KR20120061905A - Gate valve - Google Patents

Abstract

The gate valve has an inner surface formed around the hollow portion 11, the first opening portion 12a and the second opening portion 12b provided to sandwich the hollow portion 11, and the first opening portion 12a. And a valve box (10, 10a, 10b) having a flow path (H) passing through the hollow portion (11), the first opening portion (12a) and the second opening portion (12b), and in the hollow portion (11). It is installed to surround the support 30 disposed, the fixed valve unit 50 fixed to the support 30, and the outer circumference of the fixed valve unit 50 to slide in the direction in which the flow path (H) is extended. A valve plate 40 having a movable valve portion 60, a first peripheral region 40a and a second peripheral region 40b, and the first peripheral region 40a, and arranged in the movable valve portion 60; ) Is moved toward the first opening 12a, the movable valve portion 60 is brought into contact with the inner surface, and the movable valve portion 60 is pressed against the inner surface to close the flow path H. It is arrange | positioned in the 1st press part 70 and the said 2nd peripheral area | region 40b, and moves the said movable valve part 60 toward the said 2nd opening part 12b, and moves the said movable valve part 60 to the said The second press part 80 which opens the said flow path H by separating from an inner surface is included.

Description

Gate valve

The present invention relates to a gate valve suitable for a pendulum type, a linear motion type, a door type, etc. for sliding the valve plate in addition to the operation of opening and closing the flow path by the valve plate. In particular, the present invention relates to a gate valve for shutting off (closing) a flow path connecting two spaces having different degrees of vacuum (including atmospheric pressure) in a vacuum apparatus or the like and opening the shutoff state (connecting two spaces).

This application claims priority based on Japanese Patent Application No. 2009-204070 for which it applied on September 3, 2009, and uses the content here.

In a vacuum apparatus or the like, a gate valve is provided that can block two spaces having different degrees of vacuum such as between a chamber and a pipe, between a pipe and a pipe, or between a pipe and a pump and connect two spaces that are blocked. As such a gate valve, valves of various forms are known.

For example, the valve plate is slid to insert the valve plate in the valve opening / closing position of the flow path, and the valve plate is operated to shut off the flow path (valve closing operation), or the valve plate is operated to connect the flow path (valve). Opening operation) and a structure in which the valve plate is retracted from the flow path to the retracted position in the valve box by sliding the valve plate. As the valve having such a structure, a pendulum type, a direct motion type, a door type and the like are known.

The linear gate valve has a structure in which a valve plate fixed to a valve rod (support) is disposed in a hollow portion of a valve box in which a first opening portion and a second opening portion constituting a flow path are formed. In this structure, the valve bar is directly moved in the longitudinal direction to insert the valve plate into the valve open / close position of the opening (euro) or the valve plate is evacuated to the retracted position where the opening is not formed.

The conventional direct acting gate valve includes a valve body composed of two first valve plates and a second valve plate connected by bellows, an actuator disposed at the center of the valve plate between the two valve plates, and a flow path. The gate valve provided with the valve box in which the opening part which comprises is comprised is known. In this gate valve, the actuator closes the flow path by contacting and pressing the first valve plate to the inner surface around the opening of the valve box, or the actuator separates the first valve plate from the inner surface of the valve box so as to close the flow path. It opens (for example, refer patent document 1).

In addition, the pendulum-type gate valve has a first opening and a second opening constituting the flow path, and has a valve box having a hollow portion, and is fixed to the rotation shaft at the hollow portion and extends in a direction parallel to the plane perpendicular to the rotation shaft. And a valve body fixed in the support (a valve plate in the case where the sealing plate is provided in the opening). In this gate valve, the said valve body is rotated by rotating the said rotating shaft, and the said valve body is inserted in the valve opening-closing position of an opening part (euro), or the valve body is evacuated to the retracted position in which the opening part is not formed.

The conventional pendulum-type gate valve is provided with a valve plate which is rotatable on a rotating shaft, a slidable sealing plate disposed in an opening of the housing, and an actuator for sliding the sealing plate on a flange integrally formed in the housing. The structure is known. In this gate valve, a flow path is closed by contacting and pressing the sealing plate with the valve plate, or the sealing plate is separated from the valve plate to open the flow path (see Patent Document 2, for example).

The actuator of this pendulum type gate valve has a structure in which a bolt, an annular chamber (cylinder), a piston and a spring are arranged in series in the sliding direction of the sealing plate. Therefore, when closing the flow path, the restoring force generated in the spring is transmitted to the sealing plate via the piston, the cylinder and the bolt.

The door-type gate valve includes a valve box having a first opening portion and a second opening portion constituting the flow path, and having a hollow portion, a support fixed to the valve shaft and extending in a direction parallel to the surface including the valve shaft; And a valve body fixed to the support. In this gate valve, the valve shaft is rotated to rotate the valve body, and the valve body is inserted into a valve opening / closing position of the opening (euro) or the valve body is evacuated to a retracted position approximately perpendicular to the opening.

Patent Document 1: Japanese Patent Application Laid-Open No. 2002-181205 Patent Document 2: Japanese Patent No. 3655715

In such a gate valve, it is necessary to simplify the structure of the valve body by request to make the overall configuration of the gate valve compact, and to ensure the reliability of the shut-off operation.

However, in the above conventional valve, since the actuator is disposed at the center portion of the valve plate, high rigidity is required for the valve plate in order to deliver sufficient pressure pressure to the surface of the valve plate actually sealing the space. There was a problem that if the rigidity of the valve plate was insufficient, it was impossible to reliably shut off and high reliability could be obtained.

Moreover, the structure which connects two valve plates is employ | adopted as the said conventional valve. Since this connection structure and an actuator are separate structural components, there existed a problem that the structure of a valve body was complicated.

