TWI698614B - Superheated steam generating device and processing method using the same - Google Patents

Abstract

A superheated steam generating device includes a steam generating part, a superheated steam generating part, a steam supply flow channel and a gas supply flow channel. The water vapor generation unit heats water into water vapor by induction or electric heating. The superheated steam generating part heats the water vapor into superheated steam by induction or electric heating. The water vapor supply flow path supplies the water vapor generated by the water vapor generation unit to the superheated steam generation unit. The gas supply flow path supplies other gases to the superheated steam generating part. Wherein, the superheated steam generating device can be switched to a first state or a second state. The first state is a state in which steam is supplied to the superheated steam generating unit. The second state is a state in which other gases are supplied to the superheated steam generating part and the superheated steam generating part functions as a gas heating part.

Description

Superheated steam generating device and processing method using it

The present invention relates to a superheated steam generator and a treatment method using the same, in particular to a superheated steam generator that generates superheated steam from water and a treatment method using the superheated steam generator.

In recent years, research has been conducted on superheated steam treatment devices that use superheated steam to clean, dry, or sterilize objects to be treated.

As shown in Patent Document 1, the superheated steam treatment device includes a superheated steam generating part and a treatment furnace. The superheated steam generating part is used to generate superheated steam, and the treatment furnace is supplied with the superheated steam generated by the superheated steam generating part to clean, dry or sterilize the processed objects contained in the treatment furnace.

However, for example, when the pressure in the processing furnace is 1 atm and the initial temperature of the processed object is lower than 100°C, the superheated steam will liquefy and cause the object to be processed before the temperature of the processed object rises above 100°C. Condensation occurs on the surface. Condensation on the processed object is not good, and this situation is not desired.

Patent Document 1: Japanese Patent Application Publication No. 2007-231367.

The present invention is to provide a superheated steam generating device and a treatment method using the same, so as to solve the problem that in the prior art, when the superheated steam is used to treat the object to be treated, the superheated steam will It liquefies and causes condensation on the processed objects.

The superheated steam generating device disclosed in an embodiment of the present invention includes a water vapor generating part, a superheated steam generating part, a water vapor supply flow path and a gas supply flow path. The steam generating part heats water into a steam by induction heating or energization heating. The superheated steam generating part heats the water vapor into a superheated steam by an induction heating method or an electric heating method. The water vapor supply flow path supplies the water vapor generated by the water vapor generation unit to the superheated steam generation unit. The gas supply flow channel supplies a gas other than water vapor to the superheated steam generating part. Among them, the superheated steam generating device can be switched to a first state or a second state. The first state is a state in which steam is supplied to the superheated steam generating unit. The second state is a state in which other gases are supplied to the superheated steam generating part and the superheated steam generating part functions as a gas heating part.

The processing method disclosed in an embodiment of the present invention uses a superheated steam generator as described above to process a processed object. Among them, the processing method includes a pre-process and a post-process. The previous step is to supply and heat other gases to the superheated steam generating part, and heat the object to be processed through the heated other gases. The post process is carried out after the previous process, and the superheated steam generation part is supplied with water vapor, and the water vapor is heated to generate superheated steam, and the processed object heated in the previous process is processed through the superheated steam.

According to the superheated steam generator disclosed in the above embodiment and the treatment method using the same, by using the heated other gas to heat the treatment object before using the superheated steam to treat the treatment object, it is possible to Prevent the superheated water vapor from liquefying and causing condensation on the processed objects.

The above description of the content of the present invention and the description of the following embodiments are used to demonstrate and explain the principle of the present invention and provide a further explanation of the scope of the patent application of the present invention.

Please refer to Figure 1 and Figure 2. Fig. 1 is a diagram schematically showing the structure of the superheated steam generator described in this embodiment. Figure 2 is a schematic diagram showing an example of the hollow conductor tube described in the same implementation.

The superheated steam generating device 100 of this embodiment is a device that generates superheated steam by heating water. In addition to the superheated steam generating function, it also has a gas heating and superheating function that heats other gases different from water vapor. . Among them, the other gas may be air, oxygen, nitrogen, argon, etc., and as long as it is a gas other than water vapor, various gases can be considered depending on the application.

The superheated steam generating device 100 includes a steam generating part 2 (hereinafter referred to as saturated steam generating part 2), a superheated steam generating part 3, and a steam supply flow path L2 (hereinafter referred to as saturated steam supply flow path) L2) and a gas supply flow path L3. The saturated steam generator 2 is for heating water to generate saturated steam. The superheated steam generator 3 is for heating saturated steam to generate superheated steam. The saturated water vapor supply flow path L2 is used to supply the saturated water vapor generated by the saturated water vapor generating section 2 to the superheated steam generating section 3; the gas supply flow path L3 is used to supply saturated water to the superheated vapor generating section 3 Other gases with different vapors.

The saturated steam generating unit 2 has a water inlet 21 for introducing water and a saturated steam outlet 22 for guiding out saturated steam. In addition, a water supply flow path L1 for supplying water from the container shown in the figure to the saturated steam generating part 2 is connected to the water inlet 21. Among them, the saturated steam generating unit 2 may heat water by an induction heating method or an electric heating method.

