TWI698606B - Slide valve - Google Patents

Abstract

A slide valve of the invention includes: a valve box having a hollow, a first opening, and a second opening, the first opening and the second opening being provided so as to face each other with the hollow interposed therebetween and forming a flow passage passing through the hollow; a neutral valve body that is arranged in the hollow of the valve box and is capable of sealing the first opening; a rotation shaft that rotate the neutral valve body between a valve sealing position at which the neutral valve body is in a state of sealing the first opening and a valve opening position at which the neutral valve body is in a state of being retracted from the first opening; a rotation driver that is constituted of a rack pinion rotating the rotation shaft and a rotation air cylinder driving the rack pinion; a sealing release driver that is constituted of a sealing release air cylinder that carries out operation of releasing seal of the neutral valve body; and a sequence circuit that is capable of sequentially allowing operation of releasing seal of the neutral valve body and operation of rotating the neutral valve body. The rotation air cylinder includes: a piston that is capable of being operated integrally with the rotation air cylinder; a first pressure space and a third pressure space that are capable of carrying out closing operation of the piston; and a second pressure space and a fourth pressure space that are capable of carrying opening operation, wherein the first pressure space, the second pressure space, the third pressure space, and the fourth pressure space are disposed in series in an operation direction of the piston. The sequence circuit includes: an air operated three-channel spool valve; an air operated two-channel spool valve; a speed control valve in which a check valve and a flow control valve are combined; a check valve; and a rotational-operation completion detecting switch valve that is provided in parallel with the check valve and is capable of maintaining the sealing pressure in a state where a sealing pressure of the sealing release air cylinder is stabilized until operation of rotating the neutral valve body is completed. When the slide valve is opened due to supply of drive compressed air in one line and when drive of the sealing release air cylinder is completed, the sequence circuit causes the first pressure space to be in a non-pressurized state, causes the second pressure space to be in a pressurized state, causes the third pressure space and the fourth pressure space to be in a pressurized state, and thereby starts opening operation of the rotation air cylinder. When the slide valve is closed due to releasing the supply of drive compressed air, the sequence circuit causes the first pressure space and the second pressure space to be in a non-pressurized state, causes the third pressure space to be in a hermetically-sealing maintaining state in a pressurized state, causes the fourth pressure space to be in a non-pressurized state, and thereby starts closing operation of the rotation air cylinder and starts sealing operation by the sealing release air cylinder when the rotation operation is completed.

Description

Slide valve

The present invention relates to a swing type, direct-acting type spool valve suitable for sliding the valve body in addition to the operation of opening and closing the flow path by the valve body (valve plate). In particular, the present invention relates to a vacuum device, etc., in which a flow path connecting two spaces with different pressures and a flow path connecting two spaces for different processes are blocked (closed), and the blocking state is opened ( Connect the slide valve of 2 spaces).

In a vacuum device, etc., a gate valve is installed to isolate two spaces with different vacuum levels between the chamber and the pipe, between the pipe and the pipe, or between the pipe and the pump, etc., and connect the separated spaces 2 spaces. As such a gate valve, various types of valves are known.

For example, it is known to slide the valve plate to insert the valve plate into the valve opening and closing position of the flow path, and then actuate the valve plate to block the flow path (valve closing action), or actuate the valve plate to connect the flow path (valve opening). Action), and then slide the valve plate, and make the valve plate retreat from the flow path to the retreat position in the valve box. As a spool valve having such a structure, swing type, direct-acting type, gate type, etc. are known.

The swing-type spool valve has a structure in which the following parts are arranged, namely: a valve box in which a first opening and a second opening constituting a flow path are formed and a hollow part; a support body, which is fixed to the rotating part in the hollow part The shaft extends in a direction parallel to the plane perpendicular to the rotating shaft; and the valve body (the valve plate when the sealing plate is arranged in the opening part) is fixed on the support body. In this spool valve (gate valve), the rotation shaft is rotated to rotate the valve body, so that the valve body is inserted into the valve opening and closing position of the opening (flow path), or the valve body is retracted to the point where no The retreat position of the opening.

The inventors of the present invention have developed a gate valve that has a structure that can achieve a large closing area in a spool valve driven by a compressed air supply, and can perform a highly reliable shut-off operation with a simple structure. A patent application (Japanese Patent No. 5727841, hereinafter referred to as Patent Document 1).

In addition, regarding a spool valve that performs a blocking operation in a large area, the valve disclosed in Japanese Patent Laid-Open No. 2013-190028 (hereinafter referred to as Patent Document 2) is different from the above-mentioned gate valve in terms of valve type, but pursues one For example, the normally closed type described in Patent Document 2, that is, a highly safe valve that can automatically close the flow path when the drive power supply or compressed air supply has disappeared and is in the valve closed position.

The normally closed means that when the valve is shut off, the compressed air (compressed air) driven by the valve body is not acting, etc., when the valve is in the open state, it automatically becomes the closed state, and when the valve is in the closed state, it is maintained The state of closing the flow path.

However, the spool valve described in Patent Document 1 developed by the inventors does not have such a normally closed structure.

In addition, when the pressure-driven spool valve described in Patent Document 1 uses a spring member to achieve a normally closed structure as described in Patent Document 2, it is necessary to cancel the elastic thrust of the spring member used in the normally closed structure The opening action is performed by operating fluid such as compressed air. Therefore, in a spool valve that performs a blocking operation in a large area, the pressure value required for driving or the driving area required for a driving cylinder becomes larger, so there is a problem of increased size and weight of parts.

Furthermore, in the opening/closing operation of the gate valve, there are cases where the movable portion such as the driving portion or the valve body abuts against another member when the operation is stopped.

Recently, with the rapid opening and closing of the gate valve and the enlargement of the closed area of the gate valve, the problem of preventing insufficient impact caused by the operation of the gate valve has gradually attracted attention. In order to solve this problem, it is also considered to install a mechanical mechanism such as a damper in the gate valve.

However, in the device/manufacturing line etc. where the gate valve is installed, the installation posture of the gate valve is set according to the device/manufacturing line using the gate valve, and various. Therefore, in general, when the gate valve is manufactured, the installation posture of the gate valve cannot be specified. Therefore, it is not practical to install the damper on the gate valve in consideration of all the installation postures of the gate valve in advance. This is due to the change in the direction of movement when the gate valve is opened and closed corresponding to the setting posture of the gate valve. Furthermore, although the amount of impact caused by the opening and closing operations of the mechanical mechanism such as a damper is installed in the gate valve, it is necessary to set the structure, number, performance, etc. of the mechanical mechanism in accordance with the shock absorption force of the mechanical mechanism. Although various installation structures are considered for the installation posture of the gate valve in the device/manufacturing line, it is not realistic to prepare various dampers accordingly.

In addition, in the spool valve described in Patent Document 1 developed by the inventors, three systems of compressed air are used as the drive control pressure, but the pressure is generated by supplying only one system of the drive control compressed air , That is, the requirement to control the opening and closing action of the spool valve only by the opening/closing of the air pressure of one system.

The present invention was completed in view of the foregoing actual situation, and its purpose is to provide a method that can prevent the generation of particles caused by the impact caused by the action of the slide valve, and achieve the Space-saving, a normally closed spool valve that can be operated only by supplying compressed air for driving in one system.

In order to solve the above-mentioned problems, the spool valve of the aspect of the present invention has a valve box having a hollow portion, and a first opening and a second opening portion and a second opening portion that are provided to face each other with the hollow portion interposed therebetween. Opening; a neutral valve body, which is arranged in the hollow portion of the valve box and can close the first opening; and a rotating shaft, which enables the neutral valve body to set the neutral valve body relative to the first The opening is closed between the valve closed position and the valve opening position where the neutral valve body is set to retract from the first opening. The rotating device includes a rack for rotating the rotating shaft. A gear and a rotating cylinder that drives the rack and pinion; a closing and releasing drive part, which includes a closing and releasing cylinder for releasing the closing of the neutral valve body; and a sequence circuit that can release the closing of the neutral valve body The action and the aforementioned rotation action of the neutral valve body act in sequence. The rotating cylinder has: a piston that can move integrally with the rotating cylinder; first and third pressure spaces, which are arranged in series in the direction of movement of the piston, so that the piston can be closed; and a second pressure space And the fourth pressure space, etc. can make the aforementioned piston open. The aforementioned sequence circuit has: a pneumatic 3-channel spool valve; a pneumatic 2-channel spool valve; a speed control valve, which combines a one-way valve and a flow adjustment valve; a check valve; and an on-off valve for detecting the end of rotation. The check valves are arranged in parallel, and the closing pressure of the closing and releasing cylinder is stabilized, and the closing pressure can be maintained until the rotation of the neutral valve body is completed. In the sequence circuit, when the spool valve is opened by the supply of compressed air driven by one system, the first pressure space is set to a non-pressurized state when the driving of the closing release cylinder is completed. The second pressure space is set to a pressurized state, and the third pressure space and the fourth pressure space are set to a pressurized state to start the opening operation of the rotary cylinder; in the foregoing process by canceling the supply of drive compressed air When the spool valve is closed, the first pressure space and the second pressure space are set to a non-pressurized state, the third pressure space is set to a pressurized state of airtight maintenance, and the fourth pressure space is set to a non-pressurized state. In the pressurized state, the closing action of the rotating cylinder starts; and when the rotating action ends, the closing action of the closing and releasing cylinder starts.

In the slide valve of the aspect of the present invention, the aforementioned sequence circuit may have a maintenance switch set as a 4-way valve, and a check valve. The maintenance switch is actuated during maintenance and repair of the valve open position, and the aforementioned first The first pressure space, the third pressure space, the fourth pressure space, and the aforementioned closing and releasing cylinder are in a non-pressurized state, and the aforementioned second pressure space is maintained in a pressurized state.

In the spool valve of the aspect of the present invention, the sequence circuit may be two-way in the pneumatic 3-channel spool valve, and only the flow path connected to the supply source of driving pressure air to the third pressure space can be set valve.

The spool valve of the aspect of the present invention has: a valve box having a hollow portion, and a first opening portion and a second opening portion that are provided so as to face each other with the hollow portion interposed therebetween to form a communicating flow path; a neutral valve A body, which is arranged in the hollow portion of the valve box and can close the first opening; and a rotating shaft that causes the neutral valve body to close the neutral valve body with respect to the first opening Between the valve closed position and the valve open position where the neutral valve body is set to retract from the first opening; the rotating device includes a rack and pinion that rotates the rotating shaft and A rotating cylinder driven by a rack and pinion; a closing and releasing drive part, which includes a closing and releasing cylinder that performs the action of releasing the closing of the neutral valve body; and a sequence circuit that can make the action of releasing the closing of the neutral valve body the same as the foregoing The rotation of the neutral valve body moves in sequence. The rotary cylinder has: a piston that can move integrally with the rotary cylinder; a first and a third pressure space, which are arranged in series in the direction of movement of the piston, so that the piston can be closed; and a second pressure space and The fourth pressure space can open the aforementioned piston. The aforementioned sequence circuit has: a pneumatic 3-channel spool valve; a pneumatic 2-channel spool valve; a speed control valve, which combines a one-way valve and a flow adjustment valve; a check valve; and an on-off valve for detecting the end of rotation. The check valves are arranged in parallel, and the closing pressure of the closing and releasing cylinder is stabilized, and the closing pressure can be maintained until the rotation of the neutral valve body is completed. In the sequence circuit, when the spool valve is opened by the supply of compressed air driven by one system, the first pressure space is set to a non-pressurized state when the driving of the closing release cylinder is completed, and the second pressure space is set Set to the pressurized state, set the third pressure space and the fourth pressure space to the pressurized state to start the opening action of the rotary cylinder; when the spool valve is closed due to the release of the drive compressed air supply, the The first pressure space and the second pressure space are set to a non-pressurized state, the third pressure space is set to a pressurized state in a hermetically maintained state, and the fourth pressure space is set to a non-pressurized state to rotate the The closing action of the cylinder starts; and the closing action of the aforementioned closing and releasing cylinder starts when the aforementioned rotation action ends. With this, when an on signal is input to the sequence circuit to open the driving compressed air supply of one system, the pressure state is set to expand and contract the rotating cylinder, and the compressed air supply can be delayed by the speed control valve. Close and release the cylinder. At the same time, when an open signal is input to the sequence circuit to disconnect the drive compressed air supply of a system to close the action, it is set to a pressure state that makes the rotating cylinder expand and contract, and the cylinder can be closed and released by the speed control valve delay stress reliever. Thereby, the closing action and the rotating action of the neutral valve body can be released in sequence correctly. Furthermore, when the compressed air driven by one system in the sequence circuit is not supplied, the closed position of the valve and the closed state of the neutral valve body can be maintained normally closed.

In the aspect of the present invention, the aforementioned sequence circuit has a maintenance and repair switch as a 4-way valve and a check valve, and the maintenance and repair switch is used for maintenance and repair at the valve open position. The first pressure space, the third pressure space, the fourth pressure space, and the closing release cylinder are set to a non-pressurized state, and the second pressure space is maintained in a pressurized state. As a result, when the compressed air driven by one system is in the supply state during maintenance work, the valve-opened retreat position is maintained by the closed-release cylinder and the second pressure space maintained in the pressurized state. Even when the compressed air supply is unexpectedly reduced, the check valve can still maintain the pressurized state of the second pressure space and maintain the retracted position for a certain period of time so that the valve does not suddenly close.

In the aspect of the present invention, the sequence circuit is a pneumatic 3-channel spool valve, and only the flow path connected to the supply source of driving compressed air to the third pressure space is set as a two-way valve. As a result, when the pneumatic 3-channel spool valve is not set to pneumatic, even if the drive compressed air supply of one system fluctuates below the threshold, the closed two-way valve is judged to be With the closing signal, the pressure increase in the third pressure space becomes the closed state, which conforms to the foregoing, and the spool valve does not perform unexpected operations, but can perform appropriate operations.

According to the spool valve of the aspect of the present invention, the following effects can be obtained. That is, it is possible to provide a method for preventing the generation of particles due to the impact caused by the action of the spool valve, achieving space saving of parts, and having only one The drive of the system is a normally closed slide valve that can be operated by compressed air supply.

Hereinafter, the slide valve of the first embodiment of the present invention will be described based on the drawings.

In addition, in each figure used in the following description, in order to set each constituent element to a size that is recognizable in the drawing, the size and ratio of each constituent element are appropriately adjusted to the actual size and ratio. Different situations.

The technical scope of the present invention is not limited to the embodiments described below, and various changes can be added without departing from the scope of the present invention.

(First Embodiment) Figure 1 is a plan view showing the structure of the slide valve of this embodiment. Fig. 2 is a longitudinal sectional view showing the structure of the spool valve of the first embodiment of the present invention, and is a diagram showing a state where the valve body is arranged in a retractable position. Fig. 3 is an enlarged view showing the main part of the connecting part between the neutral valve part and the first movable valve part and the area near the first elastic part and the second elastic part shown in Fig.2. Fig. 4 is a longitudinal sectional view showing the structure of the spool valve of this embodiment, and is a diagram showing a situation where the neutral valve body is arranged in the valve closed position. Fig. 5 is an enlarged view showing the main part of the connecting part between the neutral valve part and the first movable valve part and the area near the first elastic part and the second elastic part shown in Fig. 4; Fig. 6 is a longitudinal cross-sectional view showing the structure of the spool valve of the first embodiment of the present invention, and is a view showing the state where the valve body is arranged in the retracted position. Fig. 7A is an enlarged view showing the main parts of the members located in the vicinity of the rotary shaft and the fluid path ring of the spool valve of this embodiment, and is a sectional view taken along the radial direction of the rotary shaft. Fig. 7B is an enlarged view showing the main parts of the members located in the vicinity of the rotary shaft and the fluid path ring of the spool valve of this embodiment, and is a sectional view taken along the axial direction of the rotary shaft.

[Swing type slide valve] The spool valve 1 of the first embodiment is a swing type spool valve as shown in FIGS. 1 to 6.

The spool valve 1 of the present embodiment includes: a valve box 10 provided with a first opening 12a and a second opening 12b facing each other; a rotating shaft 20 that serves as a switching portion penetrating the valve box 10; and a connecting member 91, which is fixed to the rotating shaft 20; the neutral valve portion 30, which is connected to the rotating shaft 20 via the connecting member 91; the movable valve portion 40, which is movably connected to the neutral valve portion 30 in the axial direction of the rotating shaft 20; The main spring (first urging portion) 70, which urges the movable valve portion 40 in the thickness direction of the movable valve portion 40 to increase the thickness of the movable valve portion 40; an annular cylinder (closed-release cylinder) 80 for driving, which It can be stretched in the direction opposite to the direction of the main spring 70, and the auxiliary spring (third spring) 90 for position regulation, which makes the movable valve part 40 arranged near the center of the valve box 10.

The neutral valve portion 30 and the movable valve portion 40 constitute a neutral valve body 5. In addition, the movable valve portion 40 includes a movable valve plate portion (second movable valve portion) 50 and a movable valve frame portion (first movable valve portion) 60. A flow path H is set from the first opening 12a toward the second opening 12b. In addition, in the following description, the direction along the flow path H may be referred to as the flow path direction H.

If the rotating shaft 20 rotates in the direction indicated by the symbol A1 (the direction intersecting the direction of the flow path H), it will be fixed to the rotating shaft 20 via the connecting member 91 along with the rotation. The neutral valve portion 30 will also rotate in the direction A1 . In addition, since the movable valve portion 40 and the neutral valve portion 30 are slidably connected only in the thickness direction, the movable valve portion 40 and the neutral valve portion 30 rotate integrally.

By rotating the neutral valve portion 30 in this way, the movable valve portion 40 moves from the retreat position E1 where the hollow portion 11 is not provided with the flow path H to the valve closing position E2 of the flow path H at a position corresponding to the first opening 12a. Move while swinging.

Then, when the main spring 70 acts in the direction of extension, if an action to expand the thickness of the movable valve portion 40 in the direction of the flow path H (valve closing action) is performed, as described later, the movable valve frame portion The sealing portion 61 of 60 and the reaction force transmission portion 59 of the movable valve plate portion 50 press the inner surface 15a and the inner surface 15b of the valve box 10, respectively, and the movable valve portion 40 closes the flow path H.

Conversely, by the action of the annular cylinder (the second urging part) 80, the pressing force of the annular cylinder 80 becomes larger than the urging force of the main spring 70, and the valve part 40 is moved in the direction of the flow path H. The action of shrinking the thickness. Thereby, the front surface and the back surface of the movable valve part 40 are separated from the inner surface 15a and the inner surface 15b of the valve box 10 (releasing operation). After that, when the rotating shaft 20 rotates in the direction indicated by the symbol A2 (retraction operation), the neutral valve portion 30 and the movable valve portion 40 also rotate in the direction A2 following the rotation.

By the release operation and the retreat operation, the movable valve portion 40 is retracted from the valve opening and closing position to the retreat position, and a valve opening operation is performed in which the movable valve portion 40 is in the valve open state.

[Valve Box 10] The valve box 10 is composed of a frame having a hollow portion 11. A first opening 12a is provided on the upper surface of the frame in the drawing, and a second opening 12b is provided on the lower surface of the frame in the drawing.

The slide valve 1 is inserted between a space (first space) where the first opening 12a is exposed and a space (second space) where the second opening 12b is exposed. The spool valve 1 blocks (closes) the flow path H connecting the first opening 12a and the second opening 12b, that is, the flow path H connecting the first space and the second space, and opens the blocked state (connecting the first space) With 2nd space).

In the hollow portion 11 of the valve box 10, there are provided: a rotating shaft 20, a neutral valve portion 30, a movable valve portion 40, a main spring (first elastic portion) 70, an annular cylinder (second elastic portion) 80, And the auxiliary spring (third elastic push part) 90.