In addition, a large-diameter valve requires a cylinder that generates a large force in order to be able to withstand the back pressure, and there is a problem that the valve body becomes large.

In the conventional pendulum-type gate valve, an actuator for sliding the seal is provided on the flange, and the actuator, the annular cylinder, and the spring are arranged in series.

For this reason, the surface of the valve plate which actually seals the space is located inside the actuator, and this surface is shifted from the position of the actuator, and this surface is provided with a pressure force (spring restoring force by a spring) via a piston, cylinder, and bolt. ) Is transmitted. Therefore, there is a problem that if this pressing pressure is insufficient, it cannot be reliably cut off and high reliability cannot be obtained.

In addition, in order to withstand the back pressure in a large diameter valve or to apply it to a valve plate, a sealing plate, and a flange of a special shape, many actuator parts except a cylinder need to be arrange | positioned, and the structure of the gate valve became complicated.

The present invention has been made to solve such a conventional problem, and an object of the present invention is to provide a gate valve capable of a highly reliable shut-off operation with a simple configuration.

The gate valve of one aspect of the present invention includes a hollow portion, a first opening portion and a second opening portion provided to sandwich the hollow portion, an inner surface formed around the first opening portion, the hollow portion, the first opening portion, and A valve box having a flow passage passing through the second opening, a support disposed in the hollow portion, a fixed valve portion fixed to the support, and an outer circumference of the fixed valve portion to slide in a direction in which the flow path extends A valve plate having a movable valve portion, a first peripheral region, a second peripheral region, and the first peripheral region, and moving the movable valve portion toward the first opening, And a first pressurizing portion for pressing the movable valve portion against the inner surface to close the flow path, the second valve being disposed in the second circumferential region. And a second pressurizing portion that moves toward the second opening and opens the flow path by separating the movable valve portion from the inner surface.

Moreover, in the gate valve of one aspect of this invention, the said movable valve part has a 1st sealing part which contacts the said inner surface, and is pressed against the said inner surface, The said 1st press part is directly under the said 1st sealing part from the said movable valve part. It is preferable that it is an elastic member (magnetic elastic member) provided in the.

Moreover, in the gate valve of one aspect of this invention, it is preferable that the said 2nd press part is one air cylinder formed annularly between the said fixed valve part and the said movable valve part in the said 2nd circumferential area.

Moreover, in the gate valve of one aspect of this invention, it is preferable that the said 1st press part is arrange | positioned so as to approach the said 2nd press part in parallel in the direction which the said movable valve part slides.

Moreover, in the gate valve of one aspect of this invention, it is preferable that the said fixed valve part has a 2nd sealing part, a 3rd sealing part, and a wiper, and the said wiper is arrange | positioned in the position closer to the said 2nd opening part than the said 3rd sealing part. desirable.

In the gate valve of 1 aspect of this invention, a valve plate is comprised by the fixed valve part and the movable valve part. The first pressing part moves the movable valve part toward the first opening to contact the movable valve part with the inner surface, and presses the movable valve part with the inner surface to close the flow path. Moreover, the said 2nd press part opens the said flow path by moving the said movable valve part toward the said 2nd opening part, and separating the said movable valve part from the said inner surface. According to this structure, a valve body can be comprised by one valve plate and two press parts. Moreover, the 1st press part can move a movable valve part, and a gate valve can be closed directly and reliably. In addition, the second pressurization portion can move the movable valve portion to directly and reliably open the gate valve. Therefore, it is possible to obtain an effect that a gate valve having a high reliability shut-off operation can be obtained with a simple configuration.

1A is a cross sectional view showing a configuration of a gate valve of a first embodiment of the present invention.
1: B is a longitudinal cross-sectional view which shows the structure of the gate valve of 1st Embodiment of this invention, and is a figure which shows the case where a valve body is arrange | positioned in a valve opening-closing position.
FIG. 2 is an enlarged longitudinal sectional view showing a portion where the fixed valve portion and the fixed valve portion are fitted in the gate valve of the first embodiment of the present invention.
3 is an enlarged longitudinal sectional view showing a portion where the fixed valve portion and the fixed valve portion are fitted in the gate valve according to the second embodiment of the present invention.
4A is a cross sectional view showing a configuration of a gate valve according to a third embodiment of the present invention.
It is a longitudinal cross-sectional view which shows the structure of the gate valve of 3rd Embodiment of this invention, and is a figure which shows the case where a valve body is arrange | positioned in a valve opening / closing position.
5A is a cross sectional view showing a configuration of a gate valve according to a fourth embodiment of the present invention.
It is a longitudinal cross-sectional view which shows the structure of the gate valve of 4th Embodiment of this invention, and is a figure which shows the case where a valve body is arrange | positioned in a valve opening / closing position.
It is a figure which shows the shape of the opening part and valve board which are applicable to the gate valve of embodiment of this invention.
It is a figure which shows the shape of the opening part and valve plate which are applicable to the gate valve of embodiment of this invention.
It is a figure which shows the shape of the opening part and valve board which are applicable to the gate valve of embodiment of this invention.
It is a figure which shows the shape of the opening part and valve plate applicable to the gate valve of embodiment of this invention.
It is a figure which shows the shape of the opening part and valve plate applicable to the gate valve of embodiment of this invention.
It is a figure which shows the shape of the opening part and valve board which are applicable to the gate valve of embodiment of this invention.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of the gate valve concerning this invention is described based on drawing.

In addition, in each drawing used for the following description, in order to make each component into the magnitude | size which can be recognized on drawing, the dimension and ratio of each component were changed suitably from the actual thing.

The technical scope of the present invention is not limited to the embodiments described below, and various changes can be added without departing from the spirit of the present invention.

(First embodiment)

1A and 1B are views for explaining the configuration of the gate valve of the first embodiment of the present invention. FIG. 1A is a cross-sectional view of the gate valve, and FIG. 1B is a longitudinal cross-sectional view of the gate valve when the valve body is disposed in the valve open / close position.

