TWI687638B - Superheated steam processing device and the method of using the same - Google Patents

Abstract

A superheated steam processing device and the method of using the same, and the superheated steam processing device includes a superheated steam generator and a superheated steam container. The superheated steam generator has a channel made of conductive material, the channel is being electrically connected and the steam flowing in the channel is heated by heating the channel, and thereby generating superheated steam; a part of or the whole channel is disposed in the superheated steam container, for guiding the superheated steam generated by the channel. The channel is made of conductive material which is oxidized when it’s at temperatures higher than 100 °C. The temperature of the channel can be changed by the superheated steam generator.

Description

Superheated steam treatment device and operation method thereof

The present invention relates to a superheated steam generator for generating superheated steam from water and a processing method using the superheated steam generator.

In recent years, a superheated steam treatment device has been developed that uses superheated steam to wash, dry, or sterilize the object.

As shown in Patent Document 1, the superheated steam treatment device includes a superheating device that generates superheated steam, and a heat treatment furnace supplied with the superheated steam generated by the superheating device, and the superheated steam treatment device houses the heat treatment furnace To be cleaned, dried or sterilized.

In this processing apparatus, a steam pipe (introduction pipe) for ejecting superheated steam generated by the superheating apparatus is provided inside the heat treatment furnace.

Here, in a state where the inside of the heat treatment furnace is filled with steam or superheated steam, since oxygen is not present or the concentration is extremely low, it is difficult to cause deterioration due to oxidation of the steam pipe.

However, in a state where the inside of the heat treatment furnace is not filled with steam or superheated steam, the steam pipe that becomes a high temperature combines with oxygen remaining in the atmosphere inside the heat treatment furnace and oxidizes. As a result, the steam pipe is deteriorated and the life of the device is reduced.

Existing technical literature

Patent Document 1: Japanese Patent Laid-Open No. 2006-226561.

In view of this, the present invention provides a superheated steam generating device that generates superheated steam from water and a processing method using the superheated steam generating device to solve the aforementioned problems, and the main purpose is to suppress the flow heated to a high temperature Oxidation of tract forming bodies.

The present invention provides a superheated steam treatment device including a superheated steam generating unit that electrically heats a flow path forming body formed of a conductive material and having a flow path formed therein and steam that flows through the flow path Superheated steam is generated by heating; and a superheated steam storage portion in which a part or all of the flow channel forming body is disposed, and the superheated steam generated by the flow channel forming body is introduced into the superheat A water vapor storage portion, the flow path forming body is formed of a conductive material having an oxidation start temperature of 100° C. or higher, and the superheated steam generation portion can switch the temperature of the flow path forming body to a temperature lower than the oxidation start temperature It operates at a temperature above the oxidation start temperature.

Here, the oxidation start temperature is a temperature higher than 100°C, and is a temperature at which oxidation of the conductive material rapidly progresses in the atmosphere. That is, at temperatures lower than the oxidation start temperature, the oxidation rate of the conductive material in the atmosphere is small, which is a level that can be substantially ignored; at temperatures above the oxidation start temperature, the oxidation rate of the conductive material in the atmosphere increases , Corrosion due to oxidation is large.

According to this superheated steam treatment device, the temperature of the flow channel formation body formed of a conductive material having an oxidation start temperature of 100° C. or higher can be switched to a temperature lower than the oxidation start temperature and a temperature higher than the oxidation start temperature Operation, so long as the operation is performed at a temperature where the flow channel formation is lower than the oxidation start temperature and the superheated steam storage portion is filled with water vapor or superheated steam, and thereafter the temperature of the flow channel formation is the oxidation start temperature Operating at the above temperature can prevent the flow channel formation body from being oxidized by oxygen in the atmosphere.

Specifically, it is preferable that before the superheated steam storage portion is filled with steam or superheated steam, the superheated steam generating unit is operated so that the temperature of the flow channel formation body becomes lower than the oxidation start temperature. After introducing steam or superheated steam into the superheated steam storage section, and after the superheated steam storage section is filled with steam or superheated steam, the superheated steam generation section sets the temperature of the flow path formation body to The oxidation is started at a temperature higher than the starting temperature, and superheated steam is introduced into the superheated steam storage portion.

For example, if the door of the superheated steam storage section is opened and the object to be processed is taken out while operating at a temperature higher than the oxidation start temperature, air flows in from the outside, and the flow path formation in the superheated steam generation section is oxidized. Therefore, it is preferable that when the superheated steam storage portion is filled with superheated steam and the flow path formation body is at or above the oxidation start temperature, the superheated steam storage portion may flow into the superheated steam except from the outside. Before the state of the gas, the superheated steam generation unit operates so that the temperature of the flow channel formation body becomes lower than the oxidation start temperature.

As a specific structure of the superheated steam generating portion, it is preferable that 2N conductor tubes as the flow channel forming body are arranged parallel to each other, N is an integer of 1 or more, and 2N end portions of the conductor tubes are mutually For the electrical connection, the U-phase and V-phase of the single-phase AC power supply are alternately connected to the other ends of the 2N conductor tubes so that the polarity of the single-phase AC power supply connected to the other end adjacent to each other is different. According to this configuration, since the currents flowing through the conductor tubes adjacent to each other become opposite to each other, the magnetic fluxes generated by the respective currents cancel each other, the impedance generated by the conductor tubes can be reduced, and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device can be improved.

As another specific structure of the superheated steam generating portion, it is preferable that 3N conductor tubes as the flow channel forming body are arranged so as to be parallel to each other, N is an integer of 1 or more, and 3N one end of the conductor tube The three parts of the 3N conductor tubes are alternately connected to the U-phase and V-phase of the three-phase AC power source alternately in such a manner that the polarities of the three-phase AC power source connected to the three other end parts in series are different from each other. And W phase. According to this configuration, since the U-phase, V-phase, and W-phase of the three-phase AC power supply are connected in different polarities from the three-phase AC power supply connected to the other ends of the three consecutive arrays, the three The magnetic flux generated by the currents of the two conductor tubes cancel each other, which can reduce the impedance generated by the conductor tubes and improve the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved.