[Rotating shaft 20, fluid path ring 17, 18] The rotating shaft 20 extends substantially in parallel with the flow path H, penetrates the valve box 10 and is rotatably provided.

The connecting member 91 is fixed to the rotating shaft 20. The connecting member 91 is, for example, a substantially flat member. As shown in FIG. 7B, one end 20a of the rotating shaft 20 is fixed by a screw 92. A protrusion 93 is formed on one end side of the connecting member 91 in the direction H of the flow path. In other words, the protrusion 93 widens in a direction orthogonal to the flow path direction H, and the connecting member 91 has a substantially T-shaped cross-sectional shape.

As shown in FIGS. 7A and 7B, the housing 14 fixed to the valve box 10 passes through the valve box 10 via bearings 16A, 16B using bearings or the like, and is rotatably supported by the rotating shaft 20. The bearings 16A and 16B are arranged as far apart as possible in the direction along the axis LL of the rotating shaft 20.

The housing 14 is fixed so as to penetrate through the valve box 10 in a sealed state. The housing 14 is set as: a sealed housing 14A, which is rotatably penetrated by the rotating shaft 20 in a sealed state; a cylindrical housing 14B, which is connected to the sealed housing 14A, and rotates through bearings 16A, 16B provided on the inner peripheral side Freely supports the rotating shaft 20; and the cover housing 14C, which closes one end of the cylindrical housing 14B. The sealed housing 14A, the cylindrical housing 14B, and the cover housing 14C are fixedly connected to each other. A cover 14D that closes the opening of the pluggable rotating shaft 20 is provided on the cover housing 14C.

In the sealed casing 14A, in order to seal the inside of the valve box 10, sealing parts 14Aa, 14Ab, 14Ac and an intermediate atmosphere chamber 14Ad as a space (gap) of atmospheric pressure are provided.

On the inner peripheral surface side of the cylindrical housing 14B, fluid path rings 17 and 18 are fixed at positions between the bearings 16A and 16B in the direction of the axis LL so as to be in slidable contact with the outer peripheral surface 20b of the rotating shaft 20.

At the center position between the fluid path rings 17 and 18 on the outer peripheral surface 20b of the rotating shaft 20, a pinion gear constituting a rotating shaft drive mechanism 100 (refer to FIG. 8) for driving (rotating) the rotating shaft 20 is fixed. twenty one. The pinion gear 21 is accommodated in the internal space 22h of the housing 14B which can be sealed from the outside, and a round rod-shaped rack member 22 is connected to the pinion gear 21. The rack member 22 reciprocates in the depth direction of the paper in FIG. 7B, and the rack member 22 rotates the rotating shaft 20 via the pinion 21.

[Rotating shaft drive mechanism 100] FIG. 8 is a cross-sectional view (extended position) of the rotating shaft driving mechanism 100. FIG. 9 is a cross-sectional view (retracted position) of the rotating shaft driving mechanism 100. Figure 10 is an enlarged cross-sectional view showing the main parts of the rack member and the sliding bearing. Fig. 11 is an enlarged cross-sectional view showing the main part of the meshing part of the rack member and the pinion gear.

The rotating shaft drive mechanism 100 for rotating the rotating shaft 20 has a rack member 22 having a pinion 21 fixed to the rotating shaft 20 and rack teeth 22 a meshed with the pinion 21.

In addition, the rotating shaft drive mechanism 100 includes a rotating drive cylinder 110 (rotating cylinder) for reciprocating the rack member 22 and a sub-cylinder 120. By rotating the cylinder 110 and the auxiliary cylinder 120, the rack member 22 can linearly reciprocate along the axis (length direction) C.

As shown in FIGS. 8 and 9, the rack member 22 has an axis in a direction orthogonal to the axis of the rotating shaft 20 and is connected to a reciprocating piston 112. The piston 112 is housed in a cylindrical cylinder body (housing) 111 and constitutes a rotary drive cylinder (driving mechanism, rotary cylinder, cylinder) 110. The rack member 22 connected to the rotary drive cylinder 110 is expanded by supplying compressed air (driving gas) to the expansion pressure space (second pressure space) 113 on the opposite side of the piston 112 with respect to the rack member 22. Similarly, the rack member 22 is contracted by supplying compressed air (driving gas) to the contraction pressure space (first pressure space) 22c on the rack member 22 side that becomes the piston 112.

The rack member 22 is inside the housing 14Bb integrated with the housing 14B, and the rack storage spaces (spaces) 22d, 22g, 22m provided in a manner extending in the direction orthogonal to the rotating shaft 20 are movable in the axial direction. The ground is stored. The spaces 22d, 22g, and 22m have a diameter larger than that of the rack member 22. Inside the spaces 22d, 22g, and 22m, the rack member 22 is reciprocally supported by sliding bearings (bearings) 115B, 115C provided so as to cover the outer periphery of two locations.

The bearings 115B and 115C are arranged on both sides of the position where the pinion 21 meshes with the rack member 22 in the axial direction of the rack member 22. Any one of the bearings 115B and 115C is integrated with the housing 14Bb, and has an outer peripheral surface that is reduced in diameter compared to the diameter of the space 22g. The bearings 115B and 115C are in close contact with the outer peripheral surface of the rack member 22.

On one side of the outer circumferential surface of the rack member 22 in the circumferential direction, a plurality of rack teeth 21a meshing with the pinion gear 21 are arranged adjacently in the axial direction. A communication groove 116 is provided on the outer peripheral surface of the rack member 22 at a position different from the portion where the rack teeth 22a are provided in the circumferential direction. The communication groove 116 communicates the space 22d and the space 22g located on both sides of the bearing 115B with respect to the axial direction of the rack member 22.

As shown in FIG. 10, this communication groove 116 connects the space 22g and the space 22m located on both sides of the bearing 115C with respect to the axial direction. The length of the communicating groove 116 is set so that even when the rack member 22 reciprocates, the communicating state of the space 22d and the space 22g on both sides of the bearing 115B, and the space 22g and the space 22g on both sides of the bearing 115C can be maintained Connected state of space 22m.

The expansion pressure space 113 is connected to a supply source for supplying compressed air for expansion to the outside of the air cylinder 110 which is driven by rotation through the expansion vent (supply path) 114 via the sequence circuit SQ described later.

The contraction pressure space 22c is connected to a supply path 22j for supplying compressed air for contraction from a supply source via a sequence circuit SQ described later to spin the outside of the cylinder 110.

Regarding the path from the shrinking pressure space 22c to the compressed air supply source, the supply path (restricted air port) 22j passes through the space 22d in which the rack 22 is accommodated, and the communicating groove 116 and the tooth arranged at a position corresponding to the reduced diameter bearing 115B. The part of the space corresponding to the tooth 22a, the space 22g expanded in diameter between the bearing 115B and the bearing 115C, the internal space 22h of the housing 14B containing the pinion 21, and the internal space 22h are connected to the outside of the housing 14B.

The rotating shaft 20 supported by the bearings 16A, 16B with respect to the housing 14 is driven by a rack member 22 that reciprocates using a rotary drive cylinder (rotation driving device), together with a pinion 21 meshing with the rack member 22 Rotating action.

In addition, during the contraction operation of the rotary drive cylinder (driving mechanism, rotary cylinder) 110 and while maintaining the retracted position Pb of the rack member 22, the compressed pressure space 22c, the storage space 22d, and the space 22g in which the rack member 22 is accommodated, The space 22g corresponding to the meshing position of the communicating groove 116 and the rack tooth 22a arranged at the position corresponding to the reduced-diameter bearing 115B, the space 22d, 22g, 22m that expands the diameter regardless of the position of the bearing 115B and the bearing 115C, storage Any one of the internal space 22h of the housing 14B of the pinion gear 21 and the supply path 22j connecting the internal space 22h and the outside of the housing 14B can maintain a pressurized state.

The rotary drive cylinder 110 reciprocates the rack member 22 by telescopic drive. The rotary drive cylinder 110 is integrated with the housing 14B that houses the rotating shaft 20. The rotary drive cylinder 110 includes a cylindrical cylinder body 111, an internal space 111b inside the cylinder body 111, and a piston 112 slidably accommodated in the internal space 111.

For the rotation drive cylinder 110, the sub-cylinder block 120 is arranged in series in the axial direction at a position on the opposite side of the cylinder body 111 to the rack member 22. The sub-cylinder 120 is integrated with the cylinder main body 111, and has an internal space 121b located inside the cylindrical cylinder main body 111 with one end 111a closed; and a piston 122 slidably received in the internal space 121b. The piston 122 and the piston 112 are connected to the shaft 122s and can move in the same telescopic direction as a unit.

The inner space 111b of the rotary drive cylinder 110 is divided by an end side 111a of the cylinder body 111 and a surface side 112a of the piston 112 to form an expansion pressure space 113 whose capacity is variable by the movement of the piston 112. In addition, an expansion vent (vent) 114 is formed in the cylinder body 111, which communicates with the expansion pressure space 113, and supplies compressed air for expansion driving to the expansion pressure space 113 via a sequence circuit SQ described later. The vent 114 only needs to be connected to a supply source of compressed air for driving, such as a pump, provided outside the spool valve 1.

The piston 112 is housed in the internal space 111b of the cylinder body 111 so as to be linearly reciprocating along the axis (length direction) C. The piston 112 having such a structure can slide between the extended position Pa (FIG. 8) and the retracted position Pb (FIG. 9). In the extension position Pa (FIG. 8), the extension pressure space 113 expands to the maximum, and the piston 112 is located at the position farthest from the one end 111a in the internal space 111b of the cylinder body 111. In the retracted position Pb (FIG. 9), the retracted pressure space 22c on the rack member 22 side of the piston 112 expands to the maximum, the expansion pressure space 113 decreases to the minimum, and the piston 112 is located closest to the one end side 111a.

In addition, a protrusion 112c is formed on one surface side 112a (first surface) of the piston 112. On one end side 111a of the cylinder body 111, there is formed a recess 111c into which the protrusion 112c enters when the piston 112 is at the retracted position Pb. The outer diameter of the protrusion 112c is approximately equal to the inner diameter of the recess 111c, and the protrusion is set so that the outer surface of the protrusion 112c and the inner surface of the recess 111c are close to the airtight state when the inner surface of the recess 111c and the compression space 113 become close to airtight. The outer diameter of 112c and the inner diameter of the recess 111c. One end side of the air vent 114 is formed at a position exposed at the recess 111c.

On one side 112a of the piston 112, a shaft 122s is fixed at the center of the protrusion 112c.

Moreover, the rack member 22 is fixed to the other surface side 112b (second surface) of the piston 112 via the protrusion part (connection part) 112d formed like the protrusion part 112c. The outer diameter of the connecting portion 112d is approximately the same as the inner diameter of the rack storage space 22d, so that when the outer surface of the connecting portion 112d slides with the inner surface of the rack storage space 22d, the inside of the rack storage space 22d and the compression space 22c The outer diameter of the connecting portion 112d and the inner diameter of the rack storage space 22d are set to be close to the airtight state. One end side of the supply path (restricted vent) 22j may be formed at a position exposed in the rack storage space 22d.

On the protrusion 112c of the piston 112, a buffer groove (shrink buffer groove) 118 is formed, which continuously changes along the reciprocating direction of the piston 112, that is, the axis (length direction) C cross-sectional area, so that the air in the pressure space 113 is extended Slowly ventilate toward the vent 114.

Specifically, the buffer groove 118 is formed in the protrusion 112c of the piston 112, and includes a section inclined with respect to the axis (longitudinal direction) C such that the cross-sectional area widens from the side 112a of the piston 112 toward the end side 111a of the cylinder body 111 groove.

A buffer groove (extending buffer groove) 119 is formed on the protrusion 112d of the piston 112, which continuously changes along the reciprocating direction of the piston 112, that is, the axis (length direction) C cross-sectional area, so that the air in the pressure space 22c is reduced Ventilate slowly toward the space 22g.

The buffer groove (extended buffer groove) 119 is formed on the protrusion 112d of the piston 112 in the same way as the buffer groove 118, and includes a cross-sectional area of the space 22d extending from the side 112b of the piston 112 toward the rack member 22. Slot with inclined axis (length direction) C.

In the rotary drive cylinder 110, the internal space 111b of the cylinder body 111 and the internal space 121b are communicated via the shaft hole 111s. The shaft hole 111s extends in the telescopic axial direction of the piston 122 and the piston 112, and penetrates the cylinder body 111 at a central position in the radial direction. Inside the shaft hole 111s, the shaft 122s can reciprocate. Thereby, the cylinder 110 and the sub-cylinder 120 are linked.

In addition, the volume of the internal space 121b is larger than that of the internal space 111b, that is, the radial cross-sectional area of the internal space 121b is larger than that of the internal space 111b.

The cylindrical side surfaces of the piston 112 and the internal space 111b, the cylindrical side surfaces of the piston 122 and the internal space 121b, the shaft 122s and the inner surface of the shaft hole 111s are all slidably slidable with each other while being kept in a sealed state by O-rings and other sealing members. It is sealed all around.

A pressure space (fourth pressure space) 123 is formed in the internal space 121b of the sub-cylinder 120. The pressure space 123 is partitioned by an end side 111a of the cylinder body 111 and a surface side 122a of the piston 122, and the volume of the pressure space 123 is variable by the movement of the piston 122.

A vent 124 is formed in the cylinder body 111 which becomes a side 111 a of the piston 122. The vent 124 communicates with the pressure space 123, and supplies compressed air for operation to the pressure space 123 via a sequence circuit SQ described later. To the vent 124, it is only necessary to connect a compressed air supply source, such as a pump, which is provided outside the slide valve 1 for driving.

In the internal space 121b of the sub-cylinder 120, a pressure space (third pressure space) 122c is formed. The pressure space 122c is partitioned by the inner surface of the cylinder body 111 and the other side 122b of the piston 122, and the displacement capacity of the piston 122 is variable.

On the other side 112b of the piston 122, a shaft 122s is fixed.

In addition, a vent port 122j is formed in the cylinder body 111 to be the other side 112b of the piston 112. The vent port 122j communicates with the pressure space 122c, and supplies compressed air for operation to the pressure space 122c via a sequence circuit SQ described later. To the vent port 122j, it is only necessary to connect a compressed air supply source for driving provided outside the slide valve 1, such as a pump.

The piston 122 is accommodated in the internal space 121b of the cylinder body 111 so as to be linearly reciprocating along the axis (length direction) C.

The piston 122 can slide between the extended position Pa (Figure 8) and the retracted position Pb (Figure 9). In the extended position Pa (FIG. 8), the pressure space 123 expands to the maximum, and the piston 122 is located at the position farthest from the one end 111a in the internal space 121b of the sub-cylinder 120. In the retracted position Pb (FIG. 9 ), the pressure space 122c of the piston 122 that becomes the inner space 111b expands to the maximum, the pressure space 123 shrinks to the minimum, and the piston 122 is located closest to the one end side 111a.

In addition, in FIG. 9, illustration of the rack member 22 is omitted.

Furthermore, one surface side 122a (first surface) of the piston 122 and the other surface side 112b (second surface) of the piston 122 may be formed as a buffer groove with the protrusion 112c and the recess 111c, the connecting portion 112d and the housing The space 22d corresponds to the unevenness.

As shown in FIGS. 8, 9, and 10, the rack member 22 is formed in a circular rod shape in a cross section perpendicular to the axis (length direction) C. In addition, at a part of the peripheral surface of the round rod-shaped rack member 22, rack teeth 22a are arranged along the axis (length direction) C at a predetermined pitch.

On both sides of the meshing portion S of the pinion 21 fixed to the rotating shaft 20 and the rack teeth 22a, sliding bearings 115B and 115C are respectively arranged to slidably support the rack member 22. In the sliding bearings 115B and 115C, as shown in FIG. 10, an inner circumferential surface 115 a with a circular cross section that is slightly larger than the cross section of the rack member 22 is formed. The inner peripheral surface 115a contacts the outer periphery of the rack member 22, and the inner peripheral surface 115a supports the round rod-shaped rack member 22 along the axis (length direction) C in a smoothly slidable manner.

Also, as shown in FIGS. 8 and 10, on the surface (peripheral surface) of the rack member 22, the communicating groove (groove) 116 extends in the direction of the axis C as described above to extend to both the sliding bearing 115B and the sliding bearing 115C Formed in the outer position side. Moreover, in the housing 14B which accommodates the rack member 22, the convex part (illustration omitted) which enters into this communicating groove 116 is formed. Due to the engagement between the communicating groove 116 and the protrusion, the rack member 22 can be prevented from rotating about the axis C. Thereby, the rack member 22 does not twist around the axis C when reciprocating.

Fig. 11 is an explanatory diagram showing the arrangement positions of the sliding bearings 115B and 115C.

The sliding bearings 115B, 115C are preferably arranged on the line of action (extension lines) L1, L2, and the axis of the rack member 22 generated at the meshing portion S of the pinion 21 and the rack teeth 22a. (Axis center line) The intersection points P1 and P2 of C are farther away from the direction of the meshing part S.

That is, when the action lines L1 and L2, which are the contact points of the two meshing teeth, that are the contact points of the pinion 21 and the rack teeth 22a, intersect with the axis (shaft center line) C of the rack member 22, respectively When the intersection points P1 and P2 are set, the sliding bearings 115B and 115C are respectively arranged so that the center line Q of the sliding bearings 115B and 115C becomes outside the intersection points P1 and P2.

By setting the arrangement positions of the sliding bearings 115B and 115C as described above, the sliding bearings 115B and 115C are not affected by the external force generated by the rotation of the pinion gear 21, that is, the force in the direction away from the pinion gear 21. Thereby, the sliding bearings 115B, 115C can prevent the contact parts of the sliding bearings 115B, 115C and the rack member 22 from applying stress in the direction perpendicular to the shaft center (shaft center line) C, and reduce the sliding bearings 115B, 115C and the teeth. The friction force of the bar member 22 thus slidably holds the rack member 22 smoothly.

On one end side 111a of the cylinder body 111, there is provided a contact type limit switch valve (rotation end detection switch valve) cdS that operates when the piston 112 and the piston 122 are in the retracted position Pb. The limit switch valve cdS makes the operation of the sequence circuit SQ shown in FIG. 14 dependent on the positions of the piston 112 and the piston 122 as described later. In addition, the aforementioned limit switch valve cdS is arranged in the position where the piston 122 is in contact in the figure, and may also be arranged in the position where the piston 112 is operated.

Specifically, in a manner corresponding to the pressure on the pneumatic sp2V0 side of the spool valve (pneumatic 2-channel spool valve) sp2V of FIG. 14 described later, when the piston 112 is in the retracted position Pb, the switch is pressed The thrust of the spring, etc., is greater than the force of the compressed air, so that the circuit that drives the spool valve is operated. In addition, when the piston 112 and the piston 122 move from the retracted position Pb, they follow the movement of the piston 112 and the piston 122 to cut off the circuit that drives the spool valve by the elastic force of a spring or the like.

In addition, in FIG. 9, in order to explain the air buffering operation by the buffer tank 118 etc. mentioned later, the state just before reaching the retracted position Pb is shown. Therefore, the limit switch valve cdS is not displayed in the operating state.

According to the rotating shaft drive mechanism 100 configured as described above, for example, when the piston 112 and the piston 122 are in the retracted position Pb shown in FIG. 9, the rack member 22 fixed to the piston 112 and the piston 122 passes through the pinion 21 The interlocking (rotating) rotating shaft 20 is within the rotation range of the rotating shaft 20 and becomes a state of fully rotating counterclockwise in FIG. 8. At the position of the rotating shaft 20, the movable valve portion 40 is placed in the valve closing position E2 of the flow path H via the vertical valve portion 30 fixed to the rotating shaft 20 (FIG. 1).

