TWI728306B - Substrate transfer apparatus and substrate transfer method - Google Patents

Abstract

The present invention provides a substrate conveying device and a substrate conveying method that can reliably detect that the substrate has been delivered to a predetermined position. The substrate conveying device includes: a holding portion that holds the substrate; a shuttle mechanism that makes the holding portion reciprocate relative to a predetermined position; and an optical sensor that forms a sensor on the path where the holding portion is moved by the shuttle mechanism Detector area; and control department. The control unit judges the conveyance abnormality during the delivery of the substrate. The substrate delivery operation includes a forward movement in which the holding portion moves to a predetermined position by the reciprocating mechanism, and a return movement in which the holding portion leaves the predetermined position. During the substrate delivery operation, the control section detects the first passage period during which the holding section or the substrate held by the holding section passes through the sensor area, and performs detection between the first passage period and the preset first passage period. During the normal period, it is not judged as a transport abnormality at the same time.

Description

Substrate conveying device and substrate conveying method

This application claims priority based on Japanese Patent Application No. 2018-035510 filed on February 28, 2018, and all the contents of this application are included in this specification by reference.

The present invention relates to a substrate conveying device and a substrate conveying method for conveying substrates.

In the manufacturing process of semiconductor substrates or semiconductor device manufacturing processes, the substrates are transported by a transport robot or the like. In the transportation of the substrate, it is required to accurately place the substrate on the placement part of the processing unit for processing the substrate, and to accurately store the processed substrate in the storage container. Therefore, for example, it is necessary to use a sensor to confirm for each substrate whether or not the substrate has been normally transferred to the placement part by a transfer robot or the like.

For example, the substrate transfer device described in Patent Document 1 is provided with a picker (robot) that holds the substrate when the substrate is transferred by the transfer section. The conveying part fixes and holds the substrate on the pickup by the pressing body, and detects the holding state of the substrate according to the position of the pressing body. In addition, when the transfer section delivers the substrate to a predetermined position such as the placement section, it releases the fixing and holding by the pressing body.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication 2012-74485

In the substrate inspection operation using the pressing body described in Patent Document 1, when the pickup is moved back after the substrate is delivered to a predetermined position, the substrate is not inspected. Therefore, it is impossible to detect the state in which the substrate is straddled on the pickup that is going to retreat and the substrate remains on the pickup. In this case, even if the substrate cannot be delivered to the predetermined position, the situation cannot be detected. In this way, the technique described in Patent Document 1 cannot detect when the substrate has been delivered to a predetermined position by the transport unit, and therefore there are cases in which the transport failure cannot be detected.

In view of the above situation, an embodiment of the present invention provides a substrate conveying device and a substrate conveying method that can reliably detect that a substrate has been delivered to a predetermined position.

An embodiment of the present invention provides a substrate transfer device for transferring substrates to a predetermined position. The substrate conveying device includes: a holding portion that holds a substrate; a shuttle mechanism that reciprocates the holding portion relative to a predetermined position; and an optical sensor formed on a path where the holding portion is moved by the shuttle mechanism The sensor area; and the control section. The above-mentioned control unit judges the conveyance abnormality during the substrate delivery operation. The substrate delivery operation includes a forward movement in which the holding portion moves to a predetermined position by the shuttle mechanism, and a return movement in which the holding portion moves away from the predetermined position by the shuttle mechanism. During the substrate delivery operation, the control unit detects the first passage period (duration) during which the holding part or the substrate held by the holding part (hereinafter referred to as the "holding substrate") passes through the sensor area, and in When the first passing period is different from the first normal period set in advance, it is determined that the conveyance is abnormal.

In one embodiment of the present invention, the predetermined position is a position in the substrate storage container that stores the substrate, and the optical sensor forms the sensor area outside the substrate storage container.

In one embodiment of the present invention, the sensor area of the optical sensor is set at a position where the substrate is placed in a state shifted to the outside of the substrate storage container.

In one embodiment of the present invention, the holding portion has: an abutting portion that abuts on one end of the substrate; a retractable position shift prevention mechanism that pushes the other end of the substrate toward the abutting portion The substrate is stretched and fixed in a manner; and an expansion/contraction detection unit that detects the expansion/contraction movement of the position shift prevention mechanism. The position shift prevention mechanism fixes the substrate during the forward movement, and releases the fixing of the substrate during the backward movement. The expansion and contraction detection section detects the elongation of the positional deviation prevention mechanism in the state where the positional deviation prevention mechanism is fixing the substrate, and shifts the position when the positional deviation prevention mechanism releases the fixing of the substrate Prevent the shrinkage of the organization for testing.

In one embodiment of the present invention, the holding portion is a plate-shaped member that is flat along the horizontal direction, and when viewed in a plan view, the plate-shaped member has at least a portion of a portion that overlaps the substrate when the substrate is held. When the holding portion normally holds the substrate, the substrate and the hollow area of the plate-shaped member are completely overlapped in a plan view, and when the holding portion is moved back and forth by the reciprocating mechanism, the holding portion The above-mentioned hollow area passes through the above-mentioned path.

In an embodiment of the present invention, the optical sensor is formed along The transmissive sensor in the linear optical axis of the sensor area, and the control section uses the period during which the light projected by the transmissive sensor is shielded by the holding section or the holding substrate The detection is performed during the first passing period described above.

In an embodiment of the present invention, the optical sensor is a reflective sensor in which the sensor area is formed by light, and the control unit is used for the light projected by the reflective sensor. The period during which the holding portion or the holding substrate is reflected and received by the reflective sensor is detected as the first passing period.

In an embodiment of the present invention, the control unit judges the conveyance abnormality when the receiving operation of the substrate at a predetermined position is received by the holding unit. The receiving operation of the substrate includes a forward movement in which the holding portion moves to a predetermined position by the shuttle mechanism, and a return movement in which the holding portion moves away from the predetermined position by the shuttle mechanism. In the substrate receiving operation, the control unit detects the second passage period during which the holding portion or the holding substrate passes through the sensor area, and when the second passage period is different from the preset second normal period , It is judged that the conveyance is abnormal.

In one embodiment of the present invention, the first normal period and the second normal period have the same length.

In one embodiment of the present invention, the control unit sets the first normal period or the second normal period according to the moving speed of the holding unit by the reciprocating mechanism.

In one embodiment of the present invention, during the delivery operation, the control unit sets the moving speed of the holding portion by the shuttle mechanism in the return movement to be higher than that of the movement by the shuttle mechanism in the forward movement. The above-mentioned guarantee The moving speed of the holding part is slow.

An embodiment of the present invention provides a substrate transport method for transferring substrates to a predetermined position. The substrate transport method includes: a first forward step, which moves the holding portion holding the substrate toward a predetermined position; a delivery step, which performs an action of delivering the substrate from the above-mentioned holding portion to the predetermined position; and a first return step, which After the delivery step, the holding portion is retracted from the predetermined position; the first detection step is the holding portion or the holding portion for the first passing period during the period including the first forward step and the first returning step The held substrate (hereinafter referred to as the "holding substrate") is detected by the optical sensor during the first passing period of the sensor area formed on the path of the holding portion moving; and the first judgment step is performed at When the first passing period detected in the first detection step is different from the first normal period set in advance, it is determined that the conveyance is abnormal.

In an embodiment of the present invention, the holding portion includes: an abutment portion that abuts on one end of the substrate; and a retractable position shift prevention mechanism that pushes the other end of the substrate toward the abutment The above-mentioned substrate is fixed by extending the part. Furthermore, in the first advancing step, the positional deviation prevention mechanism pushes the other end of the substrate toward the abutting portion to fix the substrate to prevent positional deviation, and the positional deviation prevention mechanism The telescopic movement is detected. In the first return step, the fixation performed by the above-mentioned positional deviation prevention mechanism is released.

In one embodiment of the present invention, the moving speed of the holding portion by the reciprocating mechanism in the first forward movement is higher than the movement of the holding portion by the reciprocating mechanism in the first forward movement The speed is slow.

In an embodiment of the present invention, the above method further includes: a second forwarding step, which moves the holding portion toward the substrate located at a predetermined position; a receiving step, which performs a receiving action for the holding portion to receive the substrate located at the predetermined position; First 2 Returning step, which retreats the holding part from a predetermined position after the receiving step; and the second detection step, which involves applying the holding part or the holding substrate during the period including the second forwarding step and the second returning step Detect through the second pass period of the sensor area; and the second judgment step, which judges that the transport is abnormal when the second pass period detected in the second detection step is different from the preset second normal period .

In one embodiment of the present invention, the first normal period and the second normal period have the same length.

According to the embodiment of the present invention, it is possible to reliably detect that the substrate conveyed by the conveying part has been delivered to a predetermined position.

The above or further other objects, features, and effects of the present invention are clarified by referring to the accompanying drawings and the description of the embodiments described below.

1‧‧‧Substrate processing equipment

2‧‧‧Grading unit

3‧‧‧Processing Department

4‧‧‧Transfer unit

5‧‧‧Substrate storage container

5a‧‧‧Frame

5b‧‧‧cover

5c‧‧‧Substrate guide

6‧‧‧Control Department

7‧‧‧The next wall

7a‧‧‧Partition wall through hole

7b‧‧‧Bottom

8, 81‧‧‧Optical sensor

8a, 8c, 81a‧‧‧Projection part

8b, 8d, 81b‧‧‧light receiving part

12‧‧‧Processing unit

20‧‧‧Ontology

21‧‧‧Support

22‧‧‧Claw guide

22a‧‧‧Plane

22b‧‧‧Side part

23‧‧‧ Rear Guide Department

24‧‧‧Propeller Department

24a‧‧‧movable part

24b‧‧‧Fixed part

25‧‧‧Base

26、26A‧‧‧Elevating part

27, 27A‧‧‧Connecting part

28, 28A‧‧‧Retractable part

29‧‧‧Pusher detection department

31: Processing Unit

32: platform

34: Loading port opening and closing mechanism

34a: Gate component

34b: Gate drive unit

35: setting table

35a: upper horizontal plane

35b: Upper vertical surface

61: Storage Department

62: Judgment Department

63: Drive Control Department

64: Processing Control Department

200: User interface

801: Sidewall

802: Chamber

803: Rotating Chuck

804: Treatment liquid nozzle

805: supply pipe

806: Treatment Liquid Valve

807: Cup lifting mechanism

808: Treatment Cup

811: open

812: Gate

813: Gate Lifting Mechanism

814‧‧‧Rotating Motor

815‧‧‧Rotation axis

A‧‧‧Arrangement direction

A1‧‧‧Rotation axis

B‧‧‧Open

C, D, E‧‧‧Two-point arrow chain

CR‧‧‧Central Robot

F‧‧‧Two-point chain line

FW‧‧‧forward position

G‧‧‧Two-point chain line arrow

H1, H2‧‧‧Robot

HM‧‧‧Starting position

IR‧‧‧Indexing Robot

L‧‧‧Load port opening

LP‧‧‧Load Port

M‧‧‧Movement path

NHP‧‧‧Normal fixed hold mode

NP1‧‧‧The first normal period

NP2‧‧‧The second normal period

NP3‧‧‧3rd normal period

PP1‧‧‧The 1st Pass Period

PP2‧‧‧Second Pass Period

PP3‧‧‧The third pass period

PP4‧‧‧The 4th pass period

PP5‧‧‧Fifth Pass Period

RHP‧‧‧Real fixed hold mode

RLS1, RLS2, RLS3, RLS4‧‧‧Optical signal

S1~S8‧‧‧Step

S11~S16‧‧‧Step

SGP‧‧‧Signal acquisition period

SP1‧‧‧The first monitoring point

SP2‧‧‧The second monitoring point

t1~t6, t5a‧‧‧time

t11~t16, t15a‧‧‧time

W‧‧‧Substrate

Fig. 1A is a plan view showing a schematic configuration of a substrate processing apparatus.

