TWI758791B - gate - Google Patents

Abstract

The gate valve of the present invention includes a valve box, a valve body, a rotating shaft, a rotating shaft driving part, a movable valve part, a valve box energizing part, a hydraulic driving part, a first connecting part, and a second connecting part. The first connection part has: a plurality of connection members, which are arranged along the circumference of the first opening; and an inner sealing area and an outer sealing area, which are located in the radial direction of the first opening and on both sides of the connection member, and The surface of the valve box and the surface of the first chamber can be sealed by being provided along the circumference of the first opening.

Description

gate

The present invention relates to a gate valve, in particular to a technology suitable for use in a swing valve.

In vacuum devices, etc., there is a flow path that separates two spaces with different degrees of vacuum between the chamber and the piping, between the piping and the piping, or between the piping and the pump, etc., and connects the separated two spaces. gate. As such a gate valve, various types of valves are known.

As such a valve, when the valve is closed, the valve body of the blocking valve is rotated so as to block the flow path. Furthermore, as an energizing portion that presses the valve body against the opening of the valve box, there are known ones having hydraulic pressure. Swing gate valve for driven telescopic actuator. The inventors of the present invention filed a patent application related to such a gate valve (Patent Document 1).

The gate valve can seal the space on the upstream side and the space on the downstream side of the flow path partitioned by the partition operation, and connect the upstream side and the downstream side of the flow path. The gate valve is connected to the member outside the valve box opening. In this case, the gate valve is connected to the chamber having the flow path using the flange for vacuum apparatus prescribed in the Japanese Industrial Standards described in Non-Patent Document 1. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 6358727 [Non-patent literature]

[Non-Patent Document 1] Japanese Industrial Standard JIS_B_2290_1998 Flange for Vacuum Equipment

[Problems to be Solved by Invention]

However, recently, in order to save the space of a vacuum apparatus, it is desired to directly connect a gate valve to a chamber having a flow path. In addition, the connection according to the Japanese Industrial Standards described in Non-Patent Document 1 was also performed. Therefore, as the structure of the gate valve, a structure suitable for the connection pattern of both is required.

Moreover, in the manufacture of FPD (flat panel display: flat panel display), etc., the enlargement of the board|substrate progresses, and the enlargement of the apparatus in the vacuum apparatus which manufactures FPD is also remarkable. Therefore, miniaturization of each part constituting the vacuum apparatus is required. In addition, as the size of the device increases, the space outside the chamber decreases, and in the above-mentioned connection structure based on the Japanese Industrial Standards described in Non-Patent Document 1, it becomes difficult to fasten the fastening member. Therefore, it is desirable to connect the gate valve directly to the chamber having the flow path.

Furthermore, the manufacture of the gate valve requires more time. On the other hand, the specification of the gate valve corresponding to the design change of the vacuum apparatus is sought. In particular, as the initial design of the vacuum apparatus, even if the connection structure based on the Japanese Industrial Standards described in the above-mentioned Non-Patent Document 1 is adopted, it cannot be denied that, in order to save space, it is possible to directly connect a gate valve to a chamber having a flow path. Possibility of changing the design of the vacuum device. Therefore, as the structure of the gate valve, there is a requirement to realize the connection pattern of the two (a connection structure using a flange, a structure in which the gate valve is directly connected to the chamber).

The present invention has been accomplished in view of the above-mentioned circumstances, and has achieved the following objects. (1) Provide a gate valve that can correspond to both connection methods. (2) Seek space saving of the device. [Technical means to solve problems]

A gate valve according to one aspect of the present invention includes a valve box having a hollow portion, and a first opening portion and a second opening portion which are provided so as to face each other across the hollow portion and form a communicating flow path; the valve A body, which can open and block the flow path; a movable valve part, which can change the position of the flow path direction, and is provided in the valve body; a first connection part, which is installed in the first opening of the valve box The airtight manner is connected to the first chamber; and the second connection portion is connected to the second chamber in such a manner that the second opening provided in the valve box is hermetically sealed. The first connection part has: an inner sealing area, which is arranged along the circumference of the first opening part, and can seal the surface of the valve box and the surface of the first chamber; a plurality of fastening holes, which are located in the inner seal The region is located closer to the radially outer side of the first opening; and the outer sealing region is located closer to the radially outer side of the first opening than the fastening hole. The valve box and the first chamber are sealed by the outer sealing area in a connection method in which the connecting member fastened to the fastening hole is exposed to the vacuum side of the first chamber. The valve box and the first chamber are sealed in the connection method in which the connection member is exposed on the atmosphere side of the first chamber by the inner sealing region. The above-mentioned connection member can be applied to any of the connection method exposed on the vacuum side of the first chamber and the connection method exposed on the atmosphere side. A sealing groove is formed in the inner sealing region and the outer sealing region. The sealing groove is formed on the surface of the valve box. A sealing member is arranged in any one of the above-mentioned sealing grooves of the above-mentioned inner sealing region and the above-mentioned outer sealing region. In the first connection portion, on the surface of the valve box, the radial direction of the first opening portion is closer to the inner side of the outer sealing region, and the radial direction of the first opening portion is closer to the outer sealing region than the outer side. The direction of the hollow portion is concave. This solves the above problems. A gate valve according to one aspect of the present invention includes a valve box having a hollow portion, and a first opening portion and a second opening portion which are provided so as to face each other across the hollow portion and form a communicating flow path; the valve a body, which can open and close the flow path; a rotating shaft, which rotatably supports the valve body between the retracted position in the hollow part and the valve opening shielding position, and has an axis extending in the direction of the flow path; the rotating shaft drives A part, which rotates the above-mentioned rotating shaft, and can rotatably drive the above-mentioned valve body; a movable valve part, which can change the position of the direction of the above-mentioned flow path, and is provided on the above-mentioned valve body; The movable valve part at the valve opening shielding position moves in the direction of the flow path and is closed; a hydraulic drive part supplies an operating oil pressure to the valve box energizing part to drive; a first connection part is provided in the The said 1st opening part of the said valve box is connected to the 1st chamber so that the said 1st opening part may be sealed; The first connecting portion has: a plurality of connecting members arranged along the periphery of the first opening; and an inner sealing area and an outer sealing area, which are located in the radial direction of the first opening and on both sides of the connecting member. , and is arranged along the circumference of the first opening, so that the surface of the valve box and the surface of the first chamber can be sealed. The valve box and the first chamber are sealed in the connection method in which the connecting member is exposed on the vacuum side of the first chamber by the outer sealing region. The valve box and the first chamber are sealed in the connection method in which the connection member is exposed on the atmosphere side of the first chamber by the inner sealing region. The above-mentioned connection member can be applied to any of the connection method exposed on the vacuum side of the first chamber and the connection method exposed on the atmosphere side. A sealing groove is formed in the inner sealing region and the outer sealing region. The sealing groove is formed on the surface of the valve box. A sealing member is arranged in any one of the above-mentioned sealing grooves of the above-mentioned inner sealing region and the above-mentioned outer sealing region. In the first connection portion, on the surface of the valve box, the radial direction of the first opening portion is closer to the inner side of the outer sealing region, and the radial direction of the first opening portion is closer to the outer sealing region than the outer side. The direction of the hollow portion is concave. This solves the above problems. In the gate valve of one aspect of the present invention, in the first connecting portion, the surface of the valve box and the surface of the first chamber may be in contact with each other at the outer side of the outer sealing region in the radial direction of the first opening portion. . In the gate valve according to an aspect of the present invention, in the first connecting portion, the surface of the valve box and the surface of the first chamber may be spaced apart from each other in the radial direction of the first opening portion inside the outer sealing region. open. In the gate valve according to an aspect of the present invention, in the first connecting portion, the radial direction of the first opening portion may be more than the inner side of the outer sealing region, between the surface of the valve box and the surface of the first chamber. A gap is formed up to the edge of the first opening. In the gate valve of one aspect of the present invention, a sealing groove may be formed in the inner sealing region and the outer sealing region, and a sealing member may be disposed in any one of the sealing grooves in the inner sealing region and the outer sealing region. In the gate valve according to an aspect of the present invention, the sealing groove is formed on the surface of the valve box, and the first connecting portion may be located on the surface of the valve box and the radial direction of the first opening portion is higher than the outer sealing region. The inner side is recessed in a direction closer to the hollow portion than the outer side of the outer seal region in the radial direction of the first opening. In the gate valve of one aspect of the present invention, the sealing groove is formed on the surface of the first chamber, and the first connecting portion may be formed on the surface of the first chamber, and the first opening portion is radially higher than the first opening. The outer side of the outer sealing region protrudes in a direction closer to the hollow portion than the inner side of the outer sealing region in the radial direction of the first opening. In the gate valve of one aspect of the present invention, in the first connection portion, the connection member may be exposed on the vacuum side of the first chamber, and a sealing member may be disposed in the sealing groove of the outer sealing region. In the gate valve of one aspect of the present invention, in the first connection portion, the connection member may be exposed on the atmosphere side of the first chamber, and a sealing member may be disposed in the sealing groove of the inner sealing region. In the gate valve of one aspect of the present invention, the valve box energizing portion may be disposed around the second opening.

A gate valve according to one aspect of the present invention is a gate valve including: a valve box having a hollow part; a valve body, which can open and block the flow path; a rotating shaft, which rotatably supports the valve body between the retracted position in the hollow portion and the valve opening shielding position, and has an axis extending in the direction of the flow path; A rotating shaft driving part, which rotates the rotating shaft, and can rotatably drive the valve body; a movable valve part, which can change the position of the flow path direction, and is provided on the valve body; and a valve box energizing part, which is provided on the valve a box for moving and closing the movable valve portion at the valve opening shielding position in the direction of the flow path; a hydraulic driving portion for supplying operating oil pressure to the valve box energizing portion to drive; a first connecting portion for driving The first opening provided in the valve box is connected to the first chamber in such a manner as to seal; and the second connection portion is connected to the second chamber in such a manner as to seal the second opening provided in the valve box room. The first connecting portion has: a plurality of connecting members arranged along the periphery of the first opening; and an inner sealing area and an outer sealing area, which are located in the radial direction of the first opening and on both sides of the connecting member. , and is arranged along the circumference of the first opening, so that the surface of the valve box and the surface of the first chamber can be sealed. Thereby, a gate valve can be provided, which can also be applied to the connection method (connection structure) in which the connection member is exposed on the vacuum side of the first chamber, or the connection method (connection structure) in which the connection member is exposed on the atmosphere side of the first chamber. connection structure) can be used for any connection method. In this case, the inner sealing region and the outer sealing region can be switched by the connection method, and the first opening can be sealed. Specifically, in the connection method in which the connecting member is exposed on the vacuum side of the first chamber, the valve box and the first chamber can be sealed by forming an outer sealing area outside the through hole through which the connecting member penetrates. In addition, in the connection method in which the connecting member is exposed on the atmosphere side of the first chamber, the valve box and the first chamber can be sealed by forming an inner sealing area inside the through hole through which the connecting member penetrates. With this structure, when the gate valve of the vacuum apparatus is installed, it is easy to install the same gate valve in the vacuum apparatus when any connection method is adopted. Therefore, gate valves suitable for 2 connection methods can be manufactured, so there is no need to separately manufacture gate valves with 2 specifications corresponding to 2 connection methods, and there is no need to bear the inventory of gate valves. The inventory of gate valves with a long manufacturing period can be reduced.

In the gate valve of one aspect of the present invention, in the first connecting portion, the surface of the valve box and the surface of the first chamber are in contact with each other on the outer side of the outer sealing region in the radial direction of the first opening. Thereby, the gate valve and the first chamber can be sealed in the region closer to the first opening than the metal contact region in the metal contact region where the surface of the valve box and the surface of the first chamber contact each other.

In the gate valve of one aspect of the present invention, in the first connecting portion, the surface of the valve box and the surface of the first chamber are spaced apart from each other in the radial direction of the first opening portion inside the outer sealing region. Thereby, the valve box and the 1st chamber can be prevented from sliding on the inner side of the outer sealing region which becomes the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from being a source of particle generation.

In the gate valve according to an aspect of the present invention, in the first connection portion, a gap is formed between the surface of the valve box and the surface of the first chamber, in the radial direction of the first opening portion, inside the outer sealing region. up to the edge of the first opening. Thereby, the valve box and the 1st chamber can be prevented from sliding on the inner side of the outer sealing region which becomes the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from being a source of particle generation.

Furthermore, in the gate valve of one aspect of the present invention, a seal groove is formed in the inner seal region and the outer seal region, and a sealing member is disposed in any one of the seal grooves in the inner seal region and the outer seal region. Thereby, the valve box and the first chamber are fastened by the connecting member, so that the sealing member arranged around the first opening can be pressed against the surface facing the entire circumference of the sealing member, and the valve box and the first chamber can be sealed. Chamber 1.

In the gate valve according to one aspect of the present invention, the sealing groove is formed on the surface of the valve box, and in the first connecting portion, the surface of the valve box and the radial direction of the first opening are inside the outer sealing region. Compared with the radial direction of the said 1st opening part, rather than the outer side of the said outer sealing area, it is recessed in the direction approaching the said hollow part. Thereby, a gap is formed between the surface of the valve box and the surface of the first chamber up to the edge of the first opening in the radial direction of the first opening of the valve box compared to the inner side of the outer sealing region, thereby preventing the The valve box and the first chamber slide against each other on the inner side of the outer sealing region on the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from being a source of particle generation.

Furthermore, in the gate valve according to an aspect of the present invention, the sealing groove is formed on a surface of the first chamber, and in the first connection portion, the surface of the first chamber is radially closer to the first opening. The outer side of the outer sealing region protrudes in a direction closer to the hollow portion than the inner side of the outer sealing region in the radial direction of the first opening. Thereby, a gap is formed between the surface of the valve box and the surface of the first chamber up to the edge of the first opening in the radial direction of the first opening of the first chamber relative to the inner side of the outer sealing region. The valve box and the first chamber can be prevented from sliding against each other on the inner side of the outer sealing region which is the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from being a source of particle generation.

In the gate valve according to one aspect of the present invention, in the first connecting portion, the connecting member is exposed on the vacuum side of the first chamber, and a sealing member is disposed in the sealing groove of the outer sealing region. Thereby, when attaching and fixing the valve box and the first chamber, the connecting member can be fastened from the vacuum side of the inner side of the first chamber by the connecting member such as the fastening bolt, and the gate valve and the first chamber can be sealed. At the same time, the through-hole through which the connecting member such as the fastening bolt passes is positioned on the vacuum side relative to the sealing member of the sealing groove, so that the inside of the through-hole can be prevented from communicating with the atmosphere side, and the sealed state can be maintained. In this case, the connecting member may be an exhaust bolt.

In the gate valve according to one aspect of the present invention, in the first connecting portion, the connecting member is exposed on the atmosphere side of the first chamber, and a sealing member is disposed in the sealing groove of the inner sealing region. Thereby, when the valve box and the first chamber are fixed by attaching and fixing the valve box and the first chamber as a connecting member such as a fastening bolt, the connecting member can be fastened from the atmosphere side of the outside of the first chamber, and the gate valve and the first chamber can be sealed. In this case, the connecting member can be set as the usual fastening bolts other than exhaust bolts.

In the gate valve of one aspect of the present invention, the valve box energizing portion is disposed around the second opening. Thereby, the valve box energizing portion driven by the hydraulic pressure can maintain the driving state at a position separated from the heating chamber, and the driving reliability of the valve box energizing portion can be maintained. [Effect of invention]

According to the present invention, in the connection method in which the connection member is exposed on the vacuum side of the first chamber, or the connection method in which the connection member is exposed on the atmosphere side of the first chamber, the gate valve can be connected to the first chamber. It can be used for both time and time, and the effect of installing the gate valve in a vacuum device without replacing it with a different structure can be obtained.

Hereinafter, the gate valve according to the first embodiment of the present invention will be described based on the drawings. FIG. 1 is a diagram showing a connection method of the gate valve of the present embodiment, and is a cross-sectional view along the direction of the flow path. FIG. 2 is a cross-sectional view along the direction of the flow path showing another connection method of the gate valve of the present embodiment. In FIGS. 1 and 2 , reference numeral 100 is a gate valve.

As shown in FIGS. 1 and 2 , the gate valve 100 of the present embodiment is a pendulum spool valve that can be normally closed by rebound. The gate valve 100 of the present embodiment includes a valve box 10 , a hollow portion 11 , a valve body 5 , a rotary shaft 20 , a rotary shaft drive portion 200 , and a hydraulic drive portion 700 .

The valve body 5 is arranged in the hollow portion 11 of the valve box 10 and can open and close the flow path H. As shown in FIG. The rotating shaft 20 has an axis extending in the direction of the flow path H. As shown in FIG. The rotary shaft 20 can rotate the valve body 5 between a retracted position (valve opening position) and a valve opening shielding position (sliding ready position) in the hollow portion 11 . The rotating shaft driving part 200 can rotatably drive the rotating shaft 20 . The rotary shaft drive unit 200 can reciprocate the valve body 5 .

The valve body 5 is composed of a neutral valve portion 30 connected to the rotating shaft 20 , a valve frame portion 63 connected to the neutral valve portion 30 , and a movable valve portion 54 (movable valve plate portion) connected to the valve frame portion 63 . The neutral valve portion 30 is fixed to the rotating shaft 20 . The neutral valve portion 30 maintains the center position of the hollow portion 11 in the flow path H direction.