The saturated steam generating part 2 by induction heating may include a first hollow conductor tube 2T (as shown in FIG. 2), an induction coil (not shown), and an AC power supply (not shown). The first hollow conductor tube 2T may be spirally surrounded and have a water inlet 21 and a saturated water vapor outlet 22. The induction coil can be arranged inside or outside the first hollow conductor tube 2T to inductively heat the first hollow conductor tube 2T. The AC power supply applies an AC voltage to the induction coil, and by applying an AC voltage to the induction coil, an induced current flows in the first hollow conductor tube 2T, thereby generating Joule heat, thereby changing the water introduced into the first hollow conductor tube 2T State and become saturated steam. In addition, the spiral feature of the first hollow conductor tube 2T does not limit the present invention. In other embodiments, it may be a straight tube.

In addition, the saturated steam generating part 2 in the energized heating mode may include a first hollow conductor tube 2T and a DC power supply or an AC power supply (not shown). The first hollow conductor tube 2T may be spirally surrounded and have a water inlet 21 and a saturated water vapor outlet 22. A DC power supply or an AC power supply applies a voltage to the first hollow conductor tube 2T, and by causing a current to flow through the first hollow conductor tube 2T, Joule heat is generated, thereby changing the state of the water introduced into the first hollow conductor tube 2T. Saturated water vapor. In addition, in the case of the electric heating mode, the spiral feature of the first hollow conductor tube 2T does not limit the present invention. In other embodiments, it may be a straight tube.

When the saturated steam generating unit 2 is heated by the above-mentioned induction heating or energization heating method, it detects the temperature of the saturated steam derived from the saturated steam outlet 22 of the first hollow conductor tube 2T, and responds to the voltage applied to the induction coil , The voltage applied to the first hollow conductor tube 2T or the current flowing through the first hollow conductor tube 2T is feedback controlled, thereby controlling the temperature of the saturated water vapor derived from the saturated water vapor outlet 22 of the first hollow conductor tube 2T . In addition, the temperature detection of saturated water vapor may be a method of directly detecting the temperature of saturated water vapor, or a method of detecting the temperature of saturated water vapor indirectly by detecting the temperature of the first hollow conductor tube 2T.

The superheated steam generating unit 3 has a saturated steam inlet 31 for introducing saturated steam and a superheated steam outlet 32 for leading out the superheated steam. The heating method of the superheated steam generating unit 3 and the saturated steam generating unit 2 are the same, for example, the saturated steam may be heated by an induction heating method or an electric heating method.

The superheated steam generating part 3 by induction heating may include a second hollow conductor tube 3T (as shown in FIG. 2), an induction coil (not shown), and an AC power supply (not shown). The second hollow conductor tube 3T may be spirally surrounded and have a saturated steam inlet 31 and a superheated steam outlet 32. The induction coil can be arranged inside or outside the second hollow conductor tube 3T to inductively heat the second hollow conductor tube 3T. The AC power supply applies an AC voltage to the induction coil, and by applying an AC voltage to the induction coil, the induced current flows through the second hollow conductor tube 3T, thereby generating Joule heat, thereby causing the saturated water vapor introduced into the second hollow conductor tube 3T Change the state and become superheated steam. In addition, the spiral feature of the second hollow conductor tube 3T does not limit the present invention. In other embodiments, it may be a straight tube.

In addition, the superheated steam generating part 3 in the energized heating mode may include a second hollow conductor tube 3T and a DC power supply or an AC power supply (not shown). The second hollow conductor tube 3T may be spirally surrounded and have a saturated steam inlet 31 and a superheated steam outlet 32. A DC power supply or an AC power supply applies a voltage to the second hollow conductor tube 3T, and by causing a current to flow through the second hollow conductor tube 3T, Joule heat is generated, so that the saturated water vapor introduced into the second hollow conductor tube 3T Change the state and become superheated steam. Either way, the superheated water derived from the superheated steam outlet 32 of the second hollow conductor tube 3T is controlled by controlling the voltage applied to the second hollow conductor tube 3T or the current flowing through the second hollow conductor tube 3T The temperature of the vapor. In addition, in the case of the electric heating mode, the spiral feature of the first hollow conductor tube 2T does not limit the present invention. In other embodiments, it may be a straight tube.

When the superheated steam generating unit 3 is heated by the above-mentioned induction heating or energization heating method, it detects the temperature of the superheated steam derived from the superheated steam outlet 32 of the second hollow conductor tube 3T of the hollow conductor tube and applies it to the induction heating The voltage of the coil, the voltage applied to the second hollow conductor tube 3T, or the current flowing through the second hollow conductor tube 3T are feedback controlled, thereby controlling the superheated water derived from the superheated steam outlet 32 of the second hollow conductor tube 3T The temperature of the vapor. In addition, the temperature detection of the superheated steam may be a method of directly detecting the temperature of the superheated steam or a method of detecting the temperature of the superheated steam indirectly by detecting the temperature of the second hollow conductor tube 3T.

