. The light source device illuminates the inspection surface of the object to be inspected 1, so that the flaws and defects of the object to be inspected 1 can appear in the inspection image. The light source device includes: a beam splitter 14, which is arranged on the photographing optical axis 18 of the camera 1; a positive light source 15, which is matched with the beam splitter 14 to provide the positive light source of the object to be detected 1 for the camera 11 to take pictures; and, A left light source 17 and a right light source 16 provide auxiliary light for photographing the object 1 to be inspected. The conventional optical inspection system uses the inspection image to determine whether the object to be inspected 1 is an OK part (indicating that there is no defect) or a NG part (indicating that there is a defect), so that the subsequent operators can illuminate the defect with white light in the defect review process. The condition of NG pieces for human eye recognition of defects.

In the conventional optical detection system, the height difference of the object to be detected 1 cannot be obtained by the general optical system, and equipment that can measure the height difference is often used to detect the degree of change in height, which increases the knowledge of the conventional optical system. Cost of optical inspection systems.

The height detection method of the object to be detected 1 can be measured with different optical systems. A common method is to illuminate the object to be detected 1 with light sources of different colors, and the detection images show different color reflections to generate height difference information. But also because of this, the obtained detection image is not the response of white light irradiation seen by real human eyes. Although the image obtained by direct non-white light irradiation can show a high degree of change, the image is not conducive to subsequent human eye recognition. Defect review procedure for white light exposure.

According to the prior art, although the height variation difference of the object to be detected 1 can be obtained, because the light source device uses non-white light color, the overall appearance of the detected image will be different from the actual white light irradiation result. However, if the light source device only uses white light, the height difference change of the object to be detected 1 cannot be seen, and the same color light source is used to illuminate the item numbers with different heights, and the phenomenon of shadows on the item numbers may be seen, but this phenomenon is Due to the difference in height, it is also caused by the original black dirt, which cannot be recognized by the prior art. Therefore, according to the height detection of the prior art, the absence of height information on the object to be inspected 1 indicates a defect, and the subsequent defect review process may repeat inspections due to the original parts or IC of the object to be inspected 1 generating height information in the inspection image.

In view of the problems and application requirements of the prior art, one of the objectives of the present invention is to provide an optical detection system and method for obtaining height information by using a multi-angle multi-color symmetrical light source.

One of the objects of the present invention is to provide a multi-angle multi-color light The source is an optical inspection system and method that converts flawless height information in the inspection image into a preset color, so that subsequent operators can perform defect review procedures on NG parts supplemented by a light source based on the converted inspection image.

In order to achieve one of the above-mentioned objects of the present invention, the present invention provides an optical detection system with high-level information, comprising: a platform for carrying an object to be detected; an image capturing system for defining a photographing light on the object to be detected an axis to capture a detection image; and a light source device including a plurality of light sources of different colors, and the light sources of different colors illuminate the object to be detected; wherein, the light sources of different colors are at least divided into two groups of light sources, which are respectively arranged On both sides of the photographing optical axis, the detection image is provided with height information of the object to be detected by the configuration of the group of light sources.

Wherein, the platform is used to carry a calibration sheet, and the light sources of different colors illuminate the calibration sheet, so that the image capturing system shoots a calibration image on the calibration sheet, and the calibration image is used to determine a calibration parameter.

Wherein, the calibration parameter is used for correcting the color of the region with flawless height information in the inspection image to white, and the color distribution of the inspection image includes the part inconsistent with the color distribution of the calibration image and white.

In order to achieve one of the above objects of the present invention, the present invention provides an optical detection method with height information, comprising: activating light source devices of different colors to illuminate a calibration sheet carried on a platform, and shooting a calibration image from the calibration sheet; Record the color distribution of the corrected image; activate light source devices of different colors to illuminate an object to be inspected carried by the platform, and shoot a detected image from the object to be inspected; calculate the color distribution of the detected image; compare the corrected image with The color distribution of the detected image, if at least a part of the color distribution of the two is inconsistent, record the to-be-detected The test object has defects of height information; and the part of the inspection image that is consistent with the color distribution of the calibration image is converted into a preset color, and the converted inspection image is stored for subsequent re-inspection of the defects of the object to be inspected.

