TWI703232B - Tungsten product vapor deposition recovery method - Google Patents
Tungsten product vapor deposition recovery method Download PDFInfo
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- TWI703232B TWI703232B TW108124949A TW108124949A TWI703232B TW I703232 B TWI703232 B TW I703232B TW 108124949 A TW108124949 A TW 108124949A TW 108124949 A TW108124949 A TW 108124949A TW I703232 B TWI703232 B TW I703232B
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Abstract
一種鎢製品氣相沉積回收方法,其主要是透過氣相沉積對報廢鎢之製品來進行回收再生利用,其步驟主要包括:表面進行噴砂處理、進行拋光研磨、以去離子水洗淨、進行化學氣相沉積以及精密加工成型,在報廢鎢製品經過噴砂、拋光研磨與離子水洗淨後,乃是透過氣相沉積將修補報廢鎢製品之表面,最後再經過精密加工即可成為可再次使用之鎢製品。 A method for vapor deposition recovery of tungsten products, which mainly recycles waste tungsten products through vapor deposition. The steps mainly include: sandblasting the surface, polishing and grinding, washing with deionized water, and chemical Vapor deposition and precision processing and molding. After the waste tungsten products are sandblasted, polished and washed with ion water, the surface of the waste tungsten products will be repaired through vapor deposition, and finally they can be reused after precision processing. Tungsten products.
Description
本發明係有關於一種鎢製品氣相沉積回收方法,尤指一種透過氣相沉積來回收廢鎢製品之方法。 The invention relates to a method for recovering tungsten products by vapor deposition, especially a method for recovering waste tungsten products through vapor deposition.
在科技與工業高度且快速發展之情況下,許多貴重金屬之需求乃日趨擴大,但許多貴重金屬由於可採集之資源較少,因此,各國政府無不想盡辦法來研究如何能夠將回收貴重金屬之效率提升至最大,在多種貴重金屬中,尤其是「鎢」金屬在近年來使用需求急增,而目前所較常見使用之回收方式大致包括有:機械破碎法、硝石法、鋅熔法、電解法、浸出法、還原法以及焙燒氨浸法等等,然,上述該等回收方式除了在過程當中造成相當程度之環境汙染外,最高之回收率乃僅落在10%~30%之間,因此造成回收成品相當的昂貴,故,如何將上述缺失問題加以改進,乃為本案創作人所欲解決之技術困難點之所在。 With the rapid development of technology and industry, the demand for many precious metals is expanding day by day. However, many precious metals have fewer resources to collect. Therefore, governments around the world have endless ways to study how to recover precious metals. The efficiency has been increased to the maximum. Among a variety of precious metals, especially the "tungsten" metal, the demand for use has increased rapidly in recent years. The more common recycling methods currently used include: mechanical crushing, saltpeter, zinc melting, electrolysis Method, leaching method, reduction method, roasting ammonia leaching method, etc. However, the above-mentioned recovery methods cause considerable environmental pollution during the process, and the highest recovery rate is only between 10% and 30%. As a result, the recycling of finished products is quite expensive. Therefore, how to improve the above-mentioned shortcomings is the technical difficulty that the creators of this case want to solve.
本發明之主要目的在於:主要是透過氣相沉積對報廢鎢之製品來進行回收再生利用,其步驟主要包括:表面進行噴砂處理、進行拋光研磨、以去離子水洗淨、進行化學氣相沉積以及精密加工成型,在報廢鎢製品經過噴砂、拋光研磨與離子水洗淨後,乃是透過氣相沉積將修補報廢 鎢製品之表面,最後再經過精密加工即可成為可再次使用之鎢製品。 The main purpose of the present invention is to recycle waste tungsten products through vapor deposition. The steps include: sandblasting, polishing and grinding, washing with deionized water, and chemical vapor deposition. As well as precision processing and molding, after the waste tungsten products are sandblasted, polished and washed with ionized water, the surface of the waste tungsten products will be repaired through vapor deposition, and finally after precision processing, they can become reusable tungsten products.
