TWI712559B - Separation method of silicon carbide and silicon (1) - Google Patents

Separation method of silicon carbide and silicon (1) Download PDF

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TWI712559B
TWI712559B TW108146073A TW108146073A TWI712559B TW I712559 B TWI712559 B TW I712559B TW 108146073 A TW108146073 A TW 108146073A TW 108146073 A TW108146073 A TW 108146073A TW I712559 B TWI712559 B TW I712559B
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silicon
silicon carbide
organic solvent
ton
phase solution
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TW202028112A (en
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王立邦
李旻晏
鄭大偉
張添晉
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國立臺北科技大學
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Abstract

一種碳化矽與矽的分離方法,包括前處理步驟、分散步驟、酸鹼值調整步驟、捕集步驟、混合步驟、靜置步驟、離心步驟及乾燥步驟。本發明可將矽晶圓切削廢棄物中的碳化矽與矽,藉由使用毒性較低的有機溶劑,並且透過先調整目標酸鹼值,然後添加捕集劑,使碳化矽與矽的分離於一個分離操作程序即可達成,並能夠以最佳分離條件獲得高回收率的碳化矽和高品位的矽,並且碳化矽分離效率在70%以上,還可分離10 μm以下微粒子,進而達到降低生產太陽能電池時的廢棄物處理成本及達到循環經濟的目標。A method for separating silicon carbide and silicon includes a pretreatment step, a dispersion step, a pH adjustment step, a collection step, a mixing step, a standing step, a centrifugation step, and a drying step. The present invention can separate the silicon carbide and silicon in the silicon wafer cutting waste by using a less toxic organic solvent, and by first adjusting the target acid-base value, and then adding a trapping agent to separate the silicon carbide and silicon One separation operation procedure can be achieved, and high-recovery silicon carbide and high-grade silicon can be obtained under the best separation conditions, and the separation efficiency of silicon carbide is more than 70%, and it can also separate particles below 10 μm, thereby reducing production The cost of waste disposal of solar cells and achieve the goal of circular economy.

Description

碳化矽與矽的分離方法(一)Separation method of silicon carbide and silicon (1)

本發明係有關一種碳化矽與矽的分離方法,特別是一種可將矽晶圓切削廢棄物中的碳化矽與矽,以單一分離操作程序,進行直接分離回收的方法。The present invention relates to a method for separating silicon carbide and silicon, in particular to a method for directly separating and recycling silicon carbide and silicon in silicon wafer cutting waste in a single separation operation procedure.

太陽能電池由矽晶圓所製造而成。矽晶圓的製造方法,一般而言,都是先製造出矽晶棒,然後藉由多根鐵線鋸切削將矽晶棒切削成複數塊矽晶圓。為了能夠讓鐵線鋸順利切削矽晶棒,必須添加聚乙二醇等切削油及碳化矽磨料。鐵線鋸在切削矽晶棒的過程中,會有許多的矽成為廢料,再加上為了切削而添加的碳化矽、聚乙二醇和磨損的鐵線鋸,即構成矽晶圓切削廢棄物。換言之,矽晶圓切削廢棄物中含有碳化矽、矽、鐵屑、聚乙二醇和水等成分。Solar cells are manufactured from silicon wafers. Generally speaking, the manufacturing method of silicon wafers is to first manufacture silicon ingots, and then use multiple wire saws to cut the silicon ingots into multiple silicon wafers. In order for the wire saw to cut the silicon ingot smoothly, cutting oil such as polyethylene glycol and silicon carbide abrasive must be added. In the process of cutting silicon ingots with iron wire saws, a lot of silicon becomes waste, and the addition of silicon carbide, polyethylene glycol and worn iron wire saws for cutting constitutes silicon wafer cutting waste. In other words, silicon wafer cutting waste contains components such as silicon carbide, silicon, iron filings, polyethylene glycol, and water.

目前矽晶圓切削廢棄物大多送往最終處置場進行掩埋處理。惟因現有掩埋場容量逐漸減少,且台灣地狹人稠,難以另闢新掩埋場場址,使廢棄物處理費用逐漸提高,導致矽晶圓切削廢棄物的非法棄置時有發生。At present, most of the silicon wafer cutting waste is sent to the final disposal site for landfill treatment. However, due to the gradual decrease in the capacity of existing landfills and Taiwan’s narrow and densely populated land, it is difficult to open new landfill sites, which gradually increases the cost of waste disposal, resulting in the illegal disposal of silicon wafer cutting waste from time to time.

為解決上述問題,習用技術的回收方法包括:高溫熱處理法、鋁矽合金法、電場分離法、濕式渦錐分選法、重液離心法、相轉移法、雙層有機溶劑沉降法、泡沫浮選法等。In order to solve the above problems, the conventional technology recovery methods include: high temperature heat treatment, aluminum-silicon alloy method, electric field separation method, wet vortex cone sorting method, heavy liquid centrifugation method, phase transfer method, double-layer organic solvent sedimentation method, foam Flotation and so on.

高溫熱處理法是利用碳化矽與矽的熔點差異使兩者分離。此方法的問題在於:其一,必須在1420~1500℃高溫環境加熱,相當耗能;其二,步驟繁瑣。The high-temperature heat treatment method uses the melting point difference between silicon carbide and silicon to separate the two. The problem with this method is: first, it must be heated in a high temperature environment of 1420~1500℃, which is quite energy-consuming; second, the steps are complicated.

鋁矽合金法是先將碳化矽轉化為矽,以得到矽鋁塊,然後進行酸溶或電解處理去除鋁及碳化鋁。此方法的問題在於:必須在1500℃高溫環境下加熱,相當耗能;其二,步驟繁瑣。The aluminum-silicon alloy method first converts silicon carbide into silicon to obtain silicon-aluminum blocks, and then performs acid solution or electrolytic treatment to remove aluminum and aluminum carbide. The problem with this method is that it must be heated in a high temperature environment of 1500°C, which consumes energy; second, the steps are complicated.

電場分離法是利用碳化矽與矽的界達電位不同,所受電場影響亦不同,及粒徑大小不同所受重力亦有所差異,藉以分離碳化矽與矽。此方法的問題在於:分離效果不理想,回收率差。The electric field separation method uses the difference in the boundary potential between silicon carbide and silicon, the influence of the electric field is also different, and the gravitational force is different for different particle sizes, so as to separate silicon carbide and silicon. The problem with this method is that the separation effect is not ideal and the recovery rate is poor.

濕式渦錐分選法是利用二個幫浦和三支濕式渦錐循環串聯回收碳化矽。此方法的問題在於:適用於粒徑約10~300 μm之間的粒子,對於粒徑10 μm以下的碳化矽與矽之微粒子,碳化矽分離效率降低。The wet vortex cone sorting method uses two pumps and three wet vortex cones to recycle silicon carbide in series. The problem with this method is that it is suitable for particles with a particle size of about 10 to 300 μm. For silicon carbide and silicon fine particles with a particle size of less than 10 μm, the separation efficiency of silicon carbide is reduced.

重液離心法是利用碳化矽與矽的密度及粒徑大小不同,調配不同比例的溴仿及乙醇混合重液,並利用離心機進行離心分離。相轉移法是利用碳化矽與矽的表面親疏水性及比重差異進行分離。這兩種方法的問題在於:其一,使用到溴仿等毒化物,對人體和環境有害;其二,步驟繁瑣。The heavy-liquid centrifugation method uses different densities and particle sizes of silicon carbide and silicon to prepare mixed heavy liquids of bromoform and ethanol in different proportions, and centrifuge them for centrifugal separation. The phase transfer method uses the difference in surface hydrophilicity and hydrophobicity and specific gravity of silicon carbide and silicon for separation. The problems with these two methods are: first, the use of bromoform and other toxic substances is harmful to the human body and the environment; second, the steps are complicated.

雙層有機溶劑沉降法是利用四氯化碳和環氧氯丙烷等兩種密度和極性不同的有機溶劑進行碳化矽與矽的分離沉降。此方法的問題在於:四氯化碳和環氧氯丙烷均為毒化物,對於人體和環境有害。The two-layer organic solvent sedimentation method uses two organic solvents with different densities and polarities, such as carbon tetrachloride and epichlorohydrin, to separate and sediment silicon carbide and silicon. The problem with this method is that both carbon tetrachloride and epichlorohydrin are poisonous and harmful to the human body and the environment.

泡沬浮選法是添加氫氟酸及改變氧化還原電位,利用浮游選別分離碳化矽與矽。此方法的問題在於:其一,氫氟酸為毒化物,對於人體和環境有害;其二,因為氫氟酸會溶解矽,所以矽可能並非被浮起分離而是被氫氟酸所溶解;其三,適用於粒徑約10~300 μm之間的粒子,對於粒徑10 μm以下的碳化矽與矽之微粒子,碳化矽分離效率降低。The foam flotation method is to add hydrofluoric acid and change the oxidation-reduction potential, and use flotation to separate silicon carbide and silicon. The problem with this method is: first, hydrofluoric acid is a poisonous substance, which is harmful to the human body and the environment; second, because hydrofluoric acid dissolves silicon, silicon may not be separated by floating but dissolved by hydrofluoric acid; Third, it is suitable for particles with a particle size of about 10~300 μm. For silicon carbide and silicon fine particles with a particle size of less than 10 μm, the separation efficiency of silicon carbide is reduced.

請參考TW 201040109專利案說明書第5頁倒數第1行至第6頁第一段第4行,為了在矽晶棒切割過程中,由矽泥回收到高純度及高產率的矽粉,TW 201040109專利案採用二階段的粒子相轉移法,利用矽粉與碳化矽粉表面的親水性及疏水性差異,以及矽粉與碳化矽粉比重不同,透過油相及水相分層,有效地回收到高純度的矽粉及碳化矽粉。Please refer to the TW 201040109 patent specification on page 5 from the bottom line 1 to page 6 at line 4 of the first paragraph. In order to recover high-purity and high-yield silicon powder from the silicon mud during the silicon ingot cutting process, TW 201040109 The patent case uses a two-stage particle phase transfer method, which utilizes the difference in hydrophilicity and hydrophobicity of the surface of silicon powder and silicon carbide powder, and the difference in specific gravity between silicon powder and silicon carbide powder. Through the separation of the oil phase and the water phase, it is effectively recovered High-purity silicon powder and silicon carbide powder.

然而,根據TW 201040109專利案說明書第11頁第三段至第12頁第一段所記載,TW 201040109專利案實際上是利用碳化矽與矽的表面親疏水性及比重差異進行分離,必須使用到溴仿,否則無法提升碳化矽分離效率。However, according to the third paragraph of page 11 to the first paragraph of page 12 of the TW 201040109 patent specification, the TW 201040109 patent actually uses the difference in surface affinity and specific gravity of silicon carbide and silicon for separation, and bromine must be used. Otherwise, the separation efficiency of silicon carbide cannot be improved.

再者,TW 201040109專利案的第一階段的碳化矽分離效率只有63.98%(回收率83.1%乘以品位77%乘以100%),低於70%。因此,TW 201040109專利案必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過70%。Furthermore, the silicon carbide separation efficiency in the first stage of the TW 201040109 patent case is only 63.98% (recovery rate 83.1% multiplied by 77% grade multiplied by 100%), which is less than 70%. Therefore, the TW 201040109 patent case must undergo the second stage of separation, or even the third stage of separation, to further increase the silicon carbide separation efficiency to equal to or exceed 70%.

值得一提的是,TW 201040109專利案在調整目標酸鹼值以前,添加六偏磷酸鈉。因為六偏磷酸鈉只會促進混合漿料中的碳化矽與矽等粒子分離,避免產生沉降或凝集的情形,使欲分散粒子能穩定分散於介質中,此作用稱之為分散作用,此為分散劑的特性,故不須事先調整目標酸鹼值。因此,添加六偏磷酸鈉的步驟為分散步驟。It is worth mentioning that the TW 201040109 patent case added sodium hexametaphosphate before adjusting the target pH. Because sodium hexametaphosphate can only promote the separation of silicon carbide and silicon particles in the mixed slurry, avoid sedimentation or agglomeration, so that the particles to be dispersed can be stably dispersed in the medium. This effect is called dispersion. This is Because of the characteristics of the dispersant, there is no need to adjust the target pH in advance. Therefore, the step of adding sodium hexametaphosphate is a dispersion step.

六偏磷酸鈉是分散劑乃眾所周知的通知常識,可參考TW 201527445、TW 201545808、TW 201609238、TW 201612330、TW 201712076等專利案,以及台灣中華化學工業股份有限公司的網頁https://www.chciw.com.tw/index.php/ch/products/product_moreinfo/id/294.html。Sodium hexametaphosphate is a dispersing agent and it is well-known notification common knowledge. You can refer to patent cases such as TW 201527445, TW 201545808, TW 201609238, TW 201612330, TW 201712076, etc., and the website of Taiwan Chunghwa Chemical Industry Co., Ltd. https://www.chciw .com.tw/index.php/ch/products/product_moreinfo/id/294.html.

H.P. Hsu, W.P. Huang, C.F. Yang, C.W. Lan等人的研究論文「Silicon recovery from cutting slurry by phase transfer separation」(以下稱文獻一)刊載在期刊Separation and Purification Technology, Volume 133, (2014) p. 1-7。文獻一的摘要揭露基於矽與碳化矽的疏水性的差異,建議相轉移法使用柴油。因為碳化矽比矽更具疏水性,所以乳化相富含碳化矽顆粒。純度為95 wt%的矽粉能夠被獲得,且產率約為80%。影響分離效率的諸多因素,例如乳化作用等,進一步被探討。The research paper "Silicon recovery from cutting slurry by phase transfer separation" by HP Hsu, WP Huang, CF Yang, CW Lan and others (hereinafter referred to as literature 1) was published in the journal Separation and Purification Technology, Volume 133, (2014) p. 1 -7. The abstract of Literature 1 reveals that based on the difference in hydrophobicity between silicon and silicon carbide, it is recommended that diesel be used in the phase transfer method. Because silicon carbide is more hydrophobic than silicon, the emulsified phase is rich in silicon carbide particles. Silicon powder with a purity of 95 wt% can be obtained, and the yield is about 80%. Many factors that affect separation efficiency, such as emulsification, are further discussed.

文獻一第2頁2.1「樣品能力檢測與製備」的第一段揭露前處理步驟,第二段揭露重力沉降步驟。文獻一第2頁2.2「相轉移分離方法」的第二段揭露加水(分散步驟)、調整酸鹼值(酸鹼值調整步驟)、添加柴油且利用攪拌機攪拌40秒(混合步驟)以及靜置1.5小時(靜置步驟)等步驟。The first paragraph of 2.1 "Sample Capability Testing and Preparation" on page 2 of Document 1 discloses the pre-processing steps, and the second paragraph discloses the gravity sedimentation step. The second paragraph of 2.2 "Phase Transfer Separation Method" on page 2 of Document 1 discloses adding water (dispersion step), adjusting the pH value (pH adjustment step), adding diesel fuel and stirring with a mixer for 40 seconds (mixing step) and standing still 1.5 hours (standstill step) and other steps.

文獻一的方法的第一個限制是在前處理步驟和分散步驟之間,另增加重力沉降步驟。換言之,文獻一必須先利用重力沉降方式,將矽泥中大顆粒的碳化矽沉降去除後,再將小顆粒的碳化矽與矽粉,利用柴油與水,以上述程序進行分離。因此,文獻一方法僅適用於小顆粒的碳化矽與矽粉的分離。惟,以重力沉降方式將矽泥中大顆粒的碳化矽沉降去除時,矽泥中部分大顆粒之矽粉亦隨之沉降去除,此部分於文獻一中被忽略未提及與探討。此外,如未先以重力沉降方式將矽泥中大顆粒的碳化矽沉降去除,而將矽泥中所有的碳化矽與矽粉,直接以上述程序進行分離時,兩者之分離效率約為65.9%,低於70%。因此,文獻一必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過70%。The first limitation of the method in Document 1 is to add a gravity settling step between the pretreatment step and the dispersion step. In other words, Document 1 must first use the gravity sedimentation method to remove the large silicon carbide particles in the silicon mud, and then separate the small particles of silicon carbide and silicon powder using diesel oil and water using the above procedures. Therefore, the method in Document 1 is only suitable for the separation of small particles of silicon carbide and silicon powder. However, when the large particles of silicon carbide in the silica mud are removed by gravity sedimentation, some of the large particles of silica powder in the silica mud will also be removed. This part is ignored and not mentioned and discussed in Literature 1. In addition, if the large silicon carbide particles in the silicon sludge are not settled and removed by gravity sedimentation first, and all the silicon carbide and silicon powder in the silicon sludge are directly separated by the above procedure, the separation efficiency of the two is about 65.9 %, less than 70%. Therefore, literature 1 must carry out the second stage of separation, or even the third stage of separation, to further increase the silicon carbide separation efficiency to equal to or exceed 70%.

文獻一的方法的第二個限制為:先利用重力沉降方式,將矽泥中大顆粒的碳化矽沉降去除後,再以上述程序,將小顆粒碳化矽轉移至油相和水相間之油水界面 (如文獻一之Fig.4, Fig.5, Fig.8所示),批次處理能力較差。The second limitation of the method in Document 1 is: first use the method of gravity sedimentation to remove the large particles of silicon carbide in the silicon mud, and then use the above procedure to transfer the small particles of silicon carbide to the oil-water interface between the oil phase and the water phase. (As shown in Fig.4, Fig.5, Fig.8 in Literature 1), the batch processing capability is poor.

文獻一的方法實質上亦為二階段處理方式,如未先以重力沉降方式去除矽泥中大顆粒的碳化矽,而直接以上述程序進行分離時,碳化矽分離效率會比65.9%更低。The method in Document 1 is essentially a two-stage treatment method. If the large silicon carbide particles in the silicon sludge are not removed by gravity sedimentation first, and the silicon carbide separation efficiency is lower than 65.9% when the above procedure is used for separation.

本發明的主要目的在於提供一種碳化矽與矽的分離方法,可將矽晶圓切削廢棄物中的碳化矽與矽,藉由使用毒性較低的有機溶劑,並且透過先調整目標酸鹼值,然後添加捕集劑,使碳化矽與矽的分離於一個分離操作程序即可達成,碳化矽分離效率在70%以上,還可分離10 μm以下微粒子。The main purpose of the present invention is to provide a method for separating silicon carbide and silicon, which can remove silicon carbide and silicon from silicon wafer cutting waste by using organic solvents with lower toxicity and adjusting the target pH value first. Then add a trapping agent to separate silicon carbide and silicon in one separation operation. The separation efficiency of silicon carbide is above 70%, and it can also separate particles below 10 μm.

本發明的另一目的在於提供一種碳化矽與矽的分離方法,批次處理能力高於先前技術所述的文獻一。Another object of the present invention is to provide a method for separating silicon carbide and silicon, the batch processing capacity is higher than that of the document 1 described in the prior art.

為了達成前述的目的,本發明將提供一種碳化矽與矽的分離方法,包括下列步驟:In order to achieve the foregoing objective, the present invention provides a method for separating silicon carbide and silicon, which includes the following steps:

前處理步驟:去除由切割矽晶棒所得到的一矽晶圓切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品,樣品由碳化矽與矽所組成;Pre-processing steps: remove water, cutting oil and metal impurities in the cutting waste of a silicon wafer obtained by cutting the silicon ingot to obtain a sample composed of silicon carbide and silicon;

分散步驟:加水於樣品中並混合成一混合漿料,利用一超音波分散機以分散混合漿料中的碳化矽與矽;Dispersion step: add water to the sample and mix it to form a mixed slurry, and use an ultrasonic disperser to disperse the silicon carbide and silicon in the mixed slurry;

酸鹼值調整步驟:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整混合漿料的酸鹼值至一目標酸鹼值為7;PH adjusting step: adding an acid adjusting agent or an alkaline adjusting agent to a pH adjusting agent to adjust the pH of the mixed slurry to a target pH of 7;

捕集步驟:添加一捕集劑,用以對混合漿料所包含的碳化矽產生捕集作用,其中,捕集劑為十二烷胺醋酸鹽(Dodecylamine Acetate,DAA),捕集劑的添加量相對於1 ton之樣品重量介於0.2~0.5 kg/ton;Capture step: Add a capture agent to capture the silicon carbide contained in the mixed slurry, where the capture agent is Dodecylamine Acetate (DAA), the addition of the capture agent The amount relative to the sample weight of 1 ton is between 0.2~0.5 kg/ton;

混合步驟:利用一搖盪機所產生的搖盪力對混合漿料進行一初階混合,添加一有機溶劑,並利用搖盪機進行一進階混合而形成一混合溶液,其中,有機溶劑為4-甲基-2-戊醇,有機溶劑和水的體積比介於1:9至1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50;Mixing step: use the shaking force generated by a shaker to perform a preliminary mixing of the mixed slurry, add an organic solvent, and use the shaker to perform an advanced mixing to form a mixed solution, wherein the organic solvent is 4-methyl 2-pentanol, the volume ratio of organic solvent and water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in ml) are solid The liquid ratio is between 1:50 to 3:50;

靜置步驟:將混合溶液靜置一段時間,形成上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出有機溶劑相溶液及水相溶液,其中,有機溶劑相溶液富含碳化矽,水相溶液富含矽;Standing step: The mixed solution is allowed to stand for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other up and down, and then take out the organic solvent phase solution and the aqueous phase solution respectively, where the organic solvent phase solution is rich in silicon carbide , The aqueous solution is rich in silicon;

離心步驟:利用一離心機所產生的離心力將有機溶劑相溶液的固體物及液體分離,並取出有機溶劑相溶液的固體物,以及利用一離心機所產生的離心力將水相溶液的固體物及液體分離,並取出水相溶液的固體物;以及Centrifugation step: use the centrifugal force generated by a centrifuge to separate the solids and liquids of the organic solvent phase solution, take out the solids of the organic solvent phase solution, and use the centrifugal force generated by a centrifuge to separate the solids and liquids of the aqueous phase solution The liquid is separated and the solids of the aqueous solution are taken out; and

乾燥步驟:利用一烘乾機對有機溶劑相溶液的固體物或水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽。Drying step: Use a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively.

較佳地,捕集劑的添加量相對於1 ton之樣品重量為0.25 kg/ton,有機溶劑和水的體積比為1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。Preferably, the additive amount of the collector is 0.25 kg/ton relative to the weight of 1 ton of the sample, the volume ratio of organic solvent and water is 1:4, and the weight of the sample (in g) is composed of water and organic solvent. The volume of liquid (in ml) has a solid-liquid ratio of 1:50.

在一實施例中,其步驟如前所述,差別在於,目標酸鹼值為5,捕集劑選自於十二烷基硫酸鈉(Sodium Dodecyl Sulfate,SDS)、十四烷基硫酸鈉(Sodium Tetradecyl Sulfate)、月桂醇聚氧乙烯醚硫酸鈉(Sodium Laureth Sulfate)、十二烷基磺酸鈉(Sodium Dodecyl Sulfonate)、十烷基磺酸鈉(Sodium Decane-1-Sulfonate)及對甲苯磺酸鈉(Sodium p-Toluene Sulfonate)所構成的群組中的其中一種,捕集劑的添加量相對於1 ton之樣品重量介於0.25~2 kg/ton。較佳地,捕集劑的添加量相對於1 ton之樣品重量為2 kg/ton,有機溶劑和水的體積比為1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。In one embodiment, the steps are as described above, the difference is that the target acid-base value is 5, and the collector is selected from sodium dodecyl sulfate (SDS) and sodium tetradecyl sulfate ( Sodium Tetradecyl Sulfate, Sodium Laureth Sulfate, Sodium Dodecyl Sulfonate, Sodium Decane-1-Sulfonate and p-toluenesulfonate Sodium p-Toluene Sulfonate (Sodium p-Toluene Sulfonate) is one of the groups. The amount of collector added is 0.25~2 kg/ton relative to 1 ton of sample weight. Preferably, the additive amount of the collector is 2 kg/ton relative to the weight of 1 ton of the sample, the volume ratio of organic solvent and water is 1:4, and the weight of the sample (in g) is composed of water and organic solvent The volume of liquid (in ml) has a solid-liquid ratio of 1:50.

在一實施例中,其步驟如前所述,差別在於,目標酸鹼值為5,捕集劑為油酸鈉(Sodium Oleate,NaOL),捕集劑的添加量相對於1 ton之樣品重量介於4~6 kg/ton。較佳地,捕集劑的添加量相對於1 ton之樣品重量為5 kg/ton,有機溶劑和水的體積比為1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。In one embodiment, the steps are as described above, the difference is that the target pH is 5, the trapping agent is sodium oleate (NaOL), and the amount of trapping agent added is relative to 1 ton of sample weight Between 4~6 kg/ton. Preferably, the added amount of the collector is 5 kg/ton relative to the weight of 1 ton of the sample, the volume ratio of organic solvent and water is 1:4, and the weight of the sample (in g) is composed of water and organic solvent The volume of liquid (in ml) has a solid-liquid ratio of 1:50.

