TWI752616B - Signal control module and low coherence interferometry - Google Patents

Signal control module and low coherence interferometry Download PDF

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TWI752616B
TWI752616B TW109130350A TW109130350A TWI752616B TW I752616 B TWI752616 B TW I752616B TW 109130350 A TW109130350 A TW 109130350A TW 109130350 A TW109130350 A TW 109130350A TW I752616 B TWI752616 B TW I752616B
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image capture
signal
control signal
controller
dimensional
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TW202210038A (en
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李翔傑
陳庭皓
蔡廷彥
闕川博
張育瑋
王璟郁
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國立臺灣大學
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/0209Low-coherence interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02041Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044Imaging in the frequency domain, e.g. by using a spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062Active error reduction, i.e. varying with time
    • G01B9/02067Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069Synchronization of light source or manipulator and detector
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/665Control of cameras or camera modules involving internal camera communication with the image sensor, e.g. synchronising or multiplexing SSIS control signals
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/80Camera processing pipelines; Components thereof
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/90Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums

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  • Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

A signal control module is integrated to a low coherence interferometry which includes an one-dimensional(1D) array image sensor. The signal control module includes an imaging acquisition controller and a signal controller. The imaging acquisition controller sends a 1D image acquisition control signal. The signal controller sends a two-dimensional(2D) image acquisition control signal, wherein the 1D and 2D image acquisition control signals are synchronized with each other. The 1D array image sensor captures 1D imaging information of different positions along a direction on an object-to-be-tested according 1D and 2D image acquisition control signals. These 1D imaging information constitute 2D imaging information. Furthermore, a low coherence interferometry is provided.

Description

訊號控制模組及低同調干涉儀 Signal control module and low coherence interferometer

本發明是有關於一種訊號控制模組與低同調干涉儀。 The invention relates to a signal control module and a low coherence interferometer.

現有光學同調斷層掃瞄技術主要分為兩類,一類為時域式光學同調斷層掃瞄(Time Domain Optical Coherence Tomography,TD-OCT,以下簡稱TD-OCT)技術,而另一類則為傅立葉域式光學同調斷層掃瞄(Fourier Domain Optical Coherence Tomography,FD-OCT,以下簡稱FD-OCT)技術。相較TD-OCT,FD-OCT具有影像擷取速度快且系統造價便宜等優勢,故被視為光學同調斷層掃瞄的主流技術。 Existing optical coherence tomography technology is mainly divided into two categories, one is Time Domain Optical Coherence Tomography (TD-OCT, hereinafter referred to as TD-OCT) technology, and the other is Fourier domain type Optical coherence tomography (Fourier Domain Optical Coherence Tomography, FD-OCT, hereinafter referred to as FD-OCT) technology. Compared with TD-OCT, FD-OCT has the advantages of fast image acquisition speed and low system cost, so it is regarded as the mainstream technology of optical coherence tomography.

而FD-OCT技術又分為兩種,一種稱為光譜頻域光學同調斷層掃瞄(Spectral Domain Optical Coherence Tomography,SD-OCT),另一種稱為掃頻式光學同調斷層掃瞄(Swept Source Optical Coherence Tomography,SSOCT)技術。在現有的SD-OCT技術中,若要對待測物上的一點感測一維縱向或深度解析之影像時,會先將光束照射至待測物上的一點,並且影像擷取控制裝置 發出一一維影像擷取控制訊號以通知影像感測器截取位於該點的一維影像。若要對待測物的一橫截面感測二維影像時,使用者會發出二維影像擷取控制訊號以通知影像擷取控制裝置在某一段時間區間內擷取不同點的一維影像,因此在此時間區間內影像擷取控制裝置會持續地對影像感測器發出一維影像擷取控制訊號以控制影像感測器擷取不同點的一維影像,最終再將這些一維影像合成一二維影像。但是,在上述的過程中,因為外部輸入的二維影像擷取控制訊號與一維影像擷取控制訊號的時序不具有對應關係,導致以這些二維影像構成三維影像會有影像誤差(包含錯位或扭曲等)的問題。因此,上述時序不相應的問題,導致了影像誤差,而限制了SD-OCT的應用。 The FD-OCT technology is divided into two types, one is called Spectral Domain Optical Coherence Tomography (SD-OCT), and the other is called Swept Source Optical Coherence Tomography (Swept Source Optical Tomography). Coherence Tomography, SSOCT) technology. In the existing SD-OCT technology, when a one-dimensional longitudinal or depth-resolved image is to be sensed at a point on the object to be measured, the light beam is first irradiated to a point on the object to be measured, and the image capture control device A one-dimensional image capture control signal is sent to notify the image sensor to capture the one-dimensional image at the point. When a 2D image is to be sensed from a cross-section of the object to be measured, the user will send a 2D image capture control signal to notify the image capture control device to capture 1D images at different points within a certain period of time. During this time interval, the image capture control device will continue to send a one-dimensional image capture control signal to the image sensor to control the image sensor to capture one-dimensional images of different points, and finally combine these one-dimensional images into one 2D image. However, in the above process, because the timings of the externally input 2D image capture control signals and the 1D image capture control signals do not have a corresponding relationship, there will be image errors (including misalignment) when these 2D images are used to form a 3D image. or distortion, etc.). Therefore, the above-mentioned problem of inconsistent timing leads to image errors, which limits the application of SD-OCT.

本發明提供一種訊號控制模組,其可使應用此訊號控制模組的低同調干涉儀具有良好的影像品質。 The invention provides a signal control module, which can make the low coherence interferometer applied with the signal control module have good image quality.

本發明提供一種低同調干涉儀,其具有良好的影像品質。 The present invention provides a low coherence interferometer with good image quality.

在本發明的一實施例中提供一種訊號控制模組,整合於低同調干涉儀。低同調干涉儀包括一一維陣列影像感測器。訊號控制模組包括影像擷取控制器與訊號控制器。影像擷取控制器與一維陣列影像感測器耦接,且影像擷取控制器用以發出一維影像擷取控制訊號以控制一維陣列影像感測器擷取一待測物的一點的一維影像資訊。訊號控制器與影像擷取控制器耦接,且用以發出 二維影像擷取控制訊號。一維影像擷取控制訊號與二維影像擷取控制訊號彼此同步,且一維陣列影像感測器根據一維影像擷取控制訊號以及二維影像擷取控制訊號擷取該待測物在多個沿一方向且在不同位置處的一維影像資訊,且這些不同位置處所對應的這些一維影像資訊構成該待測物的一二維影像資訊。 In an embodiment of the present invention, a signal control module is provided, which is integrated in a low-coherence interferometer. The low coherence interferometer includes a one-dimensional array of image sensors. The signal control module includes an image capture controller and a signal controller. The image capture controller is coupled to the one-dimensional array image sensor, and the image capture controller is used for sending out a one-dimensional image capture control signal to control the one-dimensional array image sensor to capture a point of an object to be measured. Dimensional Image Information. The signal controller is coupled to the image capture controller and used for sending out 2D image capture control signal. The 1D image capture control signal and the 2D image capture control signal are synchronized with each other, and the 1D array image sensor captures the multiple images of the object to be tested according to the 1D image capture control signal and the 2D image capture control signal. One-dimensional image information along a direction and at different positions, and the one-dimensional image information corresponding to the different positions constitutes a two-dimensional image information of the object to be tested.

在本發明的一實施例中提供一種低同調干涉儀,包括低同調光源、分合光元件、反射元件、掃描元件、一維陣列影像感測器以及上述的訊號控制模組。低同調光源用以發出照明光束。分合光元件設置於照明光束的傳遞路徑上。分合光元件將照明光束分光而成參考光束與物體光束。待測物位於物體光束的傳遞路徑上。反射元件設置於參考光束的傳遞路徑上。掃描元件設置於物體光束的傳遞路徑上,且位於分合光元件與待測物之間。參考光束被反射元件反射而傳遞至分合光元件,且物體光束依序被掃描元件與待測物反射後傳遞至分合光元件,反射後的參考光束與反射後的物體光束被分合光元件合光而形成一合成光束,其中掃描元件用以調整物體光束照射待測物的位置。一維陣列影像感測器,設置於合成光束的傳遞路徑上。上述的訊號控制模組內的影像擷取控制器與該一維陣列影像感測器耦接,且訊號控制器與影像擷取控制器及掃描元件耦接。 In an embodiment of the present invention, a low-coherence interferometer is provided, which includes a low-coherence light source, a light splitting and combining element, a reflective element, a scanning element, a one-dimensional array image sensor, and the above-mentioned signal control module. A low-coherence light source is used to emit the illumination beam. The light splitting element is arranged on the transmission path of the illumination beam. The splitting and combining element splits the illumination beam into a reference beam and an object beam. The object to be tested is located on the transmission path of the object beam. The reflective element is arranged on the transmission path of the reference beam. The scanning element is arranged on the transmission path of the object beam, and is located between the light splitting element and the object to be measured. The reference beam is reflected by the reflective element and transmitted to the splitting and combining element, and the object beam is sequentially reflected by the scanning element and the object to be measured and then transmitted to the splitting and combining element. The reflected reference beam and the reflected object beam are split and combined. The elements combine light to form a combined beam, wherein the scanning element is used to adjust the position where the object beam illuminates the object to be measured. The one-dimensional array image sensor is arranged on the transmission path of the combined beam. The image capture controller in the above-mentioned signal control module is coupled to the one-dimensional array image sensor, and the signal controller is coupled to the image capture controller and the scanning element.

基於上述,在本發明實施例的訊號控制模組與低同調干涉儀中,影像擷取控制器與訊號控制器分別發出時序上彼此同步的一維、二維影像擷取控制訊號,當一維陣列影像感測器受控於 一維、二維影像擷取控制訊號以擷取待測物的影像資訊時,較不容易產生影像誤差的問題,故本發明實施例的低同調干涉儀具有良好的影像品質,亦有助於提升光學同調斷層掃描血管造影術(OCT angiography,OCTA)的動態範圍。 Based on the above, in the signal control module and the low coherence interferometer according to the embodiments of the present invention, the image capture controller and the signal controller respectively send out one-dimensional and two-dimensional image capture control signals that are synchronized with each other in timing. The array image sensor is controlled by When the one-dimensional and two-dimensional image capture control signals are used to capture the image information of the object to be tested, the problem of image error is less likely to occur. Therefore, the low-coherence interferometer of the embodiment of the present invention has good image quality, which is also helpful for Improve the dynamic range of optical coherence tomography angiography (OCT angiography, OCTA).

100、100’、100a、100b:低同調干涉儀 100, 100', 100a, 100b: Low coherence interferometers

110:低同調光源 110: Low coherence light source

120:分合光元件 120: split light components

130:反射元件 130: Reflective element

140:物鏡 140: Objective lens

150:光譜儀 150: Spectrometer

152:一維陣列影像感測器 152: 1D Array Image Sensor

154:繞射光柵 154: Diffraction grating

156:聚焦透鏡 156: Focusing Lens

16c:晶片 16c: Wafer

160、160’、160a、160b、160c:訊號控制模組 160, 160’, 160a, 160b, 160c: Signal control module

162、162a、162b:影像擷取控制器 162, 162a, 162b: Image capture controller

1621:微控制器 1621: Microcontroller

1622:訊號合成元件 1622: Signal synthesis component

164’:控制器 164': Controller

164:訊號控制器 164: Signal Controller

1701~1704:光傳輸元件 1701~1704: Optical Transmission Components

180:掃描元件 180: Scanning Components

1901、1902:準直透鏡 1901, 1902: Collimating lens

A1、A2:橫截面 A1, A2: cross section

C:載合 C: load

IB:照明光束 IB: Lighting Beam

IS1~ISn:影像感測元件 IS1~ISn: Image sensor element

IG1、IG1’、IG2、IG2a、IG2’:一維、二維影像擷取控制訊號 IG1, IG1', IG2, IG2a, IG2': 1D, 2D image capture control signals

LE:光源端 LE: light source end

ME:量測端 ME: measuring terminal

OB:待測物 OB: object to be tested

OL:物體光束 OL: Object Beam

RE:參考端 RE: reference terminal

RL:參考光束 RL: Reference beam

SE:樣品端 SE: sample end

SD:掃描方向 SD: Scanning direction

SL:合成光束 SL: Synthetic beam

Sync:同步訊號 Sync: sync signal

SCL、SCL’:掃描元件控制訊號 SCL, SCL': Scanning element control signal

SGL:合成影像擷取控制訊號 SGL: Synthetic image capture control signal

SL1~SLn:子光束 SL1~SLn: Sub-beams

T1~T3:第一至第三時間區間 T1~T3: The first to third time interval

t1~t3:時間 t1~t3: time

P、P1~P18、P1’~P18’:點 P, P1~P18, P1’~P18’: point

PC:偏振控制器 PC: Polarization Controller

PR:處理器 PR: Processor

PS、PS’、PS1、PS1’、PSN、PSN’:脈衝訊號 PS, PS’, PS1, PS1’, PSN, PSN’: pulse signal

△t、△t’、△t1:時刻差值 △t, △t’, △t1: time difference

圖1A為本發明一實施例的低同調干涉儀的架構示意圖。 FIG. 1A is a schematic structural diagram of a low coherence interferometer according to an embodiment of the present invention.

圖1B為一比較實施例的低同調干涉儀的架構示意圖。 FIG. 1B is a schematic structural diagram of a low coherence interferometer according to a comparative embodiment.

圖2為一比較實施例中的一維影像擷取控制訊號、二維影像擷取控制訊號的時序關係圖。 FIG. 2 is a timing diagram of a one-dimensional image capture control signal and a two-dimensional image capture control signal in a comparative embodiment.

圖3A為本發明一實施例中的一維影像擷取控制訊號、二維影像擷取控制訊號的時序關係圖。 3A is a timing diagram of a one-dimensional image capture control signal and a two-dimensional image capture control signal in an embodiment of the present invention.

圖3B為本發明另一實施例的一維影像擷取控制訊號、二維影像擷取控制訊號及合成影像擷取控制訊號的時序關係圖。 3B is a timing diagram of a one-dimensional image capture control signal, a two-dimensional image capture control signal, and a composite image capture control signal according to another embodiment of the present invention.

圖4是物體光束沿著掃描方向照射待測物的不同橫截面的示意圖。 FIG. 4 is a schematic diagram of different cross-sections of the object beam irradiating the object to be tested along the scanning direction.

圖5至圖7為本發明不同實施例的低同調干涉儀的架構示意圖。 5 to 7 are schematic structural diagrams of low coherence interferometers according to different embodiments of the present invention.

圖1A為本發明一實施例的低同調干涉儀的架構示意 圖。圖1B為一比較實施例的低同調干涉儀的架構示意圖。圖2為一比較實施例中的一維影像擷取控制訊號、二維影像擷取控制訊號的時序關係圖。圖3A為本發明一實施例中的一維影像擷取控制訊號、二維影像擷取控制訊號的時序關係圖。圖3B為本發明另一實施例的一維影像擷取控制訊號、二維影像擷取控制訊號及合成影像擷取控制訊號的時序關係圖。圖4是物體光束沿著掃描方向照射待測物的不同橫截面的示意圖。 FIG. 1A is a schematic diagram of the structure of a low coherence interferometer according to an embodiment of the present invention. picture. FIG. 1B is a schematic structural diagram of a low coherence interferometer according to a comparative embodiment. FIG. 2 is a timing diagram of a one-dimensional image capture control signal and a two-dimensional image capture control signal in a comparative embodiment. 3A is a timing diagram of a one-dimensional image capture control signal and a two-dimensional image capture control signal in an embodiment of the present invention. 3B is a timing diagram of a one-dimensional image capture control signal, a two-dimensional image capture control signal, and a composite image capture control signal according to another embodiment of the present invention. FIG. 4 is a schematic diagram of different cross-sections of the object beam irradiating the object to be tested along the scanning direction.

請參照圖1A,在本實施例中,低同調干涉儀100例如是採用SD-OCT技術,其用以感測待測物OB的影像資訊,其中待測物OB例如是人體組織,但不以此為限。低同調干涉儀100包括低同調光源110、分合光元件120、反射元件130、物鏡140、光譜儀150、訊號控制模組160、多個光傳輸元件1701~1704、掃描元件180、準直透鏡1901、1902、偏振控制器PC與處理器PR。在本實施例中,低同調干涉儀100係基於Michelson干涉儀的架構為例,於其他的實施例中,亦可以為Mach-Zehnder干涉儀或Linnik干涉儀或Mirau interferometer干涉儀架構,但不以此為限。於以下的段落中會詳細地說明上述各元件。 Referring to FIG. 1A , in this embodiment, the low coherence interferometer 100 adopts SD-OCT technology, for example, which is used to sense the image information of the object to be tested OB, wherein the object to be tested OB is, for example, human tissue, but not This is limited. The low coherence interferometer 100 includes a low coherence light source 110 , a light splitting and combining element 120 , a reflecting element 130 , an objective lens 140 , a spectrometer 150 , a signal control module 160 , a plurality of light transmission elements 1701 to 1704 , a scanning element 180 , and a collimating lens 1901 , 1902, polarization controller PC and processor PR. In this embodiment, the low coherence interferometer 100 is based on the structure of the Michelson interferometer. This is limited. Each of the above elements will be described in detail in the following paragraphs.

低同調光源110用以發出照明光束IB,其種類可包括發光二極體(Light Emitting Diode,LED)、超流明二極體(Superluminscent LED)、短脈衝雷射光源(short pulse laser)或其他合適的發光元件,係具有寬頻寬之特性。在本實施例中,因低同調干涉儀100量測的是人體組織,故低同調光源110的主要發 光波長的波段為以不傷害人體的可見光波段(390奈米至700奈米)或近紅外光波段(700奈米至1700奈米),其中中心波長(central wavelength)係指低同調光源110的光強度頻譜中光強度最強所對應的波長。於其他實施例中,所屬技術領域中具有通常之適者亦可根據不同的待測物OB選用低同調光源110適當的中心波長,本發明並不以此為限。 The low-coherence light source 110 is used for emitting the illumination beam IB, and the type of the light source 110 may include Light Emitting Diode (LED), Superluminscent LED (Superluminscent LED), short pulse laser light source (short pulse laser) or other suitable The light-emitting element has the characteristics of wide bandwidth. In this embodiment, since the low-coherence interferometer 100 measures human tissue, the low-coherence light source 110 mainly emits The wavelength band of the light is the visible light band (390 nm to 700 nm) or the near-infrared light band (700 nm to 1700 nm) that does not harm the human body, wherein the central wavelength (central wavelength) refers to the low coherence light source 110. The wavelength corresponding to the strongest light intensity in the light intensity spectrum. In other embodiments, those skilled in the art can also select an appropriate center wavelength of the low-coherence light source 110 according to different objects OB, and the present invention is not limited thereto.

分合光元件120係為可使以不同光路行進的多道光束合成一道光束輸出(合光功能)且可使一道光束分為以不同光路行進的多道光束輸出(分光功能)的光學元件。於本實施例中,分合光元件120例如是50/50光纖耦合器,也就是說,其可使入射此50/50光纖耦合器的光束的以50:50分光比例均勻分配至兩輸出端1702、1703,藉此以分光。反之,若不同入射方向的光束入射此分合光元件120可被此分合光元件合併,而形成合成光束。 The splitting/combining element 120 is an optical element capable of combining multiple beams traveling in different optical paths into one beam output (light combining function) and dividing one beam into multiple beam output traveling on different optical paths (splitting function). In this embodiment, the splitting and combining element 120 is, for example, a 50/50 fiber coupler, that is to say, it can evenly distribute the light beam entering the 50/50 fiber coupler to the two output ends at a split ratio of 50:50. 1702, 1703, thereby splitting light. Conversely, if light beams from different incident directions are incident on the splitting and combining element 120, the splitting and combining element 120 can be combined by the splitting and combining element to form a combined light beam.