Preferably, the superheated steam storage unit has a discharge part that discharges the supplied steam or superheated steam. According to this configuration, steam or superheated steam can always be supplied, and the superheated steam storage portion can always be kept in a low-oxygen state.

When high-temperature superheated steam is generated, the temperature in the superheated steam storage portion becomes high, so the flow path forming body outside the superheated steam storage portion or the flow path connecting portion connected to the flow path forming body (for example, a current-carrying member) And external piping) also become high temperature. Here, if the flow channel formation body or the flow channel connection part outside the superheated steam storage portion becomes higher than the oxidation start temperature, the life of the flow channel formation body or the flow channel connection part will be reduced.

Therefore, it is preferable that in the flow path forming body or the flow path connecting portion connected to the flow path forming body, the energized cross-sectional area of the portion outside the superheated steam storage portion is larger than that of the portion inside the superheated steam storage portion The cross-sectional area is large, or the resistance of the energized portion outside the superheated steam storage portion is smaller than the resistance of the energized portion inside the superheated steam storage portion. According to this structure, the heat generation of the flow channel formation body or the flow channel connection portion outside the superheated steam storage portion can be suppressed, the temperature can be maintained below the oxidation start temperature, and the decrease in life can be suppressed.

In addition, if the flow path formation body or flow path connection portion outside the superheated steam storage portion can be cooled to a temperature lower than the oxidation start temperature, the life of the flow path formation body or flow path connection portion can be suppressed. Therefore, in addition to the superheated steam storage portion, a water vapor introduction portion is further provided, the flow path formation body or the flow path connection portion connected to the flow path formation body penetrates the water vapor introduction portion, and the water vapor is introduced into the water Steam introduction section. According to this configuration, by introducing water vapor at a temperature of 100° C. or higher and lower than the oxidation start temperature to the water vapor introduction part, the flow path forming body or the flow path connection part outside the superheated steam storage part can be maintained below the oxidation start temperature, which can be suppressed Life is reduced.

Here, the superheated steam whose temperature has been adjusted may be introduced into the steam introduction section from the outside, or a superheated steam generation section may be provided in the steam storage section, and saturated steam may be introduced from the outside and generated by the superheated steam generation section Superheated steam.

Of course, the flow channel forming body must be used at a temperature below the melting point. Therefore, although it is preferable to use a material having a high melting point as much as possible to form the flow channel formation body, in practice, availability and workability, as well as material cost and processing cost are important factors.

For example, metals with melting points above 2000°C include the following metals:

Tungsten (melting point: 3443°C), tantalum (melting point: 3027°C), osmium (melting point: 2697°C), molybdenum (melting point: 2622°C), niobium (melting point: 2500°C), columbium (melting point 2500°C), iridium (melting point) : 2454°C), ruthenium (melting point: 2427°C), zirconium (melting point: 2127°C).

Among these metals, pure iridium and iridium alloys have melting points above 2000°C, good availability and processability, and are not prone to chemical changes for high-temperature superheated steam. Figure 7 is the test data after placing tungsten, tantalum, molybdenum, titanium and iridium in a superheated steam atmosphere above 1000°C for 1.5 to 6 hours. The weight reduction rate of iridium is 1.4%, which is the degree of measurement error, but the weight reduction rate of molybdenum is 50.5%, the weight reduction rate of tantalum is 30.8%, and the weight reduction rate of tungsten is 15.7%. Practicalization is difficult. Titanium increased by 24.4%, which is believed to be due to the increase in weight due to the formation of oxides when combined with oxygen atoms or hydrogen atoms in water molecules. In this case, the material is also changed to other substances, which is difficult for practical use.

As a specific embodiment for detecting the temperature of the flow path forming body, the superheated steam treatment device may include a temperature detector mechanism that calculates the temperature of the flow path forming body based on the resistance value of the flow path forming body. Specifically, the superheated steam treatment device includes: a voltage detection unit that detects the AC voltage applied to the flow channel formation body; a current detection unit that detects the current flowing through the flow channel formation body; and a temperature detection mechanism based on the passage The relationship between the voltage value obtained by the voltage detection unit and the impedance obtained by the current detection unit and the temperature of the flow channel formation body is calculated to calculate the temperature of the flow channel formation body. According to this configuration, by energizing the flow path forming body, the temperature of the flow path forming body can be electrically measured, and the temperature can be easily measured. In addition, the superheated steam treatment device may also include: a DC power supply that applies a DC voltage to the flow channel formation body; a current detection unit that detects a DC current flowing through the flow channel formation body; and a temperature detection mechanism based on the passing of the DC voltage The relationship between the resistance value obtained from the current value obtained from the current detection unit and the temperature of the flow channel forming body is used to calculate the temperature of the flow channel forming body.

Preferably, in addition to the flow channel forming body, a metal body is additionally provided in the superheated steam storage portion, the metal body has an oxidation start temperature of 100° C. or higher, and the superheated steam treatment device further includes a temperature detection mechanism, which temperature The detection mechanism calculates the ambient temperature in the superheated steam storage portion based on the resistance value of the metal body. By installing the metal body in the superheated steam storage portion, the temperature of the atmosphere in the metal body and the superheated steam storage portion becomes the same temperature when the metal body is not energized or a weak current that does not generate a large amount of heat flows. . By calculating the resistance value based on the relationship between the voltage applied to the metal body and the current flowing or the applied voltage and current value when intermittently energized, and calculating the temperature based on the resistance value, the atmosphere in the superheated steam storage portion can be detected temperature. Here, it is preferable that the metal body is made of a material having an oxidation start temperature of 100° C. or higher, and the melting point temperature is higher than the ambient temperature in the superheated steam storage portion. For example, the metal body may be formed of the same material as the flow channel forming body. Since the metal body is made of a material having an oxidation start temperature of 100° C. or higher in this way, the oxidation of the metal body can be prevented.

