JP2012193812A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gate valve having a simple constitution, in which a valve element is correctly and easily mounted to a rotary shaft.SOLUTION: Contact surfaces of a recessed part 95 and a projection part 93 in an insertion process are limited to first parallel surfaces 96a, 96b and second parallel surfaces 97a, 97b, and first inclined surfaces 93e, 93f of the projection part 93 are not brought into contact with second inclined surfaces 95e, 95f of the recessed part 95. Thus, even when the clearance (gap) between the contact surfaces (the first parallel surfaces 96a, 96b, the second parallel surfaces 97a, 97b) between the recessed part 95 and the projection part 93 is set to be very small, the friction force when pushing the recessed part 95 into the projection part 93 is reduced, and the recessed part 95 and the projection part 93 can be smoothly fitted to each other.

Description

  The present invention relates to a gate valve suitable for a pendulum type, a direct acting type, a door type, or the like that slides a valve plate in addition to an operation of opening and closing a flow path by a valve plate. In particular, the present invention partitions (closes) a flow path connecting two spaces for performing different pressures and different processes in a vacuum apparatus or the like, and opens the partition state (connects the two spaces). About.

  For example, in a vacuum device or the like, two spaces that are divided into two spaces having different degrees of vacuum, such as between a chamber and piping, between piping and piping, or between piping and a pump, etc. A partition valve that connects the two is provided. Various types of valves are known as such partition valves.

  For example, a structure is known in which a valve plate is slid to introduce a valve body onto a flow path (flow path partitioning position), and an opening constituting the flow path is closed with a valve plate (valve closing position). As a valve having such a structure, a pendulum type, a direct acting type, a door type and the like are known.

  The direct acting type gate valve has a structure in which a valve plate fixed to a valve rod (support) is arranged in a hollow portion of a valve box in which a first opening and a second opening forming a flow path are formed. Have In this structure, the valve stem is moved linearly in the longitudinal direction, and the valve plate is inserted into the valve opening / closing position of the opening (flow path), or the valve plate is retracted with no opening formed. Retract to position.

  As the conventional direct-acting gate valve, there are a valve body composed of two first valve plates and a second valve plate connected by bellows, and an actuator disposed in the center of the valve plate between the two valve plates. A gate valve including a valve box in which an opening that forms a flow path is formed is known. In this gate valve, the first valve plate is brought into contact with and pressed against the inner surface around the opening of the valve box by the actuator to close the flow path, or the first valve plate is closed by the actuator to the inner surface of the valve box. The flow path is opened by being spaced apart from (see, for example, Patent Document 1).

  The pendulum type gate valve includes a valve box having a first opening and a second opening that form a flow path and having a hollow portion, and a hollow portion that is fixed to the rotating shaft and is perpendicular to the rotating shaft. A structure in which a support body spreading in a direction parallel to the surface and a valve body fixed to the support body (a valve plate in the case of a structure in which a seal ring plate is provided in the opening) are arranged. Have. In this gate valve, the rotary shaft is rotated to rotate the valve body, and the valve body is inserted into the valve opening / closing position of the opening (flow path), or the valve body is formed by the opening. Retreat to an unoccupied retreat position.

  The conventional pendulum type gate valve is integrally formed in the housing in a hollow portion of the housing, a valve plate that can be rotated on a rotating shaft, a slidable seal ring plate disposed in an opening of the housing, and the housing. A structure in which an actuator for sliding the seal ring plate on a flange is provided is known. In this gate valve, the seal ring plate is brought into contact with and pressed against the valve plate to close the flow path, or the seal ring plate is separated from the valve plate to open the flow path (for example, Patent Documents). 2).

  The actuator of this pendulum type gate valve has a structure in which a bolt, an annular chamber (cylinder), a piston, and a spring are arranged in series in the sliding direction of the seal ring plate. Therefore, when closing the flow path, the restoring force generated in the spring is transmitted to the seal ring plate via the piston, cylinder, and bolt.

In such a conventional pendulum type gate valve, in order to attach the valve body to the rotating shaft, a connecting member is provided at one end of the rotating shaft, and the valve body is engaged with the connecting member so that the valve body and the rotating shaft are engaged. And connected.
17 and 18 show an example of a conventional engagement structure between the connecting member and the valve body. For example, the gate valve 201 shown in FIG. 17 includes a rectangular engagement protrusion 203 formed at one end of the valve body 202 and a connection member 205 attached to the rotating shaft 204. The connection member 205 has a recess 206 that engages with the engagement protrusion 203.

  And when attaching the valve body 202 to the rotating shaft 204, the engagement protrusion 203 is inserted in the recessed part 206 of the connection member 205 (refer Fig.17 (a)). Then, the valve body 202 is pushed toward the connection member 205 until the front end surface of the engagement protrusion 203 contacts the inner surface of the recess (see FIG. 17B).

Further, for example, in the gate valve 211 shown in FIG. 18, an engagement protrusion 213 formed on one end of the valve body 212 and having a surface inclined with respect to the attachment direction, and a connection member 215 attached to the rotating shaft 214 It has. The connection member 215 is formed with a recess 216 that engages with the engagement protrusion 213.
And when attaching the valve body 212 to the rotating shaft 214, the engagement protrusion 213 is aligned with the recessed part 216 of the connection member 225 (refer Fig.18 (a)). Then, the engagement protrusion 213 is held so as to be aligned with the recess 216, and the valve body 212 is fixed to the connection member 215 with a screw or the like (see FIG. 18B).

JP 2002-181205 A Japanese Patent No. 3655715

  However, in the above-described conventional gate valve mounting structure of the rotary shaft and the valve body, an extremely large force is required for mounting the valve body on the connecting member fixed to the rotary shaft, or the correct mounting position is set. There was a problem that it was difficult to attach the valve body without displacement.

  For example, in the conventional gate valve 201 shown in FIG. 17, in order to attach the valve body 202 to the connecting member 205 without deviation, the clearance at the contact portion between the engagement projection 203 and the recess 206 is extremely small. For this reason, when the rectangular engaging protrusion 203 is pushed into the recess 206, the pushing length becomes long and the frictional force becomes large, so that a large force is required for attachment. Therefore, there is a problem that it is difficult to detach the valve body 202 from the connection member 205.

  On the other hand, in the conventional gate valve 210 shown in FIG. 18, for example, the engagement protrusion 213 can be easily fitted in the recess 216, but the valve body 212 is held at the correct mounting position and formed on the rotating shaft 214. It is necessary to match the screw hole formed with the screw hole formed in the engagement protrusion 213 and to fix the screw without deviation, and each component is required to have high processing accuracy. In addition, since a high degree of alignment is required, there is a problem that workability is poor.

  The present invention has been made to solve such a conventional problem, and provides a gate valve capable of attaching a valve body accurately and easily to a rotating shaft with a simple configuration. It is the purpose.

In order to solve the above problems, an embodiment of the present invention provides the following gate valve.
That is, the gate valve in one embodiment of the present invention is a gate valve,
A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other;
A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening;
A rotating shaft that rotates the neutral valve body between a valve closing position that closes the first opening and a valve opening position that is retracted from the first opening;
A connection member fixed to the rotary shaft in the valve box and holding the neutral valve portion in a detachable manner;
The neutral valve body has a neutral valve portion connected to the rotating shaft via the connection member, and a movable valve portion connected to the neutral valve portion so that the position in the flow direction can be changed,
The connection member and the neutral valve portion extend in parallel with each other along the flow path direction and a pair of first parallel surfaces spaced apart at a first interval, and extend in parallel with each other along the flow path direction. A pair of second parallel surfaces spaced apart by a second interval wider than the interval are in contact with each other.

The movable valve portion is provided with a seal portion that is provided around the valve plate and is in close contact with the inner surface of the valve box around the first opening,
A first movable valve portion connected to the neutral valve portion so as to be capable of changing the position in the flow path direction;
A first urging portion that urges the first movable valve portion toward the first opening in the flow path direction so that the seal portion can be brought into close contact with the inner surface of the valve box around the first opening;
A second movable valve portion slidable in the flow path direction with respect to the first movable valve portion;
A second biasing portion that drives the first movable valve portion and the second movable valve portion so as to be able to contract the flow direction thickness dimension against the biasing force of the first biasing portion;
The first movable valve portion is connected to the neutral valve body in such a manner that the position of the first movable valve portion and the second movable valve portion can be changed in the flow passage direction in response to the change in the thickness dimension in the flow passage direction. And a third urging portion that urges the first movable valve portion toward the flow path direction center position side.

The connecting member is formed with a protrusion having a first contact surface constituting the first parallel surface and a second contact surface constituting the second parallel surface,
At one end of the neutral valve body, there is formed a recess that has a third contact surface that constitutes the first parallel surface and a fourth contact surface that constitutes the second parallel surface and fits with the protrusion. It is characterized by.

  The concave portion is formed on one side and the other side of the neutral valve portion in the flow path direction, respectively.

  The rotary shaft and the neutral valve portion are coupled by a male screw that passes through the rotary shaft and the connecting member, and a female screw that is formed in the neutral valve portion and is screwed into the male screw. .

The gate valve in one embodiment of the present invention is a gate valve, and is a gate valve,
A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other;
A valve body arranged in the hollow portion of the valve box and capable of closing the first opening;
A rotating shaft for rotating the valve body between a valve closing position for closing the valve body with respect to the first opening and a valve opening position for opening the valve body retracted from the first opening;
A connection member fixed to the rotary shaft in the valve box and holding the valve part in a detachable manner;
The connection member and the valve portion extend in parallel to each other along the flow path direction and a pair of first parallel surfaces spaced apart by a first interval, and extend in parallel to each other along the flow path direction. A pair of second parallel surfaces spaced apart at a wider second interval are in contact with each other.

  According to the gate valve of one embodiment of the present invention, when the neutral valve body is attached to the connecting member fixed to the rotating shaft, the contact surface between the concave portion of the neutral valve portion and the protruding portion of the connecting member is the first parallel. Limited to planes and second parallel planes. Thus, for example, even when the clearance (gap) of the contact surface (first parallel surface, second parallel surface) between the recess and the projection is set to be extremely small, the recess is pushed into the projection compared to the conventional case. The pushing length is shortened, and the recess and the projection can be fitted smoothly and with high mounting accuracy.