In addition, in the case of the induction heating method, if the applied AC voltage frequency is 50Hz or 60Hz commercial frequency, the current penetration is deep, so it penetrates the outer surface of the first hollow conductor tube 2T and the second hollow conductor tube 3T. The temperature detection can obtain the same value as the temperature detection of the inner surface, so even indirect detection can perform high-precision vapor temperature detection.

In this embodiment, as shown in FIGS. 3A, 3B, and 4, the central part of the first induction coil 2C of the saturated water vapor generating part 2 and the second induction coil 3C of the superheated steam generating part 3 are respectively provided The first iron core 101 and the second iron core 102 for the magnetic circuit. Thereby, by efficiently circulating the magnetic flux generated by the first induction coil 2C and the second induction coil 3C, the magnetic flux is efficiently introduced into the first hollow conductor tube 2T and the second hollow conductor tube 3T. In addition, in addition to the first iron core 101 of the saturated steam generator 2 and the second iron core 102 of the superheated steam generator 3, a common iron core 103 is also provided, which is the first iron core 101 and the second iron core. The common path of the magnetic flux generated by the core 102. The first connecting iron core 104 and the second connecting iron core 105 are connected to the upper and lower sides of the common iron core 103, the first iron core 101 and the second iron core 102, respectively. With the above configuration, the size of the entire iron core can be reduced, and further miniaturization of the entire device can be achieved. In addition, as shown in the top view in FIGS. 3A and 4, each core is arranged so as to be located at the apex of the triangle. The first connecting iron core 104 and the second connecting iron core 105 are bent with the common iron core 103 as a bending point when viewed from above. Thereby, the distance between the two first iron core 101 and the second iron core 102 for the magnetic circuit can be reduced, and the size of the entire iron core in the width direction can be reduced, thereby achieving space saving.

In addition, the first induction coil 2C of the saturated steam generating unit 2 and the second induction coil 3C of the superheated steam generating unit 3 are Scottish connections (as shown in FIG. 5). That is, the saturated steam generating unit 2 and the superheated steam generating unit 3 are constructed using a Scottrade connection transformer composed of a main transformer and a secondary transformer (Teaser transformer).

With the output of the main transformer, the first hollow conductor tube 2T (the first heating metal piece) of the saturated water vapor generating portion 2 is subjected to induction heating or energization heating. The output of the sub-transformer performs induction heating or energization heating on the second hollow conductor tube 3T (second heating metal member) of the superheated steam generating section 3.

In addition, a first controller 81 is provided on one of the two phases on the input side of the main transformer (the V phase of the three-phase AC power supply 10 in FIG. 5), and the first controller 81 controls voltage or current. A second controller 82 is provided on one end of the primary coil (second induction coil 3C) of the secondary transformer as the input side (the U-phase of the three-phase AC power supply 10 in FIG. 5). The second controller 82 controls the voltage or Current. Here, the first controller 81 and the second controller 82 are configured using semiconductor control elements such as thyristors. In addition, the output voltage of the main transformer and the output voltage of the auxiliary transformer are independently controlled by the first controller 81 and the second controller 82, respectively.

One end of the saturated steam supply flow path L2 is connected to the saturated steam outlet 22 of the saturated steam generator 2 and the other end is connected to the saturated steam inlet 31 of the superheated steam generator 3. Among them, the saturated steam supply flow path L2 is constituted by, for example, a connecting pipe. In addition, it is also possible to integrate the first hollow conductor tube 2T or the second hollow conductor tube 3T as a connecting tube, and to connect the saturated water vapor conductor of the saturated water vapor generator 2 through, for example, an insulating joint. The outlet 22 and the saturated steam inlet 31 of the superheated steam generator 3.

In addition, a water vapor flow rate adjustment unit 4 (hereinafter referred to as saturated water vapor flow rate adjustment unit 4) is provided on the saturated water vapor supply flow path L2 to adjust the flow rate of saturated water vapor supplied to the superheated steam generation unit 3. The saturated water vapor flow regulating part 4 of this embodiment is a first flow regulating valve 4 as an example, but it does not limit the invention. In addition, the control device 7 described later inputs a control signal to the first flow regulating valve 4 to control its valve opening. In addition, a flow meter may be provided on the saturated steam supply flow path L2.

One end of the gas supply flow path L3 is connected to the supply source of other gases, and the other end is connected to the downstream side (the superheated steam generation part 3 side) of the first flow control valve 4 on the saturated steam supply flow path L2 or superheated steam generation部3连接。 3 connection. In the case where the gas supply flow path L3 is connected to the saturated steam supply flow path L2, a gas introduction port is formed in the connection pipe constituting the gas supply flow path L3. In addition, when the gas supply flow path L3 is connected to the superheated steam generating part 3 (as shown in FIG. 1 ), a gas inlet 33 (not shown in FIG. 2) is formed on the superheated steam generating part 3. In addition, when the gas introduction port 33 is formed in the superheated water vapor generation part 3, the gas introduction port 33 is formed on the upstream side of the second hollow conductor tube 3T (saturated water vapor introduction port 31 side) in consideration of the heating efficiency of other gases .