Fig. 1B is a side view showing the schematic configuration of the substrate processing apparatus.

Figure 2 is a side view showing the schematic structure of the loading port and the indexing unit.

Fig. 3A is a plan view showing the schematic configuration of the robotic hand.

Fig. 3B is a side view showing the schematic configuration of the robot hand.

Figure 4 is a block diagram of the control system.

Fig. 5 is a flow chart showing the conveying action of the substrate.

FIG. 6A is a diagram showing an example of the operation when the substrate is normally placed in the substrate storage container.

FIG. 6B is a diagram showing an example of the operation when the substrate is normally placed in the substrate storage container.

FIG. 6C is a diagram showing an example of the operation when the substrate is normally placed in the substrate storage container.

FIG. 6D is a diagram showing an example of the operation when the substrate is normally placed in the substrate storage container.

FIG. 6E is a diagram showing an example of the operation when the substrate is normally placed in the substrate storage container.

FIG. 7A is a diagram showing an example of the operation when the substrate is not normally placed in the substrate storage container.

FIG. 7B is a diagram showing an example of the operation when the substrate is not normally placed in the substrate storage container.

FIG. 8A is a time sequence diagram showing the detection signal of the normal optical sensor and the detection signal of the pusher detection part in the substrate delivery operation.

FIG. 8B is a time sequence diagram showing the detection signal of the normal and abnormal optical sensor and the detection signal of the pusher detection part in the substrate delivery operation.

Fig. 9 is a side view showing the schematic configuration of the processing unit.

Fig. 10 is a flow chart showing the conveying action of the substrate in the substrate processing apparatus.

FIG. 11 is a time sequence diagram showing the detection signals of the normal and abnormal optical sensors in the substrate delivery operation.

Hereinafter, the first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1A is a plan view showing the schematic structure of the substrate processing apparatus, and FIG. 1B is a side view showing the schematic structure of the substrate processing apparatus.

The substrate processing apparatus 1 is an apparatus for processing a substrate using a chemical liquid. For example, the substrate processing apparatus 1 is a monolithic apparatus for applying chemical liquid treatment to the surface (upper surface) of the substrate W. The substrate W is a plate-shaped member configured with functional parts for realizing specific functions. More specifically, the substrate W is a substrate used in the manufacture of semiconductor devices (semiconductor devices), and may be a round silicon wafer. The chemical solution treatment is, for example, a treatment used in the main steps of a semiconductor manufacturing process such as cleaning treatment, etching treatment, resist coating treatment, and development treatment.

As shown in FIGS. 1A and 1B, the substrate processing apparatus 1 includes a load port LP, an indexer unit 2, a processing unit 3, a transfer unit 4, and a controller 6.

The load port LP is arranged at one end of the substrate processing apparatus 1, and in a plan view, a plurality of load ports LP are arranged at intervals along the arrangement direction A. Each load port LP is configured to hold the substrate storage container 5 storing the substrate W, and introduce the substrate W into the substrate introduction portion of the substrate processing apparatus 1. The substrate storage container 5 is an example of a mounting portion where the substrate W is mounted. The substrate W is supplied from the substrate storage container 5 toward the inside of the substrate processing apparatus 1.

The indexing unit 2 is a unit that is connected to the load port LP to carry out/carry in the substrate W with respect to the substrate storage container 5. The processing unit 3 has a plurality of processing units 31 and performs chemical liquid processing on the substrate W. The transfer unit 4 is a unit for holding the substrate W between the indexing unit 2 and the processing unit 3. The control unit 6 controls the substrate processing apparatus 1.

In this embodiment, the substrate processing apparatus 1 includes 12 processing units 12. More specifically, the substrate processing apparatus 1 includes three sets of processing units 3 stacked in the vertical direction, and each processing unit 3 is composed of four processing units 31 arranged in a plane. Furthermore, the substrate processing apparatus 1 includes a conveyance section that conveys the substrate. For example, the conveying unit includes an indexer robot (IR) included in the indexing unit 2 and a processing unit 3 The central robot CR possessed.

The indexing unit 2 is arranged between the load port LP and the processing unit 3. An indexing robot IR is installed inside the indexing unit 2. A user interface 200 is installed on the side of the indexing unit 2. The user interface 200 has a display unit that displays the state of the substrate processing apparatus 1 and is configured to operate the substrate processing apparatus 1 or input information through a touch panel provided in the display unit. The operation and input of the substrate processing apparatus 1 are not limited to using a touch panel, and can also be performed using a keyboard or a mouse.

The indexing robot IR takes out the unprocessed substrate W contained in the storage container 5 and transports it toward the pass unit 4. The unprocessed substrate W is held by the transfer unit 4. In addition, when the transfer unit 4 holds the processed substrate W that has been processed by the processing unit 31, the indexing robot IR transfers the substrate W from the transfer unit 4 toward the substrate storage container 5.

The indexing robot IR is provided with two robots H1 (refer to FIG. 2) arranged in a stacked state along the top and bottom, and these are examples of holding parts. Each robot H1 is a plate-shaped member that is flat in the horizontal direction when viewed from above, and one end is connected to the support part 21 (refer to FIG. 3). The other end has a hollow shape in which at least a part of a portion overlapping with the substrate W when the substrate W is held, the middle part of which is removed. Each robot H1 can hold one substrate W in a horizontal posture. The indexing robot IR moves the robot hand H1 in the horizontal direction and the vertical direction. In addition, the indexing robot IR changes the orientation of the robot H1 by rotating (rotating) around the vertical axis.

The indexing robot IR can move along the moving path M (refer to FIG. 1) in the indexing unit 2. The moving path M is designed to be parallel to the arrangement direction of the plurality of load ports LP. The indexing robot IR can move along the movement path M toward the indexing transfer position opposite to any substrate storage container 5, and at the indexing transfer position, the robot H1 can enter the opposite substrate storage container 5 .

The indexing robot IR moves the robot H1 in the horizontal direction at the indexing transfer position, so that the robot H1 enters and retreats with respect to the substrate storage container 5. The indexing robot IR performs a loading operation (delivery operation) in which the robot H1 enters the substrate storage container 5 while holding the substrate W, and then retreats after placing the substrate W in the substrate storage container 5. In addition, the indexing robot IR performs an unloading operation (receiving operation) in which the robot H1 enters the substrate storage container 5 and retreats after holding the substrate W stored in the substrate storage container 5. In this way, the indexing robot 1R is a substrate transfer device that transfers the substrate W to a predetermined position in the substrate storage container 5. The indexing robot IR also performs the same action on the transfer unit 4.

The center robot CR has the same structure as the index robot IR, and includes two robots H2 arranged in a stacked state along the vertical direction, and an example of these system holding parts. Each robot H2 is a plate-shaped member that is flat along the horizontal direction in a plan view, and one end is connected to the support part 21 (refer to FIG. 3). The other end of the robot H2 has a hollow shape in which at least a part of the portion overlapping the substrate W when the substrate W is held is removed. Each robot H2 can hold one substrate W in a horizontal posture. The center robot CR moves the robot hand H2 in the horizontal direction and the vertical direction. In addition, the center robot CR changes the orientation of the robot hand H2 by rotating (rotating) around the vertical axis.

The central robot CR is surrounded by a plurality of processing units 31 when viewed from above. The central robot CR makes the robot H2 face any processing unit 31 when carrying out the substrate transfer. For example, the central robot CR moves (rotates) to a position where the robot H2 can enter the processing unit 31 at a position where the processing unit 31 opposes the robot H2.

At the handover position of the processing unit, the central robot CR moves the robot hand H2 in the horizontal direction to enter and retreat relative to the processing unit 31. The center robot CR performs a loading operation (delivery operation) in which the robot H2 enters the processing unit 31 while holding the substrate W, and then retreats after placing the substrate W on the processing unit 31. In addition, the center robot CR performs an unloading operation (receiving operation) in which the robot hand H1 enters the processing unit 31 and retreats after holding the substrate W placed on the processing unit 31. In this way, the central robot CR is a substrate transfer device that transfers the substrate W to a predetermined position in the processing unit 31. The central robot CR also performs the same action on the transfer unit 4.

The center robot CR transports the unprocessed substrates W held in the transfer unit 4 toward each processing unit 31 one at a time. In addition, the center robot CR transfers the substrate W between the plurality of processing units 31 as necessary. The central robot CR transports the substrate W processed by the processing unit 31 from the processing unit 31 toward the transfer unit 4.

The processing unit 31 processes the substrate W. The processing performed by the processing unit 31 is, for example, washing processing. The processing performed by the processing unit 31 can also replace the washing processing and be other processing. The other treatments include, for example, chemical solution treatments such as etching treatment, coating treatment, and development treatment, or heat treatments such as heating treatment and cooling treatment.

Figure 2 is a side view showing the schematic structure of the loading port and the indexing unit. In FIG. 2, detailed descriptions are omitted by denoting the same symbols for the same components as described above.

The substrate storage container 5 as the placement portion of the substrate W is configured as a container that can accommodate a plurality of substrates W. The substrate storage container 5 is, for example, a FOUP (Front Opening Unified Pod) that stores the substrate W in a sealed state. The substrate storage container 5 can also replace FOUP, and be a SMIF (Standard Mechanical InterFace) transfer box, and an OC (Open Cassette), etc.

For example, when the substrate storage container 5 is installed in the load port LP, in the substrate storage container 5, a plurality of substrates W in a horizontal posture are separated from each other and stacked in a vertical direction. The substrate storage container 5 contains, for example, 25 substrates W. However, in FIG. 2, a part of the illustration of the substrate W is omitted for convenience.

The substrate storage container 5 has a frame 5a, a lid 5b, and a plurality of substrate guide portions 5c. The cover 5b can be detached from the front surface of the frame 5a, and the inside of the frame 5a is sealed by the cover 5b being installed on the front surface of the frame 5a. If the cover 5b is removed, it is convenient to form an opening B on the front surface of the frame 5a.

In order to accommodate 25 substrates W, a 25-layer substrate guide 5c is provided. The substrate guide portions 5c of each layer are provided on the left and right inner walls of the substrate storage container 5 in pairs and horizontally extending in the front-rear direction when viewed from the side of the cover 5b. The substrate guide 5c supports the substrate W by supporting the end portion on the lower surface side of the substrate W.

The load port LP is connected to the indexing unit 2 and is provided on the opposite side of the processing unit 3. The load port LP is provided with a setting stand 35, a platform 32, and a load port opening and closing mechanism 34.

The installation stand 35 is arranged on the side of the partition wall 7, and a drive mechanism such as an electric motor is housed in the lower part. This drive mechanism is connected to and drives the gate drive part 34b. The platform 32 is arranged on the upper horizontal surface 35a of the installation platform 35, and is installed to be movable in the horizontal direction so as to approach and leave the index unit 2 (refer to the two-point arrow chain C). The substrate storage container 5 is placed on the platform 32, and the platform 32 moves closer to the index unit 2 to be connected to the index unit 2. A loading port opening L communicating with the partition wall through hole 7a is provided on the upper vertical surface 35b of the setting platform 35.

The load port opening and closing mechanism 34 includes a gate member 34a and a gate drive unit 34b. The gate member 34a is inserted into the load port opening L to close the load port opening L. The shutter member 34a has a mechanism for holding the cover 5b. Normally, the gate member 34a is embedded The state of the load port opening L, and the load port opening L is closed.

The gate drive portion 34b is connected to the gate member 34a. The gate drive unit 34b moves the gate member 34a in the horizontal direction and the vertical direction.