反射元件130係為具有反射功能的光學元件,於本實施例中,其例如是金屬塊,金屬的材料例如是金(即金鏡)、銀(即銀鏡)。於其他的實施例中,反射元件130亦可以是表面上鍍上一層具有高反射率的反射物,本發明並不以此為限。 The reflective element 130 is an optical element with a reflective function. In this embodiment, it is, for example, a metal block, and the metal material is, for example, gold (ie, a gold mirror) or silver (ie, a silver mirror). In other embodiments, the reflective element 130 may also be coated with a layer of reflector with high reflectivity on the surface, but the present invention is not limited to this.

物鏡140係用以引導光束至待測物OB的鏡頭,其例如是由一至多片具有屈光度的透鏡所組成的,本發明並不以此為限。 The objective lens 140 is a lens used to guide the light beam to the object to be measured OB, for example, it is composed of one or more lenses with diopter, and the present invention is not limited to this.

光譜儀150包括繞射光柵154、一維陣列影像感測器152與聚焦透鏡156。於本實施例中,繞射光柵154的主要功能是分光,其態樣例如是可使光束透射的透射型繞射光柵。於其他實施 例中,亦可以是使光束反射的反射型繞射光柵,本發明並不以此為限。一維陣列影像感測器152包括多個沿單方向排列的影像感測元件IS1~ISn(亦或稱線掃描相機(line scan camera)),影像感測元件IS1~ISn的種類包括互補式金氧半導體(Complementary Metal-Oxide-Semiconductor,CMOS)型影像感測元件或電荷耦合器件(Charge-coupled Device,CCD)型影像感測元件,但本發明並不此為限。聚焦透鏡156例如是凸透鏡且可選擇性地設置,但不以此為限。 The spectrometer 150 includes a diffraction grating 154 , a one-dimensional array image sensor 152 and a focusing lens 156 . In this embodiment, the main function of the diffraction grating 154 is to split light, and its form is, for example, a transmission-type diffraction grating that can transmit light beams. in other implementations For example, it may be a reflection-type diffraction grating that reflects light beams, but the present invention is not limited to this. The one-dimensional array image sensor 152 includes a plurality of image sensing elements IS1 ˜ISn (also referred to as line scan cameras) arranged in a single direction. The types of the image sensing elements IS1 ˜ISn include complementary gold An oxygen semiconductor (Complementary Metal-Oxide-Semiconductor, CMOS) type image sensing element or a charge-coupled device (Charge-coupled Device, CCD) type image sensing element, but the invention is not limited thereto. The focusing lens 156 is, for example, a convex lens and can be selectively provided, but not limited thereto.

訊號控制模組160包括彼此耦接的影像擷取控制器162與訊號控制器164,且於本實施例中,影像擷取控制器162與訊號控制器164分屬於不同晶片。影像擷取控制器162例如是內部具有影像擷取電路且藉由發出影像擷取控制訊號以控制一維陣列影像感測器152擷取影像資訊,訊號控制器164例如是用以調整影像擷取控制器162的訊號。於本實施例中,影像擷取控制器162例如是影像擷取卡(frame grabber card),其中影像擷取卡除了可控制一維陣列影像感測器152擷取影像外,更具有影像預處理的能力,其中影像預處理包括OCT干涉解調如波數校準(wavenumber calibration,or k calibration),色散補償(dispersion compensation),快速傅立葉轉換(FFT)等影像處理,此外此影像預處理功能可以透過影像擷取卡內建FPGA晶片加速上述影像處理的速度或透過與GPU卡協同運算亦可以加速上述影像處理。訊號控制器164例如是資料擷取卡(Data Acquisition card,DAQ card)。 The signal control module 160 includes an image capture controller 162 and a signal controller 164 coupled to each other, and in this embodiment, the image capture controller 162 and the signal controller 164 belong to different chips. The image capture controller 162 has, for example, an image capture circuit inside and controls the one-dimensional array image sensor 152 to capture image information by sending out image capture control signals. The signal controller 164 is used to adjust the image capture, for example. The signal from the controller 162 . In this embodiment, the image capture controller 162 is, for example, a frame grabber card, wherein the frame grabber card not only controls the one-dimensional array image sensor 152 to capture images, but also has image preprocessing. The ability of image preprocessing includes OCT interferometric demodulation such as wavenumber calibration (wavenumber calibration, or k calibration), dispersion compensation (dispersion compensation), fast Fourier transform (FFT) and other image processing, in addition, this image preprocessing function can be achieved through The built-in FPGA chip of the image capture card accelerates the speed of the above-mentioned image processing or can also accelerate the above-mentioned image processing by cooperating with the GPU card. The signal controller 164 is, for example, a data acquisition card (DAQ card).

光傳輸元件1701~1704例如是可使光束於其內傳遞的光學元件,其種類例如是光纖(optical fiber),但不以此為限。 The optical transmission elements 1701 to 1704 are, for example, optical elements that can transmit the light beams therein, and the types thereof are, for example, but not limited to, optical fibers.

掃描元件180係指可改變光束在待測物OB上的照射位置的機構元件。於本實施例中,掃描元件180包括二片彼此垂直擺設的高反射鏡片(Galvanometer Mirror,亦被稱為振鏡),分別稱為第一、第二高反射鏡片,各高反射鏡片具有轉動軸且可依據轉動軸來回振動。於另一實施例中,掃描元件180亦可包括一高反射鏡片與用以使此高反射鏡片在二維平面內位移的一位移模組。於另一實施例中,掃描元件例如是可在二個不同方向上轉動的微機電反射鏡(MEMS mirror),本發明並不以此為限。 The scanning element 180 refers to a mechanism element that can change the irradiation position of the light beam on the object OB. In this embodiment, the scanning element 180 includes two high-reflection mirrors (Galvanometer Mirrors, also known as galvanometers) arranged perpendicular to each other, which are called first and second high-reflection mirrors respectively, and each high-reflection mirror has a rotation axis. And it can vibrate back and forth according to the rotating shaft. In another embodiment, the scanning element 180 may also include a high-reflection lens and a displacement module for displacing the high-reflection lens in a two-dimensional plane. In another embodiment, the scanning element is, for example, a MEMS mirror that can be rotated in two different directions, but the invention is not limited thereto.

準直透鏡1901、1902例如是可使光束準直化的透鏡。 The collimating lenses 1901 and 1902 are, for example, lenses that can collimate light beams.

偏振控制器PC係用以修正光束因於光傳輸元件1702本身所造成的偏振態改變,其例如是透過控制光傳輸元件1702內光束的方位角或延遲量消除偏振態誤差的目的,而可提高分合光元件120的干涉效率。於本實施例中,係只有在光傳輸元件1702上設置偏振控制器PC。於其他的實施例中,亦可以依據需求在其他光傳輸元件上設置偏振控制器,本發明並不以此為限。 The polarization controller PC is used to correct the polarization state change of the light beam caused by the light transmission element 1702 itself. For example, it is for the purpose of eliminating the polarization state error by controlling the azimuth angle or retardation of the light beam in the light transmission element 1702, and can improve the The interference efficiency of the splitting and combining element 120 . In this embodiment, only the polarization controller PC is provided on the light transmission element 1702 . In other embodiments, polarization controllers may also be set on other optical transmission elements according to requirements, but the present invention is not limited thereto.

處理器PR例如是可對訊號進行不同運算的裝置,於本實施例中,處理器PR例如是電腦,但不以此為限。 The processor PR is, for example, a device that can perform different operations on signals. In this embodiment, the processor PR is, for example, a computer, but not limited thereto.

於以下的段落中會詳細地說明上述各元件之間的配置關係。 In the following paragraphs, the arrangement relationship between the above elements will be described in detail.

請參照圖1A,依據不同的功能,本實施例的低同調干涉 儀100主要分成四個端,分別為光源端LE、參考端RE、樣品端SE、量測端ME(或稱偵測端),分合光元件120位於這四端之間。光源端LE包括低同調光源110。參考端RE包括偏振控制器PC、準直透鏡1901與反射元件130。樣品端SE包括準直透鏡1902、物鏡140、掃描元件180及用以設置待測物OB的載台C。量測端ME包括光譜儀150。 Please refer to FIG. 1A , according to different functions, the low coherence interference of the present embodiment The instrument 100 is mainly divided into four ends, namely the light source end LE, the reference end RE, the sample end SE, and the measurement end ME (or detection end), and the splitting and combining element 120 is located between the four ends. The light source end LE includes a low coherence light source 110 . The reference terminal RE includes a polarization controller PC, a collimating lens 1901 and a reflective element 130 . The sample end SE includes a collimating lens 1902, an objective lens 140, a scanning element 180, and a stage C for setting the object to be tested OB. The measurement end ME includes a spectrometer 150 .

詳細來說,四個端之間分別藉由光傳輸元件1701~1704以使彼此之間的光耦合。低同調光源110藉由光傳輸元件1701與分合光元件120連接。參考端RE的偏振控制器PC藉由光傳輸元件1702與分合光元件120連接,且準直透鏡1901設置於偏振控制器PC的光路下游、反射元件130設置於準直透鏡1901的光路下游。樣品端SE的準直透鏡1902藉由光傳輸元件1703與分合光元件120連接,且掃描元件180位於準直透鏡1902的光路下游,物鏡140位於掃描元件180的光路下游,待測物OB設置於載台C上,且待測物OB位於物鏡140的光路下游。量測端ME的繞射光柵154藉由光傳輸元件1704與分合光元件120連接,且一維陣列影像感測器152位於繞射光柵154的光路下游。 In detail, the light transmission elements 1701 to 1704 are used between the four ends to couple light with each other. The low coherence light source 110 is connected to the light splitting and combining element 120 through the light transmission element 1701 . The polarization controller PC of the reference terminal RE is connected to the light splitting and combining element 120 through the optical transmission element 1702 , the collimating lens 1901 is disposed downstream of the optical path of the polarization controller PC, and the reflecting element 130 is disposed downstream of the optical path of the collimating lens 1901 . The collimating lens 1902 at the sample end SE is connected to the light splitting element 120 through the optical transmission element 1703, the scanning element 180 is located downstream of the optical path of the collimating lens 1902, the objective lens 140 is located downstream of the optical path of the scanning element 180, and the object to be tested OB is set on the stage C, and the object to be tested OB is located downstream of the optical path of the objective lens 140 . The diffraction grating 154 of the measurement end ME is connected to the light splitting and combining element 120 through the light transmission element 1704 , and the one-dimensional array image sensor 152 is located downstream of the diffraction grating 154 in the optical path.