S1‧‧‧表面進行噴砂處理 S1‧‧‧The surface is sandblasted
S2‧‧‧進行拋光研磨 S2‧‧‧For polishing and grinding
S3‧‧‧以去離子水洗淨 S3‧‧‧Rinse with deionized water
S4‧‧‧進行化學氣相沉積 S4‧‧‧Chemical vapor deposition
S5‧‧‧精密加工成型 S5‧‧‧Precision processing and forming
第1圖係為本發明之流程圖。 Figure 1 is a flowchart of the present invention.
第2圖係為本發明之噴塗報廢鎢製品表面示意圖。 Figure 2 is a schematic diagram of the surface of the sprayed waste tungsten product of the present invention.
第3圖係為本發明之氣相沉積原理示意圖。 Figure 3 is a schematic diagram of the vapor deposition principle of the present invention.
請同時參閱第1圖、第2圖與第3圖所示,係為本發明之流程圖、噴塗報廢鎢製品表面示意圖以及氣相沉積原理示意圖,由圖中可清楚看出,本發明乃是透過氣相沉積對報廢鎢之製品來進行回收再生利用,其步驟主要包括:(1)表面進行噴砂處理;(2)進行拋光研磨;(3)以去離子水洗淨;(4)進行化學氣相沉積;(5)精密加工成型;其中,化學氣相沉積乃是透過六氟化鎢(WF6)與氫氣(3H2)之氣體來進行,以修補報廢鎢製品之表面;其中,化學氣相沉積乃是在低於攝氏600°之環境條件下進行;其中,化學氣相沉積時乃將報廢鎢製品置於模具內並在反應室來進行;在進行化學氣相沉積之前,乃需先將已經報廢之鎢製品表面進行噴砂處理以及拋光研磨,再以去離子水洗淨該表面,並將經過上述程序後之報廢鎢製品放置於一模具內並在反應室來進行化學氣相沉積,最後並經過精密加工成型,以取得可再次使用之鎢製品;承上述,化學氣相沉積主要乃是透過六氟化鎢(WF6)與氫氣(3H2)之氣體來進行,使報廢鎢製品之表面由化學反應產生鎢原子(W)堆積生長,使鎢原子(W)慢慢的累積修補報廢鎢製品之表面,其中之所以應用氫氣(3H2),主要是氫氣(3H2)可讓六氟化鎢(WF6)還原出高純度與高密度之鎢原子(W);在進行化學氣相沉積之前之所以需進行噴砂處理以及拋光研磨,再以去離子水洗淨該表面,乃是由於廢鎢製品之前使用時乃會在表面沾染有灰塵、異物或不明液體,為了避免鎢原子(W)在表面堆積時會參雜其中,且造成表面之不均勻,因此需先進行上述該等處理程序;而如第3圖所示,當氫氣(3H2)讓六氟化鎢(WF6)還原出高純度與高密度之鎢原子(W)後,乃會堆積於廢鎢製品之表面,且在反應時所同時產生之氫氟酸(6HF)乃會揮發;而其中在進行化學氣相沉積時所產生之化學式原理乃如下:WF6(六氟化鎢)+3H2(氫)→W(鎢)+6HF(氫氟酸);如上述化學式即可得知,當六氟化鎢(WF6)在遇到氫氣(3H2)後,即會產生高純度與高密度之鎢原子(W)以及氫氟酸(6HF),並在鎢原子(W)於廢鎢製品之表面進行堆積時,其中之氫氟酸(6HF)乃會同時揮發;綜上所述,相較於習用透過機械破碎法、硝石法、鋅熔法、電解法、浸出法、還原法以及焙燒氨浸法等方式所存在有環境汙染與低回收率之缺失,本發明乃是透過化學氣相沉積之方式以修補廢鎢製品之表面,最後,再經過精密加工成型即可成為可再次使用之鎢製品,之所以透過化學氣相沉積來進行除了可得到高純度與高密度之鎢原子(W)外,最後所揮發之氫氟酸(6HF)相較於上述習用該等方式所產生之廢棄物更無環境汙染之堪慮,且由於在進行化學氣相沉積時乃是在一模具以及反應室內來進行,因此,更容易集中且回收所揮發之氫氟酸(6HF)。 Please refer to Figure 1, Figure 2 and Figure 3 at the same time, which are the flow chart of the present invention, the schematic diagram of the surface of the sprayed waste tungsten product and the schematic diagram of the vapor deposition principle. It can be clearly seen from the figure that the present invention is Recycling and recycling of scrap tungsten products through vapor deposition mainly includes: (1) sandblasting the surface; (2) polishing and grinding; (3) washing with deionized water; (4) chemical Vapor deposition; (5) Precision processing and molding; Among them, chemical vapor deposition is carried out through the gas of tungsten hexafluoride (WF6) and hydrogen (3H2) to repair the surface of waste tungsten products; among them, chemical vapor deposition The deposition is carried out under environmental conditions below 600°C; among them, the waste tungsten products are placed in the mold and carried out in the reaction chamber during chemical vapor deposition; before chemical vapor deposition, it is necessary to The surface of the discarded tungsten products is sandblasted and polished, and then the surface is cleaned with deionized water. The discarded tungsten products after the above procedures are placed in a mold and chemical vapor deposition is performed in the reaction chamber. Finally, And through precision processing and molding, to obtain reusable tungsten products; as mentioned above, chemical vapor deposition is mainly carried out through the gas of tungsten hexafluoride (WF6) and hydrogen (3H2), so that the surface of scrap tungsten products The chemical reaction produces tungsten atoms (W) to accumulate and grow, so that