TWI710819B - Liquid crystal display - Google Patents

Abstract

A liquid crystal display includes a first substrate, a pixel array, a first pad, a dielectric layer, a filling pattern, a first conductor, a second substrate and a liquid crystal layer. The first substrate has a display area and a pad area located outside the display area. The pixel array is disposed on the display area. The first pad is disposed on the pad area. The dielectric layer has a first opening overlapped with the first pad. The filling pattern is disposed within the first opening of the dielectric layer. The filling pattern has through holes, and the through holes of the filling pattern are overlapped with the first pads. The first conductor is disposed in the first opening of the dielectric layer, and is electrically connected to the first pad via the through holes of the filling pattern.

Description

LCD Monitor

The present invention relates to a display, and more particularly to a liquid crystal display.

Liquid crystal on silicon (LCOS) is a type of liquid crystal display that uses semiconductor processes to fabricate pixel arrays, drive integrated circuits and other electronic components on a silicon wafer. Liquid crystal silicon crystal displays not only have the technical advantages of small pixel size and high resolution, but also have the advantages of simple manufacturing process, low cost and small size. Therefore, liquid crystal silicon crystal displays have been widely used in various electronic products, such as portable cameras. , Projectors and other equipment.

In the manufacturing process of the liquid crystal silicon crystal display, an alignment film must be formed on the silicon wafer. However, the surface of the silicon wafer is mostly uneven. When an alignment film is formed on the uneven surface, striation defects are likely to occur.

The invention provides a liquid crystal display with excellent performance.

A liquid crystal display of the present invention includes a first substrate, a pixel array, a first pad, a dielectric layer, a filling pattern, a first conductor, a second substrate and a liquid crystal layer. The first substrate has a display area and a pad area outside the display area. The pixel array is arranged on the display area of the first substrate. The first pad is disposed on the pad area of the first substrate. The dielectric layer is disposed on the pad area of the first substrate and has a first opening. The first opening of the dielectric layer overlaps with the first pad. The filling pattern is arranged in the first opening of the dielectric layer. The filling pattern has a plurality of through holes, and the plurality of through holes of the filling pattern overlap the first pad. The first conductor is disposed in the first opening of the dielectric layer, and is electrically connected to the first pad through a plurality of through holes of the filling pattern. The second substrate is disposed opposite to the first substrate. The liquid crystal layer is disposed between the pixel array and the second substrate.

In an embodiment of the present invention, the material of the aforementioned filling pattern includes photoresist.

In an embodiment of the present invention, the above-mentioned liquid crystal display further includes an alignment film located between the first conductor and the filling pattern.

In an embodiment of the present invention, the above-mentioned first pad is electrically connected to the second substrate through the first conductor.

In an embodiment of the present invention, the above-mentioned liquid crystal display further includes a bonding wire and a circuit board. The bonding wire is arranged on the first conductor and electrically connected with the first conductor. The circuit board is electrically connected to the first pad through the bonding wire and the first conductor.

In an embodiment of the present invention, one of the plurality of through holes of the above-mentioned filling pattern has an aperture D, and 0.3 μm≦D≦10 μm.

In an embodiment of the present invention, the aforementioned first substrate is a silicon substrate.

In an embodiment of the present invention, the material of the aforementioned first conductor includes nickel.

In an embodiment of the present invention, the above-mentioned dielectric layer further has a second opening separated from the first opening. The liquid crystal display further includes a second pad and a second conductor. The second pad is disposed on the pad area of the first substrate and is separated from the first pad. The second opening of the dielectric layer overlaps with the second pad. The second conductor is disposed in the second opening of the dielectric layer. The second pad has a surface overlapping with the second opening of the dielectric layer, and the second conductor directly contacts and completely covers the surface of the second pad.

In an embodiment of the present invention, the area of the second pad is smaller than the area of the first pad.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

FIG. 1 is a schematic cross-sectional view of a liquid crystal display 10 according to an embodiment of the invention.

FIG. 2 is a schematic top view of the pixel array substrate 100 of FIG. 1.

3A to 3E are schematic cross-sectional views of the manufacturing process of the liquid crystal display 10 according to an embodiment of the invention. Figures 3A to 3E correspond to the section line Ι-Ι' and the section line П-П' of Figure 2.

The following describes the manufacturing process and structure of the liquid crystal display 10 according to an embodiment of the present invention with reference to FIGS. 1, 2 and FIGS. 3A to 3E.

Please refer to FIG. 1, FIG. 2 and FIG. 3A. First, a pixel array substrate 100 is provided. The pixel array substrate 100 includes a first substrate 110, a pixel array 120 and a plurality of pads 131 and 132. The first substrate 110 has a display area 110a and a pad area 110b located outside the display area 110a. The pixel array 120 is disposed on the display area 110 a of the first substrate 110. A plurality of pads 131 and 132 are disposed on the pad area 110b of the first substrate 110. In this embodiment, the plurality of pads 131 and 132 can be electrically connected to the pixel array 120 and/or other components of the pixel array substrate 100 in the display area 110a, but the invention is not limited thereto.