在一實施例中,其步驟如前所述,差別在於,目標酸鹼值為9,捕集劑的添加量相對於1 ton之樣品重量介於0.1~0.25 kg/ton,有機溶劑為異辛烷。較佳地,捕集劑的添加量相對於1 ton之樣品重量為0.1 kg/ton,有機溶劑和水的體積比為1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。In one embodiment, the steps are as described above, the difference is that the target acid-base value is 9, the amount of the collector added relative to the sample weight of 1 ton is 0.1~0.25 kg/ton, and the organic solvent is isooctane alkyl. Preferably, the additive amount of the collector is 0.1 kg/ton relative to the weight of 1 ton of the sample, the volume ratio of organic solvent and water is 1:4, and the weight of the sample (in g) is composed of water and organic solvent The volume of liquid (in ml) has a solid-liquid ratio of 1:50.

在一實施例中,其步驟如前所述,差別在於,目標酸鹼值為5,捕集劑為油酸鈉(Sodium Oleate,NaOL),捕集劑的添加量相對於1 ton之樣品重量介於0.1~1.25 kg/ton,有機溶劑為異辛烷。較佳地,捕集劑的添加量相對於1 ton之樣品重量為1.0 kg/ton,有機溶劑和水的體積比為1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。In one embodiment, the steps are as described above, the difference is that the target pH is 5, the trapping agent is sodium oleate (NaOL), and the amount of trapping agent added is relative to 1 ton of sample weight Between 0.1~1.25 kg/ton, the organic solvent is isooctane. Preferably, the additive amount of the collector is 1.0 kg/ton relative to the weight of 1 ton of the sample, the volume ratio of organic solvent and water is 1:4, and the weight of the sample (in g) is composed of water and organic solvent The volume of liquid (in ml) has a solid-liquid ratio of 1:50.

本發明的功效在於,可將矽晶圓切削廢棄物中的碳化矽與矽,藉由使用毒性較低的有機溶劑,並且透過先調整目標酸鹼值,然後添加捕集劑,使碳化矽與矽的分離於一個分離操作程序即可達成,並能夠以最佳分離條件獲得高回收率的碳化矽和高品位的矽,並且碳化矽分離效率在70%以上,還可分離10 μm以下微粒子,進而達到降低生產太陽能電池時的廢棄物處理成本及達到循環經濟的目標。The effect of the present invention is that the silicon carbide and silicon in the silicon wafer cutting waste can be removed by using a less toxic organic solvent, and by first adjusting the target acid-base value, and then adding a trapping agent to make the silicon carbide and silicon The separation of silicon can be achieved in one separation operation procedure, and high-recovery silicon carbide and high-grade silicon can be obtained under optimal separation conditions, and the separation efficiency of silicon carbide is more than 70%, and it can also separate particles below 10 μm. In turn, it achieves the goal of reducing waste disposal costs when producing solar cells and achieving a circular economy.

再者,相較於先前技術所述的文獻一的第二個限制,本發明係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。Furthermore, compared with the second limitation of Document 1 described in the prior art, the present invention separates all silicon carbide into the oil phase, and the batch processing capacity is higher than that of Document 1 described in the prior art.

以下配合圖式及元件符號對本發明的實施方式做更詳細的說明,俾使熟習該項技藝者在研讀本說明書後能據以實施。The following describes the embodiments of the present invention in more detail in conjunction with the drawings and component symbols, so that those who are familiar with the art can implement it after studying this specification.

請參閱圖1,本發明提供一種碳化矽與矽的分離方法,包括前處理步驟S10、分散步驟S20、酸鹼值調整步驟S30、捕集步驟S40、混合步驟S50、靜置步驟S60、離心步驟S70及乾燥步驟S80。1, the present invention provides a method for separating silicon carbide and silicon, including pre-processing step S10, dispersion step S20, pH adjustment step S30, trapping step S40, mixing step S50, standing step S60, and centrifuging step S70 and drying step S80.

前處理步驟S10:去除由切割矽晶棒所得到的一矽晶棒切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品;樣品由碳化矽與矽所組成。更明確地說,矽晶圓切削廢棄物在尚未經過任何處理之前,富含碳化矽、矽、金屬雜質(例如,鐵屑)、切削油(例如,聚乙二醇)和水。在前處理步驟S10中,首先將矽晶棒切削廢棄物放置在一烘乾機(圖未示)以105℃的溫度初步乾燥,藉以去除水分;其次,以適量的乙醇或丙酮離心清洗乾燥的矽晶圓切削廢棄物兩次,藉以去除切削油;接著,以適量的30 wt%的硝酸或硫酸溶解金屬雜質,再離心並乾燥粉體,重複執行三次;然後,以去離子水離心水洗粉體,藉以洗去硝酸或硫酸;最後,烘乾粉體,以獲得樣品。由於水、切削油和金屬雜質都已經完全去除,所以樣品只有由碳化矽與矽所組成,沒有其他物質殘留。Pre-processing step S10: removing water, cutting oil and metal impurities in a silicon ingot cutting waste obtained by cutting the silicon ingot to obtain a sample; the sample is composed of silicon carbide and silicon. More specifically, silicon wafer cutting waste is rich in silicon carbide, silicon, metal impurities (for example, iron filings), cutting oil (for example, polyethylene glycol), and water before any treatment. In the pre-processing step S10, firstly, the silicon crystal rod cutting waste is placed in a dryer (not shown) for preliminary drying at a temperature of 105°C to remove water; secondly, the dried silicon wafer is cleaned by centrifugation with an appropriate amount of ethanol or acetone. The silicon wafer was cut twice to remove the cutting oil; then, the metal impurities were dissolved with an appropriate amount of 30 wt% nitric acid or sulfuric acid, and the powder was centrifuged and dried. Repeat three times; then, the powder was centrifuged with deionized water In order to wash away the nitric acid or sulfuric acid; finally, the powder is dried to obtain a sample. Since water, cutting oil and metal impurities have been completely removed, the sample is only composed of silicon carbide and silicon, and no other substances remain.

請參閱圖2,圖2是利用雷射粒度分析儀對本發明的前處理步驟S10的樣品的粒徑分析結果示意圖。利用一雷射粒度分析儀(圖未示)對樣品的粒徑進行分析。圖2的分析結果顯示出,樣品的粒徑介於0.25~5.47 μm,平均粒徑為0.390 μm。由此可見,樣品的粒徑小於10 μm,非常適合利用後述的液液抽出法進行分離回收。Please refer to FIG. 2. FIG. 2 is a schematic diagram of the particle size analysis result of the sample in the pre-processing step S10 of the present invention using a laser particle size analyzer. A laser particle size analyzer (not shown) is used to analyze the particle size of the sample. The analysis results in Figure 2 show that the particle size of the sample is between 0.25 and 5.47 μm, and the average particle size is 0.390 μm. It can be seen that the particle size of the sample is less than 10 μm, which is very suitable for separation and recovery using the liquid-liquid extraction method described later.

請參閱圖3,圖3是利用X光繞射儀對本發明的前處理步驟S10的樣品的結晶型態分析結果示意圖。利用一X光繞射分析儀(圖未示)對樣品的結晶型態進行分析。圖3的分析結果顯示出,樣品的結晶相以碳化矽與矽為主。Please refer to FIG. 3. FIG. 3 is a schematic diagram of the crystalline state analysis result of the sample in the pre-processing step S10 of the present invention using an X-ray diffractometer. An X-ray diffraction analyzer (not shown) was used to analyze the crystalline form of the sample. The analysis result in Figure 3 shows that the crystalline phase of the sample is dominated by silicon carbide and silicon.

請參閱圖4,圖4是利用掃描式電子顯微鏡對本發明的前處理步驟S10的樣品的結構外觀分析結果示意圖。利用一掃描式電子顯微鏡(圖未示)對樣品的結構外觀進行分析。圖4的分析結果顯示出,有許多小顆粒的矽附著在大顆粒的碳化矽上。原因在於,在進行矽晶圓切削過程中會添加碳化矽作為磨料進行切削,切削時損失的微小矽粒子附著在較大顆粒的碳化矽上。Please refer to FIG. 4. FIG. 4 is a schematic diagram of the structural appearance analysis result of the sample in the pre-processing step S10 of the present invention by using a scanning electron microscope. A scanning electron microscope (not shown) was used to analyze the structural appearance of the sample. The analysis results in Figure 4 show that there are many small particles of silicon attached to the large particles of silicon carbide. The reason is that silicon carbide is added as an abrasive for cutting during the silicon wafer cutting process, and the tiny silicon particles lost during cutting adhere to the larger silicon carbide particles.

分散步驟S20:加水於樣品中並混合成一混合漿料,利用一超音波分散機(圖未示)震盪分散混合漿料中的碳化矽與矽。較佳地,混合漿料被震盪分散至少二十分鐘。Dispersion step S20: add water to the sample and mix it to form a mixed slurry, and use an ultrasonic dispersion machine (not shown) to vibrate and disperse the silicon carbide and silicon in the mixed slurry. Preferably, the mixed slurry is shaken and dispersed for at least twenty minutes.

酸鹼值調整步驟S30:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整混合漿料的酸鹼值至一目標酸鹼值。具體而言,酸性調整劑為鹽酸或硝酸,鹼性調整劑為氫氧化鈉或氫氧化鉀,目標酸鹼值介於4~10。混合漿料的目標酸鹼值調整好以後,倒入一分液漏斗(圖未示)。PH adjusting step S30: adding an acid adjusting agent or a pH adjusting agent of an alkaline adjusting agent to adjust the pH of the mixed slurry to a target pH. Specifically, the acidity regulator is hydrochloric acid or nitric acid, and the alkalinity regulator is sodium hydroxide or potassium hydroxide, and the target acid-base value is between 4-10. After adjusting the target pH of the mixed slurry, pour it into a separatory funnel (not shown).

捕集步驟S40:添加一捕集劑,用以對混合漿料所包含的碳化矽產生捕集作用。捕集劑可為陽離子捕集劑或陰離子捕集劑。捕集劑選自於十二烷胺醋酸鹽(Dodecylamine Acetate,DAA)、十二烷基硫酸鈉(Sodium Dodecyl Sulfate,SDS)、十四烷基硫酸鈉(Sodium Tetradecyl Sulfate)、月桂醇聚氧乙烯醚硫酸鈉(Sodium Laureth Sulfate)、十二烷基磺酸鈉(Sodium Dodecyl Sulfonate)、十烷基磺酸鈉(Sodium Decane-1-Sulfonate)、對甲苯磺酸鈉(Sodium p-Toluene Sulfonate)及油酸鈉(Sodium Oleate,NaOL)所構成的群組中的其中一種。捕集劑的添加量相對於1 ton之樣品重量介於0.1~6 kg/ton之間。The trapping step S40: adding a trapping agent for trapping the silicon carbide contained in the mixed slurry. The trapping agent may be a cation trapping agent or an anion trapping agent. The trapping agent is selected from Dodecylamine Acetate (DAA), Sodium Dodecyl Sulfate (SDS), Sodium Tetradecyl Sulfate, and Polyoxyethylene Lauryl Alcohol Sodium Laureth Sulfate, Sodium Dodecyl Sulfonate, Sodium Decane-1-Sulfonate, Sodium p-Toluene Sulfonate, and One of the group consisting of Sodium Oleate (NaOL). The amount of the collector added is between 0.1 and 6 kg/ton relative to the weight of 1 ton of the sample.

混合步驟S50:利用一搖盪機所產生的搖盪力對混合漿料進行一初階混合。接著,添加一有機溶劑。然後再利用搖盪機進行一進階混合而形成一混合溶液。較佳地,初階混合和進階混合的操作皆維持至少十五分鐘,有機溶劑為4-甲基-2-戊醇或異辛烷,4-甲基-2-戊醇微溶於水,異辛烷不溶於水,有機溶劑和水的體積比介於1:9至1:4,樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50。Mixing step S50: using the shaking force generated by a shaking machine to perform a preliminary mixing of the mixed slurry. Next, add an organic solvent. Then use a shaker to perform an advanced mixing to form a mixed solution. Preferably, both the primary mixing and advanced mixing operations are maintained for at least fifteen minutes, the organic solvent is 4-methyl-2-pentanol or isooctane, 4-methyl-2-pentanol is slightly soluble in water , Isooctane is insoluble in water, the volume ratio of organic solvent and water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in ml) The solid-liquid ratio is between 1:50 to 3:50.

靜置步驟S60:將混合溶液靜置一段時間,形成一上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出有機溶劑相溶液及水相溶液。其中,有機溶劑相溶液富含碳化矽,水相溶液富含矽。具體來說,有機溶劑相溶液的比重小於水相溶液的比重,所以有機溶劑相溶液在上,水相溶液在下。利用分液漏斗先將下方的水相溶液取出,然後再將上方的有機溶劑相溶液取出。Standing step S60: standing the mixed solution for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other from top and bottom, and then take out the organic solvent phase solution and the aqueous phase solution respectively. Among them, the organic solvent phase solution is rich in silicon carbide, and the aqueous phase solution is rich in silicon. Specifically, the specific gravity of the organic solvent phase solution is less than the specific gravity of the aqueous phase solution, so the organic solvent phase solution is on top and the aqueous phase solution is on the bottom. Use a separatory funnel to first take out the lower aqueous phase solution, and then take out the upper organic solvent phase solution.

離心步驟S70:利用一離心機(圖未示)所產生的離心力將有機溶劑相溶液的固體物及液體分離,並取出有機溶劑相溶液的固體物。利用離心機所產生的離心力將水相溶液的固體物及液體分離,並取出水相溶液的固體物。其中,離心機的離心條件設定在3500 rpm,離心30分鐘。Centrifugation step S70: Use the centrifugal force generated by a centrifuge (not shown) to separate the solids and liquids of the organic solvent phase solution, and take out the solids of the organic solvent phase solution. The centrifugal force generated by the centrifuge is used to separate the solids and liquids of the aqueous solution, and take out the solids of the aqueous solution. Among them, the centrifugal condition of the centrifuge is set at 3500 rpm, and the centrifugal time is 30 minutes.

乾燥步驟S80:利用一烘乾機對有機溶劑相溶液的固體物或水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽,達到回收的目的。其中,烘乾機的乾燥條件設定在105℃,乾燥二十四小時,然後放置在室溫冷卻後秤重。最後,透過碳化矽磨料化學分析法(CNS-9439,R3109方法)分析碳化矽的重量,再經計算可得到碳化矽與矽品位及回收率。Drying step S80: Use a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively, to achieve the purpose of recovery. Among them, the drying condition of the dryer is set at 105°C, dried for 24 hours, and then placed at room temperature to cool down and weighed. Finally, analyze the weight of silicon carbide by the silicon carbide abrasive chemical analysis method (CNS-9439, R3109 method), and then calculate the silicon carbide and silicon grade and recovery rate.

為了進一步說明本發明所達成的功效,以下將提供二個對照組、五個實驗組以及列舉五個示範性的實施例代表五項實際樣品分離實驗。In order to further illustrate the effects achieved by the present invention, two control groups, five experimental groups, and five exemplary embodiments will be provided below to represent five actual sample separation experiments.

對照組一:以4-甲基-2-戊醇為有機相,未添加捕集劑。Control group 1: Use 4-methyl-2-pentanol as the organic phase without adding a trapping agent.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為4-甲基-2-戊醇,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)未添加捕集劑。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is 4-methyl-2-pentanol, and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) No trapping agent is added.

請參閱圖5,圖5是對照組一的4-甲基-2-戊醇未添加捕集劑對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~11時,隨著目標酸鹼值的增加,4-甲基-2戊醇相回收物的碳化矽品位從87%降低至46%。當目標酸鹼值為5時,4-甲基-2戊醇相回收物的碳化矽回收率達到最高44%。隨著目標酸鹼值增加,碳化矽回收率降低至5%。雖然目標酸鹼值在 5以下時,碳化矽品位達到80%以上,但碳化矽回收率低於45%。另一方面,當目標酸鹼值介於3~11時,水相回收物的矽品位介於41%~52%,水相回收物的矽回收率介於82%~98%,皆無明顯變化。雖然矽回收率皆達80%以上,但矽品位皆低於45%。Please refer to Figure 5. Figure 5 is a graph showing the separation and extraction results of samples with different target acid-base values of 4-methyl-2-pentanol without the addition of trapping agent in control group 1. When the target acid-base value is between 3 and 11, as the target acid-base value increases, the silicon carbide grade of the 4-methyl-2-pentanol phase recovery product decreases from 87% to 46%. When the target acid-base value is 5, the silicon carbide recovery rate of the 4-methyl-2-pentanol phase recovery material reaches the highest 44%. As the target acid-base value increases, the silicon carbide recovery rate is reduced to 5%. Although the silicon carbide grade reaches over 80% when the target acid-base value is below 5, the silicon carbide recovery rate is less than 45%. On the other hand, when the target acid-base value is between 3-11, the silicon grade of the water-phase reclaimed material is between 41% and 52%, and the silicon recovery rate of the water-phase reclaimed material is between 82% and 98%. . Although the silicon recovery rate is above 80%, the silicon grade is below 45%.

因為碳化矽分離效率為4-甲基-2-戊醇相回收物中的碳化矽回收率和品位的相乘積,因此對照組一在目標酸鹼值為5時,可得到最佳碳化矽分離效率為38.3%((回收率44%乘以品位87%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and grade in the 4-methyl-2-pentanol phase recovery, the best silicon carbide can be obtained when the target acid-base value of the control group is 5 The separation efficiency is 38.3% ((recovery rate 44% multiplied by 87% grade multiplied by 100%).

對照組二:以柴油為有機相,未添加捕集劑。Control group two: diesel oil is used as the organic phase, no trapping agent is added.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為柴油,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)未添加捕集劑。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is diesel oil and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) no trapping agent is added .

請參閱圖6,圖6是對照組二的柴油未添加捕集劑對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~9時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽品位上升。當目標酸鹼值為9時,碳化矽品位達到最高78.5%。當目標酸鹼值在 11以上時,碳化矽品位則下降。當目標酸鹼值介於3~11時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽回收率下降。另一方面,當目標酸鹼值介於3~11時,隨著目標酸鹼值的增加,水相回收物的矽品位下降,水相回收物的矽回收率上升。當目標酸鹼值為11時,矽回收率達到最高84.8%。Please refer to Figure 6. Figure 6 is a graph showing the separation and extraction results of samples with different target acid-base values for the control group 2 diesel without trapping agent. When the target acid-base value is between 3 and 9, as the target acid-base value increases, the grade of silicon carbide in the diesel phase recycle material increases. When the target acid-base value is 9, the silicon carbide grade reaches the highest 78.5%. When the target pH is above 11, the grade of silicon carbide drops. When the target acid-base value is between 3 and 11, as the target acid-base value increases, the recovery rate of silicon carbide in the diesel phase recycle material decreases. On the other hand, when the target acid-base value is between 3 and 11, as the target acid-base value increases, the silicon grade of the water phase reclaimed material decreases, and the silicon recovery rate of the water phase reclaimed material increases. When the target acid-base value is 11, the silicon recovery rate reaches the highest 84.8%.

因為碳化矽分離效率為柴油相回收物中的碳化矽回收率和品位的相乘積,因此對照組二在目標酸鹼值為3時,可得到最佳碳化矽分離效率為65.9% (回收率95.8%乘以品位68.8%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade in the diesel phase recovery, the best silicon carbide separation efficiency of 65.9% can be obtained when the target acid-base value of the control group is 3 (recovery rate). 95.8% multiplied by grade 68.8% multiplied by 100%).

值得一提的是,上述對照組二實質上為先前技術所述的文獻一的方法,因此,對照組二的實驗結果即為先前技術所述的文獻一的方法的實驗結果。It is worth mentioning that the above-mentioned control group two is essentially the method described in the prior art document 1, therefore, the experimental result of the control group two is the experimental result of the document one described in the prior art.

實驗組一:以4-甲基-2-戊醇為有機相,六偏磷酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton。Experimental group 1: Using 4-methyl-2-pentanol as the organic phase, the addition amount of sodium hexametaphosphate is 0.25 kg/ton relative to the sample weight of 1 ton.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為4-甲基-2-戊醇,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)在酸鹼值調整步驟之後,在混合步驟之前,添加分散劑:六偏磷酸鈉,六偏磷酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is 4-methyl-2-pentanol, and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) After the pH adjustment step and before the mixing step, add dispersant: sodium hexametaphosphate. The amount of sodium hexametaphosphate added is 0.25 kg/ton relative to the weight of 1 ton of the sample.

請參閱圖7,圖7是實驗組一的4-甲基-2-戊醇添加六偏磷酸鈉(分散劑)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~5時,隨著目標酸鹼值的增加,4-甲基-2戊醇相回收物的碳化矽品位及回收率逐漸上升。當目標酸鹼值為5時,碳化矽品位達到最高75.5%,碳化矽回收率達到最高24.8%。當目標酸鹼值在5以上時,碳化矽品位及碳化矽回收率均下降。另一方面,當目標酸鹼值介於pH 3~11時,水相回收物的矽品位並無明顯變化,矽回收率介於88.7%~98.1%。當目標酸鹼值為5時,矽品位達到最高49.8%。Please refer to Figure 7. Figure 7 shows the 4-methyl-2-pentanol added with sodium hexametaphosphate (dispersant) of experimental group 1 relative to the sample weight of 1 ton as 0.25 kg/ton. The sample is at different target pH values. The separation draws the result graph. When the target acid-base value is between 3 and 5, with the increase of the target acid-base value, the silicon carbide grade and recovery rate of the 4-methyl-2-pentanol phase recovery material gradually increase. When the target acid-base value is 5, the silicon carbide grade reaches the highest 75.5%, and the silicon carbide recovery rate reaches the highest 24.8%. When the target pH is above 5, the grade of silicon carbide and the recovery rate of silicon carbide decrease. On the other hand, when the target acid-base value is between pH 3-11, the silicon grade of the water phase reclaimed product does not change significantly, and the silicon recovery rate is between 88.7%-98.1%. When the target pH value is 5, the silicon grade reaches the highest 49.8%.

因為碳化矽分離效率為4-甲基-2-戊醇相回收物中的碳化矽回收率和品位的相乘積,因此實驗組一在目標酸鹼值為5時,可得到最佳碳化矽分離效率為19.8% (回收率24.8%乘以品位75.5%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade in the 4-methyl-2-pentanol phase recovery, the best silicon carbide can be obtained when the target acid-base value of the first experimental group is 5 The separation efficiency is 19.8% (recovery rate of 24.8% multiplied by 75.5% of grade multiplied by 100%).

實驗組二:以柴油為有機相,十二烷胺醋酸鹽添加量相對於1 ton之樣品重量為0.25 kg/ton。Experimental group 2: With diesel as the organic phase, the dodecylamine acetate addition amount is 0.25 kg/ton relative to the sample weight of 1 ton.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為柴油,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)添加捕集劑:十二烷胺醋酸鹽,十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.25 kg/ton。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is diesel oil, and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) the trapping agent is added: Dodecylamine acetate, the addition amount of dodecylamine acetate is 0.25 kg/ton relative to the sample weight of 1 ton.

請參閱圖8,圖8是實驗組二的柴油添加十二烷胺醋酸鹽(DAA)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~7時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽品位上升,碳化矽回收率介於82.8%~99.8%。當目標酸鹼值為7時,碳化矽品位達到最高68.6%。當目標酸鹼值在7以上時,柴油相回收物的碳化矽品位以及碳化矽回收率均下降。另一方面,當目標酸鹼值介於3~5時,隨著目標酸鹼值的增加,水相回收物的矽品位上升。當目標酸鹼值為5時,矽品位達到最高99.6%。隨著目標酸鹼值的增加,水相回收物的矽回收率上升。當目標酸鹼值為11時,矽回收率達到最高71.5%。Please refer to Figure 8. Figure 8 is a graph showing the separation and extraction results of the sample with different target pH values for the sample weight of 1 ton of dodecylamine acetate (DAA) relative to 1 ton of sample weight of 0.25 kg/ton. When the target acid-base value is between 3 and 7, as the target acid-base value increases, the grade of silicon carbide in the diesel phase reclaimed material increases, and the silicon carbide recovery rate ranges from 82.8% to 99.8%. When the target acid-base value is 7, the silicon carbide grade reaches the highest 68.6%. When the target acid-base value is above 7, the silicon carbide grade and the silicon carbide recovery rate of the diesel phase reclaimed material will decrease. On the other hand, when the target acid-base value is between 3 and 5, as the target acid-base value increases, the silicon level of the water phase reclaimed product increases. When the target pH value is 5, the silicon grade reaches the highest 99.6%. As the target acid-base value increases, the silicon recovery rate of the water phase recyclate increases. When the target acid-base value is 11, the silicon recovery rate reaches the highest 71.5%.

