TWI716272B - Respiration sensor, respirometer, and respiratory care system - Google Patents

Abstract

The inventions include respiration sensor, respirometer, and respiratory care system. The respiration sensing chips have be fabricated using a relative humidity sensor with indium nitride (InN) sensing film on silicon substrate as a respirometer. Afterward, the respiration sensing chip was put into the inner layer of face mask which can be worn by user to detect the breath signals of the user. Thereby, the respiratory frequency and variation of human body can be detected using the respiration sensor and then recorded using respirometer. The breath detection results of human body can be transmitted to the respiratory care and monitoring system to analysis and diagnosis the vital sign. Consequently, the respiration sensor, respirometer, and respiratory care system can be applied in health management and judgment of respiratory diseases of home care and elderly care to effectively decrease the healthcare human resources.

Description

Respiratory sensor, respirator and care of respiratory system

The present invention relates to a breathing sensor, a respirator and a respiratory system for caring for it, in particular a humidity sensor made of indium nitride film is put in a mask, and the frequency of human breathing is recorded by humidity sensing And the amount of change is its application inventor.

Press, the air exhaled by the human body reflects the condition of various organs and tissues in the human body, such as inflammation and oxidative stress, which can be monitored by measuring the changes in the concentration of the following gases: In the field of respiratory therapy, common uses are different Respiration evaluation parameters, such as pressure, volume and flow rate, etc., to evaluate the patient’s breathing status. However, the technologies developed in this regard are roughly as follows:

1. Taiwan Patent Publication No. I319978 "Apparatus for sensing human breathing gas" includes a substrate on which a circuit module, a carbon nanotube gas sensing element, a wireless transmission/reception module, and A power supply with a clamping structure that can be clamped on the nostril wall tissue; the gas also includes bioaerosol in the gas, the carbon nanotube gas sensing element reacts with the breathing gas, and can measure whether the exhaled and inhaled contain Specific gas and bio-aerosol, exhaled and inhaled gas temperature; used to measure the electrical characteristics of the carbon nanotube gas sensing element, and processed the signal through the circuit module, and then used the wireless transmitting/receiving module to process the processed The signal is sent to the wireless signal receiving device for gas type, concentration, temperature interpretation or warning, which can achieve portable, fast and highly sensitive sensing capabilities.

2. Taiwan Patent Announcement No. M575322 "Respiration Training and Monitoring Device", including breathing circuit, fluid sensor and control unit. The breathing circuit is equipped with three communicating gas inlets and outlets, namely the breathing end, the exhalation end and Inhalation end, and the fluid sensor is set in the breathing circuit, the control unit is electrically connected to the fluid sensor, so that when the user is in the breathing training and monitoring device, the fluid sensor is inhaled by the user A sensing signal is generated in the process of breathing or exhalation, and is transmitted to an external electronic device through the control unit, so that the electronic device can convert the volume, flow rate or pressure during the breathing process and other breathing assessment information based on the sensing signal.

3. Taiwan Patent Announcement No. M483775 "Monitoring Device Based on Breathing Detection", which is suitable for monitoring a bedridden user and is set on the chest of the user. The device includes a gravity sensor, a memory, and a A processing unit, a warning unit, and a breathing detection program module. The gravity sensor is used to generate a plurality of gravity signals corresponding to the user's breathing state. The breathing detection program module is stored in the memory and used according to The gravity signal generated by the gravity sensor in a first time period determines whether the user is in a weak breathing state, the processing unit is used for executing the breathing detection program module, and the warning unit is used for breathing When the detection program module determines that the user is in the weak breathing state, a warning message is issued.

4. Taiwan Patent Publication No. M415691 "Respiration Rate Measuring Device", which uses physiological signals to calculate its respiration rate and displays it on the interface. It can be a collar-type fixing element to fix the sound sensor on the meter. In the measurement part, the sound disc is used to collect the breathing sound, and then the condenser microphone behind the sound disc converts the sound pressure of the breathing sound into a voltage. The breathing sound is converted into a packet signal by the signal processing module, and the packet signal is sent to the micro The AD conversion module of the processing control module converts the analog signal into a digital signal. The digital signal is sent to the central control unit to determine the respiration rate count. The counted result can be displayed on the display screen, which helps to improve the efficiency of respiration detection. , And the measurement data can be transmitted to the computer for storage by RS-232.

5. Chinese Patent No. CN208973853 "Portable Respiration Signal Detection Device", including a respiration monitoring flexible sensor and a signal conditioning circuit, where: the respiration monitoring flexible sensor is composed of PVDF piezoelectric film, two signal wires, plastic substrate and skin-friendly The PVDF piezoelectric film is made of a gel material, the PVDF piezoelectric film is made into an arched structure, glued on a plastic substrate and embedded in the middle of the skin-friendly gel material, and the two electrodes of the PVDF piezoelectric film are connected to the two The signal lines are connected; the signal conditioning circuit is composed of a high input impedance charge amplifier circuit, a dual power supply instrument amplifier voltage amplifier circuit, a primary low-pass filter, a secondary low-pass filter, and a voltage follower circuit.

However, the above-mentioned methods and technologies can indeed achieve the effect of detecting respiratory status; however, the inventor still upholds the rich experience in design, development and actual production in the related industry for many years, and specially provides an invention that is different from the above-mentioned technical means. Sensors, respirators and their respiratory system care, solve the problem that there is no portable respiration sensor on the market at present, and provide a portable respiration sensor that can be carried, is low in price, and has high accuracy. The purpose of making it have better practical value.

The main purpose of the present invention is to provide a breathing sensor, a respirator and a breathing system for caring for it, in particular a humidity sensor made of indium nitride film is placed in a mask, and the human body is recorded by humidity sensing The frequency and the amount of change in breathing are its purpose.

The main purpose and effect of the breathing sensor, respirator and the respiratory system care of the present invention are achieved by the following specific technical means:

It mainly uses a thin-film chip made of indium nitride as a breath sensor for sensing humidity, and it is placed in the mask, so that the user can simultaneously detect when wearing the mask; The breathing sensor records the frequency and change of human breathing, and can analyze and judge the data of the detection results through the back-end system to achieve human health management, and can instantly determine whether there is a respiratory-related disease attack, and it can be applied Health care at home and the elderly can effectively reduce the effectiveness of human resources in care.

In a preferred embodiment of the present invention, the breathing sensor, the respirator and the respiratory care system thereof, wherein the indium nitride thin film wafer includes a substrate, the substrate is a porous silicon substrate, and a layer of natural silicon oxide is placed on the substrate A silicon layer is grown on the porous silicon substrate, and then an indium nitride layer is sputtered on the silicon layer, and a drain and a source are arranged on the indium nitride layer.

In the preferred embodiment of the present invention, the breathing sensor, the respirator, and the respiratory system for caring for the same, a respirator is provided, and the respirator is configured by placing the breathing sensor in a mask, and the mask is provided There is an interlayer for the breathing sensor to be embedded in the interlayer, and the mask is provided with at least one positioning rope for positioning the mask on the mouth and nose of the human body.

The preferred embodiment of the breathing sensor, respirator and respiratory system of the present invention further includes a transmission unit, a recording unit, and a back-end receiving unit, through which data is transmitted to the recording unit for processing Respiration change data at each time is recorded, and then the data is transmitted and connected to the back-end receiving unit through the transmission unit, and the result can be interpreted by the back-end receiving unit.

In the preferred embodiment of the breathing sensor, respirator and the respiratory system of the present invention, the transmission unit can adopt a wired or wireless transmission mode.

In the preferred embodiment of the breathing sensor, respirator and the respiratory system of the present invention, the back-end receiving unit can be a smart communication device, an instrument or a medical monitoring system.

In order to make the technical content, the purpose of the invention and the effect achieved by the present invention have a more complete and clear disclosure, the detailed description is given below, and please refer to the disclosed drawings and figure numbers together:

First of all, the actual application of the technology and means of the present invention, please refer to Figures 1 to 4, which are schematic diagrams of the breathing sensor, respirator and their respiratory care system of the present invention, which have an indium nitride thin film wafer. The indium film chip is used to sense the humidity and respiration frequency of the gas exhaled when the human body breathes. The indium nitride film chip is used as a breathing sensor (1) to obtain electricity by detecting the capacitance value under the gas humidity. The value of the sexual measurement.

