TWI743120B - Chip packaging structure with lead tabs on top and manufacturing method thereof - Google Patents

Chip packaging structure with lead tabs on top and manufacturing method thereof Download PDF

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TWI743120B
TWI743120B TW106114916A TW106114916A TWI743120B TW I743120 B TWI743120 B TW I743120B TW 106114916 A TW106114916 A TW 106114916A TW 106114916 A TW106114916 A TW 106114916A TW I743120 B TWI743120 B TW I743120B
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chip
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conductive
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TW201843788A (en
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葉秀慧
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葉秀慧
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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Abstract

一種上方具有導接片的晶片封裝結構及其製造方法,該晶片封裝結構包含:一基板;該基板上有多個焊墊;至少一晶片,其下表面置於該基板上;各該晶片上有多個焊墊,可經由導線連接該基板上的多個焊墊;至少一導接片,該導接片係為一薄片狀的板狀材料;各該導接片黏貼在對應的晶片的上表面;其中該導接片的材料不同於後續將封裝之結構的材料。 A chip package structure with a guide tab on the top and a manufacturing method thereof. The chip package structure includes: a substrate; a plurality of bonding pads on the substrate; at least one chip whose lower surface is placed on the substrate; There are multiple soldering pads, which can be connected to multiple soldering pads on the substrate via wires; at least one conductive tab, the conductive tab is a thin plate-like material; each of the conductive tabs is pasted on the corresponding chip The upper surface; where the material of the guide tab is different from the material of the structure to be packaged later.

Description

上方具有導接片的晶片封裝結構及其製造方法 Chip packaging structure with lead tabs on top and manufacturing method thereof

本發明係有關於晶片封裝結構,尤其是一種上方具有導接片的晶片封裝結構及其製造方法。 The present invention relates to a chip package structure, in particular to a chip package structure with a conductive sheet on the upper side and a manufacturing method thereof.

半導體製程中,某些種類的晶片由於必須感光或電磁感應所以要求在晶片上方的封裝結構必須做得相當的薄,已使的在下方的晶片可以感光或電磁感應。比如指紋辨識晶片或由CMOS所形成的影像晶片。指紋辨識晶片係將指紋按壓在晶片上方,並透過感光或電磁感應而使得晶片可以感測到上方的指紋。CMOS所形成的影像晶片可以應用在指紋辨識及影像攝入,為了可以產生良好的影像效果,所以必須上方的封裝結構相的薄。比如要求在晶片上方封裝成的厚度僅150到200μm。為以現今的半導體製程要製造這麼薄的封裝結構相當的困難,而且成本也高昂。 In the semiconductor manufacturing process, certain types of wafers must be light-sensitive or electromagnetically induced. Therefore, the package structure above the chip must be made relatively thin, so that the lower wafer can be light-sensitive or electromagnetically induced. Such as fingerprint recognition chip or image chip formed by CMOS. The fingerprint recognition chip presses the fingerprint on the top of the chip, and the chip can sense the fingerprint on the top through photosensitive or electromagnetic induction. The image chip formed by CMOS can be used for fingerprint recognition and image capture. In order to produce a good image effect, the upper package structure must be thin. For example, the thickness required to be packaged above the wafer is only 150 to 200 μm. It is quite difficult to manufacture such a thin package structure with the current semiconductor manufacturing process, and the cost is also high.

故本案希望提出一種嶄新的上方具有導接片的晶片封裝結構及其製造方法,以解決上述先前技術上的缺陷。 Therefore, this case hopes to propose a new chip package structure with conductive tabs on the top and a manufacturing method thereof to solve the above-mentioned defects in the prior art.