因為碳化矽分離效率為柴油相回收物中的碳化矽回收率和品位的相乘積,因此實驗組二在目標酸鹼值為5時,可得到最佳碳化矽分離效率為64.7% (回收率99.8%乘以品位64.8%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade in the diesel phase recovery, the best silicon carbide separation efficiency of 64.7% (recovery rate) can be obtained when the target acid-base value of experimental group 2 is 5. 99.8% multiplied by grade 64.8% multiplied by 100%).

實驗組三:以柴油為有機相,十二烷基硫酸鈉添加量相對於1 ton之樣品重量為0.25 kg/ton。Experimental group three: diesel oil is used as the organic phase, and the amount of sodium lauryl sulfate added is 0.25 kg/ton relative to the weight of 1 ton of the sample.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為柴油,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)添加捕集劑:十二烷基硫酸鈉,十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is diesel oil, and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) the trapping agent is added: Sodium lauryl sulfate, the addition amount of sodium lauryl sulfate is 0.25 kg/ton relative to the sample weight of 1 ton.

請參閱圖9,圖9是實驗組三的柴油添加十二烷基硫酸鈉(SDS)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~9時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽品位上升。當目標酸鹼值為9時,碳化矽品位達到最高74.6%。當目標酸鹼值在11以上時,碳化矽品位則下降。當目標酸鹼值介於3~11時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽回收率下降。另一方面,當目標酸鹼值介於3~11時,水相回收物的矽品位介於42%-96%,水相回收物的矽回收率上升。當目標酸鹼值為11時,矽回收率達到最高82.8%。Please refer to Figure 9. Figure 9 is a graph showing the separation and extraction results of samples with different target acid-base values for the sample weight of 0.25 kg/ton relative to 1 ton of diesel fuel added with sodium dodecyl sulfate (SDS). When the target acid-base value is between 3 and 9, as the target acid-base value increases, the grade of silicon carbide in the diesel phase recycle material increases. When the target acid-base value is 9, the silicon carbide grade reaches the highest 74.6%. When the target pH is above 11, the grade of silicon carbide drops. When the target acid-base value is between 3 and 11, as the target acid-base value increases, the recovery rate of silicon carbide in the diesel phase recycle material decreases. On the other hand, when the target acid-base value is between 3-11, the silicon grade of the water-phase reclaimed material is between 42%-96%, and the silicon recovery rate of the water-phase reclaimed material increases. When the target acid-base value is 11, the silicon recovery rate reaches the highest 82.8%.

因為碳化矽分離效率為柴油相回收物中的碳化矽回收率和品位的相乘積,因此實驗組三在目標酸鹼值為7時,可得到最佳碳化矽分離效率為66.6% (回收率87.8%乘以品位75.8%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade in the diesel phase recovery, the best silicon carbide separation efficiency of 66.6% (recovery rate) can be obtained when the target acid-base value of the experimental group 3 is 7. 87.8% multiplied by grade 75.8% multiplied by 100%).

實驗組四:以柴油為有機相,油酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton。Experimental group 4: With diesel as the organic phase, the amount of sodium oleate added relative to the sample weight of 1 ton is 0.25 kg/ton.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為柴油,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)添加捕集劑:油酸鈉,油酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is diesel oil, and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) the trapping agent is added: Sodium oleate, the amount of sodium oleate added is 0.25 kg/ton relative to 1 ton of sample weight.

請參閱圖10,圖10是實驗組四的柴油添加油酸鈉(NaOL)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~7時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽品位上升。當目標酸鹼值為7時,碳化矽品位達到最高66.6%。當目標酸鹼值在7以上時,碳化矽品位則下降。當目標酸鹼值介於3~5時,隨著目標酸鹼值的增加,柴油相回收物的碳化矽回收率上升。當目標酸鹼值為5時,碳化矽回收率達到最高81.8%。目標酸鹼值在5以上時,碳化矽回收率則下降。另一方面,當目標酸鹼值介於3~11時,水相回收物的矽品位無明顯變化,介於55%~42%,水相回收物的矽回收率上升。當目標酸鹼值為11時,矽回收率達到最高80.8%。Please refer to Figure 10. Figure 10 is a graph showing the separation and extraction results of sodium oleate (NaOL) in experimental group 4 with respect to the sample weight of 1 ton of 0.25 kg/ton against different target pH values. When the target acid-base value is between 3 and 7, as the target acid-base value increases, the silicon carbide grade of the diesel phase reclaimed material rises. When the target acid-base value is 7, the silicon carbide grade reaches the highest 66.6%. When the target pH is above 7, the grade of silicon carbide decreases. When the target acid-base value is between 3 and 5, as the target acid-base value increases, the recovery rate of silicon carbide in the diesel phase recycle material increases. When the target acid-base value is 5, the silicon carbide recovery rate reaches the highest 81.8%. When the target pH is above 5, the recovery rate of silicon carbide decreases. On the other hand, when the target acid-base value is between 3-11, there is no significant change in the silicon grade of the water phase reclaimed product, which is between 55% and 42%, and the silicon recovery rate of the water phase reclaimed material will increase. When the target acid-base value is 11, the silicon recovery rate reaches the highest 80.8%.

因為碳化矽分離效率為柴油相回收物中的碳化矽回收率和品位的相乘積,因此實驗組四在目標酸鹼值為5時,可得到最佳碳化矽分離效率為49.7% (回收率81.8%乘以品位60.8%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade in the diesel phase reclaimed product, the best silicon carbide separation efficiency of 49.7% (recovery rate) can be obtained when the target acid-base value of experimental group 4 is 5. 81.8% multiplied by grade 60.8% multiplied by 100%).

實驗組五:以異辛烷為有機溶劑,六偏磷酸鈉(分散劑)的添加量相對於1 ton之樣品重量為0.25 kg/ton。Experimental group 5: Using isooctane as the organic solvent, the addition amount of sodium hexametaphosphate (dispersant) is 0.25 kg/ton relative to the sample weight of 1 ton.

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為異辛烷,添加量為20 ml;(3)去離子水的添加量為80 ml;以及(4)在酸鹼值調整步驟之後,在混合步驟之前,添加分散劑:六偏磷酸鈉,六偏磷酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is isooctane and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) After the value adjustment step and before the mixing step, add dispersant: sodium hexametaphosphate. The addition amount of sodium hexametaphosphate is 0.25 kg/ton relative to the weight of 1 ton of the sample.

請參閱圖11,圖11是實驗組五的異辛烷添加六偏磷酸鈉(分散劑)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~7時,隨著目標酸鹼值的增加,異辛烷相回收物的碳化矽品位及回收率均上升。當目標酸見值為7時,碳化矽品位達到最高75.5%,碳化矽回收率達到最高56.8%。當目標酸鹼值在7以上時,碳化矽品位及回收率則下降。另一方面,當目標酸鹼值介於3~7時,隨著目標酸鹼值的增加,水相回收物的矽品位上升。當目標酸鹼值為7時,矽品位達到最高57.8%。當目標酸鹼值在7以上時,矽品位則下降。當目標酸鹼值介於3~11時,水相回收物的矽回收率無明顯變化,矽回收率介於76.7%~89.8%。Please refer to Figure 11. Figure 11 is a graph showing the separation and extraction results of isooctane added sodium hexametaphosphate (dispersant) relative to 1 ton of sample weight of 0.25 kg/ton for different target pH values of experimental group 5. . When the target acid-base value is between 3 and 7, with the increase of the target acid-base value, the silicon carbide grade and recovery rate of the isooctane phase recovery material increase. When the target acid value is 7, the silicon carbide grade reaches the highest 75.5%, and the silicon carbide recovery rate reaches the highest 56.8%. When the target pH is above 7, the silicon carbide grade and recovery rate will decrease. On the other hand, when the target acid-base value is between 3 and 7, as the target acid-base value increases, the silicon grade of the water phase reclaimed product rises. When the target acid-base value is 7, the silicon grade reaches the highest 57.8%. When the target pH is above 7, the silicon grade drops. When the target acid-base value is between 3 and 11, there is no significant change in the silicon recovery rate of the water phase reclaimed product, and the silicon recovery rate is between 76.7% and 89.8%.

因為碳化矽分離效率為異辛烷相回收物中的碳化矽回收率和品位的相乘積,因此實驗組五在目標酸鹼值為7時,可得到最佳碳化矽分離效率為42.8%(回收率56.8%乘以品位75.5%乘以100%)。Because the silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade of the isooctane phase recovery, the best silicon carbide separation efficiency of 42.8% can be obtained when the target acid-base value of experimental group 5 is 7. The recovery rate is 56.8% times the grade 75.5% times 100%).

實施例一:以4-甲基-2-戊醇為有機相,添加的捕集劑為十二烷胺醋酸鹽(DAA)。Example 1: Using 4-methyl-2-pentanol as the organic phase, the added collector is dodecylamine acetate (DAA).

基本分離條件為:(1)樣品取樣秤重2g;(2)有機溶劑為4-甲基-2-戊醇,添加量為20 ml;(3)去離子水的添加量為80 ml;及(4)捕集劑為十二烷胺醋酸鹽(DAA)。由上可知,4-甲基-2-戊醇和水的體積比為1:4,樣品的重量與水及4-甲基-2-戊醇所組成的液體的體積的固液比為1:50。以下將以4-甲基-2-戊醇相代表有機溶劑相。以下將以4-甲基-2-戊醇相回收物代表從4-甲基-2-戊醇相所回收的固體物,碳化矽回收率和品位分別是指4-甲基-2-戊醇相回收物中的碳化矽回收率和品位。以下將以水相回收物代表水相所回收的固體物,矽回收率和品位分別是指水相回收物中的矽回收率和品位。以下碳化矽分離效率為4-甲基-2-戊醇相回收物中的碳化矽回收率和品位的相乘積,數值越大,表示4-甲基-2-戊醇相回收物中的碳化矽回收率和品位皆越高,與水相中回收物中的矽的分離效果越佳,為表示碳化矽與矽的分離程度指標。The basic separation conditions are: (1) the sample is sampled and weighed 2g; (2) the organic solvent is 4-methyl-2-pentanol, and the addition amount is 20 ml; (3) the addition amount of deionized water is 80 ml; and (4) The trapping agent is dodecylamine acetate (DAA). It can be seen from the above that the volume ratio of 4-methyl-2-pentanol to water is 1:4, and the solid-to-liquid ratio of the weight of the sample to the volume of the liquid composed of water and 4-methyl-2-pentanol is 1: 50. The organic solvent phase will be represented by the 4-methyl-2-pentanol phase below. In the following, the 4-methyl-2-pentanol phase recovery product will represent the solid recovered from the 4-methyl-2-pentanol phase. The recovery rate and grade of silicon carbide refer to 4-methyl-2-pentanol phase. The recovery rate and grade of silicon carbide in the alcohol phase recovery. In the following, the water phase reclaimed material will be used to represent the solid material recovered in the water phase. The silicon recovery rate and grade refer to the silicon recovery rate and grade of the water phase reclaimed material respectively. The following silicon carbide separation efficiency is the product of the silicon carbide recovery rate and the grade in the 4-methyl-2-pentanol phase recovery. The larger the value, the higher the value in the 4-methyl-2-pentanol phase recovery. The higher the recovery rate and grade of silicon carbide, the better the separation effect from the silicon in the reclaimed material in the water phase, which is an index indicating the degree of separation between silicon carbide and silicon.

首先,在基本分離條件維持不變及十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.25 kg/ton的前提之下,改變目標酸鹼值。其目的在於,找出4-甲基-2-戊醇和十二烷胺醋酸鹽的組合,在哪一個目標酸鹼值的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高 。First, under the premise that the basic separation conditions remain unchanged and the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is 0.25 kg/ton, the target pH value is changed. The purpose is to find out the combination of 4-methyl-2-pentanol and dodecylamine acetate, under which target pH condition, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency are all Can reach the highest.

請參閱圖12,圖12是本發明的實施例一的4-甲基-2-戊醇添加十二烷胺醋酸鹽(DAA)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。碳化矽品位和矽品位受到碳化矽回收率和矽回收率所影響。當目標酸鹼值介於3~5時,碳化矽回收率隨著目標酸鹼值增加而上升,矽回收率隨著目標酸鹼值增加而下降。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量增加及矽含量增加,水相回收物中的矽含量減少及碳化矽含量減少,從而碳化矽品位隨著目標酸鹼值增加而下降,但矽品位則無明顯變化。當目標酸鹼值介於5~7時,碳化矽回收率隨著目標酸鹼值增加而上升,矽回收率隨著目標酸鹼值增加而上升。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量增加及矽含量減少,水相回收物中的矽含量增加及碳化矽含量減少,從而碳化矽品位隨著目標酸鹼值增加而上升,矽品位隨著目標酸鹼值增加而上升。尤其是在目標酸鹼值為7時,碳化矽回收率達到最高92.8%,矽品位達到最高89.8%,碳化矽分離效率達到最高78.9%。但是,在目標酸鹼值大於7時,碳化矽回收率下降,矽回收率上升。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量減少及矽含量減少,水相回收物中的矽含量增加及碳化矽含量增加,從而碳化矽品位隨著目標酸鹼值增加而下降,矽品位隨著目標酸鹼值增加而下降。特別是在目標酸鹼值為11時,矽回收率達到最高92%。Please refer to Figure 12, Figure 12 is the 4-methyl-2-pentanol added dodecylamine acetate (DAA) in the first embodiment of the present invention relative to the sample weight of 1 ton is 0.25 kg/ton. The separation and extraction result curve graph of the target pH value. The silicon carbide grade and silicon grade are affected by the silicon carbide recovery rate and the silicon recovery rate. When the target acid-base value is between 3 and 5, the silicon carbide recovery rate increases as the target acid-base value increases, and the silicon recovery rate decreases as the target acid-base value increases. This phenomenon means that the silicon carbide content in the 4-methyl-2-pentanol phase recovery increases and the silicon content increases, the silicon content in the water phase recovery decreases and the silicon carbide content decreases, so that the silicon carbide grade increases with the target The acid-base value increased and decreased, but the silicon grade did not change significantly. When the target acid-base value is between 5 and 7, the silicon carbide recovery rate increases as the target acid-base value increases, and the silicon recovery rate increases as the target acid-base value increases. This phenomenon means that the silicon carbide content in the 4-methyl-2-pentanol phase recovery increases and the silicon content decreases, the silicon content increases and the silicon carbide content decreases in the water phase recovery, so that the silicon carbide grade increases with the target As the pH value increases, the silicon grade increases as the target pH value increases. Especially when the target acid-base value is 7, the silicon carbide recovery rate reaches the highest 92.8%, the silicon grade reaches the highest 89.8%, and the silicon carbide separation efficiency reaches the highest 78.9%. However, when the target acid-base value is greater than 7, the silicon carbide recovery rate decreases and the silicon recovery rate increases. This phenomenon means that the silicon carbide content in the 4-methyl-2-pentanol phase recovery decreases and the silicon content decreases, the silicon content increases and the silicon carbide content increases in the water phase recovery, so that the silicon carbide grade increases with the target The pH value increases and decreases, and the silicon grade decreases as the target pH value increases. Especially when the target acid-base value is 11, the silicon recovery rate reaches the highest 92%.

由上可知,在基本分離條件維持不變及十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.25 kg/ton的前提之下,4-甲基-2-戊醇和十二烷胺醋酸鹽的組合,在目標酸鹼值為7的條件下,碳化矽回收率達到最高92.8%,矽品位達到最高89.8%,碳化矽分離效率達到最高78.9%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is 0.25 kg/ton, 4-methyl-2-pentanol and dodecane With the combination of amine acetate, under the condition of the target acid-base value of 7, the silicon carbide recovery rate reaches the highest 92.8%, the silicon grade reaches the highest 89.8%, and the silicon carbide separation efficiency reaches the highest 78.9%.

值得一提的是,在基本分離條件維持不變及十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.25 kg/ton的前提之下,只要將目標酸鹼值控制在介於6~8,碳化矽回收率和品位均維持在80%以上,矽回收率維持在70%以上,矽品位維持在80%以上,碳化矽分離效率維持在65%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is 0.25 kg/ton, as long as the target pH value is controlled between 6~8, the silicon carbide recovery rate and grade are maintained above 80%, the silicon recovery rate is maintained above 70%, the silicon grade is maintained above 80%, and the silicon carbide separation efficiency is maintained above 65%.

接著,在基本分離條件維持不變及目標酸鹼值為7的前提之下,改變十二烷胺醋酸鹽的添加量。其目的在於,找出4-甲基-2-戊醇和十二烷胺醋酸鹽的組合,在哪一個十二烷胺醋酸鹽的添加量的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。Next, under the premise that the basic separation conditions remain unchanged and the target acid-base value is 7, the addition amount of dodecylamine acetate is changed. The purpose is to find out the combination of 4-methyl-2-pentanol and dodecylamine acetate, under which dodecylamine acetate addition amount, the silicon carbide recovery rate, silicon grade and silicon carbide The three separation efficiency can reach the highest.

請參閱圖13,圖13是本發明的實施例一的4-甲基-2-戊醇對樣品於不同十二烷胺醋酸鹽(DAA)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。隨著十二烷胺醋酸鹽的添加量的增加,碳化矽回收率和矽品位上升,但是碳化矽品位和矽回收率卻下降。惟,矽品位隨著碳化矽回收率增加或減少而上升或下降。原因在於,隨著十二烷胺醋酸鹽的添加量的增加,被抽出至4-甲基-2-戊醇相的矽也增加,因而導致矽回收率下降,而碳化矽品位也下降。當十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量大於0.25 kg/ton時,碳化矽回收率皆達85%以上。當十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.25 kg/ton時,矽品位達到最高89.8%。Please refer to Figure 13. Figure 13 is the separation and extraction of 4-methyl-2-pentanol in the first embodiment of the present invention on the sample weight of different dodecylamine acetate (DAA) added relative to 1 ton Result graph. With the increase in the amount of dodecylamine acetate added, the silicon carbide recovery rate and silicon grade increase, but the silicon carbide grade and silicon recovery rate decrease. However, the silicon grade increases or decreases as the silicon carbide recovery rate increases or decreases. The reason is that as the addition amount of dodecylamine acetate increases, the silicon extracted to the 4-methyl-2-pentanol phase also increases, resulting in a decrease in the silicon recovery rate and a decrease in the silicon carbide grade. When the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is greater than 0.25 kg/ton, the recovery rate of silicon carbide is above 85%. When the addition amount of dodecylamine acetate is 0.25 kg/ton relative to the sample weight of 1 ton, the silicon grade reaches the highest 89.8%.

由上可知,在基本分離條件維持不變及目標酸鹼值為7的前提之下,4-甲基-2-戊醇和十二烷胺醋酸鹽的組合,在十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.25 kg/ton的條件下,碳化矽回收率可達到最高92.8%,矽品位可達到最高89.8% ,碳化矽分離效率達到最高78.9%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 7, the combination of 4-methyl-2-pentanol and dodecylamine acetate can be used in the addition of dodecylamine acetate. When the amount is 0.25 kg/ton relative to the sample weight of 1 ton, the silicon carbide recovery rate can reach up to 92.8%, the silicon grade can reach up to 89.8%, and the silicon carbide separation efficiency can reach up to 78.9%.

值得一提的是,在基本分離條件維持不變及目標酸鹼值為7的前提之下,只要將十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量維持在0.2~0.5 kg/ton,碳化矽回收率和品位均維持在80%以上,矽回收率維持在75%以上,矽品位維持在80%以上,碳化矽分離效率維持在70%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 7, as long as the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is maintained at 0.2~0.5 kg/ ton, silicon carbide recovery rate and grade are maintained above 80%, silicon recovery rate is maintained above 75%, silicon grade is maintained above 80%, and silicon carbide separation efficiency is maintained above 70%.

補充一點,因為4-甲基-2戊醇在常溫常壓下的黏度為5.1 mPa·s,黏性大,所以形成的有機溶劑相的油滴較大且穩定,有助於較大的碳化矽微粒子的抽出。In addition, because 4-methyl-2-pentanol has a viscosity of 5.1 mPa·s at room temperature and pressure, which is very viscous, the oil droplets in the organic solvent phase formed are large and stable, which contributes to greater carbonization. Extraction of silicon particles.

以下將對照組一、對照組二、實驗組一、實驗組二、TW 201040109專利案的第一階段以及本發明的實施例一的碳化矽分離效率彙整於表一。The following summarizes the silicon carbide separation efficiency of the control group 1, the control group 2, the experimental group 1, the experimental group 2, the first stage of the TW 201040109 patent case, and the first embodiment of the present invention in Table 1.

《表一》   對照組一 對照組二 實驗組一 實驗組二 TW 201040109 本發明的實施例一 碳化矽分離效率 38.3% 65.9% 19.8% 64.7% 63.98% 70%以上 "Table I" Control group one Control group two Experimental group one Experimental group two TW 201040109 Embodiment 1 of the present invention Silicon carbide separation efficiency 38.3% 65.9% 19.8% 64.7% 63.98% More than 70%

從本發明的實施例一與對照組一的實驗結果相比可以證明,本發明的實施例一在目標酸鹼值7的環境下,以及將十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量控制在0.2~0.5 kg/ton等條件下,能夠提供十二烷胺醋酸鹽對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從38.3%大幅提升至70%以上,至少提高31.7%。Comparing the experimental results of the first embodiment of the present invention with the control group one, it can be proved that the first embodiment of the present invention is in an environment with a target pH of 7 and the addition amount of dodecylamine acetate is relative to 1 ton. The sample weight is controlled at 0.2~0.5 kg/ton, etc., which can provide dodecylamine acetate to have a better trapping effect on the silicon carbide contained in the mixed slurry, so that the silicon carbide separation efficiency can be reduced from 38.3% Significantly increase to more than 70%, at least an increase of 31.7%.

從對照組一與實驗組一的實驗結果相比可以證明,實驗組一在目標酸鹼值5的環境下,以及六偏磷酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton的條件下,不僅無助於碳化矽分離效率之提升,反而從38.3%大幅下降至19.8%,足足下降18.5%。若與本發明的實施例一相比,實驗組一的碳化矽分離效率更是遠低於本發明的實施例一的碳化矽分離效率,足足下降至少50.2%。原因在於:六偏磷酸鈉只會促進混合漿料中的碳化矽與矽等粒子分離,避免產生沉降或凝集的情形,使欲分散粒子能穩定分散於介質中,此作用稱之為分散作用,此為分散劑的特性,與捕集作用有所不同。因此,六偏磷酸鈉確實是分散劑,不是捕集劑,故不須事先調整目標酸鹼值。Comparing the experimental results of the control group 1 with the experimental group 1 can prove that the experimental group 1 is in the environment of the target pH value of 5, and the addition amount of sodium hexametaphosphate is 0.25 kg/ton relative to the sample weight of 1 ton. Under these conditions, not only did it not help to increase the efficiency of silicon carbide separation, but it dropped significantly from 38.3% to 19.8%, a full 18.5% drop. If compared with the first embodiment of the present invention, the silicon carbide separation efficiency of the experimental group 1 is far lower than the silicon carbide separation efficiency of the first embodiment of the present invention, which is a full reduction of at least 50.2%. The reason is: Sodium hexametaphosphate only promotes the separation of silicon carbide and silicon particles in the mixed slurry, avoids sedimentation or agglomeration, and enables the particles to be dispersed to be stably dispersed in the medium. This effect is called dispersion. This is the characteristic of the dispersant, which is different from the trapping effect. Therefore, sodium hexametaphosphate is indeed a dispersant, not a collector, so it is not necessary to adjust the target pH in advance.