The valve frame portion 63 is located around the movable valve portion 54 . The valve frame portion 63 is fixed to the neutral valve portion 30 . The valve frame portion 63 maintains the center position of the hollow portion 11 together with the neutral valve portion 30 in the retracted position, the valve opening shielding position, and the valve closing position.

The movable valve portion 54 is slidable in the direction of the flow path H with respect to the valve frame portion 63 . The movable valve portion 54 can change the position of the valve frame portion 63 in the flow path H direction at the valve opening shielding position and the valve closing position.

The movable valve portion 54 maintains the center position of the hollow portion 11 between the retracted position, the retracted position, and the valve opening shielding position. The movable valve portion 54 is provided with a valve plate sealing gasket which is in close contact with the inner surface of the valve box 10 located around the first opening portion 12a.

The valve box energizing part 70 (pressing cylinder) is embedded in the valve box 10 . A plurality of valve box energizing portions 70 are arranged along the circumferential direction of the movable valve portion 54 .

As shown in FIGS. 1 and 2 , the valve box energizing portion 70 includes a telescopic rod 72 (movable portion), an energizing member (pressing spring), and a fixed portion 71 . The movable part 72 (the telescopic rod) of the valve box energizing part 70 can be extended and retracted into the chamber Ch in the vacuum atmosphere.

The valve box energizing portion 70 is arranged so that the energizing member can energize the movable portion 72 in a direction away from the movable valve portion 54 . In the valve box energizing portion 70 , the movable portion 72 retracted by the energizing ability of the energizing member is separated from the movable valve portion 54 and accommodated in the fixed portion 71 .

The driving of the valve box energizing part 70 is performed by the hydraulic pressure (incompressible fluid) supplied from the hydraulic driving part 700 .

The valve frame portion 63 or the movable valve portion 54 is not shown, but includes an energizing portion (neutral energizing portion) that energizes the movable valve portion 54 to the center position of the hollow portion 11 in the direction of the flow path H with respect to the valve frame portion 63 . .

In addition, the gate valve 100 has a mechanism for maintaining the movable valve portion 54 at the central position of the central portion 11 inside the valve box portion 10 when the valve box energizing portion 70 is not actuated. The valve frame portion 63 and the movable valve portion 54 can be adjusted in the flow path H between the valve opening shielding position and the valve closing position by the valve box energizing portion 70 and the energizing portion (neutral energizing portion) of the valve frame portion 63 . The thickness dimension in the direction.

When the rotating shaft 20 rotates in a direction intersecting with the direction of the flow passage H, the vertical valve portion 30 fixed to the rotating shaft 20 also rotates integrally with the rotation. Moreover, since the movable valve portion 54 can slide only in the thickness direction with respect to the neutral valve portion 30 , the movable valve portion 54 and the neutral valve portion 30 integrally rotate.

The neutral valve portion 30 is rotated by the rotating shaft drive portion 200, so that the movable valve portion 54 is moved from the retracted position of the hollow portion 11 in which the flow path H is not provided, to the shielding flow corresponding to the position of the first opening portion 12a by a swinging motion. The valve opening shielding position of road H.

The fixing portion 71 of the valve box energizing portion 70 is built in the valve box 10 . The valve box energizing portion 70 is disposed by an energizing member that energizes the movable portion 72 in a direction away from the movable valve portion 54 .

Further, in the valve box energizing portion 70, from the retracted storage state, hydraulic pressure (rebound) is supplied from the hydraulic driving portion 700, and the movable portion 72 is extended. At this time, the valve box energizing portion 70 moves the movable valve portion 54 toward the first opening portion 12 a via the movable portion 72 , and brings the movable valve portion 54 into contact with the inner surface of the valve box 10 . Furthermore, the valve box energizing portion 70 presses the movable valve portion 54 against the inner surface of the valve box 10 to be in a closed state, thereby closing the flow path H (valve closing operation).

In the valve box energizing portion 70 , the movable portion 72 retracted by the energizing member is separated from the movable valve portion 54 and received by the fixed portion 71 built in the valve box 10 . Thereby, the movable valve portion 54 is pulled away from the inner surface of the valve box 10 and retracted. By setting the movable valve portion 54 at the center position of the hollow portion 11 in the direction of the flow path H, the flow path H is opened (release operation).

After the releasing operation, when the rotating shaft 20 is rotationally driven by the rotating shaft driving part 200 (retracting operation), the neutral valve part 30 and the movable valve part 54 also rotate together with the rotation. The gate valve 100 performs the valve opening operation in which the movable valve portion 54 is retracted from the valve opening shielding position to the retracted position by the releasing operation and the retracting operation, and the valve is in the valve opening state. The rotary shaft drive unit 200 is configured to be able to perform a normally closed operation.

In the present embodiment, the gate valve 100 is disposed between the first chamber 910 and the second chamber 920 forming the flow path H, as shown in FIGS. 1 and 2 . The first chamber 910 constitutes a first space. The second chamber 920 constitutes a second space. The valve box 10 is in the shape of a plate having a specific thickness. A hollow portion 11 is formed inside the valve box 10 . On both surfaces of the valve box 10, a first opening 12a and a second opening 12b communicating with the hollow portion 11 are formed. The first opening 12a is connected to the first chamber 910 . The second opening 12b is connected to the second chamber 920 . Here, for convenience, the flow path H is set in the direction from the first chamber 910 to the second chamber 920 .

The 1st opening part 12a and the 2nd opening part 12b are arrange|positioned orthogonally to the flow path H direction. The first opening 12a and the second opening 12b are arranged parallel to each other. The 1st opening part 12a and the 2nd opening part 12b have substantially the same outline shape. The first opening portion 12a and the second opening portion 12b may have circular contours. The 1st opening part 12a and the 2nd opening part 12b are arrange|positioned at substantially the same position so that it may mutually overlap as seen in the flow path H direction.

In the gate valve 100, the valve box 10 is provided with a first connection portion 930 connected to the first chamber 910 so as to seal the first opening portion 12a. In the gate valve 100, the valve box 10 is provided with a second connection portion 940 connected to the second chamber 920 so as to seal the second opening portion 12b.

The gate valve 100 can use both the connection method shown in FIG. 1 and the connection method shown in FIG. 2 through the first connection portion 930 . For convenience, the connection method shown in FIG. 1 is referred to as the JIS (Japanese Industrial Standard) type. In this type, for the first chamber 910, the valve box 10 is connected to the first chamber 910 via a connecting cylinder 915 having a connecting flange 911. This type is a connection method in which the connection member 932 described later is exposed to the atmosphere side of the first chamber 910 . For convenience, the connection method shown in FIG. 2 is called direct type. In this type, for the first chamber 910 , the valve box 10 is directly connected to the chamber wall portion 912 of the first chamber 910 . This type is a connection method in which the connection member 932 described later is exposed on the vacuum side of the first chamber 910 .

FIG. 3 is an enlarged cross-sectional view showing the direction along the flow path of the first connection portion of the gate valve of the present embodiment. As shown in FIGS. 1 to 3 , the first connecting portion 930 of the present embodiment includes an inner sealing region 931 , a connecting member 932 , an outer sealing region 933 , and a metal contact region 934 along the circumference of the first opening 12 a . The inner sealing region 931 , the connecting member 932 , the outer sealing region 933 , and the metal contact region 934 are arranged concentrically toward the radially outer side of the first opening portion 12 a along the circumference of the first opening portion 12 a.

In the first connecting portion 930 of the present embodiment, an inner sealing region 931, an outer sealing region 933, a metal contact region 934, and a plurality of fasteners are formed in the surface 10a of the valve box 10 facing the first chamber 910 hole. Furthermore, in the first connection portion 930 of the present embodiment, a plurality of fastening holes 932a for fastening the connection member 932 are formed on the surface 10a of the valve box 10 facing the first chamber 910 .

The connection member 932 is, for example, a fastening bolt.

Alternatively, the connecting member 932 may be a vent bolt.

The plurality of fastening holes 932 a are located on the radially outer side of the first opening 12 a than the inner sealing region 931 . The outer sealing region 933 is located on the radially outer side of the first opening 12a than the fastening hole 932a.

In particular, the valve box 10 and the first chamber 910 are sealed by the outer sealing region 933 in a connection method in which the connecting member 932 fastened to the fastening hole 932a is exposed to the vacuum side of the first chamber 910 .

The valve box 10 and the first chamber 910 are sealed by the inner sealing region 931 in the connection mode in which the connecting member 932 is exposed to the atmosphere side of the first chamber 910 .

The connection member 932 can also be applied to either the connection method exposed on the vacuum side of the first chamber 910 or the connection method exposed on the atmosphere side.

A sealing groove 931a is formed in the inner sealing region 931 . A sealing groove 933 a is formed in the outer sealing region 933 . Sealing grooves 931a, 933a are formed on the surface 10a of the valve box 10, and sealing members 931b, 933b are disposed in any of the sealing grooves 931a, 933a in the inner sealing region 931 and the outer sealing region 933.

In the first connecting portion 930, on the surface 10a of the valve box 10, the radial direction of the first opening portion 12a is closer to the inner side of the outer sealing region 933 than the radially outer side of the outer sealing region 933 of the first opening portion 12a. The direction of the hollow portion 11 is concave.

The inner sealing area 931 is arranged along the outline of the first opening 12a. The inner seal region 931 is arranged concentrically with the first opening 12a. The inner sealing area 931 is circumferentially arranged with a size larger than that of the edge of the first opening 12a. The inner sealing region 931 is provided on the entire circumference of the first opening portion 12a. A sealing groove 931 a is formed in the inner sealing region 931 .

The sealing groove 931a is formed in the surface 10a (recess 935) of the valve box 10 facing the first chamber 910, and is recessed toward the hollow portion 11 in the direction of the flow path H. As shown in FIG. In the seal groove 931a, for example, an O-ring is accommodated as a seal member 931b that is an elastic body. The O-ring is crushed in contact with the surface 914 of the connecting flange 911 , and can seal the space between the surface 10 a of the valve box 10 and the connecting flange 911 .

A plurality of fastening holes 932a are formed on the radially outer side of the first opening portion 12a relative to the inner sealing region 931 . A plurality of fastening holes 932a and the first opening 12a are arranged concentrically and spaced apart from each other. The fastening holes 932a are arranged on the same circumference having a larger diameter than the inner sealing region 931 . The circumference of the fastening hole 932a is spaced apart from the outer contour of the inner sealing area 931 .

An outer sealing region 933 is arranged on the radially outer side of the first opening portion 12a than the circumference where the fastening hole 932a is arranged. The outer sealing region 933 is arranged concentrically with the first opening 12a. The outer sealing region 933 is arranged along the outline of the first opening 12a. The outer sealing region 933 is provided on the entire circumference of the first opening portion 12a. A sealing groove 933 a is formed in the outer sealing region 933 .

The sealing groove 933a is formed in the surface 10a (recess 935) of the valve box 10 facing the first chamber 910, and is recessed in the direction of the flow path H. As shown in FIG. The seal groove 933a is formed with a substantially equal depth dimension and a substantially equal diameter dimension (width dimension) as the seal groove 931a. In the seal groove 933a, for example, an O-ring is accommodated as the seal member 933b. The O-ring is crushed in contact with the surface 914 of the connecting flange 911 , and can seal the space between the surface 10 a of the valve box 10 and the connecting flange 911 .

In addition, the depth and width of the sealing groove 933a can also be increased or reduced relative to the depth and width of the sealing groove 931a. In particular, when the JIS type connection method described later is the main method, the depth and width of the sealing groove 931a may be increased relative to the depth and width of the sealing groove 933a.

In addition, in the case where the direct connection method described later is mainly used, the depth and width of the sealing groove 933a may be increased relative to the depth and width of the sealing groove 931a. In addition, the same applies to any connection method, that is, when both are used, preferably, the depth and width of the sealing groove 933a are approximately equal to the depth and width of the sealing groove 931a.

A metal contact region 934 is provided on the radially outer side of the first opening portion 12 a than the outer sealing region 933 . The metal contact area 934 is in contact with the surface 914 of the connecting flange 911 facing the valve box 10 over the entire area of the metal contact area 934 . The metal contact area 934 only needs to have a specific width, and it can be set to, for example, an area equal to the outer contour of the connecting flange 911 . In addition, as long as the metal contact area 934 can fix the valve box 10 and the connecting flange 911 and support the gate valve 100 in the first chamber 910, its size is not limited.

In the first connection portion 930 of the present embodiment, a concave portion 935 is formed from the outer seal region 933 to the radially inner side of the first opening portion 12a. That is, the surface 10 a of the valve box 10 facing the first chamber 910 that is closer to the first opening portion 12 a than the metal contact region 934 serves as the recessed portion 935 . In other words, the concave portion 935 is formed between the metal contact region 934 and the formation surface of the first opening portion 12a (the surface indicated by the reference numeral 12a in FIGS. 3 and 5). The recessed part 935 is formed so that the periphery of the 1st opening part 12a may be seen in the direction of the flow path H, and may be called a recessed part formation area|region. That is, a concave portion forming region is formed between the metal contact region 934 and the surface where the first opening portion 12a is formed. The concave portion 935 has an equal depth dimension over the entire area of the concave portion 935 . In the recessed portion 935, the sealing member 931b accommodated in the sealing groove 931a or the sealing member 933b accommodated in the sealing groove 933a is crushed in a state of being in contact with the surface 914 of the contact flange 911. In the state where the sealing members 931b and 933b are crushed, the recessed portion 935 has a depth dimension that can seal the space between the valve box 10 and the surface 914 of the connection flange 911 .

In the first connecting portion 930 of the present embodiment, a gap is formed between the surface 914 of the connecting flange 911 and the surface 10a of the valve box 10 from the outer sealing region 933 to the edge of the first opening portion 12a over the entire area of the concave portion 935 . . Inside the recess 935 , the surface 914 of the connecting flange 911 is in contact with the surface 10 a of the valve box 10 .

FIG. 4 is an enlarged cross-sectional view showing the direction along the flow path of the second connection portion of the gate valve of the present embodiment. In the gate valve 100 of the present embodiment, as shown in FIGS. 1 , 2 and 4 in the second connecting portion 940 , an inner sealing area 941 and an inner sealing area 941 are formed on the surface 10 b of the valve box 10 facing the second chamber 920 . Metal contact area 944 . Furthermore, in the second connection portion 940 of the present embodiment, a plurality of fastening holes 942a for fastening the connection member 942 are formed on the surface 10b of the valve box 10 facing the second chamber 920 .

The connection member 942 is, for example, a fastening bolt. In the second connection portion 940 , the valve box 10 is connected to the second chamber 920 having the connection flange 921 . In the second chamber 920 , a connecting flange 921 is provided at a position close to the end of the gate valve 100 .

The connecting flange 921 has a surface 924 opposite to the surface 10b of the valve box 10 . The connection flange 921 is arranged in parallel with the surface 10b of the valve box 10 and the second opening 12b. The connection flange 921 has the same inner peripheral cross-sectional shape as the second opening 12b when viewed from the direction of the flow path H. As shown in FIG. The connection flange 921 is provided with a through hole 921b through which the connection member 942 penetrates.

The through-hole 921b attaches the connection flange 921 and the gate valve 100 to each other through the connection member 942 . A plurality of through holes 921b are formed so as to be spaced apart from each other in the circumferential direction of the connection flange 921 . The plurality of through holes 921b are arranged on the same circumference with respect to the center of the flow path H. As shown in FIG.

The inner sealing region 941 is arranged along the contour of the second opening 12b. The inner seal region 941 is arranged concentrically with the second opening 12b. The inner sealing area 941 is circumferentially arranged with a size larger than that of the edge of the second opening 12b. The inner sealing region 941 is provided on the entire circumference of the second opening portion 12b. A sealing groove 941 a is formed in the inner sealing region 941 .

The inner sealing area 941 corresponds to the inner sealing area 931 of the first connecting portion 930 . That is, when the first opening 12a and the second opening 12b have substantially equal contour shapes, the inner seal region 941 and the inner seal region 931 can be arranged so as to overlap when viewed from the flow path H direction.

The sealing groove 941a is formed in the surface 10b (recess 945 ) of the valve box 10 facing the second chamber 920 , and is recessed toward the hollow portion 11 in the flow path H direction. In the seal groove 941a, for example, an O-ring is accommodated as a seal member 941b that is an elastic body. The O-ring is crushed in contact with the surface 924 of the connecting flange 921 , and can seal the space between the surface 10 b of the valve box 10 and the connecting flange 921 .

A plurality of fastening holes 942a are formed on the radially outer side of the second opening portion 12b relative to the inner sealing region 941 . A plurality of fastening holes 942a and the second opening 12b are arranged concentrically and spaced apart from each other. The fastening holes 942a are arranged on the same circumference having a larger diameter than the inner sealing region 941 . The circumference of the fastening hole 942a is spaced apart from the outer contour of the inner sealing area 941 .

When the first opening 12a and the second opening 12b have substantially equal contour shapes, the circumference of the fastening hole 942a and the circumference of the fastening hole 932a can be arranged so as to overlap when viewed from the direction of the flow path H.

A metal contact region 944 is provided on the radially outer side of the second opening portion 12b relative to the inner sealing region 941 . The metal contact area 944 is in contact with the surface 924 of the connecting flange 921 facing the valve box 10 over the entire area of the metal contact area 944 . The metal contact region 944 only needs to have a specific width dimension, and can be set to, for example, a region equal to the outer edge contour of the connection flange 921 .