On the other hand, when the piston 112 and the piston 122 are moved from the retracted position Pb to the extended position Pa shown in FIG. 8, the extension pressure space 113 partitioned by the inner surface of the cylinder body 111 and the side 112a of the piston 112 Inside, compressed air for driving is fed from the vent 114.

Then, as the internal pressure of the extension pressure space 113 increases, the piston 112 moves (slides) along the axis (length direction) C away from one end side 111a of the cylinder body 111, and the pressure space 113 expands.

At this time, the excess air inside the pressure space 22c is compressed, and the pressure space 22c is compressed through the rack 22 accommodating space 22d, the portion corresponding to the communicating groove 116 and the rack tooth 22a arranged at the position corresponding to the bearing 115B The space, the internal space 22g of the housing 14Bb, the internal space 22h of the housing 14B, and the vent 22j are exhausted to the outside.

Also, at this time, in the sub-cylinder 120, as described later, the vent port 122j is set to a closed state to maintain the pressure between the inner surface of the cylinder body 111 and the other surface side 122b of the piston 122 to maintain the compressed air. The pressurized state in the space 122c. At the same time, by setting the vent 124 to an open state, the valve-closing position E2 (FIG. 1) can be normally closed.

If the piston 112 and the piston 122 move in the direction away from the end side 111a of the cylinder body 111 to the extended position Pa, the rack member 22 fixed to the piston 112 causes the pinion 21 meshing with the rack teeth 22a to follow Figure 8 Nakazuki rotates clockwise. Thereby, the rotating shaft 20 is also rotated in the clockwise direction, and the movable valve portion 40 moves in a swing motion toward the retreat position E1 (FIG. 1) of the flow path H via the neutral valve portion 30 fixed to the rotating shaft 20.

Furthermore, when the piston 112 is at the extended position Pa shown in FIG. 8 and the movable valve portion 40 is set to the retracted position E1 of the flow path H (FIG. 1), the piston 112 and the piston 122 are moved from the extended position Pa (FIG. 8) When moving to the retracted position Pb (FIG. 9), in the compressed pressure space 22c partitioned by the end surface 14Ba side of the housing 14Bb, the inner surface 111b of the cylinder body 111 and the other surface side 112b of the piston 112, from the vent 22j Send compressed air for driving. Then, as the internal pressure of the contracting pressure space 22c increases, the piston 112 moves (slides) along the axis (length direction) C toward one end side 111a of the cylinder body 111, and the pressure space 113 contracts.

At this time, the excess air inside the expansion pressure space 113 is discharged from the expansion pressure space 113 to the outside through the vent 114.

Also, at this time, in the sub-cylinder 120, as will be described later, compressed air for driving is fed into the pressure space 123 partitioned by the inner surface of the cylinder body 111 and one surface 122a of the piston 122 from the vent 124, And into the pressure space 122c partitioned by the inner surface of the cylinder body 111 and the other surface side 122b of the piston 122, compressed air for driving is fed from the air vent 122j. Therefore, the pressure space 123 and the pressure space 122c have the same pressure, and the sub-cylinder 120 can be set in a state where it does not contribute to the driving of the rotary drive cylinder 110.

The contraction pressure space 22c passes from the vent 22j through the internal space 22h containing the pinion 21, the internal space 22g containing the rack 22, the communicating groove 116 corresponding to the position corresponding to the bearing 115B and the rack teeth 22a The space 22g of the meshing position and the storage space 22d are supplied with compressed air. At this time, the inside of the communicating groove 116 corresponding to the bearing 115C and the space 22d are also in a pressurized state.

If the piston 112 and the piston 122 move to the retracted position Pb in the direction close to the end side 111a of the cylinder body 111, the rack member 22 fixed to the piston 112 causes the pinion 21 meshing with the rack teeth 22a to move along the line in FIG. It rotates counterclockwise. Thereby, the rotating shaft 20 also rotates in the counterclockwise direction, and the movable valve portion 40 moves toward the valve closing position E2 (FIG. 1) of the flow path H in a swinging motion via the central valve portion 30 fixed to the rotating shaft 20.

In this way, the internal pressures of the expansion pressure space 113 and the contraction pressure space 22c in the cylinder body 111 constituting the rotating shaft drive mechanism 100 are variable, so that the piston 112 and the piston 122 are in the extended position Pa (FIG. 8) and the retracted position Straight line movement between Pb (Figure 9). Thereby, the rotating shaft 20 can be rotated via the rack member 22 and the pinion 21, and the movable valve part 40 can be moved with respect to the flow path H between the retracted position E1 and the valve closing position E2 (FIG. 1).

In addition, the sub-cylinder 120 can realize the normally closed in the valve closing position E2 (FIG. 1).

As described above, during the movement of the piston 112 between the extended position Pa and the retracted position Pb, the movement of the piston 112 toward the retracted position Pb is smoothly changed by the buffer groove 118. Similarly, by the buffer groove 119, the movement of the piston 112 toward the extended position Pa changes smoothly.

The buffer tank 118 will be described.

When the piston 112 is moved from the extended position Pa to the retracted position Pb, the emergency stop of the piston 112 due to the sharp reduction of the extension pressure space 113 is not generated, that is, the meshing part of the rack member 22 and the pinion 21 is not aligned. The way S applies a large stress abruptly, the movement of the piston 112 to the retracted position Pb is changed smoothly by the buffer groove 118 formed in the protrusion 112c of the piston 112.

For example, a case where compressed air for driving is supplied to the contraction pressure space 22c, the internal pressure of the contraction pressure space 22c is increased, and the piston 112 is moved toward the contraction position Pb. In this case, if the protrusion 112c moves until it enters the position of the recess 111c of the cylinder body 111, the flow of air flowing from the expansion pressure space 113 around the protrusion 112c into the recess 111c and discharged from the vent 114 is blocked . The internal pressure of the expansion pressure space 113 expanded at the periphery of the protrusion 112c rises sharply (the expansion pressure space 113 is compressed), and the force acts in the direction in which the moving speed of the piston 112 sharply decreases.

However, with the buffer groove 118 formed in the protrusion 112c, the air in the extension pressure space 113 is induced to the vent 114 through the buffer groove 118. That is, the expansion pressure space 113 is connected to the vent 114 via the buffer groove 118.

However, the buffer groove 118 is formed in such a way that the cross-sectional area of the buffer groove 118 expands from the side 112a of the piston 112 toward the end side 111a of the cylinder body 111. Therefore, the closer the piston 112 is to the retracted position Pb (FIG. 9), the cross-section of the buffer groove 118 The area, that is, the opening area decreases. Thereby, immediately before the piston 112 reaches the retracted position Pb, since the flow rate of air from the extension pressure space 113 to the vent 114 is gradually narrowed (decreased), the reduction in the internal pressure of the extension pressure space 113 gradually decreases. Thereby, the piston 112 can be gently stopped at the retracted position Pb. Therefore, the sudden stop of the piston 112 due to the sharp reduction of the extension pressure space 113 can be prevented, and the meshing portion S (FIG. 11) of the rack member 22 and the pinion 21 can be prevented from being sharply stressed. It stopped smoothly.

Similarly, by the buffer groove 119, the movement of the piston 112 toward the extended position Pa changes smoothly.

Next, a case where compressed air for driving is supplied to the extension pressure space 113 to increase the internal pressure of the extension pressure space 113 to move the piston 112 toward the extension position Pa will be described. In this case, if the protrusion 112d moves to the position where it enters the space 22d of the housing 14Bb, it blocks the flow of the contraction pressure space 22c around the protrusion 112d into the space 22d, moves to the space 22h side, and discharges from the vent 22j The flow of air. Thereby, the internal pressure of the contraction pressure space 22c expanded at the periphery of the protrusion 112d rises sharply (it is compressed in the contraction pressure space 22c), and force acts in the direction in which the moving speed of the piston 112 sharply decreases.

However, by the buffer groove 119 formed in the protrusion 112d, the air in the contracted pressure space 22c is induced through the buffer groove 119 to the space 22d connected to the vent 22j.

That is, the contraction and expansion pressure space 22c communicates with the space 22d via the buffer groove 119.

Moreover, since the buffer groove 119 is formed in such a way that the cross-sectional area of the buffer groove 119 is enlarged from one surface side 112b of the piston 112 toward the other end side 14Ba of the housing 14Bb, the cross-sectional area of the buffer groove 119 is the closer the piston 112 is to the extended position Pa (FIG. 8) , That is, the opening area decreases. Thereby, immediately before the piston 112 reaches the extended position Pa, since the flow rate of air from the contraction pressure space 22c to the space 22d is gradually narrowed (decreased), the reduction in the internal pressure of the contraction pressure space 22c gradually decreases. Thereby, the piston 112 can be gently stopped at the extended position Pa. Therefore, the sudden stop of the piston 112 caused by the sharp reduction of the contraction pressure space 22c can be prevented, and the meshing portion S of the rack member 22 and the pinion 21 (FIG. 11) can be used without sharply applying large stress. It stopped smoothly.

In addition to the above-mentioned buffer grooves 118 and 119, the rotary drive cylinder 110 is also provided with a control buffer flow path 119a, which is used to adjust the position before the piston 112 reaches the extended position Pa or just after the piston 112 starts to move from the extended position Pa The moving speed of the piston 112.

When the piston 112 is set to the extended position Pa (FIG. 8), one end of the control buffer flow path 119a opens to the space 22d located at the position closed by the protrusion 112d. The other end of the control buffer flow path 119a is set as a flow path 119a that opens toward the other surface side 14Ba of the housing 14Bb.

The flow path 119a is provided with a control hole 119b. The control hole 119b extends in a direction intersecting the flow path 119a, communicates with the flow path 119a, and opens to the outside of the housing 14Bb. Inside the control hole 119b, a control pin 119c capable of closing the flow path 119a is slidably provided in the extending direction of the control hole 119b.

The control buffer flow path 119a is used to control the flow rate of the air moving between the reduced pressure space 22c and the space 22d similarly to the buffer tank 119.

Specifically, in the control buffer flow path 119a, if the control pin 119c moves inside the control hole 119b, the cross-sectional area of the flow path 119a changes depending on its position. Thereby, the flow rate of the air moving between the reduced pressure space 22c and the space 22d changes. Therefore, when the control buffer flow path 119a is in a state of opening to the space 22d and the protrusion 112d enters the space 22d of the housing 14Bb, the opening of the flow path 119a can be adjusted by controlling the position of the pin 119c, thereby The moving speed of the piston 112 can be controlled.

If the control pin 119c is pulled out to increase the cross-sectional area of the flow path 119a, the moving speed of the rack 22, that is, the moving speed of the swing motion of the movable valve body 40 (movable valve portion) increases. If the control pin 119c is inserted to reduce the cross-sectional area of the flow path 119a, the moving speed of the rack 22 is reduced, that is, the moving speed of the swing type movement of the movable valve body 40 is reduced.

In particular, not only before the piston 112 reaches the extended position Pa, but also when the piston 112 starts to move from the extended position Pa toward the retracted position Pb, that is, when the movable valve portion 40 starts to move toward the retreat position E1 of the flow path H (FIG. 1 ) It also exerts such an air damper effect when it is moved by swinging motion. Thereby, the operation can be started and stopped smoothly without abruptly applying a large stress to the meshing portion S of the rack member 22 and the pinion 21 (FIG. 11).

With such a cylinder 110, the cylinder 110 can be expanded and contracted only by switching the supply of compressed air at the extension vent 114 and the contract vent 22j, so that the neutral valve body 5 can swing.

The fluid path ring 17 and the fluid path ring 18 have an inner diameter approximately equal to that of the rotating shaft 20. The outer diameter of the fluid path ring 17 located closer to the valve box 10 of the smaller gear 21 is set to be larger than the outer diameter of the bearing 16A and smaller than the outer diameter of the pinion 21. The outer diameter of the fluid path ring 18 located closer to the cover 14D of the smaller gear 21 is larger than the diameter of the pinion 21. If the rotating shaft 20 supported by the bearings 16A and 16B rotates, the contact position with respect to the fluid path ring 17 and the fluid path ring 18 changes in the circumferential direction.

The fluid path ring 17 is provided with a radial ring path 17c. The radial ring path 17c is a fluid path serving as a part of the supply path 41 for supplying driving gas to the annular cylinder 80 formed between the movable valve plate portion 50 and the movable valve frame portion 60 in the second peripheral area 40a. The radial ring path 17c extends in the radial direction of the fluid path ring 17 and opens toward the outer peripheral surface 17a and the inner peripheral surface 17b of the fluid path ring 17. The radial ring path 17c communicates with a path 14Bc penetrating in the radial direction of the cylindrical casing 14B at the outer circumferential surface 17a of the fluid path ring 17.

The fluid path ring 18 is provided with a radial ring path 18c. The radial ring path 18c is connected to the intermediate atmosphere chamber 55 (refer to FIG. 5). The intermediate atmosphere chamber 55 is provided in the second surrounding area 40a at the double-sealed portion of the annular cylinder 80 formed between the movable valve plate portion 50 and the movable valve frame portion 60, and is provided in the second heavy-sealed portion 51a. , 52a is closer to the gas supply side. The radial ring path 18c is a fluid path that serves as a part of the communication path 42 for releasing the driving gas to the outside of the spool valve 1 when the first re-seal portions 51b and 52b are broken. The radial ring path 18c extends in the radial direction of the fluid path ring 18 and opens toward the outer peripheral surface 18a and the inner peripheral surface 18b of the fluid path ring 18. The radial ring path 18c communicates with a path 14Cc penetrating in the radial direction of the cylindrical casing 14B on the outer peripheral surface 18a of the fluid path ring 18.

The fluid path ring 17 is provided with a groove 17d around the inner peripheral surface 17b, and the groove 17d is surrounded by the outer peripheral surface 20b of the rotating shaft 20 to form a circumferential path.

On the outer peripheral surface 20b of the rotating shaft 20 which is the position facing the groove 17d, the radial in-axis path 27 is open, and the radial in-axis path 27 is connected to extend in the direction along the axis LL of the rotating shaft 20 and toward the rotating shaft. An axial inner path 25 with an opening on one end surface 20a of 20.

The fluid path ring 18 is provided with a groove 18d around the inner circumferential surface 18b, and the groove 18d is surrounded by the outer circumferential surface 20b of the rotating shaft 20 to form a circumferential path.

On the outer peripheral surface 20b of the rotating shaft 20 which is the position facing the groove 18d, the radial in-axis path 28 is open. The radial in-axis path 28 is connected to extend in the direction along the axis LL of the rotating shaft 20 and toward the rotating shaft 20 An axial in-axis path 26 with an opening on one end surface 20a.

The axial in-axis path 25 and the axial in-axis path 26 are parallel to each other and parallel to the axis LL. The other end 20c of the rotating shaft 20 facing the cover 14D is closed.

Either the axial in-axis path 25 and the axial in-axis path 26 are connected to the supply path 41 and the communication path 42 inside the neutral valve section 30.

In the fluid path ring 17, between the inner peripheral surface 17b and the outer peripheral surface 20b of the rotating shaft 20, there is provided a sealing member 17h such as an O-ring that slidably seals the opening portion of the radial inner path 27 and the groove 17d. 17j, 17k.

The fluid path ring 17 is provided with sealing members 17e, 17f, 17g such as O-rings that seal the opening portion of the radial ring path 17c and the path 14Bc between the outer peripheral surface 17a and the inner surface of the cylindrical casing 14B.

In the fluid path ring 18, between the inner peripheral surface 18b and the outer peripheral surface 20b of the rotating shaft 20, there is provided a sealing member 18h such as an O-ring that slidably seals the opening portion of the radial inner path 27 and the groove 18d, 18j, 18k.

In the fluid path ring 18, sealing members 18e, 18f, 18g such as O-rings that seal the opening portion of the radial ring path 18c and the path 14Cc are provided between the outer peripheral surface 18a and the inner surface of the cylindrical housing 14B.

Since the fluid path ring 17 and the fluid path ring 18 having such a structure, no matter what rotational position of the rotating shaft 20 is, the state in which the radial inner path 27 and the radial inner path 28 are connected can be maintained. It is possible to supply the driving fluid with high airtightness as described later. In addition, since the supply path 41 and the communication path 42 are independently connected, regardless of the rotational position of the rotating shaft 20, the two systems of gases in different pressure states or different states can be used in the valve body 10 Control under internal influence.

At the same time, since the fluid path ring 17 and the fluid path ring 18 are provided with grooves 17d and 18d that become circumferential paths, the pressure of the fluid in the grooves 17d and 18d acts in a way around the outer peripheral surface 20b of the rotating shaft 20. Therefore, since the pressure acting in the radial direction can be made equal throughout the entire circumference, it is irrelevant to the pressure state in the flow paths, and it is possible to prevent the supporting state of the rotating shaft 20 at the bearing 16A and the bearing 16B from being brought influences.

At the same time, the above-mentioned fluid path ring 17 and fluid path ring 18 are located between the bearing 16A and the bearing 16B, and the distance between the bearing 16A and the bearing 16B supporting the rotating shaft can be ensured as long as possible. Thereby, when the bearing 16A and the bearing 16B are used to maintain the moment acting on the rotating shaft in the direction in which the rotating shaft 20 is inclined, the radial load borne by the bearings 16A and 16B can be minimized, thereby increasing the Durability of bearing 16A and bearing 16B. In addition, the axial length of the rotating shaft 20 can be ensured while maintaining the necessary tilt direction of the rotating shaft 20 to prevent deformation, and the rotary drive cylinder 110 including the rotating shaft 20 can be miniaturized, thereby making the valve compact.化.

In addition, as the outer diameter dimensions of the bearing 16A and the bearing 16B, the fluid path ring 17, the pinion gear 21, and the fluid path ring 18, by adopting the above-mentioned configuration, without changing the composition of the parts, only by changing the assembly direction of the parts, The mounting surface of the valve box with respect to the rotating mechanism portion can be reversed, so that the valve box can be assembled with respect to the housing 14.

In this embodiment, the compressed air used for driving the cylinder 80 can be supplied to the neutral valve body 5 through the inside of the rotating shaft 20 without being exposed (exposed) under the inner hollow portion 11 of the valve box 10, and can make The communication path 42 to the intermediate atmosphere chambers 55 and 56 described later communicates with the outside of the valve box 10 via the inside of the rotating shaft 20.

The rotating shaft 20 is provided with axial paths 25 and 26 that become the supply path 41 and the communication path 42 in parallel, respectively. In addition, the fluid path ring 17 and the fluid path ring 18 corresponding to the supply path 41 and the communication path 42 are provided at different positions in the direction along the axis LL of the rotating shaft 20. Thereby, a plurality of paths 25 and 26 can be individually connected to each other at the same time through the inside of one rotating shaft 20. Therefore, the supply path 41 for the driving fluid of the cylinder 80 and the communication path 42 for the intermediate atmosphere for safety can be formed by only one rotating shaft 20, and the supply path 41 and the communication path 42 can be arranged without using other structures.于轮轴20。 At the axis of rotation 20.

A groove 17d communicating with the radial ring path 17c is provided on the inner peripheral surface 17b of the fluid path ring 17 between the sealing member 17h and the sealing member 17j, and a groove 17p is provided around the sealing member 17j and the sealing member 17k .

The outer peripheral surface 20b of the rotating shaft 20 facing the groove 17p forms a second intermediate atmospheric chamber as a space (gap) of atmospheric pressure, and is connected to the outside of the housing by a second communication path 42A.