It is a cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention, and is a figure which shows the case where the valve body is made into the retractable position. FIG. 3 is an enlarged view of a main part near a cylinder in FIG. 2. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention, and is a figure which shows the case where a valve body is made into the valve closed position. It is a principal part enlarged view of the main spring vicinity in FIG. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention, and is a figure which shows the case where a valve body is made into a retracted position. FIG. 8 is an essential part enlarged plan view (FIG. 7A) and an essential part enlarged sectional view (FIG. 7B) showing a connecting member fixed to a rotating shaft. It is a principal part enlarged plan view (Drawing 8 (a)) which shows one end of a neutral valve part connected with a connecting member, and a principal part expanded sectional view (Drawing 8 (b)). It is a principal part enlarged plan view (Drawing 9 (a)) and a principal part expanded sectional view (Drawing 9 (b)) which show the state where a connecting member and a neutral valve part were made to fit. It is explanatory drawing which shows a mode at the time of attaching a neutral valve part to a connection member. It is a top view which shows the shape of the connection part of the neutral valve part which is a modification of 1st Embodiment, and a connection member. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 2nd Embodiment of this invention, and is the principal part enlarged view of a cylinder vicinity. It is a cross-sectional view which shows the structure of the gate valve in 3rd Embodiment of this invention. It is a principal part enlarged view of the neutral valve body vicinity in FIG. It is a figure which shows the shape of the opening part and valve plate which can be applied to the gate valve of embodiment of this invention. It is a principal part enlarged view of the connection pin vicinity in 4th Embodiment of this invention. It is explanatory drawing which shows the attachment part of the valve body and rotating shaft in the conventional gate valve. It is explanatory drawing which shows the attachment part of the valve body and rotating shaft in the conventional gate valve. It is a top view which shows the shape of the connection part of the neutral valve part in 5th Embodiment of this invention, and a connection member.

Hereinafter, an embodiment of a gate valve according to the present invention will be described with reference to the drawings.
In the drawings used in the following description, the dimensions and ratios of the respective components are appropriately changed from the actual ones in order to make the respective components large enough to be recognized on the drawings.
The technical scope of the present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit of the present invention.

  FIG. 1 is a plan view showing the configuration of the gate valve in the present embodiment. FIG. 2 is a longitudinal sectional view showing the structure of the gate valve in the first embodiment of the present invention, and is a view showing a case where the valve body is at the retractable position. FIG. 3 is an enlarged view of a main part showing a connection portion between the neutral valve portion and the first movable valve portion in FIG. 2 and the vicinity of the first and second urging portions. FIG. 4 is a longitudinal sectional view showing the structure of the gate valve according to the first embodiment of the present invention, and is a view showing a case where the valve body is in a hermetically closed position.

  FIG. 5 is an enlarged view of a main part showing a connection portion between the neutral valve portion and the first movable valve portion in FIG. 4 and the vicinity of the first and second urging portions. FIG. 6 is a longitudinal sectional view showing the configuration of the gate valve in the first embodiment of the present invention, and shows a case where the valve body is in the retracted position. FIG. 7 is an enlarged plan view (FIG. 7 (a)) and an enlarged sectional view (FIG. 7 (b)) of a main part showing a connecting member fixed to a rotating shaft. FIG. 8 is an enlarged plan view (FIG. 8 (a)) and an enlarged sectional view (FIG. 8 (b)) of a main part showing one end of a neutral valve part connected to the connecting member. FIG. 9 is an essential part enlarged plan view (FIG. 9 (a)) and an essential part enlarged sectional view (FIG. 9 (b)) showing a state in which the connecting member and the neutral valve part are fitted.

[Pendulum type gate valve]
As shown in FIGS. 1 to 3, the gate valve 1 of the first embodiment is a pendulum type gate valve.
The gate valve 1 is fixed to the rotary shaft 20, a valve box 10 provided with a first opening 12 a and a second opening 12 b facing each other, a rotary shaft 20 as a switching means penetrating the valve box 10, and the rotary shaft 20. And a neutral valve portion 30 connected to the rotary shaft 20 via the connection member 91.

  Further, the movable valve portion 40 connected to the neutral valve portion 30 so as to be movable in the axial direction of the rotary shaft 20 and a main spring (first biasing force) biased in the direction of expanding the thickness direction dimension of the movable valve portion 40. Portion) 70, a driving air cylinder (second urging portion) 80 that can be extended in a direction opposite to the urging direction of the main spring 70, and a position where the movable valve portion 40 is to be located at the center position side of the valve box 10. And an auxiliary spring (third urging portion) 90 for restriction. The neutral valve body 5 is composed of the neutral valve portion 30 and the movable valve portion 40. The movable valve unit 40 includes a second movable valve unit (movable valve plate unit) 50 and a first movable valve unit (movable valve frame unit) 60. A flow path H is set from the first opening 12a toward the second opening 12b. In the following description, the direction along the flow path H may be referred to as the flow path direction H.

When the rotating shaft 20 rotates in the direction indicated by the reference symbol A1 (the direction intersecting the flow path direction H), the neutral valve portion 30 fixed to the rotating shaft 20 via the connecting member 91 also follows the rotation in the direction A1. Rotate along Since the movable valve unit 40 is connected to the neutral valve unit 30 so as to be slidable only in the thickness direction, the movable valve unit 40 rotates integrally with the neutral valve unit 30.
By rotating the neutral valve portion 30 in this way, the valve H is closed from the retracted position where the flow path H is not provided to the position corresponding to the first opening 12a. The movable valve unit 40 moves by a pendulum motion.

  Then, as described later, the seal portion of the movable valve frame portion 60 is actuated by the action of expanding the thickness dimension of the movable valve portion 40 in the direction of the flow path H by acting in the extending direction of the main spring 70 (valve closing operation). 61 and the reaction force transmission portion 59 of the movable valve plate portion 50 press the inner surface 15a and the inner surface 15b of the valve box 10, respectively, so that the movable valve portion 40 closes the flow path H.

On the contrary, when the air cylinder 80 acts, the pressing force of the air cylinder 80 overcomes the urging force of the main spring 70 and the thickness of the movable valve portion 40 contracts in the flow path direction H. After both the front and back surfaces are separated from the inner surface 15a and the inner surface 15b of the valve box 10 (release operation), when the rotary shaft 20 rotates in the direction indicated by reference numeral A2 (retraction operation), the neutral valve portion 30 and the movable valve are rotated according to this rotation. The part 40 also rotates in the direction A2.
By the release operation and the retreat operation, the movable valve unit 40 performs a valve open operation that retreats from the valve opening / closing position to the retraction position to open the valve.

[Valve box 10]
The valve box 10 is constituted by a frame having a hollow portion 11. A first opening 12a is provided on the upper surface of the frame in the figure, and a second opening 12b is provided on the lower surface of the frame in the figure.
The gate valve 1 is inserted between a space where the first opening 12a is exposed (first space) and a space where the second opening 12b is exposed (second space). The gate valve 1 partitions (closes) the flow path H connecting the first opening 12a and the second opening 12b, that is, the flow path H connecting the first space and the second space. The partitioning state is opened (connecting the first space and the second space).
The hollow portion 11 of the valve box 10 includes a rotary shaft 20, a neutral valve portion 30, a movable valve portion 40, a main spring (first urging portion) 70, an air cylinder (second urging portion) 80, and an auxiliary spring (first 3 biasing portions) 90 are provided.

[Rotating shaft 20, neutral valve portion 30, connecting member 91]
The rotating shaft 20 extends substantially parallel to the flow path H, penetrates the valve box 10 and is rotatably provided.
A connecting member 91 is fixed to the rotating shaft 20. The connecting member 91 is a substantially flat plate member, for example, and is fixed to the one end 20a of the rotating shaft 20 with a screw 92 as shown in FIG. As shown in FIG. 7B, the connection member 91 is formed with a protrusion 93 having a substantially T-shaped cross-sectional shape in which one end side along the flow path direction H is widened.

  On the other hand, the neutral valve portion 30 extends in a direction perpendicular to the axis of the rotary shaft 20 and has a surface parallel to this direction. As shown in FIG. 1, the neutral valve portion 30 includes a circular portion 30 a that overlaps the movable valve portion 40, and a rotating portion 30 b that rotates the circular portion as the rotating shaft 20 rotates. The rotating part 30b is located between the rotating shaft 20 and the circular part 30a, and the width of the rotating part 30b gradually increases from the rotating shaft 20 toward the circular part 30a. The rotary shaft 20 and the neutral valve section 30 are provided so as to rotate with respect to the valve box 10 but do not change in position in the flow path H direction.

  As shown in FIG. 8, a recess 95 that fits with the protrusion 93 of the connection member 91 is formed at one end of the neutral valve portion 30. The recess 95 has a substantially T-shape whose cross-sectional shape matches the cross-sectional shape of the connection member 91. The concave portions 95 are formed as concave portions 95A and 95B on both sides of the one surface side 30A and the other surface side 30B in the flow path direction H of the neutral valve portion 30, respectively. Accordingly, the rotating shaft 20 (see FIG. 9) can be selectively connected to the neutral valve portion 30 either on the upper side or the lower side along the flow path direction H. Alternatively, the entire neutral valve body 5 can be attached to both surfaces of the rotating shaft 20. That is, if the neutral valve body 5 is attached to the recess 95A side of the connection member 91, the movable valve portion 40 is in a direction to close the first opening portion 12a (see FIG. 2) when the gate valve 1 is closed. Conversely, when the neutral valve body 5 is attached to the concave portion 95B side of the connection member 91, the movable valve portion 40 is in a direction to close the second opening 12ab.

  As shown in FIG. 9, the protrusion 93 formed on the connection member 91 and the recess 95 formed on the neutral valve portion 30 are fitted to each other. As shown in FIG. 9 (a), the connection member 91 and the neutral valve portion 30 in the engaged state extend in parallel with each other along the flow path direction H and are a pair of first parallels separated by a first interval t1. The surfaces 96a and 96b are in contact with each other by a pair of second parallel surfaces 97a and 97b that extend in parallel to each other along the flow path direction H and are separated by a second interval t2 that is wider than the first interval t1.

  The set of first parallel surfaces 96a and 96b and the set of second parallel surfaces 97a and 97b are arranged symmetrically with a single axis L extending perpendicular to the flow direction H. Further, the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b are arranged along the one axis L so as not to overlap each other.

  As shown in FIG. 7, the protrusion 93 of the connecting member 91 is provided with first contact surfaces 93a and 93b and second parallel surfaces 97a and 97b that constitute the pair of first parallel surfaces 96a and 96b. Second contact surfaces 93c and 93d are formed. Along with the first inclined surfaces 93e and 93f connecting the first contact surfaces 93a and 93b and the second contact surfaces 93c and 93d, the projecting portion 93 has a projecting shape having a two-stage width as a whole. .

  On the other hand, as shown in FIG. 8, the recessed part 95 formed in the end of the neutral valve part 30 has the 3rd contact surfaces 95a and 95b which comprise a pair of 1st parallel surfaces 96a and 96b, and the 2nd parallel surface 97a. , 97b and fourth contact surfaces 95c, 95d are formed. And the recessed part 95 has comprised the groove shape with the width | variety of two steps as a whole with the 2nd inclined surfaces 95e and 95f which connect each of these 3rd contact surfaces 95a and 95b and the 4th contact surfaces 95c and 95d.

  Further, as shown in FIGS. 7 and 9, a male screw (fastener) 21 for fastening the rotary shaft 20 and the neutral valve portion 30 through the connecting member 91 is passed through the center of the rotary shaft 20. A through hole 22 is formed. A female thread 31 that is screwed into the male thread (fastener) 21 is formed in the recess 95 formed at one end of the neutral valve section 30. Further, the connection member 91 is formed with an opening 98 without a thread groove through which the male screw (fastener) 21 passes.

  With the above configuration, the protruding portion 93 formed on the connecting member 91 and the concave portion 95 formed on the neutral valve portion 30 are fitted, and the male screw (fastener) 21 from the upper end side of the rotating shaft 20. Are inserted into the through hole 22 and the opening 98, and the distal end portion of the male screw 21 is screwed to the female screw 31 of the neutral valve portion 30, whereby the rotary shaft 20 and the neutral valve portion 30 are connected via the connecting member 91. And fastened (fixed).

FIG. 10 is an explanatory view showing step by step the process of attaching the neutral valve portion to the connecting member.
When the neutral valve part 30 is attached to the connecting member 91 fixed to the rotary shaft 20 for maintenance of the neutral valve part 30, for example, replacement of the neutral valve part 30 by repeated opening and closing, it is formed at one end of the neutral valve part 30. The recessed portion 95 thus made is opposed to the protrusion 93 formed on the connection member 91 (see FIG. 10A).

  Next, when the recess 95 of the neutral valve portion 30 is inserted into the protrusion 93, the third contact surfaces 95a and 95b of the recess 95 come into contact with the first contact surfaces 93a and 93b of the protrusion 93, respectively (FIG. 10B). )reference). Further, the fourth contact surfaces 95c and 95d of the recess 95 are in contact with the second contact surfaces 93c and 93d of the protrusion 93, respectively.

  The contact surface between the recess 95 and the projection 93 in such an insertion step is limited to the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b, and the first inclined surfaces 93e and 93f of the projection 93, The second inclined surfaces 95e and 95f of the recess 95 are not in contact with each other. Thereby, for example, even if the clearance (gap) of the contact surface (first parallel surfaces 96a, 96b, second parallel surfaces 97a, 97b) between the recess 95 and the protrusion 93 is set to be extremely small, the recess 95 is The frictional force at the time of pushing into 93 is reduced, and the recessed part 95 and the projection part 93 can be smoothly fitted (refer FIG.10 (c)).

  Further, by bringing the recess 95 and the projection 93 into contact with each other at the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b having different widths, the mounting accuracy when the recess 95 is pushed into the projection 93 is improved. At the same time, by reducing the frictional force at the time of mounting, the mounting position, that is, the pushing amount of the recess 95 with respect to the projection 93 can be easily adjusted. That is, when the recess 95 and the projection 93 are engaged, the screw hole position of the screw 31 formed in the recess 95 needs to be matched with the opening 98 formed in the projection 93 of the connection member 91.

  However, in the engagement structure having a large frictional force at the time of attachment as shown in FIG. 17, it is difficult to adjust so that the small-diameter holes are matched. However, as in the present embodiment, the position of the screw hole of the female screw 31 and the protruding portion are obtained by bringing the concave portion 95 and the protruding portion 93 into contact with each other only by the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b. It is possible to match the opening 98 formed in 93 with easy fine adjustment. Thereby, the screw (fastener) 21 can be easily fastened to the female screw 31 through the opening 98 from the through hole 22 of the rotating shaft 20.

In the first embodiment, the connecting member 91 is provided with the protruding portion 93 and the neutral valve portion 30 is provided with the concave portion 95. However, the reverse may be possible.
FIG. 11 is a modification of the first embodiment. In this modification, a recess 195 is formed in the connection member 191 that is fixed to the rotary shaft 20. In addition, a protrusion 193 that fits into the recess 195 is formed at one end of the neutral valve portion 130. Even in such a modified example, when the neutral valve portion 130 is attached to the connection member 191, as in the above-described embodiment, the friction between the concave portion 195 and the projection portion 193 is reduced to facilitate attachment, and the attachment Fine adjustment of the position can be easily performed.

[Movable valve portion 40, second movable valve portion (movable valve plate portion) 50, first movable valve portion (movable valve frame portion) 60]
The movable valve portion 40 has a substantially disc shape, a movable valve plate portion 50 formed substantially concentrically with the circular portion 30a, and a substantially annular first plate disposed so as to surround the movable valve plate portion 50. 2 movable valve part 60. The second movable valve portion 60 is connected to the neutral valve portion 30 so as to be slidable in the flow path H direction. Moreover, the movable valve plate part 50 is fitted to the second movable valve part 60 so as to be slidable. The movable valve plate portion 50 and the second movable valve portion 60 are movable while sliding in the directions (reciprocating directions) indicated by the symbols B1 and B2 by the main spring 70 and the air cylinder 80.

Here, the directions indicated by the symbols B1 and B2 are directions perpendicular to the surfaces of the movable valve plate portion 50 and the second movable valve portion 60, and are flow direction H parallel to the axial direction of the rotary shaft 20. is there.
Further, an inner peripheral crank portion 50 c is formed in the entire region near the outer periphery of the movable valve plate portion 50. An outer peripheral crank portion 60 c is formed in the entire region near the inner periphery of the movable valve frame portion 60.
In the first embodiment, the outer peripheral crank portion 60c and the inner peripheral crank portion 50c are slidably fitted with each other between the sliding surfaces 50b and 60b parallel to the flow path H direction.

A first seal made of, for example, an O-ring or the like formed in an annular shape corresponding to the shape of the first opening 12a is formed on the surface of the movable valve frame portion 60 facing (abuts) the inner surface of the valve box 10. A portion 61 (main seal portion) is provided.
The first seal portion 61 is in contact with the inner surface 15a of the valve box 10 serving as the periphery of the first opening portion 12a in a state where the movable valve portion 40 covers the first opening portion 12a when the valve is closed. It is pressed by the part 60 and the inner surface of the valve box 10. Thus, the first space is reliably isolated from the second space (partition state is ensured).

[Main spring (first urging portion) 70]
The main spring (first urging portion) 70 is disposed in a first peripheral region 40 b adjacent to the first peripheral region 40 a that is the outermost periphery of the movable valve portion 40. In the main spring 70, at the same time, the movable valve plate 50 is directed toward the second opening 12b (B2 direction) so as to press the movable valve frame 60 toward the first opening 12a (B1 direction). A restoring force is generated so as to press. Thereby, in the valve closed state by the movable valve portion 40, the main spring 70 applies a force (bias) to the movable valve plate portion 50, toward the inner surface 15b of the valve box 10 located around the second opening 12b. The movable valve plate portion 50 is pressed to bring the inner surface 15b into contact with the reaction force transmission portion 59 of the movable valve plate portion 50, and at the same time, a force is applied (biased) to the movable valve frame portion 60. The movable valve frame portion 60 is pressed toward the inner surface 15a of the valve box 10 located around the one opening 12a to bring the inner surface 15a and the first seal portion 61 of the movable valve frame portion 60 into contact with each other.

  In the first embodiment, the main spring 70 has a concave portion 50a provided in the movable valve plate portion 50 so as to open toward the second opening portion 12b, and a first position on the movable valve frame portion 60 at a position opposite to the concave portion 50a. It is an elastic member (for example, a spring, rubber, a sealed air damper, etc.) provided by being fitted into a recess 60a provided so as to open toward the opening 12a side.

  The main spring 70 has a first end and a second end. The first end is in contact with the bottom surface of the recess 50 a of the movable valve plate portion 50. The second end is in contact with the ceiling surface of the recess 60 a of the movable valve frame 60. Further, as shown in FIG. 1, in the annular movable valve frame portion 60, a plurality of first urging portions 70 are provided at equal intervals along the circumferential direction.

  The natural length of the elastic member constituting the main spring 70 is that the seal portion 61 of the movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50 respectively connect the inner surface 15a and the inner surface 15b of the valve box 10 with each other. This is larger than the distance between the bottom surface of the concave portion 50a of the movable valve plate portion 50 and the ceiling surface of the concave portion 60a of the movable valve frame portion 60 when the maximum thickness dimension of the movable valve portion 40 to be pressed is reached. For this reason, in the main spring 70 arranged inside the recess 50a and the recess 60a while being compressed by the bottom surface of the recess 50a of the movable valve plate portion 50 and the ceiling surface of the recess 60a of the movable valve frame portion 60, an elastic restoring force is provided. (Stretching force, biasing force) is generated. When this elastic restoring force acts, the movable valve frame portion 60 slides in the B1 direction, and simultaneously the movable valve plate portion 50 slides in the B2 direction, while the first seal portion 61 and the reaction force transmission portion 59 become the valve box. The valve 10 is pressed against the inner surface of the valve 10 to perform a valve closing operation.

  In addition, the main spring 70 is disposed in the second peripheral region 40b close to the first seal portion 61 in order to efficiently transmit the pressing force to the first seal portion 61 and ensure the closing of the gate valve 1. Specifically, a ridge serving as a reaction force transmitting portion 59 (described later) is located at an immediately outer peripheral position immediately below the first seal portion 61, whereas the first seal is used as a radial position of the movable valve plate portion 50. The main spring 70 is positioned at a position opposite to the protrusion (reaction force transmitting portion) 59 with the portion 61 interposed therebetween. As a result, the urging force of the main spring 70 is efficiently transmitted to the seal portion 61 of the movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50, and the valve is reliably sealed by the deformation of the first seal portion 61. Can be improved.