In addition, if the metal contact area 944 can fix the valve box 10 and the connecting flange 921 and support the gate valve 100 and the second chamber 920, its size is not limited. Fastening holes 942 a are formed in the metal contact area 944 . That is, the surface 10b of the valve box 10 is in contact with the surface 924 of the connecting flange 921 around the fastening hole 942a.

In the second connection portion 940, a concave portion 945 is formed from the inner seal region 941 toward the radially inner side of the second opening portion 12b. That is, on the surface 10 b of the valve box 10 facing the second chamber 920 , a region closer to the second opening 12 b than the metal contact region 944 serves as the recessed portion 945 . The concave portion 945 has an equal depth dimension over the entire area of the concave portion 945 . In the recessed portion 945 , the sealing member 941 b such as an O-ring accommodated in the sealing groove 941 a is crushed in a state of being in contact with the surface 924 of the contact flange 921 . In the state where the sealing member 941b is crushed, the recessed portion 945 has a depth dimension that can seal the space between the surface 10b of the valve box 10 and the connection flange 921 .

In the second connecting portion 940, a gap is formed between the surface 924 of the connecting flange 921 and the surface 10b of the valve box 10 from the inner sealing region 941 to the edge of the second opening portion 12b over the entire area of the concave portion 945. Inside the recess 945 , the surface 924 of the connecting flange 921 is not in contact with the surface 10b of the valve box 10 .

The connecting flange 921 is in contact with the surface 10b of the valve box 10 over the entire area of the metal contact area 944 . The connecting flange 921 is not in contact with the surface 10b of the valve box 10 over the entire area of the recess 945 .

In the second connection portion 940, the connection member 942 penetrates through the through hole 921b and is fastened to the fastening hole 942a. In the sealing groove 941a of the inner sealing area 941, the sealing member 941b such as an O-ring is crushed by the surface 924 of the connecting flange 921, thereby sealing the flow path H.

At this time, the connection member 942 is exposed on the atmosphere side of the second chamber 920 and the valve box 10 . The through hole 921b is exposed on the atmosphere side of the second chamber 920 and the valve box 10 . In the recessed portion 945 , a region further radially outward of the second opening portion 12 b than the inner sealing region 941 is exposed to the atmosphere side of the second chamber 920 and the valve box 10 .

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by the JIS type connection shown in FIG. 1 will be described.

In the JIS type connection method, as shown in FIGS. 1 and 3 , a connection cylinder 915 is arranged in the connection portion of the first chamber 910 with the gate valve 100 . The connecting cylinder 915 has the same cross-sectional shape as the first opening 12a. In the connecting cylinder 915 , a connecting flange 911 is provided near the end of the gate valve 100 .

The connecting flange 911 has a surface 914 opposite to the surface 10a of the valve box 10 . The connection flange 911 is arranged in parallel with the surface 10a of the valve box 10 and the first opening 12a. The connecting flange 911 is provided with a through hole 911b through which the connecting member 932 penetrates.

The through hole 911b is arranged at a position corresponding to the fastening hole 932a when the connecting flange 911 and the gate valve 100 are attached to each other. That is, a plurality of through holes 911b are formed so as to be spaced apart from each other in the circumferential direction of the connection flange 911 . The plurality of through holes 911b are arranged on the same circumference with respect to the center of the flow channel H. As shown in FIG. A plurality of through holes 911b are formed at positions corresponding to the inside of the recessed portion 935 .

The connecting flange 911 is in contact with the surface 10a of the valve box 10 in the entire area of the metal contact area 934 . The connecting flange 911 is not in contact with the surface 10a of the valve box 10 in the entire area of the recess 935 .

In the first connection portion 930, the connection member 932 penetrates the through hole 911b and is fastened to the fastening hole 932a. Let the connection member 932 be a fastening bolt. In the sealing groove 931a of the inner sealing region 931, a sealing member 931b such as an O-ring is arranged.

In the sealing groove 933a of the outer sealing area 933, a sealing member 933b such as an O-ring may be arranged, or it may not be arranged. In the sealing groove 933a, a sealing member 933b such as an O-ring is crushed by the surface 914 of the connection flange 911, and the flow path H is sealed.

At this time, the connection member 932 is exposed on the atmosphere side of the first chamber 910 and the valve box 10 . The through hole 911b is exposed on the atmosphere side of the first chamber 910 and the valve box 10 . In the concave portion 935 , the inner sealing region 931 is a region on the radially outer side of the first opening portion 12 a , and is exposed to the atmosphere side of the first chamber 910 and the valve box 10 .

When the gate valve 100 is connected to the first chamber 910 by the JIS type connection shown in FIG. In addition, in FIG. 3, since this JIS type connection method and the next direct type connection method are shown, the other connection flange 911 and the chamber wall part 912 are shown in the same position.

In this case, when the first chamber 910 is heated, the temperature rise of the gate valve 100 is also slowed down, so that the influence of the heating in the gate valve 100 can be reduced. In particular, the influence of heating in the valve box energizing portion 70 driven by hydraulic pressure can be reduced. Thereby, the operation reliability can be improved.

The case where the gate valve 100 of this embodiment is connected to the first chamber 910 by the direct connection shown in FIG. 2 will be described.

In the direct connection method, as shown in FIGS. 2 and 3 , in the connecting portion of the first chamber 910 and the gate valve 100 , the valve box 10 is directly connected to the chamber wall portion 912 . A chamber opening portion 912 a is opened to the chamber wall portion 912 . The chamber opening 912a has the same cross-sectional shape as the first opening 12a. The chamber opening portion 912a corresponds to the connecting flange 911 of the JIS type.

The chamber wall portion 912 has a surface 914 opposite to the surface 10a of the valve box 10 . The chamber wall portion 912 is arranged in parallel with the surface 10a of the valve box 10 and the first opening portion 12a. The chamber wall portion 912 is provided with a through hole 912b through which the connecting member 932 penetrates.

The through hole 912b corresponds to the JIS type through hole 911b. The through hole 912b is arranged at a position corresponding to the fastening hole 932a when the chamber wall portion 912 and the gate valve 100 are attached to each other. That is, a plurality of through holes 912b are formed so as to be spaced apart from each other in the circumferential direction of the chamber opening portion 912a. The plurality of through holes 911b are arranged on the same circumference with respect to the center of the chamber opening 912a serving as the flow path H. A plurality of through holes 911b are formed at positions corresponding to the inside of the recessed portion 935 .

The chamber wall 912 is in contact with the surface 10a of the valve box 10 over the entire metal contact area 934 . The chamber wall portion 912 is not in contact with the surface 10a of the valve box 10 over the entire area of the recessed portion 935 .

In the first connection portion 930, the connection member 932 penetrates the through hole 911b and is fastened to the fastening hole 932a. The connection member 932 is an exhaust bolt. In the sealing groove 933a of the outer sealing region 933, a sealing member 933b such as an O-ring is arranged.

In the sealing groove 931a of the inner sealing region 931, a sealing member 931b such as an O-ring may be arranged, or it may not be arranged. In the sealing groove 933a, the sealing member 933b such as an O-ring is crushed by the surface 914 of the chamber wall portion 912, so that the sealing of the flow path H is completed.

At this time, the connection member 932 is exposed on the vacuum side of the first chamber 910 and the valve box 10 . The through hole 911b is exposed on the vacuum side of the first chamber 910 and the valve box 10 . In the concave portion 935 , a region further radially outward of the first opening 12 a than the outer sealing region 933 is exposed to the atmosphere side of the first chamber 910 and the valve box 10 .

When the gate valve 100 is connected to the first chamber 910 by the direct connection method shown in FIG. 2 , the gate valve 100 is placed in contact with the first chamber 910 . Thereby, compared with the JIS type using the connection cylinder 915, the distance between the gate valve 100 and the 1st chamber 910 in the direction of the flow path H is shortened, and space saving can be achieved.

Specifically, when various devices are arranged on the atmospheric side of the first chamber 910 that is outside the first chamber 910, when the operation of tightening the connecting member 932 is performed in a state where the outside of the first chamber 910 is narrow, even if the operator needs to If the space is insufficient, the connecting member 932 can also be fastened in the interior of the first chamber 910 on the vacuum side when the device is operating. The step of removing the gate valve 100 from the first chamber 910 or installing it in the first chamber 910 is performed in a state in which the device is not operated, such as maintenance. Therefore, the operator can perform the fastening and releasing operations of the connection member 932 in the inside of the first chamber 910 from the maintenance port or the like provided in the first chamber 910 . In particular, in an apparatus having a large internal volume of the first chamber 910, such as an apparatus for manufacturing an FPD, the fastening and releasing operations of the connecting member 932 can be easily performed.

As shown in FIG. 3 , the gate valve 100 of the present embodiment can be applied to any of the JIS type, the direct type, or the connection method in which the connection member is exposed on the atmosphere side of the first chamber.

Specifically, in the JIS type connection method in which the connecting member 932 is exposed on the vacuum side of the first chamber 910 , the valve box 10 can be connected to the outer sealing area 933 outside the through hole 911b through which the connecting member 932 penetrates. Sealing of the first chamber 910 . At the same time, in the direct connection method in which the connecting member 932 is exposed on the atmosphere side of the first chamber 910, the valve box 10 can be connected to the first chamber 931 through the inner sealing area 931 inside the through hole 911b through which the connecting member 932 passes. Sealing of the chamber 910.

In addition, with the gate valve 100 having the same structure, both of the above-mentioned connection methods can be used.

Thereby, when the gate valve 100 is attached to the vacuum apparatus having the first chamber 910, any connection method can be easily applied, and the gate valve 100 of the same structure can be easily attached to the vacuum apparatus. Therefore, gate valves suitable for 2 connection methods can be manufactured, so there is no need to separately manufacture gate valves with 2 specifications corresponding to 2 connection methods, and there is no need to bear the inventory of gate valves. It is possible to reduce the inventory of the gate valve 100 with a long manufacturing period without changing the design of the gate valve 100 according to the connection method.

In addition, for the metal contact area 934 where the surface 10a of the valve box 10 and the surface 914 of the first chamber 910 are in contact with each other, the gate valve 100 and the first Chamber 910 is sealed. Therefore, in the gate valve 100 which can correspond to the connection method of the two, the sealing performance is not lowered.

At the same time, by forming the concave portion 935, the valve box 10 and the first chamber 910 can be prevented from sliding on the inner side of the outer sealing region 933, which is the vacuum side, in the first connection portion 930. Therefore, the sealing portion between the gate valve 100 and the first chamber 910 can be prevented from being a source of particle generation.

Hereinafter, a gate valve according to a second embodiment of the present invention will be described based on the drawings. FIG. 5 is an enlarged cross-sectional view showing the direction along the flow path of the first connection portion of the gate valve of the present embodiment. FIG. 7 is a perspective view showing the first connection portion of the gate valve of the present embodiment. In the present embodiment, the difference from the above-mentioned first embodiment is related to the part where the structure of the first connection part and the second connection part is formed, and other parts corresponding to the above-mentioned first embodiment are denoted by the same reference numerals and omitted. illustrate.

In the gate valve 100 of the present embodiment, as shown in FIG. 5 , the first connecting portion 930 is also formed on the connecting flange 911 or the chamber wall portion 912 . A plurality of fastening holes 932a are provided on the surface 10a of the valve box 10 . The surface 10a of the valve box 10 is formed so that the radial outer side of the 1st opening part 12a may become one surface except for the fastening hole 932a. In the first connection portion 930 of the present embodiment, both the JIS type and the direct type connection method may be used.

Hereinafter, the connection of the JIS type will be described first.

5 and 7, a plurality of fastening holes 932a for fastening the connection member 932 are arranged on the surface 10a of the valve box 10 along the circumference of the first opening 120a. The plurality of fastening holes 932a are arranged concentrically outward in the radial direction of the first opening 12a, as in the first embodiment.

On the other hand, in the first connecting portion 930 of the present embodiment, the inner sealing region 931 , the outer sealing region 933 and the metal contact region 934 are arranged on the surface 914 of the connecting flange 911 along the circumference of the first opening 12a. That is, the inner seal region 931 , the through hole 911 b , the outer seal region 933 , and the metal contact region 934 are arranged concentrically from the outline of the first opening 12 a toward the radially outer side of the connection flange 911 . When viewed in the direction of the flow path H, the inner sealing region 931, the through hole 911b, the outer sealing region 933, and the metal contact region 934 are formed in the same positions as those of the first embodiment.

In the first connecting portion 930 of the present embodiment, a concave portion 935 is formed in the radial direction of the connecting flange 911 from the outer sealing region 933 to the inner contour. That is, the concave portion 935 is formed on the surface 914 of the connecting flange 911 at a position closer to the inner contour of the connecting flange 911 than the metal contact region 934 in the radial direction of the connecting flange 911 . The concave portion 935 is formed so as to be separated from the surface 10a of the valve box 10 in the direction of the flow path H. As shown in FIG.

The concave portion 935 has an equal depth dimension over the entire area of the concave portion 935 . In the recessed part 935, the inner sealing area 931, the through-hole 911b, and the outer sealing area 933 are formed in the position which becomes the bottom part which opposes the surface 10a of the valve box 10. In the recessed portion 935, as in the first embodiment, a sealing member 931b such as an O-ring housed in the sealing groove 931a, or a sealing member 933b such as an O-ring housed in the sealing groove 933a so as to be in contact with the surface 10a of the valve box 10. State is crushed. In the state where the sealing members 931b and 933b are crushed, the recessed portion 935 has a depth dimension that can seal the space between the surface 10a of the valve box 10 and the connection flange 911 .

The inner sealing area 931 is arranged along the outline of the first opening 12a. The inner seal region 931 is arranged concentrically with the first opening 12a. The inner sealing area 931 is circumferentially arranged with a size larger than that of the edge of the first opening 12a. The inner sealing region 931 is provided on the entire circumference of the first opening portion 12a. A sealing groove 931 a is formed in the inner sealing region 931 .

The sealing groove 931a is formed at the bottom of the concave portion 935 formed in the surface 914 of the connecting flange 911 facing the valve box 10 . The sealing groove 931a is formed in the bottom portion of the concave portion 935 in a state of being more recessed in the direction away from the hollow portion 11 in the direction of the flow path H. As shown in FIG. In the seal groove 931a, for example, an O-ring is accommodated as a seal member 931b that is an elastic body. The O-ring is crushed in a state of being in contact with the surface 10a of the valve box 10, so that the surface 10a of the valve box 10 and the connecting flange 911 can be sealed.

A plurality of through holes 911b are formed on the radially outer side of the connecting flange 911 than the inner sealing region 931 . The through-hole 911b is penetrated by the connection flange 911 . A plurality of through holes 911b are arranged concentrically and spaced apart from the first opening 12a. The through holes 911b are arranged on the same circumference having a larger diameter than the inner sealing region 931 . The circumference of the through hole 911b is spaced apart from the outer contour of the inner sealing region 931 .

An outer sealing region 933 is arranged on the radially outer side of the connecting flange 911 than the circumference of the through hole 911b. The outer sealing area 933 is arranged concentrically with the connecting flange 911 . The outer sealing area 933 is arranged along the contour of the connecting flange 911 . The outer sealing area 933 is provided on the entire circumference of the connecting flange 911 . A sealing groove 933 a is formed in the outer sealing region 933 .

The sealing groove 933a is formed at the bottom of the concave portion 935 formed in the surface 914 of the connecting flange 911 facing the valve box 10 . The sealing groove 933a is formed in the bottom portion of the concave portion 935, and is in a state of being more recessed in the direction of the flow path H in the direction away from the hollow portion 11. As shown in FIG. The seal groove 933a is formed with a substantially equal depth dimension and a substantially equal diameter dimension (width dimension) to the seal groove 931a. In the seal groove 933a, a seal member 933b which is an elastic body such as an O-ring is accommodated. The O-ring is crushed in a state of being in contact with the surface 10a of the valve box 10, so that the surface 10a of the valve box 10 and the connecting flange 911 can be sealed.

In addition, the depth and width of the sealing groove 933a can also be increased or reduced relative to the depth and width of the sealing groove 931a. In particular, when the JIS-type connection method described below is the main method, the depth and width of the sealing groove 931a may be increased relative to the depth and width of the sealing groove 933a.

In addition, in the case where the direct connection method described later is mainly used, the depth and width of the sealing groove 933a may be increased relative to the depth and width of the sealing groove 931a. In addition, the same applies to any connection method, that is, when both are used, preferably, the depth and width of the sealing groove 933a are approximately equal to the depth and width of the sealing groove 931a.

A metal contact area 934 is provided on the radially outer side of the connecting flange 911 than the outer sealing area 933 . The metal contact area 934 is in contact with the surface 10 a of the valve 10 opposite to the connecting flange 911 over the entire area of the metal contact area 934 . The metal contact area 934 only needs to have a specific width dimension, for example, it is set as an area equal to the contour from the outer sealing area 933 to the outer edge of the connecting flange 911 . In addition, the metal contact area 934 has a size capable of fixing the valve box 10 and the connecting flange 911 and supporting the gate valve 100 in the first chamber 910 .

In the first connecting portion 930 of the present embodiment, a gap is formed between the surface 914 of the connecting flange 911 and the surface 10a of the valve box 10 from the outer sealing region 933 to the edge of the first opening portion 12a over the entire area of the concave portion 935 . . Inside the recess 935 , the surface 914 of the connecting flange 911 is not in contact with the surface 10 a of the valve box 10 .