The present invention further comprises: setting parameters of at least one detection area; comparing the color distribution of the calibration image and the detection image according to the parameters of the detection area; recording a calibration parameter of the calibration image according to the parameters of the detection area; And, according to the parameter of the detection area and the calibration parameter, the part of the detection image that is consistent with the color distribution of the calibration image is converted into the preset color.

The present invention further comprises: setting a color difference threshold; and if the color difference of the color distribution of the correction image and the detection image exceeds the color difference threshold, determining that the color distributions of the two are at least partially inconsistent.

Wherein, the color distribution of the calibration image includes full plane information or height information of parts, and the color distribution of the converted inspection image includes the part inconsistent with the color distribution of the calibration image, and the preset color, and the preset color distribution The color is preferably white, so as to facilitate the defect review process and white light to inspect the object to be inspected.

According to the optical detection system and method with height information implemented in the present invention, after detecting the image to obtain the color distribution of the height difference, the flawless height information is converted into white light, and the color distribution inconsistent with the corrected image is retained for subsequent operations. Personnel supplemented by white light to carry out the defect review process can easily confirm whether the height information is a defect.

1‧‧‧Object to be tested

2‧‧‧Mobile Platform

11‧‧‧Camera

12‧‧‧Lens

13‧‧‧Polarizer

14‧‧‧Beamsplitter

15‧‧‧Positive light source

16‧‧‧Light source on the right

17‧‧‧Left light source

18‧‧‧Shooting optical axis

21‧‧‧R light source on the left

22‧‧‧R light source on the right

31‧‧‧Left G light source

32‧‧‧Right G light source

41‧‧‧Left B light source

42‧‧‧B light source on the right

100‧‧‧Detection and correction method

200‧‧‧Optical detection methods

101~107‧‧‧Steps

201~214‧‧‧Steps

A, B, B’‧‧‧ area

The first figure is a system architecture diagram of a conventional optical detection system.

The second figure is a system block diagram of a conventional optical detection system.

Figure 3 A is a system architecture diagram of the first embodiment of the optical detection system of the present invention.

Figure 3 B is a system architecture diagram of the second embodiment of the optical detection system of the present invention.

The third diagram C is a system architecture diagram of the third embodiment of the optical detection system of the present invention.

Figure 3 D is a system architecture diagram of the fourth embodiment of the optical detection system of the present invention.

The fourth figure is the calibration flow chart of the optical detection system of the present invention.

The fifth figure is the detection flow chart of the optical detection system of the present invention.

FIG. 6A is a schematic diagram of a calibration image of the system of the present invention using a multi-angle and multi-color symmetrical light source.

FIG. 6B is a schematic diagram of a detection image of the system of the present invention using symmetrical light sources with multiple angles and colors.

The sixth figure C is a schematic diagram of the detection image in which the system of the present invention converts the flawless height information in the detection image into white.

First, please refer to FIG. 3 A, which shows a system structure diagram of the first embodiment of the optical detection system of the present invention. In the first embodiment, the optical detection system of the present invention includes a platform 2 ; an image capturing system and a light source device, wherein the platform 2 is used to carry an object to be detected 1 or a calibration sheet, and the calibration sheet can be regarded as without Object to be inspected for defective condition 1. The image capturing system of the present invention includes: a camera 11 with a lens 12, the camera 11 defines a capturing optical axis 18 from the object to be inspected 1 carried by the platform 2 to capture a detected image; and a polarizer 13, configured On the shooting optical axis 18 of the camera 11 to filter out stray light sources. The light source device is configured to illuminate the inspection surface of the object to be inspected 1 , so that flaws and defects of the object to be inspected 1 can appear in the inspection image captured by the camera 11 .

In this first embodiment, the light source device of the present invention includes: left group light sources (left R light source 21 , left G light source 31 and left B light source 41 ); and right group light sources (right R light source 22 , right G light source 32 ) and the right side B light source 42), wherein R, G, B represent red, green and blue, respectively. The light source device of the present invention uses two groups of symmetrical light sources with multiple angles and colors. The same number of light sources are arranged on both sides of the photographing optical axis 18 of the image photographing system, but the angle positions and colors may be different. Among them, a left group light source such as a left R light source 21, a left G light source 31 and a left B light source 41 is arranged on one side of the photographing optical axis 18 of the image photographing system, and the illumination angles of the left light sources 21, 31 and 41 of each color are respectively the same as those of the left light source. There are different angles between the photographing optical axis 18 or the detection surface of the object to be detected 1, for example, the angles of the light sources of each color differ from each other by 5 degrees; and the right R light source is symmetrically arranged on the other side of the photographing optical axis 18 of the image photographing system 22. Right group light sources such as the right G light source 32 and the right B light source 42, and the illumination angles of the right light sources 22, 32, and 42 of each color are symmetrical to the illumination angles of the left light sources 21, 31, and 41 of each color.

When the optical detection system of the present invention activates the light sources 21 , 22 , 31 , 32 , 41 , 42 of different colors configured in the first embodiment to jointly illuminate a calibration sheet carried by the platform 2 , the image capturing system can capture a calibration sheet from the calibration sheet. The calibration image, wherein the calibration sheet can be regarded as the object to be inspected 1 in a flawless state. Therefore, the optical inspection system of the present invention can obtain the color distribution of the flawless condition from the corrected image, and store and record it. Afterwards, when the optical detection system of the present invention activates the light sources 21, 22, 31, 32, 41, 42 of different colors configured in the first embodiment to jointly illuminate an object to be detected 1 carried by the platform 2, the image capture system can start from the The object to be detected 1 captures a detection image. The optical inspection system of the present invention calculates the color distribution of the inspection image, and compares the color distribution of the corrected image and the inspection image. If the color distributions of the two are at least partially inconsistent, record the height information of the object to be inspected 1. Defects are identified as NG pieces; if the color distribution of the two is the same, the pending inspection shall be recorded. Item 1 has no defects and is considered to be OK. The optical inspection system of the present invention converts the flawless height information into white light for the inspection image of the NG part, and retains the color distribution inconsistent with the corrected image, so that the subsequent operators can cover the defect of the NG part with white light according to the converted inspection image. The inspection procedure can easily confirm whether the height information is a defective condition.

Please refer to FIG. 3 B, which shows a system structure diagram of the second embodiment of the optical detection system of the present invention. In the second embodiment, the platform 2 and the image capturing system of the optical detection system of the present invention are the same as the platform 2 and the image capturing system of the first embodiment, but the light source device is different from the symmetry mode of the light source device of the first embodiment. In the second embodiment, the light source device of the present invention includes: left group light sources (left R light source 21 , left G light source 31 and left B light source 41 ); and right group light sources (right R light source 22 , right G light source 32 ) with the right B light source 42). The light source device of the present invention uses two groups of symmetrical light sources with multiple angles and colors. The same number of light sources are arranged on both sides of the photographing optical axis 18 of the image photographing system, but the angle positions and colors may be different. Among them, a left group light source such as a left R light source 21, a left G light source 31 and a left B light source 41 is arranged on one side of the photographing optical axis 18 of the image photographing system, and the illumination angles of the left light sources 21, 31 and 41 of each color are respectively the same as those of the left light source. The shooting optical axis 18 or the detection surface of the object to be detected 1 has different included angles; and the right R light source 22, the right G light source 32 and the right B light source are symmetrically arranged on the other side of the shooting optical axis 18 of the image shooting system 42 and other right group light sources, but the irradiation angles of the right light sources 22, 32, and 42 of each color are symmetrical to the irradiation angles of the left light sources 31, 21, and 41 of each color. In other words, the positions of the left R light source 21 and the left G light source 31 of the first embodiment and the second embodiment are reversed.

In the second embodiment, the optical inspection system of the present invention activates light sources of different colors to jointly illuminate a calibration sheet or an object to be inspected carried on the platform 2 to capture a calibration image or a detection image and compare the colors of the two Distribution to determine whether the object to be detected is an NG piece of work The method is the same as that of the optical detection system shown in the first embodiment.