The gate valve 100 of 1st Embodiment has the valve box 10, the rotating shaft 20, the support body 30, the valve plate 40, the 1st press part 70, and 2nd pressurization. The part 80 is provided. The support body 30 and the valve board 40 comprise a valve body. Moreover, the valve plate 40 is comprised by the fixed valve part 50 (fixed valve plate part) and the movable valve part 60 (movable valve plate part).

Pendulum Gate Valve

The gate valve 100 of the first embodiment is a pendulum type gate valve.

When the rotating shaft 20 rotates in the direction indicated by the code | symbol A1 (direction which intersects the direction of the flow path H), the support body 30 will also rotate along A1 direction by this rotation. Moreover, since the valve plate 40 is provided in the support body 30, the valve plate 40 rotates integrally with the support body 30. As shown in FIG.

As the support body 30 rotates in this way, the valve plate 40 is inserted into the valve opening / closing position of the oil passage H from the retracted position where the oil passage H is not provided.

And the valve board 40 closes the flow path H by operating the 1st press part 70 (valve closing operation). On the contrary, if the rotating shaft 20 rotates in the direction indicated by the symbol A2 after opening the valve plate 40 by operating the second pressing part 80 (valve opening operation), the support 30 also moves in the direction A2 according to this rotation. Rotate

As a result, the valve plate 40 retracts from the valve open / close position to the retracted position.

[Valve box (10)]

The valve box 10 is comprised by the frame which has the hollow part 11. The first opening 12a is provided on the upper surface of the frame, and the second opening 12b is provided on the lower surface of the frame.

The gate valve 100 is inserted between the space in which the first opening 12a is exposed (first space) and the space in which the second opening 12b is exposed (second space). The gate valve 100 blocks (closes) a flow path H connecting the first opening 12a and the second opening 12b, that is, a flow path H connecting the first space and the second space. ), This blocking state is opened (connecting the first space and the second space).

The hollow shaft 11 of the valve box 10 is provided with a rotating shaft 20, a support 30, a valve plate 40, a first pressurizing part 70, and a second pressurizing part 80.

[Rotary Shaft 20, Support 30]

The rotary shaft 20 is rotatably installed in the valve box 10.

The support 30 is fixed to this rotating shaft 20. The support 30 has a surface parallel to the direction perpendicular to the rotation axis 20. As shown in FIG. 1A, the support 30 has a circular portion 30a overlapping the valve plate 40 and a rotating portion 30b for rotating the circular portion in accordance with the rotation of the rotation shaft 20. The rotating part 30b is located between the rotating shaft 20 and the circular part 30a, and the width | variety of the rotating part 30b increases gradually from the rotating shaft 20 toward the circular part 30a.

[Valve plate 40, fixed valve part 50, movable valve part 60]

The valve plate 40 has a fixed valve portion 50 formed in a substantially concentric shape, and a substantially annular movable valve portion 60 disposed to surround the fixed valve portion 50. The fixed valve part 50 is fixed to the support body 30. Moreover, the movable valve part 60 is fitted to the fixed valve part 50, and is fixed by the 1st press part 70 and the 2nd press part 80 in the direction (return direction) shown by the code | symbol B1, B2. It is movable while sliding with respect to the part 50. Here, the directions indicated by the symbols B1 and B2 are directions perpendicular to the surfaces of the support 30 and the fixed valve portion 50, and are directions parallel to the axial direction of the rotation shaft 20.

Moreover, the outer periphery crank part is formed in the whole outer periphery area | region of the fixed valve part 50. As shown in FIG. Moreover, the inner peripheral crank part is formed in the whole inner peripheral area of the movable valve part 60. As shown in FIG.

In 1st Embodiment, the outer peripheral crank part of the fixed valve part 50 is slidably fitted with the inner peripheral crank part of the movable valve part 60. As shown in FIG.

On the surface of the movable valve part 60 which opposes (contacts) the inner surface of the valve box 10, the 1st sealing part 61 (main sealing part) formed in an annular shape, for example, O-ring etc. is provided.

The first sealing portion 61 comes into contact with the inner surface of the valve box 10 in a state where the valve plate 40 covers the first opening 12a at the time of closing the valve, and the movable valve portion 60 and the valve box It is pressed by the inner surface of (10). As a result, the first space is reliably isolated from the second space (a blocking state is secured).

[First Pressing Unit 70 (Elastic Member)]

The first pressing portion 70 is disposed in the first peripheral region 40a of the valve plate 40. In the 1st press part 70, a restoring force generate | occur | produces so as to press the movable valve part 60 toward (B1 direction) toward the 1st opening part 12a. As a result, the first pressurizing part 70 applies (pressurizes) the movable valve part 60 to the movable valve part 60 on the inner surface of the valve box 10 positioned around the first opening part 12a. It presses and makes this inner surface contact the movable valve part 60.

In 1st Embodiment, the 1st press part 70 is an elastic member (for example, a spring, rubber | gum, an air damper etc. which were provided in the recessed part 60a of the movable valve part 60).

The first pressing part 70 has a first end and a second end. The first end is in contact with the ceiling surface of the recessed part 60a of the movable valve part 60. The second end is in contact with the support 30. Moreover, as shown in FIG. 1A, in the annular movable valve part 60, the some 1st press part 70 is provided along the circumferential direction.

The natural length of the elastic member which comprises the 1st press part 70 is larger than the depth of the said recessed part 60a. Therefore, the elastic restoring force (extension force, pressing force) is generated in the first pressing portion 70 arranged in the recess 60a while being compressed by the ceiling surface of the recess 60a and the support 30. When the elastic restoring force acts, the movable valve portion 60 slides in the B1 direction while the first sealing portion 61 is pressed against the inner surface of the valve box 10 to perform a valve closing operation.