In addition, a gas flow rate adjustment unit 5 is provided in the gas supply flow path L3, and the gas flow rate adjustment unit 5 adjusts the flow rate of other gas supplied to the superheated steam generating unit 3. The gas flow regulating part 5 of this embodiment is a second flow regulating valve 5 as an example, but it does not limit the invention. In addition, a control signal is input to the second flow control valve 5 from the control device 7 described later to control its valve opening. In addition, a flow meter can also be provided on the gas supply flow path L3.

In addition, in this embodiment, the superheated steam generated by the superheated steam generating unit 3 or other heated gas is supplied to the processing unit 6, and the processing unit 6 processes the object W to be processed.

The processing section 6 heats the processed object W through superheated steam or other gases (for example, cleaning, drying, firing, or sterilization). The processing section 6 has a processed object storage portion 61, a superheated vapor inlet 62, and Condensate discharge port 63 and a discharge port 64. The to-be-processed object accommodating part 61 accommodates the to-be-processed object W, and forms a closed space or a close-closed space. The superheated steam introduction port 62 is provided in the to-be-processed object storage part 61, and is used for introducing superheated steam. The condensed water discharge port 63 is used to discharge the condensed water generated in the object storage portion 61. The exhaust port 64 exhausts the used water vapor or other gas that has passed through the to-be-processed object storage portion 61. The superheated steam inlet 62 of the processing unit 6 is connected to the superheated steam outlet 32 of the superheated steam generating unit 3 through the superheated steam supply flow path L4. In addition, an on-off valve is provided in the flow path connected to the condensed water discharge port 63 and the discharge port 64.

The superheated steam generating device 100 is configured to be switchable to a first state, a second state, and a third state. The first state is a state in which only saturated steam is supplied to the superheated steam generating unit 3. The second state is a state in which only other gases are supplied to the superheated steam generating unit 3 and the superheated steam generating unit 3 functions as a gas heating unit. The third state is a state in which both saturated steam and other gases are supplied to the superheated steam generating unit 3, and the superheated steam generating unit 3 functions as a mixed gas heating unit.

Here, by controlling the saturated steam generating unit 2, the superheated steam generating unit 3, the first flow regulating valve 4, and the second flow regulating valve 5 by the control device 7, the superheated steam generating device 100 can be switched to the first state and the second state. Either the second state or the third state.

The control device 7 is a device physically equipped with a central processing unit, a memory, an analog-to-digital converter, a digital-to-analog converter, etc. As shown in FIG. 6, functionally, the control device 7 has a first heating temperature control unit 71 , A second heating temperature control unit 72, a first flow regulating valve control unit 73, a second flow regulating valve control unit 74, and a processing object temperature obtaining unit 75. The first heating temperature control unit 71 controls the heating temperature of the saturated steam generating unit 2 (hereinafter referred to as the first heating temperature). The second heating temperature control unit 72 controls the heating temperature of the superheated steam generating unit 3 (hereinafter referred to as the second heating temperature). The first flow rate adjustment valve control unit 73 controls the first flow rate adjustment valve 4. The second flow adjustment valve control unit 74 controls the second flow adjustment valve 5. The processing object temperature obtaining unit 75 is used to obtain the temperature of the processing object W accommodated in the processing unit 6 or the temperature in the processing unit 6. In addition, the control device 7 is connected to the saturated steam generating part 2 and the superheated steam generating part 3 and other parts. However, in FIG. 1, the description of the connection is omitted.

Hereinafter, the operation of the superheated steam generating device 100 of this embodiment will be described with reference to FIG. 7 as an explanation of each part.

First, if the user activates the superheated steam generating device 100 to operate, for example, a water supply pump is used to supply the saturated steam generating part 2 with water in a container not shown.

At this time, the first heating temperature control unit 71 controls the first heating temperature so that the saturated water vapor generated by the saturated water vapor generation unit 2 becomes a predetermined temperature. In this embodiment, the first hollow of the saturated water vapor generation unit 2 The temperature of the conductor tube 2T is set as the first heating temperature.

Specifically, the first heating temperature control unit 71 obtains a measurement value from the first hollow conductor tube 2T or the first temperature sensor T1 of the saturated water vapor supply flow path L2 provided in the saturated water vapor generation unit 2, and according to the The measured value controls the magnitude of the AC voltage applied to the first induction coil 2C of the saturated water vapor generating unit 2, and controls the first heating temperature to, for example, 100 to 140°C.

In addition, in order to make the measured value closer to the real saturated water vapor temperature, the first temperature sensor T1 can be arranged on the downstream side of the first hollow conductor tube 2T of the saturated water vapor generating part 2, the saturated water vapor outlet 22 or the saturated water vapor Near the steam outlet 22.

In addition, when the saturated steam generating unit 2 is generating saturated steam, the first flow regulating valve control unit 73 controls the first flow regulating valve 4 to a state where the valve opening degree is zero, that is, the first flow regulating valve 4 The control is closed. Thereby, the superheated steam generating device 100 is in a state where the saturated water vapor generating unit 2 generates saturated water vapor, and enters a standby state in which the supply of saturated water vapor is stopped.

