TWI733374B - Flexible connector, flexible adsorption device and photoetching system - Google Patents

Abstract

The present invention provides a flexible connector, a flexible adsorption device and a photoetching system. A plurality of adsorption units are connected to a supporting unit through a flexible connector, and the bottom of each flexible connector is located on the same level. The bottom of each adsorption unit Located on the same level, the vacuum unit is connected with each suction unit to realize the vacuum suction of the shield plate, because the flexible connecting piece includes the connecting piece body and the first direction groove and the second direction groove provided on the connecting piece body , The body of the connector can be deformed when the shield plate is adsorbed to realize the self-adaptive adjustment in both directions of rotation around the first direction and rotation around the second direction, ensuring that the bottom of the suction unit is completely attached to the surface of the shield plate , The deformation of the shield plate is reduced, the transfer accuracy is improved, and the rigid contact between the suction unit and the shield plate is effectively avoided, and the shield plate is protected.

Description

Flexible connector, flexible adsorption device and photoetching system

The invention relates to the technical field of semiconductor manufacturing, in particular to a flexible connector, a flexible adsorption device and a photolithography system.

In the photolithography process, the transmission of the mask plate is an indispensable process, and the transfer accuracy of the mask plate in the transfer process is a key indicator. In the prior art, when the mask plate is handed over, the mask plate suction device in the lithography machine is usually used to vacuum the mask plate. To make the mask plate reach a certain handover accuracy during the handover process, the suction mask must be guaranteed The suction surface of the plate is effectively attached to the surface of the mask plate, which can greatly reduce the deformation of the mask plate.

At present, the mask plate suction device in the lithography machine generally adopts a rigid structure, such as ceramic or aluminum. Due to the limitation of the machining accuracy of the parts, the coplanarity of the mask plate suction device of the rigid structure can be as high as 0.25 μm (3 Class accuracy), plus the maximum flatness of the mask plate itself in the suction area is 1μm. When a rigid structure of the mask plate suction device is used, the possible deformation of the mask plate can reach 1.25μm, resulting in the mask plate It cannot be completely attached to the mask plate suction device, and the mask plate is likely to move during the process of moving the mask plate, which greatly reduces the transfer accuracy of the mask plate. In addition, for the rigid structure of the mask plate suction device, if you want to The coplanarity of the adsorption surface is 0.25μm (level 3 accuracy), and the processing cost is very high.

The purpose of the present invention is to provide a flexible connector, a flexible suction device and a photolithography system, which can ensure that the suction surface of the flexible suction device and the mask plate can be completely attached, thereby greatly reducing the deformation of the mask plate and improving the mask The transfer accuracy of the cover plate.

In order to achieve the above objective, the present invention provides a flexible connector, including a connector body and a first direction groove and a second direction groove provided on the connector body, the first direction groove splits the connector along the first direction The body extends into the inside of the connector body, the second direction groove cuts the connector body along the second direction and extends into the inside of the connector body, the first direction is perpendicular to the second direction.

Preferably, there are two first-direction grooves and two second-direction grooves. The two first-direction grooves are symmetrically arranged along the central axis of the connector body, and the two second-direction grooves extend along the connector body. The central axis of the body is symmetrically arranged.

Preferably, the connector body is further provided with a first extension groove and a second extension groove. The first extension groove extends in the third direction from the end of the groove in the first direction in the connector body. The first extension groove and The groove in the first direction is L-shaped, the second extension groove extends in the third direction from the end of the groove in the second direction in the body of the connector, the second extension groove and the groove in the second direction are L-shaped, the third direction It is perpendicular to both the first direction and the second direction.

Preferably, the depth of the groove in the first direction along the second direction is greater than 0 mm and less than or equal to 8 mm, the depth of the groove in the second direction along the first direction is greater than 0 mm and less than or equal to 8 mm, the first extension groove and the second extension The length of the groove along the third direction is greater than 0 mm and less than or equal to 7 mm.

Preferably, the widths of the grooves in the first direction and the grooves in the second direction are both greater than 0 mm and less than or equal to 0.1 mm.

Preferably, the damping coefficient jointly produced by the first direction groove and the second direction groove is greater than one.