For example, in this embodiment, the first substrate 110 may be a silicon substrate, the pixel array 120 includes a plurality of pixels, and each pixel may include a transistor and a transistor formed on the silicon substrate. Is electrically connected to a reflective electrode of the transistor. In short, in this embodiment, the pixel array substrate 100 may be a silicon chip of a reflective liquid crystal on silicon panel, but the invention is not limited to this.

The pixel array substrate 100 further includes a dielectric layer 140. The dielectric layer 140 is at least disposed on the pad area 110 b of the first substrate 110 and has a plurality of openings 141 and 142. The openings 141 and 142 of the dielectric layer 140 overlap the pads 131 and 132 respectively.

For example, in this embodiment, the material of the dielectric layer 140 may be an inorganic material (for example: silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), organic material, or the above Combination; the material of the multiple pads 131, 132 can be metal or other conductive materials.

Please refer to FIG. 1, FIG. 2 and FIG. 3B. Next, a plurality of filling patterns 151 and 152 are formed on the first substrate 110. A plurality of filling patterns 151 and 152 are respectively disposed in the plurality of openings 141 and 142 of the dielectric layer 140. In particular, the filling pattern 151 has multiple through holes 151a, and the multiple through holes 151a of the filling pattern 151 overlap the pads 131; the filling pattern 152 has multiple through holes 152a, and the multiple through holes 152a of the filling pattern 152 and The pads 132 overlap.

For example, in this embodiment, an entire photoresist layer (not shown) can be formed on the dielectric layer 140 and the plurality of pads 131, 132; after that, the photoresist layer is processed A patterning process to form a plurality of filling patterns 151 and 152. In this embodiment, the material of the multiple filling patterns 151 and 152 may include photoresist, but the invention is not limited thereto.

In addition, in this embodiment, each of the plurality of through holes 151a, 152a of the filling patterns 151, 152 has an aperture D, and 0.3 µm≤D≤10 µm, but the invention is not limited thereto.

Please refer to FIGS. 1, 2 and 3C. Then, an alignment film 160 is formed to cover the pixel array 120, the dielectric layer 140, and the filling patterns 151, 152. The alignment film 160 is used to provide an anchoring force, so that the plurality of liquid crystal molecules in the liquid crystal layer 300 have a specified pre-tile angle when the liquid crystal display 10 is not enabled.

For example, in this embodiment, a spin coating method can be used to form the alignment film 160 on the dielectric layer 140 and the filling patterns 151 and 152, but the invention is not limited thereto.

It is worth mentioning that, in this embodiment, the alignment film 160 is formed after the filling patterns 151, 152 have been filled into the openings 141, 142 of the dielectric layer 140; through the filling of the filling patterns 151, 152, the dielectric The upper surface 140b of the layer 140 and the top surfaces 151b, 152b of the filling patterns 151, 152 will form a relatively flat surface, which helps prevent striation defects when the alignment film 160 is formed.

Please refer to FIG. 1, FIG. 2 and FIG. 3D. Next, a plurality of conductors 410, 420 are formed on the plurality of pads 131, 132. In this embodiment, the conductors 410 and 420 can be preliminarily fixed on the first substrate 110 through the glue 500. For example, in this embodiment, the conductors 410 and 420 are, for example, Ni Balls, and the colloid 500 is, for example, a sealant for encapsulating the liquid crystal layer 300, but the invention is not limited thereto.

Please refer to FIG. 1, FIG. 2 and FIG. 3E. Next, the conductors 410 and 420 are electrically connected to the pads 131 and 132. For example, in this embodiment, when the pixel array substrate 100 and the second substrate 200 are assembled, the second substrate 200 presses down the conductors 410 and 420 so that the conductors 410 and 420 are disposed on the dielectric layer. The openings 141 and 142 of 140 are electrically connected to the pads 131 and 132 through the through holes 151 a and 152 a of the filling patterns 151 and 152.

It is worth mentioning that since the filling patterns 151 and 152 have a plurality of through holes 151a and 152a, the conductors 410 and 420 can easily pass through the filling patterns 151 and 152 to be electrically connected to the pads 131 and 132. That is to say, while the filling patterns 151, 152 are provided in the openings 141, 142 to avoid striation defects, the filling patterns 151, 152 have a plurality of through holes 151a, 152a, so the filling patterns 151, 152 The arrangement does not easily affect the electrical connection between the conductors 410 and 420 and the pads 131 and 132.