In the standby state, the second flow rate adjustment valve control unit 74 opens the second flow rate adjustment valve 5 to supply other gas from the gas supply flow path L3 to the superheated steam generation unit 3.

At this time, the second heating temperature control unit 72 controls the second heating temperature so that the other gas heated by the superheated steam generating unit 3 becomes a predetermined temperature. In this embodiment, the second hollow conductor of the superheated steam generating unit 3 The temperature of the tube 3T is set as the second heating temperature.

Specifically, the second heating temperature control unit 72 obtains the measured value from the second hollow conductor tube 3T provided in the superheated steam generating unit 3 or the second temperature sensor T2 of the superheated steam supply flow path L4, and according to this The measured value controls the magnitude of the AC voltage applied to the second induction coil 3C of the superheated steam generating unit 3, and controls the second heating temperature to, for example, 100°C or higher.

In addition, the second heating temperature when heating other gases may be a temperature that can heat the object W so as not to cause condensation on the object W when superheated steam is supplied. In addition, in order to make the measured value closer to the real superheated steam temperature, the second temperature sensor T2 can be arranged on the downstream side of the second hollow conductor tube 3T of the superheated steam generating part 3, the superheated steam outlet 32 or the superheated steam. Near the steam outlet 32.

As a result, the first flow control valve 4 is in the closed state, the second flow control valve 5 is in the open state, and the superheated steam generator 100 becomes the second superheated steam generator 3 that functions as a gas heating part for heating other gases. status. In the second state, a pre-process of heating (preheating) the to-be-processed object W accommodated in the processing section 6 is performed.

The processing object temperature obtaining unit 75 of the control device 7 obtains a measurement value from the third temperature sensor T3 that measures the temperature of the processing object W accommodated in the processing unit 6 or the temperature in the processing unit 6. In addition, the processing object temperature obtaining unit 75 determines whether the measurement value from the third temperature sensor T3 has reached a predetermined temperature (a temperature at which condensation does not occur on the processing object W when superheated steam is supplied).

When it is determined by the processing object temperature obtaining unit 75 that the measured value from the third temperature sensor T3 is higher than the predetermined temperature, the second flow regulating valve control unit 74 controls the second flow regulating valve 5 to be closed, and the first flow The regulating valve control unit 73 opens the first flow regulating valve 4 to supply saturated steam from the saturated steam supply flow path L2 to the superheated steam generating unit 3.

In addition, the first flow regulating valve control unit 73 and the second flow regulating valve control unit 74 can also be distinguished from the judgment of the processed object temperature obtaining unit 75, and switch between the first flow regulating valve 4 and the first flow regulating valve 4 based on the switching signal input from the user. The opening and closing of the second flow control valve 5. In addition, the first flow control valve control unit 73 and the second flow control valve control unit 74 may obtain a predetermined time elapsed signal indicating that a predetermined time has elapsed since becoming the second state, and switch the first flow control valve. 4 and the opening and closing of the second flow control valve 5.

At this time, the second heating temperature control unit 72 obtains the measurement value from the second hollow conductor tube 3T provided in the superheated steam generating unit 3 or the second temperature sensor T2 of the superheated steam supply flow path L4, and according to the measurement Value, the second heating temperature is controlled so that the superheated steam generated by the superheated steam generating unit 3 becomes a predetermined temperature. Specifically, the second heating temperature is controlled to the set temperature of the superheated steam generated by the superheated steam generating unit 3 or the temperature before and after the set temperature, and here is controlled to, for example, 200 to 1200°C.

Thereby, the first flow control valve 4 is in the open state, the second flow control valve 5 is in the closed state, and the superheated steam generator 100 is in the first state in which the superheated steam generator 3 generates superheated steam. In the first state, a post process is performed, which is a heat treatment (for example, washing, drying, firing, or sterilization) of the to-be-processed object W accommodated in the processing section 6.

In addition, when switching from the second state (standby state) as the gas supply state to the first state as the saturated water vapor supply state, as shown in FIG. 7, the first flow regulating valve control unit 73 controls to make The first flow control valve 4 is gradually opened and its valve opening degree gradually increases from zero to a predetermined opening degree. Thus, from the switching time point when the standby state is switched to the saturated steam supply state to before the valve opening of the first flow control valve 4 reaches the predetermined opening, it is the initial operation in which the saturated steam supply gradually increases. From the point of time when the opening degree reaches the prescribed opening degree, it is a stable operation with a certain amount of saturated steam supply. In addition, post-processes are performed within the prescribed processing time.

The operation at the end of the post process will be described below.

The superheated steam generator 100 of the present embodiment stops supplying the superheated steam to the superheated steam generator 3 after a predetermined time has elapsed since the automatic or manual operation for switching from the saturated steam supply state to the standby state is performed Saturated water vapor. In addition, at the point in time when an operation for switching from the saturated steam supply state to the standby state is performed, the supply of electric power to the induction coil of the superheated steam generating unit 3 is stopped.