所以本發明的目的係為解決上述習知技術上的問題,本發明中提出一種上方具有導接片的晶片封裝結構及其製造方法,係應用導接片貼附在晶片的上方,可以將導接片做的非常的薄,以目前的技術可以到60μm至100μm之間,比傳統的封裝技術更薄,而且製作技術也相當簡易。另一方面可以選擇所需要的導接片以適應所使用之晶片的需要,而產生更好的效果。尤其是指紋辨識及影像晶片更是有這一方面的需要。如果用傳統的封裝方式,必須將在晶片上方感應區的封裝層做得相當的薄,可是在製造技術上相當困難,再者其感應的能力也比直接選用適當的感應材料差。 Therefore, the purpose of the present invention is to solve the above-mentioned problems in the prior art. In the present invention, a chip package structure with conductive tabs on the upper side and a manufacturing method thereof are proposed. The splice is very thin, with the current technology, it can be between 60μm and 100μm, which is thinner than the traditional packaging technology, and the manufacturing technology is quite simple. On the other hand, you can choose the required guide tabs to meet the needs of the used chip, and produce better results. In particular, fingerprint recognition and imaging chips are required in this regard. If the traditional packaging method is used, the packaging layer in the sensing area above the chip must be made quite thin, but it is quite difficult in manufacturing technology, and its sensing ability is worse than directly selecting appropriate sensing materials.

為達到上述目的本發明中提出一種上方具有導接片的晶片封裝結構,包含:一基板;該基板上有多個焊墊;至少一晶片,其下表面置於該基板上;各該晶片上有多個焊墊,可經由導線連接該基板上的多個焊墊;至少一導接片,該導接片係為一薄片狀的板狀材料;各該導接片黏貼在對應的晶片的上表面;其中該導接片的材料不同於後續將封裝之結構的材料。 In order to achieve the above objective, the present invention proposes a chip package structure with conductive tabs on the top, including: a substrate; a plurality of bonding pads on the substrate; at least one chip whose lower surface is placed on the substrate; There are multiple soldering pads, which can be connected to multiple soldering pads on the substrate via wires; at least one conductive tab, the conductive tab is a thin plate-like material; each of the conductive tabs is pasted on the corresponding chip The upper surface; where the material of the guide tab is different from the material of the structure to be packaged later.

本案中尚提出一種製造上方具有導接片的晶片封裝結構的方法,其中在晶片尚未從整個晶圓上分開而形成各自獨立的晶片前,將大量的導接片同時貼附在該晶圓的上方,其位置對應到切割之後的各個晶片的上方;再進行後續的切割、 分離、封裝等的半導體製程;其中該導接片係為一薄片狀的板狀材料;各該導接片黏貼在對應的晶片的上表面;其中該導接片的材料不同於後續將封裝之結構的材料;以及其中封裝時,該導接片可以外露至外部。 In this case, a method for manufacturing a chip package structure with lead pads on the top is also proposed, in which a large number of lead pads are attached to the wafer at the same time before the chip is separated from the entire wafer to form separate chips. Above, its position corresponds to the top of each chip after dicing; subsequent semiconductor manufacturing processes such as dicing, separation, packaging, etc. are carried out; wherein the conductive sheet is a thin plate-shaped material; each conductive sheet is pasted on Corresponding to the upper surface of the chip; wherein the material of the conductive tab is different from the material of the structure to be packaged later; and when the package is packaged, the conductive tab can be exposed to the outside.

由下文的說明可更進一步瞭解本發明的特徵及其優點,閱讀時並請參考附圖。 The features and advantages of the present invention can be further understood from the following description, and please refer to the accompanying drawings when reading.

10‧‧‧基板 10‧‧‧Substrate

20‧‧‧晶片 20‧‧‧Chip

30‧‧‧導接片 30‧‧‧Guide piece

40‧‧‧封裝結構 40‧‧‧Packaging structure

50‧‧‧晶圓 50‧‧‧wafer

70‧‧‧膠黏底板 70‧‧‧Adhesive bottom plate

80‧‧‧導線 80‧‧‧Wire

100‧‧‧焊墊 100‧‧‧Solder pad

200‧‧‧焊墊 200‧‧‧Solder pad

圖1顯示本案之元件組合示意圖。 Figure 1 shows a schematic diagram of the component assembly in this case.

圖2顯示圖1之截面示意圖。 Fig. 2 shows a schematic cross-sectional view of Fig. 1.

圖3顯示本案之元件組合示意圖之另一說明例。 Fig. 3 shows another illustrative example of the component assembly diagram of this case.