In addition, the present invention also provides a superheated steam treatment device, which includes: a steam storage portion for storing steam; a heating member provided in the steam storage portion and made of a conductive material; and an induction heating portion provided for Outside the water vapor storage portion, the heating member is induction heated, and the water vapor in the water vapor storage portion is heated by the heating member induction-heated by the induction heating portion, thereby generating superheated steam, the heating The member is formed of a conductive material having an oxidation start temperature of 100° C. or higher, and the induction heating unit can be operated to switch the temperature of the heating member to a temperature lower than the oxidation start temperature and a temperature higher than the oxidation start temperature .

According to this superheated steam treatment device, it is possible to operate so as to switch the temperature of the heating member formed of a conductive material having an oxidation start temperature of 100° C. or higher to a temperature lower than the oxidation start temperature and a temperature higher than the oxidation start temperature. , So as long as the heating member is operated at a temperature lower than the oxidation start temperature and the steam storage portion is filled with steam or superheated steam, and then the temperature of the heating member is operated at a temperature above the oxidation start temperature, it is possible The heating member is prevented from being oxidized by the oxygen in the atmosphere in the water vapor storage portion.

In addition, the present invention provides an operation method of a superheated steam treatment apparatus including a superheated steam generation unit that energizes a flow passage formed body made of a conductive material having a flow passage formed therein Heating and heating the steam flowing through the flow path, thereby generating superheated steam; and a superheated steam storage portion in which a part or all of the flow path forming body is arranged, and the flow path The superheated steam generated by the forming body is introduced into the superheated steam storage portion, the flow path forming body is formed of a conductive material having an oxidation start temperature of 100° C. or higher, and the superheated steam storage portion is filled with steam or superheated steam Previously, the superheated steam generation unit was operated so that the temperature of the flow path forming body became lower than the oxidation start temperature, and steam or superheated steam was introduced into the superheated steam storage unit to be stored in the superheated steam After the portion is filled with steam or superheated steam, the superheated steam generating section is operated so that the temperature of the flow path forming body becomes higher than the oxidation start temperature, and the superheated steam is introduced into the superheated steam storage section .

In addition, the present invention also provides an operation method of a superheated steam treatment device, the superheated steam treatment device including: a steam storage portion that stores steam; a heating member provided in the steam storage portion and made of a conductive material And an induction heating section, which is provided outside the water vapor storage section, to inductively heat the heating member, and the superheated steam treatment device heats the water vapor storage by the heating member induction-heated by the induction heating section Superheated steam is generated by the steam in the portion. The heating member is formed of a conductive material having an oxidation start temperature of 100° C. or more. Before the steam storage portion is filled with steam or superheated steam, The heating member is operated at a temperature lower than the oxidation start temperature, and the induction heating unit is operated to introduce steam or superheated steam into the steam storage section, and the steam storage section is filled with steam or superheated steam Thereafter, the induction heating unit is operated so that the heating member becomes a temperature higher than the oxidation start temperature.

According to the present invention thus constituted, by operating the flow path forming body at a temperature lower than the oxidation start temperature and making the superheated steam storage portion filled with steam or superheated steam, the temperature of the flow path forming body is then at the oxidation start temperature Operating at the above temperature can prevent the flow channel formation body from being oxidized by oxygen in the atmosphere.

The above description of the disclosure and the following description of the embodiments are used to demonstrate and explain the spirit and principle of the present invention, and provide a further explanation of the scope of the patent application of the present invention.

The following describes in detail the detailed features and advantages of the present invention in the embodiments. The content is sufficient for any person skilled in the relevant art to understand and implement the technical contents of the present invention, and according to the contents disclosed in this specification, the scope of patent application and the drawings In this way, any person skilled in the relevant art can easily understand the objects and advantages related to the present invention. The following examples further illustrate the views of the present invention in detail, but do not limit the scope of the present invention in any way.

In addition, the embodiments of the present invention will be disclosed in the following figures. For the sake of clarity, many practical details will be described together in the following description. However, it should be understood that these practical details are not intended to limit the invention. In addition, in order to simplify the drawings, some conventional structures and components will be shown in a simple schematic way in the drawings, and even some of the drawings omit the structure of the wiring (cable or cable) and other structures In order to keep the picture clean and tidy, declare here first.

Furthermore, unless otherwise defined, all words used in this article, including technical and scientific terms, etc. have their usual meanings, and their meanings can be understood by those familiar with the technical field. Furthermore, the definition of the above words should be interpreted as having the same meaning as the technical field related to the present invention in this specification. Unless specifically defined, these terms will not be interpreted as too idealistic or formal meanings.

As shown in FIG. 1, the superheated steam treatment device 100 of the present embodiment includes: a superheated steam generation unit 2 of an energized heating method, which generates superheated steam by heating the steam; and a superheated steam storage unit 3, which introduces superheated steam The superheated steam generated by the steam generating unit 2.

The superheated steam generating unit 2 directly energizes the conductor tube 21 by applying an alternating voltage, and heats the conductor tube 21 by Joule heat generated by the internal resistance of the conductor tube 21, thereby heating the water vapor flowing through the flow channel R, the conductor The tube 21 is a flow path forming body made of a conductive material in which a flow path R through which water vapor flows is formed.

Specifically, as shown in FIG. 2, the two conductor tubes 21 of the superheated steam generation unit 2 are arranged parallel to each other, and the one end portions 21 a of the two conductor tubes 21 on the steam introduction side are electrically connected to each other. Each conductor tube 21 is a cylindrical tube having a straight tube shape and has the same shape.

In addition, the conductor tube 21 is formed of a conductive material having an oxidation start temperature of 100° C. or higher. That is, the conductor tube 21 is in a state where corrosion does not progress or can be substantially ignored even if corrosion progresses at an oxide film formed by bonding with oxygen in the atmosphere at a temperature lower than the oxidation start temperature. On the other hand, at the temperature above the oxidation start temperature of the conductor tube 21, the oxide film formed on the surface is destroyed, oxygen enters the inside, and the oxidation of the conductive material further develops, and the oxidation rate significantly increases. The oxidation start temperature is a temperature determined by the material of the conductive material used for the conductor tube 21, the life expectancy of the conductor tube 21, and the like.