Here, the so-called operation for switching from the saturated water vapor supply state to the standby state is, for example, the user inputs a switching signal from the outside using an input device or the like, or the output of a timer indicates that the saturated water vapor supply state has passed a predetermined time. Time elapsed signal, etc.

In more detail, in this embodiment, if an operation for switching from the saturated water vapor supply state to the standby state is performed, the first flow regulating valve control unit 73 obtains, for example, a switching signal or the predetermined time elapsed signal. The first flow regulating valve 4 is kept open for a predetermined time from the time point when the signal is obtained. Within a predetermined period of time, saturated steam is supplied from the saturated steam generating unit 2 to the superheated steam generating unit 3. Thereby, the superheated steam generating part 3 that has become high temperature at the end of the subsequent process is cooled by the saturated steam. Thereby, the superheated steam generating unit 3 is cooled to the set temperature in the standby state, and the damage of the superheated steam generating device 100 and the like can be prevented.

As described above, the to-be-processed object W that has been heat-treated through the pre-process and post-process is taken out from the processing unit 6. In addition, after the unprocessed to-be-processed object W is accommodated in the processing part 6, the pre-process and post-process are performed similarly to the said description.

In addition, in the superheated steam generator 100 of this embodiment, in the subsequent process, the first flow regulating valve 4 is opened by the first flow regulating valve control unit 73, and the second flow regulating valve control unit 74 The flow control valve 5 is in an open state, thereby simultaneously supplying saturated steam and other gases to the superheated steam generating part 3. At this time, by adjusting the flow rates of saturated steam and other gases supplied to the superheated steam generating unit 3, the mixing ratio of the mixed gas composed of the superheated steam and other gases can be adjusted.

In the subsequent process, by simultaneously supplying saturated steam and other gases to the superheated steam generating section 3, it is possible to perform other treatment methods different from the treatment method using superheated steam. For example, when the other gas is air or nitrogen, oxidation treatment or nitridation treatment of the object W can be performed. In addition, by adjusting the mixing ratio, it is possible to control the degree of oxidation or nitridation of the workpiece W.

According to the above-mentioned superheated steam generating device 100, in the first state, the superheated steam generating part 3 generates superheated steam, and in the second state, the superheated steam generating part 3 functions as a gas heating part. The other gas is heated, so before the object W is treated with the superheated steam, the object W is heated with the heated other gas to prevent the superheated steam from liquefying and condensation on the object W. In addition, since the superheated steam generating unit 3 functions as a gas heating unit, no additional heating device is required to heat the object W, which can simplify the structure of the system for preventing condensation on the object W, and can Miniaturize the system.

In addition, the present invention is not limited to the embodiments.

For example, in the above-mentioned embodiment, the method of turning the first flow regulating valve 4 into the second state by closing the first flow regulating valve control unit 73 to the second state can be changed to stop the first heating temperature control unit 71 from reaching saturation. The induction coil of the water vapor generation unit 2 is supplied with electric power and enters the second state. At this time, the first flow control valve 4 may be in a closed state or an open state. However, if the first flow control valve 4 is in a closed state, other gases can be prevented from flowing back into the saturated steam generating part 2.

In addition, in the above-described embodiment, the superheated steam generating unit 3 receives the saturated water vapor generated by the saturated water vapor generating unit 2 provided in the front stage. However, in other embodiments, the saturated steam generating part 2 may further heat the saturated steam to generate superheated steam. Therefore, the superheated steam generating part 3 may also receive the superheated steam and respond to the received superheated steam. It is further heated to generate superheated steam of a required temperature to be supplied to the superheated steam utilization part.

In addition, in other embodiments, the superheated steam generating device 100 may also have a return flow path for returning the steam or other gas used by the treatment part 6 to the superheated steam generating part 3. One end of the return flow path is connected to the processing section 6 (for example, the discharge port of the to-be-processed object storage section), and the other end is connected to the downstream side of the flow control valve of the saturated steam supply flow path L2 (the superheated steam generating section 3 side), and the gas The supply flow path L3 or the superheated steam generator 3 is connected. In this way, by reusing the used water vapor or other gases, it is possible to suppress heat loss.

Moreover, as shown in FIG. 8, the superheated steam generating device 100 may also include a switching mechanism 9 for switching between the first connection state and the second connection state. The first connection state is a state where the primary coil (first induction coil 2C) of the main transformer and the primary coil (second induction coil 3C) of the sub-transformer are connected by Scottrade. The second connection state is a state where the first induction coil 2C and the second induction coil 3C are respectively used as independent circuits.

The first connection state is the history of connecting the midpoint terminal 2M connected to the midpoint O of the primary coil (first induction coil 2C) of the main transformer and one end side terminal 3E of the primary coil (second induction coil 3C) of the sub-transformer Court wiring status. On the other hand, the second connection state is to cancel the Scottrade wiring, and connect the terminals on both sides of the primary coil (second induction coil 3C) of the secondary transformer of the second controller 82 to the three-phase AC power supply 10 (in Fig. 8 U-phase and V-phase) connection status. In addition, in the second connection state, the terminals on both sides of the primary coil (first induction coil 2C) of the main transformer remain connected to the V-phase and W-phase of the three-phase AC power supply 10.

