CN112303265A

CN112303265A - Gate valve

Info

Publication number: CN112303265A
Application number: CN202010703772.7A
Authority: CN
Inventors: 和田慎一; 井上英晃; 迫田圣也; 石田智也; 猿渡治郎; 铎木干也; 照井敬晶; 和出拓也; 都留俊介
Original assignee: Ulvac Inc
Current assignee: Ulvac Inc
Priority date: 2019-07-23
Filing date: 2020-07-21
Publication date: 2021-02-02
Anticipated expiration: 2040-07-21
Also published as: CN112303265B; JP6745953B1; JP2021017967A; KR20210011889A; TW202118958A; TWI758791B

Abstract

A gate valve of the present invention includes a valve housing, a valve body, a rotary shaft driving section, a movable valve section, a valve housing urging section, a hydraulic driving section, a first connecting section, and a second connecting section. The first connection portion has: a plurality of connecting members provided along the periphery of the first opening portion; and an inner seal region and an outer seal region provided along a periphery of the first opening portion at positions on both sides of the connection member in a radial direction of the first opening portion and capable of sealing a surface of the valve housing and a surface of the first chamber.

Description

Gate valve

Technical Field

The present invention relates to a gate valve, and more particularly, to a technique suitable for use in a pendulum valve.

Background

A gate valve is provided in a vacuum apparatus or the like to block a flow path between two spaces of different vacuum degrees, such as between a chamber and a pipe, between a pipe and a pipe, or between a pipe and a pump or the like, and to connect the two spaces that are blocked. Various types of gate valves are known as such gate valves.

As such a valve, a pendulum gate valve is known as follows: when the valve is closed, a valve body for closing the valve is rotated so as to block the flow passage, and a hydraulic drive type telescopic actuator is provided as an urging portion for pressing the valve body to the valve housing opening.

The present inventors have proposed a patent application relating to such a gate valve (patent document 1).

The gate valve can seal the space on the upstream side and the space on the downstream side of the flow path blocked by the blocking operation, and is connected to the upstream side and the downstream side of the flow path. The gate valve is connected to a member outside the valve box opening.

In this case, the gate valve is connected to the chamber having the flow path by using a flange for a vacuum apparatus defined by japanese industrial standards described in non-patent document 1.

Patent document 1: japanese patent No. 6358727

Non-patent document 1: japanese Industrial Standard JIS _ B _2290-

However, in recent years, in order to save space of a vacuum apparatus, it is desired to directly connect a gate valve to a chamber having a flow path. Further, connection based on the japanese industrial standard described in non-patent document 1 is still performed. Therefore, a gate valve structure is required to be applicable to both connection methods.

In addition, in the manufacture of Flat Panel Displays (FPDs) and the like, the size of a substrate tends to increase, and in vacuum apparatuses for manufacturing flat panel displays, the size of apparatuses also increases significantly. Therefore, miniaturization of each component constituting the vacuum apparatus is required. Further, since the space outside the chamber is reduced as the apparatus is increased in size, it is difficult to fasten the connection structure by the fastening member in the connection structure based on the japanese industrial standard described in non-patent document 1. Therefore, it is desirable to directly connect the gate valve with the chamber having the flow passage.

In addition, a relatively long time is required for manufacturing the gate valve. On the other hand, the specifications of the gate valve are required to be changed in accordance with the design of the vacuum apparatus. In particular, although the connection structure based on the japanese industrial standard described in non-patent document 1 is adopted as the initial design of the vacuum apparatus, it is not possible to deny the possibility of changing the design of the vacuum apparatus such as direct connection to a chamber having a flow path in order to save space. Therefore, as the gate valve structure, two connection methods (a connection structure using a flange and a structure in which the gate valve is directly connected to the chamber) are required.

Disclosure of Invention

The present invention has been made in view of the above circumstances, and it is intended to achieve the following object.

1. Provided is a gate valve which can cope with two connection methods.

2. To save space of a device.

A gate valve according to an aspect of the present invention includes: a valve box having a hollow portion, and a first opening portion and a second opening portion which are provided opposite to each other with the hollow portion therebetween and form a communicating flow passage; a valve body capable of opening and closing the flow passage; a movable valve portion provided in the valve body so as to be capable of changing a position in the flow passage direction; a first connecting portion provided in the valve box and connected to the first chamber so as to close the first opening; and a second connection portion provided in the valve box and connected to the second chamber so as to seal the second opening portion. The first connection portion has: an inner sealing region provided along a periphery of the first opening portion and capable of sealing a surface of the valve housing and a surface of the first chamber; a plurality of fastening holes located further to a radial outer side of the first opening portion than the inner seal region; and an outer seal region located radially outward of the first opening portion with respect to the fastening hole. In a connection manner in which a connection member fastened to the fastening hole is exposed toward a vacuum side of the first chamber, sealing of the valve housing from the first chamber is performed by the outer sealing region. In a connection mode in which the connection member is exposed to the atmosphere side of the first chamber, the valve housing and the first chamber are sealed by the inner seal region. The connecting member may be applied to any one of a connection mode in which the connecting member is exposed to a vacuum side of the first chamber and a connection mode in which the connecting member is exposed to an atmosphere side. A seal groove is formed in the inner seal region and the outer seal region. The sealing groove is formed on a surface of the valve housing. A seal member is disposed in the seal groove in either one of the inner seal region and the outer seal region. The first connection portion is recessed more toward the hollow portion in a surface of the valve housing at a position further inward than the outer seal region in a radial direction of the first opening portion than at a position further outward than the outer seal region in the radial direction of the first opening portion. Thereby, the above-described problems are solved.

A gate valve according to an aspect of the present invention includes: a valve box having a hollow portion, and a first opening portion and a second opening portion which are provided opposite to each other with the hollow portion therebetween and form a communicating flow passage; a valve body capable of opening and closing the flow passage; a rotating shaft rotatably supporting the valve body between a retracted position in the hollow portion and a valve opening shielding position, and having an axis extending in a flow path direction; a rotary shaft driving unit configured to rotate the rotary shaft to rotationally drive the valve body; a movable valve portion provided in the valve body so as to be capable of changing a position in the flow passage direction; a valve housing urging portion that is provided in the valve housing and closes the flow passage by moving the movable valve portion in the flow passage direction at the valve opening shielding position; a hydraulic drive unit that drives the valve housing biasing unit by supplying a hydraulic pressure to the valve housing biasing unit; a first connecting portion provided in the valve box and connected to the first chamber so as to close the first opening; and a second connection portion provided in the valve box and connected to the second chamber so as to seal the second opening portion. The first connection portion has: a plurality of connecting members provided along the periphery of the first opening; and an inner seal region and an outer seal region which are located at both side positions of the connection member in a radial direction of the first opening portion and are provided along a periphery of the first opening portion and which can seal a surface of the valve housing and a surface of the first chamber. In a connection mode in which the connection member is exposed toward the vacuum side of the first chamber, the valve housing and the first chamber are sealed by the outer sealing region. In a connection mode in which the connection member is exposed to the atmosphere side of the first chamber, the valve housing and the first chamber are sealed by the inner seal region. The connecting member may be applied to any one of a connection mode in which the connecting member is exposed to a vacuum side of the first chamber and a connection mode in which the connecting member is exposed to an atmosphere side. A seal groove is formed in the inner seal region and the outer seal region. The sealing groove is formed on a surface of the valve housing. A seal member is disposed in the seal groove in either one of the inner seal region and the outer seal region. The first connection portion is recessed more toward the hollow portion in a surface of the valve housing at a position further inward than the outer seal region in a radial direction of the first opening portion than at a position further outward than the outer seal region in the radial direction of the first opening portion. Thereby, the above-described problems are solved.

In the gate valve according to one aspect of the present invention, in the first connection portion, a surface of the valve housing and a surface of the first chamber may contact each other at a position radially outside the outer seal region in the first opening portion.

In the gate valve according to one aspect of the present invention, in the first connection portion, a surface of the valve housing and a surface of the first chamber may be spaced apart from each other at a position radially inward of the outer seal region in the first opening portion.

In the gate valve according to one aspect of the present invention, in the first connection portion, a gap may be formed between a surface of the valve housing and a surface of the first chamber from a position further inside than the outer seal region in a radial direction of the first opening portion to an edge portion of the first opening portion.

In the gate valve according to one aspect of the present invention, a seal groove may be formed in the inner seal region and the outer seal region, and a seal member may be disposed in the seal groove in any one of the inner seal region and the outer seal region.

In the gate valve according to one aspect of the present invention, the seal groove may be formed on a surface of the valve housing, and the first connection portion may be recessed in a direction toward the hollow portion, at a position on the surface of the valve housing on an inner side than the outer seal region in a radial direction of the first opening portion, as compared with a position on the outer side than the outer seal region in the radial direction of the first opening portion.

In the gate valve according to an aspect of the present invention, the seal groove may be formed in a surface of the first chamber, and the first connection portion may protrude in a direction toward the hollow portion at an outer side than the outer seal region in a radial direction of the first opening portion in the surface of the first chamber than at an inner side than the outer seal region in the radial direction of the first opening portion.

In the gate valve according to one aspect of the present invention, the connection member may be exposed to a vacuum side of the first chamber in the first connection portion, and a seal member may be disposed in the seal groove of the outer seal region.

In the gate valve according to one aspect of the present invention, the connection member may be exposed to the atmosphere side of the first chamber in the first connection portion, and a seal member may be disposed in the seal groove in the inner seal region.

In the gate valve according to one aspect of the present invention, the valve housing biasing portion may be disposed around the second opening portion.

A gate valve according to an aspect of the present invention includes: a valve box having a hollow portion, and a first opening portion and a second opening portion which are provided opposite to each other with the hollow portion therebetween and form a communicating flow passage; a valve body capable of opening and closing the flow passage; a rotating shaft rotatably supporting the valve body between a retracted position in the hollow portion and a valve opening shielding position, and having an axis extending in a flow path direction; a rotary shaft driving unit configured to rotate the rotary shaft to rotationally drive the valve body; a movable valve portion provided in the valve body so as to be capable of changing a position in the flow passage direction; a valve housing urging portion that is provided in the valve housing and closes the flow passage by moving the movable valve portion in the flow passage direction at the valve opening shielding position; a hydraulic drive unit that drives the valve housing biasing unit by supplying a hydraulic pressure to the valve housing biasing unit; a first connecting portion provided in the valve box and connected to the first chamber so as to close the first opening; and a second connection portion provided in the valve box and connected to the second chamber so as to seal the second opening portion. The first connection portion has: a plurality of connecting members provided along the periphery of the first opening; and an inner seal region and an outer seal region which are located at both side positions of the connection member in a radial direction of the first opening portion and are provided along a periphery of the first opening portion and which can seal a surface of the valve housing and a surface of the first chamber.

As a result, it is possible to provide a gate valve that can be used in both of the connection method (connection structure) in which the connection member is exposed to the vacuum side of the first chamber and the connection method (connection structure) in which the connection member is exposed to the atmosphere side of the first chamber. In this case, the inner seal region and the outer seal region can be switched according to the connection method to seal the first opening.

Specifically, in the connection mode in which the connection member is exposed toward the vacuum side of the first chamber, the valve box and the first chamber can be sealed by the outer seal region located outside the through hole through which the connection member penetrates. In the connection mode in which the connection member is exposed to the atmosphere side of the first chamber, the valve box and the first chamber can be connected by the inner seal region located inside the through hole through which the connection member passes. According to this configuration, even if any connection method is adopted when the gate valve is attached to the vacuum apparatus, the same gate valve can be easily attached to the vacuum apparatus. Therefore, since the gate valves applicable to the two connection systems can be manufactured, it is not necessary to separately manufacture gate valves having two specifications corresponding to the two connection systems, and it is not necessary to be responsible for stock of the gate valves. The stock of gate valves having a long manufacturing period can be reduced.

In the gate valve according to one aspect of the present invention, in the first connection portion, a surface of the valve housing and a surface of the first chamber contact each other at a position radially outward of the outer seal region in the first opening portion.

Thereby, the gate valve and the first chamber can be sealed in a region closer to the first opening portion than the metal contact region with respect to a region where metal, which is a surface of the valve housing and a surface of the first chamber, contacts each other.

In the gate valve according to one aspect of the present invention, in the first connection portion, a surface of the valve housing and a surface of the first chamber are spaced apart from each other on a radially inner side of the first opening portion with respect to the outer seal region.

This prevents the valve housing and the first chamber from sliding on each other, inside the outer seal region on the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from becoming a particle generation source.

In the gate valve according to one aspect of the present invention, in the first connection portion, a gap is formed between a surface of the valve housing and a surface of the first chamber from a position further inside than the outer seal region in a radial direction of the first opening portion to an edge portion of the first opening portion.

This prevents the valve housing and the first chamber from sliding on each other, further to the inside than the outer seal region on the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from becoming a particle generation source.

In the gate valve according to one aspect of the present invention, a seal groove is formed in the inner seal region and the outer seal region, and a seal member is disposed in the seal groove in either one of the inner seal region and the outer seal region.

Thus, by fastening the valve housing and the first chamber with the connecting member, the sealing member provided around the first opening portion can be pressed against the surface corresponding to the entire circumference of the sealing member to seal the valve housing and the first chamber.

In the gate valve according to one aspect of the present invention, the seal groove is formed in a surface of the valve housing, and the first connection portion is recessed in a direction toward the hollow portion, in a surface of the valve housing, more inward than the outer seal region in a radial direction of the first opening portion than more outward than the outer seal region in the radial direction of the first opening portion.

In this way, a gap is formed between the surface of the valve box and the surface of the first chamber from the radially inner side of the first opening portion to the edge portion of the first opening portion, and the valve box and the first chamber can be prevented from sliding against each other at the radially inner side of the outer sealing region, which is the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from becoming a particle generation source.

In the gate valve according to the aspect of the present invention, the seal groove is formed in the surface of the first chamber, and the first connection portion protrudes in a direction toward the hollow portion, in the surface of the first chamber, on an outer side than the outer seal region in a radial direction of the first opening portion, as compared to on an inner side than the outer seal region in the radial direction of the first opening portion.

Thus, a gap is formed between the surface of the valve housing and the surface of the first chamber from the radially inner side of the first opening portion to the edge portion of the first opening portion in the radial direction of the first opening portion, and the valve housing and the first chamber can be prevented from sliding against each other at the radially inner side of the outer sealing region which is the vacuum side. Therefore, the sealing portion between the gate valve and the first chamber can be prevented from becoming a particle generation source.

In the gate valve according to one aspect of the present invention, the connection member is exposed to a vacuum side of the first chamber in the first connection portion, and a seal member is disposed in the seal groove of the outer seal region.

Thus, when the valve housing and the first chamber are attached and fixed by a connecting member such as a fastening bolt, the connecting member can be fastened from the vacuum side, which is the inside of the first chamber, to seal the gate valve and the first chamber. Further, by providing the through hole through which the coupling member such as a fastening bolt passes on the vacuum side of the seal member of the seal groove, the inside of the through hole can be prevented from communicating with the atmosphere side, and the sealed state can be maintained. In this case, the connection member may be an exhaust bolt.

In the gate valve according to one aspect of the present invention, the first connection portion has the connection member exposed to the atmosphere of the first chamber, and a seal member is disposed in the seal groove in the inner seal region.

Thus, when the valve housing and the first chamber are attached and fixed by the connecting member such as the fastening bolt, the connecting member can be fastened from the atmosphere side which is the outside of the first chamber to seal the gate valve and the first chamber. In this case, the connection member may be a general fastening bolt instead of the exhaust bolt.

In the gate valve according to one aspect of the present invention, the valve box biasing portion is disposed around the second opening portion.

This can maintain the state in which the hydraulically driven valve box biasing unit is driven at a position away from the chamber in the heated state, and can maintain the driving reliability of the valve box biasing unit.

According to the present invention, the following effects can be obtained: the present invention can be used in both cases when the gate valve is connected to the first chamber and when the gate valve is mounted to the vacuum apparatus, the gate valve can be mounted without replacing the gate valve with a gate valve having a different structure, regardless of whether the connection mode is a connection mode in which the connection member is exposed to the vacuum side of the first chamber or a connection mode in which the connection member is exposed to the atmosphere side of the first chamber.