The shutter member 34a has a mechanism for holding the cover 5b. The gate driving section 34b moves the gate member 34a from the load port LP toward the indexing unit 2 side (refer to the two-dot chain arrow D) with the gate member 34a holding the cover 5b, thereby disengaging the cover 5b from the substrate storage container 5. . In addition, by moving the gate member 34a in the vertical downward direction (refer to the two-dot chain arrow E), the substrate storage container 5 communicates with the indexing unit 2, and the robot H1, which becomes the indexing robot IR, can face the inside of the substrate storage container 5. The state of entry. The gate driving portion 34b is driven by a driving mechanism housed in the lower part of the installation table 35. Although the drive mechanism is typically composed of an electric motor and a ball screw, it is not limited to this, and it may be a drive mechanism using a cylinder. When the substrate storage container 5 is sealed, an operation opposite to the above-mentioned operation is performed, the opening B is closed with the lid 5b, and the load port opening L is closed with the shutter member 34a.

The optical sensor 8 is a sensor that optically detects the presence or absence of an object. For example, the optical sensor 8 may also be a transmissive sensor. In addition, the optical sensor 8 forms a sensor area on the moving path of the robot H1. The optical sensor 8 in the form of a transmissive sensor has a light projecting part 8a and a light receiving part 8b. The light projecting portion 8a and the light receiving portion 8b are arranged so that the upper and lower positions of the load port opening L are opposed to each other with the optical axis aligned. The optical sensor 8 forms a linear sensor area along the optical axis between the light projecting portion 8a and the light receiving portion 8b. The optical sensor 8 in the form of a transmissive sensor detects the light-emitting state and the light-shielding state. The so-called light-emitting state refers to a state where the light projected from the light-emitting portion 8a is not shielded but is received by the light-receiving portion 8b. The so-called light-shielding state means that the light projected from the light-emitting portion 8a is shielded by objects passing through the sensor area and will not be light-receiving The status received by part 8b. For example, when the indexing robot IR transfers the substrate W to the substrate storage container 5, the main body of the robot H1 or the substrate W held by the robot H1 shields the optical path (sensor area) between the light projecting part 8a and the light receiving part 8b. ). Accordingly, the detection state of the optical sensor 8 is switched between the light-emitting state and the light-shielded state by whether the body of the robot H1 or the substrate W exists in the sensor area. For example, the optical sensor 8 outputs an on/off signal to the determination unit 62 (see FIG. 4) to set the light emission state to be on (ON) and the light shielding state to be off (OFF).

The optical sensor 8 may also have the form of a reflective sensor. The optical sensor 8 in the form of a reflective sensor has a light-projecting portion 8c and a light-receiving portion 8d, and these are arranged at the lower or upper position of the load port opening L (shown in FIG. 2 at the lower position Example). The optical sensor 8 in the form of a reflective sensor is arranged such that the optical axis of the light projecting portion 8c and the optical axis of the light receiving portion 8d intersect in the sensor area. The sensor area at the load port opening L is set on the path of the robot H1 or the substrate W held by it. In other words, the sensor area is defined by the light projected from the light projecting portion 8c, reflected by the object located in the passing path, and received by the light receiving portion 8d. The optical sensor 8 in the form of a reflective sensor detects the light projection state and the reflection state. The so-called light-emitting state refers to a state where the light projected from the light-emitting portion 8c is not received by the light-receiving portion 8d. The so-called reflection state refers to a state where the light projected from the light projecting portion 8c is reflected by an object passing through the sensor area, and the reflected light is received by the light receiving portion 8d. For example, when the indexing robot IR transfers the substrate W to the substrate storage container 5, the main body of the robot H1 or the substrate W held by the robot H1 reflects the light projected from the light projecting portion 8c, and the reflected light is transmitted by the light receiving portion 8d received. Accordingly, the optical sensor 8 is switched between the light projection state and the reflection state according to whether the robot H1 or the substrate W exists in the sensor area. For example, the optical sensor 8 outputs a projected light shape to the determination unit 62 (refer to FIG. 4) The state is set to on, and the reflection state is set to off, the on/off signal.

By using the optical sensor 3, the passage of objects passing through the space can be correctly detected based on the on/off signal without blocking the passage of objects passing through the space.

The index unit 2 is covered by the partition wall 7. Thereby, the inside of the indexing unit 2 is isolated from the external ambient air, and a clean environment is maintained. The partition wall 7 connected to the load port LP is provided with a partition wall passage hole 7a for the substrate W to pass through. At the bottom 7b of the indexing unit 2, an indexing robot IR is arranged.

The index robot IR has two robots H1, a base part 25, an elevating part 26, a connecting part 27, and a pair of telescopic parts 28. The base part 25 is fixed to the bottom 7b of the indexing unit to form the base of the indexing robot IR.

The lifting part 26 extends vertically upward from the base part 25 and has a lifting mechanism inside. Although the lifting mechanism is typically composed of a motor, an encoder, and a ball screw, it can also be composed of a cylinder. The lifting part 26 can change the stop position of the robot H1 in the vertical direction. Specifically, the lifting part 26 can adjust the height position of the robot H1 to a picking position (lower position) and a placing position (upper position). The pick-up position is a position where the uppermost part of the claw guide 22 (see FIG. 3B) of the robot H1 when the substrate W is carried out from the substrate storage container 5 is lower than the lower surface of the substrate W to be carried out. The placement position is a height position where the lower surface of the robot H1 is higher than the upper surface of the substrate guide portion 5c when the substrate W is carried in toward the substrate storage container 5. The details of the composition of the robot H1 will be described later.

The connecting part 27 connects the lifting part 26 and the telescopic part 28, and transmits the lifting motion of the lifting part 26 to the telescopic part 28. The connecting part 27 connects the two telescopic parts 28 to the upper part. Each telescopic part 28 connects the support part 21 which supports the robot H1 to the upper part. The two telescopic parts 28 and the corresponding two supporting parts 21 are respectively connected to the two robot hands H1, and Two robots H1 can advance and retreat individually.

The telescopic part 28 has a plurality of joints, and performs telescopic action by rotating and driving the joint parts. The telescopic part 28 can change the position of the robot H1 in the horizontal direction by telescopic action. For example, regarding the upper robot hand H1, the position (solid line) at which the joint of the telescopic part 28 is contracted in the horizontal direction is set as the starting position HM (reverse position), and the position where the joint is extended in the horizontal direction ( The two-point chain line F) is set to the forward position FW (entry position). The starting position HM is the reference position of the robot H1 in the horizontal direction. The expansion and contraction part 28 can reduce the installation space by expansion and contraction of a plurality of joints. The same goes for the lower robot H1. In this way, the telescopic portion 28 constitutes a reciprocating mechanism for reciprocating the robot hand H1.

The indexing unit 2 obtains the unprocessed substrate W from the substrate storage container 5 by the indexing robot IR, and delivers it to the transfer unit 4. The substrate W processed by the processing unit 31 is placed in the transfer unit 4. The processed substrate W can be transported toward the substrate storage container 5 and stored by the indexing robot IR.

Fig. 3A is a plan view showing the schematic configuration of the robotic hand, and Fig. 3B is a side view showing the schematic configuration of the robotic hand. The detailed description is omitted by assigning the same symbols to the above-mentioned components.

As shown in FIG. 3A, the robot hand H1 has a main body 20, a supporting part 21, a claw guide part 22, a rear guide part 23, and a pusher part 24.

The main body 20 is a plate-shaped member that is flat along the horizontal direction in a plan view (viewed from the upper surface), and one end is connected to the supporting portion 21. The other end has a hollow shape in which at least a part of a portion overlapping with the substrate W when the substrate W is held is removed. The main body 20 can hold the substrate W in a horizontal position. For example, the hollow shape is a V-shaped shape. The main body 20 is formed of, for example, a lightweight and strong material such as ceramic or aluminum.

When the robot H1 passes through the sensor area of the optical sensor 8, by The robot H1 has a hollow shape, and the optical sensor 8 can easily detect whether the substrate W is present on the robot H1. Specifically, when the substrate W is held by the robot H1, the substrate W overlaps the hollow area of the robot H1. By using the optical sensor 8 to detect the overlapped portion of the substrate W, it can be easily detected that the substrate W is held on the robot hand H1. As will be described later, even if the substrate W exists on the robot H1 in a state of straddling the robot H1, the substrate W overlaps the hollow area of the robot H1. By using the optical sensor 8 to detect the overlapped portion of the substrate W, it can be easily detected that the substrate W is located on the robot hand H1.

The pawl guide 22 is respectively provided at each front end of the V-shaped shape of the main body 20, and has an L-shaped shape when viewed from the side. The claw guide 22 has a structure in which the substrate W is supported from below by a flat surface portion 22a, and the peripheral end of the substrate W is supported by a side surface portion 22b.

The rear guide portion 23 is disposed on the support portion 21 side of the claw guide portion 22 on the surface of the main body 20, and is arranged at a fixed distance from the claw guide portion 22 in such a way that the substrate W can be supported. The rear guide portion 23 is substantially cylindrical in this embodiment, and has an inclined portion with a slope that becomes thinner from the middle section of the cylinder toward the upper side, so as to be configured to support the peripheral end of the substrate W by the inclined portion.

The substrate W is supported by four points of two claw guides 22 and two rear guides 23. As a result, compared with the case where it is directly supported on the entire surface of the main body 20, the contact area with the back surface and the end of the substrate W is smaller, and accordingly, the damage or contamination of the back surface of the substrate W can be reduced.

As shown in FIG. 3B, the upper surface of the substrate W held by the claw guide 22 and the rear guide 23 is lower than the uppermost part of the claw guide 22 and the rear guide 23. Therefore, the substrate W is not easily detached from the robot H1.

The pusher part 24 has a movable part 24a and a fixed part 24b. Movable part 24a It is connected to the fixing portion 24 b, and the fixing portion 24 b is fixed to the support portion 21.

The movable portion 24a is an expansion and contraction portion that can perform expansion and contraction in a direction along the horizontal extension of the main body 20 (two-dot chain line arrow G in FIG. 3A). The movable portion 24a is driven to expand and contract by, for example, a spring, a cylinder, a motor, or the like. When the substrate W is placed on the robot H1, the substrate W is supported by the claw guide 22 and the rear guide 23. In this state, by extending the movable portion 24a toward the substrate W side, the substrate W can be sandwiched and fixedly held. For example, by extending the movable part 24a toward the substrate W and pressing the end of the substrate W, the end of the substrate W is pressed against the side surface 22b of the claw guide 22, and the movable part 24a and the claw guide 22 sandwiches the substrate W and fixes it. Conversely, as the movable portion 24a contracts and moves away from the end of the substrate W, the fixed holding is released.

When the indexing robot IR or the center robot CR transports the substrate W, if the linear motion or rotation motion is performed at a high speed, the substrate W may fall due to vibration or inertial force. However, by fixing and holding the substrate W on the robot H1, the pusher portion 24 functions as a positional deviation prevention mechanism for preventing the positional deviation of the substrate W. Therefore, even when the index robot IR or the center robot CR performs linear motion or rotation motion at high speed, the positional deviation of the substrate W can be prevented. Since the substrate W is fixed and held, the possibility of dropping the substrate W can be eliminated. Therefore, the indexing robot IR or the center robot CR can move at the same high speed as the robot H1 without holding the substrate W.

The pusher part 24 has a pusher detection part 29 (a telescopic detection part). The pusher detection part 29 estimates the extension amount of the movable part 24a. If the movable portion 24a is extended by more than the fixed extension amount, the movable portion 24a can fix and hold the substrate W. For example, the pusher detection portion 29 detects the extended state when the movable portion 24a becomes more than the fixed extension amount, and detects the contracted state when the fixed extension amount is less than full. 29 cases of pusher detection department For example, an on/off signal that sets the extended state as an on signal and the contracted state as an off signal is output to the determination section 62. If the signal output from the pusher detection unit 29 is ON, the determination unit 62 determines that the substrate W is in a fixed holding state, and if it is disconnected, the substrate W is determined to be an unlocked state. The fixed amount of elongation is determined based on design data or past performance, and is stored in the storage unit 61. For example, instead of detecting the elongation amount by the pusher detection unit 29, the elongation amount may be detected based on a captured image obtained by camera photography.