若以同樣是一階段相比,TW 201040109專利案的第一階段的碳化矽分離效率為63.98%(回收率83.1%乘以品位77%乘以100%),而本發明的實施例一的分離方法的一階段的碳化矽分離效率在70%以上。由此可見,TW 201040109專利案之方法的第一階段的碳化矽分離效率低於本發明的實施例一的分離方法的一階段的碳化矽分離效率。這也是為什麼TW 201040109專利案必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過本發明的實施例一的碳化矽分離效率。If compared with the same stage, the silicon carbide separation efficiency of the first stage of the TW 201040109 patent case is 63.98% (recovery rate 83.1% multiplied by 77% grade multiplied by 100%), while the separation of the first embodiment of the present invention The silicon carbide separation efficiency in the first stage of the method is above 70%. It can be seen that the silicon carbide separation efficiency in the first stage of the method of the TW 201040109 patent is lower than the silicon carbide separation efficiency in the first stage of the separation method of the first embodiment of the present invention. This is why the TW 201040109 patent case must undergo the second stage of separation, or even the third stage of separation, to further improve the silicon carbide separation efficiency to be equal to or exceed the silicon carbide separation efficiency of the first embodiment of the present invention.

再者,與TW 201040109專利案相比,本發明的實施例一選用的有機溶劑為4-甲基-2-戊醇,毒性遠比溴仿低,對人體和環境的危害程度較輕。Furthermore, compared with the TW 201040109 patent case, the organic solvent selected in the first embodiment of the present invention is 4-methyl-2-pentanol, which has much lower toxicity than bromoform and is less harmful to the human body and the environment.

從本發明的實施例一與對照組二的實驗結果相比可以證明,本發明的實施例一在目標酸鹼值7的環境下,以及將十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量控制在0.2~0.5 kg/ton等條件下,能夠提供十二烷胺醋酸鹽對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從65.9%微幅提升至70%以上,至少提高4.1%。From the comparison of the experimental results of Example 1 of the present invention and the control group 2, it can be proved that Example 1 of the present invention is in an environment with a target pH of 7 and the addition amount of dodecylamine acetate is relative to 1 ton. The sample weight is controlled at 0.2~0.5 kg/ton and other conditions, which can provide dodecylamine acetate to have a better trapping effect on the silicon carbide contained in the mixed slurry, so that the silicon carbide separation efficiency can be reduced from 65.9% A slight increase to more than 70%, an increase of at least 4.1%.

從對照組二與實驗組二的實驗結果相比可以證明,當有機溶劑為柴油時,即使添加十二烷胺醋酸鹽,碳化矽分離效率無明顯提高。Comparing the experimental results of the control group two with the experimental group two, it can be proved that when the organic solvent is diesel oil, even if dodecylamine acetate is added, the silicon carbide separation efficiency is not significantly improved.

從本發明的實施例一與實驗組二的實驗結果相比可以證明,本發明的實施例一在目標酸鹼值7的環境下,以及將十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量控制在0.2~0.5 kg/ton等條件下,能夠提供十二烷胺醋酸鹽對混合漿料所包含的碳化矽產生較佳的捕集作用,再加上特定的有機溶劑:4-甲基-2-戊醇,從而能夠將碳化矽分離效率從64.7%微幅提升至70%以上,至少提高5.3%。From the comparison of the experimental results of the first embodiment of the present invention and the second experimental group, it can be proved that the first embodiment of the present invention is in an environment with a target pH of 7 and the addition amount of dodecylamine acetate is relative to 1 ton. The sample weight is controlled at 0.2~0.5 kg/ton, etc., which can provide dodecylamine acetate to have a better trapping effect on the silicon carbide contained in the mixed slurry, plus a specific organic solvent: 4- Methyl-2-pentanol can slightly increase the separation efficiency of silicon carbide from 64.7% to more than 70%, at least 5.3%.

依據行政院環境保護署事業廢棄物申報及管理資訊系統的2017年統計資料顯示,台灣矽晶圓製造業每年產生約16,577公噸的矽晶圓切削廢棄物。碳化矽分離效率若能提高1%,光是在台灣每年就能夠回收相當大量的碳化矽與矽,若應用在全世界的相關產業,全世界每年回收的碳化矽與矽更為可觀。According to the 2017 statistics of the Business Waste Declaration and Management Information System of the Environmental Protection Agency of the Executive Yuan, Taiwan's silicon wafer manufacturing industry generates approximately 16,577 metric tons of silicon wafer cutting waste each year. If the silicon carbide separation efficiency can be increased by 1%, a considerable amount of silicon carbide and silicon can be recycled every year in Taiwan alone. If applied to related industries around the world, the world's annual recycling of silicon carbide and silicon will be even more impressive.

總的來說,本發明的實施例一的分離方法的碳化矽分離效率在70%以上,大於對照組一的38.3%、對照組二(即,先前技術所述的文獻一)的65.9%、實驗組一的19.8%、實驗組二的64.7%和TW 201040109專利案的第一階段的63.98%。原因在於:在添加十二烷胺醋酸鹽以前,先將目標酸鹼值調整至7,十二烷胺醋酸的添加量相對於1 ton之樣品重量控制在0.2~0.5 kg/ton,十二烷胺醋酸鹽即可在適當的酸鹼值環境與碳化矽粉作用,以促進分離,同時適用之有機溶劑限定為4甲基2戊醇,不含溴仿。In general, the silicon carbide separation efficiency of the separation method of Example 1 of the present invention is more than 70%, which is greater than 38.3% of the control group 1, 65.9% of the control group 2 (ie, the document 1 described in the prior art), 19.8% of experimental group one, 64.7% of experimental group two, and 63.98% of the first phase of the TW 201040109 patent case. The reason is: before adding dodecylamine acetate, adjust the target acid-base value to 7, the amount of dodecylamine acetic acid added relative to the sample weight of 1 ton is controlled within 0.2~0.5 kg/ton, dodecane Amine acetate can interact with silicon carbide powder in a suitable pH environment to promote separation. At the same time, the applicable organic solvent is limited to 4-methyl-2-pentanol and does not contain bromoform.

若將本發明的實施例一推廣至全世界的相關產業,全世界每年回收的碳化矽與矽將遠超過對照組一、對照組二(即,先前技術所述的文獻一)、實驗組一、實驗組二和TW 201040109專利案的第一階段,無須進一步進行第二階段甚至第三階段,可省下鉅額成本,還可避免溴仿等毒性極強的毒化物汙染環境的風險。If the first embodiment of the present invention is extended to related industries all over the world, the world’s annual recovery of silicon carbide and silicon will far exceed those of the control group one, the control group two (ie, the document one described in the prior art) and the experimental group one. , Experimental group 2 and the first stage of the TW 201040109 patent case, without the need to further carry out the second or even the third stage, which can save huge costs and avoid the risk of environmental pollution by extremely toxic compounds such as bromoform.

此外,相較於先前技術所述的文獻一的第二個限制,本發明的實施例一係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。In addition, compared to the second limitation of the document 1 described in the prior art, the first embodiment of the present invention separates all silicon carbide into the oil phase, and the batch processing capacity is higher than that of the document 1 described in the prior art.

縱使該發明所屬技術領域中具有通常知識者,在參酌TW 201040109專利案和先前技術所述的文獻一以後,有合理的動機想到本發明的實施例一的分離方法的所有步驟,有機溶劑採用柴油,並且嘗試添加十二烷胺醋酸鹽,也僅能得到和實驗組二相同的結果,絕對無法想到本發明的實施例一的全部技術特徵,更遑論達到本發明的實施例一的有利功效。因此,相較於TW 201040109專利案和先前技術所述的文獻一結合通常知識,本發明的實施例一儼然具有進步性。Even if the person with ordinary knowledge in the technical field of the invention, after referring to the TW 201040109 patent case and the document 1 described in the prior art, there is a reasonable motivation to think of all the steps of the separation method of the first embodiment of the present invention. The organic solvent is diesel oil. And trying to add dodecylamine acetate, only the same results as experimental group two can be obtained. It is absolutely impossible to think of all the technical features of the first embodiment of the present invention, let alone achieve the beneficial effects of the first embodiment of the present invention. Therefore, compared with the TW 201040109 patent case and the literature described in the prior art combined with common knowledge, the embodiment of the present invention is more advanced.

實施例二:以4-甲基-2-戊醇為有機相,添加的捕集劑為十二烷基硫酸鈉(SDS)。Example 2: Using 4-methyl-2-pentanol as the organic phase, the added collector is sodium dodecyl sulfate (SDS).

本發明的實施例二的基本分離條件與本發明的實施例一大致相同,差別在於:捕集劑為十二烷基硫酸鈉(SDS)。The basic separation conditions of the second embodiment of the present invention are roughly the same as those of the first embodiment of the present invention, with the difference that the collector is sodium dodecyl sulfate (SDS).

首先,在基本分離條件維持不變及十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton的前提之下,改變目標酸鹼值。其目的在於,找出4-甲基-2-戊醇和十二烷基硫酸鈉的組合,在哪一個目標酸鹼值的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高 。First, under the premise that the basic separation conditions remain unchanged and the addition amount of sodium lauryl sulfate is 0.25 kg/ton relative to the sample weight of 1 ton, the target pH value is changed. The purpose is to find out the combination of 4-methyl-2-pentanol and sodium lauryl sulfate, under which target pH condition, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency are all Can reach the highest.

請參閱圖14,圖14為本發明的實施例二的4-甲基-2-戊醇添加十二烷基硫酸鈉(SDS)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於 3~5時,碳化矽回收率隨著目標酸鹼值增加而上升,同時矽回收率隨著目標酸鹼值增加而上升。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量增加及矽含量減少,水相回收物中的矽含量增加及碳化矽含量減少,從而碳化矽品位隨著目標酸鹼值增加而上升,矽品位隨著目標酸鹼值增加而上升。尤其是在目標酸鹼值為5時,碳化矽回收率達到最高85.9%,同時矽品位達到最高83.3%,碳化矽分離效率達到最高77.5%。須注意的是,在目標酸鹼值大於5時,碳化矽回收率隨著目標酸鹼值增加而大幅下降,但是矽回收率卻隨著目標酸鹼值增加而微幅上升。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量大幅減少及矽含量微幅減少,水相回收物中的矽含量微幅增加及碳化矽含量大幅增加,從而碳化矽品位隨著目標酸鹼值增加而下降,矽品位隨著目標酸鹼值增加而下降。Please refer to Figure 14. Figure 14 shows the sample weight of 4-methyl-2-pentanol added with sodium dodecyl sulfate (SDS) relative to 1 ton of 0.25 kg/ton. The separation and extraction result curve graph of the target pH value. When the target acid-base value is between 3 and 5, the silicon carbide recovery rate increases as the target acid-base value increases, while the silicon recovery rate increases as the target acid-base value increases. This phenomenon means that the silicon carbide content in the 4-methyl-2-pentanol phase recovery increases and the silicon content decreases, the silicon content increases and the silicon carbide content decreases in the water phase recovery, so that the silicon carbide grade increases with the target As the pH value increases, the silicon grade increases as the target pH value increases. Especially when the target acid-base value is 5, the silicon carbide recovery rate reaches the highest 85.9%, while the silicon grade reaches the highest 83.3%, and the silicon carbide separation efficiency reaches the highest 77.5%. It should be noted that when the target acid-base value is greater than 5, the silicon carbide recovery rate decreases significantly as the target acid-base value increases, but the silicon recovery rate increases slightly as the target acid-base value increases. This phenomenon means that the silicon carbide content in the 4-methyl-2-pentanol phase recovery is greatly reduced and the silicon content is slightly reduced, and the silicon content in the water phase recovery is slightly increased and the silicon carbide content is greatly increased. The silicon carbide grade decreases as the target acid-base value increases, and the silicon grade decreases as the target acid-base value increases.

由上可知,在基本分離條件維持不變及十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton的前提之下,4-甲基-2-戊醇和十二烷基硫酸鈉的組合,在目標酸鹼值為5的條件下,碳化矽回收率可達到最高85.9%,矽品位可達到最高83.3% ,碳化矽分離效率達到最高77.5%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the addition amount of sodium lauryl sulfate is 0.25 kg/ton relative to the sample weight of 1 ton, 4-methyl-2-pentanol and dodecane With the combination of sodium sulphate, under the condition of the target acid-base value of 5, the recovery rate of silicon carbide can reach up to 85.9%, the silicon grade can reach up to 83.3%, and the separation efficiency of silicon carbide can reach up to 77.5%.

值得一提的是,在基本分離條件維持不變及十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton的前提之下,只要將目標酸鹼值控制在介於4.5至5.5,碳化矽回收率維持在80%以上,碳化矽品位維持在85%以上,矽回收率和品位均維持在80%以上,分離效率維持在70%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the addition amount of sodium lauryl sulfate is 0.25 kg/ton relative to the sample weight of 1 ton, as long as the target acid-base value is controlled between From 4.5 to 5.5, the recovery rate of silicon carbide is maintained above 80%, the grade of silicon carbide is maintained above 85%, the recovery rate and grade of silicon are maintained above 80%, and the separation efficiency is maintained above 70%.

接著,在基本分離條件維持不變及目標酸鹼值為5的前提之下,改變十二烷基硫酸鈉的添加量。其目的在於,找出4-甲基-2-戊醇和十二烷基硫酸鈉的組合,在哪一個十二烷基硫酸鈉的添加量的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。Next, under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, the addition amount of sodium lauryl sulfate is changed. The purpose is to find out the combination of 4-methyl-2-pentanol and sodium lauryl sulfate, under which sodium lauryl sulfate addition amount, the silicon carbide recovery rate, silicon grade and silicon carbide The three separation efficiency can reach the highest.

請參閱圖15,圖15是本發明的實施例二的4-甲基-2-戊醇對樣品於不同十二烷基硫酸鈉(SDS)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。隨著十二烷基硫酸鈉的添加量的增加,碳化矽回收率和矽品位上升,碳化矽品位和矽回收率卻下降。此現象意味著,隨著十二烷基硫酸鈉的添加量的增加,碳化矽品位隨著矽回收率減少而下降。原因在於,隨著十二烷基硫酸鈉的添加量的增加,被抽出至4-甲基-2-戊醇相的矽也增加,因而導致矽回收率下降,而碳化矽品位也下降。當十二烷基硫酸鈉的添加量相對於1 ton之樣品重量大於0.5 kg/ton時,碳化矽回收率皆達93%以上。當十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為2.0 kg/ton時,矽品位達到最高97%。Please refer to Figure 15. Figure 15 is the separation and extraction of the sample weight of the sample with different sodium dodecyl sulfate (SDS) added by 4-methyl-2-pentanol in the second embodiment of the present invention. Result graph. As the addition of sodium lauryl sulfate increases, the silicon carbide recovery rate and silicon grade increase, but the silicon carbide grade and silicon recovery rate decrease. This phenomenon means that as the addition of sodium lauryl sulfate increases, the silicon carbide grade decreases as the silicon recovery rate decreases. The reason is that as the addition amount of sodium lauryl sulfate increases, the silicon extracted to the 4-methyl-2-pentanol phase also increases, which results in a decrease in the silicon recovery rate and a decrease in the silicon carbide grade. When the addition amount of sodium lauryl sulfate is greater than 0.5 kg/ton relative to the sample weight of 1 ton, the recovery rate of silicon carbide is more than 93%. When the addition amount of sodium lauryl sulfate is 2.0 kg/ton relative to the sample weight of 1 ton, the silicon grade reaches the highest 97%.

由上可知,在基本分離條件維持不變及目標酸鹼值為5的前提之下,4-甲基-2-戊醇和十二烷基硫酸鈉的組合,在十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為1.0 kg/ton的條件下,碳化矽回收率為96.4%,碳化矽品位為83.6%,矽回收率為75.6%,矽品位為96.5%,碳化矽分離效率達到最高80.3%。在十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為2.0 kg/ton的條件下,碳化矽回收率為98.3%,碳化矽品位為80.7%,矽回收率為70.1%,矽品位為97.0%,碳化矽分離效率達到最高79.3%。雖然比較碳化矽分離效率,十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為2 kg/ton明顯比在十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為1 kg/ton略低1%,但是考量到為了獲得高回收率的碳化矽和高品位的矽,2 kg/ton為十二烷基硫酸鈉的最佳添加量相對於1 ton之樣品重量。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, the combination of 4-methyl-2-pentanol and sodium lauryl sulfate can be used in the addition of sodium lauryl sulfate. Relative to 1 ton of sample weight of 1.0 kg/ton, the silicon carbide recovery rate is 96.4%, the silicon carbide grade is 83.6%, the silicon recovery rate is 75.6%, the silicon grade is 96.5%, and the silicon carbide separation efficiency reaches The highest is 80.3%. When the addition amount of sodium lauryl sulfate is 2.0 kg/ton relative to the sample weight of 1 ton, the silicon carbide recovery rate is 98.3%, the silicon carbide grade is 80.7%, the silicon recovery rate is 70.1%, and the silicon grade At 97.0%, the silicon carbide separation efficiency reaches the highest 79.3%. Although the separation efficiency of silicon carbide is compared, the amount of sodium lauryl sulfate added relative to the sample weight of 1 ton is 2 kg/ton, which is significantly higher than the amount of sodium lauryl sulfate added relative to the sample weight of 1 ton is 1 kg /ton is slightly lower by 1%, but considering that in order to obtain high-recovery silicon carbide and high-grade silicon, 2 kg/ton is the optimal addition amount of sodium lauryl sulfate relative to the sample weight of 1 ton.

值得一提的是,在基本分離條件維持不變及目標酸鹼值為5的前提之下,只要將十二烷基硫酸鈉的添加量相對於1 ton之樣品重量維持在0.25~2 kg/ton,碳化矽回收率和品位均維持在85%以上,矽回收率維持在70%以上,矽品位維持在80%以上,碳化矽分離效率維持在75%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, as long as the amount of sodium lauryl sulfate added relative to the sample weight of 1 ton is maintained at 0.25~2 kg/ ton, the recovery rate and grade of silicon carbide are maintained above 85%, the recovery rate of silicon is maintained above 70%, the grade of silicon is maintained above 80%, and the separation efficiency of silicon carbide is maintained above 75%.

以下將對照組一、對照組二、實驗組二、實驗組三、TW 201040109專利案的第一階段以及本發明的實施例二的碳化矽分離效率彙整於表二。The silicon carbide separation efficiency of the control group 1, the control group two, the experimental group two, the experimental group three, the first stage of the TW 201040109 patent case, and the second embodiment of the present invention are summarized in Table 2.

《表二》   對照組一 對照組二 實驗組二 實驗組三 TW 201040109 本發明的實施例二 碳化矽分離效率 38.3% 65.9% 64.7% 66.6% 63.98% 75%以上 "Table II" Control group one Control group two Experimental group two Experimental group three TW 201040109 Embodiment 2 of the present invention Silicon carbide separation efficiency 38.3% 65.9% 64.7% 66.6% 63.98% 75% or more

從本發明的實施例二與對照組一的實驗結果相比可以證明,本發明的實施例二在目標酸鹼值為5的環境下,以及將十二烷基硫酸鈉的添加量相對於1 ton之樣品重量控制在0.25~2 kg/ton等條件下,能夠提供十二烷基硫酸鈉對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從38.3%大幅提升至75%以上,至少提高36.7%。From the comparison of the experimental results of the second embodiment of the present invention and the control group 1, it can be proved that the second embodiment of the present invention is in an environment with a target pH of 5 and the addition amount of sodium lauryl sulfate is relative to 1 The sample weight of ton is controlled at 0.25~2 kg/ton, etc., which can provide better capture effect of sodium lauryl sulfate on the silicon carbide contained in the mixed slurry, so that the separation efficiency of silicon carbide can be reduced from 38.3 % Increased significantly to over 75%, at least 36.7%.

若以同樣是一階段相比,TW 201040109專利案的第一階段的碳化矽分離效率為63.98%(回收率83.1%乘以品位77%乘以100%),而本發明的實施例二的分離方法的一階段的碳化矽分離效率在75%以上。由此可見,TW 201040109專利案之方法的第一階段的碳化矽分離效率低於本發明的實施例二的分離方法的一階段的碳化矽分離效率。這也是為什麼TW 201040109專利案必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過本發明的實施例二的碳化矽分離效率。If compared with the same stage, the silicon carbide separation efficiency of the first stage of the TW 201040109 patent case is 63.98% (recovery rate 83.1% multiplied by 77% grade multiplied by 100%), while the separation of the second embodiment of the present invention The silicon carbide separation efficiency in the first stage of the method is above 75%. It can be seen that the silicon carbide separation efficiency in the first stage of the method of the TW 201040109 patent is lower than the silicon carbide separation efficiency in the first stage of the separation method of the second embodiment of the present invention. This is why the TW 201040109 patent case must undergo the second stage of separation, and even the third stage of separation, to further increase the silicon carbide separation efficiency to be equal to or exceed the silicon carbide separation efficiency of the second embodiment of the present invention.

再者,與TW 201040109專利案相比,本發明的實施例二選用的有機溶劑為4-甲基-2-戊醇,毒性遠比溴仿低,對人體和環境的危害程度較輕。Furthermore, compared with the TW 201040109 patent case, the organic solvent selected in the second embodiment of the present invention is 4-methyl-2-pentanol, which is far less toxic than bromoform and is less harmful to the human body and the environment.

從對照組二與實驗組三的實驗結果相比可以證明,當有機溶劑為柴油時,即使添加十二烷基硫酸鈉,碳化矽分離效率無明顯提高。Comparing the experimental results of the control group two with the experimental group three, it can be proved that when the organic solvent is diesel oil, even if sodium lauryl sulfate is added, the separation efficiency of silicon carbide is not significantly improved.

從本發明的實施例二與實驗組三的實驗結果相比可以證明,本發明的實施例二在目標酸鹼值為5的環境下,以及將十二烷基硫酸鈉的添加量相對於1 ton之樣品重量控制在0.25~2 kg/ton等條件下,能夠提供十二烷基硫酸鈉對混合漿料所包含的碳化矽產生較佳的捕集作用,再加上特定的有機溶劑:4-甲基-2-戊醇,從而能夠將碳化矽分離效率從66.6%微幅提升至75%以上,至少提高8.4%。From the comparison of the experimental results of the second embodiment of the present invention and the third experimental group, it can be proved that the second embodiment of the present invention is in an environment with a target pH of 5 and the addition amount of sodium lauryl sulfate is relative to 1 The sample weight of ton is controlled at 0.25~2 kg/ton, etc., which can provide the sodium lauryl sulfate to have a better trapping effect on the silicon carbide contained in the mixed slurry, plus a specific organic solvent: 4 -Methyl-2-pentanol, which can slightly increase the separation efficiency of silicon carbide from 66.6% to more than 75%, at least 8.4%.

依據行政院環境保護署事業廢棄物申報及管理資訊系統的2017年統計資料顯示,台灣矽晶圓製造業每年產生約16,577公噸的矽晶圓切削廢棄物。碳化矽分離效率若能提高1%,光是在台灣每年就能夠回收相當大量的碳化矽與矽,若應用在全世界的相關產業,全世界每年回收的碳化矽與矽更為可觀。According to the 2017 statistics of the Business Waste Declaration and Management Information System of the Environmental Protection Agency of the Executive Yuan, Taiwan's silicon wafer manufacturing industry generates approximately 16,577 metric tons of silicon wafer cutting waste each year. If the silicon carbide separation efficiency can be increased by 1%, a considerable amount of silicon carbide and silicon can be recycled every year in Taiwan alone. If applied to related industries around the world, the world's annual recycling of silicon carbide and silicon will be even more impressive.

總的來說,本發明的實施例二的碳化矽分離效率在75%以上,大於對照組一的38.3%、對照組二(即,先前技術所述的文獻一)的65.9%、實驗組二的64.7%、實驗組三的66.6%和TW 201040109專利案的第一階段的63.98%。原因在於:在添加十二烷基硫酸鈉以前,先將目標酸鹼值控制在5,十二烷基硫酸鈉的添加量相對於1 ton之樣品重量控制在0.25~2 kg/ton,十二烷基硫酸鈉即可在適當的酸鹼值環境與碳化矽粉作用,以促進分離,同時適用之有機溶劑限定為4-甲基-2-戊醇,不含溴仿。In general, the silicon carbide separation efficiency of Example 2 of the present invention is more than 75%, which is greater than 38.3% of the control group 1, 65.9% of the control group 2 (ie, the document 1 described in the prior art), and the experimental group 2 64.7% of the total, 66.6% of the experimental group three, and 63.98% of the first phase of the TW 201040109 patent case. The reason is that: before adding sodium lauryl sulfate, the target pH value is controlled at 5, and the amount of sodium lauryl sulfate added relative to the weight of 1 ton of the sample is controlled at 0.25~2 kg/ton. Sodium alkyl sulfate can interact with silicon carbide powder in an appropriate pH environment to promote separation. At the same time, the applicable organic solvent is limited to 4-methyl-2-pentanol, which does not contain bromoform.