A plurality of fastening holes 932a are provided on the surface 10a of the valve box 10 . The fastening hole 932a is arranged at a position corresponding to the through hole 911b when the connecting flange 911 and the gate valve 100 are attached to each other. That is, a plurality of fastening holes 932a are formed so as to be spaced apart from each other in the circumferential direction of the first opening 12a. The plurality of fastening holes 932a are arranged on the same circumference with respect to the center of the flow path H. As shown in FIG. A plurality of fastening holes 932a are formed on the surface 10a of the valve box 10 which is substantially one-sided. The fastening holes 932a are arranged at positions corresponding to the recesses 935 .

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by the JIS type connection will be described.

In the JIS type connection method, as shown in FIG. 5 , in the first connection portion 930 , the connection member 932 penetrates through the through hole 911b and is fastened to the fastening hole 932a. The connection member 932 is a fastening bolt. A sealing member 931b such as an O-ring is arranged in the sealing groove 931a of the inner sealing region 931 .

In the sealing groove 933a of the outer sealing area 933, a sealing member 933b such as an O-ring may be arranged, or it may not be arranged. In the sealing groove 933a, a sealing member 933b such as an O-ring is crushed by the surface 10a of the valve box 10, and the flow path H is sealed.

At this time, the connection member 932 is exposed on the atmosphere side of the first chamber 910 and the valve box 10 . The through hole 911b is exposed on the atmosphere side of the first chamber 910 and the valve box 10 . In the concave portion 935 , a region further radially outward of the first opening portion 12 a than the inner sealing region 931 is exposed to the atmosphere side of the first chamber 910 and the valve box 10 .

When the gate valve 100 is connected to the first chamber 910 by the JIS type connection, the gate valve 100 is arranged to be separated from the first chamber 910 by the length of the connection cylinder 915 in the direction H of the flow path.

Next, the direct type connection will be described.

In the direct connection method, as shown in FIG. 5 , the valve box 10 is directly connected to the chamber wall portion 912 in the connection portion between the first chamber 910 and the gate valve 100 . A chamber opening portion 912 a is opened to the chamber wall portion 912 . The chamber opening 912a has the same cross-sectional shape as the first opening 12a.

In the first connection portion 930 of the present embodiment, the inner sealing region 931 , the outer sealing region 933 and the metal contact region 934 are arranged on the surface 914 of the chamber wall portion 912 along the circumference of the first opening portion 12a. That is, the inner sealing region 931, the through hole 912b, the outer sealing region 933, and the metal contact region 934 are arranged concentrically from the opening contour of the chamber opening 912a to the radially outer side of the chamber opening 912a.

When viewed in the direction of the flow path H, the inner sealing region 931, the through hole 911b, the outer sealing region 933, and the metal contact region 934 are formed in the same positions as those of the first embodiment. In addition, in the direct type connection system of this embodiment, the connection flange 911 of the above-mentioned JIS type connection system corresponds to the chamber wall portion 912 .

In the first connecting portion 930 of the present embodiment, a concave portion 935 is formed in the opening contour from the outer sealing region 933 to the chamber opening portion 912a. That is, on the surface 914 of the chamber wall portion 912, the recess portion 935 is formed at a position closer to the opening contour of the chamber opening portion 912a than the metal contact region 934 in the radial direction of the chamber opening portion 912a. The concave portion 935 is formed so as to be separated from the surface 10a of the valve box 10 in the direction of the flow path H. As shown in FIG.

The concave portion 935 has an equal depth dimension over the entire area of the concave portion 935 . In the recessed part 935, the inner sealing area 931, the through-hole 911b, and the outer sealing area 933 are formed in the position which becomes the bottom part which opposes the surface 10a of the valve box 10. In the concave portion 935, a sealing member 931b such as an O-ring housed in the sealing groove 931a or a sealing member 933b such as an O-ring housed in the sealing groove 933a is in contact with the surface 10a of the valve box 10 in the same manner as in the first embodiment. crush. When the sealing members 931b and 933b are crushed, the recessed portion 935 has a depth dimension capable of sealing the space between the surface 10a of the valve box 10 and the chamber wall portion 912 .

The inner sealing area 931 is arranged along the outline of the first opening 12a. The inner seal region 931 is arranged concentrically with the first opening 12a. The inner sealing area 931 is circumferentially arranged with a size larger than that of the edge of the first opening 12a. The inner sealing region 931 is provided on the entire circumference of the first opening portion 12a. A sealing groove 931 a is formed in the inner sealing region 931 .

The sealing groove 931a is formed at the bottom of the concave portion 935 formed in the surface 914 of the chamber wall portion 912. The sealing groove 931a is formed at the bottom of the recessed portion 935 to be more recessed so as to be separated from the hollow portion 11 in the direction of the flow path H. As shown in FIG. In the seal groove 931a, for example, an O-ring is accommodated as a seal member 931b that is an elastic body. The O-ring is crushed in a state of being in contact with the surface 10a of the valve box 10, and the space between the surface 10a of the valve box 10 and the chamber wall 912 can be hermetically sealed.

A plurality of through holes 911b are formed on the radially outer side of the chamber opening 912a than the inner sealing region 931 . The through hole 911b penetrates the chamber wall portion 912 . The through-holes 911b and the chamber opening 912a are spaced apart from each other in a plurality of numbers concentrically. The through holes 911b are arranged on the same circumference having a larger diameter than the inner sealing region 931 . The circumference of the through hole 911b is spaced apart from the outer contour of the inner sealing region 931 .

An outer sealing region 933 is arranged on the radially outer side of the chamber opening portion 912a from the circumference of the through hole 911b. The outer sealing region 933 is arranged concentrically with the chamber opening 912a. The outer sealing area 933 is arranged along the outline of the chamber opening 912a. The outer sealing area 933 is provided on the entire circumference of the chamber opening 912a. A sealing groove 933 a is formed in the outer sealing region 933 .

The sealing groove 933a is formed at the bottom of the concave portion 935 formed in the surface 914 of the chamber wall portion 912. The sealing groove 933a is formed in the bottom portion of the concave portion 935, and is in a state of being more recessed in the direction of the flow path H in the direction away from the hollow portion 11. As shown in FIG. The seal groove 933a is formed with a substantially equal depth dimension and a substantially equal diameter dimension (width dimension) to the seal groove 931a. In the seal groove 933a, a seal member 933b which is an elastic body such as an O-ring is accommodated. The O-ring is crushed in a state of being in contact with the surface 10a of the valve box 10, and the space between the surface 10a of the valve box 10 and the chamber wall 912 can be hermetically sealed.

In addition, the depth and width of the sealing groove 933a can also be increased or reduced relative to the depth and width of the sealing groove 931a. In particular, when the JIS-type connection method described below is the main method, the depth and width of the sealing groove 931a may be increased relative to the depth and width of the sealing groove 933a.

In addition, in the case where the direct connection method described later is mainly used, the depth and width of the sealing groove 933a may be increased relative to the depth and width of the sealing groove 931a. In addition, the same applies to any connection method, that is, when both are used, preferably, the depth and width of the sealing groove 933a are approximately equal to the depth and width of the sealing groove 931a.

A metal contact region 934 is provided on the radially outer side of the chamber opening portion 912 a than the outer sealing region 933 . The metal contact area 934 is in contact with the surface 10a of the valve box 10 over the entire area of the metal contact area 934 . The metal contact region 934 only needs to have a specific width dimension. In addition, the metal contact area 934 has a size that can fix the valve box 10 and the chamber wall 912 and support the gate valve 100 in the first chamber 910 .

In the first connecting portion 930 of the present embodiment, the entire area of the concave portion 935 is formed between the surface 914 of the chamber wall portion 912 and the surface 10a of the valve box 10 from the outer sealing region 933 to the edge of the first opening portion 12a. gap. Inside the recessed portion 935, the surface 914 of the chamber wall portion 912 is not in contact with the surface 10a of the valve box 10. As shown in FIG.

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by a direct connection method will be described.

In the direct type connection method, as shown in FIG. 5 , in the first connection portion 930 , the connection member 932 penetrates through the through hole 911b and is fastened to the fastening hole 932a. The connection member 932 is an exhaust bolt. In the sealing groove 933a of the outer sealing region 933, a sealing member 933b such as an O-ring is arranged.

In the sealing groove 931a of the inner sealing region 931, a sealing member 931b such as an O-ring may be arranged, or it may not be arranged. In the sealing groove 931a, a sealing member 931b such as an O-ring is crushed by the surface 10a of the valve box 10, and the flow path H is sealed.

At this time, the connection member 932 is exposed on the vacuum side of the first chamber 910 and the valve box 10 . The through hole 911b is exposed on the vacuum side of the first chamber 910 and the valve box 10 . In the concave portion 935 , a region further radially outward of the first opening 12 a than the outer sealing region 933 is exposed to the atmosphere side of the first chamber 910 and the valve box 10 .

When the gate valve 100 is connected to the first chamber 910 by the direct connection method, the first chamber 910 and the gate valve 100 are arranged closer to each other in the direction of the flow path H than the JIS connection method.

FIG. 6 is an enlarged cross-sectional view showing the direction along the flow path of the second connection portion of the gate valve of the present embodiment. FIG. 8 is a perspective view showing the second connection portion of the gate valve of the present embodiment. 6 and 8, a plurality of fastening holes 942a for fastening the connection member 942 are arranged on the surface 10b of the valve box 10 along the circumference of the second opening 12b. Similar to the first embodiment, the plurality of fastening holes 942a are arranged concentrically outward in the radial direction of the second opening 12b.

On the other hand, in the second connecting portion 940 of the gate valve 100 of the present embodiment, the connecting flange 921 of the second chamber 920 has an inner sealing region 941 and a through hole 921a formed on the surface 924 facing the valve box 10 , and a metal contact region 944 .

The inner sealing area 941 is arranged along the contour of the connecting flange 921 . The inner sealing area 941 is arranged concentrically with the connecting flange 921 . The inner sealing area 941 is circumferentially arranged with a size larger than that of the inner peripheral edge of the connecting flange 921 . The inner sealing area 941 is provided on the entire circumference of the connecting flange 921 . A sealing groove 941 a is formed in the inner sealing region 941 .

The inner sealing area 941 corresponds to the inner sealing area 931 of the first connecting portion 930 . That is, when the first opening 12a and the second opening 12b have substantially equal contour shapes, the inner seal region 941 and the inner seal region 931 can be arranged so as to overlap when viewed from the flow path H direction.

The sealing groove 941 a is formed in the direction of the flow path H, and the surface 924 (recess 945 ) of the connection flange 921 is recessed in the direction away from the hollow portion 11 . In the seal groove 941a, for example, an O-ring is accommodated as a seal member 941b that is an elastic body. The O-ring is crushed in a state of being in contact with the surface 10b of the valve box 10, thereby sealing the space between the surface 10b of the valve box 10 and the connecting flange 921.

A plurality of through holes 921b are formed on the radially outer side of the connecting flange 921 than the inner sealing region 941 . The through-holes 921b and the connecting flange 921 are spaced apart from each other by a plurality of concentrically arranged ones. The through holes 921b are arranged on the same circumference having a larger diameter than that of the inner sealing region 941 . The circumference of the through hole 921b is spaced apart from the outer contour of the inner sealing region 941 .

When the first opening 12a and the second opening 12b have substantially equal contour shapes, the circumference of the fastening hole 942a and the circumference of the fastening hole 932a can be arranged so as to overlap when viewed from the direction of the flow path H.

A metal contact area 944 is provided on the radially outer side of the connecting flange 921 than the inner sealing area 941 . The metal contact area 944 is in contact with the surface 10 b of the valve box 10 opposite to the connection flange 921 in the entire area of the metal contact area 944 . The metal contact area 944 only needs to have a specific width dimension, and it can be set as an area equal to, for example, from the inner sealing area 941 to the outer edge of the connecting flange 921 .

In addition, if the metal contact area 944 can fix the valve box 10 and the connecting flange 921 and support the gate valve 100 and the second chamber 920, its size is not limited. Fastening holes 942 a are formed in the metal contact area 944 . That is, around the fastening hole 942a, the surface 10b of the valve box 10 is connected with the surface 924 of the connecting flange 921.

In the second connection portion 940 , a concave portion 945 is formed from the inner seal region 941 to the radially inner side of the connection flange 921 . That is, on the surface 924 of the connecting flange 921 , a region closer to the inner peripheral edge of the connecting flange 921 than the metal contact region 944 serves as the concave portion 945 . The concave portion 945 has an equal depth dimension over the entire area of the concave portion 945 . In the concave portion 945 , a sealing member 941 b such as an O-ring, which is an elastic body accommodated in the sealing groove 941 a , is crushed in a state of being in contact with the surface 10 b of the valve box 10 . In the state where the sealing member 941b is crushed, the recessed portion 945 has a depth dimension that can seal the space between the surface 10b of the valve box 10 and the connection flange 921 .

In the second contact portion 940 , a gap is formed between the surface 924 of the connecting flange 921 and the surface 10 b of the valve box 10 from the inner sealing region 941 to the inner edge contour of the connecting flange 921 in the entire area of the concave portion 945 . Inside the recess 945 , the surface 924 of the connecting flange 921 is not in contact with the surface 10b of the valve box 10 .

The connecting flange 921 is in contact with the surface 10b of the valve box 10 over the entire area of the metal contact area 944 . The connecting flange 921 is not in contact with the surface 10b of the valve box 10 in the entire area of the recess 945 .

In the second connection portion 940, the connection member 942 penetrates the through hole 921b and is fastened to the fastening hole 942a. In the sealing groove 941a of the inner sealing region 941, the sealing member 941b such as an O-ring is crushed by the surface 10b of the valve box 10, thereby sealing the flow path H. As shown in FIG.

At this time, the connection member 942 is exposed on the atmosphere side of the second chamber 920 and the valve box 10 . The through hole 921b is exposed on the atmosphere side of the second chamber 920 and the valve box 10 . In the concave portion 945 , a region further radially outward of the second opening portion 12 b than the inner sealing region 941 is exposed to the atmosphere side of the second chamber 920 and the valve box 10 .

In this embodiment, the same effects as those of the first embodiment described above can be exhibited.

Hereinafter, a gate valve according to a third embodiment of the present invention will be described based on the drawings. The difference between the present embodiment and the second embodiment described above is related to the swing valve body of the gate valve, and the like, and the description thereof is omitted for other corresponding components.

FIG. 9 is a cross-sectional view showing the gate valve of the present embodiment orthogonal to the flow path. Fig. 10 is a cross-sectional view showing the gate valve of the present embodiment along the flow path. Fig. 11 is an enlarged cross-sectional view along the flow path showing the peripheral portion of the gate valve of the present embodiment. In addition, in this embodiment, illustration of the 1st chamber 910 and the 2nd chamber 920 is abbreviate|omitted.

As shown in FIGS. 9 and 10 , the gate valve 100 of the present embodiment includes a valve box 10 , a hollow portion 11 , a valve body 5 , a rotating shaft 20 , a rotating shaft driving portion 200 , a valve box energizing portion 70 , and a valve plate energizing portion. part 80 (holding spring), valve frame energizing part 90 , and hydraulic driving part 700 . A first connection portion 930 and a second connection portion 940 are provided in the valve box 10 .

The 1st opening part 12a and the 2nd opening part 12b have substantially the same outline. The first opening 12a has a circular outline. The second opening 12b has a circular outline.

The valve body 5 is arranged in the hollow portion 11 . The valve body 5 can block the first space of the first chamber 910 and the second space of the second chamber 920 at the valve blocking position. The rotation shaft 20 has an axis extending substantially parallel to the flow path H direction. The rotary shaft 20 penetrates the valve box 10 . The rotating shaft 20 can be rotationally driven by the rotating shaft driving part 200 . The valve body 5 is fixed to the rotary shaft 20 via a connecting member (not shown). Alternatively, the valve body 5 may be directly connected to the rotary shaft 20 without a connecting member (not shown). The rotating shaft 20 functions as a position switching portion of the valve body 5 .

Fig. 12 is a top view showing the valve body of the gate valve of the present embodiment when viewed in a direction orthogonal to the flow path. The valve body 5 can block the first opening 12a and/or the second opening 12b. The valve body 5 operates between a valve closing position, a valve opening shielding position, and a valve opening position (retraction position). The valve body 5 is rotatable between the retracted position and the valve opening shielding position.

At the valve closing position, the valve body 5 is in a state of closing the first opening 12a and/or the second opening 12b ( FIGS. 14 to 17 ). At the valve open position (retracted position), the valve body 5 is in an open state (shown by a broken line in FIG. 9 ) retracted from the first opening 12a and/or the second opening 12b.

The valve body 5 is composed of a neutral valve portion 30 and a movable valve portion 40 . The neutral valve portion 30 extends in a direction orthogonal to the axis of the rotating shaft 20 . The neutral valve portion 30 is arranged so as to be included in a plane parallel to the direction orthogonal to the axis of the rotation shaft 20 .

The neutral valve portion 30 has a circular portion 30a and a rotating portion 30b as shown in FIGS. 9 to 11 . The shape of the circular portion 30a is an annular shape slightly larger than the outline of the first opening portion 12a and/or the second opening portion 12b. The movable valve part 40 is arrange|positioned at the position which becomes the radial inner side of the circular part 30a. The inner periphery of the circular part 30a is arrange|positioned so that it may substantially overlap with the 1st opening part 12a and/or the 2nd opening part 12b as seen in the flow path H direction.