Figure 4 is a block diagram of the control system. As shown in FIG. 4, the control part 6 controls each component part of the substrate processing apparatus 1. As shown in FIG. The control unit 6 has a determination unit 62, a storage unit 61, a drive control unit 63, and a processing control unit 64.

The storage unit 61 stores information necessary to control each component of the substrate processing apparatus 1. For example, as a normal period, the storage unit 61 stores the substrate W from the optical sensor 8 when the substrate W is normally delivered during the substrate delivery operation in which the indexing robot IR delivers the substrate W held by the robot H1 to the substrate storage container 5 The duration of the output disconnect signal. In the substrate delivery operation, the indexing robot IR moves the robot H1 holding the substrate W from the starting position HM to the forward position FW, and moves the robot H1 from the placement position to the picking position and moves vertically downward and will be moved by the robot H1. The substrate W held by H1 is placed on the substrate guide portion 5c for placement movement, and the robot H1 is composed of a return movement that moves the robot H1 from the advance position FW to the start position HM. The normal period is the period during which the substrate W is normally transported, which is determined based on the design data, evaluation data, and past performance, and can be arbitrarily changed according to the moving distance or moving speed of the robot H1. In addition, during the normal period, the slight time deviation caused by the operation deviation can also be considered, so that it has a certain margin on the positive side and/or the negative side.

For example, the storage unit 61 stores the signals on the substrate as a normal timing signal. The on-signal output from the pusher detection unit 29 at the start of the forward movement (starting position HM) during the auxiliary operation. In addition, the storage unit 61 stores the disconnection signal output from the pusher detection unit 29 at the end of the forward movement (forward position FW) during the substrate delivery operation as a normal timing signal. These normal timing signals are determined based on design data, evaluation data, and past performance. In addition, the normal timing signal can also consider the slight time deviation caused by the action deviation, so that it has a certain margin on the positive side and/or the negative side.

For example, the storage unit 61 stores the on/off signal patterns output by the pusher detection unit 29 in a time series when the substrate W is normally fixed and held during the substrate delivery operation. Specifically, the normal fixed holding mode NHP means that the indexing robot IR moves the robot H1 to the forward position FW from the starting position HM to the forward position FW in a state where the indexing robot IR holds the substrate W until the robot H1 is released. Switching of the on/off signal of the time series output from the pusher detection unit 29. The normal fixed maintenance mode NHP is determined based on design data, evaluation data, and past performance. The normal fixed hold mode NHP can also consider the slight time deviation caused by the action deviation, so that it has a certain margin on the positive side and/or the negative side.

In addition, the storage unit 61 stores various recipes representing a series of device operations. For example, the storage unit 61 stores an abnormality recipe. The recipe at the time of abnormality is when the judgment section 62 judges that it is abnormal based on the on/off signal detected by the optical sensor 8 during the delivery operation of the substrate, and when the control operation is performed on each component of the substrate processing apparatus 1 Used. As a recipe at the time of an abnormality, the storage unit 61 stores, for example, that the indexing robot IR and the gate drive unit 34b are stopped immediately, and the processing unit 31 is stopped after processing, and the center robot CR is stopped after the substrate is transported, and sends out an abnormality indication. The alarm is a series of device actions. The recipe is also the same when the abnormality is based on the on/off signal from the pusher detection unit 29. The recipe when an abnormality occurs, that is, the device action when an abnormality occurs, can be changed arbitrarily.

The ON/OFF signal detected by the optical sensor 8 is input to the determination unit 62. Regarding the transfer operation of the substrate W, the judging unit 62 sets the duration of the disconnection signal output from the optical sensor 8 accompanying the movement of the robot H1 as the passing period. The judging unit 62 sets the timing when the signal input from the optical sensor 8 changes from on to off as the measurement start point, and thereafter sets the timing from off to on as the measurement end point. When the signal of the optical sensor 8 has not been turned off to on even after a predetermined period has passed since the measurement start point, the determination unit 62 sets the time point when the predetermined period has elapsed as the measurement end point. The determination unit 62 compares the passing period with the normal period stored in the storage unit 61. The judging section 62 judges that the conveying operation of the substrate W is normal when the passing period coincides with the normal period, but judges that the conveying operation of the substrate W is abnormal (abnormal conveying) at the same time. When it is determined that the conveyance is abnormal, the control unit 6 controls each component of the control substrate processing apparatus 1 to execute the abnormality recipe.

When a plurality of normal periods are stored in the storage unit 61, a specific normal period can be selected according to the moving speed of the robot H1. The control unit 6 automatically selects a specific normal period according to a correspondence table that establishes a correspondence between the moving speed of the robot H1 and the normal period. The specific normal period can also be selectively designated by the user through input from the input unit (not shown).

The ON/OFF signal detected by the pusher detection unit 29 is input to the determination unit 62. The determination section 62 interprets the conduction signal output from the pusher detection section 29 when the movable section 24a becomes equal to or greater than the fixed extension amount, as detecting the fixed holding state of the substrate W. In addition, the determination section 62 interprets the disconnection signal output from the pusher detection section 29 when the movable section 24a is less than the fixed extension amount, as detecting that the substrate W has been released from the fixed state.

The judging part 62 will output the output from the pusher detection part 29 at a specific timing. The ON/OFF signal is compared with the information of the normal ON/OFF signal at a specific time sequence stored in the storage unit 61. The judging section 62 judges that the on/off signal output from the pusher detection section 29 at a specific timing is consistent with the information of the normal on/off signal at the specific timing stored in the storage section 61 to determine whether the substrate W is fixed and maintained The state and/or the unfixed state are normal, but the fixed holding state and/or the unfixed state of the substrate W are not determined to be abnormal (abnormal) at the same time. When it is determined to be abnormal, the control unit 6 controls each component of the substrate processing apparatus 1 to execute the abnormal time recipe.

In addition, the judging unit 62 can also switch the time-series on/off signal output from the pusher detection unit 29 (the actual fixed hold mode RHP) and the normal time-series on/off signal stored in the storage unit 61 The switching (normal fixed hold mode NHP) is compared. When the actual fixed holding mode RHP is consistent with the normal fixed holding mode NHP, the judging section 62 judges that the fixed holding state and/or release of the fixed state of the substrate W is normal, but does not judge the fixed holding state and/or release of the substrate W at the same time The status is abnormal (abnormal). When it is determined to be abnormal, the control unit 6 controls each component of the substrate processing apparatus 1 to execute the abnormal time recipe.

The drive control unit 63 controls the drive of the index robot IR, the center robot CR, and the gate drive unit 34b. When the determination unit 62 determines that it is abnormal, the drive control unit 63 immediately stops the indexing robot IR and the gate driving unit 34b according to the abnormality recipe, and stops the center robot CR after the substrate is transported.

The processing control unit 64 controls the processing of the processing unit 31. The specific processing is in accordance with the processing recipe stored in the storage unit 61. The processing control unit 64 continues the processing of the processing unit 31 according to the recipe at the time of the abnormality when the determination unit 62 determines that it is abnormal, and stops the operation of the processing unit 31 after the processing ends.

The control unit 6 is composed of a central processing unit (CPU), ROM (read-only memory) Memory; Read-only Memory), RAM (Random-Access Memory), and storage media, drive circuits and communication circuits such as fixed disks or SSDs (Solid State Drive) constitute. The communication circuit includes a circuit for communication such as RS-232C (Recommended Standard 232C by the American Industry Association) or Ethernet (registered trademark), and a circuit for digital or analog signal input and output. The communication circuit not only communicates between the control unit 6 and the optical sensor 8, the pusher detection unit 29, various drive units, and the processing unit 31, or transfers input and output signals, but also communicates with the load port LP or external control equipment, etc. Communication of peripheral equipment or transmission of input and output signals.

Fig. 5 is a flowchart showing the transfer operation (transfer operation) of the substrate. 6A to 6E are diagrams showing examples of operations when the substrate is normally placed in the substrate storage container. FIG. 8A is a timing diagram showing the detection signal of the optical sensor 8 and the detection signal of the pusher detection portion 29 in the substrate delivery operation according to the time sequence. The detailed description is omitted by assigning the same symbols to the same components as the above. In FIG. 8A, the time-series on/off signal output from the optical sensor 8 when the substrate delivery operation is normal is set as the optical signal RLS1.

<Step S1> The substrate storage container is placed

The substrate storage container 5 is placed on the platform 32. The cover 5b closes the opening B. The platform 32 moves the substrate storage container 5 on the platform 32 toward the indexing unit 2 and makes the cover 5b contact the gate member 34a.

The load port opening and closing mechanism 34 causes the shutter member 34 a to hold the cover 5 b and moves the shutter driving portion 34 b from the substrate storage container 5 toward the indexing unit 2. With this operation, the lid 5b is detached from the substrate storage container 5. In addition, the load port opening and closing mechanism 34 moves the gate drive portion 34b in the vertical downward direction, so that the substrate storage container 5 and the indexing unit 2 is connected, and the robot hand H1 of the indexing robot IR can enter the state of the substrate storage container 5.

<Step S2> Take out the substrate from the substrate storage container

The indexing robot IR performs the receiving operation of the substrate W. The board receiving operation is composed of the forward movement (the second forward step), the acquisition movement, and the backward movement (the second backward step). The indexing robot IR, which is waiting at the indexing transfer position, moves the vertical position of the robot H1 toward the picking position. Then, the indexing robot IR moves the robot H1 toward the lower part of the substrate guide 5c holding the substrate W in the substrate storage container 5, and moves the robot H1 from the starting position HM to the forward position FW. mobile.

After the robot H1 reaches the forward position FW, the indexing robot IR performs an acquisition movement to raise the robot H1 from the picking position to the placing position. By obtaining the movement, the substrate W placed on the substrate guiding portion 5c is lifted by the robot hand H1 and supported by the claw guiding portion 22 and the rear guiding portion 23. In this state, the movable portion 24 a extends toward the substrate W side, and presses the substrate W against the claw guide portion 22. The substrate W is in a state of being sandwiched between the movable portion 24a and the claw guide portion 22, and is fixedly held. The pusher detection section 29 detects the conduction signal when the movable section 24 a becomes equal to or greater than the fixed extension amount, and outputs the detected conduction signal to the determination section 62.

The indexing robot IR moves the robot H1 back from the forward position FW to the starting position HM in order to move the robot H1 back from the substrate storage container 5 while the robot H1 is holding the substrate W fixedly.

<Step S3> Process the substrate

The indexing robot IR makes the robot H1 enter while holding the substrate W The transfer unit 4 and the substrate W are placed on the transfer unit 4. After the placement, the indexing robot IR moves the robot hand H1 back toward the outside of the transfer unit 4. The substrate W placed on the transfer unit 4 is transported toward the processing unit 31 by the center robot CR. The center robot CR is also transported in a state where the substrate W is fixed and held in the same way as the indexing robot IR.

The chemical solution processing is performed on the substrate W that is transported to the processing unit 31. The chemical liquid treatment is, for example, a cleaning process. The chemical liquid is supplied to the substrate W and the substrate W is cleaned. Instead of washing treatment, etching treatment, coating treatment, or development treatment may be performed. In addition, it may be a treatment different from the chemical solution treatment, for example, a heat treatment such as a heating treatment or a cooling treatment. The substrate W processed by the processing unit 31 is taken out from the processing unit 31 by the central robot CR and placed on the transfer unit 4.

<Step S4> Deliver the substrate to the substrate storage container

The indexing robot IR performs the delivery action of the substrate W. The board delivery operation is composed of forward movement (first forward step), placement movement, and return movement (first backward step). The substrate W placed on the transfer unit 4 is fixedly held by the robot H1. The indexing robot IR moves to the indexing transfer position of the substrate storage container 5 as the storage object of the substrate W in the state where the robot H1 holds the substrate W fixedly. After the movement, as shown in FIG. 6A, the robot H1 rotates toward the direction opposite to the opening B, and moves the vertical position to the placement position (time t1). At time t1, since the optical sensor 8 is in the light-emitting state, it outputs a conduction signal, and because the movable portion 24a is in the extended state, the pusher detection portion 29 outputs a conduction signal.

<Step S5> Compare whether the signals of the pusher detection part are consistent

Next, as shown in FIG. 6B, the indexing robot IR is to hold the substrate W in a fixed position. In the state, the robot H1 is entered toward the inside of the substrate storage container 5, and the forward movement from the starting position HM to the forward position FW is started (time t2). The judging unit 62 serves as the first monitoring point SP1 at the beginning of the road movement, and compares the signal output from the pusher detection unit 29 with the normal timing signal of the first monitoring point SP1 stored in the storage unit 61. Since the substrate W must be fixedly held at the first monitoring point SP1, the normal timing signal of the first monitoring point SP1 stored in the storage portion 61 is the ON signal. The judging unit 62 continues the processing when the result of the comparison is that the two signals are consistent, and executes the abnormal time recipe at different times (NO in step S5). The first monitoring point SP1 does not have to be immediately before the start of the onward movement, and may be before the fixed period when the onward movement starts. In addition, in order to obtain the time-series pattern of the signal output from the pusher detection unit 29, the determination unit 62 may start the acquisition of the on/off signal (signal acquisition period SGP).

After starting the forward movement, if the robot H1 reaches the loading port opening L, the fixed and held substrate W interrupts the optical axis of the optical sensor 8, and the signal output from the optical sensor 8 toward the determination unit 62 is The self-on signal is switched to the off signal (time t3). The judging part 62 regards the switching of the on signal input from the optical sensor 8 to the off signal as the starting point of the passing period, and starts measuring the duration of the off signal.

Next, as shown in Fig. 6C, the robot hand H1 reaches the forward position FW. After reaching the forward position FW, the control part 6 releases the pressing against the substrate W by shrinking the movable part 24a. By releasing the pressing force toward the substrate W, the substrate W can be placed on the substrate guide portion 5c. Since the movable portion 24a is in the contracted state, the signal output from the pusher detection portion 29 toward the determination portion 62 is switched from the on signal to the off signal (time t4). The judging unit 62 serves as the second monitoring point SP2 as the end of the path movement, and compares the signal output from the pusher detection unit 29 with the normal timing signal of the second monitoring point SP2 stored in the storage unit 61. Since the board W must be unfixed at the second monitoring point SP2, The normal sequence signal of the second monitoring point SP2 stored in the storage unit 61 is an off signal. When the result of the comparison is that the two signals are the same (YES in step S5), the judging unit 62 continues the processing, but when they are not the same (NO in S5), executes the abnormal time recipe. The second monitoring point SP2 does not have to be immediately after the onward movement is completed, and may be after the onward movement is completed and after a fixed period has elapsed.

In addition, when the determination unit 62 obtains the time-series pattern of the signal output from the pusher detection unit 29 (the actual fixed hold mode RHP), it ends the acquisition of the on/off signal. The determination unit 62 compares the acquired actual fixed holding pattern RHP with the normal fixed holding pattern NHP stored in the storage unit 61. When the result of the comparison is that the two modes are consistent (YES in step S5), the judging unit 62 continues the processing, and when they are different (NO in step S5), executes the abnormal recipe.

When the determination unit 62 determines that it is normal based on the signal output from the pusher detection unit 29 (YES in step S5), the indexing robot IR is maintained at the forward position FW, and the vertical position of the robot H1 is moved downward from the placement position. Placement movement to the pickup position. By the placement movement, the substrate W held inside the claw guide portion 22 and the rear guide portion 23 is placed on the substrate guide portion 5c.

<Step S6> Retreat the robot H1

Next, as shown in FIG. 6D, in order to retreat the robot H1 from the substrate storage container 5, the indexing robot IR performs a return movement of moving the robot H1 from the forward position FW to the starting position HM. If the substrate W is normally placed on the substrate guide portion 5c, there is no substrate W on the robot H1. Therefore, if the hollow area of the robot H1 (the area between the non-existent parts, that is, the area between the V-shaped parts) of the robot H1 reaches the optical axis while passing through the optical axis of the optical sensor 8, the optical sensor 8 changes from the light-shielded state to Projection state. Accordingly, since the light The signal output by the learning sensor 8 changes from the on signal to the off signal (time t5). The determination unit 62 ends the measurement of the duration of the disconnection signal output from the optical sensor 8 at the time point when the signal output from the optical sensor 8 changes from the disconnection signal to the conduction signal. After passing through the hollow area of the robot H1, the output of the optical sensor 8 is switched from an off signal to an on signal. If the robot H1 reaches the starting position HM, the return movement ends (Figure 6E, time t6). When the substrate W is normally delivered for operation, the period from the time t3 when the signal output by the optical sensor 8 changes from the on signal to the off signal to the time t5 when the signal from the off signal changes to the on signal , Becomes the first pass period PP1.

When the indexing robot IR moves the robot H1 backward from the substrate storage container 5, it can be set to a speed slower than the conveying speed when moving forward. By reducing the speed when moving back, the detection accuracy of the optical sensor 8 when moving back can be improved.

<Step S7> Compare whether the optical sensor signals are consistent

The determination unit 62 compares the first passing period PP1 measured during the delivery operation of the substrate W with the first normal period NP1 stored in the storage unit 61. For example, the first normal period NP1 is the period from time t3 to t5 from the off signal output from the optical sensor 8. When the judgment unit 62 compares the first passing period PP1 with the first normal period NP1 set in advance and stored in the storage unit 61 and the result is consistent, it judges that it is normal (YES in S7), and continues processing, and At different times, it is judged as abnormal (NO of S7), and the formula when abnormal is executed. When comparing the first passing period PP1 with the first normal period NP1, it is also possible to make a determination with a margin of about ±10% with respect to the first normal period NP1.

For example, the stored first normal period NP1 is 2.8 seconds or less. According to design values and experiments, around 2.5 seconds is an appropriate value. If there is an abnormality, it is 3.0 seconds or more, then 2.5 seconds plus a margin of about 10%, and the first normal period NP1 is set to 2.8 seconds or less. As described above, since the first normal period NP1 can be arbitrarily changed according to the movement distance or the movement speed, it is not limited to these values. In addition, the first normal period NP1 may have a range of upper and lower limits such as 2.2 seconds or more and 2.8 seconds or less. In this way, by providing a margin, it is possible to prevent a situation in which small non-problematic deviations of operation are detected as errors. If the first passing period PP1 is judged to be normal by the judging unit 62, a series of substrate delivery operations performed by the indexing robot IR is ended.

Here, the case where the substrate W is not normally placed on the substrate guide part 5c by the robot H1, in other words, the case where the substrate W is not normally delivered to the substrate guide part 5c as a predetermined position is performed Description. For example, the substrate W may be warped into a concave shape due to the process. After the substrate W is placed on the substrate guide portion 5c, due to the warpage of the substrate W, even if the robot H1 has been lowered to the pickup position, a part of the lower surface of the substrate W is still with the side surface 22b of the robot H1. The upper end may be the same height or lower than the upper end of the side part 22b of the robot H1.

7A to 7B are diagrams for explaining the operation when the substrate is not normally placed in the substrate storage container. FIG. 8B is a time sequence diagram showing the detection signal of the normal and abnormal optical sensor and the detection signal of the pusher detection part in the substrate delivery operation. Since the robot H1 enters the forward position and descends to the pick-up position is the same as in FIGS. 6A to 6C, the description is omitted. The description of the same parts as those in FIG. 8A is also omitted. In FIG. 8B, the time-series on/off signal output from the optical sensor 8 when an abnormality occurs during the substrate delivery operation is set as the optical signal RLS2.

As shown in FIG. 7A, in order to place the substrate W on the substrate by the indexing robot IR After the board guide 5c is placed and moved, when the robot H1 moves back from the forward position FW to the starting position HM, the upper end of the side surface 22b where the robot H1 exists will hook the end of the substrate W or The situation of the bottom surface and so on. In the hooked state, the substrate W is not supported by the claw guide 22 and the rear guide 23, and a part of the substrate W straddles the side surface 22b and is placed on the robot H1 in an unstable state . After the placement movement, since the state of retracting the movable portion 24a is normal, the judging section 62 judges that the disconnection signal output from the pusher detecting section 29 is the normal state (FIG. 6C, time t4). Therefore, even when the substrate W is placed on the robot H1 in an unstable state, the abnormality cannot be detected by the pusher detection unit 29.

On the other hand, even if the hollow area of the robot H1 (the area between the V-shaped parts as the non-existent part of the component) reaches the optical axis (time t5) in the optical axis passing through the optical sensor 8, because the robot H1 There is a substrate W on H1, so the optical sensor 8 does not change from a light-shielding state to a light-emitting state, and its output signal is maintained as an off signal. As shown in FIG. 7A, the robot H1 continues to move back, and the output of the optical sensor 8 changes to a conduction signal (time t5a) when the substrate W passes through the optical axis. The determination section 62 ends the measurement of the duration of the disconnection signal of the optical sensor 8 at the time point when the signal output from the optical sensor 8 changes from the disconnection signal to the conduction signal. If the robot H1 reaches the starting position HM, the return movement ends (Figure 7B, time t6). When the substrate W is not transported normally, the signal output from the optical sensor 8 changes from the on signal to the off signal at time t3 to the time t5a when the off signal changes to the on signal The period becomes the second pass period PP2.

The determination unit 62 compares the measured second pass period PP2 with the first normal period NP1 stored in the storage unit 61 for the delivery operation of the substrate W. The determination unit 62 compares the second pass period PP2 with the first normal period NP1 stored in the storage unit 61. As shown in FIG. 8B, the second pass period PP2 and the first normal period NP1 stored in the storage unit 61 are compared. Different, so the recipe is executed abnormally.

<Step S8> Execution of recipe when abnormal

When the determination unit 62 determines that it is abnormal, it causes each component of the substrate processing apparatus 1 to execute the abnormal time recipe stored in the storage unit 61. For example, the recipe at abnormal time includes a series of actions including the immediate stop of the indexing robot IR and the gate drive unit 34b, the post-processing stop of the processing unit 31, the stop after the substrate transfer of the center robot CR, and the generation of an alarm. The alarm is the warning display of the main screen of the substrate processing apparatus 1, the generation of sound, the display command output of the pop-up message to the main computer through the communication line, and so on. By generating an alarm, the device user can be notified that the substrate processing device 1 is abnormal. When the execution of the recipe is completed in an abnormal situation, the judging unit 62 also sets the series of conveying operations to end.

According to the substrate transfer device of the first embodiment of the present invention described above, an optical sensor can be used for a series of substrate W delivery operations when the robot H1 places the substrate W on the substrate guide portion 5c of the substrate storage container 5 8 detection signals to determine whether it is in a normal state or in an abnormal state. More specifically, the passing period can be measured based on the duration of the disconnect signal generated when the optical sensor 8 detects the body of the robot H1 or the substrate W. By comparing whether the passing period is consistent with the normal period stored in the storage unit 61, it can be determined whether the delivery operation of the substrate W is normal or abnormal.