Drawings

Fig. 1 is a view showing one connection mode of a gate valve according to a first embodiment of the present invention, and is a sectional view taken along a flow path.

Fig. 2 is a view showing another connection mode of the gate valve according to the first embodiment of the present invention, and is a sectional view taken along a flow path.

Fig. 3 is an enlarged cross-sectional view showing a first connection portion in the gate valve according to the first embodiment of the present invention.

Fig. 4 is an enlarged sectional view showing a second connecting portion in the gate valve according to the first embodiment of the present invention.

Fig. 5 is an enlarged sectional view showing a first connection portion in a gate valve according to a second embodiment of the present invention.

Fig. 6 is an enlarged sectional view showing a second connecting portion in the gate valve according to the second embodiment of the present invention.

Fig. 7 is a perspective view showing a first connection portion in a gate valve according to a second embodiment of the present invention.

Fig. 8 is a perspective view showing a second connecting portion in the gate valve according to the second embodiment of the present invention.

Fig. 9 is a cross-sectional view of a gate valve according to a third embodiment of the present invention, which is orthogonal to a flow path and shows a retracted position of a valve body and a valve opening blocking position.

Fig. 10 is a sectional view along a flow path showing a gate valve according to a third embodiment of the present invention, showing a valve opening shielding position of a valve body.

FIG. 11 is an enlarged cross-sectional view along the flow path showing the edge portion of the valve body of FIG. 10.

Fig. 12 is a plan view of a valve body in a gate valve according to a third embodiment of the present invention, as viewed from a direction orthogonal to a flow channel.

Fig. 13 is an enlarged sectional view along a flow passage showing the valve housing biasing portion, the valve frame biasing portion, and the valve sheet biasing portion in fig. 12.

Fig. 14 is an enlarged sectional view along a flow path showing an edge portion of a valve body in a gate valve according to a third embodiment of the present invention, and shows a valve closed state by a movable valve frame.

Fig. 15 is an enlarged sectional view of the valve housing biasing member, the valve frame biasing member, and the valve sheet biasing member in fig. 14 taken along a flow passage.

Fig. 16 is an enlarged cross-sectional view along a flow path showing an edge portion of a valve body in a gate valve according to a third embodiment of the present invention, and shows a valve closed state in which back pressure generated by a movable valve sheet portion is cancelled.

Fig. 17 is an enlarged sectional view along a flow passage showing the valve housing biasing portion, the valve frame biasing portion, and the valve sheet biasing portion in fig. 16.

Detailed Description

Next, a gate valve according to a first embodiment of the present invention will be described with reference to the drawings.

Fig. 1 is a view showing one connection mode of a gate valve according to the present embodiment, and is a sectional view taken along a flow path.

Fig. 2 is a sectional view along the flow path showing another connection mode of the gate valve according to the present embodiment. In fig. 1 and 2, reference numeral 100 denotes a gate valve.

As shown in fig. 1 and 2, the gate valve 100 of the present embodiment is a pendulum type slide valve that can be normally closed by rebound. The gate valve 100 of the present embodiment includes a valve housing 10, a hollow portion 11, a valve body 5, a rotary shaft 20, a rotary shaft driving portion 200, and a hydraulic driving portion 700.

The valve body 5 is disposed in the hollow portion 11 of the valve housing 10 and can open and close the flow passage H.

The rotary shaft 20 has an axis extending in the direction of the flow passage H.

The rotary shaft 20 supports the valve body 5 to be rotatable between a retreat position (valve opening position) and a valve opening shielding position (slide preparation position) in the hollow portion 11.

The rotary shaft driving unit 200 can rotationally drive the rotary shaft 20.

The rotary shaft driving unit 200 can perform reciprocating rotation operation of the valve body 5.

The valve body 5 is configured by the neutral valve portion 30 connected to the rotating shaft 20, the valve frame portion 63 connected to the neutral valve portion 30, and the movable valve portion 54 (movable valve portion) connected to the valve frame portion 63.

The neutral valve portion 30 is fixed to the rotary shaft 20.

The neutral valve portion 30 is maintained at the central position in the flow passage H direction of the hollow portion 11.

The valve frame portion 63 is located around the movable valve portion 54. The valve frame portion 63 is fixed to the neutral valve portion 30. The valve frame portion 63 is maintained at the center position of the hollow portion 11 in the retracted position, the valve opening shielding position, and the valve closing position together with the neutral valve portion 30.

The movable valve portion 54 is slidable in the flow passage H direction with respect to the valve frame portion 63.

The movable valve portion 54 is capable of changing the position in the flow passage H direction with respect to the valve frame portion 63 in the valve opening shielding position and the valve closing position.

The movable valve portion 54 is maintained at the center of the hollow portion 11 at the retracted position and between the retracted position and the valve opening shielding position.

The movable valve portion 54 is provided with a valve sheet gasket which is in close contact with the inner surface of the valve housing 10 located around the first opening 12 a.

The valve housing urging portion 70 (pressing cylinder) is embedded in the valve housing 10. A plurality of the valve housing urging portions 70 are arranged along the circumferential direction of the movable valve portion 54.

As shown in fig. 1 and 2, the valve housing urging portion 70 includes an expansion link 72 (movable portion), an urging member (pressing spring), and a fixed portion 71.

The movable portion 72 (telescopic rod) of the valve box biasing portion 70 can be extended and contracted into the chamber Ch in the vacuum atmosphere.

The valve housing urging portion 70 is arranged so that the urging member can urge the movable portion 72 in a direction away from the movable valve portion 54.

In the valve housing urging portion 70, the movable portion 72, which is retracted by the urging force of the urging member, is housed in the fixed portion 71 away from the movable valve portion 54.

The valve housing urging portion 70 is driven by the hydraulic pressure (non-compressible fluid) supplied from the hydraulic driving portion 700.

Although not shown, the valve frame portion 63 or the movable valve portion 54 includes a biasing portion (neutral biasing portion) that biases the movable valve portion 54 toward a central position in the flow passage H direction of the hollow portion 11 with respect to the valve frame portion 63.

Further, the gate valve 100 has the following mechanism: this mechanism maintains the movable valve portion 54 at the center of the hollow portion 11 inside the valve housing 10 when the housing biasing portion 70 is not operated. The valve box biasing portion 70 and the biasing portion (neutral biasing portion) of the valve frame portion 63 can adjust the thickness dimensions of the valve frame portion 63 and the movable valve portion 54 in the flow passage H direction between the valve opening shielding position and the valve closing position.

When the rotary shaft 20 rotates in the direction intersecting the flow path H direction, the neutral valve portion 30 fixed to the rotary shaft 20 also rotates integrally with the rotation. Further, since the movable valve portion 54 can slide only in the thickness direction with respect to the neutral valve portion 30, the movable valve portion 54 and the neutral valve portion 30 rotate integrally.

The rotation shaft driving unit 200 rotates the neutral valve portion 30, and the movable valve portion 54 moves in a pendulum motion from a retracted position located in the hollow portion 11 where the flow passage H is not provided to a valve opening shielding position where the flow passage H, which is a position corresponding to the first opening 12a, is shielded.

The fixed portion 71 of the valve housing urging portion 70 is built in the valve housing 10. The valve housing urging portion 70 is arranged so that the urging member can urge the movable portion 72 in a direction away from the movable valve portion 54.

The valve housing urging unit 70 receives the supplied hydraulic pressure (rebound) from the hydraulic drive unit 700 from the retracted storage state, and thereby extends the movable unit 72.

At this time, the valve housing urging portion 70 moves the movable valve portion 54 toward the first opening portion 12a via the movable portion 72, and brings the movable valve portion 54 into contact with the inner surface of the valve housing 10. Further, the valve housing urging portion 70 is brought into a closed state by pressing the movable valve portion 54 to the inner surface of the valve housing 10, and closes the flow passage H (valve closing operation).

In the valve housing urging portion 70, the movable portion 72 retracted by the urging member is separated from the movable valve portion 54 and is housed in the fixed portion 71 built in the valve housing 10.

Thereby, the movable valve portion 54 is pulled away from the inner surface of the valve housing 10 and retracted. The movable valve portion 54 is positioned at the center of the hollow portion 11 in the flow path H direction, thereby opening the flow path H (releasing operation).

After the releasing operation, if the rotary shaft 20 is rotationally driven (retreated) by the rotary shaft driving unit 20, the neutral valve unit 30 and the movable valve unit 54 are also rotated integrally with the rotation.

The gate valve 100 performs a valve opening operation in which the movable valve portion 54 is retracted from the valve opening blocking position to the retracted position and is in a valve open state by the release operation and the retraction operation. The rotation shaft driving unit 200 is configured to be capable of performing a normally closed operation.

In the present embodiment, as shown in fig. 1 and 2, the gate valve 100 is disposed between the first chamber 910 and the second chamber 920 that form the flow path H. The first chamber 910 configures a first space. The second chamber 920 configures a second space.

The valve housing 10 has a plate shape with a predetermined thickness. A hollow portion 11 is formed inside the valve housing 10. A first opening 12a and a second opening 12b communicating with the hollow portion 11 are formed on both surfaces of the valve housing 10.

The first opening 12a is connected to the first chamber 910. The second opening 12b is connected to the second chamber 920. Here, for convenience, the flow passage H is set to a direction from the first chamber 910 toward the second chamber 920.

The first opening 12a and the second opening 12b are arranged to be orthogonal to the flow passage H direction. The first opening 12a and the second opening 12b are arranged in parallel with each other. The first opening 12a and the second opening 12b have substantially the same outline shape. The first opening portion 12a and the second opening portion 12b may have a circular contour. The first opening 12a and the second opening 12b are disposed at substantially the same position so as to overlap each other when viewed in the flow path H direction.

In the gate valve 100, a first connection portion 930 connected to the first chamber 910 so as to seal the first opening 12a is provided in the valve housing 10.

In the gate valve 100, a second connection portion 940 connected to the second chamber 920 so as to seal the second opening 12b is provided in the valve housing 10.

The gate valve 100 can be used for both the connection method shown in fig. 1 and the connection method shown in fig. 2 by the first connection portion 930.

For convenience, the connection shown in fig. 1 is referred to as JIS (japanese industrial standard) type. This type is directed to a first chamber 910, connecting the valve housing 10 and the first chamber 910 by a connecting barrel 915 having a connecting flange 911. This type is a connection mode in which a connection member 932 described later is exposed to the atmosphere side of the first chamber 910.

For convenience, the connection shown in fig. 2 is referred to as a direct type. This type is directed to the first chamber 910, connecting the valve housing 10 directly to the chamber wall 912 of the first chamber 910. This type is a connection mode in which a connection member 932 described later is exposed to the vacuum side of the first chamber 910.

Fig. 3 is an enlarged sectional view showing a first connection portion of the gate valve according to the present embodiment in a direction along the flow path.

As shown in fig. 1 to 3, the first connection part 930 of the present embodiment includes an inner seal region 931, a connection member 932, an outer seal region 933, and a metal contact region 934 along the periphery of the first opening part 12 a. The inner seal region 931, the connection member 932, the outer seal region 933, and the metal contact region 934 are concentrically arranged along the periphery of the first opening portion 12a toward the outside in the radial direction of the first opening portion 12 a.

In the first connection part 930 of the present embodiment, an inner sealing region 931, an outer sealing region 933, a metal contact region 934, and a plurality of fastening holes are formed on a surface 10a of the valve housing 10 opposite to the first chamber 910. In addition, in the first connection portion 930 of the present embodiment, a plurality of fastening holes 932a for fastening the connection member 932 are formed in the surface 10a of the valve housing 10 facing the first chamber 910.

The connecting member 932 is, for example, a fastening bolt.

Alternatively, the connecting member 932 is an exhaust bolt.

The plurality of fastening holes 932a are located further to the radially outer side of the first opening portion 12a than the inner seal region 931. The outer seal region 933 is located further radially outward of the first opening portion 12a than the fastening hole 932 a.

In particular, in a connection manner in which the connection part 932 fastened to the fastening hole 932a is exposed toward the vacuum side of the first chamber 910, the sealing of the valve housing 10 from the first chamber 910 is performed by the outer sealing region 933.

In the connection mode in which the connection member 932 is exposed to the atmosphere side of the first chamber 910, the valve housing 10 is sealed from the first chamber 910 by the inner seal area 931.

The connection member 932 may be applied to any one of a connection method exposed to the vacuum side of the first chamber 910 and a connection method exposed to the atmosphere side.

A seal groove 931a is formed in the inner seal region 931. A seal groove 933a is formed in the outer seal region 933. The

seal grooves

931a, 933a are formed in the surface 10a of the valve housing 10, and

seal members

931b, 933b are disposed in either one of the

seal grooves

931a, 933a of the inner seal region 931 and the outer seal region 933.

In the first connecting portion 930, the surface 10a of the valve housing 10 is recessed toward the hollow portion 11 at a position radially inward of the outer seal region 933 of the first opening portion 12a than at a position radially outward of the outer seal region 933 of the first opening portion 12 a.

The inner seal area 931 is arranged along the contour of the first opening portion 12 a. The inner seal area 931 is disposed concentrically with the first opening 12 a. The inner sealing area 931 is annularly provided in a size larger than the edge portion of the first opening portion 12 a. The inner seal area 931 is provided around the entire circumference of the first opening portion 12 a. A seal groove 931a is formed in the inner seal region 931.

The seal groove 931a is formed on a surface 10a (the recess 935) of the valve housing 10 opposite to the first chamber 910, and is recessed toward the hollow 11 in the flow passage H direction. In the seal groove 931a, an O-ring, for example, is housed in a seal member 931b which is an elastic body. The O-ring may be pressed in contact with the surface 914 of the connecting flange 911 to seal between the surface 10a of the valve housing 10 and the connecting flange 911.

A plurality of fastening holes 932a are formed in the first opening portion 12a radially outward of the inner seal region 931. A plurality of fastening holes 932a are arranged concentrically with the first opening 12a and spaced apart from each other. The fastening holes 932a are arranged on the same circumference having a diameter dimension larger than the inner sealing area 931. The fastening holes 932a are configured circumferentially away from the outer edge profile of the inner sealing area 931.

An outer seal region 933 is disposed radially outward of the first opening 12a with respect to the circumference of the fastening hole 932 a.

The outer sealing region 933 is disposed concentrically with the first opening 12 a. The outer seal region 933 is arranged along the contour of the first opening portion 12 a. The outer seal region 933 is provided over the entire circumference of the first opening 12 a. A seal groove 933a is formed in the outer seal region 933.

The seal groove 933a is formed on a surface 10a (concave portion 935) of the valve housing 10 opposite to the first chamber 910, and is recessed toward the flow passage H direction. The seal groove 933a is formed to have a depth dimension substantially equal to that of the seal groove 931a and a diameter dimension (width dimension) substantially equal to that of the seal groove 931 a. In the sealing groove 933a, an O-ring is accommodated as a sealing member 933b, for example. The O-ring may be pressed in contact with the surface 914 of the connecting flange 911 to seal between the surface 10a of the valve housing 10 and the connecting flange 911.

In addition, the depth and width of the sealing groove 933a may be greater or smaller than those of the sealing groove 931 a.

In particular, when the JIS type connection method described later is a main method, the depth and width of the seal groove 931a may be larger than those of the seal groove 933 a.

In addition, when the direct connection method described later is mainly used, the depth and width of the seal groove 933a may be larger than those of the seal groove 931 a.

In addition, when the dual-purpose system, which is similarly applicable to any connection system, is a main system, the depth and width of the seal groove 933a are preferably set to be substantially equal to those of the seal groove 931 a.

A metal contact region 934 is provided on the first opening portion 12a radially outward of the outer seal region 933.

The metal contact regions 934 are in contact with the surface 914 of the connection flange 911 opposite the valve housing 10 over the entire area of the metal contact regions 934. The metal contact regions 934 may have a defined width dimension, and may be, for example, regions that are contoured to the outer edge of the connection flange 911. The metal contact region 934 is not limited in size as long as it can fix the valve housing 10 and the connection flange 911 to support the gate valve 100 to the first chamber 910.

In the first connection portion 930 of the present embodiment, a recess 935 is formed from the outer seal region 933 toward the radial inner side of the first opening 12 a.