Please further refer to the first figure. The indium nitride thin film wafer is grown at room temperature using a DC vacuum sputtering machine. The steps are as follows:

1. Selection of the substrate-a silicon substrate (11) is selected during production, and the silicon substrate (11) is an n-type porous substrate;

2. Growing silicon layer-grow a silicon layer (12) on the natural silicon oxide of the n-type porous substrate, the growth time is 10 minutes, the growth pressure is -5×10 ^-5 Torr; however, on the substrate (11) The effect of plating a silicon layer (12) is similar to that of cleaning the substrate (11) with an acid substance;

3. Growth of indium nitride-grow an indium nitride layer (13) on the substrate (11) coated with the silicon layer (12), the growth time is 10 minutes, and the growth pressure is -5×10 ^-5 Torr;

4. Electrode plated-Al electrode is plated on the indium nitride layer (13), the growth time is 20 minutes, the growth pressure is -5×10 ^-5 Torr, and the indium nitride layer (13) is formed above There is a drain electrode (141) and a source electrode (142), and the manufactured indium nitride thin film wafer is used as a breathing sensor (1).

When the indium nitride thin film wafer [respiration sensor (1)] is completed, the detection is performed. The adsorption and desorption effects of the indium nitride thin film wafer are first detected, and the resistance, reactance, impedance, The values of capacitance, inductance, and IV; and in the above detection, the responsivity of the capacitance value [as shown in the second figure] and sensitivity [as shown in the third figure] are better than other electrical measurements; Therefore, the present invention adopts the capacitance value detection method.

Please refer to the fourth figure, the breathing sensor (1) of the present invention can be applied to the mask (21) worn by everyday people to be used as a mask respirator (2). The breathing sensor (1) is arranged in a mask (21), and the mask (21) is provided with an interlayer (211), so that the breathing sensor (1) is embedded in the interlayer (211) And the mask (21) is provided with at least one positioning cord (212), and the positioning cord (212) is used to position the mask (21) at the position of the mouth and nose of the human body. Put the finished respiration sensor (1) into the mask (21), and then perform a test to record the absorption and desorption effects during breathing to find out the frequency of respiration, and then analyze the current condition of the human body.

Please refer to the fifth figure. When the current breathing condition of the human body is detected through the mask respirator (2), the detected data can be used to determine whether there is an onset of respiratory-related diseases, and through the application and care of the respirator The establishment of the respiratory system makes home care more perfect, and its respiratory system includes:

A respirator (2) is equipped with a mask (21), the mask (21) is provided with an interlayer (211), and the mask (21) is provided with at least one positioning rope (212), the positioning rope (21) 212) It is used to position the mask (21) on the position of the mouth and nose of the human body, and then embed a breathing sensor (1) in the interlayer (211) of the mask (21), the breathing sensor (1) It has an indium nitride film chip, which is used to detect the humidity and respiration frequency of the gas exhaled by the human body when breathing, and obtain the electrical measurement by detecting the capacitance value under the gas humidity Change data

A transmission unit (3) connected to the respiration sensor (1), capable of transmitting the information detected by the respiration sensor (1);

A back-end receiving unit (4) is connected to receive the information transmitted by the transmission unit (3), and a recording unit (41) and an analysis processor (42) are constructed in the back-end receiving unit (4) ), the recording unit (41) records the data detected by the respiration sensor (1), and the analysis processor (42) receives the data recorded by the recording unit (41), and combines the aforementioned data Analyze and judge the reader.

Please refer to Figures 4 to 5, the respirator (2) is used for people to wear and hang, and the mask (21) is worn and positioned at the position of the mouth and nose of the human body, allowing breathing during the inhalation and exhalation process of the human body. The sensor (1) detects the humidity and respiratory frequency of the exhaled gas, and obtains the electrical measurement change data by detecting the capacitance value under the gas humidity, and this data can be transmitted through the transmission unit (3). It can use wired transmission or wireless transmission. When wired transmission is shown in the fourth figure, the electrodes of the breathing sensor (1) are pulled out to connect to the back-end receiving unit (4), such as instruments and equipment. Or when wireless transmission is adopted, the transmission unit (3) is a wireless transmitter that can wirelessly transmit data to the recording unit (41) of the back-end receiving unit (4) for recording, such as smart communication devices, medical monitoring systems , It can further receive and interpret by building an APP in a smart communication device, and check the current breathing situation of the human body at any time. When a patient’s respiratory condition has a problem, the smart communication device can be used to send out an alarm and contact the police, contact person or medical staff. The result judged by the smart communication device can be provided to the doctor as a reference for diagnosis and treatment. The technology of the present invention can be applied to patients to monitor respiratory patients and transmit the detection data to the medical monitoring system for doctors to use as a reference for diagnosis and treatment. In this way, the frequency and change of human breathing can be recorded through the breathing sensor, and the data of the detection result can be analyzed and judged by the back-end system to achieve human health management, and can instantly determine whether there is a respiratory-related disease attack , It can also be used in home and elderly health care, which can effectively reduce the effectiveness of care human resources.