  In addition, the main spring 70 may be disposed in the second peripheral region 40 b that is located immediately below the first seal portion 61 so that the first seal portion 61 can be directly pressed. In this case, in the gate valve, since the first urging portion 70 is provided in the movable valve frame portion 60, the first urging portion 70 can be positioned directly below the first seal portion 61.

  As described above, in the gate valve 1, the main spring 70 that performs the valve closing operation and the second urging portion 80 (described later) that performs the valve opening operation are close to each other as an actuator that performs the valve closing operation and the valve opening operation. Is provided. In this configuration, the main spring 70 and the second urging portion 80 have a diameter so as to be close to each other in the peripheral region (the first peripheral region 40a and the second peripheral region 40b) of the movable valve unit 40 close to the first seal portion 61. It is arranged adjacent to the direction.

  Further, the main spring 70 is located in the vicinity immediately below the first seal portion 61. In other words, the structure of the gate valve 1 is such that the positional relationship between the first seal portion 61, the reaction force transmission portion 59, and the main spring 70 can be efficiently sealed as a structure that applies a moment load in which an action point and a fulcrum exist. Configured.

  Further, the biasing force of the main spring 70 increases the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 are expanded, that is, the thickness of the movable valve portion 40 is increased, and the seal portion 61 and the movable valve of the movable valve frame portion 60 are increased. Since the reaction force transmission portion 59 of the plate portion 50 is set in a direction in which the reaction force transmission portion 59 is pressed against the inner surfaces 15a, 15b of the valve box 10, power supply (energy supply) from utility equipment to the device including the gate valve 1 due to a power failure or the like Even when is stopped, the gate valve 1 can be reliably closed only by the mechanical force generated in the main spring 70. For this reason, a fail-safe gate valve can be realized reliably.

  On the other hand, in the gate valve having a structure in which the biasing operation is performed to reduce the thickness of the gate valve 40 or the valve closing operation is performed by energy such as electric power supplied from the utility facility, When the energy supply to the device is stopped, the valve closing operation may not be performed. For this reason, in such a structure, a fail-safe gate valve cannot be realized.

[Air cylinder (second urging portion) 80]
The air cylinder 80 is disposed in the first peripheral region 40 a that is the outermost periphery of the movable valve unit 40. In the air cylinder 80, when compressed air is supplied as a driving fluid to the air cylinder 80, a force (biasing force, compressed air) that moves the movable valve frame 60 toward the second opening 12b (direction B2). Resulting force). At the same time, a force (biasing force, force due to compressed air) for moving the movable valve plate portion 50 toward the first opening 12a (direction B1) is generated. As a result, the biasing force of the main spring 70 is overcome, and the movable valve frame 60 is separated from the inner surface 15a of the valve box 10 positioned around the first opening 12a, and at the same time, positioned around the second opening 12b. The movable valve plate portion 50 is separated from the inner surface 15b of the valve box 10 to be operated.
As a result, the body 40 becomes rotatable in the valve box 10 at the center of the thickness of the valve box 10 in the flow path H direction by the biasing force of an auxiliary spring (third biasing part) 90 described later.

  In the movable valve portion 40, the first peripheral region 40 a is located inside the seal portion 61 of the annular movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50. At the same time, in the movable valve unit 40, the second surrounding region 40b is located inside the first surrounding region 40a. That is, the main spring 70 is disposed inside the air cylinder 80 in the radial direction of the movable valve portion 40. In other words, the air cylinder 80 is adjacent to the main spring 70 in a direction that intersects the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide (the flow path H direction). That is, the air cylinder 80 is positioned between the seal portion 61 and the reaction force transmission portion 59 and the main spring 70 in the radial direction of the movable valve portion 40.

In the first embodiment, the air cylinder 80 is one air cylinder (gap) provided between the movable valve plate portion 50 and the movable valve frame portion 60.
Specifically, the air cylinder 80 includes a recess 60d that opens toward the first opening 12a of the movable valve frame portion 60 and a protrusion 50d that protrudes toward the second opening 12b of the movable valve plate portion 50. The annular recess 60d and the annular projection 50d are formed so as to slide together. The air cylinder 80 includes an annular space formed at the peripheral edge of the movable valve frame portion 60, and a protrusion (annular convex portion) formed on the outermost periphery of the movable valve plate portion 50. It functions as two annular cylinders (annular gaps). In other words, the annular cylinder is formed so as to surround the flow path H.

  When compressed air that is a driving fluid is supplied to the air cylinder 80, an expansion force (biasing force) that expands the volume of the second urging portion 80 is generated in the B1 and B2 directions. When the magnitude of the expansion force is larger than the restoring force generated in the main spring 70, the expansion force overcomes the urging force of the main spring 70, the main spring 70 is compressed, and the movable valve plate portion 50 moves the movable valve frame portion 60 in the B1 direction. By sliding in the B2 direction, the thickness direction dimension of the valve body 40 is reduced, the first seal portion 61 is separated from the inner surface 15a of the valve box 10, and at the same time, the reaction force transmitting portion 59 is moved to the inner surface 15b of the valve box 10. The valve opening operation is performed away from the valve.

  At this time, the annular concave portion 60d and the convex portion 50d slide so that the moving direction of the movable valve plate portion 50 and the movable valve frame portion 60 is restricted only in the flow path direction, and the movable valve plate The position of the portion 50 and the movable valve frame portion 60 are regulated so that the seal portion 61 and the reaction force transmission portion 59 are moved in parallel from the state in which the seal portion 61 and the reaction force transmission portion 59 are in contact with the inner surfaces 15a and 15b of the valve box 10. That is, the air cylinder 80 can regulate the relative movement direction and the posture of the movable valve plate portion 50 and the movable valve frame portion 60.

[Auxiliary spring (third urging portion) 90]
The auxiliary spring 90 is provided between the neutral valve portion 30 and the movable valve frame portion 60, and the thickness dimension of the valve body 40 is larger than that of the neutral valve portion 30 located substantially in the center of the valve box 10 in the flow path direction. When reduced, the valve body 40 is urged from the center of the valve box 10.

The auxiliary spring 90 is provided in a rod-like position restricting portion 65 that is connected to the movable valve frame portion 60 through an opening 30 a provided in the outer peripheral position (right side position in FIGS. 2 and 4) of the neutral valve portion 30. ing. The auxiliary spring 90 is also an elastic member (for example, a spring, rubber, a sealed air damper, etc.), like the main spring 70.
The auxiliary spring 90 is locked to the flange portion 30b provided on the first opening 12a side of the opening 30a of the neutral valve portion 30a and the tip 65a of the position restricting portion 65 to open the movable valve frame portion 60 to the second opening. It is urged in the direction toward B2 moving toward the portion 12b.

  The auxiliary spring 90 biases the movable valve frame portion 60 positioned on the first opening 12a side from the neutral valve portion 30 toward the second opening 12b, and the valve positioned around the first opening 12a. When the seal portion 61 of the movable valve frame portion 60 is in contact with the inner surface 15a of the box 10 and when the compressed air that is the driving fluid is supplied to the air cylinder 80, the movable valve frame portion 60 is It is urged so as to be separated from the inner surface 15a of the valve box 10 located around the one opening 12a.

  Thereby, when compressed air is supplied to the air cylinder 80, the valve body 40 moves toward the center of the flow direction of the valve box 10, and finally the valve body 40 flows in the flow direction of the valve box 10. The posture is controlled so as to be located at the center. Further, the biasing force of the auxiliary spring 90 is much smaller than the difference between the biasing force of the main spring 70 and the biasing force of the air cylinder 80. That is, since the thickness dimension of the valve body is changed as compared with the active spring for realizing the valve closed state, or the main spring 70 or the air cylinder 80 as an actuator, it may be extremely small.

  As described above, in the gate valve 1, as an actuator for performing the valve closing operation and the valve opening operation, the main spring 70 that performs the operation of increasing the thickness of the valve body 40 and the air cylinder that performs the operation of reducing the thickness of the valve body 40. 80 and an auxiliary spring 90 that controls the posture of the valve body 40 toward the central position of the valve box 10 in the flow path direction.

  In this configuration, the main spring 70 and the air cylinder 80 are arranged in parallel so as to be close to each other in the peripheral region of the movable valve portion 40 close to the first seal portion 61. The air cylinder 80 constitutes one annular cylinder provided between the movable valve plate portion 50 and the movable valve frame portion 60. According to this configuration, if one supply path 41 for supplying the compressed air to the second urging unit 80 in one direction is provided, the compressed air is supplied along the annular air cylinder 80 inside the annular cylinder. The valve body 40 can be expanded and contracted (valve opening operation and valve closing operation), and the valve body 40 accompanying the expansion and contraction of the valve body 40 by the auxiliary spring 90 during this operation. Can be easily maintained near the center of the valve box 10. For this reason, the actuator which has a simple and compact structure is realizable.

  Further, since the air cylinder 80 is used to perform the valve opening operation, the first urging unit 70 can be compressed as the magnitude (output) of the force generated in the second urging unit 80. (Output) is enough.

  In the first embodiment, the movable valve plate portion 50 and the movable valve frame portion 60 constitute a movable valve portion 40 having a variable thickness in one thickness direction, and thus it is necessary to provide two movable valve portions. And a movable valve portion having a simple and compact structure can be realized.

  Further, the force of the actuator, particularly the force applied when sealing the valve body 40 so as to maintain the valve closed state does not act on the neutral valve portion 30. For this reason, it is sufficient that the neutral valve portion 30 has sufficient strength to swing the valve body as a pendulum valve. Further, the force of the actuator, in particular, the force applied when sealing the valve body 40 so as to maintain the valve closed state does not act on the rotating shaft 20. For this reason, it is sufficient if it has sufficient strength to swing the valve body as the rotary shaft 20 pendulum valve. At the same time, since the output of the swing mechanism of the valve body 40 can be suppressed compared to the case where a moment for sealing the valve on the rotary shaft 20 is required, the rotating mechanism of the rotary shaft 20 can be downsized. it can.

  In this structure, in addition to the strength of the neutral valve portion 30, it is sufficient if the strength is sufficient to support its own weight when the movable valve portion 40 is rotated between the retracted position and the valve opening / closing position.

  FIG. 2 is an enlarged longitudinal sectional view showing a portion where the movable valve plate portion 50 and the movable valve frame portion 60 are fitted to each other and a portion where the neutral valve portion 30 and the movable valve plate portion 50 are fitted to each other. And shows a portion where the first urging portion 70 and the guide pin 62 are provided.