That is, the surface 10a of the valve housing 10 that is closer to the first opening portion 12a than the metal contact region 934 and faces the first chamber 910 is a recessed portion 935.

In other words, the recess 935 is formed between the metal contact region 934 and the formation surface of the first opening 12a (the surface indicated by reference numeral 12a in fig. 3 and 5). The recessed portion 935 is formed to surround the periphery of the first opening portion 12a when viewed in the flow path H direction, and the recessed portion 935 may also be referred to as a recessed portion forming region. That is, a concave portion forming region is formed between the metal contact region 934 and the formation surface of the first opening portion 12 a.

The recess 935 has an equal depth dimension throughout the entire area of the recess 935.

In the recess 935, the seal member 931b accommodated in the seal groove 931a or the seal member 933b accommodated in the seal groove 933a is pressed in a state of being in contact with the surface 914 of the connection flange 911. The recess 935 has a depth dimension capable of sealing between the valve housing 10 and the surface 914 of the connection flange 911 in a state where the

seal members

931b, 933b are pressed.

In the first connection portion 930 of the present embodiment, a gap is formed between the surface 914 of the connection flange 911 and the surface 10a of the valve housing 10 at the edge portion from the outer seal region 933 to the first opening portion 12a of the entire region of the recess portion 935.

Inside the recess 935, the surface 914 of the connecting flange 911 does not contact the surface 10a of the valve housing 10.

Fig. 4 is an enlarged sectional view showing a second connection portion of the gate valve according to the present embodiment in a direction along the flow path.

In the gate valve 100 of the present embodiment, as shown in fig. 1, 2, and 4, an inner seal region 941 and a metal contact region 944 are formed on a surface 10b of the valve housing 10 facing the second chamber 920 in the second connection portion 940. In the second connection part 940 of the present embodiment, a plurality of fastening holes 942a for fastening the connecting member 942 are formed in the surface 10b of the valve housing 10 facing the second chamber 920.

The connecting member 942 is, for example, a fastening bolt.

The second connection part 940 connects the valve housing 10 to the second chamber 920 having the connection flange 921.

A connection flange 921 is provided at an end portion of the second chamber 920 near the gate valve 100.

The connecting flange 921 has a surface 924 opposite the surface 10b of the valve housing 10. The connecting flange 921 is disposed parallel to the surface 10b and the second opening portion 12b of the valve housing 10.

The connecting flange 921 has the same inner peripheral sectional shape as the second opening portion 12b when viewed in the flow path H direction.

The connection flange 921 is provided with a through hole 921b through which the connection member 942 passes.

The through hole 921b fits the connecting flange 921 and the gate valve 100 to each other by the connecting member 942. A plurality of through holes 921b are formed so as to be spaced apart from each other in the circumferential direction of the connecting flange 921. The plurality of through holes 921b are arranged on the same circumference with respect to the center of the flow path H.

The inner seal region 941 is disposed along the contour of the second opening 12 b. The inner seal region 941 is disposed concentrically with the second opening 12 b. The inner seal region 941 is annularly provided in a larger size than the edge portion of the second opening portion 12 b. The inner seal region 941 is disposed over the entire circumference of the second opening portion 12 b. A seal groove 941a is formed in the inner seal region 941.

The inner sealing region 941 corresponds to the inner sealing region 931 in the first connection part 930. That is, in the case where the first opening portion 12a and the second opening portion 12b have substantially the same outline shape, the inner seal region 941 and the inner seal region 931 may be disposed to overlap when viewed in the flow path H direction.

The seal groove 941a is formed on a surface 10b (concave portion 945) of the valve housing 10 opposite to the second chamber 920, and is recessed toward the hollow portion 11 in the flow passage H direction. A seal member 941b, for example, an O-ring, which is an elastic body is accommodated in the seal groove 941 a. The O-ring may be compressed in contact with the surface 924 of the attachment flange 921 to seal between the surface 10b of the valve housing 10 and the attachment flange 921.

A plurality of fastening holes 942a are formed in the second opening portion 12b radially outward of the inner seal region 941. The plurality of fastening holes 942a are arranged concentrically with the second opening portion 12b and spaced apart from each other. The fastening holes 942a are arranged on the same circumference with a diameter dimension larger than that of the inner sealing region 941. The circumference of the fastening hole 942a is configured away from the outer edge profile of the inner sealing region 941.

In the case where the first opening portion 12a and the second opening portion 12b have substantially the same outline shape, the circumference in which the fastening holes 942a are arranged and the circumference in which the fastening holes 932a are arranged may be arranged to overlap when viewed in the flow path H direction.

A metal contact region 944 is provided radially outward of the inner seal region 941 in the second opening 12 b.

The metal contact region 944 makes contact with the surface 924 of the connection flange 921 opposite the valve housing 10 in the entire region of the metal contact region 944. The metal contact area 944 may have a defined width dimension, and may be, for example, an area that is equal to the outer edge profile of the connection flange 921.

The size of the metal contact area 944 is not limited as long as it can fix the valve housing 10 and the connection flange 921 to support the gate valve 100 and the second chamber 920.

A fastening hole 942a is formed in the metal contact area 944. That is, around the fastening hole 942a, the surface 10b of the valve housing 10 contacts the surface 924 of the connection flange 921.

In the second connection portion 940, a recess 945 is formed from the inner seal region 941 toward the inside in the radial direction of the second opening portion 12 b.

That is, a region closer to the second opening portion 12b than the metal contact region 944 is in the surface 10b of the valve housing 10 facing the second chamber 920, which is the recess 945.

The recess 945 has an equal depth dimension throughout the entire area of the recess 945.

In the recess 945, a sealing member 941b such as an O-ring accommodated in the sealing groove 941a is pressed in a state of being in contact with the surface 924 of the connecting flange 921. The recess 945 has a depth dimension capable of sealing between the surface 10b of the valve housing 10 and the connection flange 921 in a state where the sealing member 941b is pressed.

With the second connecting portion 940, a gap is formed between the surface 924 of the connecting flange 921 and the surface 10b of the valve housing 10 at the edge of the entire area of the recess 945 from the inner seal region 941 to the second opening portion 12 b.

Inside the recess 945, the surface 924 of the connecting flange 921 does not contact the surface 10b of the valve housing 10.

The connecting flange 921 makes contact with the surface 10b of the valve housing 10 in the entire area of the metal contact area 944. The connection flange 921 does not contact the surface 10b of the valve housing 10 in the entire region of the recess 945.

In the second connection part 940, the connection part 942 penetrates and fastens the through hole 921b into the fastening hole 942 a.

In the seal groove 941a of the inner seal region 941, a seal member 941b such as an O-ring is pressed by the surface 924 of the connecting flange 921 to seal the flow path H.

At this time, the connecting member 942 is exposed to the atmosphere of the second chamber 920 and the valve housing 10. The through hole 921b is exposed to the atmosphere side of the valve housing 10 and the second chamber 920. A region of the recess 945 radially outward of the second opening 12b with respect to the inner seal region 941 is exposed to the atmosphere of the second chamber 920 and the valve housing 10.

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by the JIS type connection method shown in fig. 1 will be described.

As shown in fig. 1 and 3, a connecting cylinder 915 is disposed at a connection portion of the first chamber 910 to the gate valve 100 by a JIS type connection method.

The connecting cylinder 915 has the same cross-sectional shape as the first opening 12 a.

A connection flange 911 is provided at an end portion of the connection cylinder 915 adjacent to the gate valve 100.

The connecting flange 911 has a surface 914 opposite to the surface 10a of the valve housing 10. The connecting flange 911 is disposed parallel to the surface 10a and the first opening portion 12a of the valve housing 10.

The connection flange 911 is provided with a through hole 911b through which the connection member 932 passes.

When the connecting flange 911 and the gate valve 100 are assembled with each other, the through hole 911 is disposed at a position corresponding to the fastening hole 932 a. That is, a plurality of through holes 911b are formed so as to be spaced apart from each other in the circumferential direction of the connecting flange 911. The plurality of through holes 911b are arranged on the same circumference with respect to the center of the flow path H. The plurality of through holes 911b are formed at positions corresponding to the inside of the recess 935.

The connecting flange 911 is in contact with the surface 10a of the valve housing 10 in the entire area of the metal contact area 934. The connecting flange 911 does not contact the surface 10a of the valve housing 10 in the entire area of the recessed portion 935.

In the first connecting portion 930, the connecting member 932 penetrates and is fastened to the fastening hole 932a with the through hole 911 b. The connecting member 932 is a fastening bolt.

A seal member 931b such as an O-ring is disposed in the seal groove 931a of the inner seal region 931.

A sealing member 933b such as an O-ring may be disposed in the sealing groove 933a of the outer sealing region 933, or the sealing member 933b such as an O-ring may not be disposed.

In the seal groove 933a, a seal member 933b such as an O-ring is pressed against the surface 914 of the connection flange 911 to seal the flow path H.

At this time, the connecting member 932 is exposed to the atmosphere side of the first chamber 910 and the valve housing 10. The through hole 911b is exposed to the atmosphere of the first chamber 910 and the valve housing 10. The area of the recess 935 radially outside the first opening 12a with respect to the inner seal area 931 is exposed to the atmosphere of the first chamber and the valve housing 10.

When the gate valve 100 is connected to the first chamber 910 by the JIS type connection method shown in fig. 1, the gate valve 100 is disposed away from the first chamber 910 by the length of the connecting cylinder 915 in the flow path H direction.

In order to show this JIS type connection and the following direct type connection in fig. 3, a connection flange 911 and a chamber wall portion 912 of a different body are shown at the same position.

In this case, even if the first chamber 910 is heated, the temperature rise in the gate valve 100 is gradual, and the influence of heating of the gate valve 100 can be reduced. In particular, the influence of heating of the hydraulically driven valve box biasing unit 70 can be reduced. Thereby, the operational reliability can be improved.

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by a direct connection method shown in fig. 2 will be described.

In the direct connection method, as shown in fig. 2 and 3, the valve housing 10 is directly connected to a chamber wall 912 of a connection portion of the first chamber 910 with the gate valve 100.

The chamber wall 912 has a chamber opening 912 a. The chamber opening 912a has the same cross-sectional shape as the first opening 12 a.

The chamber opening 912a corresponds to the connection flange 911 in JIS.

The chamber wall 912 has a surface 914 corresponding to the surface 10a of the valve housing 10. The chamber wall portion 912 is disposed parallel to the surface 10a and the first opening portion 12a of the valve housing 10.

The chamber wall 912 has a through hole 912b through which the connection member 932 passes.

The through hole 912b corresponds to the through hole 911b in JIS model. When the chamber wall 912 and the gate valve 100 are assembled with each other, the through-hole 912b is disposed at a position corresponding to the fastening hole 932 a. That is, a plurality of through holes 912b are formed so as to be spaced apart from each other in the circumferential direction of the chamber opening 912 a. The plurality of through holes 911b are arranged on the same circumference with respect to the center of the chamber opening 912a as the flow path H. The plurality of through holes 911b are formed at positions corresponding to the inside of the recess 935.

The chamber wall 912 is in contact with the surface 10a of the valve housing 10 in the entire area of the metal contact area 934. The chamber wall 912 does not contact the surface 10a of the valve housing 10 in the entire area of the recess 935.

In the first connecting portion 930, the connecting member 932 penetrates and is fastened to the fastening hole 932a with the through hole 911 b. The connecting member 932 is an exhaust bolt.

A seal member 933b such as an O-ring is disposed in the seal groove 933a of the outer seal region 933.

A sealing member 931b such as an O-ring may be disposed in the sealing groove 931a of the inner sealing region 931, or the sealing member 931b such as an O-ring may not be disposed.

In the seal groove 933a, a seal member 933b such as an O-ring is pressed against the surface 914 of the chamber wall 912 to seal the flow path H.

At this time, the connecting member 932 is exposed to the vacuum side of the first chamber 910 and the valve housing 10. The through hole 911b is exposed to the vacuum side of the first chamber 910 and the valve housing 10. A region of the recess 935 radially outward of the first opening 12a with respect to the outer seal region 933 is exposed to the atmosphere of the first chamber 910 and the valve housing 10.

When the gate valve 100 is connected to the first chamber 910 by the direct type connection shown in fig. 2, the gate valve 100 is disposed to be in contact with the first chamber 910. This can shorten the distance between the gate valve 100 and the first chamber 910 in the flow path H direction, compared to JIS type using the connecting cylinder 915, and save space.

Specifically, when a plurality of types of devices are disposed on the outside air side of the first chamber 910, when the work of fastening the connecting member 932 is performed in a state where the outside of the first chamber 910 is narrow, the worker can fasten the connecting member 932 on the inside of the first chamber 910, which is the vacuum side, during the operation of the device even if the required space is insufficient. The process of removing or attaching the gate valve 100 to the first chamber 910 is performed without operating the apparatus such as maintenance. Therefore, the worker can perform the fastening and releasing work of the connecting member 932 inside the first chamber 910 through the maintenance opening or the like provided in the first chamber 910. In particular, in an apparatus having a large internal volume of the first chamber 910 such as an apparatus for manufacturing an FPD, the fastening and releasing work of the connecting member 932 can be easily performed.

As shown in fig. 3, the gate valve 100 of the present embodiment can be used in combination with a JIS type, a direct type, or a connection type in which a connection member is exposed to the atmosphere side of the first chamber, and the gate valve 100 of the present embodiment can be applied to any connection type.

Specifically, in the JIS type connection system in which the connection member 932 is exposed to the vacuum side of the first chamber 910, the valve box 10 and the first chamber 910 can be sealed by the outer sealing region 933 outside the through hole 911b through which the connection member 932 passes. Meanwhile, in the direct connection method in which the connection member 932 is exposed to the atmosphere side of the first chamber 910, the valve housing 10 and the first chamber 910 can be sealed by the inner seal region 931 inside the through hole 911b through which the connection member 932 penetrates.

Further, the two connection methods can be used in common by the gate valve 100 having the same structure.

Accordingly, when the gate valve 100 is mounted on the vacuum apparatus having the first chamber 910, the gate valve 100 having the same configuration can be easily mounted on the vacuum apparatus regardless of the connection method. Therefore, since the gate valve applied to the two connection systems can be manufactured, it is not necessary to separately manufacture gate valves having two specifications corresponding to the two connection systems, and it is not necessary to take a stock of gate valves. It is not necessary to change the design of the gate valve 100 according to the connection manner, and stock of the gate valve 100 which is long during manufacturing can be reduced.

Also, with respect to the metal contact region 934 where the surface 10a of the valve housing 10 and the surface 914 of the first chamber 910 contact each other, the gate valve 100 and the first chamber 910 may be sealed in a region closer to the first opening portion 12a than the metal contact region 934. Therefore, the gate valve 100 that can cope with both connection methods does not deteriorate the sealing performance.

Meanwhile, by forming the recess 935, the valve housing 10 and the first chamber 910 can be prevented from sliding on each other inside the outer seal region 933, which is the vacuum side, of the first connection portion 930. Therefore, the gate valve 100 and the sealing portion of the first chamber 910 can be prevented from becoming a particle generation source.

Next, a gate valve according to a second embodiment of the present invention will be described with reference to the drawings.

Fig. 5 is an enlarged sectional view showing a first connection portion of the gate valve according to the present embodiment in a direction along the flow path.

Fig. 7 is a perspective view showing a first connection portion of the gate valve according to the present embodiment.

The present embodiment is different from the first embodiment in that the first connection portion and the second connection portion are formed at positions, and the same reference numerals are used for the other structures corresponding to the first embodiment, and the description thereof is omitted.

In the gate valve 100 of the present embodiment, as shown in fig. 5, the first connection portion 930 is also formed in the connection flange 911 or the chamber wall portion 912.

A plurality of fastening holes 932a are provided on the surface 10a of the valve housing 10.

The surface 10a of the valve housing 10 is formed to be the same surface on the radial outside of the first opening portion 12a except for the fastening hole 932 a.

The first connection portion 930 of the present embodiment can use both JIS connection and direct connection.

Next, JIS type connection will be described first.