The sealing member 17j and the sealing member 17k function as a double sealing portion for the groove 17d of the supply path 41 where the driving gas exists. In this structure, during the pressurization of the cylinder 80, even if the first re-seal, that is, the sealing member 17j in the rotating shaft 20 is broken, the compressed air (driving gas) can still be sent to the housing through the groove 17p and the second communication passage 42A. 14 external release. Therefore, it is possible to obtain a structure that prevents the compressed air in the housing 14B from being discharged from the groove 17d of the fluid path ring 17 to the internal space 22h of the pinion gear 21, such that the pressure state changes between the groove 17d and the internal space 22h.

At the same time, the sealing member 17k and the sealing member 17j function as a double sealing portion for the internal space 22h that becomes the pressurized space in the rotating drive cylinder (drive mechanism, rotating cylinder) of the rotating shaft 20. In this structure, even if the first re-seal or sealing member 17k in the rotating shaft 20 is broken during the contraction of the rotary drive cylinder, the compressed air (driving gas) can still be sent to the housing through the groove 17p and the second communication passage 42A 14 external release. Therefore, it is possible to obtain a structure that prevents the pressure state from changing between the groove 17d and the internal space 22h, such as the compressed air being discharged from the internal space 22h to the groove 17d serving as the supply path 41 in the housing 14B.

Either one of the grooves 17d and the internal space 22h is a pressurized space to prevent the pressure state corresponding to a specific action from changing due to the rupture of the sealing portion, causing the thickness of the neutral valve body 5 to suddenly expand and the neutral valve body 5 Perform unexpected movements such as turning movements.

That is, the sealing member 17k, the sealing member 17j, the groove 17p, and the second communication passage 42A can prevent the spool valve 1 from being damaged due to a seal crack.

On the inner peripheral surface 18b of the fluid path ring 18, a groove 18d communicating with the radial ring path 18c is provided between the sealing member 18k and the sealing member 18j, and a groove 18p is provided around the sealing member 18j and the sealing member 18h .

The outer peripheral surface 20b of the rotating shaft 20 facing the groove 18p forms a second intermediate atmospheric chamber as a space (gap) of atmospheric pressure, and is connected to the outside of the housing by a second communication path 42A.

The sealing member 18j and the sealing member 18h function as a double sealing portion for the internal space 22h that becomes the pressurized space in the rotary drive cylinder (drive mechanism, rotary cylinder) of the rotating shaft 20. In this structure, even if the first re-seal or sealing member 18h in the rotating shaft 20 is broken during the contraction of the rotary drive cylinder, the compressed air (driving gas) can still pass through the groove 18p and the second communication passage 42A to the housing 14 external release. Therefore, it is possible to obtain a structure that prevents the compressed air in the housing 14B from being discharged from the internal space 22h to the groove 18d serving as the communication path 42 such that the pressure state changes between the groove 18d and the internal space 22h.

Thereby, the internal space 22h is a pressurized space, which prevents the neutral valve body 5 from causing an unintended movement to rotate when the pressure state corresponding to a specific movement changes due to the rupture of the sealing portion.

That is, the sealing member 18h, the sealing member 18j, the groove 18p, and the second communication passage 42A can prevent the spool valve 1 from being damaged due to a seal crack.

The cylindrical casing 14B is provided with a leakage flow path 14He extending in the radial direction at a position near the sealed casing 14A. This leakage flow path 14He communicates with the leakage space 22He as shown in FIG. 7B. The leakage space 22He is formed at a position closer to the sealed housing 14A than the bearing 16A, and is in contact with the surface 20b of the rotating shaft 20.

Inside the rotating shaft 20 connected to the leakage space 22He, an axial leakage flow path 27He is provided. One end of the axial leakage flow path 27He opens toward the leakage space 22He. The other end of the axial leakage flow path 27He opens toward the through hole 21A as described later. The through hole 21A penetrates the center of the rotating shaft 20 in the axial direction and is used to connect the rotating shaft 20 and the neutral valve portion 30 via the connecting member 91. The fastening male screw (fastening tool) 21 penetrates.

As shown in FIGS. 12A and 12B, the through hole 21A is provided in the opening 98 of the connecting member 91 and the neutral valve portion 30, and communicates with a space 31He having a female thread (fastening tool) 31 to which the male thread 21 is screwed.

As described later, the male thread 21 penetrates the opening 98 of the unthreaded groove to the space 31He with the female thread 31 to be tightened. The position of the space 31He close to the groove 95B is closed by a closing member not shown.

In the air storage space 31He of the neutral valve portion 30, it is necessary to perform a helium leak test to investigate whether the seal of an O-ring, etc., not shown, is broken in the vicinity of the groove 95B at the front end of the space 31He. Therefore, the air storage space 31He communicates with the leakage space 22He via the opening 98, the through hole 21A, the axial leakage flow path 27He, the leakage space 22He, and the leakage flow path 14He. Through this part, helium can be supplied in order to perform a helium leak test to check the airtightness of the air storage space 31He, the opening 98, and the through hole 21A.

In this way, by providing the axial leakage flow path 27He and the leakage flow path 14He, a helium leakage test with respect to the air storage space 31He, the opening 98, and the through hole 21A can be performed.

At the same time, the self-leakage flow path 14He can be used to seal the sealing parts 14Aa, 14Ab, 14Ac as the sealing mechanism along the surface 20b of the rotating shaft 20 and the intermediate atmosphere chamber 14Ad as the space (gap) of atmospheric pressure to the hollow part 11 test. That is, by supplying helium from the leakage flow path 14He to the leakage space 22He and investigating the leakage to the hollow portion 11, a helium leakage test can be performed.

Furthermore, the leakage flow path 14He fails to seal due to the sealing members 17h, 17j, 17k, the sealing members 17e, 17f, 17g, etc., and the compressed air is used as the internal space 22h of the pressurized space, the radial ring path 17c, the groove 17d, etc. When leaking to the leakage space 22He, the compressed air can be released to the outside. Thereby, pressure can be prevented from being applied to the sealing portions 14Aa, 14Ab, and 14Ac, and the leaked compressed air can be prevented from flowing into the hollow portion 11.

[Neutral valve section 30, connecting member 91] Figure 12A is an enlarged view showing the main part of the engagement part between the rotating shaft and the neutral valve body, and is a sectional view taken along the radial direction of the rotating shaft. Fig. 12B is an enlarged view showing the main part of the engaging part of the rotating shaft and the neutral valve body, and is a sectional view taken along the axial direction of the rotating shaft.

The neutral valve portion 30 extends in a direction orthogonal to the axis of the rotating shaft 20, and has a surface parallel to the orthogonal direction. As shown in FIG. 1, the neutral valve portion 30 has a circular portion 30 a that overlaps the movable valve portion 40 and a rotating portion 30 b that rotates the circular portion along with the rotation of the rotating shaft 20. The rotating portion 30b is located between the rotating shaft 20 and the circular portion 30a, and the width of the rotating portion 30b gradually increases from the rotating shaft 20 toward the circular portion 30a. Although the rotation shaft 20 and the neutral valve portion 30 rotate with respect to the valve box 10, they are installed so as to change their positions in the direction of the non-flow path H.

At one end of the neutral valve portion 30, as shown in FIG. 12B, a concave portion 95 for fitting with the protrusion 93 of the connecting member 91 is formed. The cross-sectional shape of the recess 95 is substantially T-shaped that matches the cross-sectional shape of the connecting member 91. As such recesses 95, recesses 95A and 95B are formed on both sides of one surface side 30A and the other surface side 30B in the flow path direction H of the neutral valve portion 30, respectively.

Thereby, the rotation shaft 20 can be selectively connected to either the upper side or the lower side along the flow path direction H with respect to the neutral valve portion 30.

Alternatively, the neutral valve body 5 may be integrally attached to either side of the rotating shaft 20. That is, if the neutral valve body 5 is attached to the recess 95A of the connecting member 91, when the spool valve 1 is closed, the movable valve portion 40 closes the first opening 12a. Conversely, when the neutral valve body 5 is attached to the concave portion 95B of the connecting member 91, the movable valve portion 40 closes the second opening 12b.

As shown in FIGS. 12A and 12B, the protrusion 93 formed in the connecting member 91 and the recess 95 formed in the neutral valve portion 30 are fitted to each other. As shown in FIG. 12A, in the engaged state, the connecting member 91 and the neutral valve portion 30 extend parallel to each other along the flow path direction H and are separated by a first interval t1 as a set of first parallel surfaces 96a, 96b, and A set of second parallel surfaces 97a and 97b that extend parallel to each other in the flow path direction H and are spaced apart by a second interval t2 wider than the first interval t1 are in contact with each other.

Such a set of first parallel surfaces 96a, 96b and a set of second parallel surfaces 97a, 97b are arranged symmetrically across an axis L extending at right angles to the flow path direction H, respectively. In addition, the first parallel surfaces 96a, 96b and the second parallel surfaces 97a, 97b are arranged at positions that do not overlap with each other along the one axis L.

On the protrusion 93 of the connecting member 91, as shown in FIGS. 12A and 12B, first contact surfaces 93a, 93b constituting the set of first parallel surfaces 96a, 96b, and second parallel surfaces 97a, 97b are formed. The second contact surface 93c, 93d. Furthermore, each of the first contact surfaces 93a, 93b and the second contact surfaces 93c, 93d are connected to the first inclined surfaces 93e, 93f. The protrusion 93 as a whole is formed in a protrusion shape having a two-step width.

The recess 95 formed at one end of the neutral valve portion 30, as shown in FIGS. 12A and 12B, is formed with third contact surfaces 95a, 95b constituting a set of first parallel surfaces 96a, 96b, and second parallel surfaces 97a, The fourth contact surface 95c, 95d of 97b. Furthermore, each of the third contact surfaces 95a, 95b and the fourth contact surfaces 95c, 95d are connected to the second inclined surfaces 95e, 95f. The recess 95 as a whole is formed in a groove shape having a two-step width.

At the center of the rotating shaft 20, as shown in FIGS. 12A and 12B, a through hole 21A is formed, which makes a male screw (fastening tool) for fastening the rotating shaft 20 and the neutral valve portion 30 via the connecting member 91 ) 21A through. In addition, a female thread 31 screwed with a male thread (fastening tool) 21 is formed in the recess 95 formed at one end of the neutral valve part 30. Furthermore, the connecting member 91 is formed with an opening 98 without a thread groove through which the male screw (fastening tool) 21 penetrates.

With the above configuration, the protrusion 93 formed in the connecting member 91 is fitted into the recess 95 formed in the neutral valve portion 30, and further, from the upper end side of the rotating shaft 20, the male screw 21 penetrates through the through hole 21A and the opening 98 , The front end of the male thread 21 is screwed to the female thread 31 of the neutral valve portion 30. Thereby, the rotating shaft 20 and the neutral valve portion 30 are fastened (fixed) via the connecting member 91.

In the maintenance of the neutral valve portion 30, for example, replacement of the neutral valve portion 30 due to repeated opening and closing, etc., when the neutral valve portion 30 is attached to the connecting member 91 fixed to the rotating shaft 20, the neutral valve portion 30 is formed The recess 95 at one end is opposed to the protrusion 93 formed on the connecting member 91.

Next, when the recess 95 of the neutral valve portion 30 is inserted into the protrusion 93, the third contact surfaces 95a and 95b of the recess 95 contact the first contact surfaces 93a and 93b of the protrusion 93, respectively. In addition, the fourth contact surfaces 95c and 95d of the recess 95 are in contact with the second contact surfaces 93c and 93d of the protrusion 93, respectively.

The contact surface between the recess 95 and the protrusion 93 in such an insertion step is not limited to the first parallel surfaces 96a, 96b, and the second parallel surfaces 97a, 97b, and the first inclined surfaces 93e, 93f, and recesses of the protrusion 93 The second inclined surfaces 95e and 95f of 95 do not touch each other. That is, in the direction indicated by the arrow B1, that is, in the connection direction, the circumferential installation position can be regulated at the positions on both sides of the axis of the rotating shaft 20. Therefore, the accuracy of the installation position, especially the installation direction of the neutral valve portion 30 around the axis of the rotating shaft 20 can be easily improved.

At the same time, for example, even if the gap (gap) between the contact surfaces of the recess 95 and the protrusion 93 (the first parallel surfaces 96a, 96b, and the second parallel surfaces 97a, 97b) is made extremely small, it is still possible to reduce the pressing of the recess 95 into the protrusion. The frictional force at the time of the part 93 smoothly fits the recessed part 95 and the protruding part 93.

In addition, by bringing the concave portion 95 into contact with the protruding portion 93 on the first parallel surfaces 96a, 96b and the second parallel surfaces 97a, 97b having different widths from each other, the mounting accuracy when pressing the concave portion 95 into the protruding portion 93 can be improved. In addition, by reducing the frictional force during installation, the installation position, that is, the pressing amount of the recess 95 with respect to the protrusion 93 can be easily adjusted. That is, when the recess 95 and the protrusion 93 are engaged, it is necessary to match the position of the threaded hole of the female thread 31 formed in the recess 95 with the opening 98 of the protrusion 93 formed in the connecting member 91.

As shown in this embodiment, by making the concave portion 95 and the protruding portion 93 contact only with the first parallel surfaces 96a, 96b, and the second parallel surfaces 97a, 97b, the position of the threaded hole of the female thread 31 can be The opening 98 formed in the protruding portion 93 can be easily adjusted to make it fit together. Thereby, the male screw (fastening tool) 21 can be easily fastened to the female screw 31 via the opening 98 through the through hole 21A of the rotating shaft 20. In addition, by bringing the end face 93m and the end face 95m into contact, positioning with each other in the direction shown by the arrow B1 in FIG. 12, that is, the connection direction can also be performed.

Furthermore, in this embodiment, the connecting member 91 is provided with a protruding portion 93 and a recessed portion 95 is provided at one end of the neutral valve portion 30, but it may also have a structure with opposite unevenness. That is, it is a structure in which a recessed part is formed in the connection member fixed to the rotating shaft 20, and the protrusion part which fits this recessed part is formed in one end of a neutral valve part.

[The movable valve part 40, the movable valve plate part (the second movable valve part) 50, the movable valve frame part (the first movable valve part) 60] The movable valve portion 40 is formed in a substantially circular plate shape, and has: a movable valve plate portion 50 formed substantially concentrically with the circular portion 30a; and a substantially circular movable valve frame portion 60 that surrounds The movable valve plate portion 50 is arranged in a manner around it. The movable valve frame portion 60 is slidably connected to the neutral valve portion 30 in the direction of the flow path H.

In addition, the movable valve plate portion 50 is slidably fitted to the movable valve frame portion 60. The movable valve plate portion 50 and the movable valve frame portion 60 can be moved by the main spring 70 and the circular cylinder 80 while sliding in the directions (reciprocating directions) indicated by the symbols B1 and B2. Here, the directions indicated by the signs B1 and B2 refer to the directions perpendicular to the surfaces of the movable valve plate portion 50 and the movable valve frame portion 60, and are the direction of the flow path H parallel to the axial direction of the rotating shaft 20.

In addition, an inner peripheral crank portion 50c is formed in the entire area near the outer periphery of the movable valve plate portion 50. In addition, an outer peripheral crank portion 60c is formed in the entire area near the inner periphery of the movable valve frame portion 60.

In this embodiment, the outer peripheral crank portion 60c and the inner peripheral crank portion 50c are slidably fitted to the sliding surfaces 50b, 60b parallel to the direction of the flow path H.

On the surface of the movable valve frame portion 60 facing (abutting) the inner side of the valve box 10, there is provided a first ring shaped corresponding to the shape of the first opening 12a, such as an O-ring, etc. Sealing part 61 (main sealing part).

The first sealing portion 61 is in a state where the movable valve portion 40 covers the first opening portion 12a when the valve is closed, and is in contact with the inner surface 15a of the valve box 10 that forms the periphery of the first opening portion 12a, and the movable valve frame portion 60 And the inner surface of the valve box 10 is pressed. Thereby, the first space is reliably separated from the second space (secure the partitioned state).

[Main spring (first push part) 70] The main spring (first urging portion) 70 is arranged in the first peripheral area 40 b adjacent to the first peripheral area 40 a as the outermost periphery of the movable valve portion 40. In the main spring 70, a restoring force is generated by pressing the movable valve frame portion 60 toward the first opening portion 12a (direction B1) and simultaneously pressing the movable valve plate portion 50 toward the second opening portion 12b (direction B2). .

As a result, in the valve closed state achieved by the movable valve portion 40, the main spring 70 applies a force (bounces) to the movable valve plate portion 50 and presses it toward the inner surface 15b of the valve box 10 located around the second opening portion 12b The movable valve plate portion 50 causes the inner surface 15 b to abut the reaction force transmission portion 59 of the movable valve plate portion 50. At the same time, the main spring 70 applies a force (pushing) to the movable valve frame portion 60, and presses the movable valve frame portion 60 toward the inner surface 15a of the valve box 10 located around the first opening 12a so that the inner surface 15a and the movable valve The first sealing portion 61 of the frame portion 60 abuts.

In the present embodiment, the main spring 70 is an elastic member (for example, a spring, rubber, a sealed air damper, etc.). The main spring 70 is provided so as to be fitted into a recessed portion 50a provided in the movable valve plate portion 50 to open toward the second opening portion 12b, and a position opposed to the recessed portion 50a so as to face the first opening portion 12a in the movable valve frame portion 60 The recess 60a is provided in an open manner.

The main spring 70 has a first end and a second end. The first end abuts on the bottom surface of the concave portion 50 a of the movable valve plate portion 50. The second end abuts on the top surface of the concave portion 60 a of the movable valve frame portion 60. In addition, as shown in FIG. 1, the annular movable valve frame 60 is provided with a plurality of first springs 70 at equal intervals in the circumferential direction.

The natural length of the elastic member constituting the main spring 70 is greater than the sealing portion 61 of the movable valve frame portion 60, and the movable valve in which the reaction force transmission portion 59 of the movable valve plate portion 50 presses the inner surface 15a and the inner surface 15b of the valve box 10, respectively The portion 40 is the distance between the bottom surface of the recessed portion 50a of the movable valve plate portion 50 and the top surface of the recessed portion 60a of the movable valve frame portion 60 in the state of the maximum thickness dimension. Therefore, the main spring 70 compressed by the bottom surface of the concave portion 50a of the movable valve plate portion 50 and the top surface of the concave portion 60a of the movable valve frame portion 60 and arranged in the concave portion 50a and the concave portion 60a generates an elastic restoring force ( Extension force, elastic thrust). With this elastic restoring force, the movable valve frame portion 60 slides in the direction B1, and at the same time, the movable valve plate portion 50 slides in the direction B2, and the first sealing portion 61 and the reaction force transmission portion 59 abut the valve box 10 The inner surface is pressed, and the valve closing action is performed.

In addition, the main spring 70 is arranged in the second peripheral area 40 b close to the first sealing part 61 in order to efficiently transmit the pressing force to the first sealing part 61 and to reliably close the spool valve 1. Specifically, there is a protruding line as a reaction force transmission portion 59 described later in the vicinity of the outer peripheral position immediately below the first sealing portion 61. In contrast, in the radial position of the movable valve plate portion 50, the main spring 70 is located at a position opposite to the protrusion (reaction force transmission portion) 59 with respect to the first sealing portion 61. Thereby, the elastic thrust of the main spring 70 is effectively transmitted to the sealing portion 61 of the movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50, and the deformation caused by the deformation of the first sealing portion 61 can be improved. The tightness of the valve.

In addition, the main spring 70 can be arranged in the second surrounding area 40 b that is the vicinity of the first seal portion 61 directly below so that it can directly press the first seal portion 61. In this case, in the spool valve, since the first elastic portion 70 is provided in the movable valve frame portion 60, the first elastic portion 70 can be positioned directly below the first sealing portion 61.