並且,訊號控制模組160分別與樣品端SE的掃描元件180以及量測端ME的一維陣列影像感測器152連接。詳細來說,影像擷取控制器162與一維陣列影像感測器152耦接,訊號控制器164與掃描元件180連接。 Moreover, the signal control module 160 is respectively connected to the scanning element 180 of the sample end SE and the one-dimensional array image sensor 152 of the measurement end ME. Specifically, the image capture controller 162 is coupled to the one-dimensional array image sensor 152 , and the signal controller 164 is connected to the scanning element 180 .

於以下的段落中會詳細地說明本實施例的低同調干涉儀 100的運作原理。 The low coherence interferometer of this embodiment will be described in detail in the following paragraphs How the 100 works.

請參照圖1A,首先,在本實施例中,低同調光源110發出照明光束IB。照明光束IB藉由光傳輸元件1701傳遞至分合光元件120,分合光元件120將照明光束IB分成以不同光路行進的兩道光束,一道為射往參考端RE的參考光束RL,一道為射往樣品端SE的物體光束OL,以下分段說明參考光束RL與物體光束OL的光路。 Referring to FIG. 1A , first, in this embodiment, the low-coherence light source 110 emits an illuminating light beam IB. The illumination beam IB is transmitted to the splitting and combining element 120 by the optical transmission element 1701, and the splitting and combining element 120 divides the illumination beam IB into two beams traveling in different optical paths, one is the reference beam RL directed to the reference terminal RE, and the other is The object beam OL directed to the sample end SE, the following sections describe the optical paths of the reference beam RL and the object beam OL.

參考光束RL藉由光傳輸元件1702傳遞至準直透鏡1901。在傳遞的過程中,偏振控制器PC可修正光傳輸元件1702本身導致的參考光束RL的偏振態改變,以消除偏振態誤差。接著,參考光束RL再被準直透鏡1902準直化後,傳遞至反射元件130並被其反射,反射後的參考光束RL再沿原光路返回分合光元件120。 The reference beam RL is transmitted to the collimating lens 1901 through the light transmission element 1702 . During the transfer process, the polarization controller PC can correct the polarization state change of the reference beam RL caused by the light transmission element 1702 itself, so as to eliminate the polarization state error. Next, after the reference beam RL is collimated by the collimating lens 1902, it is transmitted to and reflected by the reflecting element 130, and the reflected reference beam RL returns to the splitting and combining element 120 along the original optical path.

物體光束OL藉由光傳輸元件1703傳遞至準直透鏡1902。接著,物體光束OL被準直透鏡1902準直化後,傳遞至掃描元件180。物體光束OL被掃描元件180反射後,被物鏡140聚焦而聚焦至待測物OB。物體光束OL被待測物OB反射後帶有待測物OB的影像資訊,反射後的物體光束OL沿原光路返回分合光元件120。 The object light beam OL is transmitted to the collimating lens 1902 through the light transmission element 1703 . Next, the object light beam OL is collimated by the collimating lens 1902 and then transmitted to the scanning element 180 . After the object light beam OL is reflected by the scanning element 180 , it is focused by the objective lens 140 to be focused on the object to be measured OB. The object light beam OL is reflected by the object to be measured OB and carries image information of the object to be measured OB, and the reflected object light beam OL returns to the splitting and combining element 120 along the original optical path.

當反射後的參考光束RL與物體光束OL返回分合光元件120後,被分合光元件120合併,以形成合成光束SL。因合成光束SL為一寬頻光,故當合成光束SL經由光傳輸元件1704傳遞至 光譜儀150,會被繞射光柵154繞射而使合成光束SL分成具有不同中心波長的子光束SL1~SLn,並穿透聚焦透鏡156後而傳遞至一維陣列影像感測器152上的各影像感測元件IS1~ISn,這些影像感測元件IS1~ISn接收由短到長的各中心波長的光強度與相位資訊。又,因合成光束SL係由參考光束SL與物體光束SL合併而成,而其會在一維陣列影像感測器152上形成光干涉圖案。 After the reflected reference light beam RL and the object light beam OL return to the light splitting and combining element 120, they are combined by the light splitting and combining element 120 to form a combined light beam SL. Since the combined light beam SL is a broadband light, when the combined light beam SL is transmitted to the light transmission element 1704 to The spectrometer 150 is diffracted by the diffraction grating 154 so that the composite light beam SL is divided into sub-beams SL1 ˜SLn with different center wavelengths, and passes through the focusing lens 156 to transmit to each image on the one-dimensional array image sensor 152 Sensing elements IS1 ˜ISn, these image sensing elements IS1 ˜ISn receive light intensity and phase information of each central wavelength from short to long. In addition, since the composite light beam SL is formed by combining the reference light beam SL and the object light beam SL, it will form a light interference pattern on the one-dimensional array image sensor 152 .

於以下的段落中會在以一比較實施例的低同調干涉儀100’來與本實施例的低同調干涉儀100’作比較,以凸顯本實施例的技術效果。 In the following paragraphs, the low-coherence interferometer 100' of a comparative embodiment will be compared with the low-coherence interferometer 100' of the present embodiment to highlight the technical effect of the present embodiment.

請參照圖1A、圖1B與圖2與圖3A,在本實施例與比較實施例中,若要針對待測物OB上的一點做檢測時(即A掃描(A-scan)),掃描元件180控制第一與第二高反射鏡片不振動,故被掃描元件180反射後的物體光束OL可照射在待測物OB上的一點。此時,影像擷取控制器162發出一維影像擷取控制訊號IG1’、IG1(如圖2、圖3A所示,其由分別由多個脈衝訊號PS’、PS所構成)以告知一維陣列影像感測器152擷取此點的光干涉圖案並將光干涉圖案轉換成電訊號(一維影像資訊),其中一維陣列影像感測器152會在各脈衝訊號PS'、PS的上升時刻或下降時刻截取此點的一維影像資訊,隨後並將此點的一維影像資訊傳送至影像擷取控制器162,其中訊號由低準位向高準位的轉變稱為此訊號的上升緣(Rising edge)且其所對應的時刻稱為上升時刻,反之,由高準位向低準位的轉變稱為此訊號的下降緣(Falling edge)且其所對應的時 刻稱為下降時刻。 1A , FIG. 1B , FIG. 2 , and FIG. 3A , in the present embodiment and the comparative embodiment, to detect a point on the object OB (ie, A-scan), the scanning element 180 controls the first and second high-reflection mirrors not to vibrate, so the object beam OL reflected by the scanning element 180 can be irradiated on a point on the object to be measured OB. At this time, the image capture controller 162 sends one-dimensional image capture control signals IG1', IG1 (as shown in FIG. 2 and FIG. 3A, which are composed of a plurality of pulse signals PS', PS respectively) to inform the one-dimensional image capture The array image sensor 152 captures the light interference pattern at this point and converts the light interference pattern into an electrical signal (one-dimensional image information), wherein the one-dimensional array image sensor 152 will increase the pulse signal PS', PS The one-dimensional image information of this point is intercepted at the time or the falling time, and then the one-dimensional image information of this point is sent to the image capture controller 162, wherein the transition of the signal from a low level to a high level is called the rise of the signal The rising edge and the corresponding time is called the rising time. On the contrary, the transition from high level to low level is called the falling edge of the signal and its corresponding time The moment is called the descent moment.

若要針對待測物OB上的一橫截面A1做檢測(即B掃描(B-scan)),於以下的段落中會依據如圖2比較實施例不同訊號的時序關係圖與如圖3A本實施例不同訊號的時序關係圖兩大部分來作說明。 In order to detect a cross-section A1 on the object OB (ie, B-scan), in the following paragraphs, the timing diagram of different signals in the embodiment as shown in FIG. 2 is compared with that in FIG. 3A . Two parts of the timing relationship diagram of different signals in the embodiment are described.

首先,先說明比較實施例,請參照圖1B並搭配圖2,在比較實施例中,若要進行B掃描,影像擷取控制器162會對一維陣列影像感測器152發出一維影像擷取控制訊號IG1’。二維影像擷取控制訊號IG2’由外部晶片(未示出)提供以告知一維陣列影像感測器152要擷取某一段時間區間內的一維影像資訊。訊號控制器164’亦會對掃描元件180發出掃描元件控制訊號SCL’,以控制掃描元件180的作動。於以下的段落中會分成不同第一、第二、第三時間區間T1~T3來分別說明不同元件的作動,其中第一、第二、第三時間區間T1~T3分別為0~t1秒、t1~t2秒、t2~t3秒。 First, the comparative embodiment will be described first. Please refer to FIG. 1B in conjunction with FIG. 2 . In the comparative embodiment, to perform B-scanning, the image capture controller 162 sends a one-dimensional image capture to the one-dimensional array image sensor 152 . Take control signal IG1'. The 2D image capture control signal IG2' is provided by an external chip (not shown) to inform the 1D array image sensor 152 to capture 1D image information within a certain period of time. The signal controller 164' also sends a scan element control signal SCL' to the scan element 180 to control the operation of the scan element 180. In the following paragraphs, it will be divided into different first, second and third time intervals T1~T3 to describe the actions of different components, wherein the first, second and third time intervals T1~T3 are 0~t1 seconds, t1~t2 seconds, t2~t3 seconds.