The first pressing part 70 is preferably disposed directly under the first sealing part 61 in order to directly press the first sealing part 61.

In this gate valve 100, since the 1st press part 70 is provided in the movable valve part 60, the 1st press part 70 can be located directly under the 1st sealing part 61. As shown in FIG. In the structure of the gate valve 100, the 1st press part 70 is located directly under such a 1st sealing part 61. As shown in FIG.

As described above, the gate valve 100 is an actuator for performing a valve closing operation and a valve opening operation, and includes a first pressing part 70 for performing a valve closing operation and a second pressing part 80 for performing a valve opening operation (to be described later). Is provided. In this configuration, the first pressing portion 70 and the second pressing portion 80 are mutually adjacent in the peripheral region (first peripheral region and second peripheral region) of the valve plate 40 close to the first sealing portion 61. It is arranged in parallel so as to be close. Moreover, the 1st press part 70 is located directly under the 1st sealing part 61. As shown in FIG. In this structure, the first pressing part 70 can directly press the first sealing part 61 and can apply a load directly to the first sealing part 61 in a substantially perpendicular direction.

That is, the structure of the gate valve 100 is not a structure which applies the moment load which a working point and a point exist. Therefore, the structural member (strength) of the part equivalent to a lever is unnecessary, and the structure of an actuator can be simplified. Moreover, as rigidity required for the movable valve part 60, only the strength which can support the weight of the movable valve part 60 is enough.

Moreover, since the 1st press part 70 is arrange | positioned directly under the 1st sealing part 61, electric power supply (energy supply) from the utility installation to the apparatus provided with the gate valve 100 is stopped by a power failure etc. Even if it is, the gate valve 100 can be reliably closed only by the mechanical force which arises in the 1st press part 70. FIG. Thus, a gate valve with a guaranteed safety can be realized.

On the other hand, in a gate valve having a structure in which the valve closing operation is performed by energy such as electric power supplied from the utility equipment, the valve closing operation may not be performed when the supply of energy from the utility equipment to the apparatus is stopped. Therefore, in such a structure, it is impossible to realize a gate valve with safety.

[2nd pressurization part 80 (air cylinder)]

The second pressing portion 80 is disposed in the second peripheral region 40b of the valve plate 40. In the second pressurizing part 80, when compressed air is supplied to the second pressurizing part 80, a force (pressing force and compressed air) moves the movable valve part 60 toward the second opening part 12b (B2 direction). Resulting forces). Thereby, the movable valve part 60 is spaced apart from the inner surface of the valve box 10 located around the 1st opening part 12a. In the valve plate 40, the second peripheral region 40b is located inside the first peripheral region 40a. That is, in the radial direction of the valve plate 40, the second pressing portion 80 is disposed inside the first pressing portion 70. In other words, the first pressing portion 70 is close to the second pressing portion 80 in a direction crossing the direction in which the movable valve portion 60 slides.

In the first embodiment, the second pressurizing portion 80 is one air cylinder (void) provided between the fixed valve portion 50 and the movable valve portion 60. Specifically, the air cylinder includes the second outer circumferential surface 50c (to be described later) of the fixed valve part 50 and the "first inner circumferential surface 60b" and the first inner circumferential surface 60b (to be described later) of the movable valve part 60. It is formed between and is formed between an outer periphery crank part and an inner periphery crank part. Moreover, this air cylinder is an annular space formed around the fixed valve part 50, and functions as one annular cylinder (an annular cavity). In other words, the toroidal cylinder is formed so as to surround the flow path (H).

When compressed air is supplied to the 2nd press part 80, the expansion force (pressure force) which expands the volume of the 2nd press part 80 arises in a B2 direction. When the magnitude of the expansion force is larger than the restoring force (the pressing force generated in the B1 direction) generated in the first pressing part 70, the first pressing part 70 is compressed to slide the movable valve part 60 in the B2 direction, and the first The sealing part 61 falls from the inner surface of the valve box 10, and valve opening operation | movement is performed.

Thus, in the gate valve 100, as an actuator which performs a valve closing operation | movement and a valve opening operation | movement, the 1st press part 70 which performs a valve closing operation | movement, and the 2nd press part 80 which performs a valve opening operation | movement are provided. In this configuration, the first pressing part 70 and the second pressing part 80 are arranged in parallel so as to be close to each other in the peripheral region of the valve plate 40 close to the first sealing part 61. The 2nd press part 80 comprises the one annular cylinder provided between the fixed valve part 50 and the movable valve part 60. As shown in FIG. According to this structure, if one air cylinder to which compressed air is supplied in one direction is provided in the 2nd press part 80, compressed air can be supplied to the inside of a torus cylinder along the shape of a torus cylinder, and valve opening operation | movement and a valve The closing operation can be performed. Therefore, an actuator having a simple and compact configuration can be realized.

Moreover, since the 2nd press part 80 is used for performing a valve opening operation | movement, it can compress the 1st press part 70 as the magnitude | size (output) of the force which the 2nd press part 80 generate | occur | produces. All you need is a size (output).

In the first embodiment, since one valve plate 40 is formed by the fixed valve portion 50 and the movable valve portion 60, there is no need to provide two valve plates, and the valve has a simple and compact structure. Edition can be realized.

Moreover, the actuator force does not act on the fixed valve part 50. Therefore, even when a back pressure is applied, it is sufficient that only the strength of bending within the elastic deformation range occurs as the rigidity of the fixed valve portion 50.

It is also possible to employ | adopt the structure in which the fixed valve part 50 and the support body 30 were integrated. In this structure, in addition to the strength of the fixed valve portion 50 as rigidity, the strength that supports the own weight of the movable valve portion 60 when the valve plate 40 is rotated between the retracted position and the valve open / close position (fixed valve) The strength of the supporting structure in which the part 50 and the support 30 are integrated) is sufficient.