Thereby, in the spool valve 1, as an actuator for closing and opening the valve, the main spring 70 for closing the valve and the second spring 80 for opening the valve (described later ). In this configuration, the main spring 70 and the second spring 80 are close to each other in the surrounding area (the first surrounding area 40a and the second surrounding area 40b) of the movable valve portion 40 close to the first sealing portion 61 They are arranged adjacent to each other in the radial direction. In addition, the main spring 70 is located in the vicinity of just below the first sealing portion 61. That is, the structure of the spool valve 1 is such that the positional relationship among the first sealing portion 61, the reaction force transmission portion 59, and the main spring 70 can effectively seal as a structure for applying a moment load having an action point and a fulcrum.

Furthermore, the urging force of the main spring 70 is set in the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 are expanded, that is, the thickness of the movable valve portion 40 is increased, and the sealing portion 61 of the movable valve frame portion 60 and The reaction force transmission portion 59 of the movable valve plate portion 50 is pressed toward the inner surface 15a, 15b of the valve box 10. Therefore, even when the power supply (energy supply) from the facility equipment to the device with the spool valve 1 is stopped due to a power failure or the like, the spool valve 1 can be reliably closed only by the mechanical force generated in the main spring 70. Therefore, a fail-safe slide valve can be reliably realized.

On the other hand, there is a spool valve with a structure that performs a spring push to reduce the thickness of the spool valve 40, or a spool valve with a structure for closing the valve by energy such as power supplied from the facility equipment. When the energy supply to the device is stopped, the valve cannot be closed. Therefore, in such a structure, a fail-safe slide valve cannot be realized.

[Annular cylinder (second spring pusher) 80] The annular cylinder 80 is arranged in the first peripheral area 40 a which is the outermost periphery of the movable valve portion 40. In the annular cylinder 80, when compressed air is supplied as the driving fluid to the annular cylinder 80, a force (elastic thrust, caused by compression) that moves the movable valve frame 60 toward the second opening 12b (direction B2) is generated. The power of air). At the same time, a force (spring thrust, force due to compressed air) to move the movable valve plate portion 50 toward the first opening 12a (direction B1) is generated. Thereby, the force formed by the compressed air is greater than the elastic thrust of the main spring 70, so that the movable valve frame portion 60 is separated from the inner surface 15a of the valve box 10 located around the first opening portion 12a, and at the same time, the movable valve plate portion 50 is separated from the inner surface 15b of the valve box 10 located around the second opening 12b.

As a result, the movable valve body 40 is located at the center of the thickness direction of the valve box 10 in the direction of the flow path H by the elastic force of the auxiliary spring (third elastic portion) 90 described later, and becomes rotatable in the valve box 10 The state.

Furthermore, in the movable valve portion 40, the first peripheral area 40a is located inside the sealing portion 61 of the annular movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50. At the same time, in the movable valve portion 40, the second peripheral area 40b is located inside the first peripheral area 40a. That is, in the radial direction of the movable valve portion 40, the main spring 70 is arranged inside the annular cylinder 80. In other words, the annular cylinder 80 is adjacent to the main spring 70 in a direction intersecting the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide (the flow path H direction). That is, the annular cylinder 80 is located between the sealing portion 61, the reaction force transmission portion 59, and the main spring 70 in the radial direction of the movable valve portion 40.

In this embodiment, the annular cylinder 80 is one cylinder (space) provided between the movable valve plate portion 50 and the movable valve frame portion 60.

Specifically, the annular cylinder 80 is in a state where the concave portion 60d of the movable valve frame portion 60 that opens toward the first opening portion 12a is fitted with the convex portion 50d of the movable valve plate portion 50 that projects toward the second opening portion 12b. The ring-shaped concave portion 60d and the ring-shaped convex portion 50d slide. In addition, the annular cylinder 80 includes an annular space formed on the peripheral edge of the movable valve frame portion 60 and a protrusion (annular convex portion) formed on the outermost periphery of the movable valve plate portion 50, as one The toroidal cylinder (circular gap) functions. Also, in other words, the annular cylinder is formed to surround the flow path H.

If compressed air as a driving fluid is supplied to the annular cylinder 80, an expansion force (elastic thrust) that expands the volume of the second ejector 80 is generated in the directions B1 and B2. When the magnitude of the expansion force is greater than the restoring force generated by the main spring 70, the expansion force is also greater than the elastic thrust of the main spring 70. Thereby, the main spring 70 is compressed, the movable valve plate portion 50 slides in the direction B1 and the movable valve frame portion 60 slides in the direction B2 to reduce the size of the movable valve body 40 in the thickness direction. The first sealing portion 61 is removed from the valve box 10 The inner surface 15a is separated, and at the same time, the reaction force transmission portion 59 is separated from the inner surface 15b of the valve box 10 to perform a valve opening operation. At this time, by sliding the annular concave portion 60d and the convex portion 50d, the movement direction of the movable valve plate portion 50 and the movable valve frame portion 60 is regulated to only the flow path direction, and the movable valve plate portion 50 and The movable valve frame portion 60 performs position regulation so as to move in parallel from the state where the sealing portion 61 and the reaction force transmission portion 59 abut on the inner surfaces 15a, 15b of the valve box 10. That is, the annular cylinder 80 can regulate the relative movement direction and posture of the movable valve plate portion 50 and the movable valve frame portion 60.

[Auxiliary spring (3rd push part) 90] The auxiliary spring 90 is provided between the neutral valve portion 30 and the movable valve frame portion 60. The auxiliary spring 90 urges the movable valve body 40 further toward the center of the valve box 10 when the thickness dimension of the movable valve body 40 is reduced with respect to the neutral valve portion 30 located approximately in the center of the flow path direction of the valve box 10.

The auxiliary spring 90 is provided in a rod-shaped position regulating portion 65 that penetrates an opening 30 a provided at an outer peripheral position of the neutral valve portion 30 (right position in FIGS. 2 and 4) and is connected to the movable valve frame portion 60. The auxiliary spring 90 is also an elastic member (for example, a spring, rubber, a sealed air damper, etc.) like the main spring 70.

The auxiliary spring 90 is locked by the flange portion 30b provided in the vicinity of the first opening portion 12a of the opening 30a of the neutral valve portion 30, and the front end 65a of the position regulating portion 65, so that the movable valve frame portion 60 faces the second opening. The part 12b moves in the direction of B2.

The auxiliary spring 90 urges the movable valve frame portion 60 located near the first opening portion 12a from the neutral valve portion 30 toward the second opening portion 12b. When the sealing portion 61 of the movable valve frame portion 60 is in contact with the inner surface 15a of the valve box 10 located around the first opening portion 12a, and the annular cylinder 80 is supplied with compressed air as a driving fluid, The auxiliary spring 90 springs the movable valve frame portion 60 away from the inner surface 15a of the valve box 10 located around the first opening portion 12a.

Thereby, when compressed air is supplied to the annular cylinder 80, the movable valve body 40 moves toward the approximate center of the flow path direction of the valve box 10, and finally, the movable valve body 40 is positioned substantially in the direction of the flow path of the valve box 10. The central method controls the posture of the movable valve body 40. Moreover, the elastic thrust of the auxiliary spring 90 is much smaller than the difference between the elastic thrust of the main spring 70 and the elastic thrust of the circular cylinder 80. That is, compared with the active spring for realizing the valve-closing state or the main spring 70 as an actuator and the annular cylinder 80, the auxiliary spring 90 only needs to change the thickness of the valve body, so the auxiliary spring 90 can be It is a very small spring.

In this way, the spool valve 1 is provided with a main spring 70 for increasing the thickness of the movable valve body 40 and a circle for reducing the thickness of the movable valve body 40 as an actuator for closing and opening the valve. The ring-shaped cylinder 80 and the auxiliary spring 90 that perform the posture control of the movable valve body 40 on the side of the center position of the valve box 10 in the flow path direction.

In this configuration, the main spring 70 and the annular cylinder 80 are arranged in parallel in the vicinity of the movable valve portion 40 near the first seal portion 61 so as to be close to each other.

The annular cylinder 80 constitutes one annular cylinder provided between the movable valve plate portion 50 and the movable valve frame portion 60. According to this configuration, as long as the supply path 41 for supplying compressed air to the second spring 80 in one direction is provided, the compressed air can be supplied to the inside of the annular cylinder along the annular cylinder 80. In addition, the thickness dimension of the movable valve body 40 can be expanded and contracted (valve opening action and valve closing action). Furthermore, in this operation, the position of the movable valve body 40 accompanying the expansion and contraction of the movable valve body 40 in the flow path direction can be easily maintained near the center of the valve box 10 by the auxiliary spring 90. Therefore, an actuator with a simple and compact structure can be realized.

In addition, since the annular cylinder 80 is used for the valve opening action, as the magnitude (output) of the force generated in the second ejection portion 80, any size (output) that can compress the first ejection portion 70 ) Is sufficient.

In the present embodiment, since the movable valve plate portion 50 and the movable valve frame portion 60 constitute the movable valve portion 40 whose dimensions in the thickness direction are variable, there is no need to provide two movable valve portions, and it is possible to achieve simple And the movable valve part of the compact structure.

In addition, the force of the actuator is not applied to the neutral valve portion 30, particularly the force applied when the movable valve body 40 is sealed to maintain the valve closed state. Therefore, the neutral valve portion 30 only needs to have enough strength to swing the valve body as a swing valve. In addition, the force of the actuator is not applied to the rotating shaft 20, particularly the force applied when the movable valve body 40 is sealed to maintain the valve closed state. Therefore, the rotating shaft 20 only needs to have enough strength to swing the valve body as a swing valve. At the same time, compared with the torque required for valve sealing on the rotating shaft 20, since the output of the swing mechanism of the movable valve body 40 can be suppressed, the rotating mechanism of the rotating shaft 20 can be miniaturized.

In this structure, as rigidity, in addition to the strength of the neutral valve portion 30 described above, it is sufficient to have the strength to support its own weight when the movable valve portion 40 is rotated between the retracted position and the valve opening and closing position.

2 shows the part where the movable valve plate part 50 and the movable valve frame part 60 are fitted to each other, the part where the neutral valve part 30 and the movable valve plate part 50 are fitted to each other, and the first spring 70 and the guide pin 62 are provided. The location.

[Second sealing parts (double sealing parts) 51a, 51b and third sealing parts (double sealing parts) 52a, 52b] The outer peripheral surface of the annular convex portion (projection) 50d of the movable valve plate portion 50 serves as abutting against the inner peripheral surface of the annular recessed portion 60d of the movable valve frame portion 60 for the movable valve plate portion 50 and the movable valve frame portion The double-sealed portion between 60 is provided with annular second sealing portions 51a, 51b and third sealing portions 52a, 52b such as O-rings.

Specifically, the second seal portions 51a, 51b are provided on the first outer peripheral surface 50f located on the radially outer side of the annular convex portion (projection) 50d of the movable valve plate portion 50. In addition, third seal portions 52a and 52b are provided on the second inner peripheral surface 50g which is the inner side of the first outer peripheral surface 50f in the radial direction. The second seal portions 51 a and 51 b abut on the first inner peripheral surface 60 f of the movable valve frame 60, and the third seal portions 52 a and 52 b abut on the second outer peripheral surface 60 g of the movable valve frame 60.

The second sealing portions 51a, 51b partition the annular cylinder 80, which is a high-pressure space, from a low-pressure space, etc., and are close to the hollow portion 11 of the first opening 12a, and ensure a blocked state. Similarly, the third sealing portions 52a and 52b partition the annular cylinder 80, which is a high-pressure space, and a space 11 near the second opening 12b, such as a low-pressure space, and ensure a blocked state.

The second sealing portions 51a, 51b can block the annular cylinder 80, which is a space where compressed air for driving is supplied with high pressure, from the first space side of the first opening 12a that communicates with, for example, a space with low pressure. , And ensure that the partition status. Similarly, the third sealing portions 52a and 52b can separate the high-pressure space, that is, the annular cylinder 80, from the low-pressure space and the second space side close to the second opening 12b, and ensure a shut-off state.

[Guide Pin 62] The guide pin 62 is fixed to the movable valve frame portion 60 and is erected in the flow path direction H, and is configured as a rod-shaped body with a uniform thickness. The guide pin 62 penetrates the annular cylinder 80 and is fitted in the hole 50h of the annular convex portion (projection) 50d formed in the movable valve plate portion 50.

The guide pin 62 is such that the sliding direction of the movable valve plate portion 50 and the movable valve frame portion 60 does not deviate from the directions indicated by the symbols B1 and B2, and when the movable valve plate portion 50 and the movable valve frame portion 60 slide, The position regulation of the movable valve plate portion 50 and the movable valve frame portion 60 is reliably induced by moving in parallel without changing the postures of the movable valve plate portion 50 and the movable valve frame portion 60.

This prevents the movable valve plate portion 50 and the movable valve frame portion 60 from moving obliquely with respect to the signs B1 and B2. At the same time, the movable valve frame portion 60 is relative to the valve closed state, that is, relative to the state where the sealing portion 61 and the reaction force transmission portion 59 abut the inner surfaces 15a, 15b of the valve box 10, respectively, even if the movable valve plate portion 50 and When the position of the movable valve frame portion 60 changes in the flow path direction, the movable valve frame portion 60 still moves in parallel while maintaining the parallel state, thereby preventing the movable valve plate portion 50 and the movable valve frame portion 60 from tilting.

In this structure, the movable valve plate portion 50 and the movable valve frame portion 60 can be positioned relative to each other, and relatively move in the directions indicated by symbols B1 and B2 while maintaining a parallel state, and perform valve closing and valve opening operations. Thereby, during the valve opening operation, the pressing force is uniformly generated in the first sealing portion 61 provided on the movable valve frame portion 60, and a sealing structure in which leakage is suppressed can be realized.

Moreover, in such a structure with the guide pin 62, when the posture of the spool valve 1 to be installed in the vacuum device is not fixed, that is, when the installation direction of the spool valve 1 is free, the movable valve body 40 can be prevented. The weight of the load is locally applied to the second sealing parts 51a, 51b and the third sealing parts 52a, 52b. For example, when the spool valve 1 is installed in such a manner that gravity acts at right angles to the sliding direction of the movable valve plate portion 50 and the movable valve frame portion 60, the sliding member can be the difference between the movable valve plate portion 50 and the movable valve frame portion 60 The weight is applied to the guide pin 62. Therefore, the weight of the movable valve plate portion 50 and the movable valve frame portion 60 is prevented from being directly applied to the second seal portions 51a, 51b and the third seal portions 52a, 52b (O-ring: O-ring). Thereby, even if the posture for installing the slide valve 1 is any posture, the life of the sealing portion will not be shortened, and the leakage prevention effect can be ensured/maintained.

In order to reduce the area of the sliding surface between the guide pin 62 and the hole 50h, and to separate the guide pin 62 from the first space and the second space outside the spool valve 1, the guide pin 62 penetrates the circular cylinder Configuration within 80.

In addition, in this manner, by arranging the guide pin 62 in the annular cylinder 80, the movable valve plate portion 50 and the movable valve frame portion 60 can slide smoothly with each other.

Furthermore, as long as the strength of the guide pin can be sufficiently obtained, even in a spool valve having a large diameter, the sliding direction of the movable valve frame 60 can be prevented from deviating. In addition, even if the guide pin 62 is arranged in the movable valve portion 40 having a special shape, the load can be appropriately distributed by setting it in a plane orthogonal to the flow path, and it can be used as a spool valve with a more favorable opening and closing operation.

[Scratch 53, 54] The first outer peripheral surface 50f located on the radially outer side of the annular convex portion (projection) 50d of the movable valve plate portion 50 is provided with an annular scraper 53 abutting on the inner peripheral surface of the movable valve frame portion 60 . Similarly, in the radial direction of the annular convex portion (projection) 50d of the movable valve plate portion 50, the second inner circumferential surface 50g, which is the inner side of the first outer circumferential surface 50f, is provided in contact with the outer circumference of the movable valve frame portion 60 The surface of the circular scraper 54.

The wipers 53, 54 have a function of lubricating or cleaning the inner peripheral surface of the recessed portion 60d of the movable valve frame portion 60 by the valve opening action and the valve closing action.

[Intermediate atmosphere chamber 55, 56] On the surface of the annular cylinder 80 partitioned by the second seal portions 51a and 51b, an intermediate atmosphere chamber 55 is provided as a space (clearance) of atmospheric pressure. Similarly, the surface of the annular cylinder 80 partitioned by the third sealing portion 52a, 52b is provided with an intermediate atmosphere chamber 56 as a space (clearance) of atmospheric pressure, so that even if the annular cylinder 80 is added In the case of the first re-seal rupture under pressure, the compressed air (driving gas) can still be released toward the outside of the slide valve, and the compressed air is prevented from being released into the valve box 10.

At the same time, the pressures of the intermediate air chambers 55 and 56 can be monitored through the communication path. That is, a pressure gauge is used to measure the pressure of the intermediate atmospheric chambers 55 and 56 and is installed outside the spool valve 1 and connected by a communication path, so that the user monitors the pressure.

[Connecting pin part 69, supply path 41] Figure 13 is an enlarged view showing the main part of the member located near the connecting pin.

In the spool valve 1, as shown by a two-dot chain line in the figure, a supply path 41 for supplying driving gas to the annular cylinder 80 is formed. The supply path 41 communicates with a driving gas supply device (not shown) provided outside the slide valve 1 through the inside of the body of the movable valve frame portion 60, the inside of the body of the neutral valve portion 30, and the inside of the rotating shaft 10 Set up.

The supply path 41 is provided with a connecting pin portion 69, which can be positioned between the movable valve frame portion 60 and the neutral valve portion 30 even when the positions of the movable valve frame portion 60 and the neutral valve portion 30 in the flow path change Sliding connection to supply driving gas between.

The connecting pin portion 69 includes a hole portion 38 with a circular cross-section, which is perforated in the neutral valve portion 30 parallel to the flow path direction; and a rod-shaped connecting pin 68 that is rotatably fitted into the hole portion 38. The inner surface 38a of the hole 38 has a smaller diameter than the inner surface 38a on the opening side than the inner surface 38b on the bottom side. Correspondingly, the diameter dimension of the connecting pin 68 is also reduced in diameter with respect to the base portion 68a and the tip 68b. In addition, a step 38c and a step 68c are respectively formed in the portion where the diameter size changes.

As shown by the two-dot chain line in the figure, the connecting pin portion 69 has a supply path 41 formed in the vicinity of its central axis to be tubular, and the supply path 41 inside the movable valve frame 60 communicates with it. In addition, the supply path 41 is opened at the front end surface 68d of the connecting pin 68, and the pressurized space 69a formed in the space near the front end surface 68d and the bottom 38d of the hole 38 communicates with the supply path formed in the body of the neutral valve portion 30 41.

The compressed air supplied from the driving gas supply device is ejected into the space 69a through the supply path 41 inside the neutral valve portion 30, and through the supply path 41 inside the connecting pin portion 69 and the supply path 41 inside the movable valve frame 60 It is supplied to the annular cylinder 80.

In the connecting pin portion 69, the outer circumferential surface 68 a of the connecting pin 68 abuts on the inner circumferential surface 38 a of the hole 38, and the outer circumferential surface 68 b of the connecting pin 68 abuts on the inner circumferential surface 38 b of the hole 38.

The connecting pin 68 is provided with a double sealing part.

Even when the connecting pin 68 in the hole 38 moves in the axial direction (flow path direction), a double seal is provided not between the end surface 68d and the bottom surface 38d before becoming the pressure surface, but on the surface which becomes the sliding direction. unit. The double-sealed portion blocks the pressurized space 69a, which is a space supplied with compressed air for driving and has a high pressure, from the second space side of the second opening 12b that communicates with a space with low pressure, for example.

The sealing portion can ensure a partition state between the pressurized space 69a and the hollow portion 11.