在第一時間區間T1中,二維影像擷取控制訊號IG2’用以告知一維陣列影像感測器152要擷取某一段時間區間內的一維影像資訊,其中因二維影像擷取控制訊號IG2’的振幅值大於零,故第一時間區間T1為二維影像擷取控制訊號IG2’的開啟時間區間,因此,一維陣列影像感測器152會在一維、二維影像擷取控制訊號IG1’、IG2’重疊的時間區間擷取待測物OB不同點的一維影像資訊。同時,第一時間區間T1亦為掃描元件控制訊號SCL’的強度由0至正的極值對應到的時間區間,且掃描元件180會在 此時間區間內受控而使其第一高反射鏡片不振動,而第二高反射鏡片會往一方向轉動,故在第一時間區間T1內,物體光束OL受第二高反射鏡片轉動的關係,沿著待測物OB表面的一掃描方向SD照射,如圖4上半部所示,而圖4上半部中的每一點P1~P18分別對應到脈衝訊號PS1’~PSN’,更詳細來說,在每一個脈衝訊號PS’的時間區間內,一維陣列影像感測器152就擷取相應點的一維影像資訊,舉例來說,在第一個脈衝訊號PS1的時間區間內,一維陣列影像感測器152擷取在點P1的一維影像資訊,其他以此類推。這些不同點P1~P18的一維影像資訊構成了在此橫截面A1的二維影像資訊。應注意的是,所屬技術領域中具有通常知識者可依據自身需求調整上述多個點的數量,本發明並不以此為限。 In the first time interval T1, the 2D image capture control signal IG2' is used to inform the 1D array image sensor 152 to capture 1D image information within a certain period of time. The amplitude value of the signal IG2' is greater than zero, so the first time interval T1 is the ON time interval of the two-dimensional image capture control signal IG2'. Therefore, the one-dimensional array image sensor 152 captures one-dimensional and two-dimensional images. The one-dimensional image information of different points of the object to be tested OB is captured in the overlapping time interval of the control signals IG1' and IG2'. Meanwhile, the first time interval T1 is also the time interval corresponding to the intensity of the scanning element control signal SCL' from 0 to the positive extreme value, and the scanning element 180 will This time interval is controlled so that the first high-reflection lens does not vibrate, while the second high-reflection lens rotates in one direction. Therefore, in the first time interval T1, the object beam OL is affected by the rotation of the second high-reflection lens. , irradiating along a scanning direction SD on the surface of the object OB, as shown in the upper part of Fig. 4, and each point P1~P18 in the upper part of Fig. 4 corresponds to the pulse signal PS1'~PSN', more detailed For example, in the time interval of each pulse signal PS', the one-dimensional array image sensor 152 captures the one-dimensional image information of the corresponding point. For example, in the time interval of the first pulse signal PS1, The one-dimensional array image sensor 152 captures the one-dimensional image information at the point P1, and so on. The one-dimensional image information of these different points P1-P18 constitutes the two-dimensional image information of the cross section A1. It should be noted that those with ordinary knowledge in the art can adjust the number of the above-mentioned points according to their own needs, and the present invention is not limited thereto.

接著,在第二時間區間T2中,一維、二維影像擷取控制訊號IG1’、IG2’皆為關閉時間區間,故一維陣列影像感測器152不擷取影像,掃描元件控制訊號SCL’的強度由正的極值至0,掃描元件180會在此時間區間內受掃描元件控制訊號SCL’控制而使其第一高反射鏡片稍微偏移,而第二高反射鏡片會往反方向轉動,故在第二時間區間T2內,物體光束OL受第一、第二高反射鏡片轉動的關係,沿著待測物OB表面照射,即由橫截面A1的最下方往橫截面A2的最上方行進,如圖4中間部分所示。 Next, in the second time interval T2, the one-dimensional and two-dimensional image capture control signals IG1', IG2' are both off time intervals, so the one-dimensional array image sensor 152 does not capture images, and the scanning element control signal SCL The intensity of ' is from the positive extreme value to 0. The scanning element 180 will be controlled by the scanning element control signal SCL' during this time interval, so that the first high-reflection lens is slightly shifted, and the second high-reflection lens will go in the opposite direction. Therefore, in the second time interval T2, the object beam OL is irradiated along the surface of the object to be tested OB due to the rotation of the first and second high-reflection mirrors, that is, from the bottom of the cross-section A1 to the bottom of the cross-section A2. Proceed upwards, as shown in the middle part of Figure 4.

接著,在第三時間區間T3中,開始進行擷取下一橫截面A2,其作法與擷取橫截面A1的作法類似,於此不再贅述,因此在第三時間區間T3物體光束OL會在橫截面A2上沿著掃描方向 SD照射待測物OB,且一維陣列影像感測器152會受一維、二維影像擷取控制訊號IG1’、IG2’控制而擷取不同點P1’~P18’的一維影像資訊,如圖4下半部分所示,藉由上述的流程進行多次後,以使物體光束OL掃描整個待測物OB,以獲取三維影像資訊。 Then, in the third time interval T3, the next cross-section A2 is captured. The method is similar to the method of capturing the cross-section A1, which will not be repeated here. Therefore, in the third time interval T3, the object beam OL will be along the scan direction on cross section A2 SD illuminates the object to be tested OB, and the one-dimensional array image sensor 152 is controlled by the one-dimensional and two-dimensional image capture control signals IG1' and IG2' to capture one-dimensional image information at different points P1' to P18'. As shown in the lower half of FIG. 4 , after the above process is performed for many times, the object beam OL scans the entire object to be tested OB to obtain three-dimensional image information.

但是,因影像擷取控制器162與外部晶片分屬於不同晶片,不同晶片所發出的訊號的時序與對應的基頻訊號的時序相關,故其所發出的一維、二維影像擷取控制訊號IG1’、IG2’因基頻訊號不同的關係導致在時序上不同步,其中所謂「在時序上不同步」的意思是說,如圖2的第一時間區間T1的第一組一維、二維影像擷取控制訊號IG1’、IG2’兩者之間的起始時刻差值△t,與其他組(例如是第二時間區間T2的第二組)一維、二維影像擷取控制訊號IG1’、IG2’兩者之間的起始時刻差值△t’不相同,而此導致在橫截面A1、A2生成的二維影像在後續影像組合會有影像誤差(包含錯位或扭曲等)的問題。此外,由於控制器164’與影像擷取控制器162亦分屬於不同晶片,故掃描元件控制訊號SCL’與一維影像擷取控制訊號IG1’的時序也不同步,因此掃描元件180的作動也並未與一維陣列影像感測器152擷取影像的時序相符,而此亦會產生影像誤差的問題。 However, since the image capture controller 162 and the external chip belong to different chips, the timing of the signals sent by the different chips is related to the timing of the corresponding baseband signal, so the one-dimensional and two-dimensional image capture control signals sent by the controller 162 IG1', IG2' are not synchronized in time sequence due to the different relationship between the fundamental frequency signals. The so-called "not synchronized in time sequence" means that the first group of one-dimensional and two-dimensional in the first time interval T1 in Figure 2 The start time difference Δt between the two-dimensional image capture control signals IG1', IG2', and other groups (eg, the second group of the second time interval T2) one-dimensional and two-dimensional image capture control signals The difference Δt' between the starting times of IG1' and IG2' is different, which leads to image errors (including misalignment or distortion, etc.) in the 2D images generated in the cross-sections A1 and A2 in the subsequent image combination. The problem. In addition, since the controller 164' and the image capture controller 162 also belong to different chips, the timings of the scan element control signal SCL' and the one-dimensional image capture control signal IG1' are not synchronized, so the operation of the scan element 180 is also The timing of capturing images by the one-dimensional array image sensor 152 does not match, and this also causes the problem of image errors.

相對而言,請參照圖1A與圖3A,本實施例相較於比較實施例,主要的差異在於:影像擷取控制器162會對訊號控制器164發出同步訊號Sync。訊號控制器164可透過一傳輸介面接收同步訊號Sync,傳輸介面如可程式化功能介面(programmable function interface,PFI),但不以此為限。訊號控制器164再根據此同步訊號Sync對影像擷取控制器162發出二維影像擷取控制訊號IG2(時序關係如圖3A所示)以及對掃描元件180發出掃描元件控制訊號SCL(時序關係如圖3A所示)。由於同步訊號Sync及一維影像擷取控制訊號IG1的來源都是由同一個影像擷取控制器162,因此此二訊號Sync、IG1時序彼此同步。而訊號控制器164依據同步訊號Sync產生二維影像擷取控制訊號IG2,因此二維影像擷取控制訊號IG2的時序與同步訊號Sync同步,進而與一維影像擷取控制訊號IG1的時序同步,以圖3A的一維、二維影像擷取控制訊號IG1、IG2來舉例,所謂「在時序上彼此同步」的意思是說:第一組一維、二維影像擷取控制訊號IG1、IG2兩者之間的起始時刻差值△t1,與其他組(例如是第二組)一維、二維影像擷取控制訊號IG1、IG2兩者之間的起始時刻差值△t1相同,因此,當一維陣列影像感測器152受控於時序關係彼此同步的一維、二維影像擷取控制訊號IG1、IG2以擷取不同橫截面的影像資訊時,較不容易產生影像誤差的問題,故本發明實施例的低同調干涉儀100具有良好的影像品質。 Relatively speaking, please refer to FIG. 1A and FIG. 3A , the main difference between the present embodiment and the comparative embodiment is that the image capture controller 162 sends a synchronization signal Sync to the signal controller 164 . The signal controller 164 can receive the synchronization signal Sync through a transmission interface such as a programmable function interface. function interface, PFI), but not limited to this. The signal controller 164 then sends the two-dimensional image capture control signal IG2 to the image capture controller 162 according to the synchronization signal Sync (the timing relationship is shown in FIG. 3A ) and the scanning device control signal SCL to the scanning element 180 (the timing relationship is shown in FIG. 3A ). shown in Figure 3A). Since the source of the synchronization signal Sync and the one-dimensional image capture control signal IG1 is the same image capture controller 162, the timings of the two signals Sync and IG1 are synchronized with each other. The signal controller 164 generates the two-dimensional image capture control signal IG2 according to the synchronization signal Sync. Therefore, the timing of the two-dimensional image capture control signal IG2 is synchronized with the synchronization signal Sync, and further synchronized with the timing of the one-dimensional image capture control signal IG1. Taking the one-dimensional and two-dimensional image capture control signals IG1 and IG2 in FIG. 3A as an example, the so-called "synchronizing with each other in timing" means: the first set of one-dimensional and two-dimensional image capture control signals IG1 and IG2 The starting time difference Δt1 between them is the same as the starting time difference Δt1 between the one-dimensional and two-dimensional image capture control signals IG1 and IG2 of other groups (such as the second group), so , when the one-dimensional array image sensor 152 is controlled by the one-dimensional and two-dimensional image capture control signals IG1 and IG2 that are synchronized with each other to capture image information of different cross-sections, the problem of image error is less likely to occur , so the low coherence interferometer 100 of the embodiment of the present invention has good image quality.