若將本發明的實施例二推廣至全世界的相關產業,全世界每年回收的碳化矽與矽將遠超過對照組一、對照組二(即,先前技術所述的文獻一)、實驗組二、實驗組三和TW 201040109專利案的第一階段,無須進一步進行第二階段甚至第三階段,可省下鉅額成本,還可避免溴仿等毒性極強的毒化物汙染環境的風險。If the second embodiment of the present invention is extended to related industries all over the world, the annual recovery of silicon carbide and silicon in the world will far exceed those of the control group one, the control group two (ie, the document one described in the prior art) and the experimental group two The third experimental group and the first phase of the TW 201040109 patent case do not need to further carry out the second or even third phase, which can save huge costs and avoid the risk of environmental pollution by extremely toxic compounds such as bromoform.

請參閱附件一,附件一是本發明的實施例二的2-甲基-2-戊醇對樣品於不同十二烷機硫酸鈉(SDS)的添加量相對於1 ton之樣品重量介於0~2 kg/ton的分離抽出結果照片。相較於先前技術所述的文獻一的第二個限制,本發明的實施例二係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。Please refer to appendix 1. The addition amount of 2-methyl-2-pentanol to the sample of the second embodiment of the present invention to different sodium dodecyl sulfate (SDS) relative to the sample weight of 1 ton is between 0 ~2 kg/ton of separation and extraction result photos. Compared with the second limitation of Document 1 described in the prior art, the second embodiment of the present invention separates all silicon carbide into the oil phase, and the batch processing capacity is higher than that of Document 1 described in the prior art.

縱使該發明所屬技術領域中具有通常知識者,在參酌TW 201040109專利案和先前技術所述的文獻一以後,有合理的動機想到本發明的實施例二的分離方法的所有步驟,有機溶劑採用柴油,並且嘗試添加十二烷基硫酸鈉,也僅能得到和實驗組三相同的結果,絕對無法想到本發明的實施例二的全部技術特徵,更遑論達到本發明的實施例二的有利功效。因此,相較於TW 201040109專利案和先前技術所述的文獻一結合通常知識,本發明的實施例二儼然具有進步性。Even if the person with ordinary knowledge in the technical field of the invention, after referring to the TW 201040109 patent case and the document 1 described in the prior art, there is a reasonable motivation to think of all the steps of the separation method of the second embodiment of the present invention. The organic solvent is diesel oil. , And tried to add sodium lauryl sulfate, only the same results as the experimental group three can be obtained. It is absolutely impossible to think of all the technical features of the second embodiment of the present invention, let alone achieve the advantageous effects of the second embodiment of the present invention. Therefore, compared with the TW 201040109 patent case and the document 1 described in the prior art combined with common knowledge, the second embodiment of the present invention is more advanced.

另外,十四烷基硫酸鈉、月桂醇聚氧乙烯醚硫酸鈉、十二烷基磺酸鈉、十烷基磺酸鈉和對甲苯磺酸鈉等和十二烷基硫酸鈉的化學結構及化學性質十分類似,亦具有類似效果,可取代十二烷基硫酸鈉,並得到和實施例二類似的結果。In addition, the chemical structure of sodium tetradecyl sulfate, sodium laureth sulfate, sodium dodecyl sulfonate, sodium decayl sulfonate and sodium p-toluene sulfonate, and sodium lauryl sulfate The chemical properties are very similar and have similar effects. It can be substituted for sodium lauryl sulfate and obtain similar results as in Example 2.

實施例三:以4-甲基-2-戊醇為有機相,添加的捕集劑為油酸鈉(NaOL)。本發明的實施例三的基本分離條件與本發明的實施例一大致相同,差別在於:捕集劑為油酸鈉(NaOL)。Example 3: 4-methyl-2-pentanol was used as the organic phase, and the added collector was sodium oleate (NaOL). The basic separation conditions of the third embodiment of the present invention are approximately the same as those of the first embodiment of the present invention, except that the collector is sodium oleate (NaOL).

首先,在基本分離條件維持不變及油酸鈉的添加量相對於1 ton之樣品重量為1.0 kg/ton的前提之下,改變目標酸鹼值。其目的在於,找出4-甲基-2-戊醇和油酸鈉的組合,在哪一個目標酸鹼值的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。First, under the premise that the basic separation conditions remain unchanged and the amount of sodium oleate added is 1.0 kg/ton relative to the sample weight of 1 ton, the target pH value is changed. The purpose is to find out the combination of 4-methyl-2-pentanol and sodium oleate, under which target pH condition, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency can reach the highest .

請參閱圖16,圖16是本發明的實施例三的4-甲基-2-戊醇添加油酸鈉(NaOL)相對於1 ton之樣品重量為1 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~5時,碳化矽回收率隨著目標酸鹼值增加而上升,矽回收率隨著目標酸鹼值增加而下降。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量增加及矽含量增加,水相回收物中的矽含量減少及碳化矽含量減少,從而矽品位隨著目標酸鹼值增加而上升,但碳化矽品位則無明顯變化。在目標酸鹼值大於5時,碳化矽回收率下降,碳化矽品位並無明顯變化並且維持在77.7%以上;矽回收率亦無明顯變化並且介於84.%~93.1%;矽品位無明顯變化並且維持在50%以上。此現象意味著,4-甲基-2-戊醇相回收物中的碳化矽含量減少及矽含量無明顯增減,水相回收物中的矽含量無明顯增減及碳化矽含量增加,從而碳化矽品位和矽品位皆微幅下降。特別是在目標酸鹼值為5時,碳化矽回收率達到最高61%,矽品位達到最高63.5%,碳化矽分離效率達到最高51.7%。Please refer to Figure 16, Figure 16 is the 4-methyl-2-pentanol added sodium oleate (NaOL) in Example 3 of the present invention relative to 1 ton of sample weight of 1 kg/ton. The separation of values extracts the result graph. When the target acid-base value is between 3 and 5, the silicon carbide recovery rate increases as the target acid-base value increases, and the silicon recovery rate decreases as the target acid-base value increases. This phenomenon means that the silicon carbide content in the 4-methyl-2-pentanol phase recovery increases and the silicon content increases, the silicon content in the water phase recovery decreases and the silicon carbide content decreases, so that the silicon grade increases with the target acid The alkali number increased and rose, but the silicon carbide grade did not change significantly. When the target acid-base value is greater than 5, the silicon carbide recovery rate decreases, and the silicon carbide grade does not change significantly and remains above 77.7%; the silicon recovery rate does not change significantly and ranges from 84.% to 93.1%; the silicon grade is not obvious Change and maintain above 50%. This phenomenon means that the content of silicon carbide in the recovered 4-methyl-2-pentanol phase decreases and the content of silicon does not increase or decrease significantly, and the content of silicon in the recovered water phase does not increase or decrease and the content of silicon carbide increases. Both the silicon carbide grade and the silicon grade declined slightly. Especially when the target acid-base value is 5, the silicon carbide recovery rate reaches the highest 61%, the silicon grade reaches the highest 63.5%, and the silicon carbide separation efficiency reaches the highest 51.7%.

由上可知,在基本分離條件維持不變及油酸鈉的添加量相對於1 ton之樣品重量為1.0 kg/ton的前提之下,4-甲基-2-戊醇和油酸鈉的組合,在目標酸鹼值為5的條件下,碳化矽回收率達到最高61%,矽品位達到最高63.5%,碳化矽分離效率達到最高51.7%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the amount of sodium oleate added is 1.0 kg/ton relative to the sample weight of 1 ton, the combination of 4-methyl-2-pentanol and sodium oleate, Under the condition of the target acid-base value of 5, the silicon carbide recovery rate reached the highest 61%, the silicon grade reached the highest 63.5%, and the silicon carbide separation efficiency reached the highest 51.7%.

值得一提的是,在基本分離條件維持不變及油酸鈉的添加量相對於1 ton之樣品重量為1.0 kg/ton的前提之下,只要將目標酸鹼值控制在介於4~7,碳化矽回收率維持在50%以上,碳化矽品位維持在80%以上,矽回收率維持在85%以上,矽品位維持在50%以上,碳化矽分離效率維持在45%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the amount of sodium oleate added relative to the sample weight of 1 ton is 1.0 kg/ton, as long as the target pH value is controlled between 4~7 , The silicon carbide recovery rate is maintained above 50%, the silicon carbide grade is maintained above 80%, the silicon recovery rate is maintained above 85%, the silicon grade is maintained above 50%, and the silicon carbide separation efficiency is maintained above 45%.

接著,在基本分離條件維持不變及目標酸鹼值為5的前提之下,改變油酸鈉的添加量。其目的在於,找出4-甲基-2-戊醇和油酸鈉的組合,在哪一個油酸鈉的添加量的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。Next, under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, the amount of sodium oleate added is changed. The purpose is to find out the combination of 4-methyl-2-pentanol and sodium oleate, under which sodium oleate addition, silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency can be all three Reach the highest.

請參閱圖17,圖17是本發明的實施例三的4-甲基-2-戊醇對樣品於不同油酸鈉(NaOL)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。隨著油酸鈉的添加量的增加,碳化矽回收率和矽品位上升,碳化矽品位和矽回收率無明顯變化。在油酸鈉的添加量相對於1 ton之樣品重量大於5 kg/ton時,碳化矽回收率下降。其原因在於,油酸鈉添加過量時發生膠束現象,使得碳化矽的抽出降低;但是碳化矽品位無明顯變化。惟,矽品位隨著碳化矽回收率增加或減少而上升或下降。原因在於,隨著油酸鈉的添加量的增加,碳化矽回收率上升,矽回收率無明顯變化,因而導致矽品位上升。當油酸鈉的添加量相對於1 ton之樣品重量為5 kg/ton時,碳化矽回收率達到最高90.7%,碳化矽品位達到最高91.3%,矽品位達到最高88.3%。Please refer to Figure 17. Figure 17 is a graph showing the separation and extraction results of 4-methyl-2-pentanol in the third embodiment of the present invention for the addition of different sodium oleate (NaOL) to the sample weight of 1 ton. . With the increase in the amount of sodium oleate added, the silicon carbide recovery rate and silicon grade increase, and there is no significant change in the silicon carbide grade and silicon recovery rate. When the amount of sodium oleate added relative to the sample weight of 1 ton is greater than 5 kg/ton, the recovery rate of silicon carbide decreases. The reason is that the micelle phenomenon occurs when sodium oleate is added excessively, which reduces the extraction of silicon carbide; however, the grade of silicon carbide does not change significantly. However, the silicon grade increases or decreases as the silicon carbide recovery rate increases or decreases. The reason is that with the increase in the amount of sodium oleate added, the recovery rate of silicon carbide increases, and there is no significant change in the recovery rate of silicon, which leads to an increase in silicon grade. When the amount of sodium oleate added is 5 kg/ton relative to the sample weight of 1 ton, the silicon carbide recovery rate reaches the highest 90.7%, the silicon carbide grade reaches the highest 91.3%, and the silicon grade reaches the highest 88.3%.

由上可知,在基本分離條件維持不變及目標酸鹼值為5的前提之下,4-甲基-2-戊醇和油酸鈉的組合,在油酸鈉的添加量相對於1 ton之樣品重量為5 kg/ton的條件下,碳化矽回收率達到最高90.7%,矽品位達到最高88.3%,碳化矽分離效率達到最高82.8%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, the combination of 4-methyl-2-pentanol and sodium oleate is more than the amount of sodium oleate added to 1 ton. When the sample weight is 5 kg/ton, the recovery rate of silicon carbide reaches 90.7%, the silicon grade reaches 88.3%, and the separation efficiency of silicon carbide reaches 82.8%.

值得一提的是,在基本分離條件維持不變及目標酸鹼值為5的前提之下,只要油酸鈉的添加量相對於1 ton之樣品重量維持在4~6 kg/ton,碳化矽回收率和品位均維持在80%以上,矽回收率和矽品位均維持在80%以上,碳化矽分離效率維持在70%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, as long as the addition amount of sodium oleate is maintained at 4~6 kg/ton relative to the sample weight of 1 ton, silicon carbide Both the recovery rate and grade are maintained above 80%, the silicon recovery rate and silicon grade are maintained above 80%, and the silicon carbide separation efficiency is maintained above 70%.

以下將對照組一、對照組二、實驗組四、TW 201040109專利案的第一階段以及本發明的實施例三的碳化矽分離效率彙整於表三。The silicon carbide separation efficiency of the control group 1, the control group 2, the experimental group 4, the first stage of the TW 201040109 patent case, and the third embodiment of the present invention are summarized in Table 3 below.

《表三》   對照組一 對照組二 實驗組四 TW 201040109 本發明的實施例三 碳化矽分離效率 38.3% 65.9% 49.7% 63.98% 70%以上 "Table Three" Control group one Control group two Experimental group four TW 201040109 Embodiment 3 of the present invention Silicon carbide separation efficiency 38.3% 65.9% 49.7% 63.98% More than 70%

從本發明的實施例三與對照組一的實驗結果相比可以證明,本發明的實施例三在目標酸鹼值為5的環境下,以及將油酸鈉的添加量相對於1 ton之樣品重量控制在4~6 kg/ton等條件下,能夠提供油酸鈉對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從38.3%大幅提升至70%以上,至少提高31.7%。Comparing the experimental results of Example 3 of the present invention with that of the control group 1, it can be proved that Example 3 of the present invention is in an environment with a target pH of 5 and the addition amount of sodium oleate is relative to a sample of 1 ton. The weight is controlled at 4~6 kg/ton and other conditions, which can provide sodium oleate with a better capture effect on the silicon carbide contained in the mixed slurry, which can greatly increase the separation efficiency of silicon carbide from 38.3% to 70% Above, at least an increase of 31.7%.

若以同樣是一階段相比,TW 201040109專利案的第一階段的碳化矽分離效率為63.98%(回收率83.1%乘以品位77%乘以100%),而本發明的實施例三的分離方法的一階段的碳化矽分離效率在70%以上。由此可見,TW 201040109專利案之方法的第一階段的碳化矽分離效率低於本發明的實施例三的分離方法的一階段的碳化矽分離效率。這也是為什麼TW 201040109專利案必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過本發明的實施例三的碳化矽分離效率。If compared with the same stage, the silicon carbide separation efficiency of the first stage of the TW 201040109 patent case is 63.98% (the recovery rate is 83.1% times the grade 77% times 100%), while the separation of the third embodiment of the present invention The silicon carbide separation efficiency in the first stage of the method is above 70%. It can be seen that the silicon carbide separation efficiency in the first stage of the method of the TW 201040109 patent case is lower than the silicon carbide separation efficiency in the first stage of the separation method of the third embodiment of the present invention. This is why the TW 201040109 patent case must undergo the second stage of separation, or even the third stage of separation, to further improve the silicon carbide separation efficiency to be equal to or exceed the silicon carbide separation efficiency of the third embodiment of the present invention.

再者,與TW 201040109專利案相比,本發明的實施例三選用的有機溶劑為4-甲基-2-戊醇,毒性遠比溴仿低,對人體和環境的危害程度較輕。Furthermore, compared with the TW 201040109 patent case, the organic solvent selected in the third embodiment of the present invention is 4-methyl-2-pentanol, which is far less toxic than bromoform, and is less harmful to the human body and the environment.

從對照組二與實驗組四的實驗結果相比可以證明,當有機溶劑為柴油時,添加油酸鈉,碳化矽分離效率足足下降16.2%。Comparing the experimental results of the control group two with the experimental group four, it can be proved that when the organic solvent is diesel oil, adding sodium oleate, the silicon carbide separation efficiency is reduced by 16.2%.

從本發明的實施例三與實驗組四的實驗結果相比可以證明,本發明的實施例三在目標酸鹼值為5的環境下,以及將油酸鈉的添加量相對於1 ton之樣品重量控制在4~6 kg/ton等條件下,能夠提供油酸鈉對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從49.7%大幅提升至70%以上,至少提高20.3%。Comparing the experimental results of the third embodiment of the present invention with the experimental group four, it can be proved that the third embodiment of the present invention is in an environment with a target pH of 5 and the addition amount of sodium oleate is relative to a sample of 1 ton. The weight is controlled at 4~6 kg/ton, etc., which can provide better capture effect of sodium oleate on the silicon carbide contained in the mixed slurry, which can greatly increase the separation efficiency of silicon carbide from 49.7% to 70% Above, at least an increase of 20.3%.

依據行政院環境保護署事業廢棄物申報及管理資訊系統的2017年統計資料顯示,台灣矽晶圓製造業每年產生約16,577公噸的矽晶圓切削廢棄物。碳化矽分離效率若能提高1%,光是在台灣每年就能夠回收相當大量的碳化矽與矽,若應用在全世界的相關產業,全世界每年回收的碳化矽與矽更為可觀。According to the 2017 statistics of the Business Waste Declaration and Management Information System of the Environmental Protection Agency of the Executive Yuan, Taiwan's silicon wafer manufacturing industry generates approximately 16,577 metric tons of silicon wafer cutting waste each year. If the silicon carbide separation efficiency can be increased by 1%, a considerable amount of silicon carbide and silicon can be recycled every year in Taiwan alone. If applied to related industries around the world, the world's annual recycling of silicon carbide and silicon will be even more impressive.

總的來說,本發明的實施例三的碳化矽分離效率在70%以上,大於對照組一的38.3%、對照組二(即,先前技術所述的文獻一)的65.9%、實驗組四的49.7%和TW 201040109專利案的第一階段的63.98%。原因在於:在添加油酸鈉以前,先將目標酸鹼值調整至5,油酸鈉的添加量相對於1 ton之樣品重量控制在4~6 kg/ton,油酸鈉即可在適當的酸鹼值環境與碳化矽粉作用,以促進分離,同時適用之有機溶劑限定為4-甲基-2-戊醇,不含溴仿。In general, the silicon carbide separation efficiency of the third embodiment of the present invention is more than 70%, which is greater than 38.3% of the control group one, 65.9% of the control group two (ie, the document one described in the prior art), and the experimental group four 49.7% of the total and 63.98% of the first phase of the TW 201040109 patent case. The reason is: before adding sodium oleate, first adjust the target pH to 5, and the amount of sodium oleate added relative to the sample weight of 1 ton is controlled at 4~6 kg/ton. Sodium oleate can be properly adjusted. The pH environment interacts with silicon carbide powder to promote separation, and the applicable organic solvent is limited to 4-methyl-2-pentanol without bromoform.

若將本發明的實施例三推廣至全世界的相關產業,全世界每年回收的碳化矽與矽將遠超過對照組一、對照組二(即,先前技術所述的文獻一)、實驗組四和TW 201040109專利案的第一階段,無須進一步進行第二階段甚至第三階段,可省下鉅額成本,還可避免溴仿等毒性極強的毒化物汙染環境的風險。If the third embodiment of the present invention is extended to related industries all over the world, the world’s annual recovery of silicon carbide and silicon will far exceed those of the control group one, the control group two (ie, the document one described in the prior art), and the experimental group four. As with the first stage of the TW 201040109 patent case, there is no need to further carry out the second or even third stage, which can save huge costs and avoid the risk of environmental pollution by extremely toxic compounds such as bromoform.

此外,相較於先前技術所述的文獻一的第二個限制,本發明的實施例三係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。In addition, compared with the second limitation of Document 1 described in the prior art, the third embodiment of the present invention separates all silicon carbide into the oil phase, and the batch processing capacity is higher than that of Document 1 described in the prior art.

縱使該發明所屬技術領域中具有通常知識者,在參酌TW 201040109專利案和先前技術所述的文獻一以後,有合理的動機想到本發明的實施例三的分離方法的所有步驟,有機溶劑採用柴油,並且嘗試添加油酸鈉,也僅能得到和實驗組四相同的結果,絕對無法想到本發明的實施例三的全部技術特徵,更遑論達到本發明的實施例三的有利功效。因此,相較於TW 201040109專利案和先前技術所述的文獻一結合通常知識,本發明的實施例三儼然具有進步性。Even if the person with ordinary knowledge in the technical field of the invention, after consulting the TW 201040109 patent case and the document 1 described in the prior art, there is a reasonable motivation to think of all the steps of the separation method of the third embodiment of the present invention. The organic solvent is diesel oil. , And trying to add sodium oleate, only the same results as the experimental group four can be obtained. It is absolutely impossible to think of all the technical features of the third embodiment of the present invention, let alone achieve the advantageous effects of the third embodiment of the present invention. Therefore, compared to the TW 201040109 patent case and the document 1 described in the prior art combined with common knowledge, the third embodiment of the present invention is more advanced.

實施例四:以異辛烷為有機相,添加的捕集劑為十二烷胺醋酸鹽(DAA)。本發明的實施例四的基本分離條件與本發明的實施例一大致相同,差別在於,有機溶劑為異辛烷。以下將以異辛烷相代表有機溶劑相。以下將以異辛烷相回收物代表從異辛烷相所回收的固體物,碳化矽回收率和品位分別是指異辛烷相回收物中的碳化矽回收率和品位。以下將以水相回收物代表水相所回收的固體物,矽回收率和品位分別是指水相回收物中的矽回收率和品位。以下碳化矽分離效率為異辛烷相回收物中的碳化矽回收率和品位的相乘積,數值越大,表示異辛烷回收物中的碳化矽回收率和品位皆越高,與水相中回收物中的矽的分離效果越佳,為表示碳化矽與矽的分離程度指標。Example 4: Using isooctane as the organic phase, and the added collector is dodecylamine acetate (DAA). The basic separation conditions of Example 4 of the present invention are approximately the same as Example 1 of the present invention, except that the organic solvent is isooctane. Hereinafter, the isooctane phase will be used as the organic solvent phase. In the following, the isooctane phase recovered material will be used to represent the solids recovered from the isooctane phase, and the silicon carbide recovery rate and grade refer to the silicon carbide recovery rate and grade of the isooctane phase recovered material respectively. In the following, the water phase reclaimed material will be used to represent the solid material recovered in the water phase. The silicon recovery rate and grade refer to the silicon recovery rate and grade of the water phase reclaimed material respectively. The following silicon carbide separation efficiency is the product of the silicon carbide recovery rate and grade in the isooctane phase recovery. The larger the value, the higher the silicon carbide recovery rate and the grade in the isooctane recovery phase. The better the separation effect of silicon in the recycle, it is an index indicating the degree of separation between silicon carbide and silicon.

首先,在基本分離條件維持不變及十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.1 kg/ton的前提之下,改變目標酸鹼值。其目的在於,找出異辛烷和十二烷胺醋酸鹽的組合,在哪一個目標酸鹼值的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高 。First, under the premise that the basic separation conditions remain unchanged and the addition amount of dodecylamine acetate is 0.1 kg/ton relative to the sample weight of 1 ton, the target pH value is changed. The purpose is to find out the combination of isooctane and dodecylamine acetate, under which target pH conditions, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency can reach the highest three.

請參閱圖18,圖18是本發明的實施例四的異辛烷添加十二烷胺醋酸鹽(DAA)相對於1 ton之樣品重量為0.1 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~9時,碳化矽回收率和矽品位隨著目標酸鹼值增加而上升,矽回收率無明顯變化並且介於70.8%~93.7%,碳化矽品位介於74.2~86.1%。此現象意味著,異辛烷相回收物中的碳化矽含量增加及矽含量無明顯變化,水相回收物中的矽含量無明顯變化及碳化矽含量減少,從而碳化矽品位和矽品位均上升。尤其是當目標酸鹼值為9時,碳化矽回收率達到最高90.4%,矽品位達到最高87%,碳化矽分離效率達到最高77.8%。但是,在目標酸鹼值大於9時,碳化矽回收率下降,矽回收率上升。此現象意味著,異辛烷相回收物中的碳化矽含量減少及矽含量減少,水相回收物中的矽含量增加及碳化矽含量增加,從而碳化矽品位無明顯變化,但是矽品位下降。Please refer to Figure 18, Figure 18 is the separation of the sample with different target acid-base values of isooctane added dodecylamine acetate (DAA) relative to 1 ton of sample weight of 0.1 kg/ton in the fourth embodiment of the present invention Extract the result graph. When the target acid-base value is between 3-9, the silicon carbide recovery rate and silicon grade increase with the increase of the target acid-base value. The silicon recovery rate does not change significantly and is between 70.8% and 93.7%, and the silicon carbide grade is between 74.2 ~86.1%. This phenomenon means that the content of silicon carbide in the isooctane phase recovery increases and the silicon content does not change significantly, and the silicon content in the water phase recovery does not change significantly and the silicon carbide content decreases, so that the silicon carbide grade and the silicon grade increase . Especially when the target acid-base value is 9, the silicon carbide recovery rate reaches the highest 90.4%, the silicon grade reaches the highest 87%, and the silicon carbide separation efficiency reaches the highest 77.8%. However, when the target acid-base value is greater than 9, the silicon carbide recovery rate decreases and the silicon recovery rate increases. This phenomenon means that the silicon carbide content in the isooctane phase recovery decreases and the silicon content decreases, the silicon content in the water phase recovery increases and the silicon carbide content increases, so that the silicon carbide grade does not change significantly, but the silicon grade decreases.