[Second seal portion (double seal portion) 51a, 51b and third seal portion (double seal portion) 52a, 52b]
The outer peripheral surface of the annular convex portion (projection) 50d of the movable valve plate portion 50 is in contact with the inner peripheral surface of the annular concave portion 60d of the movable valve frame portion 60, and the movable valve plate portion 50 and the movable valve frame portion 60 are in contact with each other. As the double seal portion for sealing the gap, annular second seal portions 51a and 51b such as O-rings and third seal portions 52a and 52b are provided.

  Specifically, the second seal portions 51a and 51b are provided on the first outer peripheral surface 50f located on the radially outer side of the annular convex portion (projection) 50d of the movable valve plate portion 50. Further, third seal portions 52a and 52b are provided on the second inner peripheral surface 50g, which is the inner side of the first outer peripheral surface 50f in the radial direction. The second seal portions 51a and 51b are in contact with the first inner peripheral surface 60f of the movable valve frame portion 60, and the third seal portions 52a and 52b are in contact with the second outer peripheral surface 60g of the movable valve frame portion 60.

  The second seal portions 51a and 51b partition the air cylinder 80, which is a space with high pressure, and the hollow portion 11, which is a space with low pressure and close to the first opening portion 12a, to ensure a partitioned state. Similarly, the third seal portions 52a and 52b partition the hollow portion 11 from the air cylinder 80, which is a space with high pressure, and the second opening portion 12b, such as a space with low pressure, to ensure a partitioned state.

  The second seal portions 51a and 51b include an air cylinder 80, which is a space where compressed air for driving is supplied and a high pressure, and a first space side communicating with the first opening 12a, which is a space where the pressure is low, for example. This is to block off, and this partition state can be secured. Similarly, the third seal portions 52a and 52b partition the air cylinder 80, which is a high-pressure space, from the second space side, which is a low-pressure space and is close to the second opening 12b, to ensure a partitioned state. be able to.

[Guide pin 62]
The guide pin 62 is fixed to the movable valve frame 60 and is a rod-shaped body having a uniform thickness and standing in the flow path direction. The guide pin 62 penetrates through the air cylinder 80 and is an annular convex portion of the movable valve plate portion 50. (Ridge) It fits into a hole 50h formed in 50d.

  The guide pin 62 is configured so that the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide does not deviate from the directions indicated by reference numerals B1 and B2, and the movable valve plate portion 50 and the movable valve frame. Even when the part 60 slides, the position regulation is surely guided so that the parallel movement is performed without changing the posture.

  As a result, the movable valve plate portion 50 and the movable valve frame portion 60 are prevented from moving obliquely with respect to the symbols B1 and B2. At the same time, the movable valve frame portion 60 is in a closed state with respect to the state in which the seal portion 61 and the reaction force transmission portion 59 are in contact with the inner surfaces 15a and 15b of the valve box 10, respectively. Even when the position in the flow path direction with respect to the frame part 60 is changed, they are moved in parallel while maintaining a parallel state, and the movable valve plate part 50 and the movable valve frame part 60 are prevented from being inclined.

  In this structure, while the movable valve plate portion 50 and the movable valve frame portion 60 are positioned with respect to each other, the movable valve plate portion 50 and the movable valve frame portion 60 move relative to each other while maintaining a parallel state in the directions indicated by reference numerals B1 and B2, thereby closing and Valve operation can be performed. As a result, in the valve opening operation, it is possible to realize a seal structure in which a pressing force is uniformly generated in the first seal portion 61 provided in the movable valve frame portion 60 and leakage is suppressed.

  Further, in the structure provided with the guide pin 62 as described above, when the posture in which the gate valve 1 is attached to the vacuum apparatus is not determined, that is, when the gate valve 1 can be attached in any direction, the valve body 40 is used. Can be prevented from being locally applied to the second seal portions 51a and 51b and the third seal portions 52a and 52b. For example, when the gate valve 1 is attached so that gravity acts at right angles to the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide, the movable valve plate portion that is a sliding member. 50 and the weight of the movable valve frame portion 60 are applied to the guide pin 62. For this reason, it is prevented that the weight of the movable valve plate part 50 and the movable valve frame part 60 is directly added to the second seal parts 51a and 51b and the third seal parts 52a and 52b (O-ring). Thereby, whatever the posture in which the gate valve 1 is attached, the life of the seal portion is not shortened, and the effect of preventing leakage can be secured and maintained.

  In order to reduce the area of the sliding surface between the guide pin 62 and the hole 50h, and in order to isolate the guide pin 62 from the first space and the second space that are outside the gate valve 1, the guide pin 62 is It arrange | positions so that the inside of the air cylinder 80 may be penetrated.

Further, by arranging the guide pin 62 in the air cylinder 80 as described above, the movable valve plate portion 50 and the movable valve frame portion 60 can be smoothly slid relative to each other.
In addition, if the strength of the guide pin is sufficiently obtained, the sliding direction of the movable valve portion 60 is prevented even in a gate valve having a large diameter. Further, the guide pin 62 can be applied as a gate valve having a better opening / closing operation by setting an in-plane arrangement perpendicular to the flow path and appropriately distributing the load even in a movable valve portion having a special shape. .

[Wiper 53, 54]
An annular wiper 53 that abuts against the inner peripheral surface of the movable valve portion 60 is provided on the first outer peripheral surface 50f located on the radially outer side of the annular convex portion (ridge) 50d of the movable valve plate portion 50d. . Similarly, a second inner peripheral surface 50g that is the inner side of the first outer peripheral surface 50f in the radial direction of the annular convex portion (projection) 50d of the movable valve plate portion 50 is a circle that contacts the outer peripheral surface of the movable valve portion 60. An annular wiper 54 is provided.

The wiper 53 contacts the first inner peripheral surface 60f of the movable valve frame 60 in the same manner as the second seal portions 51a and 51b, and the wiper 54 is movable in the same manner as the third seal portions 52a and 52b. It abuts on the first outer peripheral surface 60g of the frame portion 60.
The wipers 53 and 54, the second seal portions 51a and 51b, and the third seal portions 52a and 52b are all disposed on the annular convex portion (projection) 50d of the movable valve plate portion 50. The second seal portion 51a is disposed at a position close to the first opening 12a (first space). The third seal portion 52a is disposed at a position close to the second opening 12b (second space).

These wipers 53 and 54 are formed on the inner peripheral surface of the recess 60d of the movable valve frame 60 in the air cylinder 80 in which the annular recess 60d and the annular protrusion 50d slide by valve opening and closing operations. Lubricated or cleaned, and has a function of preventing dust generated by the sliding and dust generated from the air cylinder 80 from being discharged into the first space and the second space.
Further, if, for example, a sponge-like porous elastic body is selected as a member (material) constituting the wipers 53 and 54, the lubricating oil can be infiltrated (held) inside the member.

  Accordingly, it is possible to maintain a state in which a thin oil film having a certain film thickness is formed on the seal surfaces sealed by the second seal portions 51a and 51b and the third seal portions 52a and 52b. That is, the wipers 53 and 54 wipe off an excessive oil film, and apply an oil film having a certain film thickness when the oil film is exhausted.

[Intermediate atmospheric chamber 55, 56]
An intermediate atmospheric chamber 55 that is an atmospheric pressure space (gap) is provided on the surface of the air cylinder 80 partitioned by the second seal portions 51a and 51b. Similarly, on the surface of the air cylinder 80 partitioned by the third seal portions 52a and 52b, an intermediate atmospheric chamber 56 that is an atmospheric pressure space (gap) is provided.

  Specifically, an intermediate air chamber 55 is provided in a portion partitioned by the second seal portions 51a and 51b on the outer peripheral surface 50f of the annular convex portion (projection) 50d of the movable valve plate portion 50. Further, an intermediate atmospheric chamber 56 is provided at a portion partitioned by the third seal portions 52a and 52b on the inner peripheral surface 50g of the annular convex portion (projection) 50d of the movable valve plate portion 50. The intermediate atmospheric chamber 55 is a space formed by a groove provided in the first inner peripheral surface 60f of the movable valve frame portion 60 and the outer peripheral surface 50f of the movable valve plate portion 50, and the intermediate atmospheric chamber 56 is a movable valve. This is a space formed by the first outer peripheral surface 60 g of the frame portion 60 and the grooves provided on the second inner peripheral surface 50 g of the movable valve plate portion 50.

  These intermediate atmospheric chambers 55 and 56 are configured in the same manner as a supply path 41 described later, and are communicated to the outside of the gate valve 1 through a communication path (not shown). Even when the air pressure is broken, the compressed air (driving gas) is released to the outside of the gate valve to prevent the compressed air from being released into the valve box 10.

  That is, when the second seal portion 51b that is the first seal is torn against the air cylinder 80 that is in a pressurized state, the second seal portion 51a that is the second seal is closer to the gas supply side. An intermediate atmospheric chamber 55 and a communication path for releasing the driving gas to the outside of the gate valve are provided.

In addition, when the third seal portion 52b that is the first seal is torn against the air cylinder 80 that is in a pressurized state, the third seal portion 52a that is the second seal is closer to the gas supply side, An intermediate atmospheric chamber 56 and a communication path for releasing the driving gas toward the outside of the gate valve are provided.
Accordingly, it is possible to prevent the compressed air from being ejected into the valve body 10 and adversely affecting the inside of the gate valve 1 and the first space and the second space.

  At the same time, the pressure in these intermediate atmospheric chambers 55, 56 can be monitored by a communication path. That is, a pressure gauge is provided outside the gate valve 1 so as to measure the pressure in the intermediate atmospheric chambers 55 and 56 and is connected by a communication path, and the pressure is monitored by the user.

For example, when the first space near the first opening 12a is a decompression space and the second seal portion 51a is damaged, the pressure in the intermediate atmospheric chamber 55 is lower than the atmospheric pressure.
Further, since the pressure in the air cylinder 80 to which compressed air is supplied becomes higher than the atmospheric pressure, when the second seal portion 51b is damaged, the pressure in the intermediate atmospheric chamber 55 is higher than the atmospheric pressure. Get higher.

Similarly, when the second space near the second opening 12b is a decompression space and the third seal portion 52a is damaged, the pressure in the intermediate atmospheric chamber 56 is lower than the atmospheric pressure.
Further, since the pressure in the air cylinder 80 to which compressed air is supplied becomes higher than the atmospheric pressure, when the third seal portion 52b is damaged, the pressure in the intermediate atmospheric chamber 56 is higher than the atmospheric pressure. Get higher.