Please refer to FIG. 3 C, which shows a system structure diagram of the third embodiment of the optical detection system of the present invention. In the third embodiment, the platform 2 and the image capturing system of the optical detection system of the present invention are the same as the platform 2 and the image capturing system of the first embodiment, but the light source device is different from the symmetrical manner of the light source device of the first embodiment. In the third embodiment, the light source device of the present invention includes: left group light sources (left R light source 21 and left G light source 31 ); and right group light sources (right R light source 22 and right G light source 32 ). The light source device of the present invention uses two groups of symmetrical light sources with multiple angles and colors. The same number of light sources are arranged on both sides of the photographing optical axis 18 of the image photographing system, but the angle positions and colors may be different. Among them, a left group light source such as a left R light source 21 and a left G light source 31 is arranged on one side of the photographing optical axis 18 of the image photographing system, and the illumination angles of the left light sources 21 and 31 of each color are respectively the same as the photographing optical axis 18 or the waiting light source. There are different angles between the detection surfaces of the detection object 1; and the right group light sources such as the right R light source 22 and the right G light source 32 are symmetrically arranged on the other side of the photographing optical axis 18 of the image capturing system, but the right light sources 22, The irradiation angles of 32 are symmetrical to the irradiation angles of the left light sources 21 and 31 of the respective colors. In other words, the difference between the third embodiment and the first embodiment is that the left B light source 41 and the right B light source 42 are not used.

In the third embodiment, the optical inspection system of the present invention activates light sources of different colors to jointly illuminate a calibration sheet or an object to be inspected carried on the platform 2 to capture a calibration image or a detection image and compare the colors of the two The operation method of determining whether the object to be detected is an NG piece by distribution is the same as that of the optical detection system shown in the first embodiment.

Please refer to FIG. 3 D, which shows a system structure diagram of the fourth embodiment of the optical detection system of the present invention. In the fourth embodiment, the platform 2 and the image capturing system of the optical detection system of the present invention are the same as the platform 2 and the image capturing system of the first embodiment, but the light source device is different from the first embodiment Example of the symmetry of the light source device. In the fourth embodiment, the light source device of the present invention includes: left group light sources (left R light source 21 and left G light source 31 ); and right group light sources (right G light source 32 and right B light source 42 ). The light source device of the present invention uses two groups of symmetrical light sources with multiple angles and colors. The same number of light sources are arranged on both sides of the photographing optical axis 18 of the image photographing system, but the angle positions and colors may be different. Among them, a left group light source such as a left R light source 21 and a left G light source 31 is arranged on one side of the photographing optical axis 18 of the image photographing system, and the illumination angles of the left light sources 21 and 31 of each color are respectively the same as the photographing optical axis 18 or the waiting light source. The detection surfaces of the detection object 1 have different included angles; and the right group light sources such as the right G light source 32 and the right B light source 42 are symmetrically arranged on the other side of the photographing optical axis 18 of the image capturing system, but the right light sources 32, The irradiation angles of 42 are symmetrical to the irradiation angles of the left light sources 31 and 21 of the respective colors. In other words, the difference between the fourth embodiment and the first embodiment is that the left B light source 41 and the right R light source 22 are not used, and the light source combinations of different colors are arranged on both sides of the photographing optical axis 18 .

In the fourth embodiment, the optical inspection system of the present invention activates light sources of different colors to jointly illuminate a calibration sheet or an object to be inspected carried on the platform 2 to capture a calibration image or a detection image and compare the colors of the two The operation method of determining whether the object to be detected is an NG piece by distribution is the same as that of the optical detection system shown in the first embodiment.

According to various embodiments of the present invention, the light source device is not limited to the arrangement of colors and the number of light sources. The key point is that different colors are arranged according to different angles. Compared with the third and fourth embodiments, the optical detection systems of the first and second embodiments of the present invention use a larger number of light sources, so the corrected images and the detected images obtained in the first and second embodiments have height information. The accuracy is higher than the calibration images and detection images obtained in the third and fourth embodiments. Compared with the first and third embodiments, the second embodiment of the present invention In combination with the optical inspection system of the fourth embodiment, light sources of different colors are arranged on both sides of the photographing optical axis 18, so the corrected images and inspection images obtained in the second and fourth embodiments can distinguish whether the left height is defective or the right Defects caused by height, because the colors of the light sources on the left and right sides are different, and more information about the warping position of the defect can be obtained. As shown in the third D picture, the warping on the left will reflect red light in the inspection image, and the warping on the right is in the inspection. The image reflects blue light.