由上可知,在基本分離條件維持不變及十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.1 kg/ton的前提之下,異辛烷和十二烷胺醋酸鹽的組合,在目標酸鹼值為9的條件下,碳化矽回收率達到最高90.4%,矽品位達到最高87%,碳化矽分離效率達到最高77.8%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is 0.1 kg/ton, the combination of isooctane and dodecylamine acetate , Under the condition of the target acid-base value of 9, the silicon carbide recovery rate reaches the highest 90.4%, the silicon grade reaches the highest 87%, and the silicon carbide separation efficiency reaches the highest 77.8%.

值得一提的是,在基本分離條件維持不變及十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.1 kg/ton的前提之下,只要將目標酸鹼值控制在介於8.5~9.5,碳化矽回收率和品位均維持在80%以上,矽回收率和品位均維持在80%以上,碳化矽分離效率維持在65%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is 0.1 kg/ton, as long as the target pH value is controlled between From 8.5 to 9.5, the recovery rate and grade of silicon carbide are maintained above 80%, the recovery rate and grade of silicon are maintained above 80%, and the separation efficiency of silicon carbide is maintained above 65%.

接著,在基本分離條件維持不變及目標酸鹼值為9的前提之下,改變十二烷胺醋酸鹽的添加量。其目的在於,找出異辛烷和十二烷胺醋酸鹽的組合,在哪一個十二烷胺醋酸鹽的添加量的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。Next, under the premise that the basic separation conditions remain unchanged and the target acid-base value is 9, the addition amount of dodecylamine acetate is changed. The purpose is to find out the combination of isooctane and dodecylamine acetate, under which dodecylamine acetate addition amount, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency are all Can reach the highest.

請參閱圖19,圖19是本發明的異辛烷對樣品於不同十二烷胺醋酸鹽(DAA)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。隨著十二烷胺醋酸鹽的添加量的增加,碳化矽回收率下降,矽回收率下降。原因在於,隨著十二烷胺醋酸鹽的添加量的增加,被抽出至異辛烷相的碳化矽減少,被抽出至異辛烷相的矽增加,因而導致碳化矽品位和矽品位均下降。當十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.1 kg/ton時,碳化矽回收率達到最高90.4%,矽品位達到最高87%。Please refer to FIG. 19, which is a graph showing the separation and extraction results of isooctane added to different dodecylamine acetate (DAA) samples relative to the weight of 1 ton of the sample. With the increase in the amount of dodecylamine acetate added, the recovery rate of silicon carbide decreases and the recovery rate of silicon decreases. The reason is that as the addition amount of dodecylamine acetate increases, the silicon carbide extracted to the isooctane phase decreases, and the silicon extracted to the isooctane phase increases, resulting in a decrease in both the silicon carbide grade and the silicon grade. . When the addition amount of dodecylamine acetate is 0.1 kg/ton relative to the sample weight of 1 ton, the silicon carbide recovery rate reaches the highest 90.4%, and the silicon grade reaches the highest 87%.

由上可知,在基本分離條件維持不變及目標酸鹼值為9的前提之下,異辛烷和十二烷胺醋酸鹽的組合,在十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量為0.1 kg/ton的條件下,碳化矽回收率可達到最高90.4%,矽品位可達到最高87%,碳化矽分離效率達到最高77.8%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 9, the combination of isooctane and dodecylamine acetate is relative to 1 ton of dodecylamine acetate. When the sample weight is 0.1 kg/ton, the silicon carbide recovery rate can reach up to 90.4%, the silicon grade can reach up to 87%, and the silicon carbide separation efficiency can reach up to 77.8%.

值得一提的是,在基本分離條件維持不變及目標酸鹼值為9的前提之下,只要將十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量維持在0.1~0.25 kg/ton,碳化矽回收率和品位均維持在80%以上,矽回收率維持在75%以上,矽品位維持在80%以上,碳化矽分離效率維持在70%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 9, as long as the addition amount of dodecylamine acetate relative to the sample weight of 1 ton is maintained at 0.1~0.25 kg/ ton, silicon carbide recovery rate and grade are maintained above 80%, silicon recovery rate is maintained above 75%, silicon grade is maintained above 80%, and silicon carbide separation efficiency is maintained above 70%.

以下將對照組二、實驗組二、實驗組五、TW 201040109專利案的第一階段以及本發明的實施例四的碳化矽分離效率彙整於表四。The silicon carbide separation efficiency of the control group 2, the experimental group 2, the experimental group 5, the first stage of the TW 201040109 patent case, and the fourth embodiment of the present invention are summarized in Table 4 below.

《表四》   對照組二 實驗組二 實驗組五 TW 201040109 本發明的實施例四 碳化矽分離效率 65.9% 64.7% 42.8% 63.98% 70%以上 "Table Four" Control group two Experimental group two Experimental group five TW 201040109 Fourth embodiment of the present invention Silicon carbide separation efficiency 65.9% 64.7% 42.8% 63.98% More than 70%

從本發明的實施例四與實驗組五的實驗結果相比可以證明,實驗組五在目標酸鹼值7的環境下,以及六偏磷酸鈉的添加量相對於1 ton之樣品重量為0.25 kg/ton的條件下,不僅無助於碳化矽分離效率之提升,反而從70%以上大幅下降至42.8%,足足下降至少27.2%。原因在於:六偏磷酸鈉只會促進混合漿料中的碳化矽與矽等粒子分離,避免產生沉降或凝集的情形,使欲分散粒子能穩定分散於介質中,此作用稱之為分散作用,此為分散劑的特性,與捕集作用有所不同。因此,六偏磷酸鈉確實是分散劑,不是捕集劑,故不須事先調整目標酸鹼值。From the comparison of the experimental results of the fourth embodiment of the present invention and the experimental group five, it can be proved that the experimental group five is in an environment with a target pH of 7 and the addition amount of sodium hexametaphosphate relative to the sample weight of 1 ton is 0.25 kg Under the condition of /ton, not only does it not help to increase the efficiency of silicon carbide separation, but it drops from more than 70% to 42.8%, which is a full drop of at least 27.2%. The reason is: Sodium hexametaphosphate only promotes the separation of silicon carbide and silicon particles in the mixed slurry, avoids sedimentation or agglomeration, and enables the particles to be dispersed to be stably dispersed in the medium. This effect is called dispersion. This is the characteristic of the dispersant, which is different from the trapping effect. Therefore, sodium hexametaphosphate is indeed a dispersant, not a collector, so it is not necessary to adjust the target pH in advance.

若以同樣是一階段相比,TW 201040109專利案的第一階段的碳化矽分離效率為63.98%(回收率83.1%乘以品位77%乘以100%),而本發明的實施例四的分離方法的一階段的碳化矽分離效率在70%以上。由此可見,TW 201040109專利案之方法的第一階段的碳化矽分離效率低於本發明的實施例四的分離方法的一階段的碳化矽分離效率。這也是為什麼TW 201040109專利案必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過本發明的實施例四的碳化矽分離效率。If compared with the same stage, the silicon carbide separation efficiency of the first stage of the TW 201040109 patent case is 63.98% (the recovery rate is 83.1% times the grade 77% times 100%), while the separation of the fourth embodiment of the present invention The silicon carbide separation efficiency in the first stage of the method is above 70%. It can be seen that the silicon carbide separation efficiency in the first stage of the method of the TW 201040109 patent case is lower than the silicon carbide separation efficiency in the first stage of the separation method of the fourth embodiment of the present invention. This is why the TW 201040109 patent case must undergo the second stage of separation, or even the third stage of separation, to further increase the silicon carbide separation efficiency to be equal to or exceed the silicon carbide separation efficiency of the fourth embodiment of the present invention.

再者,與TW 201040109專利案相比,本發明的實施例四選用的有機溶劑為異辛烷,毒性遠比溴仿低,對人體和環境的危害程度較輕。Furthermore, compared with the TW 201040109 patent case, the organic solvent selected in the fourth embodiment of the present invention is isooctane, which is far less toxic than bromoform and is less harmful to the human body and the environment.

從本發明的實施例四與實驗組二的實驗結果相比可以證明,本發明的實施例四在目標酸鹼值為9的環境下,以及將十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量控制在0.1~0.25kg/ton等條件下,能夠提供十二烷胺醋酸鹽對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從64.7%微幅提升至70%以上,至少提高5.3%。From the comparison of the experimental results of the fourth embodiment of the present invention with the experimental group two, it can be proved that the fourth embodiment of the present invention is in an environment with a target pH of 9 and the addition amount of dodecylamine acetate is relative to 1 The sample weight of ton is controlled at 0.1~0.25kg/ton, etc., which can provide dodecylamine acetate to have a better trapping effect on the silicon carbide contained in the mixed slurry, so that the silicon carbide separation efficiency can be increased from 64.7 % Increased slightly to more than 70%, at least 5.3%.

依據行政院環境保護署事業廢棄物申報及管理資訊系統的2017年統計資料顯示,台灣矽晶圓製造業每年產生約16,577公噸的矽晶圓切削廢棄物。碳化矽分離效率若能提高1%,光是在台灣每年就能夠回收相當大量的碳化矽與矽,若應用在全世界的相關產業,全世界每年回收的碳化矽與矽更為可觀。According to the 2017 statistics of the Business Waste Declaration and Management Information System of the Environmental Protection Agency of the Executive Yuan, Taiwan's silicon wafer manufacturing industry generates approximately 16,577 metric tons of silicon wafer cutting waste each year. If the silicon carbide separation efficiency can be increased by 1%, a considerable amount of silicon carbide and silicon can be recycled every year in Taiwan alone. If applied to related industries around the world, the world's annual recycling of silicon carbide and silicon will be even more impressive.

總的來說,本發明的實施例四的碳化矽分離效率在70%以上,大於對照組二(即,先前技術所述的文獻一)的65.9%、實驗組二的64.7%、實驗組五的42.8%和TW 201040109專利案的第一階段的63.98%。原因在於:在添加十二烷胺醋酸鹽以前,先將目標酸鹼值調整為9,十二烷胺醋酸鹽的添加量相對於1 ton之樣品重量控制在0.1~0.25 kg/ton,十二烷胺醋酸鹽即可在適當的酸鹼值環境與碳化矽粉作用,以促進分離,同時適用之有機溶劑限定為異辛烷,不含溴仿。In general, the silicon carbide separation efficiency of the fourth embodiment of the present invention is more than 70%, which is greater than 65.9% of the control group two (ie, the document one described in the prior art), 64.7% of the experimental group two, and the experimental group five. 42.8% and 63.98% of the first phase of the TW 201040109 patent case. The reason is: before adding dodecylamine acetate, adjust the target acid-base value to 9. The amount of dodecylamine acetate added relative to the sample weight of 1 ton is controlled within 0.1~0.25 kg/ton. Alkylamine acetate can interact with silicon carbide powder in an appropriate pH environment to promote separation. At the same time, the applicable organic solvent is limited to isooctane and does not contain bromoform.

若將本發明的實施例四推廣至全世界的相關產業,全世界每年回收的碳化矽與矽將遠超過對照組二(即,先前技術所述的文獻一)、實驗組二、實驗組五和TW 201040109專利案的第一階段,無須進一步進行第二階段甚至第三階段,可省下鉅額成本,還可避免溴仿等毒性極強的毒化物汙染環境的風險。If the fourth embodiment of the present invention is extended to related industries all over the world, the world’s annual recovery of silicon carbide and silicon will far exceed those of the control group two (ie, the document one described in the prior art), the experimental group two, and the experimental group five. As with the first stage of the TW 201040109 patent case, there is no need to further carry out the second or even third stage, which can save huge costs and avoid the risk of environmental pollution by extremely toxic compounds such as bromoform.

此外,相較於先前技術所述的文獻一的第二個限制,本發明的實施例四係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。In addition, compared with the second limitation of the document 1 described in the prior art, the fourth embodiment of the present invention separates all the silicon carbide into the oil phase, and the batch processing capacity is higher than that of the document 1 described in the prior art.

縱使該發明所屬技術領域中具有通常知識者,在參酌TW 201040109專利案和先前技術所述的文獻一以後,有合理的動機想到本發明的實施例四的分離方法的所有步驟,有機溶劑採用柴油,並且嘗試添加十二烷胺醋酸鹽,也僅能得到和實驗組二相同的結果,絕對無法想到本發明的實施例四的全部技術特徵,更遑論達到本發明的實施例四的有利功效。因此,相較於TW 201040109專利案和先前技術所述的文獻一結合通常知識,本發明的實施例四儼然具有進步性。Even if the person with ordinary knowledge in the technical field of the invention, after consulting the TW 201040109 patent case and the document 1 described in the prior art, there is a reasonable motivation to think of all the steps of the separation method of the fourth embodiment of the present invention. The organic solvent is diesel oil. And trying to add dodecylamine acetate, only the same results as the experimental group two can be obtained. It is absolutely impossible to think of all the technical features of the fourth embodiment of the present invention, let alone achieve the beneficial effects of the fourth embodiment of the present invention. Therefore, compared with the TW 201040109 patent case and the document 1 described in the prior art combined with common knowledge, the fourth embodiment of the present invention is more advanced.

實施例五:以異辛烷為有機相,添加的捕集劑為油酸鈉(NaOL)。本發明的實施例五的基本分離條件與本發明的實施例四大致相同,差別在於:捕集劑為油酸鈉(NaOL)。Example 5: Using isooctane as the organic phase, and the added collector is sodium oleate (NaOL). The basic separation conditions of the fifth embodiment of the present invention are approximately the same as those of the fourth embodiment of the present invention, except that the collector is sodium oleate (NaOL).

首先,在基本分離條件維持不變及油酸鈉的添加量相對於1 ton之樣品重量為0.1 kg/ton的前提之下,改變目標酸鹼值。其目的在於,找出異辛烷和油酸鈉的組合,在哪一個目標酸鹼值的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。First, under the premise that the basic separation conditions remain unchanged and the amount of sodium oleate added is 0.1 kg/ton relative to the sample weight of 1 ton, the target pH value is changed. The purpose is to find out the combination of isooctane and sodium oleate, under which target pH conditions, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency can reach the highest three.

請參閱圖20,圖20是本發明的實施例五的異辛烷添加油酸鈉( NaOL)相對於1 ton之樣品重量為0.1 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。當目標酸鹼值介於3~5時,碳化矽回收率隨著目標酸鹼值增加而上升,矽回收率隨著目標酸鹼值增加而上升。此現象意味著,異辛烷相回收物中的碳化矽含量增加及矽含量減少,水相回收物中的矽含量增加及碳化矽含量減少,從而碳化矽品位和矽品位均上升。在目標酸鹼值大於5時,碳化矽回收率下降,矽回收率則無明顯變化並且介於76.2~90.9%。此現象意味著,異辛烷相回收物中的碳化矽含量減少及矽含量無明顯變化,水相回收物中的矽含量無明顯變化及碳化矽含量增加,從而碳化矽品位和矽品位均下降。特別是在目標酸鹼值為5時,碳化矽回收率達到最高85.7%,碳化矽品位達到最高89.6%,矽品位達到最高82.8%,碳化矽分離效率達到最高76.8%。Please refer to Figure 20. Figure 20 is the separation and extraction result curve of isooctane added sodium oleate (NaOL) relative to the sample weight of 1 ton of 0.1 kg/ton for the sample at different target pH values in the fifth embodiment of the present invention Figure. When the target acid-base value is between 3 and 5, the silicon carbide recovery rate increases as the target acid-base value increases, and the silicon recovery rate increases as the target acid-base value increases. This phenomenon means that the content of silicon carbide in the recovered isooctane phase increases and the content of silicon decreases, and the content of silicon in the recovered water phase increases and the content of silicon carbide decreases, thereby increasing the grade of silicon carbide and silicon. When the target acid-base value is greater than 5, the silicon carbide recovery rate decreases, while the silicon recovery rate does not change significantly and is between 76.2-90.9%. This phenomenon means that the content of silicon carbide in the recovered isooctane phase is reduced and there is no significant change in the silicon content, and the content of silicon in the recovered water phase does not change significantly and the content of silicon carbide increases, so that the silicon carbide grade and the silicon grade both decrease . Especially when the target acid-base value is 5, the silicon carbide recovery rate reaches the highest 85.7%, the silicon carbide grade reaches the highest 89.6%, the silicon grade reaches the highest 82.8%, and the silicon carbide separation efficiency reaches the highest 76.8%.

由上可知,在基本分離條件維持不變及油酸鈉的添加量相對於1 ton之樣品重量為0.1 kg/ton的前提之下,異辛烷和油酸鈉的組合,在目標酸鹼值為5的條件下,碳化矽回收率達到最高85.7%,矽品位達到最高82.8%,碳化矽分離效率達到最高76.8%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the addition amount of sodium oleate is 0.1 kg/ton relative to the sample weight of 1 ton, the combination of isooctane and sodium oleate is at the target pH Under the condition of 5, the silicon carbide recovery rate reaches the highest 85.7%, the silicon grade reaches the highest 82.8%, and the silicon carbide separation efficiency reaches the highest 76.8%.

值得一提的是,在基本分離條件維持不變及油酸鈉的添加量相對於1 ton之樣品重量為0.1 kg/ton的前提之下,只要將目標酸鹼值控制在介於4.5~5.5,碳化矽回收率和矽品位均維持在80%以上,碳化矽品位和矽回收率均維持在85%以上,碳化矽分離效率維持在65%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the amount of sodium oleate added is 0.1 kg/ton relative to the sample weight of 1 ton, as long as the target pH value is controlled between 4.5 and 5.5 , Both the silicon carbide recovery rate and silicon grade are maintained above 80%, the silicon carbide grade and silicon recovery rate are maintained above 85%, and the silicon carbide separation efficiency is maintained above 65%.

接著,在基本分離條件維持不變及目標酸鹼值為5的前提之下,改變油酸鈉的添加量。其目的在於,找出異辛烷和油酸鈉的組合,在哪一個油酸鈉的添加量的條件下,碳化矽回收率、矽品位和碳化矽分離效率三者均可達到最高。Next, under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, the amount of sodium oleate added is changed. The purpose is to find out the combination of isooctane and sodium oleate, under which sodium oleate addition, the silicon carbide recovery rate, silicon grade and silicon carbide separation efficiency can reach the highest three.

請參閱圖21,圖21是本發明的實施例五的異辛烷對樣品於不同油酸鈉(NaOL)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。當油酸鈉的添加量相對於1 ton之樣品重量介於0.1~1.0 kg/ton時,碳化矽回收率和品位無明顯變化,矽回收率和品位也無明顯變化,矽回收率介於77.5~87.3%。在油酸鈉的添加量相對於1 ton之樣品重量大於1.0 kg/ton時,碳化矽回收率和品位均下降。其原因在於,油酸鈉添加過量時發生膠束現象,使得碳化矽的抽出降低。另外,在油酸鈉的添加量相對於1 ton之樣品重量大於1.0 kg/ton時,矽回收率無明顯變化,矽品位則下降。惟,矽品位隨著碳化矽回收率增加或減少而上升或下降。原因在於,隨著油酸鈉的添加量的增加,碳化矽回收率下降,矽回收率無明顯變化,因而導致矽品位下降。尤其是當油酸鈉的添加量相對於1 ton之樣品重量為1.0 kg/ton時,碳化矽回收率達到最高91.1%,矽品位達到最高88.2%。Please refer to Figure 21. Figure 21 is a graph showing the separation and extraction results of isooctane to different sodium oleate (NaOL) addition amounts relative to 1 ton of sample weight in Example 5 of the present invention. When the addition amount of sodium oleate is 0.1~1.0 kg/ton relative to the sample weight of 1 ton, there is no significant change in the recovery rate and grade of silicon carbide, and there is no significant change in the recovery rate and grade of silicon. The recovery rate of silicon is 77.5. ~87.3%. When the amount of sodium oleate added relative to the sample weight of 1 ton is greater than 1.0 kg/ton, the recovery rate and grade of silicon carbide decrease. The reason is that the micelle phenomenon occurs when sodium oleate is added excessively, which reduces the extraction of silicon carbide. In addition, when the amount of sodium oleate added relative to the sample weight of 1 ton is greater than 1.0 kg/ton, the silicon recovery rate does not change significantly, and the silicon grade decreases. However, the silicon grade increases or decreases as the silicon carbide recovery rate increases or decreases. The reason is that with the increase in the amount of sodium oleate added, the recovery rate of silicon carbide decreases, and there is no significant change in the recovery rate of silicon, which leads to a decrease in silicon grade. Especially when the added amount of sodium oleate is 1.0 kg/ton relative to the sample weight of 1 ton, the silicon carbide recovery rate reaches the highest 91.1%, and the silicon grade reaches the highest 88.2%.

由上可知,在基本分離條件維持不變及目標酸鹼值為5的前提之下,異辛烷和油酸鈉的組合,在油酸鈉的添加量相對於1 ton之樣品重量為1.0 kg/ton的條件下,碳化矽回收率達到最高91.1%,矽品位達到最高88.2%,碳化矽分離效率達到最高80.3%。It can be seen from the above that under the premise that the basic separation conditions remain unchanged and the target pH value is 5, the combination of isooctane and sodium oleate is 1.0 kg relative to the sample weight of 1 ton. Under the condition of /ton, the maximum recovery rate of silicon carbide is 91.1%, the maximum silicon grade is 88.2%, and the maximum separation efficiency of silicon carbide is 80.3%.

值得一提的是,在基本分離條件維持不變及目標酸鹼值為5的前提之下,只要油酸鈉的添加量相對於1 ton之樣品重量維持在0.1~1.25 kg/ton,碳化矽回收率和品位均維持在85%以上,矽回收率維持在75%以上,矽品位維持在80%以上,碳化矽分離效率維持在70%以上。It is worth mentioning that under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, as long as the addition amount of sodium oleate is maintained at 0.1~1.25 kg/ton relative to the sample weight of 1 ton, silicon carbide The recovery rate and grade are maintained above 85%, the silicon recovery rate is maintained above 75%, the silicon grade is maintained above 80%, and the silicon carbide separation efficiency is maintained above 70%.

以下將對照組二、實驗組四、TW 201040109專利案的第一階段以及本發明的實施例五的碳化矽分離效率彙整於表五。The silicon carbide separation efficiency of the control group two, the experimental group four, the first stage of the TW 201040109 patent case, and the fifth embodiment of the present invention are summarized in Table 5.

《表五》   對照組二 實驗組四 TW 201040109 本發明的實施例五 碳化矽分離效率 65.9% 49.7% 63.98% 70%以上 "Table Five" Control group two Experimental group four TW 201040109 Embodiment 5 of the present invention Silicon carbide separation efficiency 65.9% 49.7% 63.98% More than 70%

若以同樣是一階段相比,TW 201040109專利案的第一階段的碳化矽分離效率為63.98%(回收率83.1%乘以品位77%乘以100%),而本發明的實施例五的分離方法的一階段的碳化矽分離效率在70%以上。由此可見,TW 201040109專利案之方法的第一階段的碳化矽分離效率低於本發明的實施例五的分離方法的一階段的碳化矽分離效率。這也是為什麼TW 201040109專利案必須進行第二階段的分離,甚至第三階段的分離,才能夠進一步提升碳化矽分離效率至等於或超過本發明的實施例五的碳化矽分離效率。If compared with the same stage, the silicon carbide separation efficiency of the first stage of the TW 201040109 patent case is 63.98% (recovery rate 83.1% multiplied by 77% grade multiplied by 100%), while the separation of the fifth embodiment of the present invention The silicon carbide separation efficiency in the first stage of the method is above 70%. It can be seen that the silicon carbide separation efficiency in the first stage of the method of the TW 201040109 patent is lower than the silicon carbide separation efficiency in the first stage of the separation method of the fifth embodiment of the present invention. This is why the TW 201040109 patent case must undergo the second stage of separation, and even the third stage of separation, in order to further increase the silicon carbide separation efficiency to be equal to or exceed the silicon carbide separation efficiency of the fifth embodiment of the present invention.

再者,與TW 201040109專利案相比,本發明的實施例五選用的有機溶劑為異辛烷,毒性遠比溴仿低,對人體和環境的危害程度較輕。Furthermore, compared with the TW 201040109 patent case, the organic solvent selected in the fifth embodiment of the present invention is isooctane, which has much lower toxicity than bromoform and is less harmful to the human body and the environment.