Preferably, both ends of the connector body in the third direction are provided with mounting holes.

The present invention also provides a soft adsorption device for adsorbing the mask plate, comprising: a support unit; a plurality of adsorption units and a plurality of flexible connectors as described above, each adsorption unit is connected to the support unit through a flexible connector, And the side of each flexible connecting piece connected with each suction unit is located on the same horizontal surface, and the side of each suction unit used for adsorbing the mask plate is located on the same horizontal surface; and a vacuum unit is connected with each suction unit to realize the opposite shielding. Vacuum adsorption of the cover plate.

G。 Preferably, the stiffness ratio of the shield plate to each flexible connector is K, and the ratio of the coplanarity of the side connecting the multiple flexible connectors with the multiple adsorption units to the deformation of the shield plate is G, and K

G.

Preferably, each adsorption unit includes an adsorption block and an adsorption contact block arranged on the side of the adsorption block away from the flexible connecting member. An adsorption cavity is formed in the adsorption block, and an adsorption hole communicating with the adsorption cavity is formed in the adsorption contact block. The vacuum unit Connect with the adsorption chamber.

Preferably, the adsorption contact block is made of anti-static material.

Preferably, the vacuum unit includes an air pump and a gas pipeline, and the air pump communicates with the adsorption chamber in each adsorption block through the gas pipeline, so that the adsorption chamber forms a vacuum.

Preferably, each adsorption block has two adsorption cavities, the vacuum unit has two gas pipes, and the two gas pipes are respectively connected with the two adsorption cavities in each adsorption block to form two independent vacuum channels .

The invention also provides a photolithography system, including a soft adsorption device.

In the flexible connector, the flexible adsorption device and the lithography system provided by the present invention, a plurality of adsorption units are connected to the supporting unit through a flexible connector, and the bottom of each flexible connector is located on the same horizontal surface, and the The bottom is located on the same level. The vacuum unit is connected with each adsorption unit to realize the vacuum adsorption of the shield plate. Because the flexible connector includes the connector body and is arranged on the The first direction groove and the second direction groove on the connector body, the connector body can be deformed when the shield plate is adsorbed, so as to realize the self-adaptation in two directions of rotation around the first direction and rotation around the second direction Adjust to ensure that the bottom of the suction unit is completely attached to the surface of the shield plate, reduce the deformation of the shield plate, thereby improve the accuracy of handover, and effectively avoid the rigid contact between the suction unit and the shield plate for protection The role of the mask plate.

10: Support unit

20: Flexible connector

21: Connector body

22: X groove

23: Y groove

30: Adsorption unit

31: Adsorption block

311a: The first adsorption chamber

311b: The second adsorption chamber

32: Adsorption contact block

321a: The first adsorption hole

321b: second adsorption hole

41a: First gas pipeline

41b: Second gas pipeline

42: Main air pipe joint

43a: The first vacuum port

43b: second vacuum port

50: Mask plate

Figure 1 is a schematic structural diagram of a flexible connector provided by an embodiment of the present invention.

Figure 2 is a schematic cross-sectional view in the X direction of a flexible connector provided by an embodiment of the present invention.

Figure 3 is a schematic diagram of the Q field of view in Figure 2 provided by an embodiment of the present invention.

Figure 4 is a schematic cross-sectional view in the Y direction of a flexible connector provided by an embodiment of the present invention.

Figure 5 is a schematic diagram showing that the X-direction groove or the Y-direction groove provided by an embodiment of the present invention is equivalent to damping.

Figure 6 is a schematic structural diagram of a soft adsorption device provided by an embodiment of the present invention.

Figure 7 is a schematic structural diagram of an adsorption block provided by an embodiment of the present invention.

The specific embodiments of the present invention will be described in more detail below in conjunction with the schematic diagrams. According to the following description and the scope of patent application, the advantages and features of the present invention will be more clear. It should be noted that the drawings all adopt a very simplified form and all use imprecise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

As shown in Figures 1 to 4, this embodiment provides a flexible connector 20, which includes a connector body 21 and a first direction groove 22 provided on the connector body 21 (where the first direction is X Direction, that is, the X-direction groove 22) and the second-direction groove 23 (here the second direction is the Y-direction, that is, the Y-direction groove 23), the X-direction groove 22 splits the connection along the X-direction Body 21 and extends into the connector body Inside 21, the Y-direction groove 23 splits the connector body 21 along the Y-direction and extends into the connector body 21.

