TWM533211U - Humidity sensor structure with indium nitride layer - Google Patents
Humidity sensor structure with indium nitride layerInfo
- Publication number
- TWM533211U TWM533211U TW105210443U TW105210443U TWM533211U TW M533211 U TWM533211 U TW M533211U TW 105210443 U TW105210443 U TW 105210443U TW 105210443 U TW105210443 U TW 105210443U TW M533211 U TWM533211 U TW M533211U
- Authority
- TW
- Taiwan
- Prior art keywords
- nitride layer
- humidity sensor
- sensor structure
- indium nitride
- indium
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW105210443U TWM533211U (en) | 2016-07-12 | 2016-07-12 | Humidity sensor structure with indium nitride layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW105210443U TWM533211U (en) | 2016-07-12 | 2016-07-12 | Humidity sensor structure with indium nitride layer |
Publications (1)
Publication Number | Publication Date |
---|---|
TWM533211U true TWM533211U (en) | 2016-12-01 |
Family
ID=58225872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105210443U TWM533211U (en) | 2016-07-12 | 2016-07-12 | Humidity sensor structure with indium nitride layer |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWM533211U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615609B (en) * | 2016-07-12 | 2018-02-21 | 楊誌欽 | Humidity sensor having inn layer |
TWI716272B (en) * | 2020-02-03 | 2021-01-11 | 國立高雄科技大學 | Respiration sensor, respirometer, and respiratory care system |
-
2016
- 2016-07-12 TW TW105210443U patent/TWM533211U/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615609B (en) * | 2016-07-12 | 2018-02-21 | 楊誌欽 | Humidity sensor having inn layer |
TWI716272B (en) * | 2020-02-03 | 2021-01-11 | 國立高雄科技大學 | Respiration sensor, respirometer, and respiratory care system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4K | Annulment or lapse of a utility model due to non-payment of fees |