However, the foregoing embodiments or drawings do not limit the product structure or usage mode of the present invention. Any appropriate changes or modifications by those with ordinary knowledge in the relevant technical field should be regarded as not departing from the patent scope of the present invention.

Based on the above, the method of the present invention and the equipment for implementing the method and the use and implementation description show that, compared with the prior art, the present invention has the following advantages:

1. The breathing sensor, respirator and the respiratory system of the present invention record the frequency and change of human breathing through the breathing sensor, and the data of the detection results can be analyzed and judged by the back-end system to reach the human body Health management.

2. The breathing sensor, respirator and the respiratory system of the present invention can be used for physical monitoring of patients in hospitals, and can also be used for home health care, which can effectively reduce the cost of nursing human resources. effect.

In summary, the embodiments of the present invention can indeed achieve the expected use effects, and the specific structure, use mode, and implementation method disclosed by the embodiments of the present invention are not only not seen in the methods and similar products disclosed by the same technology, but also It has not been disclosed before the application, and since it has fully complied with the provisions and requirements of the Patent Law, if you file an application for an invention patent in accordance with the law, I implore the review and grant the patent, it is really convenient.

this invention:

1: Breathing sensor

11: substrate

12: Silicon layer

13: Indium nitride layer

141: Drain

142: Source

2: respirator

21: Mask

211: Mezzanine

212: positioning rope

3: Transmission unit

4: back-end receiving unit

41: Recording Unit

42: Analysis processor

Figure 1: A schematic diagram of the structure of the breathing sensor of the present invention.

Figure 2: A schematic diagram of the present invention to detect the responsivity of a breathing sensor in a capacitive type.

Figure 3: A schematic diagram of the present invention to detect the sensitivity of a breathing sensor using a capacitive type.

Figure 4: A schematic diagram of the measurement and connection analysis instrument of the mask respirator of the present invention.

Figure 5: Block diagram of the respiratory system of the present invention.

1: Breathing sensor

11: substrate

12: Silicon layer

13: Indium nitride layer

141: Drain

142: Source

Claims (6)

A respiration sensor, which mainly includes a respiration sensor; wherein, the respiration sensor has an indium nitride film chip, and the indium nitride film chip is used to sense the breath of the human body when breathing. Humidity, respiratory rate, and electrical measurement values can be obtained by detecting the capacitance value under the humidity of the gas. The respiratory sensor according to claim 1, wherein the indium nitride thin film wafer includes a substrate with a porous natural silicon oxide layer, a silicon layer is grown on the substrate, and then on the silicon layer An indium nitride layer is sputtered, and a drain electrode and a source electrode are arranged on the indium nitride layer. A respirator respirator includes the respiration sensor described in any one of items 1 to 2 in the scope of the patent application; wherein the respiration sensor is arranged in a mask, and the mask is provided with a The interlayer allows the breathing sensor to be embedded in the interlayer, and the mask is provided with at least one positioning rope for positioning the mask on the mouth and nose of the human body. A caring for the respiratory system, which contains: A breathing apparatus is equipped with a mask, the mask is provided with a sandwich layer, and the mask is provided with at least one positioning rope, and the positioning rope is used to position the mask on the mouth and nose of the human body. A respiration sensor is embedded in the interlayer of the mask, and the respiration sensor has an indium nitride film chip. The indium nitride film chip is used to detect the humidity and respiratory frequency of the gas exhaled by the human body when breathing, and through the detection The capacitance value under the gas humidity to obtain the change data of the electrical measurement; A transmission unit connected to the respiration sensor and capable of transmitting the information detected by the respiration sensor; A back-end receiving unit is connected to receive the information transmitted by the transmission unit, a recording unit and an analysis processor are constructed in the back-end receiving unit, and the recording unit records the detection by the respiration sensor The analysis processor receives the data recorded by the recording unit, and analyzes the aforementioned data to judge the reader. The respiratory care system according to claim 4, wherein the transmission unit may adopt a wired or wireless transmission mode. The respiratory care system according to claim 5, wherein the back-end receiving unit may be a smart communication device, an instrument or a medical monitoring system.

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