Please refer to FIG. 4 , which shows the calibration flow chart of the optical detection system of the present invention. In the aforementioned embodiments of the present invention, before performing flaw detection on the object 1 to be detected, the optical inspection system of the present invention needs to execute the detection and calibration method 100 or the calibration process to obtain necessary calibration parameters. As shown in FIG. 4 , the detection and calibration method 100 or calibration process of the optical inspection system of the present invention includes the following steps: Step 101 : Place a calibration sheet on the platform 2 , wherein the calibration sheet can be a flawless object to be inspected, or A full-plane (meaning no height information) calibration sheet. Step 102 : Activate light source devices including different colors to illuminate the calibration sheet carried on the platform 2 . Step 103: The image capturing system of the present invention scans and captures the calibration sheet carried by the platform 2. If the area of the calibration sheet exceeds the imaging range of the camera 11, in a further embodiment of the present invention, the platform 2 is a mobile platform, It can move in a reciprocating direction, so that the image capturing system of the present invention scans and captures the entire area of the calibration sheet. Step 104: After performing step 103, the optical detection system of the present invention can obtain a corrected image. Step 105: The optical detection system of the present invention calculates the color distribution of the corrected image. Step 106: The optical detection system of the present invention converts the color of the flawless height information into a preset color, preferably white. In different embodiments, the present invention converts the color of the full plane to white, or converts the color of the normal height image and step 107 : the optical detection system of the present invention records calibration parameters, the calibration parameters include detection position coordinates, names, specifications, and color distribution parameters.

In different embodiments of the present invention, different positions of the calibration sheet may be different because different materials are illuminated by light sources of different colors. Therefore, even if the calibration sheet is flat without height information, the colors reflected by different color light sources may not be the same. Therefore, the present invention not only records the color distribution of the calibration image, but also calculates and records the color difference parameters between the color distribution and white. Generally speaking, the system of the present invention executes the calibration process shown in Fig. 4 in order to adjust the parameters before the equipment leaves the factory, so as to record the calibration parameters. In different embodiments of the present invention, if the height fluctuation of the object to be detected is relatively uniform, the calibration process can use a full-plane (indicating no height information) calibration sheet to record the calibration parameters for reference, and during the detection process, the fluctuation is uniform The degree of color matching can be defined by editing the detection parameters to adjust the sensitivity of color matching. If the fluctuation of the object to be detected has some characteristics that cannot be expressed by the flat calibration sheet, a piece of the object to be detected of an OK piece can be used as the calibration sheet to record the calibration parameters as a reference, so that the subsequent detection process can be edited by the frame selection of the detection parameters. Then, it is actually compared with the detection image of the object to be detected. The detection process of the optical detection system of the present invention is further described below.

Please refer to FIG. 5, which shows the detection flow chart of the optical detection system of the present invention. In the aforementioned embodiments of the present invention, the optical detection method 200 or the detection process of the optical detection system of the present invention includes the following steps: Step 201 : placing an object to be detected 1 on the platform 2 . Step 202 : Edit the detection parameters, edit and set the detection area of the object to be tested 1 to be subjected to defect detection, including: position coordinates, frame selection size definition, naming and specifications and other parameters. Step 203 : Activate light source devices including different colors to illuminate the object to be detected 1 carried by the platform 2 . This step 203 and step 102 of the calibration process use the same light source configuration and combination. Step 204: The image capturing system of the present invention scans and captures the object to be inspected 1 carried by the platform 2. If the area of the object to be inspected exceeds the imaging range of the camera 11, in a further embodiment of the present invention, the platform 2 is a The mobile platform can move in a reciprocating direction, so that the The inventive image capturing system scans and captures the entire area of the object to be detected. Step 205: After step 204 is executed, the optical detection system of the present invention can obtain a detection image.