As a specific conductive material forming the conductor tube 21, austenitic stainless steel or Inconel nickel alloy can be used. In addition, as a conductive material having high heat resistance, pure iridium or an iridium alloy having a melting point temperature of 2000° C. or higher can be used.

As specific examples of the oxidation starting temperature of each conductive material, the following are illustrated:

Austenitic stainless steel: 500℃～700℃;

Inconel nickel alloy: 900℃;

Pure iridium or iridium alloy: 600℃.

Specifically, the end portions 21a of the two conductor tubes 21 are electrically connected by a shunt tube 22 made of the same material as the conductor tube 21. The shunt tube 22 is connected to one end 21 a of the two conductor tubes 21 and distributes water vapor or superheated steam to the two conductor tubes 21. In addition, in the present embodiment, the conductor tube 21 and the shunt tube 22 are integrally configured.

In addition, the other ends 21 b of the two conductor tubes 21 are closed, and a plurality of fluid ejection nozzles 23 are provided on the side wall of the conductor tube 21 halfway (between the one end 21 a and the other end 21 b ). The plurality of fluid ejection nozzles 23 may be formed on the side wall of the conductor tube 21 in the entire circumferential direction, or may be formed on the side wall of the conductor tube 21 on a side perpendicular to the arrangement direction. In addition, the plurality of fluid ejection nozzles 23 are provided at equal intervals on the side wall from one end 21a to the other end 21b, but it is not limited thereto.

In addition, a flange portion 221 is formed in the fluid introduction port constituted by the upstream opening of the shunt tube 22 so that it can be connected to an external pipe (not shown) that is connected to the saturated steam of the induction heating method or the energized heating method The generator 200 is connected.

In addition, the single-phase AC power supply 24 is connected to the other end 21 b of the two conductor tubes 21 on the fluid outlet side. Specifically, the U-phase of the single-phase AC power supply 24 is connected to one of the other ends 21 b of the two conductor tubes 21, and the V-phase of the single-phase AC power supply is connected to the other end of the other end 21 b of the two conductor tubes 21. The electrode 25 connected to the other end 21b of each conductor tube 21 is a solid material of the same material as the conductor tube 21 (for example, austenitic stainless steel), the electrode width dimension is less than the diameter of the conductor tube 21, and the electrode 25 is disposed in the conductor The extension line of the tube 21 is linear. The electrode width dimension refers to the dimension in the direction perpendicular to the tube axis direction of the conductor tube 21. In addition, the outer surface of the connection portion of the electrode 25 that is connected to the conductor tube 21 is on the same plane as the outer circumferential surface of the conductor tube 21 or on the radially inner side. Thereby, the superheated steam storage portion 3 can be simply inserted. In addition, a connection hole 251 for connecting an external wiring is formed in the electrode 25.

In the superheated steam generating unit 2 configured in this way, if a single-phase AC voltage is applied from the single-phase AC power source 24 to the conductor tube 21 through the electrode 25, the current flowing through one of the conductor tubes 21 flows and the other The current of the conductor tube 21 flows in the opposite direction. If this is done, the magnetic flux generated by each current cancels, the impedance generated by the conductor tube 2 can be reduced, and the circuit power factor can be improved. Therefore, the facility efficiency of the superheated steam generator 2 can be improved.

The superheated steam storage unit 3 is a chamber that forms a processing chamber 31 that uses the superheated steam ejected from the fluid ejection nozzle 23 of the conductor tube 21 to heat-treat the object W (for example, cleaning, drying, firing, or sterilization) ). Here, the object W can be continuously conveyed to the processing chamber 31 by a conveying mechanism such as a conveyor belt.

Specifically, the conductor tube 21 is inserted so as to penetrate the left side wall 32 and the right side wall 33 of the chamber 3. At this time, in a state where the conductor tube 21 is inserted into the left side wall 32 and the right side wall 33 of the chamber 3, a plurality of fluid ejection nozzles 23 are located between the left side wall 32 and the right side wall 33 of the chamber 3, that is, the internal space of the chamber 3.

In addition, in a state where the conductor tube 21 is inserted into the chamber 3, the electrode 25 connected to the conductor tube 21 is located outside the chamber 3. Thus, the conductor tube 21 provided with the electrode 25 can be easily attached and detached simply by forming holes for mounting the conductor tube 21 in the left side wall 32 and the right side wall 33 of the chamber 3. That is, when the conductor tube 21 is inserted into the chamber 3 for installation or when the conductor tube 21 is pulled out of the chamber 3 for removal, the electrode 25 can be prevented from interfering with the left side wall 32 and the right side wall 33 and becoming an obstacle. In addition, the single-phase AC power supply 24 connected to the conductor tube 21 is provided in a power supply chamber (not shown) provided outside the chamber 3. The single-phase AC power supply 24 provided in a space different from the chamber 3 in this way is electrically connected to the electrode 25 of the conductor tube through electrical wiring.

In addition, a discharge part 34 that discharges the supplied steam or superheated steam is formed in the chamber 3. The discharge part 34 may be a discharge port connected to an external pipe, a discharge port open to the atmosphere, or a gap communicating with the outdoor.

Next, the operation of the superheated steam treatment device 100 of this embodiment will be described with reference to FIG. 3.

In the superheated steam treatment device 100, the superheated steam generator 2 can be switched to the first operation and the second operation, the first operation is such that the temperature of the conductor tube 21 becomes 100 degrees or more and is lower than the oxidation start temperature of the first This second operation is performed in a temperature range so that the temperature of the conductor tube 21 becomes a second temperature range equal to or higher than the oxidation start temperature.

Specifically, the superheated steam generating unit 2 causes the temperature of the conductor tube 21 to be 100 degrees before the room as the superheated steam storage unit 3 is filled with water vapor or superheated steam, that is, while the atmosphere remains in the room 3. The first operation is performed so as to be above the first temperature range lower than the oxidation start temperature. In this first operation, the control device 4 that controls the superheated steam generation unit 2 acquires the measured value from a temperature sensor (not shown) provided on the conductor tube 21 to detect the temperature of the conductor tube 21 and causes the The single-phase AC power supply 24 is feedback-controlled so that the temperature of the conductor tube 21 becomes a predetermined value in the first temperature range.