Specifically, the connecting pin 68 is formed with a double sealing portion that seals between the connecting pin 68 and the hole portion 38. In the structure of the double seal portion, an O-ring and the like and an annular thick seal portion 68f in which the peripheral groove of the O-ring and the like are buried are provided on the outer peripheral surface 68a, and the O-ring and the like are buried in the O-ring A small ring-shaped seal portion 68g having a circumferential groove is provided on the outer circumferential surface 68b.

At the same time, an annular intermediate atmosphere chamber 69c formed by the step 68c and the step 38c is provided between the double seals and communicates with the communication path 42 not shown. This prevents the compressed air from spraying into the valve box 10 and adversely affecting the inside of the spool valve 1, the first space, and the second space.

In particular, in the above-mentioned structure, instead of sealing between the end surface 68d and the bottom surface 38d before it becomes the pressure surface and the distance changes, it does not directly become the pressure surface and is a sliding surface with no change in distance. 68a is sealed with the inner peripheral surface 38a, and between the outer peripheral surface 68b and the inner peripheral surface 38b. Thereby, a more reliable airtight state can be maintained.

According to the configuration of the seal portions 68f and 68g, the second seal portion (double seal portion) 51a, 51b and the third seal portion (double seal portion) 52a, 52b and the guide pin of the annular cylinder 80 can be obtained. The composition of 62 has the same effect.

Even when the connecting pin 68 in the hole 38 moves in the axial direction (flow path direction) or moves and the relative position of the flow path changes, the compressed air supplied from the driving gas supply device passes through the neutral valve 30 The internal supply path 41 ejects toward the space 69a. The compressed air will be stably supplied to the annular cylinder 80 through the space 69 a whose volume changes, and through the supply path 41 inside the connecting pin portion 69 and the supply path 41 inside the movable valve frame portion 60.

In addition, the connecting pin portion 69 located on the upper side in FIG. 13 as the connecting pin 68, and the floating pin 68A (connecting pin) connected to the movable valve frame portion 60 is fitted into the through hole 67.

The connecting pin portion 69 has a circular cross-sectional through hole 67 that is perforated parallel to the flow path direction in the movable valve frame portion 60, and a rod-shaped floating pin 68A having a flange portion 68Aa is rotatable and can be slightly moved in the radial direction, and The inclination is to be fitted into the through hole 67 to a minimum.

The flange inner surface 67a of the through hole 67 corresponds to the diameter of the flange portion 68Aa, and has a larger diameter than the diameter of the hole portion 38 opposed to the movable valve frame portion 60. Compared with the diameter of the flange inner surface 67a on the opening side, the diameter of the gas connection position inner surface 38b is smaller. Compared with the gas connection position inner surface 67b, the diameter of the support position inner surface 67c located on the upper through side in FIG. 13 is smaller. Compared with the diameter of the inner surface 67c of the supporting position, the diameter of the outer inner surface 67d on the penetrating side located on the upper side in FIG. 13 is larger.

The diameter of the floating pin 68A corresponds to the diameter of the through hole 67. The diameter of the gas connecting portion 68Ab is smaller than the diameter of the flange portion 68Aa. The diameter of the fixed end 68Ac is smaller than the diameter of the gas connecting portion 68Ab.

At the fixed end 68Ac, a fixed groove 68Ad is provided around the circumference. The fixing member 68Ae such as a washer fitted in the fixing groove 68Ad regulates the movement of the floating pin 68A in the axial direction (flow path direction) inward (downward direction) of the floating pin 68A by abutting on the outer surface 67e of the through hole 67 , And fix the position.

The sealing surface 68Af that becomes the upper side of the flange portion 68Aa and the sealing surface 68Ag that becomes the upper side of the gas connecting portion 68Ab are provided with O-rings or the like between the opposing stepped surface 67f and the stepped surface 67g. Members 67h, 67j.

The floating pin 68A and the fixing member 68Ae of the fixed end 68Ac are fixed so as to sandwich the movable valve frame 60 in the direction facing the sealing surface 68Af and the sealing members 67h and 67j of the sealing surface 68Ag. Thereby, the floating pin 68A is fixed to the movable valve frame 60 so as not to move in the axial direction (the longitudinal direction of the through hole 67) in a state of being pressed upward in FIG. 13.

At the same time, the floating pin 68A is formed such that the sealing member 67h is pressed and deformed toward the sealing surface 68Af and the stepped surface 67f, and the sealing member 67j is pressed and deformed by the sealing surface 68Ag and the stepped surface 67g.

In this way, the sealing members 67h and 67j, which are set as O-rings, of the floating pin 68A are pressed against the step surface 67f and the step surface 67g to deform, and the gas connection portion 68Ab and the connection position inner surface 67b Partially sealed.

[Sequence circuit SQ] Figure 14 is a circuit diagram showing the drive sequence mechanism.

In this embodiment, the spool valve 1 has a sequence circuit SQ as shown in FIG. 14, which supplies compressed air supplied from the OP-IN port to the output point FR, output point sub-OP, output point sub-CL, The output point main-OP and output point main-CL are used for the thickness expansion and contraction (LOCK-FREE, closed-free) of the neutral valve body 5, the expansion and contraction of the rotary drive cylinder 110 and the auxiliary cylinder 120 (OPEN-CLOSE, open-close) )action.

In the sequence circuit SQ, the output point FR is connected to the supply path 41, the output point sub-OP is connected to the pressure space 123, the output point sub-CL is connected to the pressure space 122c, and the output point main-OP is connected to the extended pressure space 113. The point main-CL is connected to the contracted pressure space 22c.

The output point FR can be used to supply the one-way drive cylinder including the annular cylinder (second elastic part) 80 and the main spring 70 from the supply path 41 to reduce the thickness of the neutral valve body 5 when the closed state of the valve is released. Compressed air connection.

When the output point main-CL is released from the closed state of the valve, before the thickness of the movable valve portion 40 is contracted, the compressed air for the cylinder length contraction is supplied to the contraction pressure space 22c via the supply path (contraction port) 22j, and The rotary drive cylinder 110 is connected to maintain the contracted state.

Here, if the closed (CLOSE) rotation state is not maintained before the contraction of the movable valve part 40 when the valve is closed, the rotation position of the valve body becomes an indeterminate state due to the contraction of the movable valve part 40, and the movable valve part 40 will be unsteady. It is not satisfactory because of the weight of the body.

The output point main-OP is connected to the rotary drive cylinder 110. When the output point main-OP is released from the closed state of the valve, after the thickness of the movable valve portion 40 is reduced, it can be supplied from the OP-IN port to the extension pressure space 113 through the extension vent (supply path) 114 to extend the cylinder length The compressed air can rotate and drive the cylinder 110 to perform a stretching action.

When the output point sub-CL is released from the closed state of the valve, before the thickness of the movable valve portion 40 shrinks, compressed air for contraction is supplied from the OP-IN port to the pressure space 122c through the vent 122j, so that the sub-cylinder 120 Perform the contraction action (CLOSE) and maintain the closed state, and the normally closed connection can be realized.

The output point sub-OP is connected to the sub-cylinder block 120. When the output point sub-OP is released from the closed state of the valve, before the thickness of the movable valve portion 40 shrinks, compressed air is supplied from the OP-IN port to the pressure space 123 through the vent 124, so that the sub-cylinder 120 can expand and contract. (OPEN-CLOSE) action.

Sequence circuit SQ has: spool valve (pneumatic 3-channel spool valve) sp1V, which is connected to the OP-IN port; speed control valve NCV1, which combines its check valve and flow regulating valve; spool valve (pneumatic 2-channel Spool valve) sp2V, which is connected to sp1V1 of the spool valve sp1V, and can be switched by the air pressure from the speed control valve NCV1; a check valve (check valve) connected in the forward direction from the speed control valve NCV1 to the output point FR ) CV1 and its parallel limit switch valve cdS; maintenance switch mSW, which is connected to the check valve CV1, sp2V2 of the spool valve sp2V, sp1V2, sp1V3 of the spool valve sp1V, and is set as a 4-channel valve; To the valve (check valve) CV3, its self-maintenance repair switch mSW is connected in the forward direction toward the output point main-OP.

In the sequence circuit SQ, the maintenance switch mSW is connected to the output point FR, the output point sub-OP, the output point sub-CL, and the output point main-OP. The sp2V1 of the spool valve sp2V is connected to the output point main-CL. A check valve CV3 is connected in parallel between the maintenance switch mSW and the output point main-OP.

The spool valve sp1V can be switched on/off (ON/OFF) by supplying compressed air for driving from the OP-IN port to the pneumatic sp1V0 side.

When the signal from the OP-IN port is off, the spool valve sp1V sets the flow path sp1V2 connected to the output point sub-CL via the maintenance switch mSW to the closed state by cutting off the flow from the OP-IN port . The spool valve sp1V is configured to connect the flow path sp1V3 connected to the output point sub-OP via the maintenance and repair switch mSW and the flow path connected to the output point main-OP and the output point main-CL via the spool valve sp2V and the maintenance and repair switch mSW. sp1V1 communicates with the atmosphere (outside).

In addition, the spool valve sp1V is configured so that when the signal from the OP-IN port is on, the flow divided into three from the OP-IN port is connected to the flow path sp1V1, the flow path sp1V2, and the flow path of the spool valve sp1V. sp1V3.

Therefore, the spool valve sp1V has a cylinder-shaped housing formed to respectively penetrate through the three flow paths from the OP-IN port and the two external communication holes and the flow path sp1V1, the flow path sp1V2, and the flow path sp1V3. In the structure of the spool valve sp1V, a slidable spool (valve body) is inserted into the housing, and the spool is pushed toward the pneumatic sp1V0 side by a spring or other push part.

In the spool valve sp1V, a flow path groove corresponding to the surface is formed on the spool (valve body). Corresponding to the sliding position along the axis of the spool (valve body), it is possible to connect the 3 flow paths from the OP-IN port and the 2 external communication holes with the flow path sp1V1, the flow path sp1V2, and the flow path sp1V3. Cut off.

In addition, on the side opposite to the pneumatic sp1V0 side of the casing (casing), an adjustment member is provided, which can receive the elastic thrust of a spring or the like, and can be set to adjust the position of the casing axis direction.

By adjusting the position of the adjustment member in the axial direction of the housing, the elastic thrust of the spring changes, so that the threshold value of channel connection/cutting can be adjusted in the pressure supplied from the pneumatic sp1V0 side.

As a result, in the spool valve sp1V, the supply pressure to the pneumatic sp1V0 from the OP-IN port is preset to a specific value, and it can be set to not operate the valve even if there is a pressure fluctuation below this value .

Furthermore, the pressure applied to the spool valve sp1V from the OP-IN port to the pneumatic sp1V0 can be set as the spool valve operation start signal of the spool. That is, the valve operation can be performed only by the signal from the OP-IN port of the first stage.

The speed control valve NCV1 is connected to the flow path branched from the flow path sp1V1 of the spool valve sp1V. The flow of compressed air in the speed control valve NCV1 is parallel to the flow of compressed air in the spool valve sp2V. The flow path of the check valve CV1 is connected to the maintenance switch mSW. The flow path branching from the flow path from the check valve CV1 to the maintenance switch mSW is connected to the pneumatic sp2V0 side of the spool valve sp2V. That is, the flow path from the check valve CV1 to the maintenance switch mSW and the flow path from the check valve CV1 to the pneumatic sp2V0 side are parallel.

In the speed control valve NCV1, a flow control valve and a check valve are combined to stop the flow of compressed air from the flow path sp1V1 of the spool valve sp1V to the pneumatic sp2V0 side of the check valve CV1 and the spool valve sp2V (Check valve's non-return function, reverse direction) method, parallel connection with flow regulating valve and check valve.

When the signal from the OP-IN port is ON, the spool valve sp2V is operated by using the speed control valve NCV1 to supply the flow to the pneumatic sp2V0 side later than the spool valve sp1V.

The spool valve sp2V is configured to connect the flow path sp1V1 from the spool valve sp1V into two flows and the flow path sp2V2 that can be connected to the output point main-OP via the maintenance switch mSW when the signal is on, and connect The flow path sp2V1 connected to the output point main-CL communicates with the atmosphere (outside).

In addition, the spool valve sp2V is configured such that when the signal is closed, the flow that branches from the flow path sp1V1 of the spool valve sp1V into two communicates with the flow path sp2V1 connected to the output point main-CL, and the maintenance switch mSW can be connected to the flow path sp2V2 of the output point main-OP to communicate with the atmosphere (outside).

The check valve CV1 is a check valve that allows the compressed air to flow in the forward direction (allowing the flow of compressed air) and not in the opposite direction (blocking the flow of compressed air).

The check valve CV1 is positively connected from the pneumatic sp2V0 side of the speed control valve NCV1 and the spool valve sp2V to the output point FR, and is connected in parallel with the flow connected by the limit switch valve cdS.

The check valve CV3 is connected in parallel so that the side from the maintenance switch mSW toward the output point main-OP becomes positive.

The maintenance and repair switch mSW is set to 4 channels for maintenance and repair. It is set to the following structure. When it is not for maintenance and repair, but when it becomes the normal position on the right side in Fig. 14, the check valve CV1 is connected to the output point FR. , Connect the flow path sp2V2 of the spool valve sp2V with the output point main-OP, close the check valve CV3 side, connect the flow path sp1V2 of the spool valve sp1V with the output point sub-CL, and connect the flow of the spool valve sp1V The path sp1V3 is connected to the output point sub-OP.

When the maintenance switch mSW is at the left position in Fig. 14, it is configured to close the check valve CV1 side, connect the output point FR side to the atmosphere (outside), and pass the flow path sp2V2 from the spool valve sp2V through the single valve. The valve CV3 is connected to main-OP, which is the positive output point of the check valve CV3, and the flow path sp1V2 side of the spool valve sp1V is closed, and the output point sub-CL side is connected to the atmosphere (outside). The sp1V3 side of the flow path of the valve sp1V is closed, and the sub-OP side of the output point is connected to the atmosphere (outside).

With the maintenance and repair switch mSW, even if the pressure from the OP-IN port is unexpectedly reduced during maintenance and repair operations, the valve closing position E2 (Figure 1) can be kept constant without suddenly becoming valve closed. time.

Next, explain the pressure state and pneumatic state in the sequence circuit SQ.

Figures 15-25 are diagrams showing the pressure state in the sequence circuit SQ. The thick line represents the high pressure PHi state, and the thin line represents the low pressure PLo state.

Furthermore, in these figures, for the convenience of description, there are situations in which states that actually occur simultaneously are shown in different figures.

First, set the LOCK-CLOSE state of the slide valve 1 to be closed and airtight as the initial state.

At this time, the movable valve portion 40 is in the valve closing position E2 (FIG. 1 ), that is, in the closed state, and becomes the LOCK state (closed state) where the thickness of the movable valve portion 40 becomes the largest.

In the LOCK-CLOSE state, as the pressure state, as shown in Figure 15, on the input side, in the input of one system for supplying compressed air, compressed air is not supplied to the OP-IN port for valve operation. Set to a low-pressure PLo state approximately the same as atmospheric pressure.

Therefore, as shown in Fig. 15, since the pneumatic sp1V0 side of the spool valve sp1V is also at atmospheric pressure, the signal is turned off and the spring push force comes from either the flow path of the OP-IN port or the flow path sp1V2. All become cut off. At the same time, the flow path sp1V1 side and the flow path sp1V3 side communicate with the atmosphere (outside).

Thereby, it becomes a high-pressure PHi state in which compressed air is stored and operated only in the flow path sp1V2 of the output point sub-CL and the spool valve sp1V communicating with it. Therefore, although the contracted pressure space 22c of the rotary drive cylinder 110 is not pressurized, the pressure space 122c in the sub-cylinder 120 is pressurized and the piston 122 is located at the contracted position Pb.

In addition, the compressed air stored in the pressure space 122c decreases to atmospheric pressure after a certain period of time, but the valve rotation position can be maintained in the closed state by the force of the spring 70 built in the movable valve portion 40.

In addition, since the flow path sp1V1 communicates with the atmosphere (outside), the pneumatic sp12V0 side of the spool valve sp2V also becomes atmospheric pressure. Therefore, the spool valve sp2V is in a signal-off state, and the flow path sp1V1 and the flow path sp2V1 are communicated to the atmosphere (outside) by the elastic force of the spring.

Thereby, the output point main-CL connected to the flow path sp2V1 communicates toward the atmosphere (outside). The compressed air is not supplied in the contraction pressure space 22c of the rotary drive cylinder 110 connected to the output point main-CL and is in a low-pressure PLo state that is substantially the same as the atmospheric pressure.

Since the flow path sp1V1 communicates with the atmosphere (outside), the check valve CV1 connected to the flow path sp1V1 and the limit switch valve cdS communicate with the atmosphere (outside).

At the same time, as the piston 122 is in the retracted position Pb, the limit switch valve cdS is in contact with the piston 122 and becomes a communication state.

In addition, since the maintenance switch mSW is in the closed state that connects the check valve CV1 connected to the flow path sp1V1 with the output point FR, on the output side, the ring-shaped cylinder (the second The elastic pushing portion 80 is in a low-pressure PLo state that is substantially the same as the atmospheric pressure without being supplied with compressed air. The elastic pushing force of the main spring 70 increases the thickness of the movable valve portion 40.

In addition, the flow path sp1V3 is connected to the atmosphere (outside). In addition, since the maintenance switch mSW is in the closed state to connect the flow path sp1V3 with the output point sub-CL, it is connected to the output point sub-CL of the flow path sp1V3 Connect to the atmosphere (outside).

Therefore, the sub-cylinder 120 is not supplied with compressed air in the pressure space 123, and becomes a low-pressure PLo state that is substantially the same as the atmospheric pressure.

Here, in the rotary drive cylinder 110, since the contraction pressure space 22c and the extension pressure space 113 are in the same low-pressure PLo state, and both have the same pressure, the piston 112 is in a state without any action.

Next, at the timing when the valve opening command becomes open as an opening action, the pressure state is switched to as shown in Figure 16. On the input side, compressed air is supplied to the OP-IN port to become an overrun action Threshold high pressure PHi state.

Along with this, as shown in Figure 16, the OP-IN port and the pneumatic sp1V0 side of the spool valve sp1V become pressurized, and the force generated by the spool valve sp1V by pressurization is greater than the elastic thrust of the spring. Move to the right in 16 to switch to signal conduction state.

Then, as shown in FIG. 17, in the spool valve sp1V, the OP-IN port communicates with any one of the flow paths sp1V1, sp1V2, and sp1V3 to become the same pressure.

Here, the flow path sp1V2 is originally in the high-voltage PHi state. In addition, the flow path sp1V3, the output point sub-OP connected to it, and the pressure space 123 of the sub-cylinder 120 instantly become a high-pressure PHi state, but since the original flow path sp1V2 and the pressure space 122c are in the high-pressure PHi state, the piston 122 does not mobile.

In the flow path sp1V1 and the flow path sp2V1 of the spool valve sp2V connected to it, the output point main-CL, and the contracted pressure space 22c of the rotary drive cylinder 110, instantly become a high-pressure PHi state, but the extended pressure space 113 of the rotary drive cylinder 110 It is in the low-pressure PLo state, and the piston 112 does not move.

At the same time, if the flow path sp1V1 becomes the high-pressure PHi state, the speed control valve NCV1 connected to the flow path sp1V1 is delayed compared to the pressure increase of the spool valve sp1V and the pressure on the pneumatic sp2V0 side of the spool valve sp2V gradually rises. At the threshold value, the compressed air force of the spool valve sp2V is greater than the elastic thrust of the spring, and it moves to the right in Fig. 17 to switch to the signal conduction state.