Among them, the switching mechanism 9 may be composed of an electromagnetic contactor or a semiconductor switching element, and controlled by the control device 7. In addition, the second controller 82 has a constant current control function of controlling the current flowing through the primary coil (second induction coil 3C) of the sub transformer to a certain value or less.

In the case of the first state of generating superheated steam and the third state of heating the mixed gas of superheated steam and other gases, the switching mechanism 9 is switched to the first connection state (Scott wiring state). On the other hand, in the second state where only other gases are heated, the switching mechanism 9 is switched to the second connection state (the sub-transformer side circuit and the main transformer side circuit are independent circuit states). In addition, in the second connection state, on the one hand, the second controller 82 controls the current flowing through the second induction coil 3C and heats other gases for operation; on the other hand, the first controller 81 controls the flow through the first induction coil 2C. The current can keep the saturated steam generating part 2 warm and standby.

According to the superheated steam generator disclosed in the above embodiment and the treatment method using the same, by using the heated other gas to heat the treatment object before using the superheated steam to treat the treatment object, it is possible to Prevent the superheated water vapor from liquefying and causing condensation on the processed objects.

Although the present invention is disclosed in the foregoing preferred embodiments as above, it is not intended to limit the present invention. Anyone who is familiar with similar skills can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of patent protection for inventions shall be determined by the scope of patent applications attached to this specification.

10‧‧‧Three-phase AC power supply 100‧‧‧Superheated steam generator 101‧‧‧First iron core 102‧‧‧Second iron core 103‧‧‧Common iron core 104‧‧‧First connecting iron core 105 ‧‧‧Second connecting iron core 2‧‧‧Saturated water vapor generation part (water vapor generation part) 2C‧‧‧First induction coil 2M‧‧‧Middle point terminal 2T‧‧‧First hollow conductor tube 21‧‧ ‧Water inlet 22‧‧‧Saturated water vapor outlet 3‧‧‧Superheated steam generating part 3C‧‧‧Second induction coil 3E‧‧‧One end terminal 3T of the secondary transformer primary coil (second induction coil) ‧‧Second hollow conductor tube 31‧‧‧Saturated steam inlet 32‧‧‧Superheated steam outlet 33‧‧‧Gas inlet 4‧‧‧Water vapor flow adjustment part (saturated steam flow adjustment part), First flow regulating valve 5‧‧‧Gas flow regulating part, second flow regulating valve 6‧‧‧Processing part 61‧‧‧Processed object storage part 62‧‧‧Superheated steam inlet 63‧‧‧Condensate drain Outlet 64‧‧‧Exhaust port 7‧‧‧Control device 71‧‧‧First heating temperature control part 72‧‧‧Second heating temperature control part 73‧‧‧First flow regulating valve control part 74‧‧‧Second Flow control valve control unit 75‧‧‧Processed object temperature acquisition unit 81‧‧‧First controller 82‧‧‧Second controller 9‧‧‧Switching mechanism Iu‧‧‧U direction current Iv‧‧‧V direction current Iw‧‧‧W direction current L1‧‧‧Water supply channel L2‧‧‧Saturated steam supply channel (steam supply channel) L3‧‧‧Gas supply channel L4‧‧‧Superheated water vapor supply channel O‧‧‧The midpoint T1 of the primary coil (first induction coil) of the main transformer.‧‧‧The first temperature sensor T2‧‧‧The second temperature sensor T3‧‧‧The third temperature sensor U‧‧ ‧U-phase V of three-phase AC power supply‧‧‧V-phase W of three-phase AC power supply‧‧‧Working object, W-phase of three-phase AC power supply

Fig. 1 is a diagram schematically showing the structure of the superheated steam generator described in this embodiment. Figure 2 is a schematic diagram showing an example of the hollow conductor tube described in the same implementation. Fig. 3A is a plan view mainly showing the iron core structure of each steam generating part described in the same implementation. Fig. 3B is a front view mainly showing the iron core composition of each steam generating part described in the same implementation. Fig. 4 is a plan view showing another configuration of the iron core of each steam generating part described in the same embodiment. Figure 5 is a schematic diagram showing the wiring of the induction coils of the water vapor generating parts described in the same implementation. Figure 6 is a diagram schematically showing the configuration of the control device described in this embodiment. Figure 7 is a schematic diagram of the processing method described in this implementation. Fig. 8 is a schematic diagram showing the wiring of induction coils of each water vapor generating part of another embodiment.