In this first operation, the control device 4 may end the first operation by acquiring a predetermined time elapsed signal indicating that a predetermined time has elapsed after starting the first operation from a timer or the like. In addition, the first operation may be ended by the user inputting the first operation end signal to the control device 4 using an external input device. In addition, an oxygen sensor (not shown) may be installed in the processing chamber 31 of the chamber 3 to obtain the measurement value from the oxygen sensor, and when the oxygen concentration becomes zero or below a predetermined threshold, the first operation may be performed End.

By performing the first operation in this way, the inside of the processing chamber 31 of the chamber 3 is filled with steam or superheated steam, that is, a state in which no atmosphere remains in the chamber 3. In this state, the superheated steam generating unit 2 performs the second operation so that the temperature of the conductor tube 21 becomes the second temperature range equal to or higher than the oxidation start temperature. In this second operation, as in the first operation, the control device 4 acquires measurement values from a temperature sensor (not shown) provided on the conductor tube 21 to detect the temperature of the conductor tube 21, and causes the conductor The single-phase AC power supply 24 is feedback-controlled so that the temperature of the tube 21 becomes a predetermined value in the second temperature range.

In this second operation, the control device 4 may end the second operation by acquiring a predetermined time elapsed signal indicating that a predetermined time has elapsed after starting the second operation from a timer or the like. In addition, the second operation may be ended by the user inputting a second operation end signal to the control device 4 using an external input device. In addition, by acquiring the detection signal from the detection unit, the second operation may be ended when the processing of the object W is completed, and the detection unit may detect the state of the object W in the processing chamber 31.

When the object to be processed is taken out from the superheated steam storage section after the second operation is completed, when the temperature of the conductor tube 21 is higher than the oxidation start temperature, air flows in from the outside, which may cause a flow path of the superheated steam generation section to form Body oxidation. Therefore, the superheated steam generating unit 2 causes the conductor tube from the state where the superheated steam storage unit 3 is filled with the superheated steam and the conductor tube 21 is at or above the oxidation start temperature until the air flows into the superheated steam storage unit 3. The temperature of 21 operates below the oxidation start temperature. Specifically, the control device 4 controls the superheated steam generation unit 2 from the time point when the second operation is completed so that the temperature of the conductor tube 21 becomes lower than the oxidation start temperature.

According to the superheated steam treatment apparatus 100 configured in this manner, it is possible to switch to the first operation that operates so that the temperature of the conductor tube 21 is within a temperature range that is difficult to be oxidized by oxygen in the atmosphere, and the temperature of the conductor tube 21 The second operation is performed in a temperature range that is easily oxidized by oxygen in the atmosphere. Therefore, before the chamber 3 is filled with steam or superheated steam, the first operation can be performed while introducing steam or superheated steam into the room. After the chamber 3 is filled with steam or superheated steam, the second operation is performed to introduce superheated steam into the chamber 3. Accordingly, even when the superheated steam generation unit 2 generates superheated steam above the oxidation start temperature, the conductor tube 21 can be prevented from being oxidized by the oxygen remaining in the atmosphere in the chamber 3.

In addition, the present invention is not limited to this embodiment.

For example, in this embodiment, the saturated steam supplied to the superheated steam generator 2 comes from the saturated steam generator 200 provided outside. However, the superheated steam generator 2 may be provided with a saturated steam generator .

In this embodiment, the superheated steam generator 2 receives the saturated steam generated by the saturated steam generator 200 provided in the previous stage, but the saturated steam generator 200 further heats the saturated steam to generate superheated steam. Next, the superheated steam generating unit 2 may receive superheated steam and further heat the received superheated steam to generate superheated steam of a desired temperature supplied to the superheated steam storage unit 3.

In addition, in this embodiment, the superheated steam generator 2 having two conductor tubes 21 has been described, but the superheated steam generator 2 may have 2N (N is an integer of 2 or more) conductor tubes 21. In addition, one end portion 21a of the 2N conductor tubes 21 is electrically connected by connecting one shunt tube 22 branched to the 2N flow path. In addition, U-phase and V-phase of the single-phase AC power supply 24 are alternately connected to the other end portion 21b of the 2N conductor tubes 21 so that the polarity of the single-phase AC power supply 24 connected to the other end portions 21b adjacent to each other is different .

In addition, as shown in FIG. 4, the three conductor tubes 21 are arranged parallel to each other, and the end portions 21 a on the water vapor introduction side of the three conductor tubes 21 are electrically connected to each other. Each conductor tube 21 is a straight cylindrical tube and has the same shape. In addition, the three conductor tubes 21 are arranged at equal intervals on the same plane.

In addition, the other ends 21 b of the three conductor tubes 21 are closed, and a plurality of fluid ejection nozzles 23 are provided on the side wall of the conductor tube 21 halfway (between the one end 21 a and the other end 21 b ). The plurality of fluid ejection nozzles 23 may be formed on the side wall of the conductor tube 21 in the entire circumferential direction, or may be formed on the side wall of the conductor tube 21 on a side perpendicular to the arrangement direction. In addition, the plurality of fluid ejection nozzles 23 are provided at equal intervals on the side wall from one end 21a to the other end 21b, but it is not limited thereto.

In addition, the three-phase AC power supply is connected to the other end 21 b of the three conductor tubes 21 on the fluid outlet side. Specifically, in the other end 21b of the three conductor tubes 21, the first other end 21b is connected to the U phase of the three-phase AC power supply, and the second other end 21b is connected to the V phase of the three-phase AC power supply. Three W-phases of the three-phase AC power supply are connected to the three other end portions 21b.

In the superheated steam generating unit 2 configured in this manner, if a three-phase AC voltage is applied to the conductor tube 21 from the three-phase AC power source through the electrode 25, the magnetic flux generated by the current flowing through the three conductor tubes 21 cancels out, so that The impedance generated by the conductor tube 21 is reduced, and the circuit power factor can be improved. Therefore, the facility efficiency of the superheated steam generator 2 can be improved.

In addition to the superheated steam generator 2 having three conductor tubes 21, the superheated steam generator 2 may have 3N (N is an integer of 2 or more) conductor tubes 21. In addition, one end portion 21a of the 3N conductor tubes 21 is electrically connected by connecting one shunt tube 22 branched to the 3N flow channel. In addition, U-phase, V-phase and V-phase of the three-phase AC power supply are alternately connected to the other end portion 21b of the 3N conductor tubes 21 in such a manner that the polarities of the three-phase AC power supply connected to the three other end portions 21b arranged in series are different from each other. W phase.

In the conductor tube 21 of this embodiment, in addition to the fluid ejection nozzle 23, a plurality of fluid ejection ports may be provided on the side wall. The fluid ejection port may be formed on the side wall of the conductor tube 21 in the entire circumferential direction, or may be formed on the side wall of the conductor tube 21 on a side perpendicular to the arrangement direction. In addition, the plurality of fluid ejection ports are formed on the side wall from one end 21a to the other end 21b in the substantially entire lengthwise direction, or may be formed in a part in the longitudinal direction, for example, formed in the length of the conductor tube 21 From the center to the other end 21b in the lateral direction.

In addition, a flange portion or the like may be provided without closing the other end portion 21b of the conductor tube, so that the other end portion 21b can be connected to an external pipe.

The superheated steam storage portion 3 of this embodiment may be a heat-insulating container that forms a storage chamber for storing superheated steam and keeping it warm. The superheated steam contained in the heat preservation container is led out to the outside from the fluid outlet provided in the heat preservation container and used. In this case, the storage container may have a heating mechanism that further heats the superheated steam contained therein, or may have a temperature adjustment function for temperature adjustment of the superheated steam.

In the conductor tube 21 or the flow channel connection portion connected to the conductor tube 21, the energized cross-sectional area of the portion outside the superheated steam storage portion 3 can be made larger than the energized cross-sectional area of the portion inside the superheated steam storage portion 3. Here, the flow path connection portion is, for example, a pipe connected to the conductor tube 21 and energized together with the conductor tube 21, or a pipe connected to the conductor tube but not energized. According to this configuration, it is possible to suppress the heat generation of the conductor tube 21 or the flow channel connection portion outside the superheated steam storage portion 3, to maintain the temperature lower than the oxidation start temperature, and to suppress the decrease in life.

In addition, in the conductor tube 21 or the flow channel connection portion connected to the conductor tube 21, the resistance of the energized portion outside the superheated steam storage portion 3 can be made smaller than the resistance of the energized portion in the superheated steam storage portion 3. For example, the resistance of the material of the energized portion outside the superheated steam storage portion 3 may be lower than the resistance of the material of the energized portion of the superheated steam storage portion 3. According to this configuration, it is possible to suppress the heat generation of the conductor tube 21 or the flow channel connection portion outside the superheated steam storage portion 3, to maintain the temperature lower than the oxidation start temperature, and to suppress the decrease in life.

As shown in FIG. 5, in addition to the configuration of the superheated steam treatment device 100 of this embodiment, a cooling mechanism may be provided, which cools the conductor tube 21 or the flow channel connection portion outside the superheated steam storage portion 3 to 100 Above ℃ and less than the starting temperature of oxidation. Specifically, in addition to the superheated steam storage unit 3, the superheated steam treatment device 100 further includes a steam introduction unit 5 through which the conductor tube 21 or the flow channel connection portion connected to the conductor tube 21 penetrates, and Water vapor is introduced into this water vapor introduction part 5.

The water vapor introduction part 5 is provided outside the superheated steam storage part 3, and forms a storage space of a predetermined range surrounding the conductor tube 21 or the flow channel connection part outside the superheated steam storage part 3, so that the temperature in the predetermined range is reduced to 100 Above ℃ and less than the starting temperature of oxidation. Specifically, the steam introduction part 5 has an introduction port 51 to introduce saturated steam or superheated steam; and an outlet 52 to introduce saturated steam or superheated steam. Here, the superheated steam whose temperature has been adjusted may be introduced into the steam introduction part 5 from the outside, or a superheated steam generation part (not shown) may be provided in the steam introduction part 5 to introduce saturated steam from the outside and pass the superheat The steam generation unit generates superheated steam.

According to this configuration, by introducing water vapor at a temperature of 100° C. or higher and lower than the oxidation start temperature to the water vapor introduction part 5, the conductor tube 21 or the flow channel connection part outside the superheated steam storage part 3 can be maintained at a temperature lower than the oxidation start temperature. Suppresses the reduction of life.

In addition, it is preferable that the conductive cross-sectional area of the conductor tube 21 or the flow channel connection part in the steam introduction part 5 is larger than the conductive cross-sectional area of the conductive tube 21 or the flow channel connection part in the superheated steam storage part 3. According to this configuration, together with the cooling mechanism, the conductor tube 21 or the flow channel connection portion outside the superheated steam storage portion 3 can be maintained at a temperature lower than the oxidation start temperature, and the decrease in life can be suppressed.

In addition, a temperature sensor for measuring the temperature of the conductor tube 21 may not be provided. Specifically, the superheated steam treatment device 100 includes: a voltage detection unit that detects the AC voltage applied to the conductor tube 21; a current detection unit that detects the current flowing through the conductor tube 21; and an impedance calculation unit based on the value obtained by the voltage detection unit The voltage value and the current value obtained from the current detection unit calculate the impedance; the relationship data storage unit stores relationship data indicating the relationship between the impedance and the temperature of the conductor tube 21; and the temperature calculation unit based on the impedance obtained by the impedance calculation unit With the relationship data stored in the relationship data storage unit, the temperature of the conductor tube 21 is calculated. Here, the impedance calculation unit, the relationship data storage unit, and the temperature calculation unit are constituted by a computer, and these portions constitute a temperature detection mechanism. In addition, for example, the relationship data is obtained using the conductor tube 21 as a reference, and the relationship data storage unit may be set in a predetermined area of the internal memory of the computer or in a predetermined area of the external memory external to the computer. According to this configuration, by energizing the conductor tube 21, the temperature of the conductor tube 21 can be electrically measured, and the temperature can be easily measured.

In addition, the superheated steam treatment device 100 includes a transformer that generates an AC voltage applied to the conductor tube 21; a voltage detection unit that detects the AC voltage on the primary side of the transformer; a current detection unit that detects the current on the primary side of the transformer; an impedance calculation unit , Calculate the impedance based on the voltage value obtained by the voltage detection unit and the current value obtained from the current detection unit; the impedance correction unit performs correction to remove the impedance of the transformer from the impedance obtained by the impedance calculation unit; the relationship data storage unit, Relationship data representing the relationship between the impedance and the temperature of the conductor tube 21 is stored; and the temperature calculation unit calculates the temperature of the conductor tube 21 based on the corrected impedance obtained by the impedance correction unit and the relationship data stored in the relationship data storage unit. Here, the impedance calculation unit, the impedance correction unit, the relationship data storage unit, and the temperature calculation unit are constituted by a computer, and these portions constitute a temperature detection mechanism. In addition, for example, the relationship data is obtained using the conductor tube 21 as a reference, and the relationship data storage unit may be set in a predetermined area of the internal memory of the computer or in a predetermined area of the external memory external to the computer.

In addition, in this embodiment, the superheated steam treatment device is a superheated steam treatment device of the energization heating type, but the superheated steam treatment device may be an induction heating type superheated steam treatment device.

Specifically, as shown in FIG. 6, the superheated steam treatment device Z1 includes: a steam storage section Z11 that stores steam; a heating member Z12 that is provided in the steam storage section Z11 and is made of a conductive material; and induction The heating part Z13 is provided outside the water vapor storage part Z11, and inductively heats the heating member Z12.

The steam storage portion Z11 introduces saturated steam from the saturated steam generation portion 200 of the induction heating method or the energized heating method, and has an inlet Z11a for introducing steam and an outlet Z11b for discharging steam. In addition, the water vapor storage unit Z11 stores the object W inside.

The heating member Z12 is formed of the same material as this embodiment, and in this embodiment is a flat plate-shaped member provided so as to cover a part or all of the inner surface of the water vapor storage portion Z11. In addition, the heating member Z12 need not be provided so as to be in contact with the inner surface, as long as it is provided inside the steam storage portion Z11.

The induction heating unit Z13 includes an induction coil Z131 for generating an induction current for the heating member Z12, and an AC power source Z132 that applies an alternating voltage to the induction coil Z131. In addition, as in this embodiment, the AC power supply Z132 is controlled by the control device.

In addition, the superheated steam treatment device Z1 operates the induction heating unit Z13 so that the heating member Z12 becomes lower than the oxidation start temperature before the steam storage unit Z11 is filled with saturated steam from the saturated steam generation unit 200. Saturated steam is introduced into the steam storage portion Z11. In addition, the superheated steam treatment device Z1 operates the induction heating unit Z13 so that the steam storage portion Z11 is filled with saturated steam or superheated steam, so that the heating member Z12 becomes higher than the oxidation start temperature.

According to this configuration, since the temperature of the heating member Z12 formed of a conductive material having an oxidation start temperature of 100° C. or higher can be switched to a temperature lower than the oxidation start temperature and a temperature equal to or higher than the oxidation start temperature, as long as The heating member Z12 is operated at a temperature lower than the oxidation start temperature and the steam storage portion Z11 is filled with steam or superheated steam, and then the heating member Z12 is operated at a temperature higher than the oxidation start temperature to prevent heating. The member Z12 is oxidized by oxygen in the atmosphere in the water vapor storage portion Z11.

In addition, the present invention is not limited to this embodiment, and various modifications can be made without departing from the gist of the present invention.

The technical features described in the various embodiments (examples) of the present invention may be combined with each other to form a new technical solution.

Although the present invention is disclosed as the foregoing embodiments, it is not intended to limit the present invention. Without departing from the spirit and scope of the present invention, all modifications and retouching are within the scope of patent protection of the present invention. For the protection scope defined by the present invention, please refer to the attached patent application scope.

100‧‧‧Superheated steam treatment device 2‧‧‧Superheated steam generation part 21‧‧‧Runner formation body (conductor tube) 3‧‧‧Superheated steam storage part (room)

FIG. 1 is a schematic diagram of a structure of a superheated steam treatment device according to an embodiment of the invention. FIG. 2 is a six-sided view of the structure of a conductor tube according to an embodiment of the invention. FIG. 3 is a schematic diagram of the operation of the superheated steam treatment device structure according to an embodiment of the invention. 4 is a six-face view of a structure of a conductor tube according to another embodiment of the invention. 5 is a schematic diagram of a superheated steam treatment device according to another embodiment of the invention. 6 is a schematic diagram of a superheated steam treatment device according to another embodiment of the invention. FIG. 7 is test data showing the change in weight when tungsten, tantalum, molybdenum, titanium, and iridium are left in a superheated steam atmosphere of 1000° C. or higher for 1.5 to 6 hours.

2‧‧‧Superheated steam generation department

3‧‧‧Superheated steam containment department

4‧‧‧Control device

21‧‧‧Conductor tube

21a‧‧‧End

21b‧‧‧End

22‧‧‧Shunt

23‧‧‧Fluid ejection nozzle

24‧‧‧Single-phase AC power supply

25‧‧‧electrode

31‧‧‧ processing room

32‧‧‧Left side wall

33‧‧‧Right side wall

34‧‧‧Exhaust

100‧‧‧Superheated steam treatment device

200‧‧‧Saturated steam generation department

221‧‧‧Flange

W‧‧‧ object

Claims (16)

A superheated steam treatment device, comprising: a superheated steam generating part, which electrically heats a first-rate channel forming body formed of a conductive material with a flow channel formed therein and heats water vapor flowing through the flow channel, Thereby, superheated steam is generated; and a superheated steam storage portion in which a part or all of the flow channel forming body is disposed, and the superheated steam generated by the flow channel forming body is introduced into the superheated steam The accommodating portion, the flow path forming body is formed of a conductive material having an oxidation start temperature of 100° C. or higher, and the superheated steam generation portion can switch the temperature of the flow path forming body to a temperature lower than the oxidation start temperature and the It operates at a temperature above the oxidation start temperature. The superheated steam treatment device according to claim 1, wherein before the superheated steam storage portion is filled with water vapor or superheated steam, the superheated steam generation portion makes the temperature of the flow path forming body lower than the temperature The oxidation starts at a temperature, and the steam or superheated steam is introduced into the superheated steam storage section. After the superheated steam storage section is filled with steam or superheated steam, the superheated steam generation section makes the flow The temperature of the channel formation body is operated so as to be higher than the oxidation start temperature, and the superheated steam is introduced into the superheated steam storage portion. The superheated steam treatment device according to claim 1, wherein from the state where the superheated steam storage portion is filled with superheated steam and the flow path formation body is at or above the oxidation start temperature to the state from the superheated steam storage Before the state in which gas other than superheated steam flows into the outside of the unit, the superheated steam generating unit operates so that the temperature of the flow channel formation body becomes lower than the oxidation start temperature. The superheated steam treatment device according to claim 1, wherein 2N conductor tubes of the superheated steam generating part as the flow path forming body are arranged to be parallel to each other, N is an integer of 1 or more, and 2N One end of the conductor tube is electrically connected to each other, and U of the single-phase AC power source is alternately connected to the other end of the 2N conductor tubes in such a manner that the polarity of the single-phase AC power source connected to the other end adjacent to each other is different Phase and V phase. The superheated steam treatment device according to claim 1, wherein 3N conductor tubes as the flow path forming body are arranged to be parallel to each other, N is an integer of 1 or more, and 3N ends of the conductor tubes are mutually Electrically connected, the U-phase, V-phase and W of the three-phase AC power supply are alternately connected to the other end of the 3N conductor tubes in such a manner that the polarities of the three-phase AC power supply connected to the three other ends in series are different from each other phase. The superheated steam treatment device according to claim 1, wherein the superheated steam storage portion has a discharge part that discharges the supplied steam or superheated steam. The superheated steam treatment device according to claim 1, wherein the current cross-sectional area of the portion outside the superheated steam storage portion in the flow path forming body or the flow path connecting portion connected to the flow path forming body is larger than the The energized cross-sectional area of the portion in the superheated steam storage portion is large, or the resistance of the energized portion outside the superheated steam storage portion is smaller than the resistance of the energized portion in the superheated steam storage portion. The superheated steam treatment device according to claim 1, in addition to the superheated steam storage portion, a steam introduction portion is further provided, and the flow path forming body or the flow path connecting portion connected to the flow path forming body penetrates the The water vapor introduction part, and the water vapor is introduced into the water vapor introduction part. The superheated steam treatment device according to claim 8, wherein a superheated steam generating part is provided in the steam introduction part. The superheated steam treatment device according to claim 1, wherein the flow path forming body is formed of pure iridium or an iridium alloy. The superheated steam treatment device according to claim 1, further comprising a temperature detection mechanism that calculates the temperature of the flow path formation body based on the resistance value of the flow path formation body. The superheated steam treatment device according to claim 1, wherein, in addition to the flow path forming body, a metal body is additionally provided in the superheated steam storage portion, the metal body having an oxidation start temperature of 100°C or more, the superheat The steam treatment device further includes a temperature detection mechanism that calculates the ambient temperature in the superheated steam storage portion based on the resistance value of the metal body. The superheated steam treatment device according to claim 12, wherein the metal body is formed of pure iridium or an iridium alloy. A superheated steam treatment device, comprising: a steam storage part for storing steam; a heating member provided in the steam storage part and made of a conductive material; and an induction heating part provided for the steam storage Outside the part, the heating member is induction-heated, and the heating member that is induction-heated by the induction heating part heats the water vapor in the water vapor accommodating part, thereby generating superheated water vapor. The conductive material having an oxidation start temperature of 100° C. or higher is formed, and the induction heating unit can be operated to switch the temperature of the heating member to a temperature lower than the oxidation start temperature and a temperature higher than the oxidation start temperature. An operation method of a superheated steam treatment device, the superheated steam treatment device includes a superheated steam generation part and a superheated steam storage part, the superheated steam generation part has a flow channel formed inside, and is made of conductive material The formed first-passage forming body is electrically heated and heats the steam flowing through the flow passage, thereby generating superheated steam, and a part or all of the flow passage forming body is arranged in the superheated steam storage portion. The superheated steam generated by the channel formation body is introduced into the superheated steam storage portion, and the flow path formation body is formed of a conductive material having an oxidation start temperature of 100° C. or higher, wherein the superheated steam storage portion is filled with steam or Before superheated steam, the superheated steam generating unit is operated so that the temperature of the flow path forming body becomes lower than the oxidation start temperature, and steam or superheated steam is introduced into the superheated steam accommodating unit. After the steam storage part is filled with steam or superheated steam, the superheated steam generating part is operated so that the temperature of the flow path forming body becomes higher than the oxidation start temperature, and superheated steam is introduced into the superheated water Steam containment department. An operation method of a superheated steam treatment device, the superheated steam treatment device includes a water vapor accommodating portion, a heating member and an induction heating portion, the water vapor accommodating portion accommodates water vapor, the heating member is provided in the water The steam storage part is composed of a conductive material, the induction heating part is provided outside the water vapor storage part, and the heating member is induction heated, and the superheated steam treatment device passes the heating induced by the induction heating part A member for heating steam in the steam storage portion to generate superheated steam, the heating member is formed of a conductive material having an oxidation start temperature of 100° C. or higher, wherein the steam storage portion is filled with water Before steam or superheated steam, the induction heating unit is operated so that the heating member becomes a temperature lower than the oxidation start temperature, and steam or superheated steam is introduced into the steam storage unit to be stored in the steam After the part is filled with steam or superheated steam, the induction heating part is operated so that the heating member becomes a temperature higher than the oxidation start temperature.

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