The rotating part 30b is located between the rotating shaft 20 and the circular part 30a. The rotating part 30b rotates the circular part 30a in accordance with the rotation of the rotating shaft 20 . The rotating portion 30b is formed in a flat plate shape extending from the rotating shaft 20 so as to expand in diameter toward the circular portion 30a. The rotating part 30b may be set as an arm shape in which a plurality of arms extend from the rotating shaft 20 to the circular part 30a. The rotating shaft 20 and the neutral valve portion 30 rotate relative to the valve box 10, but the positions of the rotating shaft 20 and the neutral valve portion 30 in the direction of the flow path H do not change.

The circular part 30a and the rotating part 30b may be integrated. In this case, a through hole into which the movable valve portion 40 is fitted is formed in the flat-shaped neutral valve portion 30 as a circular portion 30a. A portion of the circumferential direction of the circular portion 30a extending radially outward serves as the rotating shaft 30b.

The thickness dimension of the circular portion 30a in the flow path H direction is formed so as to be substantially equal to the thickness dimension of the rotation portion 30b in the flow path H direction. On the inner side in the radial direction of the stand valve portion 30 in the circular portion 30a, a circular flange portion 30c is circumferentially provided.

The thickness dimension in the flow path H direction of the circular flange portion 30c is formed so as to be smaller than the thickness dimension in the flow path H direction of the circular portion 30a. The circular flange portion 30c is circumferentially provided on the inner peripheral surface of the circular portion 30a, at a position close to the first opening portion 12a in the flow path H direction.

The outer frame plate 60e of the movable valve portion 60, which will be described later, is located in the direction of the flow path H, and is closer to the second opening portion 12b than the circular flange portion 30c. The circular flange portion 30c is connected to an outer frame plate 60e of a movable valve frame portion 60 to be described later. The circular flange portion 30c and the outer frame plate 60e are located radially outward of the outer peripheral crank portion 60c.

The radial width dimension of the circular flange portion 30c serving as the neutral valve portion 30 is set to be approximately equal to the radial width dimension serving as the movable valve frame portion 60 of the outer peripheral crank portion 60c. The circular portion 30a and the circular flange portion 30c are circumferentially provided at positions radially outward of the movable valve frame portion 60 with respect to the outer peripheral crank portion 60c. In addition, the circular part 30a and the rotating part 30b may be formed so that the thickness dimension of the flow path H direction may be equal.

The movable valve portion 40 is formed in a substantially disk shape. The movable valve portion 40 is connected to the neutral valve portion 30 so that the position in the flow path H direction can be changed. That is, the movable valve portion 40 is only slidably connected to the neutral valve portion 30 in the thickness direction. The movable valve portion 40 includes two parts that are movable relative to each other in the direction of the flow path H. As shown in FIG. The movable valve portion 40 includes a movable valve frame portion 60 (spool valve frame) and a movable valve plate portion 50 (target plate).

The shape of the movable valve frame portion 60 is a substantially annular shape that is substantially concentric with the circular portion 30a. The movable valve frame portion 60 is located radially inward of the circular portion 30a. The movable valve frame portion 60 is fitted into the circular portion 30a.

The movable valve frame portion 60 is slidable in the direction of the flow path H relative to the neutral valve portion 30 . The movable valve frame portion 60 is movable relative to the neutral valve portion 30 in the flow path H direction. The movable valve frame portion 60 is movable relative to the neutral valve portion 30 between a position capable of swinging and a position capable of contacting the first opening portion 12a.

The movable valve frame portion 60 has an outer peripheral crank portion 60c, an inner frame plate 60d, and an outer frame plate 60e.

The movable valve frame portion 60 connects the inner frame plate 60d, the outer peripheral crank portion 60c, and the outer frame plate 60e, and has a substantially zigzag cross-sectional shape in the radial direction.

The outer peripheral crank portion 60c is formed in an annular or cylindrical shape having a slightly larger outline than the outline of the first opening portion 12a and/or the second opening portion 12b. The outer peripheral crank portion 60c is formed on the entire circumference of the outer edge of the movable valve frame portion 60 . The outer peripheral crank portion 60c has a thickness dimension in the flow passage H direction that is substantially equal to the thickness dimension of the stem valve portion 30 in the flow passage H direction.

The outer peripheral crank portion 60c has a sliding surface 60b.

The sliding surface 60b is a cylindrical surface having an axis parallel to the flow path H direction. The sliding surface 60b is provided on the entire length of the inner peripheral surface of the outer peripheral crank portion 60c in the circumferential direction. The sliding surface 60b and the sliding surface 50b of the inner peripheral crank portion 50c of the movable valve plate portion 50, which will be described later, can slide and face each other.

The inner peripheral crank portion 50c is fitted to the outer peripheral crank portion 60c.

The inner frame plate 60d is circumferentially provided at a position that becomes the radially inner side of the movable valve frame portion 60 of the outer peripheral crank portion 60c. The inner frame plate 60d is circumferentially provided at an end portion of the outer peripheral crank portion 60c in the direction of the flow path H that is close to the first opening portion 12a. The inner frame plate 60d is formed in a flange shape parallel to the valve plate 50d.

The inner frame plate 60d has a thickness dimension in the flow passage H direction smaller than a thickness dimension of the outer peripheral crank portion 60c in the flow passage H direction. The inner peripheral crank portion 50c, which will be described later, is positioned closer to the second opening portion 12b in the direction of the flow path H than the inner frame plate 60d. The radial width dimension of the movable valve frame portion 60 of the inner frame plate 60 d is set to be substantially equal to the radial width dimension of the inner peripheral crank portion 50 c that becomes the movable valve frame portion 60 .

The outer frame plate 60e is circumferentially provided at a position which becomes the radially outer side of the movable valve frame portion 60 of the outer peripheral crank portion 60c. The outer frame plate 60e is circumferentially provided at the end portion of the outer peripheral crank portion 60c that is close to the second opening portion 12b in the flow path H direction. The outer frame plate 60e is circumferentially disposed on the radially outer side of the movable valve frame portion 60 of the outer peripheral crank portion 60c.

The size of the outer frame plate 60e in the direction of the flow path H is smaller than that of the protrusions of the outer peripheral crank portion 60c. The circular flange portion 30c is positioned closer to the first opening portion 12a in the direction of the flow path H than the outer frame plate 60e. A plurality of valve frame energizing portions 90 are arranged on the outer frame plate 60e as described later. The outer frame plate 60e is provided with a plurality of energizing portion holes 68 in which the valve frame energizing portion 90 is built.

Between the movable valve portion 60 and the neutral valve portion 30, a valve frame energizing portion 90 (assist spring) is arranged. The movable valve frame portion 60 can be connected to the neutral valve portion 30 through the valve frame energizing portion 90 so that its position in the direction of the flow path H can be changed. The movable valve frame portion 60 and the circular portion 30a are formed as concentric double rings.

On the surface of the movable valve frame portion 60 facing (abutting against) the inner surface 10A of the valve box, a valve frame sealing gasket 61 is arranged around it. The valve frame gasket 61 is arranged in the vicinity of the boundary between the outer peripheral crank portion 60c and the inner frame plate 60d which is formed into a circular shape. The valve frame gasket 61 is provided on the end surface of the outer peripheral crank portion 60c facing the first opening portion 12a.

The valve frame gasket 61 is formed in an annular shape corresponding to the shape of the first opening portion 12a. The valve frame gasket 61 serves as a sealing portion including an O-ring or the like, for example. The valve frame sealing gasket 61 can be in close contact with the inner surface 10A of the valve box located around the first opening 12a. The valve frame packing 61 is concentrically arranged on the movable valve frame portion 60 .

The valve frame sealing gasket 61 is provided at a position close to the outermost periphery of the outer peripheral crank portion 60c. The valve frame gasket 61 is in contact with the valve box inner surface 10A which is the periphery of the first opening portion 12a when the valve is closed, and is pressed by the movable valve frame portion 60 and the valve box inner surface 10A. Thereby, the first space and the second space are in a separated state.

The movable valve plate portion 50 is formed as a plate body having a circular outline substantially concentric with the circular portion 30a. The movable valve plate portion 50 is fitted to the radially inner side of the outer peripheral crank portion 60 c of the movable valve frame portion 60 . The movable valve frame portion 60 is arranged at a position to be the radially outer side of the movable valve plate portion 50 so as to surround the periphery of the movable valve plate portion 50 .

The inner peripheral crank portion 50c of the movable valve plate portion 50 and the movable valve frame portion 60 are formed as concentric double-layer rings. The movable valve plate portion 50 is slidable in the direction of the flow path H relative to the movable valve frame portion 60 . The movable valve plate portion 50 is movable relative to the movable valve frame portion 60 in the flow path H direction.

Here, the movable valve plate portion 50 can move between the following three positions. The first position is a position in which the movable valve plate portion 50 can perform a swinging operation with respect to the movable valve frame portion 60 and the neutral valve portion 30 at the swingable position.

The second position is the same position as the movable valve plate portion 50 relative to the movable valve frame portion 60 in the first position when the movable valve frame portion 60 is in a position where it can contact the first opening portion 12a. The third position is a position at which the movable valve plate portion 50 can contact the second opening portion 12b with respect to the movable valve frame portion 60 at the second position.

The movable valve plate portion 50 has an inner peripheral crank portion 50c and a valve plate 50d. The movable valve plate portion 50 is provided with an inner peripheral crank portion 50c on the periphery of the surface of the valve plate 50d facing the first opening portion 12a, and the cross-sectional shape through the diameter is substantially U-shaped. The valve plate 50d is provided so as to seal the radially inner side of the inner peripheral crank portion 50c. The valve plate 50d is formed into a flat plate shape arranged in a direction substantially orthogonal to the direction of the flow path H. As shown in FIG.

The inner peripheral crank portion 50c is formed in an annular or cylindrical shape whose axial dimension is shorter than its radial dimension. The inner peripheral crank portion 50c is formed on the entire periphery of the outer edge of the movable valve plate portion 50 . The inner peripheral crank portion 50c has an outer peripheral contour slightly larger than that of the first opening portion 12a and/or the second opening portion 12b. The inner peripheral crank portion 50c has an inner peripheral contour slightly smaller than that of the first opening portion 12a and/or the second opening portion 12b.

The inner peripheral crank portion 50c has a thickness dimension smaller than that of the outer peripheral crank portion 60c, that is, the dimension in the H direction of the flow path. The inner peripheral crank portion 50c has a thickness dimension larger than that of the valve plate 50d, that is, a dimension in the direction of the flow path H.

The inner peripheral crank portion 50c has a sliding surface 50b. The sliding surface 50b is a cylindrical surface having an axis parallel to the flow path H direction. The sliding surface 50b is provided on the entire length of the outer peripheral surface of the inner peripheral crank portion 50c in the circumferential direction. The inner peripheral crank portion 50c and the outer peripheral crank portion 60c are fitted in a state in which the sliding surface 50b and the sliding surface 60b are in contact with each other. The sliding surface 50b and the sliding surface 60b of the movable valve frame portion 60 are located so as to be slidable and facing each other.

In the inner peripheral crank portion 50 c, the energizing portion holes 58 and the peripheral grooves 59 for accommodating the valve plate energizing portion 80 are alternately arranged in the circumferential direction of the movable valve plate portion 50 . A plurality of valve plate energizing portions 80 are provided at equal intervals apart from each other in the circumferential direction of the movable valve plate portion 50 . The number of locations where the plurality of valve plate energizing parts 80 are provided is preferably three or more.

In the present embodiment, as the arrangement of the valve plate energizing parts 80 spaced apart from each other, it is shown that the four valve plate energizing parts 80 are arranged at the same angular position (90 degrees) as viewed from the center O of the valve plate 50d. Composition example. The angular position of the valve plate energizing portion 80 is configured such that the angular positions of the valve box energizing portion 70 and the valve frame energizing portion 90 overlap when viewed from the center O of the valve plate 50d.

The energizing portion holes 58 correspond to the arrangement of the valve plate energizing portions 80 as described above, and are provided at four positions at equal intervals in the circumferential direction of the inner peripheral crank portion 50c. The circumferential groove 59 is circumferentially provided in the circumferential direction of the inner circumferential crank portion 50c so as to connect the adjacent energizing portion holes 58 .

The energizing portion hole 58 and the peripheral groove 59 have openings on the surface of the inner peripheral crank portion 50c facing the first opening portion 12a in the flow path H direction. The inner peripheral wall 59a, the outer peripheral wall 59b, and the bottom portion 59c between the inner peripheral wall 59a and the outer peripheral wall 59b are formed in the inner peripheral wall 59a, the outer peripheral wall 59b, and the inner peripheral wall 59a and the outer peripheral wall 59b.

The inner peripheral wall 59a and the outer peripheral wall 59b extend in the flow path H direction. The bottom portion 59c extends in a direction orthogonal to the direction of the flow path H that is substantially parallel to the valve plate 50d. The inner peripheral wall 59 a is circumferentially disposed in the radial direction of the movable valve plate portion 50 , inside the peripheral groove 59 .

The peripheral groove 59 is provided with a curved portion 59d that connects the surface (bottom surface) of the bottom portion 59c and the surface (side surface) of the inner peripheral wall 59a in a curved manner. The peripheral groove 59 is provided with a curved portion 59e that connects the surface (bottom surface) of the bottom portion 59c and the surface (side surface) of the outer peripheral wall 59b in a curved manner.

The bottom portion 59c of the peripheral groove 59 is located closer to the first opening portion 12a in the flow path H direction than the bottom portion 58c of the energizing portion hole 58 . The bottom portion 59c of the peripheral groove 59 is formed thicker than the bottom portion 58c of the energizing portion hole 58 . The energizing portion hole 58 can accommodate a valve plate energizing portion 80 to be described later, and is formed in a substantially cylindrical shape. The bottom portion 58c of the energizing portion hole 58 is formed in a flat shape. The curved portions having the same degree of curvature radius as the curved portions 59d and 59e may not be provided.

The valve plate 50d is connected to the radially inner side of the movable valve plate portion 50 to the inner peripheral wall 59a. In the movable valve plate portion 50 , the inner peripheral wall 59a of the inner peripheral crank portion 50c and the peripheral portion of the valve plate 50d are connected at a position closer to the opening of the peripheral groove 59 than the bottom 59c of the peripheral groove 59 . Furthermore, it is preferable to be closer to the first opening portion 12a than the center position of the inner peripheral crank portion 50c in the thickness direction of the movable valve plate portion 50 in the direction of the flow path H on the radially inner side of the inner peripheral wall 59a. The position is connected to the valve plate 50d.

In addition, as the position connecting the inner peripheral wall 59a and the valve plate 50d, in the direction of the flow path H, from the position of the end of the inner peripheral wall 59a, which is a position close to the first opening portion 12a, to the center position of the inner peripheral crank portion 50c appropriate settings. The position connecting the inner peripheral wall 59a and the valve plate 50d can be set in the direction of the flow path H, which is a position closer to the end of the inner peripheral wall 59a than the center position of the inner peripheral crank portion 50c is closer to the position of the first opening 12a than the center position of the inner peripheral crank portion 50c .

On the outer peripheral wall 59b, a sliding surface 50b is provided on the outer periphery in the radial direction of the movable valve plate portion 50. As shown in FIG. On the outer peripheral wall 59b, on the radially outer side of the movable valve plate portion 50, a sliding seal packing 52 (sliding seal member) including an O-ring or the like is arranged as a plate sliding seal portion. On the outer peripheral wall 59b, a groove 52m for accommodating the sliding sealing gasket 52 is circumferentially formed.

The sliding gasket 52 is provided at a position closer to the opening of the circumferential groove 59 than the outer circumferential groove 56, that is, at a position closer to the end of the outer circumferential wall 59b in the flow path H direction. The groove 52m is provided at a position closer to the opening of the circumferential groove 59 than the outer circumferential groove 56, that is, at a position closer to the end of the outer circumferential wall 59b in the flow path H direction. The groove 52m is arranged at a position close to the first opening 12a of the outer peripheral wall 59b in the thickness direction of the movable valve plate portion 50 serving as the flow path H direction.

On the outer peripheral wall 59b, at the position which becomes the radially outer side of the movable valve plate portion 50, a ridge having a groove 51m is provided on the periphery. The protrusion provided with the groove 51m is located in the thickness direction of the movable valve plate part 50 which becomes the flow path H direction, at the position close to the second opening part 12b of the outer peripheral wall 59b. The groove 51m is located in the radial direction of the movable valve plate portion 50 and is further outside than the outer peripheral wall 59b. The groove 51m accommodates a counterweight pad 51 (sealing member) which will be described later. The groove 51m is provided on the end surface of the protruding bar which is a position close to the second opening 12b.

In the radial direction of the movable valve plate portion 50, an outer peripheral groove 56 is provided on the outer peripheral surface of the outer peripheral wall 59b. The outer peripheral groove 56 is located between the groove 52m and the groove 51m in the flow path H direction. The outer peripheral groove 56 is arranged so as not to be in contact with the sliding seal packing 52 .

The sliding gasket 52 is arranged between the inner crank portion 50c and the outer crank portion 60c. By sliding the sealing gasket 52, the sealing state of the sliding surface 50b and the sliding surface 60b during sliding is maintained.

The sliding surface 50b, the sliding seal packing 52, and the sliding surface 60b constitute a plate sliding seal portion.

The movable valve plate portion 50 and the movable valve frame portion 60 are connected by the valve plate energizing portion 80 .