Moreover, in 1st Embodiment, the 1st press part 70 which performs a valve closing operation | movement, and the 2nd press part 80 which performs a valve opening operation | movement of the valve plate 40 which is close to the 1st sealing part 61 are carried out. Since it arrange | positioned in a circumference | surroundings area, it is not necessary to provide an actuator in the valve box 10, and the gate valve which has a simple structure can be implement | achieved.

Moreover, in the structure of 1st Embodiment, the 1st press part 70 is arrange | positioned directly under the 1st sealing part 61 of the movable valve part 60, and the fixed valve part 50 and the movable valve part 60 are provided. The 2nd press part 80 is formed by the one annular cylinder provided in between. In this structure, the structure of the actuator can also be simplified, and the reliability of the valve closing operation and the valve opening operation can be improved.

In addition, even when the configuration in which the actuator is arranged in the peripheral region of the valve plate 40 is applied to the gate valve having a large diameter, the same structure as described above enables the valve closing operation and the valve opening operation to be performed reliably. Even in the case of operation, the same operation is possible.

FIG. 2 is an enlarged longitudinal sectional view showing a portion in which the fixed valve portion 50 and the movable valve portion 60 are fitted to each other, and show a portion where the first pressing portion 70 and the guide pin are provided.

[Second Sealing Parts 51a, 51b and Third Sealing Parts 52a, 52b]

On the outer circumferential surface of the fixed valve portion 50, an annular second sealing portion 51a such as an O-ring which contacts the inner circumferential surface of the movable valve portion 60 to seal between the fixed valve portion 50 and the movable valve portion 60. ), 51b and third sealing portions 52a, 52b are provided.

Specifically, 2nd sealing parts 51a and 51b are provided in the 1st outer peripheral surface 50b located radially outward from the outer peripheral crank part of the fixed valve part 50. As shown in FIG. Moreover, 3rd sealing part 52a, 52b is provided in the 2nd outer peripheral surface 50c located below 2nd sealing part 51a, 51b as the inside of 1st outer peripheral surface 50b in a radial direction. . The second sealing portions 51a and 51b contact the first inner circumferential surface 60b of the movable valve portion 60, and the third sealing portions 52a and 52b are the first of the movable valve portion 60. It contacts the 2nd inner peripheral surface 60c located under the inner peripheral surface 60b.

The second sealing portions 51a and 51b block the second pressurizing portion 80, which is a space having a high pressure, and a first space, which is a space having a low pressure and are close to the first opening 12a, and block the state. Secure. Similarly, the 3rd sealing part 52a, 52b is interrupted | blocked between the 2nd press part 80 which is a space with high pressure, and the 2nd space which is a space with low pressure and is close to the 2nd opening part 12b. To secure.

[Guide pin 62]

The guide pin 62 is fixed to the movable valve portion 60 and fits into the recess 50a formed in the fixed valve portion 50 through the second press portion 80.

This guide pin 62 guides the movable valve part 60 so that the direction in which the movable valve part 60 may slide may not shift in the direction shown by the code | symbol B1, B2. Thereby, the movable valve part 60 is prevented from moving in inclined direction with respect to the code | symbol B1, B2. In this structure, while the movable valve part 60 is positioned with respect to the fixed valve part 50, the movable valve part 60 is moved in parallel with the direction shown by the code | symbol B1 and B2, and a valve closing operation | movement and a valve opening operation | movement are performed. Can be. As a result, in the valve opening operation, a sealing structure in which leakage is suppressed by generating a pressing pressure uniformly in the first sealing portion 61 provided in the movable valve portion 60 can be realized.

Moreover, in the structure provided with the guide pin 62 in this way, when the posture in which the gate valve 100 is mounted to a vacuum apparatus is not determined, ie, when the mounting direction of the gate valve 100 is free, the movable valve part ( 60 can be prevented from being applied locally to the second sealing portions 51a, 51b and the third sealing portions 52a, 52b. For example, when the gate valve 100 is mounted so that gravity acts at right angles to the direction in which the movable valve portion 60 slides, the weight of the movable valve portion 60 which is the sliding member is guide pin 62. ) Is applied. Therefore, the weight of the movable valve part 60 to the 2nd sealing part 51a, 51b and the 3rd sealing part 52a, 52b (O-ring) directly is prevented. As a result, in any posture in which the gate valve 100 is mounted, the life of the sealing unit is not shortened, thereby securing an effect of preventing leakage.

In order to reduce the area of the sliding surface of the guide pin 62 and the recess 50a and to isolate the guide pin 62 from the first space and the second space, the guide pin 62 is provided with a second pressing portion ( 80) arranged to penetrate the inside.

Moreover, by arranging the guide pin 62 in the 2nd press part 80 in this way, the movable valve part 60 can be slid smoothly with respect to the fixed valve part 50. FIG.

When the strength of the guide pin is sufficiently obtained, the direction in which the movable valve part 60 slides is prevented from shifting even in a gate valve having a large diameter. The guide pin 62 is also applicable to a valve plate having a special shape.

[Wiper 53, 54]

On the outer circumferential surface of the fixed valve portion 50, the annular wipers 53 and 54 are provided in contact with the inner circumferential surface of the movable valve portion 60.

The wiper 53 is specifically provided in the 1st outer peripheral surface 50b located radially outward from the outer peripheral crank part of the fixed valve part 50. As shown in FIG. Moreover, the wiper 54 is provided in the 2nd outer peripheral surface 50c which is inward of the 1st outer peripheral surface 50b in radial direction, and is located below the wiper 53. As shown in FIG. The wiper 53 is in contact with the first inner circumferential surface 60b of the movable valve unit 60, and the wiper 54 is located below the first inner circumferential surface 60b of the movable valve unit 60. ).