As shown in fig. 5 and 7, the first connecting portion 930 of the present embodiment has a plurality of fastening holes 932a for fastening the connecting member 932 arranged on the surface 10a of the valve housing 10 along the periphery of the first opening 12 a.

As in the first embodiment, the plurality of fastening holes 932a are concentrically arranged toward the radial outside of the first opening 12 a.

In contrast, in the first connection portion 930 of the present embodiment, the inner seal region 931, the outer seal region 933, and the metal contact region 934 are arranged on the surface 914 of the connection flange 911 along the periphery of the first opening 12 a.

That is, the inner seal region 931, the through hole 911b, the outer seal region 933, and the metal contact region 934 are concentrically arranged from the outline of the first opening portion 12a toward the radially outer side of the connection flange 911.

The inner seal region 931, the through hole 911b, the outer seal region 933, and the metal contact region 934 are formed at the same positions as the corresponding structures of the first embodiment, as viewed in the flow path H direction.

In the first connection portion 930 of the present embodiment, a recess 935 is formed from the outer seal region 933 toward the radially inner contour of the connection flange 911.

That is, the surface 914 of the connection flange 911 is formed with a recess 935 at a position closer to the radially inner contour of the connection flange 911 than the metal contact region 934. The recess 935 is formed away from the surface 10a of the valve housing 10 in the flow passage H direction.

An inner seal area 931, a through hole 911b, and an outer seal area 933 are formed in the recess 935 at a position that is a bottom portion of the recess that faces the surface 10a of the valve housing 10.

In the recess 935, as in the first embodiment, a seal member 931b such as an O-ring accommodated in the seal groove 931a or a seal member 933b such as an O-ring accommodated in the seal groove 933a is pressed in a state of being in contact with the surface 10a of the valve housing 10. The recess 935 has a depth dimension capable of sealing between the surface 10a of the valve housing 10 and the connection flange 911 in a state where the

seal members

931b, 933b are pressed.

The inner seal area 931 is arranged along the contour of the first opening portion 12 a. The inner seal area 931 is disposed concentrically with the first opening 12 a. The inner sealing area 931 is annularly provided in a size larger than the edge portion of the first opening portion 12 a. The inner seal area 931 is provided around the entire circumference of the first opening portion 12 a. A seal groove 931a is formed on the inner seal region 931.

The seal groove 931a is formed in the bottom of a recess 935, and the recess 935 is formed on a surface 914 of the connection flange 911 opposite the valve housing 10. The seal groove 931a is formed in the bottom of the recess portion 935 in a state further recessed in the flow passage H direction toward a direction away from the hollow portion 11. A seal member 931b, for example, an O-ring, which is an elastic body is accommodated in the seal groove 931 a. The O-ring may be pressed in a state of being in contact with the surface 10a of the valve housing 10 to hermetically seal between the surface 10a of the valve housing 10 and the connecting flange 911.

A plurality of through holes 911b are formed in the connecting flange 911 on the radially outer side than the inner seal region 931. The through hole 911b penetrates the connection flange 911. A plurality of through holes 911b are arranged concentrically with the first opening 12a and spaced apart from each other. The through hole 911b is arranged on the same circumference having a larger diameter than the inner seal region 931. The circumference of the through hole 911b is arranged away from the outer edge profile of the inner sealing area 931.

An outer seal region 933 is disposed radially outward of the connection flange 911 with respect to the circumference of the through hole 911 b.

The outer sealing region 933 is configured concentrically with the connection flange 911. The outer sealing region 933 is arranged along the contour of the connection flange 911. The outer sealing region 933 is provided over the entire circumference of the connection flange 911. A seal groove 933a is formed in the outer seal region 933.

The seal groove 933a is formed at the bottom of a recess 935 formed in the surface 914 of the connection flange 911 opposite to the valve housing 10. The seal groove 933a is formed in the bottom of the recess 935 in a state of being further recessed in the flow passage H direction toward a direction away from the hollow portion 11. The seal groove 933a is formed to have a depth dimension substantially equal to that of the seal groove 931a and a diameter dimension (width dimension) substantially equal to that of the seal groove 931 a. In the sealing groove 933a, an O-ring, for example, is accommodated in a sealing member 933b which is an elastic body. The O-ring may be pressed in a state of being in contact with the surface 10a of the valve housing 10 to hermetically seal between the surface 10a of the valve housing 10 and the connecting flange 911.

A metal contact region 934 is provided on the connection flange 911 radially outside the outer seal region 933.

The metal contact regions 934 are in contact with the surface 10a of the valve housing 10 opposite to the connection flange 911 in the entire region of the metal contact regions 934. The metal contact area 934 may have a prescribed width dimension, for example, an area equal in location from the outer sealing area 933 to the outer edge profile of the connection flange 911. Furthermore, the metal contact area 934 is sized to secure the valve housing 10 and the connection flange 911 and support the gate valve 100 to the first chamber 910.

When the connecting flange 911 and the gate valve 100 are assembled with each other, the fastening hole 932a is disposed at a position corresponding to the through hole 911 b. That is, a plurality of fastening holes 932a are formed to be spaced apart from each other in the circumferential direction of the first opening portion 12 a. The fastening holes 932a are arranged on the same circumference with respect to the center of the flow passage H. The plurality of fastening holes 932a are formed on the surface 10a of the valve housing 10 that is almost the same plane. The fastening hole 932a is disposed at a position corresponding to the recess 935.

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by a JIS type connection method will be described.

In the first connecting portion 930, the connecting member 932 penetrates and fastens the through hole 911b into the fastening hole 932a by a JIS-type connection method, as shown in fig. 5. The connecting member 932 is a fastening bolt.

In the seal groove 933a, a seal member 933b such as an O-ring is pressed against the surface 10a of the valve housing 10 to seal the flow path H.

At this time, the connecting member 932 is exposed to the atmosphere side of the first chamber 910 and the valve housing 10. The through hole 911b is exposed to the atmosphere of the first chamber 910 and the valve housing 10. In the recess 935, a region radially outside the first opening 12a with respect to the inner seal region 931 is exposed to the atmosphere of the first chamber 910 and the valve housing 10.

When the gate valve 100 is connected to the first chamber 910 by the JIS type connection method, the gate valve 100 is disposed away from the first chamber 910 by the length of the connecting cylinder 915 in the flow path H direction.

Next, a direct connection will be described.

In the direct connection method, as shown in fig. 5, the valve housing 10 is directly connected to a chamber wall 912 of a connection portion of the first chamber 910 with the gate valve 100.

In the first connection portion 930 of the present embodiment, the inner seal region 931, the outer seal region 933, and the metal contact region 934 are arranged on the surface 914 of the chamber wall portion 912 along the periphery of the first opening portion 12 a.

That is, the inner seal region 931, the through hole 912b, the outer seal region 933, and the metal contact region 934 are concentrically arranged from the opening contour of the chamber opening portion 912a toward the radial outside of the chamber opening portion 912 a.

In the direct connection system of the present embodiment, the connection flange 911 in the JIS connection system corresponds to the chamber wall 912.

In the first connection portion 930 of the present embodiment, a recess 935 is formed from the outer sealing region 933 to the opening contour of the chamber opening portion 912 a.

That is, the recess 935 is formed on the surface 914 of the chamber wall 912 at a position radially inward of the metal contact region 934 and closer to the opening contour of the chamber opening 912a in the radial direction of the chamber opening 912 a. The recess 935 is formed away from the surface 10a of the valve housing 10 in the flow passage H direction.

An inner seal region 931, a through hole 911b, and an outer seal region 933 are formed in a position of the recess 935, which is a bottom portion facing the surface 10a of the valve housing 10.

In the recess 935, as in the first embodiment, the sealing member 933b such as an O-ring, which is accommodated in the sealing groove 931a and the sealing member 931b such as an O-ring, which is accommodated in the sealing groove 933a, is pressed in a state of being in contact with the surface 10a of the valve housing 10. The recess 935 has a depth dimension capable of sealing between the surface 10a of the valve housing 10 and the chamber wall 912 in a state where the

seal members

931b, 933b are pressed.

The seal groove 931a is formed at the bottom of a recess 935 formed in the surface 914 of the chamber wall 912. referring to FIGS. The seal groove 931a is formed in the bottom of the recess portion 935 in a state further recessed in the flow passage H direction toward a direction away from the hollow portion 11. A seal member 931b, which is an elastic body, such as an O-ring, is accommodated in the seal groove 931 a. The O-ring may be pressed in a state of being in contact with the surface 10a of the valve housing 10 to seal between the surface 10a of the valve housing 10 and the chamber wall portion 912.

A plurality of through holes 911b are formed in the chamber opening 912a radially outward of the inner seal region 931. The through hole 911b penetrates the chamber wall 912. A plurality of through holes 911b are arranged concentrically with and spaced apart from the chamber opening 912 a. The through hole 911b is arranged on the same circumference having a larger diameter dimension than the inner seal region 931. The circumference of the through hole 911b is arranged away from the outer edge profile of the inner sealing area 931.

An outer seal region 933 is disposed radially outward of the chamber opening 912a with respect to the circumference of the chamber opening 912a in which the through hole 911b is disposed.

The outer sealing region 933 is disposed concentrically with the chamber opening 912 a. The outer sealing region 933 is arranged along the contour of the chamber opening portion 912 a. The outer sealing region 933 is provided over the entire circumference of the chamber opening portion 912 a. A seal groove 933a is formed in the outer seal region 933.

The seal groove 933a is formed at the bottom of a recess 935 formed in the surface 914 of the chamber wall 912, the recess 935 being formed in the bottom of the recess 935. The seal groove 933a is formed in the bottom of the recess 935 to be further recessed in the flow passage H direction toward a direction away from the hollow portion 11. The seal groove 933a is formed to have a depth dimension substantially equal to that of the seal groove 931a and a diameter dimension (width dimension) substantially equal to that of the seal groove 931 a. In the sealing groove 933a, an O-ring, for example, is accommodated in a sealing member 933b which is an elastic body. The O-ring may be pressed in a state of contact with the surface 10a of the valve housing 10 to seal between the surface 10a of the valve housing 10 and the chamber wall portion 912.

The depth and width of the seal groove 933a may be greater than those of the seal groove 931a, or may be smaller than those of the seal groove 931 a.

A metal contact region 934 is provided radially outward of the outer seal region 933 in the chamber opening portion 912 a.

The metal contact regions 934 are in contact with the surface 10a of the valve housing 10 in the entire region of the metal contact regions 934. Metal contact regions 934 may have a specified width dimension. Further, the metal contact area 934 is sized to be able to support the gate valve 100 to the first chamber 910 by securing the valve housing 10 and the chamber wall 912.

With the first connection portion 930 of the present embodiment, a gap is formed between the surface 914 of the chamber wall portion 912 and the surface 10a of the valve housing 10 at the edge portion from the outer seal region 933 to the first opening portion 12a in the entire region of the recess portion 935.

Inside the recess 935, the surface 914 of the chamber wall 912 does not contact the surface 10a of the valve housing 10.

A case where the gate valve 100 of the present embodiment is connected to the first chamber 910 by a direct connection will be described.

In the first connection portion 930, the connection member 932 penetrates and is fastened to the fastening hole 932a through the through hole 911b by a direct connection manner, as shown in fig. 5. The connecting member 932 is an exhaust bolt.

In the seal groove 931a, a seal member 931b such as an O-ring is pressed against the surface 10a of the valve housing 10 to seal the flow passage H.

When the gate valve 100 is connected to the first chamber 910 by the direct connection method, the first chamber 910 and the gate valve 100 are disposed closer to each other in the flow path H direction than in the JIS connection method.

Fig. 6 is an enlarged sectional view showing the second connection portion of the gate valve according to the present embodiment in a direction along the flow path.

Fig. 8 is a perspective view showing a second connection portion of the gate valve according to the present embodiment.

As shown in fig. 6 and 8, the second connecting portion 940 of the present embodiment has a plurality of fastening holes 942a for fastening the fastening member 942 arranged along the periphery of the second opening 12b on the surface 10b of the valve housing 10.

As in the first embodiment, the plurality of fastening holes 942a are concentrically arranged radially outward of the second opening 12 b.

In contrast, in the second connection portion 940 of the gate valve 100 according to the present embodiment, an inner seal region 941, a through hole 921a, and a metal contact region 944 are formed on the surface 924 of the connection flange 921 of the second chamber 920 facing the valve housing 10.

The inner sealing region 941 follows the contour of the attachment flange 921. The inner sealing region 941 is concentrically arranged with the attachment flange 921. The inner sealing region 941 is annularly provided in a larger size than the inner peripheral edge portion of the attachment flange 921. The inner sealing region 941 is disposed around the entire circumference of the attachment flange 921. A seal groove 941a is formed in the inner seal region 941.

The inner sealing region 941 corresponds to the inner sealing region 931 of the first connection part 930. That is, in the case where the first opening portion 12a and the second opening portion 12b have substantially the same outline shape, the inner seal region 941 and the inner seal region 931 may be disposed to overlap when viewed in the flow path H direction.

The seal groove 941a is formed on the surface 924 (the recess 945) of the connection flange 921 in the flow path H direction, and is recessed toward a direction away from the hollow 11. A seal member 941b, which is an elastic body, such as an O-ring, is accommodated in the seal groove 941 a. The O-ring may be pressed in a state of being in contact with the surface 10b of the valve housing 10 to seal between the surface 10b of the valve housing 10 and the connection flange 921.

A plurality of through holes 921b are formed in the connecting flange 921 radially outward of the inner seal region 941. A plurality of through holes 921b are arranged concentrically with the connection flange 921 and spaced apart from each other. The through hole 921b is arranged on the same circumference having a larger diameter dimension than the inner seal region 941. The circumference of the through hole 921b is arranged away from the outer edge contour of the inner seal region 941.

A metal contact region 944 is provided on the radially outer side of the attachment flange 921 than the inner seal region 941.

The metal contact region 944 makes contact with the surface 10b of the valve housing 10 opposite to the connection flange 921 in the entire region of the metal contact region 944. The metal contact region 944 may have a predetermined width dimension, and may be, for example, a region equal to a region from the inner seal region 941 to the outer edge of the connection flange 921.

The size of the metal contact area 944 is not limited as long as the gate valve 100 and the second chamber 920 can be supported by the fixed valve housing 10 and the connection flange 921.

A fastening hole 942a is formed in the metal contact area 944. That is, around the fastening holes 942a, the surface 10b of the valve housing 10 contacts the surface of the connection flange 921.

In the second connection portion 940, a recess 945 is formed from the inner seal region 941 toward the radially inner side of the connection flange 921.

That is, a region closer to the inner peripheral edge of the attachment flange 921 than the metal contact region 944 in the surface 924 of the attachment flange 921 is the recess 945.

In the recess 945, a seal member 941b such as an O-ring as an elastic body accommodated in the seal groove 941a is pressed in a state of being in contact with the surface 10b of the valve housing 10. The recess 945 has a depth dimension capable of sealing between the surface 10b of the valve housing 10 and the connection flange 921 in a state where the sealing member 941b is pressed.

In the second connecting portion 940, a gap is formed between the surface 924 of the connecting flange 921 and the surface 10b of the valve housing 10 at the contour of the inner edge of the entire area of the recess 945 from the inner sealing area 941 to the connecting flange 921.

In the seal groove 941a of the inner seal region 941, a seal member 941b such as an O-ring is pressed by the surface 10b of the valve housing 10 to seal the flow passage H.

The present embodiment can achieve the same effects as those of the first embodiment.

Next, a gate valve according to a third embodiment of the present invention will be described with reference to the drawings.

The present embodiment is different from the second embodiment in a pendulum valve body of a gate valve, and the like, and the same reference numerals are used for corresponding components other than those, and the description thereof is omitted.

Fig. 9 is a cross-sectional view of the gate valve of the present embodiment, which is perpendicular to the flow channel.

Fig. 10 is a sectional view along a flow path showing the gate valve of the present embodiment.

Fig. 11 is an enlarged cross-sectional view along a flow path showing an edge portion of the gate valve according to the present embodiment.

In this embodiment, the first chamber 910 and the second chamber 920 are not shown.