tungsten atoms (W) slowly accumulate to repair the surface of waste tungsten products. The reason why hydrogen (3H2) is used is mainly that hydrogen (3H2) can make tungsten hexafluoride ( WF6) reduces tungsten atoms (W) with high purity and high density; the reason why it is necessary to perform sandblasting and polishing before chemical vapor deposition, and then wash the surface with deionized water, is because the waste tungsten products When using, the surface will be contaminated with dust, foreign matter or unknown liquid. In order to avoid tungsten atoms (W) from being mixed on the surface and causing unevenness on the surface, the above-mentioned treatment procedures must be carried out first; and As shown in Figure 3, when hydrogen (3H2) reduces tungsten hexafluoride (WF6) to high-purity and high-density tungsten atoms (W), they will accumulate on the surface of waste tungsten products, and at the same time during the reaction The generated hydrofluoric acid (6HF) will volatilize; and the chemical formula generated during chemical vapor deposition is as follows: WF 6 (tungsten hexafluoride) + 3H2 (hydrogen) → W (tungsten) + 6HF( Hydrofluoric acid); as shown in the above chemical formula, when tungsten hexafluoride (WF6) encounters hydrogen (3H2), it will produce high-purity and high-density tungsten atoms (W) and hydrofluoric acid (6HF) ), and when tungsten atoms (W) accumulate on the surface of waste tungsten products, the hydrofluoric acid (6HF) will volatilize at the same time; in summary, compared with the conventional mechanical crushing method, saltpeter method, zinc The melting method, electrolysis method, leaching method, reduction method and roasting ammonia leaching method have the disadvantages of environmental pollution and low recovery rate. The present invention uses chemical vapor deposition to repair the surface of waste tungsten products, and finally , After precision processing and forming, it can become a reusable tungsten product. By chemical vapor deposition, in addition to obtaining high-purity and high-density tungsten atoms (W), the final volatilized hydrofluoric acid (6HF) is more environmentally friendly than the waste generated by the above-mentioned conventional methods Pollution is a concern, and because chemical vapor deposition is performed in a mold and a reaction chamber, it is easier to concentrate and recover the volatilized hydrofluoric acid (6HF).
上述所列舉的實施例係用以闡明本發明之一較佳可行實施例,並非用以限定本發明之範圍,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可做些許更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 The above-mentioned embodiments are used to illustrate one of the preferred and feasible embodiments of the present invention, and are not used to limit the scope of the present invention. Anyone who is familiar with the art can do a little bit without departing from the spirit and scope of the present invention. Modifications and modifications, therefore, the scope of protection of the present invention shall be subject to the scope of the attached patent application.
S1‧‧‧表面進行噴砂處理 S1‧‧‧The surface is sandblasted
S2‧‧‧進行拋光研磨 S2‧‧‧For polishing and grinding
S3‧‧‧以去離子水洗淨 S3‧‧‧Rinse with deionized water
S4‧‧‧進行化學氣相沉積 S4‧‧‧Chemical vapor deposition
S5‧‧‧精密加工成型 S5‧‧‧Precision processing and forming
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