圖4顯示圖3之截面示意圖。 Fig. 4 shows a schematic cross-sectional view of Fig. 3.

圖5顯示本案製程中晶圓置於膠黏底板之示意圖。 Figure 5 shows a schematic diagram of the wafer placed on the adhesive substrate in the process of this case.

圖6顯示本案製程中晶圓切割成多個晶片之示意圖。 FIG. 6 shows a schematic diagram of the wafer dicing into multiple wafers in the process of this case.

圖7顯示本案製程中導接片與晶片之示意圖。 Fig. 7 shows a schematic diagram of the lead pad and the chip in the manufacturing process of this case.

圖8顯示本案製程中導接片與晶片結合之示意圖。 FIG. 8 shows a schematic diagram of the bonding of the lead pad and the chip in the manufacturing process of this case.

圖9顯示本案製程之步驟流程圖。 Figure 9 shows a flow chart of the manufacturing process in this case.

茲謹就本案的結構組成,及所能產生的功效與優點,配合圖式,舉本案之一較佳實施例詳細說明如下。 With regard to the structural composition of this case, and the effects and advantages that can be produced, in conjunction with the drawings, a preferred embodiment of this case is described in detail as follows.

請參考圖1至圖4所示,顯示本發明之上方具有導接片的晶片封裝結構,包含下列元件: 一基板10。該基板上有多個焊墊100。 Please refer to FIG. 1 to FIG. 4, which show the chip package structure with the conductive tabs on the top of the present invention, which includes the following components: A substrate 10. There are a plurality of bonding pads 100 on the substrate.

至少一晶片20,其下表面置於該基板10上。各該晶片20上有多個焊墊200,可經由導線80連接該基板10上的多個焊墊100。 At least one chip 20 has a lower surface placed on the substrate 10. Each chip 20 has a plurality of bonding pads 200, and the plurality of bonding pads 100 on the substrate 10 can be connected via wires 80.

至少一導接片30,該導接片30係為一薄片狀的板狀材料。各該導接片30黏貼在對應的晶片20的上表面。 At least one guiding piece 30 is a sheet-like plate material. Each of the guide tabs 30 is adhered to the upper surface of the corresponding chip 20.

一封裝結構40用於封裝該至少一晶片20及該基板10,而使得該至少一導接片30可以外露至外部。 A packaging structure 40 is used for packaging the at least one chip 20 and the substrate 10 so that the at least one conductive sheet 30 can be exposed to the outside.

其中該導接片30的材料不同於該封裝結構的材料。 The material of the conductive tab 30 is different from the material of the packaging structure.

在本案之一實施例中,該導接片30的材料為電磁可穿透的材料,如塑膠材料(PI、PET)或玻璃等。該晶片20如指紋辨識晶片。因此當手指置於該導接片30的上方時,手指的指紋可以反射該晶片20所發射的電磁波,而使得該晶片20接收到指紋的信號,以進行相關的應用,如指紋儲存或辨識。 In an embodiment of the present case, the material of the conductive sheet 30 is an electromagnetically permeable material, such as plastic material (PI, PET) or glass. The chip 20 is a fingerprint recognition chip. Therefore, when a finger is placed above the guide piece 30, the fingerprint of the finger can reflect the electromagnetic wave emitted by the chip 20, so that the chip 20 receives the fingerprint signal for related applications, such as fingerprint storage or recognition.

在本案之另一實施例中,該導接片30的材料為光可穿透的材料。該晶片20如CMOS晶片,可做為影像感測之用,如攝影或指紋辨識。比如作為指紋辨識時,當手指置於該導接片30的上方時,指紋可以反射該晶片的光波,而使得該晶片20接收到指紋的信號,以進行相關的應用,如指紋儲存或辨識。 In another embodiment of the present case, the material of the conductive sheet 30 is a light-transmissive material. The chip 20, such as a CMOS chip, can be used for image sensing, such as photography or fingerprint recognition. For example, for fingerprint recognition, when the finger is placed above the guide piece 30, the fingerprint can reflect the light waves of the chip, so that the chip 20 can receive the fingerprint signal for related applications, such as fingerprint storage or recognition.