從本發明的實施例五與實驗組四的實驗結果相比可以證明,本發明的實施例五在目標酸鹼值為5的環境下,以及將油酸鈉的添加量相對於1 ton之樣品重量控制在0.1~1.25kg/ton等條件下,能夠提供油酸鈉對混合漿料所包含的碳化矽產生較佳的捕集作用,從而能夠將碳化矽分離效率從49.7%大幅提升至70%以上,至少提高20.3%。From the comparison of the experimental results of the fifth embodiment of the present invention and the experimental group four, it can be proved that the fifth embodiment of the present invention is in an environment with a target pH of 5 and the addition amount of sodium oleate is relative to a sample of 1 ton The weight is controlled at 0.1~1.25kg/ton, etc., which can provide a better capture effect of sodium oleate on the silicon carbide contained in the mixed slurry, which can greatly increase the silicon carbide separation efficiency from 49.7% to 70% Above, at least an increase of 20.3%.

依據行政院環境保護署事業廢棄物申報及管理資訊系統的2017年統計資料顯示,台灣矽晶圓製造業每年產生約16,577公噸的矽晶圓切削廢棄物。碳化矽分離效率若能提高1%,光是在台灣每年就能夠回收相當大量的碳化矽與矽,若應用在全世界的相關產業,全世界每年回收的碳化矽與矽更為可觀。According to the 2017 statistics of the Business Waste Declaration and Management Information System of the Environmental Protection Agency of the Executive Yuan, Taiwan's silicon wafer manufacturing industry generates approximately 16,577 metric tons of silicon wafer cutting waste each year. If the silicon carbide separation efficiency can be increased by 1%, a considerable amount of silicon carbide and silicon can be recycled every year in Taiwan alone. If applied to related industries around the world, the world's annual recycling of silicon carbide and silicon will be even more impressive.

總的來說,本發明的實施例五的碳化矽分離效率在70%以上,大於對照組二(即,先前技術所述的文獻一)的65.9%、實驗組四的49.7%和TW 201040109專利案的第一階段的63.98%。原因在於:在添加油酸鈉以前,先將目標酸鹼值調整為5,油酸鈉的添加量相對於1 ton之樣品重量控制在0.1~1.25 kg/ton,油酸鈉即可在適當的酸鹼值環境與碳化矽粉作用,以促進分離,同時適用之有機溶劑限定為異辛烷,不含溴仿。In general, the silicon carbide separation efficiency of Example 5 of the present invention is more than 70%, which is greater than 65.9% of the control group 2 (ie, the document 1 described in the prior art), 49.7% of the experimental group 4, and TW 201040109 patent. 63.98% of the first stage of the case. The reason is: before adding sodium oleate, first adjust the target pH to 5, the amount of sodium oleate added relative to the sample weight of 1 ton is controlled within 0.1~1.25 kg/ton, sodium oleate can be properly adjusted The pH environment interacts with silicon carbide powder to promote separation, and the applicable organic solvent is limited to isooctane and does not contain bromoform.

若將本發明的實施例五推廣至全世界的相關產業,全世界每年回收的碳化矽與矽將遠超過對照組二(即,先前技術所述的文獻一)、實驗組四和TW 201040109專利案的第一階段,無須進一步進行第二階段甚至第三階段,可省下鉅額成本,還可避免溴仿等毒性極強的毒化物汙染環境的風險。If the fifth embodiment of the present invention is extended to related industries all over the world, the world’s annual recovery of silicon carbide and silicon will far exceed those of the control group two (ie, the document one described in the prior art), the experimental group four and the TW 201040109 patent In the first stage of the case, there is no need to further carry out the second or even the third stage, which can save huge costs and avoid the risk of environmental pollution by extremely toxic compounds such as bromoform.

此外,相較於先前技術所述的文獻一的第二個限制,本發明的實施例五係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。In addition, compared to the second limitation of the document 1 described in the prior art, the fifth embodiment of the present invention separates all the silicon carbide into the oil phase, and the batch processing capacity is higher than that of the document 1 described in the prior art.

縱使該發明所屬技術領域中具有通常知識者,在參酌TW 201040109專利案和先前技術所述的文獻一以後,有合理的動機想到本發明的實施例五的分離方法的所有步驟,有機溶劑採用柴油,並且嘗試添加油酸鈉,也僅能得到和實驗組四相同的結果,絕對無法想到本發明的實施例五的全部技術特徵,更遑論達到本發明的實施例五的有利功效。因此,相較於TW 201040109專利案和先前技術所述的文獻一結合通常知識,本發明的實施例五儼然具有進步性。Even if the person with ordinary knowledge in the technical field of the invention, after referring to the TW 201040109 patent case and the document 1 described in the prior art, there is a reasonable motivation to think of all the steps of the separation method of the fifth embodiment of the present invention. The organic solvent is diesel oil. , And trying to add sodium oleate, only the same results as the experimental group four can be obtained. It is absolutely impossible to think of all the technical features of the fifth embodiment of the present invention, let alone achieve the advantageous effects of the fifth embodiment of the present invention. Therefore, compared with the TW 201040109 patent case and the document 1 described in the prior art combined with common knowledge, the fifth embodiment of the present invention is more advanced.

本發明的實施例一~五具有共同特別技術特徵為:(1)先進行調整目標酸鹼值步驟,再進行捕集步驟;以及(2)選用能夠提升捕集效果的有機溶劑。共同特別技術特徵(1)能夠使得捕集劑可在適當的酸鹼值環境與碳化矽作用,以促進分離。共同特別技術特徵(2)能夠進一步提升碳化矽分離效率。因此,本發明的實施例一~五的碳化矽分離效率均能夠在70%以上。在共同特別技術特徵(1)和(2)相較於TW 201040109專利案和先前技術所述的文獻一結合通常知識具有進步性的情況下,本發明的實施例一~五具有發明單一性。Embodiments 1 to 5 of the present invention have common special technical features: (1) the step of adjusting the target acid-base value is performed first, and then the trapping step; and (2) the selection of organic solvents that can improve the trapping effect. The common special technical feature (1) enables the trapping agent to interact with silicon carbide in an appropriate pH environment to promote separation. The common special technical feature (2) can further improve the separation efficiency of silicon carbide. Therefore, the silicon carbide separation efficiency of Examples 1 to 5 of the present invention can all be above 70%. In the case that the common special technical features (1) and (2) are more advanced than the TW 201040109 patent case and the document 1 described in the prior art in combination with common knowledge, the first to fifth embodiments of the present invention have the unity of invention.

需特別說明的是,碳化矽在目標酸鹼值小於3.7時其表面帶正電,碳化矽在目標酸鹼值大於3.7時其表面帶負電,矽在目標酸鹼值大於1.6時其表面帶負電。因此,在上述所有實施例中,當目標酸鹼值為3時,碳化矽與矽發生異種凝聚,顆粒較大的碳化矽受到顆粒較小的矽所包覆,使碳化矽與十二烷胺醋酸鹽、十二烷基酸鈉或油酸鈉結合受到阻礙,導致4-甲基-2-戊醇相或異辛烷相回收物中的碳化矽回收率降低。It should be noted that the surface of silicon carbide is positively charged when the target pH is less than 3.7, the surface of silicon carbide is negatively charged when the target pH is greater than 3.7, and the surface of silicon is negatively charged when the target pH is greater than 1.6 . Therefore, in all the above-mentioned embodiments, when the target acid-base value is 3, silicon carbide and silicon undergo heterogeneous agglomeration, and the silicon carbide with larger particles is covered by the silicon with smaller particles, making the silicon carbide and dodecylamine The combination of acetate, sodium lauryl or sodium oleate is hindered, resulting in a decrease in the recovery rate of silicon carbide in the recovered 4-methyl-2-pentanol phase or the isooctane phase.

總結以上,在所有實施例中,以本發明的實施例二在基本分離條件維持不變及目標酸鹼值為5的前提之下,4-甲基-2-戊醇和十二烷基硫酸鈉的組合,在十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為2.0 kg/ton的條件下,所獲得的分離效果最佳:碳化矽回收率為98.3%,矽品位為97.0%,碳化矽分離效率達到最高79.3%。因此,以下將以本發明的實施例二的最佳分離結果進一步探討分離抽出後4-甲基-2-戊醇相和水相回收物的粒徑分析。To summarize the above, in all the examples, based on the second example of the present invention under the premise that the basic separation conditions remain unchanged and the target acid-base value is 5, 4-methyl-2-pentanol and sodium lauryl sulfate Under the condition that the addition amount of sodium lauryl sulfate is 2.0 kg/ton relative to the sample weight of 1 ton, the best separation effect is obtained: the recovery rate of silicon carbide is 98.3%, and the silicon grade is 97.0% , The separation efficiency of silicon carbide reaches the highest 79.3%. Therefore, the following will further discuss the particle size analysis of the recovered 4-methyl-2-pentanol phase and the water phase after separation and extraction with the best separation result of Example 2 of the present invention.

請參閱圖22,圖22是本發明的本發明的實施例二以最佳分離條件的4-甲基-2-戊醇相回收物的粒徑分析結果示意圖。4-甲基-2-戊醇相回收物的平均粒徑為9.80 μm,及少數粒徑約為0.2~0.4 μm的粒子,推測此為被抽出至4-甲基-2-戊醇相的碳化矽和少部分一體被抽出的矽。Please refer to FIG. 22, which is a schematic diagram of the particle size analysis result of the recovered 4-methyl-2-pentanol phase under the optimal separation conditions in the second embodiment of the present invention. The average particle size of the recovered 4-methyl-2-pentanol phase is 9.80 μm, and a small number of particles with a particle size of about 0.2~0.4 μm are estimated to be extracted to the 4-methyl-2-pentanol phase Silicon carbide and a small part are drawn out together.

請參閱圖23,圖23是本發明的本發明的實施例二以最佳分離條件的水相回收物的粒徑分析結果示意圖。水相回收物的平均粒徑為0.39 μm及部分粒徑大於1 μm的粒子,推測此為停留在水相的矽及少部分位被抽出之碳化矽。Please refer to FIG. 23. FIG. 23 is a schematic diagram of the particle size analysis result of the water phase reclaimed product under the optimal separation conditions in the second embodiment of the present invention. The average particle size of the recovered water phase is 0.39 μm and some particles larger than 1 μm are presumed to be silicon staying in the water phase and a small amount of silicon carbide extracted.

請參閱圖24,圖24是利用掃描式電子顯微鏡對本發明的本發明的實施例二以最佳分離條件的4-甲基-2-戊醇相回收物的結構外觀分析結果示意圖。具有明顯的稜角粒子為碳化矽,小粒子為矽。與圖4所顯示的樣品的結構外觀比較,本發明的實施例二以最佳分離條件的4-甲基-2-戊醇相回收物的結構外觀的小粒子矽的數量減少,代表抽出至4-甲基-2-戊醇相的粒子大部分為碳化矽。Please refer to FIG. 24. FIG. 24 is a schematic diagram of the structural appearance analysis result of the 4-methyl-2-pentanol phase recovered under the optimal separation conditions in the second embodiment of the present invention using a scanning electron microscope. The particles with obvious edges and corners are silicon carbide, and the small particles are silicon. Compared with the structural appearance of the sample shown in Fig. 4, in Example 2 of the present invention, the amount of small silicon particles in the structural appearance of the 4-methyl-2-pentanol phase recovered under the optimal separation conditions is reduced, which represents the extraction to Most of the particles in the 4-methyl-2-pentanol phase are silicon carbide.

以下將以本發明的實施例二為例,調整分離條件中的有機溶劑和去離子水的添加量,並且將分離條件設定在目標酸鹼值為5,十二烷基硫酸鈉的添加量為2.0 kg/ton,進一步探討有機溶劑相和水相的體積比。如圖25所示,4-甲基-2-戊醇和水的體積比為1:9至1:4(即,10 ml:90 ml至20 ml:80 ml)時,碳化矽回收率和矽品位隨著4-甲基-2-戊醇和水的體積比增加而上升。特別是在4-甲基-2-戊醇和水的體積比為1:4時,碳化矽回收率達到最高98.3%,碳化矽品位達到最高80.7%,矽品位達到最高97%。在4-甲基-2-戊醇和水的體積比大於1:4時,碳化矽回收率和矽品位均隨著4-甲基-2-戊醇和水的體積比增加而下降,碳化矽品位和矽回收率則無明顯變化。此現象意味著,隨著4-甲基-2-戊醇和水的體積比增加,被抽至4-甲基-2-戊醇相的碳化矽減少,導致碳化矽回收率和矽品位下降。本發明的實施例一和本發明的實施例三均有相似的結果,故不再另外討論。The following will take Example 2 of the present invention as an example to adjust the addition amount of organic solvent and deionized water in the separation conditions, and set the separation conditions at the target acid-base value of 5, and the addition amount of sodium lauryl sulfate as 2.0 kg/ton, further discuss the volume ratio of organic solvent phase and water phase. As shown in Figure 25, when the volume ratio of 4-methyl-2-pentanol and water is 1:9 to 1:4 (that is, 10 ml: 90 ml to 20 ml: 80 ml), the recovery rate of silicon carbide and silicon The grade increases as the volume ratio of 4-methyl-2-pentanol to water increases. Especially when the volume ratio of 4-methyl-2-pentanol to water is 1:4, the recovery rate of silicon carbide reaches the highest 98.3%, the silicon carbide grade reaches the highest 80.7%, and the silicon grade reaches the highest 97%. When the volume ratio of 4-methyl-2-pentanol to water is greater than 1:4, the silicon carbide recovery rate and silicon grade will decrease as the volume ratio of 4-methyl-2-pentanol to water increases, and the silicon carbide grade And the silicon recovery rate did not change significantly. This phenomenon means that as the volume ratio of 4-methyl-2-pentanol to water increases, the silicon carbide pumped into the 4-methyl-2-pentanol phase decreases, resulting in a decrease in the recovery rate of silicon carbide and the silicon grade. The first embodiment of the present invention and the third embodiment of the present invention have similar results, so they will not be discussed separately.

以下將以本發明的實施例二為例,調整分離條件中的樣品重量,並且將分離條件設定在目標酸鹼值為5,十二烷基硫酸鈉的添加量相對於1 ton之樣品重量為2.0 kg/ton,其餘分離條件則不變,進一步探討固液比。如圖26所示,樣品的重量(單位為g)與水及4-甲基-2-戊醇所組成的液體的體積(單位為ml)的固液比介於1:50至3:50(即,2 g/100 ml至6 g/100 ml)時,碳化矽回收率和品位皆無明顯變化。固液比介於1:50至1:25(即,2 g/100 ml至4 g/100 ml)時,矽回收率和品位皆隨著固液比上升而下降。當固液比大於1:25時,矽回收率隨著固液比增加而微幅上升,矽品位和碳化矽分離效率均隨著固液比增加而下降。當固液比為2 :25(即,8 g/100 ml)時,碳化矽回收率下降至44.3%,碳化矽品位下降至63.5%,矽品位下降至48.8%。是以,固液比大於3:50 (即,6 g/100 ml)時,無法達到預期分離效果。特別是在固液比為1:50(即,2 g/100 ml)時,碳化矽回收率達到最高98.3%,碳化矽品位達到最高80.7%,矽回收率達到最高70.1%,矽品位達到最高97%。The following will take Example 2 of the present invention as an example, adjust the sample weight in the separation conditions, and set the separation conditions at the target acid-base value of 5, and the addition amount of sodium lauryl sulfate relative to the sample weight of 1 ton is 2.0 kg/ton, the rest of the separation conditions remain unchanged, further discuss the solid-liquid ratio. As shown in Figure 26, the solid-to-liquid ratio between the weight of the sample (in g) and the volume of the liquid composed of water and 4-methyl-2-pentanol (in ml) ranges from 1:50 to 3:50 (Ie, 2 g/100 ml to 6 g/100 ml), there is no significant change in the recovery rate and grade of silicon carbide. When the solid-liquid ratio is between 1:50 and 1:25 (ie, 2 g/100 ml to 4 g/100 ml), the silicon recovery rate and grade will decrease as the solid-liquid ratio increases. When the solid-liquid ratio is greater than 1:25, the silicon recovery rate increases slightly with the increase of the solid-liquid ratio, and the silicon grade and silicon carbide separation efficiency both decrease with the increase of the solid-liquid ratio. When the solid-liquid ratio is 2:25 (ie, 8 g/100 ml), the silicon carbide recovery rate drops to 44.3%, the silicon carbide grade drops to 63.5%, and the silicon grade drops to 48.8%. Therefore, when the solid-liquid ratio is greater than 3:50 (ie, 6 g/100 ml), the expected separation effect cannot be achieved. Especially when the solid-liquid ratio is 1:50 (ie, 2 g/100 ml), the silicon carbide recovery rate reaches the highest 98.3%, the silicon carbide grade reaches the highest 80.7%, the silicon recovery rate reaches the highest 70.1%, and the silicon grade reaches the highest 97%.

綜上所述,本發明可將矽晶圓切削廢棄物中的碳化矽與矽,藉由使用毒性較低的有機溶劑,並且透過先調整目標酸鹼值,然後添加捕集劑,使碳化矽與矽的分離於一個分離操作程序即可達成,並能夠以最佳分離條件獲得高回收率的碳化矽和高品位的矽,並且碳化矽分離效率在70%以上,還可分離10 μm以下微粒子,進而達到降低生產太陽能電池時的廢棄物成本及達到循環經濟的目標。In summary, the present invention can remove silicon carbide and silicon in silicon wafer cutting waste by using a less toxic organic solvent, and by first adjusting the target acid-base value, and then adding a trapping agent to make the silicon carbide Separation from silicon can be achieved in one separation operation procedure, and high-recovery silicon carbide and high-grade silicon can be obtained under optimal separation conditions, and the separation efficiency of silicon carbide is more than 70%, and it can also separate particles below 10 μm. , And then achieve the goal of reducing waste costs in the production of solar cells and achieving circular economy.

再者,相較於先前技術所述的文獻一的第二個限制,本發明係將所有碳化矽分離至油相中,批次處理能力高於先前技術所述的文獻一。Furthermore, compared with the second limitation of Document 1 described in the prior art, the present invention separates all silicon carbide into the oil phase, and the batch processing capacity is higher than that of Document 1 described in the prior art.

以上所述者僅為用以解釋本發明的較佳實施例,並非企圖據以對本發明做任何形式上的限制,是以,凡有在相同的發明精神下所作有關本發明的任何修飾或變更,皆仍應包括在本發明意圖保護的範疇。The above descriptions are only used to explain the preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Therefore, any modification or change related to the present invention made under the same inventive spirit , Should still be included in the scope of the present invention.

附件一:附件一是本發明的實施例二的2-甲基-2-戊醇對樣品於不同十二烷機硫酸鈉(SDS)的添加量相對於1 ton之樣品重量介於0~2 kg/ton的分離抽出結果照片。Attachment 1: Attachment 1 is the addition amount of 2-methyl-2-pentanol to the sample of the second embodiment of the present invention to different sodium dodecyl sulphate (SDS) relative to the sample weight of 1 ton between 0~2 The separation of kg/ton extracts the result photos.

S10:前處理步驟 S20:分散步驟 S30:酸鹼值調整步驟 S40:捕集步驟 S50:混合步驟 S60:靜置步驟 S70:離心步驟 S80:乾燥步驟 S10: Pre-processing steps S20: Dispersion step S30: pH adjustment steps S40: Capture step S50: mixing steps S60: standing step S70: Centrifugation step S80: drying step

圖1是本發明的流程圖。 圖2是利用雷射粒度分析儀對本發明的前處理步驟的樣品的粒徑分析結果示意圖。 圖3是利用X光繞射儀對本發明的前處理步驟的樣品的結晶型態分析結果示意圖。 圖4是利用掃描式電子顯微鏡對本發明的前處理步驟的樣品的結構外觀分析結果示意圖。 圖5是對照組一的4-甲基-2-戊醇未添加捕集劑對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖6是對照組二的柴油未添加捕集劑對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖7是實驗組一的4-甲基-2-戊醇添加六偏磷酸鈉(分散劑)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖8是實驗組二的柴油添加十二烷胺醋酸鹽(DAA)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖9是實驗組三的柴油添加十二烷基硫酸鈉(SDS)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖10是實驗組四的柴油添加油酸鈉(NaOL)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖11是實驗組五的異辛烷添加六偏磷酸鈉(分散劑)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖12是本發明的實施例一的4-甲基-2-戊醇添加十二烷胺醋酸鹽(DAA)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖13是本發明的實施例一的4-甲基-2-戊醇對樣品於不同十二烷胺醋酸鹽(DAA)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。 圖14為本發明的實施例二的4-甲基-2-戊醇添加十二烷基硫酸鈉(SDS)相對於1 ton之樣品重量為0.25 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖15是本發明的實施例二的4-甲基-2-戊醇對樣品於不同十二烷基硫酸鈉(SDS)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。 圖16是本發明的實施例三的4-甲基-2-戊醇添加油酸鈉(NaOL)相對於1 ton之樣品重量為1 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖17是本發明的實施例三的4-甲基-2-戊醇對樣品於不同油酸鈉(NaOL)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。 圖18是本發明的實施例四的異辛烷添加十二烷胺醋酸鹽(DAA)相對於1 ton之樣品重量為0.1 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖19是本發明的異辛烷對樣品於不同十二烷胺醋酸鹽(DAA)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。 圖20是本發明的實施例五的異辛烷添加油酸鈉( NaOL)相對於1 ton之樣品重量為0.1 kg/ton對樣品於不同目標酸鹼值的分離抽出結果曲線圖。 圖21是本發明的實施例五的異辛烷對樣品於不同油酸鈉(NaOL)的添加量相對於1 ton之樣品重量的分離抽出結果曲線圖。 圖22是本發明的實施例二以最佳分離條件的4-甲基-2-戊醇相回收物的粒徑分析結果示意圖。 圖23是本發明的實施例二以最佳分離條件的水相回收物的粒徑分析結果示意圖。 圖24是利用掃描式電子顯微鏡對本發明的實施例二以最佳分離條件的4-甲基-2-戊醇相回收物的結構外觀分析結果示意圖。 圖25為本發明的實施例二的4-甲基-2-戊醇添加十二烷基硫酸鈉(SDS)相對於1 ton之樣品重量為2.0 kg/ton對樣品於不同有機溶劑相和水相的體積比的分離抽出結果曲線圖。 圖26是本發明的實施例二的4-甲基-2-戊醇添加十二烷基硫酸鈉(SDS)相對於1 ton之樣品重量為2.0 kg/ton對樣品於不同固液比的分離抽出結果曲線圖。Figure 1 is a flowchart of the present invention. Fig. 2 is a schematic diagram of the particle size analysis result of the sample in the pretreatment step of the present invention by using a laser particle size analyzer. FIG. 3 is a schematic diagram of the crystal structure analysis result of the sample in the pretreatment step of the present invention by using an X-ray diffractometer. FIG. 4 is a schematic diagram of the structural appearance analysis result of the sample in the pretreatment step of the present invention by using a scanning electron microscope. Fig. 5 is a graph showing the separation and extraction results of samples at different target acid-base values of 4-methyl-2-pentanol without the addition of trapping agent in control group 1. Fig. 6 is a graph showing the separation and extraction results of the diesel oil of the control group 2 without the addition of the trapping agent at different target pH values. Figure 7 is the separation and extraction result curve of the sample with different target pH values for the sample weight of 1 ton of 4-methyl-2-pentanol added with sodium hexametaphosphate (dispersant) relative to 1 ton of 0.25 kg/ton. Figure. Fig. 8 is a graph showing the separation and extraction results of samples with different target acid-base values for the sample weight of 1 ton of dodecylamine acetate (DAA) relative to 1 ton of 0.25 kg/ton. Figure 9 is a graph showing the separation and extraction results of samples with different target acid-base values for the sample weight of 0.25 kg/ton relative to 1 ton of diesel fuel added with sodium dodecyl sulfate (SDS). Figure 10 is a graph showing the separation and extraction results of sodium oleate (NaOL) for diesel fuel in experimental group four relative to the sample weight of 1 ton of 0.25 kg/ton for different target acid-base values. Figure 11 is a graph showing the separation and extraction results of samples with different target acid-base values for the sample weight of 0.25 kg/ton relative to 1 ton of isooctane added sodium hexametaphosphate (dispersant) in experimental group 5. Fig. 12 is the comparison of 4-methyl-2-pentanol with dodecylamine acetate (DAA) relative to 1 ton of sample weight of 0.25 kg/ton relative to the sample at different target pH values in the first embodiment of the present invention. Separate and extract the result graph. FIG. 13 is a graph showing the separation and extraction results of the amount of 4-methyl-2-pentanol added to the sample to different dodecylamine acetate (DAA) relative to the weight of 1 ton of the sample in Example 1 of the present invention. Figure 14 shows the effect of adding sodium dodecyl sulfate (SDS) to 4-methyl-2-pentanol in Example 2 of the present invention relative to the sample weight of 1 ton of 0.25 kg/ton for samples at different target pH values Separate and extract the result graph. Fig. 15 is a graph showing the separation and extraction results of 4-methyl-2-pentanol in the second embodiment of the present invention with respect to the amount of sodium dodecyl sulfate (SDS) added to the sample relative to the sample weight of 1 ton. Figure 16 shows the separation and extraction results of samples with different target pH values for the sample weight of 1 kg/ton relative to the sample weight of 1 ton of 4-methyl-2-pentanol added with sodium oleate (NaOL) in Example 3 of the present invention Graph. Fig. 17 is a graph showing the separation and extraction results of 4-methyl-2-pentanol to the sample of different sodium oleate (NaOL) relative to the weight of 1 ton of the sample. 18 is a graph showing the separation and extraction results of samples with different target acid-base values of isooctane dodecylamine acetate (DAA) relative to 1 ton of sample weight of 0.1 kg/ton relative to the sample weight in Example 4 of the present invention. Fig. 19 is a graph showing the separation and extraction results of the isooctane of the present invention on different dodecylamine acetate (DAA) addition amounts relative to the sample weight of 1 ton. 20 is a graph showing the separation and extraction results of samples with different target acid-base values of 0.1 kg/ton relative to 1 ton of sample weight of isooctane added sodium oleate (NaOL) in Example 5 of the present invention. 21 is a graph showing the separation and extraction results of isooctane added to different sodium oleate (NaOL) samples relative to 1 ton of sample weight in Example 5 of the present invention. 22 is a schematic diagram of the particle size analysis results of the recovered 4-methyl-2-pentanol phase under the optimal separation conditions in Example 2 of the present invention. Figure 23 is a schematic diagram of the particle size analysis results of the water phase reclaimed product under the optimal separation conditions in the second embodiment of the present invention. FIG. 24 is a schematic diagram of the structural appearance analysis result of the 4-methyl-2-pentanol phase recovered under the optimal separation conditions of the second embodiment of the present invention using a scanning electron microscope. Figure 25 shows the sample weight of 2.0 kg/ton relative to 1 ton of 4-methyl-2-pentanol added with sodium dodecyl sulfate (SDS) in the second embodiment of the present invention. A graph of the separation and extraction results of the phase volume ratio. Figure 26 shows the separation of samples with different solid-to-liquid ratios by adding sodium dodecyl sulfate (SDS) to a sample weight of 2.0 kg/ton relative to 1 ton of 4-methyl-2-pentanol in Example 2 of the present invention Extract the result graph.