As shown in fig. 9 and 10, the gate valve 100 of the present embodiment includes a valve housing 10, a hollow portion 11, a valve body 5, a rotary shaft 20, a rotary shaft driving portion 200, a housing biasing portion 70, a valve sheet biasing portion 80 (holding spring), a valve frame biasing portion 90, and a hydraulic driving portion 700.

The valve housing 10 is provided with a first connection part 930 and a second connection part 940.

The first opening portion 12a and the second opening portion 12b have substantially the same outline. The first opening portion 12a has a circular contour. The second opening portion 12b has a circular contour.

The valve body 5 is disposed in the hollow portion 11.

The valve body 5 can block the first space of the first chamber 910 and the second space of the second chamber 920 in the valve closed position.

The rotary shaft 20 has an axis extending almost parallel to the flow passage H direction. The rotary shaft 20 penetrates the valve housing 10. The rotary shaft 20 can be rotationally driven by the rotary shaft driving section 200.

The valve body 5 is fixed to the rotary shaft 20 via a coupling member (not shown). Alternatively, the valve body 5 may be directly connected to the rotary shaft 20 without a connecting member (not shown).

The rotary shaft 20 functions as a position switching unit of the valve body 5.

Fig. 12 is a plan view showing a valve body of the gate valve according to the present embodiment, as viewed from a direction orthogonal to the flow channel.

The valve body 5 can close the first opening portion 12a and/or the second opening portion 12 b.

The valve body 5 operates between a valve-closing position, a valve-opening-shielding position, and a valve-opening position (a retracted position).

The valve body 5 is rotatable between a retreat position and a valve opening shielding position.

In the valve closed position, the valve body 5 is in a closed state with respect to the first opening portion 12a and/or the second opening portion 12b (fig. 14 to 17).

In the valve open position (retracted position), the valve body 5 is in an open state (indicated by a broken line in fig. 9) retracted from the first opening portion 12a and/or the second opening portion 12 b.

The valve body 5 is configured by a neutral valve portion 30 and a movable valve portion 40.

The neutral valve portion 30 extends in a direction orthogonal to the axis of the rotary shaft 20. The neutral valve portion 30 is disposed so as to be included in a plane parallel to a direction orthogonal to the axis of the rotary shaft 20.

As shown in fig. 9 to 11, the neutral valve portion 30 includes a circular portion 30a and a rotating portion 30 b.

The circular portion 30a has an annular shape slightly larger than the outline of the first opening 12a and/or the second opening 12 b. The movable valve portion 40 is disposed at a position radially inward of the circular portion 30 a. The inner periphery of the circular portion 30a is disposed so as to substantially overlap with the first opening 12a and/or the second opening 12b when viewed from the flow path H direction.

The rotating portion 30b is located between the rotating shaft 20 and the circular portion 30 a. The rotating portion 30b rotates the circular portion 30a in accordance with the rotation of the rotating shaft 20. The rotating portion 30b is formed in a flat plate shape extending so as to expand in diameter from the rotating shaft 20 toward the circular portion 30 a. The rotating portion 30b may be formed in an arm shape in which a plurality of arms extend from the rotating shaft 20 toward the circular portion 30 a.

The rotary shaft 20 and the neutral valve portion 30 are rotated relative to the valve housing 10 but do not undergo positional variation in the direction of the flow path H.

The circular portion 30a and the rotating portion 30b may be integrated.

In this case, a through hole into which the movable valve portion 40 is fitted is formed in the flat plate-shaped neutral valve portion 30, and the through hole becomes a circular portion 30 a. A portion extending radially outward in a part of the circular portion 30a in the circumferential direction is a rotating portion 30 a.

The thickness dimension of the circular portion 30a in the flow passage H direction is formed to be almost equal to the thickness dimension of the rotating portion 30b in the flow passage H direction. The circular portion 30a is provided with a circular flange portion 30c that is circumferentially disposed on the radially inner side of the neutral valve portion 30.

The thickness dimension of the round flange portion 30c in the flow passage H direction is formed smaller than the thickness dimension of the round portion 30a in the flow passage H direction. The round flange portion 30c is provided on the inner peripheral surface of the round portion 30a at a position close to the first opening portion 12a in the flow passage H direction.

An outer frame plate 60e of the movable valve frame portion 60, which will be described later, is provided at a position closer to the second opening portion 12b than the circular flange portion 30c in the flow passage H direction. The round flange portion 30c is connected to an outer frame plate 60e of a movable valve frame portion 60 described later. The round flange portion 30c and the outer frame plate 60e are located radially outward of the outer peripheral crank portion 60 c.

The width dimension of the circular flange portion 30c in the radial direction of the neutral valve portion 30 is set to be almost equal to the width dimension of the outer peripheral crank portion 60c in the radial direction of the movable valve frame portion 60. The circular portion 30a and the circular flange portion 30c are annularly provided at positions radially outward of the movable valve frame portion 60 with respect to the outer peripheral crank portion 60 c.

The circular portion 30a and the rotating portion 30b may be formed to have the same thickness dimension in the flow path H direction.

The movable valve portion 40 has a substantially circular plate shape.

The movable valve portion 40 is connected to be able to change the position in the flow path H direction with respect to the neutral valve portion 30. That is, the movable valve portion 40 is connected so as to be slidable only in the thickness direction with respect to the neutral valve portion 30.

The movable valve portion 40 is formed of two portions that are movable relative to each other in the flow passage H direction. The movable valve portion 40 includes a movable valve frame portion 60 (slide valve frame) and a movable valve sheet portion 50 (counter panel).

The shape of the movable valve frame portion 60 is substantially circular ring shape substantially concentric with the circular portion 30 a. The movable valve frame portion 60 is located radially inward of the circular portion 30 a. The movable valve frame portion 60 is fitted to the circular portion 30 a.

The movable valve frame portion 60 is slidable in the flow passage H direction with respect to the neutral valve portion 30. The movable valve frame portion 60 is displaceable in the flow passage H direction with respect to the neutral valve portion 30. The movable valve frame portion 60 is movable relative to the neutral valve portion 30 between a position where it can be operated in a pendulum manner and a position where it can be brought into contact with the first opening portion 12 a.

The movable valve frame portion 60 has an outer peripheral crank portion 60c, an inner frame plate 60d, and an outer frame plate 60 e.

The movable valve frame portion 60 has a substantially zigzag shape in radial annular cross-sectional shape, because the inner frame plate 60d, the outer peripheral crank portion 60c, and the outer frame plate 60e are connected.

The outer peripheral crank portion 60c is formed in a ring shape or a cylindrical shape having a slightly larger contour than the contour of the first opening portion 12a and/or the second opening portion 12 b. The outer peripheral crank portion 60c is formed around the entire periphery of the outer edge of the movable valve frame portion 60. The thickness dimension of the outer peripheral crank portion 60c in the flow channel H direction is almost equal to the thickness dimension of the neutral valve portion 30 in the flow channel H direction.

The outer peripheral crank portion 60c has a sliding surface 60 b.

The sliding surface 60b is a cylindrical surface having an axis parallel to the flow passage H direction. The sliding surface 60b is provided on the inner peripheral surface of the outer peripheral crank portion 60c over the entire length in the circumferential direction. The sliding surface 60b and a sliding surface 50b of an inner circumferential crank portion 50c of the movable valve portion 50, which will be described later, are provided so as to be slidable with respect to each other and face each other.

An inner peripheral crank portion 50c is fitted to the outer peripheral crank portion 60 c.

The inner frame plate 60d is annularly provided at a position on the outer peripheral crank portion 60c which is radially inside the movable valve frame portion 60. The inner frame plate 60d is annularly provided on an end portion of the outer peripheral crank portion 60c in the flow passage H direction close to the first opening portion 12 a. The inner frame plate 60d is formed in a flange shape parallel to the valve sheet 50 d.

The thickness dimension of the inner frame plate 60d in the flow passage H direction is smaller than the thickness dimension of the outer peripheral crank portion 60c in the flow passage H direction. An inner peripheral crank portion 50c, which will be described later, is provided at a position closer to the second opening portion 12b than the inner frame plate 60d in the flow passage H direction. The width dimension of the inner frame plate 60d in the radial direction of the movable valve frame portion 60 is set to be almost equal to the width dimension of the inner peripheral crank portion 50c in the radial direction of the movable valve frame portion 60.

The outer frame plate 60e is annularly provided at a position radially outward of the movable valve frame portion 60c on the outer peripheral crank portion 60 c. The outer frame plate 60e is annularly provided on an end portion of the outer peripheral crank portion 60c near the second opening portion 12b in the flow passage H direction. The outer frame plate 60e is annularly provided on the radially outer side of the outer peripheral crank portion 60c with respect to the movable valve frame portion 60.

The outer frame plate 60e is a projection having a dimension in the flow passage H direction smaller than that of the outer peripheral crank portion 60 c. A round flange portion 30c is provided at a position closer to the first opening portion 12a than the outer frame plate 60e in the flow passage H direction. As will be described later, the outer frame plate 60e is provided with a plurality of valve frame biasing portions 90. The outer frame plate 60e is provided with a plurality of biasing portion holes 68 for incorporating the valve frame biasing portions 90.

A valve frame biasing portion 90 (an assist spring) is disposed between the movable valve frame portion 60 and the neutral valve portion 30.

The movable valve frame portion 60 is connected to be able to change the position in the flow path H direction with respect to the neutral valve portion 30 by the valve frame urging portion 90. The movable valve frame portion 60 and the circular portion 30a are concentric double circular rings.

A valve frame gasket 61 is annularly provided on a surface of the movable valve frame portion 60 that faces (abuts) the valve box inner surface 10A. The valve frame gasket 61 is disposed at the boundary position between the circular outer peripheral crank portion 60c and the inner frame plate 60 d. The valve frame gasket 61 is provided on an end surface of the outer peripheral crank portion 60c opposite to the first opening portion 12 a.

The valve frame gasket 61 is formed in an annular shape corresponding to the shape of the first opening portion 12 a. The valve frame gasket 61 is a seal portion formed of, for example, an O-ring or the like. The valve frame gasket 61 can be in close contact with the valve box inner surface 10A located around the first opening portion 12 a. The valve frame gasket 61 is disposed concentrically with the movable valve frame portion 60.

The valve frame seal 61 is provided in the outer peripheral crank portion 60c at a position close to the outermost periphery. The valve frame gasket 61 is in contact with the valve-box inner surface 10A that is the periphery of the first opening portion 12a when the valve is closed, and is pressed by the movable valve frame portion 60 and the valve-box inner surface 10A. Thereby, the first space and the second space are in the blocked state.

The movable valve portion 50 is a plate body having a circular contour substantially concentric with the circular portion 30 a.

The movable valve portion 50 is fitted to the movable valve frame portion 60 radially inside the outer peripheral crank portion 60 c. A movable valve frame portion 60 is disposed at a radially outer position of the movable valve sheet portion 50 so as to surround the periphery of the movable valve sheet portion 50.

The inner peripheral crank portion 50c of the movable valve portion 50 and the movable valve frame portion 60 are formed as concentric double rings. The movable poppet portion 50 is slidable in the flow passage H direction with respect to the movable poppet portion 60. The movable poppet portion 50 is displaceable in the flow passage H direction with respect to the movable poppet portion 60.

Here, the movable valve sheet portion 50 is movable between the following three positions.

The first position is a position in which the movable poppet portion 50 is similarly capable of pendulum operation with respect to the movable poppet portion 60 and the neutral valve portion 30 that are located at positions capable of pendulum operation.

The second position is the same position as the position of the movable valve portion 50 with respect to the movable valve frame portion 60 at the first position when the movable valve frame portion 60 is located at a position where it can contact the first opening portion 12 a.

The third position is a position where the movable valve sheet portion 50 can contact the second opening portion 12b with respect to the movable valve frame portion 60 in the second position.

The movable valve sheet portion 50 has an inner peripheral crank portion 50c and a valve sheet 50 d.

The movable valve sheet portion 50 is provided with an inner circumferential curved portion 50c around a circumferential position of a surface of the valve sheet 50d facing the first opening portion 12a, and has a substantially U-shaped cross-sectional shape across its diameter. The valve sheet 50d is provided to close the radially inner side of the inner peripheral crank portion 50 c. The valve sheet 50d is arranged in a direction substantially orthogonal to the flow passage H direction and has a flat plate shape.

The inner peripheral crank portion 50c is formed in a ring shape or a cylindrical shape having an axial dimension shorter than a radial dimension. An inner circumferential crank portion 50c is formed on the entire circumference of the outer edge of the movable valve sheet portion 50. The inner peripheral crank portion 50c has an outer peripheral profile slightly larger than the profile of the first opening portion 12a and/or the second opening portion 12 b. The inner peripheral crank portion 50c has an inner peripheral profile slightly smaller than the profile of the first opening portion 12a and/or the second opening portion 12 b.

The inner peripheral crank portion 50c has a smaller thickness dimension, i.e., a dimension in the flow passage H direction, than the outer peripheral crank portion 60 c. The inner peripheral crank portion 50c has a larger thickness dimension than the valve sheet 50d, i.e., a dimension in the flow passage H direction.

The inner peripheral crank portion 50c has a sliding surface 50 b. The sliding surface 50b is a cylindrical surface having an axis parallel to the flow passage H direction. The sliding surface 50b is provided on the outer peripheral surface of the inner peripheral curved shank portion 50c over the entire length in the circumferential direction. The inner circumferential crank portion 50c and the outer circumferential crank portion 60c are fitted to each other in a state where the sliding surface 50b and the sliding surface 60b are in contact with each other. The sliding surface 50b and the sliding surface 60b of the movable valve frame portion 60 are slidably disposed to face each other.

An urging portion hole 58 for accommodating the valve sheet urging portion 80 and a circumferential groove 59 are alternately arranged in the inner circumferential crank portion 50c in the circumferential direction of the movable valve sheet portion 50. A plurality of the sheet biasing portions 80 are provided at equal intervals in the circumferential direction of the movable sheet portion 50. The position where the plurality of valve sheet biasing portions 80 are provided is preferably three or more.

In the present embodiment, as the arrangement of the valve sheet biasing portions 80 spaced from each other, a configuration example is shown in which four valve sheet biasing portions 80 are arranged at the same angular position (90 °) when viewed from the center O of the valve sheet 50 d.

The angular position of the valve sheet biasing portion 80 is set to overlap the angular positions of the valve box biasing portion 70 and the valve frame biasing portion 90 when viewed from the center O of the valve sheet 50 d.

In correspondence with the arrangement of the valve sheet biasing portion 80 as described above, four biasing portion holes 58 are provided at equal intervals in the circumferential direction of the inner peripheral crank portion 50 c.

The circumferential groove 59 is circumferentially provided in the inner circumferential crank portion 50c so as to connect adjacent ones of the biasing portion holes 58.

The biasing portion hole 58 and the circumferential groove 59 have openings on the surface facing the first opening portion 12a in the flow passage H direction of the inner circumferential crank portion 50 c.

An inner peripheral wall 59a, an outer peripheral wall 59b, and a bottom portion 59c between the inner peripheral wall 59a and the outer peripheral wall 59b, which are provided upright in the flow path H direction via the circumferential groove 59, are formed on the inner peripheral crank portion 50c by the circumferential groove 59.

The inner circumferential wall 59a and the outer circumferential wall 59b extend in the flow passage H direction. The bottom portion 59c extends in a direction orthogonal to the direction of the flow passage H substantially parallel to the valve sheet 50 d. The inner circumferential wall 59a is provided radially inward of the circumferential groove 59 on the upper ring of the movable valve sheet portion 50.

A curved portion 59d is provided on the circumferential groove 59, and the curved portion 59d is curved to connect between the surface (bottom surface) of the bottom portion 59c and the surface (side surface) of the inner circumferential wall 59 a. A curved portion 59e is provided in the circumferential groove 59, and the curved portion 59e connects between a surface (bottom surface) of the bottom portion 59c and a surface (side surface) of the outer circumferential wall 59 b.

The bottom portion 59c of the circumferential groove 59 is located closer to the first opening 12a than the bottom portion 58c of the biasing portion hole 58 in the flow passage H direction. The bottom 59c of the circumferential groove 59 is formed thicker than the bottom 58c of the biasing portion hole 58.