請參照圖3B,圖3B為本發明的另一種訊號控制方式,其主要差異在於:在此實施例中,同步訊號Sync與一維影像擷取控制訊號IG1例如是波型相同。當影像擷取控制器162接收來自訊號控制器164的二維影像擷取控制訊號IG2時,會與其本身發出的一維影像擷取控制IG1進行一個訊號合成的步驟,其中合成 的方式例如是將一維、二維影像擷取控制訊號IG1、IG2進行乘法或邏輯運算。經過上述的步驟後,因二維影像擷取控制訊號IG2基於同步訊號Sync而產生,故此二訊號IG2、Sync時序上彼此同步。並且,合成影像擷取控制訊號SGL由此時序彼此同步的一維、二維影像擷取控制訊號IG1、IG2合成,故,當一維陣列影像感測器152受控於此合成影像擷取控制訊號SGL以擷取待測物OB不同橫截面A1、A2的影像資訊時,亦不會產生影像誤差的問題。 Please refer to FIG. 3B , which is another signal control method of the present invention. The main difference is that in this embodiment, the synchronization signal Sync and the one-dimensional image capture control signal IG1 have the same waveform, for example. When the image capture controller 162 receives the two-dimensional image capture control signal IG2 from the signal controller 164, it will perform a signal synthesis step with the one-dimensional image capture control signal IG1 sent by itself, wherein the synthesis is performed. For example, the one-dimensional and two-dimensional image capture control signals IG1 and IG2 are multiplied or logically operated. After the above steps, since the two-dimensional image capture control signal IG2 is generated based on the synchronization signal Sync, the two signals IG2 and Sync are synchronized with each other in timing. In addition, the composite image capture control signal SGL is synthesized from the one-dimensional and two-dimensional image capture control signals IG1 and IG2 whose timings are synchronized with each other. Therefore, when the one-dimensional array image sensor 152 is controlled by the composite image capture control When the signal SGL is used to capture the image information of the different cross-sections A1 and A2 of the object to be tested OB, the problem of image error will not occur.

此外,由於在圖3A與圖3B的實施例中,訊號控制器164亦根據同步訊號Sync發出掃描元件控制訊號SCL至掃描元件180,故掃描元件控制訊號SCL亦與一維、二維影像擷取控制訊號IG1、IG2同步,此有助於掃描元件180的掃瞄過程與一維陣列影像感測器152的影像擷取過程同步。 In addition, in the embodiment shown in FIG. 3A and FIG. 3B , the signal controller 164 also sends the scan element control signal SCL to the scan element 180 according to the synchronization signal Sync, so the scan element control signal SCL is also related to one-dimensional and two-dimensional image capture. The control signals IG1 and IG2 are synchronized, which helps to synchronize the scanning process of the scanning element 180 with the image capturing process of the one-dimensional array image sensor 152 .

此外,於上述的實施例中,二維影像擷取控制訊號IG2的開啟時間區間涵蓋了一維影像擷取控制訊號IG1,而一維陣列影像感測器152會在一維、二維影像擷取控制訊號IG1、IG2重疊的時間區間進行影像擷取。於其他的實施例中,亦可以採用如圖3A的二維影像擷取控制訊號IG2a的型態,於此實施例中,二維影像擷取控制訊號IG2a當作是開始擷取二維影像資料的觸發訊號,而在第一時間區間T1內的一維影像擷取控制訊號IG1內的脈衝訊號PS的數量例如是選定的,以圖3A的一維、二維影像擷取控制訊號IG1、IG2a為例,使用者可藉由輸入介面以告知一維陣列影像感測器152在第一時間區間T1內進行擷取待測物OB上的某一橫 截面的影像資訊,當一維陣列影像感測器152接收二維影像擷取控制訊號IG2a後,得知開始要擷取待測物OB上的某一橫截面的影像資訊,並且在一維影像擷取控制訊號IG1的多個脈衝訊號的上升或下降時刻擷取影像資訊,其他時間區間以此類推,本發明並不以此為限。 In addition, in the above-mentioned embodiment, the ON time interval of the two-dimensional image capture control signal IG2 covers the one-dimensional image capture control signal IG1, and the one-dimensional array image sensor 152 captures one-dimensional and two-dimensional images. The time interval in which the control signals IG1 and IG2 are overlapped is taken for image capture. In other embodiments, the type of the 2D image capture control signal IG2a as shown in FIG. 3A can also be used. In this embodiment, the 2D image capture control signal IG2a is regarded as the start of capturing 2D image data. , and the number of pulse signals PS in the one-dimensional image capture control signal IG1 in the first time interval T1 is selected, for example, with the one-dimensional and two-dimensional image capture control signals IG1 and IG2a of FIG. 3A For example, the user can use the input interface to inform the one-dimensional array image sensor 152 to capture a certain horizontal dimension on the object OB within the first time interval T1 The image information of the cross-section, when the one-dimensional array image sensor 152 receives the two-dimensional image capture control signal IG2a, it knows that the image information of a certain cross-section on the object OB is to be captured, and the one-dimensional image The image information is captured at the rising or falling time of a plurality of pulse signals of the capture control signal IG1, and other time intervals are deduced by analogy, and the present invention is not limited to this.

應注意的是,上述實施例的光學架構僅為示例,所屬技術領域中具有通常知識者可依據其需求對應調整各光學元件的數量、擺設位置,本發明並不以此為限。 It should be noted that the optical structure of the above-mentioned embodiment is only an example, and those skilled in the art can adjust the quantity and arrangement position of each optical element according to their needs, and the present invention is not limited thereto.

在此必須說明的是,下述實施例沿用前述實施例的部分內容,省略了相同技術內容的說明,關於相同的元件名稱可以參考前述實施例的部分內容,下述實施例不再重複贅述。 It must be noted here that the following embodiments follow parts of the previous embodiments, omitting the description of the same technical content, and the same component names can refer to part of the previous embodiments, which will not be repeated in the following embodiments.

圖5至圖7為本發明不同實施例的低同調干涉儀的架構示意圖。 5 to 7 are schematic structural diagrams of low coherence interferometers according to different embodiments of the present invention.

請參照圖5,圖5的低同調干涉儀100a大致上類似於圖1的低同調干涉儀,其主要差異在於:在低同調干涉儀100a中,訊號控制模組160a中所採用的影像擷取控制器162a的態樣為可產生訊號的微控制器(micro controller),其例如是單晶片微控制器或多晶片微控制器,其中,單晶片微控制器係指訊號產生器(signal generator)、中央處理器(Central Processing Unit)、類比數位轉換器(Analog-to-digital converter,ADC)、記憶體(Memory)、定時/計數器(timer/counter)、各種輸入輸出介面等都整合在一塊積體電路晶片,或者是,在另一實施例中,單晶片微控制器僅只有包括上述 的訊號產生器。另一方面,多晶片微控制器則為將上述不同功能的元件(訊號產生器、中央處理器、類比數位轉換器等)分別設置於不同晶片上,且將這些晶片以黏著的方式設置於基板上,所構成的整合控制器。並且,一維陣列影像感測器152係與處理器PR連接。 Please refer to FIG. 5 , the low-coherence interferometer 100 a of FIG. 5 is substantially similar to the low-coherence interferometer of FIG. 1 , and the main difference is: in the low-coherence interferometer 100 a , the image capture used in the signal control module 160 a The form of the controller 162a is a microcontroller capable of generating signals, such as a single-chip microcontroller or a multi-chip microcontroller, wherein the single-chip microcontroller refers to a signal generator , central processing unit (Central Processing Unit), analog-to-digital converter (Analog-to-digital converter, ADC), memory (Memory), timer/counter (timer/counter), various input and output interfaces, etc. bulk circuit chip, or, in another embodiment, a single-chip microcontroller that includes only the above signal generator. On the other hand, in the multi-chip microcontroller, the above-mentioned components with different functions (signal generator, central processing unit, analog-to-digital converter, etc.) are respectively arranged on different chips, and these chips are arranged on the substrate in an adhesive manner On, the constituted integrated controller. In addition, the one-dimensional array image sensor 152 is connected to the processor PR.

於以下的段落中會詳細說明圖1A、圖5實施例的低同調干涉儀100、100a掃描與擷取影像的差異之處。 In the following paragraphs, the differences between scanning and capturing images of the low-coherence interferometers 100 and 100a of the embodiments of FIG. 1A and FIG. 5 will be described in detail.

圖5的低同調干涉儀100a的掃描與擷取影像的方式大致上類似於圖1A的低同調干涉儀100,其主要差異在於:微控制器型態的影像擷取控制器162a相較於影像擷取卡型態的影像擷取控制器162是不具有影像預處理的能力,其用途主要在於控制一維陣列影像感測器152擷取影像資訊,因此其成本相較於影像擷取卡型態的影像擷取控制器162為低。故,在本實施例中,一維陣列影像感測器152將擷取的一維、二維或多個二維影像資訊構成的三維影像資訊直接傳送至處理器PR,而不經過影像擷取控制器162a,以進行後續資料轉換。 The manner of scanning and capturing images of the low coherence interferometer 100a of FIG. 5 is substantially similar to that of the low coherence interferometer 100 of FIG. 1A, the main difference is that the image capture controller 162a of the microcontroller type is compared with the image The image capture controller 162 of the capture card type does not have the capability of image preprocessing, and its purpose is mainly to control the one-dimensional array image sensor 152 to capture image information, so its cost is lower than that of the image capture card type. The state of the image capture controller 162 is low. Therefore, in this embodiment, the one-dimensional array image sensor 152 directly transmits the three-dimensional image information formed by the captured one-dimensional, two-dimensional or multiple two-dimensional image information to the processor PR without image capture. Controller 162a for subsequent data conversion.