Moreover, if the signal from the OP-IN port is delayed and the pressure on the pneumatic sp2V0 side of the spool valve sp2V rises, at the same time, the check valve CV1, the limit switch valve cdS, and the output point FR connected to these When the pressure rises, the switching timing of the spool valve sp1V to the signal conduction state is delayed, and the pressure in the annular cylinder 80 connected to the output point FR also gradually rises.

Then, as shown in FIG. 18, when the spool valve sp2V is switched to the signal conduction state, the check valve CV1, the limit switch valve cdS, and the output point FR are also pressurized and become the high pressure PHi state. The pressure of the annular cylinder 80 connected to the output point FR rises to a high-pressure PHi state.

At this time, as the pressure of the annular cylinder 80 rises, the force of the cylinder becomes larger than the thrust of the main spring 70, as the movable valve plate portion 50 slides in the direction B1 and the movable valve frame portion 60 slides in the direction B2 , And reduce the size of the movable valve part 40 in the thickness direction, and move toward the closed release state, and become the FREE-CLOSE state.

At this time, the turning operation of the movable valve portion 40 is not started, and the valve closed position (release position) E2 is maintained.

At the same time, in the spool valve sp2V switched to the signal conduction state, as shown in FIG. 19, the output point main-CL is connected to the atmosphere (outside), and the output point main-OP is connected to the flow path sp1V1.

Thereby, the output point main-OP connected to the flow path sp1V1 becomes a pressurized state, and the output point main-CL connected to the atmosphere (outside) becomes a low pressure PLo state which is the same as the atmospheric pressure.

Then, the pressure space 22c of the rotary drive cylinder 110 connected to the output point main-CL instantly becomes a high-pressure PHi state, and the extension pressure space 113 of the rotary drive cylinder 110 connected to the output point main-OP instantly becomes a low pressure In the PLo state, a pressure difference occurs between the contraction pressure space 22c and the expansion pressure space 113.

As a result, in the rotary drive cylinder 110, the piston 112 starts to move from the retracted position Pb toward the extended position Pa, and the piston 122 integral with the piston 112 and the limit switch valve cdS are in non-contact.

Then, as shown in Fig. 20, the limit switch valve cdS is in a cut-off state at the right position in Fig. 20, and is connected between the output point FR and the pneumatic sp2V0 side of the spool valve sp2V only by the check valve CV1. Here, due to the check valve CV1 check valve, in the direction from the output point FR toward the pneumatic sp2V0 side of the spool valve sp2V, the check function (reverse direction) does not work, and the flow path is not connected. Thereby, the output point FR and the annular cylinder 80 are maintained in a pressurized state by the check valve CV1, and the movable valve portion 40 is maintained in a reduced state in the thickness direction.

At this time, with the movement of the piston 112 caused by the pressure reduction of the contraction pressure space 22c and the pressurization of the expansion pressure space 113, the rotation shaft 20 and the neutral valve body 5 rotate, and the movable valve portion 40 is moved from the valve closing position (closed release Position) E2 (Figure 1) rotates toward the retreat position E1 (Figure 1), and becomes the FREE-OPEN state.

Here, during the rotation of the movable valve portion 40, that is, during the movement of the piston 112 from the retracted position Pb, since the limit switch valve cdS is in the cut-off state and the annular cylinder 80 is in the pressurized state, the movement is maintained The size of the valve portion 40 in the thickness direction is reduced. That is, it is possible to maintain the operation sequence of the rotation operation of the rotating shaft 20 after the thickness reduction operation of the movable valve body 40 ends.

In this way, when the opening action of the spool valve 1 ends, as shown in FIG. 20, the valve-opening free-open state is maintained.

Furthermore, the rotational speed of the spool valve 1 during the opening action is determined by the moving speed of the piston 112 of the rotary drive cylinder 110 from the retracted position Pb toward the extended position Pa.

Here, at the end of the movement of the piston 112, the air cushioning effect due to the effect of the concave portion 111c corresponding to the protrusion 112c and the air cushion pad of the space 22d corresponding to the connecting portion 112d serves as the cushion groove 118, 119 acts like the air damper described to slow down the speed when reaching the retracted position Pb and the extended position Pa, thereby preventing the generation of particles due to impact.

Furthermore, as the pressure threshold value sp1P of the spool valve sp1V, and the pressure threshold value sp1P of the spool valve sp2V, the relationship can be set as follows.

Can be set as: sp1P>sp2P.

The pressure threshold value sp1P and the pressure threshold value sp1P are set by adjusting the spring thrust of the respective springs in the spool valves sp1V and sp2V for simplicity. Specifically, the equivalent is expressed as absolute pressure, which can be set as Pressure threshold sp1P=0.45～0.50 MPa The pressure threshold sp2P=0.38～043 MPa, but these values can be changed according to the size of the valve, the setting of opening and closing speed, etc.

Next, the closing action in the self-opening state will be explained.

As a closing action, when the command to close the valve is open, that is, when the pressurized state of the OP-IN port disappears without supplying compressed air and becomes a low-pressure PLo state that is approximately the same as the atmospheric pressure, the pressure state is as shown in Figure 21 , OP-IN port and the pneumatic sp1V0 side of the spool valve sp1V become low pressure PLo state. Thereby, the spool valve sp1V moves in the left direction in FIG. 21 by the elastic force of the spring, and is switched to the signal-off state.

Then, as shown in FIG. 22, in the spool valve sp1V, the OP-IN port and the flow path sp1V2 are cut off, and either the flow path sp1V1 and the flow path sp1V3 are communicated to the atmosphere (outside). Reduce pressure to low pressure PLo state. Here, the flow path sp1V2, the output point sub-CL, and the pressure space 122c maintain a high-pressure PHi state.

In addition, the pressure in the flow path sp1V3, the output point sub-OP connected to the flow path sp1V3, and the pressure space 123 of the sub-cylinder block 120 are instantly reduced to a low pressure PLo state.

At the same time, the flow path sp1V1 and the flow path sp2V2 of the spool valve sp2V connected to the flow path sp2V2, the output point main-OP and the extension pressure space 113 of the rotary drive cylinder 110 connected to it are decompressed to a low pressure PLo state.

Along with this, the piston 122 starts to move from the extended position Pa toward the retracted position Pb due to the pressure difference between the pressure space 122c in the high-pressure PHi state and the pressure space 123 in the low-pressure PLo state. At this time, since the contraction pressure space 22c and the extension pressure space 113 of the rotary drive cylinder 110 are in the same low-pressure PLo state, there is no pressure difference acting on the piston 112, and no movement is involved.

At the same time, if the flow path sp1V1 becomes the low-pressure PLo state, the spool valve sp2V moves in the left direction in FIG. 23 by the elastic force of the spring, and switches to the signal off state.

Here, since the speed control valve NCV1 is connected in parallel with a needle valve for speed control and a check valve, there is no delay in the pressure drop of the flow path SP1V1, and the pressure of the flow path SP2V0 is reduced. That is, although a delay is required during the FREE operation, since there is no delay in the CLOSE state, it is configured to have no delay effect.

Thereby, as shown in Fig. 23, the flow path sp2V1 that can be connected to the output point main-CL via the maintenance and repair switch mSW and the flow path sp1V1 are connected, and the flow path that can be connected to the output point main-OP via the maintenance and repair switch mSW The path sp2V2 communicates with the atmosphere (outside). At this time, since the contraction pressure space 22c and the extension pressure space 113 of the rotary drive cylinder 110 are in the same low-pressure PLo state, it has no effect on the movement of the piston 112.

Here, when the spool valve sp2V is switched to the signal-off state, as shown in FIG. 23, the side closer to the flow path sp1V1 than the check valve CV1 and the limit switch valve cdS is decompressed and becomes a low pressure PLo state. Therefore, since the check valve CV1 and the limit switch valve cdS are closer to the output point FR side, the annular cylinder 80 is also included to maintain the high-pressure PHi state, and therefore the size of the movable valve portion 40 in the thickness direction is kept reduced.

Furthermore, after the flow path sp1V1 becomes the low-pressure PLo state, during the period when the spool valve sp2V moves in the left direction of the figure by the elastic force of the spring, the flow path sp2V2 becomes the low-pressure PLo state approximately the same as the atmospheric pressure. The flow path sp1V1 or the atmosphere (outside) is connected, so the pressure is reduced in either state.

Along with the pressure increase of the pressure space 122c and the decompression of the pressure space 123, the extended position Pa of the piston 122 moves toward the retracted position Pb side, and the rotating shaft 20 and the neutral valve body 5 rotate, and the movable valve portion 40 moves from The retracted position E1 (FIG. 1) rotates toward the valve closing position (closed release position) E2 (FIG. 1), and becomes the FREE-CLOSE state.

Then, when the rotation operation of the movable valve portion 40 ends and reaches the valve closing position (closed release position) E2 (FIG. 1 ), at the same time, the piston 122 reaches the retracted position Pb. As a result, the piston 122 abuts against the limit switch valve cdS in the sub-cylinder 120, and as shown in FIG. 15, a communication state is formed in the right position in FIG. 15.

Therefore, the output point FR is connected via the limit switch valve cdS, the flow path sp2V0 side, the flow path sp1V1, and the spool valve sp1V to the OP-IN port in the low-pressure PLo state that is approximately the same as the atmospheric pressure, thereby reducing the circular cylinder 80 Press to low pressure PLo state. As a result, the thickness of the movable valve portion 40 is increased by the elastic force of the main spring 70, and moves toward the closed state at the valve closing position E2 (FIG. 1) to become the LOCK-CLOSE state.

In this way, by using the piston 122 reaching the retracted position Pb to make the limit switch valve cdS in the communicating state, the annular cylinder 80 can be brought into a decompressed state, and therefore, it is maintained to be movable after the rotation of the rotating shaft 20 is completed. The thickness of the valve body 40 increases the sequence of the closing action.

At the same time, when the closing action of the spool valve 1 ends, as shown in FIG. 15, the closed state can be maintained at the valve closing position.

Furthermore, as long as the piston 122 does not move from the retracted position Pb, the communication state of the limit switch valve cdS is maintained, and therefore the output point FR is maintained in a reduced pressure state without reducing the size of the movable valve portion 40 in the thickness direction.

Here, if the OP-IN port is in a pressure-reduced state, the state can be maintained without reducing the size of the movable valve portion 40 in the thickness direction. Therefore, the spool valve 1 does not open, even when there is no pressure air supply for driving. Normally closed can still be achieved in the state.

As described above, with respect to the input of a system set as OP-IN port, the pressure state is in the five output points of FR, main-OP, main-CL, sub-OP, and sub-CL. It can control the opening and closing of the valve without using the electrical mechanism. Furthermore, by setting the sequence in which these pressure states change, by sequentially realizing the states of the closed position, the closed release position, and the retracted position, the spool valve 1 can be operated quickly and safely, and the normally closed operation can be performed.

By having the above-mentioned sequence circuit SQ, there are two independent actions of the rotary movement of the movable valve part 40 and the lifting action (closing/releasing action) of the movable valve part 40. The rotary action is performed by the cylinder 110 and the auxiliary cylinder. 120 is carried out, and the lifting action is carried out by the spool valve 1 of the air cylinder 80 to make these moving actions/lifting actions interlocked. Since neither the moving action and the lifting action of the movable valve part 40 can be carried out under electrical control, but can be carried out by mechanical control through the input set as one system, it can prevent abnormality during power failure It can easily perform normally closed operation.

Furthermore, the above-mentioned sequence circuit SQ has a maintenance and repair switch mSW used in maintenance and repair work.

During maintenance, as shown in Fig. 24, set the FREE-OPEN state of the maintenance switch mSW from the spool valve 1 to the ON state which is the left position in Fig. 24.

Then, as shown in Fig. 24, the output point FR is cut off from the check valve CV1 and communicates with the atmosphere (outside), and the output point main-OP is closed by the check valve CV3 (the check function in the check valve works, The opposite direction), and the output point sub-CL and the output point sub-OP are connected to the atmosphere (outside).

Thereby, the output point sub-CL and the output point sub-OP become the low-pressure PLo state, and the output point main-OP maintains the high-pressure PHi state, while maintaining the OPEN state of the retracted position E1 (Figure 1), and the movable valve body 40 moves toward the neutral position. Since the output point FR is in the atmospheric release state, the compressed air supply becomes a state for the operation of removable neutral movable valve body 40. Furthermore, although not shown here, due to the action of the tightening bolt 43 for maintenance described later, even in the state where the pressure supply from the output point FR to the neutral movable valve body 40 is blocked, Keep the valve closed position.

Here, even if the pressure from the OP-IN port is unexpectedly reduced during maintenance and repair operations, the check valve CV3 can still maintain the high-pressure PHi state at the output point main-OP, without suddenly becoming The valve is closed to maintain the retracted position E1 (Figure 1) for a certain period of time.

As described above, in this embodiment, the movable valve portion 40 including the movable valve plate portion 50 and the movable valve frame portion 60 that can be separated and approached from each other in the flow path direction is provided, and the movable valve portion 40 is provided with a movable valve The main spring 70 urges the plate portion 50 and the movable valve frame portion 60 toward the outside of the flow path direction. The movable valve portion 40 is provided with the movable valve plate portion 50 and the movable valve frame portion 60 toward the center of the flow path direction of the hollow portion 11 The circular cylinder 80 that moves in position is provided with an auxiliary spring 90 that urges the movable valve frame portion 60 in a direction approaching the neutral valve portion 30. Thereby, the movable valve plate portion 50 and the movable valve frame portion 60 are pressed toward the inner surfaces 15a, 15b of the valve box, and the sealing portion 61 and the reaction force transmission portion 59 can reliably close the valve.

In addition, by moving the movable valve plate portion 50 and the movable valve frame portion 60 toward the center position of the flow path of the hollow portion 11, the movable valve body 40 can be rotated without contacting the valve box 10, and the rotation is required. Compared with other operating mechanisms, the movable valve body 40 can be moved to the retracted position by a compact and small-output drive mechanism.

In this configuration, a valve body can be formed by one movable valve part 40 and three spring push parts 70, 80, and 90. In addition, by the restoring force of the main spring 70 arranged in the surrounding area of the movable valve portion 40, the movable valve plate portion 50 and the movable valve frame portion 60 are directly pressed toward the inner surface of the valve box 10, and the valve can be reliably closed. Similarly, the movable valve plate portion 50 and the movable valve frame portion 60 are separated from the inner surface of the valve box 10 by the action of the compressed air supplied to the annular cylinder 80 arranged in the surrounding area of the movable valve portion 40, and The valve can be opened reliably in a rotatable state. Therefore, in the first embodiment, it is possible to realize a spool valve having a simple structure and capable of performing a blocking operation with high reliability.

Furthermore, the maintenance and repair switch mSW can be used for maintenance and repair together with the fastening bolt 43 described later.

[Tightening bolt (fastening member) 43] Fig. 25 is an enlarged view showing the main part of the member located in the vicinity of the fastening member in this embodiment.

As shown in FIG. 25, the fastening bolt (fastening member) 43 has a front end part 43a provided with a male screw on the outer peripheral surface. The front end portion 43 a is screwed to a threaded hole 63 a provided in the fastening screw portion 63, and the fastening screw portion 63 is provided in the movable valve frame portion 60. The tightening bolt 43 is set so that the axis of the tightening bolt 43 faces the thickness direction of the movable valve body 40, that is, a direction parallel to the direction B1 or B2 that is the moving direction of the movable valve plate portion 50 and the movable valve frame portion 60.

The central portion 43b of the fastening bolt 43 has approximately the same diameter as the front end portion 43a, and penetrates the through hole 57b provided in the fastening screw portion 63 to be axially movable, and the fastening screw portion 63 is provided on the movable valve plate portion 50. The diameter size of the central portion 43b is set to be smaller than the diameter size of the through hole 57b, and is formed so as not to contact each other even when the members move relatively in the axial direction.

The base end portion 43c of the fastening bolt 43 is a bolt head and has a larger diameter than the front end portion 43a and the center portion 43b. The abutting surface 43d of the front end portion 43a abuts against the abutting surface 57d outside the through hole 57b in the fastening portion 57 facing the front end portion 43a, thereby regulating the fastening bolt 43 and the movable valve plate portion 50 The changing position in the direction of the flow path.

For the fastening bolt 43, a locking groove 43e is provided on the periphery of the front end portion 43a of the front end portion 43a compared to the portion where the male thread is screwed. 43 f of stop rings (locking members), such as a gasket, are fitted in this groove 43e for locking. When the stop ring 43f abuts on the outer side surface 63f of the threaded hole 63a, the movement of the tightening bolt 43 in the inner direction (downward direction in the figure) of the axial direction (flow path direction) can be regulated. Even if the tightening bolt 43 rotates, the tightening bolt 43 does not come off from the movable valve frame portion 60, and the tightening bolt 43 is locked by the stopper ring 43f.

The retaining ring (locking member) 43f not only prevents the fastening bolt (fastening member) 43 from coming out, but also allows the fastening of the movable valve plate portion 50 and the movable valve frame portion 60 to be released. The fixing bolt 43 does not loosen for a long time and keeps its position. That is, since the retaining ring (locking member) 43f needs to stably bear the tightening axial force, it is preferable to use an E-shaped retaining ring or a C-shaped retaining ring as the retaining ring 43f. Furthermore, according to the type of the retaining ring, a retaining ring having a shape corresponding to the shape of the locking groove 43e can also be adopted. In addition, a pin-type locking member can also be used as the locking member. In this case, it can be fixed to the locking hole provided in the radial direction of the fastening bolt 43 instead of the groove 43e for locking.

The length of the fastening bolt 43 is set to be relatively long. That is, when the stop ring 43f is in contact with the outer surface 63f, even if the movable valve portion 40 has the maximum thickness, the contact surface 43d on the tip portion 43a side will not contact It is in contact with the contact surface 57d on the outer side of the through hole 57b in the fastening portion 57 opposed to the contact surface 43d. In addition, when the movable valve portion 40 has the smallest thickness, the fastening screw portion 63 and the opposite contact surface 63g and the contact surface 57g of the fastening screw portion 63 are in contact with each other, thereby performing the movable valve plate. The position of the part 50 and the movable valve frame part 60 are regulated. That is, with respect to the screwed fastening bolt 43, the movable valve plate portion 50 can move in the direction B1 to the position where the contact surface 57g abuts against the contact surface 63g, and can move to the contact surface 57d in the direction B2 Abutting at the position of the abutting surface 43d.

Therefore, by rotating the tightening bolt 43 with respect to the threaded hole 63a to change the tightening length, the moving range of the movable valve plate portion 50 can be regulated, that is, the movable valve plate portion 50 and the movable valve frame portion can be regulated 60 in the direction of the flow path. In particular, when the air cylinder 80 generates a force greater than the elastic thrust of the main spring 70, in a state where the thickness of the movable valve portion 40 is reduced, the tightening bolt is rotated such that the contact surface 57d abuts the contact surface 43d. Thereby, even in the state where the driving of the cylinder 80 is stopped, the state where the thickness of the movable valve portion 40 is reduced can be maintained. Thereby, the neutral valve body can be rotated in a free state without contacting the valve box 10 during maintenance and repair.

Furthermore, in order to stably maintain the state where the thickness of the movable valve portion 40 is reduced by increasing the force of the cylinder compared to the elastic thrust of the main springs 70 provided with the fastening bolt 43, it flows around the movable valve portion 40 in a plan view. The fastening bolts 43 are arranged symmetrically with respect to the center position where the plurality of main springs 70 are arranged in the path direction.

Specifically, the shape of the movable valve portion 40 is substantially circular when viewed in a plane of the flow path, and the plurality of main springs 70 are located in concentric positions on the outermost periphery of the movable valve portion 40, that is, the first peripheral area 40a Configuration. In this case, the plurality of fastening bolts 43 are arranged concentrically with respect to the arrangement of the plurality of main springs 70, and the interval between the plurality of main springs 70 and the interval between the plurality of fastening bolts 43 are equal The number of fastening bolts 43 is the same as the number of main springs 70.