The movable valve plate portion 50 and the movable valve frame portion 60 can slide relative to each other in the reciprocating directions indicated by symbols B1 and B2 in FIG. 10 . The reciprocating directions B1 and B2 are directions perpendicular to the surfaces of the movable valve plate portion 50 and the movable valve frame portion 60 . The reciprocating directions B1 and B2 are the directions of the flow paths H parallel to the axial direction of the rotating shaft 20 .

On the surface of the movable valve plate portion 50 facing (abutting against) the inner surface 10B of the valve box, a counter-balancing cushion 51 is provided around. The counterbalance cushion 51 is formed in an annular shape corresponding to the shape of the second opening 12b. The counterbalance cushion 51 is an elastic body. The counterbalance cushion 51 can be in close contact with the inner surface 10B of the valve box which becomes the peripheral edge of the second opening portion 12b when the valve is closed.

The cushion pad 51 serves as a sealing portion including an O-ring and the like. The counterbalance cushion 51 is provided on the end face of the inner peripheral crank portion 50c facing the second opening portion 12b. The counterbalance cushion 51 is provided at the outermost peripheral position of the inner peripheral crank portion 50c.

The counterbalance cushion 51 is in contact with the inner surface 10B of the valve box which becomes the periphery of the second opening 12b when the valve is closed, and is pressed by the movable valve plate portion 50 and the inner surface 10B of the valve box. Thereby, the first space and the second space are in a separated state.

The counterbalance cushion 51 is elastically deformed when the movable valve plate portion 50 collides with the inner surface 10B of the valve box. The counterbalance cushion 51 relieves the impact when the movable valve plate portion 50 collides with the inner surface 10B of the valve box. Thereby, the generation of dust can be prevented.

The counterbalance cushion 51 , the sliding seal 52 and the valve frame seal 61 are arranged on substantially the same cylindrical surface. The counterbalance cushion 51 , the sliding seal 52 , and the valve frame seal 61 are arranged so as to overlap each other when viewed in the flow path H direction. Therefore, a back pressure elimination rate of about 100% is obtained.

An exhaust hole 53 is provided in the movable valve plate portion 50 . The exhaust hole 53 communicates the inside of the outer peripheral groove 56 with the surface of the inner peripheral crank portion 50c facing the second opening 12b at a position closer to the center O than the counterbalance cushion 51 . When the movable valve plate portion 50 collides with the valve box inner surface 10B, a closed space is formed by the movable valve plate portion 50 , the valve box inner surface 10B and the cushion pad 51 . The exhaust hole 53 removes gas from the closed space.

The valve plate energizing portion 80 is built in the energizing portion hole 58 of the movable valve plate portion 50 . The valve plate energizing portion 80 is arranged in the area where the movable valve frame portion 60 and the movable valve plate portion 50 overlap when viewed in the direction of the flow path H, that is, arranged between the inner frame plate 60d of the movable valve frame portion 60 and the movable valve plate portion 50 . The inner peripheral crank portion 50c.

A plurality of valve plate energizing portions 80 are provided at equal intervals apart from each other in the circumferential direction of the movable valve plate portion 50 . The number of locations where the plurality of valve plate energizing parts 80 are provided is preferably three or more. The plurality of valve plate energizing parts 80 are arranged in a set (set) of two. A set of valve plate energizing portions 80 are respectively disposed at positions of both ends of the diameter of the movable valve plate portion 50 passing through the center O.

Each set of the plurality of valve plate energizing portions 80 is arranged spaced apart from each other in the circumferential direction of the movable valve plate portion 50 . As a specific arrangement of the plurality of valve plate energizing portions 80, as shown in FIG. 12, it can be shown that the four valve plate energizing portions 80 are arranged at the same angular position (90°) when viewed from the center O of the valve plate 50d. constitute.

The valve plate energizing portion 80 guides (restricts) the movement of the movable valve plate portion 50 in the flow path H direction. The valve plate energizing portion 80 can change the thickness dimension of the movable valve frame portion 60 and the movable valve plate portion 50 in the direction of the flow path H. As shown in FIG. The valve plate energizing portion 80 interlocks with the reciprocating directions B1 and B2 in which the movable valve plate portion 50 moves to the movable valve frame portion 60 .

13 is an enlarged cross-sectional view along the flow path showing the valve box energizing portion, the valve frame energizing portion, and the valve plate energizing portion of the gate valve of the present embodiment. The valve plate energizing portion 80 connects the inner frame plate 60 d of the movable valve frame portion 60 and the inner peripheral crank portion 50 c of the movable valve plate portion 50 .

The valve plate energizing portion 80 includes a plate guide pin 81 , a coil spring 82 , a pressure receiving portion 83 , a cover portion 58 f , and a restricting cylinder 85 . The plate guide pin 81 is constituted by a rod-shaped body having a substantially uniform thickness. The plate guide pin 81 is formed into a bolt shape. The plate guide pin 81 penetrates through the valve plate energizing portion 80 . The plate guide pin 81 is erected in the flow path H direction. The base portion 81b of the plate guide pin 81 is fixed to the inner frame plate 60d of the movable valve frame portion 60 . The base portion 81b of the plate guide pin 81 penetrates through the inner frame plate 60d. The long axis portion of the plate guide pin 81 is erected from the inner frame plate 60d toward the energizing portion hole 58 .

The plate guide pin 81 is arranged coaxially with the energizing portion hole 58 of the inner peripheral crank portion 50c. The front end 81 a of the plate guide pin 81 is located inside the energizing portion hole 58 . At the front end 81 a of the plate guide pin 81 , a pressure receiving portion 83 having a larger diameter than the long axis portion of the plate guide pin 81 is provided. The pressure-receiving portion 83 is arranged at such a position that it can be in contact with the bottom portion 58c of the energizing portion hole 58, or is not in contact with the bottom portion 58c. The pressure receiving portion 83 is peripherally provided on the front end 81 a of the plate guide pin 81 in a flange shape. The pressure receiving portion 83 protrudes radially outward from the plate guide pin 81 .

At the long shaft portion of the plate guide pin 81 , the restricting cylinder 85 is slidably positioned radially outward. The restricting cylinder 85 is formed into a cylindrical shape coaxial with the long axis of the plate guide pin 81 . The restricting cylinder 85 restricts the sliding position and the sliding direction of the plate guide pin 81 . One end of the restricting cylinder 85 is connected to the cover portion 58f that covers the energizing portion hole 58 . The axial dimension of the restricting cylinder 85 is smaller than the axial dimension of the plate guide pin 81 . On the radially inner side of the restricting cylinder 85, a bush 85a which is in contact with the plate guide pin 81 is arranged.

The cover portion 58f is arranged so as to cover the opening of the energizing portion hole 58 . The cover portion 58f is fixed to the opening position of the energizing portion hole 58 . The cover portion 58f is provided with a hole portion 58g as a through hole. The hole portion 58g is coaxial with the restricting cylinder 85 and has the same diameter. The plate guide pin 81 is fitted into the hole portion 58g and the restriction cylinder 85 .

At the position of the cover portion 58f close to the inner frame plate 60d, a fixed cover 58f1 is further provided so as to be in contact with the cover portion 58f. The fixing cover 58f1 reinforces the fixing of the cover portion 58f to the opening of the energizing portion hole 58 . The fixing cover 58f1 is provided with a through hole larger than the hole portion 58g concentrically.

The coil spring 82 (holding spring) is an elastic member such as a coil-shaped spring. The coil spring 82 is arranged to have an energizing shaft parallel to the axis of the energizing portion hole 58 . The coil spring 82 is built in the energizing portion hole 58 of the movable valve plate portion 50 . The coil spring 82 is a double-layer coil, and has an inner coil spring 82a and an outer coil spring 82b with different diameters.

Both the inner coil spring 82 a and the outer coil spring 82 b are arranged coaxially with the plate guide pin 81 . The coil spring 82 is provided in a double layer to enhance the energizing ability, but it can also be provided in a single layer.

One end of the coil spring 82 is in contact with the cover portion 58f, and the other end is in contact with the pressure receiving portion 83 . The coil spring 82 is energized so as to press the cover portions 58f and the pressure receiving portion 83 .

The cover portion 58f and the fixed cover 58f1 are provided with exhaust holes 85b which connect the vicinity of the bottom portion 58c inside the energizing portion hole 58 with a space closer to the inner frame plate 60d than the cover portion 58f. The base portion 81b of the plate guide pin 81 and the inner frame plate 60d are provided with an exhaust hole 85c, which will be a space closer to the position of the inner frame plate 60d than the cover portion 58f, and closer to the inner surface 10A of the valve box than the inner frame plate 60d. The hollow portion 11 communicates with each other.

A sealing member 85d such as an O-ring may be provided around the restricting cylinder 85 at a position closer to the cover portion 58f than the bushing 85a.

Since the plate guide pin 81 and the restricting cylinder 85 slide in the axial direction, the axial angle between the plate guide pin 81 and the restricting cylinder 85 does not change, and the position of the plate guide pin 81 and the restricting cylinder 85 in the flow path H direction changes. Thereby, the inner frame plate 60d to which the base portion 81b of the plate guide pin 81 is fixed and the cover portion 58f to which one end of the restricting cylinder 85 is fixed are moved to each other in the flow path H direction. Thereby, the position restriction of the movable valve frame portion 60 and the movable valve plate portion 50 is guided.

The coil spring 82 presses the cover portion 58f and the pressure receiving portion 83 in the direction of being spaced apart from each other. Since the pressure receiving portion 83, the front end 81a of the plate guide pin 81, the base portion 81b of the plate guide pin 81, and the inner frame plate 60d are fixed to each other, the positional relationship with each other does not change. Therefore, the coil spring 82 always urges the lid portion 58f and the pressure-receiving portion 83 in the direction in which the lid portion 58f and the inner frame plate 60d approach the flow path H direction.

Here, when the inner frame plate 60d and the lid portion 58f move in the direction of the flow path H so as to be spaced apart, the distance between the lid portion 58f and the pressure receiving portion 83 decreases. Thereby, the coil spring 82 contracts. In this case, the pressure receiving portion 83, the front end 81a of the plate guide pin 81, the base portion 81b of the plate guide pin 81, and the inner frame plate 60d are also fixed to each other, so the positional relationship does not change.

Therefore, the retracted coil spring 82 energizes the lid portion 58f and the pressure receiving portion 83 in the direction in which the lid portion 58f and the inner frame plate 60d approach the direction of the flow path H. As shown in FIG. Thereby, the movable valve plate portion 50 and the movable valve frame portion 60 are moved to each other in the direction in which the cover portion 58f and the pressure-receiving portion 83 of the plate guide pin 81 with an enlarged diameter are separated from each other.

In the valve plate energizing portion 80, when the movable valve plate portion 50 and the movable valve frame portion 60 slide against each other, the plate guide pin 81 of the through hole portion 58g is in a state in which the direction of the axial direction is restricted by the restricting cylinder 85 (the bushing 85a). Next, relative to the cover portion 58f and the restricting cylinder 85, the plate guide pin 81 moves in the axial direction. Then, the coil spring 82 contracts in the axial direction of the plate guide pin 81 . The cover portion 58f covering the energizing portion hole 58 is energized in a direction approaching the inner frame plate 60d of the movable valve frame portion 60 by the contracted coil spring 82 .

Thereby, the direction in which the thickness dimension of the movable valve plate portion 50 and the movable valve frame portion 60 in the direction of the flow path H is reduced is not energized by the valve plate energizing portion 80 .

By the valve plate energizing portion 80 , when the movable valve plate portion 50 and the movable valve frame portion 60 slide against each other, the sliding direction can be restricted so that the sliding direction does not deviate from the reciprocating directions B1 and B2 . In addition, when the movable valve plate portion 50 and the movable valve frame portion 60 slide, the movable valve plate portion 50 and the movable valve frame portion 60 may move in parallel without changing their postures.

The valve plate energizing portion 80 and the valve frame energizing portion 90 are provided so as to have an energizing ability capable of energizing in the direction of the flow path H which is opposite to each other.

The valve frame energizing portion 90 is disposed on the circular flange portion 30c of the neutral valve portion 30, and the outer frame plate 60e of the position regulating portion of the movable valve frame portion 60 overlapping the circular flange portion 30c when viewed in the direction of the flow path H. between. The valve frame energizing part 90 energizes the movable valve frame part 60 to the center position of the flow path H direction with respect to the neutral valve part 30 .

The valve frame energizing portion 90 is built in the energizing portion hole 68 of the outer frame plate 60e. The valve frame energizing portion 90 is disposed in the region where the neutral valve portion 30 and the movable valve frame portion 60 overlap when viewed in the direction of the flow path H, that is, outside the circular flange portion 30c of the neutral valve portion 30 and the movable valve frame portion 60 Frame plate 60e.

A plurality of valve frame energizing portions 90 are provided at equal intervals apart from each other in the circumferential direction of the circular flange portion 30c. Preferably, the positions where the valve frame energizing parts 90 are provided correspond to three or more positions of the valve plate energizing parts 80 . The plurality of valve frame energizing parts 90 are arranged in a set of two. A set of valve frame energizing portions 90 are respectively disposed at positions of the movable valve frame portion 60 at both ends of the diameter passing through the center O.

Each set of a plurality of valve frame energizing parts 90 is arranged spaced apart from each other in the circumferential direction of the movable valve frame part 60 . As a specific arrangement of the plurality of valve frame energizing parts 90 , FIG. 12 shows a configuration in which four valve frame energizing parts 90 are arranged at the same angular position (90°) as viewed from the center O of the movable valve frame part 60 .

Viewed from the center O of the valve plate 50d, the angular position of the valve frame energizing portion 90 in the circumferential direction of the circular flange portion 30c and the angular position of the valve plate energizing portion 80 in the circumferential direction of the movable valve plate portion 50 are configured to overlap. The valve frame energizing portion 90 and the valve plate energizing portion 80 are disposed on the same straight line passing through the center O of the valve plate 50d. The valve frame energizing portion 90 is disposed on a straight line passing through the center O, and is further away from the center O of the valve plate 50d than the valve plate energizing portion 80 .

The spool energizing portion 90 guides (restricts) the movement of the neutral valve portion 30 and the movable spool portion 60 in the direction of the flow path H. As shown in FIG. The valve frame energizing portion 90 can change the thickness dimension of the neutral valve portion 30 and the movable valve frame portion 60 in the direction of the flow path H. As shown in FIG. The valve frame energizing portion 90 reciprocates the movable valve frame portion 60 in the reciprocating directions B1 and B2 with respect to the circular flange portion 30c.

The valve frame energizing part 90 connects the circular flange part 30 c of the neutral valve part 30 and the outer frame plate 60 e of the movable valve frame part 60 . The energizing portion hole 68 is provided in the outer frame plate 60e of the movable valve frame portion 60 . The energizing portion hole 68 is formed in a cylindrical shape having an axis in the flow path H direction. The energizing portion hole 68 is provided so as to penetrate through the outer frame plate 60e of the movable valve frame portion 60 .

In the energizing portion hole 68, the opening of the surface of the outer frame plate 60e facing the second opening portion 12b is closed by the pressure receiving portion 93 as described later. In the energizing portion hole 68, the opening at the position close to the first opening portion 12a in the direction of the flow path H is not blocked. That is, the energizing portion hole 68 opens in the same direction as the energizing portion hole 58 of the movable valve plate portion 50 . The energizing portion hole 68 is provided at a radially inner side of the movable valve frame portion 60 of the outer frame plate 60e at a position close to the outer peripheral crank portion 60c.

The valve frame energizing portion 90 includes a frame guide pin 91 , a frame coil spring 92 , and a restricting cylinder 95 . The frame guide pin 91 is constituted by a rod-shaped body having a substantially uniform thickness. The frame guide pin 91 penetrates the inside of the valve frame energizing portion 90 . The frame guide pin 91 is erected in the flow path H direction. The frame guide pin 91 is fixed to the outer frame plate 60e of the movable valve frame portion 60 . The frame guide pins 91 are arranged coaxially with the energizing portion holes 68 of the outer frame plate 60e. The base portion 91b of the frame guide pin 91 is provided with a pressure receiving portion 93 whose diameter is larger than that of the long axis portion of the frame guide pin 91 .

The pressure receiving portion 93 is fixed to the position of the energizing portion hole 68 facing the second opening portion 12b in the flow path H direction. The pressure receiving portion 93 closes the opening of the energizing portion hole 68 toward the second opening portion 12b in the flow path H direction. The pressure receiving portion 93 forms the bottom of the energizing portion hole 68 . That is, the base portion 91 b of the frame guide pin 91 forms the bottom portion of the energizing portion hole 68 as the pressure receiving portion 93 . The pressure receiving portion 93 can also be screwed with the opening of the energizing portion hole 68 . In this case, the frame guide pin 91 may be formed into a bolt shape.

The pressure receiving portion 93 is exposed on the surface of the movable valve frame portion 60 facing the valve box energizing portion 70 described later. The base portion 91b of the frame guide pin 91 is fixed to the outer frame plate 60e of the movable valve frame portion 60 .

The long shaft portion of the frame guide pin 91 is erected toward the circular flange portion 30c from the energizing portion hole 68 of the outer frame plate 60e. In the circular flange part 30c, the recessed part 30cm is provided in the surface which opposes the 1st opening part 12a. The through hole 30g which penetrates the circular flange part 30c in the flow path H direction is provided in the center position of the recessed part 30cm. The frame guide pin 91 is slidably penetrated through the through hole 30g at a position close to the front end 91a.