請參照圖6,圖6的低同調干涉儀100b大致上類似於圖1A的低同調干涉儀100且其採用的訊號控制方式例如是採取圖3B,其主要差異在於:在低同調干涉儀100b中,訊號控制模組160b內的影像擷取控制器162b包括微處理器1621與訊號合成元件1622,其中訊號合成元件1622與一維陣列影像感測器152、微處理器1621及訊號控制器164耦接,且一維陣列影像感測器152 係與處理器PR連接。此外,微控制器1621例如是單晶片或多晶片微控制器。 Please refer to FIG. 6 , the low-coherence interferometer 100b of FIG. 6 is substantially similar to the low-coherence interferometer 100 of FIG. 1A and the signal control method adopted is, for example, as shown in FIG. 3B , the main difference is: in the low-coherence interferometer 100b , the image capture controller 162b in the signal control module 160b includes a microprocessor 1621 and a signal synthesis element 1622, wherein the signal synthesis element 1622 is coupled with the one-dimensional array image sensor 152, the microprocessor 1621 and the signal controller 164 connected, and the one-dimensional array image sensor 152 is connected to the processor PR. In addition, the microcontroller 1621 is, for example, a single-die or multi-die microcontroller.

於以下的段落中會詳細說明圖1、圖6實施例的低同調干涉儀100、100b掃描與擷取影像的差異之處。 In the following paragraphs, the differences between scanning and capturing images of the low-coherence interferometers 100 and 100b of the embodiments of FIG. 1 and FIG. 6 will be described in detail.

圖6的低同調干涉儀100b的掃描與擷取影像的方式大致上類似於圖1A的低同調干涉儀100a,其主要差異在於:微處理器1621會對訊號合成器1622與訊號控制器164發出同步訊號Sync,其中同步訊號Sync即為一維影像擷取控制訊號IG1。訊號控制器164接收同步訊號Sync後所發出的二維影像擷取控制訊號IG2係傳送至訊號合成器1622。因此,訊號合成器1622再接收同步訊號Sync、二維影像擷取控制訊號IG2後合成合成影像擷取控制訊號SGL,合成影像擷取控制訊號SGL再傳送至一維陣列影像感測器152擷取影像資訊。類似地,因微控制器1621相較於影像擷取卡型態的影像擷取控制器162來說其並不具有影像預處理的能力,其用途主要在於發出同步訊號Sync(一維影像擷取控制訊號IG1),且其成本相較於影像擷取卡型態的影像擷取控制器162為低。故,在本實施例中,一維陣列影像感測器152將擷取的一維、二維或多個二維影像資訊構成的三維影像資訊直接傳送至處理器PR,以進行後續資料轉換。 The manner of scanning and capturing images of the low-coherence interferometer 100b of FIG. 6 is substantially similar to the low-coherence interferometer 100a of FIG. The synchronization signal Sync, wherein the synchronization signal Sync is the one-dimensional image capture control signal IG1. After the signal controller 164 receives the synchronization signal Sync, the 2D image capture control signal IG2 is sent to the signal synthesizer 1622 . Therefore, the signal synthesizer 1622 receives the synchronization signal Sync and the 2D image capture control signal IG2, and then synthesizes the composite image capture control signal SGL. The composite image capture control signal SGL is then sent to the 1D array image sensor 152 for capture. video information. Similarly, since the microcontroller 1621 does not have the capability of image preprocessing compared to the image capture controller 162 in the form of an image capture card, its purpose is mainly to issue a synchronization signal Sync (one-dimensional image capture control signal IG1), and its cost is lower than that of the video capture controller 162 of the video capture card type. Therefore, in this embodiment, the one-dimensional array image sensor 152 directly transmits the three-dimensional image information formed by the captured one-dimensional, two-dimensional or multiple two-dimensional image information to the processor PR for subsequent data conversion.

請參照圖7,圖7的低同調干涉儀100c大致上類似於圖1A的低同調干涉儀100且其採用的訊號控制方式例如是採取圖3A,其主要差異在於:在訊號控制模組160c中,影像擷取控制器 162與訊號控制器164整合於同一晶片16c。故,一維、二維影像擷取控制訊號IG1、IG2與掃描元件控制訊號SCL時序上彼此同步,故不會產生影像誤差的問題。 Please refer to FIG. 7 , the low-coherence interferometer 100 c of FIG. 7 is substantially similar to the low-coherence interferometer 100 of FIG. 1A and the signal control method adopted is, for example, the one shown in FIG. 3A , the main difference is: in the signal control module 160 c , image capture controller 162 and the signal controller 164 are integrated in the same chip 16c. Therefore, the one-dimensional and two-dimensional image capturing control signals IG1 and IG2 and the scanning element control signal SCL are synchronized with each other in time sequence, so there is no problem of image error.

綜上所述,在本發明實施例的訊號控制模組與低同調干涉儀中,影像擷取控制器與訊號控制器分別發出時序上彼此同步的一維、二維影像擷取控制訊號。具體來說,於一實施例中,影像擷取控制器與訊號控制器分屬於不同晶片,影像擷取控制器發出同步訊號至訊號控制器,訊號控制器根據此同步訊號發出與影像擷取控制器所發出的二維影像擷取控制訊號,據此以使一維、二維影像擷取控制訊號兩者彼此同步。再一實施例中,影像擷取控制器可進一步將一維、二維影像擷取控制訊號合成以得一合成影像擷取控制訊號。於另一實施例中,亦可將影像擷取控制器與訊號控制器整合於同一晶片,故不會產生因晶片基頻訊號不同而二訊號時序彼此不同的問題,故此方式亦可使一維、二維影像擷取控制訊號兩者彼此同步。因此當一維陣列影像感測器藉由此一維、二維影像擷取控制訊號(或由此一維、二維影像擷取控制訊號合成的合成影像擷取控制訊號)擷取待測物的影像資訊時,較不容易產生影像誤差的問題,故本發明實施例的低同調干涉儀具有良好的影像品質。 To sum up, in the signal control module and the low coherence interferometer according to the embodiments of the present invention, the image capture controller and the signal controller respectively send out one-dimensional and two-dimensional image capture control signals that are synchronized with each other in timing. Specifically, in one embodiment, the image capture controller and the signal controller belong to different chips, the image capture controller sends a synchronization signal to the signal controller, and the signal controller sends out and controls the image capture according to the synchronization signal The 2D image capture control signal sent by the device is used to synchronize the 1D and 2D image capture control signals with each other. In yet another embodiment, the image capture controller may further combine the one-dimensional and two-dimensional image capture control signals to obtain a composite image capture control signal. In another embodiment, the image capture controller and the signal controller can also be integrated into the same chip, so there is no problem that the timings of the two signals are different from each other due to the difference of the chip baseband signals. , 2D image capture control signals are synchronized with each other. Therefore, when the 1D array image sensor captures the object to be tested by the 1D, 2D image capture control signal (or the synthesized image capture control signal synthesized from the 1D, 2D image capture control signal) When the image information is obtained, the problem of image error is less likely to occur, so the low coherence interferometer of the embodiment of the present invention has good image quality.

此外,在基於重複的二維影像掃描應用中,如光學同調斷層掃描血管造影術,由於上述一維、二維影像擷取控制訊號同步後,使得待測物於每次重複的二維影像掃描所對應時於待測物 上實體的掃瞄範圍更加相同,進而提升造影的品質與增進影像的動態範圍。 In addition, in applications based on repetitive 2D image scanning, such as optical coherence tomography angiography, since the 1D and 2D image capture control signals are synchronized, the object to be tested is scanned in each repetitive 2D image. corresponding to the analyte The scanning range of the upper body is more uniform, thereby improving the quality of the imaging and improving the dynamic range of the image.

IG1、IG2:一維、二維影像擷取控制訊號 IG1, IG2: 1D, 2D image capture control signal

Sync:同步訊號 Sync: sync signal

SCL:掃描元件控制訊號 SCL: Scanning element control signal

SGL:合成影像擷取控制訊號 SGL: Synthetic image capture control signal

t1~t3:時間 t1~t3: time

T1~T3:第一至第三時間區間 T1~T3: The first to third time interval

PS、PS1、PSN:脈衝訊號 PS, PS1, PSN: pulse signal

Claims (20)