  Thus, since the gate valve 1 can have a structure for monitoring the pressure in the intermediate atmospheric chambers 55 and 56, for example, the pressure value in the intermediate atmospheric chambers 55 and 56 is lower than the atmospheric pressure and has a threshold value. When the pressure is lower than the pressure, or higher than the atmospheric pressure and higher than the threshold pressure, the abnormality of the second seal portions 51a and 51b and the third seal portions 52a and 52b can be detected.

For example, if a structure in which an alarm device is provided in the intermediate atmospheric chambers 55 and 56 or in the communication path, or a structure in which an alarm device is provided in the control device connected to the gate valve 1, the second seal is used. The abnormality of the parts 51a and 51b and the third seal parts 52a and 52b can be notified by an alarm. Therefore, the second seal portions 51a and 51b and the third seal portions 52a and 52b are damaged, an internal leak occurs in the gate valve 1, and it can be immediately recognized that maintenance is necessary.
As a result, it is possible to reliably determine a problem such as an internal leak occurring in the gate valve that cannot be detected from the outside of the vacuum device or the like.

[Connection Pin 69, Supply Path 41]
The gate valve 1 is provided with a supply passage 41 for supplying a driving gas to the air cylinder 80, as shown by a two-dot chain line in the figure. The supply passage 41 is formed inside the housing of the movable valve frame 60, and It is provided so as to communicate with a driving gas supply means (not shown) provided outside the gate valve 1 via the inside of the neutral valve portion 30 and the rotary shaft 10.

  A driving gas can be supplied to the supply passage 41 between the movable valve frame portion 60 and the neutral valve portion 30 even when the flow direction position of the movable valve frame portion 60 and the neutral valve portion 30 changes. A connection pin portion 69 is provided for sliding connection.

  The connection pin portion 69 includes a hole 38 having a circular cross section that is drilled in the neutral valve portion 30 in parallel with the flow path direction, and a rod-like connection pin 68 that is rotatably fitted in the hole 38. . The inner surface 38a of the hole 38 is reduced in diameter by the inner surface 38b on the bottom side as compared with the inner surface 38a on the opening side. Correspondingly, the diameter of the connecting pin 68 is reduced in the tip 68b with respect to the base 68a. ing. And the level | step difference 38c and the level | step difference 68c are each formed in the part from which this radial dimension changes.

  As shown by a two-dot chain line in the figure, the connection pin portion 69 has a supply passage 41 formed in the vicinity of the central axis thereof, has a tubular shape, and the supply passage 41 inside the movable valve frame portion 60 communicates. Further, the supply path 41 is opened at the distal end surface 68da of the connection pin 68, and in the pressurizing space 69a formed by the distal end surface 68d and the vicinity of the bottom 38d of the hole 38, the neutral valve portion 30 body is formed. The supply path 41 formed in the communication is communicated.

  The compressed air supplied from the driving gas supply means is jetted into the space 69a via the supply passage 41 inside the neutral valve portion 30, and the supply passage 41 inside the connection pin portion 69 and the supply passage inside the movable valve frame portion 60. It is supplied to the air cylinder 80 through 41.

  In the connection pin portion 69, the inner peripheral surface 38 a of the hole 38 is in contact with the outer peripheral surface 68 a of the connection pin 68, and the inner peripheral surface 38 b of the hole 38 is in contact with the outer peripheral surface 68 b of the connection pin 68. Yes.

Even if the connection pin 68 moves in the axial direction (flow path direction) in the hole 38, the connection pin 68 is not between the front end surface 68d and the bottom surface 38d serving as the pressurizing surface but is a surface in the sliding direction. In addition, a double seal portion that shuts off the pressurized space 69a that is supplied with compressed air for driving and has a high pressure and the second space that communicates with the second opening 1b that is a low-pressure space, for example. Is provided.
The seal portion can secure a partition state between the pressurizing space 69 a and the hollow portion 11.

  Specifically, the connection pin 68 has an annular thick seal portion that is an O-ring or the like and a circumferential groove that embeds it as a double seal portion that seals between the connection pin 68 and the hole 38. 68f is provided, and an O-ring or the like and an annular small seal portion 68g serving as a circumferential groove for embedding the O-ring or the like are provided on the outer peripheral surface 68b.

  At the same time, an annular intermediate atmospheric chamber 69c formed by the step 68c and the step 38c is located between the double seals and communicates with the communication path 42 (not shown), so that compressed air is ejected into the valve box 10. Thus, adverse effects on the interior of the gate valve 1, the first space, and the second space can be prevented.

  In particular, it is not sealed between the tip surface 68d and the bottom surface 38d, which becomes a pressure surface and the distance thereof changes, but the outer peripheral surface 68a which does not directly become a pressure surface and is a sliding surface and the distance does not change. Further, since the sealing is performed between the inner peripheral surface 38a and the outer peripheral surface 68b and the inner peripheral surface 38b, a more reliable sealed state can be maintained.

  According to the configuration of the seal portions 68f and 68g, the second seal portions (double seal portions) 51a and 51b, the third seal portions (double seal portions) 52a and 52b, and the guide pins in the air cylinder 80 described above. It is possible to achieve the same effects as the configuration of 62.

  Even when the connection pin 68 is moving in the axial direction (flow channel direction) in the hole 38 or when the relative position in the flow channel direction is changed due to movement, the compressed air supplied from the driving gas supply means is neutral valve. It is ejected into the space 69a via the supply path 41 inside the part 30, and via the space 69a whose volume has changed, via the supply path 41 inside the connection pin part 69 and the supply path 41 inside the movable valve frame part 60. The air cylinder 80 is stably supplied.

  As described above, in the first embodiment, the movable valve part 40 configured by the movable valve plate part 50 and the movable valve frame part 60 that can be separated from each other in the flow path direction is provided. Is provided with a main spring 70 that urges the movable valve plate portion 50 and the movable valve frame portion 60 outward in the flow path direction, and the movable valve portion 40 includes the movable valve plate portion 50 and the movable valve frame portion 60. Is provided with an air cylinder 80 that moves the hollow portion 11 toward the center position side in the flow path direction, and an auxiliary spring 90 that biases the movable valve frame portion 60 in a direction approaching the neutral valve portion 30. The movable valve plate part 50 and the movable valve frame part 60 are pressed against the inner surfaces 15a and 15b of the valve box, and the valve can be reliably closed by the seal part 61 and the reaction force transmission part 59.

  Further, by moving the movable valve plate portion 50 and the movable valve frame portion 60 toward the central position side of the hollow portion 11 in the flow path direction, the valve body 40 is rotated so as not to contact the valve box 10, The valve body 40 can be moved to the retracted position by a drive mechanism that is smaller and has a smaller output than a mechanism that requires an operation other than rotation.

  In this configuration, a valve body can be formed by one movable valve portion 40 and three urging portions 70, 80, 90. Further, the movable valve plate portion 50 and the movable valve frame portion 60 can be directly pressed against the inner surface of the valve box 10 by the restoring force of the main spring 70 disposed in the peripheral region of the movable valve portion 40, so that the valve can be reliably closed. Similarly, the movable valve plate portion 50 and the movable valve frame portion 60 are separated from the inner surface of the valve box 10 by the action of the compressed air supplied to the air cylinder 80 disposed in the peripheral region of the movable valve portion 40, so that The valve can be opened as a rotatable state. Therefore, in the first embodiment, it is possible to realize a gate valve that has a simple structure and can perform a partitioning operation with high reliability.

(Second Embodiment)
FIG. 12 is a longitudinal sectional view showing the structure of the gate valve in the second embodiment of the present invention, and is an enlarged view of the main part in the vicinity of the cylinder in which the fixed valve part and the movable valve part are fitted.
12, the same members as those in the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and the description thereof is omitted or simplified.

In the first embodiment, a U-shaped U-shaped portion is formed on the outer periphery of the movable valve plate portion 50, and an inverted U-shaped inverted U-shaped portion is formed on the inner periphery of the movable valve frame portion 60. Yes. Moreover, the movable valve plate part 50 and the movable valve frame part 60 are provided so that the U-shaped part of the movable valve plate part 50 and the inverted U-shaped part of the movable valve frame part 60 are fitted to each other.
On the other hand, in the structure of the movable valve portion 40 of the second embodiment, as shown in FIG. 12, the outer peripheral crank portion formed on the outer periphery of the movable valve plate portion 50 and the inner periphery formed on the inner periphery of the movable valve frame portion 60. The peripheral crank part is fitted.

  The natural length of the elastic member constituting the main spring 70 is larger than the depth of the recess 60a. For this reason, in the 1st biasing part 70 arrange | positioned in the recessed part 60a, being compressed with the ceiling surface of the recessed part 60a, and the movable valve board part 50, the elastic restoring force (extension | strength force, urging | biasing force) has arisen. . When the elastic restoring force acts, the first seal portion 61 is pressed against the inner surface of the valve box 10 while the movable valve portion 60 slides in the B1 direction, and the valve closing operation is performed.

The main spring 70 is preferably disposed directly below the first seal portion 61 so that the first seal portion 61 can be pressed directly.
In the present embodiment, since the main spring 70 is provided on the movable valve frame portion 60, the main spring 70 can be positioned directly below the first seal portion 61.

  In the second embodiment, a main spring 70 that performs the valve closing operation and an air cylinder 80 that performs the valve opening operation are provided as actuators that perform the valve closing operation and the valve opening operation. In this configuration, the main spring 70 and the air cylinder 80 are arranged in parallel so as to be close to each other in the peripheral region of the movable valve portion 40 close to the first seal portion 61.

  Specifically, the main spring 70 is provided in the first peripheral region 40a that is the outermost periphery of the valve body 40, and the air cylinder 80 is disposed in the second peripheral region 40b adjacent to the first peripheral region 40a. Further, the main spring 70 is located immediately below the first seal portion 61.

In this structure, the main spring 70 can directly press the first seal portion 61, and a load can be directly applied to the first seal portion 61 in a substantially vertical direction.
That is, the structure of the gate valve 1 is not a structure for applying a moment load in which an action point and a fulcrum exist. For this reason, the structural member (strength) corresponding to the insulator is not necessary, and the structure of the actuator can be simplified. In addition, the rigidity required for the movable valve unit 60 is sufficient if it has a strength capable of supporting the weight of the movable valve unit 60.