Therefore, the front end 91a of the frame guide pin 91 penetrates the circular flange portion 30c. The front end 91a of the frame guide pin 91 may be located in the recessed portion 30cm provided in the circular flange portion 30c. The front end 91a of the frame guide pin 91 has an axial length in the direction of the flow path H so as not to be closer to the inner surface 10A of the valve box than the valve frame sealing gasket 61 . A neutral spacer 94 is provided around the front end 91 a of the frame guide pin 91 .

The neutral spacer 94 is installed at the position of the front end 91a of the frame guide pin 91 by the C-ring 94a. The C-ring 94a of the neutral spacer 94 may be located inside the recess 30cm.

At the long shaft portion located in the axial center of the frame guide pin 91 , a restricting cylinder 95 slidable relative to the frame guide pin 91 is located radially outside. The restricting cylinder 95 has a cylindrical shape coaxial with the long axis of the frame guide pin 91 . The restricting cylinder 95 restricts the sliding position and the sliding direction of the frame guide pin 91 . The axial dimension of the restricting cylinder 95 is smaller than the axial dimension of the frame guide pin 91 . On the radially inner side of the restricting cylinder 95, a bush 95a which is in contact with the frame guide pin 91 is arranged.

At one end of the restricting cylinder 95, a flange portion 95f is circumferentially provided. The flange part 95f is fixedly connected to the position which becomes the back surface of the recessed part 30cm of the circular flange part 30c. The restriction cylinder 95 is fixed to the surface of the circular flange part 30c which opposes the outer frame plate 60e by the flange part 95f.

The flange portion 95f and the restricting cylinder 95 have through holes 95g extending in the flow path H direction. The through-hole 95g communicates with the flange portion 95f and the restricting cylinder 95 . The through hole 95g is provided at a coaxial position with the through hole 30g. Like the through hole 30g, the position of the frame guide pin 91 close to the front end 91a is slidably passed through the through hole 95g.

The frame coil spring 92 constitutes the valve frame energizing portion 90 as an auxiliary spring. The frame coil spring 92 is accommodated inside the energizing portion hole 68 . The frame coil spring 92 is coaxially arranged at a position around the frame guide pin 91 . The frame coil spring 92 is an elastic member such as a spring, and is arranged to have an energizing shaft parallel to the axis of the energizing portion hole 68 .

One end of the frame coil spring 92 is in contact with the pressure receiving portion 93 around the base portion 91 b of the frame guide pin 91 . The other end of the frame coil spring 92 is in contact with the flange portion 95f that forms the periphery of the through hole 95g. The frame coil spring 92 urges the flange portion 95f around the base portion 91b of the frame guide pin 91 and the flange portion 95f around the through hole 95g in opposite directions in the direction of the flow path H, respectively. The frame coil spring 92 may be constituted by, for example, a double-layer coil spring, so as to enhance the energizing ability.

In the valve frame energizing portion 90, when the movable valve frame portion 60 moves relative to the neutral valve portion 30, the frame guide pin 91 moves in the axial direction of the through hole 95g of the restricting cylinder 95 fixed to the circular flange portion 30c. At this time, the frame guide pin 91 slides with respect to the bush 95a. Then, the front end 91a of the frame guide pin 91 protrudes from the recessed portion 30cm toward the valve box inner surface 10A.

As a result, the flange portion 95f of the restricting cylinder 95 and the bottom portion of the energizing portion hole 68, that is, the pressure receiving portion 93, approach the flow path H direction. At this time, the frame coil spring 92 contracts. Due to the energizing force of the contracted frame coil spring 92, the pressure receiving portion 93 and the flange portion 95f are pressed in a direction away from each other.

That is, the pressure receiving portion 93 at the bottom of the energizing portion hole 68 and the flange portion 95f on the back surface of the circular flange portion 30c move in position so as to move away from each other in the flow path H direction. Thereby, the movable valve frame portion 60 moves in position with respect to the neutral valve portion 30 .

In this way, the thickness dimension of the flow path H direction of the neutral valve portion 30 and the movable valve frame portion 60 can be changed by the valve frame energizing portion 90 . The spool energizing portion 90 moves the movable spool portion 60 in the reciprocating directions B1 and B2 while the neutral valve portion 30 does not move in the direction of the flow path H without positional movement.

At this time, in the valve frame energizing portion 90, the restricting cylinder 95 restricts the frame guide pin so that the axial direction thereof is not inclined. When the movable valve frame portion 60 moves relative to the neutral valve portion 30 in the direction of the flow path H, the valve frame energizing portion 90 restricts the moving direction of the movable valve frame portion 60 so as not to deviate from the reciprocating directions B1 and B2. . Therefore, the movable valve frame portion 60 moves in parallel without changing the posture of the movable valve frame portion 60 with respect to the neutral valve portion 30 .

At the same time, the movable valve frame portion 60 may restrict the neutral valve portion 30 from moving in a direction other than the flow path H direction. Specifically, the movable valve frame portion 60 fitted in the circular portion 30a can be prevented from moving in the circumferential direction. In this way, during the swinging action of the valve body 5 , the holding state of the movable valve frame portion 60 with respect to the neutral valve portion 30 can be stabilized, and the operation stability of the gate valve 100 can be improved.

Furthermore, when the movable valve frame portion 60 moves relative to the neutral valve portion 30 in the direction of the flow path H, the frame guide pins 91 and the plate guide pins 81 are parallel to each other, and the valve plate energizing portion 80 enables the movable valve to move. The plate portion 50 moves in position following the reciprocating directions B1 and B2. In addition, the case where the differential pressure in the direction of the flow path H is applied to the valve plate 50d is not limited to this.

Here, the positional movement of the movable valve frame portion 60 in the direction of the flow path H is caused by the valve plate energizing portion 80 and the valve frame energizing portion 90 in the neutral valve portion 30 , the movable valve plate portion 50 and the movable valve frame portion. When the 60s slide against each other, they can be restricted in such a way that the sliding directions do not deviate from the reciprocating directions B1, B2. In addition, when the neutral valve portion 30, the movable valve plate portion 50 and the movable valve frame portion 60 slide, the neutral valve portion 30, the movable valve plate portion 50 and the movable valve frame portion 60 can also move in parallel relative to each other without changing their postures.

A plurality of valve box energizing parts 70 are built in the valve box 10 . The valve box energizing portion 70 constitutes a lifting mechanism for pressing the movable valve frame portion 60 in the direction toward the sealing surface. The valve box energizing portion 70 is arranged at a position where the movable valve frame portion 60 can be energized in a direction approaching the first opening portion 12a in the direction of the flow path H, that is, a position around the second opening portion 12b. The valve box energizing portion 70 is the valve box energizing portion 70 of the first to second embodiments.

In the valve box energizing portion 70 of the present embodiment, the telescopic rod 72 is freely extendable in the direction of the flow path H from the fixing portion 71 toward the direction approaching the first opening portion 12a. The valve box energizing portion 70 is provided with a multi-stage sealing structure so that the oil of the working fluid does not leak to the vacuum portion 11 on the vacuum side when it is driven by hydraulic pressure. An annular sealing member (O-ring) 77f is provided around the telescopic rod 72 , for example, at a position close to the movable valve frame portion 60 . The telescopic rod 72 is expandable and contractible in a state where the fixed portion 71 is sealed with the boundary which becomes the vacuum side hollow portion 11 .

The valve box energizing portion 70 has a function of moving the movable valve frame portion 60 toward the first opening portion 12a. The valve box energizing portion 70 abuts the movable valve frame portion 60 against the valve box inner surface 10A, presses the movable valve frame portion 60 against the valve box inner surface 10A, and closes the flow path H (valve closing operation).

The valve box energizing portion 70 is arranged in the valve box 10 at a position where it can be pressed without changing the posture of the movable valve frame portion 60 . Specifically, the valve box energizing portion 70 is configured such that the axis of the telescopic rod 72 is aligned with the axis of the frame guide pin 91 of the valve frame energizing portion 90 .

The front end portion 72 a of the telescopic rod 72 is arranged so that the portion pressing the valve frame energizing portion 90 becomes the base portion 91 b of the frame guide pin 91 . That is, the front end portion 72 a of the telescopic rod 72 is arranged so that the portion pressing the valve frame energizing portion 90 becomes the pressure receiving portion 93 of the frame guide pin 91 .

A plurality of valve box energizing parts 70 are provided spaced apart from each other along the circumference of the second opening part 12b. A plurality of valve box energizing portions 70 are provided at equal intervals apart from each other in the circumferential direction of the contour of the second opening portion 12b.

Preferably, the positions where the valve box energizing portions 70 are provided correspond to three or more positions of the valve plate energizing portions 90 . The plurality of valve box energy parts 70 are arranged in a set of two. A set of valve-box energizing parts 70 are respectively arranged at positions on the radially outer side of the second opening 12b which become both ends of the diameter (straight line) passing through the center O. A set of valve box energizing portions 70 are disposed at positions of the movable valve frame portion 60 that pass through both ends of the diameter of the center O, similarly to the valve frame energizing portions 90 .

Each set of the plurality of valve box energizing portions 70 is arranged to be spaced apart from each other in the circumferential direction of the contour of the second opening portion 12b. As a specific arrangement of the plurality of valve box energizing parts 70 , FIG. 12 shows a configuration in which four valve box energizing parts 70 are arranged at the same angular position (90°) when viewed from the center O of the second opening 12b.

Viewed from the center of the second opening portion 12b, the angular position of the valve box energizing portion 70 in the circumferential direction of the circular flange portion 30c and the angle of the valve plate energizing portion 80 and the valve frame energizing portion 90 in the circumferential direction of the movable valve plate portion 50 The positions are formed in such a way that they overlap.

The valve box energizing portion 70 , the valve frame energizing portion 90 and the valve plate energizing portion 80 are arranged on the same straight line passing through the center O of the valve plate 50d. Like the valve frame energizing portion 90 , the valve box energizing portion 70 is disposed on a straight line passing through the center O, and is further away from the center O of the valve plate 50d than the valve plate energizing portion 80 .

When the valve box energizing portion 70 is in the closed valve state ( FIGS. 14 to 17 ) from the flow path communication state ( FIGS. 11 and 13 ) at the valve opening shielding position, the telescopic rod 72 is stretched by hydraulic pressure.

At this time, the valve box energizing portion 70 energizes the movable valve frame portion 60 with which the front end portion 72a abuts. Thereby, the movable valve frame part 60 moves to the 1st opening part 12a in the flow path H direction. The valve frame gasket 61 is in close contact with the inner surface 10A of the valve box around the first opening 12a.

In the plurality of valve box energizing parts 70 , the extension actions of the telescopic rods 72 can be performed substantially simultaneously.

Here, the front end portion 72 a of the telescopic rod 72 is in contact with the pressure receiving portion 93 at the position where the axis of the telescopic rod 72 is extended. Since the pressure receiving portion 93 is fixed at the bottom position of the energizing portion hole 68, the pressing force of the telescopic rod 72 is transmitted to the outer peripheral crank portion 60c through the pressure receiving portion 93 and the outer frame plate 60e.

At this time, the position restriction of the movable valve frame portion 60 with respect to the neutral valve portion 30 is performed by the frame guide pin 91 and the restriction cylinder 95 . The axis of the frame guide pin 91 is the same as the axis of the telescopic rod 72 . Accordingly, when the movable valve frame portion 60 moves in the direction of the flow path H relative to the neutral valve portion 30, the frame guide pin 91 in the moving direction of the movable valve frame portion 60 is aligned with the position of the telescopic rod 72, and the frame is aligned. The guide pin 91 acts on the pressing force of the telescopic rod 72 .

Hereinafter, the operation of the gate valve 100 of the present embodiment will be described in detail.

First, in the gate valve 100 of the present embodiment, it is considered that the valve body 5 is in a state in which the hollow portion 11 of the flow passage H is not provided, as shown by the broken line in FIG. 9 . At this time, the movable valve portion 40 is not in contact with any one of the valve box inner surface 10A and the valve box inner surface 10B.

In this state, the rotating shaft 20 is rotated in the direction indicated by the reference numeral R01 (the direction intersecting with the direction of the flow path H) by the rotating shaft driving unit 200 . Then, the neutral valve portion 30 and the movable valve portion 40 are rotationally moved in the swing motion in the direction R01. By this rotation, the valve body 5 moves from the retracted position to the valve opening shielding position at the position facing the first opening 12a as shown by the solid line in FIG. 9 .

When the valve body 5 is located at the valve opening shielding position, the valve box energizing portion 70 extends the telescopic rod 72 in the direction of approaching the second opening portion 12a in the direction of the flow path H. As shown in FIG. The telescopic rod 72 is in contact with the movable valve frame portion 60 and presses the movable valve frame portion 60 . The movable valve frame portion 60 moves in a direction approaching the first opening portion 12a.

The movable valve frame portion 60 is in contact with the valve box inner surface 10A by the valve box energizing portion 70 . At this time, the valve frame gasket 61 is in close contact with the valve box inner surface 10A around the first opening 12a. Thereby, as shown in FIGS. 14 to 17 , the flow path H is closed (valve closing operation).

Conversely, when the flow path H is closed, the valve box energizing portion 70 retracts the telescopic rod 72 . Thereby, the energizing ability from the telescopic rod 72 to the movable valve frame portion 60 is reduced. Then, the movable valve frame portion 60 is pulled away from the inner surface of the valve box 10 by the energizing ability of the valve frame energizing portion 90 . The airtight state between the movable valve frame portion 60 and the valve box inner surface 10A is released.

Thereby, as shown in FIGS. 10 to 13 , the flow path H is opened (release operation). The valve closing action and the releasing action of the movable valve portion 40 are performed by the mechanical contact action of the valve box energizing portion 70 and the mechanical separation action of the valve frame energizing portion 90 .

After the release operation, the rotating shaft 20 is rotated in the direction indicated by the reference numeral R02 by the rotating shaft driving unit 200 . Then, the movable valve portion 40 moves from the valve opening shielding position to the retracted position (retraction operation). The valve opening operation for setting the movable valve portion 40 in the valve opening state is performed by the releasing operation and the retracting operation. In a series of operations (valve closing operation, release operation, retraction operation), the valve plate energizing part 80 causes the movable valve frame part 60 and the movable valve plate part 50 to interlock.

[The valve body is in the position of retractable action (FREE: free)] 10 to 12 show a state in which the movable valve portion 40 (the movable valve frame portion 60 and the movable valve plate portion 50 ) at the valve opening shielding position is not in contact with any of the valve box inner surfaces 10A and 10B of the valve box 10 . This state is referred to as the state of the valve body being free.

When the valve body is free, the telescopic rod 72 of the valve box energizing portion 70 is in a retracted state. At this time, the telescopic rod 72 does not protrude from the inner surface 10B of the valve box, and is buried closer to the fixing portion 71 than the inner surface 10A of the valve box. That is, the valve box energizing portion 70 is not in contact with the valve body 5 . Moreover, the frame guide pin 91 does not protrude from the recessed part 30cm.

Fig. 14 is an enlarged cross-sectional view along the flow path showing the peripheral portion of the gate valve of the present embodiment. 15 is an enlarged cross-sectional view along the flow path showing the valve box energizing portion, the valve frame energizing portion, and the valve plate energizing portion of the gate valve of the present embodiment. Next, the valve box energizing portion 70 is driven from the free state of the valve body. Then, the front end portion 72a of the telescopic rod 72 comes into contact with the lower surface 60sb of the movable valve frame portion 60 as shown by the arrow F1 in FIGS. 14 and 15 . At this time, the front end portion 72 a of the telescopic rod 72 is in contact with the pressure receiving portion 93 .

Thereby, the movable valve frame portion 60 moves toward the valve box inner surface 10A. The movable valve frame portion 60 is further moved, and the state in which the valve frame packing 61 is in contact with the inner surface 10A of the valve box is the state of the valve closed position (valve closed state). Moreover, the frame guide pin 91 protrudes from the recessed part 30cm.

At this time, the movable valve plate portion 50 is moved in the same direction as the movable valve frame portion 60 by the valve plate energizing portion 80 . At the same time, the movable valve plate portion 50 and the movable valve frame portion 60 maintain a sliding sealing state via the sliding sealing gasket 52 . When the valve body is free, the valve box energizing portion 70 makes the movable valve frame portion 60 contact the valve box inner surface 10A of the valve box 10 to close the flow path H (valve closing action).

[The valve body is in the closed position (positive pressure or no differential pressure)] 14 and 15 show a state in which the flow path H is closed by the valve closing operation. This state is referred to as a positive pressure/no differential pressure valve closed state. The so-called positive pressure/no differential pressure valve closing state refers to the state in which the valve body 5 is in contact with one inner surface of the valve box 10 and is not in contact with the other inner surface. That is, in the valve-closed state of positive pressure/no differential pressure, the movable valve frame portion 60 of the valve body 5 is in contact with the inner surface 10A of the valve box around the first opening portion 12a. At the same time, the valve body 5 does not come into contact with the inner surface 10B of the valve box located around the second opening 12b.

In the valve-closed state with positive pressure/no pressure difference, in the valve box energizing portion 70 , the telescopic rod 72 is maintained in a state of extending toward the movable valve frame portion 60 . That is, the state where the front-end|tip part 72a and the lower surface 60sb of the movable valve frame part 60 are contact|abutted is maintained. In addition, the state in which the valve frame gasket 61 is in contact with the valve box inner surface 10A around the first opening 12a of the valve box 10 is maintained. Moreover, the state in which the frame guide pin 91 protrudes from the recessed part 30cm is maintained.

[The valve body is in the closed state when the valve body is in the reverse pressure position] Fig. 16 is an enlarged cross-sectional view along the flow path showing the peripheral portion of the gate valve of the present embodiment. 17 is an enlarged cross-sectional view along the flow path showing the valve box energizing portion, the valve frame energizing portion, and the valve plate energizing portion of the gate valve of the present embodiment. 16 and 17 show the state in which the flow path H is closed under the reverse pressure state. This state is referred to as the valve closed state of the reverse pressure. The valve-closed state of the reverse pressure refers to a state in which the valve body 5 is in contact with the inner surfaces 10A and 10B of the valve box in both directions of the flow path H. That is, the valve closing state of the reverse pressure is a state in which the movable valve frame portion 60 of the valve body 5 is kept in contact with the inner surface 10A of the valve box around the first opening portion 12a, and the movable valve plate portion 50 of the valve body 5 is also in contact with the inner surface 10A of the valve box around the first opening portion 12a. 2. The state in which the inner surface 10B of the valve box around the opening 12b is in contact. Here, the so-called back pressure refers to the pressure applied to the valve body in the direction from the valve closing state to the valve opening state.

When the telescopic rod 72 is extended, when the valve body 5 receives the reverse pressure, the movable valve plate portion 50 faces the reciprocating direction B2 relative to the movable valve frame portion 60 by the valve plate energizing portion 80 ( FIG. 16 , FIG. 17 ). ) slide to move. A sealed state is maintained between the movable valve frame portion 60 and the movable valve plate portion 50 via the sliding seal packing 52 . Thereby, the movable valve plate portion 50 collides with the valve box inner surface 10B around the second opening portion 12b. At this time, the counterbalance cushion 51 relieves the impact caused by the collision of the movable valve plate portion 50 . The mechanism that enables the inner surface 10B of the valve box (the body on the back side) of the valve box 10 to receive the force of the valve body 5 is the back pressure eliminating mechanism.

Furthermore, the valve closing state of self-reverse pressure is set to positive pressure/no differential pressure. In this state, the movable valve frame portion 60 is pulled away from the inner surface of the valve box 10 by the energizing ability of the frame coil spring 92 of the valve frame energizing portion 90, so that the movable valve frame portion 60 is retracted, thereby opening the flow. Road H (release action).

In the gate valve 100 of the present embodiment, when the neutral valve portion 30 , the movable valve plate portion 50 and the movable valve frame portion 60 slide against each other, the positions of each other can be controlled correctly. That is, the position regulation of the neutral valve portion 30 and the movable valve frame portion 60 can be performed accurately. At the same time, the position restriction of the movable valve frame portion 60 and the movable valve plate portion 50 can be performed correctly. In particular, the sliding directions of the neutral valve portion 30 , the movable valve plate portion 50 , and the movable valve frame portion 60 are restricted so as not to deviate from the reciprocating directions B1 and B2 .

In addition, when the neutral valve portion 30 , the movable valve plate portion 50 and the movable valve frame portion 60 slide, the neutral valve portion 30 , the movable valve plate portion 50 and the movable valve frame portion 60 may be relatively parallel to each other without changing their postures. move.

Furthermore, when the valve body 5 performs the swinging motion, the neutral valve portion 30 , the movable valve plate portion 50 and the movable valve frame portion 60 are not changed in their postures, and the swinging motion can be performed while maintaining an integral positional relationship with each other. .

In the gate valve 100 of the present embodiment, when the telescopic rod 72 presses the movable valve frame portion 60 , the position of the neutral valve portion 30 by the movable valve frame portion 60 is restricted by the frame guide pin 91 and the restriction cylinder 95 . By having the valve box energizing portion 70 , the valve plate energizing portion 80 and the valve frame energizing portion 90 configured as described above, when the movable valve frame portion 60 moves in the direction of the flow path H with respect to the neutral valve portion 30 , the movable valve frame portion 60 can be moved. In the moving direction of the valve frame portion 60 , the position of the frame guide pin 91 is consistent with the position of the telescopic rod 72 , and the pressing force of the telescopic rod 72 acts on the frame guide pin 91 .

Therefore, during the movement of the movable valve frame portion 60 relative to the neutral valve portion 30 by the valve box energizing portion 70 , the posture of the movable valve frame portion 60 relative to the neutral valve portion 30 can be very stable.

At the same time, when the movable valve frame portion 60 pressed by the telescopic rod 72 moves in the direction of the flow path H with respect to the neutral valve portion 30 , the moving direction of the movable valve frame portion 60 is consistent with the action direction of the pressing force from the telescopic rod 72 . Moreover, with respect to the moving direction of the movable valve frame portion 60 , the pressing force from the telescopic rod 72 acts on the movable valve frame portion 60 at a position on the same straight line. Thereby, the moment can be suppressed from being generated in the movable valve frame portion 60 . Therefore, the occurrence of deformation of the movable valve frame portion 60 can be suppressed. Thereby, the sealing performance of the movable valve frame portion 60 can be improved, and the operation reliability of the movable valve frame portion 60 can be improved.

In the present embodiment, the valve box energizing portion 70 , the valve plate energizing portion 80 , and the valve frame energizing portion 90 are provided in two sets of four each, but other configurations may be employed. Specifically, it can also be set as three groups of 6 each, or four groups of 8 each, etc., which can be set in other groups according to the diameter of the gate valve 100 . In addition, the valve box energizing portion 70 , the valve frame energizing portion 90 and the valve plate energizing portion 80 may be arranged in different numbers of sets. In this case, it is preferable that the valve box energizing portion 70 and the valve frame energizing portion 90 are also provided with the same number of sets.

In this embodiment, the same effects as those of the above-described embodiments are exhibited.

In the present invention, the respective configurations of the above-described embodiments can be appropriately selected and combined. For example, the concave portion 935 may be formed in the connecting flange 911 or the chamber wall portion 912 , and the sealing grooves 931 a and 933 a may be formed on the surface 10 a of the valve box 10 . Alternatively, sealing grooves 931 a and 933 a may be formed on the connecting flange 911 or the chamber wall 912 , and a recess 935 may be formed on the surface 10 a of the valve box 10 . In the same way as the first connecting portion 930 and the second connecting portion 940, in addition to the inner sealing region 941, an outer sealing region is also provided. When connecting to the second chamber 920, the two types of connection methods can also be used.

5: valve body 10: Valve box 10a: Surface 10b: Surface 10A: Inner surface of valve box 10B: Inner surface of valve box 11: Hollow part 12a: 1st opening 12b: Second opening 20: Rotary axis 30: Neutral valve department 30a: round part 30b: Rotary part 30c: Round flange part 30cm: Recess 30g: through hole 40: Movable valve part 50: Movable valve plate part 50b: Sliding surface 50c: Inner peripheral crank part 50d: valve plate 51: Counterbalance Cushion 52: Sliding seal gasket 52m: slot 54: Movable valve part (movable valve plate part) 58: Empowerment hole 58c: Bottom 58f: Cover 58f1: Fixed cover 58g: hole 59: Week Slot 59a: Inner peripheral wall 59b: Peripheral wall 59c: Bottom 59d: Bend 59e: Bend 60: Movable valve frame 60b: Sliding surface 60c: Outer peripheral crank part 60d: inner frame plate 60e: Outer frame plate 60sb: lower surface 61: Valve frame sealing gasket 63: Valve frame part 68: Empowerment hole 70: Valve box enabling part (pressing the cylinder) 71: Fixed part 72: Telescopic rod 72a: Front end 77f: Sealing member 80: Valve plate energizing part (retaining spring) 81: Plate guide pin 81a: Front end 81b: base 82: Coil spring 82a: Inner coil spring 82b: Outer coil spring 83: Pressurized part 85: Limiting cylinder 85a: Bushing 85b: exhaust hole 85c: exhaust hole 85d: Sealing member 90: Valve frame energizing part (auxiliary spring) 91: Frame guide pin 91a: Front end 91b: base 92: Box Coil Spring 93: Pressurized part 94: Neutral Spacer 95: Limiting cylinder 95a: Bushing 95f: Flange 95g: through hole 100: Gate valve 200: Rotary shaft drive part 700: Hydraulic drive part 910: Chamber 1 911: Connection flange 911b: Through hole 912: Chamber Wall 912a: Chamber opening 912b: Through hole 914: Surface 915: Connection barrel 920: Chamber 2 921: Connection flange 921b: Through hole 924: Surface 930: 1st connection 931: Inner sealing area 931a: Seal groove 931b: Sealing components 932: Connecting components 932a: Fastening holes 933: Outer sealing area 933a: Seal groove 933b: Sealing components 934: Metal Contact Area 935: Recess 940: 2nd connection 941: Inner sealing area 941a: Seal groove 941b: Sealing member 942: Connecting components 942a: Fastening holes 944: Metal Contact Area 945: Recess B1: Reciprocating direction B2: Reciprocating direction H: flow path II-II: Line IV-IV: Line O: Center R01: Direction R02: Direction

FIG. 1 is a view showing a connection method of the gate valve according to the first embodiment of the present invention, and is a cross-sectional view along the direction of the flow path. Fig. 2 is a view showing another connection method of the gate valve according to the first embodiment of the present invention, and is a cross-sectional view along the direction of the flow path. Fig. 3 is an enlarged cross-sectional view showing the first connection portion of the gate valve according to the first embodiment of the present invention. Fig. 4 is an enlarged cross-sectional view showing the second connection portion of the gate valve according to the first embodiment of the present invention. Fig. 5 is an enlarged cross-sectional view showing the first connection portion of the gate valve according to the second embodiment of the present invention. 6 is an enlarged cross-sectional view showing a second connection portion of the gate valve according to the second embodiment of the present invention. Fig. 7 is a perspective view showing the first connection portion of the gate valve according to the second embodiment of the present invention. 8 is a perspective view showing a second connection portion of the gate valve according to the second embodiment of the present invention. Fig. 9 is a cross-sectional view of the gate valve according to the third embodiment of the present invention, which is orthogonal to the flow path, and shows the retracted position of the valve body and the valve opening shielding position. 10 is a cross-sectional view of the gate valve according to the third embodiment of the present invention along the flow path, showing the valve opening shielding position of the valve body. FIG. 11 is an enlarged cross-sectional view showing the edge of the valve body of FIG. 10 along the flow path. Fig. 12 is a top view of the valve body of the gate valve according to the third embodiment of the present invention viewed in a direction perpendicular to the flow path. 13 is an enlarged cross-sectional view along the flow path showing the valve box energizing portion, the valve frame energizing portion, and the valve plate energizing portion of FIG. 12 . 14 is an enlarged cross-sectional view along the flow path showing the edge of the valve body of the gate valve according to the third embodiment of the present invention, showing the valve closed state by the movable valve frame. 15 is an enlarged cross-sectional view along the flow path showing the valve box energizing portion, the valve frame energizing portion, and the valve plate energizing portion of FIG. 14 . 16 is an enlarged cross-sectional view along the flow path showing the edge of the valve body of the gate valve according to the third embodiment of the present invention, and shows the valve closed state in which the back pressure is eliminated by the movable valve plate portion. 17 is an enlarged cross-sectional view of the valve box energizing portion, the valve frame energizing portion, and the valve plate energizing portion of FIG. 16 along the flow path.

5: valve body

10: Valve box

10a: Surface

11: Hollow part

12a: 1st opening

911: Connection flange

911b: Through hole

912: Chamber Wall

912a: Chamber opening

912b: Through hole

914: Surface

915: Connection barrel

930: 1st connection

931: Inner sealing area

931a: Seal groove

931b: Sealing components

932: Connecting components

932a: Fastening holes

933: Outer sealing area

933a: Seal groove

933b: Sealing components

934: Metal Contact Area

935: Recess

Claims (11)

A gate valve is characterized by comprising: a hollow part, a valve box having a first opening part and a second opening part which are arranged to face each other across the hollow part and become a communicating flow path; a valve body, which can be Open and close the flow path; a movable valve part, which can change the position in the flow path direction, and is provided in the valve body; a first connection part, which is provided in the valve box to seal the first opening part connected to the first chamber; and a second connecting portion, which is provided in the valve box and is connected to the second chamber in a manner of sealing the second opening; and the first connecting portion includes: an inner sealing area , which is arranged along the circumference of the first opening, which can seal the surface of the valve box and the surface of the first chamber; a plurality of fastening holes are located closer to the radial direction of the first opening than the inner sealing area. an outer side; and an outer sealing area, which is located on the radially outer side of the first opening with respect to the fastening hole; and through the outer sealing area, the connecting member fastened to the fastening hole is exposed to the first cavity In the connection method on the vacuum side of the chamber, the valve box and the first chamber are sealed, and in the connection method in which the connection member is exposed on the atmosphere side of the first chamber through the inner sealing region, the above-mentioned connection method is performed. The valve box is sealed with the first chamber, and the connection member can correspond to the connection method and the exposed side exposed on the vacuum side of the first chamber. Due to any one of the connection methods on the atmospheric side, a sealing groove is formed in the inner sealing area and the outer sealing area, the sealing groove is formed on the surface of the valve box, and either the inner sealing area or the outer sealing area is formed. The sealing groove is provided with a sealing member, and in the first connecting portion, on the surface of the valve box, the radial direction of the first opening portion is higher than the inner side of the outer sealing region, and the radial direction of the first opening portion is higher than the radial direction of the first opening portion. Compared with the outer side of the outer sealing region, it is recessed toward the direction close to the hollow portion. The gate valve of claim 1, wherein in the first connecting portion, the surface of the valve box and the surface of the first chamber are in contact with each other on the outer side of the outer sealing region in the radial direction of the first opening. The gate valve according to claim 1 or 2, wherein in the first connecting portion, the surface of the valve box and the surface of the first chamber are spaced apart from each other on the inner side of the outer sealing region in the radial direction of the first opening. The gate valve according to claim 1 or 2, wherein in the first connecting portion, in the radial direction of the first opening portion, the inner side of the outer sealing region is formed between the surface of the valve box and the surface of the first chamber. There is a gap to the edge of the first opening. A gate valve is characterized by comprising: a hollow part, A valve box, which has a first opening and a second opening which are arranged so as to face each other across the hollow portion and form a communicating flow path; a valve body that can open and close the flow path; a rotating shaft that The valve body is rotatably supported between the retracted position in the hollow part and the valve opening shielding position, and has an axis extending in the direction of the flow path; a rotating shaft driving part rotates the rotating shaft to rotatably drive the valve body A movable valve part, which can be changed in a position in the direction of the flow path, and is provided in the valve body; a valve box energizing part, which is provided in the valve box, so that the movable valve part of the valve opening shielding position is in the flow direction. The hydraulic drive part supplies the hydraulic pressure to the valve box energizing part to drive; the first connection part is provided in the valve box and seals the first opening part. connected to the first chamber; and a second connection portion, which is provided in the valve box and is connected to the second chamber in such a manner as to seal the second opening portion; and the first connection portion includes: a connection member, which A plurality of are arranged along the circumference of the above-mentioned first opening; and an inner sealing area and an outer sealing area, which are located in the radial direction of the above-mentioned first opening, are arranged on both sides of the above-mentioned connecting member and along the circumference of the above-mentioned first opening. , the surface of the valve box and the surface of the first chamber can be sealed, and the valve box and the first chamber can be connected through the outer sealing area in the connection mode in which the connecting member is exposed on the vacuum side of the first chamber. The sealing of the 1st chamber is performed by the above-mentioned inner sealing area, in the connection method in which the above-mentioned connecting member is exposed on the atmospheric side of the above-mentioned first chamber, the above-mentioned valve box and the above-mentioned first chamber are sealed, The connection member may correspond to any one of a connection method exposed to the vacuum side of the first chamber and a connection method exposed to the atmosphere side, and a sealing groove is formed in the inner sealing region and the outer sealing region, and the sealing groove is formed. Formed on the surface of the valve box, a sealing member is arranged in any one of the seal grooves in the inner sealing region and the outer sealing region, and in the first connecting portion, on the surface of the valve box, the first opening is located on the surface of the valve box. In the radial direction, the inner side of the outer sealing region is recessed in a direction closer to the hollow portion than the outer side of the outer sealing region in the radial direction of the first opening. The gate valve of claim 5, wherein in the first connecting portion, the surface of the valve box and the surface of the first chamber are in contact with each other on the outer side of the outer sealing region in the radial direction of the first opening. The gate valve of claim 5 or 6, wherein in the first connecting portion, the surface of the valve box and the surface of the first chamber are spaced apart from each other in the radial direction of the first opening portion inside the outer sealing region. The gate valve according to claim 5 or 6, wherein in the first connecting portion, in the radial direction of the first opening portion, the inner side of the outer sealing region is formed between the surface of the valve box and the surface of the first chamber. There is a gap to the edge of the first opening. The gate valve of claim 5 or 6, wherein In the said 1st connection part, the said connection member is exposed on the vacuum side of the said 1st chamber, and the sealing member is arrange|positioned in the said sealing groove of the said outer sealing area. The gate valve according to claim 5 or 6, wherein in the first connecting portion, the connecting member is exposed on the atmosphere side of the first chamber, and a sealing member is disposed in the sealing groove in the inner sealing region. The gate valve according to claim 5 or 6, wherein the valve box energizing portion is disposed around the second opening.

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