The wipers 53 and 54 are both disposed on the outer circumferential surface of the fixed valve portion 50. The 2nd sealing part 51a is arrange | positioned near the 1st opening part 12a (1st space). The 3rd sealing part 52a is arrange | positioned in the position near the 2nd opening part 12b (2nd space).

These wipers 53 and 54 lubricate or clean the inner circumferential surface of the movable valve unit 60 sliding by the valve opening operation and the valve closing operation to remove dust from the sliding and the second press unit 80. It has a function which does not discharge | generate the generated dust to a 1st space and a 2nd space.

As a member (material) constituting the wipers 53 and 54, for example, when a sponge-like porous elastic body is selected, lubricating oil can penetrate (hold) inside the member.

This makes it possible to maintain a state in which a thin oil film having a predetermined film thickness is formed on the sealing surface sealed by the second sealing portions 51a, 51b and the third sealing portions 52a, 52b. That is, the wipers 53 and 54 wipe off the excess oil film and apply an oil film having a certain film thickness when the oil film is exhausted.

[Medium waiting room 55, 56]

In the outer peripheral surface of the fixed valve part 50 blocked by the 2nd sealing part 51a, 51b, the intermediate | middle waiting room 55 which is a space (gap) of atmospheric pressure is provided.

Similarly, on the outer peripheral surface of the fixed valve part 50 interrupted | blocked by the 3rd sealing part 52a, 52b, the intermediate | middle waiting room 56 which is a space (gap) of atmospheric pressure is provided.

Specifically, the intermediate waiting room 55 is provided in the outer peripheral crank portion of the fixed valve portion 50 on the first outer peripheral surface 50b located radially outward. Moreover, the intermediate | middle waiting room 56 is provided in the 2nd outer peripheral surface 50c which is inward of the 1st outer peripheral surface 50b in radial direction, and is located below the intermediate waiting chamber 55. As shown in FIG. The intermediate waiting room 55 is a space between the grooves provided in the first inner circumferential surface 60b of the movable valve part 60 and the first outer circumferential surface 50b, and the intermediate waiting room 56 is formed of the movable valve part 60. 1 It is a space between the 2nd inner peripheral surface 60c located under the inner peripheral surface 60b, and the groove | channel provided in the 2nd outer peripheral surface 50c.

The pressures in the intermediate waiting rooms 55 and 56 can be monitored. That is, a pressure gauge is provided in the gate valve 100 so as to measure the pressure in the intermediate waiting rooms 55 and 56, and the pressure is monitored by the user.

For example, when the 1st space close to the 1st opening part 12a is a decompression space, and the 2nd sealing part 51a is damaged, the pressure of the intermediate | middle waiting room 55 will become lower than atmospheric pressure.

Moreover, since the pressure in the cylinder (second pressurizing section 80) to which compressed air is supplied becomes higher than atmospheric pressure, when the 2nd sealing part 51b is damaged, the pressure of the intermediate | middle waiting room 55 becomes higher than atmospheric pressure.

Similarly, when the second space close to the second opening 12b is a decompression space and the third sealing portion 52a is broken, the pressure in the intermediate waiting room 56 is lower than the atmospheric pressure.

Moreover, since the pressure in the cylinder (second pressurizing section 80) to which compressed air is supplied becomes higher than atmospheric pressure, when the 3rd sealing part 52b is damaged, the pressure of the intermediate | middle waiting room 56 becomes higher than atmospheric pressure.

Therefore, since the gate valve 100 has a structure for monitoring the pressure in the intermediate waiting room 55, 56, for example, the pressure in the intermediate waiting room 55, 56 is lower than the atmospheric pressure and thus the threshold pressure. When the pressure is lower than the pressure or higher than the atmospheric pressure and higher than the threshold pressure, abnormalities of the second sealing portions 51a and 51b and the third sealing portions 52a and 52b can be detected. For example, if the structure provided with the alarm device in the gate valve 100 or the structure provided with the alarm device in the control device connected to the gate valve 100 is employ | adopted, the 2nd sealing part 51a, 51b, and 1st The abnormality of the three sealing parts 52a and 52b can be notified by an alarm. Accordingly, it can be immediately recognized that the second sealing parts 51a, 51b and the third sealing parts 52a, 52b are damaged and an internal leakage occurs in the gate valve 100, requiring maintenance.

This makes it possible to reliably determine problems such as internal leakage occurring in the gate valve that cannot be detected externally such as a vacuum device.

As mentioned above, in 1st Embodiment, the valve board 40 comprised by the fixed valve part 50 and the movable valve part 60 which surrounds the outer periphery of the fixed valve part 50 is provided. Moreover, the 1st press part 70 (spring) which performs a valve closing operation | movement is provided in the circumferential area of the valve board 40 by moving the movable valve part 60 toward the 1st opening part 12a. Moreover, the 2nd press part 80 (air cylinder) which performs a valve opening operation | movement is provided by moving the movable valve part 60 toward the 2nd opening part 12b. In this structure, a valve body can be formed by one valve plate 40 and two press parts. Moreover, the movable valve part 60 can be pressed directly on the inner surface of the valve box 10 by the restoring force of the 1st press part 70 arrange | positioned in the periphery area | region of the valve board 40, and a valve can be reliably closed. Similarly, the movable valve portion 60 is separated from the inner surface of the valve box 10 by the action of the compressed air supplied to the second pressurizing portion 80 disposed in the second peripheral region 40b of the valve plate 40. The valve can be opened securely. Therefore, in the first embodiment, it is possible to realize a gate valve having a simple structure and capable of performing a shutoff operation with high reliability.

(2nd embodiment)

3 is an enlarged longitudinal cross-sectional view showing the gate valve of the second embodiment of the present invention, and showing a portion where the fixed valve portion and the fixed valve portion are fitted.