Specifically, as shown in Figure 1, the connector body 21 is integrally formed with a metal material and has a relatively strong structure. Both ends of the connector body 21 in the Z direction have mounting holes, which pass through the The mounting holes are used for connection and fixing. The mounting holes can usually be screw holes, and the mounting holes at both ends of the connector body 21 can be one or more.

Further, the connector body 21 is also provided with an X-direction groove 22 and a Y-direction groove 23. It can be understood that the X-direction groove 22 is formed by cutting the connector body 21 along the X direction. The Y-direction groove 23 is a slit formed by cutting the connector body 21 along the Y-direction, and the X-direction groove 22 and the Y-direction groove 23 both extend into the connector body 21, the connector body 21 cannot be cut into two parts, that is, the X-direction groove 22 and the Y-direction groove 23 cannot penetrate the connector body 21. Preferably, both the X-direction groove 22 and the Y-direction groove 23 extend into the vicinity of the central axis of the connector body 21.

It can be understood that the X-direction groove 22 and the Y-direction groove 23 are located on different planes in the Z direction (different positions in the Z direction), as shown in Figure 5, when the connector body 21 When a force is applied, either the X-direction groove 22 or the Y-direction groove 23 can be equivalent to an elastic structure of a damping and a spring (the stiffness of the spring is K, and the damping coefficient of the damping is C). Buffer the effect of deformation. Due to the existence of the X-direction groove 22, the connector body 21 can be rotated forward and backward by an angle (adjusting Ry) around Y. Due to the existence of the Y-direction groove 23, the connector body 21 can be rotated around X. Rotate an angle to the left and right (adjust Rx). Therefore, the connector body 21 is made of a metal material to ensure stability and firmness, and at the same time, a soft connection is achieved through self-adaptive positions in the two directions of Rx and Ry.

As shown in Figures 2 and 4, in this embodiment, the number of the X-direction groove 22 and the Y-direction groove 23 are both two, and the two X-direction grooves 22 extend along the The body center axis of the connecting piece body 21 is symmetrically arranged, and the two Y-direction grooves 23 are arranged symmetrically along the body center axis of the connecting piece body 21. In this way, the connecting piece body 21 rotates left and right around the X direction. The angles are approximately equal, and the angles of forward and backward rotation around Y are also approximately equal, so that the connector body 21 can be deformed smoothly when stressed, and the flexible connector 20 is prevented from being damaged.

Preferably, both the X-direction groove 22 and the Y-direction groove 23 have an extension groove communicating with the X-direction groove 22 and the Y-direction groove 23, that is, the X-direction groove 22 and the Y-direction groove may not only be in line, but It is also possible to extend into the inside of the connector body 21 and then extend in the third direction (here Z-direction) to form the extension groove, that is, the connector body 21 is also provided with a Z-direction extending The first extension groove and the second extension groove, the first extension groove and the X-direction groove 22 are extended and connected, and the second extension groove and the Y-direction groove 23 are extended and connected, so that the X-direction The groove 22 (including the first extension groove) and the Y-direction groove 23 (including the second extension groove) are L-shaped, and the L-shaped X-direction groove 22 and the Y-direction groove 23 can make the flexible connector 20 more easily deformed.

Based on this, as shown in Figure 6, this embodiment also provides a flexible suction device for absorbing a mask plate 50, including: a supporting unit 10, in this embodiment, the supporting unit 10 is a Y-shaped The bracket provides support for the entire soft suction device, and its top can be connected with a manipulator so that the soft suction device can move to transfer the mask plate 50 after it is adsorbed on the mask plate 50.