100‧‧‧Superheated steam generator

2‧‧‧Saturated water vapor generation part (water vapor generation part)

21‧‧‧Water inlet

22‧‧‧Saturated water vapor outlet

3‧‧‧Superheated steam generator

31‧‧‧Saturated water vapor inlet

32‧‧‧Superheated steam outlet

33‧‧‧Gas inlet

4‧‧‧Water vapor flow control unit (saturated water vapor flow control unit), first flow control valve

5‧‧‧Gas flow regulating part, second flow regulating valve

6‧‧‧Processing Department

61‧‧‧Department of processed objects

62‧‧‧Superheated steam inlet

63‧‧‧Condensate outlet

64‧‧‧Exhaust outlet

7‧‧‧Control device

L1‧‧‧Water supply channel

L2‧‧‧Saturated water vapor supply flow path (water vapor supply flow path)

L3‧‧‧Gas supply channel

L4‧‧‧Superheated steam supply flow path

T1‧‧‧First temperature sensor

T2‧‧‧Second temperature sensor

T3‧‧‧Third temperature sensor

W‧‧‧Processed object

Claims (8)

A superheated steam generating device, comprising: a water vapor generating part that heats water into a water vapor by induction heating or energization heating; a superheated steam generating part that heats the water vapor by induction heating or energization heating Into a superheated steam; a steam supply flow path to supply the superheated steam generation part with the water vapor generated by the water vapor generation part; and a gas supply flow path to supply the superheated steam generation part different from the Another gas of water vapor; wherein, the superheated steam generating device can be switched to a first state or a second state, the first state is a state of supplying the water vapor to the superheated vapor generating part, and the second The state is a state in which the other gas is supplied to the superheated steam generating part and the superheated steam generating part functions as a gas heating part; in addition to the first state and the second state, the superheated steam generating device also It can be switched to a third state, which is a state in which the water vapor and the other gas are supplied to the superheated steam generating part and the superheated steam generating part functions as a mixed gas heating part. The superheated steam generator described in item 1 of the scope of patent application further includes: A water vapor flow rate adjustment part is provided on the water vapor supply flow path for adjusting the flow rate of the water vapor supplied to the superheated steam generating part; wherein, in the second state, the water vapor flow rate adjustment part stops The steam is supplied to the superheated steam generating unit. The superheated steam generating device according to the first item of the scope of patent application, wherein the superheated steam generating device further comprises: a control device for controlling the supply of electric power to the steam generating part; wherein, in the second state , The control device stops supplying power to the water vapor generating unit. The superheated steam generating device described in the first item of the scope of patent application, wherein the superheated steam generating device further comprises: a water vapor flow rate adjusting part, which is arranged on the water vapor supply flow path, and is used for regulating the flow to the superheated steam The flow rate of the water vapor supplied by the generating part; wherein, in the third state, the water vapor flow rate adjusting part adjusts the flow rate of the water vapor supplied to the superheated steam generating part, thereby adjusting the flow rate of the water vapor in the superheated steam generating part The mixing ratio of the water vapor and the other gas. The superheated steam generating device described in item 1 of the scope of patent application, wherein the water vapor generating part and the superheated steam generating part are composed of a Scottrade wiring transformer composed of a main transformer and a secondary transformer, The steam generating part has a first heating metal piece, and the first heating metal piece is induction heated or electrically heated by the output of the main transformer, and the superheated steam generating part has a second heating metal piece, Through the vice The output of the transformer performs induction heating or energization heating of the second heating metal piece. One of the two phases on the input side of the main transformer is provided with a first controller to control voltage or current, and the auxiliary transformer is used as the input side One end of the primary coil is provided with a second controller to control voltage or current. Through the first controller and the second controller, the output voltage of the main transformer and the output voltage of the auxiliary transformer are independently controlled. The superheated steam generating device as described in item 5 of the scope of patent application, wherein the superheated steam generating device further includes a switching mechanism that switches between a first connection state and a second connection state, the The first connection state is a state in which the midpoint terminal connected to the midpoint of the primary coil of the main transformer and one end side terminal of the primary coil of the auxiliary transformer are connected to perform a Scottish connection, and the second connection state is to release the history The state where Court wire connects the terminals on both sides of the primary coil of the secondary transformer including the second controller to the three-phase AC power supply. In the superheated steam generating device described in item 6 of the scope of patent application, the second controller has a certain current control function. A processing method that uses a superheated steam generating device to process an object to be processed. The superheated steam generating device includes a steam generating part, a superheated steam generating part, a steam supply flow path, and a gas supply In the flow path, the water vapor generating unit heats water into a water vapor by induction heating or energization heating, and the superheated steam generating unit heats the water vapor into a superheated vapor by induction heating or energization heating. The supply flow path supplies the water vapor generated by the water vapor generation part to the superheated steam generating part, and the gas supply flow path supplies the water vapor different from the water vapor to the superheated steam generation part Another gas of, wherein the processing method includes: a previous process of supplying the other gas to the superheated water vapor generating part and heating the other gas, and heating the object to be processed through the heated other gas; and The post process is performed after the previous process, the water vapor is supplied to the superheated steam generating part, and the water vapor is heated to generate the superheated steam, and the superheated steam is processed by the superheated steam in the previous process. The object to be treated; wherein, different from the treatment of the object to be treated using the superheated steam in the subsequent process, the treatment of the object is performed using a mixed gas of the superheated steam and the other gas.

Images