當CMOS晶片使用在攝影時,必須要能有效的接收外部的光波,本案中可與選用透明材質的導接片30,以使得外部的光線可以幾近完全的穿透該導接片30以得到良好的效果。 When the CMOS chip is used in photography, it must be able to effectively receive external light waves. In this case, a transparent material guide sheet 30 can be used so that the external light can almost completely penetrate the guide sheet 30 to obtain good effect.

圖1及2中顯示該基板10上只有單一晶片20的結構。但是本案也可以使用在多個晶片20的情況,如圖3及4中顯示該基板10上有多個晶片20的結構。惟圖式中所示焊墊及導線的連接位置及連接方式並不用於限制本案的結構,其他的連接位置及連接方式均在本案的範圍之內。 1 and 2 show that the substrate 10 has only a single chip 20 on the structure. However, this case can also be used in the case of multiple wafers 20. As shown in FIGS. 3 and 4, the structure of the substrate 10 with multiple wafers 20 is shown. However, the connection positions and connection methods of the soldering pads and wires shown in the drawings are not used to limit the structure of this case, and other connection positions and connection methods are within the scope of this case.

本案中在製程上的一大優點為可以在晶圓還沒有將各個晶片20從該晶圓單獨分開成個別獨立的晶片時,應用統一製程的方式一次將大量的導接片30直接置於各對應晶片20的上方,然後再製作封裝結構,因此在製程上相當的方便。 A major advantage in the process in this case is that it is possible to apply a unified process method to directly place a large number of guide tabs 30 directly on each wafer when the wafer 20 has not been separated from the wafer into individual independent wafers. Corresponding to the upper side of the chip 20, the package structure is then fabricated, so the manufacturing process is quite convenient.

在晶片製程中,必須將一晶圓與基板結合,然後再進行切割而形成眾多的晶片,再分別對這些晶片進行封裝。而本案在製程上可以在各晶片還沒從該晶圓單獨分開形成個別獨立的晶片時,即將大量的導接片30一次貼附在該晶圓上,而節省整體製程。 In the chip manufacturing process, a wafer must be combined with a substrate, and then diced to form a large number of chips, and then these chips are packaged separately. In this case, when each chip is not separated from the wafer to form an independent chip, a large number of conductive tabs 30 can be attached to the wafer at one time in the manufacturing process, thereby saving the overall manufacturing process.

茲舉一例說明如下,圖5至圖8顯示本案中製程之一實施例,在本實施例中與上一實施例相同的元件以相同的標示表示,其功能相同,所以不再詳細贅述。如圖9所示,本實 施例中包含下列步驟:將一晶圓50置於一膠黏底板70(如俗稱的blue tape)(步驟100),如圖5所示。 An example is given as follows. FIGS. 5 to 8 show an embodiment of the manufacturing process in this case. In this embodiment, the same components as the previous embodiment are denoted by the same symbols, and their functions are the same, so they will not be described in detail. As shown in FIG. 9, the present embodiment includes the following steps: placing a wafer 50 on an adhesive substrate 70 (commonly known as blue tape) (step 100), as shown in FIG. 5.

將該晶圓50切割成多個晶片20,但這些晶片20仍然黏貼在該膠黏底板70,而大致維持該晶圓50外型的完整性(步驟110),如圖6所示。 The wafer 50 is diced into a plurality of wafers 20, but the wafers 20 are still adhered to the adhesive base plate 70, and the integrity of the appearance of the wafer 50 is substantially maintained (step 110), as shown in FIG. 6.

將多個導接片30置於該多個晶片20上,而大致上維持對齊的關係。並將各該導接片30黏貼到對應的晶片20上(步驟120),如圖7及圖8所示。 The plurality of guide tabs 30 are placed on the plurality of wafers 20, and the aligned relationship is maintained substantially. Each of the guide tabs 30 is pasted onto the corresponding chip 20 (step 120), as shown in FIGS. 7 and 8.