Next, the following state will be described: the substrate W is not correctly placed on the substrate guide portion 5c of the substrate storage container 5 as shown in FIG. 6E. For example, the substrate W is positioned on the right side of the state shown in FIG. 6E. W is placed so as to be offset so as to protrude from the substrate storage container 5. The sensor area of the optical sensor 8 is set at a position capable of detecting the substrate W placed in a state shifted to the outside of the substrate storage container 5 for detection. because Therefore, the optical sensor 8 can detect that the substrate W is placed in a shifted state. In this case, all are detected as other abnormal conditions.

For the receiving operation of a series of substrates W when the robot H1 receives the substrate W placed in the substrate guide portion 5c of the substrate storage container 5, it can also be determined as a normal state or an abnormal state based on the output of the optical sensor 8 . Specifically, the second passing period is measured based on the duration of the off signal generated by the optical sensor 8 detecting the robot H1 or the substrate W. It is also possible to determine whether the receiving operation of the substrate W is in a normal or abnormal state by comparing whether the second passing period is consistent with the second normal period stored in the storage unit 61.

More specifically, in the second forward step, after measuring that the body of the robot H1 that does not hold the substrate W passes through the sensor area of the optical sensor 8, to the second backward step, the robot H1 body and the machine The second passing period until the substrate W held by the hand H1 passes through the sensor area. The determining unit 62 determines whether the second passing period is different from the second normal period set in advance and stored in the storage unit 61. The judging unit 62 judges that it is normal when there are no different situations, and judges that the conveying is abnormal in different situations.

If the substrate W is warped, even after the substrate W is placed on the substrate guide 5c, and the robot H1 is lowered to the pickup position, there is still a part of the lower surface of the substrate W that is equal to the upper end of the side surface 22b of the robot H1 The height may be lower than the upper end of the side part 22b of the robot H1. In this case, when the robot H1 moves back from the forward position FW to the starting position HM, the upper end of the side surface 22b of the robot H1 will hook onto the end or the lower surface of the substrate W. At this time, the substrate W will not be held by the claw guide portion 22 and the rear guide portion 23, and a part of the substrate W will straddle the upper end of the upper side portion 22b and be placed on the robot H1 in an unstable state. In this way, the substrate W is not When the stable state is placed on the robot H1, there is a possibility that an abnormality cannot be detected based on the on/off signal from the pusher detection unit 29. Even in such a situation, the abnormality determination can still be performed by the determination section 62 based on the on/off signal from the optical sensor 8, so that the abnormality can still be detected.

In addition, the judging unit 62 causes the components of the substrate processing apparatus 1 to execute an abnormal recipe. By executing the recipe in the event of an exception, the conveying action is stopped. When an alarm is issued when the recipe is executed abnormally, the user of the substrate processing apparatus 1 can immediately know that the substrate processing apparatus 1 is in an abnormal state. As a result, the transfer of the substrate W can be stopped as soon as possible, and the influence on subsequent steps can be reduced.

The present invention is not limited to the above-mentioned embodiment, and can be modified and implemented as follows. Hereinafter, the second embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Fig. 9 is a side view showing the schematic configuration of the processing unit. The detailed description is omitted by denoting the same symbols for the same components as the above. The processing unit 31 is a single-piece processing section for performing liquid processing such as cleaning processing or etching processing on the substrate W.

The processing unit 31 has a chamber 802 inside which is partitioned by a closed space surrounded by a side wall 801. The chamber 802 is provided with a rotating chuck 803 that holds and rotates the substrate W, a processing liquid nozzle 804, a rinse liquid nozzle (not shown), an organic solvent nozzle (not shown), and a rotating chuck 803 that accommodates it. Cylindrical processing cup 808. The processing liquid nozzle 804 supplies the processing liquid supplied from the processing liquid supply unit to the surface (upper surface) of the substrate W held by the spin chuck 803. The rinse liquid nozzle supplies the rinse liquid supplied from the rinse liquid supply part to the surface (upper surface) of the substrate W held by the spin chuck 803. The organic solvent nozzle supplies organic solvent to the surface (upper surface) of the substrate W held by the spin chuck 803 The organic solvent supplied by the solvent supply part.

An opening 811 is formed in the side wall 801 of the cavity 802 in such a way that the substrate W can be carried in and out of the cavity 802. The center robot CR (refer to FIG. 1) arranged on the outer side of the chamber 802 allows the robot H2 (refer to FIG. 1) to access the inside of the chamber 802 through the opening 811. Thereby, the central robot CR can place the unprocessed substrate W on the rotating chuck 803 or take out the processed substrate W from the rotating chuck 803. A gate 812 for opening and closing the opening 811 in the vertical direction is provided on the outer side of the side wall 801. A gate lifting mechanism 813 is combined with the gate 812. The gate lifting mechanism 813 moves the gate 812 up and down between an open position and a closed position (not shown). The gate lifting mechanism 813 is controlled by the processing control unit 64.

In this embodiment, the rotating chuck 803 is a suction chuck that sucks the substrate W in the horizontal direction and keeps the substrate W horizontal. Specifically, the rotating chuck 803 is connected to a rotating shaft 815 integrated with the drive shaft of the rotating motor 814. The holding method of the substrate W may also be a holding type in which the substrate W is held in a horizontal direction and the substrate W is held horizontally. That is, instead of the suction chuck, a mechanical chuck may be used as the rotating chuck 803.

When the substrate W is held by suction by the rotating chuck 803, if the rotating motor 814 is driven, the rotating shaft 815 rotates around the predetermined rotating axis (vertical axis) A1 by the driving force. Thereby, as with the rotating chuck 803, the substrate W is rotated around the rotation axis A1 while maintaining a substantially horizontal posture.

The processing liquid nozzle 804 is connected to the processing liquid supply part by a supply pipe 805. The treatment liquid valve 806 is arranged in the middle of the supply pipe 805 and is controlled to open and close by a signal from the control unit 6. When the processing liquid valve 806 is opened, the processing liquid nozzle 804 and the processing liquid supply part are in a communication state, and the processing liquid is discharged from the processing liquid nozzle 804. By closing The liquid treatment valve 806 can stop the discharge of the treatment liquid from the treatment liquid nozzle 804.

The processing cup 808 is combined with a cup lifting mechanism 807 for moving the processing cup 808 up and down between the retreat position (solid line) and the processing position (two-dot chain line). The cup lifting mechanism 807 is controlled by the processing control unit 64 to control the upper and lower positions of the processing cup 808. In order to receive the substrate W on the spin chuck 803, the processing control unit 64 lowers the processing cup 808 to the retracted position when the substrate W is carried in. The processing control unit 64 raises the processing cup 808 to the processing position during the processing of the substrate W. By arranging the processing cup 808 at the processing position, the processing cup 808 can be used to receive the processing liquid supplied to the substrate W and being flung away due to the rotation, so that the scattering of the processing liquid in the processing unit 31 can be suppressed. After the substrate is processed, the processing control unit 64 releases the suction of the substrate W by the spin chuck 803, and lowers the processing cup 808 to the retracted position. The substrate W on the rotating chuck 803 is held by the robot hand H2 of the central robot CR, and the held substrate W is carried out toward the outside of the chamber 802.

The treatment liquid may also contain hydrofluoric acid, sulfuric acid, acetic acid, nitric acid, hydrochloric acid, ammonia, hydrogen peroxide, organic acids (such as citric acid, oxalic acid, etc.), organic bases (such as TMAH (tetramethyl ammonium hydroxide; Tetra Methyl Ammonium Hydroxide) Etc.), surfactants, or corrosion inhibitors.

The processing liquid nozzle 804 is, for example, a linear nozzle that discharges the processing liquid in a continuous flow state. The processing liquid nozzle 804 is attached to the processing liquid nozzle arm (not shown) with the discharge port facing substantially downward. The treatment liquid nozzle arm is a swing arm extending in the horizontal direction, and the treatment liquid nozzle 804 is installed at the swing end thereof. The base end of the swing arm is connected to an arm rotation mechanism not shown. The arm rotation mechanism swings the treatment liquid nozzle arm around a predetermined rotation axis (not shown) along the vertical direction. Due to the swing of the processing liquid nozzle arm, the processing liquid nozzle 804 moves horizontally along an arc-shaped trajectory that passes through the center of the upper surface of the substrate W in a plan view. With this, it can be processed in the state of spitting out the treatment liquid The liquid treatment nozzle 804 moves horizontally on the substrate W for processing.

The center robot CR transports the substrate W transferred from the substrate storage container 5 to the transfer unit 4 toward each processing unit 31 one at a time. Regarding the center robot CR, the description is omitted for the same structure as the indexing robot IR. The center robot CR has an elevating part 26A, a connecting part 27A, and a pair of telescopic parts 28A. These have the same structures as the lifting part 26, the connecting part 27, and the telescopic part 28 of the indexing robot IR, respectively.

The lifting part 26A can adjust the vertical position of the robot H2. Specifically, the lifting part 26A can adjust the height position of the robot H2 to a picking position (lower position) and a placing position (upper position). The pick-up position is a position where the uppermost part of the claw guide 22 (see FIG. 3B) of the robot H2 when the substrate W is unloaded from the processing unit 31 is lower than the lower surface of the substrate W to be unloaded. The placement position is a position where the lower surface of the robot H2 is higher than the upper surface of the rotary chuck 803 when the substrate W is carried into the processing unit 31.

The telescopic part 28A, which is a reciprocating mechanism, has a plurality of joints, and the telescopic motion is performed by the rotation drive of the joint part. The telescopic part 28A can adjust the position of the robot H2 in the horizontal direction by telescopic action. Specifically, the telescopic part 28A can adjust the horizontal position of the robot H2 to the starting position HM (solid line) and the forward position FW (two-point chain line). The initial position HM (solid line) is a horizontal position in a state where the joints of the telescopic part 28A are contracted. The forward position FW (two-point chain line) is a horizontal position where the joint can be extended and the substrate W can be placed in the substrate storage container 5. The starting position HM is the reference position of the robot H2 in the horizontal direction.

The opening 811 of the cavity 802 is provided with a detection part (sensor) for detecting the presence or absence of an object passing through the opening 811, and an optical sensor 81 is used in this embodiment. The optical sensor 81 is a transmissive sensor, and has a light projecting part 81a and a light receiving part 81b. The light projecting portion 81a and the light receiving portion 81b are arranged to align the optical axis so that the upper and lower positions of the opening 811 are opposed to each other, and an object passing the optical axis between the light projecting portion 81a and the light receiving portion 81b is detected. Specifically, when the robot H2 or the substrate W held by it passes between the light projecting portion 81a and the light receiving portion 81b, the optical axis is shielded (light shielding). The optical sensor 81 detects the presence or absence of the robot H2 or the substrate W by detecting the light projection state and the light shielding state. In this embodiment, the on/off signal that sets the light-shielding state to on and the light-emitting state to off is output from the optical sensor 81 to the determination unit 62. The optical sensor 81 may also have the form of a reflective sensor. The details of the reflective sensor are the same as in the case of the aforementioned optical sensor 8, so the description is omitted.

Fig. 10 is a flow chart showing the conveying action of the substrate in the substrate processing apparatus. FIG. 11 is a timing diagram showing the detection signals of the normal and abnormal optical sensors in the substrate delivery operation according to the time sequence. In FIG. 11, the optical signal RLS3 represents an example of a time-series on/off signal output from the optical sensor 8 when the substrate delivery operation is normal. In addition, the optical signal RLS4 represents an example of a time-series on/off signal output from the optical sensor 8 when there is an abnormality in the substrate delivery operation. The description of the pusher detection portion 29 of the robot H2 (refer to FIGS. 3A and 3B) is the same as the above, and therefore is omitted.