Next, step 206: According to the detection parameters set in step 202, the optical detection system of the present invention calculates the color distribution of each detection area. Step 207: The optical detection system of the present invention compares whether the colors of the corresponding detection areas of the corrected image and the detection image are consistent. If the two colors of all the corresponding detection areas are the same, step 208 is executed. If there are two colors of any corresponding detection area If not, step 210 is executed. Step 208 : when the colors of all the corresponding detection areas of the compared and corrected images are consistent with the inspection images, the optical inspection system of the present invention determines that the object to be inspected is an OK piece, that is, the object to be inspected is flawless. Step 209 : the optical detection system of the present invention records the object to be detected as an OK piece, that is, the OK piece detection process of the object to be detected is completed. In a further embodiment of the present invention, when it is determined that the object to be inspected is an OK piece under the light source device shown in Figures 3A to 3D, the optical detection system of the present invention can further record the color of the OK piece that does not have a high degree of flaws Convert to the natural color of general white light or the monochromatic light required by the user.

Step 210 : When the color of any corresponding detection area of the compared and corrected image is inconsistent with the detection image, the optical detection system of the present invention determines that the object to be inspected is an NG piece, that is, the object to be inspected is defective. Step 211 : The optical detection system of the present invention brings in the correction parameters of the detection area from the calibration process according to the detection areas whose colors are inconsistent in comparison. Step 212: According to the calibration parameters brought into the detection area in step 211, the optical detection system of the present invention corrects the color distribution of the detection image in the detection area, and converts the detection image in the detection area to be consistent with the color distribution of the corrected image. The part is a preset color, preferably white, and retains the part of the detection image that is inconsistent with the color distribution of the calibration image in the detection area, and the inconsistent part indicates that the detection image exists in the detection area. Correct the height information for different images. Step 213: Save the converted inspection image, The color distribution of the converted detection image includes the part inconsistent with the color distribution of the corrected image, and the preset color. Step 214: The optical detection system of the present invention records that the object to be detected is an NG piece, that is, the NG piece detection process of the object to be detected is completed.

In order to reduce the amount of information calculation for defect detection, the detection process of the present invention edits and sets the detection area for defect detection of the object to be inspected 1 in step 202, so that steps 206 and 207 only calculate the color distribution and compare colors for the set detection area, This avoids that the information calculation amount of the subsequent comparison and correction image and the detection image is too large, which affects the time for the system of the present invention to determine the defect.

In the subsequent defect re-inspection procedure, the optical inspection system of the present invention determines that the object to be inspected of the NG piece is taken out and handed over to the operator to identify the defect with the human eye. The object to be inspected in the NG piece is irradiated with white light, and then the operator checks the inspection image stored in step 213 of the present invention. It is easy for the operator to review whether there is a defect in the part of the object to be inspected corresponding to the inconsistent color distribution of the inspection image under the illumination of white light.

Please refer to Figure 6A, Figure 6B, and Figure 6C, respectively showing a schematic diagram of a calibration image of the system of the present invention using a symmetrical light source with multiple angles and colors, and a schematic diagram of a detection image of the system of the present invention using a symmetrical light source of multiple angles and colors. The system of the present invention converts the flawless height information in the inspection image into a schematic diagram of a white inspection image. The corrected image shown in FIG. 6A is an image without highly flawed information obtained by illuminating a symmetrical light source with multiple angles and multiple colors in step 104 of the method of the present invention. The detection image shown in Figure 6B is the color distribution of a detection area calculated in step 206 of the method of the present invention, which includes the height information displayed by the illumination of the symmetrical light source with multi-angle and multi-color, as shown in area A. Therefore, in the comparison step of step 207 of the method of the present invention, the detection area shown in the sixth picture B will be different in the step A because the color of the area A is inconsistent with the color of the corrected image shown in the sixth picture A. 210 Determine the object to be detected as an NG piece, and after the correction parameters are brought in in step 211, the color distribution of the detection area is corrected in step 212, and the area B in the detection area that is consistent with the color of the corrected image is converted into a preset The color is preferably white, and the area A in the detection area that is inconsistent with the color of the corrected image is reserved. In step 213, the converted detection image is stored, and the color distribution of the converted detection image includes an area A that is inconsistent with the color distribution of the corrected image, and an area B' converted to white, as shown in FIG. 6C. Therefore, in the follow-up defect review procedure, when the operator identifies the defect status of the inspection area with the human eye, the operator illuminates the inspection area with white light supplemented by the object to be inspected, and refers to the converted inspection image shown in Fig. 6C , it can be easily detected whether the area A of the detection area is a flawed concavity and convexity.