In Fig. 3, the same members as those in Figs. 1A and 1B or 2 are denoted by the same reference numerals and the description thereof will be omitted or simplified.

In the gate valve of 2nd Embodiment, the fixed valve part 50 and the movable valve part 60 in the gate valve 100 (refer FIG. 1A, 1B, or 2) of the said 1st Embodiment are fitted together, The part which is present is changed, and the thickness of the valve plate 40 is reduced.

In the structure of the valve plate 40 of the said 1st Embodiment, as shown in FIG. 2, the outer periphery crank part formed in the outer periphery of the fixed valve part 50, and the inner periphery crank part formed in the inner periphery of the movable valve part 60 are fitted. It is aligned.

On the other hand, in 2nd Embodiment, the U-shaped U-shaped part is formed in the outer periphery of the fixed valve part 50, and the reverse U-shaped part of the reverse U-shape is formed in the inner periphery of the movable valve part 60. As shown in FIG. Moreover, the fixed valve part 50 and the movable valve part 60 are provided so that the U-shaped part of the fixed valve part 50 and the reverse U-shaped part of the movable valve part 60 may mutually fit.

In such 2nd embodiment, the position of the 3rd sealing part 52b, the intermediate | middle waiting room 56, the 3rd sealing part 52a, and the wiper 54 differs from 1st Embodiment. Specifically, in the first embodiment, the third sealing portion 52b, the intermediate waiting room 56, the third sealing portion 52a, and the wiper 54 are provided on the second outer circumferential surface 50c. The third sealing portion 52b, the intermediate waiting room 56, the third sealing portion 52a and the wiper 54 are provided on the inner surface 50d opposite to the first outer circumferential surface 50b.

Moreover, the movable valve part 60 has the opposing surface 60d which opposes the 1st inner peripheral surface 60b. The third sealing portions 52a, 52b and the wiper 54 provided on the inner surface 50d are in contact with the opposing surface 60d. Moreover, the intermediate | middle waiting room 56 provided in the inner side surface 50d is a space between the opposing surface 60d and the groove | channel provided in the inner side surface 50d.

As mentioned above, according to 2nd Embodiment, the effect similar to the said 1st Embodiment can be acquired. In the second embodiment, since the thickness of the valve body can be reduced, when the size of the gate valve cannot be sufficiently secured, for example, when the gate valve is disposed in a narrow space such as a vacuum device, The gate valve can be applied effectively.

(Third embodiment)

4A and 4B are views for explaining the configuration of the gate valve according to the third embodiment of the present invention. 4A is a cross-sectional view of the gate valve, and FIG. 4B is a longitudinal cross-sectional view of the gate valve when the valve body is disposed in the valve open / close position.

In Figs. 4A and 4B, the same members as those in Figs. 1A and 1B are denoted by the same reference numerals and the description thereof will be omitted or simplified.

The gate valve 300 of 3rd Embodiment includes the valve box 10a, the valve rod 25, the support body 30, the valve plate 40, the 1st press part 70 (spring), And a second pressurizing portion 80 (air cylinder). The support body 30 and the valve board 40 comprise a valve body. Moreover, the valve plate 40 is comprised by the fixed valve part 50 and the movable valve part 60. As shown in FIG.

[Direct Operated Gate Valve]

The gate valve 300 of 3rd Embodiment is a direct acting gate valve. In the gate valve 300, the valve body structure which comprises the pendulum-type gate valve 100 of the said 1st Embodiment is applied to the direct acting gate valve.

However, in Embodiment 1, although the shape of the 1st opening part 12a, the 2nd opening part 12b, and the valve plate 40 (fixed valve part 50 and the movable valve part 60) was concentric, In the third embodiment, this shape and the shape of the support body 30 are substantially square with rounded corners.

Moreover, the cross-sectional shape of the valve box 10a is substantially rectangular in order to move a valve body directly. The support 30 is fixed to the end of the valve rod 25.

When the valve rod 25 is driven to go straight in the direction indicated by the symbol D1, the support 30 also moves linearly along the D1 direction by this driving. As the support body 30 moves in this manner, the valve plate 40 is inserted into the valve opening / closing position of the oil passage H from the retracted position where the oil passage H is not provided.

And the valve board 40 closes the flow path H by operating the 1st press part 70 (valve closing operation). On the contrary, after the valve plate 40 is opened (valve opening operation) by driving the second pressurizing portion 80, the valve rod 25 is driven to go straight in the direction D2. Accordingly, the support 30 also moves directly in the direction D2. do.

As a result, the valve plate 40 retracts from the valve open / close position to the retracted position.

As described above, according to the third embodiment, the same effects as those of the first embodiment can be obtained in the linear gate valve.

(4th Embodiment)

FIG. 5: A and 5B is a figure explaining the structure of the gate valve of 4th Embodiment of this invention. FIG. 5A is a cross-sectional view of the gate valve, and FIG. 5B is a longitudinal cross-sectional view of the gate valve when the valve body is disposed in the valve open / close position.

In Figs. 5A and 5B, the same members as those in Fig. 1A, 1B, 4A, or 4B are denoted by the same reference numerals and the description thereof will be omitted or simplified.

The gate valve 400 of 4th Embodiment includes the valve box 10b, the valve shaft 26, the support body 30, the valve plate 40, the 1st press part 70 (spring), And a second pressurizing portion 80 (air cylinder). The support body 30 and the valve board 40 comprise a valve body. Moreover, the valve plate 40 is comprised by the fixed valve part 50 and the movable valve part 60. As shown in FIG.

[Door type gate valve]

The gate valve 400 of 4th Embodiment is a door type gate valve. In the gate valve 400, the valve body structure which comprises the direct acting gate valve 300 of the said 3rd Embodiment is applied to the door type gate valve.