將該膠黏底板70撕掉,再將該多個晶片20置於基板上進入分離、焊接、導線連接及封裝的程序(步驟130)。此為一般習知的封裝程序,本案將不再說明。 The adhesive bottom plate 70 is torn off, and then the multiple chips 20 are placed on the substrate to enter the separation, soldering, wire connection and packaging procedures (step 130). This is a generally known packaging procedure and will not be explained in this case.

應用本案封裝方法的優點為,因為應用導接片貼附在晶片的上方,可以將導接片做的非常的薄,以目前的技術可以到60μm至100μm之間,比傳統的封裝技術更薄,而且製作技術也相當簡易。另一方面可以選擇所需要的導接片以適應所使用之晶片的需要,而產生更好的效果。尤其是指紋辨識及影像晶片更是有這一方面的需要。如果用傳統的封裝方式,必須將在晶片上方感應區的封裝層做得相當的薄,可是在製造技術上相當困難,再者其感應的能力也比直接選用適 當的感應材料差。 The advantage of the packaging method in this case is that, because the lead tab is attached to the top of the chip, the lead tab can be made very thin. With the current technology, it can be between 60μm and 100μm, which is thinner than the traditional packaging technology. , And the production technology is quite simple. On the other hand, you can choose the required guide tabs to meet the needs of the used chip, and produce better results. In particular, fingerprint recognition and imaging chips are required in this regard. If the traditional packaging method is used, the packaging layer in the sensing area above the chip must be made quite thin, but it is quite difficult in manufacturing technology, and its sensing ability is worse than directly selecting appropriate sensing materials.

綜上所述,本案人性化之體貼設計,相當符合實際需求。其具體改進現有缺失,相較於習知技術明顯具有突破性之進步優點,確實具有功效之增進,且非易於達成。本案未曾公開或揭露於國內與國外之文獻與市場上,已符合專利法規定。 In summary, the humanized and considerate design of this case is quite in line with actual needs. Compared with the conventional technology, the specific improvement of the existing defects is obviously a breakthrough advantage, and it does have an increase in efficacy, and it is not easy to achieve. This case has not been disclosed or disclosed in domestic and foreign documents and markets, and it has complied with the provisions of the Patent Law.

上列詳細說明係針對本發明之一可行實施例之具體說明,惟該實施例並非用以限制本發明之專利範圍,凡未脫離本發明技藝精神所為之等效實施或變更,均應包含於本案之專利範圍中。 The above detailed description is a specific description of a possible embodiment of the present invention, but this embodiment is not intended to limit the scope of the patent of the present invention. Any equivalent implementation or modification that does not deviate from the technical spirit of the present invention shall be included in In the scope of the patent in this case.

10‧‧‧基板 10‧‧‧Substrate

20‧‧‧晶片 20‧‧‧Chip

30‧‧‧導接片 30‧‧‧Guide piece

40‧‧‧封裝結構 40‧‧‧Packaging structure

80‧‧‧導線 80‧‧‧Wire

100‧‧‧焊墊 100‧‧‧Solder pad

200‧‧‧焊墊 200‧‧‧Solder pad

Claims (11)