200‧‧‧Optical detection methods

201~214‧‧‧Steps

Claims (13)

An optical detection system with height information, comprising: a platform for carrying an object to be detected and a calibration film respectively; an image capturing system defining a shooting optical axis on the object to be detected, according to at least one detection area set to shoot a detection image and shoot a calibration image on the calibration sheet; and a light source device including a plurality of light sources of different colors, the light sources of different colors illuminate the object to be detected and the calibration sheet; wherein, the The light sources of different colors are at least divided into two groups of light sources, which are respectively arranged on both sides of the shooting optical axis, and the two groups of light sources include different color light sources and the same color light sources respectively arranged at different heights, and the two sides of the shooting optical axis are The same irradiation angle assigned to the inspection image and the calibration image includes height information corresponding to the inspection area; wherein the calibration image is used to determine a calibration parameter, and the calibration parameter is used to determine the flawless height of the inspection area in the inspection image The color of the information area is corrected to white or monochromatic light as required by the user. The optical detection system with height information as set forth in item 1 of the claimed scope, wherein the color distribution of the detection image includes the part inconsistent with the color distribution of the corrected image, and white or monochromatic light required by the user. An optical detection method with height information, comprising: setting parameters of at least one detection area; activating different-color light source devices and same-color light source devices at different heights, and illuminating a platform at the same angle on both sides of a photographing optical axis Carrying a calibration sheet, and shooting a calibration image from the calibration sheet according to the parameters of the detection area; recording the color distribution of the calibration image corresponding to the detection area; Activate to dispose light source devices of different colors and light source devices of the same color respectively at different heights, and illuminate an object to be detected carried by the platform at the same angle on both sides of the shooting optical axis, and according to the parameters of the detection area, from the object to be detected Shoot a test image; calculate the color distribution of the test image corresponding to the test area; compare the color distribution of the calibration image and the test image corresponding to the test area, if at least a part of the color distribution of the two is inconsistent, record the The detection object corresponds to a defect with height information in the detection area; and the part of the detection image that is consistent with the color distribution of the calibration image corresponding to the detection area is converted into a preset color, and the converted detection image is stored for subsequent repetitions. Check the defects of the object to be tested. The optical detection method with height information as set forth in item 3 of the scope of the patent application, wherein the preset color is white or monochromatic light required by the user. The optical detection method with height information as set forth in item 3 of the scope of the patent application further comprises: recording a calibration parameter of the calibration image according to the parameters of the detection area. The optical detection method with height information as set forth in item 5 of the scope of the application, further comprising: converting the part of the detection image that is consistent with the color distribution of the calibration image into the pre-detection area according to the parameters of the detection area and the calibration parameter Set color. The optical detection method with height information as described in Item 3 of the scope of the patent application further comprises: the light source devices of different colors illuminate the calibration sheet or the object to be detected at different angles. The optical detection method with height information as set forth in Item 3 of the patent application scope, wherein the color distribution of the corrected image includes full plane information or height information of parts. The optical detection method with height information as set forth in claim 3, wherein the color distribution of the converted detection image includes the part inconsistent with the color distribution of the corrected image, and the preset color. The optical detection method with height information as set forth in Item 3 of the patent application scope further includes: setting a chromatic aberration threshold. According to the optical detection method with height information set forth in Item 10 of the scope of application, further comprising: if the color difference between the color distribution of the corrected image and the detected image exceeds the color difference threshold, judging that the color distributions of the two are at least partially inconsistent . The optical detection method with height information as set forth in Item 3 of the patent application scope further includes: comparing the color distribution of the calibration image and the detection image, and if the color distributions of the two are consistent, recording the object to be detected as an OK item. The optical detection method with height information as described in item 12 of the patent application scope further includes: converting the color of the record OK piece without height defects into the natural color of ordinary white light or the monochromatic light required by the user.

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