Therefore, in the gate valve 400 of 4th Embodiment, the valve body structure which comprises the pendulum type gate valve 100 of the said 1st Embodiment is applied to the door type gate valve, and the support body 30 and the valve plate 40 are provided. The shape of is changed from concentric to approximately square. Moreover, in the 1st embodiment, although the extending direction of the rotating shaft 20 and the direction of the flow path H corresponded, the extending direction of the valve shaft 26 of 4th Embodiment intersects with respect to the direction of the flow path H. In addition, in FIG. .

In the pendulum-type gate valve 100 of the said 1st Embodiment, the structure by which the support body 30 which has the rotating part 30b extended in parallel with the surface perpendicular | vertical to the rotating shaft 20 is fixed to the rotating shaft 20 is employ | adopted, there was. On the other hand, in the door type gate valve 400 of 4th Embodiment, the support body 30 which has a surface parallel to the valve shaft 26 is fixed to the valve shaft 26. As shown in FIG.

When the valve shaft 26 is rotated in the direction indicated by the symbol E1, the support 30 also rotates along the E1 direction in accordance with this rotation.

As the support 30 rotates as described above, the valve plate 40 is inserted into the valve opening / closing position of the flow path H from the retracted position where the flow path H is not provided.

And the valve board 40 closes the flow path H by operating the 1st press part 70 (valve closing operation). On the contrary, if the valve shaft 26 rotates in the direction indicated by the symbol E2 after the valve plate 40 is opened (valve opening operation) by the operation of the second pressurizing portion 80, the support 30 will also be in accordance with this rotation. Rotate in the E2 direction.

As a result, the valve plate 40 retracts from the valve open / close position to the retracted position. The support 30 disposed in the retracted position and the first opening 12a or the second opening 12b are approximately perpendicular.

As mentioned above, according to 3rd Embodiment, the effect similar to the said 1st Embodiment is acquired with a door type gate valve.

In the above embodiment of the present invention, the structure in which the spring is used as the first pressing part has been described, but another elastic body may be used.

Moreover, although the structure which employ | adopted one annular air cylinder was demonstrated as a structure of a 2nd press part, you may employ | adopt a hydraulic cylinder etc. The drive device which isolate | separates the movable valve part 60 from the inner surface of the valve box 10 (10a, 10b) by driving one annular cylinder is used as a 2nd press part.

Moreover, in embodiment of the said invention, the opening part and valve plate which were formed in the circular shape shown in FIG. 6A, or the opening part and valve plate which were formed in the substantially square with rounded corners shown in FIG. 6B were demonstrated. The gate valve of this invention does not limit the shape shown to FIG. 6A and 6B. Since the gate valve of this invention has a structure in which an actuator is provided in the periphery area | region of a valve board, the opening part and valve board which were formed in the substantially triangular rounded corner shown in FIG. 6C may be employ | adopted, for example. Moreover, the opening part and valve board which were formed in the substantially rectangular rounded corner shown in FIG. 6D may be employ | adopted. Moreover, the opening part and valve board which were formed in the substantially hexagon with rounded corners shown in FIG. 6E may be employ | adopted. Moreover, it is also possible to apply to the opening part and valve plate which were formed in the substantially U-shape with rounded corner shown in FIG. 6F.

Furthermore, openings and valve plates formed in all shapes, such as openings and valve plates formed in an elliptical shape, or openings and valve plates formed in an approximately octagonal rounded corner, are applicable to the present invention.

Industrial availability

INDUSTRIAL APPLICABILITY The present invention can be widely applied to a gate valve for use in a vacuum apparatus or the like for blocking a flow path connecting two spaces having different degrees of vacuum or for opening the blocked state.

10, 10a, 10b valve box, 11 hollow part, 12a first opening part, 12b second opening part, 20 rotary shaft, 25 valve rod, 26 valve shaft, 30 support body, 40 valve plate, 50 fixed valve part, 51a, 51b second Sealing part, 52a, 52b third sealing part, 53, 54 wiper, 55, 56 intermediate waiting room, 60 movable valve part, 61 first sealing part, 62 guide pin, 70 first pressing part (elastic member), 80 second Pressurized section (air cylinder), 100, 300, 400 gate valve.

Claims (5)

As a gate valve,
A valve having a hollow portion, a first opening portion and a second opening portion provided to sandwich the hollow portion, an inner surface formed around the first opening portion, and a flow passage passing through the hollow portion, the first opening portion, and the second opening portion. box;
A support disposed in the hollow portion;
A valve plate having a fixed valve portion fixed to the support, a movable valve portion provided to surround an outer circumference of the fixed valve portion and sliding in a direction in which the flow path extends, a first peripheral region, and a second peripheral region;
A first pressurizing portion disposed in the first peripheral region and moving the movable valve portion toward the first opening, contacting the movable valve portion with the inner surface, pressing the movable valve portion against the inner surface, and closing the flow path; ; And
A second pressurizing portion disposed in said second peripheral region, said second pressurizing portion opening said flow path by moving said movable valve portion toward said second opening portion and separating said movable valve portion from said inner surface; . The method of claim 1,
The movable valve portion has a first sealing portion pressed against the inner surface in contact with the inner surface,
And said first pressurizing portion is an elastic member provided directly below said first sealing portion in said movable valve portion. The method according to claim 1 or 2,
And the second pressurizing portion is one air cylinder formed annularly between the fixed valve portion and the movable valve portion in the second peripheral region. 4. The method according to any one of claims 1 to 3,
And the first pressurizing portion is arranged to be close to the second pressurizing portion in parallel in a direction in which the movable valve portion slides. 5. The method according to any one of claims 1 to 4,
The fixed valve portion has a second sealing portion, a third sealing portion and a wiper,
The wiper is disposed at a position closer to the second opening than the third sealing portion.

Images