A plurality of adsorption units 30, for example, in this embodiment, there are four adsorption units 30, and each adsorption unit 30 is connected to the bottom of the support unit 10 through the flexible connecting member 20. Each of the four adsorption units 30 includes an adsorption block 31, and the bottom of each adsorption block 31 is the adsorption surface. It is in contact with the mask plate 50 to achieve adsorption. Preferably, the shield plate 50 may be a square plate structure, and the four adsorption blocks 31 can respectively fix the four corners of the shield plate 50, which is more stable when adsorbing the shield plate 50 Therefore, it is possible to prevent the shield plate 50 from sliding relative to the suction unit 30 during the moving process. Further, the bottom of each flexible connector 20 is located on the same horizontal surface, and the bottom of each adsorption unit 30 (or adsorption block 31) is located on the same horizontal surface, so that the adsorption surface of the adsorption block 31 can fit as closely as possible The mask plate 50.

A vacuum unit is connected to each of the adsorption units 30 to realize the vacuum adsorption of the mask plate 50. Specifically, as shown in Figures 6 and 7, in this embodiment, the vacuum unit includes a suction pump (not shown) and two independent gas pipes (a first gas pipe 41a and a second gas pipe 41b), Each adsorption block 31 has two independent adsorption chambers (a first adsorption chamber 311a and a second adsorption chamber 311b), and the first gas pipe 41a and the second gas pipe 41b are installed on the supporting unit 10 , And the supporting unit 10 is provided with a main gas pipe joint 42, the air pump is in communication with the first gas pipe 41a and the second gas pipe 41b through the main gas pipe joint 42, and the first gas pipe 41a passes through The first vacuum interface 43a is in communication with the first adsorption cavity 311a in each adsorption block 31, and the second gas pipeline 41b is connected to the second adsorption cavity 311b in each adsorption block 31 through the second vacuum interface 43b. The two vacuum channels are connected to form two independent vacuum channels to achieve vacuum adsorption to the mask plate 50. The two vacuum channels do not interfere with each other to prevent one vacuum channel from leaking or failing, causing the risk of the mask plate 50 to fall.

As shown in Fig. 6, the adsorption unit 30 also includes an adsorption contact block 32, which is adhered to the bottom of the adsorption block 31 for direct contact with the shield plate 50. This embodiment In an example, the material of the adsorption contact block 32 is an antistatic material, such as PEEK (ESD) material, which has a static electricity dissipation effect, and the static electricity generated when the adsorption unit 30 adsorbs the mask plate 50 , Can be transferred to the support unit 10 through the adsorption contact block 32, and then to the support unit The grounding wire on 10 can lead out static electricity, effectively preventing static electricity from damaging the shield plate 50. It is understandable that the adsorption contact block 32 also has two independent adsorption holes (a first adsorption hole 321a and a second adsorption hole 321b), and the first adsorption hole 321a and the second adsorption hole 321b are respectively It communicates with the first adsorption chamber 311 a and the second adsorption chamber 311 b for adsorbing the shield plate 50.

G，以實現大幅度減小遮罩板50的變形量，同時，所述X向凹槽和所述Y向凹槽共同產生的阻尼係數大於1，以有效抑制所述吸附單元30在接觸所述遮罩板50時的振動。 Further, as shown in Fig. 5, the flexible suction device provided by this embodiment can realize the self-adaptive position of the suction mask plate in the two directions of Rx and Ry when the mask plate 50 is adsorbed, and can be adapted to a certain small inclination angle. The placed mask plate 50 realizes soft contact and adsorption, effectively avoids rigid contact, plays a role of protecting the mask plate 50, and ensures that the suction surface and the mask plate 50 are completely attached. Preferably, the stiffness ratio between the shield plate 50 and the flexible connector 20 is K, and the ratio of the coplanarity of the bottoms of the four flexible connectors 20 to the deformation of the shield plate 50 is G , K in this embodiment

G, in order to achieve a significant reduction in the amount of deformation of the shield plate 50, and at the same time, the damping coefficient jointly produced by the X-direction groove and the Y-direction groove is greater than 1, so as to effectively restrain the adsorption unit 30 from being in contact with the The vibration of the mask plate 50 is described.