  In the structure of the present embodiment, a main spring 70 is disposed immediately below the first seal portion 61 of the movable valve frame portion 60, and one annular ring provided between the movable valve plate portion 50 and the movable valve frame portion 60. A second urging portion (air cylinder) 80 is formed by the cylinder. In this structure, the configuration of the actuator can be simplified, and the reliability of the valve closing operation and the valve opening operation can be improved.

  Further, even when the configuration in which the actuator is arranged in the peripheral region of the movable valve portion 40 is applied to a gate valve having a large diameter, the valve closing operation and the valve opening can be reliably performed by the same structure as described above. The operation can be performed, and the same operation can be performed even when the back pressure is applied.

In the second embodiment, the positions of the third seal portion 52b, the intermediate atmospheric chamber 56, the third seal portion 52a, and the wiper 54 are different from those of the first embodiment.
Specifically, in the first embodiment, the third seal portion 52b, the intermediate atmospheric chamber 56, the third seal portion 52a, and the wiper 54 are provided on the inner surface 50g that is the surface opposite to the first outer peripheral surface 50f. However, in the second embodiment, the second outer peripheral surface 50j is provided with the third seal portion 52b, the intermediate atmospheric chamber 56, the third seal portion 52a, and the wiper 54.

  In the outer peripheral crank portion of the movable valve plate portion 50, second seal portions 51a and 51b and a wiper 53 are provided on the first outer peripheral surface 50f located on the radially outer side. The third seal portions 52a and 52b and the wiper 54 are provided on the second outer peripheral surface 50j located inside the first outer peripheral surface 50f in the radial direction and below the second seal portions 51a and 51b. The second seal portions 51a and 51b are in contact with the first inner peripheral surface 60j of the movable valve frame portion 60, and the third seal portions 52a and 52b are positioned below the first inner peripheral surface 60j of the movable valve portion 60. It contacts the second inner peripheral surface 60k.

  The second seal portions 51a and 51b, the wiper 53, and the intermediate atmospheric chamber 55 partition the air cylinder 80, which is a high-pressure space, and the first space, which is a low-pressure space or the like and is close to the first opening 12a, Ensure partitioning. Similarly, the third seal portions 52a and 52b, the wiper 54, and the intermediate atmospheric chamber 56 are an air cylinder 80 that is a space with a high pressure, and a second space that is a space with a low pressure and is close to the second opening 12b. To secure the partitioning state.

These wipers 53 and 54 lubricate or clean the inner peripheral surface of the movable valve frame portion 60 that slides by the valve opening operation and the valve closing operation, and removes dust generated by the sliding and dust generated from the air cylinder 80. The first space and the second space are not released.
Further, the lubricating oil can be penetrated (held) into the wipers 53 and 54.
Accordingly, it is possible to maintain a state in which a thin oil film having a certain film thickness is formed on the seal surfaces sealed by the second seal portions 51a and 51b and the third seal portions 52a and 52b. That is, the wipers 53 and 54 wipe off an excessive oil film, and apply an oil film having a certain film thickness when the oil film is exhausted.

  As described above, according to the second embodiment, the same effect as in the first embodiment can be obtained. Furthermore, in the second embodiment, the main spring 70 that performs the valve closing operation and the air cylinder 80 that performs the valve opening operation are disposed in the peripheral region of the movable valve unit 40 close to the first seal unit 61. There is no need to provide an actuator in the valve box 10, and a gate valve having a simple configuration can be realized.

(Third embodiment)
13 and 14 are diagrams illustrating the configuration of the gate valve of the third embodiment of the present invention. FIG. 13 is a cross-sectional view of the gate valve, and FIG. 14 is a vertical cross-sectional view of the gate valve when the valve element is disposed at the valve opening / closing position.
13 and 14, the same members as those in the first embodiment shown in FIGS. 1 to 6 and the second embodiment shown in FIG. 12 are denoted by the same reference numerals, and the description thereof will be omitted or simplified.

  The gate valve 300 of the third embodiment includes a valve box 10a, a valve stem 25, a neutral valve portion 30, a movable valve portion 40, a first biasing portion 70 (spring), and a second biasing portion 80 ( Air cylinder). The neutral valve part 30 and the movable valve part 40 constitute a valve body. The movable valve unit 40 includes a movable valve plate unit 50 and a movable valve frame unit 60.

[Direct acting gate valve]
The gate valve 300 of the third embodiment is a direct acting gate valve. In the gate valve 300, the valve body structure constituting the pendulum type gate valve 1 of the first embodiment is applied to a direct acting gate valve.
However, in Embodiment 1 described above, the shapes of the first opening 12a, the second opening 12b, and the movable valve portion 40 (the movable valve plate portion 50 and the movable valve frame portion 60) were concentric, In the third embodiment, these shapes are substantially squares having rounded corners.
Moreover, in order to move a valve body directly, the cross-sectional shape of the valve box 10a is substantially rectangular. The neutral valve portion 30 is fixed to the end portion of the valve rod 25 as switching means.

  In a state where the compressed air is supplied to the supply passage 41, the thickness dimension of the movable valve plate portion 50 and the movable valve frame portion 60 is contracted, and the movable valve portion 40 is separated from the inner surfaces 15a and 15b of the valve box 10, When the valve rod 25 is driven so as to go straight in the direction indicated by the symbol D1, the neutral valve portion 30 also moves linearly along the direction D1 according to this drive. As the neutral valve portion 30 moves in this way, the movable valve portion 40 is inserted from the retracted position where the flow path H is not provided to the valve open position of the flow path H.

When the operation of the air cylinder 80 is cut and the main spring 70 is operated (valve closing operation), the thickness dimension of the movable valve portion 40 increases and the movable valve portion 40 closes the flow path H. Conversely, when the valve rod 25 is driven to move straight in the direction D2 after the movable valve portion 40 is opened by opening the air cylinder 80 (valve opening operation), the neutral valve portion 30 is also moved in the direction D2 accordingly. Move directly.
Thereby, the movable valve part 40 is retracted from the valve opening / closing position to the retracted position.

(Fourth embodiment)
FIG. 16 is a longitudinal sectional view showing the structure of the gate valve in the fourth embodiment of the present invention, and is a main part near the connection pin part where the neutral valve part and the movable valve part (movable valve frame part) are connected. It is an enlarged view.
In FIG. 16, the same members as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and the description thereof is omitted or simplified.

In the first embodiment, the connection pin 68 integrated with the movable valve frame portion 60 is formed as the connection pin portion 69. However, as the connection pin portion 69 of this embodiment, the connection pin portion 69 is connected to the movable valve frame portion 60. The connected floating pin (connection pin) 68 </ b> A is fitted into the through hole 67.
As shown in FIG. 16, in the floating pin 68A, the lower part of the figure, which is fitted in the hole 38 so as to be rotatable and slidable in the axial direction, has a configuration substantially equivalent to that of the first embodiment described above. .

  The connection pin portion 69 of the present embodiment has a circular cross-sectional through hole 67 drilled in the movable valve frame portion 60 in parallel with the flow path direction, and a rod-shaped floating pin 68A having a flange portion 68Aa in the through hole 67. Is fitted so as to be rotatable and slightly tiltable. The inner surface 67a of the through hole 67 has a flange inner surface 67a having a diameter larger than that of the hole 38 facing the movable valve frame portion 60 corresponding to the diameter dimension of the flange portion 68Aa, and is compared with the flange inner surface 67a on the opening side. The gas connection position inner surface 38b on the penetrating side shown in the drawing is reduced in diameter, and the support position inner surface 67c on the penetrating side shown in the drawing is reduced in diameter compared to the gas connection position inner surface 67b, and compared with the support position inner surface 67c. The outer inner surface 67d on the penetrating side as shown in the figure is enlarged.

The floating pin 68A has a diameter dimension corresponding to the diameter dimension of the through hole 67, the diameter of the gas connection portion 68Ab reduced with respect to the flange portion 68Aa, and the fixed end 68Ac with respect to the gas connection portion 68Ab. The diameter is reduced.

A fixed groove 68Ad is provided around the fixed end 68Ac, and a fixing member 68Ae such as a washer fitted into the fixed groove 68Ad is brought into contact with the outer side surface 67e of the through hole 67 so that the axial direction ( The movement in the inner direction (downward direction in the figure) in the flow path direction is restricted and the position is fixed.
A seal surface 68Af on the upper side of the flange portion 68Aa and a seal surface 68Ag on the upper side of the gas connection portion 68Ab are sealed members 67h, 67j that are O-rings or the like between the opposed step surface 67f and the step surface 67g. Is provided.

  As the outer diameter dimension of the floating pin 68A, the fixed end 68Ac is set to be substantially equal to the inner diameter dimension of the support position inner surface 67c, but the flange portion 68Aa and the gas connection portion 68Ab are respectively the flange inner surface 67a and the gas connection position inner surface 38b. On the other hand, the small dimension is set to be small, and the floating pin 68A has a slight play in the radial direction with respect to the movable valve frame portion 60. For this reason, there is room for slight inclination and movement with the fixed end 68Ac as the support position in accordance with the external force in the radial direction.

  The floating pin 68A is fixed so as to sandwich the movable valve frame 60 in a direction facing the fixing member 68Ae of the fixed end 68Ac and the sealing members 68h and 67j of the sealing surface 68Af and the sealing surface 68Ag. Thus, the floating pin 68A is fixed to the movable valve frame portion 60 so as not to move in the axial direction (the length direction of the through hole 67) while being pressed upward in the drawing.

At the same time, the floating pin 68A is deformed when the seal member 67h is pressed by the seal surface 68Af and the step surface 67f, and the seal member 67j is pressed by the seal surface 68Ag and the step surface 67g. .
As described above, the seal members 67h and 67j, which are O-rings or the like of the floating pin 68A, are pressed and deformed by the step surface 67f and the step surface 67g, so that the gas connection portion 68Ab and the connection position inner surface 67b are sealed. Is done.

Near the bottom 38d of the hole 38, in the floating pin 68A serving as the supply path 41, an opening is provided in the tip end surface 68d and opened in the center along the axial direction, and an opening provided in the connection position inner surface 67b. A supply path 41 that opens to the surface of the gas connection portion 68Ab that is positioned opposite to the gas connection portion 68A is provided so that the pressurization space 69a and the air cylinder 80 can be connected.