一種製造上方具有導接片的晶片封裝結構的方法,其中在晶片尚未從整個晶圓上分開而形成各自獨立的晶片前,將大量的導接片同時貼附在該晶圓的上方,其位置對應到切割之後的各個晶片的上方;再進行後續的切割、分離、封裝等的半導體製程;其中該導接片係為一薄片狀的板狀材料;各該導接片黏貼在對應的晶片的上表面;其中該導接片的材料不同於後續將封裝之結構的材料;以及其中封裝時,該導接片可以外露至外部。 A method for manufacturing a chip package structure with lead pads on the top, where a large number of lead pads are attached to the top of the wafer at the same time before the chip is separated from the entire wafer to form separate chips. Corresponding to the top of each chip after dicing; and then perform subsequent dicing, separation, packaging and other semiconductor manufacturing processes; wherein the conductive tab is a thin plate-shaped material; each conductive tab is pasted on the corresponding chip The upper surface; wherein the material of the guide tab is different from the material of the structure to be packaged later; and the guide tab can be exposed to the outside during packaging. 如申請專利範圍第1項所述之方法,其中該導接片的材料為電磁可穿透的材料。 According to the method described in item 1 of the scope of patent application, the material of the conductive sheet is electromagnetically permeable material. 如申請專利範圍第1項所述之方法,其中該晶片為指紋辨識晶片。 The method described in item 1 of the scope of patent application, wherein the chip is a fingerprint recognition chip. 如申請專利範圍第1項所述之方法,其中該導接片的材料為光可穿透的材料。 According to the method described in item 1 of the scope of patent application, the material of the guide sheet is a light-transmissive material. 如申請專利範圍第1項所述之方法,其中該晶片為CMOS晶片,用於影像感測或指紋辨識。 The method described in item 1 of the scope of patent application, wherein the chip is a CMOS chip for image sensing or fingerprint recognition. 一種應用申請專利範圍第1至5項之方法所製造的上方具有導接片的晶片封裝結構,包含: 一基板;該基板上有多個焊墊;至少一晶片,其下表面置於該基板上;各該晶片上有多個焊墊,可經由導線連接該基板上的多個焊墊;至少一導接片,該導接片係為一薄片狀的板狀材料;各該導接片黏貼在對應的晶片的上表面;其中該導接片的材料不同於後續將封裝之結構的材料。 A chip package structure with conductive tabs on the top manufactured by the method in the scope of patent application 1 to 5, including: A substrate; the substrate has a plurality of bonding pads; at least one chip, the lower surface of which is placed on the substrate; each chip has a plurality of bonding pads, which can be connected to the plurality of bonding pads on the substrate via wires; at least one The guiding piece is a sheet-like plate material; each of the guiding pieces is pasted on the upper surface of the corresponding chip; wherein the material of the guiding piece is different from the material of the structure to be packaged later. 如申請專利範圍第6項所述之上方具有導接片的晶片封裝結構,尚包含:一封裝結構用於封裝該至少一晶片及該基板,而使得該至少一導接片可以外露至外部。 For example, the chip packaging structure with conductive tabs on the upper part of the patent application scope includes: a package structure for packaging the at least one chip and the substrate, so that the at least one conductive tab can be exposed to the outside. 如申請專利範圍第6項所述之上方具有導接片的晶片封裝結構,其中該導接片的材料為電磁可穿透的材料。 As described in item 6 of the scope of the patent application, the chip package structure with a conductive sheet on the upper side, wherein the material of the conductive sheet is an electromagnetic permeable material. 如申請專利範圍第6項所述之上方具有導接片的晶片封裝結構,其中該晶片為指紋辨識晶片。 As described in item 6 of the scope of patent application, the chip package structure with the lead tab on the top, wherein the chip is a fingerprint identification chip. 如申請專利範圍第6項所述之上方具有導接片的晶片封裝結構,其中該導接片的材料為光可穿透的材料。 As described in item 6 of the scope of the patent application, the chip package structure with the conductive tabs above, wherein the material of the conductive tabs is a light-permeable material. 如申請專利範圍第6項所述之上方具有導接片的晶片封裝結構,其中該晶片為CMOS晶片,用於影像感測或指紋辨識。 As described in item 6 of the scope of the patent application, the chip package structure with conductive tabs above, wherein the chip is a CMOS chip, used for image sensing or fingerprint identification.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW502871U (en) * 2001-09-05 2002-09-11 Taiwan Ic Packaging Corp Improved package structure of photo sensing semiconductor device
TW201712818A (en) * 2015-09-25 2017-04-01 精材科技股份有限公司 Chip package and method for forming the same
TW201719826A (en) * 2015-11-20 2017-06-01 力成科技股份有限公司 Lid-pressing type semiconductor package and method for manufacturing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW502871U (en) * 2001-09-05 2002-09-11 Taiwan Ic Packaging Corp Improved package structure of photo sensing semiconductor device
TW201712818A (en) * 2015-09-25 2017-04-01 精材科技股份有限公司 Chip package and method for forming the same
TW201719826A (en) * 2015-11-20 2017-06-01 力成科技股份有限公司 Lid-pressing type semiconductor package and method for manufacturing the same

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