Preferably, in order to obtain the dimensions of the X-direction groove 22 and the Y-direction groove 23, the X-direction groove 22 and the Y-direction groove 23 are L-shaped as shown in FIG. When the structure is configured, the following calculation is made: when the flatness of the suction surface of the suction block 31 relative to the surface of the shield plate 50 is large, under the action of the suction force, the four flexible connectors 20 and the The shield plate 50 will be subjected to a torsional moment and will undergo torsional deformation. The amount of deformation between the two is determined by the torsional stiffness ratio, that is, the stiffness ratio K of the shield plate 50 and the flexible connector 20 is its torsional stiffness ratio κ _r /κ _m :

Wherein, as in FIG. 2 - section shown in FIG. 4, B _r is the mask length of the plate; E _r is the modulus of elasticity of the mask plate (mask material, quartz plate); t _r is the thickness of the mask plate; L _r is half the sheet width of the mask; B _m of a length dimension extending along the Z direction groove; E _m is the modulus of elasticity of the adsorption unit; t _m X-directional width of the grooves (or the groove may be a Y The width of the X-direction groove and the Y-direction groove are assumed to be equal here); L _m is the length dimension of the Y-direction groove along the X direction (the length dimension of the flexible connector along the X direction).

G和4個軟性連接件20的平面度值可以確定此時遮罩板50的變形量，再通過靜力學分析，得到遮罩板50由自重引起的變形量，綜合二者之和可得到遮罩板50的總變形量。通過反復試驗可計算出，當所述X向凹槽22沿Y向的深度為大於0mm且小於等於8mm，所述Y向凹槽23沿X向的深度為大於0mm且小於等於8mm，所述延伸槽沿Z向的長度尺寸為大於0mm且小於等於7mm，所述X向凹槽22和所述Y向凹槽23的寬度均大於0mm且小於等於0.1mm時，可以達到較大幅度減小遮罩板的變形量目的，且此時在不同的衝擊頻率下，整個振動周期內所述X向凹槽22和所述Y向凹槽23共同產生的阻尼係數大於1，能滿足使用要求。 After obtaining the stiffness ratio K of the mask plate 50 and the flexible connecting member 20, according to K

G and the flatness values of the four flexible connectors 20 can determine the amount of deformation of the shield plate 50 at this time, and then through static analysis, the deformation amount of the shield plate 50 caused by its own weight can be obtained. The sum of the two can be combined to obtain the shield plate 50. The total amount of deformation of the cover plate 50. Through repeated experiments, it can be calculated that when the depth of the X-direction groove 22 along the Y direction is greater than 0 mm and less than or equal to 8 mm, and the depth of the Y-direction groove 23 along the X direction is greater than 0 mm and less than or equal to 8 mm, the The length dimension of the extension groove along the Z direction is greater than 0 mm and less than or equal to 7 mm, and when the widths of the X-direction groove 22 and the Y-direction groove 23 are both greater than 0 mm and less than or equal to 0.1 mm, a significant reduction can be achieved The amount of deformation of the shield plate is for the purpose, and at this time, under different impact frequencies, the damping coefficient jointly produced by the X-direction groove 22 and the Y-direction groove 23 during the entire vibration period is greater than 1, which can meet the requirements of use.

Based on this, this embodiment also provides a photolithography system that uses the flexible adsorption device to transfer and transfer the mask plate, which can reduce the deformation of the mask plate and make the transfer accuracy higher. .

In summary, in the flexible connector, the flexible adsorption device, and the photolithography system provided by the embodiments of the present invention, a plurality of adsorption units are connected to the supporting unit through the flexible connector, and the bottom of each of the flexible connectors is located on the same horizontal plane Above, the bottom of each adsorption unit is located on the same horizontal surface, and the vacuum unit is connected with each adsorption unit to achieve vacuum adsorption of the shield plate. Because the flexible connector includes a connector body and is arranged on the connection The X-direction groove and Y-direction groove on the body of the piece are adsorbing The body of the connector can be deformed when the shield plate is used to realize adaptive adjustment in the two directions of Rx and Ry, to ensure that the bottom of the suction unit is completely attached to the surface of the shield plate, and the deformation of the shield plate is reduced Therefore, the transfer accuracy is improved, and the rigid contact between the suction unit and the shield plate is effectively avoided, and the shield plate is protected.