In addition, in this embodiment, since the conductors 410, 420 are electrically connected to the pads 131, 132 through the multiple through holes 151a, 152a of the filling patterns 151, 152 after the alignment film 160 is formed, part of the alignment The film 160 may remain between the conductors 410 and 420 and the filling patterns 151 and 152, but the invention is not limited thereto.

The second substrate 200 is disposed opposite to the first substrate 110. For example, in this embodiment, the second substrate 200 may include a glass substrate and a transparent conductive layer disposed on the glass substrate, and the potential difference between the transparent conductive layer and the reflective electrode of the pixel array 120 may be used to drive The liquid crystal molecules in the liquid crystal layer 300 in turn enable the liquid crystal display 10 to display a screen. However, the present invention is not limited to this, and according to other embodiments, the second substrate 200 may also have other configurations.

In this embodiment, the conductors 410 and 420 can be used to electrically connect the second substrate 200 and the pads 131 and 132. In other words, in this embodiment, the pads 131 and 132 provided on the first substrate 110 can be electrically connected to the second substrate 200 through the conductors 410 and 420, but the invention is not limited thereto.

Please refer to FIG. 1, FIG. 2 and FIG. 3E. Next, in this embodiment, a vacuum injection method can be selectively used to fill the liquid crystal layer 300 into the pixel array substrate 100, the second substrate 200 and the gel 500. In the space. Then, the liquid crystal injection port (not shown) of the colloid 500 is sealed. At this point, the liquid crystal display 10 of this embodiment is completed.

Since the openings 141 and 142 of the dielectric layer 140 of the pixel array substrate 100 are provided with filling patterns 151 and 152, the liquid crystal display 10 is not prone to striation defects. More importantly, since the filling patterns 151, 152 have multiple through holes 151a, 152b, during the process of manufacturing the liquid crystal display 10, the conductors 410, 420 can be well electrically connected to the pads 131, 132, so that The liquid crystal display 10 has normal functions and excellent reliability.

In this embodiment, all the openings 141 and 142 of the dielectric layer 140 are provided with filling patterns 151 and 152. However, the present invention is not limited to this. According to other embodiments, if the opening of the part of the dielectric layer 140 (for example, the opening 142) is not large, and the opening of the part of the dielectric layer 140 is not easy to cause striation defects. , The filling pattern (for example, filling pattern 152) may not be provided in the opening of the part of the dielectric layer 140, which will be described below in conjunction with FIG. 4, FIG. 5, and FIG. 6.

It must be noted here that the following embodiments use the element numbers and part of the content of the foregoing embodiments, wherein the same numbers are used to represent the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted parts, refer to the foregoing embodiment, and the following embodiments will not be repeated.

4 is a schematic cross-sectional view of a liquid crystal display 10A according to another embodiment of the invention.

FIG. 5 is a schematic top view of the pixel array substrate 100A of FIG. 4.

6 is a schematic cross-sectional view of the liquid crystal display 10A corresponding to the section line Ι-Ι' and the section line П-П' of FIG.

4, 5 and 6, the liquid crystal display 10A of this embodiment is similar to the aforementioned liquid crystal display 10, the difference between the two is that in this embodiment, the opening of the dielectric layer 140 (for example: opening In 141), a filling pattern 151 is provided, and the opening of another part of the dielectric layer 140 (for example, the opening 142) may not be provided with a filling pattern.

Specifically, in this embodiment, the multiple pads 131 and 132 of the pixel array substrate 100A include a pad 131 with a larger area and another pad 132 with a smaller area. The opening 141 of the dielectric layer 140 overlapping the pad 131 with a larger area is larger, and the opening 142 of the dielectric layer 140 overlapping the pad 132 with a smaller area is smaller. The smaller opening 142 may not have a filling pattern. That is, in this embodiment, the pad 132 has a surface 132 a overlapping the opening 142, and the conductor 420 can directly contact and completely cover the surface 132 a of the pad 132.

FIG. 7 is a schematic cross-sectional view of a liquid crystal display 10B according to another embodiment of the invention. FIG. 8 is an enlarged schematic diagram of a part R of the liquid crystal display 10B of FIG. 7.

7 and 8, the liquid crystal display 10B of this embodiment is similar to the aforementioned liquid crystal display 10, and the differences between the two are described as follows.