<Step S11> Obtain a board

The central robot CR performs the receiving action of the substrate. Since the receiving action of the substrate of the center robot CR is the same as the receiving action of the substrate of the indexing robot IR, the detailed description is omitted. The center robot CR obtains the substrate W placed on the transfer unit 4 by the indexing robot IR, and transports it to the processing unit 31. Central robot CR and indexing machine The human IR is similarly transported in a state where the substrate W is fixed and held.

<Step S12> Loading and placing the substrate

The central robot CR performs the delivery of the substrate. Since the substrate delivery action of the center robot CR is the same as the substrate delivery action of the indexing robot IR, the detailed description is omitted. The center robot CR rotates to the processing unit transfer position of the target processing unit 31 that processes the substrate W while holding the substrate W in the robot H2. In synchronization with the rotation of the central robot CR, the gate 812 is lowered from the closed position to the open position by the gate lifting mechanism 813, and the robot H2 faces the opening 811. After rotating, move the vertical position to the placement position (time t11). At time t11, since the optical sensor 8 is in the light emitting state, it outputs a turn-on signal.

Next, in order for the center robot CR to move the robot H2 toward the inside of the processing unit 31 while holding the substrate W in a fixed state, the robot H2 starts to move forward from the starting position HM to the forward position FW (time t12) . After starting to move forward, if the robot H2 reaches the opening 811, the fixed substrate W shields the optical axis of the optical sensor 81, and the signal output from the optical sensor 81 toward the determination unit 62 will be guided The on signal is switched to the off signal (time t13). The judging section 62 starts to measure the duration of the off signal by switching from the on signal input from the optical sensor 81 to the off signal as the starting point of the passing period.

Next, the robot H2 reaches the forward position FW. After reaching the forward position FW, the control section 6 retracts the movable section 24a of the pusher section 24 to release the pressing force toward the substrate W (time t14). By releasing the pressing against the substrate W, the substrate W can be placed on the rotating chuck 803. The center robot CR is maintained at the forward position FW, and executes the placement movement that moves the vertical position of the robot H2 from the placement position to the pickup position. borrow The substrate W held inside the claw guide portion 22 and the rear guide portion 23 by the placement movement is placed on the spin chuck 803.

<Step S13> Retreat the robot H2

Next, in order to make the robot H2 retreat from the processing unit 31, the center robot CR performs a return movement which moves the robot H2 from the forward position FW to the start position HM. If the substrate W is normally placed on the spin chuck 803, there is no substrate W on the robot H2. Therefore, if the hollow area of the robot H2 (the area between the V-shaped parts as the non-existent part of the component) reaches the optical axis while passing through the optical axis of the optical sensor 81, the optical sensor 8 changes from the light-shielded state It is in the light-emitting state. Accordingly, the signal output from the optical sensor 81 changes from the on signal to the off signal (time t15). The determining part 62 ends the measurement of the duration of the disconnection signal output from the optical sensor 81 at the time point when the signal output from the optical sensor 81 changes from the disconnection signal to the conduction signal. After the hollow area passes through the optical axis of the optical sensor 81, the signal state is maintained. If the robot H2 reaches the starting position HM, the return movement is completed (time t16). When the substrate is transported normally, the signal output from the optical sensor 81 changes from the on signal to the off signal at time t13 to the time t15 when the off signal changes to the on signal, It becomes the third pass period PP3.

When the central robot CR moves the robot H2 backwards from the processing unit 31, it can be set to a speed slower than the normal conveying speed when moving forward, and by reducing the speed when moving forward, it can improve the speed when moving forward. The detection accuracy of the optical sensor 81.

<Step S14> Compare whether the optical sensor signals are consistent

The determination unit 62 compares the third pass period PP3 measured during the delivery operation of the substrate W with the second normal period NP2 stored in the storage unit 61. The judging unit 62 judges that it is normal (YES in S14) when the result of comparing the third pass period PP3 with the second normal period NP2 stored in the storage unit 61 is the same, and continues processing, but judged as abnormal at the same time (NO of S14), and execute the recipe when abnormal. In the case of comparing the third pass period PP3 with the second normal period NP2, it is also possible to make a determination with a margin of about ±10% with respect to the second normal period NP2.

For example, the stored second normal period NP2 is 2.8 seconds or less. According to design values and experiments, 2.5 seconds is an appropriate value. If there is an abnormality, it is 3.0 seconds or more, 2.5 seconds plus a margin of about 10%, and the second normal period NP2 is set to 2.8 seconds or less. As described above, since the second normal period NP2 can be arbitrarily changed according to the moving distance or the moving speed, it is not limited to these values, and may have a range of upper and lower limits. In this way, by providing a margin, it is possible to prevent a situation in which small operation deviations that are not a problem can be guessed as errors. If the third pass period PP3 is judged to be normal by the judging unit 62, a series of board delivery operations performed by the center robot CR is ended.

<Step S15> Process the substrate

Various processes are performed on the substrate W transported to the processing unit 31. For example, a cleaning process, an etching process, a resist coating process, or a development process by a chemical solution is performed.

Here, it is assumed that the substrate W is not normally placed on the spin chuck 803 by the robot H2. For example, the substrate W may warp into a concave shape due to the manufacturing process. After the substrate W is placed on the spin chuck 803, due to the warpage of the substrate W, even if the robot H2 is lowered to the lowered pickup position, there is still a gap on the lower surface of the substrate W There is a possibility that a part is equal to or lower than the upper end of the side surface 22b of the robot H2.

After the robot H2 moves and places the substrate W on the spin chuck 803, when the robot H2 moves back from the forward position FW to the starting position HM, there is a side surface 22b of the robot H2 The upper end will hook onto the end or lower surface of the substrate W. In the hooked state, the substrate W is not supported by the claw guide 22 and the rear guide 23, and a part of the substrate W straddles the upper side 22b and is placed on the robot H2 in an unstable state . After the placement movement, since the state of retracting the movable portion 24a is normal, the determination section 62 determines that the disconnection signal output from the pusher detection section 29 is a normal state. Therefore, even when the substrate W is placed on the robot H2 in an unstable state, the abnormality cannot be detected by the pusher detection unit 29.

On the other hand, even if the hollow area of the robot H2 (the area between the V-shaped parts as the non-existent part of the component) reaches the optical axis (time t15) in the optical axis passing through the optical sensor 81, the There is a substrate W on H2, so the optical sensor 81 does not change from a light-shielding state to a light-emitting state, and its output signal is maintained as an off signal. The robot H2 continues to move back, and changes to a conduction signal at the point in time when the substrate W passes through the optical axis (time t15a). The determination section 62 ends the measurement of the duration of the disconnection signal of the optical sensor 81 at the time point when the signal output from the optical sensor 81 changes from the disconnection signal to the conduction signal. If the robot H2 reaches the starting position HM, the return movement ends (time t16). When the substrate W is not normally transported, the signal output from the optical sensor 81 changes from the on signal to the off signal at time t13 to the time t15a when the off signal changes to the on signal The period becomes the fourth pass period PP4.

The determination unit 62 compares the measured fourth pass period PP4 with the second normal period NP2 stored in the storage unit 61 for the delivery operation of the substrate W. The determination unit 62 compares the fourth pass period PP4 with the second normal period NP2 stored in the storage unit 61. As shown in FIG. 11, the fourth pass period PP4 and the second normal period NP2 stored in the storage unit 61 are compared. Different, so the recipe is executed abnormally.

<Step S16> Execution of recipe when abnormal

When the determination unit 62 determines that it is abnormal, it causes each component of the substrate processing apparatus 1 to execute the abnormal time recipe stored in the storage unit 61. For example, the recipe at the time of abnormality includes the stop of the substrate transfer of the indexing robot IR, the immediate stop of the target processing unit 31 that is judged to be abnormal, the stop after the processing of the processing unit 31 other than the abnormal processing unit, and the immediate stop of the central robot CR , And a series of actions that generate an alarm. The alarm is the warning display of the main screen of the substrate processing apparatus 1, the generation of sound, the display command output of the pop-up message to the main computer through the communication line, and so on. By generating an alarm, the device user can be notified that the substrate processing device 1 is abnormal. When the execution of the recipe is completed in an abnormal situation, the judging unit 62 also sets the series of conveying operations to end.

According to the substrate transfer device of the second embodiment of the present invention described above, the determination unit 62 can be used for a series of substrate W delivery operations when the robot H2 places the substrate W on the spin chuck 803 of the processing unit 31 The detection signal of the optical sensor 81 is used to determine whether it is in a normal state or in an abnormal state. More specifically, the passing period can be measured based on the duration of the off signal of the detection time of the robot hand H2 or the substrate W detected by the optical sensor 81. By comparing whether the passing period is consistent with the normal period stored in the storage unit 61, it can be determined whether the delivery operation of the substrate W is normal or abnormal.

If the substrate W is warped, even if the robot H2 is lowered to the pickup position, there is still a part of the lower surface of the substrate W that is the same height as the upper end of the side surface 22b of the robot H2 or higher than the upper end of the side surface 22b of the robot H2 Low possibility. In this case, when the robot H2 moves back from the forward position FW to the starting position HM, the upper end of the side portion 22b of the robot H2 will hook onto the end or the lower surface of the substrate W. At this time, the substrate W is not held by the claw guide 22 and the rear guide 23, and a part of the substrate W straddles the side surface 22b and is placed on the robot H2 in an unstable state. In this way, when the substrate W is placed on the robot H2 in an unstable state, there is a possibility that an abnormality cannot be detected based on the on/off signal from the pusher detector 29. Even in such a situation, the abnormality determination can still be performed by the determination section 62 based on the on/off signal from the optical sensor 81, so that the abnormality can still be detected.

In addition, the judging unit 62 causes the components of the substrate processing apparatus 1 to execute an abnormal recipe. The execution of the recipe at the time of the abnormality stops the conveying action, and then the conveying of the substrate W is stopped. In addition, when an alarm is issued, the user of the substrate processing apparatus 1 can immediately know that the substrate processing apparatus 1 is in an abnormal state. As a result, the transfer of the substrate W can be stopped as soon as possible to reduce the influence on subsequent steps.

The present invention is not limited to the above-mentioned embodiment, and can be modified and implemented as described below. Hereinafter, the third embodiment of the present invention will be described in detail.

The substrate W placed in the substrate storage container 5 may be in a state shifted from the normal position toward the index unit 2 side, that is, the substrate W may protrude from the substrate storage container 5. In this case, the optical sensor 8 can detect the protrusion of the substrate W. For example, in the case of a transmissive sensor, the optical axis is shielded by the protruding substrate W and becomes a light-shielding state. Also, in the case of a reflective sensor, the projected light will be The substrate W in the out-of-state state is reflected and becomes a reflective state. The sensor of any type outputs a disconnection signal, and since the protruding substrate W is stationary, it continues to output the disconnection signal.

In this case, the output of the optical sensor 8 will not change from off to on even if a predetermined period has passed since the measurement start point. Therefore, the determination unit 62 sets the time point when the predetermined period has elapsed as the measurement end point, and sets the predetermined period as the fifth passage period PP5. The predetermined period is preferably set to be longer than the duration of the off signal assumed when there is an abnormality in the delivery operation of the substrate W, for example, set to be 3 seconds or longer.

The determining unit 62 compares the fifth passing period PP5 obtained by measuring the duration of the off signal detected by the optical sensor 8 with the third normal period NP3 stored in the storage unit 61. For example, the third normal period NP3 is an arbitrary period determined by the user. The determination unit 62 determines that it is normal when the result of comparing the fifth pass period PP5 with the third normal period NP3 stored in the storage unit 61 is the same, but determines that it is abnormal at the same time. The judging unit 62 executes any abnormal recipe when it is judged to be an abnormal situation. The first normal period NP1 and the third normal period may be the same period (same length). By setting the same period, the user does not need to manage multiple settings, and the data processing load and communication load of the substrate processing apparatus 1 can be reduced.

The present invention is not limited to the above-mentioned embodiment, and can be modified and implemented as illustrated below.