The biasing portion hole 58 can accommodate a valve sheet biasing portion 80 described later, and is formed in a substantially cylindrical shape. The bottom 58c of the biasing portion hole 58 is flat. A curved portion having a radius of curvature of the same degree as the

curved portions

59d, 59e may not be provided.

The valve sheet 50d is connected to the inner peripheral wall 59a radially inward of the movable valve sheet portion 50.

An inner peripheral wall 59a of the inner peripheral crank portion 50c and a peripheral portion of the valve sheet 50d are connected to a position of the movable valve sheet portion 50 closer to an opening of the circumferential groove 59 than a bottom portion 59c of the circumferential groove 59.

Further, the valve sheet 50d is preferably connected to the radially inner side of the inner peripheral wall 59a at a position closer to the first opening 12a than the center position of the inner peripheral crank portion 50c in the thickness direction of the movable valve sheet portion 50 in the flow passage H direction.

Further, as for the position where the inner peripheral wall 59a and the valve sheet 50d are connected, the position can be set as appropriate between the end position of the inner peripheral wall 59a, which is the position close to the first opening portion 12a in the flow passage H direction, and the center position of the inner peripheral crank portion 50 c.

The position at which the inner circumferential wall 59a and the valve sheet 50d are connected may be set at a position closer to the end of the inner circumferential wall 59a than the center position of the inner circumferential crank portion 50c in the flow path H direction to the first opening 12 a.

A sliding surface 50b is provided annularly on the outer peripheral wall 59b radially outward of the movable valve portion 50. A sliding packing 52 (sliding seal member) formed of an O-ring or the like is disposed on the outer peripheral wall 59b radially outward of the movable valve portion 50 as a valve sheet sliding seal portion. A groove 52m for accommodating the sliding seal 52 is provided around the outer peripheral wall 59 b.

The sliding seal 52 is provided at a position closer to the opening of the circumferential groove 59 than the outer circumferential groove 56, that is, at a position closer to the end of the outer circumferential wall 59b in the flow passage H direction.

The groove 52m is provided at a position closer to the opening of the circumferential groove 59 than the outer circumferential groove 56, i.e., at a position closer to the end of the outer circumferential wall 59b in the flow passage H direction. The groove 52m is disposed in the outer peripheral wall 59b at a position close to the first opening 12a in the thickness direction of the movable valve sheet portion 50 in the flow passage H direction.

A projection provided with a groove 51m is annularly provided on the outer peripheral wall 59b at a position radially outward of the movable valve portion 50. The projection provided with the groove 51m is positioned in the outer peripheral wall 59b in a position close to the second opening 12b in the thickness direction of the movable valve sheet portion 50 in the flow path H direction.

The groove 51m is located outward of the outer peripheral wall 59b in the radial direction of the movable valve sheet portion 50. The groove 51m accommodates a facing pad 51 (sealing member) described later. The groove 51m is provided on an end surface of the ridge at a position close to the second opening 12 b.

An outer circumferential groove 56 is provided on the outer circumferential surface of the outer circumferential wall 59b in the radial direction of the movable valve sheet portion 50.

The outer peripheral groove 56 is located between the groove 52m and the groove 51m in the flow passage H direction. The outer peripheral groove 56 is configured not to contact the sliding seal gasket 52.

The sliding seal 52 is disposed between the inner peripheral crank portion 50c and the outer peripheral crank portion 60 c. The sliding seal 52 maintains the sealing state between the sliding surface 50b and the sliding surface 60b during sliding.

The sliding surface 50b, the sliding packing 52, and the sliding surface 60b constitute a sheet sliding seal portion.

The movable valve portion 50 and the movable valve frame portion 60 are connected by a valve plate urging portion 80.

The movable valve disc portion 50 and the movable valve frame portion 60 are slidable relative to each other in the reciprocating direction indicated by reference numerals B1, B2 in fig. 10. The reciprocation directions B1 and B2 are directions perpendicular to the surfaces of the movable valve piece portion 50 and the movable valve frame portion 60. The reciprocation directions B1 and B2 are the flow passage H direction parallel to the axial direction of the rotary shaft 20.

An opposing pad 51 is annularly provided on a surface of the movable valve sheet portion 50 opposing (abutting) the valve housing inner surface 10B.

The opposite pad 51 is formed in a circular ring shape corresponding to the shape of the second opening 12 b. The opposite pad 51 is an elastic body. The opposite pad 51 can be closely attached to the valve box inner surface 10B around the second opening 12B when the valve is closed.

The opposite pad 51 is a seal formed by an O-ring or the like. The opposite pad 51 is provided on an end surface of the inner peripheral crank portion 50c opposite to the second opening portion 12 b. The opposite pad 51 is disposed at the outermost position of the inner peripheral crank portion 50 c.

The opposite pad 51 is in contact with the valve box inner surface 10B, which is the periphery of the second opening 12B, and is pressed by the movable valve sheet portion 50 and the valve box inner surface 10B when the valve is closed. Thereby, the first space and the second space are in the blocked state.

The opposite pad 51 is elastically deformed at the time of collision of the movable valve sheet portion 50 with the valve housing inner surface 10B. The opposite pad 51 relieves the impact when the movable spool part 50 collides with the valve housing inner surface 10B. This can prevent the generation of garbage.

The opposite pad 51, the sliding packing 52, and the valve frame packing 61 are disposed on substantially the same cylindrical surface. The opposite pad 51, the sliding packing 52, and the valve frame packing 61 are arranged to overlap each other when viewed from the flow passage H direction. Therefore, a back pressure cancellation rate of about 100% can be obtained.

The movable valve sheet portion 50 is provided with an exhaust hole 53.

The air vent 53 communicates between the inside of the outer peripheral groove 56 and the surface facing the second opening 12b of the inner peripheral crank portion 50c at a position closer to the center O than the front pad 51.

When the movable valve sheet portion 50 collides with the valve box inner surface 10B, a closed space is formed by the movable valve sheet portion 50, the valve box inner surface 10B, and the facing pad 51. The gas discharge hole 53 removes gas from the closed space.

The valve sheet biasing portion 80 is built in the biasing portion hole 58 of the movable valve sheet portion 50.

The sheet biasing portion 80 is disposed in a region where the movable valve frame portion 60 overlaps the movable valve sheet portion 50 when viewed from the flow passage H direction, that is, between the inner frame plate 60d of the movable valve frame portion 60 and the inner circumferential crank portion 50c of the movable valve sheet portion 50.

A plurality of the sheet biasing portions 80 are provided at equal intervals in the circumferential direction of the movable sheet portion 50. The position where the valve sheet biasing portion 80 is provided is preferably three or more. The plurality of valve sheet biasing portions 80 are arranged in a set (set) of two. The pair of the sheet biasing portions 80 are disposed at positions corresponding to both ends of a diameter passing through the center O of the movable sheet portion 50.

The plurality of sheet biasing portions 80 are provided in groups (sets) spaced apart from each other in the circumferential direction of the movable sheet portion 50.

As a specific arrangement of the plurality of valve sheet biasing portions 80, as shown in fig. 12, a configuration in which four valve sheet biasing portions 80 are arranged at the same angular position (90 °) when viewed from the center O of the valve sheet 50d can be shown.

The sheet biasing portion 80 guides (restricts) the movement of the movable sheet portion 50 in the flow passage H direction. The valve sheet biasing portion 80 can change the thickness dimension in the flow passage H direction of the movable valve frame portion 60 and the movable valve sheet portion 50. The valve sheet biasing unit 80 interlocks the movable valve sheet 50 in the reciprocating directions B1 and B2 in which the movable valve frame 60 moves.

Fig. 13 is an enlarged cross-sectional view along a flow path showing a valve box biasing portion, a valve frame biasing portion, and a valve sheet biasing portion of the gate valve according to the present embodiment.

The sheet biasing portion 80 connects the inner frame plate 60d of the movable poppet portion 60 and the inner peripheral crank portion 50c of the movable poppet portion 50.

The sheet biasing portion 80 includes a sheet guide pin 81, a coil spring 82, a pressure receiving portion 83, a lid portion 58f, and a restricting cylinder 85.

The sheet guide pin 81 is constructed of a rod-shaped body having a substantially uniform thickness dimension. The sheet guide pin 81 is in the form of a bolt. The sheet guide pin 81 penetrates the sheet biasing portion 80. The valve sheet guide pin 81 is vertically provided along the flow passage H direction. The base portion 81b of the sheet guide pin 81 is fixedly provided on the inner frame plate 60d of the movable frame portion 60. The base 81b of the sheet guide pin 81 penetrates the inner frame plate 60 d. The long shaft portion of the valve sheet guide pin 81 is erected from the inner frame plate 60d toward the biasing portion hole 58.

The sheet guide pin 81 is disposed coaxially with the biasing portion hole 58 of the inner peripheral crank portion 50 c. The tip 81a of the sheet guide pin 81 is positioned inside the biasing portion hole 58. The tip 81a of the sheet guide pin 81 is provided with a pressure receiving portion 83 having a diameter larger than the diameter of the long shaft portion of the sheet guide pin 81.

The pressure receiving portion 83 is disposed at a position where it can abut against the bottom portion 58c of the biasing portion hole 58 or at a position where it does not abut against the bottom portion 58 c. The pressure receiving portion 83 is provided in a flange-like ring at the tip 81a of the sheet guide pin 81. The pressure receiving portion 83 protrudes radially outward from the valve piece guide pin 81.

A restricting cylinder 85 is slidably provided radially outside the long shaft portion of the valve sheet guide pin 81.

The restricting cylinder 85 is cylindrical and coaxial with the long axis portion of the valve sheet guide pin 81. The restricting cylinder 85 restricts the sliding position and the sliding direction of the valve sheet guide pin 81. One end of the restricting cylinder 85 is connected to the lid portion 58f that closes the biasing portion hole 58. The restriction cylinder 85 has an axial dimension smaller than that of the sheet guide pin 81. A bush 85a that contacts the valve sheet guide pin 81 is disposed radially inward of the regulating cylinder 85.

The cover portion 58f is arranged to close the opening of the biasing portion hole 58. The lid portion 58f is fixed to the opening position of the urging portion hole 58. The lid 58f is provided with a hole 58g as a through hole.

The hole 58g is coaxial with the restricting cylinder 85 and has the same diameter. The valve piece guide pin 81 is fitted into the hole 58g and the regulating cylinder 85.

A fixed cover 58f1 is further provided in a position of the cover portion 58f near the inner frame plate 60d so as to contact the cover portion 58 f. The fixing cover 58f1 reinforces the fixing of the cover 58f to the opening of the urging portion hole 58. The fixed cover 58f1 is provided with a through hole larger than the hole 58g concentrically.

The coil spring 82 (holding spring) is an elastic member such as a coil spring. The coil spring 82 is arranged to have an urging shaft parallel to the axis of the urging portion hole 58. The coil spring 82 is built in the biasing portion hole 58 of the movable valve portion 50. The coil spring 82 is a double-layer spiral having an inner coil spring 82a and an outer coil spring 82b having different diameter dimensions.

The inner coil spring 82a and the outer coil spring 82b are arranged coaxially with the sheet guide pin 81.

The coil spring 82 is provided as a double layer and reinforces the force, but may be a single layer.

One end of the coil spring 82 abuts the cover portion 58f, and the other end abuts the pressure receiving portion 83. The coil spring 82 is biased so as to press the lid portion 58f and the pressure receiving portion 83.

The lid portion 58f and the fixed lid 58f1 are provided with a vent hole 85b, and the vent hole 85b communicates between the vicinity of the bottom portion 58c inside the biasing portion hole 58 and a space located closer to the inner frame plate 60d than the lid portion 58 f.

The base portion 81b of the sheet guide pin 81 and the inner frame plate 60d are provided with air vent holes 85c, and the air vent holes 85c communicate the space located closer to the inner frame plate 60d than the cover portion 58f with the hollow portion 11 located closer to the valve housing inner surface 10A than the inner frame plate 60 d.

A seal member 85d such as an O-ring may be provided around the restricting cylinder 85 at a position closer to the cover portion 58f than the bushing 85 a.

Since the valve sheet guide pin 81 and the restriction cylinder 85 slide in the axial direction with respect to each other, the axial angle between the valve sheet guide pin 81 and the restriction cylinder 85 is not changed, but the position of the valve sheet guide pin 81 and the restriction cylinder 85 in the direction of the flow passage H is changed. Thereby, the inner frame plate 60d to which the base portion 81b of the valve sheet guide pin 81 is fixed and the lid portion 58f to which one end of the restraining cylinder 85 is fixed move relative to each other in the flow passage H direction. This guides the position restriction of the movable valve frame portion 60 and the movable valve sheet portion 50.

The coil spring 82 presses the cover portion 58f and the pressure receiving portion 83 in directions spaced from each other.

Since the pressure receiving portion 83, the leading end 81a of the sheet guide pin 81, the base portion 81b of the sheet guide pin 81, and the inner frame plate 60d are fixed to each other, the positional relationship therebetween does not change. Therefore, the coil spring 82 always biases the cover portion 58f and the pressure receiving portion 83 toward the direction in which the cover portion 58f and the inner frame plate 60d approach in the flow passage H direction.

Here, when the inner frame plate 60d and the cover portion 58f move in the flow passage H direction so as to be apart from each other, the distance between the cover portion 58f and the pressure receiving portion 83 becomes short. Thereby, the coil spring 82 contracts. In this case as well, the pressure receiving portion 83, the tip 81a of the valve sheet guide pin 81, the base 81b of the valve sheet guide pin 81, and the inner frame plate 60d are fixed to each other, and therefore the positional relationship does not change.

Therefore, the contracted coil spring 82 further biases the cover portion 58f and the pressure receiving portion 83 toward the direction in which the cover portion 58f and the inner frame plate 60d approach in the flow passage H direction. Thereby, the movable valve sheet portion 50 and the movable valve frame portion 60 move in a direction in which the cover portion 58f and the pressure receiving portion 83 of the valve sheet guide pin 81 having the increased diameter are separated from each other.

In the sheet biasing portion 80, when the movable sheet portion 50 and the movable frame portion 60 slide with each other, the sheet guide pin 81 moves in the axial direction of the sheet guide pin 81 relative to the lid portion 58f and the restricting cylinder 85 in a state where the restricting cylinder 85 (bushing 85a) restricts the axial direction of the sheet guide pin 81 of the through hole portion 58 g. Then, the coil spring 82 contracts in the axial direction of the sheet guide pin 81. The lid portion 58f that closes the biasing portion hole 58 is biased in a direction to approach the inner frame plate 60d of the movable valve frame portion 60 by the contracted coil spring 82.

Thereby, the movable valve sheet portion 50 and the movable valve frame portion 60 receive the urging force of the sheet urging portion 80 in the direction in which the thickness dimension in the flow passage H direction is reduced.

When the movable valve portion 50 and the movable valve frame portion 60 slide with respect to each other by the valve sheet urging portion 80, the sliding direction can be restricted so as not to deviate from the reciprocation directions B1, B2.

Further, when the movable valve sheet portion 50 and the movable valve frame portion 60 slide, the postures of the movable valve sheet portion 50 and the movable valve frame portion 60 can be moved in parallel without being changed.

The valve sheet biasing portion 80 and the valve frame biasing portion 90 are provided to have biasing forces that can bias in the flow passage H directions opposite to each other.

The valve frame biasing portion 90 is provided between the circular flange portion 30c of the neutral valve portion 30 and the outer frame plate 60e, and the outer frame plate 60e is overlapped with the circular flange portion 30c when viewed from the flow path H direction and serves as a position restricting portion of the movable valve frame portion 60. The valve frame biasing portion 90 biases the movable valve frame portion 60 toward the center position in the flow path H direction with respect to the neutral valve portion 30.

The valve frame biasing member 90 is housed in the biasing member hole 68 of the outer frame plate 60 e. The valve frame biasing portion 90 is disposed in a region where the neutral valve portion 30 and the movable valve frame portion 60 overlap when viewed from the flow path H direction, that is, between the circular flange portion 30c of the neutral valve portion 30 and the outer frame plate 60e of the movable valve frame portion 60.

