TWM533211U - Humidity sensor structure with indium nitride layer - Google Patents

Humidity sensor structure with indium nitride layer

Info

Publication number
TWM533211U
TWM533211U TW105210443U TW105210443U TWM533211U TW M533211 U TWM533211 U TW M533211U TW 105210443 U TW105210443 U TW 105210443U TW 105210443 U TW105210443 U TW 105210443U TW M533211 U TWM533211 U TW M533211U
Authority
TW
Taiwan
Prior art keywords
nitride layer
humidity sensor
sensor structure
indium nitride
indium
Prior art date
Application number
TW105210443U
Other languages
Chinese (zh)
Inventor
zhi-qin Yang
Original Assignee
zhi-qin Yang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by zhi-qin Yang filed Critical zhi-qin Yang
Priority to TW105210443U priority Critical patent/TWM533211U/en
Publication of TWM533211U publication Critical patent/TWM533211U/en

Links

TW105210443U 2016-07-12 2016-07-12 Humidity sensor structure with indium nitride layer TWM533211U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105210443U TWM533211U (en) 2016-07-12 2016-07-12 Humidity sensor structure with indium nitride layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105210443U TWM533211U (en) 2016-07-12 2016-07-12 Humidity sensor structure with indium nitride layer

Publications (1)

Publication Number Publication Date
TWM533211U true TWM533211U (en) 2016-12-01

Family

ID=58225872

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105210443U TWM533211U (en) 2016-07-12 2016-07-12 Humidity sensor structure with indium nitride layer

Country Status (1)

Country Link
TW (1) TWM533211U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI615609B (en) * 2016-07-12 2018-02-21 楊誌欽 Humidity sensor having inn layer
TWI716272B (en) * 2020-02-03 2021-01-11 國立高雄科技大學 Respiration sensor, respirometer, and respiratory care system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI615609B (en) * 2016-07-12 2018-02-21 楊誌欽 Humidity sensor having inn layer
TWI716272B (en) * 2020-02-03 2021-01-11 國立高雄科技大學 Respiration sensor, respirometer, and respiratory care system

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Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees