JP6574695B2 - Superheated steam generator - Google Patents

Description

  The present invention relates to a superheated steam generator that generates superheated steam from water.

  In recent years, a superheated steam treatment apparatus for cleaning, drying or sterilizing an object to be treated using superheated steam has been considered (for example, Patent Document 1).

  As this superheated steam processing apparatus, there is one provided with a saturated steam generating unit that generates saturated steam from water and a superheated steam generating unit that generates superheated steam from the saturated steam generated by the saturated steam generating unit.

  The saturated water vapor generation unit has a water introduction port for introducing water and a saturated water vapor extraction port for deriving the generated saturated water vapor. And, for example, the saturated water vapor generating unit has a hollow conductor tube that is induction-heated, and water has a larger specific gravity than water vapor and accumulates in the lower portion, so that water introduced at one end of the hollow conductor tube is introduced. The port is provided at the lower part, and the saturated water vapor outlet port formed at the other end is provided at the upper part.

  On the other hand, the superheated steam generator has a saturated steam introduction port for introducing the saturated steam generated by the saturated steam generator and a superheated steam outlet port for deriving the generated superheated steam. And, for example, the superheated steam generator has a hollow conductor tube that is induction-heated, and in order to simplify the piping with the saturated steam generator and to facilitate the connection, the hollow conductor tube A saturated steam introduction port formed at one end of the superheated steam is provided at the upper part, and a superheated steam outlet port formed at the other end is provided at the lower part.

  However, if the superheated steam outlet port is lower than the saturated steam inlet port, the saturated steam introduced from the saturated steam inlet port is liquefied when the superheated steam generator is less than 100 ° C. Water may come out. If this water adheres to or comes into contact with the object to be treated, there may be a case where problems such as deterioration of the object to be treated occur.

JP2015-137354A

  Therefore, the present invention has been made to solve the above-described problems, and its main problem is to prevent water in which steam has been liquefied from exiting from the superheated steam outlet port of the superheated steam generator.

  That is, the superheated steam generator according to the present invention includes an induction heating method or an electric heating method steam generation unit that generates steam from water, and an induction heating method or an electric heating method superheated steam generation unit that generates superheated steam from water vapor. The superheated steam generation unit has a steam introduction port for introducing the steam generated by the steam generation unit, and a superheated steam extraction port for deriving the superheated steam, It is provided in a position higher than the water vapor introduction port.

  With such a superheated steam generator, the superheated steam outlet port of the superheated steam generator is provided at a position higher than the steam inlet port, so even if the steam introduced into the steam inlet port liquefies, Liquefied water can be prevented from exiting from the superheated steam outlet port.

As a specific embodiment of the water vapor generation unit and the superheated water vapor generation unit, the water vapor generation unit is formed with a water introduction port for introducing water into one end and the water vapor extraction port through which the water vapor is derived at the other end A first hollow conductor tube having a spiral shape, wherein the superheated steam generation unit is formed in a spiral shape in which the steam introduction port is formed at one end and the superheated steam outlet port is formed at the other end. It is desirable to have the 2nd hollow conductor tube which makes | forms.
By using the spiral hollow conductor tube as described above, the heat exchange area between the fluid (water or water vapor) and the hollow conductor tube can be increased while making the generating parts compact.
In the case of a conventional configuration using a hollow conductor tube having a single flow path formed therein, liquefied water tends to come out from the superheated steam outlet port, but this hollow conductor tube was used. By providing the superheated steam outlet port at a position higher than the steam inlet port in the configuration, the effect of the present invention can be made remarkable.

  It is desirable that the first hollow conductor tube and the second hollow conductor tube have their spiral centers arranged along the vertical direction. Thus, in the hollow conductor tube in which the spiral center is arranged along the vertical direction, when the water vapor introduction port is provided in the upper part, there is no portion where the liquefied water stays and it flows to the lower end of the hollow conductor tube. In the present invention, since the water vapor introduction port is provided at the lower part of the hollow conductor tube in which the spiral center is arranged along the vertical direction, and the superheated water vapor discharge port is provided at the upper part, the effect of the present invention can be made more remarkable. it can.

The water vapor generating part is disposed inside or outside the first hollow conductor tube to inductively heat the first hollow conductor tube, and the first induction coil is provided at the center of the first induction coil. A second induction coil for inductively heating the second hollow conductor tube, wherein the superheated steam generation unit is disposed inside or outside the second hollow conductor tube; and the second induction A second magnetic path core provided in the center of the coil, and the first magnetic path core and the second magnetic path core are common paths of magnetic flux generated in the two magnetic path cores. It is desirable to constitute a single tripod core with the common iron core. Thus, a superheated steam generator can be made compact by comprising a steam generation part and a superheated steam generation part using a single tripod iron core.
Here, in the superheated steam generator using a tripod iron core, in order to facilitate the pipe connection between the first hollow conductor tube and the second hollow conductor tube, water vapor is formed above the hollow conductor tube of the superheated steam generator. Although an introduction port is provided, the problem of the present invention becomes significant. For this reason, in the superheated steam generator using a tripod iron core, the effect of the present invention can be made more remarkable by providing the steam introduction port at the lower part of the hollow conductor tube of the superheated steam generator.

  Thus, when comprising a water vapor | steam production | generation part and a superheated water vapor | steam production | generation part using a single tripod iron core, the said 1st induction coil and the said 2nd induction coil are two-phase alternating current from a three-phase alternating current power supply. It is desirable to have a Scott connection that converts to single phase AC.

The first magnetic path core, the second magnetic path core, and the common core are arranged so as to be located at the apex of a triangle in plan view, and the first magnetic path core and the second magnetic path core Preferably, the upper and lower sides of the common iron core are connected by a yoke core, and the yoke core is bent with the common iron core as a bending point in plan view.
If it is this structure, the dimension of the width direction of the whole iron core can be made small, and the whole apparatus can be made compact and space-saving.

A connection pipe connecting the water vapor outlet port of the first hollow conductor pipe and the water vapor introduction port of the second hollow conductor pipe;
It is desirable that a part or all of the connecting pipe is disposed in a space surrounded by the outer surface of the water vapor generating unit, the outer surface of the superheated steam generating unit, and the outer surface of the common iron core.
If it is this structure, both can be connected using the dead space formed between a water vapor | steam production | generation part and a superheated steam production | generation part, and the whole apparatus can be reduced in size and space-saving.

It is desirable that a discharge mechanism for discharging water liquefied by the water vapor is provided below the superheated water vapor generating unit.
If it is this structure, even if the water vapor | steam introduced into the water vapor | steam introduction port liquefies, it can discharge | emit with a discharge mechanism, and it can prevent that the liquefied water exits from a superheated water vapor | steam extraction port.

It is desirable that a storage unit for storing water liquefied by the water vapor is provided below the superheated steam generation unit.
If it is this structure, even if the water vapor | steam introduced into the water vapor | steam introduction port liquefys, it can be stored in a storage part, and it can prevent that the liquefied water comes out from a superheated water vapor | steam derivation | leading-out port.
Here, the effect of this invention can be made more remarkable by providing the said discharge mechanism in the said storage part.

When the electric capacity of the first induction coil of the steam generation unit and the second induction coil of the superheated steam generation unit are designed to be the same, at the start of operation, the steam generation unit has water and heats the water. However, the superheated steam generation unit is in a state where there is no water vapor, and the temperature rises faster than the steam generation unit with a smaller load. That is, at the stage where the steam flows into the superheated steam generation section, the superheated steam generation section is already at a temperature of 100 ° C. or higher, and it is unlikely that it will be liquefied. There is a risk of liquefaction in this superheated steam generating section in the portions where the steam generating section and the superheated steam generating section are connected and in the output part of the superheated steam generating section (near the superheated steam deriving port) that is not induction heated.
For this reason, a storage section for storing water liquefied by the steam is provided in the outlet pipe section in which the superheated steam outlet port of the superheated steam generation section is formed or in the external connection pipe connected to the superheated steam outlet port. It is desirable that The lead-out tube portion is a portion of the second hollow conductor tube that extends outside the second induction coil and is not induction heated.
Here, the effect of this invention can be made more remarkable by providing the said discharge mechanism in the said storage part.

It is desirable that the space in which the temperature detection unit for detecting the temperature of the superheated steam exiting from the superheated steam outlet port is disposed and the internal space of the storage unit are also used.
Thus, by using the arrangement space of the temperature detection unit and the internal space of the storage unit, it is not necessary to provide a dedicated space for the temperature detection unit, and the arrangement space of the temperature detection unit can be minimized.

It is desirable to provide a control mechanism that introduces the water vapor generated by the water vapor generation unit into the superheated water vapor generation unit after the superheated water vapor generation unit is heated to 100 ° C. or higher.
Thus, by controlling the timing at which water vapor is introduced into the superheated steam generator, it is possible to prevent the water vapor from being liquefied inside the superheated steam.

As a specific embodiment of the control mechanism, the control mechanism is provided between the steam generation unit and the superheated steam generation unit, and switching for switching the supply or stop of the steam to the superheated steam generation unit And a control unit that starts supply of the water vapor by the switching unit when the temperature of the superheated steam generation unit reaches 100 ° C. or higher.
If it is this structure, supply or a stop of the water vapor | steam to a superheated steam production | generation part can be switched only by switching a switching part. For example, if the supply of steam to the superheated steam generation unit is stopped until the superheated steam generation unit reaches 100 ° C. or higher, and if steam is generated in the steam generation unit during the stop, immediately after switching the switching unit Steam can be supplied to the superheated steam generator.

The superheated steam generator according to the present invention includes an induction heating method or an electric heating method steam generation unit that generates steam from water, and an induction heating method or an electric heating method superheated steam generation unit that generates superheated steam from water vapor. And a discharge mechanism that is provided in a lower part of the superheated steam generation unit and discharges water in which the steam is liquefied.
With this configuration, a discharge mechanism that discharges water in which the water vapor is liquefied is provided in the lower part of the superheated water vapor generation unit, so that even if the water vapor introduced into the water vapor introduction port is liquefied, the water can be discharged by the discharge mechanism. The liquefied water can be prevented from exiting from the superheated steam outlet port.

Furthermore, the superheated steam generator according to the present invention includes an induction heating method or an electric heating method steam generation unit that generates steam from water, an induction heating method or an electric heating method superheated steam generation unit that generates superheated steam from water vapor, and And a storage unit that is provided in a lower part of the superheated steam generation unit and stores water in which the steam is liquefied.
If it is this composition, since the storage part which stores the water which water vapor liquefied is provided in the lower part of the superheated steam generation part, even if the water vapor introduced into the water vapor introduction port liquefies, it can be stored in the storage part The liquefied water can be prevented from exiting from the superheated steam outlet port.

In addition, the superheated steam generator according to the present invention includes an induction heating method or an electric heating method steam generation unit that generates water vapor from water, and an induction heating method or an electric heating method superheated steam generation that generates superheated steam from water vapor. And a control mechanism for introducing the water vapor generated by the water vapor generation unit into the superheated water vapor generation unit after heating the superheated water vapor generation unit to 100 ° C. or higher.
With this configuration, since the steam generated by the steam generator after the superheated steam generator is heated to 100 ° C. or higher is introduced into the superheated steam generator, liquefaction of steam in the superheated steam outlet can be prevented. Further, it is possible to prevent water in which water vapor is liquefied from coming out of the superheated water vapor outlet port.

  According to the present invention configured as described above, even if the water vapor introduced into the water vapor introduction port is liquefied, the liquefied water can be prevented from exiting from the superheated water vapor outlet port.

It is a figure which shows typically the structure of the superheated steam generator of this embodiment. It is a figure which shows an example of the hollow conductor tube of the embodiment. It is a figure which mainly shows the iron core structure of each water vapor | steam production | generation part of the embodiment. It is a figure which shows the modification of the iron core structure of each water vapor | steam production | generation part of the embodiment. It is a figure which shows the connection of the induction coil to each water vapor generation part of the embodiment. It is a figure which shows typically the structure of the control apparatus of the embodiment. It is a figure which shows typically the processing method of the embodiment. It is a figure which shows typically the structure of the superheated steam generator of deformation | transformation embodiment. It is a figure which shows typically the structure of the superheated steam generator of deformation | transformation embodiment. It is a figure which shows typically the structure of the superheated steam generator of deformation | transformation embodiment. It is a figure which shows the modification of the heating element of each water vapor | steam production | generation part.

  Hereinafter, an embodiment of a superheated steam generator according to the present invention will be described with reference to the drawings.

  The superheated steam generator 100 according to the present embodiment generates superheated steam by heating water, and as shown in FIG. 1, a steam generator 2 (hereinafter referred to as “saturated steam”) that heats water and generates saturated steam. , Saturated steam generation unit 2), superheated steam generation unit 3 that heats saturated steam to generate superheated steam, and steam that supplies saturated steam generated by saturated steam generation unit 2 to superheated steam generation unit 3. And a supply flow path L2 (hereinafter referred to as a saturated water vapor supply flow path L2).

  The saturated water vapor generating unit 2 is of an induction heating type, and has a water introduction port 21 through which water is introduced and a saturated water vapor outlet port 22 through which saturated water vapor is derived. A water supply flow path L1 for supplying water from a tank or the like (not shown) to the saturated water vapor generating unit 2 is connected to the water introduction port.

  The saturated water vapor generating unit 2 includes, for example, a spiral first hollow conductor tube 2T (see FIG. 2) having a water introduction port 21 and a saturated water vapor outlet port 22, and the inside of the first hollow conductor tube 2T or A first induction coil (not shown) disposed on the outside for induction heating the first hollow conductor tube 2T, and an AC power supply (not shown) for applying an AC voltage to the first induction coil; By applying an AC voltage to the first induction coil, Joule heat is generated by flowing an induction current through the first hollow conductor tube 2T, and the state of the water introduced into the first hollow conductor tube 2T is changed to saturated water vapor. It can be considered.

  Here, the water introduction port 21 is formed at one end of the first hollow conductor tube 2T, and the saturated water vapor outlet port 22 is formed at the other end of the first hollow conductor tube 2T. That is, the internal flow path of the first hollow conductor tube 2T is a single spiral flow path from the water introduction port 21 at one end to the saturated water vapor discharge port 22 at the other end. The first hollow conductor tube 2T is arranged such that the water introduction port 21 is located at the lower part and the saturated water vapor outlet port 22 is located at the upper part. In more detail, the spiral center of the first hollow conductor tube 2T is arranged along the vertical direction.

  In the present embodiment, the temperature of the saturated water vapor derived from the saturated water vapor deriving port 22 of the first hollow conductor tube 2T is detected, and the voltage applied to the first induction coil is controlled by the Ford back control. The temperature of the saturated water vapor derived from the saturated water vapor deriving port 22 of the hollow conductor tube 2T is controlled. In addition, the temperature detection of saturated water vapor includes a method of directly detecting the temperature of saturated water vapor and a method of indirectly detecting the temperature of saturated water vapor by detecting the temperature of the first hollow conductor tube 2T.

  The superheated steam generation unit 3 is of the induction heating type, similar to the saturated steam generation unit 2, and has a saturated steam introduction port 31 through which saturated steam is introduced and a superheated steam extraction port 32 through which superheated steam is derived.

  The superheated steam generator 3 includes, for example, a spiral second hollow conductor tube 3T (see FIG. 2) having a saturated steam inlet port 31 and a superheated steam outlet port 32, and inside or outside the second hollow conductor tube 3T. A second induction coil (not shown) that is arranged to inductively heat the second hollow conductor tube 3T and an AC power source (not shown) that applies an AC voltage to the second induction coil. 2 By applying an alternating voltage to the induction coil, an induction current is caused to flow through the second hollow conductor tube 3T to cause Joule heat generation, and the state of the saturated water vapor introduced into the second hollow conductor tube 3T is changed to superheated water vapor. It can be considered.

  Here, the saturated water vapor introduction port 31 is formed at one end of the second hollow conductor tube 3T, and the superheated water vapor discharge port 32 is formed at the other end of the second hollow conductor tube 3T. That is, the internal flow path of the second hollow conductor tube 3T is a spiral flow path from the saturated water vapor introduction port 31 at one end to the superheated water vapor discharge port 32 at the other end. And this 2nd hollow conductor pipe | tube 3T is arrange | positioned so that the saturated water vapor | steam introduction port 31 may be located in the lower part, and the superheated water vapor | steam derivation | leading-out port 32 may be located in the upper part. More specifically, the spiral center of the second hollow conductor tube 3T is arranged along the vertical direction.

  In the present embodiment, the temperature of the superheated steam led out from the superheated steam lead-out port 32 of the second hollow conductor tube 3T is detected, and the voltage applied to the second induction coil is controlled by the Fordback control. The temperature of the superheated steam led out from the superheated steam lead port 32 of the hollow conductor tube 3T is controlled. In addition, the temperature detection of superheated steam can be considered as a method of directly detecting the temperature of superheated steam or a method of detecting the temperature of superheated steam indirectly by detecting the temperature of the second hollow conductor tube 3T.

  Further, in the saturated steam generation unit 2 and the superheated steam generation unit 3 of the induction heating method, when the frequency of the AC voltage to be applied is a commercial frequency of 50 Hz or 60 Hz, the current penetration degree of the induction current becomes deep. For this reason, it is possible to obtain the same value as the inner surface temperature detection by the outer surface temperature detection of the first and second hollow conductor tubes 2T and 3T, and it is possible to detect the steam temperature with high accuracy even by the indirect detection.

  In the present embodiment, as shown in FIGS. 3 and 4, the first magnetic path iron core 101 is provided at the center of the first induction coil 2 </ b> C of the saturated water vapor generation unit 2, and the first of the superheated water vapor generation unit 3. A second magnetic path core 102 is provided at the center of the 2-inductive coil 3C. Thereby, the magnetic flux generated by the first and second induction coils 2C and 3C is circulated efficiently, and the magnetic flux is efficiently introduced into the hollow conductor tubes 2T and 3T. 3 and 4 do not show each port.

  Further, in addition to the first magnetic path core 101 of the saturated water vapor generating section 2 and the second magnetic path core 102 of the superheated steam generating section 3, a common path of magnetic flux generated in the two magnetic path cores 101 and 102 is used. A common iron core 103 is provided. The upper and lower sides of the common core 103 and the two magnetic path cores 101 and 102 are connected by yokes 104 and 105 to form a single tripod core. With this configuration, it is possible to reduce the size of the entire iron core, and consequently to make the entire device compact. That is, the superheated steam generator 100 of this embodiment comprises the saturated steam generator 2 and the superheated steam generator 3 using a single tripod iron core.

  3 and 4, the iron cores are disposed so as to be located at the vertices of the triangle in plan view, and the yoke cores 104 and 105 are bent with the common core 103 as a refracting point in plan view. Thereby, the distance between the two iron cores 101 and 102 for magnetic paths can be made small, the dimension of the whole iron core in the width direction can be made small, and space saving can be achieved.

  Further, in the present embodiment, the first induction coil 2C of the saturated steam generation unit 2 and the second induction coil 3C of the superheated steam generation unit 3 convert a three-phase AC from a three-phase AC power source into two single-phase ACs. Scott connection is connected (see FIG. 5). That is, the superheated steam generator 100 of the present embodiment has a configuration including a Scott connection transformer having a single tripod core. The Scott connection transformer is composed of a main seat transformer and a T seat transformer. The portion corresponding to the saturated steam generating unit 2 is a main seat transformer, and the portion corresponding to the superheated steam generating unit 3 is a T seat transformer. It becomes.

  Moreover, as shown in FIG. 5, the 1st control apparatus 10 which controls a voltage or an electric current is provided in one of the two phases of the input side of a main transformer. In FIG. 5, a semiconductor control element such as a thyristor that is the first control device 10 is provided in the V phase on the input side of the main transformer. Further, a second voltage or current is controlled to one end side (the U phase side or the middle point O side of the T seat primary coil) of the primary coil (second induction coil 3C) which is the input side of the T seat transformer. A control device 11 is provided. Similarly to the first control device 10, the second control device 11 also uses a semiconductor control element such as a thyristor. And the control apparatus 6 controls the said 1st control apparatus 10 and the said 2nd control apparatus 11, and the voltage applied to the primary coil (1st induction coil 2C) of a main transformer and the T seat transformer The voltage applied to the primary coil (second induction coil 3C) is individually controlled.

  The saturated steam supply flow path L2 has one end connected to the saturated steam deriving port 22 of the saturated steam generating unit 2 and the other end connected to the superheated steam introducing port 31 of the superheated steam generating unit 3, for example, The connecting pipe 9 is used. Specifically, the saturated steam supply flow path L <b> 2 connects the saturated steam outlet port 22 located at the upper part of the saturated steam generator 2 and the saturated steam introduction port 31 located at the lower part of the superheated steam generator 3.

  A part or all of the connecting pipe 9 is disposed in a space S surrounded by the outer surface of the saturated steam generating unit 2, the outer surface of the superheated steam generating unit 3, and the outer surface of the common iron core 103. Specifically, the connection tube 9 includes a first induction coil 2 </ b> C wound around the first magnetic path core 101 and a second induction coil 3 </ b> C wound around the first hollow conductor tube 2 </ b> T and the second magnetic path core 102. It is desirable that the saturated water vapor outlet port 22 and the saturated water vapor inlet port 31 are connected to each other in a space S formed between the second hollow conductor tube 3T. For example, it is conceivable to arrange the connecting pipe 9 along the common iron core 103 in the space S. If it is this, both can be connected using the dead space formed between the saturated steam generation part 2 and the superheated steam generation part 3, and size reduction is not prevented.

  The saturated water vapor supply channel L2 is provided with a water vapor flow rate adjusting unit 4 (hereinafter referred to as a saturated water vapor flow rate adjusting unit 4) for adjusting the flow rate of the saturated water vapor supplied to the superheated water vapor generating unit 3. The saturated water vapor flow rate adjustment unit 4 of the present embodiment is a flow rate adjustment valve. The flow rate adjusting valve 4 receives a control signal from a control device 6 described later, and its valve opening degree is controlled. In addition, a flow meter may be provided in the saturated water vapor supply channel L2.

  In this embodiment, the superheated steam generated by the superheated steam generation unit 3 is supplied to the processing unit 5 that processes the workpiece W.

  The processing unit 5 heat-treats the workpiece W with superheated steam or other gas (for example, cleaning, drying, firing or sterilization), and accommodates the workpiece W and forms a sealed space or a substantially sealed space. To be processed, a superheated steam introduction port 52 for introducing superheated steam, and a drain discharge port for discharging drain water generated in the to-be-processed container 51 53 and a discharge port 54 for discharging the used steam or other gas that has passed through the workpiece container 51. The superheated steam introduction port 52 of the processing unit 5 is connected to the superheated steam deriving port 32 of the superheated steam generation unit 3 through a superheated steam supply channel L3. The superheated steam supply flow path L3 is constituted by, for example, an external connection pipe 10. An opening / closing valve is provided in the flow path connected to the drain discharge port 53 and the discharge port 54.

  This control device 6 physically includes a CPU, a memory, an A / D converter, a D / A converter, etc., and functionally, as shown in FIG. 6, the saturated steam generator 2 is heated. A first heating temperature control unit 61 that controls the temperature (hereinafter referred to as the first heating temperature) and a second heating temperature control unit that controls the heating temperature of the superheated steam generation unit 3 (hereinafter referred to as the second heating temperature). 62 and a flow rate adjustment valve control unit 63 that controls the flow rate adjustment valve 4. In addition, although the control apparatus 6 and each part, such as the saturated water vapor | steam production | generation part 2 and the superheated steam production | generation part 3, are connected, the description about the connection is abbreviate | omitted in FIG.

Hereinafter, the operation of the superheated steam generator 100 of this embodiment will be described with reference to FIG.
First, when the user operates the superheated steam generator 100, for example, water in a tank (not shown) is supplied to the saturated steam generator 2 by a feed water pump or the like.

  At this time, the first heating temperature control unit 61 controls the first heating temperature so that the saturated water vapor generated by the saturated water vapor generation unit 2 has a predetermined temperature, and in this embodiment, the saturated water vapor generation unit The temperature of the second hollow conductor tube 2T is the first heating temperature.

  Specifically, the first heating temperature control unit 61 acquires a measured value from the first temperature sensor T1 provided in the hollow conductor tube 2T or the saturated steam supply flow path L2 of the saturated steam generating unit 2, and this measured value. Based on the above, the magnitude of the AC voltage applied to the first induction coil 2C of the saturated water vapor generating unit 2 is controlled, and the first heating temperature is controlled to 100 to 140 ° C., for example.

  The first temperature sensor T1 is provided on the downstream side of the hollow conductor tube 2T of the saturated water vapor generation unit 2, the saturated water vapor outlet port 22 or in the vicinity thereof, in order to bring the measured value closer to the temperature of the saturated water vapor. It is preferable.

  Then, in a state where the saturated water vapor generating unit 2 is generating saturated water vapor, the first flow rate adjusting valve control unit 63 controls the first flow rate adjusting valve 4 so that the valve opening degree is zero, that is, the closed state. ing. As a result, the superheated steam generator 100 is in a standby state in which the saturated steam generator 2 is generating saturated steam and the supply of the saturated steam is stopped.

  In this standby state, the second heating temperature control unit 62 controls the second heating temperature to be higher than the first heating temperature, and in this embodiment, the temperature of the second hollow conductor tube 3T is set to the second heating temperature. It is temperature.

  Specifically, the second heating temperature control unit 62 acquires a measured value from the second temperature sensor T2 provided in the second hollow conductor tube 3T in the standby state, and based on the measured value, the second induction coil The magnitude of the AC voltage applied to 3C is controlled. Thereby, 2nd heating temperature is controlled by the setting temperature of the superheated steam produced | generated in the superheated steam production | generation part 3, or the temperature before and behind that, for example, is controlled to 200-1200 degreeC here. That is, in this standby state, the superheated steam generator 3 is controlled to 100 ° C. or higher.

  In the standby state described above, when the user inputs a switching signal using, for example, an input unit, the flow rate adjusting valve control unit 63 acquires this switching signal, and switches the flow rate adjusting valve 4 from the closed state to the open state. Thereby, the superheated steam generator 100 is switched from the standby state to the supply state, and saturated steam is started to be supplied to the superheated steam generator 3. Note that when the measured value from the second temperature sensor T2 is 100 ° C. or higher, a switching signal may be transmitted from the second heating temperature control unit 62 to the flow rate adjustment valve control unit 63. As described above, the flow rate adjusting valve 4 and the flow rate adjusting valve control unit 63 constitute a control mechanism that introduces saturated steam into the superheated steam generation unit 3 after heating the superheated steam generation unit 3 to 100 ° C. or higher.

  At this time, as shown in FIG. 7, the flow rate adjusting valve control unit 63 gradually opens the flow rate adjusting valve 4 and controls the valve opening degree to gradually increase from zero to a predetermined opening degree. Thus, from the switching time point when the standby state is switched to the supply state until the valve opening degree of the flow rate adjustment valve 4 reaches a predetermined opening degree, the initial operation in which the supply amount of saturated steam gradually increases is performed. From the point of time when the predetermined opening degree is reached, steady operation is performed in which the supply amount of saturated water vapor is constant.

  In the present embodiment, the second heating temperature control unit 62 is based on the measured value of the second temperature sensor T2 provided on the inlet side of the second conductor tube as described above for a predetermined time from the switching time. The second heating temperature is controlled. On the other hand, the second heating temperature control unit 62 is configured to control the second heating temperature based on the temperature of the superheated steam after the predetermined time has elapsed.

  A specific embodiment for this control will be described. For example, a third temperature sensor T3 for measuring the temperature of the superheated steam led out from the superheated steam lead-out port 32 is provided at or near the superheated steam lead-out port 32. ing. And the said 2nd heating temperature control part 62 acquires the measured value of the said 3rd temperature sensor T3 from the time of the said predetermined time, and controls the 2nd heating temperature based on this measured value It is configured.

  Here, in the present embodiment, the predetermined time is set to a time from when switching from the standby state to the supply state until superheated steam is derived from the superheated steam deriving port 32 of the second hollow conductor tube 3T. ing.

Next, an operation for switching from the supply state to the standby state will be described.
The superheated steam generation device 100 of the present embodiment is configured so that the supply of saturated steam to the superheated steam generation unit 3 is stopped after a predetermined time has elapsed since the operation for switching from the supply state to the standby state has been performed. It is configured.
Here, the operation for switching from the supply state to the standby state is, for example, that the user inputs a switching signal from the outside using an input means or the like, or a predetermined time elapsed signal indicating that the supply state has elapsed for a predetermined time. Is output by a timer or the like.

  More specifically, in the present embodiment, when an operation for switching from the supply state to the standby state is performed, the above-described flow rate adjustment valve control unit 63 acquires, for example, the switching signal or the predetermined time elapsed signal. The flow rate adjustment valve 4 is left open for a predetermined time from the time. Thereby, saturated steam is supplied from the saturated steam generator 2 to the superheated steam generator 20 during the predetermined time. In the predetermined time, saturated steam is supplied from the saturated steam generating unit 2 to the superheated steam generating unit 3, and the high temperature superheated steam generating unit 3 is cooled by the saturated steam. Thereby, the superheated steam generator 3 can be cooled to the set temperature in the standby state, and damage to the superheated steam generator 100 can be prevented.

  According to the superheated steam generation device 100 configured as described above, the superheated steam generation port 32 of the superheated steam generation unit 3 is provided at a position higher than the saturated steam introduction port 31, so that it is introduced into the saturated steam introduction port 31. Even if the water vapor is liquefied, the liquefied water can be prevented from exiting from the superheated water vapor outlet port 32.

  Further, since the temperature of the second hollow conductor tube 3T of the superheated steam generation unit is set to 100 ° C. or higher in the standby state, it is prevented that saturated steam is liquefied inside the second hollow conductor tube 3T in the subsequent supply state. It is possible to further prevent the liquefied water from exiting from the superheated steam outlet port 32.

The present invention is not limited to the above embodiment.
For example, the saturated steam generation unit and the superheated steam generation unit are not limited to the induction heating method, and may be those of an electric heating method.

  The saturated water vapor generating unit 2 of the electric heating system has a water introduction port 21 and a saturated water vapor outlet port 22, for example, a first hollow conductor tube 2T having a spiral shape or a straight tube shape, and a voltage applied to the first hollow conductor tube 2T. A direct current or an alternating current power supply, which causes Joule heat generation by passing a current through the first hollow conductor tube 2T, and changes the state of the water introduced into the first hollow conductor tube 2T into saturated water vapor. It is possible to do.

  Further, the superheated steam generation unit 3 of the energization heating method includes, for example, a second hollow conductor pipe 3T having a saturated steam introduction port 31 and a superheated steam lead-out port 32 having a spiral shape or a straight tube shape, and the second hollow conductor pipe 3T. A DC or AC power source for applying a voltage is applied, and Joule heat is generated by passing a current through the second hollow conductor tube 3T, and the saturated water vapor introduced into the second hollow conductor tube 3T is converted into superheated water vapor. It can be considered to change.

  These electrification heating systems are controlled by the Fordback control of the voltage applied to the first and second hollow conductor tubes 2T and 3T or the current flowing through the first and second hollow conductor tubes 2T and 3T. The temperature of the saturated steam or superheated steam led out from the lead-out port 22 of the two hollow conductor tubes 2T and 3T is controlled.

  Moreover, in the said embodiment, although the superheated steam production | generation part 3 is set as the structure which receives the saturated steam produced | generated by the saturated steam production | generation part 2 provided in the front | former stage, the saturated steam production | generation part 2 heats saturated steam more than that. When the superheated steam is generated, the superheated steam is received, and the received superheated steam is further heated to generate superheated steam having a desired temperature to be supplied to the processing unit 5.

  Furthermore, by providing a function as the connection pipe in any one of the hollow conductor tubes 2T and 3T, the saturated steam deriving port 22 of the saturated steam generating unit 2 and the superheated steam introducing port 31 of the superheated steam generating unit 3 are provided. May be connected via, for example, a joint having insulating properties. For example, when the second hollow conductor tube has a function as a connection pipe of the above embodiment, the saturated water vapor introduction port of the second hollow conductor tube is located above the superheated water vapor generating unit 3 and the second hollow conductor tube Saturated water vapor is introduced from the lower end of the spiral portion of the conductor tube.

  In addition, as shown in FIG. 8, a discharge mechanism 7 that discharges water in which water vapor is liquefied may be provided below the superheated steam generation unit 2. The discharge mechanism 7 includes a discharge flow path 71 provided in the hollow conductor tube 3T of the superheated steam generation unit 2 and an on-off valve 72 provided in the discharge flow path 71. The discharge flow path 71 is provided in the lower part of the superheated steam production | generation part 2, and is connected to the storage part 8 which stores the water which water vapor | steam liquefied. When the reservoir 8 is provided in the second hollow conductor tube 3T of the embodiment, the reservoir 8 is preferably provided in the vicinity of the saturated water vapor introduction port 31. When the discharge mechanism 7 and the storage unit 8 are provided, it is not necessary to provide the superheated steam outlet port 32 of the superheated steam generator 3 at a position higher than the saturated steam inlet port 31, but the superheated steam outlet port 32 is introduced to the saturated steam inlet. If it is provided at a position higher than the port 31, the effect of the present invention can be made more remarkable.

  In FIG. 8, the discharge mechanism 7 and the storage unit 8 are provided. However, only the discharge mechanism 7 may be provided, or the storage unit 8 may be provided. Here, when only the discharge mechanism 7 is provided in the second hollow conductor tube 3T of the embodiment, it is desirable to provide the discharge flow path 71 of the discharge mechanism 7 in the vicinity of the saturated water vapor introduction port 31.

  In addition, as shown in FIGS. 9 and 10, the discharge mechanism 7 or the storage unit 8 may be provided in the saturated water vapor introduction channel L2. In this case, it is desirable to provide the discharge mechanism 7 or the reservoir 8 in a portion where the liquefied water is likely to accumulate in the saturated water vapor introduction channel L2.

Further, as shown in FIGS. 9 and 10, the discharge mechanism 7 is connected to the outlet pipe portion in which the superheated steam outlet port 32 of the superheated steam generator 3 is formed or the external connection pipe 10 connected to the superheated steam outlet port 32. Or you may provide the storage part 8. FIG. 9 and 10 show a case where the external connection pipe 10 is provided with the discharge mechanism 7 and the storage portion 8.
Here, in FIG. 9, by providing a third temperature sensor T3 for detecting the temperature of the superheated steam exiting from the superheated steam deriving port 32 in the internal space of the storage section 8, a space in which the third temperature sensor T3 is disposed, The internal space of the storage unit 8 is also used. Thereby, it is not necessary to provide a dedicated space for the third temperature sensor T3, and the arrangement space for the third temperature sensor T3 can be minimized.
In FIG. 9, since the flow rate adjustment valve 4 is provided in the saturated water vapor supply flow path L <b> 2 (connection pipe 9), the first temperature sensor T <b> 1 is connected to the flow rate adjustment valve 4 in order to control the embodiment. It is necessary to provide it upstream. On the other hand, FIG. 10 shows a configuration in which the flow rate adjusting valve 4 is not provided in the saturated water vapor supply flow path L2 (connection pipe 9), and the first temperature sensor T1 is stored in the saturated water vapor supply flow path L2 (connection pipe 9). By providing in the internal space of the part 8, the space in which the first temperature sensor T1 is arranged and the internal space of the storage part 8 can be used together. Thereby, it is not necessary to provide a dedicated space for the first temperature sensor T1, and the arrangement space for the first temperature sensor T1 can be minimized.

  The saturated steam generation unit and the superheated steam generation unit of the embodiment are not limited to those using a hollow conductor tube. For example, as shown in FIG. It may be a conductor heating element formed, or may be a conductor heating element having a substantially cylindrical shape in which a cylindrical inner space is formed.

  In the above embodiment, before the superheated steam generating unit 3 reaches 100 ° C., the saturated steam generating unit 2 generates saturated steam, and switching the opening / closing of the flow rate adjustment valve 4, thereby generating superheated steam that has become 100 ° C. or higher. Although saturated water vapor is introduced into the part, the present invention is not limited to this control method. For example, first, power supply is started only to the superheated steam generation unit 3, the superheated steam generation unit 3 is set to 100 ° C. or higher, and then power supply to the saturated steam generation unit is started to generate saturated steam. Also good.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Superheated steam generator 2 ... Saturated steam generation part (steam generation part)
21 ... Water introduction port 22 ... Saturated steam outlet port 3 ... Superheated steam generator 31 ... Saturated steam inlet port 32 ... Superheated steam outlet port 2T ... First hollow conductor tube 3T 2nd hollow conductor tube 2C ... 1st induction coil 101 ... 1st magnetic path core 3C ... 2nd induction coil 102 ... 2nd magnetic path core 103 ... Common core 4 ... Flow rate adjustment valve (switching part)
6 ... Control device 63 ... Flow rate adjusting valve control unit 7 ... Discharge mechanism 8 ... Storage unit

Claims (14)

An induction heating steam generation unit that generates steam from water;
An induction heating type superheated steam generation unit that generates superheated steam from steam,
The superheated steam generator has a steam introduction port for introducing the steam generated by the steam generator, and a superheated steam outlet port for deriving the superheated steam;
The superheated steam outlet port is provided at a position higher than the steam inlet port;
A first hollow conductor tube having a spiral shape in which the water vapor generating portion has a water introduction port for introducing water at one end and a water vapor outlet port for deriving the water vapor at the other end; and A first induction coil that is disposed inside or outside the hollow conductor tube to inductively heat the first hollow conductor tube; and a first magnetic circuit core provided at a central portion of the first induction coil;
The superheated steam generating section has a spiral second hollow conductor tube in which the steam inlet port is formed at one end and the superheated steam outlet port is formed at the other end, and an inner side of the second hollow conductor pipe or possess a second induction coil for inductively heating the second hollow tubular conductors are arranged outside, and a second magnetic path iron core provided at the center portion of the second induction coil,
The iron core for the first magnetic path and the iron core for the second magnetic path constitute a single tripod iron core together with a common iron core serving as a common path of magnetic flux generated in the two magnetic path iron cores;
The first magnetic path core, the second magnetic path core, and the common core are arranged so as to be located at the apex of a triangle in plan view, and the first magnetic path core and the second magnetic path core And the upper and lower sides of the common iron core are connected by a yoke core, and the yoke core is bent with the common iron core as a bending point in plan view,
A connection pipe connecting the water vapor outlet port of the first hollow conductor pipe and the water vapor introduction port of the second hollow conductor pipe;
The part of the connection pipe or all the outer surface of the steam generator, the superheated steam generating unit of the outer surface and the common core superheated steam generating apparatus that is arranged in a space surrounded by the outer surface of the.   The superheated steam generator according to claim 1, wherein the first hollow conductor tube and the second hollow conductor tube have their spiral centers arranged along the vertical direction. The superheated steam generator according to claim 1 or 2, wherein the first induction coil and the second induction coil are connected by a Scott connection for converting a three-phase alternating current from a three-phase alternating current power source into two single-phase alternating currents. The superheated steam generator according to any one of claims 1 to 3 , wherein a discharge mechanism that discharges water in which the steam is liquefied is provided at a lower portion of the superheated steam generator.   The superheated steam generation device according to any one of claims 1 to 4, wherein a storage unit that stores water in which the steam is liquefied is provided below the superheated steam generation unit.   The lead-out pipe part in which the superheated steam lead-out port of the superheated steam generation part is formed or the external connection pipe connected to the superheated steam lead-out port is provided with a storage part for storing water liquefied by the steam. Item 6. The superheated steam generator according to any one of Items 1 to 5. The superheated steam generator according to claim 6, wherein the storage unit is provided with a discharge mechanism that discharges water in which the steam is liquefied. The superheated steam generation device according to claim 6 or 7 , wherein a space in which a temperature detection unit for detecting the temperature of superheated steam exiting from the superheated steam outlet port is disposed, and an internal space of the storage unit. The superheated steam according to any one of claims 1 to 8 , further comprising: a control mechanism that introduces the steam generated by the steam generation unit into the superheated steam generation unit after heating the superheated steam generation unit to 100 ° C or higher. Generator. The control mechanism is
A switching unit that is provided between the steam generation unit and the superheated steam generation unit, and switches the supply or stop of the steam to the superheated steam generation unit;
The superheated steam generation device according to claim 9 , further comprising a control unit that starts supply of the steam by the switching unit when the temperature of the superheated steam generation unit reaches 100 ° C. or more. An induction heating steam generation unit that generates steam from water;
An induction heating-type superheated steam generator that generates superheated steam from steam;
Provided at a lower part of the superheated steam generation unit, and a discharge mechanism for discharging water liquefied by the steam,
In the outlet pipe part in which the superheated steam outlet port of the superheated steam generation part is formed, or in the external connection pipe connected to the superheated steam outlet port, a storage part for storing water liquefied by the steam is provided,
Wherein a space temperature detecting unit for detecting the temperature of the superheated steam exiting the superheated steam outlet port is disposed, superheated steam generating apparatus and the internal space that is also used in the reservoir. An induction heating steam generation unit that generates steam from water;
An induction heating-type superheated steam generator that generates superheated steam from steam;
Provided in a lower portion of the superheated steam generation unit, and a storage unit for storing water liquefied by the steam,
A second storage part for storing the water liquefied by the steam is provided in the outlet pipe part in which the superheated steam outlet port of the superheated steam generation part is formed or in the external connection pipe connected to the superheated steam outlet port. And
Wherein a space temperature detecting unit for detecting the temperature of the superheated steam exiting the superheated steam outlet port is disposed, the second superheated steam generating apparatus and the internal space that is also used in the reservoir. An induction heating steam generation unit that generates steam from water;
An induction heating-type superheated steam generator that generates superheated steam from steam;
A control mechanism for introducing water vapor generated by the water vapor generation unit after heating the superheated water vapor generation unit to 100 ° C. or more, and the superheated water vapor generation unit;
In the outlet pipe part in which the superheated steam outlet port of the superheated steam generation part is formed, or in the external connection pipe connected to the superheated steam outlet port, a storage part for storing water liquefied by the steam is provided,
Wherein a space temperature detecting unit for detecting the temperature of the superheated steam exiting the superheated steam outlet port is disposed, superheated steam generating apparatus and the internal space that is also used in the reservoir. An induction heating method or an electric heating method water vapor generating unit for generating water vapor from water;
With an induction heating method or an electric heating method to generate superheated steam from water vapor, and a superheated steam generation unit,
The superheated steam generator has a steam introduction port for introducing the steam generated by the steam generator, and a superheated steam outlet port for deriving the superheated steam;
The superheated steam outlet port is provided at a position higher than the steam inlet port;
In the outlet pipe part in which the superheated steam outlet port of the superheated steam generation part is formed, or in the external connection pipe connected to the superheated steam outlet port, a storage part for storing water liquefied by the steam is provided,
A superheated steam generator in which a space in which a temperature detection unit for detecting the temperature of superheated steam exiting from the superheated steam outlet port is disposed and an internal space of the storage unit are combined.