A plurality of the valve frame urging portions 90 are provided at equal intervals in the circumferential direction of the circular flange portion 30 c. The valve frame biasing portion 90 is preferably provided at three or more positions corresponding to the valve sheet biasing portion 80. The plurality of valve frame biasing portions 90 are arranged in a set (set) of two. The pair of valve frame biasing portions 90 are disposed at positions corresponding to both ends of a diameter passing through the center O of the movable valve frame portion 60.

The plurality of the valve frame biasing portions 90 are provided in groups (sets) spaced apart from each other in the circumferential direction of the movable valve frame portion 60. As a specific arrangement of the plurality of the valve frame biasing portions 90, fig. 12 can show a configuration in which four valve frame biasing portions 90 are arranged at the same angular position (90 °) when viewed from the center O of the movable valve frame portion 60.

The angular position of the valve frame urging portion 90 in the circumferential direction of the circular flange portion 30c is set so as to overlap the angular position of the valve sheet urging portion 80 in the circumferential direction of the movable valve sheet portion 50 as viewed from the center O of the valve sheet 50 d. The frame biasing portion 90 and the sheet biasing portion 80 are disposed on the same straight line passing through the center O of the sheet 50 d. The valve frame biasing portion 90 is disposed on a straight line passing through the center O at a position farther from the center O of the valve sheet 50d than the valve sheet biasing portion 80.

The valve frame urging portion 90 guides (restricts) the movement of the neutral valve portion 30 and the movable valve frame portion 60 in the flow passage H direction. The valve frame biasing portion 90 can change the thickness dimension in the flow path H direction between the neutral valve portion 30 and the movable valve frame portion 60. The valve frame urging portion 90 reciprocates the movable valve frame portion 60 in the reciprocation directions B1 and B2 with respect to the circular flange portion 30 c.

The valve frame biasing portion 90 connects the circular flange portion 30c of the neutral valve portion 30 and the outer frame plate 60e of the movable valve frame portion 60. The biasing portion hole 68 is provided in the outer frame plate 60e of the movable valve frame portion 60. The biasing portion hole 68 is formed in a cylindrical shape having an axis in the flow passage H direction. The biasing portion hole 68 is provided to penetrate the outer frame plate 60e of the movable valve frame portion 60.

As will be described later, the biasing portion hole 68 is closed by the pressure receiving portion 93 in the outer frame plate 60e at the surface facing the second opening 12 b. The urging portion hole 68 does not block the opening at a position close to the first opening portion 12a in the flow passage H direction. That is, the biasing portion hole 68 opens in the same direction as the biasing portion hole 58 of the movable valve plate portion 50. The biasing portion hole 68 is provided in the movable valve frame portion 60 in the radial direction at a position close to the outer peripheral crank portion 60c on the radially inner side of the outer frame plate 60 e.

The valve frame urging portion 90 includes a valve frame guide pin 91, a valve frame coil spring 92, and a restricting cylinder 95.

The valve frame guide pin 91 is constructed of a rod-shaped body having a substantially uniform thickness dimension. The valve frame guide pin 91 penetrates the valve frame biasing portion 90. The valve frame guide pin 91 is erected in the flow passage H direction. The valve frame guide pin 91 is fixed to the outer frame plate 60e of the movable valve frame portion 60. The valve frame guide pin 91 is disposed coaxially with the biasing portion hole 68 of the outer frame plate 60 e. The base 91b of the valve frame guide pin 91 is provided with a pressure receiving portion 93 having a diameter larger than the diameter of the long shaft portion of the valve frame guide pin 91.

The pressure receiving portion 93 is fixed to the biasing portion hole 68 at a position facing the second opening 12b in the flow passage H direction. The pressure receiving portion 93 blocks an opening of the biasing portion hole 68 facing the second opening portion 12b in the flow passage H direction. The pressure receiving portion 93 forms the bottom of the urging portion hole 68. That is, the base portion 91b of the valve frame guide pin 91 forms the bottom of the biasing portion hole 68 as the pressure receiving portion 93. The pressure receiving portion 93 may be screwed to the opening of the biasing portion hole 68. In this case, the valve frame guide pin 91 may have a bolt shape.

The pressure receiving portion 93 is exposed to a surface of the movable valve frame portion 60 facing the valve box biasing portion 70 described later. The base portion 91b of the valve frame guide pin 91 is fixed to the outer frame plate 60e of the movable valve frame portion 60.

The long axis portion of the valve frame guide pin 91 is erected from the biasing portion hole 68 of the outer frame plate 60e toward the round flange portion 30 c. A concave portion 30cm is provided on the surface of the circular flange portion 30c facing the first opening 12 a.

A through hole 30g penetrating the circular flange 30c in the flow path H direction is provided at the center of the recess 30 cm.

A position near the front end 91a of the valve frame guide pin 91 is slidably inserted through the through hole 30 g.

Therefore, the tip end 91a of the valve frame guide pin 91 penetrates the circular flange portion 30 c. The front end 91a of the valve frame guide pin 91 may be located in the recess 30cm provided in the round flange portion 30 c. The axial length of the tip end 91a of the valve frame guide pin 91 is set so as not to be closer to the valve housing inner surface 10A than the valve frame gasket 61 in the flow passage H direction.

A neutral spacer 94 is provided around the tip end 91a of the valve frame guide pin 91.

The neutral spacer 94 is attached to the tip end 91a of the valve frame guide pin 91 by a C-ring 94 a. The neutral spacer 94 may be located inside the recess 30 cm.

A restricting cylinder 95 that is slidable with respect to the valve frame guide pin 91 is provided on the radially outer side of the long axis portion of the valve frame guide pin 91 at the axial center.

The restricting cylinder 95 has a cylindrical shape coaxial with the long axis portion of the valve frame guide pin 91. The restricting cylinder 95 restricts the sliding position and the sliding direction of the valve frame guide pin 91. The axial dimension of the restraining cylinder 95 is smaller than the axial dimension of the valve frame guide pin 91. A bush 95a that contacts the valve frame guide pin 91 is disposed radially inward of the regulating cylinder 95.

A flange portion 95f is provided around one end of the restricting cylinder 95.

The flange 95f is fixedly connected to the circular flange 30c at a position corresponding to the back surface of the recess 30 cm. The restricting cylinder 95 is fixed to the surface of the circular flange portion 30c facing the outer frame plate 60e via the flange portion 95 f.

The flange portion 95f and the regulating cylinder 95 have a through hole 95g extending in the flow path H direction. The through hole 95g communicates with the flange 95f and the restricting cylinder 95. The through hole 95g is located coaxially with the through hole 30 g. Similarly to the through hole 30g, a position near the distal end 91a of the valve frame guide pin 91 is slidably inserted through the through hole 95 g.

The spool coil spring 92 configures the spool urging portion 90 as an auxiliary spring. The spool coil spring 92 is housed inside the biasing portion hole 68. The spool coil spring 92 is disposed coaxially at a position around the spool guide pin 91.

The spool coil spring 92 is an elastic member such as a spring, and is arranged to have an urging shaft parallel to the axis of the urging portion hole 68.

One end of the spool coil spring 92 abuts against a pressure receiving portion 93 around the base portion 91b of the spool guide pin 91. The other end of the spool coil spring 92 abuts against a flange portion 95f around the through hole 95 g. The spool coil springs 92 urge the flange portions 95f around the base portions 91b and the through holes 95g of the spool guide pins 91 in the flow path H direction in directions opposite to each other. The valve frame coil spring 92 is formed of, for example, a double-layer coil spring, and can also strengthen the biasing force.

In the valve frame biasing portion 90, when the movable valve frame portion 60 moves relative to the neutral valve portion 30, the valve frame guide pin 91 moves in the axial direction in the through hole 95g of the regulating cylinder 95 fixed to the round flange portion 30 c. At this time, the valve frame guide pin 91 slides with respect to the bush 95 a. Then, the front end 91a of the valve frame guide pin 91 protrudes from the recess 30cm toward the valve housing inner surface 10A.

Thereby, the flange portion 95f of the regulation cylinder 95 and the pressure receiving portion 93, which is the bottom of the biasing portion hole 68, approach each other in the flow passage H direction. At this time, the spool coil spring 92 contracts. The pressure receiving portion 93 and the flange portion 95f are pressed in the direction of being spaced apart from each other by the urging force of the contracted spool coil spring 92.

That is, the pressure receiving portion 93 at the bottom of the biasing portion hole 68 and the flange portion 95f on the back surface of the circular flange portion 30c are displaced so as to be spaced apart from each other in the flow passage H direction. Thereby, the movable valve frame portion 60 is displaced with respect to the neutral valve portion 30.

In this way, the thickness dimensions of the neutral valve portion 30 and the movable valve frame portion 60 in the flow path H direction can be changed by the valve frame biasing portion 90. The valve frame biasing portion 90 displaces the movable valve frame portion 60 in the reciprocation directions B1 and B2 with respect to the neutral valve portion 30 that is not displaced in the flow passage H direction.

At this time, the restricting cylinder 95 restricts the valve frame guide pin from being tilted in the axial direction in the valve frame biasing portion 90. When the movable valve frame portion 60 is displaced in the flow path H direction relative to the neutral valve portion 30 by the valve frame biasing portion 90, the movement direction of the movable valve frame portion 60 is restricted so as not to deviate from the reciprocation directions B1 and B2. Therefore, the movable valve frame portion 60 can be moved in parallel without changing the posture with respect to the neutral valve portion 30.

At the same time, the movable valve frame portion 60 may be restricted so as not to move in a direction other than the flow path H direction with respect to the neutral valve portion 30. Specifically, the movable valve frame portion 60 fitted to the circular portion 30a can be prevented from moving in the circumferential direction. Thus, during the pendulum operation of the valve body 5, the holding state of the movable valve frame portion 60 with respect to the neutral valve portion 30 can be stabilized, and the operational stability of the gate valve 100 can be improved.

Further, when the movable valve frame portion 60 is displaced in the flow path H direction with respect to the neutral valve portion 30, since the valve frame guide pin 91 is parallel to the sheet guide pin 81, the movable valve plate portion 50 is also displaced in the reciprocation directions B1 and B2 following the displacement of the movable valve frame portion 60 by the sheet biasing portion 80. In addition, the case where the differential pressure in the flow path H direction is applied to the valve sheet 50d is not limited to this.

Here, regarding the displacement of the movable valve frame portion 60 in the flow passage H direction, when the neutral valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 slide on each other by the plate biasing portion 80 and the frame biasing portion 90, the sliding directions thereof can be regulated so as not to deviate from the reciprocation directions B1, B2. Further, when the neutral valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 slide, the posture of the neutral valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 does not change, and the relative parallel movement is possible.

The valve housing 10 incorporates a plurality of valve housing urging portions 70.

The valve box urging portion 70 constitutes an elevating mechanism that presses the movable valve frame portion 60 in a direction toward the sealing surface. The valve housing biasing portion 70 is disposed at a position where it can bias the movable valve frame portion 60 in a direction approaching the first opening portion 12a in the flow passage H direction, that is, at a position around the second opening portion 12 b.

The valve housing urging portion 70 is the valve housing urging portion 70 in the first to second embodiments.

In the valve housing urging portion 70 of the present embodiment, the expansion link 72 is extendable in the flow path H direction in a direction from the fixed portion 71 toward the first opening portion 12 a.

The valve housing urging portion 70 is provided with a multi-stage seal structure so that oil as the working fluid does not leak into the hollow portion 11 on the vacuum side during hydraulic driving.

An annular seal member (O-ring) 77f is provided around the expansion link 72, for example, at a position close to the movable valve frame portion 60. The expansion link 72 is expandable and contractible in a state of sealing the boundary between the fixed portion 71 and the hollow portion on the vacuum side.

The valve housing urging portion 70 has a function of moving the movable valve frame portion 60 toward the first opening portion 12 a. The valve housing urging portion 70 closes the flow passage H by bringing the movable valve frame portion 60 into contact with the valve housing inner surface 10A and pressing the movable valve frame portion 60 against the valve housing inner surface 10A (valve closing operation).

The valve housing urging portion 70 is disposed in the valve housing 10 at a position where it can be pressed without changing the posture of the movable valve frame portion 60. Specifically, the valve box biasing portion 70 is disposed such that the axis of the expansion link 72 is aligned with the axis of the valve frame guide pin 91 of the valve frame biasing portion 90.

The distal end portion 72a of the expansion link 72 is disposed so that the portion thereof that presses the valve frame biasing portion 90 is the base portion 91b of the valve frame guide pin 91. That is, the front end portion 72a of the expansion link 72 is disposed so that the portion thereof that presses the valve frame biasing portion 90 is the pressure receiving portion 93 of the valve frame guide pin 91.

The plurality of valve housing urging portions 70 are provided spaced apart from each other along the periphery of the outline of the second opening portion 12 b. A plurality of the valve housing urging portions 70 are provided at equal intervals in the circumferential direction of the contour of the second opening portion 12 b.

The valve housing biasing portion 70 is preferably provided at three or more positions corresponding to the valve frame biasing portion 90. The plurality of valve box biasing portions 70 are arranged in a set (set) of two. The valve box biasing portions 70 are disposed at positions radially outside of both ends on a diameter (straight line) passing through the center O of the second opening portion 12 b. The set of valve housing biasing portions 70 are disposed at positions corresponding to both ends of a diameter passing through the center O of the movable valve frame portion 60, as in the case of the valve housing biasing portion 90.

The plurality of valve housing urging portions 70 are provided in groups (sets) spaced from each other in the circumferential direction of the contour of the second opening portion 12 b. As a specific arrangement of the plurality of manifold biasing members 70, fig. 12 shows a configuration in which four manifold biasing members 70 are arranged at the same angular position (90 °) when viewed from the center O of the second opening portion 12 b.

The angular position of the valve housing biasing portion 70 in the circumferential direction of the circular flange portion 30c is set so as to overlap the angular positions of the valve sheet biasing portion 80 and the valve frame biasing portion 90 in the circumferential direction of the movable valve sheet portion 50 when viewed from the center O of the second opening portion 12 b.

The valve housing biasing portion 70, the valve frame biasing portion 90, and the valve sheet biasing portion 80 are disposed on the same straight line passing through the center O of the valve sheet 50 d. Similarly to the valve frame biasing member 90, the valve box biasing member 70 is disposed on a straight line passing through the center O at a position farther from the center O of the valve sheet 50d than the valve sheet biasing member 80.

When the flow passage communication state at the valve opening blocking position (fig. 11 and 13) is changed to the valve closing state (fig. 14 to 17), the valve housing urging portion 70 hydraulically expands the expansion link 72.

At this time, the valve housing urging portion 70 urges the movable valve frame portion 60 with which the distal end portion 72a abuts. Thereby, the movable valve frame portion 60 moves toward the first opening portion 12a along the flow passage H direction. The valve frame gasket 61 is in close contact with the valve box inner surface 10A around the first opening portion 12 a.

The plurality of valve box biasing portions 70 can perform the extending operation of the extensible rod 72 almost simultaneously.

Here, the distal end portion 72a of the extensible rod 72 abuts against the pressure receiving portion 93 located at a position where the axis of the extensible rod 72 extends. Since the pressure receiving portion 93 is fixed to the bottom position of the biasing portion hole 68, the pressing force of the extendable rod 72 is transmitted to the outer peripheral crank portion 60c through the pressure receiving portion 93 and the outer frame plate 60 e.

At this time, the position of the movable valve frame portion 60 with respect to the neutral valve portion 30 is regulated by the valve frame guide pin 91 and the regulating cylinder 95. The axis of the valve frame guide pin 91 is aligned with the axis of the extension rod 72. Thus, when the movable valve frame portion 60 moves in the flow path H direction with respect to the neutral valve portion 30, the pressing force of the expansion link 72 is applied to the valve frame guide pin 91 in a state where the position of the valve frame guide pin 91 and the position of the expansion link 72 are aligned in the moving direction of the movable valve frame portion 60.

Next, the operation of the gate valve 100 according to the present embodiment will be described in detail.

First, in the gate valve 100 of the present embodiment, a state is considered in which the valve body 5 is located at a retracted position which is a hollow portion 11 where the flow path H is not provided, as shown by a broken line in fig. 9. At this time, the movable valve portion 40 does not contact with the valve housing inner surface 10A and the valve housing inner surface 10B.