  In the present embodiment, the floating pin 68A is not parallel to the inner surface 67a and the flange portion 68Aa and the gas connection position inner surface 67b and the gas connection portion 68Ab in the same direction as the sliding surface, but is parallel to the tip surface 68d serving as the pressure surface. The seal member 67h and the seal member 67j are disposed between the seal surface 68Af and the step surface 67f, which are surfaces perpendicular to the sliding direction, that is, between the seal surface 68Ag and the step surface 67g. By being provided, even when the floating pin 68A is inclined or when the floating pin 68A is slightly moved in the radial direction, the crushing margin of the seal members 67h and 67j such as O-rings does not change. Therefore, even when the floating pin 68A moves in this way, that is, when the neutral valve portion 30 and the movable valve frame portion 60 change in relative positions other than in the flow path direction, the pressurized gas connection portion The seal for the supply path 41 near 68 Ab is maintained, and the sealing is not broken.

At the same time, in the present embodiment, even when the thick seal portion 68f and the small seal portion 68g are misaligned in the radial direction with respect to the floating pin 68A due to manufacturing tolerances or the like, the floating pin 68A and the movable valve frame portion 60 Therefore, there is no play in the sliding O-rings of the thick seal portion 68f and the small seal portion 68g. Therefore, even when sliding, the seal between the connection pin 68 and the hole 38 is maintained, and the sealing is not broken.
At the same time, since the deformation does not concentrate on the thick seal portion 68f and the small seal portion 68g even when the position of the floating pin 68A changes, the possibility of deformation / breakage can be reduced, and the sealing maintenance can be more reliably performed. Can be done.

In the above-described embodiment of the present invention, the structure in which the spring is used as the first urging portion 70 has been described. However, another elastic body may be used.
Further, the structure in which one annular air cylinder is employed as the structure of the second urging portion 80 has been described, but a configuration using another driving fluid such as a hydraulic cylinder may be employed. Also in this case, the driving device that contracts the thickness dimension of the movable valve plate portion 50 and the movable valve frame portion 60 from the inner surface of the valve box 10 (10a, 10b) by driving one annular cylinder is the first. 2 Used as an urging unit.

In the embodiment of the present invention described above, the opening and the movable valve portion formed in a circular shape as shown in FIG. 15A, or a substantially square having rounded corners as shown in FIG. 15B. The opening and the movable valve portion formed in the above have been described. The gate valve of the present invention is not limited to these shapes. Since the gate valve of the present invention has a structure in which an actuator is provided in the peripheral region of the movable valve portion, for example, an opening formed in a substantially triangular shape with rounded corners as shown in FIG. A valve plate (movable valve portion) may be employed. Moreover, the opening part and valve plate which were formed in the substantially rectangular shape which has roundness in a corner | angular part as shown in FIG.15 (d) may be employ | adopted. Moreover, the opening part and valve plate which were formed in the substantially hexagon which has roundness in a corner | angular part as shown in FIG.15 (e) may be employ | adopted. Moreover, it is also possible to apply to the opening part and valve plate which were formed in the substantially U shape which has roundness in a corner | angular part as shown in FIG.15 (f).
Furthermore, the present invention includes openings and valve plates formed in all shapes, such as openings and valve plates formed in an elliptical shape, or openings and valve plates formed in a substantially octagonal shape with rounded corners. It is applicable to.

(Fifth embodiment)
Hereinafter, although 5th Embodiment of a gate valve is shown, the same number is attached | subjected to the structure similar to 1st Embodiment.
In the fifth embodiment shown in FIG. 19, a projection 152 formed on the connection member 151 and a recess 154 formed on the neutral valve 153 are provided. In this embodiment, as shown in FIG. 19 (b), the connection member 151 and the neutral valve portion 153 extend in parallel with each other along the flow path direction H in the engaged state, and are separated by a first interval t1. A pair of first parallel surfaces 156a and 156b and a pair of second parallel surfaces 157a and 157b that extend in parallel to each other along the flow path direction H and are separated by a second interval t2 wider than the first interval t1 are in contact with each other. is doing.

  The set of first parallel surfaces 156a and 156b and the set of second parallel surfaces 157a and 157b are arranged at positions where they do not overlap. Then, in a state where the protrusion 152 and the recess 154 are fitted, the protrusion 152 is separated from the first parallel surfaces 156a and 156b and the second parallel surfaces 157a and 157b without contacting each other. A space portion 159 is formed.

As shown in FIG. 19A, the protrusion 152 of the connection member 151 has first contact surfaces 152a and 152b and second parallel surfaces 157a and 157b constituting the pair of first parallel surfaces 156a and 156b. The second contact surfaces 152c and 152d constituting the are formed.
On the other hand, the concave portion 154 formed at one end of the neutral valve portion 153 includes the third contact surfaces 154a and 154b constituting the pair of first parallel surfaces 156a and 156b, and the fourth constituting the second parallel surfaces 157a and 157b. Contact surfaces 154c and 154d are formed.

According to the above configuration, when the recess 154 of the neutral valve portion 153 is inserted into the protrusion 152, the third contact surfaces 154a and 154b of the recess 154 come into contact with the first contact surfaces 152a and 152b of the protrusion 152, respectively. At this time, the first contact surfaces 152a and 152b of the protrusion 152 are in contact with the third contact surfaces 154a and 154b of the recess 154 only at the tip portion, and most other parts are separated from the recess 154 and are in a fitted state. In this case, a space 159 is formed in which the recess 154 does not come into contact with the projection 152.
Further, the fourth contact surfaces 154c and 154d of the recess 154 are in contact with the second contact surfaces 152c and 152d of the protrusion 152, respectively.

  According to the gate valve of the fifth embodiment, of the entire length L3 of the portion where the protrusion 152 enters the recess 154, the length of the contact between the protrusion 152 and the recess 154 is the first parallel. It is limited to the length L1 of the surfaces 156a and 156b and the length L2 of the second parallel surfaces 157a and 157b, and in most other cases, the recess 154 and the projection 152 are separated from each other as the space 159. As a result, when the neutral valve portion 153 is fitted to the connection member 151, it is possible to easily attach the neutral valve portion 153 with a small contact surface, and the attachment workability is greatly improved. On the other hand, the recess 154 and the protrusion 152 can be reliably and accurately fitted to each other between the first parallel surfaces 156a and 156b and the second parallel surfaces 157a and 157b with the space 159 interposed therebetween.

  The present invention is widely applied to a gate valve for use in switching between a state in which a flow path connecting two spaces having different properties such as a degree of vacuum, temperature, gas atmosphere, and the like is opened in a vacuum apparatus or the like. Applicable.

  DESCRIPTION OF SYMBOLS 5 ... Neutral valve part, 10, 10a, 10b ... Valve box, 11 ... Hollow part, 12a ... 1st opening part, 12b ... 2nd opening part, 20 ... Rotating shaft, 21 ... Male screw, 25 ... Valve rod, 26 DESCRIPTION OF SYMBOLS ... Valve shaft, 30 ... Neutral valve part, 31 ... Female screw, 40 ... Movable valve part, 41 ... Supply path, 41 ... Communication path, 50 ... Movable valve plate part (2nd movable valve part), 51a, 51b ... No. 2 seal parts, 52a, 52b ... third seal part, 53, 54 ... wiper, 55, 56 ... intermediate atmospheric chamber, 60 ... movable valve frame part (first movable valve part), 61 ... first seal part, 62 ... Guide pin 68 ... Connection pin 68A ... Floating pin 69 ... Connection pin portion 70 ... Main spring (first biasing portion) 80 ... Air cylinder (second biasing portion) 90 ... Auxiliary spring (third attachment) 91) connecting member, 93 ... projection, 95 Recesses, 96a, 96b ... first parallel surface, 97a, 97b ... second parallel surface, 1,300,400 ... gate valve.

Claims (6)

A gate valve,
A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other;
A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening;
A rotating shaft that rotates the neutral valve body between a valve closing position that closes the first opening and a valve opening position that is retracted from the first opening;
A connection member fixed to the rotary shaft in the valve box and holding the neutral valve portion in a detachable manner;
The neutral valve body has a neutral valve portion connected to the rotating shaft via the connection member, and a movable valve portion connected to the neutral valve portion so that the position in the flow direction can be changed,
The connection member and the neutral valve portion extend in parallel with each other along the flow path direction and a pair of first parallel surfaces spaced apart at a first interval, and extend in parallel with each other along the flow path direction. A gate valve characterized by being in contact with each other with a pair of second parallel surfaces spaced apart at a second interval wider than the interval. The movable valve portion is provided with a seal portion that is provided around the valve plate and is in close contact with the inner surface of the valve box around the first opening,
A first movable valve portion connected to the neutral valve portion so as to be capable of changing the position in the flow path direction;
A first urging portion that urges the first movable valve portion toward the first opening in the flow path direction so that the seal portion can be brought into close contact with the inner surface of the valve box around the first opening;
A second movable valve portion slidable in the flow path direction with respect to the first movable valve portion;
A second biasing portion that drives the first movable valve portion and the second movable valve portion so as to be able to contract the flow direction thickness dimension against the biasing force of the first biasing portion;
The first movable valve portion is connected to the neutral valve body in such a manner that the position of the first movable valve portion and the second movable valve portion can be changed in the flow passage direction in response to the change in the thickness dimension in the flow passage direction. The gate valve according to claim 1, further comprising a third urging portion that urges the first movable valve portion toward the flow path direction central position. The connecting member is formed with a protrusion having a first contact surface constituting the first parallel surface and a second contact surface constituting the second parallel surface,
At one end of the neutral valve body, there is formed a recess that has a third contact surface that constitutes the first parallel surface and a fourth contact surface that constitutes the second parallel surface and fits with the protrusion. The gate valve according to claim 1 or 2, wherein the gate valve is provided.   The gate valve according to any one of claims 1 to 3, wherein the recess is formed on one side and the other side of the neutral valve portion in the flow path direction.   The rotary shaft and the neutral valve portion are coupled by a male screw that passes through the rotary shaft and the connecting member, and a female screw that is formed in the neutral valve portion and is screwed into the male screw. The gate valve according to any one of claims 1 to 4. A gate valve,
A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other;
A valve body arranged in the hollow portion of the valve box and capable of closing the first opening;
A rotating shaft for rotating the valve body between a valve closing position for closing the valve body with respect to the first opening and a valve opening position for opening the valve body retracted from the first opening;
A connection member fixed to the rotary shaft in the valve box and holding the valve part in a detachable manner;
The connection member and the valve portion extend in parallel to each other along the flow path direction and a pair of first parallel surfaces spaced apart by a first interval, and extend in parallel to each other along the flow path direction. A gate valve characterized by being in contact with each other with a pair of second parallel surfaces spaced apart at a wider second interval.

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