In the above-mentioned structure, as an example, a case where the elastic thrust of the main spring 70 is all equal is mentioned. On the other hand, when the elastic thrust of the plurality of main springs is uneven, it is better to receive the uneven elastic thrust efficiently, and the thickness dimension of the movable valve portion 40 is reduced on the surface of the neutral valve body. The tightening bolts are arranged in a way that the whole direction becomes equal.

Thereby, the movable valve portion 40 that always acts against the elastic thrust of the main spring 70 does not need to prepare a jig for reducing the thickness of the movable valve portion 40, and a neutral valve body including the neutral valve portion 30 and the movable valve portion 40 can be implemented. The disassembly.

Furthermore, by providing the retaining ring 43f, the risk of loss after the fastening bolt 43 is removed during maintenance can be eliminated.

Furthermore, in this embodiment, the diameter of the sub-cylinder block 120 needs to be larger than the diameter of the main rotary drive cylinder 110. This is due to the pressure of the pressure space 122c and the pressure space 123 being lower than the supply pressure from the output point sub-CL and the output point sub-OP due to adiabatic expansion, which requires an area for operation.

After setting the shape of the cylinders 110 and 120, if the pressure space (second pressure space) 113 and the pressure space (third pressure space) 122c are supplied with compressed air, the pressure space ( The force of the third pressure space 122c toward the pistons 112 and 122 remains closed.

At this time, after the pressure space (fourth pressure space) 123 is simultaneously pressurized, the existence of the sub-cylinder 120 can be cancelled and the rotary drive cylinder 110 can be operated.

Furthermore, in the case of a spring-type unidirectional drive cylinder, since the spring force is constantly generated, it is necessary to add a torque equivalent to the spring thrust of the spring more than the torque required for the action of the valve body. Therefore, in principle, the area of the cylinder needs to be more than doubled.

However, in the case of using the secondary piston 120 of the present embodiment, since there is no cancellation force that acts constantly like spring force, the bore of the main rotation driving cylinder 110 may be the minimum required.

On the other hand, in the sub-cylinder 120, the volume of the internal space 121b can be enlarged by lengthening the length without increasing the area, so that the necessary pressure after adiabatic expansion can be maintained.

[Industrial availability] The present invention can be widely used in vacuum equipment, etc., to switch the state of the flow path connecting two spaces with different properties such as vacuum degree, temperature or gas environment, and the use of opening the state of the isolation state, and in the isolation state A spool valve used to control the opening in the open situation.

1‧‧‧Spool valve 5‧‧‧Neutral valve body 10‧‧‧Valve Box 11‧‧‧Hollow part 12a‧‧‧First opening 12b‧‧‧Second opening 14‧‧‧Shell 14A‧‧‧Sealed enclosure 14Aa‧‧‧Sealing part 14Ab‧‧‧Sealing part 14Ac‧‧‧Sealing part 14Ad‧‧‧Intermediate atmosphere chamber 14B‧‧‧Cylinder shell, shell 14Bb‧‧‧Shell 14Bc‧‧‧Path 14C‧‧‧Cover shell 14Cc‧‧‧Path 14D‧‧‧Cover body 14He‧‧‧Leakage flow path 15a‧‧‧Inside 15b‧‧‧Inside 16B‧‧‧Bearing 17‧‧‧Fluid Path Ring 17a‧‧‧Outer peripheral surface 17b‧‧‧Inner peripheral surface 17c‧‧‧Radial ring path 17d‧‧‧slot 17e‧‧‧Sealing component 17f‧‧‧Sealing component 17g‧‧‧Sealing component 17h‧‧‧Sealing component 17j‧‧‧Sealing component 17k‧‧‧Sealing component 17p‧‧‧slot 18‧‧‧Fluid Path Ring 18a‧‧‧Outer peripheral surface 18b‧‧‧Inner peripheral surface 18c‧‧‧Radial ring path 18d‧‧‧slot 18e‧‧‧Sealing component 18f‧‧‧Sealing component 18g‧‧‧slot 18h‧‧‧Sealing component 18j‧‧‧Sealing component 18k‧‧‧Sealing component 18p‧‧‧slot 20‧‧‧Rotation axis 20a‧‧‧One end, one end face 20b‧‧‧Outer peripheral surface, surface 20c‧‧‧(The other end of the cover) 21‧‧‧Pinion gear, male thread (fastening tool) 21A‧‧‧Through hole, male thread (fastening tool) 22‧‧‧Rack components, racks 22a‧‧‧Rack teeth 22c‧‧‧Shrinking pressure space (first pressure space), shrinking and stretching pressure space 22d‧‧‧Rack storage space (space), storage space 22g‧‧‧Space, internal space 22h‧‧‧Internal space, space 22j‧‧‧Supply path (restricted vent), vent 22He‧‧‧Leakage space 22m‧‧‧Rack storage space (space) 25‧‧‧Axial path, axial path, path 26‧‧‧Axial path, axial path, path 27‧‧‧Radial axis path 27He‧‧‧Axial leakage flow path 28‧‧‧Radial axis path 30‧‧‧Neutral Valve Department 30a‧‧‧Circular part 30A‧‧‧One side 30b‧‧‧Rotating part 30B‧‧‧The other side 31‧‧‧Female thread (fastening tool) 31He‧‧‧Space, air storage space 38‧‧‧Kongbu 38a‧‧‧Inner surface, inner peripheral surface 38b‧‧‧Inner surface, inner peripheral surface 38c‧‧‧Step difference 38d‧‧‧Bottom 40‧‧‧Movable valve part, movable valve body 40a‧‧‧Around 1 40b‧‧‧ Surrounding area 2 41‧‧‧Supply Road 42‧‧‧Connecting road 42A‧‧‧The second connecting road 43‧‧‧Tightening bolt (fastening member) 43a‧‧‧Front end 43b‧‧‧Central part 43c‧‧‧The base part 43d‧‧‧Abutment surface 43e‧‧‧Slot for stop 43f‧‧‧Retaining ring (locking member) 50‧‧‧Movable valve plate part, 2nd movable valve part 50a‧‧‧Concave 50b‧‧‧Sliding surface 50c‧‧‧Inner Crank 50d‧‧‧Protrusions, ring-shaped protrusions (protrusions) 50f‧‧‧1st outer peripheral surface 50g‧‧‧Second inner surface 50h‧‧‧Hole 51a‧‧‧Second heavy seal part, double seal part, second seal part 51b‧‧‧First heavy seal, second seal, double seal 52a‧‧‧Second heavy seal, third seal, double seal 52b‧‧‧First heavy seal, third seal, double seal 53‧‧‧Scraping 54‧‧‧Scraping 55‧‧‧Intermediate atmosphere chamber 56‧‧‧Intermediate atmosphere chamber 57‧‧‧Fastening part 57b‧‧‧Through hole 57d‧‧‧Abutment surface 57g‧‧‧Abutment surface 59‧‧‧Protrusion, reaction force transmission part 60‧‧‧Movable valve frame, 1st movable valve 60a‧‧‧Concave 60b‧‧‧Sliding surface 60c‧‧‧peripheral crank 60d‧‧‧Concave 60f‧‧‧1st inner peripheral surface 60g‧‧‧2nd outer peripheral surface 61‧‧‧Sealing part, first sealing part, main sealing part 62‧‧‧Guide Pin 63‧‧‧Fastening screw part 63a‧‧‧Threaded hole 63f‧‧‧outer side 63g‧‧‧Abutment surface 65‧‧‧Location Regulation Department 65a‧‧‧Front end 67‧‧‧Through hole 67a‧‧‧Inside flange 67b‧‧‧Inner surface of gas connection position 67c‧‧‧Support position inner surface 67d‧‧‧Outside inner surface 67f‧‧‧step difference surface 67g‧‧‧step difference surface 67h‧‧‧Sealing component 67j‧‧‧Sealing component 68‧‧‧Connecting pin 68a‧‧‧Base and peripheral surface 68A‧‧‧Floating pin (connecting pin) 68Aa‧‧‧Flange 68Ab‧‧‧Gas connection part 68Ac‧‧‧Fixed end 68Ad‧‧‧Fixed groove 68Ae‧‧‧Fixed member 68Af‧‧‧Sealing surface 68Ag‧‧‧Sealing surface 68b‧‧‧Front end, outer peripheral surface 68B‧‧‧(connecting pin) front end 68c‧‧‧Step difference 68d‧‧‧Front face 68f‧‧‧Coarse seal part, seal part 68g‧‧‧Small sealing part, sealing part 69‧‧‧Connecting pin 69a‧‧‧Pressurized space, space 69c‧‧‧Intermediate atmosphere chamber 70‧‧‧Main spring, first spring, spring, spring 80‧‧‧Annular cylinder, closed release cylinder, second spring push part, cylinder, spring push part 90‧‧‧Auxiliary spring, third spring push part, spring push part 91‧‧‧Connecting member 92‧‧‧Screw 93‧‧‧Protrusion 93a‧‧‧First contact surface 93b‧‧‧First contact surface 93c‧‧‧Second contact surface 93d‧‧‧Second contact surface 93e‧‧‧First inclined plane 93f‧‧‧first inclined plane 93m‧‧‧end face 95‧‧‧Concave 95a‧‧‧3rd contact surface 95A‧‧‧Recess 95b‧‧‧3rd contact surface 95B‧‧‧Slot and recess 95c‧‧‧4th contact surface 95d‧‧‧4th contact surface 95e‧‧‧The second inclined plane 95f‧‧‧The second inclined plane 95m‧‧‧end face 96a‧‧‧First parallel plane 96b‧‧‧First parallel plane 97a‧‧‧Second parallel plane 97b‧‧‧Second parallel plane 98‧‧‧Open 100‧‧‧Rotating shaft drive mechanism 110‧‧‧Rotary drive cylinder (drive mechanism, rotary cylinder, cylinder block) 111‧‧‧Cylinder body (housing) 111a‧‧‧One end side 111b‧‧‧Internal space, inner surface 111c‧‧‧Concave 111s‧‧‧Axle hole 112‧‧‧Piston 112a‧‧‧One side (side 1) 112b‧‧‧The other side (the second side), one side 112c‧‧‧Protrusion 112d‧‧‧Protrusion (connecting part) 113‧‧‧Stretch pressure space (second pressure space), pressure space 114‧‧‧Extend vent (supply path), vent 115a‧‧‧Inner peripheral surface 115B‧‧‧Sliding bearing (bearing) 115C‧‧‧Sliding bearing (bearing) 116‧‧‧Connecting groove (groove) 118‧‧‧Buffer slot (shrink buffer slot) 119‧‧‧Buffer tank (extended buffer tank) 119a‧‧‧Control buffer flow path and flow path 119b‧‧‧Control hole 119c‧‧‧Control pin 120‧‧‧Auxiliary cylinder block, cylinder block 121b‧‧‧Internal space 122‧‧‧Piston 122a‧‧‧One side (side 1) 122b‧‧‧The other side 122c‧‧‧Pressure space (3rd pressure space) 122j‧‧‧Vent 122s‧‧‧Axis 123‧‧‧Pressure space (4th pressure space) 124‧‧‧Vent A1‧‧‧Symbol, direction A2‧‧‧ Symbol (Orientation) B1‧‧‧Arrow, symbol, direction B2‧‧‧Symbol, direction cdS‧‧‧Limit switch valve (end of rotation detection switch valve) C‧‧‧Axis (length direction), axis (axis centerline) CV1‧‧‧One-way valve (check valve) CV3‧‧‧One-way valve (check valve) E1‧‧‧Evacuation position E2‧‧‧Valve closed position, release position, closed release position FR‧‧‧Output point H‧‧‧Flow direction L‧‧‧Axis L1‧‧‧Line of Action (Extension Line) L2‧‧‧Line of Action (Extension Line) LL‧‧‧Axis main-CL output point main-OP output point mSW‧‧‧Maintenance switch NCV1‧‧‧Speed control valve OP-IN‧‧‧Port P1‧‧‧Intersection point P2‧‧‧Intersection point Pa‧‧‧extended position Pb‧‧‧Retracted position Q‧‧‧(of sliding bearing) center line S‧‧‧Meshing part sp1V‧‧‧Spool valve (pneumatic 3-channel spool valve) sp1V0‧‧‧Pneumatic sp1V1‧‧‧Flow path sp1V2‧‧‧Flow path sp1V3‧‧‧Flow path sp2V‧‧‧Spool valve (pneumatic 2-channel spool valve) sp2V0‧‧‧Pneumatic/Flow sp2V1‧‧‧Flow path sp2V2‧‧‧Flow path SQ‧‧‧Sequence circuit sub-CL‧‧‧output point sub-OP‧‧‧output point t1‧‧‧The first interval t2‧‧‧Second interval

Fig. 1 is a cross-sectional view showing the structure of the slide valve of the first embodiment of the present invention.

Fig. 2 is a longitudinal cross-sectional view showing the structure of the spool valve of the first embodiment of the present invention, and is a diagram showing a state where the valve body is arranged at a position capable of retreating action.

Fig. 3 is an enlarged view showing the main part of the member located near the annular cylinder in Fig. 2. Fig. 4 is a longitudinal sectional view showing the structure of the spool valve according to the first embodiment of the present invention, showing the state where the valve body is arranged in the valve closed position. Fig. 5 is an enlarged view showing the main part of the member located near the main spring in Fig. 4; Fig. 6 is a longitudinal cross-sectional view showing the structure of the spool valve of the first embodiment of the present invention, and is a view showing the state where the valve body is arranged in the retracted position. Fig. 7A is an enlarged view showing the main parts of the members located in the vicinity of the rotary shaft and the fluid path ring of the spool valve in the first embodiment of the present invention, and is a sectional view taken along the radial direction of the rotary shaft. Fig. 7B is an enlarged view showing the main parts of the members located in the vicinity of the rotary shaft and the fluid path ring of the spool valve of the first embodiment of the present invention, and is a sectional view taken along the axial direction of the rotary shaft. Fig. 8 is a cross-sectional view (extended position) of the rotary shaft driving mechanism of the first embodiment of the present invention. Fig. 9 is a cross-sectional view (retracted position) of the rotary shaft driving mechanism of the first embodiment of the present invention. Figure 10 is an enlarged cross-sectional view showing the main parts of the rack member and the sliding bearing. Fig. 11 is an enlarged cross-sectional view showing the main part of the meshing part of the rack member and the pinion gear. Figure 12A is an enlarged view showing the main part of the engagement part between the rotating shaft and the neutral valve body, and is a sectional view taken along the radial direction of the rotating shaft. Fig. 12B is an enlarged view showing the main part of the engaging part of the rotating shaft and the neutral valve body, and is a sectional view taken along the axial direction of the rotating shaft. Figure 13 is an enlarged view showing the main part of the member located near the connecting pin. Fig. 14 is a circuit diagram showing the driving sequence mechanism of the first embodiment of the present invention. FIG. 15 is a diagram showing the pressure state of the drive sequence mechanism shown in FIG. 14. FIG. 16 is a diagram showing the pressure state of the drive sequence mechanism shown in FIG. 14. Figure 17 is a diagram showing the pressure state of the drive sequence mechanism shown in Figure 14; Fig. 18 is a diagram showing the pressure state of the drive sequence mechanism shown in Fig. 14. Fig. 19 is a diagram showing the pressure state of the drive sequence mechanism shown in Fig. 14. FIG. 20 is a diagram showing the pressure state of the drive sequence mechanism shown in FIG. 14. FIG. 21 is a diagram showing the pressure state of the drive sequence mechanism shown in FIG. 14. Figure 22 is a diagram showing the pressure state of the drive sequence mechanism shown in Figure 14; FIG. 23 is a diagram showing the pressure state of the drive sequence mechanism shown in FIG. 14. Figure 24 is a diagram showing the pressure state of the drive sequence mechanism shown in Figure 14; Fig. 25 is an enlarged view showing the main part of the member located in the vicinity of the fastening member of the first embodiment of the present invention.

cdS‧‧‧Limit switch valve (end of rotation detection switch valve)

CV1‧‧‧One-way valve (check valve)

CV3‧‧‧One-way valve (check valve)

FR‧‧‧Output point

main-CL‧‧‧output point

main-OP‧‧‧output point

mSW‧‧‧Maintenance switch

NCV1‧‧‧Speed control valve

OP-IN‧‧‧Port

sp1V‧‧‧Spool valve (pneumatic 3-channel spool valve)

sp1V0‧‧‧Pneumatic

sp1V1‧‧‧Flow path

sp1V2‧‧‧Flow path

sp1V3‧‧‧Flow path

sp2V‧‧‧Spool valve (pneumatic 2-channel spool valve)

sp2V0‧‧‧Pneumatic/Flow

sp2V1‧‧‧Flow path

sp2V2‧‧‧Flow path

SQ‧‧‧Sequence circuit

sub-CL‧‧‧output point

sub-OP‧‧‧output point

Claims (3)

A spool valve having: a valve box having a hollow portion, and a first opening portion and a second opening portion that are provided so as to be opposed to each other via the hollow portion to form a communicating flow path; a neutral valve body, which It is arranged in the hollow portion of the valve box and can close the first opening; and a rotating shaft for closing the neutral valve body when the neutral valve body is closed relative to the first opening Position, and the valve opening position where the neutral valve body is set to retract from the first opening; the rotating device includes a rack and pinion that rotates the rotation shaft and a small rack A gear-driven rotating cylinder; a closing and releasing drive unit, which includes a closing and releasing cylinder that performs the action of releasing the closing of the neutral valve body; and a sequence circuit that allows the action of releasing the closing of the neutral valve body and the neutral valve body The rotating action of the rotating cylinder is operated in sequence; and the rotating cylinder has: a piston that can move integrally with the rotating cylinder; the first and third pressure spaces are arranged in series in the operating direction of the piston, and the piston can be closed. ; And the second pressure space and the fourth pressure space, which can open the aforementioned piston; the aforementioned sequence circuit has: a pneumatic 3-channel spool valve; Pneumatic 2-channel spool valve; speed control valve, which combines a one-way valve and a flow adjustment valve; a check valve; and a rotation end detection switch valve, which is installed in parallel with the aforementioned check valve, which can be used to release the aforementioned closure The closing pressure of the cylinder is set to a stable state to maintain the closing pressure until the end of the rotation of the neutral valve body; the sequence circuit: when the spool valve is opened by the compressed air supply of a system, it is closed When the driving of the cylinder is cancelled, the first pressure space is set to a non-pressurized state, the second pressure space is set to a pressurized state, and the third pressure space and the fourth pressure space are set to a pressurized state , The opening action of the rotary cylinder is started, and when the spool valve is closed due to the release of the drive compressed air supply, the first pressure space and the second pressure space are set to a non-pressurized state, and the third pressure The space is set to the airtight state of the pressurized state, the fourth pressure space is set to the non-pressurized state to start the closing action of the rotating cylinder, and when the rotating action ends, the closing action of the closing and releasing cylinder starts . Such as the spool valve of claim 1, wherein the aforementioned sequence circuit has: as a maintenance switch for the 4-channel valve, which operates during maintenance of the aforementioned valve open position to switch the aforementioned first pressure space, third pressure space, and fourth pressure The space and the aforementioned closing and releasing cylinder are set in a non-pressurized state, and the aforementioned second pressure space is maintained in a pressurized state; and a check valve. Such as the spool valve of claim 1 or 2, wherein the aforementioned sequence circuit: in the aforementioned pneumatic 3-channel spool valve, only the flow path connected to the supply source of driving compressed air to the aforementioned third pressure space is set to two-way valve.

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