(1) In the foregoing embodiment, although the hollow shape of the robot hand H1 (H2) is a shape including a V shape, it may also be a shape including a Y shape or a U shape. By setting the hollow shape to be changeable, the design freedom of the robot hand shape can be increased. In addition, a reflective member may be attached to the robot H1 (H2). By installing reflective components, the detection sensitivity of the reflective sensor can be improved. As long as the installation position of the reflecting member is accessible by the light receiving part 8d The position to receive the light beam projected from the light projection part 8c of the reflective sensor and reflected by the reflective member is sufficient, and it can be any side of the front and back of the robot H1 (H2).

(2) In the foregoing embodiment, the number of optical sensors 8, 81 is one. However, multiple optical sensors can also be provided. The detection accuracy can be improved by installing multiple optical sensors.

(3) In the foregoing embodiment, the optical sensor 8 is arranged opposite to the upper and lower positions of the load port opening L. However, as long as the robot H1 and the held substrate W are on the moving path when retreating from the substrate storage container 5, it is not limited to the arrangement opposite to the loading port opening L, and can also be used and installed in the indexing unit 2. The partition wall 7 of the partition wall passes through the hole 7a and is arranged so as to face each other. In this way, the degree of freedom of design can be increased.

(4) In the foregoing embodiment, the optical sensor 81 is disposed at the upper and lower positions inside the opening 811 of the processing unit 31. However, as long as the moving path of the robot H2 and the substrate W held by the processing unit 31 moves back from the processing unit 31, it is not limited to being provided inside the opening 811 of the processing unit 31, and may be provided outside the opening 811. In this way, the degree of freedom of design can be increased.

(5) The normal period can also be set during the operation period of the receiving operation of the indexing robot IR receiving the substrate W from the substrate storage container 5. The same applies to the central robot CR.

(6) The indexing robot IR may also be designed and/or controlled so that the operation period of receiving the substrate W from the substrate storage container 5 and the operation period of delivering the substrate W to the substrate storage container 5 have the same period (same length). By setting the same operation period, there is no need to set separate normal periods between the operation period of obtaining the substrate W and the operation period of delivering the substrate W, and the normal periods can be made common. By making the normal period common, it is possible to reduce the data processing load and communication load of the substrate processing apparatus 1 compared to when the normal period is individually set. The same applies to the central robot CR.

(7) The first normal period NP1 and the second normal period NP2 may be the same period (same length). In addition, the first normal period NP1, the second normal period NP2, and the third normal period NP3 may be the same period (same length). By setting the same period, the user does not need to manage multiple settings and can reduce management man-hours. In addition, the data processing load and communication load of the substrate processing apparatus 1 can be reduced.

(8) In the foregoing embodiment, the case where the abnormal state occurs due to the warpage of the substrate W has been described. However, there is also the possibility of abnormal conditions due to other reasons. For example, when an abnormality in the holding of the substrate W occurs due to a malfunction of the indexing robot IR, the holding abnormality can also be detected.

(9) In the foregoing embodiments, although the loading port LP and the processing unit 31 have been exemplified, they are not limited to these, and the present invention can also be applied to the transfer unit 4 and other substrate-mounted units.

Although the embodiments of the present invention have been described in detail, these are only specific examples for clarifying the technical content of the present invention, and the present invention should not be limited to these specific examples. The scope of the present invention is indicated by the scope of the patent application, and is intended to include the scope of the patent application and its equivalent meaning and all changes within the scope.

2‧‧‧Grading unit

3‧‧‧Processing Department

4‧‧‧Transfer unit

5‧‧‧Substrate storage container

5a‧‧‧Frame

5b‧‧‧cover

5c‧‧‧Substrate guide

7‧‧‧The next wall

7a‧‧‧Partition wall through hole

7b‧‧‧Bottom

8‧‧‧Optical Sensor

8a‧‧‧Light Projection Department

8b‧‧‧Light receiving part

8c‧‧‧Light Projection Department

8d‧‧‧light receiving part

21‧‧‧Support

25‧‧‧Base

26‧‧‧Elevator

27‧‧‧Connecting part

28‧‧‧Retractable part

32‧‧‧Platform

34‧‧‧Load port opening and closing mechanism

34a‧‧‧Gate component

34b‧‧‧Gate drive

35‧‧‧Settable

35a‧‧‧Upper horizontal plane

35b‧‧‧Upper vertical surface

B‧‧‧Open

C‧‧‧Two-point arrow chain

D‧‧‧Two-point arrow chain

E‧‧‧Two-point arrow chain

FW‧‧‧forward position

H1‧‧‧Robot

HM‧‧‧Starting position

IR‧‧‧Indexing Robot

L‧‧‧Load port opening

W‧‧‧Substrate

Claims (14)

A substrate conveying device that transfers a substrate to a predetermined position; it is provided with: a holding portion that holds the substrate; a reciprocating mechanism that allows the holding portion to reciprocate relative to the predetermined position; and an optical sensor that holds the substrate The sensor area is formed on the path moved by the above-mentioned shuttle mechanism; and the control unit, which, during the substrate delivery operation, provides for the above-mentioned holding part or the substrate held by the holding part (hereinafter referred to as “holding substrate”). ) The detection is carried out through the first passing period of the sensor area, and when the first passing period is different from the first normal period set in advance, it is judged as a conveyance abnormality, wherein the delivery operation of the substrate includes the holding portion The forward movement of the reciprocating mechanism toward the predetermined position, and the return movement of the holding portion away from the predetermined position; and the holding portion has: an abutment portion that abuts on one end of the substrate; and a retractable position deviation A movement prevention mechanism which stretches and fixes the substrate by pushing the other end of the substrate toward the abutment portion; and a telescopic detection part which detects the expansion and contraction action of the position shift prevention mechanism; the position shift prevention The mechanism fixes the substrate during the forward movement, and releases the fixing of the substrate during the return movement, and the expansion and contraction detection section controls the position shift prevention mechanism in a state where the substrate is fixed by the position shift prevention mechanism. The elongation is detected, and the shrinkage of the position deviation prevention mechanism is detected in a state where the position deviation prevention mechanism releases the fixing of the substrate. The substrate conveying device of claim 1, wherein the predetermined position is a position in the substrate storage container that stores the substrate, and the optical sensor is in the substrate storage container The above-mentioned sensor area is formed outside. The substrate conveying device of claim 2, wherein the sensor area of the optical sensor is set at a position for detecting a substrate placed in a state shifted outside the substrate storage container. The substrate conveying device according to claim 1, wherein the holding portion is a plate-shaped member that is flat in a horizontal direction, and when viewed in a plan view, the plate-shaped member has at least a part of the middle of a portion overlapping the substrate when the substrate is held Part of the hollow area is removed, and when the holding portion normally holds the substrate, the substrate completely overlaps the hollow area of the plate-shaped member in a plan view, and when the holding portion is moved back and forth by the reciprocating mechanism, the The above-mentioned hollow area of the holding part passes through the above-mentioned path. The substrate conveying device of claim 1, wherein the optical sensor is a transmissive sensor that forms the sensor area in a linear shape along the optical axis, and the control unit is configured by the transmissive sensor The period during which the light beam projected by the sensor is shielded by the holding portion or the holding substrate is detected as the first passing period. The substrate conveying device of claim 1, wherein the optical sensor is a reflective sensor forming the sensor area by light, and the control unit is projected by the reflective sensor The period during which light is reflected by the holding portion or the holding substrate and received by the reflective sensor is detected as the first passing period. The substrate conveying device according to any one of claims 1 to 6, wherein the control section judges the conveyance abnormality when receiving the substrate of the substrate at the predetermined position by the holding section, The receiving operation of the substrate includes a forward motion in which the holding portion moves toward the predetermined position by the shuttle mechanism, and a return motion in which the holding portion leaves the predetermined position by the shuttle mechanism, and the control portion is on the substrate In the receiving operation, the second passage period during which the holding portion or the holding substrate passes through the sensor area is detected, and when the second passage period is different from the preset second normal period, it is judged that the conveyance is abnormal . The substrate transfer device of claim 7, wherein the first normal period and the second normal period have the same length. The substrate transfer device of claim 1, wherein the control section sets the first normal period based on the moving speed of the holding section by the shuttle mechanism. A substrate conveying device that transfers a substrate to a predetermined position; it is provided with: a holding portion that holds the substrate; a reciprocating mechanism that allows the holding portion to reciprocate relative to the predetermined position; and an optical sensor that holds the substrate The sensor area is formed on the path moved by the above-mentioned shuttle mechanism; and the control unit, which, during the substrate delivery operation, provides for the above-mentioned holding part or the substrate held by the holding part (hereinafter referred to as “holding substrate”). ) The detection is carried out through the first passing period of the sensor area, and when the first passing period is different from the first normal period set in advance, it is judged as a conveyance abnormality, wherein the delivery operation of the substrate includes the holding portion The forward movement of the reciprocating mechanism toward the predetermined position and the return movement of the holding portion away from the predetermined position; and the control unit will perform the return movement by the reciprocating mechanism during the delivery operation. The moving speed of the above holding part is set to be lower than that of the above The moving speed of the holding portion by the reciprocating mechanism is slow. A method for transferring a substrate to a predetermined position; it includes: a first forwarding step, which moves a holding portion holding a substrate toward the predetermined position; a delivery step, which executes the delivery of the substrate from the holding portion to the above-mentioned predetermined position. Action at a predetermined position; a first return step, which retreats the holding portion from the predetermined position after the delivery step; a first detection step, which is in the period including the first forward step and the first return step , To detect the first passing period of the sensor area formed by the holding part or the substrate held by the holding part (hereinafter referred to as the "holding substrate") through the optical sensor on the path of the holding part moving And a first determining step, which determines that the conveying is abnormal when the first passing period detected in the first detecting step is different from the first normal period set in advance; and the holding portion includes: abutting Part, which abuts against one end of the substrate; and a retractable positional deviation preventing mechanism, which expands and contracts by pushing the other end of the substrate toward the abutting part to fix the substrate; in the first In the advancing step, the position shift prevention mechanism pushes the other end of the substrate toward the abutting portion to fix the substrate to prevent position shift, and detects the expansion and contraction movement of the position shift prevention mechanism In the above-mentioned first return step, the fixation performed by the above-mentioned positional deviation prevention mechanism is released. A method for transferring a substrate to a predetermined position; it includes: a first forwarding step, which moves a holding portion holding a substrate toward the predetermined position; a delivery step, which executes the delivery of the substrate from the holding portion to the above-mentioned predetermined position. Movement of a given position The first return step, which retreats the holding portion from the predetermined position after the delivery step; the first detection step, which includes the first forward step and the first return step, to the The holding portion or the substrate held by the holding portion (hereinafter referred to as the "holding substrate") is detected by the optical sensor during the first passing period of the sensor area formed on the path of the holding portion moving; and 1 judging step, which judges that the conveying is abnormal when the first passing period detected in the first detecting step is different from the first normal period set in advance; and the reciprocating The moving speed of the holding portion performed by the mechanism is slower than the moving speed of the holding portion performed by the reciprocating mechanism in the first forward movement. The substrate transport method of claim 11 or 12, which further includes: a second forwarding step of moving the holding portion toward the substrate located at the predetermined position; a receiving step of performing the holding portion receiving the predetermined position The receiving action of the substrate; the second returning step, which retreats the holding portion from the predetermined position after the receiving step; the second detecting step, which is during the period including the second forwarding step and the second returning step , Detecting the second passage period during which the holding portion or the holding substrate passes through the sensor area; and a second determination step in which the second passage period detected in the second detection step and the preset If the second normal period is different, it will be judged as a transport abnormality. The substrate transport method of claim 13, wherein the first normal period and the second normal period have the same length.

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