In this embodiment, the pixel array substrate 100B further includes a pad 133 for wire bonding. The dielectric layer 140 also has an opening 143 overlapping the pad 133. The liquid crystal display 10B further includes a filling pattern 153 disposed in the opening 143 of the dielectric layer 140. The filling pattern 153 has a plurality of through holes 153 a, and the plurality of through holes 153 a of the filling pattern 153 overlap the pad 133. The liquid crystal display 10B further includes a conductor 700 disposed in the opening 143 of the dielectric layer 140 and electrically connected to the pad 133 through a plurality of through holes 153 a of the filling pattern 153. The liquid crystal display 10B further includes a bonding wire 710 disposed on the conductor 700 and electrically connected to the conductor 700. The liquid crystal display 10B further includes a circuit board 800. The contact 810 of a circuit of the circuit board 800 can be electrically connected to the contact pad 133 through the bonding wire 710 and the conductor 700. For example, in this embodiment, the circuit board 800 may be a flexible printed circuit (FPC), but the invention is not limited thereto.

In this embodiment, during the wire bonding process, the conductive ball (ie, the conductor 700) can pass through the multiple through holes 153a of the filling pattern 153 to be electrically connected to the pad 133, thereby making the liquid crystal The display 10B has normal functions and good reliability.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be determined by the scope of the attached patent application.

10, 10A, 10B: liquid crystal display 100, 100A, 100B: pixel array substrate 110: first substrate 110a: display area 110b: Pad area 120: pixel array 131, 132, 133: pad 132a: Surface 140: Dielectric layer 141, 142, 143: opening 151, 152, 153: fill pattern 151a, 152a, 153a: through hole 151b, 152b: top surface 160: Alignment film 200: second substrate 300: liquid crystal layer 410, 420: Conductor 500: colloid 700: Conductor 710: Conductor 800: circuit board 810: Contact D: Aperture R: partial Ι-Ι’, П-П’: Sectional line

FIG. 1 is a schematic cross-sectional view of a liquid crystal display 10 according to an embodiment of the invention. FIG. 2 is a schematic top view of the pixel array substrate 100 of FIG. 1. 3A to 3E are schematic cross-sectional views of the manufacturing process of the liquid crystal display 10 according to an embodiment of the invention. 4 is a schematic cross-sectional view of a liquid crystal display 10A according to another embodiment of the invention. FIG. 5 is a schematic top view of the pixel array substrate 100A of FIG. 4. 6 is a schematic cross-sectional view of the liquid crystal display 10A corresponding to the section line Ι-Ι' and the section line П-П' of FIG. 5. FIG. 7 is a schematic cross-sectional view of a liquid crystal display 10B according to another embodiment of the invention. FIG. 8 is an enlarged schematic diagram of a part R of the liquid crystal display 10B of FIG. 7.

10: LCD display

110: first substrate

131, 132: pads

140: Dielectric layer

141, 142: Opening

151, 152: Fill pattern

151a, 152a: through hole

160: Alignment film

200: second substrate

410, 420: Conductor

500: colloid

D: Aperture

I-I’, Π-Π’: cut line

Claims (10)

A liquid crystal display, including: A first substrate having a display area and a pad area located outside the display area; A pixel array arranged on the display area of the first substrate; A first pad disposed on the pad area of the first substrate; A dielectric layer disposed on the pad area of the first substrate and having a first opening, wherein the first opening of the dielectric layer overlaps the first pad; A filling pattern disposed in the first opening of the dielectric layer, wherein the filling pattern has a plurality of through holes, and the through holes of the filling pattern overlap the first pad; A first conductor disposed in the first opening of the dielectric layer and electrically connected to the first pad through the through holes of the filling pattern; A second substrate disposed opposite to the first substrate; and A liquid crystal layer is arranged between the pixel array and the second substrate. According to the liquid crystal display described in item 1 of the scope of patent application, the material of the filling pattern includes a photoresist. The liquid crystal display described in item 1 of the scope of patent application further includes: An alignment film is located between the first conductor and the filling pattern. According to the liquid crystal display described in claim 1, wherein the first pad is electrically connected to the second substrate through the first conductor. The liquid crystal display described in item 1 of the scope of patent application further includes: A bonding wire arranged on the first conductor and electrically connected to the first conductor; and A circuit board is electrically connected to the first pad through the bonding wire and the first conductor. According to the liquid crystal display described in item 1 of the scope of patent application, one of the through holes of the filling pattern has an aperture D, and 0.3 µm≤D≤10 µm. According to the liquid crystal display described in claim 1, wherein the first substrate is a silicon substrate. According to the liquid crystal display described in claim 1, wherein the material of the first conductor includes nickel. According to the liquid crystal display of claim 1, wherein the dielectric layer further has a second opening separated from the first opening, and the liquid crystal display further includes: A second pad disposed on the pad area of the first substrate and spaced apart from the first pad, wherein the second opening of the dielectric layer overlaps the second pad; and A second conductor disposed in the second opening of the dielectric layer, wherein the second pad has a surface overlapping with the second opening of the dielectric layer, and the second conductor directly contacts and completely Ground covers the surface of the second pad. According to the liquid crystal display described in claim 9, wherein the area of the second pad is smaller than the area of the first pad.

Images