一種訊號控制模組,整合於一低同調干涉儀,該低同調干涉儀包括一一維陣列影像感測器,該訊號控制模組包括:一影像擷取控制器,用以發出一一維影像擷取控制訊號以控制該一維陣列影像感測器擷取一待測物的一維影像資訊;以及一訊號控制器,與該影像擷取控制器耦接,且用以發出一二維影像擷取控制訊號,其中,該一維影像擷取控制訊號與該二維影像擷取控制訊號彼此同步,且該一維陣列影像感測器根據該一維影像擷取控制訊號以及該二維影像擷取控制訊號擷取該待測物在多個沿一方向且在不同位置處的一維影像資訊,且該些不同位置處所對應的該些一維影像資訊構成該待測物的一二維影像資訊。 A signal control module is integrated in a low-coherence interferometer, the low-coherence interferometer includes a one-dimensional array image sensor, the signal control module includes: an image capture controller for sending out a one-dimensional image capturing control signals to control the one-dimensional array image sensor to capture one-dimensional image information of an object to be measured; and a signal controller coupled to the image capturing controller and used for sending a two-dimensional image Capture control signal, wherein the 1D image capture control signal and the 2D image capture control signal are synchronized with each other, and the 1D array image sensor captures the control signal and the 2D image according to the 1D image capture control signal The capture control signal captures a plurality of one-dimensional image information of the object to be tested along a direction and at different positions, and the one-dimensional image information corresponding to the different positions constitutes a two-dimensional image of the object to be tested video information. 如請求項1所述的訊號控制模組,其中,該影像擷取控制器與該訊號控制器分屬於不同晶片,該影像擷取控制器更發出與該一維影像擷取控制訊號同步的一同步訊號至該訊號控制器,其中該訊號控制器根據該同步訊號發出該二維影像擷取控制訊號至該影像擷取控制器。 The signal control module according to claim 1, wherein the image capture controller and the signal controller belong to different chips, and the image capture controller further sends out a synchronization signal with the one-dimensional image capture control signal. A synchronization signal is sent to the signal controller, wherein the signal controller sends the two-dimensional image capture control signal to the image capture controller according to the synchronization signal. 如請求項2所述的訊號控制模組,其中該影像擷取控制器基於該一維影像擷取控制訊號與該二維影像擷取控制訊號合成一合成影像擷取控制訊號,並將該合成影像擷取控制訊號傳遞至該一維陣列影像感測器,該一維陣列影像感測器根據該合成影 像擷取控制訊號擷取該待測物在該些沿一方向且在不同位置處的一維影像資訊。 The signal control module of claim 2, wherein the image capture controller synthesizes a composite image capture control signal based on the one-dimensional image capture control signal and the two-dimensional image capture control signal, and combines the composite image capture control signal The image capture control signal is transmitted to the one-dimensional array image sensor, and the one-dimensional array image sensor is based on the composite image The image capture control signal captures the one-dimensional image information of the object to be tested along one direction and at different positions. 如請求項3所述的訊號控制模組,其中該影像擷取控制器將該一維影像擷取控制訊號與該二維影像擷取控制訊號進行乘法或邏輯運算,以合成該合成影像擷取控制訊號。 The signal control module of claim 3, wherein the image capture controller performs multiplication or logical operation on the one-dimensional image capture control signal and the two-dimensional image capture control signal to synthesize the composite image capture control signal. 如請求項4所述的訊號控制模組,其中該影像擷取控制器更包括一訊號合成元件與一微控制器,其中該微控制器用以產生該同步訊號,該訊號合成元件基於該同步訊號與該二維影像擷取控制訊號以合成該合成影像擷取控制訊號。 The signal control module of claim 4, wherein the image capture controller further comprises a signal synthesis element and a microcontroller, wherein the microcontroller is used for generating the synchronization signal, and the signal synthesis element is based on the synchronization signal and the two-dimensional image capture control signal to synthesize the composite image capture control signal. 如請求項1所述的訊號控制模組,其中該影像擷取控制器與該訊號控制器整合於同一晶片。 The signal control module of claim 1, wherein the image capture controller and the signal controller are integrated in the same chip. 如請求項1所述的訊號控制模組,其中該影像擷取控制器包括一影像擷取卡。 The signal control module of claim 1, wherein the image capture controller comprises an image capture card. 如請求項1所述的訊號控制模組,其中該影像擷取控制器為一微控制器。 The signal control module of claim 1, wherein the image capture controller is a microcontroller. 如請求項1所述的訊號控制模組,其中該訊號控制器為一資料擷取卡。 The signal control module of claim 1, wherein the signal controller is a data capture card. 一種低同調干涉儀,包括:一低同調光源,用以發出一照明光束;一分合光元件,設置於該照明光束的傳遞路徑上,該分合光元件將該照明光束分光而成一參考光束與一物體光束,其中該待測物位於該物體光束的傳遞路徑上; 一反射元件,設置於該參考光束的傳遞路徑上;一掃描元件,設置於該物體光束的傳遞路徑上,且位於該分合光元件與該待測物之間,其中,該參考光束被該反射元件反射而傳遞至該分合光元件,且該物體光束依序被該掃描元件與該待測物反射後傳遞至該分合光元件,反射後的該參考光束與反射後的該物體光束被該分合光元件合光而形成一合成光束,其中該掃描元件用以調整該物體光束照射該待測物的位置;一維陣列影像感測器,設置於該合成光束的傳遞路徑上;以及一訊號控制模組,包括:一影像擷取控制器,與該一維陣列影像感測器耦接,且用以發出一一維影像擷取控制訊號以控制該一維陣列影像感測器擷取一待測物的一維影像資訊;一訊號控制器,與該影像擷取控制器及該掃描元件耦接,且用以發出一二維影像擷取控制訊號,其中,其中,該一維影像擷取控制訊號與該二維影像擷取控制訊號彼此同步,且該一維陣列影像感測器根據該一維影像擷取控制訊號以及該二維影像擷取控制訊號擷取該待測物在多個沿一方向且在不同位置處的一維影像資訊,且該些不同位置處所對應的該些一維影像資訊構成該待測物的一二維影像資訊。 A low-coherence interferometer, comprising: a low-coherence light source for emitting an illuminating beam; a splitting and combining element arranged on the transmission path of the illuminating beam, the splitting and combining element splitting the illuminating beam into a reference beam and an object beam, wherein the object to be tested is located on the transmission path of the object beam; A reflective element is arranged on the transmission path of the reference beam; a scanning element is arranged on the transmission path of the object beam, and is located between the splitting and combining element and the object to be measured, wherein the reference beam is transmitted by the object. The reflective element is reflected and transmitted to the splitting and combining element, and the object beam is sequentially reflected by the scanning element and the object to be measured and then transmitted to the splitting and combining element. The reflected reference beam and the reflected object beam The light is combined by the light splitting and combining element to form a combined beam, wherein the scanning element is used to adjust the position where the object beam illuminates the object to be tested; a one-dimensional array image sensor is arranged on the transmission path of the combined beam; and a signal control module, including: an image capture controller, coupled to the one-dimensional array image sensor, and used for issuing a one-dimensional image capture control signal to control the one-dimensional array image sensor capturing one-dimensional image information of an object to be tested; a signal controller, coupled to the image capturing controller and the scanning element, and used for issuing a two-dimensional image capturing control signal, wherein, the one The 2D image capture control signal and the 2D image capture control signal are synchronized with each other, and the 1D array image sensor captures the under-test according to the 1D image capture control signal and the 2D image capture control signal The one-dimensional image information of the object in a plurality of directions and at different positions, and the one-dimensional image information corresponding to the different positions constitutes a two-dimensional image information of the object to be tested. 如請求項10所述的低同調干涉儀,其中,該影像擷取控制器與該訊號控制器分屬於不同晶片,該影像擷取控制器更發出與該一維影像擷取控制訊號同步的一同步訊號至該訊號控制器,其中該訊號控制器根據該同步訊號發出該二維影像擷取控制訊號至該影像擷取控制器。 The low-coherence interferometer as claimed in claim 10, wherein the image capture controller and the signal controller belong to different chips, and the image capture controller further sends out a synchronization signal synchronized with the one-dimensional image capture control signal. A synchronization signal is sent to the signal controller, wherein the signal controller sends the two-dimensional image capture control signal to the image capture controller according to the synchronization signal. 如請求項11所述的低同調干涉儀,其中該影像擷取控制器基於該一維影像擷取控制訊號與該二維影像擷取控制訊號合成一合成影像擷取控制訊號,並將該合成影像擷取控制訊號傳遞至該一維陣列影像感測器,該一維陣列影像感測器根據該合成影像擷取控制訊號擷取該待測物在該些沿一方向且在不同位置處的一維影像資訊。 The low coherence interferometer of claim 11, wherein the image capture controller synthesizes a composite image capture control signal based on the one-dimensional image capture control signal and the two-dimensional image capture control signal, and combines the composite image capture control signal The image capture control signal is transmitted to the one-dimensional array image sensor, and the one-dimensional array image sensor captures the images of the object to be tested along one direction and at different positions according to the composite image capture control signal. One-dimensional image information. 如請求項12所述的低同調干涉儀,其中該影像擷取控制器將該一維影像擷取控制訊號與該二維影像擷取控制訊號進行乘法或邏輯運算,以合成該合成影像擷取控制訊號。 The low coherence interferometer of claim 12, wherein the image capture controller performs a multiplication or logic operation on the one-dimensional image capture control signal and the two-dimensional image capture control signal to synthesize the composite image capture control signal. 如請求項10所述的低同調干涉儀,其中該影像擷取控制器包括一影像擷取卡。 The low coherence interferometer of claim 10, wherein the image capture controller includes an image capture card. 如請求項10所述的低同調干涉儀,其中該影像擷取控制器為一微控制器。 The low coherence interferometer of claim 10, wherein the image capture controller is a microcontroller. 如請求項10所述的低同調干涉儀,其中該影像擷取控制器更包括一訊號合成元件與一微控制器,其中該微控制器用以產生一同步訊號,該訊號合成元件基於該同步訊號與該二維影像擷取控制訊號以合成一合成影像擷取控制訊號。 The low coherence interferometer of claim 10, wherein the image capture controller further comprises a signal synthesis element and a microcontroller, wherein the microcontroller is used for generating a synchronization signal, and the signal synthesis element is based on the synchronization signal and the 2D image capture control signal to synthesize a composite image capture control signal. 如請求項10所述的低同調干涉儀,其中該訊號控制器為一資料擷取卡。 The low coherence interferometer of claim 10, wherein the signal controller is a data capture card. 如請求項10所述的低同調干涉儀,其中該訊號控制器根據一同步訊號發出一掃描元件控制訊號至該掃描元件,該掃描元件依據該掃描元件控制訊號調整該物體光束的傳遞方向,以使該物體光束在該待測物上沿著該方向照射。 The low-coherence interferometer of claim 10, wherein the signal controller sends a scanning element control signal to the scanning element according to a synchronization signal, and the scanning element adjusts the transmission direction of the object beam according to the scanning element control signal, so as to The object beam is irradiated along the direction on the object to be tested. 如請求項10所述的低同調干涉儀,更包括一處理器,該處理器用以接收並處理該二維影像資訊以形成該待測物的一二維影像。 The low-coherence interferometer of claim 10, further comprising a processor for receiving and processing the two-dimensional image information to form a two-dimensional image of the object to be measured. 如請求項10所述的低同調干涉儀,其中該一維陣列影像感測器包括多個影像感測元件,且該些影像感測元件沿著一方向排列。 The low-coherence interferometer of claim 10, wherein the one-dimensional array image sensor includes a plurality of image sensing elements, and the image sensing elements are arranged along a direction.
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