The above are only preferred embodiments of the present invention, and do not play any restrictive effect on the present invention. Any person with ordinary knowledge in the technical field, without departing from the scope of the technical means of the present invention, makes any form of equivalent replacement or modification or other changes to the technical means and technical content disclosed in the present invention, which is a technology that does not depart from the present invention. The content of the means still falls within the protection scope of the present invention.

10: Support unit

20: Flexible connector

30: Adsorption unit

31: Adsorption block

32: Adsorption contact block

41a: First gas pipeline

41b: Second gas pipeline

42: Main air pipe joint

43a: The first vacuum port

43b: second vacuum port

50: Mask plate

Claims (13)

A flexible connector includes a connector body and a first direction groove and a second direction groove provided on the connector body. The first direction groove splits the connector body along the first direction and extends into the connector body. Inside the connector body, the second direction groove cuts the connector body along the second direction and extends into the connector body, the first direction is perpendicular to the second direction; wherein the connector body is also provided There are a first extension groove and a second extension groove, the first extension groove extends in the third direction from an end of the first direction groove located in the body of the connecting member, the first extension groove and the first direction groove Is L-shaped, the second extension groove extends along the third direction from an end of the second-direction groove located in the body of the connecting member, the second extension groove and the second-direction groove are L-shaped, the first The three directions are perpendicular to the first direction and the second direction. The flexible connector according to claim 1, wherein the number of the first-direction groove and the second-direction groove are both two, and the two first-direction grooves are symmetrical along the central axis of the connector body If provided, the two second-direction grooves are symmetrically arranged along the central axis of the connector body. The flexible connector according to claim 1, wherein the depth of the groove in the first direction along the second direction is greater than 0 mm and less than or equal to 8 mm, and the depth of the groove in the second direction along the first direction is greater than 0 mm and less than or equal to 8mm, the length of the first extension slot and the second extension slot along the third direction are both greater than 0 mm and less than or equal to 7 mm. The flexible connector according to claim 3, wherein the widths of the first direction groove and the second direction groove are both greater than 0 mm and less than or equal to 0.1 mm. The flexible connector according to claim 1 or 2, wherein the first direction groove and The damping coefficient jointly produced by the grooves in the second direction is greater than one. The flexible connector according to claim 1 or 2, wherein both ends of the connector body in the third direction are provided with mounting holes. A flexible adsorption device for adsorbing a mask plate, comprising: a supporting unit; a plurality of adsorption units and a plurality of flexible connectors according to any one of claims 1 to 6, each of the adsorption units passes One of the flexible connectors is connected to the supporting unit, and the side of each flexible connector connected to each of the adsorption units is located on the same horizontal surface, and the surface of each adsorption unit for adsorbing the mask plate is located on the same horizontal surface ; And a vacuum unit, connected with each of the adsorption units to achieve vacuum adsorption of the shield plate. The flexible suction device according to claim 7, wherein the stiffness ratio of the shield plate and each of the flexible connecting members is K, and the coplanarity of the side connecting the plurality of flexible connecting members and the plurality of suction units is equal to the The ratio of the deformation of the mask plate is G, and K

G. The soft adsorption device according to claim 7, wherein each of the adsorption units includes an adsorption block and an adsorption contact block arranged on a side of the adsorption block away from the flexible connecting piece, and an adsorption cavity is formed in the adsorption block, and the adsorption contact block An adsorption hole communicating with the adsorption cavity is formed in the vacuum unit, and the vacuum unit is communicated with the adsorption cavity. The soft suction device according to claim 9, wherein the suction contact block is made of antistatic material. The soft adsorption device according to claim 9, wherein the vacuum unit includes an exhaust A pump and a gas pipeline, the suction pump communicates with the adsorption chamber in each adsorption block through the gas pipeline, so that the adsorption chamber forms a vacuum. The soft adsorption device according to claim 11, wherein each adsorption block has two adsorption chambers, the vacuum unit has two gas pipes, and the two gas pipes are connected to the two adsorption blocks in each adsorption block. The adsorption chambers are correspondingly connected to form two independent vacuum channels. A photolithography system comprising the soft adsorption device according to any one of claims 8 to 12.

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