S10:前處理步驟 S10: Pre-processing steps

S20:分散步驟 S20: Dispersion step

S30:酸鹼值調整步驟 S30: pH adjustment steps

S40:捕集步驟 S40: Capture step

S50:混合步驟 S50: mixing steps

S60:靜置步驟 S60: standing step

S70:離心步驟 S70: Centrifugation step

S80:乾燥步驟 S80: drying step

Claims (10)

一種碳化矽與矽的分離方法,包括下列步驟: 前處理步驟:去除由切割矽晶棒所得到的一矽晶圓切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品,該樣品由碳化矽與矽所組成; 分散步驟:加水於該樣品中並混合成一混合漿料,利用一超音波分散機以分散該混合漿料中的碳化矽與矽; 酸鹼值調整步驟:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整該混合漿料的酸鹼值至一目標酸鹼值為7; 捕集步驟:添加一捕集劑,用以對該混合漿料所包含的碳化矽產生捕集作用,其中,該捕集劑為十二烷胺醋酸鹽(Dodecylamine Acetate,DAA),該捕集劑的添加量相對於1 ton之樣品重量介於0.2~0.5 kg/ton; 混合步驟:利用一搖盪機所產生的搖盪力對該混合漿料進行一初階混合,添加一有機溶劑,並利用該搖盪機進行一進階混合而形成一混合溶液,其中,該有機溶劑為4-甲基-2-戊醇,該有機溶劑和水的體積比介於1:9至1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50; 靜置步驟:將該混合溶液靜置一段時間,形成上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出該有機溶劑相溶液及該水相溶液,其中,該有機溶劑相溶液富含碳化矽,該水相溶液富含矽; 離心步驟:利用一離心機所產生的離心力將該有機溶劑相溶液的固體物及液體分離,並取出該有機溶劑相溶液的固體物,以及利用一離心機所產生的離心力將該水相溶液的固體物及液體分離,並取出該水相溶液的固體物;以及 乾燥步驟:利用一烘乾機對該有機溶劑相溶液的固體物或該水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽。A method for separating silicon carbide and silicon, including the following steps: Pre-processing steps: remove water, cutting oil and metal impurities in a silicon wafer cutting waste obtained by cutting a silicon crystal rod to obtain a sample composed of silicon carbide and silicon; Dispersion step: adding water to the sample and mixing it to form a mixed slurry, using an ultrasonic disperser to disperse the silicon carbide and silicon in the mixed slurry; PH adjusting step: adding an acid adjusting agent or an alkaline adjusting agent to a pH adjusting agent to adjust the pH of the mixed slurry to a target pH of 7; The trapping step: adding a trapping agent to capture the silicon carbide contained in the mixed slurry, wherein the trapping agent is Dodecylamine Acetate (DAA). The dosage of the agent is 0.2~0.5 kg/ton relative to the weight of 1 ton of the sample; Mixing step: use the shaking force generated by a shaker to perform a preliminary mixing of the mixed slurry, add an organic solvent, and use the shaker to perform an advanced mixing to form a mixed solution, wherein the organic solvent is 4-methyl-2-pentanol, the volume ratio of the organic solvent to water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in The solid-liquid ratio of ml) is between 1:50 to 3:50; Standing step: the mixed solution is allowed to stand for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other up and down, and then take out the organic solvent phase solution and the aqueous phase solution respectively, wherein the organic solvent phase solution Rich in silicon carbide, the aqueous solution is rich in silicon; Centrifugation step: use the centrifugal force generated by a centrifuge to separate the solids and liquids of the organic solvent phase solution, and take out the solids of the organic solvent phase solution, and use the centrifugal force generated by a centrifuge to separate the aqueous phase solution The solids and liquids are separated, and the solids of the aqueous solution are taken out; and Drying step: using a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively. 如申請專利範圍第1項所述的碳化矽與矽的分離方法,其中,該捕集劑的添加量相對於1 ton之樣品重量為0.25 kg/ton,該有機溶劑和水的體積比為1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。The method for separating silicon carbide and silicon as described in item 1 of the scope of patent application, wherein the addition amount of the collector is 0.25 kg/ton relative to the sample weight of 1 ton, and the volume ratio of the organic solvent and water is 1 : 4. The solid-liquid ratio of the weight of the sample (unit: g) to the volume (unit: ml) of the liquid composed of water and organic solvent is 1:50. 一種碳化矽與矽的分離方法,包括下列步驟: 前處理步驟:去除由切割矽晶棒所得到的一矽晶圓切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品,該樣品由碳化矽與矽所組成; 分散步驟:加水於該樣品中並混合成一混合漿料,利用一超音波分散機以分散該混合漿料中的碳化矽與矽; 酸鹼值調整步驟:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整該混合漿料的酸鹼值至一目標酸鹼值為5; 捕集步驟:添加一捕集劑,用以對該混合漿料所包含的碳化矽產生捕集作用,其中,該捕集劑選自於十二烷基硫酸鈉(Sodium Dodecyl Sulfate,SDS)、十四烷基硫酸鈉(Sodium Tetradecyl Sulfate)、月桂醇聚氧乙烯醚硫酸鈉(Sodium Laureth Sulfate)、十二烷基磺酸鈉(Sodium Dodecyl Sulfonate)、十烷基磺酸鈉(Sodium Decane-1-Sulfonate)及對甲苯磺酸鈉(Sodium p-Toluene Sulfonate)所構成的群組中的其中一種,該捕集劑的添加量相對於1 ton之樣品重量介於0.25~2 kg/ton; 混合步驟:利用一搖盪機所產生的搖盪力對該混合漿料進行一初階混合,添加一有機溶劑,並利用該搖盪機進行一進階混合而形成一混合溶液,其中,該有機溶劑為4-甲基-2-戊醇,該有機溶劑和水的體積比介於1:9至1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50; 靜置步驟:將該混合溶液靜置一段時間,形成上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出該有機溶劑相溶液及該水相溶液,其中,該有機溶劑相溶液富含碳化矽,該水相溶液富含矽; 離心步驟:利用一離心機所產生的離心力將該有機溶劑相溶液的固體物及液體分離,並取出該有機溶劑相溶液的固體物,以及利用一離心機所產生的離心力將該水相溶液的固體物及液體分離,並取出該水相溶液的固體物;以及 乾燥步驟:利用一烘乾機對該有機溶劑相溶液的固體物或該水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽。A method for separating silicon carbide and silicon, including the following steps: Pre-processing steps: remove water, cutting oil and metal impurities in a silicon wafer cutting waste obtained by cutting a silicon crystal rod to obtain a sample composed of silicon carbide and silicon; Dispersion step: adding water to the sample and mixing it to form a mixed slurry, using an ultrasonic disperser to disperse the silicon carbide and silicon in the mixed slurry; PH adjustment step: adding an acid regulator or a pH regulator of an alkali regulator to adjust the pH of the mixed slurry to a target pH of 5; The trapping step: adding a trapping agent to capture the silicon carbide contained in the mixed slurry, wherein the trapping agent is selected from sodium dodecyl sulfate (SDS), Sodium Tetradecyl Sulfate (Sodium Tetradecyl Sulfate), Sodium Laureth Sulfate (Sodium Laureth Sulfate), Sodium Dodecyl Sulfonate (Sodium Dodecyl Sulfonate), Sodium Decane-1 -Sulfonate) and sodium p-Toluene Sulfonate (Sodium p-Toluene Sulfonate) in one of the group, the addition amount of the collector is between 0.25~2 kg/ton relative to the sample weight of 1 ton; Mixing step: use the shaking force generated by a shaker to perform a preliminary mixing of the mixed slurry, add an organic solvent, and use the shaker to perform an advanced mixing to form a mixed solution, wherein the organic solvent is 4-methyl-2-pentanol, the volume ratio of the organic solvent to water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in The solid-liquid ratio of ml) is between 1:50 to 3:50; Standing step: the mixed solution is allowed to stand for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other up and down, and then take out the organic solvent phase solution and the aqueous phase solution respectively, wherein the organic solvent phase solution Rich in silicon carbide, the aqueous solution is rich in silicon; Centrifugation step: use the centrifugal force generated by a centrifuge to separate the solids and liquids of the organic solvent phase solution, and take out the solids of the organic solvent phase solution, and use the centrifugal force generated by a centrifuge to separate the aqueous phase solution The solids and liquids are separated, and the solids of the aqueous solution are taken out; and Drying step: using a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively. 如申請專利範圍第3項所述的碳化矽與矽的分離方法,其中,該捕集劑的添加量相對於1 ton之樣品重量為2 kg/ton,該有機溶劑和水的體積比為1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。The method for separating silicon carbide and silicon as described in item 3 of the scope of patent application, wherein the additive amount of the collector is 2 kg/ton relative to the weight of 1 ton of the sample, and the volume ratio of the organic solvent to water is 1 : 4. The solid-liquid ratio of the weight of the sample (unit: g) to the volume (unit: ml) of the liquid composed of water and organic solvent is 1:50. 一種碳化矽與矽的分離方法,包括下列步驟: 前處理步驟:去除由切割矽晶棒所得到的一矽晶圓切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品,該樣品由碳化矽與矽所組成; 分散步驟:加水於該樣品中並混合成一混合漿料,利用一超音波分散機以分散該混合漿料中的碳化矽與矽; 酸鹼值調整步驟:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整該混合漿料的酸鹼值至一目標酸鹼值為5; 捕集步驟:添加一捕集劑,用以對該混合漿料所包含的碳化矽產生捕集作用,其中,該捕集劑為油酸鈉(Sodium Oleate,NaOL),該捕集劑的添加量相對於1 ton之樣品重量介於4~6 kg/ton; 混合步驟:利用一搖盪機所產生的搖盪力對該混合漿料進行一初階混合,添加一有機溶劑,並利用該搖盪機進行一進階混合而形成一混合溶液,其中,該有機溶劑為4-甲基-2-戊醇,該有機溶劑和水的體積比介於1:9至1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50; 靜置步驟:將該混合溶液靜置一段時間,形成上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出該有機溶劑相溶液及該水相溶液,其中,該有機溶劑相溶液富含碳化矽,該水相溶液富含矽; 離心步驟:利用一離心機所產生的離心力將該有機溶劑相溶液的固體物及液體分離,並取出該有機溶劑相溶液的固體物,以及利用一離心機所產生的離心力將該水相溶液的固體物及液體分離,並取出該水相溶液的固體物;以及 乾燥步驟:利用一烘乾機對該有機溶劑相溶液的固體物或該水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽。A method for separating silicon carbide and silicon, including the following steps: Pre-processing steps: remove water, cutting oil and metal impurities in a silicon wafer cutting waste obtained by cutting a silicon crystal rod to obtain a sample composed of silicon carbide and silicon; Dispersion step: adding water to the sample and mixing it to form a mixed slurry, using an ultrasonic disperser to disperse the silicon carbide and silicon in the mixed slurry; PH adjustment step: adding an acid regulator or a pH regulator of an alkali regulator to adjust the pH of the mixed slurry to a target pH of 5; The trapping step: add a trapping agent to capture the silicon carbide contained in the mixed slurry, wherein the trapping agent is sodium oleate (NaOL), the addition of the trapping agent Relative to the sample weight of 1 ton, between 4~6 kg/ton; Mixing step: use the shaking force generated by a shaker to perform a preliminary mixing of the mixed slurry, add an organic solvent, and use the shaker to perform an advanced mixing to form a mixed solution, wherein the organic solvent is 4-methyl-2-pentanol, the volume ratio of the organic solvent to water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in The solid-liquid ratio of ml) is between 1:50 to 3:50; Standing step: the mixed solution is allowed to stand for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other up and down, and then take out the organic solvent phase solution and the aqueous phase solution respectively, wherein the organic solvent phase solution Rich in silicon carbide, the aqueous solution is rich in silicon; Centrifugation step: use the centrifugal force generated by a centrifuge to separate the solids and liquids of the organic solvent phase solution, and take out the solids of the organic solvent phase solution, and use the centrifugal force generated by a centrifuge to separate the aqueous phase solution The solids and liquids are separated, and the solids of the aqueous solution are taken out; and Drying step: using a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively. 如申請專利範圍第5項所述的碳化矽與矽的分離方法,其中,該捕集劑的添加量相對於1 ton之樣品重量為5 kg/ton,該有機溶劑和水的體積比為1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。The method for separating silicon carbide and silicon as described in item 5 of the scope of patent application, wherein the additive amount of the collector is 5 kg/ton relative to the sample weight of 1 ton, and the volume ratio of the organic solvent to water is 1 : 4. The solid-liquid ratio of the weight of the sample (unit: g) to the volume (unit: ml) of the liquid composed of water and organic solvent is 1:50. 一種碳化矽與矽的分離方法,包括下列步驟: 前處理步驟:去除由切割矽晶棒所得到的一矽晶圓切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品,該樣品由碳化矽與矽所組成; 分散步驟:加水於該樣品中並混合成一混合漿料,利用一超音波分散機以分散該混合漿料中的碳化矽與矽; 酸鹼值調整步驟:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整該混合漿料的酸鹼值至一目標酸鹼值為9; 捕集步驟:添加一捕集劑,用以對該混合漿料所包含的碳化矽產生捕集作用,其中,該捕集劑為十二烷胺醋酸鹽(Dodecylamine Acetate,DAA),該捕集劑的添加量相對於1 ton之樣品重量介於0.1~0.25 kg/ton; 混合步驟:利用一搖盪機所產生的搖盪力對該混合漿料進行一初階混合,添加一有機溶劑,並利用該搖盪機進行一進階混合而形成一混合溶液,其中,該有機溶劑為異辛烷,該有機溶劑和水的體積比介於1:9至1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50; 靜置步驟:將該混合溶液靜置一段時間,形成上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出該有機溶劑相溶液及該水相溶液,其中,該有機溶劑相溶液富含碳化矽,該水相溶液富含矽; 離心步驟:利用一離心機所產生的離心力將該有機溶劑相溶液的固體物及液體分離,並取出該有機溶劑相溶液的固體物,以及利用一離心機所產生的離心力將該水相溶液的固體物及液體分離,並取出該水相溶液的固體物;以及 乾燥步驟:利用一烘乾機對該有機溶劑相溶液的固體物或該水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽。A method for separating silicon carbide and silicon, including the following steps: Pre-processing steps: remove water, cutting oil and metal impurities in a silicon wafer cutting waste obtained by cutting a silicon crystal rod to obtain a sample composed of silicon carbide and silicon; Dispersion step: adding water to the sample and mixing it to form a mixed slurry, using an ultrasonic disperser to disperse the silicon carbide and silicon in the mixed slurry; PH adjustment step: adding an acid regulator or a pH regulator of an alkali regulator to adjust the pH of the mixed slurry to a target pH of 9; The trapping step: adding a trapping agent to capture the silicon carbide contained in the mixed slurry, wherein the trapping agent is Dodecylamine Acetate (DAA). The dosage of the agent is 0.1~0.25 kg/ton relative to the weight of 1 ton of the sample; Mixing step: use the shaking force generated by a shaker to perform a preliminary mixing of the mixed slurry, add an organic solvent, and use the shaker to perform an advanced mixing to form a mixed solution, wherein the organic solvent is Isooctane, the volume ratio of the organic solvent and water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in ml) are solid-liquid The ratio is between 1:50 to 3:50; Standing step: the mixed solution is allowed to stand for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other up and down, and then take out the organic solvent phase solution and the aqueous phase solution respectively, wherein the organic solvent phase solution Rich in silicon carbide, the aqueous solution is rich in silicon; Centrifugation step: use the centrifugal force generated by a centrifuge to separate the solids and liquids of the organic solvent phase solution, and take out the solids of the organic solvent phase solution, and use the centrifugal force generated by a centrifuge to separate the aqueous phase solution The solids and liquids are separated, and the solids of the aqueous solution are taken out; and Drying step: using a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively. 如申請專利範圍第7項所述的碳化矽與矽的分離方法,其中,該捕集劑的添加量相對於1 ton之樣品重量為0.1 kg/ton,該有機溶劑和水的體積比為1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。The method for separating silicon carbide and silicon as described in item 7 of the scope of patent application, wherein the addition amount of the collector is 0.1 kg/ton relative to the sample weight of 1 ton, and the volume ratio of the organic solvent to water is 1 : 4. The solid-liquid ratio of the weight of the sample (unit: g) to the volume (unit: ml) of the liquid composed of water and organic solvent is 1:50. 一種碳化矽與矽的分離方法,包括下列步驟: 前處理步驟:去除由切割矽晶棒所得到的一矽晶圓切削廢棄物中的水、切削油及金屬雜質,以獲得一樣品,該樣品由碳化矽與矽所組成; 分散步驟:加水於該樣品中並混合成一混合漿料,利用一超音波分散機以分散該混合漿料中的碳化矽與矽; 酸鹼值調整步驟:加入一酸性調整劑或一鹼性調整劑的一酸鹼值調整劑,以調整該混合漿料的酸鹼值至一目標酸鹼值為5; 捕集步驟:添加一捕集劑,用以對該混合漿料所包含的碳化矽產生捕集作用,其中,該捕集劑為油酸鈉(Sodium Oleate,NaOL),該捕集劑的添加量相對於1 ton之樣品重量介於0.1~1.25 kg/ton; 混合步驟:利用一搖盪機所產生的搖盪力對該混合漿料進行一初階混合,添加一有機溶劑,並利用該搖盪機進行一進階混合而形成一混合溶液,其中,該有機溶劑為異辛烷,該有機溶劑和水的體積比介於1:9至1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比介於1:50至3:50; 靜置步驟:將該混合溶液靜置一段時間,形成上下相互分離的一有機溶劑相溶液及一水相溶液,再分別取出該有機溶劑相溶液及該水相溶液,其中,該有機溶劑相溶液富含碳化矽,該水相溶液富含矽; 離心步驟:利用一離心機所產生的離心力將該有機溶劑相溶液的固體物及液體分離,並取出該有機溶劑相溶液的固體物,以及利用一離心機所產生的離心力將該水相溶液的固體物及液體分離,並取出該水相溶液的固體物;以及 乾燥步驟:利用一烘乾機對該有機溶劑相溶液的固體物或該水相溶液的固體物進行加熱,藉以去除殘留的液體,從而分別得到碳化矽與矽。A method for separating silicon carbide and silicon, including the following steps: Pre-processing steps: remove water, cutting oil and metal impurities in a silicon wafer cutting waste obtained by cutting a silicon crystal rod to obtain a sample composed of silicon carbide and silicon; Dispersion step: adding water to the sample and mixing it to form a mixed slurry, using an ultrasonic disperser to disperse silicon carbide and silicon in the mixed slurry; PH adjustment step: adding an acid regulator or a pH regulator of an alkali regulator to adjust the pH of the mixed slurry to a target pH of 5; The trapping step: add a trapping agent to capture the silicon carbide contained in the mixed slurry, wherein the trapping agent is sodium oleate (NaOL), the addition of the trapping agent The amount relative to the sample weight of 1 ton is between 0.1~1.25 kg/ton; Mixing step: use the shaking force generated by a shaker to perform a preliminary mixing of the mixed slurry, add an organic solvent, and use the shaker to perform an advanced mixing to form a mixed solution, wherein the organic solvent is Isooctane, the volume ratio of the organic solvent and water is between 1:9 to 1:4, the weight of the sample (in g) and the volume of the liquid composed of water and organic solvent (in ml) are solid-liquid The ratio is between 1:50 to 3:50; Standing step: the mixed solution is allowed to stand for a period of time to form an organic solvent phase solution and an aqueous phase solution that are separated from each other up and down, and then take out the organic solvent phase solution and the aqueous phase solution respectively, wherein the organic solvent phase solution Rich in silicon carbide, the aqueous solution is rich in silicon; Centrifugation step: use the centrifugal force generated by a centrifuge to separate the solids and liquids of the organic solvent phase solution, and take out the solids of the organic solvent phase solution, and use the centrifugal force generated by a centrifuge to separate the aqueous phase solution The solids and liquids are separated, and the solids of the aqueous solution are taken out; and Drying step: using a dryer to heat the solids of the organic solvent phase solution or the solids of the aqueous phase solution to remove the remaining liquid, thereby obtaining silicon carbide and silicon, respectively. 如申請專利範圍第9項所述的碳化矽與矽的分離方法,其中,該捕集劑的添加量相對於1 ton之樣品重量為1.0 kg/ton,該有機溶劑和水的體積比為1:4,該樣品的重量(單位為g)與水及有機溶劑所組成的液體的體積(單位為ml)的固液比為1:50。The method for separating silicon carbide and silicon as described in item 9 of the scope of patent application, wherein the addition amount of the collector is 1.0 kg/ton relative to the sample weight of 1 ton, and the volume ratio of the organic solvent to water is 1 : 4. The solid-liquid ratio of the weight of the sample (unit: g) to the volume (unit: ml) of the liquid composed of water and organic solvent is 1:50.
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Citations (3)

* Cited by examiner, † Cited by third party
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TW200827305A (en) * 2006-12-29 2008-07-01 Chung-Wen Lan The recycling method of silicon sludge after slicing
TW201040109A (en) * 2009-05-11 2010-11-16 Univ Nat Taiwan Recovery of silicon and silicon carbide powder from kerf loss slurry using particle phase-transfer method
CN102765722A (en) * 2012-08-08 2012-11-07 铁生年 Method for recovering and separating silicone and silicon carbide powder through foam flotation in silicon wafer cutting effluent

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200827305A (en) * 2006-12-29 2008-07-01 Chung-Wen Lan The recycling method of silicon sludge after slicing
TW201040109A (en) * 2009-05-11 2010-11-16 Univ Nat Taiwan Recovery of silicon and silicon carbide powder from kerf loss slurry using particle phase-transfer method
CN102765722A (en) * 2012-08-08 2012-11-07 铁生年 Method for recovering and separating silicone and silicon carbide powder through foam flotation in silicon wafer cutting effluent

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