In this state, the rotary shaft 20 is rotated in a direction indicated by reference numeral R01 (a direction intersecting the flow path H direction) by the rotary shaft driving unit 200. Then, the neutral valve portion 30 and the movable valve portion 40 rotationally move in the direction R01 in a pendulum motion. By this rotation, as indicated by a solid line in fig. 9, the valve body 5 moves from the retracted position to the valve opening blocking position which is a position facing the first opening portion 12 a.

In a state where the valve body 5 is positioned at the valve opening shielding position, the valve housing urging portion 70 extends the expansion link 72 in a direction approaching the first opening portion 12a in the flow passage H direction. The expansion link 72 abuts against the movable valve frame portion 60 and presses the movable valve frame portion 60. The movable valve frame portion 60 moves in a direction to approach the first opening portion 12 a.

The movable valve frame portion 60 abuts against the valve housing inner surface 10A by the valve housing urging portion 70. At this time, the valve frame gasket 61 is in close contact with the valve box inner surface 10A located around the first opening portion 12 a. Thereby, as shown in fig. 14 to 17, the flow passage H is closed (valve closing operation).

On the contrary, in a state where the flow path H is closed, the valve housing urging portion 70 retracts the expansion link 72. This reduces the force applied from the expansion link 72 to the movable valve frame portion 60. Then, the movable valve frame portion 60 is pulled away from the inner surface of the valve casing 10 by the urging force of the valve frame urging portion 90. The sealing state between the movable valve frame portion 60 and the valve housing inner surface 10A is released.

Thereby, as shown in fig. 10 to 13, the flow path H is opened (release operation).

The valve closing operation and the releasing operation in the movable valve portion 40 are performed by the mechanical abutment operation by the valve housing urging portion 70 and the mechanical separation operation by the valve frame urging portion 90.

After the releasing operation, the rotary shaft 20 is rotated in the direction indicated by reference symbol R02 by the rotary shaft driving section 200. Then, the movable valve portion 40 is moved from the valve opening shielding position to the retreat position (retreat operation).

By the releasing operation and the retracting operation, a valve opening operation is performed to set the movable valve portion 40 in a valve opened state.

In a series of operations (valve opening operation, release operation, retraction operation), the valve sheet biasing portion 80 causes the movable valve frame portion 60 and the movable valve sheet portion 50 to be linked.

[ state of valve body at position enabling retreat operation (FREE) ]

Fig. 10 to 12 show a state in which the movable valve portion 40 (the movable valve frame portion 60, the movable valve sheet portion 50) in the valve opening blocking position is not in contact with either of the valve housing

inner surfaces

10A, 10B of the valve housing 10. This state is referred to as a free state of the valve body.

In the free state of the valve body, the expansion link 72 of the valve housing urging portion 70 is in a retracted state. At this time, the expansion link 72 is not projected from the valve box inner surface 10B, and is buried in a position closer to the fixing portion 71 than the valve box inner surface 10A. That is, the valve housing urging portion 70 does not contact the valve body 5. Further, the valve frame guide pin 91 does not protrude from the recess 30 cm.

Fig. 14 is an enlarged cross-sectional view along a flow path showing a peripheral portion of the gate valve according to the present embodiment. Fig. 15 is an enlarged sectional view along a flow path showing a valve box biasing portion, a valve frame biasing portion, and a valve sheet biasing portion of the gate valve according to the present embodiment.

Next, the valve housing urging portion 70 is driven from the free state of the valve body. Then, as indicated by an arrow F1 in fig. 14 and 15, the tip end portion 72a of the expansion link 72 abuts against the lower surface 60sb of the movable valve frame portion 60. At this time, the distal end portion 72a of the expansion link 72 abuts against the pressure receiving portion 93.

Thereby, the movable valve frame portion 60 moves toward the valve housing inner surface 10A. Further, the movable valve frame portion 60 moves and the valve frame gasket 61 comes into contact with the valve housing inner surface 10A, and is in a state of a valve closing position (valve closing state). Further, the valve frame guide pin 91 protrudes from the recess 30 cm.

At this time, the movable valve portion 50 is moved in the same direction as the movable valve frame portion 60 by the valve sheet biasing portion 80. Meanwhile, the movable poppet portion 50 and the movable poppet portion 60 maintain the sliding seal state by the sliding gasket 52.

In the free state of the valve element, the valve housing urging portion 70 brings the movable valve frame portion 60 into contact with the valve housing inner surface 10A of the valve housing 10 to close the flow passage H (valve closing operation).

[ State of the valve body in the valve-closed position (without Positive pressure or differential pressure) ]

Fig. 14 and 15 show a state in which the flow passage H is closed by the valve closing operation.

This state is referred to as a valve-closed state in which there is no positive pressure or differential pressure. The valve-closed state without the positive pressure or the differential pressure is a state in which the valve body 5 is in contact with one inner surface of the valve housing 10 and is not in contact with the other inner surface. That is, in the valve closed state where there is no positive pressure or differential pressure, the movable valve frame portion 60 of the valve element 5 contacts the valve box inner surface 10A around the first opening portion 12 a. Meanwhile, the valve body 5 does not contact the valve housing inner surface 10B located around the second opening portion 12B.

In the valve closed state where there is no positive pressure or differential pressure, the valve box biasing portion 70 maintains the state where the expansion rod 72 extends in the direction toward the movable valve frame portion 60. That is, the state in which the distal end portion 72a abuts against the lower surface 60sb of the movable valve frame portion 60 is maintained. Further, the valve frame gasket 61 is maintained in contact with the valve housing inner surface 10A around the first opening portion 12a of the valve housing 10. Further, the valve frame guide pin 91 is kept protruding from the recess 30 cm.

[ valve-closed state of valve body at Back pressure position ]

Fig. 16 is an enlarged cross-sectional view along a flow path showing a peripheral portion of the gate valve according to the present embodiment. Fig. 17 is an enlarged sectional view along a flow path showing a valve box biasing portion, a valve frame biasing portion, and a valve sheet biasing portion of the gate valve according to the present embodiment.

Fig. 16 and 17 show a state in which the flow passage H is closed in the back pressure state.

This state is referred to as a back pressure valve-closed state. The back pressure valve-closed state is a state in which the valve body 5 is in contact with the two valve housing

inner surfaces

10A, 10B in the flow passage H direction. That is, the back pressure valve-closed state is a state in which the movable valve plate portion 50 of the valve body 5 is in contact with the valve box inner surface 10B located around the second opening portion 12B while the movable valve frame portion 60 of the valve body 5 is in contact with the valve box inner surface 10A around the first opening portion 12 a. Here, the back pressure means that a pressure is applied to the valve body in a direction from a closed valve state to an open valve state.

When the valve body 5 receives back pressure in the extended state of the expansion link 72, the movable valve portion 50 moves while sliding in the reciprocating direction B2 (fig. 16 and 17) with respect to the movable valve frame portion 60 by the valve sheet biasing portion 80. The seal state between the movable valve frame portion 60 and the movable valve sheet portion 50 is maintained by the sliding gasket 52.

Thereby, the movable valve portion 50 collides with the valve housing inner surface 10B around the second opening portion 12B. At this time, the opposite pad 51 buffers the impact caused by the collision of the movable valve sheet portion 50. The mechanism in which the force received by the valve body 5 is received by the valve box inner surface 10B (inner body) of the valve box 10 is a back pressure cancellation mechanism.

Further, the back pressure valve-closed state is changed to a state without a positive pressure or a differential pressure. In this state, the movable valve frame portion 60 is pulled away from the inner surface of the valve casing 10 by the biasing force of the valve frame coil spring 92 of the valve frame biasing portion 90, and the movable valve frame portion 60 is retracted, thereby opening the flow passage H (release operation).

In the gate valve 100 of the present embodiment, when the vertical valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 slide with each other, the positions of the valve portions can be accurately regulated. That is, the position of the neutral valve portion 30 and the movable valve frame portion 60 can be accurately regulated. At the same time, the position of the movable valve frame portion 60 and the movable valve sheet portion 50 can be accurately regulated.

In particular, the sliding directions of the neutral valve portion 30, the movable valve sheet portion 50, and the movable valve frame portion 60 can be all restricted so as not to deviate from the reciprocation directions B1 and B2.

Further, when the neutral valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 slide, the posture of the neutral valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 does not change, and the relative parallel movement is possible.

Further, when the valve body 5 is operated in a pendulum manner, the posture of the neutral valve portion 30, the movable valve plate portion 50, and the movable valve frame portion 60 does not change, and the pendulum operation can be performed while maintaining the positional relationship of the valve body and the movable valve plate portion integrated with each other.

In the gate valve 100 of the present embodiment, when the telescopic rod 72 presses the movable valve frame portion 60, the position of the movable valve frame portion 60 is regulated with respect to the neutral valve portion 30 by the valve frame guide pin 91 and the regulating cylinder 95.

Since the valve housing biasing portion 70, the valve sheet biasing portion 80, and the valve frame biasing portion 90 are configured as described above, when the movable valve frame portion 60 moves in the flow path H direction with respect to the neutral valve portion 30, the pressing force of the expansion link 72 is applied to the valve frame guide pin 91 in a state where the position of the valve frame guide pin 91 and the position of the expansion link 72 are aligned in the moving direction of the movable valve frame portion 60.

Therefore, when the movable valve frame portion 60 is moved relative to the neutral valve portion 30 by the valve housing urging portion 70, the posture of the movable valve frame portion 60 relative to the neutral valve portion 30 can be stabilized very stably.

At the same time, when the movable valve frame portion 60 pressed by the expansion link 72 moves in the flow path H direction with respect to the neutral valve portion 30, the moving direction of the movable valve frame portion 60 coincides with the acting direction of the pressing force from the expansion link 72. Further, the pressing force from the expansion link 72 acts on the movable valve frame portion 60 at a position that is collinear with the moving direction of the movable valve frame portion 60.

This can suppress the generation of torque in the movable valve frame portion 60. Therefore, the occurrence of deformation of the movable valve frame portion 60 can be suppressed.

This improves the sealing performance of the movable valve frame portion 60, and improves the operational reliability of the movable valve frame portion 60.

In the present embodiment, the valve housing biasing member 70, the valve sheet biasing member 80, and the valve frame biasing member 90 are configured in two groups of four, respectively, but may be configured in other configurations. Specifically, the gate valve may have three groups of six or four groups of eight, and the number of the groups may be set according to the hole diameter of the gate valve 100.

The valve housing biasing member 70, the valve frame biasing member 90, and the valve sheet biasing member 80 may be arranged in different groups. In this case, it is also preferable to provide the same number of groups of the valve housing biasing portion 70 and the valve frame biasing portion 90.

The present embodiment can achieve the same effects as those of the above embodiments.

In the present invention, the respective configurations in the above embodiments may be appropriately selected and combined.

For example, a recess 935 may be formed in the connecting flange 911 or the chamber wall 912, and the

seal grooves

931a and 933a may be formed in the surface 10a of the valve housing 10. Alternatively, the

seal grooves

931a and 933a may be formed in the connecting flange 911 or the chamber wall 912, and the recess 935 may be formed in the surface 10a of the valve housing 10.

In order to make the second connection part 940 identical to the first connection part 930, an outer sealing region may be provided in addition to the inner sealing region 941, and two types of connection methods may be used in combination when the second connection part 940 is connected to the second chamber 920.

Description of the reference numerals

5 valve body

10 valve box

10a, 10b surface

11 hollow part

12a first opening part

12b second opening part

20 rotating shaft

30 neutral valve section

40 movable valve part

50 movable valve sheet part

54 movable valve part (movable valve part)

60 movable valve frame part

63 valve frame part

70 valve box force application part (push cylinder)

80 valve plate force application part (holding spring)

90 valve frame force application part (auxiliary spring)

100 gate valve

200 rotating shaft driving part

700 hydraulic drive unit

910 first chamber

911. 921 connecting flange

911b, 912b, 921b through hole

912 chamber wall portion

912a chamber opening

914. 924 surface

915 connecting cylinder

920 second chamber

930 first connecting part

931. 941 inner sealing area

931a, 933a, 941a seal groove

931b, 933b, 941b sealing member

932. Connecting part 942

932a, 942a fastening hole

933 outer sealing region

934. 944 metal contact region

935. 945 concave part

940 second connecting part

H flow channel

O center

Claims

1. A gate valve, comprising:

a valve box having a hollow portion, and a first opening portion and a second opening portion which are provided opposite to each other with the hollow portion therebetween and form a communicating flow passage;

a valve body capable of opening and closing the flow passage;

a movable valve portion provided in the valve body so as to be capable of changing a position in the flow passage direction;

a first connecting portion provided in the valve box and connected to the first chamber so as to close the first opening; and

a second connection portion provided in the valve box and connected to the second chamber so as to close the second opening portion,

the first connection portion has:

an inner sealing region provided along a periphery of the first opening portion and capable of sealing a surface of the valve housing and a surface of the first chamber;

a plurality of fastening holes located further to a radial outer side of the first opening portion than the inner seal region; and

an outer seal region located further to a radially outer side of the first opening portion than the fastening hole,

in a connection manner in which a connection part fastened into the fastening hole is exposed toward a vacuum side of the first chamber, sealing of the valve housing with the first chamber is performed by the outer sealing region,

and in a connection mode in which the connection member is exposed toward the atmosphere side of the first chamber, the valve housing is sealed from the first chamber by the inner seal region,

the connecting member may be applied to either one of a connection mode in which the connecting member is exposed to a vacuum side of the first chamber and a connection mode in which the connecting member is exposed to an atmosphere side,

a seal groove formed in the inner seal region and the outer seal region, the seal groove being formed on a surface of the valve housing, a seal member being disposed in the seal groove in any one of the inner seal region and the outer seal region,

the first connection portion is recessed more toward the hollow portion in a surface of the valve housing at a position further inward than the outer seal region in a radial direction of the first opening portion than at a position further outward than the outer seal region in the radial direction of the first opening portion.

2. The gate valve of claim 1,

in the first connection portion, a surface of the valve housing and a surface of the first chamber contact each other at a position radially outside the outer seal region of the first opening portion.

3. The gate valve of claim 1 or 2,

in the first connection portion, a surface of the valve housing and a surface of the first chamber are spaced apart from each other at a position radially inward of the first opening portion than the outer seal region.

4. The gate valve of claim 1 or 2,

in the first connection portion, a gap is formed between a surface of the valve housing and a surface of the first chamber from a position further inside than the outer seal region in a radial direction of the first opening portion to an edge portion of the first opening portion.

5. A gate valve, comprising:

a valve body capable of opening and closing the flow passage;

a rotating shaft rotatably supporting the valve body between a retracted position in the hollow portion and a valve opening shielding position, and having an axis extending in a flow path direction;

a rotary shaft driving unit configured to rotate the rotary shaft to rotationally drive the valve body;

a valve housing urging portion that is provided in the valve housing and closes the flow passage by moving the movable valve portion in the flow passage direction at the valve opening shielding position;

a hydraulic drive unit that drives the valve housing biasing unit by supplying a hydraulic pressure to the valve housing biasing unit;

the first connection portion has:

a plurality of connecting members provided along the periphery of the first opening; and

an inner seal region and an outer seal region which are provided at positions on both sides of the connection member in a radial direction of the first opening portion and along a periphery of the first opening portion and which can seal a surface of the valve housing and a surface of the first chamber,

in a connection mode in which the connection member is exposed toward the vacuum side of the first chamber, the valve housing is sealed from the first chamber by the outer seal region,

a seal groove formed on a surface of the valve housing, the seal groove being formed in the inner seal region and the outer seal region, a seal member being disposed in the seal groove of either one of the inner seal region and the outer seal region,

6. The gate valve of claim 5,

7. The gate valve of claim 5 or 6,

8. The gate valve of claim 5 or 6,

9. The gate valve of claim 5 or 6,

in the first connection portion, the connection member is exposed toward a vacuum side of the first chamber, and a seal member is disposed in the seal groove of the outer seal region.

10. The gate valve of claim 5 or 6,

in the first connection portion, the connection member is exposed toward an atmosphere side of the first chamber, and a seal member is disposed in the seal groove of the inner seal region.

11. The gate valve of claim 5 or 6,

the valve box urging portion is disposed around the second opening portion.